U.S. patent application number 14/560361 was filed with the patent office on 2016-06-09 for channel cladding last process flow for forming a channel region on a finfet device.
The applicant listed for this patent is GLOBALFOUNDRIES Inc.. Invention is credited to Jody A. Fronheiser, Ajey Poovannummoottil Jacob, Witold P. Maszara.
Application Number | 20160163863 14/560361 |
Document ID | / |
Family ID | 56083241 |
Filed Date | 2016-06-09 |
United States Patent
Application |
20160163863 |
Kind Code |
A1 |
Jacob; Ajey Poovannummoottil ;
et al. |
June 9, 2016 |
CHANNEL CLADDING LAST PROCESS FLOW FOR FORMING A CHANNEL REGION ON
A FINFET DEVICE
Abstract
One method of forming epi semiconductor cladding materials in
the channel region of a semiconductor device is disclosed which
includes forming an initial epi semiconductor cladding material
around the exposed portion of a fin for an entire axial length of
the fin, forming a sacrificial gate structure around a portion of
the fin and the initial cladding material, removing the sacrificial
gate structure so as to thereby define a replacement gate cavity,
performing an etching process through the replacement gate cavity
to remove at least the exposed portion of the initial cladding
material and thereby expose a surface of the fin within the
replacement gate cavity, forming at least one replacement epi
semiconductor cladding material around the exposed surface of the
fin, and forming a replacement gate structure within the
replacement gate cavity around the at least one replacement epi
semiconductor cladding material.
Inventors: |
Jacob; Ajey Poovannummoottil;
(Watervliet, NY) ; Maszara; Witold P.; (Morgan
Hill, CA) ; Fronheiser; Jody A.; (Delmar,
NY) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
GLOBALFOUNDRIES Inc. |
Grand Cayman |
|
KY |
|
|
Family ID: |
56083241 |
Appl. No.: |
14/560361 |
Filed: |
December 4, 2014 |
Current U.S.
Class: |
257/401 ;
438/283 |
Current CPC
Class: |
H01L 29/161 20130101;
H01L 29/6681 20130101; H01L 21/02546 20130101; H01L 29/6656
20130101; H01L 29/7848 20130101; H01L 29/1054 20130101; H01L
21/02549 20130101; H01L 21/32133 20130101; H01L 29/785 20130101;
H01L 29/7851 20130101; H01L 29/201 20130101; H01L 29/66795
20130101; H01L 29/66553 20130101; H01L 21/02532 20130101; H01L
21/02381 20130101; H01L 21/30604 20130101; H01L 29/51 20130101;
H01L 29/66522 20130101; H01L 29/66545 20130101 |
International
Class: |
H01L 29/78 20060101
H01L029/78; H01L 29/201 20060101 H01L029/201; H01L 21/02 20060101
H01L021/02; H01L 29/161 20060101 H01L029/161; H01L 29/66 20060101
H01L029/66; H01L 21/3213 20060101 H01L021/3213 |
Claims
1. A method of forming a FinFET device with a channel region, the
method comprising: forming a fin in a semiconductor substrate;
forming an initial epi semiconductor cladding material around an
exposed portion of said fin for an entire axial length of said fin;
forming a sacrificial gate structure around a portion of said fin
and said initial epi semiconductor cladding material; forming a
sidewall spacer adjacent opposite sides of said sacrificial gate
structure; removing said sacrificial gate structure so as to
thereby define a replacement gate cavity that is laterally defined
by said sidewall spacers, wherein formation of said replacement
gate cavity exposes a portion of said initial epi semiconductor
cladding material; performing an etching process through said
replacement gate cavity to remove at least said exposed portion of
said initial epi semiconductor cladding material and thereby expose
a surface of said fin within said replacement gate cavity; forming
at least one replacement epi semiconductor cladding material around
said exposed surface of said fin; and forming a replacement gate
structure within said replacement gate cavity around said at least
one replacement epi semiconductor cladding material.
2. The method of claim 1, wherein said forming said initial epi
semiconductor cladding material around said exposed portion of said
fin comprises forming a single layer of epi semiconductor cladding
material around said exposed portion of said fin.
3. The method of claim 1, wherein said forming said at least one
replacement epi semiconductor cladding material around said exposed
surface of said fin comprises forming a single layer of epi
semiconductor cladding material around said exposed surface of said
fin.
4. The method of claim 1, wherein said initial epi semiconductor
cladding material and said replacement epi semiconductor cladding
material are comprised of the same semiconductor material.
5. The method of claim 1, wherein said initial epi semiconductor
cladding material and said replacement epi semiconductor cladding
material are comprised of different semiconductor materials.
6. The method of claim 3, wherein said replacement epi
semiconductor cladding material is comprised of one of
Si.sub.(1-x)Ge.sub.(x) (where "x" ranges from 0.1-0.9), a III-V
material, InGaAs, GaAs, InAs, GaSb, InSbAs or silicon.
7. The method of claim 1, wherein, after performing said etching
process through said replacement gate cavity to remove at least
said exposed portion of said initial epi semiconductor material,
portions of said initial epi semiconductor material remain
positioned under said sidewall spacers.
8. The method of claim 7, wherein said forming said at least one
replacement epi semiconductor cladding material around said exposed
surface of said fin comprises forming said at least one replacement
epi semiconductor cladding material around said exposed surface of
said fin such that it contacts said remaining portions of said
initial semiconductor material positioned under said sidewall
spacers.
9. The method of claim 1, wherein said substrate is a silicon
substrate.
