U.S. patent application number 13/324719 was filed with the patent office on 2012-04-05 for liquid ejecting head and liquid ejecting apparatus.
This patent application is currently assigned to SEIKO EPSON CORPORATION. Invention is credited to Kazutoshi GOTO, Toshiaki KORI, Yoshinao MIYATA, Satoshi NAKAJIMA, Tomoaki TAKAHASHI.
Application Number | 20120081476 13/324719 |
Document ID | / |
Family ID | 40938523 |
Filed Date | 2012-04-05 |
United States Patent
Application |
20120081476 |
Kind Code |
A1 |
MIYATA; Yoshinao ; et
al. |
April 5, 2012 |
LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS
Abstract
A liquid ejecting head which includes a flow passage forming
substrate that has pressure generating chambers which communicate
with nozzles capable of ejecting a liquid, pressure generating
elements which apply pressure to the pressure generating chambers
in order to eject the liquid from the nozzles, lead electrodes that
supply electric signals to the pressure generating elements, wiring
substrates that supply the electric signals to the lead electrodes,
and a supporting member that supports the wiring substrates so as
to raise the wiring substrates from a surface of the liquid
ejecting head having the lead electrodes provided thereon.
Inventors: |
MIYATA; Yoshinao;
(Matsukawa-machi, JP) ; GOTO; Kazutoshi;
(Matsumoto-shi, JP) ; NAKAJIMA; Satoshi;
(Okaya-shi, JP) ; KORI; Toshiaki; (Suwa-shi,
JP) ; TAKAHASHI; Tomoaki; (Matsumoto-shi,
JP) |
Assignee: |
SEIKO EPSON CORPORATION
Tokyo
JP
|
Family ID: |
40938523 |
Appl. No.: |
13/324719 |
Filed: |
December 13, 2011 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
12367364 |
Feb 6, 2009 |
8075106 |
|
|
13324719 |
|
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Current U.S.
Class: |
347/71 |
Current CPC
Class: |
B41J 2/055 20130101;
B41J 2002/14241 20130101; B41J 2002/14491 20130101; B41J 2002/14419
20130101; B41J 2/14233 20130101 |
Class at
Publication: |
347/71 |
International
Class: |
B41J 2/045 20060101
B41J002/045 |
Foreign Application Data
Date |
Code |
Application Number |
Feb 8, 2008 |
JP |
2008-029800 |
Sep 29, 2008 |
JP |
2008-251844 |
Claims
1. A liquid ejecting head comprising: a flow passage forming
substrate including pressure generating chambers which are capable
of communicating with nozzles for ejecting a liquid provided
therein; pressure generating elements capable of applying pressure
to eject the liquid in the pressure generating chambers; lead
electrodes capable of supplying electric signal to the pressure
generating element; wiring substrate capable of supplying the
electric signal to the lead electrode; and a supporting member that
supports the wiring substrate so as to raise the wiring substrate
from a surface of the liquid ejecting head having the lead
electrodes provided thereon, wherein a surface of the wiring
substrate and the surface of the liquid ejecting head meet at an
angle.
2. The liquid ejecting head according to claim 1, wherein the
wiring substrate is formed perpendicular to the surface of the
liquid ejecting head.
3. A liquid ejecting apparatus comprising the liquid ejecting head
according to claim 1.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This patent application is a continuation of prior U.S.
patent application Ser. No. 12/367,364 filed Feb. 6, 2009, which
patent application is incorporated herein by reference in its
entirety. Furthermore, the entire disclosures of Japanese Patent
Application Nos. 2008-029800, filed Feb. 8, 2008 and 2008-251844,
filed Sep. 29, 2008 are expressly incorporated herein by
reference.
BACKGROUND OF THE INVENTION
[0002] 1. Technical Field
[0003] The present invention relates to a liquid ejecting head and
a liquid ejecting apparatus. More particularly, the present
invention relates to an ink jet recording head capable of
discharging a liquid ink from a plurality of nozzles.
