U.S. patent application number 14/463801 was filed with the patent office on 2016-02-25 for precut metal lines.
The applicant listed for this patent is GLOBALFOUNDRIES Inc.. Invention is credited to Guillaume Bouche, Andy Chih-Hung Wei, Mark A. Zaleski.
Application Number | 20160056075 14/463801 |
Document ID | / |
Family ID | 55275498 |
Filed Date | 2016-02-25 |
United States Patent
Application |
20160056075 |
Kind Code |
A1 |
Wei; Andy Chih-Hung ; et
al. |
February 25, 2016 |
PRECUT METAL LINES
Abstract
Embodiments of the present invention provide a method for cuts
of sacrificial metal lines in a back end of line structure.
Sacrificial Mx+1 lines are formed above metal Mx lines. A line cut
lithography stack is deposited and patterned over the sacrificial
Mx+1 lines and a cut cavity is formed. The cut cavity is filled
with dielectric material. A selective etch process removes the
sacrificial Mx+1 lines, preserving the dielectric that fills in the
cut cavity. Precut metal lines are then formed by depositing metal
where the sacrificial Mx+1 lines were removed. Thus embodiments of
the present invention provide precut metal lines, and do not
require metal cutting. By avoiding the need for metal cutting, the
risks associated with metal cutting are avoided.
Inventors: |
Wei; Andy Chih-Hung;
(Queensbury, NY) ; Bouche; Guillaume; (Albany,
NY) ; Zaleski; Mark A.; (Galway, NY) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
GLOBALFOUNDRIES Inc. |
Grand Cayman |
|
KY |
|
|
Family ID: |
55275498 |
Appl. No.: |
14/463801 |
Filed: |
August 20, 2014 |
Current U.S.
Class: |
438/618 |
Current CPC
Class: |
H01L 21/76808 20130101;
H01L 2924/0002 20130101; H01L 21/32139 20130101; H01L 2924/0002
20130101; H01L 23/522 20130101; H01L 23/53238 20130101; H01L
21/7682 20130101; H01L 23/528 20130101; H01L 2924/00 20130101; H01L
23/5222 20130101; H01L 23/5226 20130101; H01L 21/76816 20130101;
H01L 21/76877 20130101; H01L 23/53295 20130101; H01L 21/76897
20130101 |
International
Class: |
H01L 21/768 20060101
H01L021/768; H01L 23/532 20060101 H01L023/532; H01L 21/285 20060101
H01L021/285; H01L 21/3105 20060101 H01L021/3105; H01L 21/311
20060101 H01L021/311 |
Claims
1. A method of forming a semiconductor structure, the method
comprising: forming a plurality of sacrificial Mx+1 lines over a
plurality of metal Mx lines; depositing a dielectric layer over the
plurality of sacrificial Mx+1 lines; forming a cut cavity in one
sacrificial Mx+1 line of the plurality of sacrificial Mx+1 lines;
forming a dielectric region in the cut cavity; removing the
plurality of sacrificial Mx+1 lines to form a plurality of Mx+1
line cavities; and filling the plurality of Mx+1 line cavities with
a metal to form a plurality of metal Mx+1 lines.
2. The method of claim 1, wherein forming a plurality of
sacrificial Mx+1 lines comprises: depositing a sacrificial layer
over the plurality of metal Mx lines; depositing a lithography
stack on the sacrificial layer; patterning the lithography stack to
form a patterned lithography stack; removing a portion of the
sacrificial layer that is not covered by the patterned lithography
stack; and removing the lithography stack.
3. The method of claim 1, wherein depositing a dielectric layer
comprises depositing SiOC.
4. The method of claim 3, further comprising planarizing the
dielectric layer.
5. The method of claim 4, wherein planarizing the dielectric layer
comprises performing a chemical mechanical polish process.
6. The method of claim 1, wherein filling the plurality of Mx+1
line cavities with metal comprises filling the plurality of Mx+1
line cavities with copper.
7. A method of forming a semiconductor structure, the method
comprising: forming a plurality of sacrificial Mx+1 lines over a
plurality of metal Mx lines; depositing a dielectric layer over the
plurality of sacrificial Mx+1 lines; depositing an organic
planarization layer on the dielectric layer; depositing a resist
layer on the organic planarization layer; forming a cavity in the
resist layer and organic planarization layer; removing the resist
layer; depositing a conformal spacer layer on the organic
planarization layer; performing an anisotropic etch on the
conformal spacer layer to form an aperture spacer; forming a cut
cavity in one sacrificial Mx+1 line of the plurality of sacrificial
Mx+1 lines; forming a dielectric region in the cut cavity; removing
the plurality of sacrificial Mx+1 lines to form a plurality of Mx+1
line cavities; and filling the plurality of Mx+1 line cavities with
a metal to form a plurality of metal Mx+1 lines.
