U.S. patent application number 13/732598 was filed with the patent office on 2014-07-03 for magnetic read head with mr enhancements.
This patent application is currently assigned to HEADWAY TECHNOLOGIES, INC.. The applicant listed for this patent is HEADWAY TECHNOLOGIES, INC.. Invention is credited to Yewhee Chye, Min Li, Junjie Quan, Hui-Chuan Wang, Kunliang Zhang.
Application Number | 20140183673 13/732598 |
Document ID | / |
Family ID | 50002841 |
Filed Date | 2014-07-03 |
United States Patent
Application |
20140183673 |
Kind Code |
A1 |
Zhang; Kunliang ; et
al. |
July 3, 2014 |
Magnetic Read Head with MR Enhancements
Abstract
A TMR stack or a GMR stack, ultimately formed into a sensor or
MRAM element, include insertion layers of Fe or iron rich layers of
FeX in its ferromagnetic free layer and/or the AP1 layer of its
SyAP pinned layer. X is a non-magnetic, metallic element (or
elements) chosen from Ta, Hf, V, Co, Mo, Zr, Nb or Ti whose total
atom percent is less than 50%. The insertion layers are between 1
and 10 angstroms in thickness, with between 2 and 5 angstroms being
preferred and, in the TMR stack, they are inserted adjacent to the
interfaces between a tunneling barrier layer and the ferromagnetic
free layer or the tunneling barrier layer and the AP1 layer of the
SyAP pinned layer in the TMR stack. The insertion layers constrain
interdiffusion of B and Ni from CoFeB and NiFe layers and block
NiFe crystalline growth.
Inventors: |
Zhang; Kunliang; (Fremont,
CA) ; Wang; Hui-Chuan; (Pleasanton, CA) ;
Quan; Junjie; (Milpitas, CA) ; Chye; Yewhee;
(Hayward, CA) ; Li; Min; (Fremont, CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
HEADWAY TECHNOLOGIES, INC. |
Milpitas |
CA |
US |
|
|
Assignee: |
HEADWAY TECHNOLOGIES, INC.
Milpitas
CA
|
Family ID: |
50002841 |
Appl. No.: |
13/732598 |
Filed: |
January 2, 2013 |
Current U.S.
Class: |
257/421 |
Current CPC
Class: |
G01R 33/093 20130101;
H01F 10/3254 20130101; H01F 10/3272 20130101; H01L 43/02 20130101;
H01L 29/82 20130101; H01L 43/08 20130101; H01L 43/10 20130101; G01R
33/098 20130101; H01F 10/3295 20130101 |
Class at
Publication: |
257/421 |
International
Class: |
H01L 29/82 20060101
H01L029/82 |
Claims
1. A TMR stack comprising: a seed layer; a pinning layer formed on
said seed layer; a synthetic antiparallel (SyAP) layer formed on
said pinning layer and magnetically coupled thereto, wherein said
SyAP layer is formed as an antiferromagnetically coupled pair of
ferromagnetic layers denoted by AP1 and AP2, said ferromagnetic
layers being separated by a non-magnetic coupling layer, and
wherein layer AP2 is formed on said pinning layer; and wherein said
AP1 layer incorporates a first plurality of insertion layers of Fe
or FeX or multiple laminations of Fe or FeX wherein X is one or
more of metallic, non-magnetic elements selected from Ta, Hf, V,
Co, Mo, Zr, Nb or Ti and wherein a total atom percent of X is less
than 50%; a tunneling barrier layer formed on said AP1 layer; a
ferromagnetic free layer formed on said tunneling barrier layer,
said ferromagnetic free layer including a second plurality of
insertion layers of Fe or FeX or multiple laminations of Fe or FeX
wherein X is one or more of the metallic, non-magnetic elements
selected from Ta, Hf, V, Co, Mo, Zr, Nb or Ti and wherein a total
atom percent of X is less than 50%; and a capping layer formed on
said ferromagnetic free layer.
2. A TMR stack comprising: a seed layer; a pinning layer formed on
said seed layer; a synthetic anti-parallel (SyAP) layer formed on
said pinning layer and magnetically coupled thereto, wherein said
SyAP layer is formed as an antiferromagnetically coupled pair of
ferromagnetic layers denoted by AP1 and AP2, said ferromagnetic
layers being separated by a non-magnetic coupling layer, and
wherein layer AP2 is formed on said pinning layer; and wherein said
AP1 layer incorporates a plurality of insertion layers of Fe or FeX
or multiple laminations of Fe or FeX wherein X is one or more of
the metallic, non-magnetic elements selected from Ta, Hf, V, Co,
Mo, Zr, Nb or Ti and wherein a total atom percent of X is less than
50%; a tunneling barrier layer formed on said AP1 layer; and a
ferromagnetic free layer formed on said tunneling barrier layer;
and a capping layer formed on said ferromagnetic free layer.
