U.S. patent application number 16/014103 was filed with the patent office on 2019-12-26 for shallow trench isolation for integrated circuits.
This patent application is currently assigned to Taiwan Semiconductor Manufacturing Co., Ltd.. The applicant listed for this patent is Taiwan Semiconductor Manufacturing Co., Ltd.. Invention is credited to Hsin-Chi Chen, Kun-Tsang Chuang, Gulbagh SINGH.
Application Number | 20190393078 16/014103 |
Document ID | / |
Family ID | 68806002 |
Filed Date | 2019-12-26 |
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United States Patent
Application |
20190393078 |
Kind Code |
A1 |
SINGH; Gulbagh ; et
al. |
December 26, 2019 |
SHALLOW TRENCH ISOLATION FOR INTEGRATED CIRCUITS
Abstract
The present disclosure describes a fabrication method that can
form air-gaps in shallow trench isolation structures (STI)
structures. For example, the method includes patterning a
semiconductor layer over a substrate to form semiconductor islands
and oxidizing the sidewall surfaces of the semiconductor islands to
form first liners on the sidewall surfaces. Further, the method
includes depositing a second liner over the first liners and the
substrate and depositing a first dielectric layer between the
semiconductor islands. The second liner between the first
dielectric layer and the first liners is removed to form openings
between the first dielectric layer and the first liners. A second
dielectric layer is deposited over the first dielectric layer to
enclose the openings and form air-gaps between the first dielectric
layer and the first liners so that the gaps are positioned along
the first liners.
Inventors: |
SINGH; Gulbagh; (Hsinchu,
TW) ; Chen; Hsin-Chi; (Tainan City, TW) ;
Chuang; Kun-Tsang; (Miaoli County, TW) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Taiwan Semiconductor Manufacturing Co., Ltd. |
Hsinchu |
|
TW |
|
|
Assignee: |
Taiwan Semiconductor Manufacturing
Co., Ltd.
Hsinchu
TW
|
Family ID: |
68806002 |
Appl. No.: |
16/014103 |
Filed: |
June 21, 2018 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 27/1203 20130101;
H01L 21/76283 20130101; H01L 21/76205 20130101; H01L 21/76289
20130101; H01L 27/1211 20130101 |
International
Class: |
H01L 21/762 20060101
H01L021/762; H01L 27/12 20060101 H01L027/12 |
Claims
1. A structure, comprising: semiconductor islands formed over a
substrate; a liner disposed on each sidewall of the semiconductor
islands; and an isolation structure disposed between the
semiconductor islands and comprising an air-gap formed along each
liner.
2. The structure of claim 1, further comprising: an insulator layer
interposed between the substrate and the semiconductor islands.
3. The structure of claim 1, wherein the liners comprise a silicon
oxide layer.
4. The structure of claim 1, wherein a top surface of the isolation
structure is divot-free.
5. The structure of claim 1, wherein a top surface of the isolation
structure comprises a divot above the air-gap.
6. The structure of claim 2, wherein the isolation structure
comprises a silicon nitride layer and an oxide layer disposed
thereon.
7. The structure of claim 6, wherein the silicon nitride layer is
disposed between air-gaps formed along liners of adjacent
semiconductor islands.
8. The structure of claim 1, wherein the air-gap has a width
between about 10 nm and about 25 nm.
9. An integrated circuit (IC), comprising: an insulating layer; a
semiconductor layer disposed on the insulating layer and
comprising: semiconductor islands; a liner disposed on each
sidewall of the semiconductor islands; an isolation structure
between the semiconductor islands comprising: an oxide layer with
an air-pocket disposed along the liner of each sidewall of the
semiconductor islands; and a nitride layer disposed between the
insulating layer and the oxide layer; and a field effect transistor
formed on one or more of the semiconductor islands.
10. The IC of claim 9, wherein the liner comprises a silicon oxide
layer.
11. The IC of claim 9, wherein the air-pocket is embedded in the
oxide layer and has a width between about 10 nm and about 25
nm.
12. The IC of claim 9, wherein a top surface of the isolation
structure is not coplanar with a top surface of the semiconductor
islands.
13. The IC of claim 9, wherein the air-pocket comprises a cavity
filled with a gas or a mixture of gases.
14. The IC of claim 9, wherein the air-pocket extends through the
oxide layer to the insulating layer.
15. The IC of claim 9, wherein the semiconductor layer further
comprising: an other isolation structure between two other
semiconductor islands free from air-pockets.
