U.S. patent application number 12/638565 was filed with the patent office on 2010-09-23 for glass powders, methods for producing glass powders and devices fabricated from same.
This patent application is currently assigned to CABOT CORPORATION. Invention is credited to James Caruso, Mark J. Hampden-Smith, Toivo T. Kodas, Audunn Ludviksson, Quint H. Powell.
Application Number | 20100236288 12/638565 |
Document ID | / |
Family ID | 22495506 |
Filed Date | 2010-09-23 |
United States Patent
Application |
20100236288 |
Kind Code |
A1 |
Kodas; Toivo T. ; et
al. |
September 23, 2010 |
GLASS POWDERS, METHODS FOR PRODUCING GLASS POWDERS AND DEVICES
FABRICATED FROM SAME
Abstract
Glass powders and methods for producing glass powders. The
powders preferably have a small particle size, narrow size
distribution and a spherical morphology. The method includes
forming the particles by a spray pyrolysis technique. The invention
also includes novel devices and products formed from the glass
powders.
Inventors: |
Kodas; Toivo T.; (Carlisle,
MA) ; Hampden-Smith; Mark J.; (Albuquerque, NM)
; Caruso; James; (Albuquerque, NM) ; Powell; Quint
H.; (Albuquerque, NM) ; Ludviksson; Audunn;
(Albuquerque, NM) |
Correspondence
Address: |
MARSH, FISCHMANN & BREYFOGLE LLP
8055 East Tufts Avenue, Suite 450
Denver
CO
80237
US
|
Assignee: |
CABOT CORPORATION
Boston
MA
|
Family ID: |
22495506 |
Appl. No.: |
12/638565 |
Filed: |
December 15, 2009 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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10904909 |
Dec 3, 2004 |
7631518 |
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12638565 |
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10032298 |
Dec 21, 2001 |
6866929 |
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10904909 |
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|
09141394 |
Aug 27, 1998 |
6360562 |
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10032298 |
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|
09030057 |
Feb 24, 1998 |
6338809 |
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09141394 |
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09028628 |
Feb 24, 1998 |
6602439 |
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09030057 |
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09028029 |
Feb 24, 1998 |
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09028628 |
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Current U.S.
Class: |
65/21.1 |
Current CPC
Class: |
C09K 11/666 20130101;
B01J 2219/00171 20130101; C09K 3/1436 20130101; Y02P 40/57
20151101; C03C 17/30 20130101; B01J 2219/00162 20130101; C01G
23/003 20130101; C01P 2004/62 20130101; B01J 2219/00112 20130101;
B01J 2219/00155 20130101; B01J 2219/00166 20130101; C09K 11/642
20130101; C09K 11/672 20130101; C09K 11/7729 20130101; C01P 2004/61
20130101; C09K 11/7776 20130101; A61K 6/887 20200101; C09K 11/7708
20130101; C03C 3/091 20130101; C09G 1/02 20130101; C09K 11/644
20130101; C09K 11/7786 20130101; Y10T 428/2996 20150115; C09K
11/643 20130101; Y10T 428/2991 20150115; C03C 8/16 20130101; C09K
11/595 20130101; C09K 11/7701 20130101; B82Y 30/00 20130101; C03C
11/002 20130101; C09K 11/584 20130101; C01P 2004/32 20130101; C03C
2214/08 20130101; H01L 21/3212 20130101; B24B 37/044 20130101; C01B
17/20 20130101; C01P 2004/34 20130101; C09K 11/662 20130101; C01P
2004/03 20130101; Y10T 428/2995 20150115; C03B 2201/07 20130101;
C03C 12/00 20130101; B01J 2219/00159 20130101; C01P 2002/60
20130101; C03B 19/106 20130101; C09K 11/7784 20130101; Y10T 428/29
20150115; C01B 13/185 20130101; C03C 4/16 20130101; C03C 3/072
20130101; A61K 6/884 20200101; B01J 13/02 20130101; B01J 2219/00186
20130101; C01F 17/206 20200101; C09K 11/7787 20130101; Y10T
428/2982 20150115; B01J 19/10 20130101; C09K 11/7769 20130101; C03C
1/006 20130101; C09K 11/623 20130101; C01P 2004/50 20130101; C09K
3/1463 20130101; A61K 6/836 20200101; C01P 2004/52 20130101; C03C
14/004 20130101; C01B 13/18 20130101; C01P 2006/22 20130101; B01J
19/2405 20130101; A61K 6/887 20200101; C08L 33/00 20130101; A61K
6/887 20200101; C08L 33/00 20130101 |
Class at
Publication: |
65/21.1 |
International
Class: |
C03B 19/10 20060101
C03B019/10 |
Goverment Interests
STATEMENT REGARDING FEDERALLY-SPONSORED RESEARCH/DEVELOPMENT
[0002] This invention was made with Government support under
contracts N00014-95-C-0278 and N00014-96-C-0395 awarded by the
Office of Naval Research. The Government has certain rights in the
invention.
Claims
1. An aerosol method for making glass particles, the method
comprising: generating an aerosol stream, as generated the aerosol
stream comprising droplets comprising a liquid and at least one
precursor for glass material; and in the aerosol stream, forming
glass particles comprising the glass material, the glass particles
having a weight average particle size of not greater than 5
microns.
2-9. (canceled)
10. The method of claim 1, wherein the forming comprises heating
the aerosol stream in a thermal reactor.
11. The method of claim 10, wherein the thermal reactor is a
tubular furnace reactor.
12. The method of claim 10, wherein the thermal reactor is a flame
reactor.
13. The method of claim 10, wherein the thermal reactor is a plasma
reactor.
14. The method of claim 1, wherein during the heating, the aerosol
stream reaches a maximum average stream temperature of greater than
800.degree. C.
15-29. (canceled)
30. The method of claim 1, wherein the glass material is silicate
glass.
31. The method of claim 1, wherein the glass material is borate
glass.
32. The method of claim 1, wherein the glass material is phosphate
glass.
33. (canceled)
34. The method of claim 1, wherein the glass material is
aluminosilicate glass.
35. The method of claim 1,wherein the glass material is
borosilicate glass.
36. The method of claim 1, wherein the glass material is lead
borosilicate glass.
37-50. (canceled)
51. The method of claim 1, comprising processing the glass
particles, wherein the processing comprises forming a coating on
the particles, the coating comprises a coating material that is
different than the glass material.
52-55. (canceled)
56. The method of claim 51, wherein the coating material is a metal
phase.
57-76. (canceled)
77. A method for making a glass layer on a substrate, the method
comprising: making the glass particles according to the method of
claim 1; depositing the glass particles on a substrate; and
sintering the glass particles.
78-86. (canceled)
87. The method of claim 77, wherein the glass particles comprise a
complex glass.
88-121. (canceled)
Description
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation application of U.S.
patent application Ser. No. 10/904,909 filed Dec. 3, 2004, now U.S.
Pat. No. 7,631,518, which is a continuation application of U.S.
patent application Ser. No. 10/032,298 filed Dec. 21, 2001, now
U.S. Pat. No. 6,866,929, which is a divisional application of U.S.
patent application Ser. No. 09/141,394 filed Aug. 27, 1998, now
U.S. Pat. No. 6,360,562, which is a continuation-in-part of U.S.
patent application Ser. No. 09/030,057 filed Feb. 24, 1998, now
U.S. Pat. No. 6,338,809, and a continuation-in-part of U.S. patent
application Ser. No. 09/028,628 filed Feb. 24, 1998, now U.S. Pat.
No. 6,602,439, and a continuation-in-part of U.S. patent
application Ser. No. 09/028,029 filed Feb. 24, 1998, now abandoned.
Each of the foregoing referenced patent applications is
incorporated by reference herein as if set forth below in its
entirety.
BACKGROUND OF THE INVENTION
[0003] 1. Field of the Invention
[0004] The present invention relates to glass powders having well
controlled chemical and mechanical properties as well as methods
for producing glass powders, and intermediate products and devices
incorporating the glass powders. The glass powders are preferably
produced by spray pyrolysis of glass precursors.
[0005] 2. Description of Related Art
[0006] Many product applications require glass powders that have
one or more of the following properties: spherical morphology; high
purity; small average size; narrow size distribution; controlled
chemistry; and little or no agglomeration. Examples of glass powder
applications requiring such characteristics include, but are not
limited to, thick-film pastes used for fabricating electronic
devices. Thick-film pastes are mixtures of fine powders in an
organic vehicle, wherein the organic vehicle is removed after
application of the paste to a substrate.
[0007] In particular, many product applications require glass
powders having a small average size, such as from about 0.1 .mu.m
to about 10 .mu.m, and a spherical morphology. It can also be
advantageous if the powder consists of glass particles having a
narrow size distribution without any substantial agglomeration of
the particles. Most glass powders are produced by forming a melt of
the desired glass composition, quenching the molten glass and
milling the resulting glass to reduce the particle size of the
glass. See, for example, U.S. Pat. No. 4,820,661 by Nair which
discloses an aluminoborosilicate glass useful in thick-film
compositions for crossover dielectrics. Such methods result in
glass powders having a jagged and irregular morphology, wide spread
of particle size and other characteristics which are undesirable in
precision applications.
[0008] There have been attempts in the art to produce glass
particles having improved chemical and physical characteristics.
U.S. Pat. No. 4,775,520 by Unger et al. discloses a process for
forming monodispersed silica (SiO.sub.2) particles having an
average size of from about 0.05 to about 10 .mu.m. The particles,
which are useful as sorption materials in chromotography, are
formed by a two-step process including hydrolytic polycondensation
and the addition of a silane to control the reaction.
[0009] U.S. Pat. No. 5,173,457 by Shorthouse discloses a
borosilicate glass useful for thick-film applications having a size
of less than 5 .mu.m and a spherical morphology. The glass is
formed by a sol-gel process.
[0010] U.S. Pat. No. 5,589,150 by Kano et al. discloses a silica
gel formed by milling a hydrogel slurry and spray drying the slurry
to form gel particles having an average size of 30 to 100 .mu.m and
a spherical morphology. The gel particles are useful as polymer
catalyst carriers.
[0011] Typically, sol-gel and related precipitation routes for
forming glasses are limited in their usefulness. The precursors,
such as alkoxides, are prohibitively expensive and the process
cannot easily be converted to a continuous production method. It is
also difficult to produce complex glass compositions with good
homogeneity of the different glass components. Further, it can be
difficult to separate the glass particles from the liquid in which
they are produced.
[0012] The continued miniaturization and increased complexity of
electronic components has created a need for materials, including
glass particles, with well-controlled physical and chemical
characteristics. For example, thick-film paste technology must
continue to meet the demands of decreased line width and decreased
pitch, i.e., decreased distance between traces. As a result, pastes
have been developed that have a photo-imaging capability to enable
the formation of traces having a decreased width and pitch. In this
process, a photoactive thick-film paste is applied to a substrate
and the paste is then dried and exposed to ultraviolet light
through a photomask and the exposed portions of the paste are
developed to remove unwanted portions of the paste.
[0013] Examples of such photoactive pastes are disclosed in: U.S.
Pat. No. 3,958,996 by Inskip; U.S. Pat. No. 4,119,480 by Nishi et
al.; U.S. Pat. No. 4,598,037 by Felten; U.S. Pat. No. 4,613,560 by
Dueber et al.; and U.S. Pat. Nos. 5,032,478 and 5,032,490 both by
Nebe et al. Each of the foregoing U.S. patents are incorporated
herein by reference in their entirety.
[0014] Glass compositions for thick-film pastes are also useful for
forming dielectric layers in electronic circuits. For example, U.S.
Pat. No. 4,820,661 by Nair discloses an aluminoborosilcate glass
useful for crossover dielectrics. U.S. Pat. No. 4,959,330 by
Donohue et al. discloses a crystallizable glass including ZnO and
BaO that is useful as a dielectric layer. U.S. Pat. No. 5,210,057
by Haun et al. discloses an alkaline earth zinc silicate glass that
is partially crystallizable and is useful for forming dielectric
layers. Each of the foregoing U.S. Patents are incorporated herein
by reference in their entirety.
[0015] To meet the demands of these and similar applications, glass
powders, particularly complex glass powders, having well-controlled
physical and chemical characteristics are required. To date, such
glass powders have not been provided.
[0016] It would be particularly advantageous to provide a flexible
production method capable of producing glass powders which would
enable control over the powder characteristics as well as the
versatility to accommodate complex glass compositions which are
either difficult or impossible to produce using existing production
methods. For example, it would be advantageous to provide control
over the particle size, particle size distribution, morphology,
homogeneity, and porosity of the glass powder. It would be
particularly advantageous if such glass powders could be produced
in large quantities on a substantially continuous basis.
BRIEF DESCRIPTION OF THE DRAWINGS
[0017] FIG. 1 is a process block diagram showing one embodiment of
the process of the present invention.
[0018] FIG. 2 is a side view in cross section of one embodiment of
aerosol generator of the present invention.
[0019] FIG. 3 is a top view of a transducer mounting plate showing
a 49 transducer array for use in an aerosol generator of the
present invention.
[0020] FIG. 4 is a top view of a transducer mounting plate for a
400 transducer array for use in an ultrasonic generator of the
present invention.
[0021] FIG. 5 is a side view of the transducer mounting plate shown
in FIG. 4.
[0022] FIG. 6 is a partial side view showing the profile of a
single transducer mounting receptacle of the transducer mounting
plate shown in FIG. 4.
[0023] FIG. 7 is a partial side view in cross-section showing an
alternative embodiment for mounting an ultrasonic transducer.
[0024] FIG. 8 is a top view of a bottom retaining plate for
retaining a separator for use in an aerosol generator of the
present invention.
[0025] FIG. 9 is a top view of a liquid feed box having a bottom
retaining plate to assist in retaining a separator for use in an
aerosol generator of the present invention.
[0026] FIG. 10 is a side view of the liquid feed box shown in FIG.
9.
[0027] FIG. 11 is a side view of a gas tube for delivering gas
within an aerosol generator of the present invention.
[0028] FIG. 12 shows a partial top view of gas tubes positioned in
a liquid feed box for distributing gas relative to ultrasonic
transducer positions for use in an aerosol generator of the present
invention.
[0029] FIG. 13 shows one embodiment for a gas distribution
configuration for the aerosol generator of the present
invention.
[0030] FIG. 14 shows another embodiment for a gas distribution
configuration for the aerosol generator of the present
invention.
[0031] FIG. 15 is a top view of one embodiment of a gas
distribution plate/gas tube assembly of the aerosol generator of
the present invention.
[0032] FIG. 16 is a side view of one embodiment of the gas
distribution plate/gas tube assembly shown in FIG. 15.
[0033] FIG. 17 shows one embodiment for orienting a transducer in
the aerosol generator of the present invention.
[0034] FIG. 18 is a top view of a gas manifold for distributing gas
within an aerosol generator of the present invention.
[0035] FIG. 19 is a side view of the gas manifold shown in FIG.
18.
[0036] FIG. 20 is a top view of a generator lid of a hood design
for use in an aerosol generator of the present invention.
[0037] FIG. 21 is a side view of the generator lid shown in FIG.
20.
[0038] FIG. 22 is a process block diagram of one embodiment of the
process of the present invention including a droplet
classifier.
[0039] FIG. 23 is a top view in cross section of an impactor of the
present invention for use in classifying an aerosol.
