U.S. patent application number 15/832626 was filed with the patent office on 2019-06-06 for high voltage switching device.
The applicant listed for this patent is pSemi Corporation. Invention is credited to Alain Duvallet, Abhijeet Paul, Simon Edward Willard.
Application Number | 20190172948 15/832626 |
Document ID | / |
Family ID | 66659414 |
Filed Date | 2019-06-06 |
United States Patent
Application |
20190172948 |
Kind Code |
A1 |
Paul; Abhijeet ; et
al. |
June 6, 2019 |
High Voltage Switching Device
Abstract
A high-voltage switching device that can be fabricated in a
standard low-voltage process, such as CMOS, and more specifically
SOI CMOS. Embodiments include integrated circuits that combine, in
a unitary structure, a FET device and an integrated, co-fabricated
modulated resistance region (MRR) controlled by one or more
Voltage-Drop Modulation Gates (VDMGs). The VDMGs are generally
biased independently of the gate of the FET device, and in such a
way as to protect each VDMG from excessive and potentially
destructive voltages. In a first embodiment, an integrated circuit
high voltage switching device includes a transistor structure
including a source, a gate, and an internal drain; an MRR connected
to the internal drain of the transistor structure; at least one
VDMG that controls the resistance of the MRR; and a drain
electrically connected to the MRR. Each VDMG at least partially
depletes the MRR upon application of a bias voltage.
Inventors: |
Paul; Abhijeet; (Poway,
CA) ; Willard; Simon Edward; (Irvine, CA) ;
Duvallet; Alain; (San Diego, CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
pSemi Corporation |
San Diego |
CA |
US |
|
|
Family ID: |
66659414 |
Appl. No.: |
15/832626 |
Filed: |
December 5, 2017 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 21/743 20130101;
H01L 29/404 20130101; H01L 29/7838 20130101; H01L 27/1203 20130101;
H01L 29/1087 20130101; H01L 29/78624 20130101; H01L 29/4238
20130101; H01L 21/84 20130101; H01L 29/1083 20130101; H01L 29/0692
20130101; H01L 29/7824 20130101; H01L 29/0878 20130101; H01L
29/7831 20130101; H01L 29/66484 20130101; H01L 29/78606
20130101 |
International
Class: |
H01L 29/78 20060101
H01L029/78; H01L 27/12 20060101 H01L027/12; H01L 29/10 20060101
H01L029/10; H01L 29/66 20060101 H01L029/66; H01L 21/74 20060101
H01L021/74; H01L 21/84 20060101 H01L021/84 |
Claims
1. (canceled)
2. (canceled)
3. At least one integrated circuit high voltage switching device,
including: (a) a transistor structure including a source, a gate,
an internal drain, and a channel between the source and internal
drain; (b) a modulated resistance region co-fabricated with the
transistor structure and electrically connected to the internal
drain of the transistor structure; (c) at least one voltage-drop
modulation gate, fabricated with respect to the modulated
resistance region so as to control the resistance of the modulated
resistance region; and (d) a drain electrically connected to the
modulated resistance region and configured to be coupled to a
voltage source; wherein (1) when a first bias voltage is applied to
the at least one voltage-drop modulation gate and the FET
transistor structure is switched ON, the modulated resistance
region provides a low-resistance conduction path current between
the source and the drain, and (2) when a second bias voltage is
applied to the at least one voltage-drop modulation gate, the
modulated resistance region is sufficiently depleted so as to
provide a high-resistance to conduction of current between the
drain and the internal drain and thereby drop an applied voltage on
the drain to less than the breakdown voltage BV.sub.DSS of the FET
transistor structure.
4. The invention of claim 3, further including a plurality of
voltage-drop modulation gates series-connected between the internal
drain and the drain.
5. The invention of claim 3, wherein the source, internal drain,
and drain of at least one integrated circuit high voltage switching
device comprise semiconductor regions of a first polarity, and the
channel comprises a semiconductor region of a second polarity.
6. The invention of claim 5, wherein the first polarity is N-type
material and the second polarity is P-type material.
7. The invention of claim 5, wherein the first polarity is P-type
material and the second polarity is N-type material.
8. The invention of claim 3, wherein the source, internal drain,
and drain of at least one integrated circuit high voltage switching
device comprise semiconductor regions of a first polarity, and the
channel comprises a semiconductor region of a second polarity, and
wherein the source, internal drain, and drain of at least another
integrated circuit high voltage switching device comprise
semiconductor regions of the second polarity, and the channel
comprises a semiconductor region of the first polarity.
9. The invention of claim 8, wherein the first polarity is N-type
material and the second polarity is P-type material.
10. At least one integrated circuit high voltage switching device,
including: (a) a transistor structure including a source, a gate,
an internal drain, and a channel between the source and internal
drain; (b) a modulated resistance region co-fabricated with the
transistor structure and electrically connected to the internal
drain of the transistor structure; (c) at least one voltage-drop
modulation gate, fabricated with respect to the modulated
resistance region so as to control the resistance of the modulated
resistance region; and (d) a drain electrically connected to the
modulated resistance region and configured to be coupled to a
voltage source; wherein the modulated resistance region comprises a
semiconductor region of the first polarity, doped up to about 5
orders of magnitude less than the source and drain.
11. The invention of claim 10, wherein the at least one
voltage-drop modulation gate controls the resistance of the
modulated resistance region by at least partially depleting at
least a portion of the modulated resistance region upon application
of a bias voltage to the at least one voltage-drop modulation
gate.
12. The invention of claim 10, wherein the at least one
voltage-drop modulation gate controls the resistance of the
modulated resistance region by fully depleting at least a portion
of the modulated resistance region upon application of a bias
voltage to the at least one voltage-drop modulation gate.
13. The invention of claim 3, wherein the integrated circuit is
fabricated on a silicon-on-sapphire substrate.
14. The invention of claim 3, wherein the integrated circuit is
fabricated on a silicon-on-insulator substrate.
15. At least one integrated circuit high voltage switching device
fabricated on a silicon-on-insulator substrate, including: (a) a
transistor structure including a source, a gate, an internal drain,
and a channel between the source and internal drain; (b) a
modulated resistance region co-fabricated with the transistor
structure and electrically connected to the internal drain of the
transistor structure; (c) at least one voltage-drop modulation
gate, fabricated with respect to the modulated resistance region so
as to control the resistance of the modulated resistance region;
(d) a drain electrically connected to the modulated resistance
region and configured to be coupled to a voltage source; (e) a deep
well region proximate to at least a portion of the modulated
resistance region; and (f) at least one substrate contact in
electrical contact with the deep well region for applying a bias
voltage to the deep well region.
16. The invention of claim 15, wherein the deep well region is the
same polarity as the modulated resistance region.
17. The invention of claim 15, wherein the at least one
voltage-drop modulation gate controls the resistance of the
modulated resistance region by at least partially depleting at
least a portion of the modulated resistance region upon application
of a first bias voltage to the at least one voltage-drop modulation
gate, and wherein the deep well region further depletes at least a
portion of the modulated resistance region upon application of a
second bias voltage to the at least one substrate contact.