16. A method, comprising: patterning a semiconductor layer over a
substrate to form semiconductor islands; oxidizing sidewall
surfaces of the semiconductor islands to form first liners on the
sidewall surfaces; depositing a second liner over the first liners
and the substrate; depositing a first dielectric layer between the
semiconductor islands; removing the second liner between the first
dielectric layer and the first liners to form openings between the
first dielectric layer and the first liners; and depositing a
second dielectric layer over the first dielectric layer to enclose
the openings and form air-gaps between the first dielectric layer
and the first liners, wherein the air-gaps are positioned along the
first liners.
17. The method of claim 16, wherein a width of the air-gaps is
based on a thickness of the second liner.
18. The method of claim 16, wherein removing the second liner
comprises selectively wet etching the second liner.
19. The method of claim 16, further comprising: forming an
insulator layer between the semiconductor layer and the
substrate.
20. The method of claim 16, wherein the second liner comprises
silicon nitride.
Description
BACKGROUND
[0001] The rapid growth in smartphones, tablet personal computers
(PCs), and other mobile consumer applications has increased the
demand for chips based on radio frequency (RF)
semiconductor-on-insulator (SOI) technology, particularly for
antenna interface components and RF front-end-module (FEM)
components like RF switches and antenna tuners.
BRIEF DESCRIPTION OF THE DRAWINGS
[0002] Aspects of the present disclosure are best understood from
the following detailed description when read with the accompanying
figures. It is noted that, in accordance with common practice in
the industry, various features are not drawn to scale. In fact, the
dimensions of the various features may be arbitrarily increased or
reduced for clarity of discussion.
[0003] FIG. 1 is a flow diagram of a fabrication method that
describes the formation of air-gaps along the sidewall surfaces of
isolation structures, in accordance with some embodiments.
[0004] FIG. 2 is a cross-sectional view of a semiconductor layer
over a substrate, in accordance with some embodiments.
[0005] FIG. 3 is a cross-sectional view of a semiconductor layer
over a substrate after the formation of a photoresist layer over
the semiconductor layer, in accordance with some embodiments
[0006] FIG. 4 is a cross-sectional view of a semiconductor layer
over a substrate after the formation of patterned photoresist
structures over the semiconductor layer, in accordance with some
embodiments.
[0007] FIG. 5 is a cross-sectional view of semiconductor structures
over a substrate, in accordance with some embodiments.
[0008] FIG. 6 is a cross-sectional view of semiconductor structures
over a substrate after the formation of a first liner over the
sidewalls of the semiconductor structures, in accordance with some
embodiments.
[0009] FIG. 7 is a cross-sectional view of semiconductor structures
over a substrate after the formation of a second liner over the
semiconductor structures, in accordance with some embodiments.
[0010] FIG. 8 is a cross-sectional view of semiconductor structures
over a substrate after the deposition of a first dielectric, in
accordance with some embodiments.
[0011] FIG. 9 is a cross-sectional view of isolation structures
over a substrate after the etch process of a first dielectric, in
accordance with some embodiments.
[0012] FIG. 10 is a cross-sectional view of isolation structures
over a substrate after the removal of the second liner, in
accordance with some embodiments.
[0013] FIG. 11 is a cross-sectional view of isolation structures
over a substrate after the deposition of a second dielectric to
form air-gaps, in accordance with some embodiments.
[0014] FIG. 12 is a cross-sectional view of isolation structures
over a substrate with air-gaps therein, in accordance with some
embodiments.
[0015] FIG. 13 is a cross-sectional view of different types of
isolation structures over a substrate, in accordance with some
embodiments.
[0016] FIG. 14 is a cross-sectional view of isolation structures
with air-gaps between semiconductor structures with devices
thereon, in accordance with some embodiments.
DETAILED DESCRIPTION
[0017] The following disclosure provides many different
embodiments, or examples, for implementing different features of
the provided subject matter. Specific examples of components and
arrangements are described below to simplify the present
disclosure. These are, of course, merely examples and are not
intended to be limiting. For example, the formation of a first
feature over a second feature in the description that follows may
include embodiments in which the first and second features are
formed in direct contact, and may also include embodiments in which
additional features may be formed that are between the first and
second features, such that the first and second features are not in
direct contact.
[0018] Further, spatially relative terms, such as "beneath,"
"below," "lower," "above," "upper" and the like, may be used herein
for ease of description to describe one element or feature's
relationship to another element(s) or feature(s) as illustrated in
the figures. The spatially relative terms are intended to encompass
different orientations of the device in use or operation in
addition to the orientation depicted in the figures. The apparatus
may be otherwise oriented (rotated 90 degrees or at other
orientations) and the spatially relative descriptors used herein
may likewise be interpreted accordingly.
