U.S. patent application number 16/924203 was filed with the patent office on 2022-01-13 for package and manufacturing method thereof.
This patent application is currently assigned to Taiwan Semiconductor Manufacturing Co., Ltd.. The applicant listed for this patent is Taiwan Semiconductor Manufacturing Co., Ltd.. Invention is credited to Shang-Yun Hou, Kuan-Yu Huang, Sung-Hui Huang.
Application Number | 20220013495 16/924203 |
Document ID | / |
Family ID | |
Filed Date | 2022-01-13 |
United States Patent
Application |
20220013495 |
Kind Code |
A1 |
Huang; Sung-Hui ; et
al. |
January 13, 2022 |
PACKAGE AND MANUFACTURING METHOD THEREOF
Abstract
A package includes a first die, a second die, a semiconductor
frame, and a reinforcement structure. The first die has a first
surface and a second surface opposite to the first surface. The
first die includes grooves on the first surface. The second die and
the semiconductor frame are disposed side by side over the first
surface of the first die. The semiconductor frame has at least one
notch exposing the grooves of the first die. The reinforcement
structure is disposed on the second surface of the first die. The
reinforcement structure includes a first portion aligned with the
grooves.
Inventors: |
Huang; Sung-Hui; (Yilan
County, TW) ; Hou; Shang-Yun; (Hsinchu, TW) ;
Huang; Kuan-Yu; (Taipei, TW) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Taiwan Semiconductor Manufacturing Co., Ltd. |
Hsinchu |
|
TW |
|
|
Assignee: |
Taiwan Semiconductor Manufacturing
Co., Ltd.
Hsinchu
TW
|
Appl. No.: |
16/924203 |
Filed: |
July 9, 2020 |
International
Class: |
H01L 25/065 20060101
H01L025/065; H01L 23/00 20060101 H01L023/00; H01L 23/31 20060101
H01L023/31; H01L 23/48 20060101 H01L023/48; H01L 21/56 20060101
H01L021/56 |
Claims
1. A package, comprising: a first die having a first surface and a
second surface opposite to the first surface, wherein the first die
comprises grooves on the first surface; a second die and a
semiconductor frame disposed side by side over the first surface of
the first die, wherein the semiconductor frame has at least one
notch exposing the grooves of the first die; and a reinforcement
structure disposed on the second surface of the first die, wherein
the reinforcement structure comprises a first portion aligned with
the grooves.
2. The package of claim 1, wherein a projection of the grooves
along a direction perpendicular to the first surface of the first
die is overlapped with the first portion of the reinforcement
structure.
3. The package of claim 1, wherein the reinforcement structure
further comprises a second portion connected to the first portion,
wherein the second portion is disposed along at least one edge of
the first die.
4. The package of claim 3, wherein the first portion of the
reinforcement structure extends along a first direction and the
second portion of the reinforcement structure extends along a
second direction perpendicular to the first direction.
5. The package of claim 3, wherein the second portion of the
reinforcement structure is disposed along four edges of the first
die.
6. The package of claim 1, wherein the reinforcement structure is
electrically floating.
7. The package of claim 1, further comprising: an encapsulant over
the first die, wherein the encapsulant laterally encapsulates the
second die; a dam structure disposed along edges of the at least
one notch; optical fibers located in the grooves; conductive
terminals disposed on the second surface of the first die; and a
circuit substrate over the second surface of the first die.
8. The package of claim 7, wherein the conductive terminals are
directly in contact with the circuit substrate, and the
reinforcement structure is spaced apart from the circuit
substrate.
9. A package, comprising: a circuit substrate; an interposer
disposed on the circuit substrate, wherein the interposer comprises
grooves on a surface thereof opposite to the circuit substrate; a
die and a semiconductor frame disposed side by side over the
interposer opposite to the circuit substrate, wherein the
semiconductor frame has at least one notch exposing the grooves of
the interposer; a dam structure disposed on the interposer and
surrounded by the semiconductor frame; conductive terminals
sandwiched between the circuit substrate and the interposer; and a
reinforcement structure located between the circuit substrate and
the interposer, wherein the reinforcement structure comprises a
trunk portion and branch portions extending out from the trunk
portion.
10. The package of claim 9, wherein the conductive terminals and
the reinforcement structure are made of the same material.
11. The package of claim 9, wherein the branch portions of the
reinforcement structure are aligned with the grooves.
12. The package of claim 9, wherein the trunk portion of the
reinforcement structure extends along an edge of the
interposer.
13. The package of claim 9, wherein the reinforcement structure
further comprises an extending portion extends from one end of the
trunk portion to another end of the trunk portion.
14. The package of claim 9, wherein the reinforcement structure is
electrically floating.
15. The package of claim 9, further comprising: an encapsulant over
the interposer, wherein the encapsulant laterally encapsulates the
die; and optical fibers located in the grooves.
16. A manufacturing method of a package, comprising: providing a
wafer substrate having a first surface and a second surface
opposite to the first surface, wherein the wafer substrate
comprises grooves formed on the first surface; placing dies and a
dummy die over the first surface of the wafer substrate, wherein
the dummy die covers the grooves; laterally encapsulating the dies
and the dummy die by an encapsulant; forming conductive terminals
and a reinforcement structure on the second surface of the wafer
substrate, wherein a portion of the reinforcement structure is
aligned with the grooves; removing a portion of the dummy die to
form a semiconductor frame having at least one opening exposing the
grooves; and singulating the semiconductor frame, the wafer
substrate, and the reinforcement structure to form singulated
structures.
17. The method of claim 16, further comprising forming a dam
structure on the first surface of the wafer substrate, wherein the
dam structure surrounds the grooves.
18. The method of claim 17, wherein the dummy die comprises a
trench, and placing dies over the first surface of the wafer
substrate comprises fitting the dam structure into the trench.
19. The method of claim 16, further comprising: mounting the
singulated structure onto a circuit substrate; and performing a
reflow process on the conductive terminals and the reinforcement
structure to reshape the reinforcement structure.
20. The method of claim 16, further comprising placing optical
fibers in the grooves.
Description
BACKGROUND
[0001] Semiconductor devices and integrated circuits used in a
variety of electronic apparatus, such as cell phones and other
mobile electronic equipment, are typically manufactured on a single
semiconductor wafer. The dies of the wafer may be processed and
packaged with other semiconductor devices or dies at the wafer
level, and various technologies have been developed for the wafer
level packaging. How to ensure the reliability of the wafer level
packaging has become a challenge in the field.
BRIEF DESCRIPTION OF THE DRAWINGS
[0002] Aspects of the present disclosure are best understood from
the following detailed description when read with the accompanying
figures. It is noted that, in accordance with the standard practice
in the industry, various features are not drawn to scale. In fact,
the dimensions of the various features may be arbitrarily increased
or reduced for clarity of discussion.
[0003] FIG. 1A to FIG. 1O are schematic cross-sectional views
illustrating a manufacturing process of a package in accordance
with some embodiments of the disclosure.
[0004] FIG. 2A is a top view of the package in FIG. 1O.
[0005] FIG. 2B is a bottom view of the package in FIG. 1O.
[0006] FIG. 3A is a schematic cross-sectional view of the package
in FIG. 2A taken along line II-II'.
[0007] FIG. 3B is a schematic cross-sectional view of the package
in FIG. 2A taken along line III-III'.
[0008] FIG. 4A is a top view of a package in accordance with some
alternative embodiments of the disclosure.
[0009] FIG. 4B is a bottom view of the package in FIG. 4A.
[0010] FIG. 5A is a schematic cross-sectional view of the package
in FIG. 4A taken along line I-I'.
