U.S. patent application number 14/667590 was filed with the patent office on 2016-09-29 for perpendicular mram with magnet.
The applicant listed for this patent is Avalanche Technology, Inc.. Invention is credited to Ebrahim Abedifard, Yiming Huai, Bing K. Yen, Yuchen Zhou.
Application Number | 20160284761 14/667590 |
Document ID | / |
Family ID | 56974319 |
Filed Date | 2016-09-29 |
United States Patent
Application |
20160284761 |
Kind Code |
A1 |
Zhou; Yuchen ; et
al. |
September 29, 2016 |
Perpendicular MRAM with Magnet
Abstract
The present invention is directed to a magnetic random access
memory (MRAM) comprising an MRAM die having a front side that
includes therein a plurality of perpendicular magnetic tunnel
junction (MTJ) memory elements and a back side; and a sheet of
permanent magnet disposed in close proximity to the MRAM die with a
sheet surface facing the front side or back side of the MRAM die.
The sheet of permanent magnet has a permanent magnetization
direction substantially perpendicular to the sheet surface facing
the MRAM die and exerts a magnetic field that eliminate or minimize
the offset field of the magnetic free layer. The MRAM die and the
sheet of permanent magnet may be encapsulated by a package case.
The MRAM may further comprise a soft magnetic shield disposed on a
side of the MRAM die opposite the sheet of permanent magnet.
Inventors: |
Zhou; Yuchen; (San Jose,
CA) ; Yen; Bing K.; (Cupertino, CA) ; Huai;
Yiming; (Pleasanton, CA) ; Abedifard; Ebrahim;
(San Jose, CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Avalanche Technology, Inc. |
Fremont |
CA |
US |
|
|
Family ID: |
56974319 |
Appl. No.: |
14/667590 |
Filed: |
March 24, 2015 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 43/02 20130101;
H01L 2924/1435 20130101; H01L 2924/15153 20130101; H01L 27/228
20130101; H01L 23/552 20130101; H01L 43/08 20130101; H01L 43/10
20130101 |
International
Class: |
H01L 27/22 20060101
H01L027/22; H01L 43/08 20060101 H01L043/08; H01L 43/10 20060101
H01L043/10; H01L 43/02 20060101 H01L043/02 |
Claims
1. A magnetic random access memory (MRAM) comprising: an MRAM die
having a front side that includes therein a plurality of selection
transistors and a plurality of perpendicular magnetic tunnel
junction (MTJ) memory elements formed thereon and a back side; and
a sheet of permanent magnet disposed in close proximity to said
MRAM die with a sheet surface facing said front side or back side
of said MRAM die, said sheet of permanent magnet having a permanent
magnetization direction substantially perpendicular to said sheet
surface, wherein said sheet of permanent magnet faces said back
side of said MRAM die.
2. The magnetic random access memory of claim 1, wherein each of
said plurality of perpendicular MTJ memory elements comprises: a
magnetic reference layer having a fixed magnetization substantially
perpendicular to a layer plane thereof; a magnetic free layer
having a variable magnetization direction substantially
perpendicular to a layer plane thereof; and an insulating tunnel
junction layer formed between said magnetic reference and free
layers.
3. The magnetic random access memory of claim 2, wherein each of
said plurality of perpendicular MTJ memory elements further
comprises a magnetic fixed layer coupled to said magnetic reference
layer through an anti-ferromagnetic coupling layer.
4. The magnetic random access memory of claim 1, wherein said sheet
surface faces said back side of said MRAM die.
5. The magnetic random access memory of claim 1, wherein said sheet
surface is bonded to said back side of said MRAM die.
6. The magnetic random access memory of claim 1, wherein said sheet
of permanent magnet is made of a rare-earth magnet, a hard ferrite
magnet, or a hard magnetic alloy comprising cobalt, nickel, and
aluminum.
7. A magnetic random access memory (MRAM) comprising: an MRAM die
having a front side that includes therein a plurality of
perpendicular magnetic tunnel junction (MTJ) memory elements and a
back side; and a sheet of permanent magnet disposed in close
proximity to said MRAM die with a sheet surface facing said front
side or back side of said MRAM die, said sheet of permanent magnet
having a permanent magnetization direction substantially
perpendicular to said sheet surface, wherein said sheet of
permanent magnet has variable thickness.
8. The magnetic random access memory of claim 1, further comprising
a layer of soft ferromagnetic material formed between said MRAM die
and said sheet of permanent magnet.
9. The magnetic random access memory of claim 1, further comprising
a first soft magnetic shield formed on a side of said MRAM die
opposite said sheet of permanent magnet.
10. The magnetic random access memory of claim 9, wherein said
first soft magnetic shield is made of a soft ferromagnetic alloy
comprising nickel and iron.
11. The magnetic random access memory of claim 9, further
comprising a second soft magnetic shield formed on a side of said
sheet of permanent magnet opposite said MRAM die.
12. The magnetic random access memory of claim 11, wherein said
second soft magnetic shield is made of a soft ferromagnetic alloy
comprising nickel and iron.
13. The magnetic random access memory of claim 1, further
comprising a wrap-around soft magnetic shield that surrounds said
MRAM die and said sheet of permanent magnet.
14. A magnetic random access memory (MRAM) comprising: an MRAM die
having a front side that includes therein a plurality of selection
transistors and a plurality of perpendicular magnetic tunnel
junction (MTJ) memory elements formed thereon and a back side; a
sheet of permanent magnet disposed in close proximity to said MRAM
die with a sheet surface facing said front side or back side of
said MRAM die, said sheet of permanent magnet having a permanent
magnetization direction substantially perpendicular to said sheet
surface; and a package case encapsulating said MRAM die and said
sheet of permanent magnet.
