U.S. patent application number 13/016140 was filed with the patent office on 2011-05-26 for immersion photolithography system and method using inverted wafer-projection optics interface.
This patent application is currently assigned to ASML HOLDING N.V.. Invention is credited to Harry SEWELL.
Application Number | 20110122380 13/016140 |
Document ID | / |
Family ID | 33159952 |
Filed Date | 2011-05-26 |
United States Patent
Application |
20110122380 |
Kind Code |
A1 |
SEWELL; Harry |
May 26, 2011 |
IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD USING INVERTED
WAFER-PROJECTION OPTICS INTERFACE
Abstract
A liquid immersion photolithography system includes an exposure
system that exposes a substrate with electromagnetic radiation, and
also includes an optical system that images the electromagnetic
radiation on the substrate. A liquid is between the optical system
and the substrate. The projection optical system is positioned
below the substrate.
Inventors: |
SEWELL; Harry; (Ridgefield,
CT) |
Assignee: |
ASML HOLDING N.V.
Veldhoven
NL
|
Family ID: |
33159952 |
Appl. No.: |
13/016140 |
Filed: |
January 28, 2011 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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11187010 |
Jul 22, 2005 |
7898643 |
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13016140 |
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10831300 |
Apr 26, 2004 |
6980277 |
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11187010 |
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10607170 |
Jun 27, 2003 |
6809794 |
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10831300 |
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Current U.S.
Class: |
355/30 ;
355/77 |
Current CPC
Class: |
G03F 7/70233 20130101;
G03F 7/70341 20130101 |
Class at
Publication: |
355/30 ;
355/77 |
International
Class: |
G03B 27/52 20060101
G03B027/52 |
Claims
1.-13. (canceled)
14. A lithographic apparatus comprising: a housing with a top
surface, the housing having an opening to allow a radiation beam
from a projection optical system to be imaged on a
radiation-sensitive surface of substrate; and a liquid supply
system to provide liquid between the projection optical system and
the substrate, the liquid supply system configured to fill a region
between the housing and the projection optical system with liquid
from a liquid source, wherein the liquid is expelled from the
housing towards the substrate.
15. The lithographic apparatus of claim 14, further comprising a
catch basin to remove stray liquid during scanning of the substrate
in a horizontal axis.
16. The lithographic apparatus of claim 15, wherein the catch basin
is annular around the housing.
17. The lithographic apparatus of claim 14, wherein a surface of
the housing is configured to control a property of an interface of
the liquid between the housing and the substrate.
18. The lithographic apparatus of claim 17, wherein the property of
the interface is a shape of the interface.
19. The lithographic apparatus of claim 14, wherein the top surface
of the housing comprises a hydrophobic surface.
20. The lithographic apparatus of claim 14, wherein, in use, the
liquid forms a meniscus.
21. The lithographic apparatus of claim 20, wherein the meniscus
forms between the projection optical system and the substrate.
22. A method comprising: providing a liquid between a projection
optical system of a lithographic apparatus and a substrate, the
providing the liquid including filling a region between a housing
of the lithographic apparatus and the projection optical system
with liquid, wherein the liquid is expelled from the housing
towards the substrate; and projecting a patterned radiation beam
using the projection optical system an opening of the housing and
through the liquid onto a radiation-sensitive surface of the
substrate.
23. The method of claim 22, further comprising removing stray
liquid during scanning of the substrate in a horizontal axis using
a catch basin.
24. The method of claim 23, wherein the catch basin is annular
around the housing.
25. The method of claim 22, wherein a surface of the housing
controls a property of an interface of the liquid between the
housing and the substrate.
26. The method of claim 25, wherein the property of the interface
is a shape of the interface.
27. The method of claim 22, wherein a top surface of the housing
comprises a hydrophobic surface.
28. The method of claim 22, wherein the liquid forms a meniscus
between the projection optical system and the substrate.
