Patent | Date |
---|
Substrate Surface Modifier For Atomic Layer Deposition And Method For Modifying Surface Of Substrate Using The Same App 20220259722 - KIM; Tae Wook ;   et al. | 2022-08-18 |
Nano-scale structures Grant 10,504,726 - Ban , et al. Dec | 2019-12-10 |
Methods of forming fine patterns Grant 9,911,605 - Heo , et al. March 6, 2 | 2018-03-06 |
Fine pattern structures having block co-polymer materials Grant 9,840,059 - Lee , et al. December 12, 2 | 2017-12-12 |
Nano-scale Structures App 20170287702 - BAN; Keun Do ;   et al. | 2017-10-05 |
Methods Of Forming Fine Patterns App 20170271149 - HEO; Jung Gun ;   et al. | 2017-09-21 |
Methods of forming different sized patterns Grant 9,691,614 - Ban , et al. June 27, 2 | 2017-06-27 |
Methods of forming patterns Grant 9,666,448 - Ban , et al. May 30, 2 | 2017-05-30 |
Methods of forming patterns with block copolymer Grant 9,640,399 - Heo , et al. May 2, 2 | 2017-05-02 |
Methods of forming patterns Grant 9,523,917 - Ban , et al. December 20, 2 | 2016-12-20 |
Methods Of Forming Different Sized Patterns App 20160358771 - BAN; Keun Do ;   et al. | 2016-12-08 |
Methods for forming patterns in honeycomb array Grant 9,478,436 - Ban , et al. October 25, 2 | 2016-10-25 |
Methods Of Forming Patterns App 20160293442 - BAN; Keun Do ;   et al. | 2016-10-06 |
Methods Of Forming Different Sized Patterns App 20160293443 - BAN; Keun Do ;   et al. | 2016-10-06 |
Methods of forming different sized patterns Grant 9,449,840 - Ban , et al. September 20, 2 | 2016-09-20 |
Methods Of Forming Patterns With Block Copolymer App 20160254154 - HEO; Jung Gun ;   et al. | 2016-09-01 |
Methods Of Forming Patterns App 20160238938 - BAN; Keun Do ;   et al. | 2016-08-18 |
Methods of forming patterns Grant 9,354,519 - Ban , et al. May 31, 2 | 2016-05-31 |
Methods Of Forming Patterns App 20160077435 - BAN; Keun Do ;   et al. | 2016-03-17 |
Methods of fabricating a pattern using the block co-polymer materials Grant 9,257,281 - Ban , et al. February 9, 2 | 2016-02-09 |
Methods of fabricating interconnection structures Grant 9,245,796 - Ban , et al. January 26, 2 | 2016-01-26 |
Method for manufacturing a semiconductor device Grant 9,218,984 - Lee , et al. December 22, 2 | 2015-12-22 |
Methods of fabricating interconnection structures Grant 9,202,744 - Ban , et al. December 1, 2 | 2015-12-01 |
Methods of fabricating fine patterns Grant 9,190,274 - Ban , et al. November 17, 2 | 2015-11-17 |
Fine pattern structures having block co-polymer materials Grant 9,165,769 - Ban , et al. October 20, 2 | 2015-10-20 |
Fine Pattern Structures Having Block Co-polymer Materials App 20150273790 - LEE; Jung Hyung ;   et al. | 2015-10-01 |
Fine Pattern Structures Having Block Co-polymer Materials App 20150279661 - BAN; Keun Do ;   et al. | 2015-10-01 |
Methods Of Fabricating A Pattern Using The Block Co-polymer Materials App 20150228475 - BAN; Keun Do ;   et al. | 2015-08-13 |
Fine pattern structures having block co-polymer materials and methods of fabricating the same Grant 9,086,632 - Lee , et al. July 21, 2 | 2015-07-21 |
Fine pattern structures having block co-polymer materials Grant 9,082,718 - Ban , et al. July 14, 2 | 2015-07-14 |
Nano-scale Structures App 20150179434 - BAN; Keun Do ;   et al. | 2015-06-25 |
Fine Pattern Structures Having Block Co-polymer Materials And Methods Of Fabricating The Same App 20150153649 - LEE; Jung Hyung ;   et al. | 2015-06-04 |
Fine Pattern Structures Having Block Co-polymer Materials App 20150155180 - BAN; Keun Do ;   et al. | 2015-06-04 |
Method for forming fine pattern of semiconductor device using double spacer patterning technology Grant 8,999,848 - Lee , et al. April 7, 2 | 2015-04-07 |
Methods of fabricating nano-scale structures and nano-scale structures fabricated thereby Grant 8,999,862 - Ban , et al. April 7, 2 | 2015-04-07 |
Methods of fabricating semiconductor devices and semiconductor devices fabricated thereby Grant 8,962,491 - Ban , et al. February 24, 2 | 2015-02-24 |
Methods Of Fabricating Fine Patterns App 20150031210 - BAN; Keun Do ;   et al. | 2015-01-29 |
