U.S. patent application number 14/448370 was filed with the patent office on 2014-11-20 for method for manufacturing semiconductor substrate.
The applicant listed for this patent is DENSO CORPORATION, SUMCO CORPORATION. Invention is credited to Toshiyuki MORISHITA, Syouji NOGAMI, Nobuhiro TSUJI, Tomonori YAMAOKA, Shoichi YAMAUCHI.
Application Number | 20140342535 14/448370 |
Document ID | / |
Family ID | 37906297 |
Filed Date | 2014-11-20 |
United States Patent
Application |
20140342535 |
Kind Code |
A1 |
NOGAMI; Syouji ; et
al. |
November 20, 2014 |
METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE
Abstract
A semiconductor substrate preventing a void from being generated
in an epitaxial film buried in a trench. An N-type first epitaxial
film and first trenches are formed on an N.sup.+-type substrate
body. A P-type second epitaxial film is buried in the first
trenches. An N.sup.+-type third epitaxial film having the same
composition as the first epitaxial film is formed on the first and
second epitaxial films to form second trenches. A fourth epitaxial
film is grown on the entire interior of the second trenches. The
formation of the first and second trenches and the burying of the
second and fourth epitaxial films are performed in a plurality of
steps. Thus, the aspect ratio of the first and second trenches when
the second and fourth epitaxial films are buried can be reduced. As
a result, the second and fourth epitaxial films can be buried in
the first and second trenches without causing a void.
Inventors: |
NOGAMI; Syouji; (Tokyo,
JP) ; YAMAOKA; Tomonori; (Tokyo, JP) ;
YAMAUCHI; Shoichi; (Kariya-shi, JP) ; TSUJI;
Nobuhiro; (Kariya-shi, JP) ; MORISHITA;
Toshiyuki; (Kariya-shi, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
SUMCO CORPORATION
DENSO CORPORATION |
Tokyo
Kariya-shi |
|
JP
JP |
|
|
Family ID: |
37906297 |
Appl. No.: |
14/448370 |
Filed: |
July 31, 2014 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
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12964141 |
Dec 9, 2010 |
8835276 |
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14448370 |
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12089497 |
Apr 7, 2008 |
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PCT/JP2006/319933 |
Oct 5, 2006 |
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12964141 |
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Current U.S.
Class: |
438/494 |
Current CPC
Class: |
H01L 21/02532 20130101;
H01L 29/0634 20130101; H01L 21/0262 20130101; H01L 21/02636
20130101; H01L 2223/54453 20130101; H01L 21/02664 20130101; H01L
21/308 20130101; H01L 23/544 20130101; H01L 2223/54426 20130101;
H01L 2924/0002 20130101; H01L 21/30604 20130101; Y10S 438/975
20130101; H01L 29/66712 20130101; H01L 2924/00 20130101; H01L
2924/0002 20130101 |
Class at
Publication: |
438/494 |
International
Class: |
H01L 21/306 20060101
H01L021/306; H01L 21/02 20060101 H01L021/02 |
Foreign Application Data
Date |
Code |
Application Number |
Oct 6, 2005 |
JP |
2005-293087 |
Aug 7, 2006 |
JP |
2006-214551 |
Claims
1. A method for manufacturing a semiconductor substrate,
comprising: growing a first epitaxial film on a surface of a
substrate body; partially etching the first epitaxial film to form
a plurality of first trenches; growing a second epitaxial film on
an entire interior of the plurality of the first trenches and the
surface of the first epitaxial film except for the plurality of the
first trenches; polishing the second epitaxial film to expose the
surface of the first epitaxial film and planarizing the upper face
of the second epitaxial film buried in the entire interior of the
plurality of the first trenches; growing a third epitaxial film
having a same composition as the first epitaxial film on the upper
face of the planarized second epitaxial film and the exposed face
of the first epitaxial film; etching a part of the third epitaxial
film corresponding to the plurality of the first trenches to form a
plurality of second trenches to extend the plurality of first
trenches; growing a fourth epitaxial film on an entire interior of
the plurality of second trenches and a surface of the third
epitaxial film except for the plurality of second trenches; and
polishing the fourth epitaxial film to expose the surface of the
third epitaxial film and planarizing the upper face of the fourth
epitaxial film buried in the entire interior of the plurality of
the second trenches.
2. The method for manufacturing a semiconductor substrate according
to claim 1, wherein growing a fourth epitaxial film is followed by
polishing of the second epitaxial film, growing a third epitaxial
film, etching a part of the third epitaxial film, and growing a
fourth epitaxial film at least one time.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application is a divisional of pending U.S. application
Ser. No. 12/964,141, filed on Dec. 9, 2010, which is a divisional
of pending U.S. application Ser. No. 12/089,497, filed on Apr. 7,
2008, which is a U.S. National Phase Application of
PCT/JP2006/319933, filed Oct. 5, 2006, which claims priority of
Japanese Application No. 2005/293087, filed Oct. 6, 2005, and
Japanese Application No. 2006/214551, filed on Aug. 7, 2006, the
disclosure of each of which is expressly incorporated herein by
reference in its entirety.
TECHNICAL FIELD
[0002] The present invention relates to a semiconductor substrate
that is preferred for the manufacture of a semiconductor apparatus
that uses a trench formed in a depth direction of the substrate
with a high aspect ratio such as a MOSFET and a super junction
MOSFET having a three-dimensional structure and the method for
manufacturing the same.
BACKGROUND ART
[0003] Conventionally, a semiconductor apparatus that uses a trench
formed in a depth direction of a substrate with a high aspect ratio
(e.g., MOSFET (see Patent Publication 1 for example), super
junction MOSFET (see Patent Publication 2 for example) has been
known. A semiconductor apparatus having the structure as described
above forms an impurity diffused layer having a high aspect ratio
by burying an epitaxial film in a trench (see Patent Publications 3
and 4 for example). [0004] Patent Publication 1: Japanese
Unexamined Patent Application Publication No. 2001-274398 [0005]
Patent Publication 2: Japanese Unexamined Patent Application
Publication No. 2003-124464 [0006] Patent Publication 3: Japanese
Unexamined Patent Application Publication No. 2001-196573 [0007]
Patent Publication 4: Japanese Unexamined Patent Application
Publication No. 2005-317905
DISCLOSURE OF THE INVENTION
Problem to be Solved by the Invention
[0008] When an impurity diffused layer having a high aspect ratio
is formed by burying an epitaxial film in a trench, a method for
manufacturing a semiconductor substrate as described below can be
considered for example. FIG. 8 is a sectional view of an example of
a part of the steps of manufacturing the same.