[0019] The term "nominal" as used herein refers to a desired, or
target, value of a characteristic or parameter for a component or a
process operation, set during the design phase of a product or a
process, together with a range of values above and/or below the
desired value. The range of values is typically due to slight
variations in manufacturing processes or tolerances.
[0020] The term "substantially" as used herein indicates the value
of a given quantity that can vary based on a particular technology
node associated with the subject semiconductor device. Based on the
particular technology node, the term "substantially" can indicate a
value of a given quantity that varies within, for example, .+-.5%
of a target (or intended) value.
[0021] The term "about" as used herein indicates the value of a
given quantity that can vary based on a particular technology node
associated with the subject semiconductor device. Based on the
particular technology node, the term "about" can indicate a value
of a given quantity that varies within, for example, 5-30% of the
value (e.g., .+-.5%, .+-.10%, .+-.20%, or .+-.30% of the
value).
[0022] The term "vertical," as used herein, means nominally
perpendicular to the surface of a substrate.
[0023] The term "insulating layer", as used herein, refers to a
layer that functions as an electrical insulator (e.g., a
liner).
[0024] Embodiments of the present disclosure may be applicable to
fin field effect transistors ("finFETs"). The "fins" in finFETs may
be patterned by any suitable method. For example, the fins may be
patterned using one or more photolithography processes, including
double-patterning or multi-patterning processes. Generally,
double-patterning or multi-patterning processes combine
photolithography and self-aligned processes, allowing patterns to
be created that have, for example, pitches smaller than what is
otherwise obtainable using a single, direct photolithography
process. For example, in one embodiment, a sacrificial layer is
formed over a substrate and patterned using a photolithography
process. Spacers are formed alongside the patterned sacrificial
layer using a self-aligned process. The sacrificial layer is then
removed, and the remaining spacers may then be used to pattern the
fins.
[0025] A radio frequency (RF) front-end module (FEM) requires
integration of multiple RF functions, including for example antenna
low noise amplifiers (LNA), power amplifiers (PA), antenna tuning
switches, transceivers, as well as digital processing and power
management. Each RF FEM component can include a large number of
field effect transistors (FETs) that are electrically isolated by
shallow trench isolation (STI) structures. In addition to the
electrical isolation, the STI structures can provide protection
against parasitic coupling that can occur between adjacent FETs
during normal device operation.
[0026] However, as the devices are continuously scaled down from
one technology generation to the next, capacitive coupling between
adjacent FETs can become more prominent. This is because the FETs
are packed closer together and the space available for the STI
structures, which are disposed between them, can be further
reduced. Isolating highly packed FETs from parasitic capacitance
coupling can be challenging for operating frequencies in the GHz
range. Additionally, as the edge of the STI structures between the
FETs comes closer to the channel region of each FET, unintentional
compressive stress can be introduced to the channel region, which
can be detrimental for the FET's performance (e.g., for the n-type
FET's performance). For example, the unintentional compressive
stress in the vicinity of the channel region can impact the
electron mobility and, therefore, the current output of the
NFETs.
[0027] The embodiments described herein are directed to a method
that forms STI structures with air-gaps (air-pockets or cavities).
The air-gaps, which can be formed along the sidewalls of the STI
structures, can serve multiple purposes. In some embodiments, the
STI structures with air-gaps can provide both enhanced electrical
isolation between the FETs and protection against parasitic
capacitance coupling when the device operates in the GHz range.
This is because the air-gaps can lower the overall dielectric
constant of the STI material (e.g., lower than 3.9). Further, due
to the presence of air gaps, the STI structures can mitigate the
compressive stress on the channel region of a neighboring FET, even
if the edge of the STI structure is close to the channel region
(e.g., within about 0.5 .mu.m).
[0028] FIG. 1 is a flow chart of fabrication method 100, according
to some embodiments. Fabrication method 100 describes the formation
of air-gaps along the sidewall surfaces of STI structures.
Fabrication method 100 can be used to form air-gaps either on
selective STI structures or on all the STI structures of the
substrate (e.g., the wafer). Other, or additional, fabrication
operations may be performed between the various operations of
fabrication method 100. These fabrication operations are omitted
merely for clarity.
