U.S. patent application number 16/710630 was filed with the patent office on 2021-06-17 for semiconductor device module and method of assembly.
This patent application is currently assigned to Littelfuse, Inc.. The applicant listed for this patent is Littelfuse, Inc.. Invention is credited to Elmar Wisotzki.
Application Number | 20210183841 16/710630 |
Document ID | / |
Family ID | 1000005623323 |
Filed Date | 2021-06-17 |
United States Patent
Application |
20210183841 |
Kind Code |
A1 |
Wisotzki; Elmar |
June 17, 2021 |
SEMICONDUCTOR DEVICE MODULE AND METHOD OF ASSEMBLY
Abstract
A semiconductor device module. The semiconductor device module
may include a first substrate; and a semiconductor die assembly,
disposed on the first substrate. The semiconductor die assembly may
include a first semiconductor die, bonded to the first substrate; a
second semiconductor die, disposed over the first semiconductor
die; and an electrical connector, disposed between the first
semiconductor die and the second semiconductor die, wherein the
semiconductor die assembly comprises an insulated gate bipolar
transistor (IGBT) die and a freewheeling diode die.
Inventors: |
Wisotzki; Elmar; (Darmstadt,
DE) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Littelfuse, Inc. |
Chicago |
IL |
US |
|
|
Assignee: |
Littelfuse, Inc.
Chicago
IL
|
Family ID: |
1000005623323 |
Appl. No.: |
16/710630 |
Filed: |
December 11, 2019 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 23/16 20130101;
H01L 29/7393 20130101; H01L 25/18 20130101; H01L 25/50 20130101;
H01L 29/861 20130101; H01L 23/49562 20130101 |
International
Class: |
H01L 25/18 20060101
H01L025/18; H01L 29/739 20060101 H01L029/739; H01L 29/861 20060101
H01L029/861; H01L 23/16 20060101 H01L023/16; H01L 25/00 20060101
H01L025/00; H01L 23/495 20060101 H01L023/495 |
Claims
1. A semiconductor device module, comprising: a first substrate;
and a semiconductor die assembly, disposed on the first substrate,
the semiconductor die assembly comprising: a first semiconductor
die, bonded to the first substrate; a second semiconductor die,
disposed over the first semiconductor die; and an electrical
connector, disposed between the first semiconductor die and the
second semiconductor die, wherein the semiconductor die assembly
comprises an insulated gate bipolar transistor (IGBT) die and a
freewheeling diode die.
2. The semiconductor device module of claim 1, wherein the IGBT die
is directly bonded to the first substrate.
3. The semiconductor device module of claim 2, wherein the IGBT die
comprises a first area and is disposed over the first substrate in
a first region, and the freewheeling diode die comprises a second
area, less than the first area, and is disposed in the first
region.
4. The semiconductor device module of claim 1, wherein the
freewheeling diode die is electrically coupled to the IGBT die as
an inverse diode.
5. The semiconductor device module of claim 1, further comprising:
a spacer, disposed over the semiconductor die assembly; and a
second substrate, bonded to the spacer, wherein the spacer is
disposed between the semiconductor die assembly and the second
substrate.
6. The semiconductor device module of claim 1, wherein the
semiconductor die assembly is a first semiconductor die assembly,
the semiconductor device module further comprising; a second
semiconductor die assembly, disposed on the first substrate, and
comprising: a third semiconductor die, bonded to the first
substrate; a fourth semiconductor die, disposed over the third
semiconductor die; and an electrical connector, disposed between
the third semiconductor die and the fourth semiconductor die,
wherein the second semiconductor die assembly comprises an
insulated gate bipolar transistor (IGBT) die and a freewheeling
diode die.
7. The semiconductor device module of claim 6, wherein the first
substrate is an insulator substrate, wherein the first
semiconductor die assembly is disposed on the insulator substrate
in a first region, wherein the second semiconductor die assembly is
disposed on the first substrate in a second region, not overlapping
the first region, and wherein the first semiconductor die assembly
is arranged in a coplanar fashion with the second semiconductor die
assembly.
