U.S. patent application number 13/332868 was filed with the patent office on 2013-06-27 for erase inhibit for 3d non-volatile memory.
The applicant listed for this patent is Xiying Costa, Haibo Li. Invention is credited to Xiying Costa, Haibo Li.
Application Number | 20130163337 13/332868 |
Document ID | / |
Family ID | 47428980 |
Filed Date | 2013-06-27 |
United States Patent
Application |
20130163337 |
Kind Code |
A1 |
Li; Haibo ; et al. |
June 27, 2013 |
Erase Inhibit For 3D Non-Volatile Memory
Abstract
An erase process for a 3D stacked memory device performs a
two-sided erase of NAND strings until one of more of the NAND
strings passes an erase-verify test, then a one-sided erase of the
remaining NAND strings is performed. The two-sided erase charges up
the body of a NAND string from the source-side and drain-side ends,
while the one-sided erase charges up the body of the NAND string
from the drain-side end. The NAND strings associated with one bit
line form a set. The switch to the one-sided erase can occur when
the set meets a set erase-verify condition, such as one, all, or
some specified portion of the NAND strings of the set passing the
erase-verify test. The erase operation can end when no more than a
specified number of NAND strings have not met the erase-verify
test. As a result, erase degradation of the memory cells is
reduced.
Inventors: |
Li; Haibo; (Sunnyvale,
CA) ; Costa; Xiying; (San Jose, CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Li; Haibo
Costa; Xiying |
Sunnyvale
San Jose |
CA
CA |
US
US |
|
|
Family ID: |
47428980 |
Appl. No.: |
13/332868 |
Filed: |
December 21, 2011 |
Current U.S.
Class: |
365/185.17 ;
365/185.22 |
Current CPC
Class: |
G11C 16/04 20130101;
G11C 16/3418 20130101; G11C 16/0483 20130101; G11C 16/16 20130101;
G11C 16/344 20130101 |
Class at
Publication: |
365/185.17 ;
365/185.22 |
International
Class: |
G11C 16/16 20060101
G11C016/16; G11C 16/04 20060101 G11C016/04 |
Claims
1. A 3D stacked non-volatile memory device, comprising: a
substrate; a stacked non-volatile memory cell array carried by the
substrate, and comprising a plurality of sets of memory strings,
and each memory string comprises a plurality of memory cells
between a drain end of the memory string and a source end of the
memory string; a plurality of bit lines, where, for each set of
memory strings, a respective bit line of the plurality of bit lines
is connected to the drain end of each memory string in the set of
memory strings; at least one source line connected to the source
end of at least one memory string in each of the sets of memory
strings; and at least one control circuit in communication with the
stacked non-volatile memory cell array, the plurality of bit lines
and the at least one source line, the at least one control circuit:
(a) to perform one erase-verify iteration in an erase operation for
the plurality of sets of memory strings: applies an erase voltage
to each bit line of the plurality of bit lines, then determines
whether at least one of the sets of memory strings reaches a set
erase-verify condition, the at least one of the sets of memory
strings is connected to at least one of the bit lines, and (b) to
perform a next erase-verify iteration in the erase operation: (i)
if the at least one of the sets of memory strings reaches the set
erase-verify condition, applies an erase voltage to remaining bit
lines of the plurality of bit lines, other than the at least one of
the bit lines, and applies an erase-inhibit voltage to the at least
one of the bit lines, and (ii) if the at least one of the sets of
memory strings does not reach the set erase-verify condition,
applies an erase voltage to each bit line of the plurality of bit
lines.
2. The 3D stacked non-volatile memory device of claim 1, wherein:
the erase voltage comprises an initial lower level (Vsg) and a
subsequent peak level (Verase0 to Verase7); and the erase-inhibit
voltage exceeds the initial lower level by a margin (.DELTA.) of
0-2 V.
3. The 3D stacked non-volatile memory device of claim 1, wherein:
the plurality of sets of memory strings are in a block; and the at
least one control circuit ends the erase operation when the block
meets a block erase-verify condition, the block erase-verify
condition is met when no more than a specified number of the memory
strings have not passed an erase-verify test.
4. The 3D stacked non-volatile memory device of claim 1, wherein:
the at least one of the sets of memory strings reaches the set
erase-verify condition when the at least one control circuit
determines that at least one memory string in the one of the sets
of memory strings passes an erase-verify test.
5. The 3D stacked non-volatile memory device of claim 1, wherein:
the bit lines extend parallel to one another and the at least one
source line extends transversely to the bit lines.
6. The 3D stacked non-volatile memory device of claim 1, wherein:
each memory string comprises a U-shaped NAND string; and the at
least one source line is connected to the source ends of two
adjacent memory strings in each of the sets of memory strings.
7. The 3D stacked non-volatile memory device of claim 1, wherein:
each set of memory strings comprises a plurality of U-shaped NAND
strings; and for each set of memory strings, the respective bit
line of the plurality of bit lines is connected to a drain end of
each U-shaped NAND string.
8. The 3D stacked non-volatile memory device of claim 1, wherein:
each memory string comprises a U-shaped NAND string; and each
U-shaped NAND string comprises a source-side column of memory cells
and a drain-side column of memory cells.
9. The 3D stacked non-volatile memory device of claim 1, wherein:
when the erase voltage is applied to each bit line of the plurality
of bit lines, the at least one control circuit, to erase one or
more memory cells in each set of memory strings, floats a control
gate voltage of the one or more memory cells then drives the
control gate voltage down to a lower fixed level.
10. The 3D stacked non-volatile memory device of claim 1, wherein:
each memory string comprises a drain-side select gate at the drain
end of the memory string and a source-side select gate at the
source end of the memory string; during the one erase-verify
iteration, the at least one control circuit applies an erase
voltage to the at least one source line; and during the next
erase-verify iteration, if the at least one of the sets of memory
strings reaches the set erase-verify condition, the at least one
control circuit drives a voltage (Vsg) of each of the source-side
select gates and applies an erase-inhibit voltage to the at least
one source line.
11. A method for performing an erase operation in a 3D stacked
non-volatile memory device, comprising: performing at least one
erase-verify iteration of the erase operation for a stacked
non-volatile memory cell array, the stacked non-volatile memory
cell array comprising a plurality of sets of memory strings, and
each memory string comprises a plurality of memory cells between a
drain end of the memory string and a source end of the memory
string, the drain ends of the memory strings of each set of memory
strings are connected to a respective bit line of a plurality of
bit lines, and the source ends of the memory strings are connected
to at least one source line, each erase-verify iteration of the at
least one erase-verify iteration charges up a body of each of the
memory strings from at least the drain ends; determining whether at
least one of the sets of memory strings connected to at least one
of the bit lines reaches a set erase-verify condition; and
performing a next erase-verify iteration of the erase operation,
(a) if the at least one of the sets of memory strings reaches the
set erase-verify condition, the next erase-verify iteration of the
erase operation charges up a body of each memory string connected
to remaining bit lines of the plurality of bit lines other than the
at least one of the bit lines, from the drain ends of each memory
string connected to the remaining bit lines, and does not charge up
a body of each memory string connected to the at least one of the
bit lines, and (b) if the at least one of the sets of memory
strings does not reach the set erase-verify condition, the next
erase-verify iteration of the erase operation charges up the body
of each of the memory strings from at least the drain ends.
12. The method of claim 11, wherein: the determining comprises
determining that each memory string in the one of the sets of
memory strings passes an erase-verify test.
13. The method of claim 11, wherein: each erase-verify iteration of
the at least one erase-verify iteration charges up the body of each
of the memory strings by applying an erase voltage to the drain
ends of each of the memory strings; and if the at least one of the
sets of memory strings reaches the set erase-verify condition, the
next erase-verify iteration: (c) charges up the body of each memory
string connected to the remaining bit lines by applying an erase
voltage to the drain ends of each memory string connected to the
remaining bit lines, and (d) applies an erase-inhibit voltage to
the drain ends of each memory string connected to the at least one
of the bit lines, and drives (Vsg) a source-side select gate at the
source end of each of the memory strings connected to the at least
one of the bit lines.
14. The method of claim 11, wherein: the erase operation erases one
or more memory cells in each set of memory strings; and a control
gate voltage of the one or more memory cells is floated and then
driven down to a lower fixed level (.about.0 V) in each of the at
least one erase-verify iteration and the next erase-verify
iteration.
