U.S. patent application number 14/032773 was filed with the patent office on 2014-06-26 for dresser.
This patent application is currently assigned to EBARA CORPORATION. The applicant listed for this patent is EBARA CORPORATION. Invention is credited to Hiroyuki Shinozaki.
Application Number | 20140179204 14/032773 |
Document ID | / |
Family ID | 50400732 |
Filed Date | 2014-06-26 |
United States Patent
Application |
20140179204 |
Kind Code |
A1 |
Shinozaki; Hiroyuki |
June 26, 2014 |
DRESSER
Abstract
A dresser includes an attachment secured to a dresser shaft for
rotating the dresser, a disk holder removably attached to the
attachment by a magnetic force, and a dresser disk removably
attached to the disk holder. The dresser disk has a dressing
surface. Each of the attachment and the disk holder has magnet for
generating the magnetic force.
Inventors: |
Shinozaki; Hiroyuki; (Tokyo,
JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
EBARA CORPORATION |
Tokyo |
|
JP |
|
|
Assignee: |
EBARA CORPORATION
Tokyo
JP
|
Family ID: |
50400732 |
Appl. No.: |
14/032773 |
Filed: |
September 20, 2013 |
Current U.S.
Class: |
451/443 |
Current CPC
Class: |
B24B 53/017
20130101 |
Class at
Publication: |
451/443 |
International
Class: |
B24B 53/017 20060101
B24B053/017 |
Foreign Application Data
Date |
Code |
Application Number |
Oct 1, 2012 |
JP |
2012-219304 |
Claims
1. A dresser for dressing a polishing pad, comprising: an
attachment secured to a dresser shaft for rotating the dresser; a
disk holder removably attached to the attachment by a magnetic
force; and a dresser disk removably attached to the disk holder,
the dresser disk having a dressing surface, wherein each of the
attachment and the disk holder has magnet for generating the
magnetic force.
2. The dresser according to claim 1, wherein the magnet comprises a
plurality of magnets arranged around a center of the dresser, and
an arrangement of the plurality of magnets are such that magnetic
poles of adjacent two of the magnets are different from each
other.
3. The dresser according to claim 2, wherein: the plurality of
magnets constitute a plurality of groups arranged at equal
intervals around the center of the dresser; each of the groups
includes at least three magnets arrayed such that north pole and
south pole alternate with each other; and an arrangement of the at
least three magnets is the same in all of the plurality of
groups.
4. The dresser according to claim 1, wherein the attachment is
removably secured to the dresser shaft.
5. The dresser according to claim 1, wherein the dresser disk is
removably attached to the disk holder.
6. The dresser according to claim 5, wherein the dresser disk is
attached to the disk holder by a magnetic force.
7. The dresser according to claim 5, wherein the dresser disk is
attached to the disk holder by a screw
8. A dresser for dressing a polishing pad, comprising: an
attachment secured to a dresser shaft for rotating the dresser; and
a brush disk removably attached to the attachment by a magnetic
forces, the brush disk having a dressing surface, wherein each of
the attachment and the brush disk has magnet for generating the
magnetic three.
9. The dresser according to claim 8, wherein the magnet comprises a
plurality of magnets arranged around a center of the dresser, and
an arrangement of the plurality of magnets are such that magnetic
poles of adjacent two of the magnets are different from each
other.
10. A dresser according to claim 9, wherein: the plurality of
magnets constitute a plurality of groups arranged at equal
intervals around the center of the dresser; each of the groups
includes at least three magnets arrayed such that pale and south
pole alternate with each other; and an arrangement of the at least
three magnets is the same in all of the plurality of groups.
11. The dresser according to claim 8, wherein the attachment is
removably secured to the dresser shaft.
Description
CROSS REFERENCE TO RELATED APPLICATION
[0001] This document claims priority to Japanese Application Number
2012-219304 filed Oct. 1, 2012, the entire contents of which are
hereby incorporated by reference.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] The present invention relates to a dresser for dressing (or
conditioning) a polishing pad of a polishing apparatus which is
typified by a CMP (Chemical Mechanical Polishing) apparatus.