[0011] FIG. 5B is a schematic cross-sectional view of the package
in FIG. 4A taken along line II-II'.
[0012] FIG. 5C is a schematic cross-sectional view of the package
in FIG. 4A taken along line III-III'.
[0013] FIG. 6A is a top view of a package in accordance with some
alternative embodiments of the disclosure.
[0014] FIG. 6B is a bottom view of the package in FIG. 6A.
[0015] FIG. 7A is a schematic cross-sectional view of the package
in FIG. 6A taken along line I-I'.
[0016] FIG. 7B is a schematic cross-sectional view of the package
in FIG. 6A taken along line II-II'.
[0017] FIG. 7C is a schematic cross-sectional view of the package
in FIG. 6A taken along line III-III'.
[0018] FIG. 8A is a top view of a package in accordance with some
alternative embodiments of the disclosure.
[0019] FIG. 8B is a bottom view of the package in FIG. 8A.
[0020] FIG. 9A is a schematic cross-sectional view of the package
in FIG. 8A taken along line I-I'.
[0021] FIG. 9B is a schematic cross-sectional view of the package
in FIG. 8A taken along line II-II'.
[0022] FIG. 9C is a schematic cross-sectional view of the package
in FIG. 8A taken along line III-III'.
DETAILED DESCRIPTION
[0023] The following disclosure provides many different
embodiments, or examples, for implementing different features of
the provided subject matter. Specific examples of components and
arrangements are described below to simplify the present
disclosure. These are, of course, merely examples and are not
intended to be limiting. For example, the formation of a first
feature over or on a second feature in the description that follows
may include embodiments in which the first and second features are
formed in direct contact, and may also include embodiments in which
additional features may be formed between the first and second
features, such that the first and second features may not be in
direct contact. In addition, the present disclosure may repeat
reference numerals and/or letters in the various examples. This
repetition is for the purpose of simplicity and clarity and does
not in itself dictate a relationship between the various
embodiments and/or configurations discussed.
[0024] Further, spatially relative terms, such as "beneath,"
"below," "lower," "above," "upper" and the like, may be used herein
for ease of description to describe one element or feature's
relationship to another element(s) or feature(s) as illustrated in
the figures. The spatially relative terms are intended to encompass
different orientations of the device in use or operation in
addition to the orientation depicted in the figures. The apparatus
may be otherwise oriented (rotated 90 degrees or at other
orientations) and the spatially relative descriptors used herein
may likewise be interpreted accordingly.
[0025] Other features and processes may also be included. For
example, testing structures may be included to aid in the
verification testing of the 3D packaging or 3DIC devices. The
testing structures may include, for example, test pads formed in a
redistribution layer or on a substrate that allows the testing of
the 3D packaging or 3DIC, the use of probes and/or probe cards, and
the like. The verification testing may be performed on intermediate
structures as well as the final structure. Additionally, the
structures and methods disclosed herein may be used in conjunction
with testing methodologies that incorporate intermediate
verification of known good dies to increase the yield and decrease
costs.
[0026] FIG. 1A to FIG. 1O are schematic cross-sectional views
illustrating a manufacturing process of a package 10 in accordance
with some embodiments of the disclosure. Referring to FIG. 1A, a
wafer substrate WS1 is provided. In some embodiments, the wafer
substrate WS1 may be made of a suitable elemental semiconductor,
such as crystalline silicon, diamond, or germanium; a suitable
compound semiconductor, such as gallium arsenide, silicon carbide,
indium arsenide, or indium phosphide; or a suitable alloy
semiconductor, such as silicon germanium carbide, gallium arsenic
phosphide, or gallium indium phosphide.
[0027] In some embodiments, the semiconductor wafer WS1 includes a
plurality of trenches TR formed therein. In some embodiments, each
trench TR exhibits a ring-shape from the top view. In some
embodiments, the trenches TR are arranged in an array. In some
embodiments, the wafer substrate WS1 further includes a plurality
of alignment recesses AR formed therein. In some embodiments, each
alignment recess AR exhibits an L-shape or a cross-shape from the
top view. As illustrated in FIG. 1A, the trenches TR and the
alignment recesses AR extend downwardly from a top surface of the
wafer substrate WS1 into the interior of the wafer substrate WS1.
In some embodiments, a depth of the alignment recesses AR is
smaller than a depth of the trenches TR. On the other hand, the
depth of the alignment recesses AR and the depth of the trenches TR
are both smaller than a thickness of the wafer substrate WS1. For
example, the depth of the trenches TR may range from about 50
micrometers to about 600 micrometers, which is about 7% to about
80% of the thickness of the wafer substrate WS1, and the depth of
the alignment recesses AR may range from about 30 micrometers to
about 300 micrometers, which is be about 4% to about 40% of the
thickness of the wafer substrate WS1. That is, the trenches TR and
the alignment recesses AR do not penetrate through the wafer
substrate WS1. In some embodiments, the trenches TR and the
alignment recesses AR may be formed by etching or other suitable
processes. In some embodiments, the alignment recesses AR may be
optional. It should be noted that that the number of the trenches
TR and the number of the alignment recesses AR illustrated in FIG.
1A are merely for illustrative purposes, and the disclosure is not
limited thereto. In some alternative embodiments, fewer or more
trenches TR and alignment recesses AR may be included in the wafer
substrate WS1 depending on the layout design.
[0028] Referring to FIG. 1B, the trenches TR of the semiconductor
wafer WS1 is partially filled with a dielectric material to form
dummy rings 102. For example, the dummy rings 102 covers a bottom
surface and a portion of sidewalls of the trenches TR. On the other
hand, another portion of the sidewalls of the trenches TR is not
being covered by the dummy rings 102. In some embodiments, the
dielectric material is also filled into the alignment recesses AR
to form alignment marks AM. In some embodiments, the dielectric
material fills the alignment recesses AR completely to form the
alignment marks AM. In some embodiments, the dielectric material is
further deposited on portions of the top surface of the
semiconductor wafer WS1 to form protective coatings 104. For
example, the protective coatings 104 cover portions of the top
surface of the wafer substrate WS1 which are enclosed by the
trenches TR. As illustrated in FIG. 1B, the dummy rings 102 and the
alignment marks AM are embedded in the wafer substrate WS1 and are
not covered by the protective coatings 104. Since the dummy rings
102 partially fill the trenches TR and do not protrude from the top
surface of the wafer substrate WS1, the dummy rings 102 are not in
direct contact with the protective coatings 104. In some
embodiments, top surfaces of the dummy rings 102 are lower than the
top surface of the wafer substrate WS1, and the level height
difference between the top surfaces of the dummy rings 102 and the
top surface of the wafer substrate WS1 ranges from about 3
micrometers to about 50 micrometers.
[0029] In some embodiments, the dummy rings 102, the alignment
marks AM, and the protective coatings 104 are simultaneously
formed. That is, the dummy rings 102, the alignment marks AM, and
the protective coatings 104 are made of the same material. For
example, a material of the dummy rings 102, the alignment marks AM,
and the protective coatings 104 includes polyimide, epoxy resin,
acrylic resin, phenol resin, benzocyclobutene (BCB),
polybenzooxazole (PBO), or any other suitable polymer-based
dielectric materials. However, the disclosure is not limited
thereto. In some alternative embodiments, the dummy rings 102, the
alignment marks AM, and the protective coatings 104 may be formed
separately by different materials. In some embodiments, the dummy
rings 102, the alignment marks AM, and the protective coatings 104
may be formed by a three-dimensional printing process.
