U.S. patent application number 17/592148 was filed with the patent office on 2022-05-19 for integrated circuit package and system using same.
The applicant listed for this patent is Medtronic, Inc.. Invention is credited to Mark R. Boone, Mark E. Henschel.
Application Number | 20220158021 17/592148 |
Document ID | / |
Family ID | |
Filed Date | 2022-05-19 |
United States Patent
Application |
20220158021 |
Kind Code |
A1 |
Boone; Mark R. ; et
al. |
May 19, 2022 |
INTEGRATED CIRCUIT PACKAGE AND SYSTEM USING SAME
Abstract
Various embodiments of an integrated circuit package and a
method of forming such package are disclosed. The integrated
circuit package includes first and second active dies. Each of the
first and second active dies includes a top contact disposed on the
top surface of the die and a bottom contact disposed on a bottom
surface of the die. The package further includes a via die having
first and second vias that each extends between a top contact
disposed on a top surface of the via die and a bottom contact
disposed on a bottom surface of the via die, where the bottom
contact of the first active die is electrically connected to the
bottom contact of the first via of the via die and the bottom
contact of the second active die is electrically connected to the
bottom contact of the second via of the via die.
Inventors: |
Boone; Mark R.; (Gilbert,
AZ) ; Henschel; Mark E.; (Phoenix, AZ) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Medtronic, Inc. |
Minneapolis |
MN |
US |
|
|
Appl. No.: |
17/592148 |
Filed: |
February 3, 2022 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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16148702 |
Oct 1, 2018 |
11264527 |
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17592148 |
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International
Class: |
H01L 31/167 20060101
H01L031/167; H01L 25/075 20060101 H01L025/075; H01L 25/16 20060101
H01L025/16; H01L 31/12 20060101 H01L031/12; H01L 33/00 20060101
H01L033/00; H01L 33/52 20060101 H01L033/52; H01L 33/62 20060101
H01L033/62; H01S 5/02 20060101 H01S005/02; H01S 5/02208 20060101
H01S005/02208; H01S 5/042 20060101 H01S005/042; H01S 5/42 20060101
H01S005/42; H01S 5/0237 20060101 H01S005/0237; H01S 5/02234
20060101 H01S005/02234; H01S 5/02325 20060101 H01S005/02325 |
Claims
1. An integrated circuit package, comprising: first and second
active dies, wherein the first active die is adapted to emit
electromagnetic radiation from a top surface that comprises a first
wavelength and the second active die is adapted to emit
electromagnetic radiation from a top surface that comprises a
second wavelength different from the first wavelength, wherein each
of the first and second active dies comprises a top contact
disposed on the top surface of the die and a bottom contact
disposed on a bottom surface of the die; and a via die comprising
first and second vias that each extends between a top contact
disposed on a top surface of the via die and a bottom contact
disposed on a bottom surface of the via die, wherein the bottom
contact of the first active die is electrically connected to the
bottom contact of the first via of the via die and the bottom
contact of the second active die is electrically connected to the
bottom contact of the second via of the via die.
2. The package of claim 1, further comprising third, fourth, and
fifth active dies, wherein the third active die is adapted to emit
electromagnetic radiation from a top surface that comprises a third
wavelength, the fourth active die is adapted to emit
electromagnetic radiation from a top surface that comprises a
fourth wavelength, and the fifth active die is adapted to emit
electromagnetic radiation from a top surface of the fifth active
die that comprises a fifth wavelength; wherein the bottom contact
of each of the third, fourth, and fifth active dies is electrically
connected to bottom contacts of third, fourth, and fifth vias
respectively of the via die.
3. The package of claim 1, wherein the first and second active dies
and the via die are disposed in a molded encapsulant.
4. The package of claim 3, wherein the encapsulant is disposed
between the first and second active dies and the via die.
5. The package of claim 1, further comprising a patterned
conductive layer disposed on the bottom surfaces of the first and
second active dies and the via die, wherein the patterned
conductive layer electrically connects the bottom contact of the
first active die to the bottom contact of the first via of the via
die and the bottom contact of the second active die to the bottom
contact of the second via of the via die.
6. The package of claim 1, further comprising solder bumps disposed
on the top contact of each of the first and second active dies and
the via die.
7. The package of claim 1, wherein at least one of the first and
second active dies comprises a light emitting diode.
8. The package of claim 1, wherein at least one of the first and
second active dies comprises a vertical-cavity surface-emitting
laser.
9. The package of claim 1, wherein at least one of the first and
second active dies comprises an organic light emitting diode.
10. The package of claim 1, wherein each of the first and second
active dies comprises an aperture disposed on the top surface of
the die, wherein the electromagnetic radiation emitted by each of
the first and second active dies is directed through the respective
aperture.
11. The package of claim 1, wherein a bandwidth of the
electromagnetic radiation emitted by each of the first and second
active dies is no greater than 20 nm full-width at
half-maximum.
12. The package of claim 1, wherein at least one of the first and
second active dies may be pulsed in a sequential manner.
13. The package of claim 1, wherein at least one of the first or
second dies comprises a cone angle of emission of no greater than
90 degrees.
14. The package of claim 1, wherein the first active die comprises
a second top contact and a second bottom contact, and further
wherein the second active die comprises a second top contact and a
second bottom contact.
15. The package of claim 14, wherein the second top contact of the
first active die is electrically connected to the second top
contact of the second active die.
16. The package of claim 14, wherein the second bottom contact of
the first active die is electrically connected to the second bottom
contact of the second active die.
17. The package of claim 1, wherein each of the first and second
active dies comprises a broadband emitter that utilizes re-emission
of phosphorous materials.
18. The package of claim 1, wherein the first and second active
dies and the via die are disposed on a substrate.
19. The package of claim 1, wherein at least one of the first
active die and the second active die can emit at least one of
infrared, near-infrared, visible, and UV light.
20. An implantable medical device comprising the integrated circuit
package of claim 1.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application is a continuation application of U.S.
patent application Ser. No. 16/148,702 filed on Oct. 1, 2018, which
is incorporated herein by reference in its entirety.
BACKGROUND
[0002] IMDs for monitoring a physiological condition and/or
delivering a therapy can include one or more physiological sensors.
Such sensors can provide one or more signals related to one or more
physiological conditions of a patient state. Examples of such IMDs
include heart monitors, pacemakers, implantable cardioverter
defibrillators (ICDs), myostimulators, neurological stimulators,
drug delivery devices, insulin pumps, glucose monitors, etc.
[0003] A wide variety of electronic assemblies such as those that
are utilized for IMDs employ electronic circuitry, e.g., for
providing electrical stimulation of body tissue and/or monitoring a
physiologic condition. Such IMDs may deliver electrical therapy
energy in the form of shocking energy and stimulating pulses to
selected body tissue. These IMDs typically include output circuitry
for generating the electrical energy under prescribed conditions
and at least one lead bearing a stimulation electrode for
delivering the electrical energy to the selected tissue. For
example, cardiac pacemakers and implantable
cardioverter-defibrillators (ICDs) have been developed for
maintaining a desired heart rate during episodes of bradycardia or
for applying cardioversion or defibrillation therapies to the heart
upon detection of serious arrhythmias. Other nerve, brain, muscle,
and organ tissue stimulating medical devices are also known for
treating a variety of conditions.
