U.S. patent application number 14/595128 was filed with the patent office on 2015-06-25 for nano-scale structures.
The applicant listed for this patent is SK hynix Inc.. Invention is credited to Keun Do BAN, Cheol Kyu BOK, Jung Gun HEO, Myoung Soo KIM.
Application Number | 20150179434 14/595128 |
Document ID | / |
Family ID | 53400806 |
Filed Date | 2015-06-25 |
United States Patent
Application |
20150179434 |
Kind Code |
A1 |
BAN; Keun Do ; et
al. |
June 25, 2015 |
NANO-SCALE STRUCTURES
Abstract
A nanoscale structure includes an array of pillars over an
underlying layer, a separation wall layer including first
separation walls formed over sidewalls of the pillars, and a block
co-polymer (BCP) layer formed over the separation wall layer and
filling gaps between the pillars. The BCP layer is phase-separated
to include first domains that provide second separation walls
formed over the first separation walls and second domains that are
separated from each other by the first domains.
Inventors: |
BAN; Keun Do; (Yongin,
KR) ; HEO; Jung Gun; (Icheon, KR) ; BOK; Cheol
Kyu; (Pohang, KR) ; KIM; Myoung Soo;
(Seongnam, KR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
SK hynix Inc. |
Icheon |
|
KR |
|
|
Family ID: |
53400806 |
Appl. No.: |
14/595128 |
Filed: |
January 12, 2015 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
14139502 |
Dec 23, 2013 |
8962491 |
|
|
14595128 |
|
|
|
|
Current U.S.
Class: |
428/179 ;
428/195.1; 428/201 |
Current CPC
Class: |
H01L 21/0337 20130101;
H01L 27/2463 20130101; H01L 45/16 20130101; H01L 27/10817 20130101;
H01L 21/3086 20130101; H01L 21/3088 20130101; Y10T 428/24851
20150115; H01L 21/0271 20130101; H01L 27/10855 20130101; H01L 28/92
20130101; Y10T 428/24802 20150115; H01L 21/3081 20130101; Y10T
428/24669 20150115 |
International
Class: |
H01L 21/027 20060101
H01L021/027 |
Foreign Application Data
Date |
Code |
Application Number |
Jul 25, 2013 |
KR |
10-2013-0088353 |
Claims
1. A nanoscale structure comprising: an array of pillars over an
underlying layer; a separation wall layer including first
separation walls formed over sidewalls of the pillars; and a block
co-polymer (BCP) layer formed over the separation wall layer and
filling gaps between the pillars, wherein the BCP layer is
phase-separated to include first domains that provide second
separation walls formed over the first separation walls and second
domains that are separated from each other by the first
domains.
2. The nanoscale structure of claim 1, wherein the separation wall
layer is disposed to expose top surfaces of the pillars.
3. The nanoscale structure of claim 1, wherein the separation wall
layer extends to cover top surfaces of the pillars.
4. The nanoscale structure of claim 1, wherein the BCP layer
includes a polystyrene-poly(methyl meta acrylate) (PS-PMMA)
co-polymer material or a silicon contained polystyrene-poly(di
methyl siloxane) (Si contained PS-PDMS) co-polymer material.
5. The nanoscale structure of claim 1, wherein the BCP layer is
disposed to expose top surfaces of the pillars.
6. The nanoscale structure of claim 1, wherein each of the second
domains has a post shape.
7. The nanoscale structure of claim 6, wherein each of the first
domains has a `U`-shaped sectional view that covers a sidewall and
a bottom surface of each of the second domains.
8. The nanoscale structure of claim 1, wherein a unit array of the
pillars includes four of the pillars which are respectively located
at four vertex of a tetragon or three of the pillars which are
respectively located at three vertex of a triangle; and wherein
each of the second domains is disposed in a central portion of the
tetragon or the triangle.
9. The nanoscale structure of claim 8, wherein the first domain
fills gaps between the pillars arrayed in a row direction and
between the pillars arrayed in a column direction and extends onto
the underlying layer to provide a recessed space in a central
portion surrounded by the pillars located at four vertex of the
tetragon or at three vertex of the triangle; and wherein the second
domain fills the recessed space which is surrounded by the first
domain,
10. A nanoscale structure comprising: an array of first separation
walls over an underlying layer, each of the first separation walls
having a hollow cylindrical shape; and a block co-polymer (BCP)
layer filling inside regions of the first separation walls and gaps
between the first separation walls, wherein the BCP layer is
phase-separated to include first domains that provide second
separation walls formed over inner sidewalls and outer sidewalls of
the first separation walls and second domains that are separated
from each other by the first domains.
11. The nanoscale structure of claim 10, wherein the BCP layer
includes a polystyrene-poly(methyl meta acrylate) (PS-PMMA)
co-polymer material or a silicon contained polystyrene-poly(di
methyl siloxane) (Si contained PS-PDMS) co-polymer material.
12. The nanoscale structure of claim 10, wherein each of the second
domains has a post shape.
13. The nanoscale structure of claim 12, wherein each of the first
domains has a `U`-shaped sectional view that covers a sidewall and
a bottom surface of each of the second domains.
14. The nanoscale structure of claim 10, wherein a unit array of
the first separation walls includes four of the first separation
walls which are located at four vertex of a tetragon or three of
the first separation walls which are located at three vertex of a
triangle; and wherein the second domains are disposed in a central
portion of the tetragon or the triangle as well as in the first
separation walls.
Description
CROSS-REFERENCES TO RELATED APPLICATIONS
[0001] This application is a continuation-in-part of U.S. patent
application Ser. No. 14/139,502, filed on Dec. 23, 2013, which
claims the priority of Korean Patent Application No.
10-2013-0088353, filed on Jul. 25, 2013 in the Korean Intellectual
Property Office.
BACKGROUND
[0002] 1. Technical Field
[0003] Embodiments of the present disclosure relate to nano-scale
structures, and more particularly, to nano-scale structures used in
fabrication of a semiconductor device having an array of fine
patterns.
[0004] 2. Related Art
[0005] In fabrication of electronic devices such as semiconductor
devices, many efforts have been focused to integrate more patterns
in a limited area of a semiconductor substrate. That is, attempts
to increase the integration density of the electronic devices or
the semiconductor devices have typically resulted in formation of
fine patterns. Various techniques have been proposed to form the
fine patterns such as small contact holes having a nano-scaled
critical dimension (CD), for example, a size of about a few
nanometers to about several tens of nanometers.
[0006] In the event that the fine patterns of the semiconductor
devices are formed using only a photolithography process, there may
be some limitations in forming the fine patterns due to image
resolution limits of lithography apparatuses used in the
photolithography process. Methods of forming the fine patterns
using a self-assembly of polymer molecules may be considered as an
alternative for overcoming the image resolution limits of optical
systems used in the photolithography process and for avoiding
constraints arising from wavelengths of lights generated from light
sources of optical systems used in the photolithography process.
However, the methods of forming the fine patterns using the
self-assembly technique are still under development. Thus, there
may be still some difficulties in forming the fine patterns of
highly integrated semiconductor devices using the self-assembly
technique.
SUMMARY
[0007] Various embodiments are directed to nanoscale structures of
semiconductor devices.
