U.S. patent application number 14/696259 was filed with the patent office on 2016-04-28 for spatial light modulator with integrated optical compensation structure.
The applicant listed for this patent is QUALCOMM MEMS Technologies, Inc.. Invention is credited to Clarence Chui, William J. Cummings, Jeffrey Brian Sampsell, Ming-Hau Tung.
Application Number | 20160116820 14/696259 |
Document ID | / |
Family ID | 34842008 |
Filed Date | 2016-04-28 |
United States Patent
Application |
20160116820 |
Kind Code |
A1 |
Chui; Clarence ; et
al. |
April 28, 2016 |
SPATIAL LIGHT MODULATOR WITH INTEGRATED OPTICAL COMPENSATION
STRUCTURE
Abstract
A spatial light modulator comprises an integrated optical
compensation structure, e.g., an optical compensation structure
arranged between a substrate and a plurality of individually
addressable light-modulating elements, or an optical compensation
structure located on the opposite side of the light-modulating
elements from the substrate. The individually addressable
light-modulating elements are configured to modulate light
transmitted through or reflected from the transparent substrate.
Methods for making such spatial light modulators involve
fabricating an optical compensation structure over a substrate and
fabricating a plurality of individually addressable
light-modulating elements over the optical compensation structure.
The optical compensation structure may be a passive optical
compensation structure. The optical compensation structure may
include one or more of a supplemental frontlighting source, a
diffuser, a black mask, a diffractive optical element, a color
filter, an anti-reflective layer, a structure that scatters light,
a microlens array, and a holographic film.
Inventors: |
Chui; Clarence; (Los Altos,
CA) ; Sampsell; Jeffrey Brian; (Pueblo West, CO)
; Cummings; William J.; (Hsinchu, TW) ; Tung;
Ming-Hau; (San Francisco, CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
QUALCOMM MEMS Technologies, Inc. |
San Diego |
CA |
US |
|
|
Family ID: |
34842008 |
Appl. No.: |
14/696259 |
Filed: |
April 24, 2015 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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13337494 |
Dec 27, 2011 |
9019590 |
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14696259 |
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12014657 |
Jan 15, 2008 |
8111445 |
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13337494 |
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11036965 |
Jan 14, 2005 |
7342705 |
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12014657 |
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60541607 |
Feb 3, 2004 |
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60613482 |
Sep 27, 2004 |
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60613536 |
Sep 27, 2004 |
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60613542 |
Sep 27, 2004 |
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Current U.S.
Class: |
359/259 ;
359/245 |
Current CPC
Class: |
G02F 1/21 20130101; G02B
26/001 20130101; G02F 1/1335 20130101; G02F 2001/13356
20130101 |
International
Class: |
G02F 1/21 20060101
G02F001/21 |
Claims
1. A spatial light modulator, comprising: a substrate; a plurality
of individually addressable interferometric light-modulating
elements configured to modulate light transmitted through the
substrate, the interferometric light-modulating elements including
a movable reflective layer; and a plurality of optical compensation
structures between the substrate and the plurality of individually
addressable interferometric light-modulating elements, at least one
of the optical compensation structures including a diffuser.
2. The spatial light modulator of claim 1, wherein at least one of
the optical compensation structures includes a black mask.
3. The spatial light modulator of claim 1, wherein at least one of
the optical compensation structures includes a color filter.
4. The spatial light modulator of claim 1, wherein at least one of
the optical compensation structures includes an anti-reflective
layer.
5. The spatial light modulator of claim 1, wherein at least one of
the optical compensation structures includes a plurality of
scattering elements.
6. The spatial light modulator of claim 1, wherein at least one of
the optical compensation structures includes a microlens array.
7. The spatial light modulator of claim 1, wherein at least one of
the optical compensation structures includes a holographic
film.
8. The spatial light modulator of claim 1, wherein at least one of
the optical compensation structures includes a diffractive optical
element.
9. The spatial light modulator of claim 1, wherein at least one of
the optical compensation structures includes a planarization layer
that includes a scattering element.
10. The spatial light modulator of claim 1, wherein at least one of
the optical compensation structures includes a passive optical
compensation structure.
11. The spatial light modulator of claim 1, further comprising a
planarization layer.
12. The spatial light modulator of claim 1, wherein the substrate
is partially transparent.
13. The spatial light modulator of claim 1, wherein at least one of
the optical compensation structures is between the diffuser and the
plurality of individually addressable interferometric
light-modulating elements.
14. The spatial light modulator of claim 1, wherein the diffuser is
between at least one of the optical compensation structures and the
plurality of individually addressable interferometric
light-modulating elements.
15. The spatial light modulator of claim 1, further comprising
driver electronics.
16. A spatial light modulator, comprising: a substrate; a means for
interferometrically modulating light transmitted through; a
plurality of means for compensating the light transmitted through
the substrate, the plurality of light compensating means between
the substrate and the light modulating means, at least one of the
light compensating means including a diffuser.