8. The semiconductor device module of claim 6, the first
semiconductor die assembly further comprising: a spacer, disposed
over the first semiconductor die assembly and the second
semiconductor die assembly; and a second substrate, bonded to the
semiconductor die assembly, wherein the spacer is disposed between
the semiconductor die assembly and the second substrate.
9. The semiconductor device module of claim 1, further comprising
at least one additional semiconductor die assembly, disposed on the
substrate, wherein the semiconductor die assembly comprises a
stacked configuration of the IGBT die and the freewheeling diode
die, wherein each additional semiconductor die assembly of the at
least one additional semiconductor die assembly comprises a stacked
configuration of an additional IGBT die and an additional
freewheeling diode die, wherein the first substrate is configured
to accommodate the semiconductor die assembly in a stacked
configuration within a first substrate area, and is configured to
accommodate the at least one additional semiconductor die assembly
within a second substrate area. wherein in a non-stacked
configuration, a given IGBT die and given freewheeling diode die of
a given semiconductor die assembly are each bonded directly to the
first substrate.
10. The semiconductor device module of claim 1, the semiconductor
die assembly comprising a stacked semiconductor die assembly,
arranged as a stacked configuration of the IGBT die and the
freewheeling diode die, wherein the stacked semiconductor die
assembly is configured to reduce a temperature swing during current
pulsing in comparison to a non-stacked configuration of a
semiconductor die assembly, wherein a given IGBT die and given
freewheeling diode die are each bonded directly to the first
substrate.
11. A method of forming a semiconductor device module, comprising:
providing a first substrate; and affixing a semiconductor die
assembly to the first substrate, the semiconductor die assembly
comprising: a first semiconductor die, bonded to the first
substrate; a second semiconductor die, disposed over the first
semiconductor die; and an electrical connector, disposed between
the first semiconductor die and the second semiconductor die,
wherein the first semiconductor die assembly comprises an insulated
gate bipolar transistor (IGBT) die and a freewheeling diode
die.
12. The method of claim 11, comprising bonding the IGBT die
directly bonded to the first substrate.
13. The method of claim 12, wherein the IGBT die comprises a first
area and is disposed over the first substrate in a first region,
and the freewheeling diode die comprises a second area, less than
the first area, and is disposed in the first region.
14. The method of claim 11, comprising electrically coupling the
freewheeling diode die to the IGBT die as an inverse diode
configuration.
15. The method of claim 11, further comprising: arranging a spacer
over the semiconductor die assembly; and affixing a second
substrate to the spacer, wherein the spacer is disposed between the
semiconductor die assembly and the second substrate.
16. The method of claim 11, wherein the semiconductor die assembly
is a first semiconductor die assembly, the method further
comprising; affixing a second semiconductor die assembly, over the
first substrate, the second semiconductor die assembly comprising:
a third semiconductor die, bonded to the first substrate; a fourth
semiconductor die, disposed over the third semiconductor die; and
an electrical connector, disposed between the third semiconductor
die and the fourth semiconductor die, wherein the second
semiconductor die assembly comprises another IGBT die and another
freewheeling diode die.
17. The method of claim 16, wherein the first substrate is a first
insulator substrate, the method further comprising arranging the
first semiconductor die assembly in a coplanar fashion with the
second semiconductor die assembly, on the first insulator
substrate.
18. A semiconductor device module, comprising: a first substrate;
and a semiconductor die assembly, disposed on the first substrate,
the semiconductor die assembly comprising a stacked configuration
of a first insulated gate bipolar transistor (IGBT) die and a
freewheeling diode die, and an electrical connector, disposed
between the IGBT die and the freewheeling diode semiconductor die,
wherein the IGBT die is directly bonded to the first substrate, and
wherein the stacked configuration defines a first die area,
equivalent to an area of the IGBT die.