15. The magnetic random access memory of claim 14, wherein said
package case is made of an insulator material.
16. A magnetic random access memory (MRAM) comprising: an MRAM die
having a front side that includes therein a plurality of
perpendicular magnetic tunnel junction (MTJ) memory elements and a
back side; a sheet of permanent magnet disposed in close proximity
to said MRAM die with a sheet surface facing said front side or
back side of said MRAM die, said sheet of permanent magnet having a
permanent magnetization direction substantially perpendicular to
said sheet surface; and a package case encapsulating said MRAM die
and said sheet of permanent magnet, wherein said package case is
made of a composite material comprising soft ferromagnetic
particles imbedded in an insulator matrix.
17. The magnetic random access memory of claim 14, wherein said
package case is partly constructed of a soft ferromagnetic
material.
18. The magnetic random access memory of claim 1, wherein said MRAM
die is fabricated by dicing a wafer substrate with device layers
formed thereon.
19. (canceled)
20. The magnetic random access memory of claim 9, wherein said
first soft magnetic shield has a discrete, planar shape and is
isolated from other magnetic structures.
Description
BACKGROUND
[0001] The present invention relates to a memory that includes a
magnet packaged therein, and more particularly, to a perpendicular
magnetic random access memory (MRAM) packaged with a permanent
magnet to improve programming characteristics thereof.
[0002] Spin transfer torque magnetic random access memory
(STT-MRAM) is a new class of non-volatile memory, which can retain
the stored information when powered off. An STT-MRAM device
normally comprises an array of memory cells, each of which includes
a magnetic memory element and a selection transistor coupled in
series between appropriate electrodes. Upon application of a
switching current to the magnetic memory element, the electrical
resistance of the magnetic memory element would change accordingly,
thereby switching the stored logic in the respective memory
cell.
[0003] FIG. 1 is a schematic circuit diagram of an STT-MRAM device
30, which comprises a plurality of memory cells 32 with each of the
memory cells 32 including a selection transistor 34 coupled to a
magnetic memory element 36; a plurality of parallel word lines 38
with each being coupled to the gates of a respective row of the
selection transistors 34 in a first direction; and a plurality of
parallel bit lines 40 with each being coupled to a respective row
of the memory elements 36 in a second direction substantially
perpendicular to the first direction; and optionally a plurality of
parallel source lines 42 with each being coupled to a respective
row of the selection transistors 34 in the first or second
direction.
[0004] The magnetic memory element 36 normally includes a magnetic
reference layer and a magnetic free layer with an electron tunnel
junction layer interposed therebetween. The magnetic reference
layer, the electron tunnel junction layer, and the magnetic free
layer collectively form a magnetic tunneling junction (MTJ). Upon
the application of an appropriate current through the MTJ, the
magnetization direction of the magnetic free layer can be switched
between two directions: parallel and anti-parallel with respect to
the magnetization direction of the magnetic reference layer. The
electron tunnel junction layer is normally made of an insulating
material with a thickness ranging from a few to a few tens of
angstroms. When the magnetization directions of the magnetic free
and reference layers are substantially parallel, electrons
polarized by the magnetic reference layer can tunnel through the
insulating tunnel junction layer, thereby decreasing the electrical
resistance of the MTJ. Conversely, the electrical resistance of the
MTJ is high when the magnetization directions of the magnetic
reference and free layers are substantially anti-parallel. The
stored logic in the magnetic memory element can be switched by
changing the magnetization direction of the magnetic free layer
between parallel and anti-parallel with respect to the
magnetization direction of the reference layer. Therefore, the MTJ
has two stable resistance states that allow the MTJ to serve as a
non-volatile memory element.
[0005] Based on the relative orientation between the magnetic
reference and free layers and the magnetization directions thereof,
an MTJ can be classified into one of two types: in-plane MTJ, the
magnetization directions of which lie substantially within planes
parallel to the same layers, or perpendicular MTJ, the
magnetization directions of which are substantially perpendicular
to the layer planes.
[0006] FIGS. 2A and 2B illustrate programming operations of an
STT-MRAM cell including a perpendicular MTJ memory element 80
coupled to a selection transistor 82 in series. The MTJ memory
element 80 includes a magnetic reference layer 84 having an
invariable or fixed magnetization direction 86 perpendicular to the
layer plane thereof, a magnetic free layer 88 having a variable
magnetization direction 90 or 96 perpendicular to the layer plane
thereof, and a tunnel junction layer 92 interposed
therebetween.
[0007] FIG. 2A illustrates the writing process for switching the
resistance state of the MTJ memory element 80 from high to low. As
electrons that pass through the magnetic reference layer 84 are
being spin-polarized, the spin-polarized electrons exert a spin
transfer torque on the magnetic free layer 88. When the
spin-polarized current or parallelizing current (i.sup.p) 98
exceeds a threshold level, the magnetic free layer 88 switches from
the anti-parallel to parallel magnetization direction 90. It should
be noted that the parallelizing write current (i.sup.p) 98 flows in
the opposite direction as the electrons.