[0040] FIG. 24 is a front view of a flow control plate of the
impactor shown in FIG. 23.
[0041] FIG. 25 is a front view of a mounting plate of the impactor
shown in FIG. 23.
[0042] FIG. 26 is a front view of an impactor plate assembly of the
impactor shown in FIG. 23.
[0043] FIG. 27 is a side view of the impactor plate assembly shown
in FIG. 26.
[0044] FIG. 28 is a process block diagram of one embodiment of the
present invention including a particle cooler.
[0045] FIG. 29 is a top view of a gas quench cooler of the present
invention.
[0046] FIG. 30 is an end view of the gas quench cooler shown in
FIG. 29.
[0047] FIG. 31 is a side view of a perforated conduit of the quench
cooler shown in FIG. 29.
[0048] FIG. 32 is a side view showing one embodiment of a gas
quench cooler of the present invention connected with a
cyclone.
[0049] FIG. 33 is a process block diagram of one embodiment of the
present invention including a particle coater.
[0050] FIG. 34 is a block diagram of one embodiment of the present
invention including a particle modifier.
[0051] FIG. 35 shows cross sections of various particle
morphologies of some composite particles manufacturable according
to the present invention.
[0052] FIG. 36 is a block diagram of one embodiment of the process
of the present invention including the addition of a dry gas
between the aerosol generator and the furnace.
[0053] FIG. 37 illustrates an SEM photomicrograph of a glass powder
produced according to an embodiment of the present invention.
[0054] FIG. 38 illustrates a particle size distribution for a glass
powder batch according to an embodiment of the present
invention.
DETAILED DESCRIPTION OF THE INVENTION
[0055] The present invention is generally directed to glass powders
and methods for producing glass powders. The invention is also
directed to novel intermediate products and devices fabricated
using the glass powders. As used herein, glass powders or glass
particles are inorganic materials that are predominately amorphous,
as determined, for example, by x-ray diffraction analysis of the
powder. Glasses are characterized by a random structure with no
long-range (crystalline) order. Finely powdered glass powders are
sometimes referred to as glass frits or fillers.
[0056] The present invention is particularly applicable to complex
glasses. As used herein, complex glasses are those that include at
least one structural forming oxide (e.g. SiO.sub.2) and at least
one additional oxide (e.g. B.sub.2O.sub.3, PbO). Complex glasses
include binary, ternary or quaternary glasses, as well as glasses
including more than four components. Examples of particularly
preferred complex glasses are disclosed in detail hereinbelow.
[0057] In one aspect, the present invention provides a method for
preparing a particulate product including a glass. A feed of
liquid-containing, flowable medium, including at least one
precursor for the desired glass material, is converted to aerosol
form, with droplets of the medium being dispersed in and suspended
by a carrier gas. Liquid from the droplets in the aerosol is then
removed to permit formation in a dispersed state of the desired
particles. Typically, the feed precursor is pyrolyzed in a furnace
to make the particles. In one embodiment, the particles are
subjected, while still in a dispersed state, to compositional or
structural modification, if desired. Compositional modification may
include, for example, coating the particles. Structural
modification may include, for example, annealing the particles. The
term powder is often used herein to refer to the particulate
product of the present invention. The use of the term powder does
not indicate, however, that the particulate product must be dry or
in any particular environment. Although the particulate product is
typically manufactured in a dry state, the particulate product may,
after manufacture, be placed in a wet environment, such as in a
paste or slurry.
[0058] The process of the present invention is particularly well
suited for the production of finely divided glass particles having
a small weight average size. In addition to making particles within
a small weight average particle size, the particles may be produced
with a narrow size distribution, thereby providing size uniformity
that is desired for many applications.
[0059] In addition to control over particle size and size
distribution, the method of the present invention provides
significant flexibility for producing particles of varying chemical
composition wherein the particles are high purity with good
chemical homogeneity. Complex glasses, such as binary, ternary or
quaternary glasses, can be formed by the method. The ability to
tightly control the chemical composition of the glass particles
advantageously permits control over the properties of the glass
such as glass transition temperature (T.sub.g), dielectric
constant, density, and the like.
[0060] The glass particles may also include a second-phase that is
not a glass. For example, one phase (e.g. a crystalline oxide) may
be uniformly dispersed throughout a matrix of another phase (e.g. a
glass). Alternatively, one phase may form an interior core while
another phase forms a coating that surrounds the core. Other
morphologies are also possible, as is discussed more fully
below.
[0061] Referring now to FIG. 1, one embodiment of the process of
the present invention is described. A liquid feed 102, including at
least one precursor for the desired particles, and a carrier gas
104 are fed to an aerosol generator 106 where an aerosol 108 is
produced. The aerosol 108 is then fed to a furnace 110 where liquid
in the aerosol 108 is removed to produce glass particles 112 that
are dispersed in and suspended by gas exiting the furnace 110. The
glass particles 112 are then collected in a particle collector 114
to produce a particulate product 116.
[0062] As used herein, the liquid feed 102 is a feed that includes
one or more flowable liquids as the major constituent(s), such that
the feed is a flowable medium. The liquid feed 102 need not
comprise only liquid constituents. The liquid feed 102 may comprise
only constituents in one or more liquid phase, or it may also
include particulate material suspended in a liquid phase. The
liquid feed 102 must, however, be capable of being atomized to form
droplets of sufficiently small size for preparation of the aerosol
108. Therefore, if the liquid feed 102 includes suspended
particles, such as colloidal silica particles, those particles
should be relatively small in relation to the size of droplets in
the aerosol 108. Such suspended particles should typically be
smaller than about 1 .mu.m in size, preferably smaller than about
0.5 .mu.m in size, and more preferably smaller than about 0.3 .mu.m
in size and most preferably smaller than about 0.1 .mu.m in size.
Most preferably, the suspended particles should be able to form a
colloid. The suspended particles could be finely divided particles,
or could be agglomerate masses comprised of agglomerated smaller
primary particles. For example, 0.5 .mu.m particles could be
agglomerates of nanometer-sized primary particles. When the liquid
feed 102 includes suspended particles, the particles preferably
comprise not greater than about 15 weight percent of the liquid
feed.
[0063] As noted, the liquid feed 102 includes at least one
precursor for preparation of the particles 112. The precursor may
be a substance in either a liquid or solid phase of the liquid feed
102. Preferably, the precursor will be a material dissolved in a
liquid solvent of the liquid feed 102, such as a salt, e.g., a
nitrate salt. The precursor can also be an acid, such as boric acid
(H.sub.3BO.sub.3), a precursor to B.sub.2O.sub.3. The precursor may
undergo one or more chemical reactions in the furnace 110 to assist
in production of the particles 112. Alternatively, the precursor
material may contribute to formation of the particles 112 without
undergoing chemical reaction. This could be the case, for example,
when the liquid feed 102 includes, as a precursor material,
suspended particles that are not chemically modified in the furnace
110. In any event, the particles 112 comprise at least one
component originally contributed by the precursor.
[0064] For the production of complex glass powders, the liquid feed
102 will typically include multiple precursor materials, which may
be present together in a single phase or separately in multiple
phases. For example, the liquid feed 102 may include multiple
precursors in solution in a single liquid vehicle. Alternatively,
one precursor material could be in a solid particulate phase (e.g.
colloidal silica) and a second precursor material could be in a
liquid phase (e.g. a metal salt). Also, one precursor material
could be in one liquid phase and a second precursor material could
be in a second liquid phase, such as could be the case when the
liquid feed 102 comprises an emulsion. One of the advantages of the
present invention is that high quality glass powders can be
produced from reasonably inexpensive precursor materials.
[0065] The carrier gas 104 may comprise any gaseous medium in which
droplets produced from the liquid feed 102 may be dispersed in
aerosol form. The carrier gas 104 may be inert, in that the carrier
gas 104 does not participate in formation of the particles 112.
Alternatively, the carrier gas may have one or more active
component(s) that contribute to formation of the particles 112. In
that regard, the carrier gas may include one or more reactive
components that react in the furnace 110 to contribute to formation
of the glass particles 112. For example, oxygen can be a critical
reactive component to the formation of the glass particles.
[0066] The aerosol generator 106 atomizes the liquid feed 102 to
form droplets in a manner to permit the carrier gas 104 to sweep
the droplets away to form the aerosol 108. The droplets comprise
liquid from the liquid feed 102. The droplets may also include
nonliquid material, such as one or more small particles held in the
droplet by the liquid. For example, when producing glass composite
particles, one phase of the particles may be provided in the liquid
feed 102 in the form of suspended precursor particles and a second
phase of the particles may be produced in the furnace 110 from one
or more precursors in the liquid phase of the liquid feed 102.
Furthermore the precursor particles could be included in the liquid
feed 102, and therefore also in droplets of the aerosol 108, for
the purpose only of dispersing the particles for subsequent
compositional or structural modification during or after processing
in the furnace 110.
[0067] An important aspect of the present invention is generation
of the aerosol 108 with droplets of a small average size and narrow
size distribution. In this manner, the glass particles 112 may be
produced at a desired small size with a narrow size distribution,
which are advantageous for many applications.
[0068] The aerosol generator 106 is preferably capable of producing
the aerosol 108 such that it includes droplets having a weight
average size in a range having a lower limit of about 1 .mu.m and
preferably about 2 .mu.m; and an upper limit of about 20 .mu.m;
preferably about 10 .mu.m, more preferably about 7 .mu.m and most
preferably about 5 .mu.m. A weight average droplet size in a range
of from about 2 .mu.m to about 4 .mu.m is preferred for many
applications. The aerosol generator is also preferably capable of
producing the aerosol 108 such that it includes droplets in a
narrow size distribution. Preferably, the droplets in the aerosol
are such that at least about 70 weight percent (more preferably at
least about 80 weight percent and most preferably at least about 85
weight percent) of the droplets are smaller than about 10 .mu.m and
more preferably at least about 70 weight percent (more preferably
at least about 80 weight percent and most preferably at least about
85 weight percent) are smaller than about 5 .mu.m. Furthermore,
preferably no greater than about 30 weight percent, more preferably
no greater than about 25 weight percent and most preferably no
greater than about 20 weight percent, of the droplets in the
aerosol 108 are larger than about twice the weight average droplet
size.
[0069] Another important aspect of the present invention is that
the aerosol 108 may be generated without consuming excessive
amounts of the carrier gas 104. The aerosol generator 106 is
capable of producing the aerosol 108 such that it has a high
loading, or high concentration, of the liquid feed 102 in droplet
form. In that regard, the aerosol 108 preferably includes greater
than about 1.times.10.sup.6 droplets per cubic centimeter of the
aerosol 108, more preferably greater than about 5.times.10.sup.6
droplets per cubic centimeter, still more preferably greater than
about 1.times.10.sup.7 droplets per cubic centimeter, and most
preferably greater than about 5.times.10.sup.7 droplets per cubic
centimeter. That the aerosol generator 106 can produce such a
heavily loaded aerosol 108 is particularly surprising considering
the high quality of the aerosol 108 with respect to small average
droplet size and narrow droplet size distribution. Typically,
droplet loading in the aerosol is such that the volumetric ratio of
liquid feed 102 to carrier gas 104 in the aerosol 108 is larger
than about 0.04 milliliters of liquid feed 102 per liter of carrier
gas 104 in the aerosol 108, preferably larger than about 0.083
milliliters of liquid feed 102 per liter of carrier gas 104 in the
aerosol 108, more preferably larger than about 0.167 milliliters of
liquid feed 102 per liter of carrier gas 104, still more preferably
larger than about 0.25 milliliters of liquid feed 102 per liter of
carrier gas 104, and most preferably larger than about 0.333
milliliters of liquid feed 102 per liter of carrier gas 104.
[0070] This capability of the aerosol generator 106 to produce a
heavily loaded aerosol 108 is even more surprising given the high
droplet output rate of which the aerosol generator 106 is capable,
as discussed more fully below. It will be appreciated that the
concentration of liquid feed 102 in the aerosol 108 will depend
upon the specific components and attributes of the liquid feed 102
and, particularly, the size of the droplets in the aerosol 108. For
example, when the average droplet size is from about 2 .mu.m to
about 4 .mu.m, the droplet loading is preferably larger than about
0.15 milliliters of aerosol feed 102 per liter of carrier gas 104,
more preferably larger than about 0.2 milliliters of liquid feed
102 per liter of carrier gas 104, even more preferably larger than
about 0.25 milliliters of liquid feed 102 per liter of carrier gas
104, and most preferably larger than about 0.3 milliliters of
liquid feed 102 per liter of carrier gas 104. When reference is
made herein to liters of carrier gas 104, it refers to the volume
that the carrier gas 104 would occupy under conditions of standard
temperature and pressure.
[0071] The furnace 110 may be any suitable device for heating the
aerosol 108 to evaporate liquid from the droplets of the aerosol
108 and thereby permit formation of the glass particles 112. The
maximum average stream temperature, or reaction temperature, refers
to the maximum average temperature that an aerosol stream attains
while flowing through the furnace. This is typically determined by
a temperature probe inserted into the furnace.
[0072] For the production of glass particles, residence time in the
heating zone of the furnace 110 will depend on the composition of
the glass particles. In one embodiment, the residence time in the
heating zone is at least about 4 seconds, with shorter than about
15 seconds being preferred. The residence time will depend on the
reaction temperature as well as the geometric size of the reactor
and the carrier gas flow rate. The residence time should be long
enough, however, to assure that the particles 112 attain the
desired maximum stream temperature for a given heat transfer rate
such that substantially all of the precursors are fully reacted. In
that regard, with extremely short residence times, higher furnace
temperatures could be used to increase the rate of heat transfer so
long as the particles 112 attain a maximum temperature within the
desired stream temperature range. However, the temperature should
not be so high that volatile species (e.g. PbO) are lost. Thus,
that mode of operation is not typically preferred. Also, it is
preferred that, in most cases, the maximum stream temperature not
be attained in the furnace 110 until substantially at the end of
the heating zone in the furnace 110. For example, the heating zone
will often include a plurality of heating sections that are each
independently controllable. The maximum stream temperature should
typically not be attained until the final heating section, and more
preferably until substantially at the end of the last heating
section. This is important to reduce the potential for
thermophoretic losses of material. Also, it is noted that as used
herein, residence time refers to the actual time for a material to
pass through the relevant process equipment. In the case of the
furnace, this includes the effect of increasing velocity with gas
expansion due to heating.
[0073] Typically, the furnace 110 will be a tube-shaped furnace, so
that the aerosol 108 moving into and through the furnace does not
encounter sharp edges on which droplets could collect. Loss of
droplets to collection at sharp surfaces results in a lower yield
of particles 112. Further, the accumulation of liquid at sharp
edges can result in re-release of undesirably large droplets back
into the aerosol 108, which can cause contamination of the
particulate product 116 with undesirably large particles. Also,
over time, such liquid collection at sharp surfaces can cause
fouling of process equipment, impairing process performance.
[0074] The furnace 110 may include a heating tube made of any
suitable material. The tube material may be a ceramic material, for
example, mullite, fused silica or alumina. Alternatively, the tube
may be metallic. Advantages of using a metallic tube are low cost,
ability to withstand steep temperature gradients and large thermal
shocks, machinability and weldability, and ease of providing a seal
between the tube and other process equipment. Disadvantages of
using a metallic tube include limited operating temperature and
increased reactivity in some reaction systems. For example, some
metal tubes can out-gas chromium at increased temperatures and very
small amounts of chromium (e.g. as little as 150 ppm) can discolor
the glass particles. Given the foregoing, the proper tube can be
selected for a particular glass composition and reactor
temperature. For making high purity glass particles, fused silica
(quartz) tubes are often preferred.
