U.S. patent application number 14/875335 was filed with the patent office on 2016-01-28 for semiconductor device and manufacturing method for the same.
The applicant listed for this patent is RENESAS ELECTRONICS CORPORATION. Invention is credited to Yoshinori Deguchi, Kazuki Fukuoka, Ryo Mori, Naozumi Morino.
Application Number | 20160027731 14/875335 |
Document ID | / |
Family ID | 49233816 |
Filed Date | 2016-01-28 |
United States Patent
Application |
20160027731 |
Kind Code |
A1 |
Mori; Ryo ; et al. |
January 28, 2016 |
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR THE SAME
Abstract
A semiconductor device includes a substrate including a circuit
region where a circuit element is formed, a multilayer wiring layer
that is formed on the substrate and composed of a plurality of
wiring layers and a plurality of via layers that are laminated, and
an electrode pad that is formed on the multilayer wiring layer. An
interlayer insulating film is formed in a region of a first wiring
layer that is a top layer of the plurality of wiring layers, in the
region the electrode pad and the first circuit region overlapping
each other in a planar view of the electrode pad.
Inventors: |
Mori; Ryo; (Tokyo, JP)
; Fukuoka; Kazuki; (Tokyo, JP) ; Morino;
Naozumi; (Tokyo, JP) ; Deguchi; Yoshinori;
(Tokyo, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
RENESAS ELECTRONICS CORPORATION |
Tokyo |
|
JP |
|
|
Family ID: |
49233816 |
Appl. No.: |
14/875335 |
Filed: |
October 5, 2015 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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14536620 |
Nov 8, 2014 |
9171767 |
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14875335 |
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13767940 |
Feb 15, 2013 |
8896129 |
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14536620 |
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Current U.S.
Class: |
257/774 |
Current CPC
Class: |
H01L 2924/13091
20130101; H01L 23/5226 20130101; H01L 2924/13091 20130101; H01L
2924/1306 20130101; H01L 2224/05624 20130101; H01L 2224/05553
20130101; H01L 23/562 20130101; H01L 2924/1306 20130101; H01L
21/02697 20130101; H01L 2924/00 20130101; H01L 2224/02166 20130101;
H01L 23/528 20130101; H01L 2924/00 20130101; H01L 23/5286 20130101;
H01L 21/768 20130101; H01L 24/05 20130101; H01L 24/06 20130101;
H01L 22/32 20130101; H01L 23/5384 20130101; H01L 23/5283
20130101 |
International
Class: |
H01L 23/522 20060101
H01L023/522; H01L 23/528 20060101 H01L023/528 |
Foreign Application Data
Date |
Code |
Application Number |
Mar 27, 2012 |
JP |
2012-070840 |
Claims
1-17. (canceled)
18. A semiconductor device comprising: a substrate including a
first circuit region, and a first circuit element formed in the
first circuit region; a second circuit region, and a second circuit
element formed in the second circuit region; a multilayer wiring
layer formed on the substrate and composed of a plurality of wiring
layers and a plurality of via layers that are laminated; and an
electrode pad formed on the multilayer wiring layer, wherein an
interlayer insulating film is formed in a region of a first wiring
layer that is a top layer of the plurality of wiring layers, in the
region the electrode pad and the first circuit region overlapping
each other in a planar view of the electrode pad, wherein the
electrode pad overlaps the first circuit region and the second
circuit region in the planar view of the electrode pad, and wherein
the first circuit region is formed in an internal circuit region,
and the second circuit region is formed in an I/O circuit
region.
19. The semiconductor device according to claim 18, wherein the
electrode pad overlaps the first circuit region and the second
circuit region in the planar view of the electrode pad.
20. The semiconductor device according to claim 18, wherein the
electrode pad includes a first pad region and a second pad region
in which a larger stress is imposed than a stress imposed on the
first pad region, and wherein an interlayer insulating film is
formed in a region of the first wiring layer, in the region in
which the second pad region and the first circuit region overlap
with each other in the planar view of the electrode pad.
21. The semiconductor device according to claim 19, wherein a first
conductor pattern is formed in at least a part of a region of the
first wiring layer, in a region other than the second pad region
and the first circuit region which overlap with each other in the
planar view of the electrode pad.
22. The semiconductor device according to claim 21, wherein a
second conductor pattern is formed across the first and second pad
regions in a second wiring layer, which is a wiring layer
immediately below the first wiring layer, and wherein the first and
second conductor patterns are connected through a via.
23. The semiconductor device according to claim 18, wherein the
first pad region is formed on a side of the first circuit region
and the second pad region is formed on a side of the second circuit
region in the planar view of the electrode pad.
24. The semiconductor device according to claim 18, wherein a
projection is formed to a part corresponding to the second pad
region in a periphery of the electrode pad.
25. The semiconductor device according to claim 18, wherein a
length of the first pad region in a direction vertical to a
longitudinal direction of the electrode pad is different from a
length of the second pad region in the direction vertical to the
longitudinal direction of the electrode pad.
26. The semiconductor device according to claim 25, wherein the I/O
circuit region is disposed along a circumference of the
semiconductor device to surround the internal circuit region.
27. The semiconductor device according to claim 25, wherein the
first circuit element formed in the internal circuit region
includes at least one of a memory circuit and a logic circuit, and
wherein the second circuit element formed in the I/O circuit region
includes at least one of an input buffer circuit, an output buffer
circuit, and a level shifter.
28. The semiconductor device according to claim 18, wherein an
analog circuit is formed in a region where the first pad region of
the substrate is formed in the planar view of the electrode
pad.
29. The semiconductor device according to claim 28, wherein the
analog circuit includes at least one of a PLL circuit and a
regulator circuit.
30. The semiconductor device according to claim 18, wherein the
first circuit element formed in the first circuit region is a power
switch circuit.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is based upon and claims the benefit of
priority from Japanese patent application No. 2012-070840, filed on
Mar. 27, 2012, the disclosure of which is incorporated herein in
its entirety by reference.
BACKGROUND
[0002] The present invention relates to a semiconductor device and
a manufacturing method for the same, and for example, to a
semiconductor device including an electrode pad and a manufacturing
method for the same.
[0003] A semiconductor device includes an electrode pad for
connecting to an external electrode terminal. This electrode pad is
also used to examine electrical properties of the semiconductor
device. Specifically, a probe of an inspection device is brought
into contact with the electrode pad, and the semiconductor device
is energized via the probe, so as to examine the electrical
properties of the semiconductor device. In this way, as the probe
of the inspection apparatus is brought into contact with the
electrode pad at the time of examining the electrical properties of
the semiconductor device, large stress is imposed on the electrode
pad, thereby possibly damaging the electrode pad and the
semiconductor device.
[0004] Japanese Unexamined Patent Application Publication No.
2002-76075 discloses a technique concerning a semiconductor device
that is capable of reducing the chip size by forming test electrode
pads utilizing the top wiring layer on a vacant I/O area. Japanese
Unexamined Patent Application Publication No. 2006-351588 discloses
a technique concerning a semiconductor device that is capable of
preventing damage to an electrode pad caused by bonding. Japanese
Unexamined Patent Application Publication No. 2009-170763 discloses
a technique concerning a semiconductor device that is capable of
preventing generation of cracks in an insulating film below an
electrode pad due to external force applied to the electrode pad of
the semiconductor device.
SUMMARY
[0005] As explained in Background, large stress is imposed on the
electrode pad at the time of examining the electrical properties of
the semiconductor device by the probe of the inspection device
being brought into contact with the electrode pad. The stress
arising from the contact of the probe could damage circuit elements
formed on the semiconductor device. For this reason, constraints
are required in the layout of the circuit elements such that the
circuit elements should not be disposed below the electrode
pad.
[0006] However, recent development in microfabrication techniques
contributes to reduction in the size of the circuit elements and
thus reduction in the chip size. Meanwhile, the number of the
electrode pads of the semiconductor device increases along with the
increase in the number of functions of the semiconductor device.
Consequently, the present inventor has found a problem that the
ratio of the area occupied by the electrode pads on the chip area
increases, and the constraints on the layout of the circuit
elements in light of the positions of the electrode pads inhibit
the reduction in the chip size.
[0007] Other problems and new features will be apparent from the
description in the present specification and the drawings attached
herewith.
[0008] An aspect of the present invention is a semiconductor device
that includes a substrate provided with a first circuit region, a
multilayer wiring layer composed of a plurality of wiring layers
and a plurality of via layers that are laminated, and an electrode
pad that is formed on the multilayer wiring layer. Further, an
interlayer insulating film is formed in a region of a first wiring
layer that is a top layer of the plurality of wiring layers, in the
region the electrode pad and the first circuit region overlapping
each other in a planar view of the electrode pad.
[0009] Another aspect of the present invention is a manufacturing
method for a semiconductor device that includes forming a first
circuit element in a first circuit region of a substrate, forming a
multilayer wiring layer on the substrate, and forming an electrode
pad on the multilayer wiring layer. Further, at the time of forming
the multilayer wiring layer, an interlayer insulating film is
formed in a region of a first wiring layer that is a top layer of
the plurality of wiring layers, in the region the electrode pad and
the first circuit region overlapping each other in a planar view of
the electrode pad.
