U.S. patent application number 14/138147 was filed with the patent office on 2015-05-28 for multi-mode thin film deposition apparatus and method of depositing a thin film.
This patent application is currently assigned to Industrial Technology Research Institute. The applicant listed for this patent is Industrial Technology Research Institute. Invention is credited to Chia-Hao Chang, Chien-Chih Chen, Chih-Yung Chen, Kuan-Yu Lin, Kung-Liang Lin, Shih-Chin Lin, Fu-Ching Tung, Shieh-Sien Wu.
Application Number | 20150147890 14/138147 |
Document ID | / |
Family ID | 53001646 |
Filed Date | 2015-05-28 |
United States Patent
Application |
20150147890 |
Kind Code |
A1 |
Lin; Kung-Liang ; et
al. |
May 28, 2015 |
MULTI-MODE THIN FILM DEPOSITION APPARATUS AND METHOD OF DEPOSITING
A THIN FILM
Abstract
A multi-mode thin film deposition apparatus including a reaction
chamber, a carrying seat, a showerhead, an inert gas supplying
source, a first gas inflow system and a second gas inflow system is
provided. The carrying seat is disposed in the reaction chamber.
The showerhead has a gas mixing room and gas holes disposed at a
side of the gas mixing room. The gas mixing room is connected to
the reaction chamber through the plurality of gas holes which faces
the carrying seat. The first gas inflow system is connected to the
reaction chamber and supplies a first process gas during a first
thin film deposition process mode. The inert gas supplying source
is connected to the gas mixing room for supplying an inert gas. The
second gas inflow system is connected to the gas mixing room to
supply a second process gas during a second thin film deposition
process mode.
Inventors: |
Lin; Kung-Liang; (Hsinchu
City, TW) ; Chen; Chien-Chih; (Taichung City, TW)
; Tung; Fu-Ching; (Hsinchu City, TW) ; Chen;
Chih-Yung; (Hsinchu City, TW) ; Lin; Shih-Chin;
(New Taipei City, TW) ; Lin; Kuan-Yu; (Changhua
County, TW) ; Chang; Chia-Hao; (Nantou County,
TW) ; Wu; Shieh-Sien; (Chiayi County, TW) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Industrial Technology Research Institute |
Hsinchu |
|
TW |
|
|
Assignee: |
Industrial Technology Research
Institute
Hsinchu
TW
|
Family ID: |
53001646 |
Appl. No.: |
14/138147 |
Filed: |
December 23, 2013 |
Current U.S.
Class: |
438/763 ;
118/723R; 118/728; 118/729 |
Current CPC
Class: |
C23C 16/4583 20130101;
H01L 51/5253 20130101; H01J 37/3244 20130101; C23C 16/505 20130101;
C23C 16/45544 20130101; C23C 16/50 20130101; C23C 16/45536
20130101; H01J 37/32091 20130101; C23C 16/455 20130101; C23C
16/45548 20130101; H01L 21/0228 20130101; H01L 21/02274
20130101 |
Class at
Publication: |
438/763 ;
118/728; 118/729; 118/723.R |
International
Class: |
H01L 51/52 20060101
H01L051/52; C23C 16/505 20060101 C23C016/505; C23C 16/458 20060101
C23C016/458; C23C 16/455 20060101 C23C016/455; H01L 21/02 20060101
H01L021/02 |
Foreign Application Data
Date |
Code |
Application Number |
Nov 27, 2013 |
TW |
102143232 |
Claims
1. A multi-mode thin film deposition apparatus, comprising: a
reaction chamber, having a first opening and a second opening
penetrating through the reaction chamber, the first opening and the
second opening having a same axial direction; a carrying seat,
disposed in the reaction chamber and suitable to carry a substrate;
a first gas inflow system, connected to the first opening and
suitable to supply a first process gas during a first thin film
deposition process mode; a showerhead, having a gas mixing room and
a plurality of gas holes, wherein the plurality of gas holes is
disposed at a side of the reaction chamber and faces to the
carrying seat, and the gas mixing room is connected to the reaction
chamber through the plurality of gas holes; an inert gas supplying
source, connected to the gas mixing room of the showerhead and
suitable to supply an inert gas which is non-reactive to the first
process gas; and a second gas inflow system, connected to the gas
mixing room of the showerhead and suitable to supply a second
process gas during a second thin film deposition process mode.