[0004] 2. Related Art
[0005] One example of a liquid ejecting head currently known in the
art is an ink jet recording head that discharges ink as a plurality
of ink droplets. Typically, an ink jet recording head includes a
flow passage forming substrate that has pressure generating
chambers which communicate with nozzles and a communicating portion
which communicates with the pressure generating chambers,
piezo-electric elements that are formed on one surface of the flow
passage forming substrate, and a protective substrate that is
bonded to one surface of the flow passage forming substrate which
includes piezo-electric element holding portions for holding the
piezo-electric elements. In addition, an IC, which is a driving
circuit for driving the piezo-electric elements, is provided on the
protective substrate. A driving circuit and the piezo-electric
elements are connected to each other by connection lines composed
of conductive wires through lead electrodes, which extend from one
electrode of the piezo-electric using a wire bonding method.
[0006] The protective substrate protects two rows of piezo-electric
elements which correspond to two rows of pressure generating
chambers, with a through hole formed at the center of the
protective substrate through which the connection lines pass. In
the ink jet recording head disclosed in Japanese Patent Application
No. JP-A-2004-148813, for example, the lead electrodes and the
conductive wires are connected to each other in the through
hole.
[0007] One problem with such configurations, however, is that the
wire bonding method used to connect the driving circuit and the
piezo-electric elements makes it difficult to reduce the size of
the ink jet recording head. In addition, since the driving circuit
is formed parallel to the protective substrate, the area of an
actuator including the piezo-electric elements is increased.
[0008] In addition, these problems arise in other liquid ejecting
heads which eject liquid materials other than ink.
BRIEF SUMMARY OF THE INVENTION
[0009] An advantage of some aspects of the invention is that
provides a liquid ejecting head and a liquid ejecting apparatus
having a compact size.
[0010] A first aspect of the invention comprises a liquid ejecting
head which includes a flow passage forming substrate including
pressure generating chambers which are capable of communicating
with nozzles for ejecting a liquid provided therein, pressure
generating elements capable of applying pressure to eject the
liquid in the pressure generating chambers, lead electrodes capable
of supplying electric signals to the pressure generating elements,
wiring substrates capable of supplying the electric signals to the
lead electrodes, and a supporting member that supports the wiring
substrates so as to raise the wiring substrates from a surface of
the liquid ejecting head having the lead electrodes provided
thereon.
[0011] A second aspect of the invention comprises a liquid ejecting
apparatus which includes the liquid ejecting head described
above.
[0012] A third aspect of the invention is a method of manufacturing
a liquid ejecting head with wiring substrates electrically
connected to lead electrodes in a liquid ejecting head member
including a flow passage forming substrate that has includes
pressure generating chambers communicating with nozzles capable of
ejecting a liquid provided therein, pressure generating elements
capable of applying pressure which causes the liquid to the
pressure generating chambers to be ejected from the nozzles, where
the lead electrodes supply electric signals to the pressure
generating elements. The method comprises fixing the wiring
substrates to a supporting member to support the wiring substrates,
aligning the lead electrodes of the liquid ejecting head member
with the wiring substrates, and pressing connecting portions
between the aligned lead electrodes and the wiring substrates so as
to electrically connect the lead electrodes and the wiring
substrates.
[0013] One advantage of the aspects of the invention is that the
lead electrodes of the piezo-electric elements are connected to the
wiring substrates, making it possible to easily reduce the size of
a liquid ejecting head as compared to the wire bonding method
currently used that performs bonding on each wiring line using a
bonding tool. In addition, since the wiring substrate is supported
by the supporting member, causing it to be raised from the surface
of the liquid ejecting head where the lead electrodes are provided,
it is possible to easily achieve a reduction in the size of a
liquid ejecting head.
BRIEF DESCRIPTION OF THE DRAWINGS
[0014] The invention will be described with reference to the
accompanying drawings, wherein like numbers reference like
elements.