[0075] When a metallic tube is used in the furnace 110, it is
preferably a high nickel content stainless steel alloy, such as a
330 stainless steel, or a nickel-based super alloy. As noted, one
of the major advantages of using a metallic tube is that the tube
is relatively easy to seal with other process equipment. In that
regard, flange fittings may be welded directly to the tube for
connecting with other process equipment. Metallic tubes are
generally preferred for making particles that do not require a
maximum tube wall temperature of higher than about 1100.degree. C.
during particle manufacture. When higher temperatures are required,
ceramic tubes are typically used. One major problem with ceramic
tubes, however, is that the tubes can be difficult to seal with
other process equipment, especially when the ends of the tubes are
maintained at relatively high temperatures.
[0076] Also, although the present invention is described with
primary reference to a furnace reactor, which is preferred, it
should be recognized that, except as noted, any other thermal
reactor, including a flame reactor or a plasma reactor, could be
used instead. A furnace reactor is, however, preferred, because of
the generally even heating characteristic of a furnace for
attaining a uniform stream temperature.
[0077] The particle collector 114, may be any suitable apparatus
for collecting glass particles 112 to produce the particulate
product 116. One embodiment of the particle collector 114 uses one
or more filters to separate the glass particles 112 from the gas.
Such a filter may be of any type, including a bag filter. Another
preferred embodiment of the particle collector uses one or more
cyclones to separate the particles 112. A cyclone is preferred
according to one embodiment of the present invention due to the
ability of a cyclone to separate the glass powder based upon
particle size. Thus, the collected particles can advantageously
have an even narrower particle size distribution. Other apparatus
that may be used in the particle collector 114 include an
electrostatic precipitator. Collection should normally occur at a
temperature above the condensation temperature of the gas stream in
which the glass particles 112 are suspended. Also, collection
should normally be at a temperature that is low enough to prevent
significant agglomeration of the glass particles 112, that is, the
temperature should be below the softening point of the glass.
[0078] Of significant importance to the operation of the process of
the present invention is the aerosol generator 106, which must be
capable of producing a high quality aerosol with high droplet
loading, as previously noted. With reference to FIG. 2, one
embodiment of an aerosol generator 106 of the present invention is
described. The aerosol generator 106 includes a plurality of
ultrasonic transducer discs 120 that are each mounted in a
transducer housing 122. The transducer housings 122 are mounted to
a transducer mounting plate 124, creating an array of the
ultrasonic transducer discs 120. Any convenient spacing may be used
for the ultrasonic transducer discs 120. Center-to-center spacing
of the ultrasonic transducer discs 120 of about 4 centimeters is
often adequate. The aerosol generator 106, as shown in FIG. 2,
includes forty-nine transducers in a 7.times.7 array. The array
configuration is as shown in FIG. 3, which depicts the locations of
the transducer housings 122 mounted to the transducer mounting
plate 124.
[0079] With continued reference to FIG. 2, a separator 126, in
spaced relation to the transducer discs 120, is retained between a
bottom retaining plate 128 and a top retaining plate 130. Gas
delivery tubes 132 are connected to gas distribution manifolds 134,
which have gas delivery ports 136. The gas distribution manifolds
134 are housed within a generator body 138 that is covered by
generator lid 140. A transducer driver 144, having circuitry for
driving the transducer discs 120, is electronically connected with
the transducer discs 120 via electrical cables 146.
[0080] During operation of the aerosol generator 106, as shown in
FIG. 2, the transducer discs 120 are activated by the transducer
driver 144 via the electrical cables 146. The transducers
preferably vibrate at a frequency of from about 1 MHz to about 5
MHz, more preferably from about 1.5 MHz to about 3 MHz. Frequently
used frequencies are at about 1.6 MHz and about 2.4 MHz.
Furthermore, all of the transducer discs 110 should be operating at
substantially the same frequency when an aerosol with a narrow
droplet size distribution is desired. This is important because
commercially available transducers can vary significantly in
thickness, sometimes by as much as 10%. It is preferred, however,
that the transducer discs 120 operate at frequencies within a range
of 5% above and below the median transducer frequency, more
preferably within a range of 2.5%, and most preferably within a
range of 1%. This can be accomplished by careful selection of the
transducer discs 120 so that they all preferably have thicknesses
within 5% of the median transducer thickness, more preferably
within 2.5%, and most preferably within 1%.
[0081] Liquid feed 102 enters through a feed inlet 148 and flows
through flow channels 150 to exit through feed outlet 152. An
ultrasonically transmissive fluid, typically water, enters through
a water inlet 154 to fill a water bath volume 156 and flow through
flow channels 158 to exit through a water outlet 160. A proper flow
rate of the ultrasonically transmissive fluid is necessary to cool
the transducer discs 120 and to prevent overheating of the
ultrasonically transmissive fluid. Ultrasonic signals from the
transducer discs 120 are transmitted, via the ultrasonically
transmissive fluid, across the water bath volume 156, and
ultimately across the separator 126, to the liquid feed 102 in flow
channels 150.
[0082] The ultrasonic signals from the ultrasonic transducer discs
120 cause atomization cones 162 to develop in the liquid feed 102
at locations corresponding with the transducer discs 120. Carrier
gas 104 is introduced into the gas delivery tubes 132 and delivered
to the vicinity of the atomization cones 162 via gas delivery ports
136. Jets of carrier gas exit the gas delivery ports 136 in a
direction so as to impinge on the atomization cones 162, thereby
sweeping away atomized droplets of the liquid feed 102 that are
being generated from the atomization cones 162 and creating the
aerosol 108, which exits the aerosol generator 106 through an
aerosol exit opening 164.
[0083] Efficient use of the carrier gas 104 is an important aspect
of the aerosol generator 106. The embodiment of the aerosol
generator 106 shown in FIG. 2 includes two gas exit ports per
atomization cone 162, with the gas ports being positioned above the
liquid medium 102 over troughs that develop between the atomization
cones 162, such that the exiting carrier gas 104 is horizontally
directed at the surface of the atomization cones 162, thereby
efficiently distributing the carrier gas 104 to critical portions
of the liquid feed 102 for effective and efficient sweeping away of
droplets as they form about the ultrasonically energized
atomization cones 162. Furthermore, it is preferred that at least a
portion of the opening of each of the gas delivery ports 136,
through which the carrier gas exits the gas delivery tubes, should
be located below the top of the atomization cones 162 at which the
carrier gas 104 is directed. This relative placement of the gas
delivery ports 136 is very important to efficient use of carrier
gas 104. Orientation of the gas delivery ports 136 is also
important. Preferably, the gas delivery ports 136 are positioned to
horizontally direct jets of the carrier gas 104 at the atomization
cones 162. The aerosol generator 106 permits generation of the
aerosol 108 with heavy loading with droplets of the carrier liquid
102, unlike aerosol generator designs that do not efficiently focus
gas delivery to the locations of droplet formation.
[0084] Another important feature of the aerosol generator 106, as
shown in FIG. 2, is the use of the separator 126, which protects
the transducer discs 120 from direct contact with the liquid feed
102, which is often highly corrosive. The height of the separator
126 above the top of the transducer discs 120 should normally be
kept as small as possible, and is often in the range of from about
1 centimeter to about 2 centimeters. The top of the liquid feed 102
in the flow channels above the tops of the ultrasonic transducer
discs 120 is typically in a range of from about 2 centimeters to
about 5 centimeters, whether or not the aerosol generator includes
the separator 126, with a distance of about 3 to 4 centimeters
being preferred. Although the aerosol generator 106 could be made
without the separator 126, in which case the liquid feed 102 would
be in direct contact with the transducer discs 120, the highly
corrosive nature of the liquid feed 102 can often cause premature
failure of the transducer discs 120. The use of the separator 126,
in combination with use of the ultrasonically transmissive fluid in
the water bath volume 156 to provide ultrasonic coupling,
significantly extends the life of the ultrasonic transducers 120.
One disadvantage of using the separator 126, however, is that the
rate of droplet production from the atomization cones 162 is
reduced, often by a factor of two or more, relative to designs in
which the liquid feed 102 is in direct contact with the ultrasonic
transducer discs 102. Even with the separator 126, however, the
aerosol generator 106 used with the present invention is capable of
producing a high quality aerosol with heavy droplet loading, as
previously discussed. Suitable materials for the separator 126
include, for example, polyam ides (such as Kapton.TM. membranes
from DuPont) and other polymer materials, glass, and plexiglass.
The main requirements for the separator 126 are that it be
ultrasonically transmissive, corrosion resistant and
impermeable.
[0085] One alternative to using the separator 126 is to bind a
corrosion-resistant protective coating onto the surface of the
ultrasonic transducer discs 120, thereby preventing the liquid feed
102 from contacting the surface of the ultrasonic transducer discs
120. When the ultrasonic transducer discs 120 have a protective
coating, the aerosol generator 106 will typically be constructed
without the water bath volume 156 and the liquid feed 102 will flow
directly over the ultrasonic transducer discs 120. Examples of such
protective coating materials include platinum, gold, TEFLON.TM.,
epoxies and various plastics. Such a coating can significantly
extend the transducer life. Also, when operating without the
separator 126, the aerosol generator 106 will typically produce the
aerosol 108 with a much higher droplet loading than when the
separator 126 is used.
[0086] One surprising finding with operation of the aerosol
generator 106 of the present invention is that the droplet loading
in the aerosol may be affected by the temperature of the liquid
feed 102. It has been found that when the liquid feed 102 includes
an aqueous liquid at an elevated temperature, the droplet loading
increases significantly. The temperature of the liquid feed 102 is
preferably higher than about 30.degree. C., more preferably higher
than about 35.degree. C. and most preferably higher than about
40.degree. C. If the temperature becomes too high, however, it can
have a detrimental effect on droplet loading in the aerosol 108.
Therefore, the temperature of the liquid feed 102 from which the
aerosol 108 is made should generally be lower than about 50.degree.
C., and preferably lower than about 45.degree. C. The liquid feed
102 may be maintained at the desired temperature in any suitable
fashion. For example, the portion of the aerosol generator 106
where the liquid feed 102 is converted to the aerosol 108 could be
maintained at a constant elevated temperature. Alternatively, the
liquid feed 102 could be delivered to the aerosol generator 106
from a constant temperature bath maintained separate from the
aerosol generator 106. When the ultrasonic generator 106 includes
the separator 126, the ultrasonically transmissive fluid adjacent
the ultrasonic transducer discs 120 are preferably also at an
elevated temperature in the ranges discussed for the liquid feed
102.
[0087] The design for the aerosol generator 106 based on an array
of ultrasonic transducers is versatile and is easily modified to
accommodate different generator sizes for different specialty
applications. The aerosol generator 106 may be designed to include
a plurality of ultrasonic transducers in any convenient number.
Even for smaller scale production, however, the aerosol generator
106 preferably has at least nine ultrasonic transducers, more
preferably at least 16 ultrasonic transducers, and even more
preferably at least 25 ultrasonic transducers. For larger scale
production, however, the aerosol generator 106 includes at least 40
ultrasonic transducers, more preferably at least 100 ultrasonic
transducers, and even more preferably at least 400 ultrasonic
transducers. In some large volume applications, the aerosol
generator may have at least 1000 ultrasonic transducers.
[0088] FIGS. 4-21 show component designs for an aerosol generator
106 including an array of 400 ultrasonic transducers. Referring
first to FIGS. 4 and 5, the transducer mounting plate 124 is shown
with a design to accommodate an array of 400 ultrasonic
transducers, arranged in four subarrays of 100 ultrasonic
transducers each. The transducer mounting plate 124 has integral
vertical walls 172 for containing the ultrasonically transmissive
fluid, typically water, in a water bath similar to the water bath
volume 156 described previously with reference to FIG. 2.
[0089] As shown in FIGS. 4 and 5, four hundred transducer mounting
receptacles 174 are provided in the transducer mounting plate 124
for mounting ultrasonic transducers for the desired array. With
reference to FIG. 6, the profile of an individual transducer
mounting receptacle 174 is shown. A mounting seat 176 accepts an
ultrasonic transducer for mounting, with a mounted ultrasonic
transducer being held in place via screw holes 178. Opposite the
mounting receptacle 176 is a flared opening 180 through which an
ultrasonic signal may be transmitted for the purpose of generating
the aerosol 108, as previously described with reference to FIG.
2.
[0090] A preferred transducer mounting configuration, however, is
shown in FIG. 7 for another configuration for the transducer
mounting plate 124. As illustrated in FIG. 7, an ultrasonic
transducer disc 120 is mounted to the transducer mounting plate 124
by use of a compression screw 177 threaded into a threaded
receptacle 179. The compression screw 177 bears against the
ultrasonic transducer disc 120, causing an o-ring 181, situated in
an o-ring seat 182 on the transducer mounting plate, to be
compressed to form a seal between the transducer mounting plate 124
and the ultrasonic transducer disc 120. This type of transducer
mounting is particularly preferred when the ultrasonic transducer
disc 120 includes a protective surface coating, as discussed
previously, because the seal of the o-ring to the ultrasonic
transducer disc 120 will be inside of the outer edge of the
protective seal, thereby preventing liquid from penetrating under
the protective surface coating from the edges of the ultrasonic
transducer disc 120.
[0091] Referring now to FIG. 8, the bottom retaining plate 128 for
a 400 transducer array is shown having a design for mating with the
transducer mounting plate 124 (shown in FIGS. 4-5). The bottom
retaining plate 128 has eighty openings 184, arranged in four
subgroups 186 of twenty openings 184 each. Each of the openings 184
corresponds with five of the transducer mounting receptacles 174
(shown in FIGS. 4-5) when the bottom retaining plate 128 is mated
with the transducer mounting plate 124 to create a volume for a
water bath between the transducer mounting plate 124 and the bottom
retaining plate 128. The openings 184, therefore, provide a pathway
for ultrasonic signals generated by ultrasonic transducers to be
transmitted through the bottom retaining plate.
[0092] Referring now to FIGS. 9 and 10, a liquid feed box 190 for a
400 transducer array is shown having the top retaining plate 130
designed to fit over the bottom retaining plate 128 (shown in FIG.
8), with a separator 126 (not shown) being retained between the
bottom retaining plate 128 and the top retaining plate 130 when the
aerosol generator 106 is assembled. The liquid feed box 190 also
includes vertically extending walls 192 for containing the liquid
feed 102 when the aerosol generator is in operation. Also shown in
FIGS. 9 and 10 is the feed inlet 148 and the feed outlet 152. An
adjustable weir 198 determines the level of liquid feed 102 in the
liquid feed box 190 during operation of the aerosol generator
106.
[0093] The top retaining plate 130 of the liquid feed box 190 has
eighty openings 194 therethrough, which are arranged in four
subgroups 196 of twenty openings 194 each. The openings 194 of the
top retaining plate 130 correspond in size with the openings 184 of
the bottom retaining plate 128 (shown in FIG. 8). When the aerosol
generator 106 is assembled, the openings 194 through the top
retaining plate 130 and the openings 184 through the bottom
retaining plate 128 are aligned, with the separator 126 positioned
therebetween, to permit transmission of ultrasonic signals when the
aerosol generator 106 is in operation.