Alternatively, the dummy rings 102, the alignment marks AM, and the
protective coatings 104 may be formed by a deposition process, such
as chemical vapor deposition (CVD), plasma-enhanced chemical vapor
deposition (PECVD), or the like.
[0030] Referring to FIG. 1B and FIG. 1C, the wafer substrate WS1
illustrated in FIG. 1B is singulated to form a plurality of dummy
dies 100. In some embodiments, the dicing process or the
singulation process typically involves dicing with a rotating blade
or a laser beam. In other words, the dicing or singulation process
is, for example, a laser cutting process, a mechanical cutting
process, or other suitable processes. As illustrated in FIG. 1C,
each dummy die 100 includes a semiconductor substrate 106, a dummy
ring 102, an alignment mark AM, and a protective coating 104. The
dummy ring 102 and the alignment mark AM are embedded in the
semiconductor substrate 106, and the protective coating 104 is
disposed on a surface of the semiconductor substrate 106. In some
embodiments, the trench TR and the dummy ring 102 divide the
semiconductor substrate 106 into an inner portion 106a and an outer
portion 106b. As illustrated in FIG. 1C, the inner portion 106a and
the outer portion 106b are connected to each other by the bottom
portion of the semiconductor substrate 106. In some embodiments,
the dummy die 100 may be free of active components and passive
components. Alternatively, the dummy die 100 may include active
components and passive components with functions of these
components being disabled.
[0031] Referring to FIG. 1D, a wafer substrate WS2 is provided. In
some embodiments, the wafer substrate WS2 includes a semiconductor
substrate 202 and a plurality of through semiconductor vias (TSV)
204 embedded in the semiconductor substrate 202. In some
embodiments, the semiconductor substrate 202 may be made of a
suitable elemental semiconductor, such as crystalline silicon,
diamond, or germanium; a suitable compound semiconductor, such as
gallium arsenide, silicon carbide, indium arsenide, or indium
phosphide; or a suitable alloy semiconductor, such as silicon
germanium carbide, gallium arsenic phosphide, or gallium indium
phosphide. In some embodiments, the semiconductor substrate 202 has
a plurality of semiconductor devices (e.g., transistors,
capacitors, photodiodes, combinations thereof, or the like) and a
plurality of optical devices (e.g. waveguides, filters,
photodiodes, light-emitting diodes, combinations thereof, or the
like) formed therein. In some embodiments, a depth of the TSVs 204
is smaller than a thickness of the semiconductor substrate 202.
That is, at this stage, the TSVs 204 do not penetrate through the
semiconductor substrate 202.
[0032] In some embodiments, the wafer substrate WS2 has a first
surface T1 and a second surface T2 opposite to the first surface
T1. As illustrated in FIG. 1D, a plurality of grooves GR is formed
on the first surface T1 of the wafer substrate WS2. In some
embodiments, the grooves GR may be V-grooves (shown in FIG. 3A)
formed by etching, laser cutting, or other suitable processes. It
should be noted that the number of the grooves illustrated in FIG.
1D is merely for illustrative purpose, and the disclosure is not
limited thereto. In some alternative embodiments, fewer or more
grooves GR may be formed in the wafer substrate WS2 depending on
the layout design.
[0033] As illustrated in FIG. 1D, a plurality of connectors 300 and
a dam structure 400 are formed on the first surface T1 of the
semiconductor wafer WS2. In some embodiments, each of the
connectors 300 includes a conductive pillar 302 and a conductive
bump 304 disposed on the conductive pillar 302. As illustrated in
FIG. 1D, the conductive pillars 302 are disposed corresponding to
the TSVs 204. In some embodiments, the connectors 300 are referred
to as "micro bumps." In some embodiments, the connectors 300 may be
formed by the following steps. First, a seed layer (not shown) is
blanketly formed over the wafer substrate WS2. The seed layer may
be formed through, for example, a sputtering process, a physical
vapor deposition (PVD) process, or the like. In some embodiments,
the seed layer may include, for example, copper, titanium-copper
alloy, or other suitable choice of materials. Subsequently, a
photoresist pattern layer (not shown) is formed over the seed
layer. The photoresist pattern layer has openings exposing portions
of the seed layer. In some embodiments, locations of the exposed
portions of the seed layer correspond to locations of the TSVs 204
of the wafer substrate WS2. Thereafter, a conductive material (not
shown) and a solder material (not shown) are sequentially deposited
onto the exposed seed layer. That is, the conductive material and
the solder material are located within the openings of the
photoresist pattern layer. In some embodiments, the conductive
material and the solder material may be formed by a plating
process. The plating process is, for example, electro-plating,
electroless-plating, immersion plating, or the like. In some
embodiments, the conductive material includes, for example, copper,
copper alloys, or the like. After the conductive material and the
solder material are formed, the photoresist pattern layer is
removed. Upon removal of the photoresist pattern layer, portions of
the seed layer, which are not covered by the conductive material
and the solder material, are exposed. In some embodiments, the
photoresist pattern layer may be removed/stripped through, for
example, etching, ashing, or other suitable removal processes.
Then, the seed layer that is not covered by the conductive material
and the solder material is removed. The exposed portions of the
seed layer may be removed through an etching process. In some
embodiments, the remaining seed layer and the conductive material
constitute the conductive pillars 302. Thereafter, a reflow process
is performed on the solder material to transform the solder
material into the conductive bumps 304.
[0034] In some embodiments, the dam structure 400 is formed to
surround the grooves GR. On the other hand, the dam structure 400
is surrounded by the connectors 300. In some embodiments, the dam
structure 400 includes a conductive ring 402 and a conductive
protrusion 404 disposed on the conductive ring 402. In some
embodiments, the connectors 300 and the dam structure 400 may be
formed simultaneously. For example, the conductive pillars 302 of
the connectors 300 and the conductive ring 402 of the dam structure
400 may be formed by the same process step. On the other hand, the
conductive bumps 304 of the connectors 300 and the conductive
protrusion 404 of the dam structure 400 may also be formed by the
same process step. In some embodiments, the dam structure 400 may
exhibit a ring-shape enclosing the grooves GR from the top view. In
some embodiments, the dimension (i.e. thickness and width), the
position, and the shape of the dam structure 400 may be designed to
correspond to the trench TR of the dummy die 100 in FIG. 1C. For
example, the height of the dam structure 400 may range from about 5
micrometers to about 50 micrometers.
[0035] Referring to FIG. 1E, an adhesive layer 500 is formed on the
first surface T1 of the wafer substrate WS2. In some embodiments, a
material of the adhesive layer 500 includes a thermally curable
polymer. In some embodiments, the adhesive layer 500 is formed on
the first surface T1 of the wafer substrate WS2 through a
dispensing process, a screen printing process, an inkjet printing
process, a three-dimensional printing process, or the like. In some
embodiments, the adhesive layer 500 is located between the
connectors 300 and the dam structure 400. In some embodiments, the
adhesive layer 500 exhibits a ring-shape from the top view. That
is, the adhesive layer 500 surrounds dam structure 400. In some
embodiments, the adhesive layer 500 may keep a lateral distance
from the dam structure 400. However, the disclosure is not limited
thereto. In some alternative embodiments, the adhesive layer 500
may be adhered to the dam structure 400. As illustrated in FIG. 1E,
a thickness of the adhesive layer 500 is smaller than the height of
the dam structure 400. In some embodiments, the distribution of the
adhesive layer 500 may correspond to the outer portion 106b of the
semiconductor substrate 106 of the dummy die 100 in FIG. 1C.
[0036] Referring to FIG. 1F, the dummy die 100 illustrated in FIG.