2. The multi-mode thin film deposition apparatus as claimed in
claim 1, further comprising an elevating mechanism connected to the
carrying seat and suitable to adjust the position of the carrying
seat.
3. The multi-mode thin film deposition apparatus as claimed in
claim 1, further comprising an air-extracting system connected to
the second opening of the reaction chamber.
4. The multi-mode thin film deposition apparatus as claimed in
claim 1, further comprising a first voltage supplying source
connected to the showerhead and suitable to supply a radio
frequency bias voltage to the second process gas so as to produce a
plasma.
5. The multi-mode thin film deposition apparatus as claimed in
claim 1, further comprising a second voltage supplying source
connected to the first gas inflow system and suitable to supply a
bias voltage to the first process gas so as to produce a
plasma.
6. The multi-mode thin film deposition apparatus as claimed in
claim 1, wherein the first gas inflow system further comprises a
first gas supplying source and a second gas supplying source, the
first gas supplying source is connected to the first opening of the
reaction chamber via a first gas supplying tube and the second gas
supplying source is connected to the first opening of the reaction
chamber via a second gas supplying tube.
7. The multi-mode thin film deposition apparatus as claimed in
claim 6, wherein the first thin film deposition process mode is an
atomic layer deposition (ALD) process mode, and the first process
gas comprises a first precursor reactant gas and a second precursor
reactant gas supplied from the first gas supplying source and the
second gas supplying source, respectively.
8. The multi-mode thin film deposition apparatus as claimed in
claim 1, wherein the second thin film deposition process mode is a
plasma-enhanced chemical vapor deposition (PECVD) process mode.
9. The multi-mode thin film deposition apparatus as claimed in
claim 1, further comprising a flow control unit connected to the
first gas inflow system, the second gas inflow system and the inert
gas supplying source, respectively, and controlling flow of the
first process gas, the second process gas and the inert gas,
respectively.
10. A method of depositing a thin film by using a multi-mode thin
film deposition apparatus, the method of depositing the thin film
comprising: providing a substrate and deposing the substrate on a
carrying seat; performing a first thin film deposition process
mode, including: opening a first gas inflow system and an inert gas
supplying source synchronously, a first process gas being supplied
by the first gas inflow system through a first opening to a
reaction chamber, and an inert gas entering the reaction chamber
via a plurality of gas holes of a showerhead at the same time;
controlling an inflow of the inert gas to make a pressure of the
gas mixing room and the gas holes higher than the pressure of the
reaction chamber, the inert gas outputted from the showerhead
making the first process gas attached to the substrate and forming
a first thin film on the substrate; and closing the first gas
inflow system and the inert gas supplying source; and performing a
second thin film deposition process mode, a second process gas
entering the reaction chamber through the plurality of gas holes of
the showerhead and forming a second thin film on the substrate;
wherein the multi-mode thin film deposition apparatus comprises:
the reaction chamber, having the first opening and a second opening
penetrating through the reaction chamber, the first opening and the
second opening having a same axial direction; the carrying seat,
disposed in the reaction chamber and suitable to carry the
substrate; the first gas inflow system, connected to the first
opening and suitable to supply the first process gas during the
first thin film deposition process mode; the showerhead, having a
gas mixing room and the plurality of gas holes, wherein the
plurality of gas holes is disposed at a side of the reaction
chamber and faces to the carrying seat, and the gas mixing room is
connected to the reaction chamber through the plurality of gas
holes; the inert gas supplying source, connected to the gas mixing
room of the showerhead and suitable to supply the inert gas which
is non-reactive to the first process gas; and a second gas inflow
system, connected to the gas mixing room of the showerhead and
suitable to supply the second process gas during the second thin
film deposition process mode.
11. The method of depositing the thin film as claimed in claim 10,
wherein the first process gas comprises a first precursor reactant
gas and a second precursor reactant gas entering to the reaction
chamber at time intervals.
12. The method of depositing the thin film as claimed in claim 10,
wherein the ratio of the flow rate of the first precursor reactant
gas to the flow rate of the inert gas ranges of 2/3 to 5/4.