17. The spatial light modulator of claim 16, wherein the light
modulating means includes a plurality of interferometric
modulators.
18. The spatial light modulator of claim 17, wherein each of the
plurality of interferometric modulators includes a movable
reflective layer.
19. The spatial light modulator of claim 16, wherein the plurality
of light compensating means includes at least one of a black mask,
a color filter, an anti-reflective layer, a plurality of scattering
elements, a microlens array, a holographic film, a diffractive
optical element, and a planarization layer that includes a
scattering element.
20. The spatial light modulator of claim 16, wherein at least one
of the light compensating means includes a passive optical
compensation structure.
21. The spatial light modulator of claim 16, wherein the substrate
is partially transparent.
22. The spatial light modulator of claim 16, further comprising a
planarization layer.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation of U.S. patent
application Ser. No. 13/337,494, filed Dec. 27, 2011 and scheduled
to issue as U.S. Pat. No. 9,019,590 on Apr. 28, 2015, which is a
continuation of U.S. patent application Ser. No. 12/014,657, filed
Jan. 15, 2008, issued as U.S. Pat. No. 8,111,445 on Feb. 7, 2012,
which is a divisional of U.S. patent application Ser. No.
11/036,965, filed Jan. 14, 2005, issued as U.S. Pat. No. 7,342,705
on Mar. 11, 2008, which claims priority benefit under 35 U.S.C.
.sctn.119(e) of: U.S. Provisional Patent Application Ser. No.
60/541,607, filed Feb. 3, 2004; U.S. Provisional Patent Application
Ser. No. 60/613,482, filed Sep. 27, 2004; U.S. Provisional Patent
Application Ser. No. 60/613,536, filed Sep. 27, 2004; and U.S.
Provisional Patent Application Ser. No. 60/613,542, filed Sep. 27,
2004. The disclosures of all of the above-referenced prior
applications, publications, and patents are considered part of the
disclosure of this application, and are incorporated by reference
herein in their entirety.
BACKGROUND
[0002] 1. Field of the Invention
[0003] This invention relates to improvements in the manufacturing
and performance of spatial light modulators such as interferometric
modulators.
[0004] 2. Description of the Related Art
[0005] Spatial light modulators are display devices that contain
arrays of individually addressable light modulating elements.
Examples of spatial light modulators include liquid crystal
displays and interferometric modulator arrays. The light modulating
elements in such devices typically function by altering the
characteristics of light reflected or transmitted through the
individual elements, thus altering the appearance of the
display.
SUMMARY
[0006] As spatial light modulators become increasingly
sophisticated, the inventor anticipates that difficulties
associated with fabricating them by current manufacturing process
flows will also increase. Accordingly, the inventor has developed
spatial light modulators having integrated optical compensation
structures and methods for making them.
[0007] An embodiment provides a spatial light modulator that
includes a substrate; a plurality of individually addressable
light-modulating elements arranged over the substrate and
configured to modulate light transmitted through the substrate; and
an optical compensation structure; wherein the optical compensation
structure is arranged between the substrate and the plurality of
individually addressable light-modulating elements. In certain
embodiments, the optical compensation structure is a passive
optical compensation structure.
[0008] An embodiment provides a spatial light modulator that
includes a substrate; a plurality of individually addressable
light-modulating elements arranged over the substrate and
configured to modulate light transmitted through the substrate; and
an optical compensation structure; wherein the plurality of
individually addressable light-modulating elements is arranged
between the substrate and the optical compensation structure. In
certain embodiments, the optical compensation structure is a
passive optical compensation structure.
[0009] Another embodiment provides a method of making a spatial
light modulator that includes fabricating an optical compensation
structure over a transparent substrate; and fabricating a plurality
of individually addressable light-modulating elements over the
optical compensation structure, the individually addressable
light-modulating elements being configured to modulate light
transmitted through the transparent substrate. In certain
embodiments, fabricating the optical compensation structure
includes fabricating a passive optical compensation structure.
[0010] Another embodiment provides a method of making a spatial
light modulator that includes fabricating a plurality of
individually addressable light-modulating elements over a
substrate; and fabricating an optical compensation structure over
the plurality of individually addressable light-modulating
elements, the individually addressable light-modulating elements
being configured to modulate light transmitted through the optical
compensation structure. In certain embodiments, fabricating the
optical compensation structure includes fabricating a passive
optical compensation structure.
[0011] Another embodiment provides a spatial light modulator that
includes a transparent substrate; a plurality of individually
addressable interferometric light-modulating elements arranged over
the transparent substrate and configured to modulate light
transmitted through the transparent substrate, the interferometric
light-modulating elements comprising a cavity and a movable wall;
and at least one optical compensation structure arranged between
the transparent substrate and the plurality of individually
addressable interferometric light-modulating elements, the optical
compensation structure comprising a black mask, color filter, or
diffuser.
