U.S. patent application number 14/476881 was filed with the patent office on 2014-12-18 for encapsulating layer-covered semiconductor element, producing method thereof, and semiconductor device.
This patent application is currently assigned to NITTO DENKO CORPORATION. The applicant listed for this patent is NITTO DENKO CORPORATION. Invention is credited to Yuki EBE, Kazuhiro FUKE, Hiroyuki KATAYAMA, Ryuichi KIMURA, Hidenori ONISHI.
Application Number | 20140367729 14/476881 |
Document ID | / |
Family ID | 48699635 |
Filed Date | 2014-12-18 |
United States Patent
Application |
20140367729 |
Kind Code |
A1 |
EBE; Yuki ; et al. |
December 18, 2014 |
ENCAPSULATING LAYER-COVERED SEMICONDUCTOR ELEMENT, PRODUCING METHOD
THEREOF, AND SEMICONDUCTOR DEVICE
Abstract
A method for producing an encapsulating layer-covered
semiconductor element includes the steps of preparing a support
sheet including a hard support board formed with a through hole
passing through in a thickness direction and a pressure-sensitive
adhesive layer laminated on a surface at one side in the thickness
direction of the support board so as to cover the through hole;
disposing a semiconductor element on a surface at one side in the
thickness direction of the pressure-sensitive adhesive layer in
opposed to the through hole in the thickness direction; covering
the semiconductor element with an encapsulating layer to produce an
encapsulating layer-covered semiconductor element; and inserting a
pressing member into the through hole from the other side in the
thickness direction to peel the encapsulating layer-covered
semiconductor element from the pressure-sensitive adhesive
layer.
Inventors: |
EBE; Yuki; (Osaka, JP)
; KATAYAMA; Hiroyuki; (Osaka, JP) ; KIMURA;
Ryuichi; (Osaka, JP) ; ONISHI; Hidenori;
(Osaka, JP) ; FUKE; Kazuhiro; (Osaka, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
NITTO DENKO CORPORATION |
Osaka |
|
JP |
|
|
Assignee: |
NITTO DENKO CORPORATION
Osaka
JP
|
Family ID: |
48699635 |
Appl. No.: |
14/476881 |
Filed: |
September 4, 2014 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
13914231 |
Jun 10, 2013 |
|
|
|
14476881 |
|
|
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|
Current U.S.
Class: |
257/98 |
Current CPC
Class: |
H01L 33/52 20130101;
H01L 23/28 20130101; H01L 33/0095 20130101; H01L 2933/005 20130101;
H01L 2924/0002 20130101; H01L 33/60 20130101; H01L 21/56 20130101;
H01L 2924/00 20130101; H01L 2924/0002 20130101; H01L 33/505
20130101 |
Class at
Publication: |
257/98 |
International
Class: |
H01L 33/50 20060101
H01L033/50; H01L 33/60 20060101 H01L033/60; H01L 33/52 20060101
H01L033/52 |
Foreign Application Data
Date |
Code |
Application Number |
Jun 29, 2012 |
JP |
2012-147554 |
Jan 30, 2013 |
JP |
2013-015781 |
Claims
1. An encapsulating layer-covered semiconductor element comprising:
an LED and a phosphor sheet, wherein the phosphor sheet is made of
a phosphor resin composition containing a curable resin and a
phosphor, and the phosphor sheet is disposed so that at least the
side surfaces of the LED are covered.
2. An encapsulating layer-covered semiconductor element comprising:
an LED and an embedding portion, wherein the embedding portion is
made of a phosphor resin composition containing a curable resin and
a phosphor, and the LED is embedded in the embedding portion so
that the side surfaces and the upper surface of the LED are
covered.
3. The encapsulating layer-covered semiconductor element according
to claim 2, further comprising: a reflector portion, wherein the
reflector portion is made of a reflecting resin composition
containing a resin and a light reflecting component, and the
reflector portion is disposed so that at least the side surfaces of
the embedding portion are covered.
4. An encapsulating layer-covered semiconductor element comprising:
an LED and a cover portion, wherein the cover portion is made of a
phosphor resin composition containing a curable resin and a
phosphor, and the cover portion is disposed so that the upper
surface of the LED is covered.
5. The encapsulating layer-covered semiconductor element according
to claim 4, further comprising a reflector portion, wherein the
reflector portion is made of a reflecting resin composition
containing a resin and a light reflecting component, and the
reflector portion is disposed so that the side surfaces of the
cover portion are covered.
6. A semiconductor device comprising: a board, an LED mounted on
the board and a phosphor sheet, wherein the phosphor sheet is made
of a phosphor resin composition containing a curable resin and a
phosphor, and the phosphor sheet is disposed so that at least the
side surfaces of the LED are covered.
7. The semiconductor device according to claim 6, further
comprising an encapsulating protective layer, wherein the LED and
the phosphor sheet are encapsulated in the encapsulating protective
layer.
8. A semiconductor device comprising: a board, an LED mounted on
the board and an embedding portion, wherein the embedding portion
is made of a phosphor resin composition containing a curable resin
and a phosphor, and the LED is embedded in the embedding portion so
that the side surfaces and the upper surface of the LED are
covered.
9. The semiconductor device according to claim 8, further
comprising a reflector portion, wherein the reflector portion is
made of a reflecting resin composition containing a resin and a
light reflecting component, and the reflector portion is disposed
so that at least the side surfaces of the embedding portion are
covered.
10. The semiconductor device according to claim 8, further
comprising an encapsulating protective layer, wherein the LED and
the embedding portion are encapsulated in the encapsulating
protective layer.
11. A semiconductor device comprising: a board, an LED mounted on
the board and a cover portion, wherein the cover portion is made of
a phosphor resin composition containing a curable resin and a
phosphor, and the cover portion is disposed so that the upper
surface of the LED is covered.
12. The semiconductor device according to claim 11, further
comprising a reflector portion, wherein the reflector portion is
made of a reflecting resin composition containing a resin and a
light reflecting component, and the reflector portion is disposed
so that the side surfaces of the cover portion are covered.
13. The semiconductor device according to claim 11, comprising an
encapsulating protective layer, wherein the LED and the cover
portion are encapsulated in the encapsulating protective layer.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This is a continuation of U.S. application Ser. No.
13/914,231 filed Jun. 10, 2013, which claims priority from Japanese
Patent Applications No. 2012-147554 filed on Jun. 29, 2012 and No.
2013-015781 filed on Jan. 30, 2013, the contents of which are
hereby incorporated by reference into this application.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] The present invention relates to an encapsulating
layer-covered semiconductor element, a producing method thereof,
and a semiconductor device, to be specific, to a method for
producing an encapsulating layer-covered semiconductor element, an
encapsulating layer-covered semiconductor element obtained by the
method, and a semiconductor device including the encapsulating
layer-covered semiconductor element.
[0004] 2. Description of Related Art
[0005] It has been known that, conventionally, a semiconductor
device including a light emitting diode device (hereinafter,
abbreviated as an LED device), an electronic device, or the like is
produced as follows: first, a plurality of semiconductor elements
(including light emitting diode elements (hereinafter, abbreviated
as LEDs), electronic elements, or the like) are mounted on a board;
next, an encapsulating layer is provided so as to cover a plurality
of the semiconductor elements; and thereafter, the resulting
products are singulated into individual semiconductor elements.
[0006] Among all, when the semiconductor element is an LED and the
semiconductor device is an LED device, unevenness in emission
wavelength and luminous efficiency is generated between a plurality
of the LEDs, so that in such an LED device mounted with the LED,
there is a disadvantage that unevenness in light emission is
generated between a plurality of the LEDs.
[0007] In order to solve such a disadvantage, it has been
considered that, for example, a plurality of LEDs are covered with
a phosphor layer to fabricate a plurality of phosphor layer-covered
LEDs to be then singulated into each of the phosphor layer-covered
LEDs as required. Thereafter, the phosphor layer-covered LED is
selected in accordance with the emission wavelength and the
luminous efficiency to be then mounted on a board.
[0008] For example, a chip is attached onto a flat and transparent
board (a silica glass substrate) via a pressure-sensitive adhesive
sheet and next, a resin is applied onto the chip to fabricate dummy
wafers made of the chips covered with the resin.
[0009] Then, the pressure-sensitive adhesive force of the
pressure-sensitive adhesive sheet is reduced by applying an
ultraviolet ray from the side of the silica glass substrate, by a
chemical solution, or by heating. Thereafter, the dummy wafers are
peeled from the silica glass substrate and the pressure-sensitive
adhesive sheet and then, the obtained dummy wafers are subjected to
dicing on a chip basis to be singulated so as to produce a chip
component. The chip component obtained by the above-described
method has been proposed (ref: for example, Japanese Unexamined
Patent Publication No. 2001-308116). The chip component in Japanese
Unexamined Patent Publication No. 2001-308116 is to be then mounted
on a board, so that a semiconductor device can be obtained.
SUMMARY OF THE INVENTION
[0010] In the method described in Japanese Unexamined Patent
Publication No. 2001-308116, in order to peel the dummy wafers from
the silica glass substrate and the pressure-sensitive adhesive
sheet, the pressure-sensitive adhesive force of the
pressure-sensitive adhesive sheet is reduced by applying the
ultraviolet ray from the side of the silica glass substrate, by the
chemical solution, or by heating.
[0011] Thus, there is a disadvantage that a material capable of
being used in the pressure-sensitive adhesive sheet is limited or a
step of reducing the pressure-sensitive adhesive force of the
pressure-sensitive adhesive sheet is required, so that the number
of production steps increases. As a result, an increase in the
production cost for an encapsulating layer-covered semiconductor
element is unavoidable.
[0012] It is an object of the present invention to provide a method
for producing an encapsulating layer-covered semiconductor element
in which a material used in a pressure-sensitive adhesive layer is
capable of being widely selected, the freedom in process planning
is improved, and furthermore, the number of steps required for the
production of an encapsulating layer-covered semiconductor element
is capable of being reduced; an encapsulating layer-covered
semiconductor element obtained by the method; and a semiconductor
device including the encapsulating layer-covered semiconductor
element.
[0013] A method for producing an encapsulating layer-covered
semiconductor element of the present invention includes a preparing
step of preparing a support sheet including a hard support board
formed with a through hole passing through in a thickness direction
and a pressure-sensitive adhesive layer laminated on a surface at
one side in the thickness direction of the support board so as to
cover the through hole; a semiconductor element disposing step of
disposing a semiconductor element on a surface at one side in the
thickness direction of the pressure-sensitive adhesive layer in
opposed to the through hole in the thickness direction; a
semiconductor element covering step of covering the semiconductor
element with an encapsulating layer to produce an encapsulating
layer-covered semiconductor element including the semiconductor
element and the encapsulating layer covering the semiconductor
element; and a semiconductor element peeling step of inserting a
pressing member into the through hole from the other side in the
thickness direction to press the pressure-sensitive adhesive layer
corresponding to the through hole relatively toward the one side in
the thickness direction with respect to the support board so as to
relatively move the encapsulating layer-covered semiconductor
element toward the one side in the thickness direction and peel the
encapsulating layer-covered semiconductor element from the
pressure-sensitive adhesive layer.
[0014] In the method for producing an encapsulating layer-covered
semiconductor element of the present invention, it is preferable
that the encapsulating layer is formed of an encapsulating
sheet.
[0015] In the method for producing an encapsulating layer-covered
semiconductor element of the present invention, it is preferable
that the semiconductor element covering step includes a layer
disposing step of, after the semiconductor element disposing step,
disposing the encapsulating layer formed from an encapsulating
resin composition containing a curable resin at the one side in the
thickness direction of the support sheet so as to embed the
semiconductor element; an encapsulating step of curing the
encapsulating layer to encapsulate the semiconductor element by the
encapsulating layer that is flexible; and a cutting step of, after
the encapsulating step, cutting the encapsulating layer that is
flexible corresponding to the semiconductor element to produce the
encapsulating layer-covered semiconductor element including the
semiconductor element and the encapsulating layer covering the
semiconductor element.
[0016] In the method for producing an encapsulating layer-covered
semiconductor element of the present invention, it is preferable
that in the layer disposing step, the semiconductor element is
embedded by the encapsulating layer that is in a B-stage state and
in the encapsulating step, the encapsulating layer is cured to be
brought into a C-stage state and the semiconductor element is
encapsulated by the encapsulating layer in a C-stage state.
[0017] In the method for producing an encapsulating layer-covered
semiconductor element of the present invention, it is preferable
that in the preparing step, the support sheet is prepared so that a
reference mark, which serves as a reference of cutting in the
cutting step, is provided in advance.
