U.S. patent application number 16/448374 was filed with the patent office on 2020-09-17 for methods for reducing transfer pattern defects in a semiconductor device.
This patent application is currently assigned to APPLIED Materials, Inc.. The applicant listed for this patent is APPLIED Materials, Inc.. Invention is credited to Nadine Alexis, Regina Freed, Steven R. Sherman, Lin Zhou.
Application Number | 20200294802 16/448374 |
Document ID | / |
Family ID | 1000005059799 |
Filed Date | 2020-09-17 |
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United States Patent
Application |
20200294802 |
Kind Code |
A1 |
Freed; Regina ; et
al. |
September 17, 2020 |
METHODS FOR REDUCING TRANSFER PATTERN DEFECTS IN A SEMICONDUCTOR
DEVICE
Abstract
Disclosed are methods for reducing transfer pattern defects in a
semiconductor device. In some embodiments, a method includes
providing a semiconductor device including a plurality of
photoresist lines on a stack of layers, wherein the plurality of
photoresist lines includes a bridge defect extending between two or
more photoresist lines of the plurality of photoresist lines. The
method may further include forming a plurality of mask lines by
etching a set of trenches in a first layer of the stack of layers,
and removing the bridge defect by etching the bridge defect at a
non-zero angle of inclination with respect to a perpendicular to a
plane of an upper surface of the stack of layers.
Inventors: |
Freed; Regina; (Santa Clara,
CA) ; Sherman; Steven R.; (Newton, MA) ;
Alexis; Nadine; (Santa Clara, CA) ; Zhou; Lin;
(San Jose, CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
APPLIED Materials, Inc. |
Santa Clara |
CA |
US |
|
|
Assignee: |
APPLIED Materials, Inc.
Santa Clara
CA
|
Family ID: |
1000005059799 |
Appl. No.: |
16/448374 |
Filed: |
June 21, 2019 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
62818389 |
Mar 14, 2019 |
|
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 21/0337 20130101;
H01L 21/31122 20130101 |
International
Class: |
H01L 21/033 20060101
H01L021/033; H01L 21/311 20060101 H01L021/311 |
Claims
1. A method, comprising: providing a semiconductor device including
a stack of layers, wherein the stack of layer includes a bridge
defect, and wherein the stack of layers comprises: a substrate; a
masking layer atop the substrate; and a patterned photoresist atop
the masking layer; forming a plurality of device features by
etching a set of trenches into the stack of layers; and removing
the bridge defect between two or more device features of the
plurality of device features by etching the bridge defect at a
non-zero angle of inclination with respect to a perpendicular to a
plane of an upper surface of the masking layer.
2. The method of claim 1, further comprising etching a sidewall and
a top surface of the bridge defect to remove the bridge defect.
3. The method of claim 2, further comprising removing the bridge
defect selective to an upper surface of the substrate.
4. The method of claim 1, wherein the plurality of device features
is a plurality of photoresist lines in the patterned
photoresist.
5. The method of claim 1, further comprising etching the masking
layer to form the plurality of features.
6. The method of claim 1, wherein etching the bridge defect
comprises performing one of: an anisotropic reactive ion etch, and
an isotropic reactive ion etch.
7. The method of claim 1, wherein the bridge defect extends between
a first mask line sidewall and a second mask line sidewall, and
wherein the masking layer of the stack of layers is etched in a
direction parallel to the first mask line sidewall and the second
mask line sidewall.
8. The method of claim 1, wherein etching the masking layer of the
stack of layers comprises performing a vertical etch.
9. The method of claim 8, wherein the vertical etch is
perpendicular to the upper surface of the masking layer.
10. The method of claim 1, further comprising providing a line
defect in the patterned photoresist, wherein the line defect is not
present in the masking layer following formation of the set of
trenches.
