U.S. patent application number 17/008109 was filed with the patent office on 2022-03-03 for method and system for calculating printed area metric indicative of stochastic variations of the lithographic process.
The applicant listed for this patent is Siemens Industry Software Inc.. Invention is credited to Germain Louis Fenger, Hyejin Jin, Gurdaman Khaira, Azat Latypov, Shumay D. Shang, John L. Sturtevant.
Application Number | 20220067260 17/008109 |
Document ID | / |
Family ID | 1000005105602 |
Filed Date | 2022-03-03 |
United States Patent
Application |
20220067260 |
Kind Code |
A1 |
Jin; Hyejin ; et
al. |
March 3, 2022 |
Method and System for Calculating Printed Area Metric Indicative of
Stochastic Variations of the Lithographic Process
Abstract
Systems and methods for calculating a printed area metric
indicative of stochastic variations of the lithographic process are
disclosed. Lithography is a process that uses light to transfer a
geometric pattern from a photomask, based on a layout design, to a
resist on a substrate. The lithographic process is subject to
random stochastic phenomena, with the resulting stochastic
randomness potentially becoming a major challenge. To characterize
the stochastic phenomena, a printed area metric may be generated
analytically (rather than via simulations) and comprise one or more
defined moments for a printed area distribution associated with the
printed area that are indicative of one or more aspects associated
with printing. For example, the printed area metric may be
indicative of the likelihood of printing within the printed area or
the variance of printing within the printed area due to stochastic
randomness in one or both of exposure or resist process.
Inventors: |
Jin; Hyejin; (Palo Alto,
CA) ; Sturtevant; John L.; (Portland, OR) ;
Shang; Shumay D.; (Saratoga, CA) ; Latypov; Azat;
(San Jose, CA) ; Fenger; Germain Louis;
(Gladstone, OR) ; Khaira; Gurdaman; (Beaverton,
OR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Siemens Industry Software Inc. |
Plano |
TX |
US |
|
|
Family ID: |
1000005105602 |
Appl. No.: |
17/008109 |
Filed: |
August 31, 2020 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
G06F 2111/10 20200101;
G03F 7/705 20130101; G06F 2111/08 20200101; G06F 30/392
20200101 |
International
Class: |
G06F 30/392 20060101
G06F030/392; G03F 7/20 20060101 G03F007/20 |
Claims
1. A method comprising: defining, by at least one processor of a
computer, a printed area comprising a sidelobe printing control
domain (SPCD) associated with a layout design, wherein the layout
design includes one or more elements corresponding to one or more
sub-resolution assist features (SRAFs) to remain unprinted during a
lithographic process for imaging part or all of the layout design
onto a substrate; determining, by the at least one processor of the
computer, one or more defined moments for a printed area
distribution associated with the printed area, wherein the one or
more defined moments are indicative of likelihood of printing
within the printed area due to stochastic randomness in one or both
of exposure or resist process; and modifying, by the at least one
processor of the computer, at least one aspect in the lithographic
process based on the one or more defined moments for the printed
area distribution associated with the printed area, which reduces
an effect of the stochastic randomness in the lithographic
process.
2. The method of claim 1, wherein a first moment for the printed
area distribution associated with the printed area is determined;
and wherein the at least one aspect in the lithographic process is
modified based on the first moment for the printed area
distribution associated with the printed area.
3. The method of claim 2, wherein the printed area is defined based
on the one or more elements in the layout design; and wherein the
first moment for the printed area distribution comprise an average
printed area (APA) relating to printing due to the stochastic
randomness of the one or more elements in the layout design that
are not supposed to be printed.
4. (canceled)
5. The method of claim 3, wherein the printed area is defined as
being between tips of two or more trenches; and wherein the average
printed area is indicative of pinching or bridging between the tips
of the two or more trenches.
6. The method of claim 3, wherein the APA is calculated based, at
least in part, on an integration of a cumulative distribution
function (CDF) of a deprotection function of a resist image.
7. The method of claim 6, wherein the deprotection function of the
resist image comprises a Gaussian Random Field such that the APA is
calculated by: A .times. .times. P .times. .times. A = 1 2 .times.
.intg. SPCD .times. ( 1 - erf .function. ( t - .mu. .function. ( x
) ) .sigma. .function. ( x ) .times. 2 ) ) .times. dx ##EQU00002##
wherein erf(.) is a Gauss error function, t is a printability
threshold of the resist model, .mu.(x) is a mean deprotection, and
.sigma.(x) is a standard deviation.
8. The method of claim 1, wherein a second moment for the printed
area distribution associated with the printed area is determined;
and wherein the at least one aspect in the lithographic process is
modified based on the second moment for the printed area
distribution associated with the printed area.
9. The method of claim 8, wherein one or more elements in the
layout design are supposed to be printed; and wherein the second
moment for the printed area distribution comprise a standard
deviation printed area relating to variation in printing due to the
stochastic randomness of the one or more elements in the layout
design that are supposed to be printed.
10. The method of claim 9, wherein the one or more elements in the
layout design that are supposed to be printed comprise vias/contact
holes.
11. The method of claim 9, wherein the standard deviation printed
area is a sqrt(Var(A)), where A is the printed area; wherein the
standard deviation printed area is calculated by: Var .function. (
A ) = E .function. ( A 2 ) - ( E .function. ( A ) ) 2 ##EQU00003##
E .function. ( A 2 ) = .intg. V .times. .intg. V .times. ( 1 - F (
n .function. ( x 1 ) , n .function. ( x 2 ) ) .function. ( t , t )
) .times. dx 1 .times. dx 2 ##EQU00003.2## E .function. ( A ) = A
.times. .times. P .times. .times. A = ( .intg. V .times. ( 1 - F n
.function. ( x ) .function. ( t ) ) .times. dx ) ##EQU00003.3##
wherein V is a simulation domain, n(x) is a deprotection function
of a resist image, t is a printability threshold of a resist model,
E( ) is a statistical operator of expectation, and
F.sub.(n(x.sub.1.sub.),n(x.sub.2.sub.))(t,t) is a cumulative
distribution function (CDF) of a bivariate random variable
(n(x.sub.1), n(x.sub.2)), where the CDF is evaluated at a point
(t,t) F.sub.n(x)(t) is a CDF of a univariate random variable n(x),
and APA is an average printed area.
12. The method of claim 9, wherein the standard deviation printed
area is a sqrt(Var(A)), where A is the printed area; wherein the
standard deviation printed area is calculated by:
Var(A)=E(A.sup.2)-(E(A)).sup.2 wherein integrations to calculate
E(A.sup.2) and E(A) use a simulation domain.
13. The method of claim 1, wherein determining one or more defined
moments for a printed area distribution associated with the printed
area is based on a cumulative distribution function (CDF)
associated with deprotection of resist for the printed area.