18. The invention of claim 3, wherein the breakdown voltage per
voltage-drop modulation gate is at least about 4V.
19. The invention of claim 3, wherein the breakdown voltage per
voltage-drop modulation gate is greater than the breakdown voltage
of the transistor structure.
20. The invention of claim 3, wherein the integrated circuit high
voltage switching device is made using a CMOS process.
21. The invention of claim 3, wherein surface regions of the
modulated resistance region adjacent the at least one voltage-drop
modulation gate are doped with a material having a first polarity
and at a higher doping concentration than the modulated resistance
region under the at least one voltage-drop modulation gate.
22. The invention of claim 3, wherein a silicide layer is formed on
surface regions of the modulated resistance region adjacent the
least one voltage-drop modulation gate.
23-45. (canceled)
46. The invention of claim 3, wherein when the second bias voltage
is sufficiently negative with respect to a threshold voltage for
the modulated resistance region, the modulated resistance region is
fully depleted and pinches off all current through the modulated
resistance region.
47. At least one integrated circuit high voltage switching device,
including: (a) a transistor structure including a source, a gate,
an internal drain, and a channel between the source and internal
drain; (b) a modulated resistance region co-fabricated with the
transistor structure and electrically connected to the internal
drain of the transistor structure; (c) at least one voltage-drop
modulation gate, fabricated with respect to the modulated
resistance region so as to control the resistance of the modulated
resistance region; and (d) a drain electrically connected to the
modulated resistance region and configured to be coupled to a
voltage source; wherein the modulated resistance region comprises a
semiconductor region of the first polarity, doped to at least about
2 orders of magnitude less than the source and drain.
48. The invention of claim 47, wherein the modulated resistance
region comprises a semiconductor region of the first polarity,
doped to at least about 3 orders of magnitude less than the source
and drain.
Description
BACKGROUND
(1) Technical Field
[0001] This invention relates to electronic switching devices, and
more particularly to high voltage switching devices.
(2) Background
[0002] Many electronic products, particularly mobile computing
and/or communication products (e.g., notebook computers, ultra-book
computers, and tablet devices), use high voltage DC power sources.
Examples of such DC power sources are lithium ion (Li-Ion) and
nickel metal hydride (NiMH) batteries, which may have DC voltages
ranging from 6-100V. However, system electronics generally require
much lower voltages (typically 1-5V) to operate.
[0003] It is common to use a variety of circuits, such as DC-to-DC
step-down converters, to generate intermediate and/or low voltage
levels from a higher voltage DC power source; such circuits are
typically characterized by their output-to-input voltage conversion
ratio, V.sub.OUT:V.sub.IN.
[0004] The well-known DC-to-DC step-down converter is also known as
a "buck" converter, because V.sub.OUT is less than V.sub.IN, and
hence the converter is "bucking" the input voltage rather than
boosting the input voltage such that V.sub.OUT is greater than
V.sub.IN, as is the case with DC-to-DC step-up converters. Both
types of DC-to-DC converters work on the same principle: an array
of electronic switches charges capacitors or inductors in series or
parallel, and then switches them into other configurations to
create the desired output voltage. Examples of DC-to-DC converters
are set forth in co-pending U.S. patent application Ser. No.
15/266,784, filed Sep. 15, 2016, entitled "Current Protected
Integrated Transformer Driver for Isolating a DC-DC Convertor",
Attorney Docket No. PER-180-PAP, the contents of which are hereby
incorporated by reference.
[0005] A requirement of all DC/DC step-down converter switches is
to withstand application of a high supply voltage, which is
typically done in one of two ways: (1) either utilize switches that
are specially designed to withstand high voltage and/or which are
fabricated in a technology that allows such switches to inherently
withstand high voltage (e.g., SiC or GaN transistors), or (2)
utilize circuit stacking approaches that divide an applied high
voltage among multiple series-connected lower voltage switches.
While the lower voltage switches may comprise diodes, MEMS devices,
transistors of various types, or similar well-known devices, a
quite common type of lower voltage switch is a field effect
transistor (FET), particularly a MOSFET.
[0006] FIG. 1 is a cross-sectional view of a prior art
silicon-on-insulator (SOI) N-type enhancement mode MOSFET 100 (note
that the dimensions of various elements are not to scale). The
transistor comprises a source S, a self-aligned gate G, and a drain
D formed in a silicon (Si) active layer, typically within an
isolation region 101 such as a shallow trench isolation (STI)
region. The Si active layer is in turn formed on a buried oxide
(BOX) layer formed on top of an Si Substrate. A p-well (i.e., a
region doped with P-type material, such as boron) is formed in the
Si active layer, and the gate G is formed above a region of the
p-well, thereby defining a channel 102. The source S and the drain
D regions are formed within the p-well adjacent the gate G by
implanting or diffusing N+ material (such as phosphorus or
arsenic), and thus bracket the channel 102.
[0007] In this example, the gate G comprises an insulator (e.g., an
oxide layer) 104 and overlaying gate material (e.g., polysilicon or
metal) 106. Offset spacers 108 along the sides the gate G may also
be formed as part of the fabrication process for making the gate G.
More details on the use and fabrication of offset spacers may be
found in U.S. patent application Ser. No. 14/921,976, filed Oct.
23, 2015, entitled "Switch Device Performance Through Utilization
of Offset Spacers", the contents of which are hereby incorporated
by reference.
[0008] Electrically conductive contacts 110, 112, 114 are made to
the source S, the gate G, and the drain D, respectively. Other
common structures (e.g., device interconnects, etc.) are omitted
for clarity. The multiple steps needed for making elements and
features of the MOSFET structure, such as masking, doping (via
implanting, diffusion, etc.), epitaxial growing, cleaving,
polishing, etc., are well known in the art.
[0009] As is known in the art, P-type enhancement mode MOSFETs have
a similar structure, but with different doping characteristics, as
do N-type and P-type depletion mode MOSFETS. Complementary
metal-oxide-semiconductor (CMOS) devices use pairs of P-type and
N-type MOSFETs, which may be either enhancement mode or depletion
mode structures. Enhancement mode CMOS devices have very low power
consumption and have become the dominant implementation technology
for modern electronic systems, particularly battery-powered
electronic systems.
[0010] The MOSFET 100 can be operated as an electrical switch by
applying a gate-source voltage, V.sub.GS, to the gate G
sufficiently positive to turn the transistor ON, thereby creating a
low impedance current path between the source S and the drain D
through the channel 102. The MOSFET 100 is turned OFF by applying a
V.sub.GS to the gate G at a voltage less than the threshold
voltage, V.sub.T, of the device, thereby creating a high impedance
path between the source S and the drain D.