8. The method of claim 7, wherein depositing a conformal spacer
layer comprises depositing carbon.
9. The method of claim 8, wherein depositing carbon is performed
with an atomic layer deposition process.
10. The method of claim 7, wherein forming a plurality of
sacrificial Mx+1 lines comprises: depositing a sacrificial layer
over the plurality of metal Mx lines; depositing a lithography
stack on the sacrificial layer; patterning the lithography stack to
form a patterned lithography stack; removing a portion of the
sacrificial layer that is not covered by the patterned lithography
stack; and removing the lithography stack.
11. The method of claim 7, wherein depositing a dielectric layer
comprises depositing SiOC.
12. The method of claim 11, further comprising planarizing the
dielectric layer.
13. The method of claim 12, wherein planarizing the dielectric
layer comprises performing a chemical mechanical polish
process.
14. The method of claim 7, wherein filling the plurality of Mx+1
line cavities with metal comprises filling the plurality of Mx+1
line cavities with copper.
15. A method of forming a semiconductor structure, the method
comprising: forming a plurality of sacrificial Mx+1 lines over a
plurality of metal Mx lines; depositing a dielectric layer over the
plurality of sacrificial Mx+1 lines; forming a cut cavity in one
sacrificial Mx+1 line of the plurality of sacrificial Mx+1 lines;
forming a dielectric region in the cut cavity; removing the
plurality of sacrificial Mx+1 lines to form a plurality of Mx+1
line cavities; depositing a via cut lithography stack; patterning
an opening in the via cut lithography stack; forming a via cavity
that exposes one Mx metal line of the plurality of metal Mx lines;
removing the via cut lithography stack; and filling the plurality
of Mx+1 line cavities and via cavity with a metal to form a
plurality of metal Mx+1 lines and a via.
16. The method of claim 15, wherein forming a plurality of
sacrificial Mx+1 lines comprises: depositing a sacrificial layer
over the plurality of metal Mx lines; depositing a line cut
lithography stack on the sacrificial layer; patterning the line cut
lithography stack to form a patterned line cut lithography stack;
removing a portion of the sacrificial layer that is not covered by
the patterned line cut lithography stack; and removing the
patterned line cut lithography stack.
17. The method of claim 15, wherein depositing a dielectric layer
comprises depositing SiOC.
18. The method of claim 17, further comprising planarizing the
dielectric layer.
19. The method of claim 18, wherein planarizing the dielectric
layer comprises performing a chemical mechanical polish
process.
20. The method of claim 19, wherein filling the plurality of Mx+1
line cavities with metal comprises filling the plurality of Mx+1
line cavities with copper.
Description
FIELD OF THE INVENTION
[0001] The present invention relates generally to semiconductor
fabrication, and more particularly, to precut metal lines.
BACKGROUND
[0002] As the fabrication techniques for semiconductor devices has
progressed, manufacturers have been placing an increasingly larger
number of devices on a chip by increasing the integration density
of semiconductor devices. Accordingly, a critical dimension (CD) in
a design rule is gradually reduced in order to increase the circuit
density.
[0003] In order to increase the circuit density, it is necessary to
reduce the sizes of elements inside the semiconductor devices and
reduce the lengths and widths of interconnections which couple the
elements together. Moreover, the resistances of interconnections
must be small so that electric signals can be transferred with
minimal loss within the semiconductor devices through
interconnections having narrow widths.
[0004] In a typical integrated circuit, there may be many
metallization layers and interconnecting via layers formed in a
back end of line (BEOL) interconnect structure. The BEOL
interconnect structure connects various devices (e.g. transistors,
capacitors, etc.) to form functional circuits. During fabrication,
it is necessary to form cuts and connections of metal lines to
create the desired connectivity to implement a given design. As
critical dimensions continue to shrink, this can be challenging. It
is therefore desirable to have improvements to address the
aforementioned challenges.
SUMMARY
[0005] Embodiments of the present invention provide a method for
cuts of sacrificial metal lines in a back end of line structure.