15. The method of claim 11, wherein: if the at least one of the
sets of memory strings reaches the set erase-verify condition, the
performing the next erase-verify iteration comprises floating
source-side select gates at the source end of each of the memory
strings connected to the at least one of the bit lines, so that
each of the memory strings connected to the at least one of the bit
lines is not subject to erase.
16. The method of claim 11, wherein: each erase-verify iteration of
the at least one erase-verify iteration charges up the body of each
of the memory strings from the source ends, so that each of the
memory strings is subjected to a two-sided erase; and if the at
least one of the sets of memory strings reaches the set
erase-verify condition, the next erase-verify iteration does not
charge up the body of each memory string connected to the remaining
bit lines, so that each memory string connected to the remaining
bit lines is subjected to a one-sided erase.
17. The method of claim 11, wherein: the bit lines extend parallel
to one another and the at least one source line extends
transversely to the bit lines; each memory string comprises a
U-shaped NAND string; and the at least one source line is connected
to the source ends of two adjacent memory strings in each of the
sets of memory strings.
18. The method of claim 11, wherein: each set of memory strings
comprises a plurality of U-shaped NAND strings; and for each set of
memory strings, the respective bit line of the plurality of bit
lines is connected to a drain end of each U-shaped NAND string.
19. A 3D stacked non-volatile memory device, comprising: a
substrate; a stacked non-volatile memory cell array carried by the
substrate, and comprising a plurality of sets of memory strings,
each memory string comprises a plurality of memory cells between a
drain end of the memory string and a source end of the memory
string, a drain-side select gate at the drain end of the memory
string and a source-side select gate at the source end of the
memory string; a plurality of bit lines, where, for each set of
memory strings, a respective bit line of the plurality of bit lines
is connected to the drain end of each memory string in the set of
memory strings; at least one source line connected to the source
end of at least one memory string in each of the sets of memory
strings; and at least one control circuit in communication with the
stacked non-volatile memory cell array, the plurality of bit lines
and the at least one source line, the at least one control circuit:
(a) to perform one erase-verify iteration in an erase operation for
the plurality of sets of memory strings: applies an erase voltage
to each bit line of the plurality of bit lines, applies an erase
voltage to the at least one source line, then determines whether at
least one of the sets of memory strings reaches a set erase-verify
condition, the at least one of the sets of memory strings is
connected to at least one of the bit lines, and (b) to perform a
next erase-verify iteration in the erase operation: (i) if the at
least one of the sets of memory strings reaches the set
erase-verify condition, applies an erase voltage to remaining bit
lines of the plurality of bit lines, other than the at least one of
the bit lines, applies a bit line erase-inhibit voltage to the at
least one of the bit lines and applies a source line erase-inhibit
voltage to the at least one source line, and (ii) if the at least
one of the sets of memory strings does not reach the set
erase-verify condition, applies an erase voltage to each bit line
of the plurality of bit lines.
20. The 3D stacked non-volatile memory device of claim 19, wherein:
the bit lines extend parallel to one another; and the at least one
source line extends transversely to the bit lines.
21. The 3D stacked non-volatile memory device of claim 19, wherein:
each memory string comprises a U-shaped NAND string; and the at
least one source line is connected to the source ends of two
adjacent memory strings in each of the sets of memory strings.
22. The 3D stacked non-volatile memory device of claim 19, wherein:
during the next erase-verify iteration, if the at least one of the
sets of memory strings reaches the set erase-verify condition, the
at least one control circuit floats a voltage of each of the
source-side select gates and applies an erase-inhibit voltage to
the at least one source line.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates to techniques for erasing
memory cells in a 3D-non-volatile memory device.
[0003] 2. Description of the Related Art
[0004] Recently, ultra high density storage devices have been
proposed using a 3D stacked memory structure sometimes referred to
as a Bit Cost Scalable (BiCS) architecture. For example, a 3D NAND
stacked memory device can be formed from an array of alternating
conductive and dielectric layers. A memory hole is drilled in the
layers to define many memory layers simultaneously. A NAND string
is then formed by filling the memory hole with appropriate
materials. A straight NAND string extends in one memory hole, while
a pipe- or U-shaped NAND string (P-BiCS) includes a pair of
vertical columns of memory cells which extend in two memory holes
and which are joined by a bottom back gate. Control gates of the
memory cells are provided by the conductive layers.
BRIEF DESCRIPTION OF THE DRAWINGS
[0005] Like-numbered elements refer to common components in the
different figures.
[0006] FIG. 1A is a perspective view of a 3D stacked non-volatile
memory device.
[0007] FIG. 1B is a functional block diagram of the 3D stacked
non-volatile memory device 100 of FIG. 1A.
[0008] FIG. 1C depicts an embodiment of block BLK0 of FIG. 1A which
includes U-shaped NAND strings.
[0009] FIG. 1D depicts an embodiment of block BLK0 of FIG. 1A which
includes straight NAND strings.
[0010] FIG. 2A depicts a top view of a word line layer of a 3D
non-volatile memory device having U-shaped NAND strings, consistent
with FIG. 1C, showing word line layer portions and associated
drivers.
[0011] FIG. 2B depicts a top view of a select gate layer of the 3D
non-volatile memory device of FIG. 2A, showing drain-side select
gate lines, source-side select gate lines and associated
drivers.
[0012] FIG. 2C depicts a top view of a source line layer of the 3D
non-volatile memory device of FIG. 2A, showing source lines and
associated drivers.
[0013] FIG. 2D depicts a top view of a bit line layer of the 3D
non-volatile memory device of FIG. 2A, showing bit lines and
associated drivers.
[0014] FIG. 2E depicts a cross-sectional view of a block of the 3D
non-volatile memory device of FIG. 2A, along line 200 of SetA0 of
NAND strings of FIG. 2A.
[0015] FIG. 2F depicts a close-up view of the region 269 of the
column C0 of FIG. 2E, showing a drain-side select gate SGD0 and a
memory cell MC6,0.
[0016] FIG. 2G depicts a cross-sectional view of the column C0 of
FIG. 2F.
[0017] FIG. 3 depicts an arrangement of memory cells in an example
set of NAND strings such as SetA0 in FIG. 2E.
[0018] FIG. 4A depicts threshold voltage distributions of an erased
state and higher data states.
[0019] FIG. 4B depicts a series of erase pulses and verify pulses
in an erase operation.
[0020] FIG. 5A depicts one embodiment of an erase operation for a
block of memory cells.
[0021] FIG. 5B depicts details of step 510 (two-sided erase) of
FIG. 5A.
[0022] FIG. 5C depicts details of step 526 (one-sided erase) of
FIG. 5A.
[0023] FIGS. 6A-6E depict voltages in the erase portion of an
erase-verify iteration of an erase operation.
[0024] FIGS. 7A-7C depict voltages in the verify portion of an
erase-verify iteration of an erase operation.
[0025] FIG. 8A depicts a top view of word line layers of a 3D
non-volatile memory device having straight NAND strings, consistent
with FIG. 1D, showing associated drivers.
[0026] FIG. 8B depicts a top view of a select gate layer of the 3D
non-volatile memory device of FIG. 8A, showing drain-side select
gate lines and associated drivers.
[0027] FIG. 8C depicts a top view of a select gate layer of the 3D
non-volatile memory device of FIG. 8A, showing source-side select
gate lines and associated drivers.
[0028] FIG. 8D depicts a top view of a source line layer of the 3D
non-volatile memory device of FIG. 8A, showing source lines and
associated drivers.
[0029] FIG. 8E depicts a top view of a bit line layer of the 3D
non-volatile memory device of FIG. 8A, showing bit lines and
associated drivers.
[0030] FIG. 8F depicts a cross-sectional view of a block of the 3D
non-volatile memory device of FIG. 8A, along line 800 of setB0 of
NAND strings FIG. 8A.
[0031] FIG. 9 depicts an arrangement of memory cells in an example
set of NAND strings such as SetB0 in FIG. 8F.
DETAILED DESCRIPTION
[0032] A 3D stacked non-volatile memory device can be arranged in
multiple blocks, where typically an erase operation is performed
one block at a time. An erase operation can include multiple
erase-verify iterations which are performed until an erase-verify
condition is met for the block, at which point the erase operation
ends. One approach is for the erase-verify condition to allow a
predetermined number of fail bits. That is, the erase operation can
be declared to be successful even if a small number of memory cells
have not reached the erase state. However, this approach does not
inhibit fast-erasing memory cells from over-erase. As a result,
over-erase of some of the memory cells can occur, causing serious
degradation of the memory cells as excessive holes are accumulated
in the tunneling path.