[0018] In the method for producing an encapsulating layer-covered
semiconductor element of the present invention, it is preferable
that the semiconductor element is an LED and the encapsulating
layer is a phosphor layer.
[0019] In the method for producing an encapsulating layer-covered
semiconductor element of the present invention, it is preferable
that the encapsulating layer includes a cover portion that covers
the semiconductor element and a reflector portion that contains a
light reflecting component and is formed so as to surround the
cover portion.
[0020] An encapsulating layer-covered semiconductor element of the
present invention is obtained by a method for producing an
encapsulating layer-covered semiconductor element including a
preparing step of preparing a support sheet including a hard
support board formed with a through hole passing through in a
thickness direction and a pressure-sensitive adhesive layer
laminated on a surface at one side in the thickness direction of
the support board so as to cover the through hole; a semiconductor
element disposing step of disposing a semiconductor element on a
surface at one side in the thickness direction of the
pressure-sensitive adhesive layer in opposed to the through hole in
the thickness direction; a semiconductor element covering step of
covering the semiconductor element with an encapsulating layer to
produce an encapsulating layer-covered semiconductor element
including the semiconductor element and the encapsulating layer
covering the semiconductor element; and a semiconductor element
peeling step of inserting a pressing member into the through hole
from the other side in the thickness direction to press the
pressure-sensitive adhesive layer corresponding to the through hole
relatively toward the one side in the thickness direction with
respect to the support board so as to relatively move the
encapsulating layer-covered semiconductor element toward the one
side in the thickness direction and peel the encapsulating
layer-covered semiconductor element from the pressure-sensitive
adhesive layer.
[0021] A semiconductor device of the present invention includes a
board and an encapsulating layer-covered semiconductor element
mounted on the board, wherein the encapsulating layer-covered
semiconductor element is obtained by a method for producing an
encapsulating layer-covered semiconductor element including a
preparing step of preparing a support sheet including a hard
support board formed with a through hole passing through in a
thickness direction and a pressure-sensitive adhesive layer
laminated on a surface at one side in the thickness direction of
the support board so as to cover the through hole; a semiconductor
element disposing step of disposing a semiconductor element on a
surface at one side in the thickness direction of the
pressure-sensitive adhesive layer in opposed to the through hole in
the thickness direction; a semiconductor element covering step of
covering the semiconductor element with an encapsulating layer to
produce an encapsulating layer-covered semiconductor element
including the semiconductor element and the encapsulating layer
covering the semiconductor element; and a semiconductor element
peeling step of inserting a pressing member into the through hole
from the other side in the thickness direction to press the
pressure-sensitive adhesive layer corresponding to the through hole
relatively toward the one side in the thickness direction with
respect to the support board so as to relatively move the
encapsulating layer-covered semiconductor element toward the one
side in the thickness direction and peel the encapsulating
layer-covered semiconductor element from the pressure-sensitive
adhesive layer.
[0022] In the method for producing an encapsulating layer-covered
semiconductor element of the present invention, the pressing member
is inserted into the through hole in the hard support board to
press the pressure-sensitive adhesive layer, so that the
semiconductor element is peeled from the pressure-sensitive
adhesive layer.
[0023] Thus, the semiconductor element can be peeled from the
pressure-sensitive adhesive layer without requiring a step of
reducing the pressure-sensitive adhesive force of the
pressure-sensitive adhesive layer before the semiconductor element
peeling step.
[0024] As a result, the number of steps required for the production
of the encapsulating layer-covered semiconductor element can be
reduced.
[0025] Also, a material for forming the pressure-sensitive adhesive
layer can be widely selected in addition to materials in which the
pressure-sensitive adhesive force is capable of being reduced by
application of ultraviolet ray, a chemical solution, or
heating.
[0026] As a result, the freedom in process planning can be
improved.
[0027] In the encapsulating layer-covered semiconductor element of
the present invention, the number of steps required for the
production thereof is reduced, so that its cost can be reduced.
[0028] The semiconductor device of the present invention includes
the above-described encapsulating layer-covered semiconductor
element, so that its cost can be reduced.
BRIEF DESCRIPTION OF THE DRAWINGS
[0029] FIG. 1 shows process drawings for illustrating a first
embodiment of a method for producing an encapsulating layer-covered
semiconductor element of the present invention:
[0030] FIG. 1 (a) illustrating a step of preparing a support sheet
(a preparing step),
[0031] FIG. 1 (b) illustrating a step of disposing LEDs on a
surface at the upper side of the support sheet (an LED disposing
step),
[0032] FIG. 1 (c) illustrating a step of disposing a phosphor sheet
on the surface at the upper side of the support sheet (a sheet
disposing step),
[0033] FIG. 1 (d) illustrating a step of encapsulating the LEDs by
the phosphor sheet (an encapsulating step) and a step of cutting
the phosphor sheet (a cutting step),
[0034] FIG. 1 (e) illustrating a step of peeling phosphor
sheet-covered LEDs from the support sheet (an LED peeling
step),
[0035] FIG. 1 (e') illustrating a step of describing the details of
a state of peeling the phosphor sheet-covered LEDs from a
pressure-sensitive adhesive layer using a pick-up device in the LED
peeling step in FIG. 1 (e), and
[0036] FIG. 1 (f) illustrating a step of mounting the phosphor
sheet-covered LED on a board (a mounting step).
[0037] FIG. 2 shows a plan view of the support sheet shown in FIG.
1 (a).
[0038] FIG. 3 shows a modified example of the LED peeling step
shown in FIGS. 1 (e) and 1 (e') and shows a modified example of
peeling a plurality of phosphor sheet-covered LEDs that are not
singulated.
[0039] FIG. 4 shows process drawings for illustrating a second
embodiment of a method for producing an encapsulating layer-covered
semiconductor element of the present invention:
[0040] FIG. 4 (a) illustrating a step of preparing a support sheet
(a preparing step),
[0041] FIG. 4 (b) illustrating a step of disposing LEDs on the
support sheet (an LED disposing step),
[0042] FIG. 4 (c) illustrating a step of embedding the LEDs by
embedding portions of an embedding-reflector sheet (a sheet
disposing step),
[0043] FIG. 4 (d) illustrating a step of encapsulating the LEDs by
the embedding portions (an encapsulating step) and a step of
cutting a reflector portion (a cutting step),
[0044] FIG. 4 (e) illustrating a step of peeling phosphor
sheet-covered LEDs each including the reflector portion from the
support sheet (an LED peeling step),
[0045] FIG. 4 (e') illustrating a step of describing the details of
a state of peeling the phosphor sheet-covered LEDs from a
pressure-sensitive adhesive layer using a pick-up device in the LED
peeling step in FIG. 4 (e), and
[0046] FIG. 4 (f) illustrating a step of mounting the phosphor
sheet-covered LED including the reflector portion on a board (a
mounting step).
[0047] FIG. 5 shows a plan view of the phosphor sheet-embedded LEDs
shown in FIG. 4 (d).
[0048] FIG. 6 shows process drawings for illustrating a method for
producing the embedding-reflector sheet shown in FIG. 4 (b):
[0049] FIG. 6 (a) illustrating a step of disposing a reflector
sheet on a pressing device,
[0050] FIG. 6 (b) illustrating a step of pressing the reflector
sheet to form a reflector portion,
[0051] FIG. 6 (c) illustrating a step of disposing a phosphor sheet
on the reflector portion,
[0052] FIG. 6 (d) illustrating a step of pressing the phosphor
sheet to form embedding portions, and
[0053] FIG. 6 (e) illustrating a step of peeling the
embedding-reflector sheet from a releasing sheet.
[0054] FIG. 7 shows process drawings for illustrating a method for
producing an embedding-reflector sheet used in a third embodiment
of a method for producing an encapsulating layer-covered
semiconductor element of the present invention:
[0055] FIG. 7 (a) illustrating a step of disposing a reflector
sheet on a pressing device,
[0056] FIG. 7 (b) illustrating a step of pressing the reflector
sheet to form a reflector portion,
[0057] FIG. 7 (c) illustrating a step of potting a varnish of a
phosphor resin composition into through holes, and
[0058] FIG. 7 (d) illustrating a step of peeling the
embedding-reflector sheet from a releasing sheet.
[0059] FIG. 8 shows process drawings for illustrating a fourth
embodiment of a method for producing an encapsulating layer-covered
semiconductor element of the present invention:
[0060] FIG. 8 (a) illustrating a step of preparing a support sheet
(a preparing step),
[0061] FIG. 8 (b) illustrating a step of disposing LEDs on the
support sheet (an LED disposing step),
[0062] FIG. 8 (c) illustrating a step of embedding the LEDs by
embedding portions of an embedding-reflector sheet (a sheet
disposing step),
[0063] FIG. 8 (d) illustrating a step of encapsulating the LEDs by
the embedding portions (an encapsulating step) and a step of
cutting a reflector portion (a cutting step),
[0064] FIG. 8 (e) illustrating a step of peeling phosphor
sheet-covered LEDs each including the reflector portion from the
support sheet (an LED peeling step),
[0065] FIG. 8 (e') illustrating a step of describing the details of
a state of peeling the phosphor sheet-covered LEDs from a
pressure-sensitive adhesive layer using a pick-up device in the LED
peeling step in FIG. 8 (e), and
[0066] FIG. 8 (f) illustrating a step of mounting the phosphor
sheet-covered LED including the reflector portion on a board (a
mounting step).
[0067] FIG. 9 shows process drawings for illustrating a fifth
embodiment of a method for producing an encapsulating layer-covered
semiconductor element of the present invention:
[0068] FIG. 9 (a) illustrating a step of preparing a support sheet
(a preparing step),
[0069] FIG. 9 (b) illustrating a step of disposing LEDs on the
support sheet (an LED disposing step),
[0070] FIG. 9 (c) illustrating a step of embedding the LEDs by
embedding portions of an embedding-reflector sheet (a sheet
disposing step),
[0071] FIG. 9 (d) illustrating a step of encapsulating the LEDs by
the embedding portions (an encapsulating step) and a step of
cutting a reflector portion (a cutting step),
[0072] FIG. 9 (e) illustrating a step of peeling phosphor
sheet-covered LEDs each including the reflector portion from the
support sheet (an LED peeling step),
[0073] FIG. 9 (e') illustrating a step of describing the details of
a state of peeling the phosphor sheet-covered LEDs from a
pressure-sensitive adhesive layer using a pick-up device in the LED
peeling step in FIG. 9 (e), and
[0074] FIG. 9 (f) illustrating a step of mounting the phosphor
sheet-covered LED including the reflector portion on a board (a
mounting step).
[0075] FIG. 10 shows process drawings for illustrating a method for
producing the embedding-reflector sheet shown in FIG. 9 (b):
[0076] FIG. 10 (a) illustrating a step of disposing a reflector
sheet on a punching device,
[0077] FIG. 10 (b) illustrating a step of stamping out the
reflector sheet to form a reflector portion,
[0078] FIG. 10 (c) illustrating a step of disposing a phosphor
sheet on the reflector portion,
[0079] FIG. 10 (d) illustrating a step of pressing the phosphor
sheet to form embedding portions, and
[0080] FIG. 10 (e) illustrating a step of peeling the
embedding-reflector sheet from a releasing sheet.
[0081] FIG. 11 shows process drawings for illustrating a method for
producing an embedding-reflector sheet used in a sixth embodiment
of a method for producing an encapsulating layer-covered
semiconductor element of the present invention:
[0082] FIG. 11 (a) illustrating a step of disposing a reflector
sheet on a punching device,
[0083] FIG. 11 (b) illustrating a step of stamping out the
reflector sheet to form a reflector portion,
[0084] FIG. 11 (c) illustrating a step of potting a varnish of a
phosphor resin composition into through holes, and
[0085] FIG. 11 (d) illustrating a step of peeling the
embedding-reflector sheet from a releasing sheet.
[0086] FIG. 12 shows process drawings for illustrating a seventh
embodiment of a method for producing an encapsulating layer-covered
semiconductor element of the present invention:
[0087] FIG. 12 (a) illustrating a step of preparing a support sheet
(a preparing step),
[0088] FIG. 12 (b) illustrating a step of disposing LEDs on the
support sheet (an LED disposing step),
[0089] FIG. 12 (c) illustrating a step of covering the LEDs with
cover portions (a covering step),
[0090] FIG. 12 (d) illustrating a step of curing the cover portions
(a curing step) and a step of cutting a reflector portion (a
cutting step),
[0091] FIG. 12 (e) illustrating a step of peeling phosphor
sheet-covered LEDs each including the reflector portion from the
support sheet (an LED peeling step),
[0092] FIG. 12 (e') illustrating a step of describing the details
of a state of peeling the phosphor sheet-covered LEDs from a
pressure-sensitive adhesive layer using a pick-up device in the LED
peeling step in FIG. 12 (e), and
[0093] FIG. 12 (f) illustrating a step of mounting the phosphor
sheet-covered LED including the reflector portion on a board (a
mounting step).