[0029] Fabrication method 100 begins with operation 110, where a
semiconductor layer is patterned over a substrate to form
semiconductor structures. FIGS. 2-5 will be used to describe
operation 110. For example, FIG. 2 is a cross-sectional view of
semiconductor layer 200 over substrate 210. In some embodiments,
substrate 210 can be a bulk silicon wafer with a dielectric layer
220 formed thereon and a top semiconductor layer 200. Dielectric
layer 220 can be an oxide, such as silicon oxide (e.g., buried
oxide layer), sapphire, or another suitable dielectric layer on
which semiconductor layer 200 can be grown, attached, or otherwise
formed. By way of example and not limitation, dielectric layer 220
is thicker than semiconductor layer 200. Further, dielectric layer
220 electrically isolates semiconductor layer 200 from substrate
210. In some embodiments, semiconductor layer 200 is directly on
silicon substrate 210. In this case, substrate 210 can be a
high-resistivity (HR) bulk silicon substrate. In other words,
current cannot flow from semiconductor layer 200 to substrate
210.
[0030] According to some embodiments, semiconductor layer 200 can
include (i) silicon, (ii) a compound semiconductor such as gallium
arsenide (GaAs), gallium phosphide (GaP), indium phosphide (InP),
indium arsenide (InAs), and/or indium antimonide (InSb), (iii) an
alloy semiconductor including silicon germanium (SiGe), gallium
arsenide phosphide (GaAsP), aluminum indium arsenide (AlInAs),
aluminum gallium arsenide (AGaAs), gallium indium arsenide
(GaInAs), gallium indium phosphide (GaInP), and/or gallium indium
arsenide phosphide (GaInAsP), or (iv) combinations thereof.
[0031] For example purposes, semiconductor layer 200 in fabrication
method 100 will be described in the context of a top silicon layer
of a silicon-on-insulator substrate (e.g., SOI wafer). Based on the
disclosure herein, other materials, as discussed above, can be
used. These materials are within the spirit and scope of this
disclosure.
[0032] Referring to FIG. 3, a stack including a bottom oxide layer
300 and a top nitride layer 310 are deposited over semiconductor
layer 200. By way of example and not limitation, oxide layer 300
can include silicon oxide, and nitride layer 310 can include
silicon nitride. Oxide layer 300 can be a capping layer that
protects the top surface of semiconductor layer 200 during
subsequent processing. By way of example and not limitation,
nitride layer 310 can function as a stop layer in subsequent
operations of fabrication method 100.
[0033] A photoresist layer 320 can be deposited over nitride layer
310. A bottom antireflective coating (BARC), which is not shown in
FIG. 3, can be interposed between photoresist layer 320 and nitride
layer 310. The BARC layer can suppress light reflections during a
subsequent ultra violet (UV) or extreme ultra violet (EUV) light
exposure of photoresist layer 320 and minimize undesirable
generation of standing waves during the exposure process. Standing
waves can increase the edge roughness of the resulting patterned
photoresist structures. The BARC layer can also form a flat
surface, on which photoresist layer 320 can be formed, by operating
as a filler that fills small imperfections of the top surface of
nitride layer 310.
[0034] Photoresist layer 320 can be patterned so that patterned
photoresist structures 400 are formed over nitride layer 310, as
shown in FIG. 4. Patterning of photoresist layer 320 can be
accomplished by exposing photoresist layer 320 to UV or EUV light
through a reticle (photomask) and subsequently removing unexposed
(or exposed portions) of the photoresist layer. The pitch (e.g.,
spacing) of patterned photoresist structures 400 may vary over
substrate 210 depending on the pattern design. Therefore, high and
low density areas of patterned photoresist structures 400 (e.g.,
patterned photoresist structures with different pitch or spacing)
may be formed over different areas of substrate 210. Further, the
width of the patterned photoresist structures 400 can also vary
across substrate 210.
[0035] In referring to FIG. 5, a dry etch process can remove
nitride layer 310, oxide layer 300 and semiconductor layer 200
between patterned photoresist structures 400 to form semiconductor
structures, or semiconductor islands, 500. In other words,
patterned photoresist structures 400 can be used as an etch mask to
define the geometrical aspects of semiconductor structures 500. For
example, the width and the pitch of the patterned photoresist
structures 400 can be used to further define the width and the
pitch of the resulting semiconductor structures 500. In some
embodiments, the sidewalls of the resulting semiconductor
structures 500 can have a positive slope, as shown in FIG. 5.
However, this is not limiting, because semiconductor structures 500
can be designed to have substantially vertical sidewalls (e.g.,
between about 86.degree. and about 90.degree.), or sidewalls with a
negative slope. The sidewall slope (or sidewall angle) of
semiconductor structures 500 can be tuned by the dry etch process
conditions. Therefore, the dry etch process conditions may be
adjusted to achieve the desired slope for the sidewalls of
semiconductor structures 500. In some embodiments, the dry etch
process can include several etch sub-steps with a different etch
chemistry for each sub-step.