[0009] First, a semiconductor substrate is prepared structured as
shown in FIG. 8(a) so that an N.sup.--type layer 102 is formed on
an N.sup.+-type substrate 101. Then, a mask (not shown) is used to
form trenches 103 having a plurality of high aspect ratios in a
device formation region of the N.sup.--type layer 102 as shown in
FIG. 8(b). At the same time, a trench 104 is also formed in an
alignment region exterior to the device formation region as an
alignment mark in a subsequent step. Then, an epitaxial film 105 is
grown under conditions in which impurity is doped so as to bury the
trench 103 as shown in FIG. 8(c). Thereafter, the epitaxial film
105 formed at the upper part of the trench 103 is subjected to a
planarization processing step in which the epitaxial film 105 is
planarized to eliminate an uneven part, thereby forming an impurity
diffused layer 106 as shown in FIG. 8(d).
[0010] As described above, when the epitaxial film 105 is buried in
the trench 103 to form the impurity diffused layer 106 having a
high aspect ratio, a planarization processing step is used to
planarize the uneven part of the epitaxial film 105.
[0011] However, when the epitaxial film 105 is buried in the trench
103, the epitaxial film 105 is also buried in the trench 104 formed
in the alignment region and thus the uneven part of the trench 104
is eliminated after the planarization processing step. Then, the
epitaxial film 105 grows in single crystal to a substrate or a
silicon layer as a base. Thus, the existence of only a pure
material diffusion layer is recognized in the trench 104 formed in
the alignment region as well. In contrast with an oxidized film or
non-polycrystalline silicon, such a single crystal impurity
diffused layer makes difficult to recognize an interface between an
N.sup.+-type substrate 101 and an N.sup.--type layer 102 formed by
single crystals by an optical manner or by laser (He--Ne). As a
result, the trench 104 formed in the alignment region cannot be
used as an alignment mark for the alignment in the subsequent
step.
[0012] On the other hand, a conventional method for manufacturing a
semiconductor substrate buries an epitaxial film in
previously-formed trenches a plurality of times to form a diffusion
layer having a high aspect ratio. Thus, the aspect ratio can be
increased to a limited level. When the aspect ratio of the trenches
is increased to a level exceeding the limit, the epitaxial film
buried in the trenches may have a burying defect (void). The
generation of the void may cause flakedown at the upper part of the
void to reduce the breakdown voltage, thus causing a deteriorated
element performance.
[0013] In particular, in order to improve the breakdown voltage of
the above-described super junction structure (P/N column structure)
in which an N-type region and a P-type region are alternately
arranged in a direction orthogonal to the current direction, the
trench depth must be increased. However, when an increased trench
depth causes an increased aspect ratio to cause a burying defect
(void) in the epitaxial film buried in the trenches, the burying
defect (void) causes a crystal fault to reduce the yield of the
junction leak and breakdown voltage or to leave resist at a
defective burying portion of a trench to cause an in-process
contamination.
[0014] It is the first objective of the present invention to
provide a semiconductor substrate having an alignment mark that can
be used for alignment even after an epitaxial film is planarized to
form an impurity diffused layer and the method for manufacturing
thereof.
[0015] It is the second objective of the present invention to
provide a method for manufacturing a semiconductor substrate by
which a void can be prevented from being generated in an epitaxial
film buried in a trench.
Means for Solving the Problem
[0016] In order to achieve the first objective, the first
characteristic of the present invention is that a semiconductor
substrate has a substrate (1) made of single crystal semiconductor
and a semiconductor layer (2) made of single crystal formed on the
surface of the substrate (1). Voids (3) as an alignment mark are
formed in the substrate (1) in an alignment region in the substrate
(1) that is different from a device formation region.
[0017] In the semiconductor substrate having the structure as
described above, the voids formed in the alignment region can be
optically recognized for example to the substrate made of single
crystal semiconductor. Thus, the voids can be used as an alignment
mark to form a trench in a semiconductor layer included in the
semiconductor substrate for example to provide alignment for the
manufacture of a semiconductor apparatus such as a MOSFET and a
super junction MOSFET having a three-dimensional structure.
[0018] The second characteristic of the present invention is that a
semiconductor has a substrate (21) made of single crystal
semiconductor and a semiconductor layer (22) made of single crystal
formed on the surface of the substrate. Voids (25) as an alignment
mark are formed in the semiconductor layer in an alignment region
in the semiconductor layer that is different from a device
formation region.
[0019] As described above, the same effect as that of the first
characteristic also can be obtained by the above structure in which
voids as an alignment mark are formed in the semiconductor
layer.
[0020] In these cases, a trench (4, 23) may be formed in a device
formation region of the semiconductor layer and an
epitaxially-grown impurity diffused layer (5, 24) may be formed in
the trench.
[0021] A single void or a plurality of voids may be used. A
plurality of voids arranged with an equal interval for example can
be easily recognized as voids formed an alignment mark.
[0022] The semiconductor substrate having the first characteristic
is manufactured by a method for manufacturing that includes, for
example, a step of preparing a substrate (1) made of single crystal
semiconductor; a step of arranging, on the substrate, a mask
material (10) in which an opening is formed in the alignment region
in the substrate different from a device formation region; and a
step of etching the substrate covered by the mask material to form
an alignment mark formation trench (11) in the alignment region;
and a step of forming a semiconductor layer (2) made of single
crystal on the surface of the substrate so as to form voids (3) in
the alignment mark formation trench.
[0023] In this case, the step of forming an alignment mark
formation trench preferably forms the alignment mark formation
trench having a width of 1 to 50 .mu.m for example.