[0094] FIG. 13 shows process drawings for illustrating an eighth
embodiment of a method for producing an encapsulating layer-covered
semiconductor element of the present invention:
[0095] FIG. 13 (a) illustrating a step of preparing a support sheet
(a preparing step),
[0096] FIG. 13 (b) illustrating a step of disposing LEDs on the
support sheet (an LED disposing step),
[0097] FIG. 13 (c) illustrating a step of covering the side
surfaces of the LEDs with a phosphor sheet (a sheet disposing
step),
[0098] FIG. 13 (d) illustrating a step of curing the phosphor sheet
(a curing step) and a step of cutting the phosphor sheet (a cutting
step),
[0099] FIG. 13 (e) illustrating a step of peeling phosphor
sheet-covered LEDs from the support sheet (an LED peeling
step),
[0100] FIG. 13 (e') illustrating a step of describing the details
of a state of peeling the phosphor sheet-covered LEDs from a
pressure-sensitive adhesive layer using a pick-up device in the LED
peeling step in FIG. 13 (e), and
[0101] FIG. 13 (f) illustrating a step of mounting the phosphor
sheet-covered LED on a board (a mounting step).
[0102] FIG. 14 shows a perspective view of a dispenser used in a
ninth embodiment of a method for producing an encapsulating
layer-covered semiconductor element of the present invention.
DETAILED DESCRIPTION OF THE INVENTION
First Embodiment
[0103] In FIG. 1, the up-down direction of the paper surface is
referred to as an up-down direction (a first direction, a thickness
direction); the right-left direction of the paper surface is
referred to as a right-left direction (a second direction, a
direction perpendicular to the first direction); and the paper
thickness direction of the paper is referred to as a front-rear
direction (a third direction, a direction perpendicular to the
first direction and the second direction). Directions and direction
arrows in FIG. 2 and the subsequent figures are in conformity with
the above-described directions and the direction arrows in FIG.
1.
[0104] FIG. 1 shows process drawings for illustrating a first
embodiment of a method for producing an encapsulating layer-covered
semiconductor element of the present invention. FIG. 2 shows a plan
view of the support sheet shown in FIG. 1 (a).
[0105] In FIG. 2, a pressure-sensitive adhesive layer 3 to be
described later is omitted so as to clearly show the relative
arrangement of a support board 2 and a reference mark 18 to be
described later.
[0106] As shown in FIGS. 1 (a) to 1 (e), a method for producing a
phosphor sheet-covered LED 10 that is one example of a phosphor
layer-covered LED as an encapsulating layer-covered semiconductor
element includes a preparing step of a support sheet 1 (ref: FIG. 1
(a)), an LED disposing step of disposing LEDs 4 as semiconductor
elements (one example of a semiconductor element disposing step,
ref: FIG. 1 (b)), an LED covering step (one example of a
semiconductor element covering step, ref: FIGS. 1 (c) and 1 (d)),
and an LED peeling step (one example of a semiconductor element
peeling step, ref: FIGS. 1 (e) and 1 (e')).
[0107] The LED covering step includes a sheet disposing step (one
example of a layer disposing step, ref: FIG. 1 (c)) of, after the
LED disposing step, disposing a phosphor sheet 5 as an
encapsulating sheet that is one example of an encapsulating layer
on the surface at the upper side (the upper surface) of the support
sheet 1; an encapsulating step (ref: FIG. 1 (d)) of curing the
phosphor sheet 5 to encapsulate the LEDs 4 by the phosphor sheet 5;
and a cutting step (ref: dashed lines in FIG. 1 (d)) of, after the
encapsulating step, cutting the phosphor sheet 5 corresponding to
each of the LEDs 4 to produce the phosphor sheet-covered LEDs
10.
[0108] [Preparing Step]
[0109] The preparing step is a step of preparing the support sheet
1. As shown in FIGS. 1 (a) and 2, the support sheet 1 is formed
into a sheet shape extending in the plane direction (a direction
perpendicular to the thickness direction, that is, the right-left
direction and the front-rear direction). The support sheet 1 is
formed into, for example, a rectangular shape in plane view (a
shape when projected in the thickness direction).
[0110] The support sheet 1 is prepared so that the reference marks
18, which serve as a reference of cutting in the cutting step to be
described later, are provided in advance.
[0111] As shown in FIG. 2, a plurality of the reference marks 18
are provided at spaced intervals to each other at the circumference
end portion in the plane direction of the support sheet 1. The
reference marks 18 are, for example, provided at two sides that are
opposed to each other in the support sheet 1. The reference marks
18 are formed to make a pair opposing to each other in an opposing
direction of the two sides of the support sheet 1. One pair of the
reference marks 18 is provided corresponding to the LEDs 4 that are
subsequently disposed and is disposed so as to be capable of
singulating the LEDs 4 when the phosphor sheet 5 is cut with the
reference marks 18 as a reference.
[0112] Each of the reference marks 18 is formed into a shape that
is easily recognized in plane view and is, for example, formed into
a generally triangular shape in plane view.
[0113] The maximum length of the support sheet 1 is, for example,
10 mm or more and 300 mm or less.
[0114] The support sheet 1 is configured to be capable of
supporting the LEDs 4 (ref: FIG. 1 (b)) to be described next and as
shown in FIGS. 1 (a) and 2, includes, for example, the support
board 2 and the pressure-sensitive adhesive layer 3 that is
laminated on the surface at the upper side of the support board
2.
[0115] The support board 2 is formed into a plate shape extending
in the plane direction. The support board 2 is provided in the
lower portion of the support sheet 1 and is formed to have the
generally same shape as that of the support sheet 1 in plane
view.
[0116] In the surface at the upper side of the support board 2, the
reference marks 18 are formed. The reference marks 18 are, in
sectional view, though not shown, formed as concave portions that
dent from the surface at the upper side of the support board 2
toward the middle in the up-down direction thereof or as holes that
pass through in the up-down direction thereof.
[0117] The support board 2 is formed of a hard material. To be
specific, examples of the material include an oxide such as a
silicon oxide (silica or the like) and alumina, a metal such as
stainless steel, and silicon.
[0118] The support board 2 has a Young's modulus at 23.degree. C.
of, for example, 1.times.10.sup.6 Pa or more, preferably
1.times.10.sup.7 Pa or more, or more preferably 1.times.10.sup.8 Pa
or more, and of, for example, 1.times.10.sup.12 Pa or less. When
the Young's modulus of the support board 2 is not less than the
above-described lower limit, hardness of the support board 2 is
secured and the LEDs 4 (ref: FIG. 1 (b)) to be described later can
be further surely supported. The Young's modulus of the support
board 2 is obtained by, for example, the compressive elastic
modulus in JIS H 7902:2008.
[0119] The thickness of the support board 2 is, for example, 0.1 mm
or more, or preferably 0.3 mm or more, and is, for example, 5 mm or
less, or preferably 2 mm or less.
[0120] In the support board 2, through holes 21 for allowing a
pressing member 14 to insert thereinto in the LED peeling step to
be described later are formed.
[0121] As shown in FIG. 2, a plurality of the through holes 21 are
provided at spaced intervals to each other in the support board 2
corresponding to the LEDs 4 that are subsequently disposed. The
through holes 21 are, for example, disposed so as to allow each of
the phosphor sheet-covered LEDs 10 to be pressed when the phosphor
sheet-covered LEDs 10 are singulated with the reference marks 18 as
a reference.
[0122] To be more specific, a plurality of the through holes 21 are
disposed in alignment in the support sheet 1 so as to be spaced
apart from each other at equal intervals in the front-rear and the
right-left directions in plane view.
[0123] The shape of each of the through holes 21 is, for example,
formed into a circular shape in plane view. In the size thereof,
the hole diameter is, for example, 0.1 mm or more, or preferably
0.2 mm or more, and is, for example, 1 mm or less, or preferably
0.7 mm or less.
[0124] The size of each of the through holes 21 with respect to
that of each of the LEDs 4 is, for example, 10% or more, or
preferably 20% or more, and is, for example, 90% or less, or
preferably 80% or less.
[0125] The pressure-sensitive adhesive layer 3 is formed on the
entire surface at the upper side of the support board 2.
[0126] That is, the pressure-sensitive adhesive layer 3 is
laminated on the surface at the upper side (the surface at one side
in the thickness direction) of the support board 2 so as to cover
the through holes 21.
[0127] An example of a pressure-sensitive adhesive material for
forming the pressure-sensitive adhesive layer 3 includes a
pressure-sensitive adhesive such as an acrylic pressure-sensitive
adhesive and a silicone pressure-sensitive adhesive.
[0128] The pressure-sensitive adhesive material can be widely
selected from materials that can be usually used as a
pressure-sensitive adhesive, in addition to materials in which the
pressure-sensitive adhesive force is capable of being reduced by
application of ultraviolet ray, a chemical solution, or
heating.
[0129] The thickness of the pressure-sensitive adhesive layer 3 is,
for example, 0.1 mm or more, or preferably 0.2 mm or more, and is,
for example, 1 mm or less, or preferably 0.5 mm or less.
[0130] In order to prepare the support sheet 1, for example, the
support board 2 is attached to the pressure-sensitive adhesive
layer 3.
[0131] The thickness of the support sheet 1 is, for example, 0.2 mm
or more, or preferably 0.5 mm or more, and is, for example, 6 mm or
less, or preferably 2.5 mm or less.
[0132] [LED Disposing Step]
[0133] The LED disposing step is a step of disposing the LEDs 4 on
the pressure-sensitive adhesive layer 3. As shown in FIG. 1 (b) and
by phantom lines in FIG. 2, a plurality of the LEDs 4 are prepared
to be disposed on the surface at the upper side (the surface at one
side in the thickness direction) of the support sheet 1.
[0134] The LEDs 4 are semiconductor elements that convert
electrical energy to light energy. Each of the LEDs 4 is, for
example, formed into a generally rectangular shape in sectional
view and a generally rectangular shape in plane view with the
thickness shorter than the length in the plane direction (the
maximum length). The surface at the lower side (the lower surface)
of each of the LEDs 4 is formed of a bump that is not shown. An
example of the LEDs 4 includes blue light emitting diode elements
that emit blue light.
[0135] The maximum length in the plane direction of each of the
LEDs 4 is, for example, 0.1 mm or more and 3 mm or less. The
thickness thereof is, for example, 0.05 mm or more and 1 mm or
less.
[0136] In the LED disposing step, for example, a plurality of the
LEDs 4 are disposed in alignment on the surface at the upper side
of the support sheet 1. To be specific, a plurality of the LEDs 4
are disposed in such a manner that a plurality of the LEDs 4 are
arranged at equal intervals to each other in the front-rear and the
right-left directions in plane view.
[0137] The LEDs 4 are disposed on the surface at the upper side
(the surface at one side in the thickness direction) of the
pressure-sensitive adhesive layer 3 so as to be opposed to the
through holes 21 in the thickness direction and the LEDs 4 are
attached to the pressure-sensitive adhesive layer 3 so that the
bumps thereof that are not shown are opposed to the support sheet
1. In this way, the LEDs 4 are supported by the surface at the
upper side of the support board 2 via the pressure-sensitive
adhesive layer 3 so that the alignment state thereof is
retained.
[0138] Each of the LEDs 4 is disposed so that each of the
corresponding through holes 21 is positioned at the center
thereof.
[0139] The gap between the LEDs 4 is, for example, 0.05 mm or more
and 2 mm or less.
[0140] [LED Covering Step]
[0141] The LED covering step is a step of covering the surfaces of
the LEDs 4 with the phosphor sheet 5 to produce the phosphor
sheet-covered LEDs 10, each of which includes the LED 4 and the
phosphor sheet 5 covering the surfaces of the LED 4. The LED
covering step includes a sheet disposing step, an encapsulating
step, and a cutting step.
[0142] (Sheet Disposing Step)
[0143] The sheet disposing step is a step of, after the LED
disposing step, disposing the phosphor sheet 5 on the support sheet
1 so as to embed the LEDs 4. In FIG. 1 (c), the phosphor sheet 5 is
formed from a phosphor resin composition containing a curable resin
and a phosphor into a sheet shape.
