U.S. patent application number 13/389285 was filed with the patent office on 2012-05-31 for charged particle beam device and image display method.
This patent application is currently assigned to HITACHI HIGH-TECHNOLOGIES CORPORATION. Invention is credited to Tatsuya Hirato, Shigeru Kawamata, Hiroyuki Komuro.
Application Number | 20120132803 13/389285 |
Document ID | / |
Family ID | 43586111 |
Filed Date | 2012-05-31 |
United States Patent
Application |
20120132803 |
Kind Code |
A1 |
Hirato; Tatsuya ; et
al. |
May 31, 2012 |
CHARGED PARTICLE BEAM DEVICE AND IMAGE DISPLAY METHOD
Abstract
According to the present invention, in a charged particle beam
device having a charged particle source, an objective lens for
focusing a primary-charged particle beam emitted from the charged
particle source, a scan deflector for scanning the primary-charged
particle beam on a sample, and a detector for detecting signal
particles generated from the sample under scanning of the
primary-charged particle beam, whereby a sample image is obtained
by using the signal particles of the detector, the charged particle
beam device comprises a deflector for deflecting an angle of
irradiation of the primary-charged particle beam onto the sample,
first and second independent power supplies for passing currents to
the deflector, and a switch for switching over voltages applied
from the two power supplies in unit of one line or one frame of
scanning of the primary-charged particle beam.
Inventors: |
Hirato; Tatsuya;
(Hitachinaka, JP) ; Komuro; Hiroyuki;
(Hitachinaka, JP) ; Kawamata; Shigeru;
(Hitachinaka, JP) |
Assignee: |
HITACHI HIGH-TECHNOLOGIES
CORPORATION
Tokyo
JP
|
Family ID: |
43586111 |
Appl. No.: |
13/389285 |
Filed: |
July 20, 2010 |
PCT Filed: |
July 20, 2010 |
PCT NO: |
PCT/JP2010/062173 |
371 Date: |
February 7, 2012 |
Current U.S.
Class: |
250/310 |
Current CPC
Class: |
H01J 37/28 20130101;
H01J 37/153 20130101; G02B 30/23 20200101; H01J 2237/2611 20130101;
G02B 30/27 20200101; A61B 6/022 20130101; H01J 37/1478
20130101 |
Class at
Publication: |
250/310 |
International
Class: |
H01J 29/70 20060101
H01J029/70 |
Foreign Application Data
Date |
Code |
Application Number |
Aug 10, 2009 |
JP |
2009-185396 |
Claims
1. A charged particle beam device having a charged particle source;
an objective lens which focuses a primary-charged particle beam
emitted from said charged particle source; a scan deflector which
scans said primary-charged particle beam on a sample; and a
detector which detects signal particles generated from the sample
under scanning of said primary-charged particle beam, whereby a
sample image is obtained by using the signal particles of said
detector, comprising: a deflector which deflects an angle of
irradiation of said primary-charged particle beam onto the sample;
independent first and second power supplies which pass currents to
said deflector; and a switch which switches over said two power
supplies in unit of one line or one frame of scanning of said
primary-charged particle beam.
2. A charged particle beam device according to claim 1, wherein by
using a first sample image captured through the use of signal
particles when said first power supply is applied and a second
sample image captured through the use of signal particles when said
second power supply is applied, a stereoscopic image of said sample
as viewed from obliquely above can be observed.
3. A charged particle beam device according to claim 1, wherein a
table for prescribing current values passed to said deflector in
accordance with tilting directions of said primary-electron beam is
memorized.
4. A charged particle beam device according to claim 1, wherein a
stigmator adapted to correct the primary-charged particle beam for
astigmatism, is provided on the side of deflector opposing said
charged particle source.
5. A charged particle beam device according to claim 1 further
comprising a condenser lens on the side of deflector opposing said
charged particle source, wherein an off-axis aberration generated
in said objective lens is cancelled out by means of said condenser
lens.