1C and dies 600 are placed over the first surface T1 of the wafer
substrate WS2. In some embodiments, the dummy die 100 and the dies
600 may be placed through a pick-and-place process. In some
embodiments, the dummy die 100 and the dies 600 are disposed side
by side over the first surface T1 of the wafer substrate WS2. For
example, the dummy die 100 may be placed between two adjacent dies
600. As illustrated in FIG. 1F, the dummy die 100 is placed to
cover the grooves GR, the dam structure 400, and the adhesive layer
500 while the dies 600 are placed to cover the connectors 300.
[0037] In some embodiments, the dummy die 100 may be placed over
the wafer substrate WS2 through the following steps. First, the
trench TR of the dummy die 100 and the dam structure 400 are
aligned. In some embodiments, the alignment between the trench TR
of the dummy die 100 and the dam structure 400 may be achieved by
the aid of the alignment mark AM. Thereafter, the dummy die 100 is
being moved downward to fit the dam structure 400 into the trench
TR of the dummy die 100. That is, the dam structure 400 is inserted
into the trench TR. Meanwhile, the outer portion 106b of the
semiconductor substrate 106 of the dummy die 100 is attached to the
adhesive layer 500. In other words, the adhesive layer 500 is
sandwiched between the wafer substrate WS2 and the dummy die 100.
By fitting the dam structure 400 into the trench TR and by
attaching the outer portion 106b of the semiconductor substrate 106
of the dummy die 100 to the adhesive layer 500, the dummy die 100
may be temporarily fixed in position. Subsequently, the dummy die
100 is pressed against the adhesive layer 500 to ensure the outer
portion 106b of the semiconductor substrate 106 of the dummy die
100 is securely fixed onto the adhesive layer 500. Thereafter, the
adhesive layer 500 is cured to strengthen the adhesion between the
wafer substrate WS2 and the outer portion 106b of the semiconductor
substrate 106 of the dummy die 100. As illustrated in FIG. 1F, the
dam structure 400 is spaced apart from the dummy ring 102 of the
dummy die 100. However, the disclosure is not limited thereto. In
some alternative embodiments, the dam structure 400 is directly in
contact with the dummy ring 102 of the dummy die 100.
[0038] As illustrated in FIG. 1F, the protective coating 104 of the
dummy die 100 covers the grooves GR of the wafer substrate WS2. In
some embodiments, the protective coating 104 serves the purpose of
protecting the grooves GR from being damaged. In some embodiments,
the protective coating 104 is in direct contact with the first
surface T1 of the wafer substrate WS2. However, the disclosure is
not limited thereto. In some alternative embodiments, the
protective coating 104 may be spaced apart from the first surface
T1 of the wafer substrate WS2.
[0039] In some embodiments, the die 600 includes a semiconductor
substrate 602 and a plurality of conductive pads 604 formed on the
semiconductor substrate 602. In some embodiments, the semiconductor
substrate 602 may be made of a suitable elemental semiconductor,
such as crystalline silicon, diamond, or germanium; a suitable
compound semiconductor, such as gallium arsenide, silicon carbide,
indium arsenide, or indium phosphide; or a suitable alloy
semiconductor, such as silicon germanium carbide, gallium arsenic
phosphide, or gallium indium phosphide. In some embodiments, the
semiconductor substrate 602 may include active components (e.g.,
transistors or the like) and optionally passive components (e.g.,
resistors, capacitors, inductors or the like) formed therein. The
conductive pads 604 are distributed over the semiconductor
substrate 602. In some embodiments, the conductive pads 604
includes, for example, aluminum pads, copper pads, or other
suitable metal pads. As illustrated in FIG. 1F, the dies 600 are
placed such that the conductive pads 604 of dies 600 are attached
to the connectors 300. For example, each of conductive pads 604 is
directly in contact with the corresponding conductive bump 304.
After the dies 600 are placed on the connectors 300, a reflow
process may be performed to fix the conductive pads 604 onto the
conductive bumps 304. As such, electrical connection between the
dies 600 and the wafer substrate WS2 may be realized through the
connectors 300. That is, the connectors 300 are disposed between
the wafer substrate WS2 and the dies 600, and the dies 600 are
electrically connected to the wafer substrate WS2 through the
connectors 300.
[0040] In some embodiments, the attachment of the dummy die 100 is
performed prior to the bonding of the dies 600. However, the
disclosure is not limited thereto. In some alternative embodiments,
the bonding of the dies 600 is performed prior to the attachment of
the dummy die 100.
[0041] Referring to FIG. 1G, an underfill layer UF1 is formed
between the dies 600 and the wafer substrate WS2. For example, the
underfill layer UF1 may be formed to wrap around the conductive
pads 604 of the dies 600 and the connectors 300 to protective these
elements. In some embodiments, the underfill layer UF1 not only
protects the conductive pads 604 and the connectors 300 from
fatigue but also enhances bonding reliability between the dies 600
and the wafer substrate WS2. In some embodiments, the underfill
layer UF1 may be optional.
[0042] Referring to FIG. 1H, an encapsulation material 700a is
formed on the wafer substrate WS2 to encapsulate the dummy die 100,
the dies 600, the underfill layer UF1, and the adhesive layer 500.
In some embodiments, the encapsulation material 700a is a molding
compound, a molding underfill, a resin (such as epoxy), or the
like. In some embodiments, the encapsulation material 700a includes
fillers. The fillers may be particles made of silica, aluminum
dioxide, or the like. The encapsulation material 700a may be formed
by a molding process, such as a compression molding process. In
some embodiments, the dummy die 100 and the dies 600 are completely
encapsulated by the encapsulation material 700a. For example, a top
surface T.sub.700a of the encapsulation material 700a is located at
a level height higher than a top surface T.sub.100 of the dummy die
100 and top surfaces T.sub.600 of the dies 600. In other words, the
dummy die 100 and the dies 600 are not revealed and are well
protected by the encapsulation material 700a. As illustrated in
FIG. 1F, the grooves GR of the wafer substrate WS2 are sealed by
the dummy die 100, the dam structure 400, and the adhesive layer
500, so the encapsulation material 700a does not fill into the
grooves GR.
[0043] Referring to FIG. 1H and FIG. 1I, a portion of the
encapsulation material 700a is removed until the dummy die 100 and
the dies 600 are reveled. After the dummy die 100 and the dies 600
are revealed, a thickness of the dummy die 100, thicknesses of the
dies 600, and a thickness of the encapsulation material 700a are
further reduced until the dummy ring 102 filled in the trench TR of
the dummy die 100 is revealed. In some embodiments, portions of the
encapsulation material 700a, portions of the dummy die 100, and
portions of the dies 600 may be removed through a grinding process,
such as a mechanical grinding process, a chemical mechanical
polishing (CMP) process, or another suitable mechanism. After the
encapsulation material 700a is grinded, an encapsulant 700 is
formed over the wafer substrate WS2 to laterally encapsulate the
dummy die 100 and the dies 600. After the grinding process, a top
surface T.sub.102 of the dummy ring 102, a top surface T.sub.700 of
the encapsulant 700, the top surface T.sub.100 of the dummy die
100, and the top surface T.sub.600 of the dies 600 are
substantially coplanar. As illustrated in FIG. 1I, after the
grinding process, the trench TR penetrates through the dummy die
100. At this stage, the inner portion 106a and the outer portion
106b of the semiconductor substrate 106 of the dummy die 100 are
separated from each other. For example, the dummy ring 102 is
sandwiched between the inner portion 106a and the outer portion
106b of the semiconductor substrate 106 of the dummy die 100 to
separate the inner portion 106a and the outer portion 106b.
