loadpatents
Patent applications and USPTO patent grants for Freed; Regina.The latest application filed is for "photoresists by physical vapor deposition".
Patent | Date |
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Fully self-aligned via Grant 11,437,274 - Freed , et al. September 6, 2 | 2022-09-06 |
Self-aligned contact and contact over active gate structures Grant 11,437,273 - Shusterman , et al. September 6, 2 | 2022-09-06 |
Photoresists By Physical Vapor Deposition App 20220197146 - Bagby; Lauren ;   et al. | 2022-06-23 |
Methods of etching metal oxides with less etch residue Grant 11,232,955 - Mullick , et al. January 25, 2 | 2022-01-25 |
DRAM Capacitor Module App 20220013624 - Mitra; Uday ;   et al. | 2022-01-13 |
Vapor Phase Photoresists Deposition App 20220002869 - Kalutarage; Lakmal Charidu ;   et al. | 2022-01-06 |
Vapor Phase Thermal Etch Solutions For Metal Oxo Photoresists App 20220002882 - Kalutarage; Lakmal Charidu ;   et al. | 2022-01-06 |
Dry Develop Process Of Photoresist App 20220004105 - Dai; Yuqiong ;   et al. | 2022-01-06 |
Methods for reducing transfer pattern defects in a semiconductor device Grant 11,217,448 - Freed , et al. January 4, 2 | 2022-01-04 |
Fully Self-aligned Subtractive Etch App 20210391215 - Feng; Lili ;   et al. | 2021-12-16 |
DRAM capacitor module Grant 11,164,938 - Mitra , et al. November 2, 2 | 2021-11-02 |
Methods For Controllable Metal And Barrier-Liner Recess App 20210305091 - Ren; He ;   et al. | 2021-09-30 |
Methods and apparatus for performing profile metrology on semiconductor structures Grant 11,133,152 - Freed , et al. September 28, 2 | 2021-09-28 |
Methods for controllable metal and barrier-liner recess Grant 11,062,942 - Ren , et al. July 13, 2 | 2021-07-13 |
Selective removal process to create high aspect ratio fully self-aligned via Grant 11,037,825 - Mullick , et al. June 15, 2 | 2021-06-15 |
Fully Self-Aligned Via App 20210090952 - Freed; Regina ;   et al. | 2021-03-25 |
Methods for removing metal oxides Grant 10,892,183 - Mullick , et al. January 12, 2 | 2021-01-12 |
Method for creating a fully self-aligned via Grant 10,892,187 - Freed , et al. January 12, 2 | 2021-01-12 |
Selective Removal Process To Create High Aspect Ratio Fully Self-Aligned Via App 20200388535 - Mullick; Amrita B. ;   et al. | 2020-12-10 |
Methods For Reducing Transfer Pattern Defects In A Semiconductor Device App 20200357639 - Freed; Regina ;   et al. | 2020-11-12 |
DRAM Capacitor Module App 20200312953 - Mitra; Uday ;   et al. | 2020-10-01 |
Selective removal process to create high aspect ratio fully self-aligned via Grant 10,790,191 - Mullick , et al. September 29, 2 | 2020-09-29 |
Methods And Apparatus For Performing Profile Metrology On Semiconductor Structures App 20200300618 - FREED; REGINA ;   et al. | 2020-09-24 |
Methods For Reducing Transfer Pattern Defects In A Semiconductor Device App 20200294802 - Freed; Regina ;   et al. | 2020-09-17 |
Methods for reducing transfer pattern defects in a semiconductor device Grant 10,777,414 - Freed , et al. Sept | 2020-09-15 |
Self-aligned Contact And Contact Over Active Gate Structures App 20200279773 - Shusterman; Yuriy ;   et al. | 2020-09-03 |
Methods Of Etching Metal Oxides With Less Etch Residue App 20200227275 - Mullick; Amrita B. ;   et al. | 2020-07-16 |