29. A lithographic apparatus comprising: a housing with a top
surface, the housing having an opening to allow a radiation beam
from a projection optical system to be imaged on a
radiation-sensitive surface of substrate; a liquid supply system to
provide liquid between the projection optical system and the
substrate, the liquid supply system configured to fill a region
between the housing and the projection optical system with liquid
from a liquid source; and a catch basin to remove stray liquid
during scanning of the substrate in a horizontal axis.
30. The lithographic apparatus of claim 29, wherein the catch basin
is annular around the housing.
31. The lithographic apparatus of claim 29, wherein a surface of
the housing is configured to control the shape of an interface of
the liquid between the housing and the substrate.
32. The lithographic apparatus of claim 29, wherein a top surface
of the housing comprises a hydrophobic surface.
33. The lithographic apparatus of claim 29, wherein, in use, the
liquid forms a meniscus between the projection optical system and
the substrate.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a Continuation of application Ser. No.
10/831,300, filed Apr. 26, 2004, titled IMMERSION PHOTOLITHOGRAPHY.
SYSTEM AND METHOD USING INVERTED WAFER-PROJECTION OPTICS INTERFACE,
when is a Continuation of application Ser. No. 10/607,170, filed
Jun. 27, 2003, titled IMMERSION PHOTOLITHOGRAPHY SYSTEM AND METHOD
USING INVERTED WAFER-PROJECTION OPTICS INTERFACE, each of which is
incorporated by reference herein.
FIELD OF THE INVENTION
[0002] The present invention relates to liquid immersion
photolithography, and more particularly, to a method and system for
confining liquid flow in an immersion photolithographic system.
DESCRIPTION OF THE RELATED ART
[0003] Optical lithography, using lens systems and catadioptric
systems, is used extensively in the semiconductor manufacturing
industry for the printing of circuit patterns. To date, the gap
between a final lens element and a semiconductor wafer surface has
been filled with gas, usually air or nitrogen. This gaseous gap
works well particularly when the wafer is scanned under the optics
during exposure and there is relative movement between the wafer
and the lens system during the image transfer.
[0004] The practical limits of optical lithography assume that the
medium through which imaging is occurring is air. This practical
limit is defined by the equation
.LAMBDA. = .lamda. 4 n NA , ##EQU00001##
where 8 is the wavelength of incident light, NA is numerical
aperture of the projection optical system, and n is the index of
refraction of the medium (where 4 is used instead of 2 due to the
use of off axis illumination). The gas interface between the final
lens element and the wafer surface limits the maximum resolution of
the optical system to a numerical aperture of <1.0. If the gas
space between the final lens element and the wafer surface can be
filled with a refractive material, such as oil or water, then the
numerical aperture, and hence the resolution capability, of the
system can be significantly increased, corresponding to the index
of refraction n.
[0005] Thus, by introducing a liquid between a last lens element of
the projection optical system and a wafer being imaged, the
refractive index changes, thereby enabling enhanced resolution with
a lower effective wavelength of the light source. Immersion
lithography effectively lowers a 157 nm light source to a 115 nm
wavelength (for example, for n=1.365), enabling the printing of
critical layers with the same photolithographic tools that the
industry is accustomed to using today.
[0006] Similarly, immersion lithography can push 193 rim
lithography down to, for example, 145 nm (for n=1.33). 435 nm, 405
nm, 365 nm, 248 nm, 193 nm and 157 nm tools can all be used to
achieve effectively better resolution and "extend" the usable
wavelengths. Also, large amounts of CaF.sub.2, hard pellicles, a
nitrogen purge, etc.--can be avoided. Also, depth of focus can be
increased by the use of liquid immersion, which may be useful, for
example, for LCD panel manufacturing.