[0010] According to the aspects of the present invention, it is
possible to provide a semiconductor device capable of realizing
reduction in the chip size and a manufacturing method for the
same.
BRIEF DESCRIPTION OF THE DRAWINGS
[0011] The above and other aspects, advantages and features will be
more apparent from the following description of certain embodiments
taken in conjunction with the accompanying drawings, in which:
[0012] FIG. 1 is a top view showing an example of a semiconductor
device according to a first embodiment;
[0013] FIG. 2 is a top view showing another example of the
semiconductor device according to the first embodiment;
[0014] FIG. 3 is an enlarged diagram showing periphery of electrode
pads of the semiconductor device shown in FIG. 1;
[0015] FIG. 4 is a cross-sectional diagram of the semiconductor
device according to the first embodiment taken along the line IV-IV
of the semiconductor device shown in FIG. 3;
[0016] FIG. 5 is a cross-sectional diagram for explaining a
comparative example;
[0017] FIG. 6 is a cross-sectional diagram of the semiconductor
device according to the first embodiment taken along the line VI-VI
of the semiconductor device shown in FIG. 1;
[0018] FIG. 7 is a cross-sectional diagram for explaining a
comparative example;
[0019] FIG. 8 is a top view showing an electrode pad included in a
semiconductor device according to a second embodiment;
[0020] FIG. 9 is a cross-sectional diagram of the semiconductor
device according to the second embodiment;
[0021] FIG. 10 is a top view of the semiconductor device according
to the second embodiment;
[0022] FIG. 11 is a top view of the semiconductor device according
to the second embodiment;
[0023] FIG. 12 is a cross-sectional diagram of the semiconductor
device according to the second embodiment;
[0024] FIG. 13 is a top view showing an example of electrode pads
included in the semiconductor device according to the second
embodiment;
[0025] FIG. 14 is a top view showing another example of the
electrode pads included in the semiconductor device according to
the second embodiment;
[0026] FIG. 15 is a cross-sectional diagram of a semiconductor
device according to a third embodiment;
[0027] FIG. 16 is a top view of the semiconductor device according
to the third embodiment;
[0028] FIG. 17 is a top view of the semiconductor device according
to the third embodiment;
[0029] FIG. 18 is a cross-sectional diagram of a semiconductor
device according to a fourth embodiment;
[0030] FIG. 19 is a top view of the semiconductor device according
to the fourth embodiment; and
[0031] FIG. 20 is a top view of the semiconductor device according
to the fourth embodiment.
DETAILED DESCRIPTION
First Embodiment
[0032] FIG. 1 is a top view showing an example of a semiconductor
device according to a first embodiment. As shown in FIG. 1, a
semiconductor device 1 according to this embodiment includes an I/O
circuit region 2 where I/O circuits are formed, an internal circuit
region 3 where internal circuits are formed, and electrode pads 4,
5, and 6.
[0033] The I/O circuit region 2 is disposed along a circumference
of the semiconductor device 1, and the internal circuit region 3 is
disposed in the center of the semiconductor device 1. In other
words, the I/O circuit region 2 is disposed in a frame shape to
surround the internal circuit region 3. The internal circuits
formed in the internal circuit region 3 are, for example, a memory
circuit and a logic circuit. The I/O circuits formed in the I/O
circuit region 2 are, for example, an input/output circuit, such as
an input buffer circuit and an output buffer circuit, and a level
shifter.
[0034] The I/O circuit can be composed of a MOS (Metal Oxide
Semiconductor), for example, including a thick oxide film with a
certain degree of withstand voltage against external voltage.
Further, the internal circuit may be composed of a MOS, for
example, with a relatively thin oxide film that is driven by lower
driving voltage than driving voltage of the I/O circuit. However,
the above examples are merely illustrative, and the I/O circuit and
the internal circuit are not necessarily distinguished by the
driving voltage of MOS or the thickness of the oxide film.
[0035] The electrode pads 4 and 5 are staggered in the I/O circuit
region 2. Some of the electrode pads 4 and 5 are disposed to exceed
the I/O circuit region 2. For example, the electrode pads 5 are
disposed across the I/O circuit region 2 and the internal circuit
region 3. The electrode pads 4 and 5 are electrically connected to
the I/O circuits disposed in the I/O circuit region 2, for example.
The electrode pads 6 are disposed in the internal circuit region 3.
The electrode pads 6 are electrically connected to the internal
circuits disposed in the internal circuit region 3, for instance.
The electrode pads 6 can be used as a pad for backing up power
supplied to the internal circuits.
[0036] The electrode pads 4, 5, and 6 are connected to external
electrode terminals using bumps and wire bonding. Bumps including a
Cu pillar bump, an Au bump, a solder bump, and a micro bump can be
used as the bump.
[0037] FIG. 2 is a top view showing another example of the
semiconductor device according to this embodiment. Also in a
semiconductor device 1' shown in FIG. 2, the I/O circuit region 2
is disposed to surround the internal circuit region 3. Moreover, in
the semiconductor device 1' shown in FIG. 2, electrode pads 9 are
disposed in a line in the I/O circuit region 2. In addition, some
of the electrode pads 9 are disposed to exceed the I/O circuit
region 2. For example, the electrode pads 9 are disposed across the
I/O circuit region 2 and the internal circuit region 3.
[0038] FIG. 3 is an enlarged diagram showing the periphery of the
electrode pads 4 and 5 of the semiconductor device 1 shown in FIG.
1. As shown in FIG. 3, the electrode pad 4 can be formed by
creating an opening in a part of a conductor pattern 12 (for
example, metal aluminum). In other words, an insulating film is
formed on the conductor pattern 12 except for the parts of the
electrode pads 4 on the conductor pattern 12. Vias 13 are provided
in projected parts of longitudinal ends of the conductive pattern
12. The electrode pads 4 are electrically connected to the I/O
circuits formed in the I/O circuit region 2 through the vias
13.
[0039] Similarly, the electrode pad 5 can be formed by creating an
opening in a part of a conductor pattern 11 (for example, metal
aluminum). In other words, an insulating film is formed on the
conductor pattern 11 except for the parts of the electrode pads 5
on the conductor pattern 11. Vias 14 are provided in projected
parts of longitudinal ends of the conductor pattern 11. The
electrode pads 5 are electrically connected to the I/O circuit
formed in the I/O circuit region 2 through the vias 14. The
electrode pads 5 are disposed across the I/O circuit region 2 and
the internal circuit region 3.
[0040] FIG. 4 is a cross-sectional diagram taken along the line
IV-IV of the semiconductor device shown 1 in FIG. 3. As shown in
FIG. 4, the semiconductor device includes a substrate 20, a contact
layer CL, wiring layers ML1 to ML9, via layers VL1 to VL9, and an
electrode pad 5. The wiring layers ML1 to ML9 and the via layers
VL1 to VL9 compose a multilayer wiring layer.
[0041] A p-type silicon single crystal can be used for the
substrate 20, for example. Grooved separation parts 21, for
example, are formed in the surface of this substrate 20. The
separation parts 21 can be formed by embedding an insulating film,
such as silicon oxide, in the grooves formed in the surface of the
substrate 20. A circuit element 22 (first circuit element) and a
circuit element 23 (second circuit element) are formed in regions
surrounded by the separation parts 21. The circuit element 22 is
formed in a first circuit region 15. The first circuit region 15 is
a region included in the internal circuit region 3. Moreover, the
circuit element 23 is formed in a second circuit region 16. The
second circuit region 16 is a region included in the I/O circuit
region 2. The circuit element 23 is less susceptible to the stress
as compared to the circuit element 22, and is evaluated in the
point that there is no characteristics problem when the stress is
imposed on the circuit element 23 as the relative position with the
pads is fixed.
[0042] The circuit elements 22 and 23 are field effect transistors
(FET), for example. The circuit elements 22 and 23 have a pair of
semiconductor regions for the source and the drain formed on the
surface of the substrate 20, a gate insulating film formed on the
surface of the substrate 20 between the pair of semiconductor
regions, and a gate electrode formed on the gate insulating
film.
[0043] The contact layer CL is formed on the surface of the
substrate 20. The contact layer CL is a layer for connecting the
circuit elements 22 and 23 formed on the surface of the substrate
20 to conductor patterns 26 formed in the wiring layer ML1. The
contact layer CL includes plugs 24 and an interlayer insulating
film 25. The plugs 24 can be formed by embedding a conductive
member in through holes formed in the interlayer insulating film
25. Tungsten can be used for the conductive member that forms the
plugs 24, for example. Moreover, a barrier metal may be formed
between the plugs 24 and the interlayer insulating film 25. A
titanium nitride (TiN) film can be used for the barrier metal, for
example. The conductor patterns 26 formed in the wiring layer ML1
are electrically connected to the circuit elements 22 and 23
through the plugs 24.
[0044] The wiring layer ML1 includes the conductor patterns 26 and
an interlayer insulating film 27. The conductor patterns 26 can be
formed by embedding a conductive member in grooves formed in the
interlayer insulating film 27. Copper can be used for the
conductive member that forms the conductor patterns 26, for
example. Moreover, a barrier metal may be formed between the
conductor patterns 26 and the interlayer insulating film 27. The
barrier metal has a function to suppress diffusion of copper in the
conductive member and a function to improve adhesion between the
conductive member and the insulating film. A laminated film
composed of a tantalum (Ta) film formed on a tantalum nitride (TaN)
film can be used for the barrier metal. In addition, the tantalum
nitride film is in contact with the interlayer insulating film 27,
and the tantalum film is in contact with the conductive member.