10. A method of forming a FinFET device with a channel region, the
method comprising: forming a fin in a semiconductor substrate;
forming an initial epi semiconductor cladding material around an
exposed portion of said fin for an entire axial length of said fin;
forming a sacrificial gate structure around a portion of said fin
and said initial epi semiconductor cladding material; forming a
sidewall spacer adjacent opposite sides of said sacrificial gate
structure and on said initial epi semiconductor cladding material;
removing said sacrificial gate structure so as to thereby define a
replacement gate cavity that is laterally defined by said sidewall
spacers, wherein formation of said replacement gate cavity exposes
a portion of said initial epi semiconductor cladding material;
performing an etching process through said replacement gate cavity
to remove said exposed portion of said initial epi semiconductor
cladding material while leaving said initial semiconductor cladding
material positioned under said sidewall spacers so as to thereby
expose a surface of said fin within said replacement gate cavity;
forming at least one replacement epi semiconductor cladding
material around said exposed surface of said fin and in contact
with said initial semiconductor cladding material positioned under
said sidewall spacers; and forming a replacement gate structure
within said replacement gate cavity around said at least one
replacement epi semiconductor cladding material.
11. The method of claim 10, wherein said forming said initial epi
semiconductor cladding material around said exposed portion of said
fin comprises forming a single layer of epi semiconductor cladding
material around said exposed portion of said fin.
12. The method of claim 10, wherein said forming said at least one
replacement epi semiconductor cladding material around said exposed
surface of said fin comprises forming a single layer of epi
semiconductor cladding material around said exposed surface of said
fin.
13. The method of claim 10, wherein said initial epi semiconductor
cladding material and said replacement epi semiconductor cladding
material are comprised of the same semiconductor material.
14. The method of claim 10, wherein said initial epi semiconductor
cladding material and said replacement epi semiconductor cladding
material are comprised of different semiconductor materials.
15. A method of forming a FinFET device with a channel region, the
method comprising: forming a fin in a semiconductor substrate;
forming an initial epi semiconductor cladding material around an
exposed portion of said fin for an entire axial length of said fin;
forming a sacrificial gate structure around a portion of said fin
and said initial epi semiconductor cladding material; forming a
sidewall spacer adjacent opposite sides of said sacrificial gate
structure and on said initial epi semiconductor cladding material;
removing said sacrificial gate structure so as to thereby define a
replacement gate cavity that is laterally defined by said sidewall
spacers, wherein formation of said replacement gate cavity exposes
a portion of said initial epi semiconductor cladding material;
performing an etching process through said replacement gate cavity
to remove all of said exposed portion of said initial epi
semiconductor cladding material and all of said initial
semiconductor cladding material positioned under said sidewall
spacers so as to thereby expose a surface of said fin within said
replacement gate cavity; forming at least one replacement epi
semiconductor cladding material around said exposed surface of said
fin, wherein said at least one replacement epi semiconductor
cladding material is formed so as to extend under said sidewall
spacers; and forming a replacement gate structure within said
replacement gate cavity around said at least one replacement epi
semiconductor cladding material.
16. The method of claim 15, wherein said forming said initial epi
semiconductor cladding material around said exposed portion of said
fin comprises forming a single layer of epi semiconductor cladding
material around said exposed portion of said fin.
17. The method of claim 15, wherein said forming said at least one
replacement epi semiconductor cladding material around said exposed
surface of said fin comprises forming a single layer of epi
semiconductor cladding material around said exposed surface of said
fin.
18. The method of claim 15, wherein said initial epi semiconductor
cladding material and said replacement epi semiconductor cladding
material are comprised of the same semiconductor material.
19. The method of claim 15, wherein said initial epi semiconductor
cladding material and said replacement epi semiconductor cladding
material are comprised of different semiconductor materials.
20. A FinFET transistor device, comprising: a plurality of trenches
that define a fin in a semiconducting substrate; a recessed layer
of insulating material positioned in said trenches that exposes a
portion of said fin; a gate structure positioned around said
exposed portion of said fin above a channel region of said device;
sidewall spacers positioned on opposite sides of said gate
structure; source/drain regions positioned laterally outside said
sidewall spacers; a first channel epi semiconductor cladding
material positioned around said fin and under said gate structure;
and a second epi semiconductor cladding material positioned under
said sidewall spacers, said second epi semiconductor cladding
material being in contact with said first channel epi semiconductor
cladding material and said source/drain regions, wherein said first
channel epi semiconductor material and said second epi
semiconductor material are comprised of different semiconductor
materials.
21. The device of claim 20, wherein said first channel epi
semiconductor cladding material is a single layer of epi
semiconductor cladding material.
22. The device of claim 20, wherein said first channel epi
semiconductor cladding material comprises multiple layers of epi
semiconductor cladding material.
23. The device of claim 20, wherein a thickness of said first
channel epi semiconductor cladding material is different from a
thickness of said second epi semiconductor cladding material.
24. The device of claim 20, wherein said first channel epi
semiconductor cladding material is substantially self-aligned with
a bottom surface of said gate structure.
25. The device of claim 20, wherein said first channel epi
semiconductor cladding material is comprised of one of
Si.sub.(1-x)Ge.sub.(x) (where "x" ranges from 0.1-0.9), a III-V
material, InGaAs, GaAs, InAs, GaSb, InSbAs or silicon.
26. The device of claim 20, wherein said gate structure is
comprised of a high-k gate insulation layer and at least one layer
of metal.