[0024] The semiconductor substrate having the second characteristic
is manufactured by a method for manufacturing that includes, for
example, a step of preparing a substrate (21) made of single
crystal semiconductor; a step of forming a semiconductor layer (22)
made of single crystal on the surface of the substrate; a step of
arranging a first mask material (30) on the semiconductor layer,
the first mask material (30) includes an opening formed in an
alignment region in the semiconductor layer different from a device
formation region; a step of etching the semiconductor layer covered
by the first mask material to form an alignment mark formation
trench (31) in the alignment region; a step of removing the first
mask material to place, on the surface of the semiconductor layer,
a second mask material (32) in which an opening is formed in the
device formation region of the semiconductor layer; a step of
etching the semiconductor layer covered by the second mask material
to form a device trench (23) in the device formation region; a step
of removing the second mask material to bury an epitaxial film (33)
in the device trench so as to form voids (25) in the alignment mark
formation trench; and a step of subjecting, to a planarization
processing, a part of the epitaxial film that is formed exterior to
the device trench.
[0025] As described here, instead of performing the step of forming
the alignment mark formation trench in the alignment region prior
to the step of forming the device trench in the device formation
region, the step of forming the alignment mark formation trench in
the alignment region also may be performed after the step of
forming the device trench in the device formation region.
[0026] In these cases, the step of forming an alignment mark
formation trench preferably forms the alignment mark formation
trench to have a depth deeper than the width of the device trench.
This can easily form the epitaxial film to bury the device trench
while forming the voids in the alignment mark formation trench.
[0027] For example, the alignment mark formation trench can have a
depth at which the substrate can be etched.
[0028] Furthermore, the formation of the alignment mark formation
trench in the alignment region also may be simultaneously performed
with the formation of the device trench in the device formation
region. This can simplify the steps of manufacturing the
semiconductor substrate.
[0029] In the method for manufacturing a semiconductor substrate
having the second characteristic as described above, the alignment
mark formation trench preferably has a width smaller than that of
the device trench. This can easily form the epitaxial film to bury
the device trench while forming voids in the alignment mark
formation trench.
[0030] It is noted that reference numerals in the parentheses show
the correspondences with specific means described in the
embodiments described later.
[0031] The invention according to claim 13 is for achieving the
above second objective. As shown in FIG. 7, the invention is a
method for manufacturing a semiconductor substrate that includes:
(a) a step of growing a first epitaxial film 61 on the surface of a
substrate body 63; (b) a step of partially etching the first
epitaxial film 61 to form a plurality of first trenches 64; (c) a
step of growing a second epitaxial film 62 on the entire interior
of the plurality of the first trenches 64 and the surface of the
first epitaxial film 61 except for the plurality of the first
trenches 64; (d) a step of polishing the second epitaxial film 62
to expose the surface of the first epitaxial film 61 and
planarizing the upper face of the second epitaxial film 62 buried
in the entire interior of the plurality of the first trenches 64;
(e) a step of further growing a third epitaxial film 66 having the
same composition as that of the first epitaxial film 61 on the
upper face of the planarized second epitaxial film 62 and the
exposed face of the first epitaxial film 61; (f) a step of etching
a part of the third epitaxial film 66 corresponding to the
plurality of the first trenches 64 to form a plurality of second
trenches 67 to extend the plurality of first trenches 64; (g) a
step of further growing a fourth epitaxial film 68 on the entire
interior of the plurality of second trenches 67 and the surface of
the third epitaxial film 66 except for the plurality of second
trenches 67; and (h) a step of polishing the fourth epitaxial film
68 to expose the surface of the third epitaxial film 66 and
planarizing the upper face of the fourth epitaxial film 68 buried
in the entire interior of the plurality of the second trenches
67.
[0032] With regards to whether the epitaxial films 62 and 68 can be
buried in the trenches 64 and 67 without causing a void, the
shallower the depth B of the trenches 64 and 67 is to the width A
of the trenches 64 and 67, the epitaxial films 62 and 68 can be
buried in the trenches 64 and 67 without causing a void.
[0033] In the method for manufacturing a semiconductor substrate
according to claim 13, the formation of the trenches 64 and 67 and
the burying of the epitaxial films 62 and 68 are performed by a
plurality of steps. Thus, when the epitaxial films 62 and 68 are
buried in the trenches 64 and 67, the depth B of the trenches 64
and 67 to the width A of the trenches 64 and 67 can be reduced.
Thus, the epitaxial films 62 and 68 can be buried in the trenches
64 and 67 without causing a void in the trenches 64 and 67.
[0034] The invention according to claim 14 is the invention
according to claim 13 and is characterized in that the step (g) is
followed by the repetition of the step (d) to the step (g) one or
two times or more.
[0035] In the method for manufacturing a semiconductor substrate
according to claim 14, the step (d) to the step (g) are repeated
three times or more. Thus, even when an aspect ratio of the
trenches to be finally obtained is relatively high, the depth B of
the trenches to the width A of the trenches when the epitaxial film
is buried one time can be reduced. This can effectively prevent a
void from being generated in the epitaxial film buried in the
trenches.
Effect of the Invention
[0036] As described above, according to the present invention, in
an alignment region in a substrate different from a device
formation region, a void as an alignment mark was formed. This void
can be optically recognized to a substrate formed by single crystal
semiconductor for example. Thus, this void can be used as an
alignment mark to form a trench in a semiconductor layer provided
in a semiconductor substrate for example to provide the alignment
for manufacturing a semiconductor apparatus such as a MOSFET and a
super junction MOSFET having a three-dimensional structure. In this
case, in an alignment region in a semiconductor layer different
from a device formation region, a semiconductor layer also may
include a void as an alignment mark.
[0037] When the formation of a trench and the burying of an
epitaxial film are separately performed a plurality of times, the
trench can have a shallow depth to the width of the trench when the
epitaxial film is buried and thus the epitaxial film can be buried
in a plurality of trenches without causing a void in the trenches.
In particular, if the formation of a trench and the burying of an
epitaxial film are repeated three times or more, the trench can
have a sufficiently-shallow depth to the depth of the trench in
which the epitaxial film is buried even when a trench to be
obtained finally has a relatively high aspect ratio. This can
effectively avoid a void caused in an epitaxial film buried in the
trench.