Sacrificial Mx+1 lines are formed above metal Mx lines. A line cut
lithography stack is deposited and patterned over the sacrificial
Mx+1 lines and a cut cavity is formed. The cut cavity is filled
with dielectric material. A selective etch process removes the
sacrificial Mx+1 lines, preserving the dielectric that fills in the
cut cavity. Precut metal lines are then formed by depositing metal
where the sacrificial Mx+1 lines were removed. Thus, embodiments of
the present invention provide precut metal lines, and do not
require metal cutting. By avoiding the need for metal cutting, the
risks associated with metal cutting are avoided.
[0006] In a first aspect, embodiments of the present invention
provide a method of forming a semiconductor structure, comprising:
forming a plurality of sacrificial Mx+1 lines over a plurality of
metal Mx lines; depositing a dielectric layer over the plurality of
sacrificial Mx+1 lines; forming a cut cavity in one sacrificial
Mx+1 line of the plurality of sacrificial Mx+1 lines; forming a
dielectric region in the cut cavity; removing the plurality of
sacrificial Mx+1 lines to form a plurality of Mx+1 line cavities;
and filling the plurality of Mx+1 line cavities with a metal to
form a plurality of metal Mx+1 lines.
[0007] In a second aspect, embodiments of the present invention
provide a method of forming a semiconductor structure, comprising:
forming a plurality of sacrificial Mx+1 lines over a plurality of
metal Mx lines; depositing a dielectric layer over the plurality of
sacrificial Mx+1 lines; depositing an organic planarization layer
on the dielectric layer; depositing a resist layer on the organic
planarization layer; forming a cavity in the resist layer and
organic planarization layer; removing the resist layer; depositing
a conformal spacer layer on the organic planarization layer;
performing an anisotropic etch on the conformal spacer layer to
form an aperture spacer; forming a cut cavity in one sacrificial
Mx+1 line of the plurality of sacrificial Mx+1 lines; forming a
dielectric region in the cut cavity; removing the plurality of
sacrificial Mx+1 lines to form a plurality of Mx+1 line cavities;
and filling the plurality of Mx+1 line cavities with a metal to
form a plurality of metal Mx+1 lines.
[0008] In a third aspect, embodiments of the present invention
provide a method of forming a semiconductor structure, comprising:
forming a plurality of sacrificial Mx+1 lines over a plurality of
metal Mx lines; depositing a dielectric layer over the plurality of
sacrificial Mx+1 lines; forming a cut cavity in one sacrificial
Mx+1 line of the plurality of sacrificial Mx+1 lines; forming a
dielectric region in the cut cavity; removing the plurality of
sacrificial Mx+1 lines to form a plurality of Mx+1 line cavities;
depositing a via cut lithography stack; patterning an opening in
the via cut lithography stack; forming a via cavity that exposes
one Mx metal line of the plurality of metal Mx lines; removing the
via cut lithography stack; and filling the plurality of Mx+1 line
cavities and via cavity with a metal to form a plurality of metal
Mx+1 lines and a via.
BRIEF DESCRIPTION OF THE DRAWINGS
[0009] The accompanying drawings, which are incorporated in and
constitute a part of this specification, illustrate several
embodiments of the present teachings and, together with the
description, serve to explain the principles of the present
teachings.
[0010] Certain elements in some of the figures may be omitted, or
illustrated not-to-scale, for illustrative clarity. The
cross-sectional views may be in the form of "slices", or
"near-sighted" cross-sectional views, omitting certain background
lines which would otherwise be visible in a "true" cross-sectional
view, for illustrative clarity.
[0011] Often, similar elements may be referred to by similar
numbers in various figures (FIGs) of the drawing, in which case,
typically the last two significant digits may be the same, the most
significant digit being the number of the drawing figure (FIG).
Furthermore, for clarity, some reference numbers may be omitted in
certain drawings.
[0012] FIG. 1 is a semiconductor structure at a starting point for
embodiments of the present invention.
[0013] FIG. 2 is a semiconductor structure after a subsequent
process step of depositing a sacrificial layer.
[0014] FIG. 3 is a semiconductor structure after subsequent process
steps of depositing a resist layer and patterning the resist
layer.
[0015] FIG. 4 is a semiconductor structure after subsequent process
steps of patterning the sacrificial layer and removing the resist
layer.