6. A charged particle beam device having a charged particle source;
an objective lens which focuses a primary-charged particle beam
emitted from said charged particle source; a scan deflector which
scans said primary-charged particle beam on a sample; and a
detector which detects signal particles generated from the sample
under scanning of said primary-charged particle beam, whereby a
sample image is obtained by using the signal particles of said
detector, comprising: a deflector which deflects an angle of
irradiation of said primary-charged particle beam onto the sample;
and a display unit which displays a first image and a second image
under application of two different voltages to said deflector so as
to acquire the first image and the second image, wherein locations,
on said display unit, of the first image and the second image which
are displayed on said display unit are switched over.
7. A charged particle beam device according to claim 6, wherein the
locations of the first and second images are switched over in
accordance with a cross method, a stereoscopic method or an
anaglyph method.
8. A charged particle beam device according to claim 6, wherein a
stereoscopic image is formed on a stereoscopic display unit by
using said first and second images.
Description
TECHNICAL FIELD
[0001] The present invention relates to a charged particle beam
device and an image display method thereby and more particularly,
to a method for structuring a three-dimensional image in a charged
particle beam device provided with a stereo pair image observing
function.
BACKGROUND ART
[0002] When capturing a three-dimensional image, the charged
particle beam device typified by a scanning electron microscope
displayed two images alternately by using two sheets of images for
left eye and for right eye which are captured in directions at
different angles (cited literature 1) or conducted a stereoscopic
observation through a cross method, a parallel method or an
anaglyph method using a pair of red and blue spectacles.
[0003] Also, in recent years, a scheme of obtaining a tilt image of
a sample by tilting a charged particle beam in relation to the
sample (patent literature 2) and a stereoscopic liquid crystal
display for use in a three-dimensional image display method as well
have been developed and therefore, techniques applicable to
stereoscopic observation have been developed in the respective
technical fields.
CITATION LIST
Patent Literature
[0004] Patent Literature 1: JP-U-55-48610
[0005] Patent Literature 2: JP-A-2-33843
SUMMARY OF INVENTION
Technical Problem
[0006] In the aforementioned conventional techniques laid open to
public, a stereoscopic image is structured from parallax images
making right/left uniform angles to the optical axis center (for
example,).+-.3.degree. in only one axis direction (for example, X
direction) and consequently, a stereoscopic image as viewing a
sample from directly above can only be obtained.
[0007] Conceivably, a stereoscopic image as viewing from another
direction (for example, from obliquely above) can be obtained by
tilting or rotating a sample stage but a problem of time to set a
sample stage mechanically or a drift of observation position will
become apprehensive, making the operation complicated.
[0008] In addition, different stereoscopic observation methods have
features as below, respectively, and which one of the observation
methods is superior cannot generally be determined.
[0009] The cross method and parallel method do not require
dedicated tools and permit stereoscopic view to be effected with
naked eyes but these methods are unsuited for ordinary operation,
raising necessity for training and not a small numbers of operators
are ill fitted for these methods.
[0010] Further, the anaglyph method permits stereoscopic
observation without making a request for training but constantly
requires a pair of red and blue spectacles, having problems of
unsuitability to ordinary operation and of a degradation in
brightness attributable to a color filter.
[0011] Furthermore, the stereoscopic liquid crystal display does
not require training and can permit stereoscopic observation to be
effected with naked eyes, thus hardly hindering the ordinary
operation but it needs an installation space and is expensive.
[0012] As described above, the individual observation methods have
advantages/disadvantages and different operators are skilful at or
ill fitted to them, demonstrating that if a stereoscopic
observation method can be selected freely, facilitation of the
usage can be improved.
[0013] An object of the present invention is to provide capture
means for acquiring right and left parallax images from not only
directly above but also obliquely above. Besides, parallax image
display means and an operation screen which are able to switch over
stereoscopic observation methods are provided.