[0045] The via layer VL1 is a layer for connecting the conductor
patterns formed in the wiring layer ML1 and the conductor patterns
formed in the wiring layer ML2. The via layer VL1 includes vias 28
and an interlayer insulating film 29. The vias 28 can be formed by
embedding a conductive member in the through holes formed in the
interlayer insulating film 29. Tungsten can be used for the
conductive member that forms the vias 28, for example. Moreover, a
barrier metal may be formed between the conductor pattern 28 and
the interlayer insulating film 29. A titanium nitride (TiN) film
can be used for the barrier metal, for example. The conductor
patterns formed in the wiring layer ML2 are connected to the
conductor patterns formed in the wiring layer ML1 through the vias
28.
[0046] In the semiconductor device according to this embodiment,
the plurality of above wiring layers ML1 to ML9 and via layers VL1
to VL9 as above are alternately laminated. An Al wiring layer
provided with the conductor pattern 11 including the electrode pad
5 and a power supply line 31 is formed on the via layer VL9, and
the Al wiring layer is covered with an insulating film 32 except
for the part where an opening 35 (electrode pad 5) is formed. In
addition, the power supply line 31 and the conductor pattern of the
wiring layer ML9 are electrically connected to each other through a
via 38 formed in the via layer VL9. Moreover, the conductor pattern
11 and the conductor pattern of the wiring layer ML9 are
electrically connected to each other through a via 39 formed in the
via layer VL9.
[0047] Such a configuration enables the electrode pad 5 and the
circuit element 23 to be electrically connected. This further
enables the power supply line 31 and the circuit element 22 to be
electrically connected. For example, in the semiconductor device
according to this embodiment, the wiring layers ML1 to ML7 may be
mainly used as signal wiring, and the wiring layers ML8 and ML9 may
be mainly used as power supply wiring. By using the wiring layers
ML1 to ML7 that are close to the circuit elements 22 and 23 mainly
for the signal wiring and the wiring layers ML8 and ML9 with large
film thickness and low resistance mainly for the power supply
wiring, it is possible to efficiently supply power to the circuit
elements 22 and 23.
[0048] In the semiconductor device according to this embodiment, an
interlayer insulating film 30 is formed in a region 36 of the top
wiring layer ML9 (first wiring layer) among the plurality of wiring
layers ML1 to ML9 (i.e., a region where the electrode pad 5 and the
first circuit region 15 overlap in a planar view of the electrode
pad 5). In other words, in the semiconductor device according to
this embodiment, the interlayer insulating film 30 may be formed in
the region 36 of the wiring layer ML9, and a conductor pattern or
an interlayer insulating film may be formed in the wiring layer ML9
except for the region 36. Note that the planar view of the
electrode pad 5 indicates viewing the electrode pad 5 from the
normal direction of the principal plane of the electrode pad 5.
[0049] By forming the interlayer insulating film 30 in the region
of the top wiring layer ML9, it is possible to suppress
deterioration in the characteristics of the circuit element 22
caused by the stress imposed on the electrode pad 5. Specifically,
the interlayer insulating film 30 functions as a stress relief
layer.
[0050] As explained in Background, upon inspection of the
electrical properties of the semiconductor device, as the electrode
pad is brought into contact with the probe of the inspection
device, large stress is imposed on the electrode pad. The stress
arising from the contact with the probe could damage the circuit
elements formed on the semiconductor device. For this reason,
constraints are required in the layout of the circuit elements such
that the circuit elements should not be disposed below the
electrode pad.
[0051] However, recent development in microfabrication techniques
contributes to reduction in the size of the circuit elements and
thus reduction in the chip size. Meanwhile, the number of the
electrode pads of the semiconductor device increases along with the
increase in the number of functions of the semiconductor device.
Consequently, there has been a problem that the ratio of the area
occupied by the electrode pads on the chip area increases, and the
constraints on the layout of the circuit elements in light of the
positions of the electrode pads inhibit the reduction in the chip
size.
[0052] That is, the size of the chip can be reduced by reducing the
size of a MOS device, however the number of electrode pads will not
be reduced because of the increase in the number of functions of
the semiconductor device. Thus, it is necessary to increase the
density of the electrode pads by reducing the size and pitch of the
electrode pads. However, as an expensive inspection device and a
PKG substrate are required to realize higher density of the
electrode pads, the increase in the density of the electrode pads
cannot catch up with the speed of reduction in the size of the MOS
device. As a consequence, the area of the I/O circuit region will
be smaller relative to the size of the electrode pad, and the
electrode pad thus exceeds the I/O circuit region.
[0053] Due to the large stress from the probe of the inspection
device applied to the electrode pad, constraints are required in
the layout of the circuit elements such that the circuit elements
should not be disposed below the electrode pad. When the electrode
pad exceeds the I/O circuit region, this constraint also influences
the internal circuit region other than the I/O circuit region. That
is, the internal circuits cannot be disposed in the internal
circuit region below the electrode pads even with the reduced area
of the I/O circuit region. For this reason, the region used as the
I/O circuit region is not practically reduced, thereby leading to a
problem that inhibits the reduction in the chip size.
[0054] FIG. 5 is a cross-sectional diagram for explaining a
comparative example of this embodiment. The cross-sectional diagram
shown in FIG. 5 corresponds to the cross-sectional diagram shown in
FIG. 4, and the same components as in FIG. 4 are denoted by 200s
numerals. In the comparative example shown in FIG. 5, in the wiring
layer ML9, a conductor pattern 230 is formed in the part
immediately below an electrode pad 205. With the conductor pattern
230 provided in the wiring layer ML9 immediately below the
electrode pad 205 in this way, when the probe of the inspection
device is brought into contact with the electrode pad 205, the
stress imposed on the electrode pad 205 is transmitted down to the
wiring layers ML1 to ML8, the via layers VL1 to VL8, and the
substrate 220.
[0055] Since the circuit element 223 composes the I/O circuit, the
circuit element 223 is relatively insusceptible to stress.
Accordingly, a second region 216 where the circuit element 223 is
formed can be disposed to a position to overlap the electrode pad
205 in a planar view of the electrode pad 205. The relative
position of the elements composing the I/O circuit with the
electrode pads is fixed, thus it has been evaluated that the
element has no characteristics problem when the stress from the
probing operation is imposed thereon. There is no concern on the
stress in this regard as well.
[0056] Meanwhile, since the circuit element 222 composes the
internal circuit, the circuit element 222 is relatively susceptible
to the stress. For example, as an oxide film (gate oxide film)
composing the internal circuit is thinner than the oxide film
composing the I/O circuit, the driving voltage is low. Thus, the
transistor characteristics of the transistor composing the internal
circuit may fluctuate by the stress imposed thereon. For this
reason, a first region 215 where the circuit element 222 is formed
must be disposed not to overlap the electrode pad 205 in a planar
view of the electrode pad 205. That is, the internal circuit region
203 where the first region 215 is disposed must be at the position
not overlapping the electrode pad 205.
[0057] Hence, when the electrode pad 205 exceeds the I/O circuit
region 202, the internal circuit region 203 cannot be disposed in a
region 236 where the electrode pad 205 is exceeding. Consequently,
the circuits other than the I/O circuit are unable to be disposed
in the region 236 where the electrode pad 205 is exceeding, thereby
causing the region 236 to be a dead space. More specifically, even
with the reduced area of the I/O circuit region 202, the circuits
other than the I/O circuit cannot be disposed in the region 236
where the electrode pad 205 is exceeding, and thus the chip size
cannot be reduced.
[0058] In the semiconductor device according to this embodiment,
the interlayer insulating film 30 is formed in the region 36 of the
top wiring layer ML9 among the plurality of wiring layers ML1 to
ML9 (i.e., in a region where the electrode pad 5 and the first
circuit region 15 overlap in the planar view of the electrode pad
5), as shown in FIG. 4. By the interlayer insulating film 30 formed
in the region 36 of the top wiring layer ML9, it is possible to
suppress the stress imposed on the electrode pad 5 from
transmitting below to the wiring layers ML1 to ML8, the via layers
VL1 to VL8, and the substrate 20 when the probe of the inspection
device is brought into contact with the electrode pad 5. As a
consequence, the circuits other than the I/O circuit (i.e., the
internal circuit region 3) can be disposed in the region 36 where
the electrode 5 is exceeding to efficiently use the region 36,
thereby enabling the reduction in the chip size.
[0059] For example, a core circuit (logic circuit), an SRAM (Static
Random Access Memory), a power switch and the like can be disposed
in the region 36. Note that although an analog circuit (such as a
PLL circuit, a regulator circuit and the like) may be disposed in
the region 36, as the analog circuit is especially sensitive to the
transistor characteristics, it is preferable to dispose the analog
circuit in the internal circuit region 3 except in the region
36.