27. The device of claim 20, wherein said source/drain regions are
comprised of an epi semiconductor material.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] Generally, the present disclosure relates to the manufacture
of FET semiconductor devices, and, more specifically, to various
methods of forming epi semiconductor cladding materials in the
channel region of a FinFET semiconductor device by performing
various channel-cladding-last formation techniques, and the
resulting semiconductor devices.
[0003] 2. Description of the Related Art
[0004] The fabrication of advanced integrated circuits, such as
CPU's, storage devices, ASIC's (application specific integrated
circuits) and the like, requires the formation of a large number of
so-called metal oxide field effect transistors (MOSFETs or FETs). A
transistor includes a source region, a drain region, a channel
region that is positioned between the source region and the drain
region, and a gate electrode positioned above the channel region
that is separated therefrom by a gate insulation layer. Current
flow between the source and drain regions of the FET device is
controlled by setting the voltage applied to the gate electrode.
For example, for an NMOS device, if there is no voltage applied to
the gate electrode, then there is no current flow through the NMOS
device (ignoring undesirable leakage currents, which are relatively
small). However, when an appropriate positive voltage is applied to
the gate electrode, the channel region of the NMOS device becomes
conductive, and electrical current is permitted to flow between the
source region and the drain region through the conductive channel
region.
[0005] Transistors come in a variety of configurations. A
conventional FET is a planar device, wherein the transistor is
formed in and above an active region having a substantially planar
upper surface. In contrast to a planar FET, there are so-called 3D
devices, such as an illustrative FinFET device, which is a
three-dimensional structure. FIG. 1A is a perspective view of an
illustrative prior art FinFET semiconductor device 10 that is
formed above a semiconductor substrate 12 that will be referenced
so as to explain, at a very high level, some basic features of a
FinFET device. FIG. 1B is a cross-sectional view of the device 10
taken through the gate electrode 18 in the gate width (GW)
direction of the device 10. As shown in FIG. 1A, in this example,
the FinFET device 10 includes a plurality of trenches 14 formed in
the substrate 12 that define three illustrative fins 16, a gate
structure 18, sidewall spacers 20 and a gate cap layer 22. The fins
16 have a three-dimensional configuration: a height H, a width W
and an axial length L. The axial length L of the fins 16
corresponds to the direction of current travel in the device 10
when it is operational. The portions of the fins 16 covered by the
gate structure 18 are the channel regions of the FinFET device 10.
With reference to FIG. 1B, the gate structure 18 is typically
comprised of a layer of gate insulating material 18A, e.g., a layer
of high-k insulating material (k-value of 10 or greater) or silicon
dioxide, and one or more conductive material layers (e.g., metal
and/or polysilicon) that serve as the gate electrode 18B for the
device 10. In the device 10, the cladding material 17 is the
primary current carrying portion of the channel region when the
device 10 is operational, i.e., the gate length (GL) direction of
the device. Typically, with respect to current day technology, the
cladding material 17 may have a thickness 17 T of about 2-3 nm. The
cladding material 17 is typically an epi semiconductor material,
such as silicon germanium, that is formed on the fin 16 by
performing known epi deposition processes.
[0006] FIGS. 2A-2G depict an illustrative prior art process flow
for a FinFET device with a cladded channel region. In FIGS. 2A-2G,
the upper drawing is a cross-sectional view taken through the gate
structure in the gate width direction (GW) of the device 10. The
bottom drawing in FIGS. 2A-2G is a cross-sectional view taken
through the middle of one of the fins 16 along the axial length of
the fin 16, i.e., in a direction that is parallel to the gate
length (GL) direction of the device 10.
[0007] FIG. 2A depicts the device 10 after several process
operations were performed. First, a plurality of trenches 14 were
formed in the substrate 12 to define the initial fins 16 (only two
fins are shown in FIG. 2A). After the trenches 14 were formed, a
layer of insulating material 21, such as silicon dioxide, was
formed so as to overfill the trenches 14. Thereafter, a chemical
mechanical polishing (CMP) process was performed to planarize the
upper surface of the insulating material 21 with the top of the
fins 16 (or the top of a patterned hard mask--not shown).
Thereafter, a recess etching process was performed to recess the
layer of insulating material 21 between adjacent fins 16 so as to
thereby expose the upper portion of the fins 16.
[0008] FIG. 2B depicts the device 10 after an epitaxial deposition
process was performed to form a cladding material 18 on the exposed
portion of the fins 16. The cladding material 18 may be comprised
of a variety of different materials, e.g., Si.sub.(1-x)Ge.sub.(x),
and it may be formed to any desired thickness.
[0009] FIG. 2C depicts the device 10 after several process
operations were performed. First, an illustrative and schematically
depicted sacrificial gate structure 20 and gate cap layer 22 (e.g.,
silicon nitride) were formed above the channel region of the device
10. Illustrative sidewall spacers 24 (e.g., silicon nitride) were
formed adjacent the sacrificial gate structure 20. In one
illustrative embodiment, the schematically depicted sacrificial
gate structure 20 includes an illustrative gate insulation layer
(not separately shown) and an illustrative gate electrode (not
separately shown).
[0010] FIG. 2D depicts the device 10 in one illustrative process
flow wherein trenches 23 were formed to remove portions of the fins
16 positioned in the source/drain regions of the device 10.
Thereafter, an epi semiconductor material 25 was formed in the
source/drain regions of the device 10 by performing a traditional
epi growth process, i.e., raised source/drain regions were formed
for the device 10. Various ion implant regions would have been
formed in the fins 16/substrate 12 at this point in the process
flow, e.g., halo implants, extension implants, well implants, etc.