Methods Of Fabricating Semiconductor Devices And Semiconductor Devices Fabricated Thereby App 20150031185 - BAN; Keun Do ;   et al. | 2015-01-29 |
Method For Manufacturing A Semiconductor Device App 20140206194 - Lee; Ki Lyoung ;   et al. | 2014-07-24 |
Method for manufacturing a semiconductor device Grant 8,685,627 - Lee , et al. April 1, 2 | 2014-04-01 |
Method For Forming Fine Pattern Of Semiconductor Device Using Double Spacer Patterning Technology App 20140017889 - LEE; Ki Lyoung ;   et al. | 2014-01-16 |
Method of manufacturing semiconductor device Grant 8,481,429 - Kim , et al. July 9, 2 | 2013-07-09 |
Method Of Manufacturing Semiconductor Device App 20120289051 - KIM; Jae Heon ;   et al. | 2012-11-15 |
Method for fabricating semiconductor device Grant 8,304,174 - Lee , et al. November 6, 2 | 2012-11-06 |
Method for forming pattern of semiconductor device Grant 8,202,683 - Lee , et al. June 19, 2 | 2012-06-19 |
Method For Forming Contact Hole Of Semiconductor Device App 20120009523 - LEE; Sung-Kwon ;   et al. | 2012-01-12 |
Method For Forming Semiconductor Device App 20110256723 - LEE; Ki Lyoung ;   et al. | 2011-10-20 |
Method for manufacturing semiconductor device Grant 8,003,540 - Bok August 23, 2 | 2011-08-23 |
Method for forming fine pattern of semiconductor device Grant 7,989,145 - Lee , et al. August 2, 2 | 2011-08-02 |
Method for forming fine pattern of semiconductor device Grant 7,972,766 - Bok July 5, 2 | 2011-07-05 |
Method for manufacturing semiconductor device using immersion lithography process Grant 7,910,291 - Bok , et al. March 22, 2 | 2011-03-22 |
Method for manufacturing a semiconductor device Grant 7,838,201 - Jung , et al. November 23, 2 | 2010-11-23 |
Method For Forming Pattern Of Semiconductor Device App 20100248153 - Lee; Ki Lyoung ;   et al. | 2010-09-30 |
Semiconductor device and method for forming pattern in the same Grant 7,776,747 - Ban , et al. August 17, 2 | 2010-08-17 |
Forming fine pattern of semiconductor device using three mask layers and CMP of spin-on carbon layer Grant 7,615,497 - Bok , et al. November 10, 2 | 2009-11-10 |
Method for forming fine pattern of semiconductor device Grant 7,576,009 - Lee , et al. August 18, 2 | 2009-08-18 |
Method for Manufacturing a Semiconductor Device App 20090191709 - Jung; Jae Chang ;   et al. | 2009-07-30 |
Method For Fabricating Semiconductor Device App 20090170035 - LEE; Ki Lyoung ;   et al. | 2009-07-02 |
Method for Manufacturing Semiconductor Device Including Vertical Transistor App 20090170322 - Bok; Cheol Kyu | 2009-07-02 |
Method For Forming Pattern Of Semiconductor Device App 20090170336 - Ban; Keun Do ;   et al. | 2009-07-02 |
Method For Manufacturing A Semiconductor Device App 20090162795 - LEE; Ki Lyoung ;   et al. | 2009-06-25 |
Method for manufacturing semiconductor device Grant 7,550,362 - Ban , et al. June 23, 2 | 2009-06-23 |
Semiconductor device and method for forming pattern in the same Grant 7,550,384 - Ban , et al. June 23, 2 | 2009-06-23 |
Polymer for immersion lithography and photoresist composition Grant 7,534,548 - Jung , et al. May 19, 2 | 2009-05-19 |
Method for forming fine pattern of semiconductor device Grant 7,494,935 - Jung , et al. February 24, 2 | 2009-02-24 |
Method for Forming Fine Pattern of Semiconductor Device App 20090004603 - Bok; Cheol Kyu | 2009-01-01 |
Method For Forming Fine Pattern Of Semiconductor Device App 20090004604 - LEE; Ki Lyoung ;   et al. | 2009-01-01 |
Method for forming a photoresist pattern Grant 7,467,632 - Lee , et al. December 23, 2 | 2008-12-23 |
Method For Forming Fine Pattern Of Semiconductor Device App 20080305642 - Lee; Ki Lyoung ;   et al. | 2008-12-11 |
Top anti-reflective coating polymer, its preparation method and top anti-reflective coating composition comprising the same Grant 7,462,439 - Jung , et al. December 9, 2 | 2008-12-09 |
Method for Forming Fine Pattern of Semiconductor Device App 20080272467 - Bok; Cheol Kyu ;   et al. | 2008-11-06 |
Top anti-reflective coating composition, method for forming the pattern of a semiconductor device using the same, and semiconductor device comprising the pattern Grant 7,419,760 - Jung , et al. September 2, 2 | 2008-09-02 |
