U.S. patent application number 16/737319 was filed with the patent office on 2021-01-07 for contact pads for electronic substrates and related methods.
The applicant listed for this patent is Qorvo US, Inc.. Invention is credited to David Jandzinski, Thomas Scott Morris, John August Orlowski.
Application Number | 20210007224 16/737319 |
Document ID | / |
Family ID | |
Filed Date | 2021-01-07 |
United States Patent
Application |
20210007224 |
Kind Code |
A1 |
Orlowski; John August ; et
al. |
January 7, 2021 |
CONTACT PADS FOR ELECTRONIC SUBSTRATES AND RELATED METHODS
Abstract
Electronic substrates, contact pads for electronic substrates,
and related methods are disclosed. Electronic substrates may
include an electrically conductive layer that forms at least one
contact pad and at least one metal trace on a non-conductive layer.
The contact pads are arranged with greater thicknesses or heights
above the non-conductive layer than the metal traces. Dielectric
layers are disclosed that cover the metal traces while leaving top
surfaces of the contact pads exposed. Top surfaces of the
dielectric layers may be arranged to be coplanar with top surfaces
of the contact pads to provide electronic substrates having
generally planar top faces. Bottom faces of electronic substrates
may include mounting pads that are coplanar with additional
dielectric layers. Methods are disclosed that include forming
dielectric layers to cover contact pads and metal traces, and
removing surface portions of the dielectric layers until the
contact pads are accessible through the dielectric layers.
Inventors: |
Orlowski; John August;
(Summerfield, NC) ; Morris; Thomas Scott;
(Lewisville, NC) ; Jandzinski; David;
(Kernersville, NC) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Qorvo US, Inc. |
Greensboro |
NC |
US |
|
|
Appl. No.: |
16/737319 |
Filed: |
January 8, 2020 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
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62869386 |
Jul 1, 2019 |
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Current U.S.
Class: |
1/1 |
International
Class: |
H05K 1/11 20060101
H05K001/11; H05K 3/24 20060101 H05K003/24; H05K 3/00 20060101
H05K003/00 |
Claims
1. An electronic substrate comprising: a non-conductive layer; a
conductive layer on the non-conductive layer, the conductive layer
forming at least one contact pad and at least one metal trace; a
dielectric layer on the conductive layer such that the at least one
metal trace is covered by the dielectric layer and a top surface of
the at least one contact pad is coplanar with a top surface of the
dielectric layer; and an additional conductive layer that forms at
least one mounting pad, wherein a bottom surface of the at least
one mounting pad is coplanar with a bottommost face of the
electronic substrate.
2. The electronic substrate of claim 1, wherein the conductive
layer comprises copper.
3. The electronic substrate of claim 1, wherein the dielectric
layer comprises prepreg or a resin coated film.
4. The electronic substrate of claim 1, wherein the dielectric
layer is devoid of acrylic-based materials.
5. The electronic substrate of claim 1, wherein a thickness of the
at least one contact pad above the non-conductive layer is in a
range including 3 microns (.mu.m) to 12 .mu.m greater than a
thickness of the at least one metal trace above the non-conductive
layer.
6. The electronic substrate of claim 1, wherein at least a portion
of the at least one metal trace is completely embedded in the
dielectric layer.
7. The electronic substrate of claim 1, wherein the non-conductive
layer and the conductive layer form a laminate structure with a
plurality of additional non-conductive layers and a plurality of
additional conductive layers.
8. (canceled)
9. The electronic substrate of claim 1, further comprising an
additional dielectric layer and wherein the bottom surface of the
at least one mounting pad is coplanar with a bottom surface of the
additional dielectric layer.
10. The electronic substrate of claim 9, further comprising a
surface finish coating on the at least one contact pad and the at
least one mounting pad.
11. The electronic substrate of claim 9, wherein the at least one
mounting pad comprises a portion that is covered by the additional
dielectric layer.