BRIEF DESCRIPTION OF THE DRAWINGS
[0038] FIG. 1 is a view of the sectional structure of a
semiconductor substrate of the first embodiment of the present
invention;
[0039] FIG. 2 is a sectional view of steps of manufacturing a
semiconductor apparatus using a semiconductor substrate
manufactured by steps of manufacturing including the steps of
manufacturing the semiconductor substrate shown in FIG. 1;
[0040] FIG. 3 is a view of the sectional structure of a
semiconductor substrate of the second embodiment of the present
invention;
[0041] FIG. 4 is a sectional view of steps of manufacturing a
semiconductor apparatus using a semiconductor substrate
manufactured by steps of manufacturing including the steps of
manufacturing the semiconductor substrate shown in FIG. 3;
[0042] FIG. 5 is a sectional view of steps of manufacturing a
semiconductor apparatus using a semiconductor substrate
manufactured by manufacture steps including the manufacture steps
of a semiconductor substrate according to the third embodiment of
the present invention;
[0043] FIG. 6 is a sectional view of manufacture steps of a
semiconductor apparatus using a semiconductor substrate
manufactured by manufacture steps including the manufacture steps
of a semiconductor substrate according to the fourth embodiment of
the present invention;
[0044] FIG. 7 is a view of steps of a method for manufacturing a
semiconductor substrate of the fifth embodiment of the present
invention; and
[0045] FIG. 8 is a sectional view of manufacture steps of a
semiconductor apparatus based on the examination by the present
inventors.
DESCRIPTION OF REFERENCE NUMERALS
[0046] 1 N.sup.+-type substrate [0047] 2 N.sup.--type layer [0048]
3 Void [0049] 4 Trench [0050] 5 Impurity diffused layer [0051] 6
N.sup.--type layer [0052] 10 Mask material [0053] 11 Trench [0054]
12 Oxidized film [0055] 13 Epitaxial film [0056] 21 N.sup.+-type
substrate [0057] 22 N.sup.--type layer [0058] 23 Trench [0059] 24
Impurity diffused layer [0060] 25 Void [0061] 26 N.sup.--type layer
[0062] 30 Mask material [0063] 31 Trench [0064] 32 Oxidized film
[0065] 33 Epitaxial film [0066] 60 Semiconductor substrate [0067]
61 First epitaxial film [0068] 62 Second epitaxial film [0069] 63
Substrate body [0070] 64 First trench [0071] 66 Third epitaxial
film [0072] 67 Second trench [0073] 68 Fourth epitaxial film
BEST MODE FOR CARRYING OUT THE INVENTION
[0074] Hereinafter, embodiments of the present invention will be
described with reference to the drawings. In the respective
embodiments shown below, the same or similar components will be
denoted with the same reference numerals.
First Embodiment
[0075] The first embodiment of the present invention will be
described. FIG. 1 is a sectional view of a semiconductor substrate
of the first embodiment. As shown in FIG. 1, an N.sup.+-type
substrate 1 made of single crystal silicon has thereon an
N.sup.--type layer 2 made of single crystal silicon to constitute a
semiconductor substrate. This semiconductor substrate is structured
so that an alignment region of the N.sup.+-type substrate 1
(specifically, a position different from a device formation region)
has voids 3 in the N.sup.+-type substrate 1. These voids 3 are
formed with an equal interval thereamong for example.
[0076] In the semiconductor substrate having the structure as
described above, the voids 3 formed in the alignment region can be
optically recognized for example to the N.sup.+-type substrate 1
made of single crystal silicon. Thus, these voids 3 can be used as
an alignment mark to form a trench in the N.sup.--type layer 2
provided in the semiconductor substrate for example to provide
alignment in the manufacture of a semiconductor apparatus such as a
MOSFET and a super junction MOSFET having a three-dimensional
structure.
[0077] Next, the following section will be describe a method for
manufacturing a semiconductor apparatus using a semiconductor
substrate including a method for manufacturing the semiconductor
substrate having the structure as described above. FIG. 2 is a
sectional view of manufacture steps of a semiconductor apparatus
using a semiconductor substrate manufactured by manufacture steps
including the manufacture steps of the semiconductor substrate
shown in FIG. 1.
[0078] First, in a step shown in FIG. 2(a), the N.sup.+-type
substrate 1 made of single crystal silicon is prepared and the
N.sup.+-type substrate 1 has thereon a mask material 10 such as
resist. Then, in the alignment region, positions in the mask
material 10 at which the voids 3 as an alignment mark are to be
formed are opened. As a result, openings having an identical width
are formed in the mask material 10 with an equal interval for
example.
[0079] Next, in a step shown in FIG. 2(b), the N.sup.+-type
substrate 1 covered by the mask material 10 is etched to form, in
the alignment region of the N.sup.+-type substrate 1, the trenches
11 having an identical width arranged with an equal interval for
example. The trench 11 has a width of 50 .mu.m or less, a depth of
fpm or more, and has a thickness equal to or lower than that of the
N.sup.+-type substrate 1. The trench 11 may be etched, for example,
by an anisotropic dry etching using Reactive Ion Etching (RIE) or
an anisotropic wet etching using TMAH or KOH for example.
[0080] In a step shown in FIG. 2(c), the N.sup.--type layer 2 is
epitaxially grown on the surface of the N.sup.+-type substrate 1.
In this step, the epitaxial growth at the surface of the
N.sup.+-type substrate 1 can be promoted while suppressing the
epitaxial growth into the trenches 11 formed in the N.sup.+-type
substrate 1.
[0081] For example, any of monosilane (SiH), disilane (SiH),
dichlorosilane (SiH.sub.2Cl.sub.2), trichlorosilane (SiHCl.sub.3),
and silicon tetrachloride (SiCl.sub.4) is used as semiconductor
source gas for epitaxial growth. In particular, any of
dichlorosilane (SiH.sub.2Cl.sub.2), trichlorosilane (SiHCl.sub.3),
and silicon tetrachloride (SiCl.sub.4) may be used as silicon
source gas.
[0082] At this time, preferable conditions are that no epitaxial
film is grown in the trench 11. However, an epitaxial film may be
grown so as not to entirely bury the trench 11. Thus, a region of
the trench 11 on which no epitaxial film is formed is left as the
void 3 in the surface of the N.sup.+-type substrate 1.
[0083] In a step shown in FIG. 2(d), an oxidized film 12 by thermal
oxidation or CVD or the like is formed on the N.sup.--type layer 2
as mask material. Then, a desired position of the oxidized film 12
can be accurately etched in a device formation region to open the
position by using the void 3 as an alignment mark to provide
alignment with an etching mask of the oxidized film 12. Then, the
N-type layer 2 is etched by using the oxidized film 12 as mask
material to form a plurality of trenches 4 in the N.sup.--type
layer 2 arranged with an equal interval.