[0094] Referring now to FIGS. 9-11, a plurality of gas tube
feed-through holes 202 extend through the vertically extending
walls 192 to either side of the assembly including the feed inlet
148 and feed outlet 152 of the liquid feed box 190. The gas tube
feed-through holes 202 are designed to permit insertion
therethrough of gas tubes 208 of a design as shown in FIG. 11. When
the aerosol generator 106 is assembled, a gas tube 208 is inserted
through each of the gas tube feed-through holes 202 so that gas
delivery ports 136 in the gas tube 208 will be properly positioned
and aligned adjacent the openings 194 in the top retaining plate
130 for delivery of gas to atomization cones that develop in the
liquid feed box 190 during operation of the aerosol generator 106.
The gas delivery ports 136 are typically holes having a diameter of
from about 1.5 millimeters to about 3.5 millimeters.
[0095] Referring now to FIG. 12, a partial view of the liquid feed
box 190 is shown with gas tubes 208A, 208B and 208C positioned
adjacent to the openings 194 through the top retaining plate 130.
Also shown in FIG. 12 are the relative locations that ultrasonic
transducer discs 120 would occupy when the aerosol generator 106 is
assembled. As seen in FIG. 12, the gas tube 208A, which is at the
edge of the array, has five gas delivery ports 136. Each of the gas
delivery ports 136 is positioned to divert carrier gas 104 to a
different one of atomization cones that develop over the array of
ultrasonic transducer discs 120 when the aerosol generator 106 is
operating. The gas tube 208B, which is one row in from the edge of
the array, is a shorter tube that has ten gas delivery ports 136,
five each on opposing sides of the gas tube 208B. The gas tube
208B, therefore, has gas delivery ports 136 for delivering gas to
atomization cones corresponding with each of ten ultrasonic
transducer discs 120. The third gas tube, 208C, is a longer tube
that also has ten gas delivery ports 136 for delivering gas to
atomization cones corresponding with ten ultrasonic transducer
discs 120. The design shown in FIG. 12, therefore, includes one gas
delivery port per ultrasonic transducer disc 120. Although this is
a lower density of gas delivery ports 136 than for the embodiment
of the aerosol generator 106 shown in FIG. 2, which includes two
gas delivery ports per ultrasonic transducer disc 120, the design
shown in FIG. 12 is, nevertheless, capable of producing a dense,
high-quality aerosol without unnecessary waste of gas.
[0096] Referring now to FIG. 13, the flow of carrier gas 104
relative to atomization cones 162 during operation of the aerosol
generator 106 having a gas distribution configuration to deliver
carrier gas 104 from gas delivery ports on both sides of the gas
tubes 208, as was shown for the gas tubes 208A, 208B and 208C in
the gas distribution configuration shown in FIG. 11. The carrier
gas 104 sweeps both directions from each of the gas tubes 208.
[0097] An alternative, and preferred, flow for carrier gas 104 is
shown in FIG. 14. As shown in FIG. 14, carrier gas 104 is delivered
from only one side of each of the gas tubes 208. This results in a
sweep of carrier gas from all of the gas tubes 208 toward a central
area 212. This results in a more uniform flow pattern for aerosol
generation that may significantly enhance the efficiency with which
the carrier gas 104 is used to produce an aerosol. The aerosol that
is generated, therefore, tends to be more heavily loaded with
liquid droplets.
[0098] Another configuration for distributing carrier gas in the
aerosol generator 106 is shown in FIGS. 15 and 16. In this
configuration, the gas tubes 208 are hung from a gas distribution
plate 216 adjacent gas flow holes 218 through the gas distribution
plate 216. In the aerosol generator 106, the gas distribution plate
216 would be mounted above the liquid feed, with the gas flow holes
positioned to each correspond with an underlying ultrasonic
transducer. Referring specifically to FIG. 16, when the ultrasonic
generator 106 is in operation, atomization cones 162 develop
through the gas flow holes 218, and the gas tubes 208 are located
such that carrier gas 104 exiting from ports in the gas tubes 208
impinge on the atomization cones and flow upward through the gas
flow holes. The gas flow holes 218, therefore, act to assist in
efficiently distributing the carrier gas 104 about the atomization
cones 162 for aerosol formation. It should be appreciated that the
gas distribution plates 218 can be made to accommodate any number
of the gas tubes 208 and gas flow holes 218. For convenience of
illustration, the embodiment shown in FIGS. 15 and 16 shows a
design having only two of the gas tubes 208 and only 16 of the gas
flow holes 218. Also, it should be appreciated that the gas
distribution plate 216 could be used alone, without the gas tubes
208. In that case, a slight positive pressure of carrier gas 104
would be maintained under the gas distribution plate 216 and the
gas flow holes 218 would be sized to maintain the proper velocity
of carrier gas 104 through the gas flow holes 218 for efficient
aerosol generation. Because of the relative complexity of operating
in that mode, however, it is not preferred.
[0099] Aerosol generation may also be enhanced through mounting of
ultrasonic transducers at a slight angle and directing the carrier
gas at resulting atomization cones such that the atomization cones
are tilting in the same direction as the direction of flow of
carrier gas. Referring to FIG. 17, an ultrasonic transducer disc
120 is shown. The ultrasonic transducer disc 120 is tilted at a
tilt angle 114 (typically less than 10 degrees), so that the
atomization cone 162 will also have a tilt. It is preferred that
the direction of flow of the carrier gas 104 directed at the
atomization cone 162 is in the same direction as the tilt of the
atomization cone 162.
[0100] Referring now to FIGS. 18 and 19, a gas manifold 220 is
shown for distributing gas to the gas tubes 208 in a 400 transducer
array design. The gas manifold 220 includes a gas distribution box
222 and piping stubs 224 for connection with gas tubes 208 (shown
in FIG. 11). Inside the gas distribution box 222 are two gas
distribution plates 226 that form a flow path to assist in
distributing the gas equally throughout the gas distribution box
222, to promote substantially equal delivery of gas through the
piping stubs 224. The gas manifold 220, as shown in FIGS. 18 and
19, is designed to feed eleven gas tubes 208. For the 400
transducer design, a total of four gas manifolds 220 are
required.
[0101] Referring now to FIGS. 20 and 21, the generator lid 140 is
shown for a 400 transducer array design. The generator lid 140
mates with and covers the liquid feed box 190 (shown in FIGS. 9 and
10). The generator lid 140, as shown in FIGS. 20 and 21, has a hood
design to permit easy collection of the aerosol 108 without
subjecting droplets in the aerosol 108 to sharp edges on which
droplets may coalesce and be lost, and possibly interfere with the
proper operation of the aerosol generator 106. When the aerosol
generator 106 is in operation, the aerosol 108 would be withdrawn
via the aerosol exit opening 164 through the generator cover
140.
[0102] It is important that the aerosol stream that is fed to the
furnace 110 have a high droplet flow rate and high droplet loading
as would be required for most industrial applications. With the
present invention, the aerosol stream fed to the furnace preferably
includes a droplet flow of greater than about 0.5 liters per hour,
more preferably greater than about 2 liters per hour, still more
preferably greater than about 5 liters per hour, even more
preferably greater than about 10 liters per hour, particularly
greater than about 50 liters per hour and most preferably greater
than about 100 liters per hour; and with the droplet loading being
typically greater than about 0.04 milliliters of droplets per liter
of carrier gas, preferably greater than about 0.083 milliliters of
droplets per liter of carrier gas 104, more preferably greater than
about 0.167 milliliters of droplets per liter of carrier gas 104,
still more preferably greater than about 0.25 milliliters of
droplets per liter of carrier gas 104, particularly greater than
about 0.33 milliliters of droplets per liter of carrier gas 104 and
most preferably greater than about 0.83 milliliters of droplets per
liter of carrier gas 104.
[0103] As discussed previously, the aerosol generator 106 of the
present invention produces a concentrated, high quality aerosol of
micro-sized droplets having a relatively narrow size distribution.
However, the process of the present invention can be enhanced by
further classifying by size the droplets in the aerosol 108 prior
to introduction of the droplets into the furnace 110. In this
manner, the size and size distribution of particles in the
particulate product 116 are further controlled.
[0104] Referring now to FIG. 22, a process flow diagram is shown
for one embodiment of the process of the present invention
including such droplet classification. As shown in FIG. 22, the
aerosol 108 from the aerosol generator 106 goes to a droplet
classifier 280 where oversized droplets are removed from the
aerosol 108 to prepare a classified aerosol 282. Liquid 284 from
the oversized droplets that are being removed is drained from the
droplet classifier 280. This drained liquid 284 may advantageously
be recycled for use in preparing additional liquid feed 102.
[0105] Any suitable droplet classifier may be used for removing
droplets above a predetermined size. For example, a cyclone could
be used to remove over-size droplets. A preferred droplet
classifier for many applications, however, is an impactor. One
embodiment of an impactor for use with the present invention will
now be described with reference to FIGS. 23-27.
[0106] As seen in FIG. 23, an impactor 288 has disposed in a flow
conduit 286 a flow control plate 290 and an impactor plate assembly
292. The flow control plate 290 is conveniently mounted on a
mounting plate 294.
[0107] The flow control plate 290 is used to channel the flow of
the aerosol stream toward the impactor plate assembly 292 in a
manner with controlled flow characteristics that are desirable for
proper impaction of oversize droplets on the impactor plate
assembly 292 for removal through the drains 296 and 314. One
embodiment of the flow control plate 290 is shown in FIG. 24. The
flow control plate 290 has an array of circular flow ports 296 for
channeling flow of the aerosol 108 towards the impactor plate
assembly 292 with the desired flow characteristics.
[0108] Details of the mounting plate 294 are shown in FIG. 25. The
mounting plate 294 has a mounting flange 298 with a large diameter
flow opening 300 passing therethrough to permit access of the
aerosol 108 to the flow ports 296 of the flow control plate 290
(shown in FIG. 24).
[0109] Referring now to FIGS. 26 and 27, one embodiment of an
impactor plate assembly 292 is shown. The impactor plate assembly
292 includes an impactor plate 302 and mounting brackets 304 and
306 used to mount the impactor plate 302 inside of the flow conduit
286. The impactor plate 302 and the flow channel plate 290 are
designed so that droplets larger than a predetermined size will
have momentum that is too large for those particles to change flow
direction to navigate around the impactor plate 302.
[0110] During operation of the impactor 288, the aerosol 108 from
the aerosol generator 106 passes through the upstream flow control
plate 290. Most of the droplets in the aerosol navigate around the
impactor plate 302 and exit the impactor 288 through the downstream
flow control plate 290 in the classified aerosol 282. Droplets in
the aerosol 108 that are too large to navigate around the impactor
plate 302 will impact on the impactor plate 302 and drain through
the drain 296 to be collected with the drained liquid 284 (as shown
in FIG. 23).
[0111] The configuration of the impactor plate 302 shown in FIG. 22
represents only one of many possible configurations for the
impactor plate 302. For example, the impactor 288 could include an
upstream flow control plate 290 having vertically extending flow
slits therethrough that are offset from vertically extending flow
slits through the impactor plate 302, such that droplets too large
to navigate the change in flow due to the offset of the flow slits
between the flow control plate 290 and the impactor plate 302 would
impact on the impactor plate 302 to be drained away. Other designs
are also possible.
[0112] In a preferred embodiment of the present invention, the
droplet classifier 280 is typically designed to remove droplets
from the aerosol 108 that are larger than about 15 .mu.m, more
preferably to remove droplets larger than about 10 .mu.m, even more
preferably to remove droplets of a size larger than about 8 .mu.m
and most preferably to remove droplets larger than about 5 .mu.m.
The droplet classification size in the droplet classifier is
preferably smaller than about 15 .mu.m, more preferably smaller
than about 10 .mu.m, even more preferably smaller than about 8
.mu.m and most preferably smaller than about 5 .mu.m. The
classification size, also called the classification cut point, is
that size at which half of the droplets of that size are removed
and half of the droplets of that size are retained. Depending upon
the specific application, however, the droplet classification size
may be varied, such as by changing the spacing between the impactor
plate 302 and the flow control plate 290 or increasing or
decreasing aerosol velocity through the jets in the flow control
plate 290. Because the aerosol generator 106 of the present
invention initially produces a high quality aerosol 108, having a
relatively narrow size distribution of droplets, typically less
than about 30 weight percent of liquid feed 102 in the aerosol 108
is removed as the drain liquid 284 in the droplet classifier 288,
with preferably less than about 25 weight percent being removed,
even more preferably less than about 20 weight percent being
removed and most preferably less than about 15 weight percent being
removed. Minimizing the removal of liquid feed 102 from the aerosol
108 is particularly important for commercial applications to
increase the yield of high quality particulate product 116. It
should be noted, however, that because of the superior performance
of the aerosol generator 106, it is typically not required to use
an impactor or other droplet classifier to obtain a suitable
aerosol. This is a major advantage, because the added complexity
and liquid losses accompanying use of an impactor may often be
avoided with the process of the present invention.
[0113] With some applications of the process of the present
invention, it may be possible to collect the glass particles 112
directly from the output of the furnace 110. More often, however,
it will be desirable to cool the glass particles 112 exiting the
furnace 110 prior to collection of the particles 112 in the
particle collector 114. Referring now to FIG. 28, one embodiment of
the process of the present invention is shown in which the
particles 112 exiting the furnace 110 are sent to a particle cooler
320 to produce a cooled particle stream 322, which is then fed to
the particle collector 114. Although the particle cooler 320 may be
any cooling apparatus capable of cooling the particles 112 to the
desired temperature for introduction into the particle collector
114, traditional heat exchanger designs are not preferred. This is
because a traditional heat exchanger design ordinarily directly
subjects the aerosol stream, in which the hot particles 112 are
suspended, to cool surfaces. In that situation, significant losses
of the particles 112 occur due to thermophoretic deposition of the
hot particles 112 on the cool surfaces of the heat exchanger.
According to the present invention, a gas quench apparatus is
provided for use as the particle cooler 320 that significantly
reduces thermophoretic losses compared to a traditional heat
exchanger.
[0114] Referring now to FIGS. 29-31, one embodiment of a gas quench
cooler 330 is shown. The gas quench cooler includes a perforated
conduit 332 housed inside of a cooler housing 334 with an annular
space 336 located between the cooler housing 334 and the perforated
conduit 332. In fluid communication with the annular space 336 is a
quench gas inlet box 338, inside of which is disposed a portion of
an aerosol outlet conduit 340. The perforated conduit 332 extends
between the aerosol outlet conduit 340 and an aerosol inlet conduit
342. Attached to an opening into the quench gas inlet box 338 are
two quench gas feed tubes 344. Referring specifically to FIG. 31,
the perforated tube 332 is shown. The perforated tube 332 has a
plurality of openings 345. The openings 345, when the perforated
conduit 332 is assembled into the gas quench cooler 330, permit the
flow of quench gas 346 from the annular space 336 into the interior
space 348 of the perforated conduit 332. Although the openings 345
are shown as being round holes, any shape of opening could be used,
such as slits. Also, the perforated conduit 332 could be a porous
screen. Two heat radiation shields 347 prevent downstream radiant
heating from the furnace. In most instances, however, it will not
be necessary to include the heat radiation shields 347, because
downstream radiant heating from the furnace is normally not a
significant problem. Use of the heat radiation shields 347 is not
preferred due to particulate losses that accompany their use.