12. An electronic substrate comprising: a non-conductive layer; a
conductive layer on the non-conductive layer, the conductive layer
forming at least one contact pad and at least one metal trace,
wherein a thickness of the at least one contact pad is greater than
a thickness of the at least one metal trace above the
non-conductive layer; a dielectric layer on the conductive layer
such that the at least one metal trace is covered by the dielectric
layer and a top surface of the at least one contact pad is
uncovered by the dielectric layer; and an additional conductive
layer, wherein a portion of the additional conducive layer forms at
least one mounting pad at a bottom face of the electronic
substrate, and a thickness of the at least one mounting pad is
greater than a thickness of at least one other portion of the
additional conductive layer.
13. The electronic substrate of claim 12, wherein the thickness of
the at least one contact pad is in a range including 3 microns
(.mu.m) to 12 .mu.m greater than the thickness of the at least one
metal trace above the non-conductive layer.
14. The electronic substrate of claim 12, wherein at least a
portion of the at least one metal trace is completely embedded in
the dielectric layer.
15. The electronic substrate of claim 12, wherein the thickness of
the at least one contact pad is within one percent of a thickness
of the dielectric layer above the non-conductive layer.
16. The electronic substrate of claim 12, wherein the at least one
contact pad and the at least one metal trace comprise the same
material.
17. A method of fabricating an electronic substrate comprising:
depositing a conductive layer on a non-conductive layer such that
the conductive layer forms at least one metal trace and partially
forms at least one contact pad; selectively depositing additional
conductive material to form the at least one contact pad with a
greater thickness than the at least one metal trace; forming a
dielectric layer on the conductive layer such that the at least one
metal trace and the at least one contact pad are covered by the
dielectric layer; and removing surface portions of the dielectric
layer to expose a top surface of the at least one contact pad while
still covering the at least one metal trace.
18. The method of claim 17, wherein the additional conductive
material comprises a same material as the conductive layer.
19. The method of claim 17, further comprising forming a mask
material over the at least one metal trace before selectively
depositing the additional conductive material.
20. The method of claim 19, further comprising removing the mask
material before forming the dielectric layer.
21. The method of claim 17, wherein the top surface of the at least
one contact pad is coplanar with a top surface of the dielectric
layer.
22. The method of claim 17, wherein removing the surface portions
of the dielectric layer comprises planarizing a top surface of the
dielectric layer.
23. The method of claim 17, wherein removing the surface portions
of the dielectric layer comprises mechanical grinding.
24. The method of claim 17, wherein removing the surface portions
of the dielectric layer comprises plasma etching.
25. The method of claim 17, further comprising applying a surface
finish to the top surface of the at least one contact pad.
26. The electronic substrate of claim 12, wherein the at least one
mounting pad comprises two mounting pads that are connected to one
another by the at least one other portion of the additional
conducive layer
Description
RELATED APPLICATIONS
[0001] This application claims the benefit of provisional patent
application Ser. No. 62/869,386, filed Jul. 1, 2019, the disclosure
of which is hereby incorporated herein by reference in its
entirety.
FIELD OF THE DISCLOSURE
[0002] The present disclosure relates to electronic substrates, and
particularly to contact pads for electronic substrates and related
methods.
BACKGROUND
[0003] Electronic substrates are often used to support and connect
electrical components and electronic modules. Laminate structures,
including printed circuit boards (PCBs) and the like, are commonly
used as electronic substrates for electronic devices. A typical
laminate structure may include a non-conductive body for support
and one or more conductive features for connecting semiconductor
die, electrical components, and electronic modules. Some of the
conductive features can be exposed at a surface of the
non-conductive body and may include contact pads, conductive
traces, surface-exposed sections of vias, and the like. Electrical
components are mounted to the exposed conductive features to form
electronic devices, modules, and circuits.
[0004] PCBs are electronic substrates that are often used to mount
electrical components housed within integrated circuit (IC)
packages. For example, a semiconductor die is often mounted on a
PCB and then covered with an overmold in order to protect the
semiconductor die. Traditional PCBs are often formed from a
laminate structure of non-conductive and conductive layers. The
conductive layers can form a conductive structure of the PCB that
is arranged to connect input and output structures of the
semiconductor die to other electrical components within the IC
package and/or to input and output structures of the IC package
accessible externally from the IC package. The conductive structure
typically has conductive layers formed horizontally between the
non-conductive layers and/or on a substrate surface. These
conductive layers are shaped to form various structures, such as
traces, terminals, contact pads, and the like to connect electrical
components within the IC package and/or the input and output
structures of the IC package to the electrical components.
