Patent | Date |
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Method And System For Fabricating Mems-based Cooling Systems App 20220087064 - Ganti; Suryaprakash ;   et al. | 2022-03-17 |
Angled facets for display devices Grant 9,678,329 - Holman , et al. June 13, 2 | 2017-06-13 |
Spatial Light Modulator With Integrated Optical Compensation Structure App 20160116820 - Chui; Clarence ;   et al. | 2016-04-28 |
Systems, devices, and methods for driving an analog interferometric modulator Grant 9,305,497 - Seo , et al. April 5, 2 | 2016-04-05 |
Dot inversion configuration Grant 9,293,076 - Chan , et al. March 22, 2 | 2016-03-22 |
Electrostatic Discharge Mitgation In Display Devices App 20150351207 - Tung; Ming-Hau ;   et al. | 2015-12-03 |
Vertically etched facets for display devices Grant 9,110,281 - Tung , et al. August 18, 2 | 2015-08-18 |
Spatial light modulator with integrated optical compensation structure Grant 9,019,590 - Chui , et al. April 28, 2 | 2015-04-28 |
Dot Inversion Configuration App 20150109265 - Chan; Edward Keat Leem ;   et al. | 2015-04-23 |
Electromechanical device with optical function separated from mechanical and electrical function Grant 9,001,412 - Chui , et al. April 7, 2 | 2015-04-07 |
Method of manufacturing MEMS devices providing air gap control Grant 8,964,280 - Tung , et al. February 24, 2 | 2015-02-24 |
Systems, Devices, And Methods For Driving An Analog Interferometric Modulator App 20140210866 - Seo; Jae Hyeong ;   et al. | 2014-07-31 |
In-plane Mems Varactor App 20140146435 - Stephanou; Philip Jason ;   et al. | 2014-05-29 |
Angled Facets For Display Devices App 20130162656 - Holman; Robert L. ;   et al. | 2013-06-27 |
Vertically Etched Facets For Display Devices App 20130162657 - Tung; Ming-Hau ;   et al. | 2013-06-27 |
Encapsulated Arrays Of Electromechanical Systems Devices App 20130135184 - Tung; Ming-Hau ;   et al. | 2013-05-30 |
Storage Capacitor For Electromechanical Systems And Methods Of Forming The Same App 20130120327 - Seo; Jae Hyeong ;   et al. | 2013-05-16 |
Storage Capacitor For Electromechanical Systems And Methods Of Forming The Same App 20130120416 - Seo; Jae Hyeong ;   et al. | 2013-05-16 |
Tuning Movable Layer Stiffness With Features In The Movable Layer App 20130100518 - Tupelly; Chandra Shekar Reddy ;   et al. | 2013-04-25 |
Electromechanical Device With Optical Function Separated From Mechanical And Electrical Function App 20130069958 - Chui; Clarence ;   et al. | 2013-03-21 |
Electromechanical devices having support structures Grant 8,344,470 - Sampsell , et al. January 1, 2 | 2013-01-01 |
Thin Film Transistors (tft) Active-matrix Imod Pixel Layout App 20120274611 - Seo; Jae Hyeong ;   et al. | 2012-11-01 |
MEMS devices with multi-component sacrificial layers Grant 8,300,299 - Tung , et al. October 30, 2 | 2012-10-30 |
Electromechanical device with optical function separated from mechanical and electrical function Grant 8,289,613 - Chui , et al. October 16, 2 | 2012-10-16 |
Controlling electromechanical behavior of structures within a microelectromechanical systems device Grant 8,278,726 - Miles , et al. October 2, 2 | 2012-10-02 |
Method Of Manufacturing Mems Devices Providing Air Gap Control App 20120122259 - Tung; Ming-Hau ;   et al. | 2012-05-17 |
Spatial Light Modulator With Integrated Optical Compensation Structure App 20120099177 - Chui; Clarence ;   et al. | 2012-04-26 |
Diffusion Barrier Layer For Mems Devices App 20120086998 - Wang; Hsin-Fu ;   et al. | 2012-04-12 |
Integrated Backlit Frontlight For Reflective Display Elements App 20120081406 - Li; Kebin ;   et al. | 2012-04-05 |