3. TMR stack comprising: a seed layer; a pinning layer formed on
said seed layer; a synthetic antiparallel (SyAP) layer formed on
said pinning layer and magnetically coupled thereto, wherein said
SyAP layer is formed as an antiferromagnetically coupled pair of
ferromagnetic layers denoted by AP1 and AP2, said ferromagnetic
layers being separated by a non-magnetic coupling layer, and
wherein layer AP2 is formed on said pinning layer; a tunneling
barrier layer formed on said AP1 layer; and a ferromagnetic free
layer formed on said tunneling barrier layer, wherein said
ferromagnetic free layer includes a plurality of insertion layers
of Fe or FeX or multiple laminations of Fe or FeX wherein X is one
or more of the metallic, non-magnetic elements selected from Ta,
Hf, V, Co, Mo, Zr, Nb or Ti and wherein a total atom percent of X
is less than 50%; and a capping layer formed on said ferromagnetic
free layer.
4. GMR stack comprising: a seed layer; a pinning layer formed on
said seed layer; a synthetic antiparallel (SyAP) layer formed on
said pinning layer and magnetically coupled thereto, wherein said
SyAP layer is formed as an antiferromagnetically coupled pair of
ferromagnetic layers denoted by AP1 and AP2, said ferromagnetic
layers being separated by a non-magnetic coupling layer, and
wherein layer AP2 is formed on said pinning layer; and wherein said
AP1 layer incorporates a first plurality of insertion layers of Fe
or FeX or multiple laminations of Fe or FeX wherein X is one or
more of metallic, non-magnetic elements selected from Ta, Hf, V,
Co, Mo, Zr, Nb or Ti and wherein a total atom percent of X is less
than 50%; an electrically conducting, non-magnetic spacer layer
formed on said AP1 layer; a ferromagnetic free layer formed on said
electrically conducting, non-magnetic spacer layer, said
ferromagnetic free layer including a second plurality of insertion
layers of Fe or FeX or multiple laminations of Fe or FeX wherein X
is one or more of the metallic, non-magnetic elements selected from
Ta, Hf, V, Co, Mo, Zr, Nb or Ti and wherein a total atom percent of
X is less than 50%; and a capping layer formed on said
ferromagnetic free layer.
5. A GMR stack comprising: a seed layer; a pinning layer formed on
said seed layer; a synthetic antiparallel (SyAP) layer formed on
said pinning layer and magnetically coupled thereto, wherein said
SyAP layer is formed as an antiferromagnetically coupled pair of
ferromagnetic layers denoted by AP1 and AP2, said ferromagnetic
layers being separated by a non-magnetic coupling layer, and
wherein layer AP2 is formed on said pinning layer; and wherein said
AP1 layer incorporates a plurality of insertion layers of Fe or FeX
or multiple laminations of Fe or FeX wherein X is one or more of
the metallic, non-magnetic elements selected from Ta, Hf, V, Co,
Mo, Zr, Nb or Ti and wherein a total atom percent of X is less than
50%; a non-magnetic, electrically conducting spacer layer formed on
said AP1 layer; and a ferromagnetic free layer formed on said
tunneling barrier layer; and a capping layer formed on said
ferromagnetic free layer.
6. A GMR stack comprising: a seed layer; a pinning layer formed on
said seed layer; a synthetic antiparallel (SyAP) layer formed on
said pinning layer and magnetically coupled thereto, wherein said
SyAP layer is formed as an antiferromagnetically coupled pair of
ferromagnetic layers denoted by AP1 and AP2, said ferromagnetic
layers being separated by a non-magnetic coupling layer, and
wherein layer AP2 is formed on said pinning layer; a non-magnetic
electrically conducting spacer layer formed on said AP1 layer; and
a ferromagnetic free layer formed on said tunneling barrier layer,
wherein said ferromagnetic free layer includes a plurality of
insertion layers of Fe or FeX or multiple laminations of Fe or FeX
wherein X is one or more of the metallic, non-magnetic elements
selected from Ta, Hf, V, Co, Mo, Zr, Nb or Ti and wherein a total
atom percent of X is less than 50%; and a capping layer formed on
said ferromagnetic free layer.
7-12. (canceled)
13. The TMR stack of claim 1 wherein said first and second
plurality of insertion layers of Fe or FeX are formed to a
thickness between approximately 1 angstrom and 10 angstroms.
14. The TMR stack of claim 2 wherein said plurality of insertion
layers of Fe or FeX are formed to a thickness between approximately
1 angstrom and 10 angstroms.
15. The TMR stack of claim 3 wherein said plurality of insertion
layers of Fe or FeX are formed to a thickness between approximately
1 angstrom and 10 angstroms.
16. The GMR stack of claim 4 wherein said first and second
plurality of insertion layers of Fe or FeX are formed to a
thickness between approximately 1 angstrom and 10 angstroms.
17. The GMR stack of claim 5 wherein said plurality of insertion
layers of Fe or FeX are formed to a thickness between approximately
1 angstrom and 10 angstroms.
18. The GMR stack of claim 6 wherein said plurality of insertion
layers of Fe or FeX are formed to a thickness between approximately
1 angstrom and 10 angstroms.