19. The semiconductor device module of claim 18, further
comprising: a spacer, disposed over the semiconductor die assembly;
and a second substrate, bonded to the spacer, wherein the spacer is
disposed between the semiconductor die assembly and the second
substrate.
20. The semiconductor device module of claim 18, wherein the first
substrate is configured to accommodate the semiconductor die
assembly in a first area A1, wherein when the IGBT die and the
freewheeling diode die are arranged in a non-stacked configuration
on the first substrate, the first substrate is configured to
accommodate the IGBT die and the freewheeling diode die in an area
A2, wherein the area A2 is at least 50% larger than A1.
Description
BACKGROUND
Field
[0001] Embodiments relate to the field of semiconductor devices,
and in particular, packages for power semiconductor chips.
Discussion of Related Art
[0002] In the present day, fast switching, power semiconductor
devices normally employ fast switching diodes such as freewheeling
diodes to protect the power semiconductor device from inductive
loads, including motor coils or relay windings. At each instance of
switching, where a switching device is turned "ON", the freewheel
diode changes from a conducting state to a blocking state as it
becomes reversed biased.
[0003] However, when the device rapidly turns "OFF", the
freewheeling diode becomes forward biased and the collapse of the
energy stored, for example, in a coil, causes a current to flow
through the freewheel diode. Without the protection of the
freewheeling diode, a high di/dt current may occur, causing a high
voltage spike or transient to flow, and possibly damaging the
switching device.
[0004] Accordingly, power semiconductor devices such as insulated
gate bipolar transistors (IGBTs) are often arranged in power
semiconductor modules, such as one or more substrates, such as 2, 4
or 6 substrates, similar to each other. Each substrate, including
wires and resistors, hold pairs of IGBT die (chips) and diode
chips, where one or more IGBT chips may be paired with a diode
chip. This arrangement provides a modular manner to switch currents
of a desirable amount by choosing the appropriate number of chips.
Because the IGBT chips and diode chips are arranged in a planar
configuration on a substrate, the substrates need to be sized to
accommodate all of the chips, including wiring between chips. As
such, power semiconductor modules may be unduly large in size to
accommodate the required number of substrates and power
semiconductor devices.
[0005] In view of the above, the present embodiments are
provided.
BRIEF SUMMARY
[0006] In some embodiments, a semiconductor device module is
provided. The semiconductor device module may include a first
substrate; and a semiconductor die assembly, disposed on the first
substrate. The semiconductor die assembly may include a first
semiconductor die, bonded to the first substrate; a second
semiconductor die, disposed over the first semiconductor die; and
an electrical connector, disposed between the first semiconductor
die and the second semiconductor die, wherein the semiconductor die
assembly comprises an insulated gate bipolar transistor (IGBT) die
and a freewheeling diode die.
[0007] In another embodiment, a method of forming a semiconductor
device module, may include providing a first substrate and affixing
a semiconductor die assembly to the first substrate. The
semiconductor die assembly may include a first semiconductor die,
bonded to the first substrate; a second semiconductor die, disposed
over the first semiconductor die; and an electrical connector,
disposed between the first semiconductor die and the second
semiconductor die, wherein the first semiconductor die assembly
comprises an insulated gate bipolar transistor (IGBT) die and a
freewheeling diode die.
[0008] In an additional embodiment, a semiconductor device module
may include a first substrate; and a semiconductor die assembly,
disposed on the first substrate, the semiconductor die assembly
comprising a stacked configuration of a first insulated gate
bipolar transistor (IGBT) die and a freewheeling diode die, and an
electrical connector, disposed between the IGBT die and the
freewheeling diode semiconductor die. As such the IGBT die may be
directly bonded to the first substrate, wherein the stacked
configuration defines a first die area, equivalent to an area of
the IGBT die.