Thereafter, one or more heat treatment processes would have been
performed to repair any damage to the crystalline structure of the
fins 16 due to the various ion implantation processes and to
activate the implanted dopant materials.
[0011] FIG. 2E depicts the device 10 after a layer of insulating
material 26 was formed on the device 10 and after a CMP process was
performed to planarize the upper surface of the layer of insulating
material 26 with the upper surface of the gate cap layer 22.
[0012] FIG. 2F depicts the device 10 after several process
operations were performed. First, one or more planarization
processes, e.g., CMP processes, were performed to remove the gate
cap layer 22 and a portion of the spacers 24 using the sacrificial
gate structure 20 as a polish-stop layer. Thereafter, one or more
etching processes were performed to remove the sacrificial gate
structure 20 relative to the surrounding structures and thereby
define a replacement gate cavity 28 where a replacement gate
structure will eventually be formed for the device 10.
Unfortunately, the cladding material 18 within the channel region
of the device 10 is subjected to many of these process operations
since it was formed prior to the formation of the sacrificial gate
structure 20. As a result, the cladding material 18 within the
channel region of the device 10 may be damaged or degraded. More
specifically, the cladding material 18 within the channel region
may have a variety of divots or defects 19 that may result in the
removal of all or a portion of the thickness of the cladding
material 18, as depicted in the dashed-line region 30. The amount
and extent of damage to the cladding material 18 in the channel
region of the device 10 may vary depending upon the device under
construction and the exact process flow.
[0013] FIG. 2G depicts the prior art device 10 after an
illustrative and schematically depicted replacement gate structure
32 and gate cap layer 34 were formed in the replacement gate cavity
28 of the device 10 using well-known techniques. In one
illustrative embodiment, the schematically depicted replacement
gate structure 32 includes an illustrative gate insulation layer
(not separately shown) and an illustrative gate electrode (not
separately shown). The gate insulation layer may be comprised of a
variety of different materials, such as, for example, a so-called
high-k (k value greater than 10) insulation material (where k is
the relative dielectric constant), etc. Similarly, the gate
electrode of the replacement gate structure 32 may be comprised of
one or more metal layers that act as the gate electrode.
Unfortunately, the damage to the cladding material 18 in the
channel region of the device can adversely affect device
performance.
[0014] The present disclosure is directed to various methods of
forming one or more cladding materials in the channel region of a
semiconductor device by performing various channel-cladding-last
formation techniques, and the resulting semiconductor devices that
may reduce or eliminate one or more of the problems identified
above.
SUMMARY OF THE INVENTION
[0015] The following presents a simplified summary of the invention
in order to provide a basic understanding of some aspects of the
invention. This summary is not an exhaustive overview of the
invention. It is not intended to identify key or critical elements
of the invention or to delineate the scope of the invention. Its
sole purpose is to present some concepts in a simplified form as a
prelude to the more detailed description that is discussed
later.
[0016] Generally, the present disclosure is directed to various
methods of forming one or more cladding materials in the channel
region of a semiconductor device by performing various
channel-cladding-last formation techniques, and the resulting
semiconductor devices. One illustrative method disclosed herein
includes, among other things, forming a fin in a semiconductor
substrate, forming an initial epi semiconductor cladding material
around an exposed portion of the fin for an entire axial length of
the fin, forming a sacrificial gate structure around a portion of
the fin and the initial epi semiconductor cladding material, and
forming a sidewall spacer adjacent opposite sides of the
sacrificial gate structure. In this embodiment, the method further
includes removing the sacrificial gate structure so as to thereby
define a replacement gate cavity that is laterally defined by the
sidewall spacers, wherein formation of the replacement gate cavity
exposes a portion of the initial epi semiconductor cladding
material, performing an etching process through the replacement
gate cavity to remove at least the exposed portion of the initial
epi semiconductor cladding material and thereby expose a surface of
the fin within the replacement gate cavity, forming at least one
replacement epi semiconductor cladding material around the exposed
surface of the fin, and forming a replacement gate structure within
the replacement gate cavity around the at least one replacement epi
semiconductor cladding material.
[0017] One illustrative device disclosed herein includes, among
other things, a plurality of trenches that define a fin in a
semiconducting substrate, a recessed layer of insulating material
positioned in the trenches that exposes a portion of the fin, a
gate structure positioned around the exposed portion of the fin
above a channel region of the device, sidewall spacers positioned
on opposite sides of the gate structure, source/drain regions
positioned laterally outside the spacers, a first channel epi
semiconductor cladding material positioned around the fin and under
the gate structure, and a second epi semiconductor cladding
material positioned under the sidewall spacers, the second epi
semiconductor cladding material being in contact with the first
channel epi semiconductor cladding material and the source/drain
regions, wherein the first channel epi semiconductor material and
the second epi semiconductor materials are comprised of different
semiconductor materials.
BRIEF DESCRIPTION OF THE DRAWINGS
[0018] The disclosure may be understood by reference to the
following description taken in conjunction with the accompanying
drawings, in which like reference numerals identify like elements,
and in which:
[0019] FIG. 1A is a perspective view of one illustrative embodiment
of a prior art FinFET device;
[0020] FIG. 1B is a cross-sectional view of an illustrative
fin/gate structure of a prior art FinFET device;
[0021] FIGS. 2A-2G depict an illustrative prior art process flow
for forming a cladded channel region on a FinFET device;
[0022] FIGS. 3A-3F depict various illustrative methods disclosed
herein of forming cladding materials in the channel region of a
semiconductor device, and the resulting semiconductor devices;
[0023] FIGS. 4A-4G depict other illustrative methods disclosed
herein of forming cladding materials in the channel region of a
semiconductor device, and the resulting semiconductor devices;
and
[0024] FIGS. 5A-5E depict yet other illustrative methods disclosed
herein of forming cladding materials in the channel region of a
semiconductor device, and the resulting semiconductor devices.