[0005] The art continues to seek improved electronic devices and
related fabrication techniques capable of overcoming challenges
associated with conventional electronic devices.
SUMMARY
[0006] The present disclosure relates to electronic substrates, and
particularly to contact pads for electronic substrates and related
methods. Electronic substrates may include an electrically
conductive layer that forms at least one contact pad and at least
one metal trace on a non-conductive layer. The contact pads are
arranged with greater thicknesses or heights above the
non-conductive layer than the metal traces. Dielectric layers are
disclosed that cover the metal traces while leaving top surfaces of
the contact pads exposed. Top surfaces of the dielectric layers may
be arranged to be coplanar with the top surfaces of the contact
pads to provide electronic substrates having generally planar top
faces. Bottom faces of electronic substrates may include mounting
pads that are coplanar with additional dielectric layers. Methods
are disclosed that include forming dielectric layers to cover
contact pads and metal traces, and removing surface portions of the
dielectric layers until the contact pads are accessible through the
dielectric layers.
[0007] In one aspect, an electronic substrate comprises: a
non-conductive layer; a conductive layer on the non-conductive
layer, the conductive layer forming at least one contact pad and at
least one metal trace; and a dielectric layer on the conductive
layer such that the at least one metal trace is covered by the
dielectric layer and a top surface of the at least one contact pad
is coplanar with a top surface of the dielectric layer. In certain
embodiments, the conductive layer comprises copper. In certain
embodiments, the dielectric layer comprises prepreg or a resin
coated film. In certain embodiments, the dielectric layer is devoid
of acrylic-based materials. In certain embodiments, a thickness of
the at least one contact pad above the non-conductive layer is in a
range including 3 microns (.mu.m) to 12 .mu.m greater than a
thickness of the at least one metal trace above the non-conductive
layer. In certain embodiments, at least a portion of the at least
one metal trace is completely embedded in the dielectric layer. In
certain embodiments, the non-conductive layer and the conductive
layer form a laminate structure with a plurality of additional
non-conductive layers and a plurality of additional conductive
layers.
[0008] In certain embodiments, the electronic substrate further
comprises an additional conductive layer that forms at least one
mounting pad on a bottom face of the electronic substrate. In
certain embodiments, the electronic substrate further comprises an
additional dielectric layer wherein a bottom surface of the at
least one mounting pad is coplanar with a bottom surface of the
additional dielectric layer. In certain embodiments, the electronic
substrate further comprises a surface finish coating on the at
least one contact pad and the at least one mounting pad. In certain
embodiments, the at least one mounting pad comprises a portion that
is covered by the additional dielectric layer.
[0009] In another aspect, an electronic substrate comprises: a
non-conductive layer; a conductive layer on the non-conductive
layer, the conductive layer forming at least one contact pad and at
least one metal trace, wherein a thickness of the at least one
contact pad is greater than a thickness of the at least one metal
trace above the non-conductive layer; and a dielectric layer on the
conductive layer such that the at least one metal trace is covered
by the dielectric layer and a top surface of the at least one
contact pad is uncovered by the dielectric layer. In certain
embodiments, the thickness of the at least one contact pad is in a
range including 3 .mu.m to 12 .mu.m greater than a thickness of the
at least one metal trace above the non-conductive layer. In certain
embodiments, at least a portion of the at least one metal trace is
completely embedded in the dielectric layer. In certain
embodiments, the thickness of the at least one contact pad is
within one percent of a thickness of the dielectric layer above the
non-conductive layer. In certain embodiments, the at least one
contact pad and the at least one metal trace comprise the same
material.