[0033] However, unlike a 2D NAND structure, where a p-well
substrate is common for all blocks, 3D stacked non-volatile memory
devices have an individual thin poly-silicon body for each NAND
string channel, whose bias can be controlled by bit line (BL),
source line (SL), drain-side select gate (SGD) and source-side
select gate (SGS) voltages. In a normal erase operation, referred
to as a two-sided erase, gate-induced drain leakage (GIDL) currents
are generated at both the SGD and SGS transistors. The BL and SL
are biased at Verase, and SGD and SGS are biased at Vsg. In one
approach, once all the memory cells associated with the same bit
line pass an erase-verify test (e.g., reach the erase state), the
associated bit line voltage is reduced to Vsg+(0.about.2V), so that
no GIDL current is generated at the next erase pulse at the bit
line/drain side. Meanwhile, the source line voltage is also reduced
to Vsg+(0.about.2V) so that, for all channels, there will be no
GIDL current generated at the source line side for all the
following erase pulses of the erase operation. Thus, erase inhibit
is achieved for the memory cells which pass the erase-verify test,
while those that did not pass are then erased by GIDL current
generated at the bit line side only, in a one-sided erase. This
avoids over erase of the cells which reach the erase state
relatively quickly.
[0034] In the discussion below, structural details of 3D stacked
non-volatile memory devices are provided generally in FIGS. 1A to 3
and 8A to 9, and details of an erase operation are provided
generally in FIGS. 4A to 7C.
[0035] FIG. 1A is a perspective view of a 3D stacked non-volatile
memory device. The memory device 100 includes a substrate 101. On
the substrate are example blocks BLK0 and BLK1 of memory cells and
a peripheral area 106 with circuitry for use by the blocks. The
substrate 101 can also carry circuitry under the blocks, along with
one or more lower metal layers which are patterned in conductive
paths to carry signals of the circuitry. The blocks are formed in
an intermediate region 102 of the memory device. In an upper region
103 of the memory device, one or more upper metal layers are
patterned in conductive paths to carry signals of the circuitry.
Each block comprises a stacked area of memory cells, where
alternating levels of the stack represent word lines. In one
possible approach, each block has opposing tiered sides from which
vertical contacts extend upward to an upper metal layer to form
connections to conductive paths. While two blocks are depicted as
an example, additional blocks can be used, extending in the x-
and/or y-directions.
[0036] In one possible approach, the length of the plane, in the
x-direction, represents a direction in which signal paths to word
lines extend in the one or more upper metal layers, and the width
of the plane, in the y-direction, represents a direction in which
signal paths to bit lines extend in the one or more upper metal
layers. The z-direction represents a height of the memory
device.
[0037] FIG. 1B is a functional block diagram of the 3D stacked
non-volatile memory device 100 of FIG. 1A. The memory device 100
may include one or more memory die 108. The memory die 108 includes
a 3D (three-dimensional) memory array of storage elements 150,
e.g., including the blocks BLK0 and BLK1, control circuitry 110,
and read/write circuits 165. The memory array 150 is addressable by
word lines via a row decoder 130 and by bit lines via a column
decoder 160. The read/write circuits 165 include multiple sense
blocks 140 (sensing circuitry) and allow a page of storage elements
to be read or programmed in parallel. Typically a controller 150 is
included in the same memory device 100 (e.g., a removable storage
card) as the one or more memory die 108. Commands and data are
transferred between the host and controller 150 via lines 120 and
between the controller and the one or more memory die 108 via lines
118.
[0038] The control circuitry 110 cooperates with the read/write
circuits 165 to perform memory operations on the memory array 150,
and includes a state machine 112, an on-chip address decoder 114,
and a power control module 116. The state machine 112 provides
chip-level control of memory operations. The on-chip address
decoder 114 provides an address interface between that used by the
host or a memory controller to the hardware address used by the
decoders 130 and 160. The power control module 116 controls the
power and voltages supplied to the word lines and bit lines during
memory operations. It can includes drivers for word line layers and
word line layer portions, drain- and source-side select gate
drivers (referring, e.g., to drain- and source-sides or ends of a
string of memory cells such as a NAND string, for instance) and
source lines. The sense blocks 140 can include bit line drivers, in
one approach.
[0039] In some implementations, some of the components can be
combined. In various designs, one or more of the components (alone
or in combination), other than memory array 150, can be thought of
as at least one control circuit. For example, at least one control
circuit may include any one of, or a combination of, control
circuitry 110, state machine 112, decoders 114/160, power control
116, sense blocks 140, read/write circuits 165, and controller 150,
and so forth.
[0040] In another embodiment, a non-volatile memory system uses
dual row/column decoders and read/write circuits. Access to the
memory array 150 by the various peripheral circuits is implemented
in a symmetric fashion, on opposite sides of the array, so that the
densities of access lines and circuitry on each side are reduced by
half Thus, the row decoder is split into two row decoders and the
column decoder into two column decoders. Similarly, the read/write
circuits are split into read/write circuits connecting to bit lines
from the bottom and read/write circuits connecting to bit lines
from the top of the array 150. In this way, the density of the
read/write modules is reduced by one half.
[0041] Other types of non-volatile memory in addition to NAND flash
memory can also be used.
[0042] FIG. 1C depicts an embodiment of block BLK0 of FIG. 1A which
includes U-shaped NAND strings. The block BLK0A includes U-shaped
NAND strings arranged in sets (SetA0, SetA1, SetA2, SetA3, . . . ,
SetAn, where there are n-1 sets in a block). Each set of NAND
strings is associated with one bit line (BLA0, BLA1, BLA2, BLA3, .
. . , BLAn). In one approach, all NAND strings in a block which are
associated with one bit line are in the same set. Each U-shaped
NAND string thus has two columns of memory cells--a drain-side
column and a source-side column. For example, SetA0 includes NAND
strings NSA0 (having drain-side column C0 and source-side column
C1), NSA1 (having drain-side column C3 and source-side column C2),
NSA2 (having drain-side column C4 and source-side column C5), NSA3
(having drain-side column C7 and source-side column C6), NSA4
(having drain-side column C8 and source-side column C9) and NSAS
(having drain-side column C11 and source-side column C10). Source
lines extend transversely to the bit lines and include SLA0, SLA1
and SLA2. The source lines join the source-side columns of adjacent
NAND string in a set. For example, SLA0 joins C1 and C2, SLA1 joins
C5 and C6 and SLA2 joins C9 and C10. In one approach, the source
lines in a block are joined to one another and driven by one
driver. The bit lines and the source lines are above the memory
cell array in this example.
[0043] FIG. 1D depicts an embodiment of block BLK0 of FIG. 1A which
includes straight NAND strings. The block BLK0B includes straight
NAND strings arranged in sets (SetB0, SetB1, SetB2, SetB3, . . . ,
SetBn, where there are n-1 sets in a block). Each set of NAND
strings is associated with one bit line (BLB0, BLB1, BLB2, BLB3, .
. . , BLBn). In one approach, all NAND strings in a block which are
associated with one bit line are in the same set. Each straight
NAND string has one column of memory cells. For example, SetA0
includes NAND strings NSB0, NSB1, NSB2, NSB3, NSB4 and NSB5. Source
lines extend parallel to the bit line and include SLB0, SLB1, SLB2,
SLB3, . . . , SLBn. In one approach, the source lines in a block
are joined to one another and driven by one driver. The bit lines
are above the memory cell array and the source lines are below the
memory cell array in this example.
[0044] FIG. 2A depicts a top view of a word line layer of a 3D
non-volatile memory device having U-shaped NAND strings, consistent
with FIG. 1C, showing word line layer portions and associated
drivers. This is a representative layer among the multiple word
line layers in a stack. Referring also to FIG. 2E, the stack
includes alternating dielectric and conductive layers. The
dielectric layers include D0 to D8 and may be made of SiO2, for
instance. The conductive layers include BG, which is a back gate
layer, WL0 to WL6, which form word line layers, e.g., conductive
paths to control gates of the memory cells at the layer, and SG,
which forms a select gate layer, e.g., a conductive path to control
gates of select gates of NAND strings. The word line layer of FIG.
2A may represent any one of WL0 to WL6, for instance. The
conductive layers may include doped polysilicon or metal silicide,
for instance. An example voltage of 5-10 V may be applied to the
back gate to maintain a conductive state which connects the drain-
and source-side columns.