[0025] While the subject matter disclosed herein is susceptible to
various modifications and alternative forms, specific embodiments
thereof have been shown by way of example in the drawings and are
herein described in detail. It should be understood, however, that
the description herein of specific embodiments is not intended to
limit the invention to the particular forms disclosed, but on the
contrary, the intention is to cover all modifications, equivalents,
and alternatives falling within the spirit and scope of the
invention as defined by the appended claims.
DETAILED DESCRIPTION
[0026] Various illustrative embodiments of the invention are
described below. In the interest of clarity, not all features of an
actual implementation are described in this specification. It will
of course be appreciated that in the development of any such actual
embodiment, numerous implementation-specific decisions must be made
to achieve the developers' specific goals, such as compliance with
system-related and business-related constraints, which will vary
from one implementation to another. Moreover, it will be
appreciated that such a development effort might be complex and
time-consuming, but would nevertheless be a routine undertaking for
those of ordinary skill in the art having the benefit of this
disclosure.
[0027] The present subject matter will now be described with
reference to the attached figures. Various structures, systems and
devices are schematically depicted in the drawings for purposes of
explanation only and so as to not obscure the present disclosure
with details that are well known to those skilled in the art.
Nevertheless, the attached drawings are included to describe and
explain illustrative examples of the present disclosure. The words
and phrases used herein should be understood and interpreted to
have a meaning consistent with the understanding of those words and
phrases by those skilled in the relevant art. No special definition
of a term or phrase, i.e., a definition that is different from the
ordinary and customary meaning as understood by those skilled in
the art, is intended to be implied by consistent usage of the term
or phrase herein. To the extent that a term or phrase is intended
to have a special meaning, i.e., a meaning other than that
understood by skilled artisans, such a special definition will be
expressly set forth in the specification in a definitional manner
that directly and unequivocally provides the special definition for
the term or phrase.
[0028] The present disclosure is directed to various methods of
forming a channel region for a semiconductor device by performing a
triple cladding process, and the resulting semiconductor device. As
will be readily apparent to those skilled in the art upon a
complete reading of the present application, the present method is
applicable to a variety of devices, including, but not limited to,
logic devices, memory devices, etc., and the methods disclosed
herein may be employed to form N-type or P-type semiconductor
devices. With reference to the attached figures, various
illustrative embodiments of the methods and devices disclosed
herein will now be described in more detail.
[0029] In one embodiment, the illustrative device 100 will be
formed in and above the semiconductor substrate 12, having a bulk
configuration. The device 100 may be either an NMOS or a PMOS
transistor. In some instances, the reference numbers used for
various components described in connection with FIG. 2A-2G above
will be used to explain certain aspects of the presently disclosed
invention. The substrate 12 may be made of silicon or it may be
made of materials other than silicon. Thus, the terms "substrate"
or "semiconductor substrate" should be understood to cover all
semiconducting materials and all forms of such materials.
Additionally, various doped regions, e.g., source/drain regions,
halo implant regions, well regions and the like, are not depicted
in the attached drawings. Of course, the inventions disclosed
herein should not be considered to be limited to the illustrative
examples depicted and described herein. The various components and
structures of the device 100 disclosed herein may be formed using a
variety of different materials and by performing a variety of known
techniques, e.g., a chemical vapor deposition (CVD) process, an
atomic layer deposition (ALD) process, a thermal growth process,
epi growth processes, spin-coating techniques, etc. The thicknesses
of these various layers of material may also vary depending upon
the particular application.
[0030] FIGS. 3A-3F depict one illustrative method disclosed herein
of forming cladding materials in the channel region of a
semiconductor device, and the resulting semiconductor devices.
[0031] FIG. 3A depicts the device 100 at a point in fabrication
that corresponds to that shown in FIG. 2C, i.e., after the
formation of the fins 16, an initial cladding material 118 (that
covers the entire axial length of the fins 16), the sacrificial
gate structure 20, the gate cap layer 22 and the sidewall spacer
24. Of course, after a complete reading of the present application,
those skilled in the art will appreciate that the initial cladding
material 118 may be comprised or one or more layers of cladding
material, as indicated by the dashed lines 118X, 118Y in the upper
drawing of FIG. 3A (right fin only). The initial cladding material
118 may be comprised of a variety of different semiconductor
materials, e.g., Si.sub.(1-x)Ge.sub.(x) (where "x" ranges from
0.1-0.9), a III-V material, InGaAs, GaAs, InAs, GaSb, InSbAs,
silicon, etc. The thickness of the initial cladding material 118
may vary depending upon the particular application, and it may be
formed by performing a traditional epi growth process. If desired,
dopant materials may be added to the initial cladding material 118
by way of in situ doping or ion implantation. In one embodiment,
for a PMOS device, the initial cladding material 118 may be doped
with boron (e.g., Si.sub.(1-x)Ge.sub.(x):B (where "x" ranges from
0.1-0.9). In the case of an NMOS device, the initial cladding
material 118 may be doped with carbon (e.g.,
Si.sub.(1-x)Ge.sub.(x):C (where "x" ranges from 0.1-0.9). The
recessed layer of insulating material 21 may be comprised of a
variety of different materials, such as silicon dioxide, etc., and
it may be formed by performing a variety of techniques, e.g.,
chemical vapor deposition (CVD), etc. and thereafter recessing that
layer of material to the desired height level within the trenches
14.