[0015] FIG. 1 is an exploded perspective view illustrating a
recording head according to a first embodiment of the
invention;
[0016] FIG. 2A is a plan view illustrating the recording head
according to the first embodiment of the invention;
[0017] FIG. 2B is a cross-sectional view illustrating the recording
head according to the first embodiment of the invention;
[0018] FIG. 3 is an exploded perspective view illustrating a
recording head according to a second embodiment of the
invention;
[0019] FIG. 4A is a plan view illustrating the recording head
according to the second embodiment of the invention;
[0020] FIG. 4B is a cross-sectional view illustrating the recording
head according to the second embodiment of the invention; and
[0021] FIG. 5 is a perspective view illustrating a printer which
includes a recording head described herein.
DESCRIPTION OF EXEMPLARY EMBODIMENTS
[0022] Hereinafter, exemplary embodiments of the invention will be
described in detail with reference to the accompanying
drawings.
[0023] FIG. 1 is an exploded perspective view which illustrates the
structure of an ink jet recording head, which is an example of a
liquid ejecting head I capable of performing aspects of the
invention according to a first embodiment. FIG. 2A is a plan view
of FIG. 1, and FIG. 2B is a cross-sectional view taken along the
line IIB-IIB of FIG. 1.
[0024] As shown in FIGS. 1, 2A and 2B, the liquid ejecting head I
includes a flow passage forming substrate 10 comprising a (110)
silicon single crystal substrate, and an elastic film 50 made of a
silicon dioxide formed on one surface of the flow passage forming
substrate.
[0025] Two rows of pressure generating chambers 12 are provided in
the width direction of the flow passage forming substrate 10. In
addition, a communicating portion 13 is formed in the region
outside each row of pressure generating chambers 12 in the
longitudinal direction of the flow passage forming substrate 10.
The communicating portion 13 and each of the pressure generating
chambers 12 communicate with each other through an ink supply
passage 14 and a communicating passage 15 provided in each of the
pressure generating chambers 12. The communicating portion 13
communicates with a reservoir portion 31 of a protective substrate
30, which is described more fully below, in order to form a portion
of a reservoir 100 which serves as an ink chamber that is common to
the two rows of pressure generating chambers 12. The ink supply
passage 14 has a width that is smaller than that of the pressure
generating chamber 12, which keeps the flow resistance of ink
flowing from the communicating portion 13 into the pressure
generating chamber 12 constant. In this embodiment, the ink supply
passage 14 is formed by reducing the width of the flow passage by
extending one wall of the flow passage substrate 10 into the ink
supply passage 14. However, the ink supply passage may be formed by
extending both walls of the flow passage substrate 10 into the ink
supply passage 14. In addition, the ink supply passage may be
formed by reducing the thickness of the flow passage without
reducing the width thereof. Each of the communicating passages 15
is formed by extending both partition walls 11 of the pressure
generating chamber 12 to the communicating portion 13 in order to
partition a space between the ink supply passage 14 and the
communicating portion 13. That is, in the flow passage forming
substrate 10, the ink supply passage 14 has a cross section in the
width direction that is smaller than that of the pressure
generating chamber 12 and the communicating passage 15 that
communicates with the ink supply passage 14 has a cross section in
the width direction that is larger than that of the ink supply
passage 14. Both the ink supply passage 14 and the communicating
passage 15 partitioned by a plurality of partition walls 11.
[0026] A nozzle plate 20 having nozzles 21 formed therein is fixed
to an opened surface of the flow passage forming substrate 10 by,
for example, an adhesive or a thermal bonding film. Each nozzle
communicates with an end of the corresponding pressure generating
chamber 12 opposite to the ink supply passage 14. In this
embodiment, since two rows of pressure generating chambers 12 are
formed in the flow passage forming substrate 10, two rows of
nozzles 21 are provided in one ink jet recording head I. The nozzle
plate 20 is formed of, for example, glass ceramics, silicon single
crystal, or stainless steel.