[0010] In another aspect, a method of fabricating an electronic
substrate comprises: depositing a conductive layer on a
non-conductive layer such that the conductive layer forms at least
one metal trace and partially forms at least one contact pad;
selectively depositing additional conductive material to form the
at least one contact pad with a greater thickness than the at least
one metal trace; forming a dielectric layer on the conductive layer
such that the at least one metal trace and the at least one contact
pad are covered by the dielectric layer; and removing surface
portions of the dielectric layer to expose a top surface of the at
least one contact pad while still covering the at least one metal
trace. In certain embodiments, the additional conductive material
comprises a same material as the conductive layer. In certain
embodiments, the method further comprises forming a mask material
over the at least one metal trace before selectively depositing the
additional conductive material. In certain embodiments, the method
further comprises removing the mask material before forming the
dielectric layer. In certain embodiments, a top surface of the at
least one contact pad is coplanar with a top surface of the
dielectric layer. In certain embodiments, removing the surface
portions of the dielectric layer comprises planarizing a top
surface of the dielectric layer. In certain embodiments, removing
the surface portions of the dielectric layer comprises mechanical
grinding. In certain embodiments, removing the surface portions of
the dielectric layer comprises plasma etching. In certain
embodiments, the method further comprises applying a surface finish
to the top surface of the at least one contact pad.
[0011] In another aspect, any of the foregoing aspects, and/or
various separate aspects and features as described herein, may be
combined for additional advantage. Any of the various features and
elements as disclosed herein may be combined with one or more other
disclosed features and elements unless indicated to the contrary
herein.
[0012] Those skilled in the art will appreciate the scope of the
present disclosure and realize additional aspects thereof after
reading the following detailed description of the preferred
embodiments in association with the accompanying drawing
figures.
BRIEF DESCRIPTION OF THE DRAWING FIGURES
[0013] The accompanying drawing figures incorporated in and forming
a part of this specification illustrate several aspects of the
disclosure, and together with the description serve to explain the
principles of the disclosure.
[0014] FIG. 1 is a cross-sectional view of a substrate for
electronic devices in a partially assembled state.
[0015] FIG. 2 is a cross-sectional view of the substrate of FIG. 1
with the addition of secondary resist layers over primary resist
layers.
[0016] FIG. 3 is a cross-sectional view of the substrate of FIG. 2
illustrating increased thickness portions of conductive layers that
are selectively increased through openings illustrated in FIG.
2.
[0017] FIG. 4 is a cross-sectional view of the substrate of FIG. 3
after removal of the primary resist layers, the secondary resist
layers, and uncovered portions of seed layers of FIG. 3 to form
contact pads and metal traces having differing heights.
[0018] FIG. 5 is a cross-sectional view of the substrate of FIG. 4
after application of dielectric layers that cover opposing top and
bottom faces of the substrate.
[0019] FIG. 6 is a cross-sectional view of the substrate of FIG. 5
after removal of surface portions of the dielectric layers.
[0020] FIG. 7 is a cross-sectional view of the substrate of FIG. 6
after application of surface finish coatings to contact pads and
mounting pads.
DETAILED DESCRIPTION
[0021] The embodiments set forth below represent the necessary
information to enable those skilled in the art to practice the
embodiments and illustrate the best mode of practicing the
embodiments. Upon reading the following description in light of the
accompanying drawing figures, those skilled in the art will
understand the concepts of the disclosure and will recognize
applications of these concepts not particularly addressed herein.
It should be understood that these concepts and applications fall
within the scope of the disclosure and the accompanying claims.
[0022] It will be understood that, although the terms first,
second, etc. may be used herein to describe various elements, these
elements should not be limited by these terms. These terms are only
used to distinguish one element from another. For example, a first
element could be termed a second element, and, similarly, a second
element could be termed a first element, without departing from the
scope of the present disclosure. As used herein, the term "and/or"
includes any and all combinations of one or more of the associated
listed items.
[0023] It will be understood that when an element such as a layer,
region, or substrate is referred to as being "on" or extending
"onto" another element, it can be directly on or extend directly
onto the other element or intervening elements may also be present.
In contrast, when an element is referred to as being "directly on"
or extending "directly onto" another element, there are no
intervening elements present. Likewise, it will be understood that
when an element such as a layer, region, or substrate is referred
to as being "over" or extending "over" another element, it can be
directly over or extend directly over the other element or
intervening elements may also be present. In contrast, when an
element is referred to as being "directly over" or extending
"directly over" another element, there are no intervening elements
present. It will also be understood that when an element is
referred to as being "connected" or "coupled" to another element,
it can be directly connected or coupled to the other element or
intervening elements may be present. In contrast, when an element
is referred to as being "directly connected" or "directly coupled"
to another element, there are no intervening elements present.