[0036] After semiconductor structures 500 are formed, patterned
photoresist structures 400 can be removed with a wet clean process
(e.g., wet strip). In some embodiments, the height of the formed
semiconductor structures 500 can be up to about 200 nm. However,
this is not limiting and other heights for the semiconductor
structures 500 may be considered.
[0037] Semiconductor structures 500 can be silicon structures where
n-type or p-type FETs can be formed thereon. For example,
semiconductor structures 500 can be doped to form source/drain
regions, a channel region, etc. Further, local metal contacts can
be formed on semiconductor structures 500 to electrically connect
the terminals of the FETs (e.g., the source/drain and gate
terminals) to other components of the chip.
[0038] In referring to FIG. 1, fabrication method 100 continues
with operation 120 and the formation of a first liner on each
sidewall surface of semiconductor structures 500. FIG. 6 is a
cross-sectional view of semiconductor structures 500 after the
formation of first liner 600 on each sidewall surface of
semiconductor structure 500, according to the description of
operation 120. By way of example and not limitation, first liners
600 can be formed by thermal oxidation of the exposed sidewalls
surfaces of semiconductor structure 500. By way of example and not
limitation, thermal oxidation of the sidewall surfaces of
semiconductor structures 500 can occur in an oxidizing ambient that
may include water vapors or molecular oxygen (e.g., wet or dry
oxidation). During the thermal oxidation process, first liner 600
can be formed by consuming the silicon from the sidewall surfaces
of semiconductor structures 500. In other words, a portion of first
liner 600 is grown inwards from the sidewall surface. In some
embodiments, first liner 600 includes silicon oxide (e.g., silicon
dioxide (SiO.sub.2)). By way of example and not limitation, the
oxidation process can be performed at a temperature between about
800.degree. C. and about 1200.degree. C. (e.g., between 900.degree.
C. and 1100.degree. C.). The thickness of the first liner can range
from about 5 nm to about 20 nm. Since the only exposed silicon
areas available for oxidation are the sidewall surfaces of
semiconductor structures 500, first liners 600 will be selectively
grown on (or be "self-aligned" to) the sidewall surfaces of
semiconductor structures 500.
[0039] Fabrication method 100 continues with operation 130 and the
deposition of a second liner 700 as shown in FIG. 7. Second liner
700 can be deposited over nitride layer 310, first liner 600 and
dielectric layer 220. By way of example and not limitation, second
liner 700 can be deposited by chemical vapor deposition (CVD),
plasma-enhanced chemical vapor deposition (PECVD), atomic layer
deposition (ALD), plasma-enhanced atomic layer deposition (PEALD),
or any other suitable conformal deposition method. In some
embodiments, second liner 700 has a thickness between about 10 nm
and about 50 nm. By way of example and not limitation, second liner
700 and nitride layer 310 can be the same material. In other words,
second liner 700 can include silicon nitride. In some embodiments,
second liner 700 can be considered a "sacrificial" spacer or a
sacrificial layer formed over the sidewalls of semiconductor
structures 500. For example, second liner 700 can be removed in a
subsequent operation of fabrication method 100.
[0040] In referring to FIGS. 1 and 8, fabrication method 100
continues with operation 140, where a first dielectric 800 is
deposited between semiconductor structures 500 to form isolation
structures (e.g., STI structures). In some embodiments, first
dielectric 800 is deposited with a high density plasma CVD
(HDP-CVD) process that has good gap-fill properties. For example,
first dielectric 800 can fill completely the space between
semiconductor structures 500 (e.g., without the formation of voids
or gaps). In FIG. 9, a chemical mechanical planarization (CMP)
process can polish first dielectric 800 until it is coplanar with
the top surface of second liner 700 (e.g., second liner 700 can act
as a stop layer for the CMP process). As a result, isolation
structures 900 are formed. In some embodiments, isolation
structures 900 are STI structures that can electrically isolate
semiconductor structures 500. By way of example and not limitation,
isolation structures 900 can include first dielectric 800 and
portions of second liner 700 that are disposed over the sidewalls
of semiconductor structures 500 and the top surface of dielectric
layer 220, as shown in FIG. 9 by the dashed closed line.