14. The method of claim 12, wherein the CDF associated with the
deprotection of the resist comprises a Gaussian Random Field
deprotection function.
15. A non-transitory machine-readable medium comprising
instructions that, when executed by a processor, cause a computing
system to perform a method comprising: defining a printed area
comprising a sidelobe printing control domain (SPCD) associated
with a layout design that is used for a lithographic process for
imaging part or all of the layout design onto a substrate, wherein
the layout design includes one or more elements corresponding to
one or more sub-resolution assist features (SRAFs) to remain
unprinted during the lithographic process; determining one or more
defined moments for a printed area distribution associated with the
printed area, wherein the one or more defined moments are
indicative of likelihood of printing within the printed area due to
stochastic randomness in one or both of exposure or resist process;
and modifying, based on the one or more defined moments for the
printed area distribution associated with the printed area, at
least one aspect in the lithographic process, which reduces an
effect of the stochastic randomness in the lithographic
process.
16. The non-transitory machine-readable medium of claim 15, wherein
a first moment for the printed area distribution associated with
the printed area is determined; wherein the printed area is defined
based on the one or more elements in the layout design; and wherein
the first moment for the printed area distribution comprise an
average printed area (APA) relating to printing due to the
stochastic randomness of the one or more elements in the layout
design that are not supposed to be printed; and wherein the at
least one aspect in the lithographic process is modified based on
the first moment for the printed area distribution associated with
the printed area.
17. (canceled)
18. The non-transitory machine-readable medium of claim 16, wherein
the printed area is defined as being between tips of two or more
trenches; and wherein the average printed area is indicative of
pinching or bridging between the tips of the two or more
trenches.
19. The non-transitory machine-readable medium of claim 16, wherein
the APA is calculated based, at least in part, on an integration of
a cumulative distribution function (CDF) of a deprotection function
of a resist image.
20. The non-transitory machine-readable medium of claim 16, wherein
a second moment for the printed area distribution associated with
the printed area is determined; and wherein one or more elements in
the layout design are supposed to be printed; wherein the second
moment for the printed area distribution comprise a standard
deviation printed area relating to variation in printing due to the
stochastic randomness of the one or more elements in the layout
design that are supposed to be printed; and wherein the at least
one aspect in the lithographic process is modified based on the
second moment for the printed area distribution associated with the
printed area.
21. The non-transitory machine-readable medium of claim 20, wherein
the one or more elements in the layout design that are supposed to
be printed comprise vias/contact holes.
22. The non-transitory machine-readable medium of claim 20, wherein
the standard deviation printed area is a sqrt(Var(A)), where A is
the printed area; wherein the standard deviation printed area is
calculated by: Var .function. ( A ) = E .function. ( A 2 ) - ( E
.function. ( A ) ) 2 ##EQU00004## E .function. ( A 2 ) = .intg. V
.times. .intg. V .times. ( 1 - F ( n .function. ( x 1 ) , n
.function. ( x 2 ) ) .function. ( t , t ) ) .times. dx 1 .times. dx
2 ##EQU00004.2## E .function. ( A ) = A .times. .times. P .times.
.times. A = ( .intg. V .times. ( 1 - F n .function. ( x )
.function. ( t ) ) .times. dx ) ##EQU00004.3## wherein V is a
simulation domain, n(x) is a deprotection function of a resist
image, t is a printability threshold of a resist model, E( ) is a
statistical operator of expectation, and
F.sub.(n(x.sub.1.sub.),n(x.sub.2.sub.))(t,t) is a cumulative
distribution function (CDF) of a bivariate random variable
(n(x.sub.1), n(x.sub.2)), where the CDF is evaluated at a point
(t,t) F.sub.n(x)(t) is a CDF of a univariate random variable n(x),
and APA is an average printed area.
23. The non-transitory machine-readable medium of claim 20, wherein
the standard deviation printed area is a sqrt(Var(A)), where A is
the printed area; wherein the standard deviation printed area is
calculated by: Var(A)=E(A.sup.2)-(E(A)).sup.2 wherein integrations
to calculate E(A.sup.2) and E(A) use a simulation domain.
Description
FIELD
[0001] The present disclosure relates to the field of circuit
design and manufacturing, and specifically relates to determining
success or failure for a lithographic process due to stochastic
variations of the lithographic process.
BACKGROUND
[0002] Electronic circuits, such as integrated microelectronics,
are used in a variety of products, from automobiles to microwaves
to personal computers. Designing and fabricating integrated
circuits (IC) typically involves many steps, sometimes referred to
as a "design flow." The particular steps of the design flow often
are dependent upon the type of integrated circuit, its complexity,
the design team, and the integrated circuit fabricator or foundry
that will manufacture the IC. Typically, software and hardware
"tools" verify the design at various stages of the design flow by
running software simulators and/or hardware emulators. These steps
aid in the discovery of errors in the design, and allow the
designers and engineers to correct or otherwise improve the
design.
[0003] For example, a layout design may be derived from an
electronic circuit design. The layout design may comprise an IC
layout, an IC mask layout, or a mask design. In particular, the
layout design may be a representation of an integrated circuit in
terms of planar geometric shapes that correspond to the patterns of
metal, oxide, or semiconductor layers, which make up the components
of the integrated circuit. The layout design can be one for a whole
chip or a portion of a full-chip layout design.
[0004] Lithography is a process used to manufacture electronic
circuits in which light is used to transfer a geometric pattern
from a photomask, based on the layout design, to a silicon
substrate by coated by a photo-sensitive resist material
(photoresist). One common family of photoresists is composed of
entangled polymer chains. The polymer contains certain functional
groups which get modified due to chemical reactions caused by
exposure to light (deprotection) and hence affects the polymer's
solubility during development and thus creating a mask for the
subsequent etching process. Various types of lithography processes
are used, including deep ultraviolet (DUV) lithography or extreme
ultraviolet (EUV) lithography. In DUV or EUV lithography, one or
more stochastic phenomena may manifest themselves, such as line
edge roughness or critical dimension (CD) non-uniformity. In more
extreme cases, the stochastic phenomena may lead to stochastic
pinching or bridging of the patterned features, resulting in
potential failure of the electronic circuit.
[0005] DUV lithography or EUV lithography may be subject to random
stochastic phenomenon based on any one, any combination or all of:
(1) photon shot noise; (2) stochastic phenomena in the resist
process (e.g., photo-acid generator's (PAG) activation,
acids/quencher molecules random walk and reactions, deprotection of
the functional groups); or (3) stochastic phenomena in the resist
development (e.g., dissolution of entangled partially deprotected
polymer chains). While stochastic randomness effects both DUV and
EUV lithography, the effects are more severe for EUV lithography
due to lower average photon counts, resulting in stochastic
randomness being one of the major challenges in EUV
lithography.