[0060] Next, the electrode pad 6 formed in the internal circuit
region 3 shown in FIG. 1 is explained. FIG. 6 is a cross-sectional
diagram taken along the line VI to VI of the semiconductor device
shown in FIG. 1. As shown in FIG. 6, the semiconductor device
includes the substrate 20, the contact layer CL, the wiring layers
ML1 to ML9, the via layers VL1 to VL9, and the electrode pad 6. The
wiring layers ML1 to ML9 and the via layers VL1 to VL9 compose a
multilayer wiring layer.
[0061] A p-type silicon single crystal can be used for the
substrate 20, for example. Grooved separation parts 41, for
example, are formed in the surface of this substrate 20. The
separation parts 41 can be formed by embedding an insulating film,
such as silicon oxide, in the grooves formed in the surface of the
substrate 20. Circuit elements 42 and 43 are formed in the regions
surrounded by the separation parts 41. The circuit elements 42 and
43 are formed in first circuit regions 17 and 18, respectively. The
first circuit regions 17 and 18 are regions included in the
internal circuit region 3 (see FIG. 1). That is, the circuit
elements 42 and 43 compose the internal circuit.
[0062] The circuit elements 42 and 43 are field effect transistors
(FET), for example. The contact layer CL is formed on the surface
of the substrate 20. The contact layer CL is a layer for connecting
the circuit elements 42 and 43 formed on the surface of the
substrate 20 and conductor patterns 46 formed in the wiring layer
ML1. That is, the conductor patterns 46 formed in the wiring layer
ML1 are electrically connected to the circuit elements 42 and 43
through plugs 44. The contact layer CL includes the plugs 44 and an
interlayer insulting film 45. Note that the contact layer CL has
the same configuration as that of the contact layer CL explained in
FIG. 3, thus the explanation will not be repeated here.
[0063] The wiring layer ML1 includes the conductor patterns 46 and
an interlayer insulating film 47. Note that the wiring layer ML1
also has the same configuration as the wiring layer ML1 explained
in FIG. 4, thus the explanation will not be repeated here.
[0064] The via layer VL1 is a layer for connecting the conductor
patterns formed in the wiring layer ML1 and the conductor patterns
formed in the wiring layer ML2. That is, the conductor pattern
formed in the wiring layer ML2 is connected to the conductor
patterns formed in the wiring layer ML1 through vias 48. The via
layer VL1 includes the vias 48 and an interlayer insulating film
49. Note that the via layer VL1 also has the same configuration as
the via layer VL1 explained in FIG. 4, thus the explanation will
not be repeated here.
[0065] Also in the semiconductor device shown in FIG. 6, the
plurality of wiring layers ML1 to ML9 and via layers VL1 to VL9 as
above are alternately laminated. The Al wiring layer provided with
the conductor pattern 53 including the electrode pad 6 and a power
supply line 51 is formed on the via layer VL9, and the Al wiring
layer is covered with an insulating film 52 except for the part
where an opening 54 (electrode pad 6) is formed. In addition, the
power supply line 51 and the conductor pattern of the wiring layer
ML9 are electrically connected to each other through a via 58
formed in the via layer VL9. Moreover, the conductor pattern 53 and
the conductor pattern of the wiring layer ML9 are electrically
connected to each other through a via 59 formed in the via layer
VL9.
[0066] Such a configuration enables electrical connection between
the electrode pad 6 and the circuit element 43. This further
enables the power supply line 51 and the circuit element 42 to be
electrically connected. For example, in the semiconductor device
according to this embodiment, the wiring layers ML1 to ML7 may be
mainly used for signal wiring, and the wiring layers ML8 to ML9 may
be mainly used for power supply wiring. By using the wiring layers
ML1 to ML7 that are close to the circuit elements 42 and 43 mainly
for the signal wiring and the wiring layers ML8 and ML9 with large
film thickness and low resistance mainly for the power supply
wiring, it is possible to efficiently supply power to the circuit
elements 42 and 43.
[0067] In the semiconductor device according to this embodiment, an
interlayer insulating film 56 is formed in a region 55 of the top
wiring layer ML9 among the plurality of wiring layers ML1 to ML9
(i.e., in a region where the electrode pad 6 and the first circuit
region 17 overlap in a planar view of the electrode pad 6). In
other words, in the semiconductor device according to this
embodiment, the interlayer insulating film 56 may be formed in the
region 55 of the wiring layer ML9, a conductor pattern or an
interlayer insulating film may be formed on the wiring layer ML9
except for the region 55.
[0068] By forming the interlayer insulating film 56 in the region
55 of the top wiring layer ML9, it is possible to suppress the
characteristics of the circuit element 42 from deteriorating caused
by the stress imposed on the electrode pad 6. That is, the
interlayer insulating film 56 functions as a stress relief
layer.
[0069] The interlayer insulating film 56 formed to all the parts of
the wiring layer ML9 that overlap the electrode pad 6 allows the
most efficient utilization of the space below the electrode pad
6.
[0070] FIG. 7 is a cross-sectional diagram for explaining a
comparative example according to this embodiment. The
cross-sectional diagram showing in FIG. 7 corresponds to the
cross-sectional diagram shown in FIG. 6, and the same components as
in FIG. 6 are denoted by 200's numerals. In the comparative example
shown in FIG. 7, the conductor pattern 250 is formed in the part
immediately below the electrode pad 206 of the wiring layer ML9.
With the conductor pattern 250 provided on the wiring layer ML9
which is immediately below the electrode pad 206, the stress
imposed on the electrode pad 206 is transmitted down to the wiring
layers ML1 to ML8, the via layers VL1 to VL8, and the substrate 220
when the probe of the inspection device is brought into contact
with the electrode pad 206.
[0071] Since circuit elements 242 and 243 compose the internal
circuit, the circuit elements 242 and 243 are relatively
susceptible to the stress. Accordingly, the transistor
characteristics of the transistor composing the internal circuit
may fluctuate by the stress to be imposed. For this reason, it is
necessary to dispose the first regions 217 and 218 where the
circuit elements 242 and 243 are formed therein so as not to
overlap the electrode pad 206 in a planar view of the electrode pad
206. In other words, the circuit element composing the internal
circuit cannot be disposed in a region 256 where the electrode pad
206 is disposed. For this reason, the region 256 where the
electrode pad 206 is disposed will be a dead space.
[0072] In the semiconductor device according to this embodiment,
the interlayer insulating film 56 is formed in the region 55 of the
top wiring layer ML9 among the plurality of wiring layers ML1 to
ML9 (i.e., in a region where the electrode pad 6 and the first
circuit region 17 overlap in a planar view of the electrode pad 6).
By the interlayer insulating film 56 formed in the region 55 on the
top wiring layer ML9, it is possible to suppress the stress imposed
on the electrode pad 6 from transmitting down to the wiring layers
ML1 to ML8, the via layers VL1 to VL8, and the substrate 20 when
the probe of the inspection device is brought into contact with the
electrode pad 6. As a consequence, the circuit composing the
internal circuit can be disposed in the region 54 where the
electrode pad 6 is disposed to efficiently use the region 54,
thereby enabling the reduction in the chip size.
[0073] For example, a core circuit (logic circuit), an SRAM (Static
Random Access Memory), a power switch and the like can be disposed
in the region 55. Note that an analog circuit (such as a PLL
circuit, a regulator circuit and the like) may be disposed in the
region 55. However the analog circuit is especially sensitive to
the transistor characteristics. Thus it is preferable to dispose
the analog circuit in the internal circuit region 3 except in the
region 55.
[0074] According to this embodiment explained above, it is possible
to provide a semiconductor device and a manufacturing method for
the semiconductor device that realize the reduction in the chip
size.
Second Embodiment
[0075] Next, a second embodiment is explained. In a semiconductor
device according to this embodiment, a probing region and an
external electrode connection region are provided on the electrode
pad. Other configurations are similar to the semiconductor device
according to the first embodiment, thus the same components are
denoted by the same reference numerals and the explanation will not
be repeated here as appropriate.
[0076] FIG. 8 is a top view showing an electrode pad included in
the semiconductor device according to this embodiment. As shown in
FIG. 8, an electrode pad 70 can be formed by creating an opening in
a part of the conductor pattern 11 (for example, metal aluminum).
In other words, an insulating film is formed on the conductor
pattern 11 except for part of the electrode pad 70 on the conductor
pattern 11. The vias 14 are provided in projected parts of
longitudinal ends of the conductor pattern 11.
[0077] Moreover, the electrode pad 70 includes an external
electrode connection region 71 and a probing region 72. The
external electrode connection region 71 is connected to external
electrode terminals using bumps and wire bonding. Moreover, the
probing region 72 is a region to be in contact with the probe of
the inspection device. The probing region 72 is a region to be in
contact with the probe of the inspection device, thus larger stress
is imposed on the probing region 72 than the stress imposed on the
external electrode connection region 71.
[0078] In FIG. 8, although a part of the external electrode
connection region 71 and a part of the probing region 72 are formed
to overlap, the external electrode connection region 71 and the
probing region 72 may not overlap. Note that in light of the
reduction in the area of the electrode pad 70, it is preferable to
overlap the part of the external electrode connection region 71 and
the part of the probing region 72.
[0079] FIG. 9 is a cross-sectional diagram of the semiconductor
device according to this embodiment. The cross-sectional diagram
shown in FIG. 9 corresponds to the cross-sectional diagram shown in
FIG. 4, and the electrode pad 70 is formed across the I/O circuit
region 2 and the internal circuit region 3. Note that the same
components as in the cross-sectional diagrams of FIG. 4 are denoted
by the same reference numerals.