[0008] According to some embodiments, a nanoscale structure
includes an array of pillars over an underlying layer, a separation
wall layer including first separation walls formed over sidewalls
of the pillars, and a block co-polymer (BCP) layer formed over the
separation wall layer and filling gaps between the pillars. The BCP
layer is phase-separated to include first domains that provide
second separation walls formed over the first separation walls and
second domains that are separated from each other by the first
domains.
[0009] According to further embodiments, a nanoscale structure
includes an array of first separation walls over an underlying
layer. Each of the first separation walls having a hollow
cylindrical shape. A block co-polymer (BCP) layer fills inside
regions of the first separation walls and gaps between the first
separation walls. The BCP layer is phase-separated to include first
domains that provide second separation walls formed over inner
sidewalls and outer sidewalls of the first separation walls and
second domains that are separated from each other by the first
domains.
BRIEF DESCRIPTION OF THE DRAWINGS
[0010] Embodiments will become more apparent in view of the
attached drawings and accompanying detailed description.
[0011] FIGS. 1 to 20B are schematic views illustrating a method of
fabricating a semiconductor device according to an embodiment;
[0012] FIGS. 21 to 34B are schematic views illustrating a method of
fabricating a semiconductor device according to another
embodiment;
[0013] FIGS. 35 to 38B are schematic views illustrating a method of
fabricating a semiconductor device according to still another
embodiment;
[0014] FIGS. 39 to 42B are schematic views illustrating a method of
fabricating a semiconductor device according to yet another
embodiment; and
[0015] FIGS. 43 and 44 are cross-sectional views illustrating
examples in which embodiments are applied to fabrication of
semiconductor devices.
DETAILED DESCRIPTION OF THE EMBODIMENTS
[0016] Various embodiments may provide methods of fabricating fine
patterns of semiconductor devices by self-assembling domains of a
block co-polymer (BCP) material. Phase-separated domains of the BCP
material may be spontaneously self-assembled to produce fine
structures in which the domains are repeatedly arrayed. In the
event that fine patterns are formed using a self-assembly of the
domains of the BCP material, the fine patterns may be realized to
have a similar size to a thickness of a single molecular layer. As
a result, the resolution limits of the photolithography process may
be overcome by the self-assembly of the domains of the BCP
material.
[0017] Some embodiments may be used in formation of cell contact
holes for arraying storage nodes comprising cell capacitors of
dynamic random access memory (DRAM) devices. In such a case, the
cell contact holes may be formed to have a uniform size and may be
repeatedly arrayed. That is, the cell contact holes may be formed
to have a uniform size and a uniform shape throughout a cell array
region of the DRAM device. Further, the methods according to some
embodiments may also be applied to formation of cell contact holes
for arraying nano-sized fine nodes disposed in cell array regions
of phase changeable random access memory (PcRAM) devices or
resistive random access memory (ReRAM) devices. In addition, the
methods according to some embodiments may be used in fabrication of
fine patterns which are regularly and repeatedly arrayed in memory
devices such as static random access memory (SRAM) devices, flash
memory devices, magnetic random access memory (MRAM) devices and
ferroelectric random access memory (FeRAM) devices or in logic
devices.
[0018] It will be understood that although the terms first, second,
third etc. may be used herein to describe various elements, these
elements should not be limited by these terms. These terms may only
be used to distinguish one element from another element, rather
than to describe some temporal or other aspect. Thus, a first
element in some embodiments could be termed a second element in
other embodiments without departing from the teachings of the
embodiments. As used herein, the term "and/or" includes any and all
combinations of one or more of the associated listed items.
[0019] It will also be understood that when an element is referred
to as being located "under", "beneath," "below", "lower," "on",
"over", "above," "upper", "side" or "aside" another element, it can
be directly contact the other element, or at least one intervening
element may also be present therebetween. Accordingly, the terms
such as "under", "beneath," "below", "lower," "on", "over",
"above," "upper", "side" "aside" and the like are not intended to
limit the scope of the embodiments.
[0020] FIG. 1 is a plan view illustrating an array of pillars (or
sacrificial pillars) 500, and FIGS. 2A and 2B are cross-sectional
views taken along lines A-A' and B-B' of FIG. 1, respectively
referring to FIGS. 1, 2A, and 2B, the pillars 500 may be arranged
such that four pillars are located at four vertices of a tetragon.
First gaps 501 may be disposed between the pillars 500 adjacent to
each other in a row or in a column, and a second gap 503 may be
disposed between the pillars 500 adjacent to each other in a
diagonal direction. That is, one of the first gaps 501 may be shown
in a cross-sectional view taken along the line A-A' which is
parallel with a row, and the second gap 503 may be shown in a
cross-sectional view taken along the line B-B' which is parallel
with a diagonal direction. Accordingly, a width of the second gap
503 may be greater than that of the first gaps 501. Since the four
pillars 500 are respectively located at four vertex of a tetragon,
the second gap 503 may be disposed in a central region of the
tetragon. Although, in the particular example of FIG. 1 the pillars
500 are located at four vertex of a tetragon, embodiments are not
limited thereto. For example, the pillars 500 may include three
pillars and the three pillars may be located at three vertex of a
triangle.
[0021] The pillars 500 may be formed on an underlying layer 400
disposed over a semiconductor substrate 100. Before forming the
underlying layer 400, an etch target layer 200 and a hard mask
layer 300 may be sequentially formed over the semiconductor
substrate 100.
[0022] The etch target layer 200 may be formed of an interlayer
insulation layer including, e.g., a silicon oxide layer such as a
tetra-ethyl-othor-silicate (TEOS) layer having a thickness of about
2200 angstroms. The etch target layer 200 may be used to insulate
storage node contacts penetrating therethrough from each other. The
storage node contacts may electrically connect storage nodes of
cell capacitors of a DRAM device to the semiconductor substrate 100
or to cell transistors (not shown) formed in the semiconductor
substrate 100. Alternatively, the etch target layer 200 may act as
a mold sacrificial layer for contact holes defining shapes of the
storage nodes of the cell capacitors penetrate. In ReRAM devices,
the etch target layer 200 may be used as an interlayer insulation
layer that underlying electrodes contacting variable resistive
layers penetrate.
[0023] The hard mask layer 300 may be formed to include an
amorphous carbon layer (e.g. having a thickness of about 1500
angstroms). The hard mask layer 300 may be used as an etch mask
layer when the etch target layer 200 is patterned to form contact
holes in a subsequent process. The underlying layer 400 may be
formed on the hard mask layer 300. The underlying layer 400 may be
used as an etch mask layer when the hard mask layer 300 is
patterned in a subsequent process. The underlying layer 400 may be
formed to include a silicon oxynitride (SiON) layer having a
thickness of about 200 angstroms. In some embodiments, an
interfacial layer 410 may be additionally formed between the hard
mask layer 300 and the underlying layer 400, and the interfacial
layer 410 may include a silicon oxide (SiO.sub.x) layer such as an
undoped silicate glass (USG) layer having a thickness of about 200
angstroms. The interfacial layer 410 may correspond to the
underlying layer 400. In such a case, the underlying layer 400 may
include a single layer of silicon oxynitride (SiON) material or
include a combination layer of a SiON layer and a USG layer on the
SiON layer or a combination layer of a USG layer and a SiON layer
on the USG layer.
[0024] A pillar layer for providing the pillars 500 may be formed
on the underlying layer 400 and include a high temperature spin on
carbon (SOC) layer having a thickness of about 800 angstroms. The
pillar layer may be patterned to form an array of the pillars 500.