[0084] In a step shown in FIG. 2(e), the oxidized film 12 used as
mask material is removed to subsequently form a P-type epitaxial
film 13 for example so as to bury the trenches 4. This formation is
performed based on conditions according to which a rate control can
be provided to promote the growth of the epitaxial film 13 into the
trenches 4 formed in the N.sup.--type layer 2.
[0085] For example, semiconductor source gas (silicon source gas)
for epitaxial growth composed of any of monosilane (SiH.sub.4),
disilane (Si.sub.2H.sub.6), dichlorosilane (SiH.sub.2Cl.sub.2),
trichiorosilane (SiHCl.sub.3), and silicon tetrachloride
(SiCl.sub.4) can be used to further suppress a defect or a void in
the buried epitaxial film. In particular, any of dichlorosilane
(SiH.sub.2Cl.sub.2), trichlorosilane (SiHCl.sub.3), and silicon
tetrachloride (SiCl.sub.4) may be used as silicon source gas.
Halide gas composed of any of hydrogen chloride (HCl), chlorine
(Cl.sub.2), fluorine (F.sub.2), chlorine trifluoride (CIF.sub.3),
hydrogen fluoride (HF), and hydrogen bromide (HBr) can be used to
mix the halide gas with silicon source gas to form an epitaxial
film. Thus, the resultant buried epitaxial film can be suppressed
from including a void or a defect.
[0086] An upper limit value of the film formation temperature is
950 degrees when monosilane or disilane is used as semiconductor
source gas, 1100 degrees when dichlorosilane is used as
semiconductor source gas, 1150 degrees when trichiorosilane is used
as semiconductor source gas, or 1200 degrees when silicon
tetrachloride is used as semiconductor source gas. A lower limit
value of the growth temperature is 800 degrees when the film
formation vacuum degree is in a range from a normal pressure to 100
Pa and is 600 degrees when the film formation vacuum degree is in a
range of 100 Pa to 1.times.10.sup.-5 Pa. An experiment shows that
this lower limit value can provide epitaxial growth without causing
crystal fault.
[0087] Thereafter, in a step shown in FIG. 2(f), the uneven part of
the epitaxial film 13 is eliminated by a planarization processing
step by Chemical Mechanical Polishing (CMP) for example. As a
result, the epitaxial film 13 is left in the trench 4 to form an
impurity diffused layer 5.
[0088] Thereafter, as shown in a step of FIG. 2(g) for example, a
step of manufacturing a remaining semiconductor apparatus is
performed as a subsequent step by forming an N.sup.--type layer 6
on the N.sup.--type layer 2 and the impurity diffused layer 5 for
example, thereby completing the semiconductor apparatus using the
trench 4 having a high aspect ratio. This step also can use the
void 3 as an alignment mark to provide alignment in a
photolithography step in a subsequent step to accurately form the
respective components constituting the semiconductor apparatus at
desired positions.
[0089] As described above, in the semiconductor substrate of the
first embodiment, the void 3 formed in the N.sup.+-type substrate 1
can be used as an alignment mark. Thus, the semiconductor substrate
as described above can be used to provide alignment in the
subsequent step of manufacturing the semiconductor apparatus e.g.,
a formation step of the trench 4 formed in FIG. 2(f). Therefore,
the respective components constituting the semiconductor apparatus
can be accurately formed at desired positions.
Second Embodiment
[0090] The second embodiment of the present invention will be
described. FIG. 3 is a sectional view of a semiconductor substrate
of the second embodiment. As shown in FIG. 3, an N.sup.+-type
substrate 21 made of single crystal silicon has thereon an
N.sup.--type layer 22 made of single crystal silicon. An impurity
diffused layer 24 is formed in the trench 23 formed in the
N.sup.--type layer 22, thereby constituting a semiconductor
substrate. This semiconductor substrate is structured so that the
N.sup.--type layer 22 includes therein voids 25 in the alignment
region of the N.sup.--type layer 22. These voids 25 are formed with
an equal interval for example.
[0091] In the semiconductor substrate having the structure as
described above, the voids 25 formed in the alignment region can be
optically recognized to the N.sup.--type layer 22 made of single
crystal silicon. Thus, the voids 25 can be used as an alignment
mark to form the trenches 23 in the N.sup.--type layer 22 provided
in the semiconductor substrate, for example. This can provide
alignment for a semiconductor apparatus for manufacturing a MOSFET
and a super junction MOSFET having a three-dimensional
structure.
[0092] Next, the following section will describe a method for
manufacturing a semiconductor apparatus using a semiconductor
substrate including the method for manufacturing the semiconductor
substrate having the structure as described above. FIG. 4 is a
sectional view of manufacture steps of a semiconductor apparatus
using a semiconductor substrate manufactured by manufacture steps
including the manufacture steps of the semiconductor substrate
shown in FIG. 3.
[0093] First, in a step shown in FIG. 4(a), the N.sup.+-type
substrate 21 made of single crystal silicon is prepared and the
N.sup.--type layer 22 is epitaxially grown on the N.sup.+-type
substrate 21. Then, a mask material 30 such as resist is arranged
on the surface of the N.sup.--type layer 22. Then, in the alignment
region, a part of the mask material 30 at which the voids 25 as an
alignment mark are to be formed is opened. As a result, openings
having an equal width are formed in the mask material 30 with an
equal interval for example.
[0094] In a step shown in FIG. 4(b), the N.sup.--type layer 22
covered by the mask material 30 is etched to form trenches 31
having an equal width in the alignment region of the N.sup.--type
layer 22 with an equal interval for example based on conditions in
which the trenches 31 have a width smaller than that of the
trenches 23 (e.g., smaller than 1 to 50 .mu.m) or the trenches 31
are deeper than the trenches 23 (e.g., 1 to 50 .mu.m or more). In
the case of the second embodiment, the trenches 31 have a width
smaller than that of the trenches 23 and the trenches 31 are formed
to a depth at which the N.sup.+-type substrate 21 can be etched so
that the trenches 31 are deeper than the trenches 23. The trenches
31 may be etched by an anisotropic dry etching using RIE or an
anisotropic wet etching using TMAH or KOH for example.