11. A method for minimizing device defects, comprising: providing a
semiconductor device including a plurality of photoresist lines on
a stack of layers, wherein the plurality of photoresist lines
includes a line defect, and wherein a bridge defect extends between
two or more photoresist lines of the plurality of photoresist
lines; etching the semiconductor device to form a plurality of
masking lines in a masking layer of the stack of layers, wherein
the line defect is not present in the plurality of masking lines;
and removing the bridge defect by etching the bridge defect at a
non-zero angle of inclination with respect to a perpendicular to a
plane of an upper surface of a substrate of the stack of
layers.
12. The method of claim 11, further comprising etching a sidewall
and a top surface of the bridge defect to remove the bridge
defect.
13. The method of claim 12, further comprising removing the bridge
defect selective to the upper surface of the substrate.
14. The method of claim 11, wherein etching the masking layer and
etching the bridge defect comprises performing one of: an
anisotropic reactive ion etch, and an isotropic reactive ion
etch.
15. The method of claim 11, wherein the bridge defect extends
between a first mask line sidewall and a second mask line sidewall,
and wherein etching the bridge defect comprises etching the masking
layer in a direction parallel to the first mask line sidewall and
the second mask line sidewall.
16. The method of claim 11, wherein etching the masking layer of
the stack of layers comprises performing a vertical etch oriented
substantially perpendicular to the upper surface of the
substrate.
17. A method for reducing transfer pattern defects in a
semiconductor device, the method comprising: providing a
semiconductor device including a plurality of photoresist lines on
a stack of layers, wherein the plurality of photoresist lines
includes a line defect, and wherein a bridge defect extends between
two or more photoresist lines of the plurality of photoresist
lines; etching the semiconductor device to form a set of trenches
in a masking layer of the stack of layers, wherein the line defect
is not transferred to the masking layer during formation of the set
of trenches; and removing the bridge defect by etching the bridge
defect at a non-zero angle of inclination with respect to a
perpendicular to a plane of an upper surface of a substrate of the
stack of layers.
18. The method of claim 17, further comprising performing a
reactive ion etch to a sidewall and to a top surface of the bridge
defect to remove the bridge defect, wherein the bridge defect is
removed selective to an upper surface of a substrate of the stack
of layers.
19. The method of claim 17, further comprising etching the
semiconductor device to form a plurality of masking lines from the
masking layer, wherein removing the bridge defect further comprises
etching the masking layer in a direction substantially parallel to
a sidewall of the plurality of masking lines.
20. The method of claim 17, wherein etching the masking layer and
etching the bridge defect comprises performing one of: an
anisotropic reactive ion etch, and an isotropic reactive ion etch.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application claims priority to U.S. Provisional Patent
Application No. 62/818,389, filed Mar. 13, 2019, entitled "Methods
for Reducing Transfer Pattern Defects in a Semiconductor Device,"
and incorporated by reference herein in its entirety.
FIELD
[0002] The present embodiments relate to processing methods, and
more particularly, to selective device etching for bridge and line
defect correction.
BACKGROUND
[0003] In the integrated circuit (IC) industry today, billions of
semiconductor devices are built on a single substrate, generally
referred to as a wafer. The current demands for high density and
performance associated with ultra large-scale integration entail
the use of submicron features, increased transistor and circuit
speeds, and improved reliability.
[0004] Defects, such as line and bridge defects, also known as
nano-bridging, are one of the larger sources of wafer defects
during the lithography step for advanced nodes. Bridge defects are
especially prevalent in extreme ultraviolet (EUV) lithography,
where dose limitation and high photon absorption rate make the
process particularly prone to bridge defects at the bottom of the
features due to an underdeveloped photoresist. Previous
post-processing methods to remove bridge defects are undesirable
because the methods also consume the photoresist. Consuming the
photoresist indiscriminately results in a loss in resist height,
making it difficult to transfer etch patterns.
[0005] Therefore, there is an ongoing need to more effectively
correct bridge and line defects in semiconductor devices.