BRIEF DESCRIPTION OF THE DRAWINGS
[0009] FIG. 1A shows a semiconductor device module in side view, in
accordance with various embodiments of the disclosure;
[0010] FIG. 1B illustrates a top plan view of the semiconductor
device module of FIG. 1A;
[0011] FIG. 1C illustrates a circuit representation of a
semiconductor device module according to embodiments of the
disclosure;
[0012] FIG. 2A illustrates a top plan view of another semiconductor
device module according to additional embodiments of the
disclosure;
[0013] FIG. 2B illustrates a top plan view of a reference
semiconductor device module;
[0014] FIG. 3 shows another semiconductor device module in side
view, in accordance with further embodiments of the disclosure;
[0015] FIG. 4 illustrates electrical behavior during pulsing of a
semiconductor device module, according to the present
embodiments;
[0016] FIG. 5A depicts a side view of wiring for a reference device
having a co-planar configuration of an IGBT and diode die;
[0017] FIG. 5B depicts a side view of wiring for a device according
to the present embodiments;
[0018] FIG. 6A depicts a relatively lower frequency motor signal
and resulting IGBT die temperature behavior for the reference
device of FIG. 5A;
[0019] FIG. 6B depicts a relatively lower frequency motor signal
and resulting die assembly temperature behavior for the device of
FIG. 6A;
[0020] FIG. 6C depicts a relatively higher frequency motor signal
and resulting IGBT die assembly temperature behavior for the device
of FIG. 6A;
[0021] FIG. 6D depicts a relatively higher frequency motor signal
and resulting die assembly temperature behavior for the device of
FIG. 6B;
[0022] FIG. 7 depicts a process flow, according to embodiments of
the disclosure; and
[0023] FIG. 8 depicts another process flow, according to additional
embodiments of the disclosure.
DESCRIPTION OF EMBODIMENTS
[0024] The present embodiments will now be described more fully
hereinafter with reference to the accompanying drawings, in which
exemplary embodiments are shown. The embodiments are not to be
construed as limited to the embodiments set forth herein. Rather,
these embodiments are provided so that this disclosure will be
thorough and complete, and will fully convey their scope to those
skilled in the art. In the drawings, like numbers refer to like
elements throughout.
[0025] In the following description and/or claims, the terms "on,"
"overlying," "disposed on" and "over" may be used in the following
description and claims. "On," "overlying," "disposed on" and "over"
may be used to indicate that two or more elements are in direct
physical contact with one another. Also, the term "on,",
"overlying," "disposed on," and "over", may mean that two or more
elements are not in direct contact with one another. For example,
"over" may mean that one element is above another element while not
contacting one another and may have another element or elements in
between the two elements. Furthermore, the term "and/or" may mean
"and", it may mean "or", it may mean "exclusive-or", it may mean
"one", it may mean "some, but not all", it may mean "neither",
and/or it may mean "both", although the scope of claimed subject
matter is not limited in this respect.
[0026] In various embodiments, a semiconductor device module and
techniques for assembly are provided for power semiconductor
devices.
[0027] Turning to FIG. 1A there is shown a side view of a
semiconductor device module 100, according to various embodiments
of the disclosure. FIG. 1B shows a top plan view of a variant of
the semiconductor device module 100. FIG. 1C illustrates an
electrical circuit representation of the semiconductor device
module 100. The semiconductor device module 100 includes a first
substrate 102, a semiconductor die assembly 104, disposed on the
first substrate 102. The first substrate 102 may be a known
material stack such as copper/aluminum oxide/copper also known as
DCB or DBC, according to some embodiments. As such, the first
substrate may include an insulator body sandwiched between metallic
layers, and may be referred to as an insulator substrate. The
semiconductor die assembly 104 includes a first semiconductor die
106, attached to the first substrate 102, a second semiconductor
die 110, disposed over the first semiconductor die 106, wire
bonding 112, and an electrical connector 108, disposed between the
first semiconductor die 106 and the second semiconductor die 110.