Method For Manufacturing Semiconductor Device App 20080160770 - BOK; Cheol Kyu | 2008-07-03 |
Semiconductor Device And Method For Forming Pattern In The Same App 20080160763 - Ban; Keun Do ;   et al. | 2008-07-03 |
Semiconductor Device And Method For Forming Pattern In The Same App 20080160767 - Ban; Keun Do ;   et al. | 2008-07-03 |
Method for forming fine pattern of semiconductor device App 20080153300 - Bok; Cheol Kyu | 2008-06-26 |
Top anti-reflective coating polymer, its preparation method and top anti-reflective coating composition comprising the same Grant 7,381,519 - Jung , et al. June 3, 2 | 2008-06-03 |
Method For Forming Fine Pattern Of Semiconductor Device App 20080063985 - JUNG; Jae Chang ;   et al. | 2008-03-13 |
Photoacid generating polymer, its preparation method, top anti-reflective coating composition comprising the same, method of forming a pattern in a semiconductor device, and semiconductor device Grant 7,303,858 - Jung , et al. December 4, 2 | 2007-12-04 |
Method for manufacturing semiconductor device using immersion lithography process App 20070264593 - Bok; Cheol Kyu ;   et al. | 2007-11-15 |
Top anti-reflective coating composition and method for pattern formation of semiconductor device using the same Grant 7,288,364 - Jung , et al. October 30, 2 | 2007-10-30 |
Method for forming a photoresist pattern App 20070163625 - Lee; Geun Su ;   et al. | 2007-07-19 |
Method for manufacturing semiconductor device App 20070155114 - Ban; Keun Do ;   et al. | 2007-07-05 |
Cleaning solution for photoresist and method for forming pattern using the same Grant 7,238,653 - Lee , et al. July 3, 2 | 2007-07-03 |
Method for forming patterns in a semiconductor device Grant 7,220,679 - Lee , et al. May 22, 2 | 2007-05-22 |
Cross-linking polymer for organic anti-reflective coating, organic anti-reflective coating composition comprising the same and method for forming photoresist pattern using the same Grant 7,205,089 - Jung , et al. April 17, 2 | 2007-04-17 |
Organic anti-reflective coating polymer, its preparation method and organic anti-reflective coating composition comprising the same Grant 7,198,887 - Lee , et al. April 3, 2 | 2007-04-03 |
Method for manufacturing semiconductor device using immersion lithography process App 20070042298 - Jung; Jae Chang ;   et al. | 2007-02-22 |
Top anti-reflective coating polymer, its preparation method and top anti-reflective coating composition comprising the same App 20070003861 - Jung; Jae Chang ;   et al. | 2007-01-04 |
Polymer for immersion lithography, photoresist composition containing the same, method of manufacturing a semiconductor device, and semiconductor device App 20060275695 - Jung; Jae Chang ;   et al. | 2006-12-07 |
Method for preparing semiconductor device App 20060246382 - Lee; Geun Su ;   et al. | 2006-11-02 |
Semiconductor memory device and method for fabricating the same Grant 7,112,840 - Kim , et al. September 26, 2 | 2006-09-26 |
Semiconductor memory device and method for fabricating the same App 20060134861 - Kim; Seo-Min ;   et al. | 2006-06-22 |
Top anti-reflective coating polymer, its preparation method and top anti-reflective coating composition comprising the same App 20060127803 - Jung; Jae Chang ;   et al. | 2006-06-15 |
Photoacid generating polymer, its preparation method and top anti-reflective coating composition comprising the same App 20060127804 - Jung; Jae Chang ;   et al. | 2006-06-15 |
Photoresist polymer and photoresist composition containing the same Grant 7,022,458 - Lee , et al. April 4, 2 | 2006-04-04 |
Top anti-reflective coating composition and method for forming the pattern of a semiconductor device using the same App 20060063104 - Jung; Jae Chang ;   et al. | 2006-03-23 |
Semiconductor memory device and method for fabricating the same Grant 7,012,002 - Kim , et al. March 14, 2 | 2006-03-14 |
Top anti-reflective coating composition and method for pattern formation of semiconductor device using the same App 20060046184 - Jung; Jae Chang ;   et al. | 2006-03-02 |
Photoresist cleaning solutions and methods for pattern formation using the same App 20050153855 - Lee, Geun Su ;   et al. | 2005-07-14 |