[0004] Currently available IMDs, including ICDs and implantable
pulse generators (IPGs), are typically formed having a metallic
housing that is hermetically sealed and, therefore, is impervious
to body fluids, and a header or connector assembly mounted to the
housing for making electrical and mechanical connection with one or
more leads. Such devices also possess telemetry capabilities for
communicating with external devices. Over the past several years,
IMDs have evolved from relatively bulky devices to complex
miniaturized devices that exhibit increasing functionality. For
example, numerous improvements have been made in
cardioversion/defibrillation leads and electrodes that have enabled
the cardioversion/defibrillation energy to be precisely delivered
to selected one or more portions of upper and lower heart chambers,
thereby dramatically reducing the delivered shock energy required
to cardiovert or defibrillate the heart chamber. High voltage
output circuitry has also been improved to provide monophasic,
biphasic, or multi-phase cardioversion/defibrillation shock or
pulse waveforms that are efficacious, sometimes with particular
combinations of cardioversion/defibrillation electrodes, in
lowering the required shock energy to cardiovert or defibrillate
the heart.
[0005] Optical sensors may also be employed in IMDs as
physiological sensors configured to detect changes in light
modulation by, for example, a body fluid or tissue measurement
volume due to a change in a physiological condition in the body
fluid or tissue. Such optical sensors can be used, for example, to
detect changes in metabolite levels in the blood, such as oxygen
saturation levels or glucose levels, or changes in tissue
perfusion. A typical optical sensor can include one or more light
sources and one or more detectors that are adapted to detect light
emitted by the light sources and modulated by, e.g., body fluid or
tissue measurement volume.
[0006] Monitoring such physiological conditions provides useful
diagnostic measures and may be used in managing therapies for
treating a medical condition. For example, a decrease in blood
oxygen saturation or in tissue perfusion may be associated with
insufficient cardiac output or respiratory function. Thus,
monitoring such conditions may allow an implantable medical device
to respond to a decrease in oxygen saturation or tissue perfusion,
for example, by delivering electrical stimulation therapies to the
heart to restore a normal hemodynamic function.
SUMMARY
[0007] In general, the present disclosure provides various
embodiments of an integrated circuit package and a method of
forming such package. The package can include first and second
active dies, where the first active die is adapted to emit
electromagnetic radiation from a top surface that includes a first
wavelength and the second active die is adapted to emit
electromagnetic radiation from a top surface that includes a second
wavelength different from the first wavelength. The package can
also include a via die that includes first and second vias that
each extend between a top contact disposed on a top surface of the
via die and a bottom contact disposed on a bottom surface of the
via die. A bottom contact of the first active die can be
electrically connected to a bottom contact of the first via of the
via die, and a bottom contact of the second active die can be
electrically connected to a bottom contact of the second via of the
via die.
[0008] In one aspect, the present disclosure provides an integrated
circuit package that includes first and second active dies, where
the first active die is adapted to emit electromagnetic radiation
from a top surface that includes a first wavelength, and the second
active die is adapted to emit electromagnetic radiation from a top
surface that includes a second wavelength different from the first
wavelength. Each of the first and second active dies includes a top
contact disposed on the top surface of the die and a bottom contact
disposed on a bottom surface of the die. The package further
includes a via die having first and second vias that each extends
between a top contact disposed on a top surface of the via die and
a bottom contact disposed on a bottom surface of the via die, where
the bottom contact of the first active die is electrically
connected to the bottom contact of the first via of the via die,
and the bottom contact of the second active die is electrically
connected to the bottom contact of the second via of the via
die.
[0009] In another aspect, the present disclosure provides a method
of forming an integrated circuit package. The method includes
disposing a patterned conductive layer on a major surface of an
active die wafer; singulating the active die wafer to form a first
active die and a second active die, where the first active die is
adapted to emit electromagnetic radiation having a first
wavelength, and the second active die is adapted to emit
electromagnetic radiation having a second wavelength, where the
first wavelength is different from the second wavelength; and
disposing the first and second active dies on a carrier layer. The
method further includes disposing a via die on the carrier layer;
disposing an encapsulant over the first and second active dies, the
via die, and the carrier layer to form a compression molded wafer
comprising a top surface disposed on the carrier layer and a bottom
surface; and removing the carrier layer from the compression molded
wafer. The method further includes disposing one or more top
contacts on a top surface of each of the first and second active
dies and the via die; disposing a patterned conductive layer on the
bottom surface of the compression molded wafer; and singulating the
compression molded wafer to form an integrated circuit package that
includes the first and second active dies and the via die.
[0010] All headings provided herein are for the convenience of the
reader and should not be used to limit the meaning of any text that
follows the heading, unless so specified.
[0011] The terms "comprises" and variations thereof do not have a
limiting meaning where these terms appear in the description and
claims. Such terms will be understood to imply the inclusion of a
stated step or element or group of steps or elements but not the
exclusion of any other step or element or group of steps or
elements.
[0012] In this application, terms such as "a," "an," and "the" are
not intended to refer to only a singular entity but include the
general class of which a specific example may be used for
illustration. The terms "a," "an," and "the" are used
interchangeably with the term "at least one." The phrases "at least
one of" and "comprises at least one of" followed by a list refers
to any one of the items in the list and any combination of two or
more items in the list.
[0013] The phrases "at least one of" and "comprises at least one
of" followed by a list refers to any one of the items in the list
and any combination of two or more items in the list.
[0014] As used herein, the term "or" is generally employed in its
usual sense including "and/or" unless the content clearly dictates
otherwise.
[0015] The term "and/or" means one or all of the listed elements or
a combination of any two or more of the listed elements.
[0016] As used herein in connection with a measured quantity, the
term "about" refers to that variation in the measured quantity as
would be expected by the skilled artisan making the measurement and
exercising a level of care commensurate with the objective of the
measurement and the precision of the measuring equipment used.
Herein, "up to" a number (e.g., up to 50) includes the number
(e.g., 50).
[0017] Also, the recitations of numerical ranges by endpoints
include all numbers subsumed within that range as well as the
endpoints (e.g., 1 to 5 includes 1, 1.5, 2, 2.75, 3, 3.80, 4, 5,
etc.).
[0018] These and other aspects of the present disclosure will be
apparent from the detailed description below. In no event, however,
should the above summaries be construed as limitations on the
claimed subject matter, which subject matter is defined solely by
the attached claims, as may be amended during prosecution.
BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Throughout the specification, reference is made to the
appended drawings, where like reference numerals designate like
elements, and wherein:
[0020] FIG. 1 is a schematic cross-section view of one embodiment
of an integrated circuit package.