[0024] Relative terms such as "below" or "above" or "upper" or
"lower" or "horizontal" or "vertical" may be used herein to
describe a relationship of one element, layer, or region to another
element, layer, or region as illustrated in the Figures. It will be
understood that these terms and those discussed above are intended
to encompass different orientations of the device in addition to
the orientation depicted in the Figures.
[0025] The terminology used herein is for the purpose of describing
particular embodiments only and is not intended to be limiting of
the disclosure. As used herein, the singular forms "a," "an," and
"the" are intended to include the plural forms as well, unless the
context clearly indicates otherwise. It will be further understood
that the terms "comprises," "comprising," "includes," and/or
"including" when used herein specify the presence of stated
features, integers, steps, operations, elements, and/or components,
but do not preclude the presence or addition of one or more other
features, integers, steps, operations, elements, components, and/or
groups thereof.
[0026] Embodiments are described herein with reference to schematic
illustrations of embodiments of the disclosure. As such, the actual
dimensions of the layers and elements can be different, and
variations from the shapes of the illustrations as a result, for
example, of manufacturing techniques and/or tolerances, are
expected. For example, a region illustrated or described as square
or rectangular can have rounded or curved features, and regions
shown as straight lines may have some irregularity. Thus, the
regions illustrated in the figures are schematic and their shapes
are not intended to illustrate the precise shape of a region of a
device and are not intended to limit the scope of the disclosure.
Common elements between figures may be shown herein with common
element numbers and may not be subsequently re-described.
[0027] Unless otherwise defined, all terms (including technical and
scientific terms) used herein have the same meaning as commonly
understood by one of ordinary skill in the art to which this
disclosure belongs. It will be further understood that terms used
herein should be interpreted as having a meaning that is consistent
with their meaning in the context of this specification and the
relevant art and will not be interpreted in an idealized or overly
formal sense unless expressly so defined herein.
[0028] Electronic substrates as disclosed herein may be useful to
support and connect various electrical components for electrical
devices. Electrical components may include various combinations of
resistors, capacitors, inductors, resonators, bond wires, and
integrated circuits (ICs) that may form one or more electronic
devices, modules, and circuits. In certain embodiments, the
electrical components may include an electronic circuit built on
its own semiconductor substrate, such as a processor, volatile
memory, non-volatile memory, a radio frequency (RF) circuit, or a
micro-electromechanical system (MEMS) device. In certain
embodiments, the electrical components may include one or more
electrical devices such as filters, capacitors, inductors,
resistors, amplifiers, low-noise amplifiers (LNA), switching
devices, transmit/receive modules, or electronic circuits having
combinations thereof. In this regard, electronic substrates as
described herein may be suited for use as device substrates for
cellular applications, among others.
[0029] Substrates, such as printed circuit boards (PCBs), typically
include metal traces and electrical contact pads arranged to
provide electrical connections and mounting surfaces for electrical
components. Solder mask, solder resist, and/or oxide coatings are
typically applied over metal traces for environmental protection
and to prevent unintended electrical connections during soldering
of electrical components. In a typically process, solder mask
material is applied over a PCB, and various openings are formed in
portions of the solder mask to expose contact pads of the PCB for
soldering. In this regard, solder mask material is formed with a
greater height from the PCB than metal traces and contact pads.
Electrical components may then be mounted through the solder mask
openings to the exposed contact pads.