[0115] With continued reference to FIGS. 29-31, operation of the
gas quench cooler 330 will now be described. During operation, the
particles 112, carried by and dispersed in a gas stream, enter the
gas quench cooler 330 through the aerosol inlet conduit 342 and
flow into the interior space 348 of perforated conduit 332. Quench
gas 346 is introduced through the quench gas feed tubes 344 into
the quench gas inlet box 338. Quench gas 346 entering the quench
gas inlet box 338 encounters the outer surface of the aerosol
outlet conduit 340, forcing the quench gas 346 to flow, in a
spiraling, swirling manner, into the annular space 336, where the
quench gas 346 flows through the openings 345 through the walls of
the perforated conduit 332. Preferably, the gas 346 retains some
swirling motion even after passing into the interior space 348. In
this way, the particles 112 are quickly cooled with low losses of
particles to the walls of the gas quench cooler 330. In this
manner, the quench gas 346 enters in a radial direction into the
interior space 348 of the perforated conduit 332 around the entire
periphery, or circumference, of the perforated conduit 332 and over
the entire length of the perforated conduit 332. The cool quench
gas 346 mixes with and cools the hot particles 112, which then exit
through the aerosol outlet conduit 340 as the cooled particle
stream 322. The cooled particle stream 322 can then be sent to the
particle collector 114 for particle collection. The temperature of
the cooled particle stream 322 is controlled by introducing more or
less quench gas. Also, as shown in FIG. 29, the quench gas 346 is
fed into the quench cooler 330 in counter flow to flow of the
particles. Alternatively, the quench cooler could be designed so
that the quench gas 346 is fed into the quench cooler in concurrent
flow with the flow of the particles 112. The amount of quench gas
346 fed to the gas quench cooler 330 will depend upon the specific
material being made and the specific operating conditions. The
quantity of quench gas 346 used, however, must be sufficient to
reduce the temperature of the aerosol steam including the particles
112 to the desired temperature. Typically, the particles 112 are
cooled to a temperature at least below about 200.degree. C., and
often lower. The only limitation on how much the particles 112 are
cooled is that the cooled particle stream 322 must be at a
temperature that is above the condensation temperature for water as
another condensible vapor in the stream. The temperature of the
cooled particle stream 322 is often at a temperature of from about
50.degree. C. to about 120.degree. C.
[0116] Because of the entry of quench gas 346 into the interior
space 348 of the perforated conduit 322 in a radial direction about
the entire circumference and length of the perforated conduit 322,
a buffer of the cool quench gas 346 is formed about the inner wall
of the perforated conduit 332, thereby significantly inhibiting the
loss of hot particles 112 due to thermophoretic deposition on the
cool wall of the perforated conduit 332. In operation, the quench
gas 346 exiting the openings 345 and entering into the interior
space 348 should have a radial velocity (velocity inward toward the
center of the circular cross-section of the perforated conduit 332)
of larger than the thermophoretic velocity of the particles 112
inside the perforated conduit 332 in a direction radially outward
toward the perforated wall of the perforated conduit 332.
[0117] As seen in FIGS. 29-31, the gas quench cooler 330 includes a
flow path for the particles 112 through the gas quench cooler of a
substantially constant cross-sectional shape and area. Preferably,
the flow path through the gas quench cooler 330 will have the same
cross-sectional shape and area as the flow path through the furnace
110 and through the conduit delivering the aerosol 108 from the
aerosol generator 106 to the furnace 110. In one embodiment,
however, it may be necessary to reduce the cross-sectional area
available for flow prior to the particle collector 114. This is the
case, for example, when the particle collector includes a cyclone
for separating particles in the cooled particle stream 322 from gas
in the cooled particle stream 322. This is because of the high
inlet velocity requirements into cyclone separators.
[0118] Referring now to FIG. 32, one embodiment of the gas quench
cooler 330 is shown in combination with a cyclone separator 392.
The perforated conduit 332 has a continuously decreasing
cross-sectional area for flow to increase the velocity of flow to
the proper value for the feed to cyclone separator 392. Attached to
the cyclone separator 392 is a bag filter 394 for final clean-up of
overflow from the cyclone separator 392. Separated particles exit
with undertow from the cyclone separator 392 and may be collected
in any convenient container. The use of cyclone separation is
particularly preferred for glass powder batches having a weight
average size of larger than about 1 .mu.m, although a series of
cyclones may be needed to obtain the desired degree of separation.
Cyclone separation is particularly preferred for powders having a
weight average size of larger than about 1.5 .mu.m.
[0119] In an additional embodiment, the process of the present
invention can also incorporate compositional modification of the
glass particles 112 exiting the furnace. Most commonly, the
compositional modification will involve forming on the glass
particles 112 a material phase that is different than that of the
particles 112, such as by coating the glass particles 112 with a
coating material. One embodiment of the process of the present
invention incorporating particle coating is shown in FIG. 33. As
shown in FIG. 33, the glass particles 112 exiting from the furnace
110 go to a particle coater 350 where a coating is placed over the
outer surface of the glass particles 112 to form coated particles
352, which are then sent to the particle collector 114 for
preparation of the particulate product 116. Coating methodologies
employed in the particle coater 350 are discussed in more detail
below.
[0120] With continued reference primarily to FIG. 33, in a
preferred embodiment, when the particles 112 are coated according
to the process of the present invention, the particles 112 are also
manufactured via the aerosol process of the present invention, as
previously described. The process of the present invention can,
however, be used to coat particles that have been premanufactured
by a different process. When coating particles that have been
premanufactured by a different route, such as by liquid
precipitation, it is preferred that the particles remain in a
dispersed state from the time of manufacture to the time that the
particles are introduced in slurry form into the aerosol generator
106 for preparation of the aerosol 108 to form the dry particles
112 in the furnace 110, which particles 112 can then be coated in
the particle coater 350. Maintaining particles in a dispersed state
from manufacture through coating avoids problems associated with
agglomeration and redispersion of particles if particles must be
redispersed in the liquid feed 102 for feed to the aerosol
generator 106. For example, for particles originally precipitated
from a liquid medium, the liquid medium containing the suspended
precipitated glass particles could be used to form the liquid feed
102 to the aerosol generator 106. It should be noted that the
particle coater 350 could be an integral extension of the furnace
110 or could be a separate piece of equipment.
[0121] In a further embodiment of the present invention, following
preparation of the particles 112 in the furnace 110, the particles
112 may then be structurally modified to impart desired physical
properties prior to particle collection. Referring now to FIG. 34,
one embodiment of the process of the present invention is shown
including such structural particle modification. The particles 112
exiting the furnace 110 go to a particle modifier 360 where the
particles are structurally modified to form modified particles 362,
which are then sent to the particle collector 114 for preparation
of the particulate product 116. The particle modifier 360 is
typically a furnace, such as an annealing furnace, which may be
integral with the furnace 110 or may be a separate heating device.
Regardless, it is important that the particle modifier 360 have
temperature control that is independent of the furnace 110, so that
the proper conditions for particle modification may be provided
separate from conditions required of the furnace 110 to prepare the
glass particles 112. The particle modifier 360, therefore,
typically provides a temperature controlled environment and
necessary residence time to effect the desired structural
modification of the particles 112.
[0122] The structural modification that occurs in the particle
modifier 360 may be any modification to the structure or morphology
of the particles 112. For example, the particles 112 may be
annealed in the particle modifier 360 to densify the glass
particles 112 or to recrystallize the glass particles 112 into a
polycrystalline form.
[0123] The initial morphology of composite particles made in the
furnace 110, according to the present invention, could take a
variety of forms, depending upon the specified materials involved
and the specific processing conditions. Examples of some possible
composite particle morphologies, manufacturable according to the
present invention are shown in FIG. 35. These morphologies could be
of the particles as initially produced in the furnace 110 or that
result from structural modification in the particle modifier 360.
Furthermore, the composite particles could include a mixture of the
morphological attributes shown in FIG. 35.
[0124] Aerosol generation with the process of the present invention
has thus far been described with respect to the ultrasonic aerosol
generator. Use of the ultrasonic generator is preferred for the
process of the present invention because of the extremely high
quality and dense aerosol generated. In some instances, however,
the aerosol generation for the process of the present invention may
have a different design depending upon the specific application.
For example, when larger particles are desired, such as those
having a weight average size of larger than about 3 .mu.m, a spray
nozzle atomizer may be preferred. For smaller-particle
applications, however, and particularly for those applications to
produce particles smaller than about 3 .mu.m, as is generally
desired with the particles of the present invention, an ultrasonic
generator, as described herein, is particularly preferred. In that
regard, the ultrasonic generator of the present invention is
particularly preferred for when making particles with a weight
average size of from about 0.1 .mu.m to about 3 .mu.m.
[0125] Although ultrasonic aerosol generators have been used for
medical applications and home humidifiers, use of ultrasonic
generators for spray pyrolysis particle manufacture has largely
been confined to small-scale, experimental situations. The
ultrasonic aerosol generator of the present invention described
with reference to FIGS. 2-21, however, is well suited for
commercial production of high quality powders with a small average
size and a narrow size distribution. In that regard, the aerosol
generator produces a high quality aerosol, with heavy droplet
loading and at a high rate of production. Such a combination of
small droplet size, narrow size distribution, heavy droplet
loading, and high production rate provide significant advantages
over existing aerosol generators that usually suffer from at least
one of inadequately narrow size distribution, undesirably low
droplet loading, or unacceptably low production rate.
[0126] Through the careful and controlled design of the ultrasonic
generator of the present invention, an aerosol may be produced
typically having greater than about 70 weight percent (and
preferably greater than about 80 weight percent) of droplets in the
size range of from about 1 .mu.m to about 10 .mu.m, preferably in a
size range of from about 1 .mu.m to about 5 .mu.m and more
preferably from about 2 .mu.m to about 4 .mu.m. Also, the
ultrasonic generator of the present invention is capable of
delivering high output rates of liquid feed in the aerosol. The
rate of liquid feed, at the high liquid loadings previously
described, is preferably greater than about 25 milliliters per hour
per transducer, more preferably greater than about 37.5 milliliters
per hour per transducer, even more preferably greater than about 50
milliliters per hour per transducer and most preferably greater
than about 100 millimeters per hour per transducer. This high level
of performance is desirable for commercial operations and is
accomplished with the present invention with a relatively simple
design including a single precursor bath over an array of
ultrasonic transducers. The ultrasonic generator is made for high
aerosol production rates at a high droplet loading, and with a
narrow size distribution of droplets. The generator preferably
produces an aerosol at a rate of greater than about 0.5 liter per
hour of droplets, more preferably greater than about 2 liters per
hour of droplets, still more preferably greater than about 5 liters
per hour of droplets, even more preferably greater than about 10
liters per hour of droplets and most preferably greater than about
40 liters per hour of droplets. For example, when the aerosol
generator has a 400 transducer design, as described with reference
to FIGS. 4-21, the aerosol generator is capable of producing a high
quality aerosol having high droplet loading as previously
described, at a total production rate of preferably greater than
about 10 liters per hour of liquid feed, more preferably greater
than about 15 liters per hour of liquid feed, even more preferably
greater than about 20 liters per hour of liquid feed and most
preferably greater than about 40 liters per hour of liquid
feed.
[0127] Under most operating conditions, when using such an aerosol
generator, total particulate product produced is preferably greater
than about 0.5 gram per hour per transducer, more preferably
greater than about 0.75 gram per hour per transducer, even more
preferably greater than about 1.0 gram per hour per transducer and
most preferably greater than about 2.0 grams per hour per
transducer.
[0128] One significant aspect of the process of the present
invention for manufacturing particulate materials is the unique
flow characteristics encountered in the furnace relative to
laboratory scale systems. The maximum Reynolds number attained for
flow in the furnace 110 with the present invention is very high,
typically in excess of 500, preferably in excess of 1,000 and more
preferably in excess of 2,000. In most instances, however, the
maximum Reynolds number for flow in the furnace will not exceed
10,000, and preferably will not exceed 5,000. This is significantly
different from lab-scale systems where the Reynolds number for flow
in a reactor is typically lower than 50 and rarely exceeds 100.
[0129] The Reynolds number is a dimensionless quantity
characterizing flow of a fluid which, for flow through a circular
cross sectional conduit is defined as:
Re = .rho. vd .mu. ##EQU00001## [0130] where: .rho.=fluid density;
[0131] v=fluid mean velocity; [0132] d=conduit inside diameter; and
[0133] .mu.=fluid viscosity. It should be noted that the values for
density, velocity and viscosity will vary along the length of the
furnace 110. The maximum Reynolds number in the furnace 110 is
typically attained when the average stream temperature is at a
maximum, because the gas velocity is at a very high value due to
gas expansion when heated.
[0134] One problem with operating under flow conditions at a high
Reynolds number is that undesirable volatilization of components is
much more likely to occur than in systems having flow
characteristics as found in laboratory-scale systems. The
volatilization problem occurs with the present invention, because
the furnace is typically operated over a substantial section of the
heating zone in a constant wall heat flux mode, due to limitations
in heat transfer capability. This is significantly different than
operation of a furnace at a laboratory scale, which typically
involves operation of most of the heating zone of the furnace in a
uniform wall temperature mode, because the heating load is
sufficiently small that the system is not heat transfer
limited.
[0135] With the present invention, it is typically preferred to
heat the aerosol stream in the heating zone of the furnace as
quickly as possible to the desired temperature range for particle
manufacture. Because of flow characteristics in the furnace and
heat transfer limitations, during rapid heating of the aerosol the
wall temperature of the furnace can significantly exceed the
maximum average target temperature for the stream. This is a
problem because, even though the average stream temperature may be
within the range desired, the wall temperature may become so hot
that components in the vicinity of the wall are subjected to
temperatures high enough to undesirably volatilize the components.
This volatilization near the wall of the furnace can cause
formation of significant quantities of ultrafine particles that are
outside of the size range desired.
[0136] Therefore, with the present invention, it is preferred that
when the flow characteristics in the furnace are such that the
Reynolds number through any part of the furnace exceeds 500, more
preferably exceeds 1,000, and most preferably exceeds 2,000, the
maximum wall temperature in the furnace should be kept at a
temperature that is below the temperature at which a desired
component of the final particles would exert a vapor pressure not
exceeding about 200 millitorr, more preferably not exceeding about
100 millitorr, and most preferably not exceeding about 50
millitorr. Furthermore, the maximum wall temperature in the furnace
should also be kept below a temperature at which an intermediate
component, from which a final component is to be at least partially
derived, should also have a vapor pressure not exceeding the
magnitudes noted for components of the final product.
[0137] In addition to maintaining the furnace wall temperature
below a level that could create volatilization problems, it is also
important that this not be accomplished at the expense of the
desired average stream temperature. The maximum average stream
temperature must be maintained at a high enough level so that the
particles will have a desired high density. The maximum average
stream temperature should, however, generally be a temperature at
which a component in the final particles, or an intermediate
component from which a component in the final particles is at least
partially derived, would exert a vapor pressure not exceeding about
100 millitorr, preferably not exceeding about 50 millitorr, and
most preferably not exceeding about 25 millitorr.