[0021] FIG. 2 is a schematic top plan view of the integrated
circuit package of FIG. 1.
[0022] FIG. 3 is a schematic top plan view of another embodiment of
an integrated circuit package.
[0023] FIG. 4 is a schematic bottom plan view of the integrated
circuit package of FIG. 3.
[0024] FIG. 5 is a schematic perspective view of one embodiment of
hermetically-sealed system that includes the integrated circuit
package of FIG. 1.
[0025] FIG. 6 is a schematic exploded view of the
hermetically-sealed system of FIG. 5.
[0026] FIG. 7 is a schematic bottom plan view of a substrate of the
hermetically-sealed system of FIG. 5.
[0027] FIG. 8 is a schematic top plan view of the substrate of the
hermetically-sealed system of FIG. 5.
[0028] FIG. 9 is a schematic cross-section view of the substrate of
the hermetically-sealed system of FIG. 5.
[0029] FIGS. 10A-J are various schematic cross-section views of one
embodiment of a method of forming an integrated circuit package,
where FIG. 10A is a schematic cross-section view of disposing a
conductive layer on a major surface of an active die wafer; FIG.
10B is a schematic cross-section view of patterning the conductive
layer to provide a patterned conductive layer; FIG. 10C is a
schematic cross-section view of singulating the active die wafer to
provide active dies; FIG. 10D is a schematic cross-section view of
disposing the active dies and via dies on a carrier layer; FIG. 10E
is a schematic cross-section view of encapsulating the actives dies
and the via dies to provide a compression molded wafer; FIG. 10F is
a schematic cross-section view of removing the carrier layer from
the compression molded wafer; FIG. 10G is a schematic cross-section
view of disposing one or more top contacts on a top surface of each
of the active dies and via dies; FIG. 10H is a schematic
cross-section view of planarizing a top surface of the compression
molded wafer; FIG. 10I is a schematic cross-section view of
disposing a patterned conductive layer on a bottom surface of the
compression molded wafer; and FIG. 10J is a schematic cross-section
view of singulating the compression molded wafer.
DETAILED DESCRIPTION
[0030] In general, the present disclosure provides various
embodiments of an integrated circuit package and a method of
forming such package. The package can include first and second
active dies, where the first active die is adapted to emit
electromagnetic radiation from a top surface that includes a first
wavelength and the second active die is adapted to emit
electromagnetic radiation from a top surface that includes a second
wavelength different from the first wavelength. The package can
also include a via die that includes first and second vias that
each extend between a top contact disposed on a top surface of the
via die and a bottom contact disposed on a bottom surface of the
via die. A bottom contact of the first active die can be
electrically connected to a bottom contact of the first via of the
via die, and a bottom contact of the second active die can be
electrically connected to a bottom contact of the second via of the
via die.
[0031] Typical integrated circuit packages (e.g., for memory to
logic applications) include an embedded wafer level ball grid array
package disposed on a similar package to provide a
three-dimensional package-on-package device. The bottom die of the
package-on-package device can be packaged utilizing a fan-out wafer
level package process to form vias through the device that connect
the top of the device to the bottom of the device. This allows the
top package of the device to be placed on a top surface of the
bottom package for interconnection to a die or dies of the bottom
package and a printed circuit board on which the device is
disposed. One issue with such three-dimensional package-on-package
devices is that placement tolerances and relative movement during
compression molding of the devices can be challenging to
control.
[0032] The various embodiments of integrated circuit packages
described herein can provide one or more advantages over current
three-dimensional package-on-package devices. For example, in one
or more embodiments, glass, silicon, or other encapsulating
material can be utilized as die cavities and vias in a single
structure. Such structure can render unnecessary tighter tolerances
that are required for three-dimensional package-on-package devices.
For one or more embodiments of integrated circuit packages
described herein, the tolerance of a cavity to the via of the
package will be determined by wafer fabrication capabilities and
not determined by die level placement tolerances for
package-on-package devices. Further, various embodiments of
integrated circuit packages described herein can include two or
more active dies that are each adapted to emit electromagnetic
radiation of a given wavelength or wavelengths, where a first
active die can emit a wavelength or wavelengths that are different
from a wavelength or wavelengths emitted by a second active
die.
[0033] The various embodiments of integrated circuit packages
described herein can be utilized in any suitable electronic system.
For example, one or more embodiments of integrated circuit packages
described herein can be utilized in an IMD, ICD, IPG, insertable
cardiac monitor, implantable diagnostic monitor, deep brain
stimulator, implantable neurostimulator, injectable
neurostimulator, implantable ventricular assist device, etc. In one
or more embodiments, the integrated circuit packages described
herein can be utilized in a wearable device or instrument that is
external to a user's body.
[0034] FIGS. 1-2 are various views of one embodiment of an
integrated circuit package 10. The package 10 includes a first
active die 12 and a second active die 14. The first active die 12
is adapted to emit electromagnetic radiation from a top surface 16
that includes a first wavelength. The second active die 14 is also
adapted to emit electromagnetic radiation from a top surface 18
that includes a second wavelength different from the first
wavelength. Further, the first active die 12 includes one or more
top contacts 20 disposed on the top surface 16 of the die and one
or more bottom contacts 22 disposed on a bottom surface 24 of the
die, and the second active die 14 includes one or more top contacts
26 disposed on the top surface 18 of the die and one or more bottom
contacts 28 disposed on a bottom surface 30 of the die.
[0035] The first integrated circuit package 10 also includes a via
die 32 that has a first via 34 and a second via 36. The first via
34 extends between a top contact 38 disposed on a top surface 40 of
the via die 32 and a bottom contact 42 disposed on a bottom surface
44 of the via die. Further, the second via 36 of the via die 32
extends between a top contact 46 disposed on the top surface 40 of
the via die and a bottom contact 48 disposed on the bottom surface
44 of the via die. The bottom contact 22 of the first active die 12
is electrically connected to the bottom contact 42 of the first via
34 of the via die 32, and the bottom contact 28 of the second
active die 14 is electrically connected to the bottom contact 48 of
the second via 36 of the via die.
[0036] Each of the first and second active dies 12, 14 can include
any suitable die or device, e.g., at least one of a capacitor,
resistor, passive integrated capacitor system, logic circuit,
analog circuit, diode, MOSFET, insulated-gate bipolar transistor,
thyristor, light emitting diode, vertical-cavity surface-emitting
laser, organic light emitting diode, etc. In one or more
embodiments, at least one of the first and second active dies 12,
14 can be a light emitting die. For example, at least one of the
first and second active dies 12, 14 can include any electrical
circuit component(s) capable of emitting light in response to an
applied voltage or current, including, for example, light emitting
diodes (LEDs), laser diodes, vertical cavity surface emitting
lasers (VCSELs), organic LEDs printed directly on the surface,
nano-emitters, etc. Further, each of the first and second dies 12,
14 can be a cluster of one or more components that emit one or more
discrete wavelengths or broadband emitters spanning a large range
of wavelengths. Although depicted as including two dies 12, 14, the
device 10 can include any suitable number of dies as is further
described herein. In general, the number of active dies and
corresponding emission wavelengths utilized in the packages
described herein can be selected according to the requirements of a
particular application and will depend on the physiological
condition or conditions being monitored.