[0080] As shown in FIG. 9, the semiconductor device includes the
substrate 20, the contact layer CL, the wiring layers ML1 to ML9,
the via layers VL1 to VL9, and the electrode pad 70. The wiring
layers ML1 to ML9 and the via layers VL1 to VL9 compose a
multilayer wiring layer.
[0081] A p-type silicon single crystal can be used for the
substrate 20, for example. The grooved separation parts 21, for
example, are formed in the surface of this substrate 20. The
separation parts 21 can be formed by embedding an insulating film,
such as silicon oxide, in the grooves formed in the surface of the
substrate 20. The circuit elements 22 and 23 are formed in the
regions surrounded by the separation parts 21. The circuit element
22 is formed in the first circuit region 15. The first circuit
region 15 is a region included in the internal circuit region 3.
Moreover, the circuit element 23 is formed in the second circuit
region 16. The second circuit region 16 is a region included in the
I/O circuit region 2.
[0082] The circuit elements 22 and 23 are field effect transistors
(FET), for example. The contact layer CL is formed on the surface
of the substrate 20. The contact layer CL is a layer for connecting
the circuit elements 22 and 23 formed on the surface of the
substrate 20 and the conductor patterns 26 formed in the wiring
layer ML1. That is, the conductor patterns 26 formed in the wiring
layer ML1 are electrically connected to the circuit elements 22 and
23 via the plugs 24. The contact layer CL includes the plugs 24 and
the interlayer insulating film 25. Note that the contact layer CL
has the same configuration as the contact layer CL explained in
FIG. 4, thus the explanation will not be repeated here.
[0083] The wiring layer ML1 includes the conductor patterns 26 and
the interlayer insulating film 27. Note that the wiring layer ML1
also has the same configuration as the wiring layer ML1 explained
in FIG. 4, thus the explanation will not be repeated here.
[0084] The via layer VL1 is a layer for connecting the conductor
patterns formed in the wiring layer ML1 and the conductor patterns
formed in the wiring layer ML2. That is, the conductor patterns
formed in the wiring layer ML2 are connected to the conductor
patterns formed in the wiring layer ML1 through the vias 28. The
via layer VL1 includes the vias 28 and the interlayer insulating
film 29. Note that the via layer VL1 also has the same
configuration as the via layer VL1 explained in FIG. 4, thus the
explanation will not be repeated here.
[0085] Also in the semiconductor device shown in FIG. 9, the
plurality of wiring layers ML1 to ML9 and via layers VL1 to VL9 as
above are alternately laminated. The Al wiring layer provided with
the conductor pattern 11 including the electrode pad 70 and the
power supply line 31 is formed on the via layer VL9, and the Al
wiring layer is covered with the insulating film 32 except for the
part where an opening (electrode pad 70) is formed. In addition,
the power supply line 31 and a conductor pattern 76 of the wiring
layer ML9 are electrically connected to each other through the via
38 formed in the via layer VL9. Moreover, the conductor pattern 11
and the conductor pattern of the wiring layer ML9 are electrically
connected to each other through the via 39 formed in the via layer
VL9.
[0086] Such a configuration enables electrical connection between
the electrode pad 6 and the circuit element 43. This further
enables the power supply line 31 and the circuit element 22 to be
electrically connected. For example, in the semiconductor device
according to this embodiment, the wiring layers ML1 to ML7 may be
mainly used for signal wiring, and the wiring layers ML8 to ML9 may
be mainly used for power supply wiring. By using the wiring layers
ML1 to ML7 that are close to the circuit elements 22 and 23 mainly
for the signal wiring and the wiring layers ML8 and ML9 with large
film thickness and low resistance mainly for the power supply
wiring, it is possible to efficiently supply power to the circuit
elements 22 and 23.
[0087] Moreover, the electrode pad 70 included in the semiconductor
device according to this embodiment has the external electrode
connection region 71 to be connected to an external electrode
terminal using a bump or wire bonding and the probing region 72 to
be in contact with the probe of the inspection device. The probing
region 72 is a region to be in contact with the probe of the
inspection device, thus larger stress is imposed on the probing
region 72 than the stress imposed on the external electrode
connection region 71.
[0088] In the semiconductor device according to this embodiment, an
interlayer insulating film 75 is formed in a region 73 of the top
wiring layer ML9 among the plurality of wiring layers ML1 to ML9
(i.e., in a region where the probing region 72 of the electrode pad
70 and the first circuit region 15 overlap in a planar view of the
electrode pad 70). By forming the interlayer insulating film 75 in
the region 73 on the top wiring layer ML9, it is possible to
suppress the characteristics of the circuit element 22 from
deteriorating caused by the stress imposed on the probing region
72. That is, the interlayer insulating film 75 function as a stress
relief layer. As a consequence, the circuit other than the I/O
circuit (i.e., the internal circuit region 3) can be disposed in
the region 73 where the electrode pad 6 is disposed to efficiently
use the region 73, thereby enabling the reduction in the chip
size.
[0089] For example, in the comparative example shown in FIG. 5,
only the I/O circuit that is not susceptible to the stress can be
disposed below the electrode pad 205, and the core circuit (logic
circuit), an SRAM, a power supply switch, and an analog circuit
cannot be disposed. On the other hand, the interlayer insulating
film 75 is formed in the region 73 of the top wiring layer ML9 in
the semiconductor device according to this embodiment. For this
reason, the core circuit (logic circuit), the SRAM, and the power
supply switch, which are relatively susceptible to the stress, can
be disposed in the region 73. Note that a region 74 that does not
overlap the probing region 73 in the external electrode connection
region 71 of the electrode pad 70 is a region not susceptible to
the stress by the probe. Therefore, in the region 74, an analog
circuit (such as a PLL circuit, a regulator circuit and the like)
that is sensitive to the transistor characteristics can be disposed
in addition to the core circuit (logic circuit), the SRAM, and the
power supply switch.
[0090] In the semiconductor device shown in FIG. 9, the conductor
pattern 76 (first conductor pattern) is formed in the wiring layer
ML9 of the region 74 where a region other than probing region 72
and the first circuit region 15 overlap. Moreover, a conductor
pattern 77 (second conductor pattern) of the wiring layer ML8 is
formed across the external electrode connection region 71 and the
probing region 72. The power supplied from the power supply line 31
is supplied to the circuit element 22 through the conductor pattern
76 of the wiring layer ML9 and the conductor pattern 77 of the
wiring layer ML8. Thus electric resistance in the wiring layers ML8
and ML9 can be reduced by providing the conductor pattern 76 of the
wiring layer ML9 until the end part of the probing region 72.
[0091] FIGS. 10 and 11 are top views of the semiconductor device
according to this embodiment. FIGS. 10 and 11 show the positional
relationship between the region 70 where the electrode pads are
formed, the probing region 72, the conductor patterns 76 of the
wiring layer ML9, and the conductor patterns 77 of the wiring layer
ML8. Other components are not shown in FIGS. 10 and 11. FIG. 10
shows the periphery of the electrode pads provided on the left hand
side of the semiconductor device shown in FIG. 1. Moreover, FIG. 11
shows the periphery of the electrode pads provided on the lower
part of the semiconductor device shown in FIG. 1.
[0092] In the I/O circuit region 2 of the semiconductor device,
power supply main lines (not shown) are disposed surrounding in
parallel with the sides around the semiconductor device. However,
in the internal circuit region 3, as power supply main lines, the
conductor patterns 76 of the wiring layer ML9 are provided in the
vertical direction of the drawing, and the conductor patterns 77 of
the wiring layer ML8 are provided in the horizontal direction of
the drawing in the internal circuit region 3. In addition, the
conductor patterns 77 of the wiring layer ML8 are formed also in
the probing region 72 near the electrode pads shown in FIG. 10. On
the other hand, the conductor patterns 76 of the wiring layer ML9
are formed until the end part of the probing region 72 (i.e., the
conductor pattern 76 is not formed in the probing region 72).
Moreover, the conductor patterns 77 of the wiring layer ML8 are
formed also in the probing region 72 near the electrode pads shown
in FIG. 11. Meanwhile, the conductor pattern 76 of the wiring layer
ML9 is formed until the end part of the probing region 72.
[0093] The probing region 72 of the electrode pad 70 is formed on
the I/O circuit region 2 side and the external electrode connection
region 71 is formed on the internal circuit region 3 side. This
reduces the overlapping part of the probing region 72 and the
internal circuit region 3, and allows the conductor patterns 76 of
the wiring layer ML9 to be provided near the end part of the
internal circuit region 3. Such a configuration enables reduction
in the electric resistance of the wiring layers ML8 and ML9.