[0030] The present disclosure relates to electronic substrates, and
particularly to contact pads for electronic substrates and related
methods. Electronic substrates may include an electrically
conductive layer that forms at least one contact pad and at least
one metal trace on a non-conductive layer. The contact pads are
arranged with greater thicknesses or heights above the
non-conductive layer than the metal traces. Dielectric layers are
disclosed that cover the metal traces while leaving top surfaces of
the contact pads exposed. Top surfaces of the dielectric layers may
be arranged to be coplanar with the top surfaces of the contact
pads to provide electronic substrates having generally planar top
faces. Bottom faces of electronic substrates may include mounting
pads that are coplanar with additional dielectric layers. Methods
are disclosed that include forming dielectric layers to cover
contact pads and metal traces, and removing surface portions of the
dielectric layers until the contact pads are accessible through the
dielectric layers
[0031] FIG. 1 is a cross-sectional view of a substrate 10 for
electronic devices in a partially assembled state. The substrate 10
includes a plurality of conductive layers 12-1 to 12-4 and a
plurality of non-conductive layers 14-1 to 14-3. One or more vias
16 that are electrically conductive may also be arranged to provide
electrical connections between different ones of the conductive
layers 12-1 to 12-4. The substrate 10 may form a PCB or a laminate
structure where the plurality of conductive layers 12-1 to 12-4 are
laminated in an alternating manner with the plurality of
non-conductive layers 14-1 to 14-3. While four conductive layers
12-1 to 12-4 are illustrated, the substrate 10 may be configured
with any number of conductive layers. Generally, increasing the
number of laminated conductive layers corresponds to an increased
number of electronic devices that may be mounted and electrically
connected on the substrate 10. This allows electrical connections
to various electrical components to be made at different horizontal
planes within the substrate 10. In the illustration of FIG. 1, the
non-conductive layer 14-2 is configured as a core layer of the
substrate 10. In certain embodiments, the plurality of conductive
layers 12-1 to 12-4 may include a metal such as copper (Cu),
electrolytic Cu, copper foil, or the like. In this regard, the
plurality of conductive layers 12-1 to 12-4 may form electrically
and thermally conductive layers. In certain embodiments, the
plurality of non-conductive layers 14-1 to 14-3 may include fiber
materials, glass, epoxy, glass-reinforced epoxy, prepreg, ceramic
materials, polymer materials, dielectric materials, and
combinations thereof. In this regard, the plurality of
non-conductive layers 14-1 to 14-3 may form layers that are
electrically insulating. The non-conductive layer 14-2, serving as
the core layer, may include a same material or different material
than the other non-conductive layers 14-1, 14-3. One or more of the
conductive layers 12-1 to 12-4 may comprise a pattern of continuous
portions and discontinuous portions along the substrate 10.
Discontinuous portions of the same conductive layer may be
electrically connected or isolated from one another depending on
the configuration.
[0032] In order to form discontinuous portions of one or more of
the conductive layers 12-1 to 12-4, patterned resist layers may be
used. In FIG. 1, primary resist layers 18-1, 18-2 are arranged on
opposing major faces of the substrate 10. In this example, the
opposing major faces are top and bottom faces of the substrate
where a first primary resist layer 18-1 is patterned at the top
face and a second primary resist layer 18-2 is patterned at the
bottom face. When the substrate 10 is fully assembled as
illustrated in the subsequent figures, the top face of the
substrate 10 is where one or more electronic devices may be
mounted, and the bottom face of the substrate 10 is configured for
mounting the substrate 10 to another surface. The primary resist
layers 18-1, 18-2 may be patterned by various methods, including
lithography and photolithography. A first conductive layer 12-1 may
then be deposited through the first primary resist layer 18-1 and a
fourth conductive layer 12-4 may be deposited through the second
primary resist layer 18-2. In certain embodiments, a first seed
layer 20-1 of thin conductive material (e.g., a thin Cu layer) may
initially be provided between the first primary resist layer 18-1
and a first non-conductive layer 14-1 to facilitate deposition of
the first conductive layer 12-1. In a similar manner, a second seed
layer 20-2 may be provided between a third non-conductive layer
14-3 and the second primary resist layer 18-2 to facilitate
deposition of the fourth conductive layer 12-4.
[0033] FIG. 2 is a cross-sectional view of the substrate 10 of FIG.
1 with the addition of secondary resist layers 22-1, 22-2. A first
secondary resist layer 22-1 is provided over portions of the first
primary resist layer 18-1 and over portions of the first conductive
layer 12-1. In this regard, portions of the first primary resist
layer 18-1 and the first conductive layer 12-1 that are uncovered
by the first secondary resist layer 22-1 form openings 24 that
allow heights or thicknesses of the first conductive layer 12-1 to
be selectively increased within such openings 24. In a similar
manner, a second secondary resist layer 22-2 is provided over
portions of the second primary resist layer 18-2 and over portions
of the fourth conductive layer 12-4. In this regard, portions of
the second primary resist layer 18-2 and the fourth conductive
layer 12-4 that are uncovered by the second secondary resist layer
22-2 form openings 26 that allow heights or thicknesses of the
fourth conductive layer 12-4 to be selectively increased within
such openings 26.