Specifically, the array of the pillars 500 may be formed by coating
a photoresist layer (not shown) on the pillar layer, patterning the
photoresist layer using a photolithography process to form a
photoresist pattern, and etching the pillar layer using the
photoresist pattern as an etch mask. A bottom anti-reflective
coating (BARC) layer (not shown) having a thickness of about 230
angstroms may be formed between the pillar layer and the
photoresist layer to enhance a resolution of the photolithography
process. An interfacial layer such as an SiON layer having a
thickness of about 300 angstroms may be additionally formed between
the BARC layer and the pillar layer. The pillars 500 may be formed
using a single patterning technology utilizing a photolithography
process. Alternatively, the pillars 500 may be formed using a
spacer patterning technology or a double patterning technology to
obtain a finer pitch size. For example, the pillars 500 may be
formed to have a width (e.g. of about 35 nanometers to about 59
nanometers, for example, about 40 nanometers to about 42
nanometers) using a spacer patterning technology or a double
patterning technology.
[0025] FIG. 3 is a plan view illustrating a step of forming a
separation wall layer 600, and FIGS. 4A and 4B are cross-sectional
views taken along lines A-A' and B-B' of FIG. 3, respectively.
Referring to FIGS. 3, 4a, and 4b, the separation wall layer 600 may
be formed to cover an entire surface of the resultant structure
where the pillars 500 are formed. The separation wall layer 600 may
be formed of an insulation layer having an etch selectivity with
respect to the underlying layer 400. For example, the separation
wall layer 600 may be formed of an ultra low temperature oxide
(ULTO) layer having a thickness of about 200 angstroms. The ULTO
layer may have an excellent step coverage. That is, the ULTO layer
may be deposited to conformally cover sidewalls and top surfaces of
the pillars 500 as well as a surface of the underlying layer 400
exposed between the pillars 500. The separation wall layer 600
deposited on the sidewalls of the pillars 500 will be referred to
as a first separation wall portion 605. The separation wall layer
600 disposed over the pillars 500 will be referred to as a portion
601.
[0026] FIG. 5 is a plan view illustrating a step of forming a block
co-polymer (BCP) layer 700, and FIGS. 6A and 6B are cross-sectional
views taken along lines A-A' and B-B' of FIG. 5, respectively.
Referring to FIGS. 5, 6a, and 6b, the BCP layer 700 may be formed
on the separation wall layer 600 to fill the first and second gaps
(501 and 503 of FIG. 2). The BCP layer 700 may be formed by coating
a polystyrene-poly(methyl meta acrylate) (PS-PMMA) co-polymer
material or a silicon contained polystyrene-poly(di methyl
siloxane) (Si contained PS-PDMS) co-polymer material. The BCP layer
700 may be coated to fill the first and second gaps 501 and 503 and
to the portion 601 of the separation wall layer 600 which is
located on top surfaces of the pillars 500.
[0027] FIG. 7 is a plan view illustrating a step of
phase-separating the BCP layer 700, and FIGS. 8A and 8B
cross-sectional views taken along lines A-A' and B-B' of FIG. 7,
respectively. Referring to FIGS. 7 8a, and 8b, the BCP layer 700
may be annealed and undergo phase separation. As a result, the BCP
layer 700 is separated into first and second domains 710, 730 are
formed.
[0028] The first domain 710 serves as a second separation wall 711
covering the first separation wall portions 605. The second domain
730 is spaced apart from the pillars 500 by the first domain 710.
The first domain 710 may be formed to fill the first gaps 501
between the pillars 500 arrayed in a row or in a column direction.
Further, the second domain 730 may be formed in a central region
surrounded by the four pillars 500 located at four vertex of a
tetragon. In such a case, the first domain 710 may extend to cover
the separation wall layer 600 on a bottom surface of the second gap
503.
[0029] The second domain 730 may be formed to have a post shape.
That is, the BCP layer 700 may be phase-separated such that the
second domain 730 may be surrounded by the first domain 710. The
second domain 730 may be spaced apart from the pillars 500 by the
first domain 710. The pillars 500 may be separated from each other
by the first domain 710.
[0030] The BCP layer 700 may include polystyrene (PS) block
component and poly methylmetaacrylate (PMMA) block component, and a
volume ratio of the PS to the PMMA may be about 7:3.
[0031] Upon phase separation, the first domain 710 may include the
PS as a majority component and the second domain 730 may include
the PMMA as a majority component.
[0032] The BCP layer 700 may be a functional polymer having two or
more distinct structured components that may be combined with each
other by a covalent bond. The two polymer block components
structures may be different from each other in mixing properties
and/or solubility due to a difference in chemical structure. These
differences may provide a possibility that the BCP layer 700 is
phase-separated to form a self-assembled structure.
[0033] Forming a nano structure having a specific shape through a
self-assembly of the BCP layer 700 may be influenced by a physical
property and/or a chemical property of the polymer(s) of the BCP
layer 700. When a BCP layer including two distinct polymer blocks
is self-assembled on a substrate, the self-assembled structure of
the BCP layer may be formed to have a three dimensional cubic
shape, a three dimensional double helix shape, a two dimensional
hexagonal packed column shape, a two dimensional lamella shape, or
another shape, depending on factors such as a volume ratio, an
annealing temperature for phase separation, and/or a molecule size
of the polymer(s) comprising the BCP layer.
[0034] A size of each polymer block in the various self-assembled
structures may be proportional to a molecular weight of the
corresponding polymer block. The separation wall layer 600 may
function as a guide layer inducing a self-assembly of the domains
of the BCP layer 700 in order to align the polymer block(s) of the
BCP layer 700.
[0035] In some embodiments, the BCP layer 700 may include
polybutadiene-polybutylmethacrylate co-polymer,
polybutadiene-polydimethylsiloxane co-polymer,
polybutadiene-polymethylmethacrylate co-polymer,
polybutadienepolyvinylpyridine co-polymer,
polybutylacrylate-polymethylmethacrylate co-polymer,
polybutylacrylate-polyvinylpyridine co-polymer,
polyisoprene-polyvinylpyridine co-polymer,
polyisoprene-polymethylmethacrylate co-polymer,
polyhexylacrylatepolyvinylpyridine co-polymer,
polyisobutylene-polybutylmethacrylate co-polymer,
polyisobutylene-polymethylmethacrylate co-polymer,
polyisobutylene-polybutylmethacrylate co-polymer,
polyisobutylenepolydimethylsiloxane co-polymer,
polybutylmethacrylatepolybutylacrylate co-polymer,
polyethylethylene-polymethylmethacrylate co-polymer,
polystyrene-polybutylmethacrylate co-polymer,
polystyrene-polybutadiene co-polymer, polystyrene-polyisoprene
co-polymer, polystyrene-polydimethylsiloxane co-polymer,
polystyrene-polyvinylpyridine co-polymer,
polyethylethylene-polyvinylpyridine co-polymer,
polyethylene-polyvinylpyridine co-polymer,
polyvinylpyridinepolymethylmethacrylate co-polymer,
polyethyleneoxide-polyisoprene co-polymer,
polyethyleneoxide-polybutadiene co-polymer,
polyethyleneoxide-polystyrene co-polymer,
polyethyleneoxidepolymethylmethacrylate co-polymer,
polyethyleneoxide-polydimethylsiloxane co-polymer, or
polystyrene-polyethyleneoxide co-polymer. In other embodiments, the
BCP layer 700 may include a tri-block co-polymer material having
three distinct polymer blocks.