[0144] Examples of the curable resin include a thermosetting resin
that is cured by heating and an active energy ray curable resin
that is cured by application of an active energy ray (for example,
an ultraviolet ray and an electron beam). Preferably, a
thermosetting resin is used.
[0145] To be specific, an example of the curable resin includes a
thermosetting resin such as a silicone resin, an epoxy resin, a
polyimide resin, a phenol resin, a urea resin, a melamine resin,
and an unsaturated polyester resin. Preferably, a silicone resin is
used.
[0146] An example of the silicone resin includes a silicone resin
such as a two-step curable type silicone resin and a one-step
curable type silicone resin. Preferably, a two-step curable type
silicone resin is used.
[0147] The two-step curable type silicone resin is a thermosetting
silicone resin that has a two-step reaction mechanism and in which
a silicone resin is brought into a B-stage state (a semi-cured
state) in the first-step reaction and is brought into a C-stage
state (a completely cured state) in the second-step reaction. On
the other hand, the one-step curable type silicone resin is a
thermosetting silicone resin that has a one-step reaction mechanism
and in which a silicone resin is completely cured in the first-step
reaction.
[0148] The B-stage state is a state between an A-stage state in
which a thermosetting silicone resin is in a liquid state and a
C-stage state in which the thermosetting silicone resin is
completely cured. Also, the B-stage state is a state in which the
curing and the gelation of the thermosetting silicone resin are
slightly progressed and the compressive elastic modulus thereof is
smaller than the elastic modulus thereof in a C-stage state.
[0149] An example of the two-step curable type silicone resin
includes a condensation reaction and addition reaction curable type
silicone resin that has two reaction systems of a condensation
reaction and an addition reaction.
[0150] The mixing ratio of the curable resin with respect to the
phosphor resin composition is, for example, 30 mass % or more, or
preferably 50 mass % or more, and is, for example, 99 mass % or
less, or preferably 95 mass % or less.
[0151] The phosphor has a wavelength conversion function and
examples thereof include a yellow phosphor that is capable of
converting blue light into yellow light and a red phosphor that is
capable of converting blue light into red light.
[0152] Examples of the yellow phosphor include a garnet type
phosphor having a garnet type crystal structure such as
Y.sub.3Al.sub.5O.sub.12:Ce (YAG (yttrium aluminum garnet):Ce) and
Tb.sub.3Al.sub.3O.sub.12:Ce (TAG (terbium aluminum garnet):Ce) and
an oxynitride phosphor such as Ca-.alpha.-SiAlON.
[0153] An example of the red phosphor includes a nitride phosphor
such as CaAlSiN.sub.3:Eu and CaSiN.sub.2:Eu.
[0154] Preferably, a yellow phosphor is used.
[0155] Examples of a shape of the phosphor include a sphere shape,
a plate shape, and a needle shape. Preferably, in view of fluidity,
a sphere shape is used.
[0156] The average value of the maximum length (in the case of a
sphere shape, the average particle size) of the phosphor is, for
example, 0.1 .mu.m or more, or preferably 1 .mu.m or more, and is,
for example, 200 .mu.m or less, or preferably 100 .mu.m or
less.
[0157] The mixing ratio of the phosphor with respect to 100 parts
by mass of the curable resin is, for example, 0.1 parts by mass or
more, or preferably 0.5 parts by mass or more, and is, for example,
80 parts by mass or less, or preferably 50 parts by mass or
less.
[0158] Furthermore, the phosphor resin composition can also contain
a filler.
[0159] Examples of the filler include organic microparticles such
as silicone particles and inorganic microparticles such as silica,
talc, alumina, aluminum nitride, and silicon nitride. The mixing
ratio of the filler with respect to 100 parts by mass of the
curable resin is, for example, 0.1 parts by mass or more, or
preferably 0.5 parts by mass or more, and is, for example, 70 parts
by mass or less, or preferably 50 parts by mass or less.
[0160] As shown in FIG. 1 (c), in order to dispose the phosphor
sheet 5 on the support sheet 1, first, as shown in FIG. 1 (b), the
phosphor sheet 5 is prepared. In order to prepare the phosphor
sheet 5, a curable resin and a phosphor, and a filler, which is
blended as required, are blended to prepare a phosphor resin
composition. Next, the phosphor resin composition is applied to the
surface of a release sheet 6 to be then heated. Examples of the
release sheet 6 include a polymer film such as a polyethylene film
and a polyester film (PET or the like), a ceramic sheet, and a
metal foil. Preferably, a polymer film is used. The surface of the
release sheet 6 can be also subjected to release treatment such as
fluorine treatment.
[0161] When the curable resin contains a two-step curable type
silicone resin, the curable resin is brought into a B-stage state
(a semi-cured state) by the above-described heating. That is, the
phosphor sheet 5 in a B-stage state is formed.
[0162] The phosphor sheet 5 has a compressive elastic modulus at
23.degree. C. of, for example, 0.01 MPa or more, or preferably 0.04
MPa or more, and of, for example, 1.0 MPa or less, or preferably
0.5 MPa or less.
[0163] When the compressive elastic modulus of the phosphor sheet 5
is not more than the above-described upper limit, sufficient
flexibility can be secured. On the other hand, when the compressive
elastic modulus of the phosphor sheet 5 is not less than the
above-described lower limit, the LEDs 4 can be embedded.
[0164] Next, as shown in FIG. 1 (c), the phosphor sheet 5 is
disposed on the surface at the upper side of the support sheet 1 so
as to embed the LEDs 4 (an embedding step). That is, the phosphor
sheet 5 is disposed on the support sheet 1 so as to cover the upper
surfaces and the side surfaces of the LEDs 4.
[0165] To be specific, as shown by arrows in FIG. 1 (b), the
phosphor sheet 5 laminated on the release sheet 6 is compressively
bonded toward the pressure-sensitive adhesive layer 3.
[0166] In this way, in the sheet disposing step, the embedding step
in which the LEDs 4 are embedded by the phosphor sheet 5 is
performed.
[0167] Thereafter, as shown by the phantom line in FIG. 1 (c), the
release sheet 6 is peeled from the surface at the upper side of the
phosphor sheet 5.
[0168] (Encapsulating Step)
[0169] The encapsulating step is a step of curing the phosphor
sheet 5 to encapsulate the LEDs 4 by the phosphor sheet 5 that is
flexible. The encapsulating step is performed after the sheet
disposing step (ref: FIG. 1 (c)).
[0170] In the encapsulating step, as shown in FIG. 1 (d), the
phosphor sheet 5 is cured. To be specific, the phosphor sheet 5 is
heated at, for example, 80.degree. C. or more, or preferably
100.degree. C. or more, and at, for example, 200.degree. C. or
less, or preferably 180.degree. C. or less.
[0171] When the thermosetting resin contains a two-step curable
type silicone resin and when the phosphor sheet 5 that embeds the
LEDs 4 is in a B-stage state, the phosphor sheet 5 is completely
cured (subjected to a final curing) to be brought into a C-stage
state by the above-described heating.
[0172] When the curable resin contains a one-step curable type
silicone resin, the phosphor sheet 5 that is made from the curable
resin is completely cured (subjected to a final curing) to be
brought into a C-stage state by the above-described heating.
[0173] When the curable resin is an active energy ray curable
resin, an active energy ray is applied to the phosphor sheet 5 from
the upper side.
[0174] The cured (completely cured) phosphor sheet 5 has
flexibility. To be specific, the cured (completely cured) phosphor
sheet 5 has a compressive elastic modulus at 23.degree. C. of, for
example, 0.5 MPa or more, or preferably 1 MPa or more, and of, for
example, 100 MPa or less, or preferably 10 MPa or less.
[0175] When the compressive elastic modulus of the phosphor sheet 5
is not more than the above-described upper limit, the flexibility
can be surely secured and in the cutting step (ref: FIG. 1 (d)) to
be described next, for example, the phosphor sheet 5 can be cut
using a cutting device (described later). When the compressive
elastic modulus of the phosphor sheet 5 is not less than the
above-described lower limit, the shape thereof after being cut can
be retained.
[0176] In this way, the side surfaces and the upper surfaces of the
LEDs 4, and a portion of the surface at the upper side of the
pressure-sensitive adhesive layer 3 that is exposed from the LEDs 4
are covered with the phosphor sheet 5 in close contact with each
other. That is, the LEDs 4 are encapsulated by the phosphor sheet 5
in a C-stage state.
[0177] (Cutting Step)
[0178] The cutting step is a step of, after the encapsulating step,
cutting the phosphor sheet 5 corresponding to each of the LEDs 4 to
produce the phosphor sheet-covered LEDs 10, each of which includes
the LED 4 and the phosphor sheet 5. As shown by the dashed lines in
FIG. 1 (d), in the cutting step, the flexible phosphor sheet 5
around the LEDs 4 is cut along the thickness direction. As shown by
dash-dot lines in FIG. 2, for example, the phosphor sheet 5 is cut
into a generally rectangular shape in plane view that surrounds
each of the LEDs 4.
[0179] In order to cut the phosphor sheet 5, for example, a dicing
device using a disc-shaped dicing saw (dicing blade) 31 (ref: FIG.
1 (d)), a cutting device using a cutter, a laser irradiation
device, or the like is used.
[0180] The cutting of the phosphor sheet 5 is performed with the
reference marks 18 as a reference. To be specific, the phosphor
sheet 5 is cut so as to form cuts 8 along the straight lines (shown
by the dash-dot lines in FIG. 2) that connect the reference marks
18 making one pair.
[0181] In the cutting of the phosphor sheet 5, for example, the
phosphor sheet 5 is cut from the upper side toward the lower side
so that the cuts 8 fail to pass through the support sheet 1, to be
specific, fail to pass through the pressure-sensitive adhesive
layer 3.
[0182] By the cutting step, the phosphor sheet-covered LEDs 10,
each of which includes the LED 4 and the phosphor sheet 5 that is
formed as an encapsulating layer formed of the phosphor sheet 5 so
as to cover the surfaces of the LED 4, are obtained in a state of
being in close contact with the support sheet 1.
[0183] [LED Peeling Step]
[0184] As shown in FIG. 1 (e), the LED peeling step is a step of
peeling each of the phosphor sheet-covered LEDs 10 from the
pressure-sensitive adhesive layer 3. As shown in FIG. 1 (e'), using
a pick-up device 17 that is provided with the pressing member 14
such as a needle and an absorbing member 16 such as a collet, the
pressure-sensitive adhesive layer 3 is pressed by the pressing
member 14 via the through hole 21, so that each of the phosphor
sheet-covered LEDs 10 is peeled from the support board 2 and the
pressure-sensitive adhesive layer 3.
[0185] To be specific, first, the support sheet 1 is placed in the
pick-up device 17. Then, the pressing member 14 is disposed from
the lower side (the other side in the thickness direction) in
opposed relation to the through hole 21 corresponding to the
phosphor sheet-covered LED 10 that is intended to be peeled
off.
[0186] Then, the pressing member 14 is inserted into the through
hole 21 from the lower side.
[0187] Then, the pressure-sensitive adhesive layer 3 corresponding
to the through hole 21 is pressed relatively toward the upper side
(one side in the thickness direction) with respect to the support
board 2 and the pressure-sensitive adhesive layer 3 is pushed up
along with the phosphor sheet-covered LED 10.
[0188] The pushed-up phosphor sheet-covered LED 10 is absorbed by
the absorbing member 16.
[0189] The phosphor sheet-covered LED 10 is absorbed by the
absorbing member 16 and is further moved relatively toward the
upper side (one side in the thickness direction) with respect to
the support board 2. Thereafter, the phosphor sheet-covered LED 10
is peeled from the pressure-sensitive adhesive layer 3.
[0190] Before the LED peeling step, the pressure-sensitive adhesive
force of the pressure-sensitive adhesive layer 3 is reduced by
application of ultraviolet ray, a chemical solution, or heating as
required and then, each of the phosphor sheet-covered LEDs 10 can
be also peeled off.
[0191] In this way, as shown in FIG. 1 (e), each of the phosphor
sheet-covered LEDs 10 that is peeled from the support sheet 1 is
obtained.
[0192] [Mounting Step]
[0193] The mounting step is a step of, after the LED peeling step,
mounting the phosphor sheet-covered LED 10 on a board 9. After the
phosphor sheet-covered LED 10 is selected in accordance with
emission wavelength and luminous efficiency, as shown in FIG. 1
(f), the selected phosphor sheet-covered LED 10 is mounted on the
board 9. In this way, an LED device 15 as a semiconductor device is
obtained.
