U.S. patent application number 14/567085 was filed with the patent office on 2015-06-04 for soldering a semiconductor device and a substrate based on oscillating frequencies.
The applicant listed for this patent is International Business Machines Corporation. Invention is credited to Julien Sylvestre.
Application Number | 20150156889 14/567085 |
Document ID | / |
Family ID | 46636127 |
Filed Date | 2015-06-04 |
United States Patent
Application |
20150156889 |
Kind Code |
A1 |
Sylvestre; Julien |
June 4, 2015 |
SOLDERING A SEMICONDUCTOR DEVICE AND A SUBSTRATE BASED ON
OSCILLATING FREQUENCIES
Abstract
A method includes applying solder to conductive pads of a
semiconductor device, applying solder to conductive pads of a
substrate, aligning the solder on the semiconductor device with the
solder on the substrate such that portions of the solder on the
semiconductor device contact corresponding portions of the solder
on the substrate, heating the semiconductor device and the
substrate to liquefy the solder, and exerting an oscillating force
operative to oscillate the semiconductor device relative to the
substrate at a frequency.
Inventors: |
Sylvestre; Julien; (Chambly,
CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
International Business Machines Corporation |
Armonk |
NY |
US |
|
|
Family ID: |
46636127 |
Appl. No.: |
14/567085 |
Filed: |
December 11, 2014 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
13027375 |
Feb 15, 2011 |
8939346 |
|
|
14567085 |
|
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Current U.S.
Class: |
228/18 |
Current CPC
Class: |
H01L 24/16 20130101;
H01L 2224/75272 20130101; H01L 2224/759 20130101; H05K 3/341
20130101; H01L 24/74 20130101; H01L 2224/81169 20130101; H01L 24/81
20130101; H01L 2224/16225 20130101; H01L 24/75 20130101; H01L
2224/81193 20130101; H01L 2924/12042 20130101; B23K 3/04 20130101;
B23K 1/0016 20130101; B23K 1/008 20130101; B23K 1/06 20130101; B23K
3/08 20130101; H01L 2224/81024 20130101; H01L 2224/75702 20130101;
H01L 2224/75841 20130101; H01L 2224/75252 20130101; H01L 24/13
20130101; H01L 2224/75801 20130101; H01L 2224/75841 20130101; H01L
2924/00012 20130101; H01L 2924/00 20130101; H01L 2224/81149
20130101; B23K 31/02 20130101; H01L 2924/12042 20130101; H01L
2224/16227 20130101; H01L 2224/1416 20130101; H01L 2224/75701
20130101; H01L 2224/75801 20130101; H01L 2924/00012 20130101 |
International
Class: |
H05K 3/34 20060101
H05K003/34; B23K 1/00 20060101 B23K001/00; B23K 3/04 20060101
B23K003/04; B23K 31/02 20060101 B23K031/02; B23K 3/08 20060101
B23K003/08; H01L 23/00 20060101 H01L023/00; B23K 1/008 20060101
B23K001/008 |
Claims
1. A system comprising: a heating device operative to heat a
semiconductor device and substrate to a melting point temperature
for a solder material formed on the semiconductor device and the
substrate; and a vibration device operative to induce an
oscillating relative motion between the semiconductor device and
the substrate at a frequency while the semiconductor device and the
substrate are disposed in the heating device.
2. The system of claim 1, wherein the heating device includes an
oven.
3. The system of claim 1, wherein the vibration device includes a
piezoelectric device.
4. The system of claim 1, wherein the vibration device includes a
sonic device.
5. The system of claim 1, wherein the vibration device includes a
radiation emitting device.
6. The system of claim 1, wherein the vibration device is operative
to impart a force on the substrate.
7. The system of claim 1, wherein the vibration device is operative
to impart a force on the semiconductor device.
8. The system of claim 7, wherein the force exerted on the
semiconductor device includes an oscillation force over a band of
frequencies estimated based on a number of solder portions of the
solder material and the mass of the semiconductor device.
9. The system of claim 1, wherein the frequency is based on a
number of solder portions of the solder material and a mass of the
semiconductor device.
10. The system of claim 9, wherein the frequency is based on a
spring constant of the solder portions arranged on the conductive
pads of the substrate that have liquefied and divided by the mass
of the semiconductor device.
11. The system of claim 10, wherein the frequency is estimated to
be a resonance frequency over a frequency band of 900 Hz to 950
Hz.
12. The system of claim 1, wherein the frequency is an estimated
resonance frequency of the motion of the semiconductor device
relative to the substrate.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a Divisional of U.S. Non-Provisional
Application Ser. No. 13/027,375, entitled "METHODS AND SYSTEMS
INVOLVING SOLDERING", filed Feb. 15, 2011, which is incorporated
herein by reference in its entirety.