Interferometric Display Device App 20120056855 - Zhang; Wenyue ;   et al. | 2012-03-08 |
MEMS devices having overlying support structures Grant 8,120,125 - Sasagawa , et al. February 21, 2 | 2012-02-21 |
System and method for micro-electromechanical operation of an interferometric modulator Grant 8,115,988 - Chui , et al. February 14, 2 | 2012-02-14 |
Modulating the intensity of light from an interferometric reflector Grant 8,115,987 - Bita , et al. February 14, 2 | 2012-02-14 |
Spatial light modulator with integrated optical compensation structure Grant 8,111,445 - Chui , et al. February 7, 2 | 2012-02-07 |
Method of manufacturing MEMS devices providing air gap control Grant 8,102,590 - Tung , et al. January 24, 2 | 2012-01-24 |
Integrated imods and solar cells on a substrate Grant 8,094,363 - Sasagawa , et al. January 10, 2 | 2012-01-10 |
System And Method Of Illuminating Interferometric Modulators Using Backlighting App 20120001962 - Chui; Clarence ;   et al. | 2012-01-05 |
Diffusion barrier layer for MEMS devices Grant 8,085,458 - Wang , et al. December 27, 2 | 2011-12-27 |
Spatial light modulator with integrated optical compensation structure Grant 8,045,252 - Chui , et al. October 25, 2 | 2011-10-25 |
System and method of illuminating interferometric modulators using backlighting Grant 8,040,588 - Chui , et al. October 18, 2 | 2011-10-18 |
Electromechanical Devices Having Support Structures And Methods Of Fabricating The Same App 20110205197 - Sampsell; Jeffrey B. ;   et al. | 2011-08-25 |
Mems Devices With Multi-component Sacrificial Layers App 20110205615 - Tung; Ming-Hau ;   et al. | 2011-08-25 |
Method And Apparatus For Lighting A Display Device App 20110199667 - Wang; Chun-Ming ;   et al. | 2011-08-18 |
Electromechanical Device With Optical Function Separated From Mechanical And Electrical Function App 20110188109 - Chui; Clarence ;   et al. | 2011-08-04 |
Method of manufacturing MEMS devices providing air gap control Grant 7,952,787 - Tung , et al. May 31, 2 | 2011-05-31 |
MEMS devices with multi-component sacrificial layers Grant 7,952,789 - Tung , et al. May 31, 2 | 2011-05-31 |
Apparatus and method for reducing slippage between structures in an interferometric modulator Grant 7,948,671 - Tung , et al. May 24, 2 | 2011-05-24 |
Mems Devices Having Overlying Support Structures And Methods Of Fabricating The Same App 20110115762 - Sasagawa; Teruo ;   et al. | 2011-05-19 |
Electromechanical device with optical function separated from mechanical and electrical function Grant 7,944,599 - Chui , et al. May 17, 2 | 2011-05-17 |
MEMS devices having support structures Grant 7,936,031 - Sampsell , et al. May 3, 2 | 2011-05-03 |
Method and apparatus for providing back-lighting in a display device Grant 7,933,475 - Wang , et al. April 26, 2 | 2011-04-26 |
Apparatus and method for reducing slippage between structures in an interferometric modulator Grant 7,924,494 - Tung , et al. April 12, 2 | 2011-04-12 |
Method of fabricating interferometric devices using lift-off processing techniques Grant 7,906,353 - Chui , et al. March 15, 2 | 2011-03-15 |
White interferometric modulators and methods for forming the same Grant 7,884,989 - Gally , et al. February 8, 2 | 2011-02-08 |
Methods of fabricating MEMS devices having overlying support structures Grant 7,875,485 - Sasagawa , et al. January 25, 2 | 2011-01-25 |
Controlling Electromechanical Behavior Of Structures Within A Microelectromechanical Systems Device App 20100320555 - Miles; Mark W. ;   et al. | 2010-12-23 |