In this embodiment and other embodiments of the disclosure, the
semiconductor die assembly 104 includes an insulated gate bipolar
transistor (IGBT) die and a freewheeling diode die. Generally, the
IGBT die may be disposed in contact with the first substrate 102.
As in known power device modules, an IGBT die may be coupled with a
diode die, used as a freewheeling diode to protect the IGBT die. In
other words, the first semiconductor die 106 may be an IGBT die,
while the second semiconductor die 110 may be a freewheeling diode
die. In various embodiments, the IGBT die, such as the first
semiconductor die 106, is disposed over the first substrate 102 in
a first region, and occupies a first area (in plan view, shown in
FIG. 1B), while the freewheeling diode die, such as second
semiconductor die 110, occupies a second area, less than the first
area. In some non-limiting embodiments, the second area may be on
the order of 50% of the first area, such as 40%-60%. Notably, the
second semiconductor die 110 completely overlaps the first
semiconductor die 106 as shown in plan view of FIG. 1B. As such,
the semiconductor die assembly 104 is characterized by a stacked
configuration of an IGBT die and a freewheeling diode die, in
contrast to known semiconductor power module configurations, where
IGBT die and diode die are each arranged directly on an substrate,
in a co-planar configuration. Notably, various metallic layers (not
shown) may be employed to bond the semiconductor die assembly 104
to first substrate 102, and to attach components within the
semiconductor die assembly 104 to one another, such as by
soldering.
[0028] Notably, as shown in FIG. 1C, the freewheeling diode die and
IGBT die may be electrically coupled, wherein the freewheeling
diode die is electrically coupled to the IGBT die as an inverse
freewheeling diode.
[0029] In various embodiments, the stacked configuration of an IGBT
die and freewheeling diode die may be provided on one or more
substrates in a modular fashion. Thus, in various embodiments, the
semiconductor die assembly 104 may represent just one of multiple
semiconductor die assemblies within a given semiconductor device
module. FIG. 2A illustrates a top plan view of another
semiconductor device module according to additional embodiments of
the disclosure. The semiconductor device module 200 includes four
separate semiconductor die assemblies, where each semiconductor die
assembly may be represented by semiconductor die assembly 104,
described above. Thus, each additional semiconductor die assembly
may disposed on a substrate 202, in a manner analogous to the
configuration of the semiconductor die assembly 104, shown in FIG.
1A, where each additional semiconductor die assembly includes an
insulated gate bipolar transistor (IGBT) die and a freewheeling
diode die.
[0030] While a given freewheeling diode die directly lies over a
given IGBT die within a semiconductor die assembly 104, the
different semiconductor die assemblies do not overlap one another,
as shown in FIG. 2A. Thus, a first semiconductor die assembly,
shown as semiconductor die assembly 104A, is disposed on the
substrate 202 in a first region, and a second semiconductor die
assembly, shown as semiconductor die assembly 104B, is disposed on
the substrate 202 in a second region, not overlapping the first
region. Said differently, the different semiconductor die assembly
of FIG. 2A are arranged in a coplanar fashion with one another.
[0031] To highlight the advantages of the semiconductor device
module 200, FIG. 2B illustrates a top plan view of a reference
semiconductor device module, shown as semiconductor device module
220. This reference semiconductor device module is arranged
generally according to known power semiconductor device components.
In this configuration, two different semiconductor die assemblies
are arranged on the substrate 202. The semiconductor die assemblies
are represented by semiconductor die assembly 104C, where the first
semiconductor die 106 and second semiconductor die 110 for a given
semiconductor die assembly 104C, but are arranged in a non-stacked
configuration, or co-planar configuration with one another, rather
than the stacked configuration of semiconductor die assembly 104.