[0037] The first active die 12 is adapted to emit electromagnetic
radiation from the top surface 16, and the second active die 14 is
adapted to emit electromagnetic radiation form the top surface 18.
In other words, the top surfaces 16, 18 of the first and second
active dies 12, 14 are emitting surfaces. Although depicted as
having one emitting surface 16, 18, each of the first and second
active dies 12, 14 can include two or more emitting surfaces.
[0038] At least one of the first and second active dies 12, 14 can
be a packaged light source. In one or more embodiments, at least
one of the first and second active dies 12, 14 can include a
flip-chip type package. In one or more embodiments, at least one of
the first and second active dies 12, 14 can be a bare semiconductor
die.
[0039] The first and second active dies 12, 14 can be adapted to
emit electromagnetic radiation of any suitable wavelength or
wavelengths. In one or more embodiments, the first and second
active dies 12, 14 can emit at least one of infrared,
near-infrared, visible, and UV light. In one or more embodiments,
the first and second active dies 12, 14 can emit visible light
having a wavelength of at least 350 nm and no greater than 950 nm.
The first and second active dies 12, 14 can emit any suitable
bandwidth of electromagnetic radiation. In one or more embodiments,
the first and second active dies 12, 14 can emit electromagnetic
radiation in a narrow band, e.g., the dies are adapted to emit
light having an emission bandwidth no greater than 20 nm, 15 nm, 10
nm, or 5 nm full-width at half-maximum (FWHM). In one or more
embodiments, a narrow band emitting active die can be paired with a
broadband detector that is sensitive to all wavelengths emitted by
the die. In one or more embodiments, a narrow-band emitting active
die can be paired with a narrow-band detector. Further, in one or
more embodiments, a narrow band emitting active die can be paired
with two or more broadband detectors. For example, silicon
detectors can be sensitive in the visible to near-infrared
wavelength ranges (e.g., up to about 1000 nm), but gallium arsenide
can be sensitive to longer infrared wavelengths (e.g., greater than
1000 nm). In one or more embodiments, a broadband emitting active
die can be utilized with two or more narrow band detectors.
[0040] In one or more embodiments, each of the first and second
active dies 12, 14 can include a broadband emitter that utilizes
re-emission of phosphorous materials or combination of broadband
FWHM LEDs, e.g., a 680 nm LED with greater than a 50 nm FWHM that
spans into the 720 nm wavelength. In such embodiments, a single LED
can provide emission at both 680 nm and 720 nm, paired with a
detector that can discriminate between these two wavelengths.
Similarly, a second broadband FWHM die can be used at 800 nm that
also spans 760 nm. In such embodiments, two broadband FWHM dies can
span four wavelengths, e.g., 680, 720, 760, and 800 nm.
[0041] In one or more embodiments, the first active die 12 can be
adapted to emit electromagnetic radiation from the top surface 16
that includes a first wavelength or wavelength band and the second
active die 14 can be adapted to emit electromagnetic radiation from
the top surface 18 that includes a second wavelength or wavelength
band. In one or more embodiments, the first wavelength is the same
as the second wavelength. Further, in one or more embodiments, the
first wavelength is different from the second wavelength.
[0042] In one or more embodiments, at least one of the first and
second active dies 12, 14 can be adapted to emit electromagnetic
radiation in one or more pulses having any suitable pulse width and
periodicity. Further, in one or more embodiments, at least one of
the first and second active dies 12, 14 may be pulsed in a
sequential manner.
[0043] At least one of the first and second active dies 12, 14 can
have any suitable cone angle of emission. As used herein, the term
"cone angle" refers to solid angle relative to a normal to an
emitting surface (e.g., top surface) of the die. In one or more
embodiments, at least one of the first and second active dies 12,
14 can have a cone angle of no greater than 90 degrees, 80 degrees,
70 degrees, 60 degrees, 50 degrees, 40 degrees, 30 degrees, 20
degrees, 10 degrees, or 5 degrees. In one or more embodiments, at
least one of the first and second active dies 12, 14 can emit
electromagnetic radiation hemispherically from its respective top
surface 16, 18.
[0044] The first active die 12 includes one or more top contacts 20
disposed on the top surface 16 of the die. As seen in FIG. 2, the
first active die 12 includes four top contacts 20. The first active
die 12 can include any suitable number of top contacts, e.g., one,
2, 3, 4, 5, or more top contacts. The top contacts 20 can include
any suitable contact or pad that can provide an electrical
connection to the active die 12. In one or more embodiments, one or
more of the top contacts 20 can include a conductive pillar (or a
solder bump with a barrier metal disposed over a die pad) that can
be disposed on the top surface 16 of the active die 12 using any
suitable technique or techniques, e.g., electroplating, etching,
photo etching, ablation, laser ablation, etc.
[0045] Further, the top contacts 20 can each include a solder bump
21 disposed thereon. any suitable solder bumps 21 can be disposed
on the top contacts 20. The top contacts 20 can have any suitable
dimensions and can be disposed in any suitable arrangement or array
on the top surface 16 of the first active die 12. Further, the top
contacts 20 can include any suitable conductive material or
materials.
[0046] The second active die 14 also includes one or more top
contacts 26 disposed on the top surface 18 of the die. The top
contacts 26 of the second active die 14 can include any suitable
contacts or conductive pads described here in, e.g., the same
conductive contacts as top contacts 20 of first active die 12. All
of the design considerations and possibilities regarding the top
contacts 20 of the first active die 12 apply equally to the top
contacts 26 of the second active die 14. In one or more
embodiments, the top contacts 26 of the second active die 14 can
each include a solder bump 27 disposed on one or more of the top
contacts.
[0047] The first active die 12 also includes one or more bottom
contacts 22 disposed on the bottom surface 24 of the first active
die, and the second active die 14 also includes one or more bottom
contacts 28 disposed on the bottom surface 30 of the second active
die. The bottom contacts 22, 28 are adapted to provide an
electrical connection to the first and second active dies 12, 14
respectively. The bottom contacts 22, 28 of the first and second
active dies 12, 14 can include any suitable contact or conductive
pad described herein regarding top contacts 20, 26. Further, the
bottom contacts 22, 28 can have any suitable dimensions and be
disposed in any suitable arrangement or array on the bottom
surfaces 24, 30 of the first and second of active dies 12, 14
respectively. Further, the bottom contacts 22, 28 can take any
suitable shape or shapes.
[0048] Although not shown in FIGS. 1-2, one or more top contacts 20
of the first active die 12 can be electrically connected to one or
more top contacts 26 of the second active die 14 using any suitable
technique or techniques. Further, for example, the bottom contacts
22, 28 of the first and second active dies 12, 14 can be
electrically connected to bottom contacts 42, 48 of the via die 32
using any suitable technique or techniques.