[0194] To be specific, the phosphor sheet-covered LED 10 is
disposed in opposed relation to the board 9 so that a bump (not
shown) in the LED 4 is opposed to a terminal (not shown) provided
on the surface at the upper side of the board 9. That is, the LED 4
in the phosphor sheet-covered LED 10 is flip-chip mounted on the
board 9.
[0195] In this way, the LED device 15 including the board 9 and the
phosphor sheet-covered LED 10 that is mounted on the board 9 is
obtained.
[0196] Thereafter, as shown by the phantom line in FIG. 1 (f), an
encapsulating protective layer 20 (an encapsulating layer that is
different from the phosphor sheet 5) that encapsulates the phosphor
sheet-covered LED 10 is provided in the LED device 15 as required.
In this way, reliability of the LED device 15 can be improved.
[0197] According to the method for producing the phosphor
sheet-covered LED 10, in the preparing step, the hard support board
2 in which the through holes 21 are formed in advance is prepared
and in the LED peeling step, using the above-described pick-up
device 17, the pressing member 14 is inserted into the through hole
21 in the support board 2 to press the pressure-sensitive adhesive
layer 3, so that each of the phosphor sheet-covered LEDs 10 is
peeled from the pressure-sensitive adhesive layer 3.
[0198] Thus, each of the LEDs 4 can be peeled from the
pressure-sensitive adhesive layer 3 without requiring a step in
which the pressure-sensitive adhesive force of the
pressure-sensitive adhesive layer 3 is reduced before the LED
peeling step.
[0199] As a result, the number of steps required for the production
of the phosphor sheet-covered LED 10 can be reduced.
[0200] Also, a material for forming the pressure-sensitive adhesive
layer 3 can be widely selected in addition to materials in which
the pressure-sensitive adhesive force is capable of being reduced
by application of ultraviolet ray, a chemical solution, or
heating.
[0201] As a result, the freedom in process planning can be
improved.
[0202] On the other hand, the method for producing the phosphor
sheet-covered LED 10 includes the cutting step and after the
cutting step, each of the phosphor sheet-covered LEDs 10 is peeled
from the support sheet 1. That is, in the cutting step, the
phosphor sheet 5 is capable of being cut, while the LEDs 4 and the
phosphor sheet 5 are supported by the support sheet 1 including the
hard support board 2. Thus, the phosphor sheet-covered LED 10
having excellent size stability can be obtained.
[0203] After the encapsulating step in which the phosphor sheet 5
is cured, the cutting step in which the phosphor sheet 5 is cut is
performed, so that a dimensional deviation caused by shrinkage of
the phosphor sheet 5 that may occur in the curing can be cancelled
in the cutting step. Thus, the phosphor sheet-covered LED 10 having
further excellent size stability can be obtained.
[0204] In addition, the phosphor sheet 5 that encapsulates the LEDs
4 is flexible, so that in the cutting step, the phosphor sheet 5 is
capable of being smoothly cut not only using an expensive dicing
device, but also using various cutting devices including a
relatively cheap cutting device.
[0205] In addition, in the sheet disposing step in this method, the
LEDs 4 are embedded by the phosphor sheet 5 in a B-stage state; in
the encapsulating step, the phosphor sheet 5 is cured to be brought
into a C-stage state; and the phosphor sheet 5 in a C-stage state
encapsulates the LEDs 4. Thus, the LEDs 4 are easily and surely
covered with the phosphor sheet 5 in a B-stage state and the
phosphor sheet 5 in a C-stage state is capable of surely
encapsulating the LEDs 4.
[0206] Consequently, the phosphor sheet-covered LED 10 has
excellent size stability.
[0207] In the phosphor sheet-covered LED 10, the number of steps
required for the production thereof is reduced, so that its cost
can be reduced.
[0208] The LED device 15 includes the above-described phosphor
sheet-covered LED 10, so that its cost can be reduced.
[0209] In the preparing step in this method, the support sheet 1 is
prepared so that the reference marks 18, which serve as a reference
of cutting in the cutting step, are provided in advance.
[0210] On the other hand, in the method described in Japanese
Unexamined Patent Publication No. 2001-308116 in which dummy wafers
are peeled from a silica glass substrate or a pressure-sensitive
adhesive sheet to be then subjected to dicing, the dummy wafers are
not on the silica glass substrate when subjected to dicing and
thus, the dicing is not capable of being performed with the
above-described reference marks 18 as a reference.
[0211] In contrast, in the above-described method, the LEDs 4 are
supported by the support sheet 1 in the cutting step, so that in
this way, the LEDs 4 can be singulated with excellent accuracy with
the reference marks 18 as a reference.
Modified Example
[0212] In the first embodiment, as shown in FIG. 2, each of the
through holes 21 is formed into a circular shape in plane view.
However, the shape thereof is not particularly limited and can be
formed into an appropriate shape such as a generally rectangular
shape in plane view or a generally triangular shape in plane
view.
[0213] In the first embodiment, as shown in FIG. 2, each of the
reference marks 18 is formed into a generally triangular shape in
plane view. However, the shape thereof is not particularly limited
and can be formed into an appropriate shape such as a generally
circular shape in plane view, a generally rectangular shape in
plane view, a generally X-shape in plane view, and a generally
T-shape in plane view.
[0214] In the first embodiment, first, in the cutting step, a
plurality of the LEDs 4 and the phosphor sheet 5 that covers the
surfaces of a plurality of the LEDs 4 (hereinafter, these are
defined as phosphor sheet-covered LEDs 10') are singulated into
each of the phosphor sheet-covered LEDs 10. Next, in the LED
peeling step, each of the phosphor sheet-covered LEDs 10 is peeled
from the pressure-sensitive adhesive layer 3. Alternatively, in the
cutting step, the phosphor sheet-covered LEDs 10' are not
singulated and in the LED peeling step, the phosphor sheet-covered
LEDs 10' can be peeled from the pressure-sensitive adhesive layer
3.
[0215] FIG. 3 shows a modified example of the LED peeling step
shown in FIGS. 1 (e) and 1 (e') and shows a modified example of
peeling the phosphor sheet-covered LEDs 10' (a plurality of the
phosphor sheet-covered LEDs 10 that are not singulated).
[0216] In the modified example, as shown in FIG. 3, the pick-up
device 17 is provided with a plurality of the pressing members 14
and a plurality of the absorbing members 16 corresponding to a
plurality of the LEDs 4. A plurality of the pressing members 14
move relative to one another in the up-down direction at the same
time.
[0217] In order to peel the phosphor sheet-covered LEDs 10', first,
the phosphor sheet-covered LEDs 10' are placed in the pick-up
device 17 and each of a plurality of the pressing members 14 is
disposed from the lower side (the other side in the thickness
direction) in opposed relation to each of a plurality of the
through holes 21.
[0218] A plurality of the pressing members 14 are simultaneously
inserted into a plurality of the through holes 21 from the lower
side.
[0219] Then, the entire pressure-sensitive adhesive layer 3 is
pressed relatively toward the upper side (one side in the thickness
direction) with respect to the support board 2 and the entire
pressure-sensitive adhesive layer 3 is pushed up along with the
phosphor sheet-covered LEDs 10'.
[0220] The pushed-up phosphor sheet-covered LEDs 10' are absorbed
by a plurality of the absorbing members 16.
[0221] The phosphor sheet-covered LEDs 10' are absorbed by a
plurality of the absorbing members 16 and are further moved
relatively toward the upper side (one side in the thickness
direction) with respect to the support board 2. Thereafter, the
phosphor sheet-covered LEDs 10' are peeled from the
pressure-sensitive adhesive layer 3.
[0222] Furthermore, in the first embodiment, a plurality of the
LEDs 4 are covered with and encapsulated by the phosphor sheet 5.
Alternatively, for example, a single piece of the LED 4 can be
covered with and encapsulated by the phosphor sheet 5.
[0223] In such a case, to be specific, in the cutting step shown in
FIG. 1 (d) that is illustrated in the first embodiment, the
phosphor sheet 5 around the LED 4 is trimmed (subjected to
trimming) so as to have a desired size.
Second Embodiment
[0224] FIG. 4 shows process drawings for illustrating a second
embodiment of a method for producing an encapsulating layer-covered
semiconductor element of the present invention. FIG. 5 shows a plan
view of the phosphor sheet-embedded LEDs shown in FIG. 4 (d). FIG.
6 shows process drawings for illustrating a method for producing
the embedding-reflector sheet shown in FIG. 4 (b).
[0225] In the second embodiment, the same reference numerals are
provided for members and steps corresponding to each of those in
the first embodiment, and their detailed description is
omitted.
[0226] In the first embodiment, as shown in FIG. 1 (b), the
phosphor sheet 5 in which a phosphor is uniformly (uniformly at
least in the plane direction) dispersed is illustrated as an
encapsulating sheet that is one example of the encapsulating layer
of the present invention. Alternatively, for example, as shown in
FIGS. 4 (b) and 5, an embedding-reflector sheet 24 that includes
embedding portions 33 containing a phosphor as cover portions and a
reflector portion 34 surrounding the embedding portions 33 can be
also illustrated as an encapsulating sheet.
[0227] As shown in FIG. 5, a plurality of the embedding portions 33
are provided at spaced intervals to each other as portions that
embed a plurality of the LEDs 4 in the embedding-reflector sheet
24. Each of the embedding portions 33 is formed into a generally
circular shape in plane view. To be specific, as shown in FIG. 4
(b), each of the embedding portions 33 is formed into a generally
conical trapezoidal shape in which its width is gradually reduced
toward the lower side.
[0228] The diameter (the maximum length) of the lower end portion
of each of the embedding portions 33 is larger than the maximum
length in the plane direction of each of the LEDs 4. To be
specific, the diameter (the maximum length) of the lower end
portion thereof with respect to the maximum length in the plane
direction of each of the LEDs 4 is, for example, 200% or more,
preferably 300% or more, or more preferably 500% or more, and is,
for example, 3000% or less. To be more specific, the diameter (the
maximum length) of the lower end portion of each of the embedding
portions 33 is, for example, 5 mm or more, or preferably 7 mm or
more, and is, for example, 300 mm or less, or preferably 200 mm or
less.
[0229] The diameter (the maximum length) of the upper end portion
of each of the embedding portions 33 is larger than the diameter
(the maximum length) of the lower end portion thereof. To be
specific, the diameter (the maximum length) of the upper end
portion thereof is, for example, 7 mm or more, or preferably 10 mm
or more, and is, for example, 400 mm or less, or preferably 250 mm
or less.
[0230] The gap between the embedding portions 33 (the minimum gap,
to be specific, the gap between the upper end portions of the
embedding portions 33) is, for example, 20 mm or more, or
preferably 50 mm or more, and is, for example, 1000 mm or less, or
preferably 200 mm or less.
[0231] The embedding portions 33 are formed from the
above-described phosphor resin composition. When the phosphor resin
composition contains a curable resin, the embedding portions 33 are
formed in a B-stage state.
[0232] As shown in FIG. 5, the reflector portion 34 is continuous
at the circumference end portion of the embedding-reflector sheet
24 and is disposed between the embedding portions 33. The reflector
portion 34 is formed into a generally grid shape in plane view
surrounding each of the embedding portions 33.
[0233] The reflector portion 34 is formed from a reflecting resin
composition containing a light reflecting component to be described
later.
[0234] Next, a method for producing the embedding-reflector sheet
24 is described with reference to FIGS. 5 and 6.
[0235] In this method, first, as shown in FIG. 6 (a), a pressing
device 35 is prepared.
[0236] The pressing device 35 is provided with a support board 36
and a die 37 that is disposed in opposed relation to the upper side
of the support board 36.
[0237] The support board 36 is, for example, formed of a metal such
as stainless steel into a generally rectangular flat plate
shape.
[0238] The die 37 is, for example, formed of a metal such as
stainless steel and integrally includes a flat plate portion 38 and
extruded portions 39 that are formed to be extruded downwardly from
the flat plate portion 38.
[0239] The flat plate portion 38 is formed into the same shape as
that of the support board 36 in plane view.
[0240] In the die 37, a plurality of the extruded portions 39 are
disposed at spaced intervals to each other in the plane direction
so as to correspond to the embedding portions 33. That is, each of
the extruded portions 39 is formed into a generally conical
trapezoidal shape in which its width is gradually reduced from the
lower surface of the flat plate portion 38 toward the lower side.