As shown in FIG. 2A, the substrate 202 is configured to accommodate
the semiconductor die assembly 104 in a stacked configuration
within a first substrate area, shown as A1. As shown in FIG. 2B,
the same substrate is configured to accommodate the semiconductor
die assembly 104C in a second substrate area, shown as A2, where
the semiconductor die assembly 104C assembly contains the same
semiconductor die as in semiconductor die assembly 104, arranged,
however, in a non-stacked configuration. In accordance with various
embodiments of the disclosure, the area A2 may be substantially
larger than the area A1, such as at least 50% larger, and in some
examples 100% larger. Said differently, the area A1, occupied by
the semiconductor die assembly 104 of the present embodiments, may
be 67% of the area A2, or in some examples just 50% of the area A2.
Thus, a semiconductor device module arranged with the semiconductor
die assembly 104 may be much more compact in area as compared to
known semiconductor power device modules, for a given number of
IGBT die. For example, as shown in FIG. 2A and FIG. 2B, the
individual IGBT die, such as first semiconductor die 106, and the
individual freewheeling diode die, such as second semiconductor die
110, may all be the same size, while the substrate 202 may be the
same size in FIG. 2A and FIG. 2B. However, the substrate 202 of
FIG. 2A may accommodate four IGBT die in a stacked configuration,
while the substrate 202 accommodates just two IGBT die in the
non-stacked arrangement of FIG. 2B.
[0032] While the aforementioned embodiments reflect so called
single-side cooled device modules, in further embodiments,
double-side cooled device modules are provided. FIG. 3 shows
another semiconductor device module in side view, in accordance
with further embodiments of the disclosure. In this embodiment the
semiconductor device module 250, in addition to having the
aforementioned components of semiconductor device module 100,
includes a spacer 252, disposed over the semiconductor die assembly
104; and a second substrate 254, bonded to the spacer 252, where
the spacer 252 is disposed between the semiconductor die assembly
104 and the second substrate 254. As such, the first substrate 102
and second substrate 254 may provide double sided cooling to the
semiconductor die assembly 104.
[0033] In various additional embodiments, a plurality of
semiconductor die assemblies 104 may be arranged between a first
substrate 102 and second substrate 254, including the spacer
252.
[0034] Another advantage provided by the stacked configuration of a
semiconductor die assembly provided by the present embodiments is
the improved thermal management resulting from the stacked
configuration of diode and IGBT dies. FIG. 4 illustrates electrical
behavior during pulsing of a semiconductor device module, according
to the present embodiments. In the example shown, a series of
regular power pulses are shown as a function of time, as well as
the module temperature changes as a function of time. As
illustrated, at the beginning of a pulse, a relatively rapid
increase in temperature occurs, which increase may level off with
time, depending upon the duration of the pulse. After the pulse
terminates, a slower decrease in temperature may take place, which
decrease may also level off with time, depending upon the duration
of the OFF time between pulses. As such, the thermal swings may be
characterized between highest and lowest temperature in one metric.
According to the present embodiments, because the freewheeling
diode is stacked directly over the IGBT, the overall temperature
swing may be reduced for a given power switching level, in
comparison to non-stacked configurations of known power modules,
where the freewheeling diode is located away from the IGBT die.
[0035] To highlight the improvements in thermal swing provided by
the present embodiments, FIG. 5A and FIG. 5B depict a reference
configuration and a configuration according to the present
embodiments for a device. In FIG. 5A there is shown a side view of
wiring for a reference device 500, having a co-planar configuration
of the first semiconductor die 106, in one implementation, an IGBT
device, and a second semiconductor die 110, such as a diode die. A
wire bond 122 is provided, connecting the IGBT device and diode die
is series to ground. The first substrate 102 may be laminated with
conductive layers 120, such as copper, coupled to outside voltage,
on the opposite side of die from the wire bond.
[0036] FIG. 5B depicts a side view of wiring for a device 550,
according to the present embodiments. In this example, the diode
die (second semiconductor die 110) is stacked on top of the IGBT
die (first semiconductor die 106). The electrical connector 108,
disposed between the two die, is coupled to ground, while the top
surface of the diode die and the bottom surface of the IGBT die
(see conductive layer 120) are coupled to external voltage.