[0045] FIG. 2A depicts the block BLK0A of FIG. 1C and a similar
block BLK1A as an example. For each block, the word line layer is
divided into two word line layer portions, e.g., word line layer
portions WLA1 and WLA2 in BLK0A, and word line layer portions WLB1
and WLB2 in BLK1A. Each block includes a slit pattern. A slit
refers, e.g., to a void which extends vertically in the stack,
typically from an etch stop layer at the bottom to at least a top
layer of the stack. The slit can be filled with insulation to
insulate words line layer portions from one another. A slit 208 of
BLK0A is a single continuous slit which extends in a zig-zag
pattern in the block so that the block is divided into two
portions, WLA1 and WLA2, which are insulated from one another.
Similarly, a slit 209 of BLK1A divides BLK1A into two portions,
WLB1 and WLB2, which are insulated from one another. This approach
can provide greater flexibility in controlling the memory cells
since the word line layer portions can be drive independently.
[0046] Each block includes rows of columnar, e.g., vertical, memory
holes or pillars, represented by circles. Each row represents a
vertical group of columns in the figure. The memory holes extend
vertically in the stack and include memory cells such as in a
vertical NAND string. Example columns of memory cells in BLK0A
along a line 200 include C0 to C11. The figure represents a
simplification, as many more rows of memory holes will typically be
used, extending to the right and left in the figure. Also, the
figures are not necessarily to scale. The columns of memory cells
can be arranged in sub-blocks 201 to 206 in BLK0A and 221 to 226 in
BLK1A. When U-shaped NAND strings are used, each sub-block can
include two adjacent rows of columns of memory cells. In a
sub-block, the adjacent rows are separated by the slit. The columns
of memory cells on one side of the slit are drain-side columns
(e.g., C0, C3, C4, C7, C8 and C11 in FIG. 2E), and the columns of
memory cells on the other side of the slit are source-side columns
(e.g., C1, C2, C5, C6, C9 and C10 in FIG. 2E). Note that the
pattern of two source-side columns between two drain-side columns
repeats in the y-direction.
[0047] Word line drivers WL0A1-DR, WL0A2-DR, WL1A1-DR and WL1A2-DR
independently provide signals such as voltage waveforms to the word
line layer portions WLA1, WLA2, WLB1 and WLB2, respectively.
[0048] The drawings are not to scale and do not show all memory
columns. For example, a more realistic block might have 12 memory
columns in the y direction as shown, but a very large number such
as 32k memory columns in the x direction, for a total of 384k
memory columns in a block. With U-shaped NAND strings, this is 192K
NAND strings. With straight NAND strings, this is 384k NAND
strings.
[0049] FIG. 2B depicts a top view of a select gate layer of the 3D
non-volatile memory device of FIG. 2A, showing drain-side select
gate lines, source-side select gate lines and associated drivers.
For example, this can represent layer SG of FIG. 2E. A separate
select gate line, e.g., a conductive line or path, is associated
with each row of columns of memory cells. Moreover, separate select
gate lines can be connected to the drain- and source-side columns
of a U-shaped NAND string. For example, BLK0A includes drain-side
select gate lines 231, 234, 235, 238, 239 and 242, which are driven
by select gate drivers SGD0A0-DR to SGD0A5-DR, respectively, and
source-side select gate lines 232, 233, 236, 237, 240 and 241,
which are driven by select gate drivers SGS0A0-DR to SGS0A5-DR,
respectively (DR denotes driver). Similarly, BLK1 includes
drain-side select gate lines 251, 254, 255, 258, 259 and 262, which
are driven by select gate drivers SGD6-DR to SGD11-DR,
respectively, and source-side select gate lines 252, 253, 256, 257,
260 and 261, which are driven by select gate drivers SGS0A1-DR to
SGS1A5-DR, respectively. The select gate drivers provide signals
such as voltage waveforms to the select gate lines.
[0050] FIG. 2C depicts a top view of a source line layer of the 3D
non-volatile memory device of FIG. 2A, showing source lines and
associated drivers. For example, this can represent layer SL of
FIG. 2E. A source line, e.g., a conductive line or path, is
associated with pairs of rows of source-side columns of memory
cells. A source line is connected to a source-side end of a
U-shaped or straight NAND string. For example, BLK0A includes
source lines 271 (e.g., connected to C0 and C1), 272 (e.g.,
connected to C5 and C6) and 273 (e.g., connected to C9 and C10).
Similarly, BLK1A includes source lines 274, 275 and 276. The source
line drivers provide signals such as voltage waveforms to the
source lines. For example, SL0A-DR provides signals to source lines
271 to 273, and SL1A-DR provides signals to source lines 274 to
276.
[0051] FIG. 2D depicts a top view of a bit line layer of the 3D
non-volatile memory device of FIG. 2A, showing bit lines and
associated drivers. For example, this can represent layer BL of
FIG. 2E. A bit line, e.g., a conductive line or path, is associated
with a set of columns of memory cells which extend in a horizontal
line in the figure. A bit line extends across multiple blocks which
are adjacent laterally of one another. A bit line is connected to a
drain-side end of a U-shaped or straight NAND string, e.g., to a
vertical channel or body of the NAND string. For example, bit lines
281 to 295 are driven by bit line drivers BL0-DR to BL14-DR,
respectively. The bit line drivers provide signals such as voltage
waveforms to the ends of the NAND strings. Each bit line can be
independently driven.
[0052] FIG. 2E depicts a cross-sectional view of a block of the 3D
non-volatile memory device of FIG. 2A, along line 200 of SetA0 of
NAND strings of FIG. 2A. Columns of memory cells C0 to C11 are
depicted in the multi-layer stack. The stack 277 includes the
substrate 101, an insulating film 109 on the substrate, and a back
gate layer BG, which is a conductive layer, on the insulating film.
A trench is provided in portions of the back gate below pairs of
columns of memory cells of a U-shaped NAND string. Layers of
materials which are provided in the columns to form the memory
cells are also provided in the trenches, and the remaining space in
the trenches is filled with a semiconductor material to provide
connecting portions 263 to 268 which connect the columns. The back
gate thus connects the two columns of each U-shaped NAND string.
For example, NSA0 includes columns C0 and C1 and connecting portion
263. NSA0 has a drain end 278 and a source end 302. NSA1 includes
columns C2 and C3 and connecting portion 264. NSA1 has a drain end
306 and a source end 304. NSA2 includes columns C4 and C5 and
connecting portion 265. NSA3 includes columns C6 and C7 and
connecting portion 266. NSA4 includes columns C8 and C9 and
connecting portion 267. NSA5 includes columns C10 and C11 and
connecting portion 268.
[0053] The source line SLA0 is connected to the source ends 302 and
304 of two adjacent memory strings NSA0 and NSA1, respectively, in
the SetA0 of memory strings. The source line SLA0 is also connected
to other sets of memory strings which are behind NSA0 and NSA1 in
the x direction. Recall that additional U-shaped NAND strings in
the stack 277 extend behind the U-shaped NAND strings depicted in
the cross-section, e.g., along the x-axis. The U-shaped NAND
strings NSA0 to NSA5 are each in a different sub-block, but are in
a common set of NAND strings (SetA0).
[0054] The slit portion 208 from FIG. 2A is also depicted as an
example. In the cross-section, multiple slit portions are seen,
where each slit portion is between the drain- and source-side
columns of a U-shaped NAND string. Portions of the source lines 271
to 273 are also depicted. A portion of the bit line BLA0 is also
depicted.
[0055] Short dashed lines depict memory cells and select gates, as
discussed further below.
[0056] A region 269 of the stack is shown in greater detail in FIG.
2F.
[0057] FIG. 2F depicts a close-up view of the region 269 of the
column C0 of FIG. 2E, showing a drain-side select gate SGD0 and a
memory cell MC6,0. See also FIG. 3, where this notation is also
used. The region shows portions of the dielectric layers D6 to D8
and the conductive layers WL6 and SG. Each column includes a number
of layers which are deposited along the sidewalls of the column.
These layers can include oxide-nitride-oxide and polysilicon layers
which are deposited, e.g., using atomic layer deposition. For
example, a block oxide can be deposited as layer 296, a nitride
such as SiN as a charge trapping layer can be deposited as layer
297, a tunnel oxide can be deposited as layer 298, a polysilicon
body or channel can be deposited as layer 299, and a core filler
dielectric can be deposited as region 300. Additional memory cells
are similarly formed throughout the columns.