[0012] Another embodiment provides a spatial light modulator that
includes a substrate; a plurality of individually addressable
interferometric light-modulating elements arranged over the
substrate and configured to modulate light transmitted through or
reflected from the substrate, the interferometric light-modulating
elements comprising a cavity and a movable wall; and at least one
optical compensation structure, the plurality of individually
addressable interferometric light-modulating elements being
arranged between the substrate and the optical compensation
structure, the optical compensation structure comprising a
structure selected from the group consisting of an anti-reflective
layer, a diffractive optical element, a structure that scatters
light, a black mask, a color filter, a diffuser, a microlens array,
and a holographic film.
[0013] Another embodiment provides a spatial light modulator that
includes a substrate; a means for modulating light transmitted
through or reflected from the substrate; and a means for
compensating the light transmitted through or reflected from the
substrate; wherein the means for compensating the light is
operatively arranged between the substrate and the means for
modulating light transmitted through or reflected from the
substrate. In certain embodiments, the means for compensating the
light transmitted through or reflected from the substrate is a
means for passively compensating the light transmitted through or
reflected from the substrate.
[0014] Another embodiment provides a spatial light modulator that
includes a substrate; a means for modulating light transmitted
through or reflected from the substrate; and a means for
compensating the light transmitted through or reflected from the
substrate;
[0015] wherein the means for modulating light transmitted through
or reflected from the substrate is operatively arranged between the
substrate and the means for compensating the light. In certain
embodiments, the means for compensating the light transmitted
through or reflected from the substrate is a means for passively
compensating the light transmitted through or reflected from the
substrate.
[0016] Another embodiment provides a spatial light modulator made
by a method that includes fabricating an optical compensation
structure over a transparent substrate; and fabricating a plurality
of individually addressable light-modulating elements over the
optical compensation structure, the individually addressable
light-modulating elements being configured to modulate light
transmitted through the transparent substrate.
[0017] Another embodiment provides a spatial light modulator made
by a method that includes fabricating a plurality of individually
addressable light-modulating elements over a substrate; and
fabricating an optical compensation structure over the plurality of
individually addressable light-modulating elements, the
individually addressable light-modulating elements being configured
to modulate light transmitted through the optical compensation
structure.
[0018] These and other embodiments are described in greater detail
below.
BRIEF DESCRIPTION OF THE DRAWINGS
[0019] These and other aspects of the invention will be readily
apparent from the following description and from the appended
drawings, which are meant to illustrate and not to limit the
invention, and wherein:
[0020] FIGS. 1A and 1B illustrate some characteristics of a typical
interferometric modulator (see FIGS. 1A and 1B of U.S. Patent
Publication No. 2002/0126364 A1).
[0021] FIG. 2 illustrates some characteristics of a typical
interferometric modulator (see FIG. 2 of U.S. Patent Publication
No. 2002/0126364 A1).
[0022] FIGS. 3A-3F illustrate optical compensation films fabricated
on the opposite surface of the substrate from which an array of
light modulating elements resides (see FIGS. 6A-6F of U.S. Patent
Publication No. 2002/0126364 A1).
[0023] FIG. 4 illustrates an optical compensation film (diffuser)
fabricated on the opposite surface of the substrate from which a
light modulating element resides.
[0024] FIGS. 5A to 5C illustrate various embodiments of spatial
light modulators comprising integrated optical compensation
structures.
[0025] FIG. 6 illustrates an embodiment of a spatial light
modulator comprising an integrated optical compensation structure
that scatters light.
[0026] FIGS. 7A and 7B illustrate various embodiments of spatial
light modulators comprising integrated optical compensation
structures.
[0027] FIG. 8 illustrates an embodiment of a manufacturing process
flow diagram for making spatial light modulators comprising
integrated optical compensation structures.
[0028] FIG. 9 illustrates an embodiment of a spatial light
modulator comprising an integrated optical compensation
structure.
DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
[0029] A preferred embodiment is an interferometric modulator that
includes at least one integrated optical compensation structure. In
some configurations, the optical compensation structure is arranged
between the substrate and the light-modulating elements of the
interferometric modulator. In other configurations, the
light-modulating elements are arranged between the substrate and
the optical compensation structure.
[0030] Various examples of interferometric modulators are described
in U.S. Patent Publication No. 2002/0126364 A1. FIGS. 1 and 2
illustrate some characteristics of a typical interferometric
modulator (see FIGS. 1 and 2 of U.S. Patent Publication No.
2002/0126364 A1 and the corresponding text). Referring to FIGS. 1A
and 1B, two interferometric modulator structures 114 and 116 each
include a secondary mirror 102 with a corrugated pattern 104 etched
into its upper (outer) surface 103, using any of a variety of known
techniques. The corrugation does not extend through the membrane
106 on which the mirror is formed so that the inner surface 108 of
the mirror remains smooth. FIG. 1B reveals the pattern of etched
corrugation 104 on the secondary mirror and the smooth inner
surface 112 which remains after etch. The corrugated pattern, which
can be formed in a variety of geometries (e.g., rectangular,
pyramidal, conical), provides structural stiffening of the mirror,
making it more immune to variations in material stresses, reducing
total mass, and preventing deformation when the mirror is
actuated.