[0008] Conversely, FIG. 2B illustrates the writing process for
switching the resistance state of the MTJ memory element 80 from
low to high. As electrons pass through the magnetic free layer 88,
the electrons with the same spin direction as that of the
magnetization in the magnetic reference layer 84 pass into the
magnetic reference layer 84 unimpeded. However, the electrons with
the opposite spin direction are reflected back to the magnetic free
layer 88 at the boundary between the tunnel junction layer 92 and
the magnetic reference layer 84, causing the magnetization
direction 96 of the magnetic free layer 88 to switch from the
parallel to anti-parallel orientation when the anti-parallelizing
current (i.sup.ap) 100 exceeds a threshold level.
[0009] The voltages required to drive the parallelizing current
(i.sup.p) 98 and the anti-parallelizing current (i.sup.ap) 100
should ideally be similar in order to accommodate the control and
power circuitry, which is normally designed and optimized for
symmetric switching voltages. In the MTJ memory element 80,
however, the magnetic reference layer 84 exerts an external
magnetic field perpendicular to the layer plane thereof upon the
magnetic free layer 88, causing the switching voltages to become
asymmetric. Therefore, the stray magnetic field exerted by the
magnetic reference layer 84 upon the magnetic free layer 88, also
known as the offset field, needs to be eliminated or minimized to
ensure symmetric switching behavior.
[0010] One approach for eliminating the offset field of the
magnetic free layer 88 is to add one or more magnetic layers with
fixed magnetization to the MTJ memory element 80 in order to
counter-balance or cancel the stray magnetic field exerted by the
magnetic reference layer 84. FIG. 3A shows an exemplary MTJ memory
element 110 comprising the MTJ memory element 80 and a magnetic
fixed layer 112 separated from the magnetic reference layer 84 by a
non-magnetic coupling layer 114. The magnetic fixed layer 112 has a
second fixed magnetization direction 116 that is perpendicular to
the layer plane thereof and is substantially opposite to the first
magnetization direction 86 of the magnetic reference layer 84.
Another exemplary MTJ memory element 120 illustrated in FIG. 3B
includes the MTJ memory element 80 and a magnetic compensation
layer 122 separated from the magnetic free layer 88 by a
non-magnetic spacer layer 124. The magnetic compensation layer 122
has a third fixed magnetization direction 126 that is perpendicular
to the layer plane thereof and is substantially opposite to the
first magnetization direction 86 of the magnetic reference layer
84.
[0011] While the magnetic fixed layer 112 and the magnetic
compensation layer 122 may eliminate or minimize the offset field
of the magnetic free layer 88 by counter-balancing the stray
magnetic field exerted by the magnetic reference layer 84, the
addition of the magnetic fixed layer 112 and the magnetic
compensation layer 112 disadvantageously increases the total film
stack thickness, which may complicate the etching and integration
processes. Etching of magnetic material, which cannot be readily
volatilized by chemical reactions with common etching vapors, is
mostly a physical sputtering process that may redeposit sputtered
magnetic material on the sidewall of the insulating tunnel junction
layer 92 and cause the electrical shunting of the MTJ memory
element. Therefore, the propensity for shunting of the MTJ memory
element increases with increasing amount of magnetic material to be
etched.
[0012] For the foregoing reasons, there is a need for an MRAM that
has a desired symmetric switching behavior and that can be
inexpensively manufactured with high yield.
SUMMARY
[0013] The present invention is directed to a magnetic random
access memory (MRAM) that satisfies this need. The MRAM having
features of the present invention comprises an MRAM die having a
front side that includes therein a plurality of perpendicular
magnetic tunnel junction (MTJ) memory elements and a back side; and
a sheet of permanent magnet disposed in close proximity to the MRAM
die with a sheet surface facing the front side or back side of the
MRAM die. Each of the plurality of perpendicular MTJ memory
elements may comprise a magnetic reference layer having a fixed
magnetization direction substantially perpendicular to a layer
plane thereof, a magnetic free layer having a variable
magnetization direction substantially perpendicular to a layer
plane thereof, and an insulating tunnel junction layer interposed
between the magnetic reference layer and the magnetic free layer.
The sheet of permanent magnet has a fixed or permanent
magnetization direction substantially perpendicular to the sheet
surface facing the MRAM die and exerts a magnetic field that
cancels or counter-balances the stray magnetic field exerted on the
magnetic free layer, thereby eliminating or minimizing the offset
field. The MRAM die and the sheet of permanent magnet may be
encapsulated in a package case. The MRAM may further comprise a
soft magnetic shield disposed on a side of the MRAM die opposite
the sheet of permanent magnet.