[0041] Fabrication method 100 of FIG. 1 continues with operation
150. In operation 150, second liner 700 is removed between
isolation structures 900 and first liner 600 to form respective
openings 1000, as shown in FIG. 10. In some embodiments, removal of
second liner 700 can be achieved with a wet etch process (also
referred to as wet chemical strip). By way of example and not
limitation, the wet etch process can include hot phosphoric acid
(H.sub.3PO.sub.4) and it can be performed at a temperature of about
160.degree. C. Further, the wet etch chemistry can be selected to
have high selectivity towards second liner 700 as opposed to
exposed oxide material-such as oxide layer 300 and first liner 600,
which are both silicon-based oxides (e.g., silicon oxide). For
example, the wet etch process may exhibit a selectivity ratio for
second liner 700 and oxide layer 300, or second liner 700 and first
liner 600, of about 100:1. If the selectivity ratio is not high
enough, portions of oxide layer 300 and first liner 600 will also
be etched during the etch process.
[0042] During the wet etch process, second liner 700 and nitride
layer 310 are both removed (e.g., etched) over oxide layer 300. As
discussed above, both second liner 700 and nitride layer 310 can
include silicon nitride. Hence, the selectivity of the wet etch
process towards second liner 700 and nitride layer 310 can be the
same (e.g., selectivity ratio 1:1). According to some embodiments,
the wet etch process can be timed so that a portion of second liner
700 between isolation structures 900 and dielectric layer 220 is
not removed (e.g., etched). In some embodiments, second liner 700
under dielectric 800 can be equal or narrower than the base of
dielectric 800. In some embodiments, second liner 700 underneath
dielectric 800 can be wider that the base of dielectric 800 and
cover the entire exposed surface of dielectric layer 220.
Alternatively, second liner 700 underneath dielectric 800 can be
wider that the base of isolation structures 900 but not cover the
entire exposed surface of dielectric layer 220. In some
embodiments, the thickness of second liner 700 over the sidewalls
of semiconductor structures 500 can be used to control the width of
openings 1000 and ultimately the size of the air-gaps in the STI
structures.
[0043] Referring to FIG. 1, fabrication method 100 continues with
operation 160 and the deposition of a second dielectric (e.g.,
capping dielectric layer) to form an air-gap (e.g., an air-pocket
or cavity), between first dielectric 800 and first liner 600. For
example, an air-gap can be formed when the second dielectric seals
the top entrance of opening 1000. Further, openings 1000 can have
an aspect ratio--e.g., a high aspect ratio between about 5:1 to
about 20:1--that prevents second dielectric material from filling
opening 1000. According to some embodiments, the combination of the
high deposition rate of second dielectric 1120 and the high aspect
ratio of openings 1000 form air-gaps at the locations of openings
1000. In some embodiments, the second dielectric can be deposited
by a PECVD process, a physical vapor deposition (PVD), or any other
suitable oxide deposition process with appropriate deposition
rate.
[0044] FIG. 11 shows the resulting air-gaps (e.g., air-pockets or
cavities) 1100 after the deposition of second dielectric 1120. In
some embodiments, the first and the second dielectrics (e.g., 800
and 1120, respectively) are the same material, e.g., silicon oxide
(SiO.sub.2). Further, until opening 1000 is sealed, second
dielectric 1120 may or may not reach the bottom of opening 1000.
Therefore, in some embodiments, the resulting air-gaps may or may
not extend to the top surface of dielectric layer 220.
Additionally, the size of air-gaps (or air-pockets, or cavities)
1100 can be smaller than the size of openings 1000 in operation
150. This is because second dielectric 1120 may continue to be
deposited into opening 1000 until the top entrance of the opening
is capped (e.g., sealed). By way of example and not limitation, the
size of air-gaps 1100 may depend, among other things, on (i) the
size of openings 1000 (which can be modulated by the thickness of
second liner 700 and the height of semiconductor structures 500),
(ii) the sidewall slope of semiconductor structures 500, and (iii)
the deposition process parameters of second dielectric 1120. For
example, the deposition process parameters of second dielectric
1120 can modulate the gap-fill properties and the deposition rate
of second dielectric 1120 in openings 1000. In some embodiments,
the width of air-gaps 1100 can range from about 10 nm to about 25
nm (e.g., from 10 nm to 25 nm).
[0045] In some embodiments, air-gaps (e.g., air-pockets, or
cavities) 1100 can be filled with one or more gases that are
present during the deposition process of second dielectric 1120. In
other words, air-gaps 1100 may not be filled with atmospheric air.
In some embodiments, air-gaps (e.g., air-pockets, or cavities) 1100
can be filled with an inert gas or gases such as nitrogen, helium,
and argon.
[0046] In some embodiments, a porogen containing material (e.g.,
carbon-doped silicon dioxide that contains loosely bounded methyl
groups) can be used to fill openings 1000 of FIG. 10. The porogen
containing material can be cured and converted to a porous low-k
material with a k value below 3.6 (e.g., k value of about 3).