[0027] As described above, the elastic film 50 is formed on a
surface of the flow passage forming substrate 10 opposite to the
surface where the nozzles 21 are formed. An insulating film 55 is
formed on the elastic film 50. In addition, a lower electrode film
60, a piezo-electric layer 70, and an upper electrode film 80 are
formed on the insulating film 55 using a process described more
fully below, in order to form a piezo-electric element 300. The
piezo-electric element 300 includes the lower electrode film 60,
the piezo-electric layer 70, and the upper electrode film 80. In
general, one electrode of the piezo-electric element 300 serves as
a common electrode, and the other electrode thereof and
piezo-electric layer 70 are formed in each pressure generating
chamber 12 by patterning. In this embodiment, a piezo-electric
active portion includes the patterned electrode and the
piezo-electric layer 70, such that when a voltage is applied
between two electrodes, voltage distortion occurs in the
piezo-electric active portion. In this embodiment, the lower
electrode film 60 is used as the common electrode of the
piezo-electric element 300, and the upper electrode film 80 is used
as an individual electrode of the piezo-electric element 300.
However, the electrode structure may be reversed according to a
driving circuit and wiring lines. Further, in this embodiment, the
piezo-electric element 300 and a diaphragm that is deformed by the
driving of the piezo-electric element 300 are referred to
collectively as an actuator. In this embodiment, the elastic film
50, the insulating film 55, and the lower electrode film 60 serve
as the diaphragm, but the invention is not limited thereto. For
example, the elastic film 50 and the insulating film 55 may not be
provided, and the diaphragm may be comprised of only the lower
electrode film 60. In addition, the piezo-electric element 300 may
also serve as the diaphragm.
[0028] The piezo-electric layer 70 is formed on the lower electrode
film 60 and is made of a piezo-electric material, which is an
electro-mechanical conversion material. The piezo-electric layer 70
is preferably formed of a crystal film having a perovskite
structure. For example, it is preferable that the piezo-electric
layer 70 be formed of a ferroelectric material, such as lead
zirconate titanate (PZT), or a mixture of PZT and a metal oxide,
such as a niobium oxide, a nickel oxide, or a magnesium oxide.
[0029] A lead electrode 90 made of, for example, gold (Au), is
connected to one end of each upper electrode film 80, which is an
individual electrode of the piezo-electric element 300. More
specifically, the lead electrode is connected to the end of each
upper electrode film 80 opposite to the ink supply passage 14, and
extends onto the insulating film 55. However, the upper electrode
film 80 may extend as the lead electrode 90.
[0030] A protective substrate 30 having a reservoir portion 31 that
forms at least a portion of the reservoir 100 is bonded to the
upper surface of the flow passage forming substrate 10 having the
piezo-electric elements 300 formed therein by an adhesive 35. In
this embodiment, the reservoir portion 31 is formed so as to pass
through the protective substrate 30 in the thickness direction and
extend in the width direction of the pressure generating chamber
12. In addition, the reservoir portion 31 communicates with the
communicating portion 13 of the flow passage forming substrate 10
to form the reservoir 100, which is an ink chamber common to the
pressure generating chambers 12. However, the communicating portion
13 of the flow passage forming substrate 10 is divided into a
plurality of portions corresponding to the pressure generating
chambers 12, and only the reservoir portion 31 serves as the
reservoir. In addition, for example, only the pressure generating
chambers 12 are formed in the flow passage forming substrate 10,
and the ink supply passage 14 that allows the reservoir to
communicate with the pressure generating chambers 12 may be formed
in a member interposed between the flow passage forming substrate
10 and the protective substrate 30, such as, for example, the
elastic film 50 or the insulating film 55.
[0031] Piezo-electric element holding portions 32 are provided in a
region of the protective substrate 30 opposite to the
piezo-electric element 300, each having a shape so that the
operation of the piezo-electric element 300 is not hindered. The
piezo-electric element holding portion 32 may or may not be
sealed.