[0044] Referring to FIG. 1I and FIG. 1J, a planarization process is
performed on the second surface T2 of the wafer substrate WS2. In
some embodiments, the planarization process includes a mechanical
grinding process and/or a CMP process. In some embodiments, the
semiconductor substrate 202 is planarized until the TSVs 204 are
revealed. For example, after the planarization process, the TSVs
204 penetrate through the semiconductor substrate 202. The TSVs 204
allow electrical communication between the front side and the back
side of the wafer substrate WS2. In some embodiments, after the
TSVs 204 are revealed, the wafer substrate WS2 may be further
grinded to reduce the overall thickness thereof.
[0045] Referring to FIG. 1K, a plurality of conductive terminals
800 and a reinforcement structure 900 are formed on the second
surface T2 of the wafer substrate WS2. In some embodiments, each
conductive terminal 800 includes a conductive pillar 802 and a
conductive bump 804 disposed on the conductive pillar 802. In some
embodiments, the conductive terminals 800 are referred to as
"controlled collapse chip connection (C4) bumps." In some
embodiments, at least some of the conductive terminals 800 are
disposed corresponding to the TSVs 204. In some embodiments, the
conductive terminals 800 may be formed by the following steps.
First, a seed layer (not shown) is blanketly formed over the second
surface T2 of the wafer substrate WS2. The seed layer may be formed
through, for example, a sputtering process, a PVD process, or the
like. In some embodiments, the seed layer may include, for example,
copper, titanium-copper alloy, or other suitable choice of
materials. Subsequently, a photoresist pattern layer (not shown) is
formed over the seed layer. The photoresist pattern layer has
openings exposing portions of the seed layer. Thereafter, a
conductive material (not shown) and a solder material (not shown)
are sequentially deposited onto the exposed seed layer. That is,
the conductive material and the solder material are located within
the openings of the photoresist pattern layer. In some embodiments,
the conductive material and the solder material may be formed by a
plating process. The plating process is, for example,
electro-plating, electroless-plating, immersion plating, or the
like. In some embodiments, the conductive material includes, for
example, copper, copper alloys, or the like. After the conductive
material and the solder material are formed, the photoresist
pattern layer is removed. Upon removal of the photoresist pattern
layer, portions of the seed layer, which are not covered by the
conductive material and the solder material, are exposed. In some
embodiments, the photoresist pattern layer may be removed/stripped
through, for example, etching, ashing, or other suitable removal
processes. Then, the seed layer that is not covered by the
conductive material and the solder material is removed. The exposed
portions of the seed layer may be removed through an etching
process. In some embodiments, the remaining seed layer and the
conductive material constitute the conductive pillars 802.
Thereafter, a reflow process is performed on the solder material to
transform the solder material into the conductive bumps 804. In
some embodiments, the conductive terminals 800 are arranged in an
array.
[0046] As illustrated in FIG. 1K, a portion of the reinforcement
structure 900 is formed to vertically align with the grooves GR of
the wafer substrate WS2. For example, a portion of the
reinforcement structure 900 is located directly underneath the
grooves GR. That is, a projection of the grooves GR along a
direction D1 perpendicular to the first surface T1 of the wafer
substrate WS2 is overlapped with a portion of the reinforcement
structure 900. As illustrated in FIG. 1K, the reinforcement
structure 900 is surrounded by the conductive terminals 800. In
some embodiments, the reinforcement structure 900 includes a base
pattern 902 and a protrusion 904 disposed on the base pattern 902.
In some embodiments, the conductive terminals 800 and the
reinforcement structure 900 may be formed simultaneously. For
example, the conductive pillars 802 of the conductive terminals 800
and the base pattern 902 of the reinforcement structure 900 may be
formed by the same process step. On the other hand, the conductive
bumps 804 of the conductive terminals 800 and the protrusion 904 of
the reinforcement structure 900 may also be formed by the same
process step. That is, the conductive terminals 800 and the
reinforcement structure 900 are made of the same material. In some
embodiments, a material of the conductive pillars 802 of the
conductive terminals 800 and a material of the base pattern 902 of
the reinforcement structure 900 are the same, and a material of the
conductive bumps 804 of the conductive terminals 800 and a material
of the protrusion 904 of the reinforcement structure 900 are the
same. For example, both of the conductive pillars 802 and the base
pattern 902 are made of a conductive material. However, the
disclosure is not limited thereto. In some alternative embodiments,
the conductive terminals 800 and the reinforcement structure 900
may be formed in separate steps. For example, the conductive
terminals 800 may be formed by a conductive material while the
reinforcement structure 900 may be made of a dielectric material
(such as polyimide, epoxy resin, acrylic resin, phenol resin, BCB,
PBO, or the like).
[0047] In some embodiments, a size of the reinforcement structure
900 is larger than a size of each conductive terminal 800. For
example, each conductive terminal 800 has a diameter ranging from
about 50 micrometers to about 200 micrometers. On the other hand,
the reinforcement structure 900 has a length or a width ranging
from about 1 millimeter to about 200 millimeters. As illustrated in
FIG. 1K, a height of each conductive terminal 800 is greater than a
height of the reinforcement structure 900. However, the disclosure
is not limited thereto. In some alternative embodiments, the height
of each conductive terminal 800 may be substantially equal to the
height of the reinforcement structure 900. The relative
configuration of the reinforcement structure 900 and the grooves GR
will be discussed in greater detail later in conjunction with FIG.
1O, FIGS. 2A-2B, and FIGS. 3A-3B.
[0048] In some embodiments, a redistribution structure (not shown)
may be formed on the second surface T2 of the wafer substrate WS2.
That is, the redistribution structure may be optionally formed
between the wafer substrate WS2 and the conductive terminals 800
and between the wafer substrate WS2 and the reinforcement structure
900. In some embodiments, the redistribution structure includes a
plurality of dielectric layers (not shown) and a plurality of
redistribution conductive layers (not shown) stacked alternately.
In some embodiments, the redistribution structure electrically
connects the TSVs 204 and the conductive terminals 800 while
redistributing the routing of the electrical path.
[0049] Referring to FIG. 1K and FIG. 1L, a portion of the dummy die
100 is removed. For example, the inner portion 106a of the
semiconductor substrate 106 and the dummy ring 102 are removed. In
some embodiments, the inner portion 106a is removed through the
following steps. First, a cutting process is performed on the
exposed dummy ring 102. In some embodiments, the cutting process
may include a laser drilling process, a mechanical drilling
process, a combination thereof, or any other suitable dicing
processes. In some embodiments, the dummy ring 102 is completely
removed during the cutting process. However, the disclosure is not
limited thereto. In some alternative embodiments, the dummy ring
102 is partially removed during the cutting process. For example,
the dummy ring 102 may be cut through such that a portion of the
dummy ring 102 remains on the sidewalls of the outer portion 106b
of the semiconductor substrate 106 while another portion of the
dummy ring 102 remains on the sidewalls of the inner portion 106a
of the semiconductor substrate 106. After the cutting process, the
inner portion 106a and the outer portion 106b are disconnected from
each other. Subsequently, the inner portion 106a is removed. On the
other hand, the remaining outer portion 106b forms a semiconductor
frame SF having an opening OP. In some embodiments, the
semiconductor frame SF is electrically floating. As illustrated in
FIG. 1L, the opening OP of the semiconductor frame SF exposes the
dam structure 400 and the grooves GR.