[0095] In a step shown in FIG. 4(c), the mask material 30 is
removed to subsequently form an oxidized film 32 by thermal
oxidation or CVD or the like as mask material on the surface of the
N.sup.--type layer 22. This step also may be performed so as to
form the oxidized film 32 not only on the surface of the
N.sup.--type layer 22 but also in the trenches 31. In this case,
the oxidized film 32 may be formed in the entirety or a part of the
interior of the trenches 31. Thereafter, in the device formation
region, a desired position of the oxidized film 32 is etched and
opened by using the trenches 31 as an alignment mark to provide
alignment with the etching mask of the oxidized film 32. Thus, the
desired position of the oxidized film 32 can be accurately opened.
Then, the oxidized film 32 used as mask material is etched to form
the trenches 23 in the N.sup.--type layer 22 with an equal
interval.
[0096] In a step shown in FIG. 4(d), the oxidized film 32 is
removed. At this time, the oxidized film 32 arranged in the
trenches 31 may be removed imperfectly. Then, a P.sup.--type
epitaxial film 33 for example is formed so as to bury the trenches
23 formed in the N.sup.--type layer 22 based on conditions
according to which a rate control can be provided to promote the
growth of the epitaxial film 33 into the trenches 23 formed in the
N.sup.--type layer 22. The conditions are the same as those of the
above-described step of FIG. 2(e) of the first embodiment.
[0097] As a result, the epitaxial film 33 is buried in the trenches
23 that have a width larger or smaller than that of the trenches
31. Thus, the trenches 31 are not perfectly buried by the epitaxial
film 33, leaving the voids 25.
[0098] Thereafter, in a step shown in FIG. 4(e), an uneven part of
the epitaxial film 33 is eliminated by a planarization processing
step by CMP for example. As a result, the epitaxial film 33 is left
in the trenches 23 to form the impurity diffused layer 24.
[0099] Then, as shown in a step of FIG. 4(f) for example, as in the
step of FIG. 2(g) of the first embodiment, a subsequent step of
manufacturing the remaining semiconductor apparatus is performed by
forming the N.sup.--type layer 26 on the N.sup.--type layer 22 and
the impurity diffused layer 24 for example to complete the
semiconductor apparatus using the trenches 23 having a high aspect
ratio. This step also uses the voids 25 as an alignment mark to
provide alignment with a subsequent photolithography step. Thus,
the respective components constituting the semiconductor apparatus
can be formed at desired positions accurately.
[0100] As described above, in the semiconductor substrate of the
second embodiment, the voids 25 formed in the N.sup.--type layer 22
can be used as an alignment mark. Thus, the semiconductor substrate
as described above can be used to provide alignment in the
subsequent step of manufacturing a semiconductor apparatus. Thus,
the respective components constituting the semiconductor apparatus
can be formed at desired positions accurately.
Third Embodiment
[0101] The following section will describe the third embodiment of
the present invention. The third embodiment simultaneously forms
the trenches 31 for forming the voids 25 used as an alignment mark
shown in the second embodiment and the trenches 23 for forming the
impurity diffused layer 24 having a high aspect ratio. Thus, the
following section will describe a difference of the third
embodiment from the second embodiment and the same structures as
those of the second embodiment will not be further described.
[0102] FIG. 5 is a sectional view of manufacture steps of a
semiconductor apparatus using a semiconductor substrate
manufactured by manufacture steps including the manufacture steps
of a semiconductor substrate according to the third embodiment of
the present invention.
[0103] First, in a step shown in FIG. 5(a), the same step as the
above-described step of FIG. 4(a) is performed to form the
N.sup.--type layer 22 on the surface of the N.sup.+-type substrate
21 to further arrange the mask material 30 on the surface of the
N.sup.--type layer 22. Then, in the alignment region, a part of the
mask material 30 at which the voids 25 as an alignment mark are to
be formed is opened and a part in the device formation region at
which the trenches 23 are to be formed in the mask material 30 is
opened.
[0104] Next, in a step shown in FIG. 5(b), the N.sup.--type layer
22 covered by the mask material 30 is etched to simultaneously
perform the formation of the trenches 31 in the alignment region of
the N.sup.--type layer 22 and the formation of the trenches 23 in
the device formation region of the N.sup.--type layer 22 so that
the trenches 31 have a width smaller than that of the trenches 23
(e.g., smaller than 1 to 50 .mu.m).
[0105] In a step shown in FIG. 5(c), the mask material 30 is
removed to subsequently form the P.sup.--type epitaxial film 33 for
example so as to bury the trenches 23 formed in the N.sup.--type
layer 22 based on conditions according to which a rate control can
be provided to promote the growth of the epitaxial film 33 into the
trenches 23 formed in the N.sup.--type layer 22. The conditions are
the same as those of the above-described step of FIG. 2(e) of the
first embodiment.
[0106] As a result, the epitaxial film 33 is buried in the trenches
23 that have a width larger than that of the trenches 31. Thus, the
trenches 31 are imperfectly buried by the epitaxial film 33 to
leave the voids 25.
[0107] Thereafter, in a step shown in FIG. 5(d), the same step as
that of FIG. 4(e) is performed to form the impurity diffused layer
24.
[0108] Then, as shown in a step of FIG. 5(e) for example, the
subsequent step of manufacturing the remaining semiconductor
apparatus is performed as in the step of FIG. 2(g) of the first
embodiment by forming the N.sup.--type layer 26 on the N.sup.--type
layer 22 and the impurity diffused layer 24 for example. As a
result, the semiconductor apparatus using the trenches 23 having a
high aspect ratio is completed.
[0109] As described above, the third embodiment simultaneously
performs the formation of the trenches 31 for forming the voids 25
as an alignment mark and the formation of the trenches 23 for
forming the impurity diffused layer 24 having a high aspect ratio.
This can eliminate a step that is required only to form the voids
25 as an alignment mark and thus can simplify the manufacture steps
of the semiconductor substrate and the semiconductor apparatus.
Fourth Embodiment
[0110] The following section will describe the fourth embodiment of
the present invention. The fourth embodiment forms the trenches 23
for forming the impurity diffused layer 24 having a high aspect
ratio to subsequently form the trenches 31 for forming the voids 25
used as an alignment mark shown in the second embodiment. The
following section will describe a difference of the fourth
embodiment from the second embodiment. The same structures as those
of the second embodiment will not be further described.