BRIEF DESCRIPTION OF THE DRAWINGS
[0014] These and other features, aspects, and advantages of the
present invention will become better understood with regard to the
following description, appended claims, and accompanying drawings
where:
[0015] FIG. 1 is a schematic circuit diagram of an STT-MRAM
device;
[0016] FIGS. 2A and 2B are schematic drawings illustrating writing
processes of an STT-MRAM element to low and high resistance state,
respectively;
[0017] FIGS. 3A and 3B are schematic views of alternative STT-MRAM
elements that are compatible with the present invention;
[0018] FIG. 4 is a schematic view of an embodiment of the present
invention as applied to an MRAM;
[0019] FIG. 5 is a schematic view of another embodiment in which
the thickness of the permanent magnet varies;
[0020] FIG. 6 is a schematic view of still another embodiment in
which the permanent magnet is bonded to the MRAM die;
[0021] FIG. 7 is a schematic view of yet another embodiment in
which a soft magnetic layer is disposed between the MRAM die and
the permanent magnet;
[0022] FIG. 8 is a schematic view of still yet another embodiment
of the present invention in which the permanent magnet is formed on
or bonded to the back side of the wafer prior to dicing;
[0023] FIG. 9 is a schematic view of yet still another embodiment
of the present invention in which a magnetic shield is disposed on
one side of the MRAM die opposite the permanent magnet;
[0024] FIGS. 10A and 10B are schematic views of two variations of
the embodiment of FIG. 9 in which the magnetic shield forms a part
of a package case;
[0025] FIG. 11 is a schematic view of still yet another embodiment
of the present invention in which the MRAM die and the permanent
magnet are disposed between two magnetic shields that may be
substantially parallel to each other;
[0026] FIG. 12 is a schematic view of yet still another embodiment
of the present invention in which the MRAM die and the permanent
magnet are surrounded by a wrap-around magnetic shield;
[0027] FIG. 13 is a schematic view of a variation of the embodiment
of FIG. 12 in which a piece of the wrap-around magnetic shield
forms a part of a package case;
[0028] FIG. 14 is a schematic view of another variation of the
embodiment of FIG. 12 in which a wrap-around magnetic shield is
coated onto the inner wall of the package case;
[0029] FIG. 15 is a schematic view of still another variation of
the embodiment of FIG. 12 in which a package case also functions as
a wrap-around magnetic shield; and
[0030] FIG. 16 is a plot illustrating the dependence of offset
field on MTJ size.
[0031] For purposes of clarity and brevity, like elements and
components will bear the same designations and numbering throughout
the Figures, which are not necessarily drawn to scale.
DETAILED DESCRIPTION
[0032] In the Summary above and in the Detailed Description, and
the claims below, and in the accompanying drawings, reference is
made to particular features of the invention. It is to be
understood that the disclosure of the invention in this
specification includes all possible combinations of such particular
features. For example, where a particular feature is disclosed in
the context of a particular aspect or embodiment of the invention,
or a particular claim, that feature can also be used, to the extent
possible, in combination with and/or in the context of other
particular aspects and embodiments of the invention, and in the
invention generally.
[0033] Where reference is made herein to a material AB composed of
element A and element B, the material AB can be an alloy, a
compound, or a combination thereof, except where the context
excludes that possibility.
[0034] The term "noncrystalline" means an amorphous state or a
state in which fine crystals are dispersed in an amorphous matrix,
not a single crystal or polycrystalline state. In case of state in
which fine crystals are dispersed in an amorphous matrix, those in
which a crystalline peak is substantially not observed by, for
example, X-ray diffraction can be designated as
"noncrystalline."
[0035] The term "magnetic dead layer" means a layer of supposedly
ferromagnetic material that does not exhibit a net magnetic moment
in the absence of an external magnetic field. A magnetic dead layer
of several atomic layers may form in a magnetic film in contact
with another layer material owing to intermixing of atoms at the
interface. Alternatively, a magnetic dead layer may form as
thickness of a magnetic film decreases to a point that the magnetic
film becomes superparamagnetic.
[0036] The term "at least" followed by a number is used herein to
denote the start of a range beginning with that number, which may
be a range having an upper limit or no upper limit, depending on
the variable being defined. For example, "at least 1" means 1 or
more than 1. The term "at most" followed by a number is used herein
to denote the end of a range ending with that number, which may be
a range having 1 or 0 as its lower limit, or a range having no
lower limit, depending upon the variable being defined. For
example, "at most 4" means 4 or less than 4, and "at most 40%"
means 40% or less than 40%. When, in this specification, a range is
given as "(a first number) to (a second number)" or "(a first
number)-(a second number)," this means a range whose lower limit is
the first number and whose upper limit is the second number. For
example, "25 to 100 nm" means a range whose lower limit is 25 mm
and whose upper limit is 100 nm.
[0037] An embodiment of the present invention as applied to a
magnetic random access memory (MRAM) will now be described with
reference to FIG. 4. Referring now to FIG. 4, the illustrated MRAM
200 comprises an MRAM die 202, a permanent magnet 204 disposed in
close proximity thereto, and a supporting package case 206 for
encapsulating and protecting the MRAM die 202 and the permanent
magnet 204 disposed within the cavity defined by the package case
206. The supporting package case 206 may be made of any suitable
insulator material, such as polymer or ceramic material.
[0038] The MRAM die 202, which may be diced from a larger wafer
comprising device layers formed on a substrate, has a front side
208 and a back side 210 opposite thereto. The front side 208
includes the device layers (not shown), such as layers of
transistors and memory elements, while the back side 210 is a
surface of the substrate that is substantially free of devices. The
MRAM die 202 includes a plurality of perpendicular MTJ memory
elements (not shown) formed on the front side 208. Each of the
plurality of perpendicular MTJ memory elements may have a structure
analogous to the perpendicular MTJ memory element 80 of FIGS. 2A
and 2B, comprising a magnetic reference layer 84 and a magnetic
free layer 88 with an insulating tunnel junction layer 92
interposed therebetween. The magnetic reference layer 84 has a
first fixed magnetization direction 86 substantially perpendicular
to the layer plane thereof. The magnetic free layer 88 has a
variable magnetization direction 90/96 substantially perpendicular
to the layer plane thereof.