To be specific, each of the extruded portions 39 is formed into a
tapered shape in which its width is gradually reduced toward the
lower side in front sectional view and side sectional view. That
is, each of the extruded portions 39 is formed into the same shape
as that of each of the embedding portions 33.
[0241] As shown in FIG. 6 (a), a spacer 40 is provided on the upper
surface of the circumference end portion of the support board 36.
The spacer 40 is, for example, formed of a metal such as stainless
steel and is disposed so as to surround a plurality of the
embedding portions 33 when projected in the thickness direction.
The spacer 40 is disposed on the support board 36 so as to be
included in the die 37, to be specific, to be overlapped with the
circumference end portion of the flat plate portion 38, when
projected in the thickness direction.
[0242] The thickness of the spacer 40 is set so as to be the total
thickness of the thickness of a releasing sheet 49 to be described
later and that of each of the extruded portions 39. To be specific,
the thickness of the spacer 40 is, for example, 0.3 mm or more, or
preferably 0.5 mm or more, and is, for example, 5 mm or less, or
preferably 3 mm or less.
[0243] In the pressing device 35, the die 37 is configured to be
replaceable with that having a different shape. To be specific, in
the pressing device 35, the die 37 having the extruded portions 39
shown in FIG. 6 (a) is configured to be replaceable with the die 37
in a flat plate shape having no extruded portion 39 shown in FIG. 6
(c) to be described later.
[0244] As shown in FIG. 6 (a), the releasing sheet 49 is disposed
at the inner side of the spacer 40 on the upper surface of the
support board 36. The circumference end surfaces of the releasing
sheet 49 are, on the upper surface of the support board 36, formed
so as to be in contact with the inner side surfaces of the spacer
40. The thickness of the releasing sheet 49 is, for example, 10
.mu.m or more, or preferably 30 .mu.m or more, and is, for example,
200 .mu.m or less, or preferably 150 .mu.m or less.
[0245] Next, in the pressing device 35 shown in FIG. 6 (a), a
reflector sheet 42 is disposed on the upper surface of the
releasing sheet 49.
[0246] In order to dispose the reflector sheet 42 on the upper
surface of the releasing sheet 49, for example, the following
method is used: that is, a laminating method in which the reflector
sheet 42 formed from a reflecting resin composition is laminated on
the upper surface of the releasing sheet 49 or an application
method in which a liquid reflecting resin composition is applied to
the upper surface of the releasing sheet 49.
[0247] The reflecting resin composition contains, for example, a
resin and a light reflecting component.
[0248] An example of the resin includes a thermosetting resin such
as a thermosetting silicone resin, an epoxy resin, a thermosetting
polyimide resin, a phenol resin, a urea resin, a melamine resin, an
unsaturated polyester resin, a diallyl phthalate resin, and a
thermosetting urethane resin. Preferably, a thermosetting silicone
resin and an epoxy resin are used.
[0249] The light reflecting component is, for example, a white
compound. To be specific, an example of the white compound includes
a white pigment.
[0250] An example of the white pigment includes a white inorganic
pigment. Examples of the white inorganic pigment include an oxide
such as a titanium oxide, a zinc oxide, and a zirconium oxide; a
carbonate such as white lead (lead carbonate) and calcium
carbonate; and a clay mineral such as kaolin (kaolinite).
[0251] As the white inorganic pigment, preferably, an oxide is
used, or more preferably, a titanium oxide is used.
[0252] To be specific, the titanium oxide is TiO.sub.2 (titanium
oxide (IV), titanium dioxide).
[0253] A crystal structure of the titanium oxide is not
particularly limited. Examples of the crystal structure thereof
include a rutile type, a brookite type (pyromelane), and an anatase
type (octahedrite). Preferably, a rutile type is used.
[0254] A crystal system of the titanium oxide is not particularly
limited. Examples of the crystal system thereof include a
tetragonal system and an orthorhombic system. Preferably, a
tetragonal system is used.
[0255] When the crystal structure and the crystal system of the
titanium oxide are the rutile type and the tetragonal system,
respectively, it is possible to effectively prevent a reduction of
the reflectivity with respect to light (to be specific, visible
light, among all, the light around the wavelength of 450 nm) even
in a case where the reflector portion 34 is exposed to a high
temperature for a long time.
[0256] The light reflecting component is in the form of a particle.
The shape thereof is not limited and examples of the shape thereof
include a sphere shape, a plate shape, and a needle shape. The
average value of the maximum length (in the case of a sphere shape,
the average particle size) of the light reflecting component is,
for example, 1 nm or more and 1000 nm or less. The average value of
the maximum length is measured using a laser diffraction scattering
particle size analyzer.
[0257] The mixing ratio of the light reflecting component with
respect to 100 parts by mass of the resin is, for example, 0.5
parts by mass or more, or preferably 1.5 parts by mass or more, and
is, for example, 90 parts by mass or less, or preferably 70 parts
by mass or less.
[0258] The above-described light reflecting component is uniformly
dispersed and mixed in the resin.
[0259] Also, the above-described filler can be further added to the
reflecting resin composition. That is, the filler can be used in
combination with the light reflecting component (to be specific, a
white pigment).
[0260] An example of the filler includes a known filler excluding
the above-described white pigment. To be specific, examples of the
filler include organic microparticles such as silicone particles
and inorganic microparticles such as silica, talc, alumina,
aluminum nitride, and silicon nitride.
[0261] The addition ratio of the filler is adjusted so that the
total amount of the filler and the light reflecting component with
respect to 100 parts by mass of the resin is, for example, 10 parts
by mass or more, preferably 25 parts by mass or more, or more
preferably 40 parts by mass or more, and is, for example, 80 parts
by mass or less, preferably 75 parts by mass or less, or more
preferably 60 parts by mass or less.
[0262] In the laminating method, the reflecting resin composition
is prepared in an A-stage state by blending the above-described
resin and light reflecting component, and the filler, which is
added as required, to be uniformly mixed.
[0263] Subsequently, in the laminating method, the reflecting resin
composition in an A-stage state is applied to the surface of a
release sheet that is not shown by an application method such as a
casting, a spin coating, or a roll coating and thereafter, the
applied product is heated to be brought into a B-stage state or
C-stage state. An example of the release sheet includes the same
one as the above-described release sheet 6.
[0264] Alternatively, for example, the reflecting resin composition
in an A-stage state is applied to the surface of a release sheet
that is not shown using a screen printing or the like by the
above-described application method and thereafter, the applied
product is heated to form the reflector sheet 42 in a B-stage state
or C-stage state.
[0265] Thereafter, the reflector sheet 42 is transferred onto the
releasing sheet 49. Subsequently, the release sheet that is not
shown is peeled off.
[0266] On the other hand, in the application method, the
above-described reflecting resin composition in an A-stage state is
applied to the upper surface of the releasing sheet 49 using a
screen printing or the like and thereafter, the applied product is
heated to form the reflector sheet 42 in a B-stage state.
[0267] The thickness of the reflector sheet 42 is, for example, 0.3
mm or more, or preferably 0.5 mm or more, and is, for example, 5 mm
or less, or preferably 3 mm or less.
[0268] Subsequently, as shown by the arrows in FIG. 6 (a), and in
FIG. 6 (b), the reflector sheet 42 is pressed by the pressing
device 35.
[0269] To be specific, the die 37 is pushed down with respect to
the support board 36. To be more specific, the die 37 is pushed
downwardly so that the extruded portions 39 pass through the
reflector sheet 42 in the thickness direction. Along with this, the
circumference end portion of the flat plate portion 38 in the die
37 is brought into contact with the upper surface of the spacer
40.
[0270] In this way, as shown in FIG. 6 (b), in the reflector sheet
42, through holes 41, which pass through the reflector sheet 42 in
the thickness direction and are in shapes corresponding to the
extruded portions 39, are formed.
[0271] In the pushing down of the die 37, when the reflecting resin
composition contains a thermosetting resin in a B-stage state, a
heater (not shown) is built in the die 37 in advance and the
reflector sheet 42 can be also heated by the heater. In this way,
the reflecting resin composition is completely cured (is brought
into a C-stage state).
[0272] The heating temperature is, for example, 80.degree. C. or
more, or preferably 100.degree. C. or more, and is, for example,
200.degree. C. or less, or preferably 180.degree. C. or less.
[0273] In this way, the reflector portion 34 is formed on the
releasing sheet 49.
[0274] Thereafter, as shown in FIG. 6 (c), a pressing state of the
pressing device 35 is released. To be specific, the die 37 is
pulled up.
[0275] Subsequently, the die 37 including the flat plate portion 38
and the extruded portions 39 is replaced with the die 37 including
the flat plate portion 38 only.
[0276] Along with this, the phosphor sheet 5 is disposed on the
reflector portion 34.
[0277] To be specific, the phosphor sheet 5 is disposed on the
upper surface of the reflector portion 34 so as to cover the
through holes 41.
[0278] When the phosphor resin composition contains a curable
resin, the phosphor sheet 5 in a B-stage state is disposed on the
reflector portion 34. The phosphor sheet 5 in a B-stage state can
retain its flat plate shape to some extent, so that it is disposed
on the upper surface of the reflector portion 34 so as to cover the
through holes 41 without falling into the inside of the through
holes 41.
[0279] The phosphor sheet 5 is formed to be more flexible than the
reflector portion 34 (to be specific, the reflector portion 34 in a
C-stage state when the reflecting resin composition of the
reflector sheet 42 contains a curable resin). To be specific, the
reflector portion 34 is formed to have non-deformable hardness by
the next pressing (ref: FIG. 6 (d)), while the phosphor sheet 5 is
formed to have deformable flexibility by the next pressing.
[0280] Next, as shown in FIG. 6 (d), the phosphor sheet 5 is
pressed by the pressing device 35. To be specific, the die 37 made
of the flat plate portion 38 is pushed down toward the support
board 36. Along with this, the circumference end portion of the
flat plate portion 38 is brought into contact with the upper
surface of the spacer 40. The lower surface of the flat plate
portion 38 is in contact with the upper surface of the reflector
portion 34.
[0281] In this way, the relatively flexible phosphor sheet 5 is
pressed from the upper side by the flat plate portion 38 to fill
the through holes 41. On the other hand, the relatively hard
reflector portion 34 is not deformed and houses the embedding
portions 33 in the through holes 41 therein.
[0282] When the curable resin is a thermosetting resin, the
phosphor sheet 5 can be heated by a heater that is built in the
flat plate portion 38.
[0283] In this way, the embedding portions 33 are formed in the
through holes 41 in the reflector portion 34.
[0284] In this way, the embedding-reflector sheet 24 including the
embedding portions 33 and the reflector portion 34 is obtained
between the support board 36 and the die 37.
[0285] Thereafter, as shown in FIG. 6 (e), the die 37 is pulled up
and subsequently, the embedding-reflector sheet 24 is peeled from
the releasing sheet 49.
[0286] Next, using the embedding-reflector sheet 24 shown in FIG. 6
(e), a method for producing the phosphor sheet-covered LED 10 and
the LED device 15, which has different steps from those in the
above-described embodiment, is described in detail with reference
to FIG. 4.
[0287] [Sheet Disposing Step]
[0288] As shown by the upper side view in FIG. 4 (b), the
embedding-reflector sheet 24 is disposed above the support sheet 1
so that each of the embedding portions 33 is formed into a tapered
shape in which its width is gradually reduced toward the lower
side.
[0289] That is, each of a plurality of the embedding portions 33 is
disposed in opposed relation to each of a plurality of the LEDs 4.
To be specific, each of the embedding portions 33 is disposed to be
opposed to the center of each of the LEDs 4 and each of the LEDs 4
is also disposed at spaced intervals to the inner side of the
reflector portion 34 in plane view.
[0290] Subsequently, as shown in FIG. 4 (c), the
embedding-reflector sheet 24 is pressed. In this way, each of the
LEDs 4 is embedded in each of the embedding portions 33 so that the
upper surface and the side surfaces of the LED 4 are covered with
the embedding portion 33.
[0291] [Encapsulating Step]
[0292] As shown in FIG. 4 (d), in the encapsulating step, when the
phosphor resin composition contains a curable resin, the phosphor
sheet 5 is cured. In this way, the embedding portions 33 are
completely cured. In this way, each of the LEDs 4 is encapsulated
by each of the embedding portions 33.
[0293] [Cutting Step]
[0294] As shown by the dashed lines in FIG. 4 (d), in the cutting
step, the reflector portion 34 is cut along the thickness
direction. As shown by the dash-dot lines in FIG. 5, for example,
the phosphor sheet 5 is cut so that the reflector portion 34 is
formed into a generally rectangular shape in plane view that
surrounds each of the embedding portions 33.