[0031] In general, an interferometric modulator which has either no
voltage applied or some relatively steady state voltage, or bias
voltage, applied is considered to be in a quiescent state and will
reflect a particular color, a quiescent color. As referenced in
U.S. Patent Publication No. 2002/0126364 A1, the quiescent color is
determined by the thickness of the sacrificial spacer upon which
the secondary mirror is fabricated.
[0032] Each interferometric modulator 114, 116 is rectangular and
connected at its four corners to four posts 118 via support arms
such as 120 and 122. In some cases (see discussion in U.S. Patent
Publication No. 2002/0126364 A1), the interferometric modulator
array will be operated at a selected constant bias voltage. In
those cases, the secondary mirror 102 will generally maintain a
quiescent position which is closer to corresponding primary mirror
128 than without any bias voltage applied. The fabrication of
interferometric modulators with differently sized support arms
allows for the mechanical restoration force of each interferometric
modulator to be determined by its geometry. Thus, with the same
bias voltage applied to multiple interferometric modulators, each
interferometric modulator may maintain a different biased position
(distance from the primary mirror) via control of the dimensions of
the support arm and its resulting spring constant. The thicker the
support arm is, the greater its spring constant. Thus different
colors (e.g., red, green, and blue) can be displayed by different
interferometric modulators without requiring deposition of
different thickness spacers. Instead, a single spacer, deposited
and subsequently removed during fabrication, may be used while
color is determined by modifying the support arm dimensions during
the single photolithographic step used to define the arms. For
example, in FIG. 2, interferometric modulators 114, 116 are both
shown in quiescent states with the same bias voltage applied.
However, the gap spacing 126 for interferometric modulator 114 is
larger than gap spacing 128 for interferometric modulator 116 by
virtue of the larger dimensions of its respective support arms.
Various other examples of interferometric modulators are also
known.
[0033] U.S. Patent Publication No. 2002/0126364 A1 also describes
various passive optical compensation structures for minimizing
color shift as the angle of incidence changes (a characteristic
typical of interferometric structures) and active optical
compensation structures for supplying supplemental illumination.
For example, as illustrated in FIGS. 3A-3F (see FIGS. 6A-6F of U.S.
Patent Publication No. 2002/0126364 A1), an optical compensation
film may be fabricated on the opposite surface of the substrate
from which the array of light modulating elements resides. Such
films can be designed and fabricated in a number of ways, and may
be used in conjunction with each other.
[0034] In FIG. 3A, a passive optical compensation film 600 is a
volume or surface relief holographic film. A volume holographic
film may be produced by exposing a photosensitive polymer to the
interference pattern produced by the intersection of two or more
coherent light sources (e.g., lasers). Using the appropriate
frequencies and beam orientations arbitrary periodic patterns of
refractive indices within the film may be produced. A surface
relief holographic film may be produced by creating a metal master
using any number of microfabrication techniques known by those
skilled in the art. The master is subsequently used to pattern the
film. Such films can be used to enhance the transmission and
reflection of light within a definable cone of angles, thus
minimizing off-axis light. The colors and brightness of a display
viewed with on axis light are enhanced and color shift is
diminished because brightness goes down significantly outside of
the cone.
[0035] In FIG. 3B, another approach is illustrated for a device 604
in which an array of passive optical compensation structures 606 is
fabricated on the substrate. These structures, which can be
fabricated using the techniques referenced in U.S. Patent
Publication No. 2002/0126364 A1, can be considered photonic
crystals, as described in the book "Photonic Crystals", by John D.
Joannopoulos, et al. They are essentially three-dimensional
interferometric arrays which demonstrate interference from all
angles. This provides the ability to design waveguides which can
perform a number of functions including channeling incident light
of certain frequencies to the appropriately colored pixels, or by
changing light of a certain incidence angle to a new incidence
angle, or some combination of both.
[0036] In another example of a passive optical compensation
structure, seen in FIG. 3C, a three-layer polymeric film 610
contains suspended particles. The particles are actually single or
multi-layer dielectric mirrors which have been fabricated in the
form of microscopic plates. These plates, for example, may be
fabricated by deposition of multilayer dielectric films onto a
polymer sheet which, when dissolved, leaves a film which can
"ground up" in a way which produces the plates. The plates are
subsequently mixed into a liquid plastic precursor. By the
application of electric fields during the curing process, the
orientation of these plates may be fixed during manufacture. The
mirrors can be designed so that they only reflect at a range of
grazing angles. Consequently, light is either reflected or
transmitted depending on the incidence angle with respect to the
mirror. In FIG. 3C, layer 612 is oriented to reflect light 609 of
high incidence that enters the film 610 closer to the
perpendicular. Layer 614 reflects light 613 of lower incidence into
a more perpendicular path. Layer 616 modifies the even lower angle
incident light 615. Because the layers minimally affect light which
approaches perpendicularly, they each act as a separate "angle
selective incidence filter" with the result that randomly oriented
incident light couples into the substrate with a higher degree of
perpendicularly. This minimizes the color shift of a display viewed
through this film.