[0049] The integrated circuit package 10 also includes the via die
32. The via die 32 includes the first via 34 and the second via 36.
Although depicted as including first and second vias 34, 36, the
via die 32 can include any suitable number of vias, e.g., 1, 2, 3,
4, 5, or more vias. The via die 32 can include any suitable
material or materials, e.g., glass, quartz, sapphire, ceramic, high
temperature plastic, printed wiring board material, polyimide flex
tape, etc.
[0050] The first via 34 extends between the top contact 38 disposed
on the top surface 40 of the via die 32 and the bottom contact 42
disposed on the bottom surface 44 of the die. Further, the second
via 36 extends between the top contact 46 disposed on the top
surface 40 of the via die 32 and the bottom contact 48 disposed on
the bottom surface 44 of the die. The vias 34, 36 can include any
suitable conductive material or materials and be formed using any
suitable technique or techniques. For example, in one or more
embodiments, one or more openings can be formed through a die body
33 of the via die 32, and conductive material can be disposed in
the openings to form the vias 34, 36. Such openings can take any
suitable shape or shapes. Further, the top contacts 38, 46 of the
vias 34, 36 can be disposed on the top surface 40 such that they
are electrically connected to the vias using any suitable technique
or techniques. And the bottom contacts 42, 48 of the first and
second vias 34, 36 can be disposed on the bottom surface 44 of the
via die 32 such that they are electrically connected to the vias
using any suitable technique or techniques.
[0051] As mentioned herein, the first and second active dies 12, 14
are adapted to emit electromagnetic radiation from at least the top
surfaces 16, 18 of the respective dies. Each active die 12, 14 can
emit electromagnetic radiation from any portion or portions of the
respective top surface 16, 18. In one or more embodiments, the
first die 12 can include an aperture 50, and the second die 14 can
include an aperture 52 as shown in FIG. 2. Each of the first and
second active dies 12, 14 are adapted to emit electromagnetic
radiation through its respective aperture 50, 52. These apertures
50, 52 can be formed using any suitable technique or techniques. In
one or more embodiments, a masking layer or layers can be disposed
on the top surfaces 16, 18 of the first and second active dies 12,
14, and the apertures 50, 52 can be formed in the masking layer
using any suitable technique or techniques. The masking layer can
include any suitable number of layers. Further, the masking layer
can include any suitable material or materials, e.g., polymeric,
metallic, inorganic materials, and combinations thereof. In one or
more embodiments, the masking layer can include a dielectric
material. In one or more embodiments, the masking layer can include
an electrically conductive material. In one or more embodiments,
the masking layer can include an absorbing material such that the
layer is adapted to absorb electromagnetic radiation having any
suitable wavelength or range of wavelengths, e.g., one or more of
ultraviolet, visible, near infrared, and infrared light. Suitable
materials for the masking layer include TiN, fractal TiN, titanium,
etc.
[0052] If the masking layer includes electrically conductive
materials, then an optional insulating layer can be disposed
between the masking layer and one or more conductors disposed on
the top surfaces 16, 18 of the first and second active dies 12, 14.
The insulating layer can include any suitable material or materials
that insulate the masking layer from the conductor, e.g., siloxane,
silicon nitride, etc. In one or more embodiments, the insulating
layer includes a dielectric material.
[0053] The masking layer can be disposed on any suitable portion or
portions of the top surfaces 16, 18 of the first and second active
dies 12, 14 using any suitable technique or techniques. In one or
more embodiments, the masking layer can be disposed on the top
surfaces 16, 18 using, e.g., plasma vapor deposition, chemical
vapor deposition, physical vapor deposition, etc., followed by
photolithography, chemical etching, etc.
[0054] Any suitable technique or techniques can be utilized to
electrically connect one or more bottom contacts 22, 28 of the
first and second active dies 12, 14 to one or more bottom contacts
42, 48 of the via die 32. For example, FIGS. 3-4 are various
schematic views of another embodiment of an integrated circuit
package 100. All of the design considerations and possibilities
regarding the integrated circuit package 10 of FIGS. 1-2 apply
equally to the integrated circuit package 100 of FIGS. 3-4.
Integrated circuit package 100 includes first, second, third,
fourth, and fifth active dies 102, 104, 106, 108, 110 (collectively
referred to as active dies 101) and a via die 112. One difference
between the integrated circuit package 100 of FIGS. 3-4 and the
integrated circuit package 10 of FIGS. 1-2 is that package 100
includes five active dies 101 that can be arranged in any suitable
arrangement or array along with the via die 112. Each of the active
dies 101 are adapted to emit electromagnetic radiation from one or
more surfaces of the die. For example, in one or more embodiments,
active die 102 can be adapted to emit electromagnetic radiation
that includes a first wavelength or wavelength band from a top
surface 114, active die 104 can be adapted to emit electromagnetic
radiation that includes a second wavelength or wavelength band from
a top surface 116, the third active die 106 can be adapted to emit
electromagnetic radiation that includes a third wavelength or
wavelength band from a top surface 118, the fourth active die 108
can be adapted to emit electromagnetic radiation that includes a
fourth wavelength or wavelength band from a top surface 120, and
the fifth active die 110 can be adapted to emit electromagnetic
radiation that includes a fifth wavelength or wavelength band from
a top surface 122.
[0055] Further, as shown in FIG. 4, a bottom contact of one or more
of the active dies 101 can be electrically connected to one or more
bottom contacts 124 of the via die 112 using any suitable technique
or techniques. In one or more embodiments, bottom contact 126 of
the first active die 102 is electrically connected to bottom
contact 128 of a first via 130 using any suitable technique or
techniques. For example, one or more conductors 156 can be disposed
on or above bottom surfaces of the active dies 101 that
electrically connect the bottom contact 126 of the first active die
102 to the bottom contact 128 of the first via 130 of the via die
112. Further, bottom contact 132 of the second active die 104 is
electrically connected to bottom contact 134 of a second via 136 of
the via die 112, bottom contact 138 of the third active die 106 is
electrically connected to bottom contact 140 of a third via 142 of
the via die, bottom contact 144 of the fourth active die 108 is
electrically connected to bottom contact 146 of a fourth via 148 of
the via die, and bottom contact 150 of the fifth active die 110 is
electrically connected to bottom contact 152 of a fifth via 154 of
the via die.
[0056] In one or more embodiments, the bottom contact of one or
more active dies 101 can be electrically connected to one or more
bottom contacts 124 of the via die 112 by utilizing a
photolithographic technique to pattern conductive segments that
connect the bottom surface of the active die 101 to a bottom
contact 124 of the via die 112. In one or more embodiments, a
patterned conductive epoxy layer can be disposed on the bottom
surface of the package 100 using any suitable technique or
techniques. Further, in one or more embodiments, a trace pattern
can be patterned on the bottom surface of the package 100 using any
suitable technique or techniques, e.g., printing, photolithography,
etc., to electrically connect the bottom contact of one or more
active dies 101 to one or more bottom contacts 124 of the via die
112.