[0006] Stochastic randomness may affect various parts of the layout
design, such as features in the layout design intended to be
printed and features in the layout design not intended to be
printed. Merely by way of example, sub-resolution assist features
(SRAFs) and main features may be included in the layout design.
SRAFs are the auxiliary features (e.g., dark or bright areas on the
photomask) added typically in the vicinity of the main features.
The main features are intended to print the element of the
integrated circuit on the wafer, usually shaped similarly to the
main feature (e.g. a via or a contact hole or an interconnect
wire). The SRAFs are designed so that they do not print themselves
on the wafer, but help to make the printed main features to be
closer to the target shapes and to be less sensitive to the
perturbations of the lithographic process parameters (e.g. dose and
focus). Examples of SRAFs are disclosed in US Patent Application
Publication No. 2006/0240342 A1, US Patent Application Publication
No. 2013/0191792 A1, and US Patent Application Publication No.
2019/0266311 A1, each of which are incorporated by reference in
their entirety.
[0007] Deviations of the lithographic process parameters from their
nominal values, such as due to the stochastic perturbation
phenomena described in the previous section, may result in SRAF
features printing themselves (e.g., sidelobe printing). As a
result, unintended printed features may occur on the wafer,
resulting in lithographic defects and reducing the yield of the
lithographic process of the integrated circuit fabrication. Thus,
methodologies seek to determine the likelihood of SRAF
printability.
[0008] Various methods seek to understand stochastic randomness in
order to determine the likelihood of SRAF printability. As one
example, experimental measurements are used whereby multiple
instances of the pattern of interest are exposed and measured, with
identical exposure, development and measurement settings. In
particular, multiple instances of the pattern of interest are
exposed and their scanning electronic microscope (SEM) images are
measured, with identical exposure, development and SEM measurement
settings. The SEM measurements results are analyzed to assess the
frequency of the SRAF or sidelobe printing in these multiple
experimental trials.
[0009] As another example, Monte Carlo simulations are performed
using stochastic rigorous models of exposure and resist processes.
Specifically, multiple simulation runs (e.g., simulation trials)
are run with identical exposure, development and simulated
metrology settings, differing by the random seed factors used in
the stochastic simulator. The outcomes of these random simulation
trials are then analyzed to assess the frequency of the SRAF or
sidelobe printing in these multiple experimental trials.
[0010] As still another example, non-stochastic resist and exposure
models may be used with modifications increasing the printability
of sidelobes. In particular, for a positive resist, the value of
the threshold may be lowered, or the nominal dose can be slightly
increased, to cause SRAFs or sidelobe printability. The simulated
printed SRAFs or sidelobes are then measured and the likelihood of
their printability from stochastic perturbations is judged by the
dimensions of the simulated printed SRAFs or sidelobes.
[0011] As yet another example, the probability of SRAF or sidelobe
printing may be calculated in a certain area. In particular, the
calculation may be performed using the stochastic model and the
methods described in U.S. application Ser. No. 16/545,601, entitled
"Method and System for Calculating Probability of Success or
Failure for a Lithographic Process Due to Stochastic Variations of
the Lithographic Process", incorporated by reference herein in its
entirety.
SUMMARY
[0012] To be completed after finalizing the claims
BRIEF DESCRIPTION OF THE DRAWINGS
[0013] The accompanying drawings, which are incorporated in and
constitute a part of this specification, illustrate various aspects
of the invention and together with the description, serve to
explain its principles. Wherever convenient, the same reference
numbers will be used throughout the drawings to refer to the same
or like elements.
[0014] FIG. 1 illustrates an example of a computing system that may
be used to implement various embodiments of the disclosed
technology.
[0015] FIG. 2 illustrates an example of a multi-core processor unit
that may be used to implement various embodiments of the disclosed
technology.
[0016] FIG. 3 illustrates a block diagram of inputs to and
output(s) from a printed area metric generator.
[0017] FIG. 4 is a flow diagram of generating and using the printed
area metric generator.
[0018] FIG. 5 is an illustration of a sidelobe printing control
domain (SPCD).
[0019] FIG. 6 is a table of SRAF-relative APA vs. dose derived from
Monte Carlo simulations and from the analytical formula for the
illustration in FIG. 5.
[0020] FIG. 7A is a graph of SRAF relative APA vs. dose for Monte
Carlo and for analytical solutions (linear scale) for the data
illustrated in FIG. 6.
[0021] FIG. 7B is a graph of SRAF relative APA vs. dose for Monte
Carlo and for analytical solutions (logarithmic scale) for the data
illustrated in FIG. 6.
[0022] FIG. 8 is an illustration of the sidelobe printability
control domain (SPCD) for a via/contact holes (CH) case.
[0023] FIG. 9 is a table of SRAF-relative APA vs. dose derived from
Monte Carlo simulations and from the analytical formula for the
illustration in FIG. 8.
[0024] FIG. 10A is a graph of SRAF relative APA vs. dose for Monte
Carlo and for analytical solutions (linear scale) for the data
illustrated in FIG. 9.
[0025] FIG. 10B is a graph of SRAF relative APA vs. dose for Monte
Carlo and for analytical solutions (logarithmic scale) for the data
illustrated in FIG. 9.
DETAILED DESCRIPTION OF EMBODIMENTS
[0026] General Considerations
[0027] Various aspects of the present disclosed technology relate
to techniques for determining one or more printed area metrics
indicative of stochastic randomness in the exposure and resist
process in order to improve (or optimize) illumination and/or mask
used in a semiconductor manufacturing process, thereby reducing the
effects of stochastic randomness on the yield of the lithographic
process. In the following description, numerous details are set
forth for the purpose of explanation. However, one of ordinary
skill in the art will realize that the disclosed technology may be
practiced without the use of these specific details. In other
instances, well-known features have not been described in detail to
avoid obscuring the present disclosed technology.
[0028] Some of the techniques described herein can be implemented
in software instructions stored on one or more non-transitory
machine-readable media, software instructions executed on a
computer, or some combination of both. Some of the disclosed
techniques, for example, can be implemented as part of an
electronic design automation (EDA) tool. Such methods can be
executed on a single computer or on networked computers.
[0029] Although the operations of the disclosed methods are
described in a particular sequential order for convenient
presentation, it should be understood that this manner of
description encompasses rearrangements, unless a particular
ordering is required by specific language set forth below. For
example, operations described sequentially may in some cases be
rearranged or performed concurrently. Moreover, for the sake of
simplicity, the disclosed flow charts and block diagrams typically
do not show the various ways in which particular methods can be
used in conjunction with other methods. Additionally, the detailed
description sometimes uses terms like "perform", "generate,"
"access," and "determine" to describe the disclosed methods. Such
terms are high-level abstractions of the actual operations that are
performed. The actual operations that correspond to these terms
will vary depending on the particular implementation and are
readily discernible by one of ordinary skill in the art.