[0039] Each of the plurality of perpendicular MTJ memory elements
may further include additional layers, such as but not limited to
coupling layer, magnetic fixed layer, spacer layer, magnetic
compensation layer, seed layer, and capping layer. For example,
each perpendicular MTJ memory element may have a structure
analogous to the perpendicular MTJ memory element 110 of FIG. 3A,
comprising a magnetic reference layer 84 and a magnetic free layer
88 with an insulating tunnel junction layer 92 interposed
therebetween, and a magnetic fixed layer 112 anti-ferromagnetically
coupled to the magnetic reference layer 84 through an
anti-ferromagnetic coupling layer 114. The magnetic fixed layer 112
has a second fixed magnetization direction 116 that is
substantially perpendicular to the layer plane thereof and is
substantially opposite to the first fixed magnetization direction
86 of the magnetic reference layer 84.
[0040] Each of the plurality of perpendicular MTJ memory elements
may alternatively have a structure analogous to the perpendicular
MTJ memory element 120 of FIG. 3B, comprising a magnetic reference
layer 84 and a magnetic free layer 88 with an insulating tunnel
junction layer 92 interposed therebetween, and a magnetic
compensation layer 122 separated from the magnetic free layer 88 by
a spacer layer 124. The magnetic compensation layer 122 has a third
fixed magnetization direction 126 that is substantially
perpendicular to the layer plane thereof and is substantially
opposite to the first fixed magnetization direction 86 of the
magnetic reference layer 84.
[0041] The layer stacking order of each of the plurality of
perpendicular MTJ memory elements may be inverted without affecting
the device performance. For example, each perpendicular MTJ memory
element may have a structure in which the magnetic reference layer
84 of FIGS. 2A, 2B, 3A, and 3B is disposed on top of the insulating
tunnel junction layer 92 and the magnetic free layer 88.
[0042] The magnetic free layer 88, the magnetic reference layer 84,
the magnetic fixed layer 112, and the magnetic compensation layer
122 of the perpendicular MTJ memory element may be made of any
suitable magnetic material or structure. One or more of the
magnetic free layer 88, the magnetic reference layer 84, the
magnetic fixed layer 112, and the magnetic compensation layer 122
may comprise at least one ferromagnetic element, such as but not
limited to cobalt (Co), nickel (Ni), or iron (Fe), to form a
suitable magnetic material, such as but not limited to Co, Ni, Fe,
CoNi, CoFe, NiFe, or CoNiFe. The magnetic material of the one or
more of the above magnetic layers may further include one or more
non-magnetic elements, such as but not limited to boron (B),
titanium (Ti), zirconium (Zr), hafnium (Hf), vanadium (V), niobium
(Nb), tantalum (Ta), chromium (Cr), molybdenum (Mo), tungsten (W),
aluminum (Al), silicon (Si), germanium (Ge), gallium (Ga), oxygen
(O), nitrogen (N), carbon (C), platinum (Pt), palladium (Pd),
ruthenium (Ru), samarium (Sm), neodymium (Nd), or phosphorus (P),
to form a magnetic alloy or compound, such as but not limited to
cobalt-iron-boron (CoFeB), iron-platinum (FePt), cobalt-platinum
(CoPt), cobalt-iron-boron-titanium (CoFeBTi),
cobalt-iron-boron-zirconium, (CoFeBZr), cobalt-iron-boron-hafnium
(CoFeBHf), cobalt-iron-boron-vanadium (CoFeBV),
cobalt-iron-boron-tantalum (CoFeBTa), cobalt-iron-boron-chromium
(CoFeBCr), cobalt-iron-titanium (CoFeTi), cobalt-iron-zirconium
(CoFeZr), cobalt-iron-hafnium (CoFeHf), cobalt-iron-vanadium
(CoFeV), cobalt-iron-niobium (CoFeNb), cobalt-iron-tantalum
(CoFeTa), cobalt-iron-chromium (CoFeCr), cobalt-iron-molybdenum
(CoFeMo), cobalt-iron-tungsten (CoFeW), cobalt-iron-aluminum
(CoFeAl), cobalt-iron-silicon (CoFeSi), cobalt-iron-germanium
(CoFeGe), iron-zirconium-boron (FeZrB), samarium-cobalt (SmCo),
neodymium-iron-boron (NdFeB), or cobalt-iron-phosphorous
(CoFeP).
[0043] One or more of the above magnetic layers 84, 88, 112, and
122 may alternatively have a multilayer structure formed by
interleaving layers of a first type of material with layers of a
second type of material with at least one of the two types of
materials being magnetic, such as but not limited to [Co/Pt],
[Co/Pd], [Co/Pt(Pd)], [Co/Ni], [CoFe/Pt], [CoFe/Pd], [CoFe/Pt(Pd)],
[CoFe/Ni], or any combination thereof. The multilayer structure may
have a face-centered cubic (FCC) type of lattice structure, which
is different from the body-centered cubic structure (BCC) of some
ferromagnetic materials, such as Fe, CoFe, and CoFeB, and the
halite-like cubic lattice structure of magnesium oxide (MgO) that
may be used as the insulating tunnel junction layer 92. All
individual magnetic layers of a magnetic multilayer structure may
have the same magnetization direction. The multilayer structure may
or may not exhibit the characteristic satellite peaks associated
with superlattice when analyzed by X-ray, neutron diffraction, or
other diffraction techniques.
[0044] Still alternatively, one or more of the above magnetic
layers 84, 88, 112, and 122 may comprise two, three, four, or more
magnetic sublayers with each magnetic sublayer being made of any
suitable magnetic material, including magnetic metal, alloy,
compound, or multilayer structure, as described in the preceding
paragraphs above. The magnetic sublayers of a magnetic layer may
form adjacent to each other and may have the same magnetization
direction.
