| Patent | Date |
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Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
Grant 11,426,834 - Miyazaki , et al. August 30, 2 | 2022-08-30 |
Am Apparatus
App 20220258248 - SHINOZAKI; Hiroyuki | 2022-08-18 |
Am Apparatus
App 20220234285 - SHINOZAKI; Hiroyuki | 2022-07-28 |
Am Apparatus And Method For Manufacturing A Fabricated Object
App 20220226899 - SHINOZAKI; Hiroyuki | 2022-07-21 |
Am Apparatus For Manufacturing A Fabricated Object And Method For Testing An Irradiation Position Of A Beam In The Am Apparatus
App 20220212261 - SHINOZAKI; Hiroyuki | 2022-07-07 |
Measurement jig
Grant D954,567 - Shinozaki June 14, 2 | 2022-06-14 |
Method of monitoring a dressing process and polishing apparatus
Grant 11,325,224 - Shinozaki May 10, 2 | 2022-05-10 |
Film thickness measuring device and polishing device
Grant 11,065,734 - Shinozaki July 20, 2 | 2021-07-20 |
Substrate processing apparatus
Grant 10,926,374 - Shinozaki , et al. February 23, 2 | 2021-02-23 |
Substrate processing apparatus
Grant 10,870,183 - Shinozaki December 22, 2 | 2020-12-22 |
Dressing device, polishing apparatus, holder, housing and dressing method
Grant 10,777,417 - Shinozaki Sept | 2020-09-15 |
Polishing Apparatus
App 20200269381 - Shinozaki; Hiroyuki ; et al. | 2020-08-27 |
Method Of Monitoring A Dressing Process And Polishing Apparatus
App 20200254585 - Kind Code | 2020-08-13 |
Dummy Disk, Dressing Disk, And Surface Height Measurement Method Using Dummy Disk
App 20200246936 - Kind Code | 2020-08-06 |
Dressing Device, Polishing Apparatus, Holder, Housing And Dressing Method
App 20200219728 - Shinozaki; Hiroyuki | 2020-07-09 |
Substrate Polishing Apparatus
App 20200198093 - SHINOZAKI; Hiroyuki ; et al. | 2020-06-25 |
Polishing apparatus
Grant 10,688,620 - Shinozaki , et al. | 2020-06-23 |
Method of monitoring a dressing process and polishing apparatus
Grant 10,675,731 - Shinozaki | 2020-06-09 |
Substrate cleaning apparatus, substrate processing apparatus, and substrate cleaning method
Grant 10,661,409 - Shinozaki | 2020-05-26 |
Dressing device, polishing apparatus, holder, housing and dressing method
Grant 10,636,665 - Shinozaki | 2020-04-28 |
Substrate polishing apparatus
Grant 10,625,395 - Shinozaki | 2020-04-21 |
Substrate Adsorption Method, Substrate Holding Apparatus, Substrate Polishing Apparatus, Elastic Film, Substrate Adsorption Dete
App 20200094372 - SHINOZAKI; Hiroyuki ; et al. | 2020-03-26 |
Substrate polishing apparatus
Grant 10,576,604 - Shinozaki , et al. | 2020-03-03 |
Substrate Processing Apparatus, Substrate Processing Method, Substrate Holding Mechanism, And Substrate Holding Method
App 20200047309 - Miyazaki; Mitsuru ; et al. | 2020-02-13 |
Coupling Mechanism With Spherical Bearing, Method Of Determining Bearing Radius Of Spherical Bearing, And Substrate Polishing Ap
App 20200039030 - Shinozaki; Hiroyuki | 2020-02-06 |
Substrate adsorption method, substrate holding apparatus, substrate polishing apparatus, elastic film, substrate adsorption determination method for substrate holding apparatus, and pressure control method for substrate holding apparatus
Grant 10,537,975 - Shinozaki , et al. Ja | 2020-01-21 |
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
Grant 10,486,285 - Miyazaki , et al. Nov | 2019-11-26 |
Coupling mechanism, substrate polishing apparatus, method of determining position of rotational center of coupling mechanism, program of determining position of rotational center of coupling mechanism, method of determining maximum pressing load of rotatin
Grant 10,442,054 - Shinozaki Oc | 2019-10-15 |
Substrate Treatment Apparatus
App 20190126430 - SHINOZAKI; Hiroyuki | 2019-05-02 |
Substrate processing apparatus
Grant 10,170,345 - Shinozaki , et al. J | 2019-01-01 |