[0004] 2. Description of the Related Art
[0005] A CMP apparatus for use in semiconductor fabrication is an
apparatus for polishing a water. This CAP apparatus is configured
to polish a surface of a wafer by bringing the wafer into sliding
contact with a polishing pad while supplying a polishing liquid
onto the polishing pad. As the polishing pad polishes wafers, the
polishing pad gradually loses its polishing performance. Therefore,
a dresser is typically used to restore a surface of the polishing
pad by slightly scraping away the surface of the polishing pad.
[0006] The dresser has a dresser disk for dressing a polishing
surface of a polishing pad. This dresser disk has a pad contacting
surface constituted by diamond abrasive grains, which are placed in
sliding contact with the surface of the polishing pad to thereby
scrape the polishing pad. The dresser disk itself is made of any of
various materials including a corrosion-resistant nonmagnetic
material such as SU316, a corrosion-resistant magnetic material
such as SUS630, and a resin such as polycarbonate. A brush dresser
having an implanted brush, instead of the diamond abrasive grains,
may be used.
[0007] The dresser disk and the brush dresser are consumables, and
are therefore inspected and replaced regularly. In order to
facilitate the replacement of the dresser, the dresser disk may be
made of a magnetic material. This is for the reason that a disk
holder, which is for holding the dresser disk and having magnets
embedded therein, can hold the dresser via a magnetic force. Such a
removable structure using the magnetic force is very convenient
because it requires no tools ibr replacing the dresser disk.
[0008] However, this conventional removable structure with use of
the magnets is not applicable to a dresser made of a nonmagnetic
material, such as a resin or the like. In recent years, there has
been a demand for using a plastic material for the dresser, from
viewpoints of corrosion resistance and prevention of metal
contamination. Further, it is necessary to remove the disk holder
When replacing the brush dresser and the diamond dresser.
Accordingly, there has also been a demand for better ease of the
replacement.
SUMMARY OF THE INVENTION
[0009] In view of the above situation, it is an object of the
present invention to provide. a dresser which can simply be
replaced regardless of the type of material of the dresser.
[0010] In order to accomplish the above object, a first aspect of
the present invention provides a dresser for dressing a polishing
pad, comprising: an attachment secured to a dresser shaft for
rotating the dresser; a disk holder removably attached to the
attachment by a magnetic force; and a dresser disk. removably
attached to the disk holder, the dresser disk having a dressing
surface, wherein each of the attachment and the disk holder has
magnet for generating the magnetic force.
[0011] In a preferred aspect of the present invention, the magnet
comprises a plurality of magnets arranged around a center of the
dresser; and an arrangement of the plurality of magnets are such
that magnetic poles of adjacent two of the magnets are different
from each other.
[0012] In a preferred aspect of the present invention, the
plurality of magnets constitute a plurality of groups arranged at
equal intervals around the center of the dresser, each of the
groups includes at least three magnets arrayed such that north pole
and south pole. alternate with each other, and an arrangement of
the at least three magnets is the same in all of the plurality of
groups.
[0013] In a preferred. aspect of the present invention, the
attachment is removably secured to the dresser Shaft..
[0014] In a preferred aspect of the present invention, the dresser
disk is removably attached to the disk holder.
[0015] In a preferred aspect of the present invention, the dresser
disk is attached to the disk holder by a magnetic force.
[0016] In a preferred aspect of the present invention, the dresser
disk is attached to the disk holder by a screw.
[0017] A second aspect of the present invention provides a dresser
for dressing a polishing pad, comprising: an attachment secured to
a dresser shaft for rotating the dresser; and a brush disk
removably attached to the attachment by a magnetic forces, the
brush disk having a dressing surface, wherein each of the
attachment and the brush disk has magnet for generating the
magnetic force.
[0018] In a preferred aspect of the present invention, the magnet
comprises a plurality of magnets arranged around a center of the
dresser, and an arrangement of the plurality of magnets are such
that magnetic poles of adjacent: two of the magnets are different
from each other.