[0032] The overall size, shape and configuration of the
fin-formation trenches 14 and fins 16 may vary depending on the
particular application. In the illustrative examples depicted in
the attached drawings, the fin-formation trenches 14 and fins 16
are all depicted as having a uniform size and shape. However, such
uniformity in the size and shape of the fin-formation trenches 14
and the fins 16 is not required to practice at least some aspects
of the inventions disclosed herein. In the attached figures, the
fin-formation trenches 14 are depicted as having been formed by
performing an anisotropic etching process that results in the
fin-formation trenches 14 having a schematically depicted,
generally rectangular configuration. In an actual real-world
device, the sidewalls of the fin-formation trenches 14 may be
somewhat inwardly tapered, although that configuration is not
depicted in the attached drawings. Thus, the size and configuration
of the fin-formation trenches 14, and the manner in which they are
made, as well as the general configuration of the fins 16, should
not be considered a limitation of the present invention. For ease
of disclosure, only the substantially rectangular fin-formation
trenches 14 and fins 16 will be depicted in the subsequent
drawings. Moreover, the device 100 may be formed with any desired
number of fins 16.
[0033] FIG. 3B depicts the device 100 in accordance with one
illustrative process flow wherein trenches 102 were formed in the
source/drain regions to remove portions of the fins 16 positioned
in the source/drain regions of the device 100, i.e., laterally
outside of the spacers 24. Thereafter, an epi semiconductor
material 104 was formed in the trenches 102 in the source/drain
regions of the device 100 by performing a traditional epi growth
process, i.e., so-called embedded source/drain regions were formed
for the device 100. In another illustrative process flow, the
trenches 102 may not be formed and the epi material 104 may simply
be grown on the portions of the fins 16 in the source/drain regions
of the device so as to form so-called raised source/drain regions
for the device 100. In another embodiment, the formation of the
trenches 102 may be omitted and the epi material 104 may simply be
formed on the initial cladding material 118 in the source/drain
regions of the device 100 so as to form raised source/drain regions
for the device 100. At least all of the foregoing alternatives for
the formation of source/drain regions should be considered to fall
within the scope of the attached claims. For purposes of disclosure
only, the subsequent drawing will depict the formation of the
trenches 102 and the embedded source/drain regions 104. Various ion
implant regions would have been formed in the fins 16/substrate 12
at this point in the process flow, e.g., halo implants, extension
implants, well implants, etc. At this point in the process flow,
one or more heat treatment processes would have been performed to
repair any damage to the crystalline structure of the fins 16 due
to the various ion implantation processes and to activate the
implanted dopant materials.
[0034] FIG. 3C depicts the device 100 after several process
operations were performed. First, a layer of insulating material
106 was formed on the device 100 above the epi semiconductor
material 104. Thereafter, one or more CMP processes were performed
to planarize the upper surface of the layer of insulating material
106 with the upper surface of the sacrificial gate structure 20.
Then, one or more etching processes were performed to remove the
sacrificial gate structure 20 relative to the surrounding
structures and thereby define a replacement gate cavity 108 where a
replacement gate structure will eventually be formed for the device
100. As in the prior art method disclosed in the background section
of this application, the initial cladding material 118 within the
channel region/gate cavity 108 of the device 100 was exposed to one
or more of the various process operations that were performed after
the initial cladding material 118 was formed. The defects 19 (e.g.,
see FIG. 2F) that would normally be present in the initial cladding
material 118 within the gate cavity 108 at this point in the
process flow are not depicted in FIG. 3C.
[0035] FIG. 3D depicts the device 100 after an etching process,
such as an anisotropic etching process, was performed through the
gate cavity 108 to remove portions of the initial cladding material
118. This etching process is performed selectively relative to the
material of the fin 16 and the surrounding structures. This etching
process exposes an upper surface 16S of the fin 16 within the gate
cavity 108. In one embodiment, the remaining portions of the
initial cladding material 118 are substantially self-aligned with
respect to the inner surfaces of the spacers 24 that laterally
define the gate cavity 108. In other embodiments, there may be some
slight recessing of the initial cladding material 118 under the
sidewall spacers 24, but that situation is not depicted in FIG.
3D.
[0036] FIG. 3E depicts the device 100 after a replacement channel
cladding material 110 was formed on the portions of the fin 16
exposed within the gate cavity 108. Of course, after a complete
reading of the present application, those skilled in the art will
appreciate that the depicted replacement channel cladding material
110 may be comprised of one or more layers of cladding material, as
indicated by the dashed lines 110X, 110Y in the upper drawing of
FIG. 3E (right fin only). The replacement channel cladding material
110 may be comprised of a variety of different materials, e.g.,
Si.sub.(1-x)Ge.sub.(x) (where "x" ranges from 0.1-0.9), a III-V
material, InGaAs, GaAs, InAs, GaSb, InSbAs, silicon, etc. The
replacement channel cladding material 110 may be comprised of the
same material or a different material than that of the initial
cladding material 118. The thickness of the replacement channel
cladding material 110 may vary depending upon the particular
application, it may be thicker or thinner than the initial cladding
material 118, and it may be formed by performing one or more
traditional epi growth processes. If desired, dopant materials,
e.g., carbon, boron, etc., may be added to the replacement channel
cladding material 110 by way of in situ doping or ion
implantation.