Dresser disk cleaning brush, cleaning apparatus, and cleaning method
Grant 10,086,495 - Shinozaki October 2, 2 | 2018-10-02 |
Substrate processing apparatus
Grant 10,032,656 - Shinozaki July 24, 2 | 2018-07-24 |
Polishing apparatus
Grant 10,029,343 - Shinozaki July 24, 2 | 2018-07-24 |
Polishing apparatus and controlling the same
Grant 10,016,871 - Shinozaki July 10, 2 | 2018-07-10 |
Polishing apparatus, method for controlling the same, and method for outputting a dressing condition
Grant 9,962,804 - Shinozaki May 8, 2 | 2018-05-08 |
Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus
Grant 9,943,943 - Shinozaki , et al. April 17, 2 | 2018-04-17 |
Substrate Polishing Apparatus
App 20180093363 - SHINOZAKI; Hiroyuki | 2018-04-05 |
Polishing Apparatus And Polishing Method
App 20180093360 - SHINOZAKI; Hiroyuki ; et al. | 2018-04-05 |
Coupling Mechanism, Substrate Polishing Apparatus, Method Of Determining Position Of Rotational Center Of Coupling Mechanism, Program Of Determining Position Of Rotational Center Of Coupling Mechanism, Method Of Determining Maximum Pressing Load Of Rotating Body, And Program Of Determining Maximum P
App 20180071885 - SHINOZAKI; Hiroyuki | 2018-03-15 |
Polishing table replacement apparatus, polishing table replacement method, and apparatus for replacing a component of semiconductor-device manufacturing machine
Grant 9,908,212 - Suemasa , et al. March 6, 2 | 2018-03-06 |
Dressing Device, Polishing Apparatus, Holder, Housing And Dressing Method
App 20180047572 - SHINOZAKI; Hiroyuki | 2018-02-15 |
Method Of Monitoring A Dressing Process And Polishing Apparatus
App 20180021920 - SHINOZAKI; Hiroyuki | 2018-01-25 |
Substrate Processing Apparatus
App 20180012780 - Shinozaki; Hiroyuki ; et al. | 2018-01-11 |
Coupling mechanism, substrate polishing apparatus, method of determining position of rotational center of coupling mechanism, program of determining position of rotational center of coupling mechanism, method of determining maximum pressing load of rotating body, and program of determining maximum p
Grant 9,849,557 - Shinozaki December 26, 2 | 2017-12-26 |
Method of monitoring a dressing process and polishing apparatus
Grant 9,808,908 - Shinozaki November 7, 2 | 2017-11-07 |
Substrate Processing Apparatus
App 20170291274 - Shinozaki; Hiroyuki ; et al. | 2017-10-12 |
Substrate Processing Apparatus
App 20170284579 - Shinozaki; Hiroyuki | 2017-10-05 |
Polishing apparatus having end point detecting apparatus detecting polishing end point on basis of current and sliding friction
Grant 9,757,838 - Shinozaki September 12, 2 | 2017-09-12 |
Substrate Processing Apparatus, Substrate Processing Method, Substrate Holding Mechanism, And Substrate Holding Method
App 20170252894 - MIYAZAKI; Mitsuru ; et al. | 2017-09-07 |
Polishing method and polishing apparatus
Grant 9,707,661 - Shinozaki July 18, 2 | 2017-07-18 |
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
Grant 9,687,957 - Miyazaki , et al. June 27, 2 | 2017-06-27 |
Wet treatment apparatus and substrate treatment apparatus provided with the same
Grant 9,687,958 - Shinozaki June 27, 2 | 2017-06-27 |
Polishing Table Replacement Apparatus, Polishing Table Replacement Method, And Apparatus For Replacing A Component Of Semiconductor-device Manufacturing Machine
App 20170151649 - SUEMASA; Shuichi ; et al. | 2017-06-01 |
Polishing apparatus
Grant 9,662,761 - Shinozaki , et al. May 30, 2 | 2017-05-30 |
Lifting device, substrate processing apparatus having lifting device, and unit transferring method
Grant 9,666,469 - Shinozaki , et al. May 30, 2 | 2017-05-30 |
Exhaust flow rate control apparatus and substrate processing apparatus provided therewith
Grant 9,616,545 - Shinozaki April 11, 2 | 2017-04-11 |