SUMMARY
[0006] This Summary is provided to introduce a selection of
concepts in a simplified form that are further described below in
the Detailed Description. This Summary is not intended to identify
key features or essential features of the claimed subject matter,
nor is it intended as an aid in determining the scope of the
claimed subject matter.
[0007] In some embodiments, a method may include providing a
semiconductor device including a stack of layers, wherein the stack
of layer includes a bridge defect, and wherein the stack of layers
includes a substrate, a masking layer atop the substrate, and a
patterned photoresist atop the masking layer. The method may
further include forming a plurality of device features by etching a
set of trenches in the stack of layers, and removing the bridge
defect between two or more device features of the plurality of
device features by etching the bridge defect at a non-zero angle of
inclination with respect to a perpendicular to a plane of an upper
surface of the masking layer.
[0008] In some embodiments, a method for minimizing device defects
may include providing a semiconductor device including a plurality
of photoresist lines on a stack of layers, wherein the plurality of
photoresist lines includes a line defect, and wherein a bridge
defect extends between two or more photoresist lines of the
plurality of photoresist lines. The method may further include
etching the semiconductor device to form a plurality of masking
lines in a masking layer of the stack of layers, wherein the line
defect is not present in the plurality of masking lines, and
removing the bridge defect by etching the bridge defect at a
non-zero angle of inclination with respect to a perpendicular to a
plane of an upper surface of a substrate of the stack of
layers.
[0009] In some embodiments, a method for reducing transfer pattern
defects in a semiconductor device may include providing a
semiconductor device including a plurality of photoresist lines on
a stack of layers, wherein the plurality of photoresist lines
includes a line defect, and wherein a bridge defect extends between
two or more photoresist lines of the plurality of photoresist
lines. The method may further include etching the semiconductor
device to form a set of trenches in a masking layer of the stack of
layers, wherein the line defect is not transferred to the masking
layer during formation of the set of trenches. The method may
further include removing the bridge defect by etching the bridge
defect at a non-zero angle of inclination with respect to a
perpendicular to a plane of an upper surface of a substrate of the
stack of layers.
BRIEF DESCRIPTION OF THE DRAWINGS
[0010] FIG. 1 depicts a perspective view of a semiconductor device
including a stack of layers in accordance with embodiments of the
present disclosure.
[0011] FIG. 2 is a perspective view of the semiconductor device of
FIG. 1 including a plurality of trenches formed therein in
accordance with embodiments of the present disclosure.
[0012] FIG. 3 is a side view of the semiconductor device of FIG. 2
in accordance with embodiments of the present disclosure.
[0013] FIG. 4 is a cross-sectional view along cut line 4-4 of FIG.
3 in accordance with embodiments of the present disclosure.
[0014] FIG. 5 is a perspective view of the semiconductor device of
FIG. 4 following a directional etch in accordance with embodiments
of the present disclosure.
[0015] FIG. 6 is a side view of a semiconductor device in
accordance with embodiments of the present disclosure.
[0016] FIG. 7 is a cross-sectional view along cut line 7-7 of FIG.
6 in accordance with embodiments of the present disclosure.
[0017] FIG. 8 is a flowchart illustrating an exemplary method
according to the present disclosure.
[0018] The drawings are not necessarily to scale. The drawings are
merely representations, not intended to portray specific parameters
of the disclosure. The drawings are intended to depict exemplary
embodiments of the disclosure, and therefore are not to be
considered as limiting in scope. In the drawings, like numbering
represents like elements.
[0019] Furthermore, certain elements in some of the figures may be
omitted, or illustrated not-to-scale, for illustrative clarity. The
cross-sectional views may be in the form of "slices", or
"near-sighted" cross-sectional views, omitting certain background
lines otherwise visible in a "true" cross-sectional view, for
illustrative clarity. Furthermore, for clarity, some reference
numbers may be omitted in certain drawings.