[0037] FIG. 3F depicts the device 100 after an illustrative and
schematically depicted replacement gate structure 112 and gate cap
layer 114 were formed in the replacement gate cavity 108 of the
device 100 above the replacement channel cladding material 110
using well-known techniques. In one illustrative embodiment, the
schematically depicted replacement gate structure 112 includes an
illustrative gate insulation layer (not separately shown) and an
illustrative gate electrode (not separately shown). The gate
insulation layer may be comprised of a variety of different
materials, such as, for example, a so-called high-k (k value
greater than 10) insulation material (where k is the relative
dielectric constant), etc. Similarly, the gate electrode of the
replacement gate structure 112 may be comprised of one or more
metal layers that act as the gate electrode. As will be recognized
by those skilled in the art after a complete reading of the present
application, the gate structure 112 of the device 100 depicted in
the drawings, i.e., the gate insulation layer and the gate
electrode, is intended to be representative in nature. That is, the
gate structure 112 may be comprised of a variety of different
materials and it may have a variety of configurations. In one
embodiment, the remaining portions of the initial cladding material
118 and the replacement cladding layer 110 may serve as the primary
channel regions of the device 100, where substantially all of the
current will flow during operation of the device 100, while the
portions of the fins 16 (around which the layers 118/110 are
positioned) will act as a core region wherein little if any of the
current will flow when the device 100 is in operation. Note that,
using the methods disclosed herein, the replacement channel
cladding material 110 has a width 110 W (in the gate length
direction of the device 100) that corresponds approximately to the
width of the gate cavity 108 and the final replacement gate
structure 112. That is, in this embodiment, the replacement channel
cladding material 110 was formed such that it is substantially
self-aligned with respect to the gate cavity 108 and the sidewalls
of the replacement gate structure 112.
[0038] At the point of fabrication depicted in FIG. 3F, traditional
manufacturing techniques may be performed to complete the
manufacture of the device 100. For example, additional contacts and
metallization layers may be formed above the device 100 using
traditional techniques.
[0039] FIGS. 4A-4G depict another illustrative method disclosed
herein of forming cladding materials in the channel region of a
semiconductor device, and the resulting semiconductor devices. In
this embodiment, the initial cladding material 118 will not be
formed on the fins 16 prior to the formation of the sacrificial
gate structure 20. Rather, in this embodiment, a cladding material
will only be formed in the channel region of the device 100 through
the replacement gate cavity.
[0040] FIG. 4A depicts the device 100 at a point in fabrication
that corresponds to that shown in FIG. 3A with the initial cladding
material 118 omitted, i.e., after the formation of the fins 16, the
sacrificial gate structure 20, the gate cap layer 22 and the
sidewall spacer 24.
[0041] FIG. 4B depicts the device 100 in the illustrative example
wherein trenches 102 were formed in the source/drain regions to
remove portions of the fins 16 positioned in the source/drain
regions of the device 100. In this embodiment, an anisotropic
etching process was performed to form the trenches 102. Thus the
trenches 102 are substantially self-aligned relative to the
sidewall spacers 24. In one embodiment, the formation of the
trenches 102 may be omitted and the epi material 104 (FIG. 4C) may
simply be formed on the fins in the source/drain regions of the
device 100 so as to form raised source/drain regions, as discussed
above with reference to FIG. 3B.
[0042] FIG. 4C depicts the device 100 after the above-described epi
semiconductor material 104 was formed in the source/drain regions
of the device 100 by performing a traditional epi growth process,
i.e., embedded source/drain regions were formed for the device 100.
As before, various ion implant regions would have been formed in
the fins 16/substrate 12 at this point in the process flow, e.g.,
halo implants, extension implants, well implants, etc.
[0043] FIG. 4D depicts the device 100 after several process
operations were performed. First, the above-described layer of
insulating material 106 was formed on the device 100 above the epi
semiconductor material 104. Thereafter, one or more CMP processes
were performed to planarize the upper surface of the layer of
insulating material 106 with the upper surface of the sacrificial
gate structure 20. Then, one or more etching processes were
performed to remove the sacrificial gate structure 20 relative to
the surrounding structures and thereby define the replacement gate
cavity 108. The removal of the sacrificial gate structure 20
exposes the upper surface 16S of the fin 16 within the gate cavity
108.
[0044] FIG. 4E depicts the device 100 after an etching process,
such as an isotropic etching or pre-clean process, was performed
through the gate cavity 108 to remove portions of the upper and
sidewall surfaces of the fin structure 16 in the area of the
channel region of the device 100. The outline of the fin structure
16 before this etching process was performed is depicted by the
dashed lines 117 shown in the upper drawing in FIG. 4E. The reduced
size fins (above the layer of insulating material 21) are
identified with the reference numbers 16A in FIG. 4E. Importantly,
this etching process removes sufficient fin material so as to
define recesses 119 under the spacers 24 and a new (and lower)
upper surface 16X for the fin 16 under the gate cavity 108. In one
embodiment, the recesses 119 are full width recesses that extend
all of the way under the lateral width of spacers to the epi
semiconductor material 104. The amount of material removed in the
etching process, e.g., the thickness (in the vertical direction) of
the recesses 119 may vary depending upon the particular
application. In one embodiment, the reduced size fin 16A has a
width and a height that is less than a width and a height,
respectively, of the initial fin 16.