[0037] In another example of a passive optical compensation
structure, illustrated in FIG. 3D, micro lenses 622 are used in an
array in device 620. Each lens 622 may be used to enhance the fill
factor of the display by effectively magnifying the active area of
each pixel. This approach may be used by itself or in conjunction
with the other color shift compensation films.
[0038] In an example of an active optical compensation structure,
illustrated in FIG. 3E; device 624 uses supplemental lighting in
the form of a frontlighting array. In this case an organic light
emitting material 626, for example, Alq/diamine structures and
poly(phenylene vinylene), can be deposited and patterned on the
substrate. The top view, FIG. 3F, reveals a pattern 627 which
corresponds with the interferometric modulator array underneath.
That is, the light emitting areas 626 are designed to obscure the
inactive areas between the interferometric modulator, and allow a
clear aperture in the remaining regions. Light is actively emitted
into the substrate onto the interferometric modulator and is
subsequently reflected back to the viewer. Conversely, a patterned
emitting film may be applied to the backplate of the display and
light transmitted forward through the gaps between the sub-pixels.
By patterning a mirror on the front of the display, this light can
be reflected back upon the interferometric modulator array.
Peripherally mounted light sources in conjunction with films
relying on total internal reflection are yet another approach. U.S.
Pat. No. 6,055,090 also discloses an interferometric modulator
having an active optical compensation structure that includes a
supplemental frontlighting source.
[0039] FIG. 4 illustrates an interferometric modulator 10
comprising a passive optical compensation film (a diffuser 22)
fabricated on the opposite surface of the substrate from which a
light modulating element resides. The diffuser 22 generally
compensates for the specular appearance of an uncompensated spatial
light modulator array, e.g., by making the reflective array appear
less like a mirror and more like paper. In FIG. 4, a light
modulating element 8 comprises a movable wall or element 16, a
cavity 20, and a support post 18. As illustrated in FIG. 4, the
movable wall 16 is supported over the cavity 20 by the support post
18. An optical stack 14 forms a wall of the cavity 20 opposite to
the movable wall 16. The optical stack 14 may be considered part of
the light modulating element 8. The optical stack 14 is fabricated
on a transparent substrate 12, and the diffuser 22 is fabricated on
the opposite side of the substrate 12 from the light modulating
element 8. In operation, the movable wall 16 moves through planes
parallel to the front wall of the cavity 20. The movable wall 16 is
highly reflective and typically comprises a metal. As the movable
wall 16 moves toward the optical stack 14 on the opposite side of
the cavity 12, self-interference of light (typically entering
through the transparent substrate 12 and the optical stack 14)
within the cavity 20 occurs. The color of the reflected light that
exits the cavity through the transparent substrate 12 and the
optical stack 14 may be controlled by varying the distance between
the optical stack 14 and the movable wall 16. The surface of the
transparent substrate 12 in contact with the optical stack 14 is
the surface upon which the light modulating element 8 is
fabricated. The diffuser 22 is typically fabricated or attached to
the opposite surface of the transparent substrate 12 after
fabrication of the light modulating element 8.
[0040] As illustrated in FIG. 4 and by the disclosure of U.S.
Patent Publication No. 2002/0126364 A1, passive optical
compensation structures for spatial light modulators are typically
fabricated on the opposite surface of the substrate from which the
array of light modulating elements resides to facilitate existing
manufacturing process flows.
[0041] Manufacturing of the overall display system typically
involves producing the various components separately, such as the
passive optical compensation structures, the interferometric
modulator structures, the driver electronics, the graphics control
fimctions, etc., and then integrating them at a later stage in the
manufacturing process flow. Producing the various components
separately and then integrating them at a later stage simplifies
the delicate task of manufacturing the light modulating elements by
reducing the need for complex deposition and micro-fabrication
schemes.
[0042] As spatial light modulators become increasingly
sophisticated, it is anticipated that difficulties associated with
fabricating them by current manufacturing process flows will also
increase. Accordingly, spatial light modulators having integrated
optical compensation structures and methods for making them have
been developed. An embodiment provides spatial light modulators
having an integrated optical compensation structure, e.g., an
optical compensation structure located between the substrate and
the light-modulating elements, or an optical compensation structure
located on the opposite side of the light-modulating elements from
the substrate. The optical compensation structure may be active or
passive, as desired. In this context, a "passive" optical
compensation structure is one that does not supply a supplemental
frontlighting source.