[0057] Returning to FIGS. 1-2, the first and second active dies 12,
14 and the via die 32 can be disposed in any suitable arrangement
or array. Further, one or more of the dies 12, 14, 32 can be in
contact with each other or spaced apart any suitable distance. In
one or more embodiments, the first and second active dies 12, 14
and the via die 32 can be disposed on a substrate or carrier using
any suitable technique or techniques. Any suitable substrate or
carrier can be utilized. In one or more embodiments, a patterned
conductive layer 56 can be disposed on the bottom surfaces 24, 30,
44 of the dies 12, 14, 32 that electrically connects the bottom
contact 22 of the first active die to the bottom contact 42 of the
first via 34 of the via die. Further, the patterned conductive
layer 56 can also electrically connect the bottom contact 28 of the
second active die 14 to the bottom contact 48 of the second via 36
of the via die 32. Any suitable technique or techniques can be
utilized to dispose the patterned conductive layer 56 on the bottom
surfaces 24, 30, 44 of the dies 12, 14, 32. In one or more
embodiments, the patterned conductive layer can include one or more
wires or conductors that electrically connect the bottom contact 22
of the first active die 12 to the bottom contact 42 of the first
via 34 of the via die 32 and the bottom contact 28 of the second
active die 14 to the bottom contact 48 of the second via 36 of the
via die 32.
[0058] In one or more embodiments, the first and second active dies
12, 14 and the via die 32 can be disposed in a molded encapsulant
54. The molded encapsulant 54 can include any suitable material or
materials, e.g., a thermosetting epoxy resin that includes organic
or inorganic (e.g., silica) filler particles, an epoxy film that is
laminated to the first and second active dies 12, 14, etc. Further,
the dies 12, 14, 32 can be disposed in the encapsulant 54 using any
suitable technique or techniques as is further described herein. In
one or more embodiments, the encapsulant 54 is disposed between the
first and second active dies 12, 14 and the via die 32.
[0059] The various embodiments of integrated circuit packages
described herein can be utilized in any suitable device or system,
e.g., the devices described in U.S. patent application Ser. No.
15/477,904, filed Apr. 3, 2017, and entitled HERMETICALLY-SEALED
PACKAGE AND METHOD OF FORMING SAME. For example, FIGS. 5-9 are
various schematic views of one embodiment of a hermetically-sealed
system 200. The system 200 includes a housing 202 and a substrate
204. The housing 202 includes an inner surface 206 and an outer
surface 208. The substrate 204 can be a non-conductive substrate
and includes a first major surface 210 and a second major surface
212. The package 200 can also include one or more electronic
devices 214 disposed within the housing 202. For example, the
electronic devices 214 can include the integrated circuit package
10 of FIGS. 1-2. Although depicted as including integrated circuit
package 10, the system 200 can include any suitable integrated
circuit package. In one or more embodiments, the integrated circuit
package 10 can be disposed on the first major surface 210 of the
substrate 204. The integrated circuit package 10 can be adapted to
transmit at least a portion of the electromagnetic radiation
emitted by each of the first and second actives dies 12, 14 through
the first and second major surfaces 210, 212 of the substrate 204.
The electronic devices 214 can further include a detector 216 (FIG.
7). In one or more embodiments, the detector 216 can be disposed on
the first major surface 210 of the substrate 204. In one or more
embodiments, one or more detectors can be disposed on the second
major surface 212 of the substrate 204. In one or more embodiments,
one or more detectors can be disposed on each of the first and
second major surfaces 210, 212 of the substrate 204. The detector
216 can be adapted to detect at least a portion of the
electromagnetic radiation transmitted through the first and second
major surfaces 210, 212 of the substrate 204 by the first and
second active dies 12, 14 of the integrated circuit package 10. For
example, in one or more embodiments, the detector 216 can be
adapted to detect at least a portion of the electromagnetic
radiation emitted by the integrated circuit package 10 and
transmitted through the substrate 204 such that it is scattered by
a volume (not shown) of tissue within a patient adjacent the second
major surface 212 of the substrate 204 and directed through the
second major surface and then the first major surface 210 to the
detector. Together, the integrated circuit package 10 and the
detector 216 can, in one or more embodiments, provide an optical
sensor.
[0060] The package 200 also includes a power source 218 that is
disposed at least partially within the housing 202. In one or more
embodiments, the power source 218 can be disposed within a cavity
220 of the housing 202. The power source 218 can include any
suitable power source or sources as is further described herein.
Further, the power source can be electrically connected to the
electronic devices 214 using any suitable technique or techniques.
For example, in one or more embodiments, the power source 218 can
include one or more power sources contacts 234, 236 can be
electrically connected to one or more device contacts 238 when the
substrate 204 is sealed to the housing 202 using any suitable
technique or techniques.
[0061] The substrate 204 can be sealed to the housing 202. In one
or more embodiments, the substrate 204 can be hermetically sealed
to the housing 202. The substrate 204 can be sealed to the housing
202 using any suitable techniques or techniques. In one or more
embodiments, the substrate 204 can be hermetically sealed to the
housing 202 by a laser bond.
[0062] The housing 202 can include any suitable material or
materials, e.g., metallic, polymeric, ceramic, or inorganic
materials. In one or more embodiments, the housing 202 can include
at least one of glass, quartz, silica, sapphire, silicon carbide,
titanium, and diamond. In one or more embodiments, the housing 202
can include at least one of copper, silver, titanium, niobium,
zirconium, tantalum, stainless steel, platinum, and iridium. The
housing 202 can include the same material or combination of
materials as the substrate 204. In one or more embodiments, the
housing 202 can include one or more materials that are different
from the material or materials of the substrate 204. Further, in
one or more embodiments, the housing 202 can include biocompatible
materials such that the system 200 can be implanted within a
patient's body. For example, one or more coatings or layers can be
disposed on the outer surface 208 of the housing 202 that provide
biocompatibility. In one or more embodiments, the housing 202 can
be electrically conductive to provide a ground electrode for the
system 200 as is known in the art. In one or more embodiments, the
housing 202 can be nonconductive.
[0063] Further, the housing 202 can take any suitable shape or
shapes and can have any suitable dimensions. In one or more
embodiments, the housing 202 takes a shape that forms the cavity
220 that can accommodate the power source 218 (including active
material and power source electronics) and one or more electronic
devices 214 as is further described herein.
[0064] Sealed to the housing 202 is the substrate 204. In one or
more embodiments, the substrate 204 can be a non-conductive or
dielectric substrate such that the electronic devices 214
(including integrated circuit package 10 and detector 216),
optional external electrodes 222, 224 and any conductors or other
devices disposed on the substrate can be electrically isolated if
desired. The substrate 204 can include any suitable material or
materials. In one or more embodiments, the substrate 204 can
include at least one of glass, quartz, silica, sapphire, silicon
carbide, diamond, and gallium nitride. As with the housing 202, the
substrate 204 can include a biocompatible material. For example,
the substrate 204 can include one or more coatings or layers that
can provide biocompatibility.