[0019] In a preferred aspect of the present invention, the
plurality of magnets constitute a plurality of groups arranged at
equal intervals around the center of the dresser, each of the
groups includes at least three magnets arrayed such that north pole
and south pole alternate with each other, and an arrangement of the
at least three magnets is the same in all of the plurality of
groups.
[0020] In a preferred aspect of the present invention, the
attachment is removably secured to the dresser shaft.
[0021] According to the first aspect of the present invention, the
attachment and the disk holder are simply attracted to each other
by the magnetic force. Therefore, the disk holder, together with
the dresser disk, can be removed from the attachment relatively
easily by hand. Because the dresser disk is held by the disk
holder, the present invention can be applied regardless of whether
the dresser disk is made of a magnetic material or a nonmagnetic
material.
[0022] According to the second aspect of the present invention, the
attachment and the brush disk are simply attracted to each other
only by the magnetic force. Therefore, the brush disk can be
removed from the attachment relatively easily by hand.
BRIEF DESCRIPTION OF THE DRAWINGS
[0023] FIG. 1 is a perspective view of a dressing apparatus having
a dresser;
[0024] FIG. 2 is a cross-sectional view of the dresser;
[0025] FIG. 3 is a plan view of an attachment;
[0026] FIG. 4 is a bottom view of the attachment;
[0027] FIG. 5 is a cross-sectional view taken along line A-A of
FIG. 3;
[0028] FIG. 6 is a cross-sectional view taken along line B-B of
FIG. 5;
[0029] FIG. 7 is a plan view of a disk holder;
[0030] FIG. 8 is a cross-sectional view taken along line C-C of
FIG. 7;
[0031] FIG. 9 is a bottom view of the disk holder;
[0032] FIG. 10 is a cross-sectional view taken along line D-D of
FIG. 9;
[0033] FIG. 11 is a cross-sectional view of a dresser according to
another embodiment;
[0034] FIG. 12 is a cross-sectional view of a dresser according to
still another embodiment;
[0035] FIG. 13 is a plan view of a brush disk;
[0036] FIG. 14 is a cross-sectional view taken along line E-E of
FIG. 13;
[0037] FIG. 15 is a bottom view of the brush disk; and
[0038] FIG. 16 is a cross-sectional view taken along line F-F of
FIG. 15.
DETAILED DESCRIPTION
[0039] Embodiments of the present invention will be described below
with reference to the drawings. In FIGS. 1 through 16, identical
elements are denoted by identical reference numerals, and
repetitive descriptions thereof are omitted.
[0040] FIG. 1 is a perspective view of a dressing apparatus having
a dresser for dressing (or conditioning) a polishing pad. As shown
in FIG. 1, a polishing pad 2 for use in polishing of a substrate,
such as a wafer, is attached to a polishing table 1. The polishing
pad 2 is rotated in unison with the polishing table 1 by a table
motor 7, which is coupled to the polishing table 1. The wafer is
polished by being pressed against the rotating polishing pad 2.
[0041] A dressing apparatus 9 includes a dresser 10 which is
brought into sliding contact with the polishing pad 2, a dresser
shaft 13 to which the dresser 10 is coupled, a pneumatic cylinder
16 mounted to an upper end of the dresser shaft 13, and a dresser
arm 17 for rotatably supporting the dresser shaft 13. The dresser
10 has a lower surface serving as a dressing surface 10a that is
formed by abrasive grains (e.g., diamond particles). The pneumatic
cylinder 16 is disposed on a support base 20 which is supported by
columns 19. These columns 19 are fixedly mounted to the dresser arm
17.
[0042] The dresser arm 17 is actuated by a motor (not shown) to
pivot on a pivot shaft 22. The dresser shaft 13 is rotated about
its own axis by a motor (not shown), thus rotating the dresser 10
about the dresser shaft 13 in a direction indicated by arrow. The
pneumatic cylinder 16 serves as an actuator for moving the dresser
10 vertically through the dresser shaft 13 and for pressing the
dresser 10 against the surface of the polishing pad 2 at a
predetermined force.