[0011] As transistor requirements increased and device sizes
shrank, additional elements have been added to the basic MOSFET
structure to maintain or improve performance. One of the most
important parameters that had to be improved as devices shrank (and
in particular, when gate lengths shrank) was the maximum voltage
handling capability of the transistor device. As used in this
disclosure, this metric is the maximum voltage between source and
drain that a transistor can withstand while remaining in a
non-conducting state (i.e., no current flow between source and
drain when the gate voltage is below the transistor's threshold
voltage). More specifically, the breakdown voltage, BV.sub.DSS
(sometimes called V.sub.BDSS) of a MOSFET is the drain-source
voltage at which no more than a specified drain current will flow
at a specified temperature and with zero gate-source voltage
[noting that breakdown of a MOSFET may be caused by various
effects, being primarily avalanche breakdown (i.e., drain-channel
driven breakdown), but also including punch-through (i.e.,
drain-source breakdown), and drain-substrate breakdown in bulk
silicon; in addition, FETs inherently include a bipolar junction
transistor (BJT) comprising the source, channel and drain, which is
also susceptible to breakdown under certain conditions]. Without
more, typical commercially available designs for N-type MOSFETs of
the type described above that are made with 65-180 nm design rules
have a DC breakdown voltage of no more than about 2-3V (noting that
the DC breakdown voltage is no more than about 2V when design rules
drop below about 130 nm).
[0012] Well-known improvements to the maximum voltage handling
capability of a MOSFET have included use of lightly doped drain
(LDD) regions and high angle, low offset (HALO) implants. An LDD
implant mitigates avalanche breakdown while a HALO implant
mitigates punch-through. In FIG. 1, LDD regions 120 are
lightly-doped with N type material to extend the source S and drain
D underneath the gate G. The LDD regions 120 reduce high electric
fields caused by the applied drain D voltage, thereby increasing
the drain-channel breakdown voltage. HALO implants 122 are pocket
regions implanted with increased P type material (which may be P+
type material) that increase a sub-surface electric field to reduce
so-called punch-through, or short channel, conduction between the
source S and the drain D, also increasing breakdown voltage.
Fabricating MOSFETs with LDD regions and/or HALO implants is
commonplace, yet often requires specific fabrication masks (for
HALO implants) and/or process steps, thus adding to the cost of
such devices.
[0013] A further improvement in handling high source-drain voltages
is the laterally diffused metal oxide semiconductor (LDMOS)
transistor, which includes an asymmetric drain connection spaced
from the gate G by an LDD region extended well beyond the edge of
the gate G, thereby enabling higher voltages to be withstood.
However, additional elements such as a gate shield are generally
required to ensure that the laterally diffused ("LD") extended
drain D and the gate G region align electrostatically. Further,
LDMOS transistors typically require special processes that do not
integrate well with traditional CMOS circuitry, so most LDMOS
transistors are sold as discrete devices in power amplifier
markets. Additional information about the structure of LDMOS
transistors may be found, for example, in U.S. Pat. No. 7,230,302
B2, issued Jun. 12, 2007, entitled "Laterally Diffused Metal Oxide
Semiconductor Device and Method Forming the Same"; U.S. Pat. No.
7,638,380 B2, issued Dec. 29, 2009, entitled "Method for
Manufacturing a Laterally Diffused Metal Oxide Semiconductor
Device"; and U.S. Pat. No. 7,829,945 B2, issued Nov. 9, 2010,
entitled "Lateral Diffusion Field Effect Transistor with Asymmetric
Gate Dielectric Profile".
[0014] The above improvements have been reasonably effective at
enabling scaling down of MOSFETs and thereby enabling modern
integrated circuits to follow the well-known "Moore's Law".
However, they only increase breakdown voltages by relatively small
amounts (from less than a volt up to a few volts). For example,
typical commercially available designs for N-type MOSFETs having
LDD regions and HALO implants and made with 65-180 nm design rules
have a DC breakdown voltage (BV.sub.DSS) of no more than about 3V
(P-type MOSFETs, which typically do not need or use HALO implants,
have only a slightly higher BV.sub.DSS of about 4V). Accordingly,
these design tweaks have not been able to create individual MOSFET
devices that can withstand higher supply voltages. More exotic
fabrication high voltage technologies, such as SiC or GaN
transistors, are expensive and do not integrate well with other
technologies, such as CMOS logic. Thus, a disadvantage of prior art
high voltage switches is that they require specialized processing
or exotic materials which adversely impacts cost, size, and
availability.
[0015] The other approach to withstanding a high supply
voltage--stacking low-voltage switches--has the drawback that large
stacks of switches are required to withstand high voltages. For
example, 25-35 or more conventional series-connected MOSFETs, even
with LDD and HALO features, may be required to withstand a DC
supply voltage of 75-100V. In the case of using MOSFETs as switches
in such a stack, the areal size of the stack increases with the
stack height squared, thereby further increasing the size and cost
of the final product.
[0016] Neither of the conventional approaches provides a complete
solution needed to withstand high voltages. Moreover, neither of
the conventional approaches provides a complete solution needed to
make high-voltage switches using standard MOSFET (and particularly
CMOS) processing that can meet modern size, efficiency, and cost
requirements.
[0017] Accordingly, there is a need for a switching device that can
withstand high voltage and yet be fabricated in a standard
low-voltage process, such as CMOS, and more specifically SOI CMOS.
Such a switching device should be small in size, efficient, and low
cost. The present invention addresses this and other needs.
SUMMARY
[0018] The invention encompasses high-voltage switching devices
that can be fabricated in a standard low-voltage process.
Embodiments of the invention include integrated circuits that
combine, in a unitary structure, a FET device and an integrated,
co-fabricated modulated resistance region controlled by one or more
Voltage-Drop Modulation Gates (VDMGs). The VDMGs are generally
biased independently of the gate of the FET device, and in such a
way as to protect each VDMG from excessive and potentially
destructive voltages (i.e., from excessively high electric
fields).
[0019] In a first embodiment, an integrated circuit high voltage
switching device in accordance with the present invention includes:
a transistor structure including a source, a gate, an internal
drain, and a channel between the source and internal drain; a
modulated resistance region co-fabricated with the transistor
structure and electrically connected to the internal drain of the
transistor structure; at least one VDMG, fabricated with respect to
the modulated resistance region so as to control the resistance of
the modulated resistance region; and a drain electrically connected
to the modulated resistance region and configured to be coupled to
a voltage source. The at least one VDMG controls the resistance of
the modulated resistance region by at least partially deplet- ing
the modulated resistance region upon application of a bias
voltage.
[0020] In a second embodiment, an integrated circuit high voltage
switching device in accordance with the present invention includes
the elements of the first embodiment, and a deep well region
proximate to at least a portion of the modulated resistance region,
with at least one substrate contact in electrical contact with the
deep well region for applying a bias voltage to the deep well
region. Applying a bias voltage to the deep well region through the
substrate contact further depletes the modulated resistance region
so as to control the resistance of the modulated resistance
region.
[0021] The details of one or more embodiments of the invention are
set forth in the accompanying drawings and the description below.
Other features, objects, and advantages of the invention will be
apparent from the description and drawings, and from the
claims.
DESCRIPTION OF THE DRAWINGS
[0022] FIG. 1 is a cross-sectional view of a prior art
silicon-on-insulator (SOI) N-type enhancement mode MOSFET.
[0023] FIG. 2A is a cross-sectional view of a first embodiment of a
high voltage switching device (HVSD) in accordance with the
invention.
[0024] FIG. 2B is a cross-sectional view of a second embodiment of
a high voltage switching device (HVSD) in accordance with the
invention.