[0295] By the cutting step, the phosphor sheet-covered LEDs 10,
each of which includes one LED 4, the embedding portion 33 that
embeds the LED 4, and the reflector portion 34 that is provided
around the embedding portion 33, are obtained in a state of being
in close contact with the support sheet 1. That is, each of the
phosphor sheet-covered LEDs 10 includes the reflector portion 34.
That is, the phosphor sheet-covered LED 10 is a reflector
portion-including phosphor sheet-covered LED 10.
[0296] [LED Peeling Step]
[0297] In the LED peeling step, as shown in FIG. 4 (e), each of the
phosphor sheet-covered LEDs 10 each including the reflector portion
34 is peeled from the support sheet 1.
[0298] [Mounting Step]
[0299] In the mounting step, after the phosphor sheet-covered LED
10 including the reflector portion 34 is selected in accordance
with emission wavelength and luminous efficiency, as shown in FIG.
4 (f), the selected phosphor sheet-covered LED 10 is mounted on the
board 9. In this way, the LED device 15 is obtained.
[0300] In this way, the LED device 15 including the board 9 and the
phosphor sheet-covered LED 10 that is mounted on the board 9 and
includes the reflector portion 34 is obtained.
[0301] According to the second embodiment, the embedding-reflector
sheet 24 includes the embedding portion 33 that embeds the LED 4
and the reflector portion 34 that contains a light reflecting
component and is formed so as to surround the embedding portion 33,
so that light emitted from the LED 4 can be reflected by the
reflector portion 34. Thus, the luminous efficiency of the LED
device 15 can be improved.
Modified Example
[0302] In the second embodiment, the embedding portion 33 is formed
from a phosphor resin composition that contains a phosphor.
Alternatively, for example, the embedding portion 33 can be also
formed from an encapsulating resin composition that does not
contain a phosphor.
[0303] Also, the release sheet 6 (ref: the phantom lines in FIG. 4
(b)) is provided between the flat plate portion 38 and the phosphor
sheet 5 that are shown in FIG. 6 (c) to form the
embedding-reflector sheet 24 in which the release sheet 6 is
laminated on the upper surface thereof. Thereafter, as shown by the
phantom lines in FIG. 4 (c), the embedding-reflector sheet 24 can
be also, for example, subjected to flat plate pressing with respect
to a plurality of the LEDs 4 and the support sheet 1.
Third Embodiment
[0304] FIG. 7 shows process drawings for illustrating a method for
producing an embedding-reflector sheet used in a third embodiment
of a method for producing an encapsulating layer-covered
semiconductor element of the present invention.
[0305] In the third embodiment, the same reference numerals are
provided for members and steps corresponding to each of those in
the second embodiment, and their detailed description is
omitted.
[0306] In the method for producing the embedding-reflector sheet 24
in the second embodiment, as shown in FIGS. 6 (c) and 6 (d), the
embedding portions 33 are formed of the phosphor sheet 5.
Alternatively, for example, as shown in FIG. 7 (c), the embedding
portions 33 can be also formed by potting a varnish of a phosphor
resin composition into the through holes 41 without using the
phosphor sheet 5.
[0307] To be specific, first, the phosphor resin composition is
prepared as a varnish. To be specific, when the phosphor resin
composition contains a curable resin, a varnish in an A-stage state
is prepared. In this way, the phosphor resin composition in an
A-stage state fills the through holes 41.
[0308] Thereafter, when the phosphor resin composition contains a
curable resin, the phosphor resin composition in an A-stage state
is brought into a B-stage state.
[0309] In the third embodiment, the same function and effect as
that of the second embodiment can be achieved.
Fourth Embodiment
[0310] FIG. 8 shows process drawings for illustrating a fourth
embodiment of a method for producing an encapsulating layer-covered
semiconductor element of the present invention.
[0311] In the fourth embodiment, the same reference numerals are
provided for members and steps corresponding to each of those in
the second and third embodiments, and their detailed description is
omitted.
[0312] In the second embodiment, as shown in FIGS. 4 (b) and 5, the
lower end portion of the embedding portion 33 is formed to be
larger than the LED 4 in plane view. Alternatively, for example, as
shown in FIG. 8 (b), the lower end portion of the embedding portion
33 can be formed to be the same size as that of the LED 4.
[0313] [LED Disposing Step]
[0314] Each of the embedding portions 33 is, for example, formed
into a generally quadrangular pyramid trapezoidal shape in which
its width is gradually reduced toward the lower side.
[0315] In order to form the embedding portions 33 shown in FIG. 8
(b), each of the extruded portions 39 referred in FIGS. 6 and 7 is
formed into a generally quadrangular pyramid trapezoidal shape in
which its width is gradually reduced from the lower surface of the
flat plate portion 38 toward the lower side.
[0316] Also, as shown by the dash-dot lines in FIG. 8 (b), the
embedding-reflector sheet 24 is disposed on the pressure-sensitive
adhesive layer 3 including the LEDs 4 so that, when projected in
the thickness direction, the lower end portion of each of the
embedding portions 33 is overlapped with each of the LEDs 4, to be
specific, the circumference end edge of the lower end portion of
each of the embedding portions 33 is formed at the same position as
the circumference end edge of each of the LEDs 4 in plane view.
[0317] In the fourth embodiment, the same function and effect as
those of the second and third embodiments can be achieved.
Fifth Embodiment
[0318] FIG. 9 shows process drawings for illustrating a fifth
embodiment of a method for producing an encapsulating layer-covered
semiconductor element of the present invention. FIG. 10 shows
process drawings for illustrating a method for producing the
embedding-reflector sheet shown in FIG. 9 (b).
[0319] In the fifth embodiment, the same reference numerals are
provided for members and steps corresponding to each of those in
the second embodiment, and their detailed description is
omitted.
[0320] In the second embodiment, as shown in FIG. 4 (b), each of
the embedding portions 33 in the embedding-reflector sheet 24 is
formed into a generally conical trapezoidal shape in which its
width is gradually reduced toward the lower side. Alternatively,
for example, as shown in FIG. 9 (b), each of the embedding portions
33 can be also formed into a generally column shape extending in
the up-down direction (the thickness direction).
[0321] In order to form the embedding portions 33, a punching
device 55 shown in FIGS. 10 (a) and 10 (b) is used.
[0322] The punching device 55 is provided with a support board 56
and a die 57 that is disposed in opposed relation to the upper side
of the support board 56.
[0323] The support board 56 is, for example, formed of a metal such
as stainless steel into a generally rectangular flat plate shape.
Through holes 53 that pass through the support board 56 in the
thickness direction are formed.
[0324] Each of the through holes 53 is formed into a generally
circular shape in plane view.
[0325] The die 57 integrally includes a flat plate portion 58 and
extruded portions 59 that are formed to be extruded downwardly from
the flat plate portion 58.
[0326] The flat plate portion 58 is formed into the same shape as
that of the flat plate portion 38 shown in FIG. 6 (a).
[0327] In the die 57, a plurality of the extruded portions 59 are
disposed at spaced intervals to each other in the plane direction
so as to correspond to the embedding portions 33 (ref: FIG. 10
(d)). That is, each of the extruded portions 59 is formed into the
same shape and the same size as those of each of the through holes
53 in plane view, to be specific, into a generally column shape.
Each of the extruded portions 59 is formed into the same shape as
that of each of the embedding portions 33 (ref: FIG. 10 (d)). That
is, each of the extruded portions 59 is formed into a generally
rectangular shape in front sectional view and side sectional
view.
[0328] In this way, the punching device 55 is configured to allow
the extruded portions 59 to be capable of being inserted into the
through holes 53 by the pushing down of the die 57.
[0329] The hole diameter of each of the through holes 53 and the
diameter of each of the extruded portions 59 are, for example, 5 mm
or more, or preferably 7 mm or more, and are, for example, 300 mm
or less, or preferably 200 mm or less.
[0330] The spacer 40 is provided on the upper surface of the
circumference end portion of the support board 56. The spacer 40
is, in plane view, disposed in a generally frame shape in plane
view at the circumference end portion of the support board 56 so as
to surround the through holes 53.
[0331] In order to form the embedding-reflector sheet 24 by the
punching device 55 shown in FIGS. 10 (a) and 10 (b), first, as
shown in FIG. 10 (a), the reflector sheet 42 is disposed on the
support board 56. To be specific, the reflector sheet 42 is
disposed on the upper surface of the support board 56 so as to
cover a plurality of the through holes 53.
[0332] Next, as shown in FIG. 10 (b), the reflector sheet 42 is
stamped out using the punching device 55.
[0333] To be specific, the extruded portions 59 stamp out the
reflector sheet 42 by pushing down the die 57.
[0334] In this way, the through holes 41 in shapes corresponding to
the extruded portions 59 are formed in the reflector sheet 42.
[0335] In this way, the reflector portion 34 is formed on the
support board 56.
[0336] Next, as shown in FIG. 10 (c), the die 57 is pulled up.
[0337] Thereafter, the formed reflector portion 34 is disposed in
the pressing device 35 that is provided with the support board 36
and the die 37 made of the flat plate portion 38, and includes the
releasing sheet 49.
[0338] Next, the phosphor sheet 5 is disposed on the reflector
portion 34.
[0339] Next, as shown by the arrows in FIG. 10 (c), and in FIG. 10
(d), the phosphor sheet 5 is pressed by the pressing device 35. In
this way, the embedding portions 33 are formed in the inside of the
through holes 41 in the reflector portion 34.
[0340] In this way, the embedding-reflector sheet 24 including the
embedding portions 33 and the reflector portion 34 is obtained
between the support board 36 and the die 37.
[0341] Thereafter, the die 37 is pulled up and subsequently, as
shown in FIG. 10 (e), the embedding-reflector sheet 24 is peeled
from the releasing sheet 49.
[0342] In the fifth embodiment, the same function and effect as
that of the second embodiment can be achieved.
Sixth Embodiment
[0343] FIG. 11 shows process drawings for illustrating a method for
producing an embedding-reflector sheet used in a sixth embodiment
of a method for producing an encapsulating layer-covered
semiconductor element of the present invention.
[0344] In the sixth embodiment, the same reference numerals are
provided for members and steps corresponding to each of those in
the fifth embodiment, and their detailed description is
omitted.
[0345] In the method for producing the embedding-reflector sheet 24
in the fifth embodiment, as shown in FIGS. 10 (c) and 10 (d), the
embedding portions 33 are formed of the phosphor sheet 5.
Alternatively, for example, as shown in FIG. 11 (c), the embedding
portions 33 can be also formed by potting a varnish of a phosphor
resin composition into the through holes 41 without using the
phosphor sheet 5.
[0346] To be specific, the reflector portion 34 shown in FIG. 11
(b) is taken out from the punching device 55 to be subsequently, as
shown in FIG. 11 (c), disposed on the upper surface of the
releasing sheet 49. Then, the varnish of the phosphor resin
composition is potted into the through holes 41.
[0347] In the sixth embodiment, the same function and effect as
that of the fifth embodiment can be achieved.
Seventh Embodiment
[0348] FIG. 12 shows process drawings for illustrating a seventh
embodiment of a method for producing an encapsulating layer-covered
semiconductor element of the present invention.
[0349] In the seventh embodiment, the same reference numerals are
provided for members and steps corresponding to each of those in
the fifth embodiment, and their detailed description is
omitted.
[0350] In the fifth embodiment, as shown in FIG. 9 (c), the
embedding portions 33 that embed the LEDs 4 are illustrated as
cover portions. Alternatively, for example, as shown in FIG. 12
(c), cover portions 43 that cover the upper surfaces of the LEDs 4
can be also illustrated.
[0351] As shown in FIG. 12 (b), the cover portions 43 are provided
in a cover-reflector sheet 44 so as to be surrounded by the
reflector portion 34. In the cover-reflector sheet 44, each of the
cover portions 43 is formed into the same shape as that of each of
the embedding portions 33 shown in FIG. 9 (b) and furthermore, as
shown by the dash-dot lines in FIG. 12 (b), is formed into the same
size as that of each of the LEDs 4.
[0352] As shown in FIG. 12 (b), for example, each of the cover
portions 43 is disposed on the upper surface of each of the LEDs 4
so that each of the cover portions 43 is overlapped with each of
the LEDs 4 when projected in the thickness direction, to be
specific, the circumference end edge of each of the cover portions
43 is formed at the same position as the circumference end edge of
each of the LEDs 4 in plane view.
