U.S. patent application number 12/557264 was filed with the patent office on 2010-04-01 for semiconductor manufacturing apparatus and method for cleaning same.
Invention is credited to Fumiki Aiso, Takashi Nakao, Kenichiro TORATANI, Kazuhei Yoshinaga.
Application Number | 20100078045 12/557264 |
Document ID | / |
Family ID | 42056079 |
Filed Date | 2010-04-01 |
United States Patent
Application |
20100078045 |
Kind Code |
A1 |
TORATANI; Kenichiro ; et
al. |
April 1, 2010 |
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR CLEANING
SAME
Abstract
An LPCVD apparatus is provided with a processing chamber and a
reaction cooling apparatus. The reaction cooling apparatus is
placed outside the processing chamber and is configured to generate
hydrogen fluoride gas by reaction of hydrogen gas and fluorine gas
and to cool the hydrogen fluoride gas. The hydrogen fluoride gas
cooled by the reaction cooling apparatus is supplied into the
processing chamber as a cleaning gas.
Inventors: |
TORATANI; Kenichiro;
(Kanagawa-ken, JP) ; Aiso; Fumiki; (Kanagawa-ken,
JP) ; Nakao; Takashi; (Kanagawa-ken, JP) ;
Yoshinaga; Kazuhei; (Kanagawa-ken, JP) |
Correspondence
Address: |
FINNEGAN, HENDERSON, FARABOW, GARRETT & DUNNER;LLP
901 NEW YORK AVENUE, NW
WASHINGTON
DC
20001-4413
US
|
Family ID: |
42056079 |
Appl. No.: |
12/557264 |
Filed: |
September 10, 2009 |
Current U.S.
Class: |
134/19 ;
118/715 |
Current CPC
Class: |
C23C 16/45514 20130101;
B08B 5/00 20130101; C23C 16/4405 20130101; H01L 21/67017 20130101;
H01L 21/67109 20130101 |
Class at
Publication: |
134/19 ;
118/715 |
International
Class: |
B08B 7/00 20060101
B08B007/00; C23C 16/54 20060101 C23C016/54 |
Foreign Application Data
Date |
Code |
Application Number |
Sep 29, 2008 |
JP |
2008-250259 |
Claims
1. A semiconductor manufacturing apparatus comprising: a processing
chamber; and a reaction cooling apparatus placed outside the
processing chamber and configured to generate a cleaning gas by
reaction of a combustible gas and a combustion-supporting gas and
to cool the cleaning gas, the cleaning gas which is cooled being
supplied into the processing chamber.
2. The apparatus according to claim 1, wherein the reaction cooling
apparatus includes: a reaction chamber supplied with the
combustible gas and the combustion-supporting gas and configured to
cause the reaction; and a water-cooling apparatus configured to
cool the cleaning gas.
3. The apparatus according to claim 1, wherein the reaction cooling
apparatus is configured to mix the combustible gas, the
combustion-supporting gas, and a cooling gas.
4. The apparatus according to claim 3, wherein the reaction cooling
apparatus includes: an outer tube in connection with the processing
chamber; a middle tube placed in the outer tube and terminated at a
position spaced from the processing chamber, the termination being
opened to inside the outer tube; and an inner tube placed in the
middle tube and terminated at a position spaced from the processing
chamber, the termination being opened to inside the outer tube, one
of the combustible gas and the combustion-supporting gas is
supplied into the inner tube, and the other is supplied between the
inner tube and the middle tube, and the cooling gas is supplied
between the middle tube and the outer tube.
5. The apparatus according to claim 1, wherein the reaction cooling
apparatus includes a heater configured to heat the cleaning
gas.
6. The apparatus according to claim 1, wherein the combustible gas
is hydrogen gas, and the combustion-supporting gas is fluorine
gas.
7. The apparatus according to claim 1, wherein the semiconductor
manufacturing apparatus is a CVD apparatus.
8. A semiconductor manufacturing apparatus comprising: a processing
chamber; a combustible gas supply pipe configured to supply a
combustible gas into the processing chamber; a
combustion-supporting gas supply pipe configured to supply a
combustion-supporting gas into the processing chamber; and at least
one of another combustible gas supply pipe and another
combustion-supporting gas supply pipe, one of the combustible gas
supply pipe and the another combustible gas supply pipe for passing
the combustible gas is temporally changed among them or one of the
combustion-supporting gas supply pipe and the another
combustion-supporting gas supply pipe for passing the
combustion-supporting gas is temporally changed among them.
9. The apparatus according to claim 8, wherein the combustible gas
is hydrogen gas, and the combustion-supporting gas is fluorine
gas.
10. The apparatus according to claim 8, wherein the semiconductor
manufacturing apparatus is a CVD apparatus.