BACKGROUND
[0002] The present invention relates to fabricating electronic
devices, and more specifically, to methods for making electrical
connections in electronic devices.
[0003] Electronic devices such as, semiconductor devices often
include a number of connective contact regions or pads that are
used to power the device and input and output electrical signals.
The electronic device may be mounted to a substrate having
corresponding pads and conductive connections that facilitate
external connections to the device. For example, a semiconductor
device may include thousands of input, output, power and ground
pads that are arranged in close proximity. The scale and proximity
of the pads add complexity to connecting wires or other types of
connectors directly to the semiconductor device. A substrate may be
fabricated having a corresponding arrangement of pads that are
connected to the pads of the semiconductor with conductive solder.
The substrate includes conductive lines that connect the pads of
the semiconductor device to contact regions that more easily
facilitate external connections to the substrate.
BRIEF SUMMARY
[0004] According to one embodiment of the present invention, a
method includes applying solder to conductive pads of a
semiconductor device, applying solder to conductive pads of a
substrate, aligning the solder on the semiconductor device with the
solder on the substrate such that portions of the solder on the
semiconductor device contact corresponding portions of the solder
on the substrate, heating the semiconductor device and the
substrate to liquefy the solder, and exerting an oscillating force
operative to oscillate the semiconductor device relative to the
substrate at a frequency.
[0005] According to another embodiment of the present invention
method includes applying solder to a plurality of conductive pads
of a semiconductor device, applying solder to plurality of
conductive pads of a substrate, wherein each conductive pad of the
plurality of conductive pads of the substrate corresponds to a
conductive pad of the plurality of conductive pads of the
semiconductor device, aligning the solder on the semiconductor
device with the solder on the substrate such that portions of the
solder on the semiconductor device contact corresponding portions
of the solder on the substrate to form an arrangement of the
semiconductor device and the substrate, heating the semiconductor
device and the substrate to liquefy the solder forming a conductive
bond between at least one of the solder on the semiconductor device
and at least one of the solder on the substrate, exerting an
oscillating force on the arrangement to result in a relative motion
between the semiconductor device and the substrate, and forming a
conductive bond between at least one of the solder on the
semiconductor device and at least one of the solder on the
substrate responsive to exerting the oscillating force.
[0006] According to another embodiment of the present invention a
system includes a heating device operative to heat a semiconductor
device and substrate to a melting point temperature for a solder
material formed on the semiconductor device and the substrate, and
a vibration device operative to induce an oscillating relative
motion between the semiconductor device and the substrate at a
frequency while the semiconductor device and the substrate are
disposed in the heating device.
[0007] Additional features and advantages are realized through the
techniques of the present invention. Other embodiments and aspects
of the invention are described in detail herein and are considered
a part of the claimed invention. For a better understanding of the
invention with the advantages and the features, refer to the
description and to the drawings.
BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS
[0008] The subject matter which is regarded as the invention is
particularly pointed out and distinctly claimed in the claims at
the conclusion of the specification. The forgoing and other
features, and advantages of the invention are apparent from the
following detailed description taken in conjunction with the
accompanying drawings in which:
[0009] FIGS. 1A and 1B illustrate top views of exemplary
embodiments of a semiconductor device and a substrate.
[0010] FIG. 2 illustrates a side view of the semiconductor device
and the substrate of FIG. 1.
[0011] FIG. 3 illustrates a side view of the semiconductor device
and the substrate where the semiconductor device has been aligned
and disposed on the substrate.
[0012] FIG. 4 illustrates a partial view of the region 4 of FIG.
3.
[0013] FIG. 5 illustrates an exemplary embodiment of a system.
[0014] FIG. 6 illustrates an alternate exemplary embodiment of a
system.
[0015] FIG. 7 illustrates a side view of the arrangement of the
semiconductor device and the substrate following the oscillation of
the arrangement.
[0016] FIG. 8 illustrates a partial view of the region 8 of FIG.
7.
[0017] FIG. 9 illustrates a block diagram of an exemplary
method.