[0353] [Upper Surface-Covering Step]
[0354] In the seventh embodiment, the upper surface-covering step
shown in FIG. 12 (c) is performed instead of the embedding step in
the sheet disposing step shown in FIG. 9 (c). The conditions of the
upper surface-covering step are the same as those of the embedding
step.
[0355] In the upper surface-covering step shown in FIG. 12 (c),
each of the cover portions 43 covers the upper surface of each of
the LEDs 4. The LED 4 is pressed into the cover portion 43 by
pressing of the LED 4, so that the cover portion 43 slightly
expands outwardly in the plane direction. The degree of expansion
thereof is subtle, so that in FIG. 12 (c), the lengths in the
right-left direction of the cover portion 43 and the LED 4 after
the pressing are shown to be the same.
[0356] [Curing Step]
[0357] In the seventh embodiment, the curing step shown in FIG. 12
(d) is performed instead of the encapsulating step shown in FIG. 9
(d).
[0358] In the curing step, the cover portions 43 are cured. The
conditions of the curing step are the same as those of the
above-described encapsulating step.
[0359] In the seventh embodiment, the same function and effect as
that of the fifth embodiment can be achieved.
Eighth Embodiment
[0360] FIG. 13 shows process drawings for illustrating an eighth
embodiment of a method for producing an encapsulating layer-covered
semiconductor element of the present invention.
[0361] In the eighth embodiment, the same reference numerals are
provided for members and steps corresponding to each of those in
the first embodiment, and their detailed description is
omitted.
[0362] In the first embodiment, as shown in FIG. 1 (c), in the
sheet disposing step, the embedding step in which the side surfaces
and the upper surfaces of the LEDs 4 are covered with the phosphor
sheet 5 is performed. Alternatively, for example, as shown in FIG.
13 (c), the side surface-covering step in which the side surfaces
only of the LEDs 4 are covered with the phosphor sheet 5 can be
performed instead of the embedding step. Also, the curing step can
be performed instead of the encapsulating step.
[0363] [Sheet Disposing Step]
[0364] As shown in FIG. 13 (b), the thickness of the prepared
phosphor sheet 5 is set to be thinner than that of each of the LEDs
4, that is, set to be, for example, 95% or less, or preferably 90%
or less, and to be, for example, 10% or more with respect to the
thickness of each of the LEDs 4. To be specific, the thickness of
the phosphor sheet 5 is set to be, for example, 1000 .mu.m or less,
or preferably 800 .mu.m or less, and to be, for example, 30 .mu.m
or more, or preferably 50 .mu.m or more.
[0365] [Side Surface-Covering Step]
[0366] As shown in FIG. 13 (c), a laminate (ref: the upper side
view in FIG. 13 (b)) made of the release sheet 6 and the phosphor
sheet 5 laminated on the lower surface of the release sheet 6 is
pressed into the support sheet 1 including the LEDs 4 so that the
lower surface of the release sheet 6 is in contact with the upper
surfaces of the LEDs 4 by the pressing.
[0367] The upper surface of the phosphor sheet 5, which is pressed
into gaps between a plurality of the LEDs 4, is formed to be flush
with the upper surfaces of the LEDs 4. The lower surface of the
phosphor sheet 5 is also formed to be flush with the lower surfaces
of the LEDs 4. That is, the thickness of the phosphor sheet 5,
which is pressed into gaps between a plurality of the LEDs 4, is
the same as that of each of the LEDs 4.
[0368] The side surfaces of the LED 4 are covered with the phosphor
sheet 5, while both a bump that forms a portion of the lower
surface of the LED 4 and the upper surface of the LED 4 are exposed
from the phosphor sheet 5.
[0369] [Curing Step]
[0370] In the curing step, the phosphor sheet 5 is cured. The
conditions of the curing step are the same as those of the
above-described encapsulating step.
[0371] [Cutting Step]
[0372] As shown by the dashed lines in FIG. 13 (d), the phosphor
sheet 5 is cut, while the position of the LEDs 4 is checked from
the upper side. To be specific, in the phosphor sheet 5, the
position of the LEDs 4 is checked, while the LEDs 4 are visually
confirmed from the upper side with, for example, a camera. As
referred in the dashed lines in FIG. 5, the phosphor sheet 5 is cut
so that the cuts 8 that define a region surrounding each of the
LEDs 4 are formed in plane view.
[0373] The phosphor sheet 5 can be also cut, while the LEDs 4 are
visually confirmed, in addition, with the reference marks 18 (ref:
FIG. 2) as a reference.
[0374] [LED Peeling Step]
[0375] In FIG. 13 (e), in the LED peeling step, each of the
phosphor sheet-covered LEDs 10 is peeled from the upper surface of
the pressure-sensitive adhesive layer 3.
[0376] In the eighth embodiment, the same function and effect as
that of the first embodiment can be achieved.
[0377] In addition, in the side surface-covering step, the side
surfaces of the LEDs 4 are covered with the phosphor sheet 5 so
that at least the upper surfaces of the LEDs 4 are exposed from the
phosphor sheet 5. Thus, in the cutting step after the sheet
disposing step, the LEDs 4 having the upper surfaces exposed are
visually confirmed and the phosphor sheet 5 can be accurately cut
corresponding to the LEDs 4. Therefore, the phosphor sheet-covered
LED 10 to be obtained has excellent size stability. As a result,
the LED device 15 including the phosphor sheet-covered LED 10 has
excellent luminous stability.
Ninth Embodiment
[0378] FIG. 14 shows a perspective view of a dispenser used in a
ninth embodiment of a method for producing an encapsulating
layer-covered semiconductor element of the present invention.
[0379] In the ninth embodiment, the same reference numerals are
provided for members and steps corresponding to each of those in
the first embodiment, and their detailed description is
omitted.
[0380] In the first embodiment, as shown in FIG. 1 (b), in the
sheet disposing step that is one example of the layer disposing
step of the present invention, the phosphor sheet 5 that is formed
in advance is illustrated as a phosphor layer that is one example
of the encapsulating layer of the present invention. Alternatively,
as referred in FIG. 14, for example, a phosphor resin composition
is prepared as a varnish and the varnish is directly applied onto
the support sheet 1 so as to cover a plurality of the LEDs 4, so
that a phosphor layer 25 as an encapsulating layer can be also
formed. That is, the phosphor layer 25 can be formed from the
varnish of the phosphor resin composition.
[0381] In order to form the phosphor layer 25, first, the varnish
is applied onto the support sheet 1 so as to cover the LEDs 4.
[0382] In order to apply the varnish, for example, an application
device such as a dispenser, an applicator, or a slit die coater is
used. Preferably, a dispenser 26 shown in FIG. 14 is used.
[0383] As shown in FIG. 14, the dispenser 26 integrally includes an
introduction portion 27 and an application portion 28.
[0384] The introduction portion 27 is formed into a generally
cylindrical shape extending in the up-down direction and the lower
end portion thereof is connected to the application portion 28.
[0385] The application portion 28 is formed into a flat plate shape
extending in the right-left and the up-down directions. The
application portion 28 is formed into a generally rectangular shape
in side view that is long in the up-down direction. The
introduction portion 27 is connected to the upper end portion of
the application portion 28. The lower end portion of the
application portion 28 is formed into a tapered shape in sectional
side view in which the front end portion and the rear end portion
are cut off. The lower end surface of the application portion 28 is
configured to be capable of being pressed with respect to the upper
surface of the pressure-sensitive adhesive layer 3 and the upper
surfaces of the LEDs 4. Furthermore, at the inside of the
application portion 28, a broad flow path (not shown) in which a
varnish introduced from the introduction portion 27 gradually
expands in the right-left direction as it goes toward the lower
section (downwardly) is provided.
[0386] The dispenser 26 is configured to be movable relatively in
the front-rear direction with respect to the support sheet 1
extending in the plane direction.
[0387] In order to apply the varnish to the support sheet 1 using
the dispenser 26, the application portion 28 is disposed in opposed
relation (pressed) to the upper surfaces of a plurality of the LEDs
4 and the varnish is supplied to the introduction portion 27. Along
with this, the dispenser 26 is moved relatively toward the rear
side with respect to a plurality of the LEDs 4. In this way, the
varnish is introduced from the introduction portion 27 into the
application portion 28 and subsequently, is broadly supplied from
the lower end portion of the application portion 28 to the support
sheet 1 and the LEDs 4. By the relative movement of the dispenser
26 toward the rear side with respect to a plurality of the LEDs 4,
the varnish is applied onto the upper surface of the support sheet
1 in a belt shape extending in the front-rear direction so as to
cover a plurality of the LEDs 4.
[0388] When the phosphor resin composition contains a curable
resin, the varnish is prepared in an A-stage state. When the
varnish is, for example, supplied from the application portion 28
to the support sheet 1, it does not flow out of its position
outwardly in the plane direction. That is, the varnish has viscous
properties of keeping its position. To be specific, the viscosity
of the varnish under conditions of 25.degree. C. and 1 pressure is,
for example, 1,000 mPas or more, or preferably 4,000 mPas or more,
and is, for example, 1,000,000 mPas or less, or preferably 100,000
mPas or less. The viscosity is measured by adjusting a temperature
of the varnish to 25.degree. C. and using an E-type cone at a
number of revolutions of 99 s.sup.-1.
[0389] When the viscosity of the varnish is not less than the
above-described lower limit, the varnish can be effectively
prevented from flowing outwardly in the plane direction. Thus, it
is not required to separately provide a dam member or the like in
the support sheet 1 (to be specific, around a plurality of the LEDs
4), so that a simplified process can be achieved. Then, the varnish
can be easily and surely applied to the support sheet 1 with a
desired thickness and a desired shape with the dispenser 26.
[0390] On the other hand, when the viscosity of the varnish is not
more than the above-described upper limit, the application
properties (the handling ability) can be improved.
[0391] Thereafter, when the phosphor resin composition contains a
curable resin, the applied varnish is brought into a B-stage state
(a semi-cured state).
[0392] In this way, the phosphor layer 25 in a B-stage state is
formed on the support sheet 1 (on the upper surface of the
pressure-sensitive adhesive layer 3) so as to cover a plurality of
the LEDs 4.
[0393] In the ninth embodiment, the same function and effect as
that of the first embodiment can be achieved.
Modified Example
[0394] In the first to ninth embodiments, a plurality of the LEDs 4
are covered with the phosphor sheet 5. Alternatively, for example,
a single piece of the LED 4 can be covered with the phosphor sheet
5.
[0395] In such a case, to be specific, in the cutting step shown in
FIG. 1 (d) that is illustrated in the first embodiment, the
phosphor sheet 5 around the LED 4 is trimmed (subjected to
trimming) so as to have a desired size.
[0396] In the first to eighth embodiments, the LED 4, the phosphor
sheet 5, the phosphor sheet-covered LED 10, and the LED device 15
are described as one example of the semiconductor element, the
encapsulating layer, the encapsulating layer-covered semiconductor
element, and the semiconductor device of the present invention,
respectively. Alternatively, for example, though not shown, the
semiconductor element, the encapsulating layer, the encapsulating
layer-covered semiconductor element, and the semiconductor device
of the present invention can also include an electronic element, an
encapsulating sheet, an encapsulating layer-covered electronic
element, and an electronic device, respectively.
[0397] The electronic element is a semiconductor element that
converts electrical energy to energy other than light, to be
specific, to signal energy or the like. Examples thereof include a
transistor and a diode. The size of the electronic element is
appropriately selected in accordance with its use and purpose.
[0398] The encapsulating sheet is formed from an encapsulating
resin composition that contains a curable resin as an essential
component and a filler as an optional component. An example of the
filler further includes a black pigment such as carbon black. The
mixing ratio of the filler with respect to 100 parts by mass of the
curable resin is, for example, 5 parts by mass or more, or
preferably 10 parts by mass or more, and is, for example, 99 parts
by mass or less, or preferably 95 parts by mass or less.
[0399] The encapsulating sheet is, as illustrated in FIG. 1 (d) in
the first embodiment or the like, cut so as to correspond to each
of the electronic elements as a protective layer covering the
electronic elements (to be specific, at least the side surfaces of
the electronic elements).
[0400] The properties other than light transmission properties (to
be specific, compressive elastic modulus and the like) of the
encapsulating sheet are the same as those of the phosphor sheet 5
in the first to eighth embodiments.
[0401] While the illustrative embodiments of the present invention
are provided in the above description, such is for illustrative
purpose only and it is not to be construed as limiting the scope of
the present invention. Modification and variation of the present
invention that will be obvious to those skilled in the art is to be
covered by the following claims.
* * * * *