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Contamination control method of vapor deposition apparatus and method of producing epitaxial silicon wafer Grant 10,379,094 - Nogami A | 2019-08-13 |
Contamination Control Method Of Vapor Deposition Apparatus And Method Of Producing Epitaxial Silicon Wafer App 20160097144 - NOGAMI; Syouji | 2016-04-07 |
Method for manufacturing semiconductor substrate Grant 9,034,721 - Nogami , et al. May 19, 2 | 2015-05-19 |
Method for manufacturing semiconductor substrate Grant 8,956,947 - Nogami , et al. February 17, 2 | 2015-02-17 |
Method For Manufacturing Semiconductor Substrate App 20140342535 - NOGAMI; Syouji ;   et al. | 2014-11-20 |
Method For Manufacturing Semiconductor Substrate App 20140342525 - NOGAMI; Syouji ;   et al. | 2014-11-20 |
Method For Manufacturing Semiconductor Substrate App 20140342526 - NOGAMI; Syouji ;   et al. | 2014-11-20 |
Method for manufacturing semiconductor substrate Grant 8,835,276 - Nogami , et al. September 16, 2 | 2014-09-16 |
Semiconductor substrate, semiconductor device, and method of producing semiconductor substrate Grant 8,501,598 - Nogami , et al. August 6, 2 | 2013-08-06 |
Method for manufacturing semiconductor device Grant RE44,236 - Yamauchi , et al. May 21, 2 | 2013-05-21 |
Semiconductor Substrate, Semiconductor Device, And Method Of Producing Semiconductor Substrate App 20120032312 - Nogami; Syouji ;   et al. | 2012-02-09 |
Semiconductor device having P-N column layer and method for manufacturing the same Grant 8,097,511 - Shibata , et al. January 17, 2 | 2012-01-17 |
Method For Manufacturing Semiconductor Substrate App 20110076830 - NOGAMI; Syouji ;   et al. | 2011-03-31 |
Method for manufacturing semiconductor device and epitaxial growth equipment Grant 7,811,907 - Shibata , et al. October 12, 2 | 2010-10-12 |
Manufacturing method of semiconductor wafer having a trench structure and epitaxial layer Grant 7,776,710 - Nogami , et al. August 17, 2 | 2010-08-17 |
Semiconductor device, method for manufacturing the same and method for evaluating the same Grant 7,642,178 - Yamauchi , et al. January 5, 2 | 2010-01-05 |
Semiconductor Substrate and Method for Manufacturing the Same App 20090273102 - Nogami; Syouji ;   et al. | 2009-11-05 |
Method for manufacturing semiconductor device Grant 7,601,603 - Yamauchi , et al. October 13, 2 | 2009-10-13 |
Semiconductor device having P-N column layer and method for manufacturing the same App 20080303114 - Shibata; Takumi ;   et al. | 2008-12-11 |
Manufacturing method of semiconductor substrate Grant 7,364,980 - Nogami , et al. April 29, 2 | 2008-04-29 |
Method For Manufacturing A Semiconductor Substrate App 20080001261 - Nogami; Syouji ;   et al. | 2008-01-03 |
Manufacturing method of semiconductor wafer and semiconductor wafer manufactured by this method App 20070128836 - Nogami; Syouji | 2007-06-07 |
Semiconductor Substrate And Manufacturing Method Thereof App 20070108444 - Nogami; Syouji ;   et al. | 2007-05-17 |
Manufacturing Method Of Semiconductor Substrate App 20070082455 - NOGAMI; Syouji ;   et al. | 2007-04-12 |
Semiconductor device, method for manufacturing the same and method for evaluating the same App 20070072397 - Yamauchi; Shoichi ;   et al. | 2007-03-29 |
Method for manufacturing semiconductor device and epitaxial growth equipment App 20070072398 - Shibata; Takumi ;   et al. | 2007-03-29 |
Method for manufacturing semiconductor device App 20050221547 - Yamauchi, Shoichi ;   et al. | 2005-10-06 |