19. The TMR stack of claim 1 wherein said ferromagnetic free layer
is formed as either of sequential layers of CoFeB/NiFe/Fe or
CoFeB/NiFe/FeX, or combinations and/or multiples of CoFeB/NiFe/Fe
or CoFeB/NiFe/FeX, and, whereby said insertion layer of Fe or FeX
is not formed adjacent to said tunneling barrier layer and wherein
said insertion layer constrains B interdiffusion and Ni
interdiffusion and block the crystallization of NiFe.
20. The TMR stack of claim 1 wherein said ferromagnetic free layer
comprises multi-layer structures of Fe/CoFeB/NiFe, or
FeX/CoFe/NiFe, or CoFeB/NiFe/Fe or CoFeB/NiFe/FeX or CoFeB/Fe/NiFe
or CoFeB/FeX/NiFe or combinations and multiples thereof and wherein
said insertion layer of Fe or FeX is inserted adjacent to said NiFe
layer to constrain Ni interdiffusion and to block the
crystallization of NiFe, or is inserted next to the CoFeB layer to
constrain interdiffusion of the B atoms.
21. The TMR stack of claim 1 wherein said AP1 layer includes a
CoFeB/CoFe structure with the CoFe layer immediately adjacent to an
MgO layer formed as said tunneling barrier layer and wherein said
first plurality of Fe or FeX insertion layers are not inserted
immediately adjacent to said MgO layer to avoid the extraction of O
from the MgO.
22. The TMR stack of claim 1 wherein said AP1 layer includes
laminates of a form CoFeB/CoFe and wherein the CoFe layer is formed
immediately adjacent to an MgO layer formed as said tunneling
barrier layer.
23. The TMR stack of claim 1 wherein said AP1 layer includes single
or multiple structures of a form CoFeB/FeX/CoFe, or CoFeB/Fe/CoFe,
or CoFeB/CoFe/Fe or CoFeB/CoFe/FeX with the CoFe layer or the CoFeB
layer deposited immediately adjacent to an MgO layer formed as said
tunneling barrier layer.
24. The TMR stack of claim 1 wherein said second plurality of Fe or
FeX insertion layers in said free layer prevent B interdiffusion
into an MgO layer formed as said tunneling barrier layer and, as a
result of BCC (body centered cubic) crystalline structure of said
second plurality of Fe or FeX insertion layers, FCC (face centered
cubic) crystalline structure of said NiFe layer is prevented from
intruding into the crystalline structure of said MgO layer.
25. The TMR stack of claim 1 wherein said first plurality of
insertion layers of Fe or FeX in said AP1 layer or said second
plurality of Fe or FeX insertion layers in said free layer provide
improved wettability and lattice matching properties with an MgO
layer formed as said tunneling barrier layer, thereby improving
sensor properties.
26. The TMR stack of claim 2 wherein said AP1 layer includes a
CoFeB/CoFe structure with the CoFe layer immediately adjacent to an
MgO layer formed as said tunneling barrier layer and wherein said
plurality of Fe or FeX insertion layers are not immediately
adjacent to said MgO layer, formed as said tunneling barrier layer,
to avoid the extraction of O from the MgO.
27. The TMR stack of claim 2 wherein said AP1 layer includes
laminates of a form CoFeB/CoFe and wherein the CoFe layer is formed
immediately adjacent to an MgO layer formed as said tunneling
barrier layer.
28. The TMR stack of claim 2 wherein said AP1 layer includes single
or multiple structures of a form CoFeB/FeX/CoFe with the CoFe layer
deposited proximate to an MgO layer formed as said tunneling
barrier layer.
29. The TMR stack of claim 2 wherein said plurality of Fe or FeX
insertion layers in said AP1 layer prevent B interdiffusion into an
MgO layer formed as said tunneling barrier layer and, as a result
of BCC (body centered cubic) crystalline structure of said
plurality of Fe or FeX insertion layers, FCC (face centered cubic)
crystalline structure of said NiFe layer is prevented from
intruding into the crystalline structure of said MgO layer.
30. The TMR stack of claim 2 wherein said plurality of insertion
layers of Fe or FeX in AP1 layer provide improved wettability and
lattice matching properties with an MgO layer formed as said
tunneling barrier layer, thereby improving sensor properties.
31. The TMR stack of claim 3 wherein said free layer is formed as
either of sequential layers of CoFeB/NiFe/Fe or CoFeB/NiFe/FeX or
CoFeB/FeX/NiFe or CoFeB/Fe/NiFe, whereby said insertion layer of Fe
or FeX is adjacent to said tunneling barrier layer and wherein said
insertion layer of Fe or FeX constrains B and Ni interdiffusion and
blocks the crystallization of NiFe.
32. The TMR stack of claim 3 wherein said ferromagnetic free layer
comprises bilayer structures of CoFeB/NiFe, or CoFe/NiFe, and
wherein said insertion layer of Fe or FeX is inserted adjacent to
said NiFe layer to constrain Ni interdiffusion and to block the
crystallization of NiFe, or is inserted next to the CoFeB layer to
constrain interdiffusion of the B atoms.