[0036] In order to rearrange and align the polymer blocks of the
BCP layer 700 through a phase separation of the BCP layer 700, the
BCP layer 700 may be annealed at a temperature exceeding the glass
transition temperature Tg of each of the blocks of the BCP layer
700. For example, the BCP layer 700 may be annealed at a
temperature of about 100 degrees Celsius to about 190 degrees
Celsius for about one hour to about twenty four hours to rearrange
and align the polymer blocks of the BCP layer 700.
[0037] Referring again to FIGS. 7, 8A, and 8B, the pillars 500 may
be formed on the underlying layer 400, and the separation wall
layer 600 may be formed to include the first separation wall
portions 605 on the sidewalls of the pillars 500. Further, the BCP
layer 700 may be formed on the separation wall layer 600 to fill
the first and second gaps 501 and 503 between the pillars 500, and
the BCP layer 700 may be phase-separated to provide the first
domain 710 that corresponds to the second separation wall 711
covering the first separation wall portions 605 and the second
domain 730 that is spaced apart from the pillars 500 by the first
domain 710. The structure illustrated in FIGS. 7, 8A, 8B may be
used in formation of an array of nano-scaled patterns constituting
memory devices or logic devices. In such a case, the memory devices
may include dynamic random access memory (DRAM) devices, static
random access memory (SRAM) devices, flash memory devices, magnetic
random access memory (MRAM) devices, phase changeable random access
memory (PcRAM) devices, resistive random access memory (ReRAM)
devices and ferroelectric random access memory (FeRAM) devices.
[0038] FIG. 9 is a plan view illustrating a step of forming a first
opening 301, and FIGS. 10A and 10B are cross-sectional views taken
along lines A-A' and B-B' of FIG. 9, respectively. Referring to
FIGS. 9, 10A, and 10B, the second domain 730 may be selectively
removed to form the first opening 301. That is, the first opening
301 may be formed by selectively removing the PMMA blocks
constituting the second domain 730. As illustrated in FIGS. 9, 10A
and 10B, a shape of the first opening 301 may be determined by the
first domain 710. That is, the first opening 301 may be formed to
have a hole shape vertically penetrating a portion of the first
domain 710. When the second domain 730 is etched and removed, a
portion of the first domain 710 exposed by the first opening 301
may also be removed to expose an extension portion 603 of the
separation wall layer 600 located below the first opening 301.
[0039] FIG. 11 is a plan view illustrating a step of exposing a
first portion 401 of the underlying layer 400 located below the
first opening 301, and FIGS. 12a and 12b are cross-sectional views
taken along lines A-A' and B-B' of FIG. 11. Referring to FIGS. 11,
12a and 12b, the portions 601 and 603 of the separation wall layer
600 exposed by the first domain 710 may be selectively removed to
expose top surfaces of the pillars 500 and the first portion 401 of
the underlying layer 400 located below the first opening 301. The
portions 601 and 603 of the separation wall layer 600 may be
removed by anisotropically etching the separation wall layer
600.
[0040] After the portions 601 and 603 of the separation wall layer
600 are removed, portions of the separation wall layer 600 may
still remain. For example, portions 615 of the separation wall
layer 600 covered with the first domain 710 in the first gaps 501
and the first separation wall portion 605 of the separation wall
layer 600 covered with the first domain 710 in the second gap 503
may be remained after the portions 601 and 603 of the separation
wall layer 600 are removed. As illustrated in FIGS. 12a and 12b,
each of the portions 615 of the separation wall layer 600 may
remain to have a `U`-shaped sectional view. The first separation
wall portion 605 of the separation wall layer 600 may remain to
have an `L`-shaped sectional view. A top portion of the first
domain 710 may be etched away while the separation wall layer 600
is anisotropically etched to expose the first portion 401 of the
underlying layer 400. However, the most part of the first domain
710 may still remain to provide the second separation wall 711
acting as an etch mask.
[0041] FIG. 13 is a plan view illustrating a step of forming second
openings 305, and FIGS. 14a and 14b are cross-sectional views taken
along lines A-A' and B-B' of FIG. 13. Referring to FIGS. 13, 14a,
and 14b, the pillars 500 may be selectively removed to form second
openings 305 whose shapes are defined by the first separation wall
portion 605 of the separation wall layer 600. The second openings
305 may expose second portions 405 of underlying layer 400. When
the pillars 500 are selectively removed to form the second openings
305, the first separation wall portion 605 and the portions 615 of
the separation wall layer 600 may still exist. Thus, the first
opening 301 and the second openings 305 may be separated from each
other by the first separation wall portion 605 and the portions 615
of the separation wall layer 600. When the pillars 500 are
selectively removed, the first domain 710 including the second
separation wall 711 may also be removed. Alternatively, when the
pillars 500 are selectively removed, the first domain 710 including
the second separation wall 711 may still remain.
[0042] FIG. 15 is a plan view illustrating a step of forming a mask
pattern 409, and FIGS. 16a and 16b cross-sectional views taken
along lines A-A' and B-B' of FIG. 15, respectively. Referring to
FIGS. 15, 16a and 16b, the first portion 401 and the second
portions 405 of the underlying layer 400 may be etched to from the
mask pattern 409. When the first portion 401 and the second
portions 405 of the underlying layer 400 are etched, the first
separation wall portion 605 and the portions 615 of the separation
wall layer 600 may be used as etch masks. Further, when the first
portion 401 and the second portions 405 of the underlying layer 400
are etched to form the mask pattern 409, the interfacial layer 410
may also be etched to have substantially the same shape as the mask
pattern 409 in a plan view. As a result, portions of the hard mask
layer 300 may be exposed by the mask pattern 409 and the etched
interfacial layer 410.
[0043] FIG. 17 is a plan view illustrating a step of forming a hard
mask 310 and contact holes 201, and FIGS. 18a and 18b are
cross-sectional views taken along lines A-A' and B-B' of FIG. 17,
respectively. Referring to FIGS. 17, 18a, and 18b, the portions of
the hard mask layer 300 exposed by the mask pattern (409 of FIGS.
16a and 16b) may be selectively etched and removed to form the hard
mask 310 having the same planar shape as the mask pattern 409. That
is, the hard mask 310 may also be formed to have the first opening
301 and the second openings 305 that expose portions of the etch
target layer 200. The portions of the etch target layer 200 exposed
by the hard mask 310 may be etched and removed to form an etch
target pattern 210 having the contact holes 201. As a result, the
contact holes 201 may be formed to be vertically aligned with the
pillars 500 and the second domain 730. Because the second domain
730 is uniformly formed by a self-assembly of the BCP layer 700,
the contact holes 201 may also be formed to be uniformly spaced
apart from each other. That is, an array of the contact holes 201
may be formed to have a uniform pitch and a uniform size. The
structure including the array of the contact holes 201 may be used
in formation of an array of storage nodes or an array of storage
node contacts of cell capacitors constituting a DRAM device.
Alternatively. the structure including the array of the contact
holes 201 may be used in formation of an array of lower electrodes
contacting variable resistive layers of a PcRAM device or a ReRAM
device.
[0044] FIG. 19 is a plan view illustrating a step of forming an
array of conductive electrodes 800, and FIGS. 20a and 20b are
cross-sectional views taken along lines A-A' and B-B' of FIG. 19,
respectively. Referring to FIGS. 19, 20a, and 20b, a conductive
layer may be formed on the resultant structure illustrated in FIGS.