[0016] FIG. 5 is a side view of a semiconductor structure after a
subsequent process step of depositing a dielectric layer over the
sacrificial Mx+1 lines.
[0017] FIG. 6 is a side view of a semiconductor structure after a
subsequent process step of planarizing the dielectric layer.
[0018] FIG. 7 is a semiconductor structure after subsequent process
steps of depositing and patterning a line cut lithography
stack.
[0019] FIG. 8 is a semiconductor structure after a subsequent
process step of forming a cut cavity in a sacrificial Mx+1
line.
[0020] FIG. 9 is a semiconductor structure after a subsequent
process step of removing the line cut lithography stack.
[0021] FIG. 10 is a semiconductor structure in accordance with an
alternative embodiment of the present invention after a subsequent
process step of removing the resist layer.
[0022] FIG. 11 is a semiconductor structure in accordance with an
alternative embodiment of the present invention after a subsequent
process step of depositing a conformal spacer layer.
[0023] FIG. 12 is a semiconductor structure in accordance with an
alternative embodiment of the present invention after a subsequent
process step of performing an anisotropic etch to form an aperture
spacer.
[0024] FIG. 13 is a semiconductor structure in accordance with an
alternative embodiment of the present invention after a subsequent
process step of forming a cut cavity in a sacrificial Mx+1
line.
[0025] FIG. 14 is a semiconductor structure after a subsequent
process step of forming a dielectric region in the cut cavity.
[0026] FIG. 15 is a semiconductor structure after a subsequent
process step of removing the sacrificial Mx+1 lines.
[0027] FIG. 16 is a semiconductor structure after subsequent
process steps of depositing and patterning a via cut lithography
stack.
[0028] FIG. 17 is a semiconductor structure after a subsequent
process step of forming a via cavity that exposes an Mx metal
line.
[0029] FIG. 18 is a semiconductor structure after a subsequent
process step of removing the via cut lithography stack.
[0030] FIG. 19 is a semiconductor structure after a subsequent
process step of forming metal Mx+1 lines.
[0031] FIG. 20 is the semiconductor structure of FIG. 19 as viewed
along line B-B'.
[0032] FIG. 21 is a flowchart indicating process steps for
embodiments of the present invention.
DETAILED DESCRIPTION
[0033] Exemplary embodiments will now be described more fully
herein with reference to the accompanying drawings, in which
exemplary embodiments are shown. It will be appreciated that this
disclosure may be embodied in many different forms and should not
be construed as limited to the exemplary embodiments set forth
herein. Rather, these exemplary embodiments are provided so that
this disclosure will be thorough and complete and will fully convey
the scope of this disclosure to those skilled in the art.
[0034] The terminology used herein is for the purpose of describing
particular embodiments only and is not intended to be limiting of
this disclosure. For example, as used herein, the singular forms
"a", "an", and "the" are intended to include the plural forms as
well, unless the context clearly indicates otherwise. Furthermore,
the use of the terms "a", "an", etc., do not denote a limitation of
quantity, but rather denote the presence of at least one of the
referenced items. It will be further understood that the terms
"comprises" and/or "comprising", or "includes" and/or "including",
when used in this specification, specify the presence of stated
features, regions, integers, steps, operations, elements, and/or
components, but do not preclude the presence or addition of one or
more other features, regions, integers, steps, operations,
elements, components, and/or groups thereof.
[0035] Reference throughout this specification to "one embodiment,"
"an embodiment," "embodiments," "exemplary embodiments," or similar
language means that a particular feature, structure, or
characteristic described in connection with the embodiment is
included in at least one embodiment of the present invention. Thus,
appearances of the phrases "in one embodiment," "in an embodiment,"
"in embodiments" and similar language throughout this specification
may, but do not necessarily, all refer to the same embodiment.
[0036] The terms "overlying" or "atop", "positioned on" or
"positioned atop", "underlying", "beneath" or "below" mean that a
first element, such as a first structure, e.g., a first layer, is
present on a second element, such as a second structure, e.g. a
second layer, wherein intervening elements, such as an interface
structure, e.g. interface layer, may be present between the first
element and the second element.
[0037] FIG. 1 is a semiconductor structure 100 at a starting point
for embodiments of the present invention. Semiconductor structure
100 shows a back-end-of-line (BEOL) wiring structure having a
plurality of metal lines 106, which are formed in a dielectric
layer 102. In embodiments, dielectric layer 102 may be comprised of
SiOC (silicon oxycarbide). In embodiments, the metal lines 106 are
comprised of copper. In embodiments, each metal line 106 is
surrounded on the sides and bottom by a barrier layer 104. This
serves to prevent diffusion of the metal. In embodiments, the
barrier layer 104 is comprised of tantalum and/or tantalum nitride.