33. The TMR stack of claim 3 wherein said plurality of Fe or FeX
insertion layers in said free layer prevent B interdiffusion into
an MgO layer formed as said tunneling barrier layer and, as a
result of BCC (body centered cubic) crystalline structure of said
first plurality of Fe or FeX insertion layers, FCC (face centered
cubic) crystalline structure of said NiFe layer is prevented from
intruding into the crystalline structure of said MgO layer.
34. The TMR stack of claim 3 wherein said insertion layers of Fe or
FeX in said free layer provide improved wettability and lattice
matching properties with an MgO layer formed as said tunneling
barrier layer, thereby improving sensor properties.
35. The GMR stack of claim 4 wherein said ferromagnetic free layer
is formed as either of the sequential layers of CoFeB/NiFe/Fe or
CoFeB/NiFe/FeX or CoFeB/FeX/NiFe or CoFeB/Fe/NiFe, whereby said
insertion layer of Fe or FeX is adjacent to said electrically
conducting non-magnetic spacer layer and wherein said insertion
layer constrains B and Ni interdiffusion and blocks the
crystallization of NiFe.
36. The GMR stack of claim 4 wherein said ferromagnetic free layer
comprises the bilayer structures of CoFeB/NiFe, or CoFe/NiFe, and
wherein said insertion layer of Fe or FeX selected from said second
plurality of insertion layers is inserted adjacent to said NiFe
layer to constrain Ni interdiffusion and to block the
crystallization of NiFe, or is inserted next to the CoFeB layer to
constrain interdiffusion of the B atoms.
37. The GMR stack of claim 5 wherein said ferromagnetic free layer
is formed as either of the sequential layers of CoFeB/NiFe/Fe or
CoFeB/NiFe/FeX or CoFeB/FeX/NiFe or CoFeB/Fe/NiFe, whereby said
insertion layer or Fe or FeX is adjacent to said electrically
conducting non-magnetic spacer layer and wherein said insertion
layer constrains B and Ni interdiffusion and blocks the
crystallization of NiFe.
38. The GMR stack of claim 5 wherein said ferromagnetic free layer
comprises the bilayer structures of CoFeB/NiFe, or CoFe/NiFe, and
wherein said insertion layer of Fe or FeX is inserted adjacent to
said NiFe layer to constrain Ni interdiffusion and to block the
crystallization of NiFe, or is inserted next to the CoFeB layer to
constrain interdiffusion of the B atoms.
39. The GMR stack of claim 6 wherein said ferromagnetic free layer
is formed as either of the sequential layers of CoFeB/NiFe/Fe or
CoFeB/NiFe/FeX or CoFeB/FeX/NiFe or CoFeB/Fe/NiFe, whereby said
insertion layer or Fe or FeX is adjacent to said electrically
conducting non-magnetic spacer layer and wherein said insertion
layer constrains B and Ni interdiffusion and blocks the
crystallization of NiFe.
40. The GMR stack of claim 6 wherein said ferromagnetic free layer
comprises the bilayer structures CoFeB/NiFe, or CoFe/NiFe, and
wherein said insertion layer of Fe or FeX is inserted adjacent to
said NiFe layer to constrain Ni interdiffusion and to block the
crystallization of NiFe, or is inserted next to the CoFeB layer to
constrain interdiffusion of the B atoms.
41. The TMR stack of claim 1 formed as a sensor device.
42. The TMR stack of claim 1 formed as an MRAM device.
43. The TMR stack of claim 2 formed as a sensor device.
44. The TMR stack of claim 2 formed as an MRAM device.
45. The TMR stack of claim 3 formed as a sensor device.
46. The TMR stack of claim 3 formed as an MRAM device.
47. The GMR stack of claim 4 formed as a sensor device.
48. The GMR stack of claim 4 formed as an MRAM device.
49. The GMR stack of claim 5 formed as a sensor device.
50. The GMR stack of claim 5 formed as an MRAM device.
51. The GMR stack of claim 6 formed as a sensor device.
52. The GMR stack of claim 6 formed as an MRAM device.
Description
BACKGROUND
[0001] 1. Technical Field
[0002] This disclosure relates generally to thin-film
magnetoresistive read sensors and particularly to the enhancement
of the magnetoresistive properties of such sensors by the insertion
of additional layers.
[0003] 2. Description
[0004] In simplest form, the usual giant magnetoresistive (GMR)
read sensor consists of two magnetic layers, formed vertically
above each other in a parallel planar configuration and separated
by a conducting, but non-magnetic, spacer layer. Each magnetic
layer is given a unidirectional magnetic moment within its plane
and the relative orientations of the two planar magnetic moments
determines the electrical resistance that is experienced by a
current that passes from magnetic layer to magnetic layer through
the spacer layer. The physical basis for the GMR effect is the fact
that the conduction electrons are spin polarized by interaction
with the magnetic moments of the magnetized layers. This
polarization, in turn, affects their scattering properties within
the layers and, consequently, results in changes in the resistance
of the layered configuration. In effect, the configuration is a
variable resistor that is controlled by the angle between the
magnetizations.