[0043] Dressing of the polishing pad 2 is performed as follows. The
dresser 10 is rotated about the dresser shaft 13, and at the same
time pure water is supplied from a pure water supply nozzle (not
shown) onto the polishing pad 2. In this state, the dresser 10 is
pressed against the polishing pad 2 by the pneumatic cylinder 16 to
place the dressing surface 10a in sliding contact with the
polishing pad 2. The dresser arm 17 pivots around the pivot shaft
22 to cause the dresser 10 to oscillate in a radial direction of
the polishing pad 2. In this manner, the dresser 10 scrapes the
polishing pad 2 to thereby dress (i.e., restore) the surface of the
polishing pad 2.
[0044] FIG. 2 is a cross-sectional view of the dresser 10. The
dresser 10 includes an attachment 30 secured to the dresser shaft
30, a disk holder 50 removably mounted to the attachment 30 by a
magnetic force, and a dresser disk 70 removably mounted to the disk
holder 50. The attachment 30 is removably secured to the lower end
of the dresser shaft 13 by screws 31.
[0045] FIG. 3 is a plan view of the attachment 30. FIG. 4 is a
bottom view of the attachment 30. FIG. 5 is a cross-sectional view
taken along line A-A of FIG. 3. FIG. 6 is a cross-sectional view
taken along line B-B of FIG. 5. The attachment 30 has an annular
flange 32 and a cylindrical protrusion 33. The protrusion 33 is
located at a center of the flange 32 and projects downwardly. The
flange 32 has through-holes 32a formed therein into which the
screws 31 are inserted.
[0046] A plurality of magnets 35 are embedded in the flange 32.
These magnets 35 are arranged around the center of the dresser 10.
in the example shown in FIG. 3, twelve magnets 35 are provided. The
magnets 35 are arrayed such that magnetic poles of adjacent two of
the magnets 35 are different from each other. FIG. 3 shows one
example of the array of the magnets 35, and the present invention
is not limited to this example shown in FIG. 3.
[0047] In FIG. 3, the magnets 35 constitute a plurality of (four in
FIG. 3) groups 36, Which are arranged at equal intervals around the
center of the dresser 10. These groups 36 are spaced by a
predetermined distance, with the through-hole 32a located between
the adjacent groups 36. Each of the groups 36 is constituted by
three magnets 35 that are arranged such that south pole and north
pole alternate with each other. In the example shown in FIG. 3, the
magnets 35 of each group 36 are arrayed in the order of south pole,
north pole, and south pole. The magnets 35 of each of the groups 36
are arrayed in the same order. Specifically, each of all the groups
36 is constituted by three magnets 35 that are arrayed in the order
of south pole, north pole, and south pole. The present invention,
however, is not limited to this magnet arrangement. Each of the
groups 36 may he constituted by more than three magnets 35. The
magnet 35 may preferably he neodymium magnet.
[0048] FIG. 7 is a plan view of the disk holder 50. FIG. 8 is a
cross-sectional view taken along line C-C of FIG. 7, FIG. 9 is a
bottom view of the disk holder 50. FIG. 10 is a cross-sectional
view taken along line D-D of FIG. 9. The disk holder 50 is a
disk-shaped member that is larger in diameter than the attachment
30. The disk holder 50 has two circular recesses 51, 52 formed
centrally in an upper surface of the disk holder 50. The recesses
51, 52 form a stepped structure. The flange 32 of the attachment 30
is housed in the first-stage recess 51., while the protrusion 33 of
the attachment 30 is housed in the second-stage recess 52. The
recess 51 has a bottom surface with holes 54 formed therein for
receiving respective heads of the screws 31.
[0049] A plurality of magnets 56 are embedded in the disk holder
50. These magnets 56 are arranged around the center of the dresser
10. In the example shown in FIG. 9 twelve magnets 56 are provided.
These magnets 56 are arrayed such that magnetic poles of adjacent
two of the magnets 56 are different from each other. FIG. 9 shows
one example of the array of the magnets 56, and the present
invention is not limited to this example shown in FIG. 9.