Method for creating a fully self-aligned via Grant 10,699,953 - Mullick , et al. | 2020-06-30 |
Methods And Apparatus For Patterning Substrates Using Asymmetric Physical Vapor Deposition App 20200135464 - KESAPRAGADA; SREE RANGASAI V. ;   et al. | 2020-04-30 |
System and method for fault isolation by emission spectra analysis Grant 10,620,263 - Deslandes , et al. | 2020-04-14 |
Methods of etching metal oxides with less etch residue Grant 10,622,221 - Mullick , et al. | 2020-04-14 |
Fully Self-aligned Via App 20200098633 - Zhang; Ying ;   et al. | 2020-03-26 |
Methods of producing self-aligned vias Grant 10,600,688 - Zhang , et al. | 2020-03-24 |
Selectively etched self-aligned via processes Grant 10,593,594 - Lin , et al. | 2020-03-17 |
Methods of producing self-aligned grown via Grant 10,573,555 - Zhang , et al. Feb | 2020-02-25 |
Methods of producing fully self-aligned vias and contacts Grant 10,553,485 - Zhang , et al. Fe | 2020-02-04 |
Fully self-aligned via Grant 10,522,404 - Zhang , et al. Dec | 2019-12-31 |
Method For Creating A Fully Self-Aligned Via App 20190378756 - Mullick; Amrita B. ;   et al. | 2019-12-12 |
Method For Creating A Fully Self-Aligned Via App 20190355620 - Freed; Regina ;   et al. | 2019-11-21 |
Selective Removal Process To Create High Aspect Ratio Fully Self-Aligned Via App 20190348322 - Mullick; Amrita B. ;   et al. | 2019-11-14 |
Fully Self-Aligned Via App 20190348323 - Zhang; Ying ;   et al. | 2019-11-14 |
Fully self-aligned via Grant 10,424,507 - Zhang , et al. Sept | 2019-09-24 |
Fully self-aligned via Grant 10,410,921 - Zhang , et al. Sept | 2019-09-10 |
Methods for Removing Metal Oxides App 20190273019 - Mullick; Amrita B. ;   et al. | 2019-09-05 |
Methods Of Etching A Tungsten Layer App 20190198392 - MULLICK; AMRITA B. ;   et al. | 2019-06-27 |
Methods For Controllable Metal And Barrier-Liner Recess App 20190198389 - Ren; He ;   et al. | 2019-06-27 |
Fully Self-Aligned Via App 20190189512 - Zhang; Ying ;   et al. | 2019-06-20 |
Methods Of Etching Metal Oxides With Less Etch Residue App 20190189456 - Mullick; Amrita B. ;   et al. | 2019-06-20 |
Selectively Etched Self-Aligned Via Processes App 20190189510 - Lin; Yung-Chen ;   et al. | 2019-06-20 |
Methods Of Producing Self-Aligned Vias App 20190074219 - Zhang; Ying ;   et al. | 2019-03-07 |
Methods Of Producing Self-aligned Grown Via App 20190067103 - Zhang; Ying ;   et al. | 2019-02-28 |
Methods Of Producing Fully Self-Aligned Vias And Contacts App 20180374750 - Zhang; Ying ;   et al. | 2018-12-27 |
System And Method For Fault Isolation By Emission Spectra Analysis App 20180328985 - Deslandes; Herve ;   et al. | 2018-11-15 |
Fully Self-Aligned Via App 20180286749 - Zhang; Ying ;   et al. | 2018-10-04 |
System and method for fault isolation by emission spectra analysis Grant 10,041,997 - Deslandes , et al. August 7, 2 | 2018-08-07 |
System And Method For Fault Isolation By Emission Spectra Analysis App 20150260789 - Deslandes; Herve ;   et al. | 2015-09-17 |
Electron reflector with multiple reflective modes Grant 8,089,051 - Grella , et al. January 3, 2 | 2012-01-03 |
Electron Reflector With Multiple Reflective Modes App 20110204251 - GRELLA; Luca ;   et al. | 2011-08-25 |
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