[0094] In the case shown in FIG. 10, the conductor patterns 77 of
the wiring layer ML8 are formed in the horizontal direction of the
drawing. Specifically, the conductor patterns 77 of the wiring
layer ML8 are formed in the direction vertical to the longitudinal
direction of the I/O circuit region 2 (vertical direction of the
drawing). Therefore, the power is supplied to the circuit elements
disposed below the probing region 72 from many conductor patterns
77. On the other hand, in the case shown in FIG. 11, the conductor
patterns 77 of the wiring layer ML8 are formed in the direction
parallel to the longitudinal direction of the I/O circuit region 2
(horizontal direction of the drawing). Accordingly, the power is
supplied to the circuit elements disposed below the probing region
72 from less conductor patterns 77. Consequently, by providing the
conductor patterns 76 of the wiring layer ML9 until the end part of
the probing region, an advantage of improving power supply is
considered to be more effective in the case shown in FIG. 11 than
the case shown in FIG. 10.
[0095] Next, the case is explained in which the electrode pad is
formed in the internal circuit region. FIG. 12 is across-sectional
diagram of the semiconductor device according to this embodiment.
The cross-sectional diagram shown in FIG. 12 corresponds to the
cross-sectional diagram shown in FIG. 6, and an electrode pad 80 is
formed in the internal circuit region 3. Note that the same
components as in the cross-sectional diagram shown in FIG. 6 are
denoted by the same reference numerals.
[0096] As shown in FIG. 12, the semiconductor device has the
substrate 20, the contact layer CL, the wiring layers ML1 to ML9,
the via layers VL1 to VL9, and the electrode pad 80. The wiring
layers ML1 to ML9 and the via layers VL1 to VL9 compose a
multilayer wiring layer.
[0097] A p-type silicon single crystal can be used for the
substrate 20, for example. The grooved separation parts 41, for
example, are formed in the surface of this substrate 20. The
separation parts 41 can be formed by embedding an insulating film,
such as silicon oxide, in the grooves formed in the surface of the
substrate 20. The circuit elements 42 and 43 are formed in the
regions surrounded by the separation parts 41. The circuit elements
42 and 43 are formed in the first circuit region 17 and 18,
respectively. The first circuit regions 17 and 18 are regions
included in the internal circuit region 3 (see FIG. 1). That is,
the circuit elements 42 and 43 compose the internal circuit.
[0098] The circuit elements 42 and 43 are field effect transistors
(FET), for example. The contact layer CL is formed on the surface
of the substrate 20. The contact layer CL is a layer for connecting
the circuit elements 42 and 43 formed on the surface of the
substrate 20 and the conductor patterns 46 formed in the wiring
layer ML1. That is, the conductor patterns 46 formed in the wiring
layer ML1 are electrically connected to the circuit elements 42 and
43 through the plugs 44. The contact layer CL includes the plugs 44
and the interlayer insulating film 45. Note that the contact layer
CL has the same configuration as the contact layer CL explained in
FIG. 6, thus the explanation will not be repeated here.
[0099] The wiring layer ML1 includes the conductor patterns 46 and
the interlayer insulating film 47. Note that the contact layer CL
also has the same configuration as the wiring layer ML1 explained
in FIG. 6, thus the explanation will not be repeated here.
[0100] The via layer VL1 is a layer for connecting the conductor
patterns formed in the wiring layer ML1 and the conductor patterns
formed in the wiring layer ML2. That is, the conductor patterns
formed in the wiring layer ML2 are connected to the conductor
patterns formed in the wiring layer ML1 through the vias 48. The
via layer VL1 includes the vias 48 and the interlayer insulating
film 49. Note that the via layer VL also has the same configuration
as the via layer VL explained in FIG. 6, thus the explanation will
not be repeated here.
[0101] Also in the semiconductor device shown in FIG. 12, the
plurality of wiring layers ML1 to ML9 and via layers VL1 to VL9 as
above are alternately laminated. The Al wiring layer provided with
the conductor pattern 53 including the electrode pad 6 and the
power supply line 51 is formed on the via layer VL9, and the Al
wiring layer is covered with the insulating film 52 except for the
part where an opening (electrode pad 80) is formed. In addition,
the power supply line 51 and the conductor pattern of the wiring
layer ML9 are electrically connected to each other through the via
58 formed in the via layer VL9. Moreover, the conductor pattern 53
and the conductor pattern of the wiring layer ML9 are electrically
connected to each other through the via 59 formed in the via layer
VL9.
[0102] Such a configuration enables electrical connection between
the electrode pad 6 and the circuit element 43. This further
enables the power supply line 51 and the circuit element 42 to be
electrically connected. For example, in the semiconductor device
according to this embodiment, the wiring layers ML1 to ML7 may be
mainly used for signal wiring, and the wiring layers ML8 to ML9 may
be mainly used for power supply wiring. By using the wiring layers
ML1 to ML7 that are close to the circuit elements 42 and 43 mainly
for the signal wiring and the wiring layers ML8 and ML9 with large
film thickness and low resistance mainly for the power supply
wiring, it is possible to efficiently supply power to the circuit
elements 42 and 43.
[0103] Moreover, the electrode pad 80 included in the semiconductor
device according to this embodiment includes an external electrode
connection region 81 to be connected to an external electrode
terminal using a bump and wire bonding and a probing region 82 to
be in contact with the probe of the inspection device. The probing
region 82 is a region to be in contact with the probe of the
inspection device, thus larger stress is imposed on the probing
region 82 than the stress imposed on the external electrode
connection region 81.
[0104] In the semiconductor device according to this embodiment, an
interlayer insulating film 85 is formed in a region 83 of the top
wiring layer ML9 among the plurality of wiring layers ML1 to ML9
(i.e., in a region where the probing region 82 of the electrode pad
80 and the first circuit region 17 overlap in a planar view of the
electrode pad 80). By forming the interlayer insulating film 85 in
the region 83 on the top wiring layer ML9, it is possible to
suppress the characteristics of the circuit element 42 from
deteriorating caused by the stress imposed on the probing region
82. That is, the interlayer insulating film 85 functions as a
stress relief layer. Moreover, the internal circuit can be disposed
in the probing region 83 of the electrode pad 80 to efficiently use
the region 83, thereby enabling the reduction in the chip size.
[0105] For example, in the comparative example shown in FIG. 7, a
core circuit (logic circuit), an SRAM, a power supply switch, and
an analog circuit cannot be disposed below the electrode pad 206.
Meanwhile, in the semiconductor device according to this
embodiment, the interlayer insulating film 85 is formed in the
region 83 of the top wiring layer ML9. Therefore, the core circuit
(logic circuit), the SRAM, and the power supply switch, which are
relatively susceptible to the stress, can be disposed in the region
83. Note that the region 84 in the external electrode connection
region 81 of the electrode pad 80 that does not overlap the probing
region 83 is not susceptible to the stress of the probe. Thus, in
the region 84, an analog circuit (such as a PLL circuit, a
regulator circuit and the like) that is sensitive to the transistor
characteristics can be disposed in addition to the core circuit
(logic circuit), the SRAM, and the power supply switch.
[0106] The interlayer insulating film 85 formed to all the parts of
the wiring layer ML9 that overlap the electrode pad 6 allows the
most efficient utilization of the space below the electrode pad
80.
[0107] In the semiconductor device shown in FIG. 12, the conductor
pattern 86 is formed in the region 84 of the wiring layer ML9 where
the region other than the probing region 82 and the first circuit
region 17 overlap. Further, a conductor pattern 87 of the wiring
layer ML8 is formed across the external electrode connection region
81 and the probing region 82. The power supplied from the power
supply line 51 is supplied to the circuit element 42 through the
wiring layers ML8 and ML9, which are the power supply wiring. Thus
the conductor pattern 86 of the wiring layer ML9 formed until the
end part of the probing region 82 enables reduction in the
electrical resistance of the wiring layers ML8 and ML9.
[0108] FIG. 13 is a top view showing an example of the electrode
pad included in the semiconductor device according to this
embodiment. As shown in FIG. 13, the electrode pad 70 can be formed
by creating an opening in apart of the conductor pattern 11 (for
example, metal aluminum). In other words, an insulating film is
formed on the conductor pattern 11 except for the part of the
electrode pad 70 on the conductor pattern 11. The vias 14 are
provided in projected parts of longitudinal ends of the conductor
pattern 11.
[0109] The electrode pad 70 includes the external electrode
connection region 71 and the probing region 72. Projections 91 and
92 are formed in the part corresponding to the probing region 72
around the electrode pad 70. That is, the projections 91 and 92 are
formed to the sides parallel in the longitudinal direction of the
electrode pad 70. The projection 91 is formed at the position
corresponding to the end part on the external electrode connection
region 71 side of the probing region 72, and the projection 92 is
formed at the position corresponding to the central part of the
probing region 72. The projections 91 and 92 provided to the
electrode pad 70 define the position of the probing region 72 on
the electrode pad 70, and further allows accurate contact of the
probe of the inspection device with the probing region 72 of the
electrode pad 70.
[0110] Note that although the electrode pad 70 shown in FIG. 13
includes a total of four projections 91 and 92 on both sides of the
probing region 72, the projections 91 and 92 may be provided only
on one side of the probing region 72. In such a case, a total of
two projections 91 and 92 are provided.
[0111] Further, as shown in FIG. 14, a width 93 (length in a
direction vertical to the longitudinal direction of the electrode
pad 70) of the electrode pad 70 in the probing region 72 may be
shorter than a width 94 of the electrode pad 70 in the external
electrode connection region 71. With the different widths of the
electrode pad 70 in the external electrode connection region 71 and
the probing region 72 in this way, the position of the probing
region 72 can be easily recognized. Note that in this embodiment,
the width 93 in the probing region 72 of the electrode pad 70 may
be longer than the width 94 in the external electrode connection
region 71 of the electrode pad 70.