Overcoating composition for photoresist and method for forming photoresist pattern using the same Grant 6,916,594 - Bok , et al. July 12, 2 | 2005-07-12 |
Cross-linking polymer for organic anti-reflective coating, organic anti-reflective coating composition comprising the same and method for forming photoresist pattern using the same App 20050142481 - Jung, Jae-chang ;   et al. | 2005-06-30 |
ArF photoresist copolymers Grant 6,866,984 - Jung , et al. March 15, 2 | 2005-03-15 |
Photoresist polymer and photoresist composition containing the same App 20050026070 - Lee, Geun Su ;   et al. | 2005-02-03 |
Organic anti-reflective coating polymer, its preparation method and organic anti-reflective coating composition comprising the same App 20050014089 - Lee, Geun-soo ;   et al. | 2005-01-20 |
ArF photoresist copolymers Grant 6,808,859 - Jung , et al. October 26, 2 | 2004-10-26 |
Cleaning solution for photoresist and method for forming pattern using the same App 20040180293 - Lee, Geun Su ;   et al. | 2004-09-16 |
Semiconductor memory device and method for fabricating the same App 20040157388 - Kim, Seo-Min ;   et al. | 2004-08-12 |
Overcoating composition for photoresist and method for forming photoresist pattern using the same App 20040142279 - Bok, Cheol Kyu ;   et al. | 2004-07-22 |
Novel ArF photoresist copolymers App 20040131968 - Jung, Jae Chang ;   et al. | 2004-07-08 |
Method for forming patterns in a semiconductor device App 20040067655 - Lee, Sung-Koo ;   et al. | 2004-04-08 |
Method for forming patterns of a semiconductor device App 20040014322 - Hwang, Young-Sun ;   et al. | 2004-01-22 |
Polymer-containing photoresist, and process for manufacturing the same Grant 6,632,903 - Jung , et al. October 14, 2 | 2003-10-14 |
Copolymer resin, preparation thereof, and photoresist using the same Grant 6,608,158 - Jung , et al. August 19, 2 | 2003-08-19 |
Method and forming fine patterns of semiconductor devices using passivation layers Grant 6,599,844 - Koh , et al. July 29, 2 | 2003-07-29 |
Methods for forming a capacitor of a semiconductor device App 20020197817 - Bok, Cheol Kyu ;   et al. | 2002-12-26 |
Copolymer resin, preparation thereof, and photoresist using the same App 20020068803 - Jung, Min Ho ;   et al. | 2002-06-06 |
Copolymer resin, preparation thereof, and photoresist using the same Grant 6,369,181 - Jung , et al. April 9, 2 | 2002-04-09 |
Multi-oxygen containing compound for preventing acid diffusion, and photoresist composition containing the same App 20020015917 - Lee, Geun Su ;   et al. | 2002-02-07 |
Method and forming fine patterns of semiconductor devices using passivation layers App 20020006585 - Koh, Cha-Won ;   et al. | 2002-01-17 |
Semiconductor device using polymer-containing photoresist, and process for manufacturing the same App 20010053834 - Jung, Min Ho ;   et al. | 2001-12-20 |
Polymer and a forming method of a micro pattern using the same Grant 6,316,162 - Jung , et al. November 13, 2 | 2001-11-13 |
Semiconductor device using polymer-containing photoresist, and process for manufacturing the same Grant 6,312,865 - Jung , et al. November 6, 2 | 2001-11-06 |
Photoresist polymers of carboxyl-containing alicyclic compounds Grant 6,265,130 - Lee , et al. July 24, 2 | 2001-07-24 |
Photoresist monomers, polymers thereof, and photoresist compositions containing the same Grant 6,235,448 - Lee , et al. May 22, 2 | 2001-05-22 |
Polymer and a forming method of a micro pattern using the same Grant 6,225,020 - Jung , et al. May 1, 2 | 2001-05-01 |
Maleimide or alicyclic olefin-based monomers, copolymer resin of these monomers and photoresist using the resin Grant 6,165,672 - Jung , et al. December 26, 2 | 2000-12-26 |
Method and photoresist using a photoresist copolymer Grant 6,143,463 - Jung , et al. November 7, 2 | 2000-11-07 |
ArF photoresist copolymers Grant 6,132,926 - Jung , et al. October 17, 2 | 2000-10-17 |
Copolymer for photoresist Grant 6,063,896 - Jung , et al. May 16, 2 | 2000-05-16 |
Photoresist film for deep ultra violet and method for forming photoresist film pattern using the same Grant 5,888,698 - Koh , et al. March 30, 1 | 1999-03-30 |