[0007] However, despite the promise of immersion photolithography,
a number of problems remain, which have so far precluded
commercialization of immersion photolithographic systems. One
problem of existing immersion photolithographic systems involves
the difficulties of confining the liquid that is used in an
interface between the projection optical system and the wafer being
exposed. In conventional systems, liquid is injected between the
projection optical system and the wafer. Fairly complex systems
have been proposed in order to maintain the confinement of the
liquid.
[0008] An additional problem exists where the scanning motion of
the wafer is such that the wafer is moved away from the exposure
area, resulting in a spilling of the liquid. Such spillage is also
a problem even when the wafer is present under the projection
optical system due to the inherent viscosity properties of the
liquid.
[0009] Accordingly, what is needed is a simple system and method
for confining the liquid between the projection optical system and
the wafer.
SUMMARY OF THE INVENTION
[0010] The present invention is directed to an immersion
photolithography system and method using an inverted
wafer-projection optics interface that substantially obviates one
or more of the problems and disadvantages of the related art.
[0011] There is provided a liquid immersion photolithography system
including an exposure system that exposes a substrate with
electromagnetic radiation, and also includes a projection optical
system that focuses the electromagnetic radiation on the substrate.
A liquid supply system provides a liquid between the projection
optical system and the substrate. The projection optical system is
positioned below the substrate.
[0012] In another aspect there is provided a liquid immersion
photolithography system that includes an exposure system that
exposes a substrate with electromagnetic radiation, and also
includes a projection optical system that focuses the
electromagnetic radiation on the substrate. A means for providing a
liquid is between the projection optical system and the substrate.
The projection optical system is positioned below the substrate. A
meniscus is formed between the projection optical system and the
wafer.
[0013] In another aspect there is provided a method of exposing a
substrate including positioning a projection optical system below
the substrate, projecting electromagnetic radiation onto the
substrate using a projection optical system, and delivering a
liquid between the projection, optical system and the
substrate.
[0014] Additional features and advantages of the invention will be
set forth in the description that follows. Yet further features and
advantages will be apparent to a person skilled in the art based on
the description set forth herein or may be learned by practice of
the invention. The advantages of the invention will be realized and
attained by the structure particularly pointed out in the written
description and claims hereof as well as the appended drawings.
[0015] It is to be understood that both the foregoing general
description and the following detailed description are exemplary
and explanatory and are intended to provide further explanation of
the invention as claimed.
BRIEF DESCRIPTION OF THE DRAWINGS/FIGS.
[0016] The accompanying drawings, which are included to provide a
further understanding of the exemplary embodiments of the invention
and are incorporated in and constitute a part of this
specification, illustrate embodiments of the invention and together
with the description serve to explain the principles of the
invention. In the drawings:
[0017] FIG. 1 shows a cross-sectional view of a liquid immersion
photolithography system according to one embodiment of the present
invention.
[0018] FIG. 2 shows an isometric view of the system of FIG. 1.
DETAILED DESCRIPTION OF THE INVENTION
[0019] Reference will now be made in detail to the embodiments of
the present invention, examples of which are illustrated in the
accompanying drawings.
[0020] The present invention allows a space between a final lens
element of a projection optical system and a wafer surface to be
filled with a liquid. It allows a significant increase in the
effective numerical aperture of the system. The volume of liquid is
contained and held in position using a combination of pressure
control on the liquid and gravity. The projection optical system
(exposure system) is inverted compared to conventional systems
currently in use. In other words, conventional systems expose
downward or to the side, while, the projection optical system of
the present invention exposes upwards. The wafer is exposed with
its resist-coated surface down, and the resist is in contact with a
liquid meniscus. During wafer scanning, the meniscus traverses the
resist-coated surface of the wafer.
[0021] The present invention allows the gap-filling liquid to be
held in place even while the edge of the wafer is passed over the
optics. The housing of the projection optical system, with the
liquid, can be scanned off the edge of the wafer and rescanned onto
the wafer while maintaining the liquid interface. Catch basins
around the housing catch and contain any liquid displaced. The
liquid meniscus is controlled by liquid pressure. This interface is
thus easily compatible with many types of liquid.