[0025] FIGS. 3A-3F are top plan views of one example fabrication
sequence for the HVSD of FIG. 2A.
[0026] FIG. 4 is a process flow diagram showing one method for
fabricating an integrated circuit HVSD in accordance with the
present invention.
[0027] FIG. 5 is a process flow diagram showing another method for
fabricating an integrated circuit HVSD in accordance with the
present invention
[0028] Like reference numbers and designations in the various
drawings indicate like elements.
DETAILED DESCRIPTION
[0029] The invention encompasses a high-voltage switching device
that can be fabricated in a standard low-voltage process.
Embodiments of the invention include integrated circuits that
combine, in a unitary structure, a FET device and an integrated,
co-fabricated modulated resistance region controlled by one or more
Voltage-Drop Modulation Gates (VDMGs). The VDMGs are generally
biased independently of the gate of the FET device, and in such a
way as to protect each VDMG from excessive and potentially
destructive voltages (i.e., from excessively high electric
fields).
First Embodiment
[0030] FIG. 2A is a cross-sectional view of a first embodiment of a
high voltage switching device (HVSD) 200 in accordance with the
invention (note that the dimensions of various elements are not to
scale). The illustrated embodiment may be fabricated using the same
technology and materials as for enhancement mode N-type MOSFETs.
Other embodiments may be fabricated using the same technology and
materials as for enhancement mode P-type MOSFETs, and yet other
embodiment may be fabricated as depletion mode N-type MOSFETs or
P-type MOSFETs. Further, embodiments may be fabricated using the
same technology and materials as for CMOS MOSFETs. In some
embodiments, no additional masks are required.
[0031] Starting from the left side of the illustrated structure,
the HVSD 200 device includes a transistor structure 202 (indicated
by a dashed circle) that essentially comprises an N-type MOSFET,
very similar to the structure shown in FIG. 1. More specifically, a
p-region or layer is formed within an isolation region 101 of an Si
active layer above a BOX layer on a Substrate, and a gate G is
formed above a portion of the p-region, thereby defining a channel
102. The Substrate may be, for example, a high resistivity
substrate, but low resistivity substrates commonly used for power
FETs may also be used. Examples of high resistivity substrates
includes silicon-on-insulator (SOI) and silicon-on-sapphire (SOS).
When SOS substrates are used, a BOX layer may or may not be
present; for avoidance of doubt, embodiments of the invention do
not require the presence of a BOX layer. A similar process may be
used for bulk silicon CMOS FETs, but, as one of ordinary skill in
the art would appreciated, additional doped wells may be required
that insure a high breakdown voltage to the substrate.
[0032] A source S is formed as an N+ doped region within the
p-region adjacent the gate G, as is an N+ doped region that may be
considered to be an "internal drain" 204. Electrically conductive
contacts 110, 112 are made to the source S and the gate G,
respectively. However, unlike a conventional MOSFET, the internal
drain 204 would normally be formed without such an electrically
conductive contact (nevertheless, a conductive contact optionally
may be made to the internal drain 204 of the transistor region 202,
for example, to test or characterize the transistor structure 202
independently of the remainder of the HVSD 200).
[0033] As with a conventional MOSFET, the transistor structure 202
can be operated as an electrical switch by applying a gate-source
voltage, V.sub.GS, to the gate G sufficiently positive with respect
to the threshold voltage, Vt, of the device to turn the transistor
ON, thereby creating a low impedance current path between the
source S and the internal drain 204 through the channel 102.
Similarly, the transistor structure 202 is turned OFF by applying a
V.sub.GS to the gate G at a voltage less than the threshold
voltage, V.sub.T, of the device, thereby creating a high impedance
path between the source S and the internal drain 204.
[0034] Adjacent to and in contact with the internal drain 204, a
region is doped with N-type material to form an n-well that defines
a modulated resistance region 206. The modulated resistance region
206 can be doped at different levels to allow different types of
electric field control, as further described below. Formed in
contact with or near the modulated resistance region 206 are one or
more Voltage-Drop Modulation Gates (VDMGs) 208 that control the
resistance of the modulated resistance region 206. The VDMGs 208
may be identical in structure and materials as the gate G of the
transistor structure 202, and formed at the same time. However, the
VDMGs 208 are generally biased independently of the gate G of the
transistor structure 202, and in such a way as to protect each VDMG
208 from excessively high electric fields, as described in greater
detail below.
[0035] The VDMGs 208 are shown in FIG. 2A as non-overlapping and
without doped N+ regions or silicide layers between them. This is a
design choice that can trade ON resistance for maximum withstand
voltage. For example, placing the VDMGs 208 close to each other,
such that the depletion zone under each VDMG 208 overlaps with the
depletion zones of one or more adjacent VDMGs 208, provides a low
ON state resistance and at the same time provides a high BV.sub.DSS
in the OFF state (but not a maximal BV.sub.DSS--overlapping the
depletion zones will reduce breakdown voltage as compared to
non-overlapping depletion zones). Other doping profiles and lengths
for the regions between VDMGs 208 and/or use of a silicide layer
applied to the surface of the HVSD between VDMGs 208 may be
selected to achieve other design goals. Also, in general, it may be
desirable to make the spacing between VDMGs 208 as small as foundry
design rules permit for a particular implementation technology.
[0036] Adjacent the final modulated resistance region 206 is an N+
doped drain D, which would generally be formed at the same time as
the source S and the internal drain 204. An electrically conductive
contact 114 is made to the drain D, which would generally be formed
at the same time as the electrically conductive contacts 110, 112
for the source S and the gate G, respectively. The drain D is
spaced apart from the internal drain 204 by the modulated
resistance region 206 and one or more VDMGs 208.
[0037] As so configured, the drain D of the HVSD 200 may be
coupled, directly or indirectly, to a high voltage DC supply (e.g.,
50-100 VDC), while the source S may be coupled to a potential (such
as ground) or other circuitry (including the drain D of another
HVSD 200; i.e., HVSD's may be stacked, for example as an output
stage of a high-voltage DC/DC converter). Examples of such DC/DC
converters are set forth in co-pending U.S. patent application Ser.
No. 15/266,784, referenced above, and in U.S. Pat. No. 7,719,343,
issued May 18, 2010, entitled "Low Noise Charge Pump Method and
Apparatus", U.S. Pat. No. 8,686,787, issued Apr. 1, 2014, entitled
"High Voltage Ring Pump with Inverter Stages and Voltage Boosting
Stages", U.S. Pat. No. 9,264,053, issued Feb. 16, 2016, entitled
"Variable Frequency Charge Pump", and U.S. Pat. No. 9,413,362,
issued Aug. 9, 2016, entitled "Differential Charge Pump", the
contents of which are hereby incorporated by reference.
[0038] The modulated resistance region 206 and VDMGs 208 form an
N-type depletion structure that is normally ON (i.e., conductive)
when the bias voltage applied to the VDMGs 208 is more positive
than the threshold voltage for the modulated resistance region 206.