Substrate Adsorption Method, Substrate Holding Apparatus, Substrate Polishing Apparatus, Elastic Film, Substrate Adsorption Determination Method For Substrate Holding Apparatus, And Pressure Control Method For Substrate Holding Apparatus
App 20170050289 - SHINOZAKI; Hiroyuki ; et al. | 2017-02-23 |
Dresser Disk Cleaning Brush, Cleaning Apparatus, And Cleaning Method
App 20170043449 - SHINOZAKI; Hiroyuki | 2017-02-16 |
Substrate holding apparatus and polishing apparatus
Grant 9,550,268 - Shinozaki January 24, 2 | 2017-01-24 |
Polishing method
Grant 9,539,699 - Shinozaki January 10, 2 | 2017-01-10 |
Dresser disk cleaning brush, cleaning apparatus, and cleaning method
Grant 9,511,476 - Shinozaki December 6, 2 | 2016-12-06 |
Polishing Apparatus, Method For Controlling The Same, And Method For Outputting A Dressing Condition
App 20160271749 - SHINOZAKI; Hiroyuki | 2016-09-22 |
Coupling Mechanism, Substrate Polishing Apparatus, Method Of Determining Position Of Rotational Center Of Coupling Mechanism, Program Of Determining Position Of Rotational Center Of Coupling Mechanism, Method Of Determining Maximum Pressing Load Of Rotating Body, And Program Of Determining Maximum P
App 20160256976 - SHINOZAKI; Hiroyuki | 2016-09-08 |
Brush for cleaning semiconductor polishing disk
Grant D764,124 - Shinozaki August 16, 2 | 2016-08-16 |
Method And Apparatus For Monitoring A Polishing Surface Of A Polishing Pad Used In Polishing Apparatus
App 20160207162 - SHINOZAKI; Hiroyuki ; et al. | 2016-07-21 |
Polishing Apparatus And Controlling The Same
App 20160184961 - SHINOZAKI; Hiroyuki | 2016-06-30 |
Brush for cleaning semiconductor polishing disk
Grant D760,455 - Shinozaki June 28, 2 | 2016-06-28 |
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
Grant 9,358,662 - Miyazaki , et al. June 7, 2 | 2016-06-07 |
Polishing apparatus and polishing method
Grant 9,362,129 - Miyazaki , et al. June 7, 2 | 2016-06-07 |
Substrate Cleaning Apparatus, Substrate Processing Apparatus, And Substrate Cleaning Method
App 20160136775 - Shinozaki; Hiroyuki | 2016-05-19 |
Polishing Method And Polishing Apparatus
App 20160114456 - SHINOZAKI; Hiroyuki | 2016-04-28 |
Dresser disk
Grant D753,736 - Shinozaki April 12, 2 | 2016-04-12 |
Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus
Grant 9,302,366 - Shinozaki , et al. April 5, 2 | 2016-04-05 |
Polishing Method
App 20160074994 - Shinozaki; Hiroyuki | 2016-03-17 |
Polishing Apparatus
App 20150343594 - SHINOZAKI; Hiroyuki | 2015-12-03 |
Polishing Apparatus
App 20150343593 - SHINOZAKI; Hiroyuki | 2015-12-03 |
Dresser disk
Grant D743,456 - Shinozaki , et al. November 17, 2 | 2015-11-17 |
Dresser disk
Grant D743,455 - Shinozaki November 17, 2 | 2015-11-17 |
Method And Apparatus For Monitoring A Polishing Surface Of A Polishing Pad Used In Polishing Apparatus
App 20150314416 - SHINOZAKI; Hiroyuki ; et al. | 2015-11-05 |
Substrate Polishing Apparatus
App 20150314418 - SHINOZAKI; Hiroyuki ; et al. | 2015-11-05 |
Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus
Grant 9,156,122 - Shinozaki , et al. October 13, 2 | 2015-10-13 |
Film Thickness Measuring Device And Polishing Device
App 20150258654 - SHINOZAKI; Hiroyuki | 2015-09-17 |
Polishing apparatus for flattening surface of workpiece
Grant 9,132,525 - Shinozaki September 15, 2 | 2015-09-15 |
Dresser disk
Grant D737,873 - Shinozaki September 1, 2 | 2015-09-01 |
Polishing Apparatus
App 20150151401 - Shinozaki; Hiroyuki ; et al. | 2015-06-04 |
Dressing pellet for dresser disk
Grant D730,960 - Shinozaki June 2, 2 | 2015-06-02 |
Exhaust flow rate control apparatus and substrate processing apparatus provided therewith
App 20150090351 - Shinozaki; Hiroyuki | 2015-04-02 |