DETAILED DESCRIPTION
[0020] Methods in accordance with the present disclosure will now
be described more fully hereinafter with reference to the
accompanying drawings, where embodiments of the methods are shown.
The methods may be embodied in many different forms and are not to
be construed as being limited to the embodiments set forth herein.
Instead, these embodiments are provided so this disclosure will be
thorough and complete, and will fully convey the scope of the
system and method to those skilled in the art.
[0021] Current art approaches do not effectively address line and
bridge defects during lithography and etch processes, as there are
tradeoffs between mitigating broken line defects versus bridging
defects. For example, the EUV dose may be significantly increased
in an attempt to prevent bridge defects, resulting in increased
line defects and decreased wafer throughput.
[0022] Embodiments according to the present disclosure address the
deficiencies of the current art by providing a multi-etch process,
whereby bridging defects and broken line defects can be separately
removed. For example, a first etch process addresses broken line
defects, and a second etch process addresses bridge defects.
Embodiments herein may be particularly effective for small features
sizes (e.g., less than 30 nm pitch).
[0023] Turning now to FIG. 1, there is shown a cross-sectional view
of a semiconductor device (hereinafter "device") 100 according to
various embodiments of the disclosure. As shown, the device 100
includes a stack of layers 101 including a first layer 102 atop a
second layer 104. Although non-limiting, the first layer 102 may be
a masking layer, while the second layer 104 may be a substrate. The
stack of layers 101 may further include a patterned photoresist
105, which is provided over the first layer 102.
[0024] As shown, the patterned photoresist 105 may include a
plurality of device features, such as photoresist lines 106, formed
over the first layer 102. In various embodiments, the plurality of
photoresist lines 106 may form part of a larger pattern of features
disposed on a silicon wafer or other substrate. Accordingly, the
plurality of photoresist lines 106 may be characteristic of many
other similar features disposed on the first layer 102, such as
millions of other similar features. In some non-limiting
embodiments, the plurality of photoresist lines 106 may be part of
a metal oxide EUV resist. In some embodiments, each of the
plurality of photoresist lines 106 may have a uniform height and
width across the device 100. In other embodiments, the plurality of
device features may include one or more cut masks, such as a series
of short line segments or elongated ovals.
[0025] As shown, the stack of layers 101 may include at least one
device defect, such as a line defect 108 in the form of an
indentation, void, or break in the plurality of photoresist lines
106. Furthermore, the plurality of photoresist lines 106 may
include one or more bridge defects 110 extending between two or
more photoresist lines of the plurality of photoresist lines 106.
As shown, the bridge defects 110 may include portions of the
patterned photoresist 105 unintentionally left remaining after
patterning. In some examples, the bridge defects 110 extend only
partially up sidewall surfaces 112 of the plurality of photoresist
lines 106 from a top surface 114 of the first layer 102. In other
embodiments, the bridge defects 110 extend to a top surface 115 of
the patterned photoresist 105. As shown, the bridge defects 110 may
be oriented perpendicular to a primary length axis (e.g., z-axis)
of each of the plurality of photoresist lines 106. Although shown
in the patterned photoresist 105, it will be appreciated that the
line defect 108 and the bridge defect 110 may be present in any
layer of the stack of layers 101.
[0026] In some embodiments, the first layer 102 may include
multiple layers. For example, the first layer 102 may be a stack of
layers including, but not limited to, an under layer, a carbon
layer, a first dielectric layer, a metal dielectric, and a second
dielectric layer. The approaches herein can be used to remove one
or more defects present within a layer of the stack of layer making
up the first layer 102. In one example, when an adhesion layer and
multiple hard mask material layers are present beneath the
patterned photoresist 105, it's possible to selectively push any of
the multiple hard mask material layers. In other embodiments,
defects may be removed from a memorization layer, for example, an
oxide layer of the second layer 104.