[0005] The magnetic tunneling junction device (TMR device) is an
alternative form of GMR sensor in which the relative orientation of
the magnetic moments in the upper and lower magnetized layers
controls the flow of spin-polarized electrons tunneling through a
very thin dielectric layer (the tunneling barrier layer) formed
between those magnetized layers. When injected electrons pass
through the upper layer, as in the GMR device, they are spin
polarized by interaction with the magnetization direction
(direction of its magnetic moment) of that layer. The probability
of such an electron then tunneling through the intervening
tunneling barrier layer into the lower magnetic layer then depends
on the availability of states within the lower layer that the
tunneling electron can occupy. This number, in turn, depends on the
magnetization direction of the lower layer. The tunneling
probability is thereby spin dependent and the magnitude of the
current (tunneling probability multiplied by the number of
electrons impinging on the barrier layer) depends upon the relative
orientation of the magnetizations of magnetic layers above and
below the barrier layer.
[0006] In what is called a spin-valve configuration, one of the two
magnetic layers in both the GMR and TMR has its magnetization fixed
in spatial direction (the pinned layer), while the other layer (the
free layer) has its magnetization free to move in response to an
external magnetic stimulus. If the magnetization of the free layer
is allowed to move continuously, as when it is acted on by a
continuously varying external magnetic field, the GMR and TMR
device each effectively acts as a variable resistor and it can be
used as a read-head in a hard disk drive. If the magnetization of
the free layer is only permitted to take on two orientations,
parallel and antiparallel to that of the pinned layer, then the
device can be used to store information (eg. 0 or 1, corresponding
to the free layer magnetization orientation) as an MRAM cell.
[0007] The difference in operation between the GMR sensor and the
TMR sensor, is that the resistance variations in the former are a
direct result of changes in the electrical resistance (due to spin
polarized electron scattering) within the three-layer configuration
(magnetic layer/non-magnetic conducting layer/magnetic layer),
whereas in the TMR sensor, the amount of current is controlled by
the availability of states for electrons that tunnel through the
dielectric barrier layer that is formed between the free and pinned
layers.
[0008] When the TMR configuration is used as a sensor or read head,
(called a TMR read head, or "tunneling magnetoresistive" read head)
the free layer magnetization is required to move about a central
bias position by the influence of the external magnetic fields of a
recorded medium, such as is produced by a moving hard disk or tape.
As the free layer magnetization varies in direction, a sense
current passing between the upper and lower electrodes and
tunneling through the dielectric barrier layer varies in magnitude
as more or less electron states become available. Thus a varying
voltage appears across the electrodes (which may be the magnetic
layers themselves). This voltage, in turn, is interpreted by
external circuitry and converted into a representation of the
information stored in the medium.
[0009] A typical bottom spin valve GMR sensor structure is the
following: Seed/AFM/outer pinned (AP2)/Ru/inner pinned
(AP1)/Cu/Free Layer/Capping Layer.
[0010] A typical bottom spin valve TMR sensor structure is the
following: Seed/AFM/outer pinned (AP2)/Ru/inner pinned
AP1)/MgO/Free Layer/Capping Layer,
[0011] In the TMR configuration shown above (and in the CPP GMR as
well), the seed layer is an underlayer required to form subsequent
high quality magnetic layers. The AFM (antiferromagnetic layer) is
required to pin the pinned layer, ie., to fix the direction of its
magnetic moment by exchange coupling. The pinned layer itself is
now most often a synthetic antiferromagnetic (SyAF) (also termed a
synthetic antiparallel (SyAP)) structure with zero total magnetic
moment. This structure is achieved by forming an
antiferromagnetically coupled tri-layer whose configuration is
denoted herein as "outer pinned (AP2)/Ru/inner pinned (AP1)", which
is to say that two ferromagnetic layers, the outer (farthest from
the free layer) and inner (closest to the free layer) pinned layers
which are denoted AP2 and AP1 respectively, are magnetically
coupled across a Ru spacer layer in such a way that their
respective magnetic moments are mutually antiparallel and
substantially cancel each other. The structure and function of such
SyAP structures is well known in the art and will not be discussed
in further detail herein.
[0012] In the GMR sensor (i.e., used as a read head) there is an
electrically conducting but non-magnetic spacer layer (typically of
Cu) that separates the free and pinned layers. This conducting, but
non-magnetic Cu spacer layer in the GMR is replaced in the TMR by a
thin insulating (dielectric) layer of (for example) oxidized
magnesium (MgO) that can be oxidized in any of several different
ways to produce an effective dielectric tunneling barrier layer.
The free layer in both the GMR and TMR is usually a bilayer of
ferromagnetic material such as CoFeB/NiFe, and the capping layer in
both the GMR and TMR is typically a layer of tantalum (Ta). The
bilayer choice for the free layer is strongly suggested by the fact
that an effective free layer should be magnetically soft (of low
coercivity), which is an attribute of the CoFeB layer. The CoFeB
layer, however, exhibits excessive magnetostriction. By adding the
NiFe layer, the magnetostriction is reduced, but unfortunately, the
TMR ratio, dR/R, (ratio of maximum resistance variation as the free
layer magnetic moment changes direction, dR, to total device
resistance, R), which is a measure of its efficacy as a read sensor
(or MRAM element), will also be reduced. We shall see below that
the structure of the free layer can be significantly altered to
provide an improved TMR sensor or MRAM element as well as a GMR
sensor or MRAM element. We note that the vertical positioning of
the free and pinned layers may be reversed, to form either what are
called "bottom spin valves" (as shown here) and, alternatively "top
spin valves" with the free layer formed on the seed layer and the
pinned layer vertically above the free layer.