Since the modulated resistance region 206 is normally conductive,
when the transistor structure 202 is biased ON (i.e., switched to a
conductive state), current will flow from the source S to the
internal drain 204 and then pass through the modulated resistance
region 206 into the drain D, which is in contact with the high
voltage. In this way, the illustrated embodiment provides the ON
state needed for a high voltage switching device. Further, in the
ON state, the bias voltage for the VDMGs 208 may be made even more
positive to further reduce the resistance of the n-well modulated
resistance region 206, thereby reducing the ON resistance of the
HVSD 200.
[0039] To switch the HVSD 200 to the OFF state, the gate G of the
transistor structure 202 is biased OFF by applying a V.sub.GS
voltage less than the threshold voltage, V.sub.T, of the transistor
structure 202, thereby creating a high impedance path between the
source S and the internal drain 204 within the channel 102. By
itself, the channel 102 is only able to withstand about 3-5V before
breakdown or punch-through occurs. However, concurrently, the VDMGs
208 for the modulated resistance region 206 between the internal
drain 204 and the drain D are also biased to an OFF state, thereby
at least partially depleting the modulated resistance region 206
and thus increasing the resistance of the n-well modulated
resistance region 206 to withstand the high voltage applied to the
drain D. Further, the VDMGs 208 may be biased sufficiently negative
with respect to the threshold voltage for the modulated resistance
region 206 to fully deplete the modulated resistance region 206,
such that the depletion region under each VDMG 208 reaches the BOX
layer and thereby cuts off (pinches off) all current through the
modulated resistance region 206, thus further enhancing voltage
drop across the modulated resistance region 206.
[0040] The n-well for the modulated resistance region 206 may be
made in a conventional manner, with a doping of N-type material at
least 2 to 3 orders of magnitude less than the doping of N-type
material for the source S and drain D implants, and up to 5 orders
of magnitude less than the doping of N-type material for the source
S and drain D implants. For P-type MOSFETS HVSDs, the polarities of
the dopants and types for the various regions and wells would be
reversed. Doping may be done by any conventional process, such as
diffusion and/or ion implantation, to intentionally introduce
impurities into a semiconductor for the purpose of modulating the
electrical properties of the semiconductor.
[0041] It should be appreciated that the OFF state and/or the ON
state resistivity of the modulated resistance region 206 is
affected by the doping level applied to that region; accordingly,
the conductivity of the modulated resistance region 206 may be
partially or fully depleted or partially or fully enhanced in the
absence of biasing the VDMGs 208. For example, the modulated
resistance region 206 may be doped at a level that permits only
partial depletion by the VDMGs 208 rather than full depletion;
however, differential doping may require an extra mask. As another
example, if the modulated resistance region 206 is partially or
fully enhanced, a sufficiently large opposite back-side voltage may
be applied (e.g., via the "deep well" region described below) to
invert the modulated resistance region 206, thereby reducing the ON
resistance of that region.
[0042] While the transistor structure 202 is essentially a
conventional MOSFET, it should be appreciated that the transistor
structure 202 may be any of a wide variety of FET structures, so
long as a modulated resistance region controlled by one or more
VDMGs 208 can be integrated, and co-fabricated with such a FET
structure.
Second Embodiment
[0043] FIG. 2B is a cross-sectional view of a second embodiment of
a high voltage switching device (HVSD) 250 in accordance with the
invention (again, the dimensions of various elements are not to
scale). Added to the structure shown in the embodiment of FIG. 2A
is a "deep well" region 220 of implanted N-type material in the
Substrate below the BOX layer. The deep well region 220 preferably
extends proximate to (below, in this case) some or all of the
modulated resistance region 206, and may extend under some or all
of the transistor structure 202 (as indicated by the dotted-outline
extension 220'). Again, for P-type MOSFETS HVSDs, the polarities of
the dopants for the various doped regions would be reversed.
[0044] At least one conductive substrate contact (S-contact) 222
penetrates through a corresponding isolation region 224 of the Si
active layer to the deep well region 220, 220'; the isolation
region 224 may be an extension of the drain-side isolation region
101 of FIG. 2A. The material used for the S-contact 222 can be any
low resistivity conductive material, such as polysilicon and
various metals (e.g., tungsten, copper, etc.). The isolation region
224 can be a shallow trench isolation (STI) region, particularly in
the case of an SOI device. By virtue of penetrating through the
isolation region 224 within the Si active layer, the S-contact 222
remains isolated from direct contact with other active regions or
elements on or in the Si active layer. Further details about
S-contacts may be found in U.S. patent application Ser. No.
14/964,412, filed Dec. 9, 2015, entitled "S-Contact for SOI", the
contents of which are hereby incorporated by reference.
[0045] A bias voltage may be applied through the S-contact 224 to
the deep well region 220, 220', which provides the ability to
impose an electrical field near the modulated resistance region 206
that can influence the conductivity and/or voltage blocking
characteristics of the modulated resistance region 206 (i.e., a
form of "back-gate modulation"). Alternatively, a bias voltage can
be applied through a metal field plate, such as an aluminum layer,
formed on the back side of the BOX layer using a single layer
transfer process. Back-gate modulation by means of the deep well
region 220, 220' can thus provide additional control over the
conductivity of the n-well modulated resistance region 206, and
help force full depletion of the modulated resistance region 206 to
maximize the voltage handling capability of the VDMGs 208.
[0046] Further, the deep well region 220, 220' also can be biased
to enhance conductivity in the modulated resistance region 206 so
as to reduce the ON resistance between the source S and drain D,
R.sub.DSon. For example, in one sample IC fabricated with a deep
well region 220, R.sub.DSon was reduced by about 30% by applying a
positive bias voltage to the deep well region 220.
[0047] Biasing of Voltage-Drop Modulation Gates
[0048] Each VDMG 208, in conjunction with the modulated resistance
region 206, provides some resistance to the voltage imposed at the
drain D. When biased in the OFF state, the VDMG 208 closest to the
drain D will drop the voltage applied to the next VDMG 208 along
the modulated resistance region 206 by a particular amount,
determined by the materials and geometry of the VDMG 208 and the
bias voltage applied to the VDMG 208. That next VDMG 208, and each
subsequent VDMG 208, will similarly drop the voltage to the next
VDMG 208 in line until the internal drain 204 is reached. The
number of VDMGs 208 should be set such that the voltage presented
at the internal drain 204 is less than the breakdown voltage of the
transistor structure 202. For example, if the voltage applied at
the drain D is 100 VDC, and the breakdown voltage of the transistor
structure 202 is 3V, then the combined voltage drop provided by the
VDMGs 208 (in conjunction with the modulated resistance region 206)
from the drain D to the internal drain 204 should be at least
97V.
[0049] Similar to the transistor structure 202, each VDMG 208 has a
breakdown voltage BV.sub.DSS beyond which the VDMG 208 will fail.
However, the BV.sub.DSS of each VDMG 208 is designed to be greater
than the BV.sub.DSS of the transistor structure 202. In example
integrated circuits embodying an HVSD, BV.sub.DSS per VDMG 208 has
been about 4V for NMOSFET designs, and about 4.5V for PMOS FET
designs. Accordingly, an example N-type HVSD with 3 VDMGs 208 has
been shown to withstand about 15V (taking into account a 3V
BV.sub.DSS for an NMOSFET transistor structure 202), and an example
P-type HVSD with 3 VDMGs 208 has been shown withstand about 17.5V
(taking into account a 4V BV.sub.DSS for a PMOSFET transistor
structure 202).