[0032] The protective substrate 30 is preferably formed of a
material having a thermal expansion coefficient that is
substantially equal to that of the flow passage forming substrate
10, such as glass or a ceramic material. In this embodiment, a
silicon single crystal substrate that is made of the same material
as that forming the flow passage forming substrate 10 is used as
the protective substrate 30.
[0033] In addition, a through hole 33 passing through the
protective substrate 30 in the thickness direction is provided in
the protective substrate 30. Therefore, the ends of the lead
electrodes 90 extending from the piezo-electric elements 300 are
exposed through the through hole 33.
[0034] Driving circuits 120 that drive the piezo-electric elements
300 are mounted on COF substrates 410, which are wiring substrates.
The COF substrates 410 are provided substantially in the vertical
direction with the lower ends thereof connected to the lead
electrodes 90 and fixed to the side surfaces of a supporting member
400. In this embodiment, the supporting member 400 is a rectangular
parallelepiped having vertical side surfaces.
[0035] Specifically, in the ink jet recording head I according to
this embodiment, two rows of pressure generating chambers 12 are
provided in the flow passage forming substrate 10, and two rows of
piezo-electric elements 300 are provided in the width direction of
the pressure generating chamber 12. That is, two rows of the
pressure generating chambers 12, piezo-electric elements 300, and
the lead electrodes 90 are arranged opposite to each other in a
symmetrical configuration. In addition, two COF substrates 410 are
fixed to both side surfaces of the supporting member 400 having a
lower part inserted into the through hole 33, and each of the COF
substrates 410 is provided substantially in the vertical direction
with the lower end thereof connected to the lead electrodes 90. A
buffer member 420 that is preferably made of Teflon.RTM. is
provided on a lower surface of a SUS member of the supporting
member 400. The lower ends of the COF substrates 410 and the lead
electrodes 90 are electrically connected to each other by
conductive particles included in an anisotropic conductive layer,
such as an anisotropic conductive film or an anisotropic conductive
paste.
[0036] More specifically, after the anisotropic conductive layer is
formed on the lead electrodes 90, the positions of the lead
electrodes 90 and the COF substrates 410 fixed to the supporting
member 400 are adjusted so that the corresponding wiring lines are
opposite to each other, and the supporting member 400 is pressed
such that the lower surface of the supporting member presses the
COF substrates 410 against the lead electrodes 90. In this way,
predetermined electrical connection is made between the COF
substrates 410 and the lead electrodes 90 by conductive particles.
In this case, the buffer member 420 functions to apply a uniform
pressing force to the COF substrates 410. It is preferable that the
lower surface of the supporting member 400 and the lower ends of
the COF substrates 410 have a profile irregularity that is less
than five times the diameter of the conductive particle. In this
case, it is possible to apply a uniform pressing force to the
conductive particles using the buffer member 420 and the lower ends
of the COF substrates 410. As a result, it is possible to reliably
press the conductive particles to ensure good electrical
connection.
[0037] It is preferable that the supporting member 400 be formed of
a material having a thermal conductivity capable of reducing the
temperature of the driving circuit to be lower than a junction
temperature even when the ink jet recording head I is operating at
a maximum operation temperature at which the ink jet recording head
I is guaranteed to operate. In this case, a sufficient dissipation
effect is obtained even when the driving circuit is operated under
the most severe load conditions. As a result, it is possible to
stably operate the driving circuit for a long time. For this
reason, in this embodiment, the supporting member 400 is formed of
a SUS material. In this case, ink flowing through the flow passage
forming substrate 10 can absorb heat generated from the driving
circuits 120 through the supporting member 400. As a result, it is
possible to effectively dissipate heat generated from the driving
circuits 120. The above-mentioned effect and operation can be
obtained by sufficiently reducing the distance between the surface
of the flow passage forming substrate 10 and the driving circuit
120 or mounting the driving circuits 120 to the COF supporting
member 400, even when a metal material, such as SUS, is not used.