During the curing process, the porogen is released leaving behind
pores in the material. By way of example and not limitation, the
curing process may include exposure to UV radiation that has a
wavelength between about 150 nm and about 400 nm. Other curing
process may be used, including a thermal process. In some
embodiments, openings 1000 can be filled directly with a low-k
dielectric material, such as carbon-doped silicon dioxide or any
other suitable low-k dielectric material with appropriate gap-fill
properties.
[0047] In some embodiments, a dry etch process, wet etch process,
or a combination of a dry and a wet process can be used to remove
(e.g., etch) second dielectric 1120 over semiconductor structures
500, until oxide layer 300 is exposed. By way of example and not
limitation, a dry etch process can include a fluorocarbon based
chemistry (e.g., fluorinated hydrocarbons), such as
tetrafluoromethane (CF.sub.4), trifluromethance (CHF.sub.3), and
the like. On the other hand, a wet etch process can include a
diluted solution of hydrofluoric acid (HF) with a buffer, such as
ammonium fluoride (NH.sub.4F), diluted HF (HF/H.sub.2O),
H.sub.3PO.sub.4, sulfuric acid with deionized water
(H.sub.2SO.sub.4/H.sub.2O), or any combinations thereof. The dry or
wet etch process can be for example timed so that first dielectric
800 is not removed during the etch process. For example, the dry or
wet etch process can be timed so that it is terminated when oxide
layer 300 is exposed. The aforementioned etch chemistries are
exemplary and, therefore, not limiting. Other suitable dry etch or
wet etch chemistries may be used.
[0048] As a result of the aforementioned dry or wet etch process,
isolation structures 1200 (e.g., STI structure 1200) with air-gaps
along their sidewalls are formed, as shown in FIG. 12. As a result
of the etching process, a divot 1210 can be formed on each corner
of isolation structure 1200. In some embodiments, divots (e.g.,
like divot 1210) can have a depth between about 2 nm and 10 nm. If
divots 1210 are not formed, the top surface of isolation structure
1200 can be substantially flat or lightly convex with round
corners.
[0049] In some embodiments, fabrication method 100 introduces
air-gaps in isolation structures (e.g., STI structures) by
retaining the original size of the isolation structures and the
pitch of the semiconductor structures. In other words, no
modification to the pitch of the semiconductor structures is
required and, subsequently, to the reticles (e.g., photomask) used
in the photolithography operations. This means that fabrication
method 100 can be introduced to an existing STI formation process
flow without any changes to the photolithography process.
[0050] According to some embodiments, it is possible that isolation
structures without air-gaps are formed alongside with isolation
structures with air-gaps (e.g., like isolation structures 1200 of
FIG. 12) on the same substrate (e.g. wafer). This means that the
resulting chip or integrated circuit can include STI structures
with and without air-gaps if desired. In other words, fabrication
method 100 can be applied on selected isolation structures of
substrate 210. Additionally, it is also possible that isolation
structures with air-gaps and divots are formed alongside with
divot-free isolation structures that have air-gaps. For example,
FIG. 13 shows the three types of isolation structures that can be
formed on a single substrate. In the example of FIG. 13, isolation
structure 1200 A has both air-gaps and divots; isolation structure
1200 B has air-gaps but no divots (e.g., a lightly convex top
surface with rounded corners); and isolation structure 1300 can
have divots, or be divot-free, without air-gaps. According to some
embodiments, isolation structure 1200 A and isolation structure
1200 B are formed using the fabrication method 100 of FIG. 1. As a
result of fabrication method 100, the air-gaps are formed embedded
in the isolation structures, along each sidewall of isolation
structures 1200 A and 1200 B, e.g., along the sidewalls of
semiconductor structures 500 and over first liner 600. By way of
example and not limitation, application of fabrication method 100
on selective areas of substrate 210 can be achieved with
photolithography methods. For example, the isolation structures
that will be "air-gap" free, will be masked by a photoresist layer
(or a hard mask) during operation 130 of fabrication method 100
(e.g., during the deposition of second liner 700 over semiconductor
structures 500 and first liner 600).