[0045] The insulating tunnel junction layer 92 may be formed of a
suitable insulating material containing oxygen, nitrogen, or both,
such as but not limited to magnesium oxide (MgO), aluminum oxide
(AlO.sub.x), titanium oxide (TiO.sub.x), zirconium oxide
(ZrO.sub.x), hafnium oxide (HfO.sub.x), vanadium oxide (VO.sub.x),
tantalum oxide (TaO.sub.x), chromium oxide (CrO.sub.x), molybdenum
oxide (MoO.sub.x), tungsten oxide (WO.sub.x), silicon oxide
(SiO.sub.x), silicon nitride (SiN.sub.x), or any combination
thereof. The insulating tunnel junction layer 92 may have a
halite-like cubic lattice structure.
[0046] The coupling layer 114, which may anti-ferromagnetically
couple the magnetic fixed layer 112 to the magnetic reference
layers 84, may have a single layer structure or may comprise two,
three, four, or more sublayers formed adjacent to each other. One
or more of the single layer and the multiple sublayers of the
coupling layer 114 may be made of a suitable coupling material,
such as but not limited to ruthenium (Ru), vanadium (V), niobium
(Nb), tantalum (Ta), chromium (Cr), molybdenum (Mo), tungsten (W),
manganese (Mn), rhenium (Re), osmium (Os), rhodium (Rh), iridium
(Ir), copper (Cu), or any combination thereof.
[0047] With continuing reference to FIG. 4, the front side 208 of
the MRAM die 202 may have conductive bond pads (not shown) that are
electrically connected to a set of package bond pads (not shown)
formed on the package case 206. The permanent magnet 204 may be in
the form of a block or sheet and may be disposed in close proximity
to the MRAM die 202 with a block or sheet surface facing the back
side 210 of the MRAM die 202. The permanent magnet 204 has a fixed
or permanent magnetization direction 212 substantially
perpendicular to the block or sheet surface thereof and exerts a
magnetic field 214 substantially perpendicular to the plane of the
MRAM die 202 that substantially cancels or counter-balances the
stray field exerted on the magnetic free layers of the
perpendicular MTJ memory elements by other magnetic layers, thereby
eliminating or minimizing the offset field. The thickness of the
permanent magnet 204 and the distance between the permanent magnet
204 and the perpendicular MTJ memory elements in the MRAM die 202
may be varied to adjust the offset field. The permanent magnet 204
may have larger planar dimensions than the MRAM die 202 in order to
improve the uniformity of the magnetic field 214. The permanent
magnet 204 may alternatively be disposed adjacent to the front side
208 of the MRAM die 202. In such a case, the permanent magnet 204
may need to have via holes (not shown), through which the
electrical connections between the conductive bond pads formed on
the front side 208 and the package bond pads formed on the package
case 206 may pass.
[0048] The permanent magnet 204 may be in a free-standing block or
sheet form and may be made of any "hard" ferromagnetic material
having suitably high coercivity and remanence. The permanent magnet
204 may have a remanence greater than about 0.1 Tesla (T),
preferably greater than about 0.4 T, more preferably greater than
about 0.7 T, even more preferably between about 1.0 T and about 1.6
T. The permanent magnet 204 may be a rare-earth magnet, such as but
not limited to SmCo.sub.5, Nd.sub.2Fe.sub.14B, or Sm.sub.2C.sub.17,
which comprises at least one rare-earth element, such as Nd or Sm,
and at least one ferromagnetic element, such as Fe, Co, or Ni. The
permanent magnet 204 may alternatively be a hard ferrite magnet
such as BaFe.sub.12O.sub.19 or SrFe.sub.12O.sub.19. Still
alternatively, the permanent magnet 204 may be made of a magnetic
alloy comprising Co, Ni, and Al.
[0049] The block or sheet thickness of the permanent magnet 204 may
be varied within the planar area thereof to optimize the
perpendicular magnetic field 214. FIG. 5 shows another embodiment
of the present invention as applied to a magnetic random access
memory. The illustrated memory 220 comprises the MRAM die 202, a
permanent magnet 204' disposed in close proximity thereto, and the
supporting package case 206 for encapsulating and protecting the
MRAM die 202 and the permanent magnet 204'. The memory 220 of FIG.
5 differs from the memory 200 of FIG. 4 in that the permanent
magnet 204', which has a permanent magnetization direction 212'
substantially perpendicular to the surface of the MRAM die 202, is
thicker at planar center and becomes thinner towards edges, thereby
generating a more uniform perpendicular magnetic field 214' that
counter-balances the offset field in the MRAM die 202. Moreover,
the surface of the permanent magnet 204' facing the MRAM die 202 is
preferably flat. Alternatively, the permanent magnet 204' may have
other thickness profiles to accommodate non-uniform distributions
of the offset field or different operating conditions in the MRAM
die 202.
[0050] FIG. 6 shows still another embodiment of the present
invention in which the permanent magnet 204 is attached to the
front or back side of the MRAM die 202 by any suitable adhesive,
such as but not limited to epoxy, polymeric glue, or solder. In
cases where the permanent magnet 204 is attached to the front side
of the MRAM die 202, the permanent magnet 204 may need to have via
holes (not shown), through which the electrical connections between
the conductive bond pads (not shown) formed on the front side of
the MRAM die 202 and the package bond pads (not shown) formed on
the package case 206 may pass. The permanent magnet 204 with the
permanent magnetization direction 212 substantially perpendicular
the layer planes of the magnetic layers and the MRAM die 202
generates the perpendicular magnetic field (not shown) that cancels
or counter-balances the offset field in the MRAM die 202.