SOLUTION TO PROBLEM
[0014] According to the present invention, a charged particle beam
device having a charged particle source, an objective lens for
focusing a primary-charged particle beam emitted from the charged
particle source, a scan deflector for scanning the primary-charged
particle beam on a sample, and a detector for detecting signal
particles generated from the sample under scanning of the
primary-charged particle beam, whereby a sample image is obtained
by using the signal particles detected by the detector, comprises a
deflector for deflecting an angle of irradiation of the
primary-charged particle beam on the sample, first and second
independent power supplies for passing currents to the deflector,
and a switch for switching over the two power supplies in unit of
one line or one frame of scanning of the primary-charged particle
beam.
[0015] Also, according to the present invention, a charged particle
beam device having a charged particle source, an objective lens for
focusing a primary-charged particle beam emitted from the charged
particle source, a scan deflector for scanning the primary-charged
particle beam on a sample and a detector for detecting signal
particles generated from the sample under scanning of the
primary-charged particle beam, whereby a sample image is obtained
by using the signal particles detected by the detector, comprises a
deflector for deflecting an angle of irradiation of the
primary-charged particle beam on the sample, the deflector being
applied with two different voltages to obtain a first image and a
second image, and a display unit for displaying the first image and
the second image, wherein locations on the display unit at which
the first image and the second image are displayed on the display
unit are switched over.
ADVANTAGEOUS EFFECTS OF INVENTION
[0016] With the above construction, a charged particle beam device
can be provided which can obtain a stereoscopic image viewing from
not only directly above but also obliquely above. Besides, parallax
image display means and an observation screen which are able to
switch over stereoscopic observation methods can be provided and
the user can select the observation direction, parallax angle and
stereoscopic observation method through mouse operation alone.
[0017] Other objects, features and advantages of the present
invention will become apparent from the following description of
embodiments of the invention taken in conjunction with the
accompanying drawings.
BRIEF DESCRIPTION OF DRAWINGS
[0018] FIG. 1 is a diagram schematically illustrating a scanning
electron microscope representing an example of the present
invention.
[0019] FIG. 2 shows means which tilts symmetrically without tilting
the beam center.
[0020] FIG. 3 shows means which captures parallax images
independently by tilting the beam center.
[0021] FIG. 4A is a diagram for explaining beam tilting (x
direction).
[0022] FIG. 4B is a diagram for explaining beam tilting (y
direction).
[0023] FIG. 4C is a diagram for explaining beam tilting (tilt angle
.phi., rotation angle .theta., parallax angle .omega.).
[0024] FIG. 5 shows an example of a control table.
[0025] FIG. 6 shows an example of arrangement of an operation
screen of a charged particle beam device exemplifying the present
invention.
[0026] FIG. 7 is a diagram of an example to which the present
invention is applied wherein aberrations liable to be generated on
a sample by off-axis beams incident on an objective lens are
cancelled out totally by an optical system of a plurality of stages
of lenses.
DESCRIPTION OF EMBODIMENTS
[0027] Embodiments of the present invention will be described
hereunder by making reference to drawings.
[0028] FIG. 1 is a diagram schematically illustrating a scanning
electron microscope representing an example of the present
invention.
[0029] Across a cathode 1 and an anode 2 constituting an electron
gun 1' representing a charged particle beam source, a voltage is
applied from a high voltage control power supply 18 which is
controlled by a computer 28 representing a control unit, a
primary-electron beam 3 representing a primary-charged particle
beam is extracted from the cathode 1 and is then accelerated
through an anode for acceleration (not shown) so as to be led to a
lens system of the succeeding stage.
[0030] The primary-electron beam 3 is converged by means of a first
condenser lens 4 controlled by a first condenser lens control power
supply 19, further converged by means of a second condenser lens 5
controlled by a second condenser lens control power supply 20,
removed of an unnecessary region of primary-electron beam 3 by
means of an aperture plate 6 and thereafter, led to a beam tilt
angle control coil 10 controlled by a primary-beam tilt angle
control power supply 24. The beam tilt angle control coil 10 is
constituted by an upper deflection coil 10a and a lower deflection
coil 10b. Disposed above the beam tilt angle control coil 10 is a
stigmator coil 8 having the function to be described later. To add,
the stigmator coil 8 is subjected to current control with the help
of a stigmator power supply 23.