[0050] Referring to FIG. 1L and FIG. 1M, a singulation process is
performed on the structure illustrated in FIG. 1L to form a
plurality of singulated structure SS. That is, the semiconductor
frame SF, the wafer substrate WS2, and the reinforcement structure
900 are singulated. In some embodiments, the dicing process or the
singulation process typically involves dicing with a rotating blade
or a laser beam. In other words, the dicing or singulation process
is, for example, a laser cutting process, a mechanical cutting
process, or other suitable processes. In some embodiments, a
thickness of the semiconductor wafer WS2 is not uniform. For
example, the regions being occupied by the grooves GR have smaller
thicknesses as compared to the regions not being occupied by the
grooves GR. Therefore, during singulation of the wafer substrate
WS2, stress may be generated at the regions being occupied by the
grooves GR, thereby causing crack in the wafer substrate WS2.
However, as mentioned above, since the reinforcement structure 900
is aligned with the grooves GR, the deficiencies in thicknesses of
the regions occupied by the grooves GR may be compensated by the
reinforcement structure 900. As such, with the presence of the
reinforcement structure 900, the crack issue in the wafer substrate
WS2 during the singulation process may be alleviated, thereby
enhancing the yield and reliability of the subsequently formed
packages.
[0051] In some embodiments, during the singulation process, the
wafer substrate WS2 is divided into a plurality of dies 200. As
illustrated in FIG. 1M, each die 200 includes the semiconductor
substrate 202 and the TSVs 204 embedded in the semiconductor
substrate 202. The die 200 has a first surface T1 and a second
surface T2 opposite to the first surface T1. In some embodiments,
the die 200 includes grooves GR on the first surface T1. As
illustrated in FIG. 1M, the die 600 and the semiconductor frame SF
are disposed side by side over the first surface T1 of the die 200.
In addition, the encapsulant 700 is disposed over the first surface
T1 of the die 200 to laterally encapsulate the die 600. Moreover,
the dam structure 400 is also disposed on the first surface T1 of
the die 200. In some embodiments, the semiconductor frame SF has a
notch N exposing the dam structure 400 and the grooves GR. In some
embodiments, the dam structure 400 is disposed along edges of the
notch N (shown in FIG. 2A). In some embodiments, the conductive
terminals 800 and the reinforcement structure 900 are disposed on
the second surface T2 of the die 200. As illustrated in FIG. 1M, at
this stage, the protrusion 904 of the reinforcement structure 900
has a substantially straight sidewall along the cutting line. That
is, one of the sidewalls of the protrusion 904 of the reinforcement
structure 900 is aligned with a sidewall of the die 200.
[0052] Referring to FIG. 1N, the singulated structure SS
illustrated in FIG. 1M is mounted onto a circuit substrate 1000. In
some embodiments, the singulated structure SS is mounted such that
the circuit substrate 1000 is over the second surface T2 of the die
200. In some embodiments, the circuit substrate 1000 includes a
printed circuit board (PCB) or the like. In some embodiments, after
the singulated structure SS is attached to the circuit substrate
1000, a reflow process is performed on the conductive terminals 800
and the reinforcement structure 900 to reshape the reinforcement
structure 900. In other words, during the reflow process, rounding
of the protrusion 904 of the reinforcement structure 900 would
occur. After the reflow process, the sidewalls of the protrusion
904 are no longer aligned with the sidewalls of the die 200. In
some embodiments, the conductive terminals 800 of the singulated
structure SS are electrically connected to the wiring of the
circuit substrate 1000. For example, the conductive terminals 800
of the singulated structure SS are directly in contact with the
circuit substrate 1000 to render electrical connection. On the
other hand, the reinforcement structure 900 is electrically
insulated from the circuit substrate 1000. As mentioned above, the
height of each conductive terminal 800 is greater than the height
of the reinforcement structure 900. As such, when the conductive
terminals 800 abut the circuit substrate 1000, the reinforcement
structure 900 is spaced apart from the circuit substrate 1000. As a
result, the reinforcement structure 900 is electrically insulated
from the circuit substrate 1000. However, the disclosure is not
limited thereto. In some alternative embodiments, the height of
each conductive terminal 800 is substantially equal to the height
of the reinforcement structure 900. As such, both of the conductive
terminals 800 and the reinforcement structure 900 would be directly
in contact with the circuit substrate 1000. Nevertheless, under
this scenario, the reinforcement structure 900 would not be in
direct contact with the wiring of the circuit substrate 1000. As a
result, the reinforcement structure 900 is still electrically
insulated from the circuit substrate 1000. In some embodiments, the
reinforcement structure 900 is electrically floating.
[0053] In some embodiments, an underfill UF2 may be optionally
formed on the circuit substrate 1000 to laterally encapsulate the
die 200, the conductive terminals 800, and the reinforcement
structure 900. In some embodiments, the underfill UF2 may be
utilized to protect these elements.
[0054] As illustrated in FIG. 1N, a plurality of conductive
terminals 1100 and a plurality of devices 1200 are formed on the
circuit substrate 1000 opposite to the singulated structure SS. In
some embodiments, the conductive terminals 1100 are solder balls,
ball grid array (BGA) balls, or the like. In some embodiments, the
conductive terminals 1100 are made of a conductive material with
low resistivity, such as Sn, Pb, Ag, Cu, Ni, Bi, or an alloy
thereof. In some embodiments, the devices 1200 may include passive
components, such as resistors, capacitors, inductors, or the
like.
[0055] Referring to FIG. 1O, optical fibers FB are placed in the
grooves GR to form the package 10. In some embodiments, the optical
fibers FB are laterally inserted into the grooves GR. The optical
fibers FB extend laterally along the grooves GR and are optically
coupled to the optical devices of the die 200. In some embodiments,
the package structure 10 illustrated in FIG. 1O may be referred to
as a "CoWoS (Chip on Wafer on Substrate) package." As illustrated
in FIG. 1O, the die 200 is sandwiched or interposed between the die
600 and the circuit substrate 1000. Therefore, in some embodiments,
the die 200 may be referred to as an "interposer."
[0056] The relative configuration of the reinforcement structure
900 and the grooves GR will be discussed below in conjunction with
FIG. 1O, FIGS. 2A-2B, and FIGS. 3A-3B.
[0057] FIG. 2A is a top view of the package 10 in FIG. 1O. FIG. 2B
is a bottom view of the package 10 in FIG. 1O. FIG. 3A is a
schematic cross-sectional view of the package 10 in FIG. 2A taken
along line II-II'. FIG. 3B is a schematic cross-sectional view of
the package 10 in FIG. 2A taken along line III-III'. It should be
noted that FIG. 1O is a schematic cross-sectional view of the
package 10 in FIG. 2A taken along line I-I'. Moreover, for
simplicity, the conductive terminals 1100 and the devices 1200 are
omitted in FIG. 2B. Referring to FIG. 1O, FIGS. 2A-2B, and FIGS.
3A-3B, the reinforcement structure 900 includes a trunk portion
900a and a plurality of branch portions 900b extending out from the
trunk portion 900a. In some embodiments, the dotted line denoting
the trunk portion 900a and the branch portions 900b in FIGS. 2A-2B
may correspond to the shape or the contour of the base pattern 902
of the reinforcement structure 900. In some embodiments, the branch
portions 900b are connected to the trunk portion 900a. For example,
as shown in FIGS. 2A-2B, the reinforcement structure 900 exhibits a
comb-shape from the top view. As illustrated in FIGS. 2A-2B, the
trunk portion 900a extends along a direction D2 while the branch
portions 900b extend along a direction D3 perpendicular to the
direction D2. In some embodiments, the trunk portion 900a of the
reinforcement structure 900 is disposed along an edge of the die
200.