That is, it is preferable that the distance between the driving
circuit 120 and the surface of the flow passage forming substrate
10 be set to a value so that the ink is capable of dissipating heat
from the driving circuit 120 so that the temperature of the driving
circuit 120 is lower than its junction temperature even when the
liquid ejecting head I is used at the maximum operation
temperature, or the driving circuit be directly connected to the
supporting member 400.
[0038] A compliance substrate 40 including a sealing film 41 and a
fixing plate 42 is bonded to the protective substrate 30. The
sealing film 41 is formed of a material having low rigidity and
flexibility, such as, for example, polyphenylene sulfide (PPS), and
the sealing film 41 seals one surface of the reservoir portion 31.
The fixing plate 42 is formed of a hard material, such as metal,
for example, stainless steel (SUS). A region of the fixing plate 42
opposite to the reservoir 100 forms an opening portion 43 that is
formed in the thickness direction. Therefore, one surface of the
reservoir 100 is sealed by only the flexible sealing film 41.
[0039] In the ink jet recording head according to this embodiment,
ink is drawn from an ink inlet connected to an external ink supply
unit (not shown), causing a space from the reservoir 100 to the
nozzles 21 to fill with ink. Then, a voltage is applied between the
lower electrode film 60 and the upper electrode film 80
corresponding to each pressure generating chamber 12 according to
recording signals transmitted from the driving circuit 120. This
causes the elastic film 50, the insulating film 55, the lower
electrode film 60, and the piezo-electric layer 70 to deform. Then,
the internal pressure of each pressure generating chamber 12 is
increased, and ink droplets are discharged from the nozzles 21.
[0040] Further, according to this embodiment, the driving circuits
120 and the lead electrodes 90 of the piezo-electric elements 300
are connected to each other by the COF substrates 410 having the
driving circuits 120 mounted thereon. Therefore, it is possible to
more easily manufacture an ink jet recording head, as compared to
the wire bonding method currently used in the art. In addition,
since the COF substrate 410 is provided substantially in the
vertical direction with its lower end connected to the lead
electrodes 90, it is possible to easily achieve a reduction in the
size of an ink jet recording head. Further, since the driving
circuits 120 are fixed to the side surfaces of the supporting
member 400 with the COF substrates 410 interposed therebetween, it
is possible to effectively dissipate heat generated from the
driving circuits 120.
[0041] FIG. 3 is an exploded perspective view schematically
illustrating the structure of an ink jet recording head II, which
is an example of a liquid ejecting head according to a second
embodiment of the invention. FIG. 4A is a plan view of FIG. 3, and
FIG. 4B is a cross-sectional view taken along the line IVB-IVB of
FIG. 3.
[0042] As shown in FIGS. 3, 4A, and 4B, an ink jet recording head
II according to this embodiment is similar to the ink jet recording
head I of the first embodiment shown in FIGS. 1, 2A, and 2B except
that the supporting member 401 is modified. In this embodiment, the
same components as those shown in FIGS. 1, 2A, and 2B are denoted
by the same reference numerals, and a description thereof will be
omitted.
[0043] As shown in FIGS. 3, 4A, and 4B, the supporting member 401
according to this embodiment is formed by bonding the rear surfaces
of two supporting members 401a and 401b. When the two supporting
members 401a and 401b are used, for example, the COF substrates 410
having the driving circuits 120 mounted thereon are bonded to the
side surfaces of the supporting members 401a and 401b, and the
lower ends of the substrates are bent so as to come into contact
with the lower surfaces of the supporting members 401a and 401b. In
this state, the COF substrates 410 bonded to the supporting members
401a and 401b are individually aligned with the lead electrodes 90.
Then, the supporting members 401a and 401b are pushed against the
conductive particles, thereby ensuring electrical connection
between the lead electrodes 90 and the supporting members.
Thereafter, the rear surfaces of the two supporting members 401a
and 401b are bonded together to form one supporting member.