Lifting Device, Substrate Processing Apparatus Having Lifting Device, And Unit Transferring Method
App 20150082613 - SHINOZAKI; Hiroyuki ; et al. | 2015-03-26 |
Dressing Device, Chemical Mechanical Polishing Apparatus Including The Same, And Dresser Disc Used In The Same
App 20150065019 - SHINOZAKI; Hiroyuki | 2015-03-05 |
Substrate Processing Apparatus, Substrate Processing Method, Substrate Holding Mechanism, And Substrate Holding Method
App 20150050863 - MIYAZAKI; Mitsuru ; et al. | 2015-02-19 |
Wet Treatment Apparatus And Substrate Treatment Apparatus Provided With The Same
App 20150042028 - Shinozaki; Hiroyuki | 2015-02-12 |
Dressing pellet for dresser disk
Grant D722,331 - Shinozaki February 10, 2 | 2015-02-10 |
Substrate Processing Apparatus
App 20140373884 - Shinozaki; Hiroyuki | 2014-12-25 |
Robot Arm Control Apparatus, Substrate Transfer Apparatus, Substrate Processing Apparatus, Robot Arm Control Method, And Program
App 20140358280 - SHINOZAKI; Hiroyuki | 2014-12-04 |
Substrate Processing Apparatus, Substrate Processing Method, Substrate Holding Mechanism, And Substrate Holding Method
App 20140302676 - MIYAZAKI; Mitsuru ; et al. | 2014-10-09 |
Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber
Grant 8,807,914 - Shinozaki August 19, 2 | 2014-08-19 |
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
Grant 8,795,032 - Miyazaki , et al. August 5, 2 | 2014-08-05 |
Dresser
App 20140179204 - Shinozaki; Hiroyuki | 2014-06-26 |
Substrate Holding Apparatus And Polishing Apparatus
App 20140134924 - SHINOZAKI; Hiroyuki | 2014-05-15 |
Polishing Apparatus And Polishing Method
App 20140120725 - MIYAZAKI; Mitsuru ; et al. | 2014-05-01 |
Polishing Apparatus
App 20140094098 - SHINOZAKI; Hiroyuki | 2014-04-03 |
Substrate Processing Apparatus
App 20140083468 - MIYAZAKI; Mitsuru ; et al. | 2014-03-27 |
Method Of Monitoring A Dressing Process And Polishing Apparatus
App 20140065931 - SHINOZAKI; Hiroyuki | 2014-03-06 |
Dresser Disk Cleaning Brush, Cleaning Apparatus, And Cleaning Method
App 20140041687 - SHINOZAKI; Hiroyuki | 2014-02-13 |
Dressing apparatus, dressing method, and polishing apparatus
Grant 8,517,796 - Shinozaki August 27, 2 | 2013-08-27 |
Method And Apparatus For Monitoring A Polishing Surface Of A Polishing Pad Used In Polishing Apparatus
App 20120309267 - SHINOZAKI; Hiroyuki ; et al. | 2012-12-06 |
Dressing Apparatus, Dressing Method, And Polishing Apparatus
App 20100311309 - SHINOZAKI; Hiroyuki | 2010-12-09 |
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
App 20090305612 - Miyazaki; Mitsuru ; et al. | 2009-12-10 |
Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber
App 20090067977 - Shinozaki; Hiroyuki | 2009-03-12 |
Substrate Treatment Apparatus And Substrate Treatment Method
App 20080220621 - Shinozaki; Hiroyuki ; et al. | 2008-09-11 |
Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber
App 20070140815 - Shinozaki; Hiroyuki | 2007-06-21 |
Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber
Grant 7,232,286 - Shinozaki June 19, 2 | 2007-06-19 |
Substrate Treatment Apparatus And Substrate Treatment Method
App 20070128364 - Shinozaki; Hiroyuki ; et al. | 2007-06-07 |
Substrate treatment apparatus and substrate treatment method
App 20070111536 - Shinozaki; Hiroyuki ; et al. | 2007-05-17 |
Substrate Treatment Apparatus And Substrate Treatment Method
App 20070111542 - Shinozaki; Hiroyuki ; et al. | 2007-05-17 |
Substrate Treatment Apparatus And Substrate Treatment Method
App 20070107656 - SHINOZAKI; Hiroyuki ; et al. | 2007-05-17 |
Substrate Processing Apparatus And Substrate Processing Method
App 20070095791 - Shinozaki; Hiroyuki ; et al. | 2007-05-03 |
Substrate Processing Apparatus And Substrate Processing Method
App 20070092646 - SHINOZAKI; Hiroyuki ; et al. | 2007-04-26 |