[0058] As illustrated in FIG. 1O, FIGS. 2A-2B, and FIGS. 3A-3B, the
branch portions 900b of the reinforcement structure 900 are aligned
with the grooves GR from the top view. For example, the branch
portions 900b of the reinforcement structure 900 are located
directly underneath the grooves GR. That is, projections of the
grooves GR along the direction D1 are overlapped with the branch
portions 900b of the reinforcement structure 900. On the other
hand, the trunk portion 900a may intersect with the grooves GR from
the top view. That is, a portion of the trunk portion 900a of the
reinforcement structure 900 is aligned with a portion of each
groove GR from the top view. For example, a portion of the trunk
portion 900a of the reinforcement structure 900 is located directly
underneath the grooves GR. That is, projections of a portion of
each groove GR along the direction D1 are overlapped with a portion
of the trunk portion 900a of the reinforcement structure 900.
Although FIG. 2A illustrated that a width of each branch portion
900b (i.e. a width of the base pattern 902 of the branch portion
900b) along the direction D2 is greater than a width of each
grooves GR along the direction D2, the disclosure is not limited
thereto. In some alternative embodiments, the width of each branch
portion 900b (i.e. the width of the base pattern 902 of the branch
portion 900b) along the direction D2 may be equal to a width of
each grooves GR along the direction D2. That is, projections of the
grooves GR along the direction D1 would match with the branch
portions 900b.
[0059] In some embodiments, the branch portions 900b may be
collectively referred to as a first portion of the reinforcement
structure 900 while the trunk portion 900a may be referred to as a
second portion of the reinforcement structure 900.
[0060] As illustrated in FIG. 2B, the conductive terminals 800 are
arranged in an array. The trunk portion 900a is located adjacent to
the array of the conductive terminals 800. In some embodiments, the
branch portions 900b are aligned with some rows of the conductive
terminals 800. On the other hand, the branch portions 900b are
sandwiched between portions of other rows of the conductive
terminals 800.
[0061] As illustrated in FIG. 1O and FIG. 3A, a thickness of the
die 200 is not uniform. For example, the regions being occupied by
the grooves GR have smaller thicknesses as compared to the regions
not being occupied by the grooves GR. Therefore, during singulation
of the wafer substrate WS2 (shown in FIG. 1M), stress may be
generated at the regions being occupied by the grooves GR, thereby
causing crack in the die 200. However, since the branch portions
900b of the reinforcement structure 900 are aligned with the
grooves GR, the deficiencies in thicknesses of the regions occupied
by the grooves GR may be compensated by the branch portions 900b.
Moreover, since the trunk portion 900a is disposed along the
cutting line during the singulation process, the trunk portion 900a
may further enhance the structure rigidity against stress
generated. As such, with the presence of the reinforcement
structure 900, the crack issue in the die 200 derived from the
singulation process may be alleviated, thereby enhancing the yield
and reliability of the package 10.
[0062] FIG. 4A is a top view of a package 20 in accordance with
some alternative embodiments of the disclosure. FIG. 4B is a bottom
view of the package 20 in FIG. 4A. FIG. 5A is a schematic
cross-sectional view of the package 20 in FIG. 4A taken along line
I-I'. FIG. 5B is a schematic cross-sectional view of the package 20
in FIG. 4A taken along line II-II'. FIG. 5C is a schematic
cross-sectional view of the package 20 in FIG. 4A taken along line
III-III'. For simplicity, the conductive terminals 1100 and the
devices 1200 are omitted in FIG. 4B. Referring to FIGS. 4A-4B and
FIGS. 5A-5C, the package 20 in FIGS. 4A-4B and FIGS. 5A-5C is
similar to the package 10 in FIG. 1O, FIGS. 2A-2B, and FIGS. 3A-3B,
so similar elements are denoted by the same reference numeral and
the detailed descriptions thereof are omitted herein. The
difference between the package 10 in FIG. 2A and the package 20 in
FIG. 4A lies in that in package 20, multiple notches N are formed
in the semiconductor frame SF. Each notch N in the package 20 of
FIG. 4A is smaller than the notch N in the package 10 of FIG. 2A.
As illustrated in FIG. 4A, the number of the notches N corresponds
to the number of the grooves GR. That is, each notch N accommodates
one groove GR. Similar to that of the package 10, the reinforcement
structure 900 of package 20 also includes a trunk portion 900a and
a plurality of branch portions 900b extending out from the trunk
portion 900a. As illustrated in FIGS. 4A-4B and FIGS. 5A-5C, the
branch portions 900b of the reinforcement structure 900 are aligned
with the grooves GR from the top view. On the other hand, the trunk
portion 900a may intersect with the grooves GR from the top
view.
[0063] As illustrated in FIG. 5A and FIG. 5B, a thickness of the
die 200 is not uniform. For example, the regions being occupied by
the grooves GR have smaller thicknesses as compared to the regions
not being occupied by the grooves GR. Therefore, during singulation
of the wafer substrate WS2 (shown in FIG. 1M), stress may be
generated at the regions being occupied by the grooves GR, thereby
causing crack in the die 200. However, since the branch portions
900b of the reinforcement structure 900 are aligned with the
grooves GR, the deficiencies in thicknesses of the regions occupied
by the grooves GR may be compensated by the branch portions 900b.
Moreover, the smaller notches N in the package 20 allows less
semiconductor material to be removed during the step shown in FIG.
1L, so the structure rigidity of the semiconductor frame SF may be
sufficiently maintained. As a result, the warpage generated during
the manufacturing process of the package 20 may be sufficiently
suppressed. Furthermore, since the trunk portion 900a is disposed
along the cutting line during the singulation process, the trunk
portion 900a may further enhance the structure rigidity against
stress generated. As such, with the presence of the reinforcement
structure 900, the crack issue in the die 200 derived from the
singulation process may be alleviated, thereby enhancing the yield
and reliability of the package 20.
[0064] FIG. 6A is a top view of a package 30 in accordance with
some alternative embodiments of the disclosure. FIG. 6B is a bottom
view of the package 30 in FIG. 6A. FIG. 7A is a schematic
cross-sectional view of the package 30 in FIG. 6A taken along line
I-I'. FIG. 7B is a schematic cross-sectional view of the package 30
in FIG. 6A taken along line II-II'. FIG. 7C is a schematic
cross-sectional view of the package 30 in FIG. 6A taken along line
III-III'. For simplicity, the conductive terminals 1100 and the
devices 1200 are omitted in FIG. 6B. Referring to FIGS. 6A-6B and
FIGS. 7A-7C, the package 30 in FIGS. 6A-6B and FIGS. 7A-7C is
similar to the package 10 in FIG. 1O, FIGS. 2A-2B, and FIGS. 3A-3B,
so similar elements are denoted by the same reference numeral and
the detailed descriptions thereof are omitted herein. The
difference between the package 10 in FIG. 2A and the package 30 in
FIG. 6A lies in that in package 30, the reinforcement structure 900
further includes an extending portion 900c extends from one end of
the trunk portion 900a to another end of the trunk portion 900a. In
some embodiments, the trunk portion 900a is disposed along one edge
of the die 200. On the other hand, the extending portion 900c is
disposed along the other three edges of the die 200. In other
words, the trunk portion 900a and the extending portion 900c form a
closed loop along four edged of the die 200. As illustrated in
FIGS. 6A-6B and FIGS. 7A-7C, the branch portions 900b of the
reinforcement structure 900 are aligned with the grooves GR from
the top view. On the other hand, the trunk portion 900a may
intersect with the grooves GR from the top view. In some
embodiments, a width of the extending portion 900c ranges from
about 50 micrometers to about 200 micrometers. In some embodiments,
the width of the extending portion 900c is smaller than a width of
the trunk portion 900a and/or a width of the branch portions 900b.