[0013] Much recent experimentation on GMR sensors has been directed
at improvements in the free layer structure. The most common
structure in both the GMR and TMR sensor had been a CoFeB/NiFe
bilayer, in which the NiFe layer provides the low magnetostriction,
while the CoFeB provides good magnetic softness. More recently,
attempts have been made to improve the magnetic properties of both
free and pinned layers by utilizing novel materials and laminated
structures. Examples of such attempts, which differ from and do not
achieve the results of the present disclosure, are to be found in:
[0014] U.S. Pat. No. 7,672,088 (Zhang et al), which is assigned to
the present assignee. [0015] U.S. Pat. No. 8,008,231 (Nishimura et
al.) [0016] U.S. Pat. No. 8,085,511 (Yuasa et al.)
SUMMARY
[0017] An object of this disclosure is to form a (top or bottom
spin valve) TMR (or, alternatively, a GMR) sensor or a TMR or GMR
MRAM element that combines a high TMR or GMR ratio and a low free
layer coercivity while retaining other advantageous properties.
[0018] An additional object of this invention is to provide such
devices in which B atom interdiffusion from a CoFeB electrode layer
(the magnetic layer into which electrons are injected or from which
they are removed), in either AP1 or the free layer, is
contained.
[0019] Still a further object of this invention is to provide such
devices in which Ni atom interdiffusion is contained and NiFe
crystalline growth is blocked, for a NiFe electrode layer in the
free layer.
[0020] These objects will be met by either a top or bottom spin
valve GMR or TMR sensor or MRAM element, but with emphasis herein
being on the description of a TMR sensor, in which there is formed
a free layer or pinned layer (AP1) in which there are inserted thin
(1-10 angstroms) iron (Fe) layers or iron rich layers of the alloy
FeX, where X is at least one of the non-magnetic, metallic elements
Ta, Hf, V, Co, Mo, Zr, Nb or Ti, combined with the Fe in amounts
less than 50% by atomic percent, or, equivalently, with the Fe atom
percent being at least 50%.
BRIEF DESCRIPTION OF THE DRAWINGS
[0021] FIG. 1 is a schematic representation of an ABS view of a
typical MTJ sensor that is patterned, biased longitudinally and
shielded.
[0022] FIG. 2 is a schematic representation of the MTJ TMR stack in
the sensor of FIG. 1, showing the layer structure in greater
detail.
[0023] FIG. 3 is a schematic representation of a MTJ TMR stack
similar to that of FIG. 2, except that layers of Fe and/or FeX
alloys have been inserted in positions where they will achieve the
objects of this disclosure.
DETAILED DESCRIPTION
[0024] The present disclosure is a (top or bottom spin valve) TMR
(or GMR) stack from which is formed a sensor or MRAM structure of
good areal resistance, good free layer coercivity and improved
magnetoresistive (MR) ratio (dR/R), provided by the insertion of
thin layers of Fe or iron-rich alloys of FeX into the free layer
and/or the pinned layer structures. The inserted layers are
characterized as having an atom percent of Fe of at least 50%, and
where X is chosen from one or several of the non-magnetic metallic
elements Ta, Hf, V, Co, Mo, Zr, Nb or Ti.
[0025] The improvement in performance is obtained by introducing
these layers at positions within the stack where they can contain
(or constrain) the interdiffusion of B from a CoFeB layer formed as
an element of the free or pinned layers and/or contain (or
constrain) the interdiffusion of Ni from an NiFe layer or halt the
crystallization of the NiFe layer, where that NiFe layer is formed
as an element of the free layer. The Fe or FeX layers are formed to
a thickness between approximately 1 and 10 angstroms, with the
approximate range between 2 and 5 angstroms being preferable. It is
noted that these performance improvements will accrue to both TMR
sensors (e.g. read elements having a variable free layer magnetic
moment) and to TMR MRAM elements (having essentially a bi-stable,
bi-directional free layer magnetic moment that is maintained by
layer anisotropy) and can also be effective in improving the
performance of GMR sensor and MRAM elements. In addition, the
structures can equally well be of the bottom or top configurations
where the vertical positions of free and pinned layers are
essentially interchanged.
[0026] To improve the TMR ratio of the current MTJ devices with MgO
barrier layer as shown in FIGS. 1 and 2, it is important to improve
the lattice matching between the AP1 layer of the bottom magnetic
electrode (the SyAF pinned layer), and/or the top magnetic
electrode (the free layer) with the MgO barrier layer. Also there
is a need to improve the growth conditions of the AP1 layer, the
MgO barrier layer and the free layer depositions. It is well known
that Fe or Fe-rich FeX alloy (X=at least one from Ta, Hf, V, Co,
Mo, Zr, Nb, Ti etc) with doping with X material of less than 50%
has a much better wetting with the MgO barriers compared with Co or
Co-rich alloys; also, such Fe or FeX alloys have a much smaller
lattice mismatch with the MgO barrier. Therefore, with such a thin
Fe layer or FeX alloy layer insertion in AP1 and/or the free layer,
MR enhancement is expected. A picture of such an improved TMR stack
is illustrated in FIG. 3 and will be discussed below.