[0050] In FIG. 9, the magnets 56 constitute a plurality of (four in
FIG. 9) groups 57, which are arranged at equal intervals around the
center of the dresser 10. The groups 57 are spaced by a
predetermined distance. Each of the groups 57 is constituted by
three magnets 56 that are arrayed such that south pole and north
pole alternate with each other. In the example shown in FIG. 9, the
magnets 56 of each group 57 are arrayed in the order of north pole,
south pole, and north pole. The magnets 56 of each of the groups 57
are arrayed in the same order. Specifically, each of all the groups
57 is constituted by three magnets 56 arrayed in the order of north
pole, south pole, and north pole. The present invention, however,
is not limited to this magnet arrangement. Each of the groups 57
may be constituted by more than three magnets 56.
[0051] As shown in. FIG. 2, the magnets 56 are located so as to
face the magnets 35 of the attachment 30, thus attracting these
magnets 35. Therefore, the disk holder 50 is removably attached to
the attachment 30 by a magnetic force (i.e., an attractive force)
generated between the magnets 35, 56. The magnets 56 may preferably
he neodymium magnets.
[0052] As shown in FIGS. 3 and 9, since the south pole and the
north pole alternate with each other, the attractive force acting
between the attachment 30 and the disk holder 50 is intensified.
Moreover, when a torque is applied from the attachment 30 to the
disk holder 50, each magnet repels the adjacent magnet. Therefore,
a relative position of the attachment 30 and the disk holder 50 is
unlikely to change, and the magnets can thus exert strong coupling
forces. In the example shown in FIGS. 3 and 9, the magnetic force
(the attractive force) generated between the confronting magnet
groups 36, 57 makes it easy to set the disk holder 50 on the
attachment 30, so that a user finds it easy to use the dresser
10.
[0053] In the example shown in FIG. 3, the groups 36, each having
an S-N-S-pole array, are arranged at equal intervals in the
circumferential direction. It is preferable to provide a clearance
as large as at least one pitch of the array of the magnets 35
between. the adjacent groups 36, as shown in FIG. 3, so that the
south pole of one group 36 is not close to the south pole of the
other group 36. If the south pole of one group 36 is located close
to the south pole of the other group 36, an attractive force may be
generated between the north pole of the magnet 56 and the south.
pole of the magnet 35 of the attachment 30 when the disk holder 50
is angularly displaced relative to the attachment 30 during
dressing of the polishing pad 2, thus causing the disk holder 50 to
be further displaced and possibly separating the disk holder 50
from the attachment 30. For the same reason, as shown in FIG, 9, it
is preferable to provide a clearance as large as at least one pitch
of the array of the magnets 56 between the adjacent groups 57. In
the example shown in FIG. 3, the magnets 35 of each group 36 are
arranged in the order of the south pole, the north pole, and the
south pole, but may be arranged in the order of the north pole, the
south pole, and the north pole. In this case, the magnets 56 of
each group 57 of the disk holder 50 are arranged in the order of
the south pole, the north pole, and the south pole.
[0054] A plurality of magnets 58 are embedded in a peripheral
portion of the disk holder 50. These magnets 58 serve to secure the
dresser disk 70 to the disk holder 50. The dresser disk 70 in this
embodiment is made of a magnetic material, and is removably
attached to the disk holder 50 by a magnetic force of the magnets
58. The dresser disk 70 has an annular lower surface with diamond
abrasive grains fixed thereto. These diamond abrasive grains
provide the dressing surface 10a in an annular shape. The dresser
10 dresses (or conditions) the polishing pad 2 with this dressing
surface 10a.
[0055] During dressing of the polishing pad 2, the dresser 10 in
its entirety is rotated about the dresser shaft 13, and presses the
dressing surface 10a of the dresser disk 70 against the polishing
pad 2. A plurality of (two in the drawings) pins 60 are secured to
the lower surface of the disk holder 50. These pins 60 are inserted
in recesses 71 (see FIG. 2) formed in the upper surface of the
dresser disk. 70. The pins 60 that engage with the recesses 71 can
prevent the dresser disk 70 from rotating relative to the disk
holder 50 when the dresser disk 70 is dressing the polishing pad
2.