[0031] The aforementioned beam tilt angle control coil 10 is
disposed above an objective lens 12 controlled by means of an
objective lens control power supply 26 and besides, around the beam
tilt angle control coil 10, a scanning coil 11 of upper and lower
two stages (11a, 11b) is arranged which is adapted to scan the
primary-electron beam 3 on a sample 14 mounted on a sample holder
(not shown). The scanning coil 11 is controlled by means of a
scanning coil control power supply 25. The sample holder mounting
the sample 14 can be moved in directions on XY plane or in Z
direction by means of a sample stage 15, thereby ensuring that a
primary-electron beam scanning area, that is, a field of view on
the sample can be moved. Movement of the sample stage 15 is
controlled by a stage control unit 44.
[0032] Horizontal direction deflection current and vertical
direction deflection current for the primary-electron beam 3 can be
controlled through the scanning coil 11 by means of the scanning
coil control power supply 25 and the primary-electron beam 3 can
undergo two-dimensional scan control on the sample 14. Secondary
electrons generated from the sample 14 under irradiation of the
primary-electron beam 3 are separated from the primary-electrons by
means of an orthogonal electromagnetic field generator for
secondary electron separation (not shown) and detected with the
help of a secondary electron detector 16. Signals detected by the
secondary electron detector 16 are amplified with a signal
amplifier 17 and then inputted to the computer 28 by way of a
signal input unit 27.
[0033] Backscattering electrons of primary-electron beam 3 from the
sample surface are also detected with a backscattered electron
detector 13, amplified with another signal amplifier 17 and
subsequently, inputted to the computer 28 by way of the signal
input unit 27. The backscattered electrons are also image-processed
to a backscattered electron image by means of the computer 28 and
can be displayed through a display unit 29.
[0034] It is to be noted that a reference sign 31 designates an
input unit in which image take-in conditions (such as switchover
operation between two-dimensional observation mode and
three-dimensional observation mode, scanning speed, accelerating
voltage and so on) are set.
[0035] In the present embodiment, the computer (control unit) 28
controls currents of beam tilt angle control coil 10 and scanning
coil 11 by way of the primary-beam tilt angle control power supply
24 and scanning coil control power supply 25, so that in executing
three-dimensional observation on real time base, the direction of
sample observation can be changed without resort to additionally
conducting mechanical operation of the sample stage 15 in
association with the beam tilt angle control coil 10.
[0036] A three-dimensional observation on real time base will be
described below.
[0037] By controlling the primary-charged particle beam (for
example, such a charged particle beam as an electron beam or ion
beam) 3 such that two scanning operations of left tilting scan and
right tilting scan corresponding to a parallax angle are carried
out on the same line of scanning on the sample by switching over
left and right parallax images in unit of one line or in unit of
one frame, these images are obtained on real time base and stored
in an image memory 30. In other words, the computer 28 synthesizes
a left tilting beam scanning image on the basis of secondary
electron detection signals obtained through scans in odd orders,
namely, through left tilting primary-electron beam scans and also
synthesizes a right tilting beam scanning image on the basis of
secondary electron detection signals obtained through scans in even
orders, namely, through right tilting primary-electron beam scans.
Then, these left and right parallax images are three-dimensionally
processed and three-dimensional observation on real time base is
executed.
[0038] Referring to FIG. 2, means which tilts the beam
symmetrically to the center axis is illustrated. A reference sign
37 designates a tilting beam trajectory for left eye (left tilting)
and a reference sign 38 designates a tilting beam trajectory for
right eye (right tilting).