[0044] According to this embodiment, it is possible to individually
adjust the alignment between the COF substrates 410 and the lead
electrodes 90 at both sides of the supporting member 401.
Therefore, it is possible to easily perform a predetermined
alignment operation.
Other Embodiments
[0045] In the above-described embodiments, two rows of pressure
generating chambers 12 are provided in the flow passage forming
substrate 10, but the number of rows of pressure generating
chambers is not limited to this configuration and any number of
rows may be formed. For example, one or three or more rows of
pressure generating chambers may be provided. When a plurality of
rows of pressure generating chambers are provided, at least a set
of two rows of pressure generating chambers may be provided
opposite to each other.
[0046] Further, in the above-described embodiments, the supporting
members 400 and 401 are pressed against the conductive particles.
However, a member other than the supporting member may be used to
press the conductive particles, and the wiring substrates may be
fixed to supporting member after the pressing process.
[0047] Furthermore, in the above-described embodiments, the driving
circuits 120 are mounted to the supporting members 400 and 401.
However, in order to achieve high-density mounting without
performing connection using a wire bonding method, the wiring
substrates connected to the lead electrodes 90 may be supported by
the supporting member 400 and 401 so as to be raised from the
surface having the lead electrodes 90 provided thereon. In this
case, the supporting members 400 and 401 may be formed in any
shape, so long as they serve a supporting function. For example,
the supporting member may have a lattice shape or a raft shape.
However, when the supporting member is pushed to press the
conductive particles, it is preferable that the lower surface of
the supporting member be flat in order to apply a uniform pressing
force. Alternatively, the driving circuits 120 may be directly
mounted to the supporting members 400 and 401, and the wiring
substrates may be connected to the surfaces of the driving circuits
120. In this case, the lower parts of the wiring substrates are
bent to the sides opposite to the supporting members 400 and 401
and then connected to the lead electrodes 90.
[0048] The material forming the flow passage forming substrate 10
is not limited to that according to the above-described
embodiments.
[0049] In the above-described embodiments, the ink jet recording
head is given as an example of the liquid ejecting head. However,
the invention can be applied to all kinds of liquid ejecting heads.
For example, the invention may be applied to a liquid ejecting head
that ejects liquid other than ink. Other examples of the liquid
ejecting head include, for example, various kinds of recording
heads used for image recording apparatuses, such as printers, a
color material ejecting head used to manufacture, for example, a
color filter of a liquid crystal display, an electrode material
ejecting head used to form, for example, electrodes of an organic
EL display or a field emission display (FED), and a bioorganic
material ejecting head used to manufacture a biochip.
[0050] The ink jet recording head according to the above-described
embodiments forms a portion of a recording head unit that has an
ink flow passage communicating with, for example, an ink cartridge,
and is provided in an ink jet recording apparatus. FIG. 5 is a
diagram schematically illustrating an example of the ink jet
recording apparatus. As shown in FIG. 5, recording head units 1A
and 1B, each comprising a ink jet recording head I according to the
above-described embodiment, are provided such that cartridges 2A
and 2B forming an ink supply unit can be inserted into or removed
from the recording head units. Additionally, a carriage 3 having
the recording head units 1A and 1B mounted thereon is provided so
as to be movable in the axial direction of a carriage shaft 5
attached to a main body 4. The recording head units 1A and 1B
eject, for example, a black ink composition and a color ink
composition, respectively.
[0051] The driving force of a driving motor 6 is transmitted to the
carriage 3 through a plurality of gears (not shown) and a timing
belt 7 to move the carriage 3 having the recording head units 1A
and 1B mounted thereon along the carriage shaft 5. A platen 8 is
provided along the carriage shaft 5 in the main body 4, and a
recording sheet S, such as paper, which comprises a recording
medium, is fed by, for example, a sheet feed roller (not shown).
The sheet S is transported by the platen 8. The driving motor 6 or
the pressure generating units of the recording head units 1A and 1B
are controlled by a control unit (not shown) including, for
example, a CPU and a memory.
* * * * *