[0022] FIG. 1 illustrates embodiment photolithographic system
according to the FIG. 1, a projection optical system 100 is placed
below a wafer 101. The wafer 101 includes resist-coated wafer
surface 106. The projection optical system 100 includes a plurality
of lens elements 102A, 102B, etc. The lens elements 102A, 102B are
mounted within a housing 103. The top of the housing 103 includes
an opening 110 for projecting an image onto the wafer 101. The top
of the housing 103 is shown as horizontal in FIG. 1, although that
need not necessarily be the case.
[0023] The region between the top of the housing 103 and the lens
102A (designated 107 in FIG. 1) is pressure controlled, and is
sealed from the rest of the projection optics 100 by a liquid seal
104. The region 107 is filled with a liquid, normally under
pressure from a liquid source (not shown in FIG. 1) so as to
counterbalance the force of gravity. During exposure, the liquid
forms a meniscus 108, as shown in FIG. 1. Catch basins 105 are used
to remove any stray liquid, which may occur as the wafer 101 is
scanned along a horizontal axis. It will be appreciated that more
or fewer catch basins (compared to what is shown in FIG. 1) may be
used. The catch basins 105 may also be annular around the housing
103.
[0024] Note that in the present invention, gravity is allowed to do
the work of confining the liquid. The meniscus 108 is essentially
controlled by gravity, while the wafer 101 is scanned. Furthermore,
when the wafer 101 moves beyond the projection optics 100, the
liquid will not readily spill over the edge of the wafer 101,
unlike in conventional immersion photolithographic systems.
[0025] A liquid enclosing collar system (i.e., the catch basin 105)
is attached to the end of the lithographic systems lens. As noted
above, the projection optical system 100 exposes the image upwards
onto the underside of the 101 (i.e., wafer surface 106). The wafer
101 is resist coated, and the wafer surface 106 to be imaged is the
lower surface. The top of the housing 103 provides a liquid
interface between the final lens element 102A and the wafer surface
106 of the wafer 101 on which the projection optical system 100 is
focused. The opening 110 in the top of the housing 103 allows the
light beam from the projection optics 100 to be imaged on the wafer
surface 106. It also allows intimate contact between the liquid and
the wafer surface 106. It is important to ensure that the enclosed
region 107 remains full of liquid, despite the top of the housing
103 being open to the wafer surface 106 and despite the wafer 101
potentially moving in an unrestricted manner above the projection
optical system 100. The liquid is held in place by control of the
pressure exerted on the liquid through a recirculation system
(i.e., a liquid supply system, not shown in the figures). The
pressure is controlled to balance gravity and maintain the meniscus
108 across the opening 110 when the wafer 101 is not present. When
the wafer 101 is slid over the projection optical system 100, the
pressure is increased to allow the liquid to "push out" of the
aperture and contact the wafer surface 106. When the liquid
interface slides over the edge of the wafer 101 due to the motion
of the wafer 101 relative to the projection optics 100, the
pressure on the liquid is adjusted to "pull back" the liquid from
the wafer surface 106 into the region 107.
[0026] The top of the housing 103 near the aperture 110, shown in
FIG. 1, may be specially contoured and surface finished to control
the shape and properties of the interface liquid. For example, the
surface of the top of the housing 103 may be made hydrophobic. The
catch basins 105 surrounding the top of the housing 103 restrain
the liquid that overflows or leaks from the top of the housing 103.
This liquid can be filtered, temperature controlled and recycled
back into the region 107.
[0027] Conditioning of the wafer surface 106 and the top of the
housing 103 can further improve the performance. In the case of the
liquid being water, the surfaces can be made hydrophobic. The gap
(distance) between the wafer surface 106 and the top of the housing
103 is optimized by the dynamics of wafer exposure. While the
system is designed for dynamic exposure of wafers in a scanning
system, it also can be used in a step-and-scan type exposure
system.