[0039] In order to obtain left and right parallax images, a signal
from the primary-beam tilt angle control power supply 24 is
amplified with a tilting signal amplifier 33 and an amplified
signal is switched over by means of a tilt direction transfer
switch 34 in unit of one line or in unit of one frame. In this
case, an inversion input element 32, for example, is provided for a
right tilting side so that a left tilt signal may be inverted and
inputted to a right tilt side so as to pass a plus-minus current to
the beam tilt angle control coil 10, with the result that the beam
can be tilted symmetrically to the center axis. In other words,
when tilting the beam right and left, a current of 1A, for example,
is passed to the beam tilt angle control coil 10 at the time of
left tilting and then, at the time of right tilting, the current
value is inverted and a current of -1A is passed. With this
construction, the beam is centered on the center axis and a
stereoscopic image as viewing the sample from directly above can be
formed.
[0040] A further description will be given of a method for forming
a three-dimensional image when the sample is viewed from obliquely
above.
[0041] As shown in FIG. 3, a second beam tilt angle control power
supply 36 is newly arranged to provide control based on independent
two systems by using tilt signal amplifiers 33 so as to permit left
and right tilts to have independent control values. With this
construction, the plus-minus current is not passed to the beam tilt
angle control coil 10 but both of plus currents or both of minus
currents are passed, thus making it possible to form a stereoscopic
image when the sample is viewed from obliquely above. It will be
appreciated that while both the first beam tilt angle control power
supply 24 and the second beam tilt angle power supply 36 are
provided, this is not limitative and the formation method can also
be materialized with a single control power supply by performing
switchover between values by means of a DAC.
[0042] Turning to FIG. 4A to 4C, the beam tilting pursuant to the
aforementioned scheme is diagrammatically outlined. Designated by
.theta., .phi.and .omega. and co are rotation angle, tilt angle and
parallax angle, respectively. Further, T designates an orbit of
observation direction when the observation angle is .phi.. The
primary beam trajectory center axis corresponds to the conventional
center axis. With a value of .phi. designated, a concentric circle
centered on the conventional center axis is drawn virtually and by
designating a value of .theta., a beam tilt direction is
determined. Furthermore, by designating a parallax angle, a tilt
beam trajectory 37 for left eye and a tilt beam trajectory 38 for
right eye are introduced and by passing currents corresponding to
the parallax angles to the beam tilt angle control coil 10, the
sample 14 can be observed stereoscopically in a direction of
observation the user desires.
[0043] FIG. 4A is a diagram illustrating that the primary beam is
tilted through a tilt angle of .phi. in x direction. In this phase,
it is assumed that the amount of current to be passed through an x
coil of bream tilt angle control coil 10 is Ix. FIG. 4B is a
diagram illustrating that the primary beam is tilted through a tilt
angle of .phi. in y direction. In this phase, it is assumed that
the amount of current to be passed through a y coil of bream tilt
angle control coil 10 is Iy.
[0044] FIG. 4C illustrates an instance where the tilt angle is
.phi., the rotation angle is .theta. and the parallax angle is
.omega.. In this case, the current value to be passed during right
tilting to the x coil is determined by Ix.(sin (.phi.+.omega.)/sin
(.phi.).cos.theta. and that to the y coil is determined by Iy.(sin
(.phi.+.omega.)/sin (.phi.).sin.theta.. The current value to be
passed during left tilting to the x coil is determined by Ix.(sin
(.phi.-.omega.)/sin (.phi.)).cos.theta. and that to the y coil is
determined by Iy.(sin (.phi.-.omega.)/sin (.phi.).sin.theta..
[0045] Then, by using a control table as shown in FIG. 5 determined
from trigonometric functions in x direction and y direction and
experiments, the user can engage in easy operation. When the user
designates a rotation angle .theta., a tilt angle .phi. and a
parallax angle .omega., the computer 28 operates to supply current
values stored in the control table to the beam tilt angle control
coil. If a meeting rotation angle, for example, is not present in
the control table, the computer 28 calculates the meeting value
through, for example, interpolation.