[0043] As discussed above, FIG. 4 illustrates a passive optical
compensation film (a diffuser 22) fabricated on the opposite
surface of the substrate from which a light modulating element
resides. In FIG. 4, the light modulating element 8 is an
interferometric modulator comprising the movable wall or element
16, the cavity 12, the support post 18. The optical stack 14 is
fabricated on the transparent substrate 12, and the diffuser 22 is
fabricated on the opposite side of the substrate 12 from the light
modulating element 8. The optical stack 14 may be considered part
of the light modulating element 8. Those skilled in the art
appreciate that, in some embodiments, an interferometric modulator
may modulate between a black, or absorbing state, and a reflecting
state. The reflecting state is a non-interference based state that
appears to be white. While the white state in these embodiments
does not particularly depend on the interference characteristics of
the modulator, the modulating elements preferably have a structure
that is similar to those embodiments of interferometric modulators
that rely upon the interference characteristics and will be
referred to as such herein. Interferometric modulators may modulate
between an absorbing state and an interference state, between an
absorbing state and a reflective state, between a reflective state
and an interference state, or between two different interference
states.
[0044] FIG. 5A illustrates an embodiment of a spatial light
modulator 40 in which a passive optical compensation structure
(diffuser 41) is arranged between a substrate 42 and a
light-modulating element 44, rather than being on the opposite side
of the substrate from the light modulating element as shown in FIG.
4. In the embodiment illustrated in FIG. 5A, the light-modulating
element 44 is an interferometric modulator comprising a cavity 45,
a movable wall 46, an optical stack 43, and a support 47. The
optical stack 43 is on the wall of the cavity 45 that is opposite
to the movable wall 46. In the illustrated embodiment, the spatial
light modulator 40 further comprises a planarization layer 48
between the substrate 42 and the optical stack 43. Both the movable
wall 46 and the optical stack 43 are reflective, so that operation
of spatial light modulator 40 is generally similar to that
described for the spatial light modulator 10 illustrated in FIG. 4.
Typically, the substrate 42 is at least partially transparent.
Those skilled in the art will appreciate that the light-modulating
element 44 may be configured in an array comprising a plurality of
individually addressable light-modulating elements arranged over a
transparent substrate and configured to modulate light transmitted
through the transparent substrate.
[0045] Those skilled in the art will also appreciate that the
diffuser 41 illustrated in FIG. 5A is representative of various
optical compensation structures (both active and passive) that may
be arranged between the substrate and the plurality of individually
addressable light-modulating elements. For example, an active
optical compensation structure may supply a supplemental
frontlighting source. Non-limiting examples of passive optical
compensation structures include an anti-reflective layer, a
diffractive optical element, a structure that scatters light, a
black mask, a color filter, a microlens array, a holographic film
(e.g., that mitigates a shift in reflected color with respect to an
angle of incidence of the light transmitted through the transparent
substrate), or a combination thereof. In FIG. 5, the
light-modulating element 44 comprises an interferometric modulator,
but other spatial light modulators may also be used.
[0046] FIG. 5B illustrates an embodiment of a spatial light
modulator 33 in which a passive optical compensation structure
(black mask 32) is arranged between a transparent substrate 12 and
a reflecting element 31. The reflecting element may be an optical
stack. Black masks such as the black mask 32 may be used to mask
parts of the spatial light modulator structure that are not
desirable for the viewer to see. A light modulating element or
elements (e.g., a plurality of individually addressable
light-modulating elements) are omitted from FIG. 5B for clarity,
but are understood to be arranged over the transparent substrate 12
and configured to modulate light transmitted through the
transparent substrate 12. For example, the light modulating element
of FIG. 5B may comprise a plurality of individually addressable
light-modulating elements arranged over the reflecting element 31
as discussed above with respect to FIG. 5A. The spatial light
modulator 33 may include a planarization layer 30, e.g., between
the black mask 32 and the reflecting element 31 as shown in FIG.
5B.
[0047] FIG. 5C illustrates an embodiment of a spatial light
modulator 37 in which a passive optical compensation structure
(comprising color filter elements 34, 36, 38) is arranged between a
transparent substrate 12 and a reflecting element 39. As in FIG.
5B, the reflecting element 39 may be an optical stack. In the
illustrated embodiment, the color filter elements 34, 36, 38 are
red, green and blue, respectively, but other colors may be selected
by those skilled in the art so that the resulting spatial light
modulator produces the desired colors. As in FIG. 5B, a light
modulating element or elements (e.g., a plurality of individually
addressable light-modulating elements) are omitted from FIG. 5C for
clarity, but are understood to be arranged over the transparent
substrate 12 and configured to modulate light transmitted through
the transparent substrate 12. For example, the light modulating
element of FIG. 5C may comprise a plurality of individually
addressable light-modulating elements arranged over the optical
stack as discussed above with respect to FIG. 5A. The spatial light
modulator 37 may include a planarization layer 30, e.g., between
the color filter elements 34, 36, 38 and the optical stack 39 as
shown in FIG. 5C.