[0058] When a memory cell is programmed, electrons are stored in a
portion of the charge trapping layer which is associated with the
memory cell. For example, electrons are represented by "-" symbols
in the charge trapping layer 297 for MC6,0. These electrons are
drawn into the charge trapping layer from the polysilicon body, and
through the tunnel oxide. The threshold voltage of a memory cell is
increased in proportion to the amount of stored charge. During an
erase operation, a voltage in the polysilicon body is raised due to
GIDL, as mentioned, while a voltage of one or more selected word
line layers floats. The voltage of the one or more selected word
line layers is then driven down sharply to a low level such as 0 V
to create an electric field across the tunnel oxide which causes
holes to be injected from the memory cell's body to the charge
trapping layer, resulting in a large Vth downshift toward an
erase-verify level, Vv-erase (FIG. 4A). This process can be
repeated in successive iterations until an erase-verify condition
is met, as discussed further in connection with FIGS. 4B to 5C.
[0059] For unselected word lines, the word lines are floated but
not driven down to a low level so that the electric field across
the tunnel oxide is relatively small, and no, or very little, hole
tunneling will occur. Memory cells of the unselected word lines
will experience little or no Vth downshift, and as a result, they
will not be erased.
[0060] FIG. 2G depicts a cross-sectional view of the column C0 of
FIG. 2F. Each layer is ring-shaped in one possible approach, except
the core filler which is cylindrical.
[0061] FIG. 3 depicts an arrangement of memory cells in an example
set of NAND strings such as SetA0 in FIG. 2E. NAND strings NSA0 to
NSA5 and their columns of memory cells are depicted. For
convenience, a notation is used in which SGD denotes a drain-side
select gate of a NAND string, e.g., the select gate at the top of
the drain-side column of a U-shaped NAND string. Each SGD is
numbered, starting from 0 and proceeding left to right across the
figures, e.g., from SGD0 to SGD5. SGS denotes a source-side select
gate of a NAND string, e.g., the select gate at the top of the
source-side column of a U-shaped NAND string. Each SGS is also
numbered, starting from 0 and proceeding left to right across the
figures, e.g., from SGS0 to SGS5.
[0062] Each memory cell is numbered in a (z,y) format where z
denotes a word line layer of the memory cell and y denotes the
position of the memory cell in the word line layer. For example,
memory cells connected to WL0, WL1, WL2, WL3, WL4, WL5 and WL6 are
numbered as MC0,0 to MC0,11, MC1,0 to MC1,11, MC2,0 to MC2,11,
MC3,0 to MC3,11, MC4,0 to MC4,11, MC5,0 to MC5,11, and MC6,0 to
MC6,11, respectively, proceeding left to right across the figures.
WL0, WL1, WL2, WL3, WL4, WL5 and WL6 denote word line layer
portions at a given level or height in the stack.
[0063] Additionally, a heavy dashed line border of a memory cell
indicates a selected memory cell which has been selected in an
erase operation. A lighter dashed line border of a memory cell
indicates an unselected memory cell which has not been selected in
an erase operation, such as a non-erased memory cell which is
eligible to store user data, or a dummy memory cell which is not
eligible to store user data. A dummy memory cell can be programmed
to any data state, for instance, and is not considered to be
eligible to store useful information such as user data or system
data. Dummy memory cells can be set aside by the control circuitry
and not used to store user data.
[0064] Recall that each word line layer can have two,
inter-digitated word line layer portions as set forth in FIG. 2A.
In one approach, only the memory cells of one of the word line
layer portions are selected to be erased. In another approach, as
shown here, the memory cells of both of the word line layer
portions in a block are selected to be erased. For example, all of
the memory cells associated with WL3, namely MC3,0 to MC3,11, are
selected to be erased in an erase operation. The memory cells of
WL0 to WL2 and WL4 to WL6 are unselected memory cells which are not
selected to be erased in the erase operation. Generally, an erase
operation can involve one or more word line layers, one or more
word line layer portions in a word line layer, and all, or fewer
than all, memory cells in a selected word line layer or portion. In
the simplest case, all memory cells in a block are selected to be
erased.
[0065] FIG. 4A depicts threshold voltage distributions of an erased
state and higher data states. As mentioned, memory cells can be
programmed so that their threshold voltages are in respective
ranges which represent data states. Initially, an erase operation
is performed which places all of the memory cells in the erased
state (E). Subsequently, some of the memory cells can be programmed
to a higher threshold voltage such as to represent the A, B or C
data states.
[0066] The x-axis indicates a threshold voltage and the y-axis
indicates a number of storage elements. In this example, there are
four data states (each represented by a threshold voltage
distribution): an initial erased state 400, a soft programmed
erased state (E) 402, an A state 404, a B state 406 and a C state
408. Memory devices with additional data states, e.g., eight or
sixteen data states, can also be used. The distribution 400 is
realized after the erase operation when storage elements are
typically over-erased, past the erase state 402. In the erase
operation, one or more erase pulses are applied to the NAND string
at its source and/or drain ends, until the threshold voltage of the
storage elements being erased transitions below an erase-verify
level, Vv-erase which can be 0 V or close to 0V, in one approach.
Once the erase operation is completed for a block, the soft
programming operation is performed, in which one or more positive
voltage pulses are applied to the control gates of the storage
elements, such as via a word line, to increase the threshold
voltages of some or all of the storage elements in the distribution
400 closer to and below a soft programming (SPGM) verify level,
Vv-spgm, to the erased state 402. For example, a certain, small
fraction of the storage elements may be soft programmed to have a
Vth above Vv-spgm, at which point the soft programing ends, leaving
most of the other storage elements with a Vth which is close to,
but below, Vv-spgm. Vv-spgm is typically above or equal to
Vv-erase. The soft programming operation advantageously results in
a narrow erase state distribution 402. Once the soft programming
operation is complete, programming to higher data states can occur,
such as to states A, B and C using verify levels VvA, VvB and VvC,
respectively. A subsequent read operation can use the levels
VreadA, VreadB and VreadC.
[0067] A set erase-verify condition can be met based on whether one
or more memory cells have a Vth below Vv-erase, e.g., as discussed
in connection with FIG. 5A.
[0068] FIG. 4B depicts a series 450 of erase pulses (Verase0 to
Verase7) and verify pulses (see, e.g., example erase-verify pulse
472) in an erase operation. The erase pulses and verify pulses are
presented together for understanding although they are applied to
different portions of the memory device. An erase operation can
include multiple erase-verify iterations, e.g., EV0 to EV7. Each
erase-verify iteration can include an erase portion followed by a
verify portion. Examples erase portions 452, 454, 456, 458, 460,
462, 464 and 466 are provided for erase-verify iterations EV0, EV1,
EV2, EV3, EV4, EV5, EV6 to EV7. Example verify portion 472 having
an amplitude of Vv-erase follows erase portion 452. In the erase
portion, an erase pulse or voltage is applied to one or both ends
of a NAND string. Each erase portion can have a first portion which
is applied in a preparation phase, and a second portion which is
applied in charge up and erase phases, as discussed further below.
For example, erase portion 452 has a first portion 468 and a second
portion 470. In this example, the first portion of each erase
portion has an amplitude of Vsg (an initial lower level), and the
second portions of the erase portions have amplitudes (subsequent
peak levels) of Verase0, Verase1, Verase2, Verase3, Verase4,
Verase5, Verase6 and Verase7, which increase according to a step
size of Verase-step.
[0069] The erase pulses can thus step up in amplitude in each
iteration, in one approach. In the verify portion, a determination
is made as to whether the Vth of a selected memory cell which is to
be erased has fallen below Vv-erase. This can include determining
whether the selected memory cell is in a conductive state when a
word line voltage of Vv-erase is applied to the selected memory
cell. If the selected memory cell is in a conductive state,
Vth<Vv-erase and the selected memory cell has been erased. If
the selected memory cell is in a non-conductive state,
Vth>Vv-erase and the selected memory cell has not yet been
erased.
[0070] FIG. 5A depicts one embodiment of an erase operation for a
block of memory cells. An erase operation begins at step 500. Step
502 identifies selected memory cells to be erased in a block. For
example, an entire block can be erased, or memory cells associated
with one or more word line layers can be selected to be erased.
All, or fewer than all, memory cells in a word line layer or layer
portion can be selected to be erased. The identifying steps can be
performed by control circuitry, and can involve a determination of
one or more selected blocks, memory cells, NAND strings and/or sets
of NAND strings. One or more unselected blocks, memory cells, NAND
strings and/or sets of NAND strings can similarly be identified by
the control circuitry. An erase operation can be initiated by
control circuitry of the memory device independently of an external
host controller, or in response to an external host controller, for
instance. A NAND string which contains a selected memory cell is a
selected NAND string.