[0065] In one or more embodiments, the substrate 204 can be a
transparent substrate. As used herein, the phrase "transparent
substrate" refers to a substrate that can transmit a given
percentage of light incident thereon during use of laser bonding
techniques described herein to preferentially heat only an outer
surface of the substrate (e.g., first major surface 210 or second
major surface 212 of substrate 204), and not an inner bulk of the
substrate, and thereby create a bond that has a relatively greater
strength than the bulk strength of the substrate. Further, the
transparent substrate 204 can transmit light emitted by the
integrated circuit package 10 having any suitable wavelength or
combinations of wavelengths. The substrate 204 can be substantially
transparent at a desired wavelength or range of wavelengths. As
used herein, the phrase "substantially transparent" means that the
substrate 204 transmits greater than 50% of light incident on the
substrate for a selected wavelength or range of wavelengths,
assuming no reflection at the air-substrate boundaries. In one or
more embodiments, the substrate 204 can be substantially
transmissive to light having a wavelength of at least 200 nm. In
one or more embodiments, the substrate 204 can be substantially
transmissive to light having a wavelength of greater than 10,000
nm. In one or more embodiments, the substrate 204 can be
substantially transmissive to light having a wavelength in a range
of 200 nm to 10,000 nm. In one or more embodiments, the substrate
204 can be substantially transmissive to at least one of UV light,
visible light, and IR light.
[0066] In one or more embodiments, at least a portion of the
substrate 204 can be transparent such that the detector 216
disposed on the first major surface 210 can detect one or more
external signals, e.g., from a patient, when the system 200 is
disposed within the patient. In one or more embodiments, the at
least a portion of the substrate 204 can be sufficiently
transparent to enable transmission of all, or a sufficient
magnitude, of the light that is incident on the substrate for
reception by the detector 216 such that the received light can be
processed to detect the external signal. In one or more
embodiments, the substrate 204 can be opaque, and a through-hole
can be formed through the substrate and filled with a transparent
hermetic material such as glass to provide a transparent portion of
the substrate.
[0067] The substrate 204 can include any suitable dimensions, e.g.,
thicknesses. Further, the substrate 204 can take any suitable shape
or combinations of shapes. In one or more embodiments, the
substrate 204 can take a shape or combination of shapes that is
complementary to a shape of the housing 202 such that the substrate
can be sealed to the housing and provide a low-profile shape for
the system 200. Further, the substrate 204 can be a single, unitary
substrate or multiple substrates joined together.
[0068] Disposed on the first major surface 210 of the substrate 204
are the electronic devices 214. Although depicted as being disposed
on the first major surface 210, one or more electronic devices 214
can be disposed on the second major surface 212, or one or more
electronic devices can be disposed on both the first and second
major surfaces. In one or more embodiments, one or more electronic
devices 214 can be disposed within the housing 204 and not
connected to the substrate 202. The electronic devices 214 can
include any suitable circuit or component, e.g., capacitors,
transistors, integrated circuits, including controllers and
multiplexers, sensors, light sources, detectors, accelerometers,
signal processors, etc.
[0069] Further, any suitable technique or combination of techniques
can be utilized to dispose one or more electronic devices 214 on
the substrate 204 and/or within the cavity 220 of the housing 202.
In one or more embodiments, one or more electronic devices 214 can
be formed on the first major surface 210 of the substrate 204. In
one or more embodiments, one or more devices 214 can be formed
separately and then attached to the first major surface 210. Any
suitable technique or techniques can be utilized to attach the
electronic devices 214 to the substrate 204, e.g., a bond can be
formed between the electronic device and the first major surface
210 of the substrate. The electronic devices 214 can include one or
more integrated circuit packages 10 each having any suitable number
of active dies.
[0070] The integrated circuit package 10 can be disposed in any
suitable location within the housing 202 of the system 200. In one
or more embodiments, the integrated circuit package 10 is disposed
adjacent the first major surface 210 of the substrate 204. As used
herein, the term "adjacent" means that an element or component is
disposed closer to the first major surface 210 of the substrate 204
than to the power source 218 disposed within the housing 202. In
one or more embodiments, the integrated circuit package 10 can be
disposed on the first major surface 210 of the substrate 204 as
shown in FIG. 9 using any suitable technique or techniques. In such
embodiments, one or more top contacts 20 of the first active die
12, top contacts 26 of the second active die 14, and top contacts
38, 46 of the via die 32 of the integrated circuit package 10 can
be connected to one or more conductors 226 (FIG. 7) disposed on the
first major surface 210 of the substrate 204 using any suitable
technique or techniques, e.g., bump bonding, solder reflow,
conventional wire bonding, laser ribbon bonding, conductive epoxy
bonding, etc.
[0071] The integrated circuit package 10 can be electrically
connected to one or more electronic devices 214 disposed on one or
both of the first major surface 210 and second major surface 212 of
the substrate 204 or within the housing 202 using any suitable
technique or techniques. For example, the integrated circuit
package 10 can be electrically connected to the conductor 226 (FIG.
7) that is disposed on or within the substrate 204. The conductor
226 can electrically connect the integrated circuit package 10 to a
controller 228 of the electronic devices 214. In one or more
embodiments, a patterned conductive layer (not shown) can be
disposed on the first major surface 210 of the substrate 204. In
such embodiments, the first and second active dies 12, 14 and the
via die 32 of the integrated circuit package 10 can be electrically
connected to the patterned conductive layer disposed on the first
major surface 210 of the substrate 204 using any suitable technique
or techniques.
[0072] The system 200 also includes the detector 216. The detector
216 includes a detecting surface 230 (FIG. 9). The detector 216 can
include any suitable detector that is adapted to detect light
emitted by the integrated circuit package 10, e.g., one or more
photodiodes, photoresistors or light dependent resistors,
phototransistors, photovoltaic cells, charge-coupled devices,
avalanche detectors, etc. In one or more embodiments, the
integrated circuit package 10 can also be utilized as a detector.
Although depicted as including a single detector 216, the system
200 can include any suitable number of detectors. For example, the
system 200 can include a second detector (not shown) disposed on
the first major surface 210 of the substrate 204. In one or more
embodiments, the detector 216 can be adapted to detected
electromagnetic radiation emitted by the first active die 12 of the
integrated circuit package 10 and the second detector is adapted to
detected electromagnetic radiation emitted by the second active die
14 of the integrated circuit package.
[0073] The detector 216 can be adapted to detect any desired
wavelength or wavelengths of electromagnetic radiation. In one or
more embodiments, the detector 216 can detect one or more of
infrared, near-infrared, visible, and UV light. In one or more
embodiments, the detector 216 can detect visible light having a
wavelength of at least 350 nm and no greater than 850 nm.