[0051] Yet another embodiment of the present invention as applied
to an MRAM will now be described with reference to FIG. 7. The
illustrated memory 240 includes a soft magnetic layer 242 disposed
between the MRAM die 202 and the permanent magnet 204. The soft
magnetic layer 242 may be disposed adjacent to the front or back
side of the MRAM die 202. In cases where the soft magnetic layer
242 is disposed adjacent to the front side of the MRAM die 202, the
soft magnetic layer 242 and the permanent magnet 204 may need to
have via holes (not shown), through which the electrical
connections between the conductive bond pads (not shown) formed on
the front side of the MRAM die 202 and the package bond pads (not
shown) formed on the package case 206 may pass.
[0052] The soft magnetic layer 242 conducts magnetic flux from the
permanent magnet 212 towards the MRAM die 202 to counter-balance
the offset field. The soft magnetic layer 242 may also help to
confine the magnetic flux from the permanent magnet 204 within the
package case 206. The soft magnetic layer 242 may have planar
dimensions that are greater than those of the MRAM die 202. The
magnetic properties of the soft magnetic layer 242 may vary in the
layer plane thereof, allowing variation in magnetic flux conducting
properties. For example, the magnetic moment of the soft magnetic
layer 242 may vary from planar center to edges for generating a
more uniform magnetic field. The soft magnetic layer 242 may be
made of any "soft" ferromagnetic material having suitably low
coercivity. The soft magnetic layer 242 may have a coercivity less
than about 0.01 Tesla (T), preferably less than about 0.005 T, more
preferably less than about 0.001 T. The soft magnetic layer 242 may
be made of a soft ferromagnetic alloy comprising Fe and Ni.
[0053] FIG. 8 illustrates still yet another embodiment of the
present invention in which the permanent magnet 204' is formed on
or bonded to the back side of the wafer prior to dicing. The
permanent magnet 204' has a permanent magnetization direction 212'
substantially perpendicular to the layer planes of the magnetic
layers in the MRAM die 202. The permanent magnet 204' may be bonded
to the back side of the wafer by an adhesive or may be plated onto
the back side of the wafer. The permanent magnet 204' and the MRAM
die 202 have substantially same planar dimensions because both are
cut by the same dicing operation.
[0054] Yet still another embodiment of the present invention as
applied to an MRAM is illustrated in FIG. 9. The illustrated memory
260 comprises the package case 206, which includes therein the
permanent magnet 204 disposed in close proximity to one side of the
MRAM die 202 and a magnetic shield 262 disposed on the other side
of the MRAM die 202 opposite the permanent magnet 204. The magnetic
shield 262 may be in the form of a block or sheet with a block or
sheet surface facing one side of the MRAM die 202. The magnetic
shield 262 may concentrate magnetic flux 264 from the permanent
magnet 204 to the MRAM die 202 and may also help to confine the
magnetic flux 264 within the package case 206. The embodiment of
FIG. 9 differs from the embodiment of FIGS. 4 and 6 in that the
memory 260 includes the magnetic shield 262. Either the magnetic
shield 262 or the permanent magnet 204 may have via holes (not
shown) to allow electrical connections (not shown) between the MRAM
die 202 and the package case 206 to pass through. The magnetic
shield 262 may have planar dimensions that are greater than those
of the MRAM die 202.
[0055] The magnetic shield 262 may be made of any "soft"
ferromagnetic material having suitably low coercivity. The magnetic
shield 262 may have a coercivity less than about 0.01 Tesla (T),
preferably less than about 0.005 T, more preferably less than about
0.001 T. The magnetic shield 262 may be made of a soft
ferromagnetic alloy comprising Fe and Ni. Alternatively, the
magnetic shield 262 may be made of a composite material comprising
soft ferromagnetic particles imbedded in a non-magnetic matrix,
such as but not limited to polymer or ceramic material.
[0056] FIGS. 10A and 10B illustrate two variations of the
embodiment of FIG. 9 in which the magnetic shield 262 forms a part
of a package case. The memory 270 of FIG. 10A has a package case
comprising a lower package case 274 capped by the magnetic shield
262 while the memory 280 of FIG. 10B has a package case comprising
an upper package case 284 covering the magnetic shield 262, which
may also function as a lead frame for the package assembly. The
lower and upper package cases 274 and 284 may be made of any
suitable insulator material, such as polymer or ceramic
material.
[0057] Still yet another embodiment of the present invention as
applied to an MRAM is illustrated in FIG. 11. The illustrated
memory 290 comprises the package case 206, which includes therein a
first magnetic shield 292 and a second magnetic shield 294
separated by the MRAM die 202 and the permanent magnet 204. The
first and second magnetic shields 292 and 294 may be in the form of
a block or sheet and may be substantially parallel to each other.
The embodiment of FIG. 11 differs from the embodiment of FIG. 9 in
that the memory 290 has two magnetic shields 292 and 294, which may
further concentrate magnetic flux from the permanent magnet 204 to
the MRAM die 202 and may further confine the magnetic flux within
the package case 206. The additional magnetic shield 294 is
disposed on one side of the permanent magnet 204 opposite the MRAM
die 202. A block or sheet surface of the second magnetic shield 294
faces a block or sheet surface of the permanent magnet 204. The
magnetic shields 292 and 294 may have planar dimensions that are
greater than those of the MRAM die 202. Moreover, at least one the
magnetic shields 292 and 294 may alternatively form a part of the
package case as shown in FIGS. 10A and 10B.