[0138] So long as the maximum wall temperature and the average
stream temperature are kept below the point at which detrimental
volatilization occurs, it is generally desirable to heat the stream
as fast as possible and to remove resulting particles from the
furnace immediately after the maximum stream temperature is reached
in the furnace. With the present invention, the average residence
time in the heating zone of the furnace may typically be maintained
at shorter than about 4 seconds, preferably shorter than about 2
seconds, more preferably shorter than about 1 second, still more
preferably shorter than about 0.5 second, and most preferably
shorter than about 0.2 second.
[0139] Another significant issue with respect to operating the
process of the present invention, which includes high aerosol flow
rates, is loss within the system of materials intended for
incorporation into the final particulate product. Material losses
in the system can be quite high if the system is not properly
operated. If system losses are too high, the process would not be
practical for use in the manufacture of particulate products of
many materials. This has typically not been a major consideration
with laboratory-scale systems.
[0140] One significant potential for loss with the process of the
present invention is thermophoretic losses that occur when a hot
aerosol stream is in the presence of a cooler surface. In that
regard, the use of the quench cooler, as previously described, with
the process of the present invention provides an efficient way to
cool the particles without unreasonably high thermophoretic losses.
There is also, however, significant potential for losses occurring
near the end of the furnace and between the furnace and the cooling
unit.
[0141] It has been found that thermophoretic losses in the back end
of the furnace can be significantly controlled if the heating zone
of the furnace is operated such that the maximum stream temperature
is not attained until near the end of the heating zone in the
furnace, and at least not until the last third of the heating zone.
When the heating zone includes a plurality of heating sections, the
maximum average stream temperature should ordinarily not occur
until at least the last heating section. Furthermore, the heating
zone should typically extend to as close to the exit of the furnace
as possible. This is counter to conventional thought which is to
typically maintain the exit portion of the furnace at a low
temperature to avoid having to seal the furnace outlet at a high
temperature. Such cooling of the exit portion of the furnace,
however, significantly promotes thermophoretic losses. Furthermore,
the potential for operating problems that could result in
thermophoretic losses at the back end of the furnace are reduced
with the very short residence times in the furnace for the present
invention, as discussed previously.
[0142] Typically, it would be desirable to instantaneously cool the
aerosol upon exiting the furnace. This is not possible. It is
possible, however, to make the residence time between the furnace
outlet and the cooling unit as short as possible. Furthermore, it
is desirable to insulate the aerosol conduit occurring between the
furnace exit and the cooling unit entrance. Even more preferred is
to insulate that conduit and, even more preferably, to also heat
that conduit so that the wall temperature of that conduit is at
least as high as the average stream temperature of the aerosol
stream. Furthermore, it is desirable that the cooling unit operate
in a manner such that the aerosol is quickly cooled in a manner to
prevent thermophoretic losses during cooling. The quench cooler,
described previously, is very effective for cooling with low
losses. Furthermore, to keep the potential for thermophoretic
losses very low, it is preferred that the residence time of the
aerosol stream between attaining the maximum stream temperature in
the furnace and a point at which the aerosol has been cooled to an
average stream temperature below about 200.degree. C. is shorter
than about 2 seconds, more preferably shorter than about 1 second,
and even more preferably shorter than about 0.5 second and most
preferably shorter than about 0.1 second. In most instances, the
maximum average stream temperature attained in the furnace will be
greater than about 800.degree. C. Furthermore, the total residence
time from the beginning of the heating zone in the furnace to a
point at which the average stream temperature is at a temperature
below about 200.degree. C. should typically be shorter than about 5
seconds, preferably shorter than about 3 seconds, more preferably
shorter than about 2 seconds, and most preferably shorter than
about 1 second.
[0143] Another part of the process with significant potential for
thermophoretic losses is after particle cooling until the particles
are finally collected. Proper particle collection is very important
to reducing losses within the system. The potential for
thermophoretic losses is significant following particle cooling
because the aerosol stream is still at an elevated temperature to
prevent detrimental condensation of water in the aerosol stream.
Therefore, cooler surfaces of particle collection equipment can
result in significant thermophoretic losses.
[0144] To reduce the potential for thermophoretic losses before the
particles are finally collected, it is important that the
transition between the cooling unit and particle collection be as
short as possible. Preferably, the output from the quench cooler is
immediately sent to a particle separator, such as a filter unit or
a cyclone. In that regard, the total residence time of the aerosol
between attaining the maximum average stream temperature in the
furnace and the final collection of the particles is preferably
shorter than about 2 seconds, more preferably shorter than about 1
second, still more preferably shorter than about 0.5 second and
most preferably shorter than about 0.1 second. Furthermore, the
residence time between the beginning of the heating zone in the
furnace and final collection of the particles is preferably shorter
than about 6 seconds, more preferably shorter than about 3 seconds,
even more preferably shorter than about 2 seconds, and most
preferably shorter than about 1 second. Furthermore, the potential
for thermophoretic losses may further be reduced by insulating the
conduit section between the cooling unit and the particle collector
and, even more preferably, by also insulating around the filter,
when a filter is used for particle collection. The potential for
losses may be reduced even further by heating of the conduit
section between the cooling unit and the particle collection
equipment, so that the internal equipment surfaces are at least
slightly warmer than the aerosol stream average stream temperature.
Furthermore, when a filter is used for particle collection, the
filter could be heated. For example, insulation could be wrapped
around a filter unit, with electric heating inside of the
insulating layer to maintain the walls of the filter unit at a
desired elevated temperature higher than the temperature of filter
elements in the filter unit, thereby reducing thermophoretic
particle losses to walls of the filter unit.
[0145] Even with careful operation to reduce thermophoretic losses,
some losses will still occur. For example, some particles will
inevitably be lost to walls of particle collection equipment, such
as the walls of a cyclone or filter housing. One way to reduce
these losses, and correspondingly increase product yield, is to
periodically wash the interior of the particle collection equipment
to remove particles adhering to the sides. In most cases, the wash
fluid will be water, unless water would have a detrimental effect
on one of the components of the particles. For example, the
particle collection equipment could include parallel collection
paths. One path could be used for active particle collection while
the other is being washed. The wash could include an automatic or
manual flush without disconnecting the equipment. Alternatively,
the equipment to be washed could be disconnected to permit access
to the interior of the equipment for a thorough wash. As an
alternative to having parallel collection paths, the process could
simply be shut down occasionally to permit disconnection of the
equipment for washing. The removed equipment could be replaced with
a clean piece of equipment and the process could then be resumed
while the disconnected equipment is being washed.
[0146] For example, a cyclone or filter unit could periodically be
disconnected and particles adhering to interior walls could be
removed by a water wash. The particles could then be dried in a low
temperature dryer, typically at a temperature of lower than about
50.degree. C.
[0147] Another area for potential losses in the system, and for the
occurrence of potential operating problems, is between the outlet
of the aerosol generator and the inlet of the furnace. Losses here
are not due to thermophoresis, but rather to liquid coming out of
the aerosol and impinging and collecting on conduit and equipment
surfaces. Although this loss is undesirable from a material yield
standpoint, the loss may be even more detrimental to other aspects
of the process. For example, water collecting on surfaces may
release large droplets that can lead to large particles that
detrimentally contaminate the particulate product. Furthermore, if
accumulated liquid reaches the furnace, the liquid can cause
excessive temperature gradients within the furnace tube, which can
cause furnace tube failure, especially for ceramic tubes. One way
to reduce the potential for undesirable liquid buildup in the
system is to provide adequate drains. In that regard, it is
preferred that a drain be placed as close as possible to the
furnace inlet to prevent liquid accumulations from reaching the
furnace. The drain should be placed, however, far enough in advance
of the furnace inlet such that the stream temperature is lower than
about 80.degree. C. at the drain location.
[0148] Another way to reduce the potential for undesirable liquid
buildup is for the conduit between the aerosol generator outlet and
the furnace inlet to be of a substantially constant cross-sectional
area and configuration. Preferably, the conduit beginning with the
aerosol generator outlet, passing through the furnace and
continuing to at least the cooling unit inlet is of a substantially
constant cross-sectional area and geometry.
[0149] Another way to reduce the potential for undesirable buildup
is to heat at least a portion, and preferably the entire length, of
the conduit between the aerosol generator and the inlet to the
furnace. For example, the conduit could be wrapped with a heating
tape to maintain the inside walls of the conduit at a temperature
higher than the temperature of the aerosol. The aerosol would then
tend to concentrate toward the center of the conduit due to
thermophoresis. Fewer aerosol droplets would, therefore, be likely
to impinge on conduit walls or other surfaces making the transition
to the furnace.
[0150] Another way to reduce the potential for undesirable liquid
buildup is to introduce a dry gas into the aerosol between the
aerosol generator and the furnace. Referring now to FIG. 36, one
embodiment of the process is shown for adding a dry gas 118 to the
aerosol 108 before the furnace 110. Addition of the dry gas 118
causes vaporization of at least a part of the moisture in the
aerosol 108, and preferably substantially all of the moisture in
the aerosol 108, to form a dried aerosol 119, which is then
introduced into the furnace 110.
[0151] The dry gas 118 will most often be dry air, although in some
instances it may be desirable to use dry nitrogen gas or some other
dry gas. If sufficient a sufficient quantity of the dry gas 118 is
used, the droplets of the aerosol 108 are substantially completely
dried to beneficially form dried precursor particles in aerosol
form for introduction into the furnace 110, where the precursor
particles are then pyrolyzed to make a desired particulate product.
Also, the use of the dry gas 118 typically will reduce the
potential for contact between droplets of the aerosol and the
conduit wall, especially in the critical area in the vicinity of
the inlet to the furnace 110. In that regard, a preferred method
for introducing the dry gas 118 into the aerosol 108 is from a
radial direction into the aerosol 108. For example, equipment of
substantially the same design as the quench cooler, described
previously with reference to FIGS. 29-31, could be used, with the
aerosol 108 flowing through the interior flow path of the apparatus
and the dry gas 118 being introduced through perforated wall of the
perforated conduit. An alternative to using the dry gas 118 to dry
the aerosol 108 would be to use a low temperature thermal
preheater/dryer prior to the furnace 110 to dry the aerosol 108
prior to introduction into the furnace 110. This alternative is
not, however, preferred.
[0152] Still another way to reduce the potential for losses due to
liquid accumulation is to operate the process with equipment
configurations such that the aerosol stream flows in a vertical
direction from the aerosol generator to and through the furnace.
For smaller-size particles, those smaller than about 1.5 .mu.m,
this vertical flow should, preferably, be vertically upward. For
larger-size particles, such as those larger than about 1.5 .mu.m,
the vertical flow is preferably vertically downward.
[0153] Furthermore, with the process of the present invention, the
potential for system losses is significantly reduced because the
total system retention time from the outlet of the generator until
collection of the particles is preferably shorter than about 15
seconds, more preferably shorter than about 10 seconds, even more
preferably shorter than about 7 seconds and most preferably shorter
than about 5 seconds.
[0154] For the production of glass particles according to the
present invention, the liquid feed 102 includes at least one metal
oxide precursor for preparation of the glass particles 112. The
metal oxide precursor may be a substance in either a liquid or
solid phase of the liquid feed 102. Typically, the metal oxide
precursor will be a metal-containing compound, such as a metal
salt, dissolved in a liquid solvent of the liquid feed 102. The
metal oxide precursor may undergo one or more chemical reactions in
the furnace 110 to assist in production of the glass particles 112.
Alternatively, the metal oxide precursor may contribute to
formation of the glass particles 112 without undergoing chemical
reaction.
[0155] This could be the case, for example, when the liquid feed
102 includes suspended oxide particles as a precursor material,
such as particulate silica.
[0156] The liquid feed 102 thus includes the chemical components
that will form the glass particles 112. For example, the liquid
feed 102 can comprise a solution containing nitrates, acetates,
chlorides, sulfates, hydroxides, or oxalates of a metal.
Particularly preferred precursor salts include metal nitrates and
metal acetates. These salts are typically highly soluble in water
and the solutions maintain a low viscosity. Metal nitrates are even
more preferred since they do not contain any carbon that can
potentially contaminate the end-product. It may be desirable to
acidify the solution to increase the solubility, such as by adding
hydrochloric acid.
[0157] The precursor solution can also include solid particulates,
for example, the precursor solution can include particulate silica
as a precursor for a silicate glass.
[0158] The solution preferably has a precursor concentration that
is unsaturated to avoid the possibility of undesirable precipitate
formation. The solution preferably includes a soluble precursor to
yield a concentration of from about 1 to about 50 weight percent of
the glass composition, more preferably from about 1 to 20 weight
percent of the glass composition and even more preferably from
about 3 to about 15 weight percent of the glass composition, such
as about 5 to 7.5 weight percent of the glass composition. The
final particle size of the glass particles 112 is also influenced
by the precursor concentration. Generally, lower precursor
concentrations will yield glass particles having a smaller average
particle size.
[0159] Preferably, the solvent is aqueous-based for ease of
operation, although other solvents, such as toluene, may be
desirable. As is disclosed above, the pH of the aqueous-based
solutions can be adjusted to alter the solubility characteristics
of the precursor in the solution or the stability of, for example,
colloid particles in the precursor solution. In addition to the
foregoing, the liquid feed 102 may also include other additives
that contribute to the formation of the particles.
[0160] Thus, the liquid feed 102 may include multiple precursor
materials, which may be present together in a single phase or
separately in multiple phases. For example, the liquid feed 102 may
include multiple precursors in solution in a single liquid vehicle.
Alternatively, one precursor material could be in a solid
particulate phase and a second precursor material could be in a
liquid phase. Also, one precursor material could be in one liquid
phase and a second precursor material could be in a second liquid
phase, such as could be the case for when the liquid feed 102
comprises an emulsion.
[0161] A carrier gas 104 under controlled pressure is introduced to
the aerosol generator to move the droplets away from the generator.
The carrier gas 104 may comprise any gaseous medium in which
droplets produced from the liquid feed 102 may be dispersed in
aerosol form. Also, the carrier gas 104 may be inert, in that the
carrier gas 104 does not participate in formation of the particles
112. Alternatively, the carrier gas 104 may have one or more active
components that contribute to formation of the particles 112. For
the production of glass particles 112, the preferred carrier gas
includes air since it is a low cost gas that can supply sufficient
oxygen to form the glass particles.
[0162] The carrier gas 104 carries the aerosol through a heated
reaction zone, as is discussed above. According to the present
invention, the reaction temperature in the heating zone is
preferably near the softening point of the glass composition to
produce a dense material. To produce porous and/or hollow
materials, the temperature is preferably below the glass transition
temperature of the glass composition. Although the exact
temperature can vary for different glass compositions, it is
generally preferred that the reaction temperature is from about
300.degree. C. to about 1500.degree. C., and more preferably from
about 500.degree. C. to about 800.degree. C. In most instances, it
is preferred that the temperature be at least about 600.degree. C.
to ensure complete reaction of the particles.
[0163] Depending on the reaction temperature, the residence time in
the heating zone can vary. It is preferred however that the
residence time be at least about 2 seconds and typically no more
than about 15 seconds. It is often preferred to adjust the process
parameters to accommodate longer residence times at lower
temperatures to ensure that volatile components such as PbO do not
volatilize from the glass composition.
[0164] To form substantially uniform coatings on the surface of the
glass particles, if desired, a reactive gas composition can be
contacted with the glass particles at an elevated temperature after
the particles have been formed. For example, the reactive gas can
be introduced into the heated reaction zone at the distal end so
that the desired compound, for example a metal, deposits on the
surface of the particles.