[0074] The detector 216 can be disposed in any suitable location
within the housing 202 of the system 200 or outside of the housing
(e.g., on the second major surface 212 of the substrate 204). In
one or more embodiments, the detector 216 is disposed adjacent the
first major surface 210 of the substrate 204. In one or more
embodiments, the detector 216 can be disposed on the first major
surface 210 of the substrate 204 using any suitable technique or
techniques as shown in FIG. 9. In such embodiments, the detecting
surface 230 can be connected to the first major surface 210 of the
substrate 204 using any suitable technique. For example, in one or
more embodiments, the detecting surface 230 can be disposed on the
first major surface 210 of the substrate 204 using an optical
coupling layer. Any suitable coupling layer can be utilized. In one
or more embodiments, the optical coupling layer can include an
optical adhesive. In one or more embodiments, the detector 216 can
be electrically connected to an electrode disposed on a carrier.
The detector 216 can also be wired bonded from the integrated
circuit package 10 to a second electrode on the carrier. The
carrier can be designed such that the two electrodes are in a
single plane. The carrier can then be bump-bonded to one or more
conductors (e.g., conductor 232) disposed on the substrate 204.
[0075] The detector 216 can be electrically connected to one or
more of the other electronic devices 214 disposed on one or both of
the first major surface 210 and second major surface 212 of the
substrate 204 or within the housing 202 using any suitable
technique or techniques. For example, the detector 216 can be
electrically connected to the conductor 232 that is disposed on or
within the substrate 204. In one or more embodiments, the conductor
232 can electrically connect the detector 218 to the controller 228
of the electronic devices 214. Any suitable technique or techniques
can be utilized to electrically connect the detector 218 to the
conductor 232.
[0076] The various embodiments of systems described herein can be
utilized to determine one or more physiological conditions. Any
suitable physiological condition can be determined, e.g., heart
rate, arterial blood oxygen level (SpO.sub.2), blood flow, fluid
volume (e.g., edema), tissue oxygen saturation (StO.sub.2),
perfusion index (PI), Total Hemoglobin/Hematocrit, Tissue
Hemoglobin Concentration Index (THI), venous oxygen saturation
(SvO.sub.2), ambient light level within a patient, respiration
rate, optically interrogated biochemical sensors (e.g., fluorescent
or other coatings and materials in contact with tissue), pulse wave
velocity (e.g., pulse transit time), etc.
[0077] Further, the various embodiments of integrated circuit
packages described herein can be manufactured using any suitable
technique or techniques. For example, FIGS. 10A-J are various
cross-section views of one method 300 of forming integrated circuit
package 10. Although described in reference to integrated circuit
package 10 of FIGS. 1-2, the method 300 can be utilized to form any
suitable integrated circuit package.
[0078] As shown in FIG. 10A, a conductive layer 302 can be disposed
on a major surface 305 of an active die wafer 304 using any
suitable technique or techniques. The conductive layer 302 can be
patterned in FIG. 10B to provide a patterned conductive layer 303
on the active die wafer 304. Singulation streets 306 can also be
formed in the patterned conductive layer 303 using any suitable
technique or techniques. In one or more embodiments, a portion or
portions of the conductive layer 302 can be removed to form the
patterned conductive layer 303. As shown in FIG. 10C, the active
die wafer 304 can be singulated using any suitable technique or
techniques to provide individual active dies 308. The active dies
308 can include one or more of the first active die 12 and the
second active die 14 of the integrated circuit package 10 of FIGS.
1-2. The first active dies 12 can each be adapted to emit
electromagnetic radiation includes a first wavelength, and the
second active dies can each be adapted to emit electromagnetic
radiation that includes a second wavelength. In one or more
embodiments, the first wavelength is different from the second
wavelength. Further, the patterned conductive layer 303 of FIG. 10B
can be utilized to form the bottom contacts 22 of the first active
dies 12 and the bottom contacts 28 of the second active dies
14.
[0079] As shown in FIG. 10D, the active dies 308 can be disposed on
a carrier layer 314 using any suitable technique or techniques. The
active dies 308 can be disposed in any suitable arrangement or
array on the carrier layer 314. Further, the active dies 308 can be
disposed such that the top surfaces 16, 18 of the first and second
active dies 12, 14 are disposed on the carrier layer. In one or
more embodiments, an optional temporary adhesive layer 316 can be
disposed between the active dies 308 and the carrier layer 314.
Further, one or more via dies 32 can also be disposed on the
carrier layer 314 using any suitable technique or techniques. The
via dies 32 can be disposed in any suitable arrangement or array on
the carrier layer 314. Further, the via dies 32 can be disposed in
any suitable relationship relative to the active dies 308.
[0080] As shown in FIG. 10E, an encapsulant 320 can be disposed
over one or more of the active dies 308 and the via dies 32 using
any suitable technique or techniques. In one or more embodiments,
the encapsulant 320 can be molded onto the active dies 308 and the
via dies 32 as well as one or more portions of the carrier layer
314. In one or more embodiments, the encapsulant 320 is compression
molded to provide a compression molded wafer 322 that includes a
top surface 324 and a bottom surface 326, where the top surface is
disposed on the carrier layer 314. In FIG. 10F, the carrier layer
314 can be removed from the compression molded wafer 322 using any
suitable technique or techniques.
[0081] As shown in FIG. 10G, one or more top contacts 20 can be
disposed on the top surfaces 16 of the first active dies 12, and
one or more top contacts 26 can be disposed on the top surfaces 18
of the second active dies 14 using any suitable technique or
techniques. In one or more embodiments, the top contacts 20, 26 can
include solder bumps. One or more top contacts 38, 46 can also be
disposed on each via die 32 using any suitable technique or
techniques. Further, as shown in FIG. 10H, the bottom surface 326
of the compression molded wafer 322 can be planarized using any
suitable technique or techniques to expose the bottom surfaces 24,
30, 44 of each of the first and second active dies 12, 14 and the
via dies 32. In one or more embodiments, the compression molded
wafer 322 can be planarized using any suitable grinding techniques
to expose the pattern conductive layer bottom surfaces 24, 30, 44
of the first and second active dies 12, 14 and the via dies 32.
[0082] As shown in FIG. 10I, a patterned conductive layer 332 can
be disposed on the bottom surface 326 of the compression molded
wafer 322 using any suitable technique or techniques to provide the
patterned conductive layer 56 for each integrated circuit package
10. In FIG. 10J, the compression molded wafer 322 can be singulated
using any suitable technique or techniques to provide individual
integrated circuit packages 10.
[0083] All references and publications cited herein are expressly
incorporated herein by reference in their entirety into this
disclosure, except to the extent they may directly contradict this
disclosure. Illustrative embodiments of this disclosure are
discussed, and reference has been made to possible variations
within the scope of this disclosure. These and other variations and
modifications in the disclosure will be apparent to those skilled
in the art without departing from the scope of the disclosure, and
it should be understood that this disclosure is not limited to the
illustrative embodiments set forth herein. Accordingly, the
disclosure is to be limited only by the claims provided below.
* * * * *