[0112] According to this embodiment explained above, it is possible
to provide a semiconductor device and a manufacturing method for
the semiconductor device that realize the reduction in the chip
size.
[0113] This embodiment explained the case, as an example, in which
the power supply wiring is disposed in the region other than the
probing region below the electrode pad, and the internal circuit is
disposed in the region including the probing region below the
electrode pad. As the internal circuit, not only an active element
including a logic circuit and an SRAM, a passive element such as a
decoupling capacitance may be formed. Moreover, the wiring layers
ML9 and ML8 can also be used as the signal wiring regions not only
as the power supply wiring. Additionally, an active element using
metal may be formed in the wiring layers ML1 to ML9 or the wiring
layers ML1 to ML9 may be regions for MOM (Metal-Oxide-Metal)
capacitance or inductance.
Third Embodiment
[0114] Next, a third embodiment is explained. The semiconductor
device according to this embodiment is different from the second
embodiment in the point that the power supply wiring is formed only
on one layer among the plurality of wiring layers. Other
configurations are the same as the semiconductor device according
to the second embodiment, thus the same components are denoted by
the same reference numerals, and the explanation will not be
repeated here as appropriate.
[0115] FIG. 15 is a cross-sectional diagram of the semiconductor
device according to this embodiment. The cross-sectional diagram
shown in FIG. 15 corresponds to the cross-sectional diagram shown
in FIG. 9, and an electrode pad 110 is formed across the I/O
circuit region 2 and the internal circuit region 3. Note that the
same components as in the cross-sectional diagram of FIG. 9 are
denoted by the same reference numerals therein.
[0116] As shown in FIG. 15, the semiconductor device includes the
substrate 20, the contact layer CL, the wiring layers ML1 to ML8,
the via layers VL1 to VL8, and the electrode pad 110. The wiring
layers ML1 to ML9 and the via layers VL1 to VL9 compose a
multilayer wiring layer.
[0117] A p-type silicon single crystal can be used for the
substrate 20, for example. The grooved separation parts 21, for
example, are formed in the surface of this substrate 20. The
separation parts 21 can be formed by embedding an insulating film,
such as silicon oxide, in the grooves formed in the surface of the
substrate 20. The circuit elements 22 and 23 are formed in the
regions surrounded by the separation parts 21. The circuit element
22 is formed in the first circuit region 15. The first circuit
region 15 is a region included in the internal circuit region 3.
Moreover, the circuit element 23 is formed in the second circuit
region 16. The second circuit region 16 is a region included in the
I/O circuit region 2.
[0118] The circuit elements 22 and 23 are field effect transistors
(FET), for example. The contact layer CL is formed on the surface
of the substrate 20. The contact layer CL is a layer for connecting
the circuit elements 22 and 23 formed on the surface of the
substrate 20 and the conductor patterns 26 formed in the wiring
layer ML1. That is, the conductor patterns 26 formed in the wiring
layer ML1 are electrically connected to the circuit elements 22 and
23 through the plugs 24. The contact layer CL includes the plugs 24
and the interlayer insulating film 25. Note that the contact layer
CL has the same configuration as the contact layer CL explained in
FIG. 9, thus the explanation will not be repeated here.
[0119] The wiring layer ML1 includes the conductor patterns 26 and
the interlayer insulating film 27. Note that the wiring layer ML
also has the same configuration as the wiring layer ML explained in
FIG. 9, thus the explanation will not be repeated here.
[0120] The via layer VL1 is a layer for connecting the conductor
patterns formed in the wiring layer ML1 and the conductor patterns
formed in the wiring layer ML2. That is, the conductor patterns
formed in the wiring layer ML2 is connected to the conductor
patterns formed in the wiring layer ML1 through the vias 28. The
via layer VL1 includes the vias 28 and the interlayer insulating
film 29. Note that the via layer VL1 also has the same
configuration as the via layer VL1 explained in FIG. 9, thus the
explanation will not be repeated here.
[0121] Also in the semiconductor device shown in FIG. 15, the
plurality of wiring layers ML1 to ML9 and via layers VL1 to VL9 as
above are alternately laminated. The Al wiring layer provided with
the conductor pattern 11 including the electrode pad 110 and the
power supply line 31 is formed on the via layer VL8, and the Al
wiring layer is covered with the insulating film 32 except for the
part where an opening (electrode pad 110) is formed. In addition,
the power supply line 31 and a conductor pattern 116 of the wiring
layer ML8 are electrically connected to each other through the via
38 formed in the via layer VL8. Moreover, the conductor pattern 11
and the conductor pattern of the wiring layer ML8 are electrically
connected to each other through the via 39 formed in the via layer
VL8.
[0122] Such a configuration enables electrical connection between
the electrode pad 110 and the circuit element 33. This further
enables the power supply line 31 and the circuit element 22 to be
electrically connected. For example, in the semiconductor device
according to this embodiment, the wiring layers ML1 to ML7 may be
mainly used for signal wiring, and the wiring layer ML8 may be
mainly Used for power supply wiring. By using the wiring layers ML1
to ML7 that are close to the circuit elements 22 and 23 mainly for
the signal wiring and the wiring layer ML8 with large film
thickness and low resistance mainly for the power supply wiring, it
is possible to efficiently supply power to the circuit elements 22
and 23.
[0123] Moreover, the electrode pad 110 included in the
semiconductor device according to this embodiment includes an
external electrode connection region 111 to be connected to an
external electrode terminal using a bump and wire bonding and a
probing region 112 to be in contact with the probe of the
inspection device. The probing region 112 is a region to be in
contact with the probe of the inspection device, thus larger stress
is imposed on the probing region 112 than the stress imposed on the
external electrode connection region 111.
[0124] In the semiconductor device according to this embodiment, an
interlayer insulating film 115 is formed in a region 113 of the top
wiring layer ML8 among the plurality of wiring layers ML1 to ML8
(i.e., in a region where the probing region 112 of the electrode
pad 110 and the first circuit region 15 overlap in a planar view of
the electrode pad 110). By forming the interlayer insulating film
115 in the region 113 on the top wiring layer ML8, it is possible
to suppress the characteristics of the circuit element 22 from
deteriorating caused by the stress imposed on the probing region
112. That is, the interlayer insulating film 115 functions as a
stress relief layer. As a consequence, the circuit other than the
I/O circuit (i.e., the internal circuit region 3) can be disposed
in the probing region 113 of the electrode pad 110 to efficiently
use the region 113, thereby enabling the reduction in the chip
size.
[0125] FIGS. 16 and 17 are top views showing the semiconductor
device according to this embodiment. FIGS. 16 and 17 illustrate the
positional relationship between the region 110 where the electrode
pads are formed, the probing region 112, and the conductor patterns
116 of the wiring layer ML8, and other components are not shown.
FIG. 16 shows the periphery of the electrode pad provided on the
left hand side of the semiconductor device shown in FIG. 1.
Moreover, FIG. 17 shows the periphery of the electrode pads
provided on the lower part of the semiconductor device shown in
FIG. 1.
[0126] In the I/O circuit region 2 of the semiconductor device, the
power supply main lines (not shown) are disposed surrounding in
parallel with the sides around the semiconductor device. In the
internal circuit region 3, the conductor patterns 116 of the wiring
layer ML8 are formed as the power supply main lines in the
horizontal direction of the drawing. In addition, the conductor
patterns 116 of the wiring layer ML8 are formed until the end part
of the probing region 112 near the electrode pads shown in FIG. 16.
Moreover, the conductor patterns 116 of the wiring layer ML8 are
formed until the end part of the probing region 112 in the
periphery of the electrode pads shown in FIG. 17.
[0127] By forming the probing region 112 of the electrode pad 110
on the I/O circuit region 2 side and the external electrode
connection region 111 on the internal circuit region 3 side, it is
possible to reduce the part where the probe region 112 and the
internal circuit region 3 overlap, and thereby enabling the
conductor patterns 116 of the wiring layer ML8 to be disposed near
the end part of the internal circuit region 3. Therefore,
sufficient power can be supplied to the circuit element 22 disposed
below the electrode pad 110 even when only the top wiring layer ML8
is used as the power supply wiring.
[0128] Note that this embodiment explained the case in which the
electrode pads are formed across the I/O circuit region and the
internal circuit region 3, however this embodiment can be applied
in a similar manner to the case in which the electrode pads are
formed in the internal circuit region (i.e., in the case of the
electrode pad 6 in FIG. 1).
Fourth Embodiment
[0129] Next, a fourth embodiment is explained. A semiconductor
device according to this embodiment includes a power switch circuit
as the circuit element included in the semiconductor device
explained in the third embodiment. Note that the same components as
in the third exemplary embodiment are denoted by the same reference
numerals therein, and the explanation will not be repeated here as
appropriate.
[0130] FIG. 18 is a cross-sectional diagram of the semiconductor
device according to this embodiment. The cross-sectional diagram
shown in FIG. 15 corresponds to the cross-sectional diagram shown
in FIG. 18, and the electrode pad 110 is formed across the I/O
circuit region 2 and the internal circuit region 3.