[0046] As a method for changing the observation direction without
resort to the aforementioned improvement, a method of
tilting/rotating the sample stage 15 is conceivable accompanied by
disadvantages of a prolonged time to set a desired position and of
a drift of observation position. But, the aforementioned
improvement may be considered to be used in combination with the
tilting/rotation of the sample stage to attain an advantage (for
example, alleviation of resolution degradation attributable to beam
tilting) and the combined use can broaden the application range of
the device.
[0047] (Problem upon Off-axis Deflection and Position of Stigmator
Coil)
[0048] In order to obtain a desired parallax angle on the sample,
the beam is caused to be incident on a position distant from the
main axis of objective lens to make use of a beam swing back
function the lens has, as disclosed in the aforementioned patent
literature publicly known. However, when passing through the
off-axis region of stigmator coil 8, the beam undergoes the
deflection action to affect the beam tilt angle. Further, when a
beam being off from the objective lens main axis is incident, the
resolution is degraded owing to a spherical aberration essential of
the objective lens and also to a blur attributable to an aberration
considered as deriving from a chromatic aberration.
[0049] An expedient considered to be useful when stereoscopic
observation is conducted with the construction as above will be
described. An example of arrangement of the stigmator coil 8 in the
present invention shown in FIG. 1 will be explained.
[0050] The stigmator coil 8 is arranged at a position where its
correction function is effective and it does not affect the tilt
angle. Mores specifically, since it needs to be arranged at a
position where the shape of beam can be formed easily and also the
deflection function hardly occurs, it is arranged at a position
above the beam tilt angle control coil 10 where the beam is not yet
off axis. With this arrangement, the correction for astigmatism is
effective and besides, the deflection function hardly occurs to
hardly affect the tilt angle.
[0051] In addition, the beam can be scanned without being subject
to the parallax angle beam tilting to switch the charged particle
beam device to ordinary operation and then, the stigmator coil 8
can be used.
[0052] Next, a parallax image display program and an operation
screen which are able to permit the stereoscopic observation method
to be switched over will be described.
[0053] FIG. 6 illustrates an operation screen in the charged
particle beam device exemplifying the present invention. A parallax
angle designating spot 39 and an observation direction designating
spot 40 are located and when individual spots are designated and
corresponding values are called out of the control table as shown
in FIG. 5 to control current to be passed to the beam tilt angle
control coil 10, the user can designate a parallax angle and an
observation direction easily.
[0054] Designation of observation direction is not limited to be
done on the operation screen only but hardware such as, for
example, joystick can substitute therefor. Putting the stereoscopic
observation aside, the beam can be tilted by using an operation
panel as shown in FIG. 6 even during ordinary observation so that a
two-dimensional sample tilting image can be captured
instantaneously without tilting the sample stage 15, finding an
application even during ordinary observation.
[0055] For watching a stereoscopic image of a sample, a
stereoscopic liquid crystal display is available.
[0056] Recently, the stereoscopic liquid crystal display using a
dedicated glass has been changing to that of a scheme achieving
stereoscopic view with naked eyes. Generally, the use of the
dedicated glass can be acceptable when three-dimensional
observation is effected constantly in the field of game operation
and media appreciation but in the charged particle beam device, an
operation other than the three-dimensional observation such as
device adjustment and setting of observation conditions and the
three-dimensional observation operation as well need to be repeated
frequently and therefore, wearing/un-wearing of the dedicated glass
is troublesome and spectroscopic view with naked eyes is
desired.