13. A method of depositing a thin film, comprising: providing a
substrate and deposing the substrate in a reaction chamber;
performing an atomic layer deposition (ALD) process mode,
including: supplying a first process gas, the first process gas
comprising a first precursor reactant gas and a second precursor
reactant gas, the first precursor reactant gas and the second
precursor reactant gas entering the reaction chamber through a
first opening respectively; and supplying an inert gas
simultaneously when the at least two precursor reactant gases enter
the reaction chamber, wherein the inert gas outputted by the
showerhead makes the first process gas attach to the substrate and
forms a first thin film on the substrate; and performing a
plasma-enhanced chemical vapor deposition (PECVD) process mode,
including: supplying a second process gas from the showerhead to
form a second thin film on the substrate; wherein the ALD process
mode and the PECVD process are performed in the same reaction
chamber.
14. The method of depositing the thin film as claimed in claim 13,
wherein the first precursor reactant gas and the second precursor
reactant gas enter to the reaction chamber at time intervals.
15. The method of depositing the thin film as claimed in claim 14,
wherein the first precursor reactant gas and the second precursor
reactant gas enter to the reaction chamber at time intervals by a
gas-extracting system extracting a gas, and the gas-extracting
system is connected to a second opening of the reaction
chamber.
16. The method of depositing the thin film as claimed in claim 13,
wherein the ratio of the flow rate of the first precursor reactant
gas to the flow rate of the inert gas in the reaction chamber
ranges of 2/3 to 5/4.
17. The method of depositing the thin film as claimed in claim 13,
wherein the showerhead comprises a gas mixing room and the method
of performing the ALD process mode further comprises: controlling
an inflow of the inert gas to make a pressure of the gas mixing
room higher than the pressure of the reaction chamber.
18. The method of depositing the thin film as claimed in claim 13,
wherein when performing the PECVD process mode, a first voltage
supplying source connected to the showerhead is turned on.
19. The method of depositing the thin film as claimed in claim 18,
wherein when performing the ALD process mode, the first voltage
supplying source is turned off.
20. The method of depositing the thin film as claimed in claim 13,
wherein when performing the ALD process mode, the second voltage
supplying source is turned on, the second voltage supplying source
is connected to a first gas inflow system which supplies the first
process gas, and one of the first precursor reactant gas and the
second precursor reactant gas forms a single wafer plasma and forms
a third thin film on the substrate to perform a plasma-enhanced
atomic layer deposition (PEALD) process.
21. The method of depositing the thin film as claimed in claim 13,
wherein flow of the first process gas, the second process gas, and
the inert gas are controlled by a flow control unit.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application claims the priority benefit of Taiwan
application serial no. 102143232, filed on Nov. 27, 2013. The
entirety of the above-mentioned patent application is hereby
incorporated by reference herein and made a part of this
specification.
TECHNICAL FIELD
[0002] The disclosure relates to a multi-mode thin film deposition
apparatus and a method of depositing a thin film.
BACKGROUND
[0003] Organic semiconductor material and low power function
electrode of an organic light-emitting diode (OLED) are degraded
easily by oxygen and mist. In the process of commercialization of
OLED, there are always challenges to increase the stability and the
useful time of the elements of OLED by effective packaging
technology. The conventional packaging method can not meet the
requirement cause of the high cost and without flexibility. It
becomes a trend to use atomic layer deposition (ALD) or
plasma-enhanced chemical vapor deposition (PECVD) technology to
produce a flexible barrier film.
[0004] The rate of ALD process depositing high compactness and low
defect inorganic thin film such as aluminum oxide (Al.sub.2O.sub.3)
is slow. It may take 200.about.-300 minutes to reach the required
packaging thickness about 20.about.30 nm of an OLED by the ALD
process. Without decreasing the cost effectively, the adoption in
the market is low. Although the deposition rate of PECVD process is
faster, plasma induced damage may occur in the elements of an OLED
easily. With the combination of the advantages of these two
deposition processes, dozens of atomic layers are deposited about
20 minutes by the ALD process to form a non-defect thin film (i.e.
aluminum oxide layer) with the thickness about 2 nm, and a thicker
Silicon Nitride (SiNx) layer is deposited by the PECVD process to
against the aluminum oxide layer from hydrolysis in the air.
Because of the non-defect thin film produced by the ALD process is
compact, the non-defect thin film may protect the elements of the
OLED from the influence of plasma induced damage during the PECVD
process. It may substantially decrease the process time from 4-5
hours to 0.5 hour forming the barrier film.