[0048] The use of a color filter may increase the performance of
the spatial light modulator by enhancing color saturation. Also,
interferometric modulators that produce only black and white may be
used in combination with color filters to produce colored
light.
[0049] Interferometric modulators may be fabricated to produce
various colors by varying the size of the cavity. However, varying
the size of the cavity may involve varying the manufacturing
process, e.g., by manufacturing a different size cavity for an
interferometric modulator that produces green light than for an
interferometric modulator that produces red light. The use of black
and white interferometric modulators in combination with color
filters may substantially simplify the manufacturing process. Other
improvements in the manufacturing process are realized by
integrating the color filter into the interferometric modulator as
illustrated in FIG. 5C.
[0050] FIG. 6 illustrates an embodiment of a spatial light
modulator 100 in which a passive optical compensation structure 105
(a planarization layer comprising a scattering element 110) is
arranged between a transparent substrate 115 and a light-modulating
element 120. In the embodiment illustrated in FIG. 6, the
light-modulating element 120 is an interferometric modulator
comprising a cavity 130, a movable wall 125, and an optical stack
135. The optical stack 135 is on the wall of the cavity 130 that is
opposite to the movable wall 125. Both the movable wall 125 and the
optical stack 135 are reflective (the optical stack 135 is
partially reflective), so that operation of spatial light modulator
100 is generally similar to that described for the spatial light
modulator 10 illustrated in FIG. 4. Light 140 passes through a slot
150 in the movable wall 125 and reflects from the scattering
element 110 such that it scatters the light 140 back to the movable
wall 125 (and in some cases back again to the scattering element
110), ultimately passing through the transparent substrate 115 and
exiting 160, 165 as shown in FIG. 6. Preferably, the scattering
element 110 is shaped such that the light 140 is scattered
randomly. For clarity, a single scattering element 110 and a single
slot 150 are illustrated in FIG. 6, but it will be understood that
the spatial light modulator 100 may comprise a plurality of
scattering elements and slots, arranged to provide the desired
amount of scattered light.
[0051] FIGS. 7A and 7B illustrate embodiments of spatial light
modulators comprising different combinations of integrated optical
compensation structures. FIG. 7A illustrates an embodiment of a
spatial light modulator 60 in which a passive optical compensation
structure (comprising a color filter element 34 and a black mask
32) is arranged between a transparent substrate 12 and an optical
stack 61. FIG. 7B illustrates an embodiment of a spatial light
modulator 62 in which a first passive optical compensation
structure (comprising a color filter element 40 and a black mask
32) and a second passive optical compensation structure (comprising
diffuser 26) are arranged between a transparent substrate 12 and an
optical stack 63. As in FIGS. 5B and 5C, a light modulating element
or elements (e.g., a plurality of individually addressable
light-modulating elements) are omitted from FIGS. 7A and 7B for
clarity, but are understood to be arranged over the transparent
substrate 12 and configured to modulate light transmitted through
the transparent substrate. The spatial light modulators 60, 62 may
include a planarization layer 30 e.g., between the passive optical
compensation structure (comprising the color filter element 34 and
the black mask 32) and the optical stack 61 as shown in FIG. 7A, or
between the first and second passive optical compensation
structures as shown in FIG. 7B. The spatial light modulator may
include an additional planarization layer, e.g., a planarization
layer 35 as shown in FIG. 7B between the first passive optical
compensation structure (comprising a color filter element 40 and a
black mask 32) and the optical stack 63.
[0052] Spatial light modulators may comprise an optical
compensation structure that performs one or more functions (e.g., a
color filter and a black mask as illustrated in FIG. 7A), and/or
the optical compensation structure may comprise multiple layers,
optionally separated from each other by planarization layers (e.g.,
as illustrated in FIG. 7B). Those skilled in the art will
understand that the term "optical compensation structure" may be
used to refer to a structure having a particular function (e.g.,
the diffuser 26), a layer having multiple functions (e.g.,
comprising the color filter element 34 and the black mask 32), or
multiple layers each having one or more functions as illustrated in
FIG. 7B, optionally including planarization layer(s). Thus, spatial
light modulators may comprise any combination of active and/or
passive optical compensation structures, e.g., a black mask and a
color filter; a black mask and a diffuser; a color filter and a
diffuser; a black mask, color filter and a diffuser, etc. Means for
compensating the light transmitted through the transparent
substrate include optical compensation structures as described
herein.