A capping layer 105 may be deposited on the tops of the metal lines
106. In embodiments, the capping layer 105 may be comprised of SiN
(silicon nitride). The metal lines 106 are referred to as Mx lines,
where "x" denotes a particular metallization level. Below metal
lines 106 are metal lines 103. Thus, metal lines 103 are referred
to as Mx-1 metal lines. The metal lines may be formed using
industry-standard techniques, including, but not limited to,
barrier deposition, metal seed layer deposition, and a metal
plating process, followed by a planarization process. In
embodiments, an etch stop layer 110 is deposited over the
dielectric layer 102, covering the metal lines 106. In embodiments,
the etch stop layer 110 is comprised of aluminum oxide (Al2O3).
[0038] FIG. 2 is semiconductor structure 100 after a subsequent
process step of depositing a sacrificial layer 112 over the
semiconductor structure. The sacrificial layer 112 is deposited on
the etch stop layer 110. In embodiments, the sacrificial layer 112
may be comprised of SiN, and may be deposited by plasma enhanced
chemical vapor deposition (PECVD). Amorphous silicon can also be
used as a sacrificial material.
[0039] FIG. 3 is semiconductor structure 100 after subsequent
process steps of depositing and patterning a resist layer
(lithography stack) 114, thus forming a patterned lithography
stack. The patterning may be accomplished using industry-standard
lithographic methods, including, but not limited to, self-aligned
double patterning (SADP), or self-aligned quad patterning
(SAQP).
[0040] FIG. 4 is semiconductor structure 100 after subsequent
process steps of patterning the sacrificial layer and removing the
resist layer. This forms sacrificial "dummy" Mx+1 lines 116 on the
semiconductor structure. This may be achieved by anisotropically
etching the sacrificial layer 112 of FIG. 3, stopping on etch stop
layer 110, as to remove the portion of the sacrificial layer that
is not covered by the patterned resist layer in order to form
sacrificial "dummy" lines 116, and then removing the resist layer
114. In some embodiments, etch stop layer 110 may also be removed.
Note that both Mx and Mx+1 are illustrated as a regular set of
unidirectional parallel lines at each level, with Mx+1
perpendicular to Mx.
[0041] FIG. 5 is a side view of semiconductor structure 100 after a
subsequent process step of depositing a dielectric layer 118 over
the sacrificial Mx+1 lines as viewed along line A-A' of FIG. 4. In
embodiments, the dielectric layer 118 may be comprised of silicon
oxycarbide (SiOC). The dielectric layer may be deposited using a
plasma-enhanced chemical vapor deposition (PECVD) process. In
embodiments, due to the conformal nature of the dielectric layer
118, air gaps 120 may be formed in between each sacrificial line
116. The air gaps have a dielectric constant of approximately 1,
and thus can serve to improve circuit performance in regards to
high speed signals that propagate through BEOL layers.
[0042] FIG. 6 is a side view of semiconductor structure 100 after a
subsequent process step of planarizing the dielectric layer 118
such that it is substantially flush with the sacrificial lines 116.
In embodiments, the planarization is performed with a chemical
mechanical polish (CMP) process. The air gaps 120 may be preserved
during this process (as shown), or in some embodiments, may be
partially opened (not shown).
[0043] FIG. 7 is semiconductor structure 100 after subsequent
process steps of depositing and patterning a line cut lithography
stack 122. The line cut lithography stack 122 may include an
organic planarization layer (OPL) followed by a layer of
photoresist (referred to as "resist"). In embodiments, the OPL can
include a photo-sensitive organic polymer comprising a
light-sensitive material that, when exposed to electromagnetic (EM)
radiation, is chemically altered and thus configured to be removed
using a developing solvent. For example, the photo-sensitive
organic polymer may be polyacrylate resin, epoxy resin, phenol
resin, polyamide resin, polyimide resin, unsaturated polyester
resin, polyphenylenether resin, polyphenylenesulfide resin, or
benzocyclobutene (BCB).