[0005] However, in recent technology, the deposition steps during
the ALD and the PECVD process are performed in two different
chambers individually. It does not only increase the costs, but
also expose the elements of the unfinished packaging OLED in the
environment during the transfer process and cause low quality of
the barrier film. Besides, the ALD process is entirely different
from the PECVD process. The PECVD process must uniform the mix
process gas via a showerhead, and produce plasma to ionize the
process gas as a coating precursor reactant. For the reason, the
showerhead is designed having 1.about.3 layers of gas diffusion
space as buffer regions, so as to carry out the purpose of
outputting gas uniformly. However, the ALD process emphasizes how
to make the coating precursor reactant distribute and adhere on the
substrate saturantly in the lowest cycle time. Hence, if the ALD
process is performed via the showerhead of the PECVD process, for
the purpose of saturate distribution, the process gas have to be
filled in the showerhead and the entire chamber. Thus, the cycle
time and the gas volume of use will increase.
SUMMARY
[0006] An exemplary embodiment of the disclosure provides a
multi-mode thin film deposition apparatus including a reaction
chamber, a carrying seat, a showerhead, an inert gas supplying
source, a first gas inflow system and a second gas inflow system.
The reaction chamber has a first opening and a second opening which
penetrate through the reaction chamber and have the same axial
direction. The carrying seat is disposed in the reaction chamber
and suitable to carry a substrate. The showerhead has a gas mixing
room and a plurality of gas holes. The plurality of gas holes is
disposed at a side of the reaction chamber and faces to the
carrying seat. The gas mixing room is connected to the reaction
chamber through the plurality of gas holes. The first gas inflow
system is connected to the first opening and suitable to supply a
first process gas during a first thin film deposition process mode.
The inert gas supplying source is connected to the gas mixing room
of the showerhead and suitable to supply an inert gas which is
non-reactive to the first process gas. The second gas inflow system
is connected to the gas mixing room of the showerhead and suitable
to supply a second process gas during a second thin film deposition
process mode.
[0007] An exemplary embodiment of the disclosure also provides a
method of depositing a thin film by using the foregoing multi-mode
thin film deposition apparatus. The method includes providing a
substrate and deposing the substrate on the carrying seat. Then,
the first thin film deposition process mode is performed. During
the first thin film deposition process, the first gas inflow system
and the inert gas supplying source are opened synchronously. The
first process gas is supplied by the first gas inflow system
through the first opening to the reaction chamber, and an inert gas
enters the reaction chamber via the plurality of gas holes of the
showerhead at the same time. By controlling the inflow of the inert
gas, the pressure of the gas mixing room and the gas holes is
higher than the pressure of the reaction chamber. The inert gas
outputting from the showerhead makes the first process gas attach
to the substrate and forms a first thin film on the substrate.
After that, the first gas inflow system and the inert gas supplying
source are closed. Then, the second thin film deposition process
mode is performed. During the second thin film deposition process,
the second gas inflow system is opened. The second process gas
enters the reaction chamber through the plurality of gas holes of
the showerhead and forms a second thin film on the substrate.
[0008] An exemplary embodiment of the disclosure provides another
method of depositing a thin film including providing a substrate
which is disposed in a reaction chamber. Then, an ALD process mode
is performed and a first process gas including at least two
different precursor reactant gases is supplied. The at least two
precursor reactant gases enter the reaction chamber through a first
opening, respectively. When the at least two precursor reactant
gases enter the reaction chamber, an inert gas is supplied by a
showerhead at the same time. The inert gas outputting by the
showerhead makes the first process gas attach to the substrate and
forms a first thin film on the substrate. Subsequently, a PECVD
process mode is performed and a second process gas is performed
through the showerhead to form a second thin film on the substrate.
In addition, the ALD process and the PECVD process are performed in
the same reaction chamber.
[0009] In order to make the aforementioned and other features of
the disclosure comprehensible, several exemplary embodiments
accompanied with figures are described in detail below.
BRIEF DESCRIPTION OF THE DRAWINGS
[0010] The accompanying drawings are included to provide a further
understanding of the disclosure, and are incorporated in and
constitute a part of this specification. The drawings illustrate
embodiments of the disclosure and, together with the description,
serve to explain the principles of the disclosure.
[0011] FIG. 1 is a structural schematic diagram of a multi-mode
thin film deposition apparatus according to an embodiment of the
disclosure.
[0012] FIG. 2 is a schematic diagram of the flow of a process gas
when the multi-mode thin film deposition apparatus performs a first
thin film deposition process mode according to an embodiment of the
disclosure.