[0051] FIG. 14 is a cross-sectional view of isolation structures
(e.g., STI structures) 1200 A between semiconductor structures 500,
where devices 1400, metal contacts 1410, and source/drain (S/D)
regions 1420 have been formed on semiconductor structure 500. In
some embodiments, devices 1400 are FETs. These FETs can be either
NFETs or PFETs, and can be part of an integrated circuit (IC)
formed on an SOI substrate (or a bulk, high-resistive semiconductor
substrate). The channel region 1430 of FETs 1400 is located in
semiconductor structure 500 between the S/D regions 1420 and below
FET 1400. According to some embodiments, isolation structures 1200
A with air-gaps, fabricated with method 100 of FIG. 1, can provide
enhanced electrical isolation and protection from parasitic
capacitances (e.g., in the GHz range) of parasitic capacitors that
can be formed between neighboring devices 1400. Further, due to the
presence of air-gaps, isolation structures 1200 A can mitigate the
compressive stress that is induced to channel region 1430 below
FETs 1400, even if the edge of isolation structure 1200 A is close
to channel region 1430 (e.g., within 0.5 .mu.m).
[0052] Fabrication method 100 may not be limited to RF SOI
technology or RF SOI applications. For example, fabrication method
100 can be implemented in other complementary metal oxide (CMOS)
applications where protection against parasitic capacitances is
required. Alternatively, method 100 can be applied to any other
semiconductor or non-semiconductor processing that includes shallow
trench isolation (STI) structures, or formation thereof.
[0053] The embodiments described herein are directed to a
fabrication method that can form air-gaps (air-pockets or cavities)
in STI structures. In some embodiments, the fabrication method
includes a sacrificial nitride layer that can be introduced prior
to the deposition of the STI material between the semiconductor
structures. The sacrificial nitride layer can be subsequently
removed after the deposition of the STI material so that an opening
can be formed along the sidewall surfaces of adjacent semiconductor
structures. A second deposition of a dielectric material can seal
the entrance of the opening and form an air-gap, which is embedded
in the STI structure along the sidewalls of the semiconductor
structure. The thickness of the sacrificial nitride layer, in
combination with the process conditions during the second
deposition of the dielectric material, can control in part the size
of the embedded air-gaps (air-pockets or cavities) in the resulting
STI structure. Further, and on the same substrate, STI structures
with and without air-gaps can be formed. In other words, the
fabrication method described herein can be applied to selective STI
structures on the substrate. Such selectivity can be achieved with
photolithography methods. For example, the STI structures that will
not form air-gaps can be masked by a photoresist layer, or a hard
mask, during the deposition of the sacrificial nitride layer.
[0054] In some embodiments, a structure includes semiconductor
islands, which are formed over a substrate, with liners disposed on
the sidewalls of the semiconductor islands and an isolation
structure disposed between the semiconductor islands. Further, the
isolation structure includes one or more air-gaps that are formed
along the liners.
[0055] In some embodiments, an integrated circuit includes an
insulating layer, a semiconductor layer disposed on the insulating
layer and a field effect transistor formed on one or more of the
semiconductor islands. The semiconductor layer further includes:
semiconductor islands, a liner disposed on each sidewall of the
semiconductor islands and an isolation structure between the
semiconductor islands. The isolation structure includes an oxide
layer with an air-pocket disposed along the liner of each sidewall
of the semiconductor islands and a nitride layer disposed between
the insulating layer and the oxide layer.
[0056] In some embodiments, a method includes patterning a
semiconductor layer over a substrate to form semiconductor islands
and oxidizing the sidewall surfaces of the semiconductor islands to
form first liners on the sidewall surfaces. Further the method
includes depositing a second liner over the first liners and the
substrate and depositing a first dielectric layer between the
semiconductor islands. The second liner between the first
dielectric layer and the first liners is removed to form openings
between the first dielectric layer and the first liners and a
second dielectric layer is deposited over the first dielectric
layer to enclose the openings and form air-gaps between the first
dielectric layer and the first liners so that the gaps are
positioned along the first liners.
[0057] It is to be appreciated that the Detailed Description
section, and not the Abstract of the Disclosure section, is
intended to be used to interpret the claims. The Abstract of the
Disclosure section may set forth one or more but not all possible
embodiments of the present disclosure as contemplated by the
inventor(s), and thus, are not intended to limit the subjoined
claims in any way.
[0058] The foregoing disclosure outlines features of several
embodiments so that those skilled in the art may better understand
the aspects of the present disclosure. Those skilled in the art
will appreciate that they may readily use the present disclosure as
a basis for designing or modifying other processes and structures
for carrying out the same purposes and/or achieving the same
advantages of the embodiments introduced herein. Those skilled in
the art will also realize that such equivalent constructions do not
depart from the spirit and scope of the present disclosure, and
that they may make various changes, substitutions, and alterations
herein without departing from the spirit and scope of the present
disclosure.
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