Support structures for free-standing electromechanical devices Grant 7,835,061 - Kogut , et al. November 16, 2 | 2010-11-16 |
Controlling electromechanical behavior of structures within a microelectromechanical systems device Grant 7,781,850 - Miles , et al. August 24, 2 | 2010-08-24 |
Mems Devices With Multi-component Sacrificial Layers App 20100165442 - Tung; Ming-Hau ;   et al. | 2010-07-01 |
Microelectromechanical device and method utilizing conducting layers separated by stops Grant 7,742,220 - Kogut , et al. June 22, 2 | 2010-06-22 |
MEMS switches with deforming membranes Grant 7,724,417 - Lewis , et al. May 25, 2 | 2010-05-25 |
Method and post structures for interferometric modulation Grant 7,719,747 - Tung , et al. May 18, 2 | 2010-05-18 |
MEMS devices requiring no mechanical support Grant 7,715,079 - Kogut , et al. May 11, 2 | 2010-05-11 |
Method of manufacture for microelectromechanical devices Grant 7,704,772 - Tung , et al. April 27, 2 | 2010-04-27 |
Apparatus And Method For Reducing Slippage Between Structures In An Interferometric Modulator App 20100085626 - Tung; Ming-Hau ;   et al. | 2010-04-08 |
Apparatus And Method For Reducing Slippage Between Structures In An Interferometric Modulator App 20100080890 - Tung; Ming-Hau ;   et al. | 2010-04-01 |
Diffusion Barrier Layer For Mems Devices App 20100046058 - Wang; Hsin-Fu ;   et al. | 2010-02-25 |
Methods for etching layers within a MEMS device to achieve a tapered edge Grant 7,660,058 - Qiu , et al. February 9, 2 | 2010-02-09 |
Mems Devices Having Overlying Support Structures And Methods Of Fabricating The Same App 20100019336 - Sasagawa; Teruo ;   et al. | 2010-01-28 |
Method And Apparatus For Providing Back-lighting In A Display Device App 20090310208 - WANG; Chun-Ming ;   et al. | 2009-12-17 |
Integrated Imods And Solar Cells On A Substrate App 20090308452 - Sasagawa; Teruo ;   et al. | 2009-12-17 |
Apparatus and method for reducing slippage between structures in an interferometric modulator Grant 7,630,119 - Tung , et al. December 8, 2 | 2009-12-08 |
Diffusion barrier layer for MEMS devices Grant 7,630,114 - Wang , et al. December 8, 2 | 2009-12-08 |
Non-planar surface structures and process for microelectromechanical systems Grant 7,623,287 - Sasagawa , et al. November 24, 2 | 2009-11-24 |
Method Of Manufacturing Mems Devices Providing Air Gap Control App 20090273823 - Tung; Ming-Hau ;   et al. | 2009-11-05 |
Microelectromechanical device with optical function separated from mechanical and electrical function Grant 7,612,932 - Chui , et al. November 3, 2 | 2009-11-03 |
Method Of Fabricating Interferometric Devices Using Lift-off Processing Techniques App 20090262412 - Chui; Clarence ;   et al. | 2009-10-22 |
Method and apparatus for providing back-lighting in an interferometric modulator display device Grant 7,603,001 - Wang , et al. October 13, 2 | 2009-10-13 |
Integrated IMODS and solar cells on a substrate Grant 7,595,926 - Sasagawa , et al. September 29, 2 | 2009-09-29 |
System And Method Of Illuminating Interferometric Modulators Using Backlighting App 20090225394 - Chui; Clarence ;   et al. | 2009-09-10 |
Method Of Manufacturing Mems Devices Providing Air Gap Control App 20090213451 - Tung; Ming-Hau ;   et al. | 2009-08-27 |
MEMS device and interconnects for same Grant 7,580,172 - Lewis , et al. August 25, 2 | 2009-08-25 |
Selective etching of MEMS using gaseous halides and reactive co-etchants Grant 7,566,664 - Yan , et al. July 28, 2 | 2009-07-28 |
Electromechanical devices having overlying support structures Grant 7,566,940 - Sasagawa , et al. July 28, 2 | 2009-07-28 |