[0013] FIG. 3 is a schematic diagram of the flow of a process gas
when the multi-mode thin film deposition apparatus performs a
second thin film deposition process mode according to an embodiment
of the disclosure.
DETAILED DESCRIPTION OF DISCLOSED EMBODIMENTS
[0014] The disclosure provides a multi-mode thin film deposition
apparatus which is suitable to perform various modes of thin film
deposition process on a substrate in a single chamber.
[0015] FIG. 1 is a structural schematic diagram of a multi-mode
thin film deposition apparatus according to an embodiment of the
disclosure. Referring to FIG. 1, the multi-mode thin film
deposition apparatus 1 includes a reaction chamber 10, a carrying
seat 20, a first gas inflow system 30, a showerhead 40, an inert
gas supplying source 50, and a second gas inflow system 60. The
reaction chamber 10 has a first opening 12 and a second opening 14
which transversely penetrate through the reaction chamber 10 and
have the same axial direction. The carrying seat 20 is disposed in
the reaction chamber 10 and suitable to carry a substrate 22. In
one embodiment of the disclosure, the multi-mode thin film
deposition apparatus 1 further includes an elevating mechanism 24
connected to the carrying seat 20. The elevating mechanism 24 is
suitable to adjust the position of the carrying seat 20. The first
gas inflow system 30 is connected to the first opening 12 and is
suitable to supply a first process gas PS1 during a first thin film
deposition process mode. In addition, the disposed direction of the
carrying seat 20 is parallel to the axial direction of the first
opening 12 and the second opening 14 so that the first process gas
PS1 enters from the first opening 12 and flows to the second
opening 14 along the disposed direction of the carrying seat 20.
The showerhead 40 has a gas mixing room 42 and a plurality of gas
holes 44. The plurality of gas holes 44 is disposed at a side of
the reaction chamber 40 and faces to the carrying seat 20. The gas
mixing room 42 is connected to the reaction chamber 40 through the
plurality of gas holes 44. The inert gas supplying source 50 is
connected to the gas mixing room 42 of the showerhead 40 and is
suitable to supply an inert gas IG. Besides, the inert gas IG means
a gas which is non-reactive to the first process gas PS1. In an
embodiment of the disclosure, the inert gas IG is listed on Group
VIIIA such as argon (Ar) of the periodic table, but it is not
limited herein. The second gas inflow system 60 is connected to the
gas mixing room 42 of the showerhead 40 and is suitable to supply a
second process gas PS2 during a second thin film deposition process
mode.
[0016] In the embodiment of the disclosure, the first gas inflow
system 30 further includes an air-extracting system 70 connected to
the second opening 14 of the reaction chamber 10. The
gas-extracting system 70 may be a pump, but is not limited herein.
The gas-extracting system 70 offers a function of gas-extracting
during modes transforming or mode performing. The gas and the
reactant produced during the processes in the reaction chamber 10
and the gas mixing room 42 are extracted by the gas-extracting
system 70. This will prevent the multi-mode thin film deposition
apparatus 1 from causing pollution.
[0017] In detail, the first gas inflow system 30 includes a first
gas supplying source 32 and a second gas supplying source 34. The
first gas supplying source 32 is connected to the first opening 12
of the reaction chamber 10 via a first gas supplying tube 36 and
the second gas supplying source 34 is connected to the first
opening 12 of the reaction chamber 10 via a second gas supplying
tube 38. In one embodiment of the disclosure, the first thin film
deposition process mode is an atomic layer deposition (ALD) process
mode. In the first thin film deposition process mode, the first
process gas PS1 includes a first precursor reactant gas PC1 and a
second precursor reactant gas PC2 supplied from the first gas
supplying source 32 and the second gas supplying source 34,
respectively.
[0018] Besides, in another embodiment of the disclosure, the first
thin film deposition process mode is a plasma-enhanced atomic layer
deposition (PEALD) process mode. The multi-mode thin film
deposition apparatus 1 further includes a second voltage supplying
source 82 connected to the first gas inflow system 30. When
performing the PEALD process, the first process gas PS1 is applied
a bias voltage by the second voltage supplying source 82 and
produces plasma. Further, the second voltage supplying source 82
applies the bias voltage to one of the first precursor reactant gas
PC1 and the second precursor reactant gas PC2 of the first process
gas PS1 and one of the precursor reactant gases (i.e. PC1 and PC2)
produces single wafer plasma to form a thin film on the substrate
22.