[0111] FIG. 6 is a sectional view of manufacture steps of a
semiconductor apparatus using a semiconductor substrate
manufactured by manufacture steps including the manufacture steps
of a semiconductor substrate according to the fourth
embodiment.
[0112] In a step shown in FIG. 6(a), the same step as the
above-described step of FIG. 4(a) is performed to form the
N.sup.--type layer 22 on the surface of the N.sup.+-type substrate
21. Then, the same step as the step of FIG. 4(c) is performed to
arrange the oxidized film 32 as mask material on the surface of the
N.sup.--type layer 22. Thereafter, a part in the device formation
region of the oxidized film 32 at which the trenches 23 are to be
formed is opened.
[0113] Next, in a step shown in FIG. 6(b), the N.sup.--type layer
22 covered by the oxidized film 32 is etched to form the trenches
23 in the device formation region of the N.sup.--type layer 22.
[0114] Next, in a step shown in FIG. 6(c), the oxidized film 32 is
removed to subsequently use the same step as the step of FIG. 4(a)
to form the mask material 30 on the surface of the N.sup.--type
layer 22. This step also may be performed so as to form the mask
material 30 not only at the surface of the N.sup.--type layer 22
but also in the trenches 23. In this case, the mask material 30 may
be formed in the entirety or a part of the interior of the trenches
31. Thereafter, a desired part in the alignment region of the mask
material 30 is etched and opened. Then, the N.sup.--type layer 22
covered by the mask material 30 is etched to form the trenches 31
in the N.sup.--type layer 22 with an equal interval.
[0115] Thereafter, in a step shown in FIG. 6(d), the same step as
that of FIG. 4(d) is performed to bury the epitaxial film 33 in the
trenches 23 and to form the voids 25 as an alignment mark. In steps
shown in FIG. 6(e) and FIG. 6(f), the same steps as those of FIG.
4(e) and FIG. 4(f) are performed and the subsequent step of
manufacturing the remaining semiconductor apparatus is performed to
complete the semiconductor apparatus using the trenches 23 having a
high aspect ratio. These steps also use the voids 25 as an
alignment mark to provide alignment in the subsequent
photolithography step. Thus, the respective components constituting
the semiconductor apparatus can be formed at desired positions
accurately.
[0116] As described above, as in the fourth embodiment, the
trenches 23 for forming the impurity diffused layer 24 having a
high aspect ratio may be formed to subsequently form the trenches
31 for forming the voids 25 used as an alignment mark.
Other Embodiments
[0117] The first embodiment has exemplarily described a
semiconductor substrate having the structure shown in FIG. 1
(specifically, the structure in which the N.sup.--type layer 2 is
formed on the surface of the N.sup.+-type substrate 1). However,
another structure also may be used in which a semiconductor
substrate for which steps up to the step of FIG. 2(f) are completed
(i.e., a structure in which the impurity diffused layer 5 is formed
in the trench 4). Similarly, the second embodiment also may use a
semiconductor substrate having a structure in which the trenches 23
are not yet formed (i.e., a structure for which steps up to the
step of FIG. 4(b) are completed).
[0118] The above respective embodiments have described a case where
only the impurity diffused layers 5 and 24 each of consisting of
one layer are formed in the trenches 4 and 23 formed in the device
formation region. However, the impurity diffused layers 5 and 24
also may be composed of a plurality of conductivity-type layers or
layers having different concentrations.
[0119] Although the above respective embodiments have described a
case where the N.sup.--type layers 2 and 22 are formed on the
N.sup.+-type substrates 1 and 21, they are not limited to these
conductivity types. For example, a semiconductor substrate and a
semiconductor layer formed on the semiconductor substrate also may
be both the P-type ones or also may be of different conductivity
types.
Fifth Embodiment
[0120] The following section will describe the fifth embodiment of
the present invention.
[0121] As shown in FIG. 7, the semiconductor substrate includes an
N.sup.+-type substrate body 63. Epitaxial films 61 and 66 are
formed on the substrate body 63. The substrate body 63 is an
N.sup.+-type silicon single crystal substrate doped with impurity
such as phosphorus, arsenic, or antimony. The epitaxial films 61
and 66 are an N-type silicon single crystal layer doped with
impurity such as phosphorus, arsenic, or antimony. The epitaxial
films 61 and 66 are partially removed by etching to form the
rib-shape epitaxial films 61 and 66 on the surface of the substrate
body 63 with a predetermined interval. Trenches 64 and 67 among the
epitaxial films 61 and 66 are filled with epitaxial films 62 and 68
consisting of P-type silicon single crystal doped with impurity
such as boron, gallium, or indium.
[0122] The following section will describe a method for
manufacturing such a semiconductor apparatus of the present
invention. First, as shown in FIG. 7(a), the N.sup.+-type substrate
body 63 is prepared to form the first N-type first epitaxial film
61 thereon. Specifically, the first epitaxial film 61 is grown in a
temperature range of 400 to 1200 degrees while supplying silane gas
as raw material gas to the surface of the substrate body 63.
[0123] Next, as shown in FIG. 7(b), the first epitaxial film 61 is
partially etched to form the first trenches 64. Specifically, a
silicon oxidized film (not shown) is formed on the first N-type
epitaxial film 61 to pattern this silicon oxidized film so as to
have a predetermined trench having a predetermined shape. This
patterned silicon oxidized film is used as a mask to subject the
first N-type epitaxial film 61 to an anisotropic etching (RIE) or a
wet etching by alkaline anisotropic etching liquid (e.g., KOH,
TMAH) to form the first trenches 64. Thereafter, the silicon
oxidized film (not shown) used as a mask is removed. In this
manner, the first epitaxial films 61 having a rib-shape are formed
on the surface of the substrate body 63 with a predetermined
interval and the first trenches 64 are formed among the first
epitaxial films 61, respectively.
[0124] Next, as shown in FIG. 7(c), the second epitaxial film 62 is
grown on the surface of the first epitaxial film 61 except for the
entire interior of the first trenches 64 and the first trenches 64.