[0027] Referring first to FIG. 1, there is shown a schematic ABS
view of a patterned, biased and shielded typical MTJ (magnetic
tunneling junction) sensor such as might be used to read recorded
magnetic data. With only minor changes, the illustration can be
applied as well to an MTJ MRAM element or a GMR sensor or MRAM
element, the MRAM being used to store binary data. In what follows,
we will denote the as-deposited configuration of layers as the
"stack." Once the stack is patterned and magnetized appropriately
(either in vertical cross-section and/or horizontal cross-section)
and provided with shields and biasing layers, it will become either
a sensor (i.e. a read sensor) or an MRAM element.
[0028] The patterned sensor stack (10), which is shown here as
being a thin-film TMR (tunneling magneto-resistive) stack, is
laterally abutted by longitudinal biasing layers (20), usually
formed of a hard magnetic material, and separated from the stack
itself by an insulating layer (30). The patterned stack is formed
between an upper shield (40) and a lower shield (50) that shields
it from extraneous magnetic fields. It is understood that the
arrangement of the shields would be different if the stack were
formed as an MRAM element. At the approximate center (vertically)
of the stack is found the defining tunneling barrier layer (60),
which controls the flow of polarized electrons through
quantum-mechanical tunneling and the availability of states for the
electrons.
[0029] Referring next to FIG. 2, there is shown, schematically, an
isolated and more detailed illustration of the stack (10) of FIG.
1. In this figure there is shown a lower layer (100) which includes
a seed layer (105), an antiferromagnetic (AFM) pinning layer (107)
and layer AP2 (109) of an antiferromagnetically (antiparallel
magnetic moments) coupled pinned layer, symbolized SyAP
hereinafter. AP2 is typically a layer of ferromagnetic
material.
[0030] Formed on lower layer (100) there is shown a coupling layer
(110), here formed of Ru, which provides an antiferromagnetic
coupling between layer AP2 (109) and another ferromagnetic layer,
AP1 (120), formed immediately above it and contiguous with it.
[0031] Formed on the coupling layer (110), there is the
abovementioned second ferromagnetic layer, denoted AP1 (120), which
together with AP2 and the intermediate coupling layer, forms a
tri-layer that behaves as a synthetic antiferromagnetic structure
(denoted SyAP). Layer AP1 is also called a reference layer because
the direction of its fixed magnetic moment provides a fixed
reference line with which the free magnetic moment of the free
layer to forms an angle.
[0032] Formed on AP1 (120) there is the tunneling barrier layer
(60), typically a layer of MgO, which is a thin non-conducting
layer. Quantum mechanically, even though the layer is classically
non-conducting, a perpendicular flow of electrons can nevertheless
pass through this barrier layer with a certain probability that
depends on the spin direction of the electrons and the
magnetization direction of AP1. If the structure were a GMR rather
than a TMR, the barrier layer would be replaced by a non-magnetic,
electrically conducting spacer layer, such as a layer of Cu,
through which electrons can pass.
[0033] Formed on the tunneling barrier layer (60) there is
magnetically free layer (140) of ferromagnetic material, it being
"free" in the sense that its magnetic moment if free to move under
the influence of external magnetic fields.
[0034] Finally, formed on the free layer (140) is a capping layer
(150), typically a layer of Ta, which serves several purposes,
including to protect the stack during processing and to provide a
good electrical contact for the current.
[0035] Referring finally to FIG. 3, there is shown, schematically,
the stack (10) of FIG. 2 in which there has been inserted the Fe
and FeX layers of this disclosure ((115) and (145)). In this figure
there is shown a lower layer configuration (100) which includes a
seed layer (105), an antiferromagnetic (AFM) pinning layer (107)
and the ferromagnetic layer AP2 (109) portion of an
antiferromagnetically coupled pinned layer. AP2 is typically a
layer of ferromagnetic material such as CoFe with Fe percent
>20%, or laminations of CoFe(y %)/FeCo(z %)/CoFe(y %), with y
%>5% and z %<50%. Furthermore, ferromagnetic layers AP1 and
the ferromagnetic free layer, are typically formed as layers of
CoFeB and CoFe and, in the free layer only, there is also a layer
of NiFe. As mentioned above, these alloys enable the ferromagnetic
free layer to have both the softness (low coercivity) of the CoFeB
and the low magnetostriction of the NiFe. Note, however that NiFe
is not preferred as a component of AP1 because of adverse effects
on the pinning fields and reduction of the MR ratio.
[0036] Formed on lower layer configuration (100), there is shown a
coupling layer (110), here formed of Ru, which provides an
antiferromagnetic coupling between layer AP2 (109) and layer AP1
(120) formed immediately above it and contiguous with it.