[0131] As shown in FIG. 18, the semiconductor device has the
substrate 20, the contact layer CL, the wiring layers ML1 to ML8,
the via layers VL1 to VL8, and the electrode pad 110. The wiring
layers ML1 to ML8 and the via layers VL1 to VL8 compose a
multilayer wiring layer.
[0132] A p-type silicon single crystal can be used for the
substrate 20, for example. The grooved separation parts 21, for
example, are formed in the surface of this substrate 20. The
separation parts 21 can be formed by embedding an insulating film,
such as silicon oxide, in the grooves formed in the surface of the
substrate 20. A power switch circuit (for example, NMOS transistor)
121 and the circuit element 23 are formed in the regions surrounded
by the separation parts 21. The power switch circuit 121 is formed
in the first circuit region 15. The first circuit region 15 is a
region included in the internal circuit region 3. Moreover, the
circuit element 23 is formed in the second circuit region 16. The
second circuit region 16 is a region included in the I/O circuit
region 2.
[0133] The contact layer CL is formed on the surface of the
substrate 20. The contact layer CL is a layer for connecting the
power switch circuit 121 and the circuit element 23 formed on the
surface of the substrate 20 and the conductor patterns 26 formed in
the wiring layer ML1. That is, the conductor patterns 26 formed in
the wiring layer ML1 are electrically connected to the power switch
circuit 121 and the circuit element 23 through the plugs 24. The
contact layer CL includes the plugs 24 and the interlayer
insulating film 25. Note that the contact layer CL has the same
configuration as the contact layer CL explained in FIG. 15, thus
the explanation will not be repeated here.
[0134] The wiring layer ML1 includes the conductor patterns 26 and
the interlayer insulating film 27. Note that the wiring layer ML
also has the same configuration as the wiring layer ML1 explained
in FIG. 15, thus the explanation will not be repeated here.
[0135] The via layer VL1 is a layer for connecting the conductor
patterns formed in the wiring layer ML1 and the conductor patterns
formed in the wiring layer ML2. That is, the conductor patterns
formed in the wiring layer ML2 is connected to the conductor
pattern formed in the wiring layer ML1 through the vias 28. The via
layer VL1 includes the vias 28 and the interlayer insulating film
29. Note that the via layer VL also has the same configuration as
the via layer VL explained in FIG. 15, thus the explanation will
not be repeated here.
[0136] Also in the semiconductor device shown in FIG. 18, the
plurality of wiring layers ML1 to ML8 and via layers VL1 to VL8 as
above are alternately laminated. The Al wiring layer provided with
the conductor pattern 11 including the electrode pad 110 and a
power supply line (VSS) 122 is formed on the via layer VL8, and the
Al wiring layer is covered with the insulating film 32 except for
the part where an opening (electrode pad 110) is formed. In
addition, the power supply line 122 and the conductor pattern 127
of the wiring layer ML8 are electrically connected to each other
through a via 138 formed in the via layer VL8. Moreover, the
conductor pattern 11 and the conductor pattern of the wiring layer
ML8 are electrically connected to each other through the via 39
formed in the via layer VL8.
[0137] Such a configuration enables electrical connection between
the electrode pad 110 and the circuit element 23. This further
enables the power supply line (VSS) 122 and the power switch
circuit 121 to be electrically connected.
[0138] Moreover, the electrode pad 110 included in the
semiconductor device according to this embodiment includes the
external electrode connection region 111 to be connected to an
external electrode terminal using a bump and wire bonding and the
probing region 112 to be in contact with the probe of the
inspection device. The probing region 112 is a region to be in
contact with the probe of the inspection device, thus larger stress
is imposed on the probing region 112 than the stress imposed on the
external electrode connection region 111.
[0139] In the semiconductor device according to this embodiment,
the interlayer insulating film 115 is formed in the region 113 of
the top wiring layer ML8 among the plurality of wiring layers ML1
to ML8 (i.e., in a region where the probing region 112 of the
electrode pad 110 and the first circuit region 15 overlap in a
planar view of the electrode pad 110). By forming the interlayer
insulating film 115 in the region 113 on the top wiring layer ML8,
it is possible to suppress the characteristics of the power switch
circuit 121 from deteriorating caused by the stress imposed on the
probing region 112. That is, the interlayer insulating film 115
functions as a stress relief layer. As a consequence, the circuit
other than the I/O circuit (i.e., the internal circuit region 3)
can be disposed in the probing region 113 of the electrode pad 110
to efficiently use the region 113, thereby enabling the reduction
in the chip size.
[0140] Moreover, in the semiconductor device according to this
embodiment, the power switch circuit 121 is used to switch the
connection between the ground side power supply line (VSS) 122 and
power supply nodes VSSM (133 and 134) of the wiring layer ML7. The
power supply nodes VSSM (133 and 134) of the wiring layer ML7 are
connected to the VSSM power supply main lines of the wiring layer
ML8 (details are explained later). The VSSM power supply main line
of the wiring layer ML8 is connected to each circuit element of the
internal circuit region 3. Although the configuration is explained
in this example that uses the ground side NMOS switch, the same
advantages can be achieved by a switch for blocking the power side
and a PMOS switch.
[0141] That is, the power supply line (VSS) 122 is connected to the
power switch circuit 121 through the via 138, the conductor pattern
127 of the wiring layer ML8, the vias 129 and 130, the conductor
patterns 131 and 132 of the wiring layer ML7, the wiring layers ML1
to ML6, the via layers VL1 to VL6, and the contact layer CL.
Moreover, the power switch circuit 121 is connected to the
conductor patterns 133 and 134 of the wiring layer ML7 through the
contact layer CL, the wiring layers ML1 to ML6, and the via layers
VL1 to VL6.
[0142] FIGS. 19 and 20 are top views of the semiconductor device
according to this embodiment. FIG. 19 illustrates the positional
relationship between the region 110 where the electrode pads are
formed, the probing region 112, the conductor patterns 126, 127,
and 128 of the wiring layer ML8, and other components are not
shown. Moreover, FIG. 20 is an enlarged view showing the periphery
of the conductor patterns 126, 127, and 128 shown in FIG. 19. FIG.
20 illustrates the positional relationship between the region 110
where the electrode pads are formed, the probing region 112, the
conductor patterns 126, 127, and 128 of the wiring layer ML8, and
the conductor patterns 131, 132, 133, and 134 of the wiring layer
ML7, and other components are not shown. The conductor pattern 126
of the wiring layer ML8 is a VDD power supply main line, the
conductor pattern 127 is a VSS power supply main line, and the
conductor pattern 128 is a VSSM power supply main line.
[0143] As shown in FIG. 19, the conductor pattern 126 (VDD power
supply main line) of the wiring layer ML8, the conductor pattern
127 (VSS power supply main line), and the conductor pattern 128
(VSSM power supply main line) are formed in the internal circuit
region 3 in the horizontal direction of the drawing. In addition,
the conductor patterns 126, 127, and 128 of the wiring layer ML8
are formed not to overlap the probing region 112. Moreover, the
power switch circuit 121 is formed below the electrode pad 110.
[0144] As shown in FIG. 20, the power supply line (VSS) 122 is
connected to the conductor pattern 127 (VSS power supply main line)
of the wiring layer ML8 through the via 138. The conductor pattern
127 (VSS power supply main line) of the wiring layer ML8 is
connected to the conductor patterns 131 and 132 of the wiring layer
ML7 through the vias 129 and 130. Moreover, as shown in FIG. 18,
the conductor patterns 131 and 132 of the wiring layer ML7 are
connected to the power switch circuit 121 through the wiring layers
ML1 to ML6, the via layers VL1 to VL6, and the contact layer CL.
The power switch circuit 121 is connected to the conductor patterns
133 and 134 of the wiring layer ML7 through the contact layer CL,
the wiring layers ML1 to ML6, and the via layers VL1 to VL6.
Moreover, as shown in FIG. 20, the conductor patterns 133 and 134
of the wiring layer ML7 are connected to the conductor pattern 128
(VSSM power supply main line) of the wiring layer ML8 through vias
136.
[0145] A region 114 except for the probing region 112 of the
electrode pad 110 is a region where low stress imposed on the
electrode pad 110. However, when a semiconductor device is mounted,
it is preferable to dispose the circuit elements sensitive to the
stress below the external electrode connection region 111 due to
certain stress imposed on the external electrode connection region
111 of the electrode pad 110.
[0146] In the semiconductor device according to this embodiment,
the power switch circuit that is relatively insusceptible to the
stress is disposed below the external electrode connection region
111. Specifically, in the case of the power switch circuit, only
the influence of the stress on the NMOS transistor alone needs to
be understood, thereby reducing the influence on the circuit
element by the stress imposed on the electrode pad 110.
[0147] The first to fourth embodiments can be combined as desirable
by one of ordinary skill in the art.
[0148] While the invention has been described in terms of several
embodiments, those skilled in the art will recognize that the
invention can be practiced with various modifications within the
spirit and scope of the appended claims and the invention is not
limited to the examples described above.
[0149] Further, the scope of the claims is not limited by the
embodiments described above.
[0150] Furthermore, it is noted that, Applicant's intent is to
encompass equivalents of all claim elements, even if amended later
during prosecution.
* * * * *