[0034] FIG. 3 is a cross-sectional view of the substrate 10 of FIG.
2 illustrating increased thickness portions 12-1', 12-4' of the
first conductive layer 12-1 and the fourth conductive layer 12-4
that are selectively increased through the openings 24, 26 of FIG.
2. In this regard, additional conductive materials may be formed
through the openings 24, 26 and onto portions of the respective
conductive layers 12-1, 12-4. In certain embodiments, the
additional conductive materials may comprise the same material
(e.g., electrolytic Cu) as the portions of the conductive layers
12-1, 12-4 as previously deposited. In other embodiments, the
additional conductive material may comprise one or more different
materials. The additional conductive materials may be formed
through the opening 24, 26 by any number of processes, including
thin film deposition, sputtering, evaporation, and plating.
[0035] FIG. 4 is a cross-sectional view of the substrate 10 of FIG.
3 after removal of the primary resist layers 18-1, 18-2, the
secondary resist layers 22-1, 22-2 and any uncovered portions of
the seed layers 20-1, 20-2 of FIG. 3. Removal of such layers may
comprise one or more of stripping and etching steps. The increased
thickness portions 12-1' of the first conductive layer 12-1 are
configured as one or more contact pads 28, and portions of the
first conductive layer 12-1 that were covered by the secondary
resist layer 22-1 are configured as one or more metal traces 30. As
such, the one or more contact pads 28 are configured with a
thickness T1 that is greater than a thickness T2 of the one or more
metal traces 30 as measured above the non-conductive layer 14-1. In
certain embodiments, the thickness T1 is in a range including 3
microns (.mu.m) to 12 .mu.m greater than the thickness T2, or in a
range including 5 .mu.m to 10 .mu.m. In certain embodiments, the
thickness T1 is in a range including 10 .mu.m to 50 .mu.m above the
non-conductive layer 14-1. In a similar manner, the increased
thickness portions 12-4' of the fourth conductive layer 12-4 that
are located on the bottom face of the substrate 10 may be
configured to form one or more surfaces for mounting the substrate
10 to another surface. In certain embodiments, the increased
thickness portions 12-4' of the fourth conductive layer 12-4 form
one or more mounting pads 32 such as a grid array, including a land
grid array (LGA) for mounting the substrate 10 to another surface.
As illustrated in FIG. 4, one or more of the increased thickness
portions 12-4' of the fourth conductive layer 12-4 may be
continuous with one or more other portions of the fourth conductive
layer 12-4 that do not have increased thickness. In this manner,
different ones of the increased thickness portions 12-4' may be
electrically coupled to form a larger ground plane for the
substrate 10 and/or thermally coupled to form a larger heat sink in
certain embodiments. With such dimensions, the substrate 10 may be
well suited for low profile applications, such as a PCB for mobile
phone applications.
[0036] FIG. 5 is a cross-sectional view of the substrate 10 of FIG.
4 after application of dielectric layers 34-1, 34-2 that cover
opposing top and bottom faces of the substrate 10. The dielectric
layers 34-1, 34-2 may be deposited, laminated, coated, or otherwise
applied to cover the first conductive layer 12-1 and the fourth
conductive layer 12-4. In certain embodiments, the dielectric
layers 34-1, 34-2 may comprise one or more of prepreg, a resin
coated film, and a solder mask. In certain embodiments, one or more
of the dielectric layers 34-1, 34-2 are devoid of acrylic-based
materials found in conventional solder mask materials. As such, the
dielectric layers 34-1, 34-2 may be formed with improved mechanical
and electrical properties over conventional solder mask materials,
such as lower coefficient of thermal expansion (CTE), higher
elastic modulus, lower material loss tangent (Df), improved
insertion loss, and higher glass transition temperature (Tg), among
others.
