Ludviksson; Audunn

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ludviksson; Audunn.The latest application filed is for "neutral beam etching of cu-containing layers in an organic compound gas environment".

Company Profile

0.17.20

Ludviksson; Audunn - Seattle WA
Ludviksson; Audunn - Scottsdale AZ US
Ludviksson; Audunn - Albuquerque NM
Ludviksson, Audunn - Scotsdale AZ

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Neutral beam etching of Cu-containing layers in an organic compound gas environment Grant 10,147,613 - Chen , et al. De	2018-12-04
Neutral Beam Etching Of Cu-containing Layers In An Organic Compound Gas Environment App 20150380271 - CHEN; Lee ; et al.	2015-12-31
Post deposition plasma cleaning system and method Grant 8,974,868 - Ishizaka , et al. March 10, 2	2015-03-10
Glass Powders, Methods For Producing Glass Powders And Devices Fabricated From Same App 20100236288 - Kodas; Toivo T. ; et al.	2010-09-23
Method and system for etching high-k dielectric materials Grant 7,781,340 - Chen , et al. August 24, 2	2010-08-24
Glass powders, methods for producing glass powders and devices fabricated from same Grant 7,631,518 - Kodas , et al. December 15, 2	2009-12-15
Apparatus and method for use of optical system with a plasma processing system Grant 7,591,923 - Mitrovic , et al. September 22, 2	2009-09-22
Plasma etching of Cu-containing layers Grant 7,553,427 - Ludviksson , et al. June 30, 2	2009-06-30
Method and apparatus for process monitoring and control Grant 7,355,171 - Ludviksson April 8, 2	2008-04-08
Method and system for etching high-k dielectric materials App 20070155181 - Chen; Lee ; et al.	2007-07-05
Anisotropic dry etching of Cu-containing layers Grant 7,214,327 - Chen , et al. May 8, 2	2007-05-08
Method and system for etching high-k dielectric materials Grant 7,202,169 - Chen , et al. April 10, 2	2007-04-10
Method and apparatus for process monitoring and control App 20060255260 - Ludviksson; Audunn	2006-11-16
Deposition system and method App 20060211243 - Ishizaka; Tadahiro ; et al.	2006-09-21
Process monitoring using infrared optical diagnostics Grant 7,102,132 - Ludviksson September 5, 2	2006-09-05
Method of using a sensor gas to determine erosion level of consumable system components Grant 7,064,812 - Ludviksson , et al. June 20, 2	2006-06-20
Anisotropic dry etching of cu-containing layers App 20050224456 - Chen, Lee ; et al.	2005-10-13
Plasma processing system and method App 20050189069 - Ludviksson, Audunn ; et al.	2005-09-01
Apparatus and method for use of optical system with a plasma processing system App 20050173375 - Mitrovic, Andrej S. ; et al.	2005-08-11
Plasma etching of cu-containing layers App 20050167399 - Ludviksson, Audunn ; et al.	2005-08-04
Glass Powders, Methods For Producing Glass Powders And Devices Fabricated From Same App 20050147752 - Kodas, Toivo T. ; et al.	2005-07-07
Monitoring erosion of system components by optical emission Grant 6,894,769 - Ludviksson , et al. May 17, 2	2005-05-17
Process monitoring using infrared optical diagnostics App 20050082482 - Ludviksson, Audunn	2005-04-21
Compositions Comprising Glass Particles And Methods Of Depositing The Same App 20050069640 - Kodas, Toivo T. ; et al.	2005-03-31
Glass powders, methods for producing glass powders and devices fabricated from same Grant 6,866,929 - Kodas , et al. March 15, 2	2005-03-15
Method of using a sensor gas to determine erosion level of consumable system components App 20050041238 - Ludviksson, Audunn ; et al.	2005-02-24
Method system and computer readable medium for monitoring the status of a chamber process App 20040221957 - Ludviksson, Audunn	2004-11-11
Monitoring material buildup on system components by optical emission Grant 6,806,949 - Ludviksson , et al. October 19, 2	2004-10-19
Monitoring erosion of system components by optical emission App 20040125360 - Ludviksson, Audunn ; et al.	2004-07-01
Monitoring material buildup on system components by optical emission App 20040125359 - Ludviksson, Audunn ; et al.	2004-07-01
Method and system for etching high-k dielectric materials App 20040110375 - Chen, Lee ; et al.	2004-06-10
Method for depositing tantalum silicide films by thermal chemical vapor deposition App 20030211736 - Ludviksson, Audunn ; et al.	2003-11-13
Apparatus and method for use of optical diagnostic system with a plasma processing system App 20030183337 - Fordemwalt, James ; et al.	2003-10-02
Method for depositing conformal nitrified tantalum silicide films by thermal CVD Grant 6,586,330 - Ludviksson , et al. July 1, 2	2003-07-01
Glass powders, methods for producing glass powders and devices fabricated from same App 20020160685 - Kodas, Toivo T. ; et al.	2002-10-31
Methods for producing glass powders Grant 6,360,562 - Kodas , et al. March 26, 2	2002-03-26

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