[0037] Formed on the coupling layer (110), there is a second
ferromagnetic layer, denoted AP1 (120), which together with AP2 and
the intermediate coupling layer, forms a tri-layer that behaves as
a synthetic antiferromagnetic structure (denoted SyAP). Layer AP1
is called a reference layer because the direction of its fixed
magnetic moment provides a fixed reference line with which the free
magnetic moment of the free layer to forms an angle. Unlike the
corresponding AP1 layer of FIG. 2, there is formed in the present
AP1 layer an inserted layer (115) of Fe or FeX alloys. Although
only a single insertion layer is shown for simplicity, multiple
layers are possible, with the multiple layers (laminations) being
all of the same alloy composition, or being a variety of such
compositions, each of the form Fe or FeX, with X being one or more
of the non-magnetic, metallic elements Ta, Hf, V, Co, Mo, Zr, Nb or
Ti and where the atom percentage of X is less than 50% so that the
layer is iron-rich. Thus, in an AP1 layer formed with laminates of
CoFeB/CoFe, the layer with the final multiple insertions could have
the form:
CoFe/FeX.sub.1/CoFe/CoFeB/FeX.sub.2/CoFe,
Where X.sub.1 could be Ta, X.sub.2 could be Hf or the FeX could be
just Fe itself.
[0038] The insertion layer (each insertion layer if more than one
is present) has a thickness of between approximately 1 and 10
angstroms with between 2 and 5 angstroms being preferred.
[0039] Formed on AP1 (120) there is a tunneling barrier layer
(130), typically a layer of MgO, which is a thin non-conducting
layer. Quantum mechanically, a perpendicular flow of electrons can
pass through this barrier layer with a certain probability that
depends on the spin direction of the electrons and the
magnetization direction of AP1.
[0040] Formed on the tunneling barrier layer (130) there is the
magnetically free layer (140) of ferromagnetic material, it being
"free" in the sense that its magnetic moment if free to move under
the influence of external magnetic fields. Unlike the magnetically
free layer of FIG. 2, however, this free layer includes a
multiplicity (only one being shown here) of insertion layers (145)
of the form Fe or FeX, where X is Ta, Hf, V, Co, Mo, Zr, Nb or Ti
and where the atom percentage of X is less than 50% so that the
layer is iron-rich. Each insertion layer has a thickness of between
approximately 1 and 10 angstroms with between 2 and 5 angstroms
being preferred.
[0041] Finally, formed on the free layer (140) is a capping layer
(150), typically a layer of Ta, which serves several purposes,
including to protect the stack during processing and to provide a
good electrical contact for the current.
[0042] When the free layer and/or the AP1 layer comprise bilayer
structures of CoFeB, CoFe and, (for the free layer only), also
NiFe, the insertion layers are preferably located next to the NiFe
portion of the free layer to constrain interdiffusion of the Ni
atoms and to block NiFe crystalline growth and next to the CoFeB
layer to constrain interdiffusion of the B atoms. The Fe layer and
the FeX insertion layers are not preferred to be immediately
adjacent to the MgO layer as the Fe or FeX layer tends to attract
some oxygen from the MgO. Note also that for the CoFeB/CoFe
structure of the AP1 layer, it is preferred that the CoFe layer be
immediately adjacent to the MgO layer. With the Fe or FeX
insertions, however, it is preferred to have the configuration
CoFeB/FeX/CoFe or its laminations, with the CoFe layer deposited on
top. For the free layer, it is preferred that the configuration:
CoFe/CoFeB/NiFe, have NiFe on top and the CoFe on the bottom where
it is closest to the MgO layer. In the preferred structure of this
disclosure, CoFeB should not be immediately adjacent to the MgO
because of interdiffusion concerns. From a crystallinity
perspective, it should be pointed out that the Fe or FeX layer
insertion is directed at preventing B interdiffusion into the MgO
tunneling barrier layer and, due to the Fe or FeX BCC (body
centered cubic) crystal structure it would prevent NiFe FCC (face
centered cubic) structure crystallization intrusion towards the MgO
layer. The NiFe layer is usually FCC structure and it the MR ratio
would be degraded should the MgO become FCC.
[0043] The fabrication process preferred for the (top or bottom)
TMR (or GMR) sensor or MRAM element is advantageously similar to
the processes currently in use to produce such sensors or MRAM
elements that do not include the insertion layers. Specifically,
the layer stack would be formed with the chosen insertion layers
deposited at their positions within the AP1 layer of the pinned
layer and/or the free layer. Then the stack would be patterned and
magnetized in accord with its ultimate use as a sensor or MRAM
element, longitudinal biasing layers would be applied and
appropriate top and bottom shields would be formed as required.
[0044] As is understood by a person skilled in the art, the present
description is illustrative of the present disclosure rather than
limiting of the present disclosure. Revisions and modifications may
be made to methods, materials, structures and dimensions employed
in forming and providing a TMR or GMR stack with enhanced MR
properties incorporating insertion layers of Fe or FeX in free
and/or pinned layers, while still forming and providing such a
structure and its method of formation in accord with the spirit and
scope of the present invention as defined by the appended
claims.
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