[0028] In typical dry exposure systems, the gap between the lens
102A and the wafer 101 is on the order of 3-4 millimeters. In the
present invention, the dimension of the gap between the housing 103
and the wafer 101 may be made as low as 50 microns, although larger
or smaller dimensions, for example, up to half a millimeter for the
gap between the housing 103 and the wafer 101, may also be used
(nominally, 100 microns are expected to be in the typical range,
although ranges of 50-150 microns, 40-200 microns, or even up to 1
min, and even in some cases greater than 1 mm, may be possible). It
should be noted that water is the preferred liquid for 193
nanometer lithography, which is relatively lossless at 193 nm. For
157 nanometer lithography, losses within the liquid are a concern,
which tends to require smaller gaps between the lens 102A and the
wafer 101. In other words, the lens 102A would move closer to the
wafer 101 (down to about 1 mm or so). In the case of 157 nm
lithography, the gap between the housing 103 and the wafer 101 may
be down to 50 microns or less.
[0029] It will also be appreciated that in the present invention,
the liquid may be removed completely, in the event that exposure of
the wafer 101 calls for a dry exposure. For dry exposure, the
optics needs to be adjusted accordingly (e.g., focus, spherical
abberation, reduction in the numerical aperture, etc.)
[0030] As noted above, for 193 nm imaging, the liquid is preferably
water (e.g., de-ionized water), although other liquids, for
example, cyclo-octane, Krytox.RTM. (Foemblin oil) and
perfluoropolyether fluids, may be used.
[0031] FIG. 2 illustrates an isometric view of the liquid immersion
photolithographic system of FIG. 1. In FIG. 2, common elements with
FIG. 1 have been labeled identically. (Note that in this simulated
figure, the wafer 101 appears transparent.)
[0032] Placing of the projection optical system 100 below the wafer
101, rather than above it, permits taking advantage of gravity to
form a meniscus 108 such that the confinement of the liquid is
substantially simplified. This removes the need for complicated
confinement systems, fairly complex liquid recirculation and
pumping mechanisms, etc. It also considerably simplifies the
effects of any stray liquid that can be simply captured using the
catch basins 105.
[0033] As, an alternative, it is possible to have "fountainhead"
effect, where the liquid is expelled from the housing 103 towards
the wafer 101, achieving a similar effect as that of the meniscus,
and then flows in the catch basins for recycling.
[0034] The present invention results in a number of benefits to a
liquid immersion photolithographic system. Confinement of the
liquid is simplified. Spillage is reduced or eliminated entirely.
The system may be used both as a wet exposure system (with the
liquid), and as a dry exposure system (without the liquid, with
optics adjustes), as appropriate. All of these benefits allow the
use of existing photolithographic tools and familiar wavelengths to
define much smaller features on a semiconductor surface.
CONCLUSION
[0035] While various embodiments of the present invention have been
described above, it should be understood that they have been
presented by way of example, and not limitation. It will be
apparent to persons skilled in the relevant art that various
changes in form and detail can be made therein without departing
from the spirit and scope of the invention.
[0036] The present invention has been described above with the aid
of functional building blocks and method steps illustrating the
performance of specified functions and relationships thereof. The
boundaries of these functional building blocks and method steps
have been arbitrarily defined herein for the convenience of the
description. Alternate boundaries can be defined so long as the
specified functions and relationships thereof are appropriately
performed. Also, the order of method steps may be rearranged. Any
such alternate boundaries are thus within the scope and spirit of
the claimed invention. One skilled in the art will recognize that
these functional building blocks can be implemented by discrete
components, application specific integrated circuits, processors
executing appropriate software and the like or any combination
thereof. Thus, the breadth and scope of the present invention
should not be limited by any of the above-described exemplary
embodiments, but should be defined only in accordance with the
following claims and their equivalents.
* * * * *