[0019] On the other hand, the multi-mode thin film deposition
apparatus 1 further includes a first voltage supplying source 80
connected to the showerhead 40. In the embodiment of the
disclosure, the second thin film deposition process mode is a
plasma-enhanced chemical vapor deposition (PECVD) process mode.
During the PECVD process, the first voltage supplying source 80
supplies a bias voltage to the second process gas PS2 which enters
from the second gas inflow system 60 to the showerhead 40 and
produces the plasma.
[0020] In addition, the multi-mode thin film deposition apparatus 1
further includes a flow control unit 90 which is connected to the
first gas inflow system 30, the second gas inflow system 60 and the
inert gas supplying source 50, respectively. During the different
thin film deposition process modes, the flow control unit 90
controls the flow of the first process gas PS1, the second process
gas PS2 and the inert gas IG, respectively.
[0021] The operation of the multi-mode thin film deposition
apparatus during different thin film deposition process modes are
describe below by referring FIG. 2 and FIG. 3.
[0022] FIG. 2 is a schematic diagram of the flow of a process gas
when the multi-mode thin film deposition apparatus performs a first
thin film deposition process mode according to an embodiment of the
disclosure. Please refer to FIG. 2, the substrate 22 is provided
which is disposed on the carrying seat 20 in the reaction chamber
10 at first. Then, the first thin film deposition process mode is
performed. During the first thin film deposition process, the first
gas inflow system 30 and the inert gas supplying source 50 are
opened synchronously. The first process gas PS1 is supplied by the
first gas inflow system 30 through the first opening 12 to the
reaction chamber 10, and an inert gas IG enters the reaction
chamber 10 via the plurality of gas holes 44 of the showerhead 40
at the same time. At this time, the inflow of the inert gas IG
flows from the inert gas supplying source 50 via the adjustment of
the flow control unit 90, so that the pressure of the gas mixing
room 42 of the showerhead 40 and the plurality of gas holes 44 is
higher than the pressure of the reaction chamber 10. In detail,
when the first process gas PS1 enters to the reaction chamber 10
through the first opening 12 and outflows the second opening 14
along the flow direction, the reaction chamber 10 and the gas
mixing room 42 should be filled with the first process gas PS1 at
first. Because of the inert gas IG spouting out from the showerhead
40, the difference of the pressure leads the first process gas PS1
unable to enter the gas mixing room 42 through the plurality of gas
holes 44. Thus, deposition of the first process gas PS1 on the
plurality of gas holes 44 will be avoided so as to prevent the gas
holes 44 from being blocked. Furthermore, without filling with the
inert gas IG in the gas mixing room 42 of the showerhead 40 and the
plurality of gas holes 44, when performing the first thin film
deposition process, the first process gas PS1 is essential to fill
with the entire reaction chamber 10, the gas mixing room 42 of the
showerhead 40, and the plurality of gas holes 44. This may lead to
unnecessary waste of the first process gas PS1. In detail, because
the inert gas IG non-reactive to the first process gas PS1 enters
the reaction chamber 10, the first process gas PS1 in the reaction
chamber 10 flows to the second opening 14 along a direction as
shown in FIG. 2. In this embodiment of the disclosure, the axial
direction of the first opening 12 and the second opening 14 are the
same, and the first opening 12 and the second opening 14
transversely penetrate through the reaction chamber 10. The
plurality of gas holes 44 faces the carrying seat 20. Thus, the
configuration relationships leads the first process gas PS1
attached to the substrate 22 via the inert gas IG outputted from
the showerhead 40 during the process that the first process gas PS1
enters from the first opening 12 and flows to the second opening
14.
[0023] In the embodiment of the disclosure, the first thin film
deposition process mode is an ALD process mode. The first process
gas PS1 includes at least two different precursor reactant gases
such as the first precursor reactant gas PC1 and the second
precursor reactant gas PC2 that are mentioned before. The first
precursor reactant gas PC1 and the second precursor reactant gas
PC2 are supplied from the first gas supplying source 32 and the
second gas supplying source 34, respectively, and enter the
reaction chamber 10 at time intervals through the first opening 12.
In detail, during the ALD process mode, the first precursor
reactant gas PC1 enters the reaction chamber 10 at first, and the
showerhead 40 offers the inert gas IG at the same time. The flow
control unit 90 controls the flow of the first precursor reactant
gas PC1 and the inert gas IG so as to lead the pressure of the gas
mixing room 42 higher than the pressure of the reaction chamber 10.