[0071] Step 504 initializes the value of Verase. Step 508 begins an
erase portion of an erase-verify iteration. At step 510, the erase
portion includes performing a two-sided erase of all selected NAND
strings in a block, in one approach. For example, these can be NAND
strings in SetA0 to SetAn in FIG. 1C, or in SetB0 to SetBn in FIG.
1D. See FIG. 5B and 6A to 6E for further details. Generally, an
erase operation can involve an entire block, or one or more
sub-blocks. Step 512 begins the verify portion of the erase-verify
iteration. At step 514, the verify portion identifies any (one or
more) of the selected NAND strings which pass an erase-verify test.
A selected NAND string passes the erase-verify test when sensing
circuitry determines that the string is conductive, when Vv-erase
is applied to the control gates of the selected memory cells of the
string. A selected NAND string which passes the erase-verify test
is now considered to be an unselected or inhibited NAND string.
[0072] Decision step 516 determines if the block meets a block
erase-verify condition. In one approach, the block erase-verify
condition is met when no more than an integer number or fraction N
of the selected NAND strings have not passed the erase-verify test.
For example, with 192k selected NAND strings in a block, it is
possible to end the erase operation before all NAND strings have
passed the erase-verify test. For instance, N can be about 1-10% of
the number of NAND strings in a block (e.g., 1-10% of 192k). The
higher N is set, the sooner the erase operation can be completed,
so that the highest amplitude value of Verase which is used is
reduced, compared to the case where N=0. Even though some NAND
strings have not passed the erase-verify test when the erase
operation ends, the associated selected memory cells are likely
very close to passing the test, and can be successfully
soft-programmed.
[0073] If decision step 516 is true, the erase operation ends at
step 520. If decision step 516 is false, decision step 518
determines whether at least one set of NAND strings reaches a set
erase-verify condition. The set erase-verify condition may be met
when at least one selected NAND string in the set has passed the
erase-verify test, for instance. In another approach, the set
erase-verify condition may be met when at least an integer number
or fraction M1 of the selected NAND strings in the set have passed
the erase-verify test, or when no more than an integer number or
fraction M2 of the selected NAND strings in the set have not passed
the erase-verify test. If decision step 518 is false, Verase is
stepped up at step 506 for the next erase-verify iteration, which
is again a two-sided erase. If decision step 518 is true, Verase is
stepped up at step 522 for the next erase-verify iteration, which
is the first one-sided erase. Decision step 518 may not be true
until after several erase-verify iterations have been performed.
Step 524 begins the erase portion of the next erase-verify
iteration. Step 526 performs a one-sided erase of the remaining
selected NAND strings. The step also includes inhibiting the at
least one set of unselected NAND strings. See FIG. 5C and 6A to 6E
for further details. Step 512 begins the verify portion of the
erase-verify iteration. The remainder of the erase operation will
use a one-sided erase.
[0074] In this case, a two-sided erase is performed initially until
one (or more) sets reach the set erase-verify condition, after
which only one-sided erases occur. This allows each set of NAND
strings to be inhibited to avoid over-erase once the set meets the
set erase-verify condition, while allowing erasing to continue for
the remaining sets which have not yet met the set erase-verify
condition. As the erase-verify iterations occur, the sets will be
become inhibited in turn until the erase operation is
completed.
[0075] FIG. 5B depicts details of step 510 (two-sided erase) of
FIG. 5A. Step 506 provides the erase portion in a two-sided erase
of all sets of NAND strings in a block. An erase operation can
include three phases, discussed further in connection with FIGS. 6A
to 6E: a preparation phase (step 530), a charge up phase (step 532)
and an erase phase (step 534). The preparation phase (PP)
corresponds to the time interval t0-t3 in FIGS. 6A to 6E. At step
530, the preparation phase sets voltages as follows: Vbl (selected
sets of NAND strings): raise from Vss to Vsg (waveform 600); Vsl
(common to all NAND strings in a block): raise from Vss to Vsg
(waveform 600); Vsgs (selected sub-block): raise from Vss to Vsg
(waveform 606); Vsgs (unselected sub-block): float (waveform 604);
Vsgd (selected sub-block): raise from Vss to Vsg (waveform 606);
Vsgd (unselected sub-block): float (waveform 604); Selected word
lines: float (waveform 614); and unselected word lines: float
(waveform 616). If all NAND strings in the block are selected to be
erased, there will be no inhibited NAND strings during the
two-sided erase.
[0076] A selected sub-block is a sub-block with one or more
selected NAND strings, and an unselected sub-block is a sub-block
with all unselected NAND strings.
[0077] A long-dash line represents a floating voltage in FIGS.
6A-6C and 6E, while a solid or short-dash line represents a driven
voltage.
[0078] The charge up phase (CUP) corresponds to the time interval
t3-t6 in FIGS. 6A to 6E. At step 532, the charge up phase sets
voltages as follows: Vbl (selected sets of NAND strings): raise to
Verase (waveform 600); Vsl: raise to Verase (waveform 600); Vsgs
(selected sub-block): Vsg (waveform 606); Vsgs (unselected
sub-block): float (waveform 604); Vsgd (selected sub-block): Vsg
(waveform 606); Vsgd (unselected sub-block): float (waveform 604);
Selected word lines: float (waveform 614); and unselected word
lines: float (waveform 616).
[0079] The erase phase (EP) corresponds to the time interval t6-t9
in FIGS. 6A to 6E. At step 534, the erase phase sets voltages as
follows: Vbl (selected sets of NAND strings): Verase (waveform
600); Vsl: Verase (waveform 600); Vsgs (selected sub-block): Vsg
(waveform 606); Vsgs (unselected sub-block): float (waveform 604);
Vsgd (selected sub-block): Vsg (waveform 606); Vsgd (unselected
sub-block): float (waveform 604); Selected word lines: drive down
to 0 V (waveform 614); and unselected word lines: float (waveform
616).
[0080] Vsgs is the source-side select gate voltage and Vsgd is the
drain-side select gate voltage.
[0081] For example, Vsg can be about 5-15 V and Verase can be about
15-25 V. In the preparation phase, if Vsl is roughly equal to Vsgs,
essentially no GIDL will be generated from the SGS transistor. Vsl
would need to exceed Vsgs by a substantial margin such as several
Volts, e.g., at least about 4-6 V, in order to generate GIDL from
the SGS transistor. Similarly, since Vbl roughly equals Vsgd,
essentially no GIDL will be generated from the SGD transistor. Vbl
would need to exceed Vsgd by a substantial margin to generate GIDL
from the SGD transistor.
[0082] Specifically, GIDL current at a select gate is determined by
the bias difference (Vdg=Vd-Vg), between the drain voltage (Vd) and
the gate voltage (Vg) of the select gate. The GIDL current density
can be modeled by: J=A*Es*exp(-B/Es), where Es is the transverse
electric field at the surface, and Es=(Vdg+C)/Tox. Thus,
J=A'*(Vdg+C)* exp(-B'/(Vdg+C)), where A', B' and C are constants
determined by some physical parameters. Normally, Vdg>>Vth of
the select gate to obtain a considerable GIDL current. In one
configuration, Vdg>4-6 V or 4-8 V is needed for erase pulse
width of about 1 msec. When Vdg is small, GIDL is negligible and is
not able to charge-up the inhibited channel to cause erase.
[0083] Vbody (waveform 608 in FIG. 6C) denotes a potential of the
body of the selected NAND string, e.g., the polysilicon body. The
body is quickly charged up to an initial level in the preparation
phase. A higher level of GIDL is generated in the charge up phase,
and the body is charged-up to a higher level. For an unselected
NAND string, Vbody is not charged up as much and may be between
about 0 V and the initial level for the selected NAND strings. It
is difficult to describe the body potential of the entire body
using a single value due to the floating of the word lines. The
body can be thought of as an electron pool, such that when Vsg+1 V
is applied on both the bit line and source line, and Vsg is applied
to SGS and SGD select gates, electrons start to flow to the bit
line and source line so that the body potential increases. However,
the electrons are quickly exhausted as there is no more electron
supply in the body, so that the body potential will not increase
further. This is different from the body of the selected NAND
strings in the charge-up stage, where GIDL-generated holes flood
into the channel and raise the whole body potential.