[0027] As further shown in FIG. 1, a first etch process 118 may
then be performed to the device 100. In some examples, the first
etch process 118 may be a vertical/anisotropic reactive ion etch
(RIE), which results in the structure of the device 100
demonstrated in FIGS. 2-3. As shown, a set of trenches 120 may be
formed in the stack of layers 101 by etching the first layer 102.
The first etch process 118 may be selective to an upper surface 124
of the second layer 104, for example, in those areas of the
trenches 120 without bridge defects 110.
[0028] Once patterned, the first layer 102 may include a plurality
of mask lines 122, wherein the line defects 108 (FIG. 1) are not
transferred to the plurality of mask lines 122. The bridge defects
110 may be transferred to the first layer 102, however. As
demonstrated in FIG. 3, the bridge defects 110 may extend between a
first mask line sidewall 113A and a second mask line sidewall 113B
of the plurality of mask lines 122.
[0029] In FIG. 4, the bridge defects 110 may be removed by
performing a second etch process 126 delivered at a non-zero angle
of inclination (.beta.) with respect to a perpendicular 128 to a
plane defined by the upper surface of 124 of the second layer 104.
Although non-limiting, the non-zero angle of inclination may be
approximately 60.degree.. To remove the bridge defects 110, the
second etch process 126 is operable to impact a sidewall 130 and a
top surface 131 thereof. As shown, the second etch process 126 may
be delivered substantially parallel to a plane defined by the
sidewall surface 113A of the plurality of mask lines 122. In
various embodiments, the second etch process 126 is an anisotropic
reactive ion etch or an isotropic reactive ion etch. Following the
second etch process 126, the bridge defects 110 may be removed
selective to the upper surface of 124 of the second layer 104,
resulting in the structure shown in FIG. 5.
[0030] The multi-etch process demonstrated in FIGS. 1-5 overcomes
the deficiencies of the current art by providing a multi-etch
process, whereby bridging defects and broken line defects can be
separately removed. For example, any line defects present in the
plurality of photoresist lines 106 are not transferred to the mask
lines during the first etch process 118 (FIG. 1). Furthermore, as a
result of the second etch process 126 (FIG. 4), the bridge defects
110 present within the trenches 120 may be eliminated or
substantially reduced.
[0031] Referring now to FIG. 6, a device 200 according to
embodiments of the present disclosure will be described in greater
detail. The device 200 may be similar in many respects to the
device 100 in FIGS. 1-5. As such, only certain aspects of the
device 200 will hereinafter be described for the sake of brevity.
FIG. 6 demonstrates the device 200 following a first etch process,
such as a vertical RIE, wherein a set of trenches 220 are formed in
a stack of layers 202 by etching the first layer 202. Once
patterned, the first layer 202 may include a plurality of mask
lines 222. Notably, should a layer of photoresist material 248
contain a line defect, that line defect is not present in the
plurality of mask lines 222. In some cases, it's possible for
bridge defects 210 to be transferred to the first layer 202. As
shown, the bridge defects 210 may be formed between a first mask
line sidewall 213A and a second mask line sidewall 213B.
[0032] In FIG. 7, the bridge defects 210 are removed by performing
a second etch process 226 delivered at a non-zero angle of
inclination (.beta.) with respect to a perpendicular 228 to a plane
defined by an upper surface of 224 of the second layer 204.
Although non-limiting, the non-zero angle of inclination may be
approximately 60.degree.. To remove the bridge defects 210, the
ions of the second etch process 226 are configured to impact a
sidewall 230 thereof. As shown, the second etch process 226 may be
delivered substantially parallel to a plane defined by the sidewall
surface 213B of the plurality of mask lines 222. In various
embodiments, the second etch process 226 is an anisotropic reactive
ion etch or an isotropic reactive ion etch. Following the second
etch process 226, the bridge defects 210 may be removed selective
to the upper surface of 224 of the second layer 204.