[0030] Also, as used herein, the term "design" is intended to
encompass data describing an entire integrated circuit device. This
term also is intended to encompass a smaller group of data
describing one or more components of an entire device, however,
such as a portion of an integrated circuit device. Still further,
the term "design" also is intended to encompass data describing
more than one micro device, such as data to be used to form
multiple micro devices on a single wafer.
[0031] Illustrative Operating Environment
[0032] The execution of various electronic design automation
processes according to embodiments of the disclosed technology may
be implemented using computer-executable software instructions
executed by one or more programmable computing devices. Because
these embodiments of the disclosed technology may be implemented
using software instructions, the components and operation of a
generic programmable computer system on which various embodiments
of the disclosed technology may be employed will first be
described. Further, because of the complexity of some electronic
design automation processes and the large size of many circuit
designs, various electronic design automation tools are configured
to operate on a computing system capable of simultaneously running
multiple processing threads. The components and operation of a
computer network having a host or master computer and one or more
remote or servant computers therefore will be described with
reference to FIG. 1. This operating environment is only one example
of a suitable operating environment, however, and is not intended
to suggest any limitation as to the scope of use or functionality
of the disclosed technology.
[0033] In FIG. 1, the computer network 101 includes a master
computer 103. In the illustrated example, the master computer 103
is a multi-processor computer that includes a plurality of
input/output devices 105 and a memory 107. The input/output devices
105 may include any device for receiving input data from or
providing output data to a user. The input devices may include, for
example, a keyboard, microphone, scanner or pointing device for
receiving input from a user. The output devices may then include a
display monitor, speaker, printer or tactile feedback device. These
devices and their connections are well known in the art, and thus
will not be discussed at length here.
[0034] The memory 107 may similarly be implemented using any
combination of machine readable media, such as computer readable
media that can be accessed by the master computer 103. The computer
readable media may include, for example, microcircuit memory
devices such as read-write memory (RAM), read-only memory (ROM),
electronically erasable and programmable read-only memory (EEPROM)
or flash memory microcircuit devices, CD-ROM disks, digital video
disks (DVD), or other optical storage devices. The computer
readable media may also include magnetic cassettes, magnetic tapes,
magnetic disks or other magnetic storage devices, punched media,
holographic storage devices, or any other medium that can be used
to store desired information.
[0035] As will be discussed in detail below, the master computer
103 runs a software application for performing one or more
operations according to various examples of the disclosed
technology. Accordingly, the memory 107 stores software
instructions 109A that, when executed, will implement a software
application for performing one or more operations, such as the
operations disclosed herein. The memory 107 also stores data 109B
to be used with the software application. In the illustrated
embodiment, the data 109B contains process data that the software
application uses to perform the operations, at least some of which
may be parallel.
[0036] The master computer 103 also includes a plurality of
processor units 111 and an interface device 113. The processor
units 111 may be any type of processor device that can be
programmed to execute the software instructions 109A, but will
conventionally be a microprocessor device. For example, one or more
of the processor units 111 may be a commercially generic
programmable microprocessor, such as Intel.RTM. Pentium.RTM. or
Xeon.TM. microprocessors, Advanced Micro Devices Athlon.TM.
microprocessors or Motorola 68K/Coldfire.RTM. microprocessors.
Alternately or additionally, one or more of the processor units 111
may be a custom-manufactured processor, such as a microprocessor
designed to optimally perform specific types of mathematical
operations. The interface device 113, the processor units 111, the
memory 107 and the input/output devices 105 are connected together
by a bus 115.
[0037] With some implementations of the disclosed technology, the
master computer 103 may employ one or more processing units 111
having more than one processor core. Accordingly, FIG. 2
illustrates an example of a multi-core processor unit 111 that may
be employed with various embodiments of the disclosed technology.
As seen in this figure, the processor unit 111 includes a plurality
of processor cores 201. Each processor core 201 includes a
computing engine 203 and a memory cache 205. As known to those of
ordinary skill in the art, a computing engine contains logic
devices for performing various computing functions, such as
fetching software instructions and then performing the actions
specified in the fetched instructions. These actions may include,
for example, adding, subtracting, multiplying, and comparing
numbers, performing logical operations such as AND, OR, NOR and
XOR, and retrieving data. Each computing engine 203 may then use
its corresponding memory cache 205 to quickly store and retrieve
data and/or instructions for execution.
[0038] Each processor core 201 is connected to an interconnect 207.
The particular construction of the interconnect 207 may vary
depending upon the architecture of the processor unit 111. With
some processor cores 201, such as the Cell microprocessor created
by Sony Corporation, Toshiba Corporation and IBM Corporation, the
interconnect 207 may be implemented as an interconnect bus. With
other processor units 111, however, such as the Opteron.TM. and
Athlon.TM. dual-core processors available from Advanced Micro
Devices of Sunnyvale, Calif., the interconnect 207 may be
implemented as a system request interface device. In any case, the
processor cores 201 communicate through the interconnect 207 with
an input/output interface 209 and a memory controller 210. The
input/output interface 209 provides a communication interface
between the processor unit 111 and the bus 115. Similarly, the
memory controller 210 controls the exchange of information between
the processor unit 111 and the system memory 107. With some
implementations of the disclosed technology, the processor units
111 may include additional components, such as a high-level cache
memory accessible shared by the processor cores 201.
[0039] While FIG. 2 shows one illustration of a processor unit 111
that may be employed by some embodiments of the disclosed
technology, it should be appreciated that this illustration is
representative only, and is not intended to be limiting. Also, with
some implementations, a multi-core processor unit 111 can be used
in lieu of multiple, separate processor units 111. For example,
rather than employing six separate processor units 111, an
alternate implementation of the disclosed technology may employ a
single processor unit 111 having six cores, two multi-core
processor units each having three cores, a multi-core processor
unit 111 with four cores together with two separate single-core
processor units 111, etc.
[0040] Returning now to FIG. 1, the interface device 113 allows the
master computer 103 to communicate with the servant computers 117A,
117B, 117C . . . 117x through a communication interface. The
communication interface may be any suitable type of interface
including, for example, a conventional wired network connection or
an optically transmissive wired network connection. The
communication interface may also be a wireless connection, such as
a wireless optical connection, a radio frequency connection, an
infrared connection, or even an acoustic connection. The interface
device 113 translates data and control signals from the master
computer 103 and each of the servant computers 117 into network
messages according to one or more communication protocols, such as
the transmission control protocol (TCP), the user datagram protocol
(UDP), and the Internet protocol (IP). These and other conventional
communication protocols are well known in the art, and thus will
not be discussed here in more detail.