Substrate Processing Apparatus And Substrate Processing Method
App 20070092651 - Shinozaki; Hiroyuki ; et al. | 2007-04-26 |
Differential pumping seal apparatus
Grant 7,134,668 - Shinozaki November 14, 2 | 2006-11-14 |
Substrate processing apparatus and substrate processing method
App 20060169208 - Shinozaki; Hiroyuki ; et al. | 2006-08-03 |
Stage device and angle detecting device
Grant 7,025,005 - Shinozaki , et al. April 11, 2 | 2006-04-11 |
Excimer laser apparatus
Grant 6,809,448 - Suzuki , et al. October 26, 2 | 2004-10-26 |
Controlled magnetic bearing apparatus
Grant 6,809,449 - Shinozaki October 26, 2 | 2004-10-26 |
Electric discharge gas laser
Grant 6,785,314 - Ooyama , et al. August 31, 2 | 2004-08-31 |
Magnetic bearing controller
Grant 6,657,345 - Shinozaki December 2, 2 | 2003-12-02 |
Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber
App 20030201606 - Shinozaki, Hiroyuki | 2003-10-30 |
Discharge-pumped excimer laser device
Grant 6,603,787 - Sekiguchi , et al. August 5, 2 | 2003-08-05 |
Stage device and angle detecting device
App 20030136309 - Shinozaki, Hiroyuki ; et al. | 2003-07-24 |
Excimer laser apparatus
App 20030107283 - Suzuki, Natsushi ; et al. | 2003-06-12 |
Magnetic bearing and magnetic levitation apparatus
App 20030107282 - Ooyama, Atsushi ; et al. | 2003-06-12 |
Controlled magnetic bearing apparatus
App 20030080638 - Shinozaki, Hiroyuki | 2003-05-01 |
Differential pumping seal apparatus
App 20030075871 - Shinozaki, Hiroyuki | 2003-04-24 |
Discharge-pumped excimer laser device
Grant 6,539,043 - Shinozaki , et al. March 25, 2 | 2003-03-25 |
Magnetic bearing and circulation fan apparatus
Grant 6,519,273 - Sekiguchi , et al. February 11, 2 | 2003-02-11 |
Substrate processing apparatus including a magnetically levitated and rotated substrate holder
Grant 6,464,825 - Shinozaki October 15, 2 | 2002-10-15 |
Circulation fan apparatus and circulation-fan driving motor
Grant 6,464,472 - Sekiguchi , et al. October 15, 2 | 2002-10-15 |
Magnetic bearing controller
App 20020096954 - Shinozaki, Hiroyuki | 2002-07-25 |
Magnetic bearing apparatus of quick response
App 20020047405 - Shinozaki, Hiroyuki | 2002-04-25 |
Magnetic bearing apparatus
App 20020047399 - Shinozaki, Hiroyuki | 2002-04-25 |
Substrate rotating apparatus
Grant 6,373,159 - Shinozaki April 16, 2 | 2002-04-16 |
Magnetic bearing apparatus
App 20020011754 - Shinozaki, Hiroyuki | 2002-01-31 |
Electric discharge gas laser
App 20010050940 - Ooyama, Atushi ; et al. | 2001-12-13 |
Substrate rotating apparatus
App 20010051499 - Shinozaki, Hiroyuki | 2001-12-13 |
Magnetic bearing and circulation fan apparatus
App 20010017877 - Sekiguchi, Shinichi ; et al. | 2001-08-30 |
Spin processing apparatus
Grant 6,269,548 - Shinozaki , et al. August 7, 2 | 2001-08-07 |
Thin-film deposition apparatus
Grant 6,176,929 - Fukunaga , et al. January 23, 2 | 2001-01-23 |
Thin-film vapor deposition apparatus
Grant 6,022,413 - Shinozaki , et al. February 8, 2 | 2000-02-08 |
Reactant gas ejector head
Grant 5,950,925 - Fukunaga , et al. September 14, 1 | 1999-09-14 |
Vapor feed supply system
Grant 5,950,646 - Horie , et al. September 14, 1 | 1999-09-14 |
Thin-film vapor deposition apparatus
Grant 5,935,337 - Takeuchi , et al. August 10, 1 | 1999-08-10 |
Access analysis method and system in parallel data base system
Grant 5,729,736 - Gomi , et al. March 17, 1 | 1998-03-17 |
Reactant gas ejector head and thin-film vapor deposition apparatus
Grant 5,728,223 - Murakami , et al. March 17, 1 | 1998-03-17 |
Magnetic levitation conveyor apparatus
Grant 5,641,054 - Mori , et al. June 24, 1 | 1997-06-24 |
Robot with dust-free and maintenance-free actuators
Grant 5,397,212 - Watanabe , et al. March 14, 1 | 1995-03-14 |
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