[0037] As is known, in operation, IGBTs may be used as high-speed
switches, providing the ability to generate various type of output
signals, including motor current, or sinewave type of output, at a
much lower frequency than the switching speed. A pair of IGBT
switches may operate in pulse width modulation (PWM) mode to
generate an time varying output based on pulse width modulation.
Current may be chopped between switch 1/diode 2 and switch 2/diode
1, for example, generating a motor signal, such as a current signal
varying as a sine wave as a function of time. As the current varies
with time the degree of heating generated at the IGBT die may vary
accordingly. FIG. 6A depicts a relatively lower frequency motor
signal, referred to herein for convenience as "low frequency," and
resulting IGBT die temperature behavior for the reference device of
FIG. 5A. The upper curve, represents the "motor signal" or current
as a function of time, while the lower signal represents the IGBT
die temperature as a function of time. In this example, the IGBT
die temperature may vary from a value T1 to a maximum temperature,
represented by the dashed line. In the first half cycle 602, the
IGBT die heats up, while in the second half cycle 604, the IGBT die
cools down. A temperature swing equal to .DELTA.T1 occurs, as
shown.
[0038] FIG. 6B depicts a low frequency motor signal and resulting
die assembly temperature behavior for the device of FIG. 5B. In
this example, the motor signal may be assumed to be the same as in
FIG. 6A. Because of the stacked configuration of die, the
temperature of the die assembly of FIG. 5B tends to remain higher
than the device of FIG. 5A, with a minimum temperature represented
by T2. Notably, during the first half cycle 602, the IGBT die
(first semiconductor die 106) heats up, while in the second half
cycle 604, the IGBT die will tend to cool down. However, during the
second half cycle 604, the second semiconductor die 110, that is,
the diode die, is active. In other words, the second semiconductor
die 110 is paired with another IGBT die (not shown), during the
second half cycle 604, and accordingly generates additional heat,
keeping the IGBT die of the device 550 warm, resulting in the
second temperature peak shown in second half cycle 604. As a
result, the overall temperature swing of the device assembly,
including the first semiconductor die 106 and the second
semiconductor die 110, is less, shown as .DELTA.T2. This lower
temperature swing generates less thermal stress and may accordingly
improve device reliability and longevity.
[0039] FIG. 6C depicts a relatively higher frequency motor signal,
referred to herein as "higher frequency" signal and resulting IGBT
die assembly temperature behavior for the reference device of FIG.
5A. In this example, a first half cycle 612 and a second half cycle
614 are shown. The frequency of the motor signal in this example,
is postulated to be much higher than the frequency in the example
of FIG. 6A, such as double the frequency. Notably, the temperature
behavior of the IGBT device is qualitatively similar to the
behavior of FIG. 6A, with a temperature swing of .DELTA.T3 about an
average temperature of T3. Thus, the IGBT device heats above the
average temperature in the first half cycle 612 and cools below the
average temperature in the second half cycle 614.
[0040] FIG. 6D depicts a higher frequency motor signal and
resulting die assembly temperature behavior for the device of FIG.
5B. Again, because the second semiconductor die 110 is active
during the second half cycle 614, the temperature shows a second
peak in this period, and the overall temperature swing is reduced,
shown as .DELTA.T4.
[0041] Notably, at ultralow frequency the number of power cycles
doubles in the stacked configuration of the present embodiments.