11. A method for cleaning a semiconductor manufacturing apparatus,
comprising: a first supplying a combustible gas and a
combustion-supporting gas into a processing chamber; and a second
supplying the combustion-supporting gas into the processing
chamber, the first supplying and the second supplying being
alternately performed.
12. The method according to claim 11, wherein hydrogen gas is used
as the combustible gas, and fluorine gas is used as the
combustion-supporting gas.
13. A method for cleaning a semiconductor manufacturing apparatus,
comprising: supplying a combustible gas and a dilution gas into a
processing chamber through a combustible gas supply pipe, and
simultaneously supplying a combustion-supporting gas and a dilution
gas into the processing chamber through a combustion-supporting gas
supply pipe, at least one of a first supply amount of the dilution
gas supplied through the combustible gas supply pipe and a second
supply amount of the dilution gas supplied through the
combustion-supporting gas supply pipe being temporally changed.
14. The method according to claim 13, wherein total amount of the
first supply amount and the second supply amount is kept
constant.
15. The method according to claim 13, wherein the supplying the
combustible gas and the dilution gas and the simultaneously
supplying the combustion-supporting gas and the dilution gas
includes: a first supplying; and a second supplying, the first
supply amount of the first supplying is more than the first supply
amount of the second supplying, the second supply amount of the
second supplying is more than the second supply amount of the first
supplying, and the first supplying and the second supplying are
alternately performed.
16. The method according to claim 13, wherein the first supply
amount and the second supply amount have each multiple values.
17. The method according to claim 13, wherein the first supply
amount and the second supply amount are each changed gradually.
18. The method according to claim 13, wherein hydrogen gas is used
as the combustible gas, and fluorine gas is used as the
combustion-supporting gas.
19. The method according to claim 13, wherein nitrogen gas is used
as the dilution gas.
20. A method for cleaning a semiconductor manufacturing apparatus
including a processing chamber, a combustible gas supply pipe
configured to supply a combustible gas into the processing chamber,
and a combustion-supporting gas supply pipe configured to supply a
combustion-supporting gas into the processing chamber, at least one
of the combustible gas supply pipe and the combustion-supporting
gas supply pipe being provided in a plurality, the method
comprising: temporally changing the supply pipe for passing the
combustible gas or the combustion-supporting gas among the
plurality of combustible gas supply pipes or the plurality of
combustion-supporting gas supply pipes.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is based upon and claims the benefit of
priority from the prior Japanese Patent Application No.
2008-250259, filed on Sep. 29, 2008; the entire contents of which
are incorporated herein by reference.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] This invention relates to a semiconductor manufacturing
apparatus and a method for cleaning the same using a cleaning gas
generated by the reaction of a combustible gas and a
combustion-supporting gas.
[0004] 2. Background Art
[0005] In an LPCVD (low pressure chemical vapor deposition)
apparatus, in the course of its use, a deposition film of thin film
materials is inevitably formed inside its processing chamber. The
thin film materials include, for instance, silicon, silicon oxide,
or silicon nitride to be deposited on a silicon wafer. Such a
deposition film, when thickened, is delaminated into particles,
which unfortunately contaminate the inside of the processing
chamber and the wafer.
[0006] Thus, the inside of the processing chamber needs to be
regularly cleaned to remove the deposition film. As a method for
this cleaning, a technique of etching the deposition film by a
cleaning gas containing hydrogen fluoride gas (HF) is developed.
However, while the supply pipe of the cleaning gas is typically
formed from stainless steel, hydrogen fluoride gas (HF) has very
high corrosivity. Hence, if hydrogen fluoride gas itself is
introduced into the processing chamber, it corrodes the supply
pipe. Then, metal fluorides generated by corrosion flow into the
processing chamber and contaminate the inside of the processing
chamber and the wafer. Thus, an alternative cleaning technique is
proposed in, e.g., JP-A-2008-098431(Kokai). In this technique,
fluorine gas (F.sub.2) and hydrogen gas (H.sub.2) are separately
introduced into the processing chamber and reacted therein to
generate hydrogen fluoride gas (HF), which is used to clean the
processing chamber.
[0007] However, the inventors have discovered that the inside of
the processing chamber is locally damaged when it is cleaned by the
method described in JP-A-2008-098431(Kokai).
SUMMARY OF THE INVENTION
[0008] According to an aspect of the invention, there is provided a
semiconductor manufacturing apparatus including: a processing
chamber; and a reaction cooling apparatus placed outside the
processing chamber and configured to generate a cleaning gas by
reaction of a combustible gas and a combustion-supporting gas and
to cool the cleaning gas, the cleaning gas which is cooled being
supplied into the processing chamber.