[0165] More specifically, the droplets can enter the heated
reaction zone at a first end such that the droplets move through
the heating zone and form the glass particles. At the opposite end
of the heating zone, a reactive gas composition can be introduced
such that the reactive gas composition contacts the glass particles
at an elevated temperature. Alternatively, the reactive gas
composition can be contacted with the heated particles in a
separate heating zone located downstream from the heated reaction
zone.
[0166] Coatings can be generated on the particle surface by a
number of different mechanisms. One or more precursors can vaporize
and fuse to the hot particle surface and thermally react resulting
in the formation of a thin-film coating by chemical vapor
deposition (CVD). Preferred coatings deposited by CVD include
elemental metals. Further, the coating can be formed by physical
vapor deposition (PVD) wherein a coating material physically
deposits on the surface of the particles. Preferred coatings
deposited by PVD include organic materials and elemental metals.
Alternatively, the gaseous precursor can react in the gas phase
forming small particles, for example less than about 5 nanometers
in size, which then diffuse to the larger particle surface and
sinter onto the surface, thus forming a coating. This method is
referred to as gas-to-particle conversion (GPC). Whether such
coating reactions occur by CVD, PVD or GPC is dependent on the
reactor conditions, such as temperature, precursor partial
pressure, water partial pressure and the concentration of particles
in the gas stream. Another possible surface coating method is
surface conversion of the surface of the particles by reaction with
a vapor phase reactant to convert the surface of the glass
particles to a different material than that originally contained in
the particles.
[0167] The coatings are preferably as thin as possible while
maintaining conformity about particle such that the glass surface
is not substantially exposed. For example, coatings can have an
average thickness of not greater than about 200 nanometers,
preferably not greater than about 100 nanometers, and more
preferably not greater than about 50 nanometers. For most
applications, the coating should have an average thickness of at
least about 5 nanometers.
[0168] The structural modification that can occur in the particle
modifier 360 may be any modification to the structure or morphology
of the particles 112. For example, the particles 112 may be
annealed in the particle modifier 360 to densify the particles 112
or to crystallize the glass particles 112 into a polycrystalline
form. Also, the glass particles may be annealed for a sufficient
time to redistribute different material phases within the particles
112 or to alter the thermal properties of the glass.
[0169] The present invention is directed to glass powder batches
wherein the particles constituting the powder batch preferably have
a spherical morphology. Advantageously, the powders can also have a
small average particle size and a narrow particle size
distribution. It is preferred that the powders are also
substantially unagglomerated and have a high purity. The powders
according to the present invention are useful for a number of
applications including use in thick film pastes for microelectronic
applications.
[0170] The glass powder batches according to the present invention
include a commercially useful quantity of glass particles. The
glass particles preferably include at least a first glass phase.
The glass phase can include any glass composition and the
particularly preferred glass composition will depend upon the
application of the powder.
[0171] According to one embodiment, the glass particles preferably
include at least about 80 weight percent glass, and depending upon
the application, preferably include at least about 90 weight
percent glass and even more preferably at least about 95 weight
percent glass. In one preferred embodiment, the particles include
at least about 99 weight percent glass, that is, not greater than
about 1 weight percent of a crystalline phase.
[0172] Glass compositions can vary and include many components. The
following description of preferred glasses is by way of example,
and is not meant to limit the present invention to specific
glasses. The most common types of glasses are oxide glasses, which
can generally be categorized as: silicates, based on SiO.sub.2, and
including sub-groups such as aluminosilicates; borates, based on
B.sub.2O.sub.3; phosphates, based on P.sub.2O.sub.5; and
germanates, based on GeO.sub.2. The foregoing oxides are commonly
referred to as the glass-formers. The structure of the glass can be
modified through the addition of intermediate oxides, such as
Al.sub.2O.sub.3, Bi.sub.2O.sub.3 and PbO. At high concentrations,
these intermediate oxides can also be considered glass-formers.
Glass compositions can also be modified by the addition of one or
more alkali (e.g., Li, Na, K, Rb, Cs) oxides and alkaline earth
(e.g., Mg, Ca, Sr, Ba) oxides. Non-oxide glass compositions, such
as halide glasses and chalcogenide glasses, are used for specific
applications.
[0173] The present invention is particularly applicable to complex
glass compositions, which are those glass compositions that include
at least two components in non-trivial amounts, for example ternary
and quaternary glass compositions.
[0174] The silicate-based glasses are the most common and are
preferred according to the present invention. A particularly
preferred glass for some microelectronic applications are the
dielectric borosilicate glasses, comprising at least SiO.sub.2 and
B.sub.2O.sub.3, such as the lead borosilicate glasses that also
include PbO. An example of such a complex dielectric glass is given
in Table I.
TABLE-US-00001 TABLE I Typical Dielectric Glass Composition
Component Range (wt. %) PbO 50-74 B.sub.2O.sub.3 10-25 SiO.sub.2
8-26 Al.sub.2O.sub.3 0-5 CaO 0-6 MgO 0-4 Na.sub.2O 0-5
[0175] The weight percent of the individual components of the glass
detailed in Table I can be selected to alter the properties of the
glass, such as the dielectric constant, thermal expansion
coefficient, glass transition temperature and the like. Specific
examples of borosilicate glasses which are useful for electronic
applications include those disclosed in U.S. Pat. No. 4,613,560 by
Dueber et al.; U.S. Pat. No. 5,032,478 by Nebe et al.; U.S. Pat.
No. 5,032,490 by Nebe et al.; and U.S. Pat. No. 5,173,457 by
Shorthouse. Each of the foregoing U.S. Patents disclosing
borosilicate glass compositions is incorporated herein by reference
in their entirety.
[0176] Also preferred according to an embodiment of the present
invention are the aluminosilicate glasses which include at least
SiO.sub.2 and Al.sub.2O.sub.3. A typical composition for an
aluminosilicate glass is listed in Table II.
TABLE-US-00002 TABLE II Typical Aluminosilicate Glass Composition
Component Range (wt. %) SiO.sub.2 54-55 CaO 13-15 BaO 3-4
B.sub.2O.sub.3 6-8 Al.sub.2O.sub.3 20-22
[0177] A specific example of an aluminosilicate glass is disclosed
in U.S. Pat. No. 4,598,037 by Felten. It will be appreciated by
those skilled in the art that combinations of the foregoing glasses
also occur in the art. For example, aluminoborosilicate glasses are
known, as is disclosed in U.S. Pat. No. 4,820,661 by Nair and U.S.
Pat. No. 5,173,457 by Shorthouse. Each of the foregoing U.S.
patents disclosing aluminosilicate and alumino borosilicate glasses
are incorporated herein by reference in their entirety.
[0178] It is an advantage of the present invention that the glass
composition within the particles is homogeneous and well mixed on
the atomic level and has substantially no phase segregation of the
different phases in the particle. Such a high degree of homogeneity
in complex glasses is often not obtainable by traditional forming
methods, such as sol-gel or liquid precipitation. However, it may
be desirable for some applications that the particles consist of
two or more distinct phases, and such a composition can also be
formed according to the present invention.
[0179] Typically, the complex glass composition will be formed from
a liquid solution which includes both a glass-former precursor
(e.g. SiO.sub.2) and a precursor for the intermediate oxides and/or
glass modifiers. The weight percentage of the different components
can be adjusted by changing the relative ratios of precursors in
the liquid precursor solution.
[0180] The glass powders according to one embodiment of the present
invention include glass particles having a small average particle
size. Although the preferred average size of the particles will
vary according to the particular application of the powder, the
weight average particle size of the particles is at least about
0.05 .mu.m, preferably is at least about 0.1 .mu.m and more
preferably is at least about 0.3 .mu.m. Further, according to this
embodiment, the average particle size is preferably not greater
than about 10 .mu.m. More preferably the weight average particle
size is not greater than about 5 .mu.m, particularly not greater
than about 3 .mu.m.
[0181] Although such small average particle sizes are preferred for
some applications, the present invention is also applicable to
glass powders having a larger average particle size, such as up to
about 20 .mu.m. Such glass powders can advantageously be produced
according to the present invention using, for example, a
nozzle-type atomizer to produce an aerosol stream with increased
aerosol droplet size.
[0182] According to a preferred embodiment of the present
invention, the powder batch of glass particles has a narrow
particle size distribution, such that the majority of glass
particles are about the same size. Preferably, at least about 80
weight percent and more preferably at least about 90 weight percent
of the particles are not larger than twice the weight average
particle size. Thus, when the average particle size is about 2
.mu.m, it is preferred that at least about 80 weight percent of the
particles are not larger than 4 .mu.m. Further, it is preferred
that at least about 80 weight percent of the particles are not
larger than about 1.5 times the weight average particle size. In a
more preferred embodiment, at least about 90 weight percent of the
particles are not larger than 1.5 times the average particle size.
Thus, when the average particle size is about 2 .mu.m, it is
preferred that at least about 80 weight percent of the particles
are not larger than 3 .mu.m.
[0183] It is also possible according to the present invention to
provide a glass powder batch having a bimodal particle size
distribution. That is, the powder batch can include particles
having two distinct and different average particle sizes. A bimodal
particle size distribution can enhance the packing efficiency of
the powder.
[0184] The glass powders produced by the processes described
herein, namely spray pyrolysis, can form soft agglomerates as a
result of their relatively high surface energy (compared to larger
particles). It is also known to those skilled in the art that soft
agglomerates may be dispersed easily by treatments such as exposure
to ultrasound in a liquid medium or sieving. The particle size
distributions described herein are measured by mixing samples of
the powders in a medium such as water with a surfactant and a short
exposure to ultrasound through either an ultrasonic bath or horn.
The ultrasonic treatment supplies sufficient energy to disperse the
soft agglomerates into primary spherical particles. The primary
particle size distribution is then measured by light scattering in
a Microtrac instrument. This provides a good measure of the useful
dispersion characteristics of the powder because this simulates the
dispersion of the particles in a liquid medium such as a paste or
slurry that is used to deposit the particles in a device. Thus, the
references to particle size herein refer to the primary particle
size, such as after lightly dispersing the soft agglomerates of the
powder.
[0185] The glass particles produced according to the present
invention also have a high degree of purity and it is preferred
that the particles include not greater than about 0.1 atomic
percent impurities and more preferably not greater than about 0.01
atomic percent impurities. Since no milling of the particles is
required to achieve small average particle sizes, there are
substantially no undesired impurities such as alumina, zirconia or
high carbon steel in the powder batch. According to one preferred
embodiment, the glass particles include less than about 100 ppm,
more preferably less than 50 ppm, of metallic impurities that can
discolor the glass, such as chromium.
[0186] The formation of hollow particles is common in spray
pyrolysis. In the present invention, it has been found that the
formation of hollow particles can be controlled through the
selection of precursors, precursor concentration, pyrolysis
temperature and residence time. According to one embodiment of the
present invention, the glass particles are dense (e.g. not hollow
or porous), as measured by helium pycnometry. According to this
embodiment, the glass particles have a particle density of at least
about 80% of the theoretical value, more preferably at least about
90% of the theoretical value and even more preferably at least
about 95% of the theoretical value. In one embodiment, the particle
density is at least about 99% of the theoretical value. The
theoretical density can be easily calculated for glasses based on
the relative percentages of each component. High density particles
provide many advantages over porous particles, including reduced
shrinkage during sintering and improved flow properties.
[0187] According to another embodiment, however, the glass
particles are hollow spheres having a reduced density. As is
discussed above, such hollow particles can be produced, for
example, by reducing the reaction temperature during manufacture to
below the glass transition temperature (Tg) of the glass. Hollow
particles can also be produced by careful selection of the
precursors. Such hollow particles are useful in electronic
applications requiring a low dielectric constant, such as a
dielectric constant of less than about 2.
[0188] The glass particles according to a preferred embodiment of
the present invention are also substantially spherical in shape.
That is, the particles are not jagged or irregular in shape.
Spherical particles are particularly advantageous because they are
able to disperse more readily in a paste or other liquid medium and
impart advantageous flow characteristics to compositions containing
the particles.
[0189] In addition, the glass powder according to the present
invention has a low surface area. The particles are substantially
spherical, which reduces the total surface area for a given mass of
powder. Further, the elimination of larger particles from the
powder batch eliminates the porosity that is typically associated
with open pores on the surface of such larger particles. Due to the
elimination of the larger particles, the powder advantageously has
a lower surface area. Surface area is typically measured using the
BET nitrogen adsorption method which is indicative of the surface
area of the powder, including the surface area of accessible pores
on the surface of the particles. For a given particle size
distribution, a lower value of surface area per unit mass of powder
generally indicates solid or non-porous particles. The reactivity
of powders having a low surface area is reduced. This
characteristic can advantageously extend the shelf life of such
powders. Preferably, the glass powders have a surface area that is
close, such as within about 5 percent, of the calculated geometric
surface area which is calculated for monodispersed spheres having
the same average particle size as the glass powder.
[0190] In addition, the powder batches of glass particles according
to the present invention are substantially unagglomerated, that is,
they include substantially no hard agglomerates of the glass
particles. Hard agglomerates are physically coalesced lumps of two
or more particles that behave as one large particle. Hard
agglomerates are disadvantageous in most applications, particularly
when the glass powder is applied to a substrate in a liquid
vehicle, such as a thick film paste. It is preferred that no more
than about 1.0 weight percent of the glass particles in the powder
batch of the present invention are in the form of hard
agglomerates. More preferably, no more than about 0.5 weight
percent of the particles are in the form of hard agglomerates. In
the event that hard agglomerates do form, they can optionally be
broken up, such as by jet-milling the powder.
[0191] According to one embodiment of the present invention, the
glass particles are composite glass particles, wherein the
individual particles include at least a first glass phase and at
least a second phase associated with the glass phase. The second
phase can be, for example, a metal. Preferred metals are the noble
metals such as gold or silver. Such composites can be produced by
adding a salt of the metal to the precursor solution, such as
silver nitrate.
[0192] According to another embodiment of the present invention,
the glass particles are coated particles that include a particulate
coating or non-particulate (film) coating that substantially
encapsulates the outer surface of the particles. Preferably, the
coating is very thin and has an average thickness of not greater
than about 200 nanometers, more preferably not greater than about
100 nanometers, and even more preferably not greater than about 50
nanometers. While the coating is thin, the coating should
substantially encapsulate the entire particle such that
substantially no glass surface is exposed. Accordingly, the coating
preferably has an average thickness of at least about 5
nanometers.
[0193] The coating can be a metal or other inorganic compound, or
can be an organic compound. For example, the particles can be
coated with a metal to utilize the surface properties of the metal
coating. The particles can include more than one coating, if
multiple coatings are desirable.
[0194] Further, a dielectric coating, either organic or inorganic,
can be used to achieve the appropriate surface charge
characteristics to carry out deposition processes such as
electrostatic deposition, discussed hereinbelow.
[0195] The glass particles of the present invention can
advantageously be coated with an organic compound, for example a
surfactant to provide improved dispersion which will result in
smoother prints having lower lump counts when applied as a paste.
The organic compound for coating the particles can be selected from
organic compounds such as PMMA (polymethylmethacrylate),
polystyrene or the like. The organic coating preferably has an
average thickness of not greater than about 100 nanometers, and
more preferably not greater than about 50 nanometers. The organic
coating is substantially dense and continuous about the
particle.