[0057] The naked-eye stereoscopic liquid crystal display can be
classified principally to two types according to its scheme. In one
type, a slit-shaped liquid crystal shutter called a parallax
barrier is disposed in a liquid crystal panel and coincidentally
with the parallax barrier, pieces of image data corresponding to
left and right eyes are arranged pixel by pixel and in the other
type, a semicircular beam division lens (lenticular) having
directivity is disposed in front of the liquid crystal panel and
coincidentally with the lens, pieces of image data corresponding to
left and right eyes are arranged pixel by pixel. To conduct
stereoscopic view with the stereoscopic liquid crystal display,
pieces of left and right view pixel data are inputted
coincidentally with the pixel arrangement of display. In this
scheme, since image data corresponding to left/right parallax can
be detected alternately in unit of one line of scanning line, the
left/right parallax pixel data pieces are recorded in a line memory
of two lines and their arrangement is converted so as to be
outputted in compliance with a display rate of the display, so that
stereoscopic view on real time base can be conducted.
[0058] The example of stereoscopic observation using the
stereoscopic liquid crystal display has been described so far but a
method for enabling the stereoscopic view to be conducted more
easily will be described hereinafter. Images corresponding to left
and right parallax are arrayed laterally and on the basis of cross
eye or long sight called cross method or parallel method, the left
and right images are viewed with the corresponding eyes so as to be
overlapped, thus enabling stereoscopic view to be conducted. In
this case, pieces of image data corresponding to left and right
parallax inputted in unit of one line of scanning line are simply
arrayed two-dimensionally right and left. Another method is called
anaglyph using a pair of red and blue spectacles, according to
which left and right view images are colored with corresponding
glass color and overlapped on a general display so as to be
displayed.
[0059] Incidentally, the individual stereoscopic observation
methods have their own features as below and which one of the
observation methods is suitable mostly depends on an observer.
[0060] The stereoscopic liquid crystal display does not require
training, thus hardly hindering the ordinary operation and can
permit stereoscopic observation to be effected with naked eyes but
it needs an installation space and is expensive.
[0061] The cross method and parallel method do not require
dedicated tools and permit stereoscopic view to be effected with
naked eyes but because of cross eye and distant sight, these
methods are unsuited for ordinary operation, raising necessity for
training and not a small numbers of operators are ill fitted for
either method.
[0062] Further, the anaglyph method permits stereoscopic
observation without making a request for training but constantly
requires a pair of red and blue spectacles for stereoscopic
observation, having apprehension of unsuitability to ordinary
operation because of wearing/un-wearing of glass and degradation in
brightness attributable to a color filter.
[0063] Then, in addition to the aforementioned observation
direction designation spot 40 and parallax angle designation spot
39, a stereoscopic observation method selection spot 43 for
selection of the stereoscopic liquid crystal display/cross
method/parallel method and anaglyph method is arranged on the
operation screen of FIG. 6. This may be substituted by hardware
such as, for example, a switch. Specifically, by arranging, on the
operation screen in the charged particle beam device, a first
display area 41 capable of displaying a plane image of one of the
left and right parallax image data pieces and a second display area
42 capable of displaying the other data piece in order that the
left and right parallax images can be displayed on the same screen,
permitting an image for right eye and an image for left eye to be
displayed, for example, on the first display area 41 and the second
display area 42, respectively, and by locating the first display
area 41 on the left side and the second display area 42 on the
right side, stereoscopic observations can be executed on real time
base through the cross method.
[0064] The aforementioned stereoscopic observation method selection
spot 43 arranged on the operation screen is switched over by means
of a button, for instance. In FIG. 6, the cross method is selected
as an example.
[0065] It is now possible that by depressing a switchover button
for parallel method, the control DAC value of tilting current is
inverted internally, by physically inverting timing for switching
tilt angle switchover, the current passed to the coil adapted to
tilt the charged particle beam is inverted or by inverting timing
for left and right scanning, an image for left eye is displayed on
the first display area 41 and an image for right eye is displayed
on the second display area 42, thus completing switchover to the
parallel method in an instant.
[0066] Also, by depressing a switchover button of anaglyph to color
left and right parallax images with corresponding glass colors,
respectively, so as to give an overlap display, a stereoscopic
observation pursuant to anaglyph can be conducted.