[0056] According to the present invention, the attachment 30 and
the disk holder 50 are simply attracted to each other by the
magnetic force. Therefore, when replacing the dresser 10, the disk
holder 50, together with the dresser disk 70, can be removed from
the attachment 30 relatively easily by hand. While the dresser disk
70 is made of a magnetic material in the above-discussed example,
the present invention, can also be applied to a dresser 10 having a
dresser disk 70 made of a nonmagnetic material,
[0057] FIG. 11 is a cross-sectional view of a dresser 10 according
to another embodiment. A dresser disk 70 of this embodiment is made
of a nonmagnetic material. The dresser disk 70 is secured to the
disk holder 50 by a plurality of screws 73. By removing these
screws 73, the dresser disk 70 can be separated from the disk
holder 50. Other structural details are the same as those of the
above embodiment, and their repetitive descriptions are
omitted.
[0058] FIG. 12 is a cross-sectional view of a dresser 10 according
to still another embodiment. The dresser 10 of this embodiment is a
brush. dresser having a dressing surface 10a constituted by a
brush. Structural details of this embodiment which will not be
described particularly are the same as those of the above
embodiment, and their repetitive descriptions are omitted. The
dresser 10 shown in FIG 12 does not have the dresser disk 70, but
has a brush disk 80 instead. This brush disk 80 has a structure
similar to the disk holder 50 in the above-discussed
embodiment.
[0059] FIG. 13 is a plan view of the brush disk 80. FIG. 14 is a
cross-sectional view taken along line E-E of FIG. 13. FIG. 15 is a
bottom view of the brush disk 80. FIG. 16 is a cross-sectional view
taken along line F-F of FIG. 15. The brush disk 80 has two circular
recesses 81, 82 formed centrally in an upper surface thereof. The
recesses 81, 82 form a stepped. structure. The flange 32 of the
attachment 30 is housed in the first-stage recess 81, while the
protrusion 33 of the attachment 30 is housed in the second-stage
recess 82. The recess 81 has a bottom surface with holes 84 formed
therein for receiving the respective heads of the screws 31. The
brush disk 80 has a lower surface with a brush (not shown)
implanted thereon. This brush provides the dressing surface
10a.
[0060] A plurality of magnets 86 are embedded in the brush disk 80.
These magnets 86 are arranged around the center of the dresser 10.
In the example shown in FIG. 15, twelve magnets 86 are provided.
The magnets 86 are arrayed such that magnetic poles of adjacent two
of the magnets 86 are different from each other. FIG. 15 shows one
example of the array of the magnets 86, and the present invention
is not limited to the example shown in FIG. 15. In FIG. 15, the
magnets 86 constitute a plurality of (four in FIG. 15) groups 87
that are arranged at equal intervals around the center of the
dresser 10. The groups 87 are spaced by a predetermined distance.
This distance corresponds to at least one pitch of the array of the
magnets 86. The arrangement of the magnets 86 in each group 87 is
the same as the arrangement of the magnets 56 shown in FIG. 9. The
magnets 86 are located so as to face the magnets 35 of the
attachment 30, thus attracting the magnets 35. Therefore, the brush
holder 80 is removably attached to the attachment 30 by the
magnetic force i.e., the attractive force) generated between the
magnets 35, 86. The magnets 86 may preferably be neodymium
magnets.
[0061] With the above-discussed structure, the dresser 10 dresses
the polishing pad 2 by placing the dressing surface 10a, which is
constituted by the brush, in sliding contact with the polishing pad
2. The attachment 30 and the brush disk 80 are simply attracted to
each other by the magnetic force. Therefore, when replacing the
dresser 10, the brush disk 80 can be removed from the attachment 30
relatively easily by hand.
[0062] The previous description of embodiments is provided to
enable a person skilled in the art to make and use the present
invention. Moreover, various modifications to these embodiments
will be readily apparent to those skilled in the art, and the
generic principles and specific examples defined herein may be
applied to other embodiments. Therefore, the present invention is
not intended to he limited to the embodiments described herein but
is to be accorded the widest scope as defined by .imitation of the
claims.
* * * * *