[0084] Vth (waveform 612 in FIG. 6D) is the threshold voltage of a
selected memory cell. It is at some non-zero level, e.g., above 0
V, perhaps 1-6 V, in the A, B or C state. Vwl-selected (waveform
614 in FIG. 6E) is the voltage of a selected word line (e.g., word
line layer or portion) which is in communication with one or more
selected memory cells to be erased. Vwl-unselected (waveform 616 in
FIG. 6E) is the voltage of an unselected word line (e.g., word line
layer or portion) which is in communication with one or more
unselected memory cells, to be inhibited from being erased.
[0085] In the charge up phase, for the two-sided erase, Vsl and Vbl
are stepped up to Verase from t3-t8 (waveform 600). As a result,
Vdg (the drain-to-gate voltage of the SGD or SGS select gates) is
increased high enough so that GIDL is generated at the SGS and SGD
select gates, charging up the body (Vbody). Verase is considered to
be an erase voltage--it is sufficiently higher than Vsg to cause a
significant amount of GIDL to charge up the body by a desired
amount in a desired amount of time. In practice, as mentioned,
Verase can exceed Vsg by at least about 4-6 V and perhaps about
10-15 V. Verase can range from about 15-25 V, as mentioned.
[0086] Vbody can be of a similar magnitude as Verase, perhaps 0-2 V
lower. The rise in Vbody is coupled to the floating word lines so
that Vwl-selected and Vwl-unselected rise up with Vbody.
Vwl-selected and Vwl-unselected can be of a similar magnitude as
Vbody, perhaps slightly lower.
[0087] In the erase phase, Vwl-selected is driven to a low level
such as 0 V at t6-t7 to add holes into the charge trapping layer,
lowering the Vth of the selected memory cells, as indicated by
waveform 612. Vwl-unselected continues to float so that holes are
not added to the charge trapping layer for unselected memory
cells.
[0088] FIG. 5C depicts details of step 526 (one-sided erase) of
FIG. 5A. At step 540, the preparation phase sets voltages as
follows: Vbl (selected sets of NAND strings): raise from Vss to Vsg
(waveform 600); Vbl (inhibited sets of NAND strings): Vsg+.DELTA.
(waveform 602); Vsl (common to all NAND strings): Vsg+.DELTA.
(waveform 602); Vsgs (selected sub-block): Vsg (waveform 606); Vsgs
(unselected sub-block): float (waveform 604); Vsgd (selected
sub-block): raise from Vss to Vsg (waveform 606); Vsgd (unselected
sub-block): float (waveform 604); selected word lines: float
(waveform 614); and unselected word lines: float (waveform
616).
[0089] At step 542, the charge up phase sets voltages as follows:
Vbl (selected sets of NAND strings): raise to Verase (waveform
600); Vbl (inhibited sets of NAND strings): Vsg+.DELTA. (waveform
602); Vsl: Vsg+.DELTA. (waveform 602); Vsgs (selected sub-block):
Vsg (waveform 606); Vsgs (unselected sub-block): float (waveform
604); Vsgd (selected sub-block): Vsg (waveform 606); Vsgd
(unselected sub-block): float (waveform 604); selected word lines:
float (waveform 614); and unselected word lines: float (waveform
616).
[0090] At step 544, the erase phase sets voltages as follows: Vbl
(selected sets of NAND strings): Verase (waveform 600); Vbl
(inhibited sets of NAND strings): Vsg+.DELTA. (waveform 602); Vsl:
Vsg+.DELTA. (waveform 602); Vsgs (selected sub-block): Vsg
(waveform 606); Vsgs (unselected sub-block): float (waveform 604);
Vsgd (selected sub-block): Vsg (waveform 606); Vsgd (unselected
sub-block): float (waveform 604); selected word lines: drive down
to 0 V (waveform 614); and unselected word lines: float (waveform
616).
[0091] During the one-sided erase, Vsl=Vsg+.DELTA., as indicated by
waveform 602. Also, Vbl=Vsg+.DELTA. (waveform 602) for the
inhibited sets of NAND strings. Vbl=Vsg+.DELTA. or some other low
voltage is considered to be an erase-inhibit voltage--it is not
sufficiently higher than Vsg to cause a significant amount of GIDL
to charge up the body. By applying Vsg+.DELTA., where .DELTA.
(delta) is about 0-2 V, for both inhibited bit lines and source
lines, various advantages are achieved. First, essentially no GIDL
will be generated at both the inhibited bit line and source line
sides on a NAND string. A better select gate cutoff is achieved.
Second, for the inhibited NAND strings, Vsg+.DELTA. is sufficiently
high so that both SGD and SGS are cut off, so that leakage is
minimized. Third, Vsg+.DELTA. is sufficiently low to avoid causing
any erase in the inhibited NAND strings. Other approaches are
possible but may be less advantageous. For example, floating the
source line and the SGS select gate while applying a lower voltage
such as 0 V to an inhibited bit line can result in a direct leakage
path from a selected bit line to the inhibited bit line.
[0092] Since the GIDL is generated only at the drain end of the
selected NAND strings in the one-sided erase, Vbody may charge up
slightly slower compared to when GIDL is generated at both the
drain and source ends of the selected NAND strings, but this does
not significantly impair the erase operation.
[0093] FIGS. 6A to 6E have a common time axis but the time
increments are not necessarily equally spaced and the figures are
not necessarily to scale.
[0094] FIGS. 7A-7C depict voltages in the verify portion of an
erase-verify iteration of an erase operation. During the verify
portion, the selected sets of NAND strings are sensed using sensing
circuitry to determine whether the threshold voltages of the
selected memory cells have passed the erase-verify test. During the
sensing, Vbl is set to a sense voltage, Vsense (waveform 700 in
FIG. 7A). Vsgs and Vsgd (waveform 702 in FIG. 7B) are set to a
level such as Vsg which renders them conductive. Vsgs and Vsgd can
be set to the same or different levels. Vwl-unselected (waveform
704 in FIG. 7C) is set to a sufficiently high level, e.g., 8 V, to
render the unselected memory cells in a conductive state.
Vwl-selected (waveform 706 in FIG. 7C) is set to Vv-erase. Sensing
circuitry connected to a NAND string senses whether the NAND string
is in a conductive state, which indicates the selected memory cells
of the NAND string have been erased and therefore pass the
erase-verify test.
[0095] In one approach, the verify portion involves performing the
erase-verify test for the selected NAND strings in one sub-block at
a time. For example, in FIG. 2A, the NAND strings in sub-block 201
can be verified. Typically, each NAND string is verified separately
from other NAND strings and the verifying occurs concurrently for
the different NAND strings in a sub-block. Next, the NAND strings
in sub-block 202 are verified. The NAND strings in each sub-block
are verified until the NAND strings in sub-block 206 have been
verified, at which time the block has been verified and the very
portion of the erase-verify iteration has ended.
[0096] FIGS. 7A to 7C have a common time axis (different than the
time axis of FIGS. 6A to 6E) but the time increments are not
necessarily equally spaced and the figures are not necessarily to
scale.
[0097] FIG. 8A depicts a top view of word line layers of a 3D
non-volatile memory device having straight NAND strings, consistent
with FIG. 1D, showing associated drivers. In this configuration, a
NAND string has only one column, and the source-side select gate is
on the bottom of the column instead of on the top, as in a U-shaped
NAND string. Moreover, a given level of a block has one word line
layer which is connected to each of the memory cells of the layer.
For example, BLK0B has word line layer WL0B, driven by WL0B-DR, and
BLK1B has word line layer WL1B, driven by WLB1-DR. A number of
slits, such as example slit 802, can also be used. These
insulation-filled slits are used in the fabrication process to
provide structural support for the stack when undoped polysilicon
layers are removed by a wet etch and a dielectric is deposited to
form the alternating dielectric layers.
[0098] A dashed line 800 extends through columns C0 to C6, shown in
cross-section in FIG. 8F. Each block can include sub-blocks of
columns of memory cells, such as sub-blocks 804 to 809 in BLK0B and
sub-blocks 810 to 815 in BLK1B.
[0099] FIG. 8B depicts a top view of a select gate layer of the 3D
non-volatile memory device of FIG. 8A, showing drain-side select
gate lines and associated drivers. For example, this can represent
layer SGD of FIG. 8F. A separate drain-side select gate line, e.g.,
a conductive line or path, may be associated with each row of
columns of memory cells. For example, BLK0B includes select gate
lines 820 to 825, which are driven by select gate drivers SGD0-DR
to SGD5-DR, respectively. BLK1B includes select gate lines 826 to
831, which are driven by select gate drivers SGD6-DR to SGD11-DR,
respectively. The select gate drivers provide signals such as
voltage waveforms to the select gate lines.