DETAILED DESCRIPTION
[0018] FIGS. 1A and 1B illustrate top views of exemplary
embodiments of a semiconductor device 102 and a substrate 104. The
semiconductor device 102 includes a number of conductive pad
regions (not shown) and solder portions 106 that are disposed on
the pad regions. The solder portions 106 are formed by disposing a
solder material such as, for example, a conductive metallic
material onto the pad regions in a liquid state. The solder
portions 106 are formed as the solder material cools and solidifies
into a generally hemispherical shape (i.e., solder bumps, solder
balls, or solder plating). The substrate 104 includes a pattern of
pad regions (not shown) and solder portions 108 that are formed in
a similar manner as the solder portions 106. The pattern of pad
regions (or solder portions 108) of the substrate 104 corresponds
to the pattern of solder portions 106 of the semiconductor device
102 such that the semiconductor device 102 and the substrate 104
may be aligned with the solder portions 106 contacting the solder
portions 108. The substrate 104 includes a number of conducive
interconnect lines 110 that are connected to contact regions 112
for illustrative purposes, the interconnect lines 110 are shown on
the top side of the substrate 104 in alternate embodiments, the
interconnect lines 110 may be formed on the bottom side of the
substrate 104 such that the interconnect lines 110 are formed on a
side opposing the colder portions 108. The contact regions 112
allow power and signals to be delivered and received from the
semiconductor device 102 via the contact regions of the substrate
104. The substrate 104 may include any type of suitable substrate
such as, for example, a ceramic material or a printed circuit board
(PCB) type material.
[0019] FIG. 2 illustrates a side view of the semiconductor device
102 and the substrate 104. The substrate 104 is disposed on a base
member 202 that is operative to support and secure the position of
the substrate 104.
[0020] FIG. 3 illustrates a side view of the semiconductor device
102 and the substrate where the semiconductor device 102 has been
aligned and disposed on the substrate 104 such that the
corresponding solder portions 106 of the semiconductor device 102
contact the solder portions 108 of the substrate 104. Prior to the
disposition of the semiconductor device, a flux material may be
applied to the solder portions 106 and 108. FIG. 4 illustrates a
partial view of the region 4 (of FIG. 3). Referring to FIG. 4, in
the illustrated embodiment the majority of corresponding solder
portions 106 and 108 are in contact when the semiconductor device
102 is disposed on the substrate 104 however, in some instances,
not all of the solder portions 106 may contact the solder portions
108 (e.g. 106a and 108a and 106b and 108b) resulting in gaps 301a
and 301b defined by the solder portions 106a and 108a and 106b and
108b respectively. The non-contacting solder portions 106 and 108
may be a result of a variety of factors. For example, the substrate
104 or the semiconductor device 102 may not be uniformly planar,
resulting in non-contact. The non-planar shape of the substrate 104
and/or the semiconductor device 102 may be caused by, for example,
heating the arrangement resulting in deformation and non-contacting
solder portions 106a and 108a. The Other factors may include, for
example, slight misalignments of the solder portions 106 or 108 in
the fabrication process, or an inconsistent deposition of the
volume of the solder material. The non-contacting solder portions
106a and 108a are undesirable and may result in a degradation of
the performance of the semiconductor device 102.
[0021] FIG. 5 illustrates an exemplary embodiment of a system 500
that includes a vibration or oscillation generating device 504, a
heat source 501, and an enclosure 503. FIG. 5 illustrates the
resultant structure following the heating of the arrangement such
that the solder portions 106 and 108 liquefy. The enclosure 503 and
heat source 501 may be portions of, for example, an oven or other
suitable device. In liquid form, the solder portions 106 and 108
that are in contact connect and combine metallurgically to form
conductive portions 502. In the illustrated embodiment, the solder
portions 106a, 108a; and 106b, 108b have been liquefied, but have
not formed conductive portions because the solder portions 106a,
108a; and 106b, 108b were not in contact when the arrangement was
heated.
[0022] The vibration generating device 504 may include any device
that may cause the arrangement to oscillate at a desired frequency.
For example, the vibration generating device 504 may include a
piezoelectric oscillator device that is communicatively connected
to a controller or processor 506. The piezoelectric oscillator
device may be mechanically connected to the base member 202 such
that oscillations of the piezoelectric oscillator device impart a
force on the base member 202 that oscillates or vibrates the
arrangement of the semiconductor device 102 and the substrate 104.
Though the illustrated embodiment includes the base member 202,
alternate embodiments may include the vibration generating device
504 that is mechanically connected to the substrate 104.
Alternatively, the vibration generating device 504 may include a
sonic device that may emit sonic pulses or oscillations that are
operative to oscillate the arrangement at a desired frequency.
Other exemplary embodiments of the vibration generating device 504
may include a radiation emitting device such as, for example, a
laser device that may emit an intensity modulated beam that may
impart an oscillation on the arrangement.