[0041] Each servant computer 117 may include a memory 119, a
processor unit 121, an interface device 123, and, optionally, one
more input/output devices 125 connected together by a system bus
127. As with the master computer 103, the optional input/output
devices 125 for the servant computers 117 may include any
conventional input or output devices, such as keyboards, pointing
devices, microphones, display monitors, speakers, and printers.
Similarly, the processor units 121 may be any type of conventional
or custom-manufactured programmable processor device. For example,
one or more of the processor units 121 may be commercially generic
programmable microprocessors, such as Intel.RTM. Pentium.RTM. or
Xeon.TM. microprocessors, Advanced Micro Devices Athlon.TM.
microprocessors or Motorola 68K/Coldfire.RTM. microprocessors.
Alternately, one or more of the processor units 121 may be
custom-manufactured processors, such as microprocessors designed to
optimally perform specific types of mathematical operations. Still
further, one or more of the processor units 121 may have more than
one core, as described with reference to FIG. 2 above. For example,
with some implementations of the disclosed technology, one or more
of the processor units 121 may be a Cell processor. The memory 119
then may be implemented using any combination of the computer
readable media discussed above. Like the interface device 113, the
interface devices 123 allow the servant computers 117 to
communicate with the master computer 103 over the communication
interface.
[0042] In the illustrated example, the master computer 103 is a
multi-processor unit computer with multiple processor units 111,
while each servant computer 117 has a single processor unit 121. It
should be noted, however, that alternate implementations of the
disclosed technology may employ a master computer having single
processor unit 111. Further, one or more of the servant computers
117 may have multiple processor units 121, depending upon their
intended use, as previously discussed. Also, while only a single
interface device 113 or 123 is illustrated for both the master
computer 103 and the servant computers, it should be noted that,
with alternate embodiments of the disclosed technology, either the
computer 103, one or more of the servant computers 117, or some
combination of both may use two or more different interface devices
113 or 123 for communicating over multiple communication
interfaces.
[0043] With various examples of the disclosed technology, the
master computer 103 may be connected to one or more external data
storage devices. These external data storage devices may be
implemented using any combination of computer readable media that
can be accessed by the master computer 103. The computer readable
media may include, for example, microcircuit memory devices such as
read-write memory (RAM), read-only memory (ROM), electronically
erasable and programmable read-only memory (EEPROM) or flash memory
microcircuit devices, CD-ROM disks, digital video disks (DVD), or
other optical storage devices. The computer readable media may also
include magnetic cassettes, magnetic tapes, magnetic disks or other
magnetic storage devices, punched media, holographic storage
devices, or any other medium that can be used to store desired
information. According to some implementations of the disclosed
technology, one or more of the servant computers 117 may
alternately or additionally be connected to one or more external
data storage devices. Typically, these external data storage
devices will include data storage devices that also are connected
to the master computer 103, but they also may be different from any
data storage devices accessible by the master computer 103.
[0044] It also should be appreciated that the description of the
computer network illustrated in FIG. 1 and FIG. 2 is provided as an
example only, and it not intended to suggest any limitation as to
the scope of use or functionality of alternate embodiments of the
disclosed technology.
[0045] Stochastic Phenomena
[0046] Lithography may comprise patterning layers for semiconductor
dies. As discussed above, random stochastic phenomena may affect
lithography, particularly EUV lithography, resulting in defects in
the semiconductor dies. As discussed in the background, one
solution is to analyze SEM measurements results to assess the
frequency of the SRAF or sidelobe printing in multiple experimental
trials. However, the experimental measurements of multiple repeated
identical exposures are practical only for a small subset of
patterns of the integrated circuit layer.
[0047] Another solution to determine the effect of the random
stochastic phenomena is to perform Monte Carlo simulations. In
particular, potentially millions of different Monte Carlo
simulations, with random seeds encoding the locations where the
individual photons are absorbed in the resist film, may be run. The
random seeds serve as starting points for random number generators
to simulate small random variations. Millions of the simulations,
which are performed for a large portion of the layer (and not
merely for the critical portions), result in success or failure,
thereby generating a distribution of success or failure. This
procedure to perform millions of simulations is very
computationally expensive. Thus, due to the computationally
expensive nature, Monte Carlo simulation simulations and analysis
of multiple repeated identical exposures are practical likewise
only for a small subset of patterns of the integrated circuit
layer.
[0048] Still another solution is using non-stochastic resist and
exposure models with modification increasing the printability of
sidelobes. However, the drawback of such a methodology is that the
known modification increasing the printability of sidelobes may not
always accurately represent stochastic perturbations of exposure
and resist processes.
[0049] In contrast, in some embodiments, rather than running Monte
Carlo simulations or the like, a printed area metric based on an
analytical solution (rather than a simulated solution) is
generated. The analytical printed area metric comprises one or more
defined moments for a printed area distribution associated with the
printed area that are indicative of one or more aspects associated
with printing (e.g., the likelihood of printing within the printed
area; variance of printing within the printed area; skewness of the
printed area; kurtosis of the printed area; etc.) due to stochastic
randomness in one or both of exposure or resist process. In
particular, the printed area may be considered the random variable
from a stochastic standpoint. As such, different moments may be
calculated for the printed area distribution associated with the
printed area.
[0050] Various ways are contemplated to calculate the moments for
the printed area distribution. As discussed in more detail below,
the moments for the printed area distribution may be calculated
without direct knowledge of the printed area distribution. In one
or some embodiments, a distribution (such as cumulative
distribution function (CDF)) associated with deprotection of resist
for the printed area may be used to calculate the moments for the
printed area distribution. In this way, knowledge of the
distribution associated with deprotection enable the calculation of
the moments for the printed area distribution without the need for
deriving the CDF for the printed area distribution. As discussed
further below, the first moment (e.g., the first raw moment) and
the second moment (e.g., the second central moment) may be
calculated. Higher order moments, such as the third moment
(skewness), fourth moment (kurtosis), and other higher moments, are
contemplated as well (e.g., in a calculation of the expected value
of the resistance of a via, assuming that the resistance of the via
satisfies the Pouillet's law where resistance is proportional to
the via material resistivity and the length of the via and is
inversely proportional its cross-section area). Alternatively, the
moments may be calculated directly from the printed area
distribution.
[0051] As one example, a first moment, indicative of the
average/mean/expectation, may be calculated for the printed area
distribution associated with the printed area. As discussed in more
detail below, the CDF associated with deprotection of resist for
the printed area may be used to determine an average printed area
(APA). As another example, a second moment, indicative of the
standard deviation/variance, may be calculated for the printed area
distribution associated with the printed area. As discussed in more
detail below, the CDF associated with deprotection of resist for
the printed area may be used to determine the standard deviation
(e.g., the square root of the variance (sqrt(Var(A)), where A is
the defined printed area)). In this way, different moments, such as
the first statistical moment of the random variable (e.g.,
indicative of the average), the second statistical moment of the
random variable (e.g., indicative of the variance), or other
moments of the random variable, may be calculated.