Specifically, the vapor growth method is used to form the second
epitaxial film 62 in a temperature range of 400 to 1150 degrees
while suppressing raw material gas to the first epitaxial film 61
including the inner face of the first trenches 64 and the second
epitaxial film 62 is buried in the first trenches 64. In the step
of burying the second epitaxial film 62 in the first trenches 64
(at least in the final burying step), mixed gas of semiconductor
source gas and halide gas is preferably used as raw material gas
supplied for the formation of the first epitaxial film 61.
Semiconductor source gas may include monosilane (SiH.sub.4),
disilane (Si.sub.2H.sub.6), dichlorosilane (SiH.sub.2Cl.sub.2),
trichlorosilane (SiHCl.sub.3), or silicon tetrachloride
(SiCl.sub.4) for example. In particular, the semiconductor source
gas is preferably any of dichlorosilane (SiH.sub.2Cl.sub.2),
trichlorosilane (SiHCl.sub.3), or silicon tetrachloride
(SiCl.sub.4). Halide gas is preferably any of hydrogen chloride
(HCl), chlorine (Cl.sub.2), fluorine (F.sub.2), chlorine
trifluoride (CIF.sub.3), hydrogen fluoride (HF), and hydrogen
bromide (HBr) and is more preferably hydrogen chloride (HCl) in
particular.
[0125] When mixed gas of semiconductor source gas and halide gas is
supplied as raw material gas, halide gas thereof functions as
etching gas. The etching gas is provided with a controlled supply
rate so that the etching rate is higher at the opening of the first
trenches 64 than at the interior of the first trenches 64. As a
result, the growth rate is lower at the opening of the first
trenches 64 than at a deeper portion. Thus, with regards to the
second epitaxial film 62 on the side faces of the first trenches
64, the bottom part of the first trenches 64 has a larger thickness
than that of the opening of the first trenches 64. Thus, as shown
in FIG. 2(c), the second epitaxial film 62 can be buried in the
first trenches 64 without causing a void in the first trenches
64.
[0126] Next, as shown in FIG. 7(d), the second epitaxial film 62 is
polished to expose the surface of the first epitaxial film 61 and
to planarize the upper face of the second epitaxial film 62 buried
in the entire interior of the first trenches 64. This polishing can
be performed by CMP for example.
[0127] Next, as shown in FIG. 7(e), the third epitaxial film 66
having the same composition as that of the first epitaxial film 61
is further grown on the planarized upper face of the second
epitaxial film 62 and the exposed face of the first epitaxial film
61. This formation of the third epitaxial film 66 is performed by
the same procedure as that of the formation of the first epitaxial
film 61. Specifically, the vapor growth method is used to grow the
third epitaxial film 66 in a temperature range of 400 to 1200
degrees while supplying silane gas as raw material gas to the
planarized upper face of the second epitaxial film 62 and the
exposed face of the first epitaxial film 61.
[0128] Next, as shown in FIG. 7(f), parts of the third epitaxial
film 66 corresponding to the first trenches 64 are etched to form
the second trenches 67 to extend the first trenches 64.
Specifically, a silicon oxidized film (not shown) is formed on the
third epitaxial film 66 and a part of this silicon oxidized film
corresponding to the first trench 64 is removed and is patterned to
have a predetermined shape. Then, this patterned silicon oxidized
film is used as a mask to subject the third epitaxial film 66 to an
anisotropic etching (RIE) or a wet etching by alkaline anisotropic
etching liquid (e.g., KOE, TMAH) to form the second trenches 67 to
extend the first trenches 64. Thereafter, the silicon oxidized film
(not shown) used as a mask is removed.
[0129] Next, as shown in FIG. 7(g), the fourth epitaxial film 68 is
further grown on the entire interior of the second trenches 67 and
the surface of the third epitaxial film 66 other than the second
trenches 67. This formation of the fourth epitaxial film 68 is
performed by the same procedure as that of the above-described
formation of the second epitaxial film 62. Specifically, the vapor
growth method is used to form the fourth epitaxial film 68 in a
temperature range of 400 to 1150 degrees while supplying raw
material gas to the third epitaxial film 66 including the inner
face of the second trenches 67 to bury the fourth epitaxial film 68
in the second trenches 67.
[0130] Next, as shown in FIG. 7(h), the fourth epitaxial film 68 is
polished to expose the surface of the third epitaxial film 66 and
the upper face of the fourth epitaxial film 68 buried in the entire
interior of the second trenches 67 is planarized. As a result, a
semiconductor substrate is obtained in which a P-type region and an
N-type region are alternately arranged in the lateral
direction.
[0131] Whether the epitaxial films 62 and 68 can be buried in the
trenches 64 and 67 without causing a void or not depends on an
aspect ratio (B/A) that is represented by a depth B of the trenches
64 and 67 to a width A of the trenches 64 and 67. The shallower
depth B the trenches 64 and 67 have to the width A of the trenches
64 and 67 (i.e., the smaller aspect ratio (B/A) is), the epitaxial
films 62 and 68 can be more securely buried in the trenches 64 and
67 without causing a void. According to the method for
manufacturing a semiconductor substrate of the present invention,
the formation of the trenches 64 and 67 and the burying of the
epitaxial films 62 and 68 are performed in a plurality of steps.
Thus, the aspect ratio of the trenches 64 and 67 when the epitaxial
films 62 and 68 are buried can be reduced. As a result, the
epitaxial films 62 and 68 can be buried in the trenches 64 and 67
without causing a void.
[0132] In the fifth embodiment, it was described that the formation
of the trenches 64 and 67 and the burying of the epitaxial films 62
and 68 are performed in two steps. When an aspect ratio of trenches
finally to be obtained is relatively high, however, the
above-described step (g) also may be followed by the repetition of
the step (d) to step (g) one or two times. A method for
manufacturing a semiconductor substrate for repeating the step (d)
to the step (g) three times or more can reduce, even when an aspect
ratio of trenches finally to be obtained is relatively high, an
aspect ratio of the tranches for burying the epitaxial film in one
time can be reduced. This can effectively prevent a void from being
generated in the epitaxial film buried in the trenches.
INDUSTRIAL APPLICABILITY
[0133] The present invention can be used for a semiconductor
substrate that is used for a semiconductor apparatus using a trench
formed with a high aspect ratio in the depth direction of the
substrate (e.g., a MOSFET and a super junction MOSFET having a
three-dimensional structure) and the method for manufacturing
thereof.
* * * * *