System and method for micro-electromechanical operation of an interferometric modulator Grant 7,567,373 - Chui , et al. July 28, 2 | 2009-07-28 |
Method of fabricating interferometric devices using lift-off processing techniques Grant 7,553,684 - Chui , et al. June 30, 2 | 2009-06-30 |
Mems Devices Requiring No Mechanical Support App 20090147343 - Kogut; Lior ;   et al. | 2009-06-11 |
Method of manufacturing MEMS devices providing air gap control Grant 7,527,998 - Tung , et al. May 5, 2 | 2009-05-05 |
Method Of Manufacture For Microelectromechanical Devices App 20090068781 - Tung; Ming-Hau ;   et al. | 2009-03-12 |
Mems Devices With Protective Coatings App 20090059345 - Tung; Ming-Hau ;   et al. | 2009-03-05 |
System And Method For Measuring Adhesion Forces In Mems Devices App 20090051369 - Kogut; Lior ;   et al. | 2009-02-26 |
System And Method For Micro-electromechanical Operation Of An Interferometric Modulator App 20090022884 - Chui; Clarence ;   et al. | 2009-01-22 |
Method of manufacture for microelectromechanical devices Grant 7,476,327 - Tung , et al. January 13, 2 | 2009-01-13 |
Integrated Imods And Solar Cells On A Substrate App 20090009847 - Sasagawa; Teruo ;   et al. | 2009-01-08 |
Methods for producing MEMS with protective coatings using multi-component sacrificial layers Grant 7,450,295 - Tung , et al. November 11, 2 | 2008-11-11 |
Microelectromechanical Device And Method Utilizing Conducting Layers Separated By Stops App 20080239455 - Kogut; Lior ;   et al. | 2008-10-02 |
Methods of fabricating interferometric modulators by selectively removing a material Grant 7,429,334 - Tung , et al. September 30, 2 | 2008-09-30 |
Methods for etching layers within a MEMS device to achieve a tapered edge App 20080218840 - Qui; Chengin ;   et al. | 2008-09-11 |
Methods of fabricating interferometric modulators by selectively removing a material Grant 7,420,728 - Tung , et al. September 2, 2 | 2008-09-02 |
Modulating The Intensity Of Light From An Interferometric Reflector App 20080186581 - Bita; Ion ;   et al. | 2008-08-07 |
Method And Post Structures For Interferometric Modulation App 20080180777 - Tung; Ming-Hau ;   et al. | 2008-07-31 |
Patterning of mechanical layer in MEMS to reduce stresses at supports Grant 7,405,863 - Tung , et al. July 29, 2 | 2008-07-29 |
Spatial Light Modulator With Integrated Optical Compensation Structure App 20080151347 - Chui; Clarence ;   et al. | 2008-06-26 |
MEMS switches with deforming membranes App 20080142347 - Lewis; Alan ;   et al. | 2008-06-19 |
Support structure for free-standing MEMS device and methods for forming the same Grant 7,385,744 - Kogut , et al. June 10, 2 | 2008-06-10 |
Spatial Light Modulator With Integrated Optical Compensation Structure App 20080112039 - Chui; Clarence ;   et al. | 2008-05-15 |
System and method of illuminating interferometric modulators using backlighting Grant 7,355,780 - Chui , et al. April 8, 2 | 2008-04-08 |
Method and post structures for interferometric modulation Grant 7,349,141 - Tung , et al. March 25, 2 | 2008-03-25 |
System and method of illuminating interferometric modulators using backlighting Grant 7,349,139 - Chui , et al. March 25, 2 | 2008-03-25 |
Spatial light modulator with integrated optical compensation structure Grant 7,342,705 - Chui , et al. March 11, 2 | 2008-03-11 |
Support structure for free-standing MEMS device and methods for forming the same App 20080055707 - Kogut; Lior ;   et al. | 2008-03-06 |
Selective etching of MEMS using gaseous halides and reactive co-etchants App 20080032439 - Yan; Xiaoming ;   et al. | 2008-02-07 |