17, 18a, and 18b to fill the contact holes 201, and the conductive
layer may be planarized until the etch target pattern 210 is
exposed. As a result, the conductive electrodes 800 may be formed
in respective contact holes 201. The conductive electrodes 800 may
be used as storage node contacts or storage nodes of cell
capacitors of a DRAM device. Alternatively, the conductive
electrodes 800 may be used as lower electrodes of a ReRAM device or
a PcRAM device.
[0045] FIG. 21 is a plan view illustrating an array of pillars 1500
and first separation walls 1600, and FIGS. 22a and 22b are
cross-sectional view taken along lines A-A' and B-B' of FIG. 21,
respectively. Referring to FIGS. 21, 22a, and 22b, four pillars
1500 may be disposed at four vertex of a tetragon to constitute an
array of the pillars 1500. In some embodiments, the array of the
pillars 1500 may include three pillars located at three vertex of a
triangle. According to the present embodiments, first gaps 1501 may
be disposed between the pillars 1500 adjacent to each other in a
row or in a column, and a second gap 1503 may be disposed between
the pillars 1500 adjacent to each other in a diagonal direction.
That is, one of the first gaps 1501 may be shown in a
cross-sectional view taken along the line A-A' which is parallel
with a row, and the second gap 1503 may be shown in a
cross-sectional view taken along the line B-B' which is parallel
with a diagonal direction. Since the four pillars 1500 are
respectively located at four vertex of a tetragon, the second gap
1503 may be disposed in a central region of the tetragon. Although,
in FIG. 21, the four pillars 1500 are located at four vertex of a
tetragon, the present embodiment is not limited thereto. For
example, in some embodiments, the pillars 1500 may include three
pillars and the three pillars may be located at three vertex of a
triangle.
[0046] The pillars 1500 may be formed on an underlying layer 1400
disposed on a semiconductor substrate 1100. Before forming the
underlying layer 1400, an etch target layer 1200 and a hard mask
layer 1300 may be sequentially formed on the semiconductor
substrate 1100. The etch target layer 1200 may be formed of an
interlayer insulation layer including a silicon oxide layer such as
a tetra-ethyl-othor-silicate (TEOS) layer having a thickness of
about 2200 angstroms. The hard mask layer 1300 may be formed to
include an amorphous carbon layer having a thickness of about 1500
angstroms. The hard mask layer 1300 may be used as an etch mask
layer when the etch target layer 1200 is patterned to form contact
holes in a subsequent process. The underlying layer 1400 may be
formed on the hard mask layer 1300. The underlying layer 1400 may
be used as an etch mask layer when the hard mask layer 1300 is
patterned in a subsequent process. The underlying layer 1400 may
include a silicon oxynitride (SiON) layer having a thickness of
about 200 angstroms. In some embodiments, the underlying layer 1400
may further include a silicon oxide (SiO.sub.x) layer such as an
undoped silicate glass (USG) layer having a thickness of about 200
angstroms. A pillar layer for providing the pillars 1500 may be
formed on the underlying layer 1400 and include a high temperature
spin on carbon (SOC) layer having a thickness of about 800
angstroms. The pillar layer may be patterned to form the array of
the pillars 1500.
[0047] A separation wall layer may cover the pillars 1500, and the
separation wall layer may be anisotropically etched to form the
first separation walls 1600 having a spacer shape on sidewalls of
the pillars 1500. The first separation walls 1600 may include an
insulation layer having an etch selectivity different from the
underlying layer 1400 and the pillars 1500. For example, the first
separation walls 1600 may be formed by depositing an ultra low
temperature oxide (ULTO) layer having a thickness of about 200
angstroms and by anisotropically etching the ULTO layer until top
surfaces of the pillars 1500 and the underlying layer 1400 below
the first and second gaps 1501 and 1503 are exposed. Since the
first separation walls 1600 are formed to surround the sidewalls of
the pillars 1500, each of the first separation walls 1600 may have
a cylindrical shape.
[0048] FIG. 23 is a plan view illustrating a step of removing the
pillars 1500, and FIGS. 24a and 24b are cross-sectional views taken
along lines A-A' and B-B' of FIG. 23. Referring to FIGS. 23, 24a,
and 24b, the pillars 1500 may be selectively removed to form
openings having a hole shape. As a result, an inside region 1506
surrounded by each first separation wall 1600 and an outside region
(i.e., the first and second gaps 1501 and 1503) of the first
separation walls 1600 may expose portions of the underlying layer
1400.
[0049] FIG. 25 is a plan view illustrating a step of forming a BCP
layer 1700, and FIGS. 26a and 26b are cross-sectional views taken
along lines A-A' and B-B' of FIG. 25. Referring to FIGS. 25, 26a,
and 26b, the BCP layer 1700 may be coated to fill the inside and
outside regions 1506, 1501 and 1503. The BCP layer 1700 may be
formed by coating a polystyrene-poly(methyl meta acrylate)
(PS-PMMA) co-polymer material or a silicon contained
polystyrene-poly(di methyl siloxane) (Si contained PS-PDMS)
co-polymer material.
[0050] FIG. 27 is a plan view illustrating a step of
phase-separating the BCP layer 1700, and FIGS. 28a and 28b are
cross-sectional views taken along lines A-A' and B-B' of FIG. 27,
respectively. Referring to FIGS. 27, 28a, and 28b, the BCP layer
1700 may be annealed and undergo phase-separation into first
domains 1710 and second domains 1730. The first domains 1710
include second separation walls 1711 having a spacer shape and
covering inner sidewalls and outer sidewalls of the first
separation walls 1600. The second domains 1730 are separated from
the first separation walls 1600 by the first domains 1710. The
second domains 1730 may include (i) an outside region 1731 of the
first separation walls 1600, including an inside of the second gap
1503, and (ii) an inside region 1735 of the first separation walls
1600, including the inside regions 1506. The first domains 1710 may
include the second separation walls 1711 covering the inner
sidewalls and the outer sidewalls of the first separation walls
1600 and extension portions 1713 formed over bottoms of regions
1506 and 1503. That is, each of the first domains 1710 may be
formed to have a `U`-shaped sectional view. Meanwhile, the first
gaps 1501 may be filled with the first domain 1710. The second
domains 1730 may be separated from each other by the first
separation walls 1600 and the second separation walls 1711. Each of
the second domains 1730 may have a post shape.
[0051] The BCP layer 1700 may include polystyrene (PS) blocks and
poly-methyl-meta-acrylate (PMMA) blocks, and a volume ratio of the
PS blocks to the PMMA blocks may be about 7:3. The first domains
1710 may be composed of the PS blocks which are phase-separated
from the BCP layer 1700 and the second domains 1730 may be composed
of the PMMA blocks which are phase-separated from the BCP layer
1700.