[0037] FIG. 6 is a cross-sectional view of the substrate 10 of FIG.
5 after removal of surface portions of the dielectric layers 34-1,
34-2 of FIG. 5. In this manner, thicknesses of the dielectric
layers 34-1, 34-2 are reduced compared with FIG. 5. Surface removal
of portions of the dielectric layers 34-1, 34-2 may comprise
planarizing top and/or bottom surfaces of the dielectric layers
34-1, 34-2. In certain embodiments, such steps may comprise one or
more of mechanical grinding and plasma etching to form the
dielectric layers 34-1, 34-2 with reduced thicknesses. Surface
removal may occur until top surfaces 28' of one or more of the
contact pads 28 are accessible or exposed through the dielectric
layer 34-1 and bottom surfaces 32' of one or more of the mounting
pads 32 are exposed through the dielectric layer 34-2. Notably, the
top surfaces 28' of one or more of the contact pads 28 may be
coplanar with a top surface 34-1' of the dielectric layer 34-1
while at least portions of the metal traces 30 may be completely
embedded within the dielectric layer 34-1.
[0038] Depending on manufacturing tolerances, minor deviations in
height between the top surfaces 28' and the top surfaces 34-1' may
exist such that the respective heights are within plus or minus 1%
of one another while still providing a flat or planar top surface.
In this regard, the substrate 10 may be formed with a generally
flat or planar top surface that provides numerous advantages for
subsequent device assembly steps. For example, solder paste may be
screened across the substrate 10 for soldering electronic die or
components to the contact pads 28. Underfill materials that may be
provided to fill any gaps between electronic die or components and
the substrate 10 may have easier and more direct wicking paths. In
certain applications, deposition of electromagnetic shielding
layers by plating or sputtering may be improved with planar
surfaces of the substrate 10. Certain devices that may be attached
to the substrate 10 may use pin contacts for electrical testing. As
such, electrical testing probes may move easier above the flat
surface of the substrate 10 with reduced substrate damage.
Additionally, post assembly cleaning steps may be improved.
[0039] In a similar manner, the bottom surfaces 32' of one or more
of the mounting pads 32 may be coplanar with a bottom surface 34-2'
of the dielectric layer 34-2. In this regard, the substrate 10 may
be formed with a generally flat or planar bottom surface for
improved mounting and thermal contact with another surface.
Additionally the increased thickness portions 12-1' of the first
conductive layer 12-1 and the increased thickness portions 12-4' of
the fourth conductive layer 12-4 may provide additional improved
thermal spreading or dissipation of heat that may be generated by
electronic die and/or components that are mounted on the substrate
10. In certain embodiments, at least one of the mounting pads 32
comprises a portion that is covered by the second dielectric layer
34-2. In this manner, larger continuous portions of the fourth
conductive layer 12-4 (e.g., ground planes and/or heat sinks) may
be configured with discontinuous exposed surfaces for improved
mounting or soldering to another surface.
[0040] FIG. 7 is a cross-sectional view of the substrate 10 of FIG.
6 after application of surface finish coatings 36-1, 36-2 to the
contact pads 28 and the mounting pads 32, respectively. The surface
finish coatings 36-1, 36-2 may be provided for environmental
protection of exposed portions of the contact pads 28 and the
mounting pads 32. In certain embodiments, the surface finish
coating 36-1 may comprise an organic solderability preservative
(OSP) that selectively bonds to the contact pads 28 for oxidation
prevention until soldering. The surface finish coating 36-2 may
comprise electroless nickel electroless palladium immersion gold
(ENEPIG) to improve solderability and reliability of the mounting
pads 32. While OSP and ENEPIG are provided as examples, other
surface finish coatings may be also be used.
[0041] In certain embodiments, any of the foregoing aspects, and/or
various separate aspects and features as described herein, may be
combined for additional advantage. Any of the various features and
elements as disclosed herein may be combined with one or more other
disclosed features and elements unless indicated to the contrary
herein.
[0042] Those skilled in the art will recognize improvements and
modifications to the preferred embodiments of the present
disclosure. All such improvements and modifications are considered
within the scope of the concepts disclosed herein and the claims
that follow.
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