[0196] The coating can also be comprised of one or more monolayer
coatings, such as from about 1 to 3 monolayer coatings. A monolayer
coating is formed by the reaction of an organic or an inorganic
molecule with the surface of the particles to form a coating layer
that is essentially one molecular layer thick. In particular, the
formation of a monolayer coating by reaction of the surface of the
particle with a functionalized organo silane such as halo- or
amino-silanes, for example hexamethyldisilazane or
trimethylsilylchloride, can be used to modify the hydrophobicity
and hydrophilicity of the powders. Such coatings allow for greater
control over the dispersion characteristics of the powder in a wide
variety of paste compositions.
[0197] The monolayer coatings can also be applied to glass powders
that have already been coated with an organic or inorganic coating
thus providing better control over the corrosion characteristics
(through the use of the thicker coating) as well as dispersibility
(through the monolayer coating) of the particles.
[0198] The glass powder batches according to the present invention
are useful in a number of applications and can be used to fabricate
a number of novel devices and intermediate products. Such devices
and intermediate products are included within the scope of the
present invention.
[0199] The glass powders according to the present invention are
particularly useful in microelectronic applications, including data
processing applications and advanced display applications. Complex
glasses, particularly borosilicate glasses, are commonly used as
dielectric materials in microelectronic circuits. For such
applications, the glass should have a low dielectric constant, good
thermal expansion match to the substrate, a well controlled glass
transition temperature (T.sub.g) and low dielectric loss.
[0200] Glass powders can be deposited onto device surfaces or
substrates by a number of different deposition methods which
involve the direct deposition of the dry powder such as dusting,
electrophotographic or electrostatic precipitation, while other
deposition methods involve liquid vehicles such as ink jet
printing, liquid delivery from a syringe, micro-pens, toner, slurry
deposition, paste-based methods and electrophoresis. In all these
deposition methods, the powders described in the present invention
show a number of distinct advantages over powders produced by other
methods. For example, small, spherical, narrow size distribution
glass particles are more easily dispersed in liquid vehicles, they
remain dispersed for a longer period and allow printing of smoother
and finer features compared to powder made by alternative
methods.
[0201] Some glasses are also used in metal thick-film paste
compositions to control the shrinkage of the paste during sintering
and facilitate the bonding of the paste to the substrate.
Generally, the glass should have good electrical resistivity,
thermal shock resistance, good mechanical strength, good dielectric
strength and low dielectric loss.
[0202] In the thick-film paste process, a viscous paste that
includes a functional particulate phase (e.g. a metal powder and/or
a dielectric glass) is screen printed onto a substrate. More
particularly, a porous screen fabricated from stainless steel,
polyester, nylon or similar inert material is stretched and
attached to a rigid frame. A predetermined pattern is formed on the
screen corresponding to the pattern to be printed. For example, a
UV sensitive emulsion can be applied to the screen and exposed
through a positive or negative image of the design pattern. The
screen is then developed to remove portions of the emulsion in the
pattern regions.
[0203] The screen is then affixed to a screen printing device and
the thick film paste is deposited on top of the screen. The
substrate to be printed is then positioned beneath the screen and
the paste is forced through the screen and onto the substrate by a
squeegee that traverses the screen. Thus, a pattern of traces
and/or pads of the paste material is transferred to the substrate.
The substrate with the paste applied in a predetermined pattern is
then subjected to a drying and firing treatment to solidify and
adhere the paste to the substrate.
[0204] Thick film pastes have a complex chemistry and generally
include a functional phase, a binder phase and an organic vehicle
phase. The functional phase include metal powders which provide
conductivity. The binder phase can be, for example, a mixture of
metal oxide or glass frit powders such as those according to the
present invention. PbO based glasses are commonly used as binders.
The function of the binder phase is to control the sintering of the
film and assist the adhesion of the functional phase to the
substrate and/or assist in the sintering of the functional phase.
Reactive compounds can also be included in the paste to promote
adherence of the functional phase to the substrate.
[0205] Thick film pastes also include an organic vehicle phase that
is a mixture of solvents, polymers, resins and other organics whose
main function is to provide the appropriate rheology (flow
properties) to the paste. The liquid solvent assists in mixing of
the components into a homogenous paste and substantially evaporates
upon application of the paste to the substrate. Usually the solvent
is a volatile liquid such as methanol, ethanol, terpineol, butyl
carbitol, butyl carbitol acetate, aliphatic alcohols, esters,
acetone and the like. The other organic vehicle components can
include thickeners (sometimes referred to as organic binders),
stabilizing agents, surfactants, wetting agents and the like.
Thickeners provide sufficient viscosity to the paste and also acts
as a binding agent in the unfired state. Examples of thickeners
include ethyl cellulose, polyvinyl acetates, resins such as acrylic
resin, cellulose resin, polyester, polyamide and the like. The
stabilizing agents reduce oxidation and degradation, stabilize the
viscosity or buffer the pH of the paste. For example,
triethanolamine is a common stabilizer. Wetting agents and
surfactants are well known in the thick film paste art and can
include triethanolamine and phosphate esters.
[0206] The different components of the thick film paste are mixed
in the desired proportions in order to produce a substantially
homogenous blend wherein the functional phase is well dispersed
throughout the paste. Typically, the thick film paste will include
from about 5 to about 95 weight percent such as from about 60 to 85
weight percent, of the functional phase.
[0207] Examples of thick film pastes are disclosed in U.S. Pat.
Nos. 4,172,733; 3,803,708; 4,140,817; and 3,816,097 all of which
are incorporated herein by reference in their entirety.
[0208] Some applications of thick film pastes require higher
tolerances than can be achieved using standard thick-film
technology, as is described above. As a result, some thick film
pastes have photo-imaging capability to enable the formation of
lines and traces with decreased width and pitch. In this type of
process, a photoactive thick film paste is applied to a substrate
substantially as is described above. The paste can include, for
example, a liquid vehicle such as polyvinyl alcohol, that is not
cross-linked. The paste is then dried and exposed to ultraviolet
light through a photomask to polymerize the exposed portions of
paste and the paste is developed to remove unwanted portions of the
paste. This technology permits higher density lines and other
features to be formed. The combination of the foregoing technology
with the glass powders of the present invention permits the
fabrication of devices with resolution and tolerances as compared
to conventional technologies using conventional glass powders.
[0209] In addition, a laser can be used instead of ultraviolet
light through a mask. The laser can be scanned over the surface in
a pattern thereby replacing the need for a mask. The laser light is
of sufficiently low intensity that it does not heating the glass or
polymer above its softening point. The unirradiated regions of the
paste can be removed leaving a pattern.
[0210] Likewise, conventional paste technology utilizes heating of
a substrate to remove the vehicle from a paste and to fuse
particles together or modify them in some other way. A laser can be
used to locally heat the paste layer and scanned over the paste
layer thereby forming a pattern. The laser heating is confined to
the paste layer and drives out the paste vehicle and heats the
powder in the paste without appreciably heating the substrate. This
allows heating of particles, delivered using pastes, without
damaging a glass or even polymeric substrate.
[0211] Powders for use in thick-film pastes should have good
dispersibility and flow properties. As is discussed above, the
glass powders according to the present invention are substantially
spherical in shape and are substantially unagglomerated. Due to
this unique combination of properties, the powders disperse and
flow in a thick-film paste better than conventional powders which
are not spherical and contain agglomerates.
[0212] Other deposition methods for the powders can also be used.
For example, a slurry method can be used to deposit the powder. The
powder is typically dispersed in an aqueous slurry including
reagents such as potassium silicate and polyvinyl alcohol, which
aids in the adhesion of the powder to the surface. For example, the
slurry can be poured onto the substrate and left to settle to the
surface. After the powder has sedimented onto the substrate the
supernatant liquid is decanted off and the powder layer is left to
dry.
[0213] Glass particles can also be deposited electrophoretically or
electrostatically. The particles are charged and are brought into
contact with the substrate surface having localized portions of
opposite charge. The layer is typically lacquered to adhere the
particles to the substrate. Shadow masks can be used to produce the
desired pattern on the substrate surface.
[0214] Ink-jet printing is another method for depositing the glass
powders in a predetermined pattern. The powder is dispersed in a
liquid medium and dispensed onto a substrate using an ink jet
printing head that is computer controlled to produce a pattern. The
glass powders of the present invention having a small size, narrow
size distribution and spherical morphology can be printed into a
pattern having a high density and high resolution. Other deposition
methods utilizing a glass powder dispersed in a liquid medium
include micro-pen or syringe deposition, wherein the powders are
dispersed and applied to a substrate using a pen or syringe and are
then allowed to dry.
[0215] Patterns can also be formed by using an ink jet or micropen
(small syringe) to dispense sticky material onto a surface in a
pattern. Powder is then transferred to the sticky regions. This
transfer can be done is several ways. A sheet covered with powder
can be applied to the surface with the sticky pattern. The powder
sticks to the sticky pattern and does not stick to the rest of the
surface. A nozzle can be used to transfer powder directly to the
sticky regions.
[0216] Many methods for directly depositing materials onto surfaces
require heating of the particles once deposited to sinter them
together and densify the layer. The densification can be assisted
by including a molecular precursor to a material in the liquid
containing the particles. The particle/molecular precursor mixture
can be directly written onto the surface using ink jet, micropen,
and other liquid dispensing methods. This can be followed by
heating in a furnace or heating using a localized energy source
such as a laser. The heating converts the molecular precursor into
the functional material contained in the particles thereby filling
in the space between the particles with functional material.
[0217] Thus, the glass powders produced according to the present
invention result in smoother powder layers when deposited by such
liquid or dry powder based deposition methods. Smoother powder
layers are the result of the smaller average particle size,
spherical particle morphology and narrower particle size
distribution compared to powders produced by other methods.
[0218] The glass powders of the present invention can also be used
in resistor and/or thermistor component applications. For these
applications, the glass powder is mixed with a conductive powder
(e.g., a metal) in a specified ratio to control the resistance of
the component. For these applications, the resistivity and
temperature coefficient of resistance (TCR) for the glass must be
well-controlled. A common problem in traditional pastes for these
applications is segregation of the metal and glass powders due to
the large difference in particle size between the two powders. The
glass powder typically has an average size much greater than the
average size of the metal powder. The glass powders of the present
invention can advantageously have a size that is tailored to be
similar to the size of the metal powder, e.g. less than about 5
.mu.m, resulting in a more uniform paste and improved component
properties. Glasses commonly used in thick-film paste applications
include borosilicate glasses containing different amounts of
modifiers such as Al.sub.2O.sub.3, Bi.sub.2O.sub.3, PbO, CdO, ZnO,
BaO and CaO.
[0219] Structural applications of the glass powders according to
the present invention include use as spacers for glass face-plates
in display applications. The high tolerance of this application
demands glass powders with well-controlled physical properties such
as a small particle size and narrow size distribution.
[0220] One preferred application of the glass powders of the
present invention is for the barrier ribs in a flat panel display,
such as a plasma display panel. Such barrier ribs provide
electrical insulation and must have well-controlled dielectric
properties. Further, the ribs are narrow and have tightly
controlled spacing in the device, therefore the powders must have
well-controlled physical properties such as a small size and a
narrow size distribution. The particles should also have a high
purity so that the ribs are substantially transparent and do not
discolor the viewing screen.
[0221] Other uses of glass powders can include high
temperature/high pressure lubrication, such as for metal stamping.
Glass powders are also used as sealants wherein the glass (referred
to as a solder glass) is selected to have a lower softening point
than the substrate glass. For example, a solder glass can be used
to seal two glass plates together in liquid-crystal displays
(LCD's). Other uses of the glass powders include dental
applications, such as for crown and filling material wherein the
glass is admixed with a ceramic and/or a resin. Glass powders in
the form of beads or hollow micro spheres can also be used to
deliver drugs or radiation into the body.
Examples
[0222] A complex glass precursor solution was prepared including
colloidal particulate silica, boric acid, lead acetate, zinc
acetate and aluminum nitrate. The solution was atomized using
ultrasonic transducers at a frequency of about 1.6 MHZ to produce
an aerosol of precursor droplets. Air was used as a carrier gas to
move the aerosol through an elongated tubular furnace such that the
droplets/particles had a residence time of about 10-12 seconds in
the furnace.
[0223] The reaction temperature was varied to determine the effect
of the reaction temperature on the formation of the particles.
Reaction temperatures were 500.degree. C., 600.degree. C.,
650.degree. C. and 700.degree. C. At 500.degree. C. and 600.degree.
C., it was observed that the powder had a slightly tan color,
indicating the presence of unreacted carbon from the acetate
precursor. At 650.degree. C. and 700.degree. C., the powders were
white. In all cases, the powders were spherical and
unagglomerated.
[0224] In a further set of experiments, the same precursor
solutions (colloidal silica, boric acid, lead acetate, zinc acetate
and aluminum nitrate) at a total precursor concentration of 7.5
weight percent based on the glass composition were formed into an
aerosol using a 7.times.7 array of ultrasonic transducers at a
frequency of about 1.6 MHZ. A tubular furnace (36''.times.5.5''
diameter) was used to heat the aerosol to the reaction temperature.
The total residence time was about 2-3 seconds. Temperatures ranged
from 400.degree. C. to 1000.degree. C. However, a fully reacted
white powder was not obtainable. The color of the powder ranged
from tan at lower temperatures to bright yellow at higher
temperatures. It is believed that the residence time of 2-3 seconds
was too short for the reaction of the acetates and complete
elimination of carbon.
[0225] As a result, a precursor solution of nitrate precursors in
distilled water was formed. The precursor solution included
colloidal silica (Cabot HS-5, Cabot Corporation, Mass.), aluminum
nitrate, boric acid, lead nitrate and zinc nitrate. The precursor
solution was formed into an aerosol using ultrasonic transducers at
a frequency of about 1.6 MHZ. Air was used as a carrier gas at a
flow rates of about 4 CFM in a 72 inch by 5.5 inch heated tube, to
yield residence times of about 4.5 seconds. The temperature of the
furnace was experimentally varied at temperatures of 600.degree.
C., 650.degree. C. and 700.degree. C.
[0226] At the lower temperatures, below 600.degree. C., the powder
was non-spherical and angular, indicating unreacted nitrates were
present. This was confirmed by x-ray diffraction. However, at
700.degree. C. and a flow rate of 4 CFM, the particles were fully
reacted and spherical. This complex glass powder is illustrated in
FIG. 37 and the particles are spherical and unagglomerated. The
particle size distribution is illustrated in FIG. 38 for particles
which were collected in a cyclone, which further narrowed the size
distribution of the powder. The volume average particle size of the
powder was about 1 .mu.m and there were substantially no particles
greater than 2 .mu.m. 90 percent of the particles had a size of
less than 1.3 .mu.m, and 90 percent of the particles were at least
0.74 .mu.m.
[0227] Thus, it is believed that nitrate precursors are preferred
over acetate precursors. The residence time of the aerosol should
be sufficient to enable complete reaction of the precursors at a
given temperature. Since some glass components, such as PbO, are
highly volatile at high temperatures, it is preferred to heat the
aerosol at low temperatures for longer residence times.
[0228] While various embodiments of the present invention have been
described in detail, it is apparent that modifications and
adaptations of those embodiments will occur to those skilled in the
art. However, it is to be expressly understood that such
modifications and adaptations are within the spirit and scope of
the present invention.
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