[0044] A plurality of voids 124 are patterned in the lithography
stack 122. The voids 124 each expose a region of a sacrificial line
116, as well as some of the dielectric region 118. The dielectric
layer 118 and the sacrificial lines 116 are comprised of different
materials, allowing selective etch techniques to remove the
portions of the sacrificial lines 116 that are exposed through the
voids 124, without removing the exposed dielectric regions 118.
Thus, the tolerances of the position and sizing of each void 124 is
relaxed, enabling easier manufacturing and improved product
yield.
[0045] FIG. 8 is semiconductor structure 100 after a subsequent
process step of forming a cut cavity 126 in a sacrificial Mx+1
line. As stated previously, the dielectric layer 118 and the
sacrificial lines 116 are comprised of different materials,
allowing selective etch techniques to remove the portions of the
sacrificial lines 116. Thus, exposed regions of sacrificial lines
116 are removed, exposing the etch stop layer 110 below, and
forming a cut cavity 126.
[0046] FIG. 9 is semiconductor structure 100 after a subsequent
process step of removing the line cut lithography stack (122 in
FIG. 7). The lithography stack may be removed using
industry-standard techniques, thus revealing the pattern of
sacrificial lines 116 with cut cavities 126 at locations where the
replacement (metal) lines are to be separated.
[0047] FIG. 10 is a semiconductor structure in accordance with an
alternative embodiment of the present invention after a subsequent
process step of removing the resist layer of line cut lithography
stack 122 (see FIG. 7), exposing an underlying organic
planarization layer (OPL). Thus FIG. 10 follows from FIG. 7, but
provides additional process steps to further control the size of
the cut cavities, as will be shown in the following figures. Voids
124 are formed in the OPL 128 to expose regions sacrificial lines
116.
[0048] FIG. 11 is a semiconductor structure in accordance with an
alternative embodiment of the present invention after a subsequent
process step of depositing a conformal spacer layer 130. In
embodiments, the conformal spacer layer 130 is comprised of carbon,
and may be deposited via an atomic layer deposition process. In
embodiments, the conformal spacer layer has a thickness ranging
from about 2 nanometers to about 5 nanometers. A recessed portion
132 is formed over the voids 124 in the OPL.
[0049] FIG. 12 is a semiconductor structure in accordance with an
alternative embodiment of the present invention after a subsequent
process step of performing an anisotropic etch to form an aperture
spacer 134. In embodiments, the anisotropic etch may include a
reactive ion etch (RIE) process. The anisotropic etch removes most
of the conformal spacer layer, except for the remaining portion,
which is aperture spacer 134. The aperture spacers 134 have a
segment thickness D1. In embodiments, D1 ranges from about 2
nanometer to about 8 nanometers. The aperture spacers further
restrict the opening prior to removing a portion of the sacrificial
lines 116 to have a length D2, thus enabling smaller cut cavities.
In embodiments, D2 may range from about 5 nanometers to about 30
nanometers.
[0050] FIG. 13 is a semiconductor structure in accordance with an
alternative embodiment of the present invention after a subsequent
process step of forming a cut cavity in a sacrificial Mx+1 line. As
stated previously, the dielectric layer 118 and the sacrificial
lines 116 are comprised of different materials, allowing selective
etch techniques to remove the portions of the sacrificial lines
116. The carbon spacer may then be selectively etched away.
[0051] FIG. 14 is a semiconductor structure after a subsequent
process step of forming a dielectric region 118A in the cut cavity.
From FIG. 14 forward, the process is similar for both the
embodiment shown in FIGS. 1-9, and for the alternative embodiment
with additional steps shown in FIGS. 10-13. As shown in FIG. 14,
additional dielectric material 118A is deposited in each cut
cavity. A planarization process may follow, such that the
dielectric regions 118A are substantially planar with sacrificial
lines 116 and dielectric regions 118. This can be accomplished by a
chemical mechanical polish (CMP) process and/or an anisotropic RIE
etch back. Dielectric regions 118A and dielectric regions 118 are
preferably comprised of the same material. Hence, in embodiments,
dielectric regions 118A may also be comprised of SiOC.
[0052] FIG. 15 is a semiconductor structure after a subsequent
process step of removing the sacrificial Mx+1 lines. This may be
accomplished using a selective etch process, such that dielectric
regions 118 and 118A remain intact.