[0058] The magnetic shields 292 and 294 may be made of any "soft"
ferromagnetic material having suitably low coercivity and may have
a coercivity less than about 0.01 Tesla (T), preferably less than
about 0.005 T, more preferably less than about 0.001 T. At least
one of the magnetic shields 292 and 294 may be made of a soft
ferromagnetic alloy comprising Fe and Ni. Alternatively, at least
one of the magnetic shields 292 and 294 may be made of a composite
material comprising soft ferromagnetic particles imbedded in a
non-magnetic matrix, such as but not limited to polymer or ceramic
material.
[0059] FIG. 12 illustrates yet still another embodiment of the
present invention in which the MRAM die 202 and the permanent
magnet 204 are surrounded by a wrap-around magnetic shield 302,
which may still further concentrate magnetic flux from the
permanent magnet 204 to the MRAM die 202 and may still further
confine the magnetic flux within the package case 206. The
wrap-around magnetic shield 302 may have four, five, or six sides
with the fifth and sixth sides formed along lateral sides parallel
to the cross-section drawing. The wrap-around magnetic shield 302
may be constructed from one piece or multiple pieces of soft
ferromagnetic materials having suitably low coercivity. Each piece
of the wrap-around magnetic shield 302 may have a coercivity less
than about 0.01 Tesla (T), preferably less than about 0.005 T, more
preferably less than about 0.001 T. At least one piece of the
wrap-around magnetic shield 302 may be made of a soft magnetic
alloy comprising Fe and Ni. Alternatively, at least one piece of
the wrap-around magnetic shield 302 may be made of a composite
material comprising soft ferromagnetic particles imbedded in a
non-magnetic matrix, such as but not limited to polymer or ceramic
material.
[0060] FIG. 13 illustrates a variation of the embodiment of FIG. 12
in which one piece of the wrap-around shield forms a part of the
package case. The illustrated memory 310 includes the MRAM die 202
and the permanent magnet 204 surrounded by a wrap-around magnetic
shield comprising a top magnetic shield 312, a bottom magnetic
shield 314, and side magnetic shields 316 disposed on at least two
lateral sides. One or two additional side magnetic shields 316 may
also be disposed along other lateral sides parallel to the
cross-section drawing. Analogous to the memory 270 of FIG. 10A, the
top magnetic shield 312 of the memory 310 also forms a part of the
package case which comprises the lower package case 274 capped by
the top magnetic shield 312. Similarly, the bottom magnetic shield
314 of the memory 310 may also form a part of the package case by
functioning as a lead frame as illustrated in FIG. 10B.
[0061] Each of the magnetic shields 312-316 may have a coercivity
less than about 0.01 Tesla (T), preferably less than about 0.005 T,
more preferably less than about 0.001 T. At least one of the
magnetic shields 312-316 may be made of a soft ferromagnetic alloy
comprising Fe and Ni. Alternatively, at least one of the magnetic
shields 312-316 may be made of a composite material comprising soft
ferromagnetic particles imbedded in a non-magnetic matrix, such as
but not limited to polymer or ceramic material.
[0062] FIG. 14 illustrates another variation of the embodiment of
FIG. 12 in which a wrap-around magnetic shield 322 is coated onto
the inner walls of the package case 206. The wrap-around magnetic
shield 322 may also be coated on the lateral walls of the package
case 206 parallel to the cross-section drawing. The coated
wrap-around magnetic shield 322 may be made of a composite material
comprising soft ferromagnetic particles imbedded in a polymeric
matrix.
[0063] FIG. 15 illustrates still another variation of the
embodiment of FIG. 12 in which a package case 332 also serves as a
wrap-around magnetic shield. The package case/magnetic shield 332
encapsulates therein the MRAM die 202 and the permanent magnet 204.
The package case/magnetic shield 332 may be made of a composite
material comprising soft ferromagnetic particles imbedded in an
insulator matrix, such as but not limited to polymer or ceramic
material.
[0064] The present invention may advantageously accommodate
within-wafer variation and/or wafer-to-wafer variation of the
offset field arisen from wafer processing. FIG. 16 illustrates that
the offset field of the magnetic free layer varies with the MTJ
size for a given MTJ stack structure. Because the MTJ size may vary
within a wafer and from wafer to wafer, the offset field and thus
the switching behavior may vary accordingly. The present invention
may accommodate such variations since different MRAM dies may use
different permanent magnets to eliminate the offset fields thereof.
In contrast, the prior art method of using additional magnetic
layers to counter-balance the stray field exerted on the magnetic
free layer by the magnetic reference layer is disadvantageously
limited to constant magnetic layer thickness and thus constant
counter-balancing magnetic field, which cannot accommodate any
wafer processing variation.
[0065] The previously described embodiments of the present
invention have many advantages, including symmetric switching
behavior and low cost. It is important to note, however, that the
invention does not require that all the advantageous features and
all the advantages need to be incorporated into every embodiment of
the present invention.
[0066] All the features disclosed in this specification, including
any accompanying claims, abstract, and drawings, may be replaced by
alternative features serving the same, equivalent or similar
purpose, unless expressly stated otherwise. Thus, unless expressly
stated otherwise, each feature disclosed is one example only of a
generic series of equivalent or similar features.
[0067] While the present invention has been shown and described
with reference to certain preferred embodiments, it is to be
understood that those skilled in the art will no doubt devise
certain alterations and modifications thereto which nevertheless
include the true spirit and scope of the present invention. Thus
the scope of the invention should be determined by the appended
claims and their legal equivalents, rather than by examples
given.
* * * * *