However, the disclosure is not limited thereto. In some alternative
embodiments, the widths of the trunk portion 900a, the branch
portions 900b, and the extending portion 900c may be the same.
[0065] In some embodiments, the branch portions 900b may be
collectively referred to as a first portion of the reinforcement
structure 900 while the trunk portion 900a and the extending
portion 900c may be collectively referred to as a second portion of
the reinforcement structure 900. As illustrated in FIG. 6B, the
trunk portion 900a and the extending portion 900c together surround
the conductive terminals 800. In other words, the second portion of
the reinforcement structure 900 surrounds the conductive terminals
800.
[0066] As illustrated in FIG. 7A and FIG. 7B, a thickness of the
die 200 is not uniform. For example, the regions being occupied by
the grooves GR have smaller thicknesses as compared to the regions
not being occupied by the grooves GR. Therefore, during singulation
of the wafer substrate WS2 (shown in FIG. 1M), stress may be
generated at the regions being occupied by the grooves GR, thereby
causing crack in the die 200. However, since the branch portions
900b of the reinforcement structure 900 are aligned with the
grooves GR, the deficiencies in thicknesses of the regions occupied
by the grooves GR may be compensated by the branch portions 900b.
Moreover, since the trunk portion 900a is disposed along the
cutting line during the singulation process and the extending
portion 900c is disposed along three edges of the die 200, the
trunk portion 900a and the extending portion 900c may further
enhance the structure rigidity against stress generated.
Furthermore, since the trunk portion 900a and the extending portion
900c are disposed along four edges of the die 200, sharp-corner
interface between the die 200 and the underfill UF2 may be
prevented. As a result, the issue of crack in the underfill UF2 may
be sufficiently eliminated. As such, with the presence of the
reinforcement structure 900, the crack issue in the die 200 derived
from the singulation process may be alleviated, thereby enhancing
the yield and reliability of the package 30.
[0067] FIG. 8A is a top view of a package 40 in accordance with
some alternative embodiments of the disclosure. FIG. 8B is a bottom
view of the package 40 in FIG. 8A. FIG. 9A is a schematic
cross-sectional view of the package 40 in FIG. 8A taken along line
I-I'. FIG. 9B is a schematic cross-sectional view of the package 40
in FIG. 8A taken along line II-II'. FIG. 9C is a schematic
cross-sectional view of the package 40 in FIG. 8A taken along line
III-III'. For simplicity, the conductive terminals 1100 and the
devices 1200 are omitted in FIG. 8B. Referring to FIGS. 8A-8B and
FIGS. 9A-9C, the package 40 in FIGS. 8A-8B and FIGS. 9A-9C is
similar to the package 30 in FIGS. 6A-6B and FIGS. 7A-7C, so
similar elements are denoted by the same reference numeral and the
detailed descriptions thereof are omitted herein. The difference
between the package 30 in FIG. 6A and the package 40 in FIG. 8A
lies in that in package 40, multiple notches N are formed in the
semiconductor frame SF. Each notch N in the package 40 of FIG. 8A
is smaller than the notch N in the package 30 of FIG. 6A. As
illustrated in FIG. 8A, the number of the notches N corresponds to
the number of the grooves GR. That is, each notch N accommodates
one groove GR. Similar to that of the package 30, the reinforcement
structure 900 of package 40 also includes a trunk portion 900a, a
plurality of branch portions 900b extending out from the trunk
portion 900a, and an extending portion 900c extending from one end
of the trunk portion 900a to another end of the trunk portion 900a.
As illustrated in FIGS. 8A-8B and FIGS. 9A-9C, the branch portions
900b of the reinforcement structure 900 are aligned with the
grooves GR from the top view. On the other hand, the trunk portion
900a may intersect with the grooves GR from the top view.
[0068] As illustrated in FIG. 9A and FIG. 9B, a thickness of the
die 200 is not uniform. For example, the regions being occupied by
the grooves GR have smaller thicknesses as compared to the regions
not being occupied by the grooves GR. Therefore, during singulation
of the wafer substrate WS2 (shown in FIG. 1M), stress may be
generated at the regions being occupied by the grooves GR, thereby
causing crack in the die 200. However, since the branch portions
900b of the reinforcement structure 900 are aligned with the
grooves GR, the deficiencies in thicknesses of the regions occupied
by the grooves GR may be compensated by the branch portions 900b.
Moreover, the smaller notches N in the package 40 allows less
semiconductor material to be removed during the step shown in FIG.
1L, so the structure rigidity of the semiconductor frame SF may be
sufficiently maintained. As a result, the warpage generated during
the manufacturing process of the package 40 may be sufficiently
suppressed. Furthermore, since the trunk portion 900a is disposed
along the cutting line during the singulation process and the
extending portion 900c is disposed along three edges of the die
200, the trunk portion 900a and the extending portion 900c may
further enhance the structure rigidity against stress generated. As
such, with the presence of the reinforcement structure 900, the
crack issue in the die 200 derived from the singulation process may
be alleviated, thereby enhancing the yield and reliability of the
package 40.
[0069] In accordance with some embodiments of the disclosure, a
package includes a first die, a second die, a semiconductor frame,
and a reinforcement structure. The first die has a first surface
and a second surface opposite to the first surface. The first die
includes grooves on the first surface. The second die and the
semiconductor frame are disposed side by side over the first
surface of the first die. The semiconductor frame has at least one
notch exposing the grooves of the first die. The reinforcement
structure is disposed on the second surface of the first die. The
reinforcement structure includes a first portion aligned with the
grooves.
[0070] In accordance with some alternative embodiments of the
disclosure, a package includes a circuit substrate, an interposer,
a die, a semiconductor frame, a dam structure, conductive
terminals, and a reinforcement structure. The interposer is
disposed on the circuit substrate. The interposer includes grooves
on a surface thereof opposite to the circuit substrate. The die and
the semiconductor frame are disposed side by side over the
interposer opposite to the circuit substrate. The semiconductor
frame has at least one notch exposing the grooves of the
interposer. The dam structure is disposed on the interposer and
surrounded by the semiconductor frame. The conductive terminals are
sandwiched between the circuit substrate and the interposer. The
reinforcement structure is located between the circuit substrate
and the interposer. The reinforcement structure includes a trunk
portion and branch portions extending out from the trunk
portion.
[0071] In accordance with some embodiments of the disclosure, a
manufacturing method of a package includes at least the following
steps. A wafer substrate having a first surface and a second
surface opposite to the first surface is provided. The wafer
substrate includes grooves formed on the first surface. Dies and a
dummy die are placed over the first surface of the wafer substrate.
The dummy die covers the grooves. The dies and the dummy die are
laterally encapsulated by an encapsulant. Conductive terminals and
a reinforcement structure are formed on the second surface of the
wafer substrate. A portion of the reinforcement structure is
aligned with the grooves. A portion of the dummy die is removed to
form a semiconductor frame having at least one opening exposing the
grooves. The semiconductor frame, the wafer substrate, and the
reinforcement structure are singulated to form singulated
structures.
[0072] The foregoing outlines features of several embodiments so
that those skilled in the art may better understand the aspects of
the present disclosure. Those skilled in the art should appreciate
that they may readily use the present disclosure as a basis for
designing or modifying other processes and structures for carrying
out the same purposes and/or achieving the same advantages of the
embodiments introduced herein. Those skilled in the art should also
realize that such equivalent constructions do not depart from the
spirit and scope of the present disclosure, and that they may make
various changes, substitutions, and alterations herein without
departing from the spirit and scope of the present disclosure.
* * * * *