[0100] FIG. 8C depicts a top view of a select gate layer of the 3D
non-volatile memory device of FIG. 8A, showing source-side select
gate lines and associated drivers. For example, this can represent
layer SGS of FIG. 8F. A separate source-side select gate line,
e.g., a conductive line or path, is associated with each row of
columns of memory cells. For example, BLK0B includes select gate
lines 840 to 846, which are driven by select gate drivers SGS0B0-DR
to SGS05B-DR, respectively. BLK1B includes select gate lines 846 to
851, which are driven by select gate drivers SGS1B0-DR to
SGS1B5-DR, respectively. The select gate drivers provide signals
such as voltage waveforms to the select gate lines.
[0101] FIG. 8D depicts a top view of a source line layer of the 3D
non-volatile memory device of FIG. 8A, showing source lines and
associated drivers. For example, this can represent layer SL of
FIG. 8F. A source line, e.g., a conductive line or path, is
associated with a set of columns of memory cells which extend in a
horizontal line in the figure. A source line extends across
multiple blocks which are adjacent laterally of one another. A
source line is connected to a source-side end of a NAND string,
e.g., to a vertical channel or body of the NAND string. For
example, source lines 861 to 875 are driven by source line driver
SL-DR. The source line driver provides a signal such as a voltage
waveform to the source-side ends of the NAND strings.
[0102] FIG. 8E depicts a top view of a bit line layer of the 3D
non-volatile memory device of FIG. 8A, showing bit lines and
associated drivers for BLK0B and BLK1B. For example, this can
represent layer BL of FIG. 8F. A bit line, e.g., a conductive line
or path, is associated with a set of columns of memory cells which
extend in a horizontal line in the figure. A bit line extends
across multiple blocks which are adjacent laterally of one another.
A bit line is connected to a drain-side end of a NAND string, e.g.,
to a vertical channel or body of the NAND string. For example, bit
lines 881 to 895 are driven by bit line drivers BL0-DR to BL14-DR,
respectively. The bit line drivers provide signals such as voltage
waveforms to the drain-side ends of the NAND strings.
[0103] FIG. 8F depicts a cross-sectional view of a block of the 3D
non-volatile memory device of FIG. 8A, along line 800 of setB0 of
NAND strings FIG. 8A. Columns of memory cells corresponding to NAND
strings NSB0 to NSB5, respectively, are depicted in the multi-layer
stack. The stack 877 includes a substrate 101, an insulating film
109 on the substrate, and a portion of a source line 863. Recall
that the additional straight NAND strings in a sub-block extend in
front of and in back of the NAND strings depicted in the
cross-section, e.g., along the x-axis. The NAND strings NSB0 to
NSB5 are each in a different sub-block, but are in a common set of
NAND strings (SetB0). NSB0 has a source end 803 and a drain end
801. The slit 802 from FIG. 8A is also depicted with other slits. A
portion of the bit line BLB0 is also depicted. Dashed lines depict
memory cells and select gates, as discussed further below.
[0104] FIG. 9 depicts an arrangement of memory cells in an example
set of NAND strings such as SetB0 in FIG. 8F. NAND strings NSB0 to
NSB5 are depicted. A similar notation as used above is provided. In
this erase process, all of the memory cells of WL3 (namely MC3,0 to
MC3,5) are selected to be erased. The memory cells of WL0-WL2, WL4
and WL4 are unselected.
[0105] Accordingly, it can be seen that, in one embodiment, a 3D
stacked non-volatile memory device includes: (1) a substrate; (2) a
stacked non-volatile memory cell array carried by the substrate,
and comprising a plurality of sets of memory strings, and each
memory string comprises a plurality of memory cells between a drain
end of the memory string and a source end of the memory string; (3)
a plurality of bit lines, where, for each set of memory strings, a
respective bit line of the plurality of bit lines is connected to
the drain end of each memory string in the set of memory strings;
(4) at least one source line connected to the source end of at
least one memory string in each of the sets of memory strings; and
(5) at least one control circuit in communication with the stacked
non-volatile memory cell array, the plurality of bit lines and the
plurality of source lines, the at least one control circuit: (a) to
perform one erase-verify iteration in an erase operation for the
plurality of sets of memory strings: applies an erase voltage to
each bit line of the plurality of bit lines, then determines
whether at least one of the sets of memory strings reaches a set
erase-verify condition, the at least one of the sets of memory
strings is connected to at least one of the bit lines, and (b) to
perform a next erase-verify iteration in the erase operation: (i)
if the at least one of the sets of memory strings reaches the set
erase-verify condition, applies an erase voltage to remaining bit
lines of the plurality of bit lines, other than the at least one of
the bit lines, and applies an erase-inhibit voltage to the at least
one of the bit lines, and (ii) if the at least one of the sets of
memory strings does not reach the set erase-verify condition,
applies an erase voltage to each bit line of the plurality of bit
lines.
[0106] In another embodiment, a method for performing an erase
operation in a 3D stacked non-volatile memory device comprises: (1)
performing at least one erase-verify iteration of the erase
operation for a stacked non-volatile memory cell array, the stacked
non-volatile memory cell array comprising a plurality of sets of
memory strings, and each memory string comprises a plurality of
memory cells between a drain end of the memory string and a source
end of the memory string, the drain ends of the memory strings of
each set of memory strings are connected to a respective bit line
of a plurality of bit lines, and the source ends of the memory
strings are connected to at least one source line, each
erase-verify iteration of the at least one erase-verify operation
charges up a body of each of the memory strings from at least the
drain ends; (2) determining whether at least one of the sets of
memory strings connected to at least one of the bit lines reaches a
set erase-verify condition; and (3) performing a next erase-verify
iteration of the erase operation, (a) if the at least one of the
sets of memory strings reaches the set erase-verify condition, the
next erase-verify iteration of the erase operation charges up a
body of each memory string connected to remaining bit lines of the
plurality of bit lines other than the at least one of the bit
lines, from the drain ends of each memory string connected to the
remaining bit lines, and does not charge up a body of each memory
string connected to the at least one of the bit lines, and (b) if
the at least one of the sets of memory strings does not reach the
set erase-verify condition, the next erase-verify iteration of the
erase operation charges up the body of each of the memory strings
from at least the drain ends.
[0107] In another embodiment, a 3D stacked non-volatile memory
device includes: (1) a substrate; (2) a stacked non-volatile memory
cell array carried by the substrate, and comprising a plurality of
sets of memory strings, each memory string comprises a plurality of
memory cells between a drain end of the memory string and a source
end of the memory string, a drain-side select gate at the drain end
of the memory string and a source-side select gate at the source
end of the memory string; (3) a plurality of bit lines, where, for
each set of memory strings, a respective bit line of the plurality
of bit lines is connected to the drain end of each memory string in
the set of memory strings; (4) at least one source line connected
to the source end of at least one memory string in each of the sets
of memory strings; and (5) at least one control circuit in
communication with the stacked non-volatile memory cell array, the
plurality of bit lines and the plurality of source lines, the at
least one control circuit: (a) to perform one erase-verify
iteration in an erase operation for the plurality of sets of memory
strings: applies an erase voltage to each bit line of the plurality
of bit lines, applies an erase voltage to the at least one source
line, then determines whether at least one of the sets of memory
strings reaches a set erase-verify condition, the at least one of
the sets of memory strings is connected to at least one of the bit
lines, and (b) to perform a next erase-verify iteration in the
erase operation: (i) if the at least one of the sets of memory
strings reaches the set erase-verify condition, applies an erase
voltage to remaining bit lines of the plurality of bit lines, other
than the at least one of the bit lines, applies a bit line
erase-inhibit voltage to the at least one of the bit lines and
applies a source line erase-inhibit voltage to the at least one
source line, and (ii) if the at least one of the sets of memory
strings does not reach the set erase-verify condition, applies an
erase voltage to each bit line of the plurality of bit lines.
[0108] The foregoing detailed description of the invention has been
presented for purposes of illustration and description. It is not
intended to be exhaustive or to limit the invention to the precise
form disclosed. Many modifications and variations are possible in
light of the above teaching. The described embodiments were chosen
in order to best explain the principles of the invention and its
practical application, to thereby enable others skilled in the art
to best utilize the invention in various embodiments and with
various modifications as are suited to the particular use
contemplated. It is intended that the scope of the invention be
defined by the claims appended hereto.
* * * * *