[0067] Further, by depressing a switchover button of stereoscopic
liquid crystal display to input left/right parallax pixel data in
coincidence with pixel arrangement of stereoscopic liquid crystal
display (parallax barrier scheme, beam division (lenticular) scheme
and so on), a stereoscopic observation by mean of the stereoscopic
liquid crystal display can be executed.
[0068] In this manner, the user can designate a self-suited
stereoscopic observation method with ease.
[0069] In the present invention, as shown in FIG. 7, a third
condenser lens (aberration correction lens) 9 controlled by means
of a third condenser lens control power supply 22 is further
provided below the first condenser lens 4 and second condenser lens
5 (not illustrated in FIG. 7) and besides, a first aberration
control power supply 21 and a second aberration control power
supply 35 are provided for an electromagnetic coil 7 for forming
parallax angles which is arranged above the third condenser lens 9.
By performing independent control of two systems as in the case of
the previously-described beam tilt angle control coil 10 and by
interlocking the control to the beam tilt angle control coil 10,
off-axis aberration of the objective lens and aberration of the
third condenser lens (aberration correction lens) 9 can be
cancelled out with each other under the condition of execution of
the present invention, thereby ensuring that an aberration blur
attributable to off-axis can be cancelled out.
[0070] Further, when the aberration blur is expected to be small as
in the case of the tilt angle being shallow, the beam is tilted by
using only the beam tilt angle control coil 10 without resort to
the parallax angle forming electromagnetic coil 7. The blur can be
considered to be removed to some extents by using only the
stigmator coil 8 without resort to canceling out of aberration and
therefore, either aberration cancel-out or astigmatism correction
is used purposely separately or both of them are used in accordance
with the situations, improving easiness of usage. At that time, the
stigmator coil 8 is arranged above the parallax angle forming
electromagnetic coil 7.
[0071] While the foregoing description has been given of the
embodiments, the present invention is not limited thereto and it
will be obvious to those skilled in the art that various changes or
alternations and modifications can be made without departing from
the sprits of the present invention and within the scope of the
appended claims.
REFERENCE SIGNS LIST
[0072] 1 Cathode
[0073] 1' Electron gun
[0074] 2 Anode
[0075] 3 Primary-electron beam
[0076] 4 First condenser lens
[0077] 5 Second condenser lens
[0078] 6 Aperture plate
[0079] 7 Parallax angle forming electromagnetic coil
[0080] 8 Stigmator coil
[0081] 9 Third condenser lens (aberration correction lens)
[0082] 10 Beam tilt angle control coil
[0083] 11 Scanning coil
[0084] 12 Objective lens
[0085] 13 Backscattering electron detector
[0086] 14 Sample
[0087] 15 Sample stage
[0088] 16 Secondary electron detector
[0089] 17 Signal amplifier
[0090] 18 High voltage control power supply
[0091] 19 First condenser lens control power supply
[0092] 20 Second condenser lens control power supply
[0093] 21 First aberration control power supply
[0094] 22 Third condenser lens control power supply
[0095] 23 Stigmator power supply
[0096] 24 First beam tilt angle control power supply
[0097] 25 Scanning coil control power supply
[0098] 26 Objective lens control power supply
[0099] 27 Signal input unit
[0100] 28 Computer
[0101] 29 Display unit
[0102] 30 Image memory
[0103] 31 Input unit
[0104] 32 Inverted input element
[0105] 33 Tilt signal amplifier
[0106] 34 Tilt direction switchover switch
[0107] 35 Second aberration control power supply
[0108] 36 Second beam tilt angle control power supply
[0109] 37 Beam trajectory for left eye
[0110] 38 Beam trajectory for right eye
[0111] 39 Parallax angle designation spot
[0112] 40 Observation direction designation spot
[0113] 41 First display area
[0114] 42 Second display area
[0115] 43 Stereoscopic observation method selection spot
[0116] 44 Stage control unit
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