[0033] In the embodiment shown in FIGS. 6-7, the layer of
photoresist material 248 may remain atop the mask lines 222
following the first etch process to protect the mask lines 222
during the second etch process 226. In some embodiments, the second
etch process 226 recesses or substantially removes the layer of
photoresist material 248.
[0034] Referring now to FIG. 8, a flow diagram illustrating an
exemplary method 300 for eliminating or greatly reducing defects
from a semiconductor device in accordance with the present
disclosure is shown. The method 300 will be understood in
conjunction with the representations shown in FIGS. 1-5.
[0035] At block 301, the method 300 may include providing a
semiconductor device including a plurality of photoresist features
on a stack of layers, wherein the plurality of photoresist features
includes a bridge defect extending between two or more photoresist
lines of the plurality of photoresist lines. In some embodiments,
at least one photoresist line of the plurality of photoresist lines
includes a line defect. In some embodiments, the stack of layers
includes a masking layer atop a substrate. In some embodiments, the
bridge defect extends just partially up a sidewall of the plurality
of photoresist lines. In some embodiments, the bridge defect
extends along an upper surface of the stack of layers. In some
embodiments, each of the plurality of photoresist lines has a
uniform height except in those areas including a line defect. Each
of the plurality of photoresist lines may also have a uniform width
except in those areas including a bridge defect.
[0036] At block 303, the method 300 may include forming a plurality
of mask lines by etching a set of trenches in a first layer of the
stack of layers. In some embodiments, the line defect is not
transferred to the first layer. In some embodiments, the first
layer is etched using a vertical RIE.
[0037] At block 305, the method 300 may further include removing
the bridge defect by etching the bridge defect at a non-zero angle
of inclination with respect to a perpendicular to a plane of an
upper surface of the stack of layers. In some embodiments, the
method may include etching the bridge defect between the plurality
of mask lines. In some embodiments, the etch may be an anisotropic
or isotropic reactive ion etch reactive ion etch. In some
embodiments, the non-zero angle of inclination is approximately
60.degree..
[0038] The foregoing discussion has been presented for purposes of
illustration and description and is not intended to limit the
disclosure to the form or forms disclosed herein. For example,
various features of the disclosure may be grouped together in one
or more aspects, embodiments, or configurations for the purpose of
streamlining the disclosure. One of skill in the art will
understand various features of the certain aspects, embodiments, or
configurations of the disclosure may be combined in alternate
aspects, embodiments, or configurations. Moreover, the following
claims are hereby incorporated into this Detailed Description by
this reference, with each claim standing on its own as a separate
embodiment of the present disclosure.
[0039] As used herein, an element or step recited in the singular
and proceeded with the word "a" or "an" should be understood as not
excluding plural elements or steps, unless such exclusion is
explicitly recited. Furthermore, references to "one embodiment" of
the present disclosure are not intended to be interpreted as
excluding the existence of additional embodiments also
incorporating the recited features.
[0040] The use of "including," "comprising," or "having" and
variations thereof herein is meant to encompass the items listed
thereafter and equivalents thereof as well as additional items.
Accordingly, the terms "including," "comprising," or "having" and
variations thereof are open-ended expressions and can be used
interchangeably herein.
[0041] The phrases "at least one", "one or more", and "and/or", as
used herein, are open-ended expressions, including conjunctive and
disjunctive, in operation. For example, each of the expressions "at
least one of A, B and C", "at least one of A, B, or C", "one or
more of A, B, and C", "one or more of A, B, or C" and "A, B, and/or
C" means A alone, B alone, C alone, A and B together, A and C
together, B and C together, or A, B and C together.
[0042] All directional references (e.g., proximal, distal, upper,
lower, upward, downward, left, right, lateral, longitudinal, front,
back, top, bottom, above, below, vertical, horizontal, radial,
axial, clockwise, and counterclockwise) are only used for
identification purposes to aid the reader's understanding of the
present disclosure. The directional references do not create
limitations, particularly as to the position, orientation, or use
of this disclosure. Connection references (e.g., attached, coupled,
connected, and joined) are to be construed broadly and may include
intermediate members between a collection of elements and relative
movement between elements unless otherwise indicated. As such,
connection references do not necessarily infer two elements are
directly connected and in fixed relation to each other.