[0052] For example, APA may comprise a statistical expectation of
the defined printed area. APA may be more lithographically
meaningful than merely a probability of printing because APA, in
effect, assigns higher "weights" to larger printed areas. Further,
APA may be analytically calculated by integrating over a defined
area (such as the sidelobe printability control domain (SPCD)) for
a deprotection function (e.g., using a CDF, such as a Gaussian
Random Field deprotection function), as discussed in more detail
below. In this way, APA may use the CDF, sampling random
deprotection at various points within the defined area, so that the
CDF is of a univariate random vector.
[0053] As another example, the standard deviation may comprise a
probative stochastic metric to characterize the stochastic-caused
variation of lithographically patterned elements, such as
vias/contact holes. Similar to the APA metric, the standard
deviation of the printed area may be analytically calculated (e.g.,
using a CDF, such as Gaussian Random Field deprotection function).
As discussed further below, the standard deviation may use the CDF
of the bivariate random vector, with a first component deprotection
at point x.sub.1 and a the second component deprotection at point
x.sub.2.
[0054] The one or more moments may be probative stochastic metrics
for different aspects of the layout design. In particular, in one
or some embodiments, the one or more moments may be probative as to
the printability of one or more elements in the layout design (such
as one or more elements in the layout design that are not
designated for printing). As one example, SRAFs are for assisting
in the printing of other elements (e.g., main features) but are not
to be printed themselves. As such, printing of SRAFs is rare,
random, and may be caused by stochastic phenomena. As another
example, pinching or bridging between two or more lithographic
features (e.g., between the tips of two trenches) may likewise be
caused by stochastic phenomena. The first moment of the printed
area distribution, such as APA, which is indicative of the average
printed area, may be probative of the likelihood of printing for
element(s) not designated for printing.
[0055] Alternatively, or in addition, the one or more moments may
be probative as to one aspect of printability (e.g., variability
associated with printing) of one or more elements in the layout
design that are designated for printing. As one example,
vias/contact holes (CH) may be considered main features for
printing. Stochastic phenomena may affect the printing of those
main features, such as the variability of those printed main
features. As such, one or more printed area metrics, such as
standard deviation (or other metric derived from variance) of the
printed area, may be probative of the variability of printing of
main features designated for printing. In this way, the second
moment of the printed area distribution may be a better metric for
assessing the printing of the main features.
[0056] Alternatively, multiple moments, such as the first moment
and the second moment, may be used in combination. In one or some
embodiments, responsive to identifying a non-linear function
associated with a physical meaningful quantity, multiple moments
may be used. For example, calculating a metric indicative of the
expectation of resistance (such as in the context of a via, which
is discussed further below and may be based on a non-linear
function), the formulation may use a Taylor expansion as a linear
combination of a first moment of the expectation of the printed
area and a second moment of the variance of the printed area.
[0057] Thus, the analytical printed area metric may be indicative
of the likelihood of whether, within a respective printed area, any
one, any combination, or all of the following may occur: SRAF
printing; pinching or bridging; the lithographic process results in
the complete removal of the resist material; the lithographic
process results in the complete retention of the resist material;
variance of main feature printing; or the like.
[0058] The analytical printed area metric may thus be indicative of
the success or failure of critical sections of the layout design
identified as particularly susceptible to failure. In this way, the
analytical printed area metric may: (i) provide a computationally
efficient way to calculate the printed area metric indicative of
the outcome of the lithographic process with respect to the
stochastic randomness in exposure and the resist process; and/or
(ii) enable the improvement (or optimization) of the illumination
(e.g., source) and/or the mask (e.g., with regard to source-mask
optimization (SMO) or optical proximity correction (OPC)
algorithms) in order to reduce or mitigate the effects of
stochastic randomness on the yield of the lithographic process.
Examples of lithographic processes are disclosed in US Patent
Application Publication No. 2015/0067628 A1 and US Patent
Application Publication No. 2019/0102501 A1, both of which are
incorporated by reference in their entirety.
[0059] Specifically, the analytical printed area metric may
efficiently identify certain critical sections prone to failure
(based on the determined printed area metrics, such as printability
and/or variability of printing) in order to modify one or both of
the intensity (or other light exposure parameter) or the resist
(such as the pattern in the layout design) to reduce the
possibility of failure. In this way, the methodology makes it
practical to calculate the printed area metric without multiple
iterations of the SMO, OPC or verification algorithms for the
entire die of the integrated circuit. This is unlike typical
analysis methodologies, such as based on Monte Carlo simulations,
that make the use of experimental exposures and measurements in
multiple iterations of the mask preparation flow impractical.
Rather, the analytical printed area metric for one or more defined
printed areas may be calculated within a reasonable time, with
results comparable to Monte Carlo simulations, allowing quick
verification of the OPC/SMO solutions and to calculate the OPC/SMO
solutions, thereby reducing the probability of stochastic failure
and improving the yield, particularly in the EUV lithography.
[0060] In one implementation of OPC, the mask pattern is modified
(such as iteratively modified) in order to produce the mask pattern
yielding the optimal process result with regard to a certain
criterion (e.g., the least edge placement error or the least
failure probability). An example of OPC is disclosed in US Patent
Application Publication No. 2016/0292348, incorporated by reference
herein in its entirety.
[0061] In one implementation, in SMO, the mask pattern,
illumination mode and potentially exposure dose are modified (such
as iteratively modified) to produce the optimal process result
(e.g., the least edge placement error or the least failure
probability). An example of SMO is disclosed in US Patent
Application Publication No. 2015/0067628, incorporated by reference
herein in its entirety.
[0062] Referring back to the figures, FIG. 3 illustrates a block
diagram 300 of inputs to and output(s) from a printed area metric
generator 330. As discussed above, the printed area metric may be
dependent on one or more factors, such as the defined area and/or
the desired moment. In this regard, the printed area metric
generator 330 may receive one or more inputs, including any one,
any combination or all of: the defined are 310 (e.g., SPCD) and the
moment input (e.g., input indicative that the first moment printed
area metric is sought, etc.). Further, the output of the printed
area metric generator 330 may comprise printed area metric (e.g.,
the first moment of the printed area metric (e.g., APA), the second
moment of the printed area metric (e.g., standard deviation)).
[0063] FIG. 4 is a flow diagram 400 of generating and using the
printed area metric generator. At 410, one or more printed areas of
the layout design may be identified. At 420, the one or more
printed area metrics are generated.