[0050] Using the 100V voltage drop example from above, if only a
single VDMG 208 is used, then that VDMG 208 would have to drop the
entire 97V required to prevent breakdown of the transistor
structure 202. If BV.sub.DSS for that VDMG 208 is only about 4V,
then the VDMG 208 would breakdown. Accordingly, the number of VDMGs
208 used to provide the necessary voltage drop from the drain D to
the internal drain 204 (i.e., so that the voltage presented at the
internal drain 204 is less than the breakdown voltage of the
transistor structure 202) should be sufficient such that the
voltage applied to each VDMG 208 is less than its corresponding
BV.sub.DSS. For example, if BV.sub.DSS is 4V for each VDMG 208, and
the voltage drop from the drain D to the internal drain 204 should
be at least 97V (the main transistor structure 202 being able to
withstand the remaining 3V), then 25 VDMGs 208 should be sufficient
to safely provide the required total voltage drop without exceeding
BV.sub.DSS for any VDMG 208.
[0051] Taking into account these constraints, it should be clear
that the bias voltages applied to the VDMGs 208 to achieve an OFF
state would not necessarily be the same. For example, if the VDMG
208 closest to the drain D is biased such that it fully blocks
current flow from the source S to the drain D, then that VDMG 208
would have to withstand the total voltage applied at the drain D
(e.g., 100 VDC), which may well exceed BV.sub.DSS for that VDMG
208. Accordingly, a better approach is to bias that first VDMG 208
to drop only a fraction of the voltage applied at the drain D
(e.g., 4V) by only partially depleting the modulated resistance
region 206 influenced by that VDMG 208. The applied input voltage
to the next VDMG 208 along the modulated resistance region 206
would then be 100V-4V, or 96V. The next VDMG 208 may then be biased
to also drop only a fraction of the voltage applied at the drain D
(e.g., 4V or some other value), which may require a different bias
voltage than the first VDMG 208, since the applied input voltage to
that next VDMG 208 is less. Additional VDMGs 208 in line to the
internal drain 204 would similarly be biased in a step-wise or
staggered fashion to achieve the total end-to-end voltage drop
required to protect the transistor structure 202 without imposing
an input voltage on any one VDMG 208 that exceeds BV.sub.DSS for
that gate. One way of achieving such a step-wise biasing scheme is
by using a resistive ladder coupled to the VDMG gates.
[0052] For example, for one exemplary embodiment of an N-type HVSD
200 having 5 VDMGs 208 and a voltage applied to the drain of about
22 VDC, the bias voltages for the VDMGs 208 might be (from the VDMG
208 closest to the drain D to the VDMG 208 closest to the internal
drain 204) 18V, 14V, 10V, 6V, and 2V, resulting in a voltage at the
internal drain 204 of about 2V, which is less than the BV.sub.DSS
of 3V for the transistor structure 202 in this example.
[0053] The specific bias voltage level for each VDMG 208 will
depend on the materials and geometry of the VDMG 208, the number of
VDMGs 208, and the voltage applied to the drain D, and accordingly
is device and circuit dependent. Further, dynamic control of the
modulated resistance region 206 as a function of the bias voltage
applied to each VDMG 208 may be applied to allow electrical fine
tuning to accommodate or counteract unit-to-unit performance
variations due to individual doping variations that may occur in
fabricating HVSD devices. Moreover, while the examples above have
used equal voltage drops across a series of VDMGs 208, unequal
voltage drops may be used in some embodiments (noting also that
process variations may cause voltage drop variations among VDMGs
208 even if they are designed to provide equal voltage drops).
[0054] In general, the VDMGs 208 may be sized and fabricated to
each withstand higher voltage compared to the transistor structure
202. Further, the number of VDMGs 208 can be chosen to withstand a
desired high voltage across an HVSD 200. This creates a substantial
advantage over prior art devices, since the maximum voltage
handling capability is a design parameter (i.e., number of VDMGs
208) rather than a process parameter (which is typically expensive
and difficult to adjust).
[0055] Example Device Layout
[0056] FIGS. 3A-3F are top plan views of one example fabrication
sequence for the HVSD 200 of FIG. 2A (for added clarity, some
reference numbers are not repeated in successive figures). As
should be appreciated, the sequence has been simplified, and many
different techniques and sequences may be used to fabricate a
similar device.
[0057] In FIG. 3A, a T-shaped island 302 of silicon Si and a
surrounding isolation region 304 are formed in conventional fashion
on top of a BOX layer (not separately shown) on an SOI Substrate
(not separately shown). The isolation region 304 may be, for
example, SiO.sub.2. An extension 302a of the Si island 302 will
become the modulated resistance region 206 of FIG. 2A after further
processing. A deep well (not shown in this plan view, but shown in
FIG. 2B in cross-section) may be formed in the Substrate directly
or through the BOX layer using known methods.
[0058] In FIG. 3B, a first region 306 of the Si island 302 is
masked off and implanted with P-type material to form a p-region,
part of which will become the channel 102 of the transistor
structure 202 shown in FIG. 2A. Similarly, a second region 308 of
the Si island 302 is masked off and implanted with N-type material
to form an n-well in the extension 302a of the Si island 302 (i.e.,
the modulated resistance region 206 of FIG. 2A). For a CMOS
integrated circuit embodiment of an HVSD, the p-region implant may
be done during the formation of nFET transistor structures 202, and
the n-well implant may be done during the formation of pFET
transistor structures 202, all as part of a conventional CMOS
process flow. Accordingly, since the CMOS process flow always
includes both nFET and pFET structures, no additional masks are
needed. Thus, two HVSD's may be formed and connected on an IC to
create a CMOS structure, such that the source, internal drain, and
drain of at least one HVSD comprise semiconductor regions of a
first polarity, and the channel comprises a semiconductor region of
a second polarity, and such that the source, internal drain, and
drain of at least HVSD comprise semiconductor regions of the second
polarity, and the channel comprises a semiconductor region of the
first polarity.
[0059] In FIG. 3C, a gate structure 310 is formed over the Si
island 302 to define the gate G and the channel 102 for the
transistor structure 202 of FIG. 2A. Concurrently, VDMGs 312 (three
in this example) are formed over the n-well in the extension 302a
of the Si island 302. Each gate structure 310, 312 comprises an
insulator (e.g., an oxide layer) and overlaying gate material
(e.g., polysilicon, pre-doped polysilicon, metal, etc.).
[0060] In FIG. 3D, two masked implant areas 314 are used to implant
N+ dopant to form the source S, the internal drain ID, and the
drain D.
[0061] In FIG. 3E, two masked implant areas 316 are used to implant
P+ dopant to facilitate formation of a gate or source body tie
connection (e.g., a direct connection or a diode, not shown), for
example, by using a conductive interconnect (e.g., metal) in
another layer of the structure (not shown). Body ties are
described, for example, in U.S. Pat. No. 7,890,891, issued Feb. 15,
2011, entitled "Method and Apparatus Improving Gate Oxide
Reliability by Controlling Accumulated Charge" and in U.S. Pat. No.