[0023] The vibrations of the assembly impart relative motion
between the semiconductor device 102 and the substrate 104. If the
magnitude of the relative motion is great enough, the gaps 301a and
302b (of FIG. 4) may be sufficiently reduced to allow contact
between liquefied solder portions 106a, 108a; and 106b, 108b
respectively resulting in the desired conductive portions 502a and
502b (shown in FIGS. 7 and 8 described below).
[0024] FIG. 6 illustrates an alternate exemplary embodiment of a
system 600 in this regard, the system 600 is similar to the system
500 described above, however the vibration generating device 504 is
operative to impart a force on the semiconductor device 102. The
force is applied such that the semiconductor device 102 will
oscillate following an interruption of the force.
[0025] FIG. 7 illustrates a side view of the arrangement of the
semiconductor device 102 and the substrate 104 following the
oscillation of the arrangement. FIG. 8 illustrates a partial view
of the region 8 (of FIG. 7) that includes conductive portions 502a
and 502b that have been formed from the contact between liquefied
solder portions 106a, 108a; and 106b, 108b during the oscillation
process.
[0026] To achieve a desired relative motion between the
semiconductor device 102 and the substrate 104, the vibration
generating device 504 may impart an oscillation on the assembly
such that the oscillations are at or near the resonance frequency
of the motion of the semiconductor device 102 relative to the
substrate, under the restraining effect of the melted solder joins
that have properly formed. In this regard, the resonance frequency
may be estimated by the equation ((Nk/m).sup.1/2)/2.pi.; where N is
the number of liquefied conductive portions 502 that have formed
desired joints (of FIG. 5), k is the spring constant of a liquefied
conductive portion 502, and m is the mass of the semiconductor
device 102. Once the resonance frequency is estimated, the
controller 506 may control the vibration generating device 504 to
oscillate at the resonance frequency. In practice, the vibration
generating device 504 may oscillate over a band of frequencies
(e.g., 900 Hz-950 Hz) to ensure that the resonance frequency is
reached while the solder portions 106 and 108 are liquefied. Once
the semiconductor device 102 has been vibrated, the assembly may be
allowed to cool, solidifying the conductive portions 502.
[0027] FIG. 9 illustrates a block diagram of an exemplary method
similar to the methods described above. In this regard, in block
902, solder is applied to the conductive pads on a semiconductor
device, once the solder is applied, flux may be applied to the
solder. Solder is applied to the conductive pads on the substrate
in block 904. In block 906, the semiconductor device and the
substrate are aligned, and the semiconductor device is disposed on
the substrate. In block 908, the semiconductor device and substrate
arrangement is heated to liquefy the solder and form conductive
portions from solder portions on substrate and corresponding solder
portions on semiconductor device. The arrangement may be heated in,
for example, an oven, furnace, or other suitable heating device
having a heat source. The number of connected conductive portions
are estimated, and an estimated resonance frequency of the
semiconductor device is calculated in block 910. In block 912, the
arrangement is vibrated or oscillated at the estimated resonance
frequency or over a band of frequencies that includes the estimated
resonance frequency. The arrangement is cooled in block 914 to
solidify the solder.
[0028] The terminology used herein is for the purpose of describing
particular embodiments only and is not intended to be limiting of
the invention. As used herein, the singular forms "a", "an" and
"the" are intended to include the plural forms as well, unless the
context clearly indicates otherwise. It will be further understood
that the terms "comprises" and/or "comprising," when used in this
specification, specify the presence of stated features, integers,
steps, operations, elements, and/or components, but do not preclude
the presence or addition of one more other features, integers,
steps, operations, element components, and/or groups thereof.
[0029] The corresponding structures, materials, acts, and
equivalents of all means or step plus function elements in the
claims below are intended to include any structure, material, or
act for performing the function in combination with other claimed
elements as specifically claimed. The description of the present
invention has been presented for purposes of illustration and
description, but is not intended to be exhaustive or limited to the
invention in the form disclosed. Many modifications and variations
will be apparent to those of ordinary skill in the art without
departing from the scope and spirit of the invention. The
embodiment was chosen and described in order to best explain the
principles of the invention and the practical application, and to
enable others of ordinary skill in the art to understand the
invention for various embodiments with various modifications as are
suited to the particular use contemplated
[0030] The flow diagrams depicted herein are just one example.
There may be many variations to this diagram or the steps (or
operations) described therein without departing from the spirit of
the invention. For instance, the steps may be performed in a
differing order or steps may be added, deleted or modified. All of
these variations are considered a part of the claimed
invention.
[0031] While the preferred embodiment to the invention had been
described, it will be understood that those skilled in the art,
both now and in the future, may make various improvements and
enhancements which fall within the scope of the claims which
follow. These claims should be construed to maintain the proper
protection for the invention first described.
* * * * *