[0052] Referring again to FIGS. 27, 28a, and 28b, an array of the
first separation walls 1600 may be formed on the underlying layer
1400, and the BCP layer 1700 may be formed to fill the inside
regions 1506 surrounded by the first separation walls 1600 and the
first and second gaps 1501 and 1503. Further, the BCP layer 1700
may be phase-separated to form (i) the first domains 1710 that
include the second separation walls 1711 covering the inner
sidewalls and the outer sidewalls of the first separation walls
1600 and the (ii) second domains 1730 that are spaced apart from
the first separation walls 1600 by the first domains 1710. The
structure illustrated in FIGS. 27, 28a, and 28b may be used in
formation of an array of nano-scaled patterns constituting memory
devices or logic devices. In such a case, the memory devices may
include dynamic random access memory (DRAM) devices, static random
access memory (SRAM) devices, flash memory devices, magnetic random
access memory (MRAM) devices, phase changeable random access memory
(PcRAM) devices, resistive random access memory (ReRAM) devices and
ferroelectric random access memory (FeRAM) devices.
[0053] FIG. 29 is a plan view illustrating a step of forming
openings 1301, and FIGS. 30a and 30b are cross-sectional views
respectively taken along lines A-A' and B-B' of FIG. 29. Referring
to FIGS. 29, 30a, and 30b, the second domain 1730 may be
selectively removed to form the opening 1301 exposing the
underlying layer 1400 in the inside regions 1506 (see FIG. 24) or
exposing the underlying layer 1400 in the second gap 1503 (see FIG.
24). That is, the openings 1301 may be formed by selectively
removing the PMMA blocks constituting the second domain 1730. As
illustrated in FIGS. 29, 30a, and 30b, a shape of the opening 1301
may be defined by the first domains 1710. That is, the opening 1301
may be formed to have a vertical hole shape. When the second
domains 1730 are etched and removed, the extension portions 1713
(see FIG. 28) of the first domains 1710 is exposed by the openings
1301, and then may also be removed to expose portions of the
underlying layer 1400.
[0054] FIG. 31 is a plan view illustrating a step of forming a mask
pattern 1409, and FIGS. 32a and 32b are cross-sectional views
respectively taken along lines A-A' and B-B' of FIG. 31. Referring
to FIGS. 31, 32a, and 32b, the exposed portions of the underlying
layer 1400 may be selectively etched to from the mask pattern 1409.
When the exposed portions of the underlying layer 1400 are etched,
the first separation walls 1600 and the second separation walls
1711 may be used as etch masks. The mask pattern 1409 may expose
portions of the hard mask layer 1300.
[0055] FIG. 33 is a plan view illustrating a step of forming a hard
mask 1310 and contact holes 1201, and FIGS. 34a and 34b are
cross-sectional views respectively taken along lines A-A' and B-B'
of FIG. 33. Referring to FIGS. 33, 34a, and 34b, the hard mask
layer 1300 and the etch target layer 1200 may be etched using the
mask pattern 1409 (see FIG. 32) as an etch mask to form the hard
mask 1310 and an etch target pattern 1210, resulting in contact
holes 1201. Thus, the hard mask 1310 and the etch target pattern
1210 may be formed to have the same planar shape as the mask
pattern 1409. As a result, the contact holes 1201 may be formed to
be vertically with respect to a surface of the semiconductor
substrate 1100.
[0056] FIG. 35 is a plan view illustrating a step of
phase-separating a BCP layer 2700, and FIGS. 36a and 36b are
cross-sectional views respectively taken along lines A-A' and B-B'
of FIG. 36. Referring to FIGS. 35, 36a, and 36b, four pillars 2500
may be disposed at four vertex of a tetragon to constitute an array
of the pillars 2500. In some embodiments, the array of the pillars
2500 may include three pillars located at three vertex of a
triangle. According to the present embodiments, first gaps may be
disposed between two adjacent pillars 2500 in a row or in a column,
and a second gap may be disposed between two adjacent pillars 2500
in a diagonal direction. Since the four pillars 2500 are
respectively located at four vertex of a tetragon, the second gap
may be disposed in a central region of the tetragon. Although the
present embodiment is described in conjunction with an example that
the four pillars 2500 are located at four vertex of a tetragon, the
present embodiment is not limited thereto. For example, in some
embodiments, the pillars 2500 may include three pillars and the
three pillars may be located at three vertex of a triangle.
[0057] The pillars 2500 may be formed on an underlying layer 2400
disposed on a semiconductor substrate 2100. Before forming the
underlying layer 2400, an etch target layer 2200 and a hard mask
layer 2300 may be sequentially formed between the underlying layer
2400 and the semiconductor substrate 2100.
[0058] A separation wall layer may be formed to cover the pillars
2500, and the separation wall layer may be anisotropically etched
to form the first separation walls 2600 having a spacer shape on
sidewalls of the pillars 2500. The first separation walls 2600 may
be formed of an insulation layer having an etch selectivity with
respect to the underlying layer 2400 and the pillars 2500. For
example, the first separation walls 2600 may be formed by
depositing an ultra low temperature oxide (ULTO) layer having a
thickness of about 200 angstroms and by anisotropically etching the
ULTO layer until top surfaces of the pillars 2500 and the
underlying layer 2400 are exposed. Since the first separation walls
2600 are formed to surround the sidewalls of the pillars 2500, each
of the first separation walls 2600 may have a cylindrical
shape.
[0059] A BCP layer 2700 may be formed on the pillars 2500 and the
first separation walls 2600 to fill the first and second gaps
between the pillars 2500. The BCP layer 2700 may be formed by
coating a polystyrene-poly(methyl meta acrylate) (PS-PMMA)
co-polymer material, a polystyrene-poly(di methyl siloxane)
(PS-PDMS) co-polymer material, or a silicon contained
polystyrene-poly(di methyl siloxane) (Si contained PS-PDMS)
co-polymer material. That is, the BCP layer 2700 may be coated to
fill the first and second gaps and to cover top surfaces of the
pillars 2500.
[0060] The BCP layer 2700 may be annealed to be phase-separated
into a first domain 2710 including a second separation wall 2711
covering the first separation walls 2600 and a second domain 2730
separated from the pillars 2500 by the first domain 2710. The first
domain 2710 may be formed to fill the first gaps between the
pillars 2500 disposed in a row or in a column direction. Further,
the first domain 2710 may be formed to have a `U`-shaped sectional
view in the second gap which is located at a central region of the
array of the four pillars 2500. The second domain 2730 may be
formed to fill an inside region of the `U`-shaped first domain
2710. That is, the second domain 2730 may be surrounded by the
`U`-shaped first domain 2710. As illustrated in the plan view of
FIG. 35, the second domain 2730 may be separated from the pillars
2500 by the first domain 2710. Meanwhile, when the BCP layer 2700
is coated to cover the top surfaces of the pillars 2500, the BCP
layer 2700 may be phase-separated to include third domains 2731 on
the pillars 2500. The third domains 2731 may be composed of
substantially the same polymer blocks as the second domain 2730.
Thus, the second and third domains 2730 and 2731 may have a
different phase from the first domain 2710.
[0061] The BCP layer 2700 may include polystyrene (PS) blocks and
poly-di-methyl-siloxane (PDMS) blocks, and a ratio of the PS blocks
to the PDMS blocks may be controlled by a volume ratio of the PS
blocks to the PDMS blocks. The first domain 2710 may be composed of
the PDMS blocks which are phase-separated from the BCP layer 2700.
The second and third domains 2730 and 2731 may be composed of the
PS blocks which are phase-separated from the BCP layer 2700.
[0062] FIG. 37 is a plan view illustrating a step of forming first
and second openings 2307 and 2309, and FIGS. 38a and 38b are
cross-sectional views respectively taken along lines A-A' and B-B'
of FIG. 37. Referring to FIGS. 37, 38a, and 38b, the second domain
2730 may be selectively removed to form the first opening 2307.