7,910,993, issued on Mar. 22, 2011, entitled "Method and Apparatus
for Use in Improving Linearity of MOSFETS Using an Accumulated
Charge Sink", both of which are assigned to the assignee of the
present invention and hereby incorporated by reference. Inclusion
of body tie implant areas 316 is an option that may be chosen for
various beneficial reasons, especially in analog and mixed signal
applications. Advantages of body ties may include improved output
resistance, higher gain, and improved linearity, among others. Body
ties can also increase the BV.sub.DSS of the transistor structure
202 by a few tenths of a volt.
[0062] In FIG. 3F, electrically conductive contacts 110, 112, 114,
210 (using the reference numbers from FIG. 2A) are respectively
made to the source S, the gate G (two contacts are shown), the
drain D, and to each of the VDMGs 312. In addition, electrically
conductive contacts 318 are made to the body of the device. A
contact is not necessary for the internal drain, as noted
above.
[0063] As one of ordinary skill in the art will appreciate, other
structures (e.g., device interconnects, deep well region 220, etc.)
are omitted for clarity, and other or additional steps may be
involved in the formation of the structures depicted in FIGS. 2A-2B
and FIGS. 3A-3F. Further, some of the steps described above may be
performed in an order different from that described. A person of
ordinary skill in the art of FET fabrication will understand that
many possible layout options exist beyond those illustrated in
FIGS. 3A-3F without departing from the teachings of the present
invention.
[0064] Note that for bulk CMOS (rather than SOI CMOS), the process
illustrated in FIGS. 3A-3F may need to be adapted for a
multiple-well process designed for high voltage breakdown to the
Substrate (e.g., 100V). Further, while the illustrated example
utilizes a CMOS MOSFET process with an SOI Substrate, it may be
adapted for GaAs MESFETs and other technologies.
Advantages & Variant Embodiments
[0065] The HVSD 200, 250 structures shown in FIG. 2A and FIG. 2B
are capable of increasing breakdown voltages substantially for a
switching device. For example, a conventional MOSFET may have a
breakdown voltage of a few volts, while an HVSD with a modulated
resistance region 206 and one or more VDMGs 208 may have a
breakdown voltage of tens of volts or more. In general, the
invention encompasses embodiments that have a BV.sub.DSS per VDMG
208 that can exceed at least about 4V for NMOSFET designs, and at
least about 5V for PMOSFET designs. Accordingly, HVSDs may increase
the device BV.sub.DSS by at least an amount equal to the BV.sub.DSS
of a conventional MOSFET.
[0066] With multiple VDMGs 208, an HVSD may have a breakdown
voltage of 50-100V or more. Further, a single device architecture
covers a wide range of voltage domains (e.g. 5-15V, 25-35V,
80-100V, etc.), with fine granularity, simply by adjusting the
number of VDMGs 208 in an HVSD.
[0067] All of the HVSD structures depicted in FIGS. 2A-2B and FIGS.
3A-2F may be fabricated using standard, commercially available SOI
(including silicon-on-sapphire) CMOS processes without the need for
additional masks in many embodiments. Therefore, HVSD devices can
be co-designed and co-fabricated with standard CMOS logic and
circuitry. In addition to providing additional functionality, this
aspect also provides the well-known low cost and high reliability
advantages of CMOS technology.
[0068] Most generally, an HVSD includes integrated circuits that
combine, in a unitary structure, a FET transistor structure and an
integrated, co-fabricated modulated resistance region controlled by
one or more VDMGs. Regardless of fabrication materials or
technique, the modulated resistance region should (1) readily
conduct current between the drain and an internal drain of the FET
transistor structure when the FET transistor structure is switched
ON so as to conduct current between the source S and drain D, and
(2) drop the voltage between the drain D and the internal drain of
the FET transistor structure to less than the breakdown voltage of
the FET transistor structure when the FET transistor structure is
switched OFF.
[0069] Embodiments may beneficially include LDD regions and HALO
implants to change or enhance the operational parameters of an
HVSD. For example, LDDs may improve gate oxide reliability, and a
light version of an LDD implant may be beneficial in some
embodiments to reduce the ON resistance, R.sub.ON, of an HVSD.
[0070] In some embodiments, the internal drain 204 may have a
different level of doping than the source S, or be doped with a
different N-type material. In some embodiments, the internal drain
204 may be an extension of the n-well that defines the modulated
resistance region 206, rather than a separate N+ doped region. In
some embodiments, the Substrate may be a highly doped P+ substrate.
In PMOSFET variants of the HVSD, the dopant types are reversed
compared to NMOSFET variants. Both NMOSFET and PMOSFET versions of
the HVSD can be combined to form CMOS devices.
[0071] Compared to prior art stacking of multiple distinct FETs to
withstand high voltages, HVSDs (i.e., devices with a modulated
resistance region 206 controlled by VDMGs 208 and co-fabricated
with a transistor structure 202) results in a smaller area on an
IC. Further, since the VDMGs 208 may be fabricated on an n-well
(rather than adjacent to N+ doped source and drain regions, as is
the case for the gates of stacked multiple distinct FETs), the
allowed drain-gate voltage, V.sub.DG, for each VDMG 208 is much
larger than for the transistor structure 202. Consequently, the
BV.sub.DSS per VDMG 208 can be designed to be much larger (e.g., up
to 1.5 times or more) than the BV.sub.DSS of the transistor
structure 202, and the BV.sub.DSS for an HVSD can be designed to be
more than twice the BV.sub.DSS of a conventional single-gate
MOSFET.
[0072] At the circuit level, a lower total gate capacitance,
C.sub.GG for an HVSD may be achieved if the VDMGs 208 are biased ON
before the transistor structure 202 is biased ON, thus leading to
faster switching, using a suitable timing and bias circuit (not
shown). Note that if the VDMGs 208 are biased ON before the
transistor structure 202 is biased ON, the potential across the
transistor structure 202 will not float up to the voltage needed
for breakdown if the number of VDMGs 208 is reasonably high (the
number depends on the length of the modulated resistance region
206), since there will be a potential drop from the drain D to the
internal drain 204.
[0073] Embodiments of the inventive HVSD architecture are less
susceptible to damage due to electrostatic discharge (ESD) events
than conventional MOSFETS. The single relatively large BJT inherent
in an HVSD device has a very inefficient base (i.e., the base is
wide and resistive) which does not breakdown easily, giving
enhanced ESD immunity to the device, a useful characteristic for
power switching applications.
[0074] HVSDs perform better than stacked FETs since there are no
narrow-base (and thus high gain) BJTs in series. Stacked FETs
inherently present a series of small BJTs, one or more of which can
breakdown during turn ON and damage the associated FETs.
[0075] As noted above, breakdown of a MOSFET may be caused by
various effects, including avalanche breakdown, punch-through, and,
in bulk silicon, drain-substrate breakdown. While the primary
breakdown mechanism is avalanche breakdown, all of these breakdown
mechanisms are mitigated by the invention by reducing the amount of
voltage on the drain of a FET device.