Generally, the PWM of the phase legs is sine-modulated to shape a
sine motor current. Thus, in an arrangement where a first
transistor/diode pair is coupled with a second transistor/diode
pair, for one half period ("+wave") the current toggles between a
second transistor die in a second transistor/diode stack (T2) and a
first diode die in a first transistor/diode pair (D1), whereas a
second diode die in the second transistor/diode pair (D2) and a
first transistor die in the first transistor/diode pair (T1) are
not conducting current. In the second half period ("-wave") T2 and
D1 are off and D2 and T1 are conducting. When the motor current
frequency is very low (e.g., .about.10 Hz) the temperature of the
conducting semiconductor follows the current. As frequency is very
low, the non-current conducting semiconductors have sufficient time
to cool down to the heatsink temperature. Thus, in the "+wave"
portion T2 and D1 will see a full temperature swing, while the
temperature of D2 and T1 drop to the heatsink temperature. In the
"-wave" portion, T1 and D2 will see a full temperature swing, while
the temperature of D1 and T2 drop to the heatsink temperature. In
the present embodiments, if D2 is stacked with T2, then T2 heats up
the stack during the "+wave" and, though T2 is not powered during
"-wave" T2 will be heated by D2, which die is powered during
"-wave". In this manner, the frequency of the temperature swing
experienced by a transistor/diode stack doubles, and in the
frequency range where the thermal capacity acts as a filter the dT
will be reduced, resulting in lower stress.
[0042] FIG. 7 depicts a process flow 700, according to embodiments
of the disclosure. At block 702 a substrate is provided. The main
portion of the substrate may be a known material such as aluminum
oxide, aluminum nitride, and so forth, according to various
non-limiting embodiments, and may include conductive layers, such
as known "DCB/DBC" (direct copper bond/direct bond copper
substrates).
[0043] At block 704, a first surface of an IGBT die is affixed to
the substrate. The IGBT may be bonded to the substrate using a
suitable known metallurgy according to known techniques.
[0044] At block 706, an electrical connector or lead, is affixed to
a second surface of the IGBT die, opposite the first surface. In
particular, a first connector lead may be connected to an "Emitter"
contact area of the IGBT die while a 2.sup.nd connector lead is
attached to a gate contact of the IGBT.
[0045] At block 708, a reverse freewheeling diode die is affixed
above the electrical connector, such as the first connector lead,
where the reverse freewheeling diode die is disposed directly over
the IGBT die. In various embodiments, the reverse freewheeling
diode die has a smaller area than the area of the IGBT die and
accordingly may entirely overlap with the IGBT die. In various
embodiments, the reverse freewheeling diode die may be centered
above the IGBT die.
[0046] According to variants of the process flow 700, the process
flow may be implemented with multiple IGBT die and multiple reverse
freewheeling diode die, where a given IGBT die and given reverse
freewheeling diode die form a given semiconductor die assembly,
such that multiple freewheeling diode die are assembled upon a
given insulator substrate.
[0047] FIG. 8 depicts another process flow, shown as process flow
750, according to additional embodiments of the disclosure. The
process flow 750 may proceed generally as in the process flow 700,
through block 702, block 704, block 706, and block 708. After block
708, at block 760, a spacer is affixed to the reverse freewheeling
diode die. The spacer may be chosen from known spacer materials for
IGBT modules. The thickness of the spacer may be chosen for
suitable isolation.
[0048] Subsequently to block 760, at block 762, a second substrate
is affixed to the spacer. The second substrate may be affixed to
the spacer on a second surface of the spacer, opposite a first
surface of the spacer that is used to bond to the reverse
freewheeling diode die. Depending upon the exact design
requirements the second substrate may be the same as or different
from a first substrate, provided at block 702, discussed above.
[0049] According to variants of the process flow 750, the process
flow may be implemented with multiple IGBT die and multiple reverse
freewheeling diode die, where a given IGBT die and given reverse
freewheeling diode die form a given semiconductor die assembly,
such that multiple freewheeling diode die are assembled between two
insulator substrates.
[0050] While the present embodiments have been disclosed with
reference to certain embodiments, numerous modifications,
alterations and changes to the described embodiments are possible
while not departing from the sphere and scope of the present
disclosure, as defined in the appended claims. Accordingly, the
present embodiments are not to be limited to the described
embodiments, and may have the full scope defined by the language of
the following claims, and equivalents thereof).
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