[0045] FIG. 4F depicts the device 100 after the above-described
replacement channel cladding material 110 was formed on the
portions of the fin 16A exposed within the gate cavity 108 and in
the recesses 119.
[0046] FIG. 4G depicts the device 100 after the above-described
replacement gate structure 112 and gate cap layer 114 were formed
in the replacement gate cavity 108 of the device 100 above the
replacement channel cladding material 110 using well-known
techniques. At the point of fabrication depicted in FIG. 4G,
traditional manufacturing techniques may be performed to complete
the manufacture of the device 100.
[0047] FIGS. 5A-5E depict yet another illustrative method disclosed
herein of forming cladding materials in the channel region of a
semiconductor device, and the resulting semiconductor devices. In
this embodiment, the initial cladding material 118 will not be
formed on the fins 16 prior to the formation of the sacrificial
gate structure 20. Rather, in this embodiment, a cladding material
will only be formed in the channel region of the device 100 through
the replacement gate cavity.
[0048] FIG. 5A depicts the device 100 at a point in fabrication
that corresponds to that shown in FIG. 4A, i.e., after the
formation of the fins 16, the sacrificial gate structure 20, the
gate cap layer 22 and the sidewall spacer 24.
[0049] FIG. 5B depicts the device 100 after trenches 102A were
formed in the source drain regions to remove portions of the fins
16 positioned in the source/drain regions of the device 100. In
this embodiment, at least some portion of the etching processes
used to form the trenches 102A is isotropic in nature such that the
inward edges 102E of the trenches 102A extend laterally inward of
an outer surface 24S of the spacers 24. In one embodiment, the
inward edges 102E of the trenches 102A will extend laterally under
substantially the entire width of the spacers 24 such that the
inward edges 102E are located adjacent the channel region of the
device 100, the inward edges 102E of the trenches 102A are
positioned at a location that is even with or inward (toward the
channel region) of a vertical line corresponding to an outermost
edge 20X of the sidewall of the sacrificial gate structure 20. In
the embodiment shown in FIG. 5B, the inward edge 102E of the trench
102A is substantially vertically aligned with the sidewall of the
sacrificial gate structure 20. In some cases, the trenches 102A may
be formed entirely by performing an isotropic etching process. In
other cases, the trenches 102A may be formed by performing a
combination of anisotropic and isotropic etching processes.
[0050] FIG. 5C depicts the device 100 after the above-described epi
semiconductor material 104 was formed in the trenches 102A by
performing a traditional epi growth process, i.e., embedded
source/drain regions were formed for the device 100. The inward
edge regions 104E of the epi semiconductor material 104 coincide
with the inward edge regions 102E of the trenches 102A. In one
embodiment, the inward edges 104E of epi semiconductor material 104
will extend laterally under substantially the entire width of the
spacers 24 such that the inward edges 104E of the epi semiconductor
material 104 are positioned adjacent or near the channel region of
the device 100. As before, various ion implant regions would have
been formed in the fins 16/substrate 12 at this point in the
process flow, e.g., halo implants, extension implants, well
implants, etc.
[0051] FIG. 5D depicts the device 100 after several process
operations were performed. First, the above-described layer of
insulating material 106 was formed on the device 100 above the epi
semiconductor material 104. Thereafter, one or more CMP processes
were performed to planarize the upper surface of the layer of
insulating material 106 with the upper surface of the sacrificial
gate structure 20. Then, one or more etching processes were
performed to remove the sacrificial gate structure 20 relative to
the surrounding structures and thereby define the replacement gate
cavity 108. The removal of the sacrificial gate structure 20
exposes the upper surface 16S of the fin 16 within the gate cavity
108.
[0052] FIG. 5E depicts the device 100 after several process
operations were performed.
[0053] First, the above-described replacement channel cladding
material 110 was formed on the portions of the fin 16 exposed
within the gate cavity 108. Next, the above-described replacement
gate structure 112 and gate cap layer 114 were formed in the
replacement gate cavity 108 of the device 100 above the replacement
channel cladding material 110 using well-known techniques. At the
point of fabrication depicted in FIG. 5E, traditional manufacturing
techniques may be performed to complete the manufacture of the
device 100.
[0054] After a complete reading of the present application, those
skilled in the art will appreciate that various aspects of the
illustrative examples depicted in the attached drawings may be
combined in certain applications if desired. For example, the
formation of the recesses 119 under the spacers 24 (FIGS. 4A-4G)
may be combined with the formation of the laterally enlarged
trenches (5A-5G) to insure connection between the source/drain
regions and the replacement cladding material 110.
[0055] The particular embodiments disclosed above are illustrative
only, as the invention may be modified and practiced in different
but equivalent manners apparent to those skilled in the art having
the benefit of the teachings herein. For example, the process steps
set forth above may be performed in a different order. Furthermore,
no limitations are intended to the details of construction or
design herein shown, other than as described in the claims below.
It is therefore evident that the particular embodiments disclosed
above may be altered or modi-fled and all such variations are
considered within the scope and spirit of the invention. Note that
the use of terms, such as "first," "second," "third" or "fourth" to
describe various processes or structures in this specification and
in the attached claims is only used as a shorthand reference to
such steps/structures and does not necessarily imply that such
steps/structures are performed/formed in that ordered sequence. Of
course, depending upon the exact claim language, an ordered
sequence of such processes may or may not be required. Accordingly,
the protection sought herein is as set forth in the claims
below.
* * * * *