[0043] Furthermore, the terms "substantial" or "substantially," as
well as the terms "approximate" or "approximately," can be used
interchangeably in some embodiments, and can be described using any
relative measures acceptable by one of ordinary skill in the art.
For example, these terms can serve as a comparison to a reference
parameter, to indicate a deviation capable of providing the
intended function. Although non-limiting, the deviation from the
reference parameter can be, for example, in an amount of less than
1%, less than 3%, less than 5%, less than 10%, less than 15%, less
than 20%, and so on.
[0044] Still furthermore, although the illustrative method 300 is
described above as a series of acts or events, the present
disclosure is not limited by the illustrated ordering of such acts
or events unless specifically stated. For example, some acts may
occur in different orders and/or concurrently with other acts or
events apart from those illustrated and/or described herein, in
accordance with the disclosure. In addition, not all illustrated
acts or events may be necessary to implement a methodology in
accordance with the present disclosure. Furthermore, the method 300
may be implemented in association with the formation and/or
processing of structures illustrated and described herein as well
as in association with other structures not illustrated.
[0045] The term "substrate" used herein is intended to include a
semiconductor substrate, a semiconductor epitaxial layer deposited
or otherwise formed on a semiconductor substrate and/or any other
type of semiconductor body, and all such structures are
contemplated as falling within the scope of the present
embodiments. For example, the semiconductor substrate may comprise
a semiconductor wafer (e.g., silicon, SiGe, or an SOI wafer) or one
or more die on a wafer, and any epitaxial layers or other type
semiconductor layers formed there over or associated therewith. A
portion or entire semiconductor substrate may be amorphous,
polycrystalline, or single-crystalline. In addition to the
aforementioned types of substrates, the semiconductor substrate
employed in the present embodiments may also comprise a hybrid
oriented (HOT) semiconductor substrate having surface regions of
different crystallographic orientation. The semiconductor substrate
may be doped, undoped, or contain doped regions and undoped regions
therein. The semiconductor substrate may contain regions with
strain and regions without strain therein, or contain regions of
tensile strain and compressive strain.
[0046] The present disclosure is not to be limited in scope by the
specific embodiments described herein. Indeed, other various
embodiments of and modifications to the present disclosure, in
addition to those described herein, will be apparent to those of
ordinary skill in the art from the foregoing description and
accompanying drawings. Thus, such other embodiments and
modifications are intended to fall within the scope of the present
disclosure. Furthermore, the present disclosure has been described
herein in the context of a particular implementation in a
particular environment for a particular purpose. Those of ordinary
skill in the art will recognize the usefulness is not limited
thereto and the present disclosure may be beneficially implemented
in any number of environments for any number of purposes. Thus, the
claims set forth below are to be construed in view of the full
breadth and spirit of the present disclosure as described
herein.
[0047] In view of the foregoing, at least the following advantages
are achieved by the embodiments disclosed herein. Firstly, by
addressing line and bridge defects separately, the first etch
process described herein may optimize a transfer pattern without
broken line defects, as any bridge defects are not specifically
targeted during the first etch. Secondly, by performing a second,
directional etch process to remove bridge defects, line/space
critical dimension (CD) and line edge roughness (LER)/line width
roughness (LWR) requirements may be maintained.
[0048] While certain embodiments of the disclosure have been
described herein, the disclosure is not limited thereto, as the
disclosure is as broad in scope as the art will allow and the
specification may be read likewise. Therefore, the above
description is not to be construed as limiting. Instead, the above
description is merely as exemplifications of particular
embodiments. Those skilled in the art will envision other
modifications within the scope and spirit of the claims appended
hereto.
* * * * *