When the second domain 2730 is selectively removed, the third
domains 2731 may also be removed to expose the pillars 2500. The
exposed pillars 2500 may then be selectively removed to form the
second openings 2309.
[0063] That is, the first opening 2307 may be formed by selectively
removing the second domain 2730 and the first domain 2710 below the
second domain 2730. The second openings 2309 may be formed by
removing the third domains 2731 and the pillars 2500. As
illustrated in the plan view of FIG. 37, the first opening 2307 may
be defined by a shape of the first domain 2710 and the second
openings 2309 may be defined by shapes of the pillars 2500. The
first and second openings 2307 and 2309 may expose portions of the
underlying layer 2400. The exposed portions of the underlying layer
2400 may be selectively removed to form mask pattern 2409.
Subsequently, although not shown in the drawings, the hard mask
layer 2300 may be etched using the mask pattern 2409 as an etch
mask to form a hard mask, and the etch target layer 2200 may be
etched using the hard mask as an etch mask to form contact holes
penetrating the etch target layer 2200.
[0064] FIG. 39 is a plan view illustrating a step of
phase-separating a BCP layer 3700, and FIGS. 40a and 40b
cross-sectional views respectively taken along lines A-A' and B-B'
of FIG. 39. Referring to FIGS. 39, 40a, and 40b, an array of first
separation walls 3600 may be formed on an underlying layer disposed
on a semiconductor substrate 3100. Each of the first separation
walls 3600 may be formed to have a cylindrical shape. Specifically,
an array of pillars may be formed on the underlying layer. The
array of the pillars may include four pillars located at four
vertex of a tetragon in a plan view. In some embodiments, the array
of the pillars may include three pillars located at three vertex of
a triangle. Before forming the underlying layer, an etch target
layer 3200 and a hard mask layer 3300 may be sequentially formed on
the semiconductor substrate 3100, and the underlying layer may be
formed between the hard mask layer 3300 and the underlying layer. A
separation wall layer may be formed to cover the pillars, and the
separation wall layer may be anisotropically etched to form the
first separation walls 3600 having a spacer shape on sidewalls of
the pillars.
[0065] The first separation walls 3600 may be formed of an
insulation layer having an etch selectivity with respect to the
underlying layer formed of a silicon oxynitride (SiON) layer and
the pillars formed of an SOC layer. For example, the first
separation walls 3600 may be formed by depositing an ultra low
temperature oxide (ULTO) layer having a thickness of about 200
angstroms and by anisotropically etching the ULTO layer until top
surfaces of the pillars and the underlying layer are exposed. Since
the first separation walls 3600 are formed to surround the
sidewalls of the pillars, each of the first separation walls 3600
may have a cylindrical shape. The pillars may be selectively
removed to form openings defined by the first separation walls
3600. Thus, inside regions (i.e., the openings) and outside regions
of the first separation walls 3600 may expose the underlying
layer.
[0066] The BCP layer 3700 may be coated to fill the inside regions
(i.e., the openings) and the outside regions of the first
separation walls 3600. The BCP layer 3700 may be formed by coating
a silicon contained polystyrene-poly(di methyl siloxane) (Si
contained PS-PDMS) co-polymer material. The BCP layer 3700 may be
annealed to be phase-separated into first domains 3710 that
includes second separation walls 3711 having spacer shapes covering
inner and outer sidewalls of the first separation walls 3600 and
second domains 3730 separated from each other by the first domains
3710.
[0067] The second domains 3730 may include (i) the region which is
surrounded by the first domain 3710 and located at a central region
of the array of the first separation walls 3600 and (ii) four
regions each of which is surrounded by the first domains 3710
formed on the inner sidewalls of the first separation walls 3600,
as illustrated in a plan view of FIG. 39. The second domains 3730
may be separated from each other by the first domains 3710 and the
first separation walls 3600. Each of the second domains 3730 may be
formed to have a post (or cylinder) shape, as illustrated in FIGS.
39, 40a, and 40b.
[0068] The BCP layer 3700 may include polystyrene (PS) blocks and
poly-di-methyl-siloxane (PDMS) blocks, and a ratio of the PS blocks
to the PDMS blocks may be controlled by a volume ratio of the PS
blocks to the PDMS blocks. The first domains 3710 may be composed
of the PDMS blocks which are phase-separated from the BCP layer
3700. The second domains 3730 may be composed of the PS blocks
which are phase-separated from the BCP layer 3700.
[0069] FIG. 41 is a plan view illustrating a step of forming
outside and inside openings 3307 and 3309, and FIGS. 42a and 42b
are cross-sectional views respectively taken along lines A-A' and
B-B' of FIG. 41. Referring to FIGS. 41, 42a, and 42b, the second
domains 3730 may be selectively removed to form the outside opening
3307 located at the outside region of the first separation walls
3600 and to form the inside openings 3309 located at the inside
regions of the first separation walls 3600. That is, the openings
3307 and 3309 may be formed by selectively removing the PS blocks
constituting the second domains 3730. As illustrated in the plan
views of FIGS. 39 and 41, the openings 3307 and 3309 may be defined
by the first domains 3710 and may be formed to have hole shapes
penetrating the first domains 3710. The openings 3307 and 3309 may
expose portions of the underlying layer. The exposed portions of
the underlying layer may be selectively removed to form mask
pattern 3409 exposing portions of the hard mask layer 3300.
[0070] Subsequently, although not shown in the drawings, the hard
mask layer 3300 may be etched using the mask pattern 3409 as an
etch mask to form a hard mask, and the etch target layer 3200 may
be etched using the hard mask as an etch mask to form contact holes
penetrating the etch target layer 3200.
[0071] Referring to FIGS. 43 and 44, the methods of fabricating a
semiconductor device according the embodiments may be performed
such that the openings and the contact holes are not formed in a
peripheral region adjacent to a cell array region of the
semiconductor device when the openings and the contact holes
repeatedly arrayed in the cell array region are formed.
[0072] As illustrated in FIG. 43, when an array of the pillars 500
is formed in the cell array region, a peripheral blocking pattern
501 may be formed to cover an entire surface of the peripheral
region adjacent to the cell array region. That is, when an SOC
layer is formed on a semiconductor substrate 300 and the SOC layer
is patterned to form the pillars 500 in the cell array region, the
SOC layer on the peripheral region is not patterned due to the
peripheral blocking pattern 501. Subsequently, a separation wall
layer may be conformally formed, i.e., in a liner type, on an
entire surface of the substrate including the pillars 500 and the
peripheral blocking pattern 501. A BCP layer may be coated on the
separation wall layer to fill spaces between the pillars 500. The
BCP layer may be annealed to be phase-separated into first domains
710, providing second separation walls 711 and second domains (not
shown) in the cell array region. When the BCP layer may be
annealed, a peripheral BCP residue 703 covering the peripheral
blocking pattern 501 may also be phase-separated into a first
peripheral domain 713 and second peripheral domains 733.
Subsequently, the second domains may be selectively removed to form
openings 301 between the pillars 500 in the cell array region. When
the second domains are selectively removed to form the openings
301, no openings are formed in the peripheral region because the
phase-separated peripheral BCP residue 703 is disposed to cover an
entire surface of the peripheral blocking pattern 501. The
separation wall layer may then be anisotropically etched to form
first separation walls 605 in the cell array region.