[0064] At 420, the generated printed area metric(s) may be used in
a cost function for one or both of source optimization or mask
optimization. In optimizing the lithographic process, a cost
function may be used. The cost function may take one of several
forms suitable for the goal of optimization and represent one or
more figures of merit (e.g., a metric of the system). An example of
cost function analysis is disclosed in US Patent Application
Publication No. 2015/0067628, incorporated by reference herein in
its entirety. The optimization process may find one or more
parameters of the system that optimizes (e.g., minimizes or
maximizes) the cost function, under a certain constraint if any.
When the cost function is optimized (e.g., minimized or maximized),
the one or more figures of merit represented by the cost function
are optimized (e.g., minimized or maximized). In a lithography
apparatus, an example of a cost function comprises:
Cost=F*D (1)
[0065] where F equals the frequency of the pattern and D equals the
printing difficulty factor. In some implementations, the generated
printed area metric(s) may be factored into the cost function, such
as incorporated into D.
[0066] FIG. 5 is an illustration 500 of a sidelobe printing control
domain (SPCD) 510. As discussed above, the printed area may be
defined in order to generate the printed area metric associated
thereto. With regards to FIG. 5, the printed area is defined as the
area associated with SRAFs, as shown by box 510 in between lines
520, 522 in which elements, such as 530, 532, 534, 536, 538, 540,
542, 544 associated with SRAFs, are printed due to stochastic
phenomena.
[0067] As discussed above, APA comprises the statistical
expectation (e.g., average) of the area of the printed features
(e.g. the area of the printed SRAFs shown by 530, 532, 534, 536,
538, 540, 542, 544) within a user-defined area, such as the SPCD
510 illustrated in FIG. 5. APA may thus be thought of as a printed
area averaged over infinitely many trials. Further, APA may be
estimated by running a sufficiently large number of Monte Carlo
trials and averaging the printed areas, as discussed above. In
contrast, the analytically-determined APA metric may be calculated
efficiently without running multiple simulations.
[0068] In one or some embodiments, the APA for the printed area
distribution may be calculated based on the CDF of the deprotection
function. As one example, the mathematical derivation may be as
follows:
APA=E(.intg..sub.SPCDH(n(x)-t)dx) (2)
APA=E(.intg..sub.SPCDE(H(n(x)-t))dx) (3)
APA=E(.intg..sub.SPCD(1-F.sub.n(x)(t))dx) (4)
[0069] where E(.) is the statistical operator of expectation (i.e.,
average), H(.) is a Heaviside function (i.e., H(x)=1, x.gtoreq.0,
H(x)=0, x<0), n(x) is a deprotection function, t is a threshold
of the resist model, F.sub.n(x)(.) is a cumulative distribution
function (CDF) of a scalar random variable n(x). Thus, where
n(x)>t, the resist is removed. In this way, the Heaviside
function may be used to correlate that for all areas where
n(x)>t, the value of the Heaviside function=1. As shown, the
integration is over the defined area, in this instance SPCD. Other
defined areas are contemplated.
[0070] Various distributions of scalar random variable n(x) are
contemplated. As one example, for one example of the stochastic
model, n(x) may comprise a Gaussian Random Field. As such, equation
(4) results in:
A .times. P .times. A = 1 2 .times. .intg. S .times. P .times. C
.times. D .times. ( 1 - erf .function. ( t - .mu. .function. ( x )
.sigma. .function. ( x ) .times. 2 ) ) .times. d .times. x ( 5 )
##EQU00001##
[0071] where erf(.) is the Gauss error function, .mu.(x) is the
mean deprotection, which may be calculated from the advanced resist
model (e.g., the non-stochastic OPC resist model) or the stochastic
model, .sigma.(x) is a standard deviation (e.g., square root of the
variance) of a random variable n(x) (i.e. the Gaussian Random Field
sampled at the point x), which may be calculated from the
stochastic model. Though n(x) is considered a Gaussian Random
Field, other distributions, such as a continuous random field
distribution, a multivariate normal distribution, or the like, are
contemplated as well.
[0072] Further, the standard deviation (e.g., the sqrt(Var(A)),
where A is the printed area) may be indicative of variation of the
area of the printed features, which may be a probative stochastic
metric characterizing the stochastic variability of certain
features. The standard deviation printed area metric may be used
alone or in combination with other metrics, such as any one, any
combination, or all of: local critical dimension uniformity (LCDU);
line width roughness (LWR) (e.g., measuring the distance between
the edges of a line and calculating 3 times the standard
deviation); or line edge roughness (LER) (e.g., measuring 3 times
the standard deviation of the position of 1 edge).
[0073] The standard deviation printed area metric may be probative
for the stochastic variability of various features that are
designated for printing, such as via/CH patterns. For example, in
the case of via/CH patterns, the standard deviation printed area
metric may be probative because the electrical resistance of the
wire is inversely proportional to the area of its cross-section
(and not its critical dimension (CD) or any other linear
measurement of its width used in other metrics). Thus, the standard
deviation printed area metric is a probative lithographical metric
to the cross-sectional area of the via. Further, the area of the
SEM-imaged via on the wafer is easy to calculate from the contour
of the SEM image. Compared to the calculation of CD from the SEM
image, the calculation of such area does not require aligning the
CD gauge to the (unknown) center of the target of the via. Finally,
the standard deviation printed area metric may be efficiently
analytically calculated, as shown below.
[0074] For Var(A), where A is the printed area:
Var(A)=E(A.sup.2)-(E(A)).sup.2 (6)
[0075] For the first term in Equation (6):
E(A.sup.2)=E((.intg..sub.VH(n(x)-t)dx).sup.2) (7)
E(A.sup.2)=E(.intg..intg..sub.VVH(n(x.sub.1)-t)H(n(x.sub.2)-t)dx.sub.1dx-
.sub.2) (8)
E(A.sup.2)=.intg..intg..sub.VVE(H(n(x.sub.1)-t)H(n(x.sub.2)-t))dx.sub.1d-
x.sub.2 (9)
E(A.sup.2)=.intg..intg..sub.VV(1-F.sub.(n(x.sub.1.sub.),n(x.sub.2.sub.))-
(t,t))dx.sub.1dx.sub.2 (10)
[0076] where V is the simulation area, n(x) is deprotection (resist
image), t is a printability threshold and H is a Heaviside function
(H (x)=1, when x>0, and (H (x)=0 otherwise).
F.sub.(n(x.sub.1.sub.),n(x.sub.2.sub.))(t, t) denotes a CDF of a
bivariate random variable (n(x.sub.1), n(x.sub.2)), where this CDF
is evaluated at a point (t, t).
[0077] The second term in Equation (6) (E(A)) is the APA, which may
be calculated for a defined area, for example, according to
paragraphs [0070]-[0076] above. The defined area may be different
from the simulation area.