Microelectromechanical Device With Optical Function Separated From Mechanical And Electrical Function App 20080013144 - Chui; Clarence ;   et al. | 2008-01-17 |
Microelectromechanical Device With Optical Function Separated From Mechanical And Electrical Function App 20080013145 - Chui; Clarence ;   et al. | 2008-01-17 |
Method of manufacturing MEMS devices providing air gap control App 20080003737 - Tung; Ming-Hau ;   et al. | 2008-01-03 |
Support structure for free-standing MEMS device and methods for forming the same App 20080003710 - Kogut; Lior ;   et al. | 2008-01-03 |
Patterning of mechanical layer in MEMS to reduce stresses at supports App 20070279753 - Tung; Ming-Hau ;   et al. | 2007-12-06 |
Non-planar surface structures and process for microelectromechanical systems App 20070249078 - Tung; Ming-Hau ;   et al. | 2007-10-25 |
Non-planar surface structures and process for microelectromechanical systems App 20070249079 - Sasagawa; Teruo ;   et al. | 2007-10-25 |
Methods for producing MEMS with protective coatings using multi-component sacrificial layers App 20070206267 - Tung; Ming-Hau ;   et al. | 2007-09-06 |
Method and apparatus for providing back-lighting in an interferometric modulator display device App 20070196040 - Wang; Chun-Ming ;   et al. | 2007-08-23 |
White interferometric modulators and methods for forming the same App 20070121118 - Gally; Brian J. ;   et al. | 2007-05-31 |
MEMS device and interconnects for same App 20070103028 - Lewis; Alan G. ;   et al. | 2007-05-10 |
Diffusion barrier layer for MEMS devices App 20070096300 - Wang; Hsin-Fu ;   et al. | 2007-05-03 |
MEMS devices having support structures and methods of fabricating the same App 20070047900 - Sampsell; Jeffrey B. ;   et al. | 2007-03-01 |
MEMS devices having overlying support structures and methods of fabricating the same App 20070019280 - Sasagawa; Teruo ;   et al. | 2007-01-25 |
System and method of illuminating interferometric modulators using backlighting App 20060209384 - Chui; Clarence ;   et al. | 2006-09-21 |
Methods of fabricating interferometric modulators by selectively removing a material App 20060076311 - Tung; Ming-Hau ;   et al. | 2006-04-13 |
Method and post structures for interferometric modulation App 20060077509 - Tung; Ming-Hau ;   et al. | 2006-04-13 |
Methods of fabricating interferometric modulators by selectively removing a material App 20060077502 - Tung; Ming-Hau ;   et al. | 2006-04-13 |
System and method of illuminating interferometric modulators using backlighting App 20060077510 - Chui; Clarence ;   et al. | 2006-04-13 |
Apparatus and method for reducing slippage between structures in an interferometric modulator App 20060067649 - Tung; Ming-Hau ;   et al. | 2006-03-30 |
Method of selective etching using etch stop layer App 20060066932 - Chui; Clarence ;   et al. | 2006-03-30 |
Method of fabricating interferometric devices using lift-off processing techniques App 20060067644 - Chui; Clarence ;   et al. | 2006-03-30 |
System and method for micro-electromechanical operation of an interferometric modulator App 20060024880 - Chui; Clarence ;   et al. | 2006-02-02 |
Method of manufacture for microelectromechanical devices App 20050249966 - Tung, Ming-Hau ;   et al. | 2005-11-10 |
Controlling electromechanical behavior of structures within a microelectromechanical systems device App 20050250235 - Miles, Mark W. ;   et al. | 2005-11-10 |
Spatial light modulator with integrated optical compensation structure App 20050179977 - Chui, Clarence ;   et al. | 2005-08-18 |