[0073] If fine patterns such as the openings 301 are formed in both
the cell array region and the peripheral region, an extra mask and
an extra etching process may be required to selectively remove the
fine patterns formed in the peripheral region. In such a case,
openings 301 adjacent to a boundary between the cell array region
and the peripheral region may be damaged to have abnormal shapes
when the openings 301 in the peripheral region are removed using
the extra mask and the extra etching process. However, according to
the embodiments, no openings are formed in the peripheral region
even without use of the extra mask and the extra etching process.
Thus, all the openings 301 in the cell array region may be
uniformly formed in terms of the size.
[0074] As illustrated in FIG. 44, when an array of pillars is
formed in the cell array region, a peripheral blocking pattern (501
of FIG. 43) is not formed in the peripheral region adjacent to the
cell array region. Thus, when first separation walls 1600 are
formed in the cell array region, no first separation wall 1600 is
formed in the peripheral region. In such a case, when a BCP layer
is formed on the substrate including the first separation walls
1600 and the BCP layer is annealed to be phase-separated into first
domains 1710 and second domains (not shown) in the cell array
region, a peripheral BCP residue 1703 on the peripheral region may
also be phase-separated into a first peripheral domain 1713 and
second peripheral domains 1733. Subsequently, the second domains
may be selectively removed to form openings 1301 in the cell array
region. When the second domains are selectively removed to form the
openings 1301, no openings are formed in the peripheral region
because the phase-separated peripheral BCP residue 1703 is disposed
to cover an entire surface of the peripheral region.
[0075] If fine patterns such as the openings 1301 are formed in
both the cell array region and the peripheral region, an extra mask
and an extra etching process may be required to selectively remove
the fine patterns formed in the peripheral region. In such a case,
openings 1301 adjacent to a boundary between the cell array region
and the peripheral region may be damaged to have abnormal shapes
when the openings 1301 in the peripheral region are removed using
the extra mask and the extra etching process. However, according to
the embodiments, no openings are formed in the peripheral region
even without use of the extra mask and the extra etching process.
Thus, all the openings 1301 in the cell array region may be
uniformly formed in terms of the size.
[0076] The present disclosure may also provide various nanoscale
structures including nano-sized patterns. As illustrated in FIGS.
8A and 8B, one of the nanoscale structures may include the
underlying layer 400 and the pillars 500 arrayed on the underlying
layer 400. The nanoscale structure may further include the
separation wall layer 600 that covers sidewalls and top surfaces of
the pillars 500 and extends onto the underlying layer 400 between
the pillars 500.
[0077] The nanoscale structure may further include the BCP layer
that is disposed on the separation wall layer 600 to fill the first
and second gaps between the pillars 500, and the BCP layer may
include the first domain 710 and the second domain 730. The first
domain 710 and the second domain 730 may be two distinct polymer
blocks which are phase-separated by an annealing process. The first
domain 710 may correspond to the second separation wall 711
covering the first separation wall portions 605 (i.e., portions of
the separation wall layer 600) on sidewalls of the pillars 500, and
the second domain 730 may be spaced apart from the pillars 500 by
the first domain 710.
[0078] The BCP layer may include a polystyrene-poly(methyl meta
acrylate) (PS-PMMA) co-polymer material or a silicon contained
polystyrene-poly(di methyl siloxane) (Si contained PS-PDMS)
co-polymer material. The first and second domains 710 and 730 may
fill the first and second gaps 501 and 503 and expose the portions
601 of the separation wall layer 600 which are located on top
surfaces of the pillars 500.
[0079] The nanoscale structure may be configured to include four
pillars 500 which are located at four vertex of a tetragon, as
illustrated in FIG. 7. Alternatively, although not shown in the
drawings, the nanoscale structure may be configured to include
three pillars which are located at three vertex of a triangle. In
either case, the second domain 730 may be disposed in a central
portion of a tetragon defined by the four pillars 500 which are
located at four vertex of the tetragon or a central portion of a
triangle defined by the three pillars 500 which are located at
three vertex of the triangle.
[0080] As illustrated in FIGS. 28A and 28B, another one of the
nanoscale structures may include the underlying layer 1400 and an
array of the first separation walls 1600 disposed on the underlying
layer 1400. Each of the first separation walls 1600 may have a
hollow cylindrical shape. The nanoscale structure illustrated in
FIGS. 28A and 28B may further include the first domains 1710 and
the second domains 1730 which are provided by annealing the BCP
layer 1700 that fills the inside regions 1506 surrounded by the
first separation walls 1600 and the first and second gaps 1501 and
1503 between the first separation walls 1600.
[0081] Each of the first domains 1710 and each of the second
domains 1730 may be two distinct polymer blocks which are
phase-separated by an annealing process. The first domains 1710 may
include the second separation walls 1711 covering the inner
sidewalls and the outer sidewalls of the first separation walls
1600, and the second domains 1730 may be spaced apart from the
first separation walls 1600 by the first domains 1710. Each of the
second domains 1730 may have a post shape, and each of the first
domains 1710 may have a `U`-shaped sectional view that covers a
sidewall and a bottom surface of each of the second domains
1730.
[0082] A unit array of the first separation walls 1600 may include
four of the first separation walls 1600 which are located at four
vertex of a tetragon, as illustrated in FIG. 27. Alternatively,
although not shown in the drawings, a unit array of the first
separation walls 1600 may include three of the first separation
walls 1600 which are located at three vertex of a triangle. In
either case, the second domains 1730 may be disposed in a central
portion of a tetragon or a triangle defined by four or three of the
first separation walls 1600 constituting the unit array of the
first separation walls 1600 as well as in the first separation
walls 1600.
[0083] The nanoscale structures described above may provide a hard
mask or an etch mask that protects predetermined portions of an
etch target layer in a patterning process or an etch process for
forming fine patterns. The fine patterns may be used as components
of a semiconductor device.
[0084] The methods of fabricating a semiconductor device according
to the embodiments may be used in formation of an array of contact
holes having a pitch size of about 38 nanometers or less. In
addition, according to the embodiments, the contact holes may be
uniformly formed without any deformation of the contact holes.
[0085] According to the embodiments described above, nano-sized
structures or nano structures may be readily fabricated by forming
a block co-polymer (BCP) layer on a large-sized substrate. The nano
structures may be used in fabrication of polarizing plates or in
formation of reflective lens of reflective liquid crystal display
(LCD) units. The nano structures may also be used in fabrication of
separate polarizing plates as well as in formation of polarizing
parts including display panels. For example, the nano structures
may be used in fabrication of array substrates including thin film
transistors or in processes for directly forming the polarizing
parts on color filter substrates. Further, the nano structures may
be used in molding processes for fabricating nanowire transistors
or memories, electronic/electric components for patterning
nano-scaled interconnections, catalysts of solar cells and fuel
cells, etch masks, organic light emitting diodes (OLEDs), and gas
sensors.
[0086] The methods according to the aforementioned embodiments and
structures formed thereby may be used in fabrication of integrated
circuit (IC) chips. The IC chips may be supplied to users in a raw
wafer form, in a bare die form, or in a package form. The IC chips
may also be supplied in a single package form or in a multi-chip
package form. The IC chips may be integrated in intermediate
products such as mother boards or end products to constitute signal
processing devices. The end products may include toys, low end
application products, or high end application products such as
computers. For example, the end products may include display units,
keyboards, or central processing units (CPUs).
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