In one embodiment, the ratio of the flow rate of the first
precursor reactant gas PC1 to the flow rate of the inert gas IG
ranges of 2/3 to 5/4. However, the ratio of the flow rate of the
first precursor reactant gas PC1 to the flow rate of the inert gas
IG in the reaction chamber 10 is not limited herein. As long as the
flow of the first precursor reactant gas PC1 and the inert gas IG
are controlled by the flow control unit 90 and the first precursor
reactant gas PC1 is leaded to reach saturated distribution on the
substrate 22, the ALD process mode is performed. Then, the first
precursor reactant gas PC1 and the inert gas IG are extracted by
the gas-extracting system 70 through the second opening 14. After a
time interval, the second precursor reactant gas PC2 is input and
the inert gas IG is injected at the same time. The process is the
same with the first precursor reactant gas PC1, it repeated no more
herein. When the second precursor reactant gas PC2 reaches the
substrate 22, a first thin film is produced after the reaction. The
first gas inflow system 30 and the inert gas supplying source 50
are then closed to finish the ALD process mode. In one embodiment
of the disclosure, the gas-extracting system 70 is opened to adjust
the pressure of the reaction chamber 10 during all the ALD process
mode.
[0024] FIG. 3 is a schematic diagram of the flow of a process gas
when the multi-mode thin film deposition apparatus performs a
second thin film deposition process mode according to an embodiment
of the disclosure. Please refer to FIG. 3, when performing the
second thin film deposition process mode, the second gas inflow
system 60 is opened and the second process gas PS2 enters the gas
mixing room 42 of the showerhead 40. After mixing amply in the gas
mixing room 42, the second process gas PS2 enters the reaction
chamber 10 through the plurality of gas holes 44. In the embodiment
of the disclosure, the second thin film deposition process mode is
a plasma-enhanced chemical vapor deposition (PECVD) process mode.
When the second process gas PS2 supplied by the showerhead 40
enters the reaction chamber 10, the first voltage supplying source
80 is turned on and offers a radio frequency bias voltage to the
second process gas PS2. Plasma is produced and then a second thin
film is formed on the substrate 22.
[0025] In addition, during the first thin film deposition process
mode, because the inert gas IG is injected into the reaction
chamber 10, the first thin film deposition process mode is
performed with less first process gas PS1. Besides, the injection
of the inert gas IG may also prevent the plurality of gas holes 44
of the showerhead 40 from being blocked by the first process gas
PS1 and maintain the quality of the operation during the second
thin film deposition process mode. Thus, the first thin film
deposition process mode (ALD process mode) and the second thin film
deposition process mode (PECVD process mode) will be performed in
the same reaction chamber.
[0026] Furthermore, during the ALD process mode, the first voltage
supplying source 80 is turned off. However, when the multi-mode
thin film deposition apparatus 1 further includes a second voltage
supplying source 82 connected to the first gas inflow system 30, a
plasma-enhanced atomic layer deposition (PEALD) process will also
be performed. During the PEALD process, the second voltage
supplying source 82 is turned on and one of the first precursor
reactant gas PC1 and the second precursor reactant gas PC2 forms a
single wafer plasma. Then, a third thin film is formed on the
substrate 22.
[0027] In summary, in the embodiments of the disclosure, during the
first thin film deposition process mode, by controlling the flow
rate of the first process gas and the inert gas in the reaction
chamber, the first process gas is reacted and deposited on the
substrate. Besides, because of the injection of the inert gas
during the first thin film deposition process mode, it will prevent
the plurality of gas holes from being blocked. Furthermore, it will
also be prevented that the entire showerhead and the gas chamber
are filled with the first process and the waste of the first
process gas is thus prevented. For this reason, in the embodiments
of the disclosure, by using the multi-mode thin film deposition
apparatus, the multi-mode thin film deposition processes will be
performed in the same reaction chamber without transferring the
substrate to different reaction chamber during different mode thin
film deposition processes. It may save the consumed time of the
transferring process of the substrate.
[0028] It will be apparent to those skilled in the art that various
modifications and variations can be made to the structure of the
disclosure without departing from the scope or spirit of the
disclosure. In view of the foregoing, it is intended that the
disclosure cover modifications and variations of this disclosure
provided they fall within the scope of the following claims and
their equivalents.
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