[0076] Methods
[0077] Another aspect of the invention includes methods for
fabricating an HVSD. For example, FIG. 4 is a process flow diagram
400 showing one method for fabricating an integrated circuit HVSD
in accordance with the present invention, including fabricating, in
a unitary structure, (1) a FET transistor structure having a
source, a gate, and an internal drain, (2) an integrated,
co-fabricated modulated resistance region coupled to the internal
drain and controlled by one or more voltage-drop modulation gates,
and (3) a drain (STEP 402).
[0078] As another example, FIG. 5 is a process flow diagram 500
showing another method for fabricating an integrated circuit HVSD
in accordance with the present invention, including: forming a
transistor structure including a source, a gate, an internal drain,
and a channel between the source and internal drain (STEP 502);
forming a modulated resistance region co-fabricated with the
transistor structure and electrically connected to the internal
drain of the transistor structure (STEP 504); forming at least one
voltage-drop modulation gate, fabricated with respect to the
modulated resistance region so as to control the resistance of the
modulated resistance region (STEP 506); and forming a drain
electrically connected to the modulated resistance region and
configured to be coupled to a voltage source (STEP 508).
[0079] Other aspect of these methods may include one or more of the
following: the modulated resistance region (1) readily conducts
current between the drain and the internal drain when the FET
transistor structure is switched ON so as to conduct current
between the source and drain, and (2) drops an applied voltage on
the drain to less than the breakdown voltage BV.sub.DSS of the FET
transistor structure when the FET transistor structure is switched
OFF; further including forming a plurality of voltage-drop
modulation gates series-connected between the internal drain and
the drain; wherein the source, internal drain, and drain of at
least one integrated circuit high voltage switching device comprise
semiconductor regions of a first polarity, and the channel
comprises a semiconductor region of a second polarity; wherein the
first polarity is N-type material and the second polarity is P-type
material; wherein the first polarity is P-type material and the
second polarity is N-type material; wherein the source, internal
drain, and drain of at least one integrated circuit high voltage
switching device comprise semiconductor regions of a first
polarity, and the channel comprises a semiconductor region of a
second polarity, and wherein the source, internal drain, and drain
of at least another integrated circuit high voltage switching
device comprise semiconductor regions of the second polarity, and
the channel comprises a semiconductor region of the first polarity;
wherein the modulated resistance region comprises a semiconductor
region of the first polarity, doped up to about 5 orders of
magnitude less than the source and drain; wherein the at least one
voltage-drop modulation gate controls the resistance of the
modulated resistance region by at least partially depleting at
least a portion of the modulated resistance region upon application
of a bias voltage to the at least one voltage-drop modulation gate;
wherein the at least one voltage-drop modulation gate controls the
resistance of the modulated resistance region by fully depleting at
least a portion of the modulated resistance region upon application
of a bias voltage to the at least one voltage-drop modulation gate;
further including fabricating the integrated circuit high voltage
switching device on a silicon-on-sapphire substrate; further
including fabricating the integrated circuit high voltage switching
device on a silicon-on-insulator substrate; wherein the
silicon-on-insulator substrate further includes a deep well region
proximate to at least a portion of the modulated resistance region,
and further including at least one substrate contact in electrical
contact with the deep well region for applying a bias voltage to
the deep well region; wherein the deep well region is the same
polarity as the modulated resistance region; wherein the at least
one voltage-drop modulation gate controls the resistance of the
modulated resistance region by at least partially depleting at
least a portion of the modulated resistance region upon application
of a first bias voltage to the at least one voltage-drop modulation
gate, and wherein the deep well region further depletes at least a
portion of the modulated resistance region upon application of a
second bias voltage to the at least one substrate contact; wherein
the breakdown voltage per voltage-drop modulation gate is at least
about 4V; wherein the breakdown voltage per voltage-drop modulation
gate is greater than the breakdown voltage of the transistor
structure; further including fabricating the integrated circuit
high voltage switching device using a CMOS process; wherein surface
regions of the modulated resistance region adjacent the at least
one voltage-drop modulation gate are doped with a material having a
first polarity and at a higher doping concentration than the
modulated resistance region under the at least one voltage-drop
modulation gate; and further including forming a silicide layer on
surface regions of the modulated resistance region adjacent the
least one voltage-drop modulation gate.
[0080] Fabrication Technologies & Options
[0081] The term "MOSFET", as used in this disclosure, means any
field effect transistor (FET) with an insulated gate and comprising
a metal or metal-like, insulator, and semiconductor structure. The
terms "metal" or "metal-like" include at least one electrically
conductive material (such as aluminum, copper, or other metal, or
highly doped polysilicon, graphene, or other electrical conductor),
"insulator" includes at least one insulating material (such as
silicon oxide or other dielectric material), and "semiconductor"
includes at least one semiconductor material.
[0082] As should be readily apparent to one of ordinary skill in
the art, various embodiments of the invention can be implemented to
meet a wide variety of specifications. Unless otherwise noted
above, selection of suitable component values is a matter of design
choice and various embodiments of the invention may be implemented
in any suitable IC technology (including but not limited to MOSFET
structures). Integrated circuit embodiments may be fabricated using
any suitable substrates and processes, including but not limited to
standard bulk silicon (if suitable insulating wells are used to
isolate the active devices from the substrate, and the well to
substrate breakdown voltage exceeds the applied voltage),
silicon-on-insulator (SOI), and silicon-on-sapphire (SOS). Unless
otherwise noted above, the invention may be implemented in other
transistor technologies such as GaAs HBT, GaN HEMT, GaAs pHEMT, and
MESFET technologies. However, the inventive concepts described
above are particularly useful with an SOI-based fabrication process
(including SOS), and with fabrication processes having similar
characteristics.
[0083] Voltage levels may be adjusted or voltage and/or logic
signal polarities reversed depending on a particular specification
and/or implementing technology (e.g., NMOS, PMOS, or CMOS, and
enhancement mode or depletion mode transistor devices). Component
voltage, current, and power handling capabilities may be adapted as
needed, for example, by adjusting device sizes, serially "stacking"
components (particularly FETs) to withstand greater voltages,
and/or using multiple components in parallel to withstand greater
currents. Additional circuit components may be added to enhance the
capabilities of the disclosed circuits and/or to provide additional
functionality without significantly altering the functionality of
the disclosed circuits.
[0084] Conclusion
[0085] A number of embodiments of the invention have been
described. It is to be understood that various modifications may be
made without departing from the spirit and scope of the invention.
For example, some of the steps described above may be order
independent, and thus can be performed in an order different from
that described. Further, some of the steps described above may be
optional. Various activities described with respect to the methods
identified above can be executed in repetitive, serial, or parallel
fashion.
[0086] It is to be understood that the foregoing description is
intended to illustrate and not to limit the scope of the invention,
which is defined by the scope of the following claims, and that
other embodiments are within the scope of the claims. (Note that
the parenthetical labels for claim elements are for ease of
referring to such elements, and do not in themselves indicate a
particular required ordering or enumeration of elements; further,
such labels may be reused in dependent claims as references to
additional elements without being regarded as starting a
conflicting labeling sequence).
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