[0078] In this regard, there is a random printed domain, or printed
feature, with the area of this random domain/feature (A), being a
random variable. V is a deterministic simulation domain, which may
be user-selected, within which the user may seek to characterize a
stochastic variation of a printed feature, such as a via. The user
may thus select V to encompass the variations of the printed
element (e.g., variations in the vias) that the user considers
possible.
[0079] For instance, certain printed elements, such as vias, may be
placed in periodic patterns. For these periodic via patterns, the
adjacent vias may be placed sufficiently far as not to merge as a
result of their stochastic fluctuations. All stochastic
fluctuations of each via of interest to the user may then be bound
to the period of the given via, with V selected to be this period.
For the formula for Var(A) to represent the variance of a given
via, the simulation domain may be selected such that for any
possible stochastic perturbation of the given via, V includes this
given via entirely, and V need not include any portion of any other
neighboring vias. In other words, the formula for Var(A) may
comprise a formula for the variance of the printed area within the
user-selected domain V. If Var(A) is sought to represent the
variance of a given via, the selected V may include this given via
in all of its entirety, and need not include any other neighboring
vias, for any stochastic fluctuations these vias may
experience.
[0080] In the example of a sufficiently sparse rectangular arrays
of vias where the vias are separated center-to-center in the x and
y directions in Px and Py, one manner to select V (the simulation
domain) for a respective via is to select V based on the dimensions
of the array (e.g., select V to be an Px-by-Py rectangle centered
on the respective via). In this way, the rectangular domain may be
called a period of this via array.
[0081] For the current stochastic model (which may be based on the
Gaussian Random Field deprotection (n(x)), an analytical
calculation of the standard deviation of the printed area metric
may be performed by calculating the CDF of the bivariate normal
distribution (n(x.sub.1), n(x.sub.2)) at a point (t, t). The CDF of
a bivariate normal distribution can be efficiently calculated by a
numerical integration of the probability density function (PDF) of
a bivariate normal distribution, see, e.g., Genz, A. Numerical
computation of rectangular bivariate and trivariate normal and t
probabilities. Statistics and Computing 14, 251-260 (2004).
https://doi.org/10.1023/B:STCO.0000035304.20635.31
[0082] The analytical APA metric may be compared with the Monte
Carlo simulation-based APA metric for a lines and spaces (LS) SRAF
case. In particular, the table 600 (with images of the SPCD 610 for
different doses) illustrated in FIG. 6 includes results for an EUV
process for an LS array with pitch=80 nm, main feature linewidth=20
nm, the SRAF linewidth of 14 nm, dose=100 mJ/cm2, diffusion
length=3 nm, resist efficiency=0.05, which results in APA relative
to the design SRAF area of about 0.07-0.08. As shown in FIG. 6, the
dose is varied within -10% to +10% from the nominal, and APA
relative to the design SRAF area is calculated, first using Monte
Carlo simulations and second using the analytical formula for APA.
Thus, as shown in the table 600, the APA in nm.sup.2 for the Monte
Carlo simulations is based on 1,000 trials. The relative APA, both
for the Monte Carlo simulations and the analytical APA, are derived
based on dividing the APA by the area of 3,500 nm.sup.2 (in the
present case, the SPCD is 14 nm*250 nm=3,500 nm.sup.2 centered
rectangle, with the mask SRAF within 250 nm long line). It is noted
that the agreement between the APA based on the Monte Carlo
simulations and the analytical APA may be further improved by
increasing the number of Monte Carlo trials.
[0083] FIG. 7A is a graph 700 of SRAF relative APA vs. dose for
Monte Carlo and for analytical solutions (linear scale) for the
data illustrated in FIG. 6. FIG. 7B is a graph 750 of SRAF relative
APA vs. dose for Monte Carlo and for analytical solutions
(logarithmic scale) for the data illustrated in FIG. 6. As shown,
the Monte Carlo simulation data points 710 follow the curve of the
analytical formula 720.
[0084] FIG. 8 is an illustration 800 of the sidelobe printability
control domain (SPCD) (defined by element 840 between box 810 and
830) for a via/contact holes (CH) case (shown as main feature 832).
In the example of FIG. 8, the mask comprises: a darkfield mask; X/Y
pitches 125 nm; main feature 832 is 27.times.27 nm on the mask
printing to the X/Y CDs of 25 nm on the wafer; and SRAFs 820, 822,
824, 826 are 10.times.54 nm, positioned with their geometrical
centers at a distance of 44 nm from the center of the main feature
832. The imaging and exposure comprises: a simplified imaging model
(e.g., coherent illumination, Kirchhoff diffraction, EUV wavelength
X=13.5 nm, NA=0.33), nominal dose of 100 mJ/cm2). The resist and
stochastic models comprise: diffusion_length=3 nm, resist
efficiency=0.05. Further, the SRAF printability assessment
comprises Sidelobe Printability Control Domain (SPCD) is the entire
pitch, with the exception of the main feature 832 (e.g.,
54.times.54 nm square centered at the center of the pitch). The
exposure dose is varied within +/-10% of the nominal value in
increments of 2%. Further, APA is calculated using 1e5 Monte Carlo
trials and using the analytical APA metric, with the results from
both calculations illustrated in the table 900 (with images of the
SPCD 910 for different doses) in FIG. 9 showing SRAF-relative APA
vs. dose derived from Monte Carlo simulations and from the
analytical formula.
[0085] FIG. 10A is a graph 1000 of SRAF relative APA vs. dose for
Monte Carlo and for analytical solutions (linear scale) for the
data illustrated in FIG. 9. FIG. 10B is a graph 1050 of SRAF
relative APA vs. dose for Monte Carlo and for analytical solutions
(logarithmic scale) for the data illustrated in FIG. 9. As shown,
the Monte Carlo simulation data points 1010 follow the curve of the
analytical formula 1020.
[0086] As shown in FIGS. 7A-B and 10A-B, both LS and via/CH
examples demonstrate a good agreement in SRAF APA prediction
between the analytical APA metric and Monte Carlo derived APA. As
discussed above, the stochastic model is based on Gaussian Random
Field deprotection. Alternatively, the stochastic model may account
for non-linearities in the real resist process (such as
non-linearities to model saturation/depletion). In such an
instance, the above analytical formulas for the printed area
metrics likewise apply.
[0087] The above disclosed subject matter is to be considered
illustrative, and not restrictive, and the appended claims are
intended to cover all such modifications, enhancements, and other
embodiments, which fall within the true spirit and scope of the
description. Thus, to the maximum extent allowed by law, the scope
is to be determined by the broadest permissible interpretation of
the following claims and their equivalents, and shall not be
restricted or limited by the foregoing detailed description.
* * * * *
References