[0053] Spatial light modulators comprising an optical compensation
structure may be fabricated by integrating the fabrication of the
optical compensation structure into the process for fabricating the
spatial light modulator. An example of such a process is
illustrated in FIG. 8. The process begins with the substrate being
provided at step 50. Typically, the substrate is glass, plastic or
other transparent substrate. Those skilled in the art will
appreciate that the term "transparent" as used herein encompasses
materials that are substantially transparent to the operational
wavelength(s) of the spatial light modulator, and thus transparent
substrates need not transmit all wavelengths of light and may
absorb a portion of the light at the operational wavelength(s) of
the spatial light modulator. For example, the transparent substrate
may be tinted and/or polarized if desired for a particular
application. Thus, the transparency and reflectivity of the
substrate may be varied, depending on the configuration and the
function desired. In some embodiments, the substrate is at least
partially transparent and may be substantially transparent. In
other embodiments, the substrate is at least partially reflective
and may be substantially reflective. It is understood that a
substrate may be both partially transparent and partially
reflective.
[0054] The process illustrated in FIG. 8 continues at step 52 with
the fabrication of the optical compensation structure. Depending on
the structure, the materials and methods used for its fabrication
may vary. For example, it is often convenient to fabricate the
optical compensation structures using techniques and methods
compatible with the manufacturing of the individually addressable
light-modulating elements, e.g., by spin coating and/or chemical
vapor deposition techniques. For example, a diffuser film may be
fabricated by spin-coating the substrate using a polymer or polymer
solution that contains scattering elements dispersed therein. For
example, the polymer may be a polyimide and the scattering elements
may be microscopic glass beads. Color filters and black masks may
be appropriately dyed photoresist polymers fabricated on the
substrate using known photoresist deposition and masking
techniques. Black masks may also be inorganic materials such as
chrome oxide, also known as black chrome, fabricated on the
substrate using known deposition and masking techniques.
[0055] The process illustrated in FIG. 8 continues at step 54 with
the deposition of a planarization layer. The planarization layer or
layers are typically polymers, e.g., polyimide, and may be
deposited using known deposition and masking techniques. The
deposition of a planarization layer is an optional, but is often
preferred because it results in a suitable substrate for subsequent
processing steps. The process illustrated in FIG. 8 continues at
step 56 with the fabrication of individually addressable
light-modulating elements (e.g., interferometric modulator
elements) over the optical compensation structure and, if present,
the planarization layer. Interferometric modulators are generally
fabricated using thin film deposition processes, e.g., as described
in U.S. Pat. Nos. 5,835,255 and 6,055,090, and in U.S. Patent
Publication No. 2002/0126364 A1. A variation of this process, also
illustrated in FIG. 8, involves the fabrication of an additional
planarization layer at step 58, followed by the fabrication of an
additional optical compensation structure at step 59. After
fabrication at step 59, the fabrication process may return to steps
58, 59 for the fabrication of additional planarization layer(s) and
optical compensation structure(s), or may proceed to steps 54, 56
for the fabrication of the planarization layer and individually
addressable light-modulating elements. Those skilled in the art
will understand that the process illustrated in FIG. 8 or
variations thereof may be used to fabricate the spatial light
modulators described herein, including without limitation the
spatial light modulators illustrated in FIGS. 5-7. Means for
modulating light transmitted through the transparent substrate
include interferometric modulators and liquid crystal displays.
[0056] FIG. 9 illustrates an embodiment of a spatial light
modulator 200 in which a light modulating element 205 is arranged
between a substrate 210 and an optical compensation structure 215.
In the embodiment illustrated in FIG. 9, the light-modulating
element 205 is an interferometric modulator comprising a cavity
220, a movable wall 225, an optical stack 230, and supports 235.
The optical stack 230 is on the wall of the cavity 220 that is
opposite to the movable wall 225. The optical compensation
structure 215 may be any of the optical compensation structures
described herein, e.g., an active optical compensation structure
that supplies a supplemental frontlighting source, and/or a passive
optical compensation structure, e.g., an anti-reflective layer, a
diffractive optical element, a structure that scatters light, a
black mask, a color filter, a diffuser, a microlens array, a
holographic film that mitigates a shift in reflected color with
respect to an angle of incidence of the light transmitted through
the substrate, or a combination thereof. In FIG. 9, the
light-modulating element 205 comprises an interferometric
modulator, but other spatial light modulators may also be used.
[0057] A spatial light modulator in which a light modulating
element is arranged between a substrate and an optical compensation
structure (such as that illustrated in FIG. 9) may be fabricated by
a process similar to that illustrated in FIG. 8, except that the
individually addressable light-modulating elements are fabricated
over the substrate, followed by fabrication of the optical
compensation structure(s) over the individually addressable
light-modulating elements (e.g., step 56 in FIG. 8 is conducted
after step 50 and prior to step 52). Optionally, a planarization
layer may be fabricated over the individually addressable
light-modulating elements, followed by fabrication of the optical
compensation structure(s) over the planarization layer.
[0058] While the above detailed description has shown, described,
and pointed out novel features of the invention as applied to
various embodiments, it will be understood that various omissions,
substitutions, and changes in the form and details of the device or
process illustrated may be made by those skilled in the art without
departing from the spirit of the invention. As will be recognized,
the present invention may be embodied within a form that does not
provide all of the features and benefits set forth herein, as some
features may be used or practiced separately from others.
* * * * *