[0053] FIG. 16 is a semiconductor structure after subsequent
process steps of depositing and patterning a via cut lithography
stack 136. The via cut lithography stack 136 may contain an OPL
layer, antireflective layer, and a resist layer. Using patterning,
voids 138 are formed in the via cut lithography stack 136. The
voids are formed over an area where the sacrificial lines 116 have
been removed, thus revealing a portion of capping layer 105 of a
perpendicularly oriented Mx line disposed in the metallization
layer below. Depending on a given design, it is desirable to, at
certain locations, form vias that interconnect to neighboring
metallization levels. Thus, voids are formed where it is desirable
to form a via between an Mx line and an Mx+1 line.
[0054] FIG. 17 is a semiconductor structure after a subsequent
process step of forming a via cavity that exposes an Mx metal line.
The region of capping layer (see 105 of FIG. 16) is removed using a
selective etch process. For example, if the dielectric layer 118 is
SiOC, and the capping layer 105 is SiN, then a variety of selective
etch techniques can be used to selectively remove the capping layer
105. Embodiments of the present invention may use other materials
for the dielectric and capping layer, so long as selective etching
of the materials to each other is possible.
[0055] FIG. 18 is a semiconductor structure after a subsequent
process step of removing the via cut lithography stack (136 of FIG.
17). This exposes capping regions 105 where no via is to be formed,
while Mx line 106 is exposed in an area where a via is to be
formed.
[0056] FIG. 19 is a semiconductor structure after a subsequent
process step of forming metal Mx+1 lines. In embodiments, this may
include an electroplating process. The process may include
depositing one or more barrier layers and/or seed layers (not
shown). Then, a fill metal (such as copper) is deposited in the
location where the sacrificial Mx+1 lines previously occupied,
forming metallization lines 142. The dielectric region 118A
separates metallization line 142A from metallization line 142A'.
Thus, metallization lines 142A and 142A' are precut, as they are
formed with the cuts already in place, and so metal cutting is
avoided. Metallization line 142B has a via that connects to the Mx
level, as will be further described in the next figure.
[0057] FIG. 20 is the semiconductor structure of FIG. 19 as viewed
along line B-B'. As can be seen, Mx+1 metal line 142B connects to
Mx metal line 106. When Mx+1 metal line 142B was formed, the Mx
line 106 was exposed, since its capping layer was removed (see 106
in FIG. 18). Hence, the process in accordance with embodiments of
the present invention simplifies fabrication by avoiding metal
cuts, and also integrates via connectivity into the metallization
process.
[0058] FIG. 21 is a flowchart 200 indicating process steps for
embodiments of the present invention. In process step 250,
sacrificial lines are formed. In embodiments, the sacrificial lines
are comprised of silicon nitride. In process step 252, a dielectric
layer is deposited. In embodiments, the dielectric layer is
comprised of SiOC. In process step 254, a line cut lithography
stack is deposited (see 122 of FIG. 7). In process step 256, the
sacrificial lines are cut (see FIG. 9). In process step 258,
additional dielectric is deposited in the cut cavities (see 118A of
FIG. 14). In process step 260, the sacrificial lines are removed
(see FIG. 15). In embodiments, the etch stop layer (110 in FIG. 1)
is also removed. In process step 262, a via cavity lithography
stack is deposited (see 136 of FIG. 16). In process step 264,
selected M(x) lines are opened in locations where a via between the
M(x) and M(x+1) levels is to be formed (see 140 of FIG. 17). In
process step 266, M(x+1) metal lines are formed (see 142 of FIG.
19). The processes disclosed herein may then be repeated to make
multiple metallization levels. In some embodiments, there may be 10
or more levels. Once the BEOL stack is complete, industry-standard
techniques for additional processes such as packaging and test may
be used to complete fabrication of the integrated circuit.
[0059] While the invention has been particularly shown and
described in conjunction with exemplary embodiments, it will be
appreciated that variations and modifications will occur to those
skilled in the art. For example, although the illustrative
embodiments are described herein as a series of acts or events, it
will be appreciated that the present invention is not limited by
the illustrated ordering of such acts or events unless specifically
stated. Some acts may occur in different orders and/or concurrently
with other acts or events apart from those illustrated and/or
described herein, in accordance with the invention. In addition,
not all illustrated steps may be required to implement a
methodology in accordance with the present invention. Furthermore,
the methods according to the present invention may be implemented
in association with the formation and/or processing of structures
illustrated and described herein as well as in association with
other structures not illustrated. Therefore, it is to be understood
that the appended claims are intended to cover all such
modifications and changes that fall within the true spirit of the
invention.
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