[0009] According to another aspect of the invention, there is
provided a semiconductor manufacturing apparatus including: a
processing chamber; a combustible gas supply pipe configured to
supply a combustible gas into the processing chamber; a
combustion-supporting gas supply pipe configured to supply a
combustion-supporting gas into the processing chamber; and at least
one of another combustible gas supply pipe and another
combustion-supporting gas supply pipe, one of the combustible gas
supply pipe and the another combustible gas supply pipe for passing
the combustible gas is temporally changed among them or one of the
combustion-supporting gas supply pipe and the another
combustion-supporting gas supply pipe for passing the
combustion-supporting gas is temporally changed among them.
[0010] According to still another aspect of the invention, there is
provided a method for cleaning a semiconductor manufacturing
apparatus, including: a first supplying a combustible gas and a
combustion-supporting gas into a processing chamber; and a second
supplying the combustion-supporting gas into the processing
chamber, the first supplying and the second supplying being
alternately performed.
[0011] According to still another aspect of the invention, there is
provided a method for cleaning a semiconductor manufacturing
apparatus, including: supplying a combustible gas and a dilution
gas into a processing chamber through a combustible gas supply
pipe, and simultaneously supplying a combustion-supporting gas and
a dilution gas into the processing chamber through a
combustion-supporting gas supply pipe, at least one of a first
supply amount of the dilution gas supplied through the combustible
gas supply pipe and a second supply amount of the dilution gas
supplied through the combustion-supporting gas supply pipe being
temporally changed.
[0012] According to still another aspect of the invention, there is
provided a method for cleaning a semiconductor manufacturing
apparatus including a processing chamber, a combustible gas supply
pipe configured to supply a combustible gas into the processing
chamber, and a combustion-supporting gas supply pipe configured to
supply a combustion-supporting gas into the processing chamber, at
least one of the combustible gas supply pipe and the
combustion-supporting gas supply pipe being provided in a
plurality, the method including: temporally changing the supply
pipe for passing the combustible gas or the combustion-supporting
gas among the plurality of combustible gas supply pipes or the
plurality of combustion-supporting gas supply pipes.
BRIEF DESCRIPTION OF THE DRAWINGS
[0013] FIG. 1 is a schematic view illustrating a semiconductor
manufacturing apparatus according to a first embodiment of the
invention;
[0014] FIG. 2 is a cross-sectional view illustrating the reaction
cooling apparatus shown in FIG. 1;
[0015] FIG. 3 is a schematic view illustrating a semiconductor
manufacturing apparatus according to a comparative example of the
first embodiment;
[0016] FIG. 4 is a schematic view illustrating a semiconductor
manufacturing apparatus according to a second embodiment of the
invention;
[0017] FIG. 5 is a perspective view illustrating the triple pipe
shown in FIG. 4;
[0018] FIG. 6 is a perspective view illustrating a triple pipe in a
variation of the second embodiment;
[0019] FIG. 7 is a schematic view illustrating a semiconductor
manufacturing apparatus according to a third embodiment of the
invention;
[0020] FIG. 8 is a graph illustrating change in the supply amount
of each gas in the third embodiment, where the horizontal axis
represents time, and the vertical axis represents gas supply
amount;
[0021] FIG. 9 is a graph illustrating change in the supply amount
of each gas in a fourth embodiment of the invention, where the
horizontal axis represents time, and the vertical axis represents
gas supply amount;
[0022] FIG. 10 is a graph illustrating change in the supply amount
of each gas in a first variation of the fourth embodiment, where
the horizontal axis represents time, and the vertical axis
represents gas supply amount;
[0023] FIG. 11 is a graph illustrating change in the supply amount
of each gas in a second variation of the fourth embodiment, where
the horizontal axis represents time, and the vertical axis
represents gas supply amount;
[0024] FIG. 12 is a plan view illustrating a semiconductor
manufacturing apparatus according to a fifth embodiment of the
invention; and
[0025] FIG. 13 is a graph illustrating a cleaning method according
to the fifth embodiment, where the horizontal axis represents time,
and the vertical axis represents gas supply amount.
DETAILED DESCRIPTION OF THE INVENTION
[0026] Embodiments of the invention will now be described with
reference to the drawings.
[0027] At the outset, a first embodiment of the invention is
described.
[0028] FIG. 1 is a schematic view illustrating a semiconductor
manufacturing apparatus according to this embodiment.
[0029] FIG. 2 is a cross-sectional view illustrating the reaction
cooling apparatus shown in FIG. 1.
[0030] The semiconductor manufacturing apparatus according to this
embodiment is an apparatus for manufacturing a semiconductor
device, such as an LSI (large-scale integrated circuit) chip, and
more specifically an LPCVD apparatus.
[0031] As shown in FIG. 1, the LPCVD apparatus 1 according to this
embodiment includes a processing chamber 11 for forming a thin film
on a workpiece, such as a silicon wafer, by the LPCVD method. In
the processing chamber 11 is provided a wafer boat 12 or other jig
for holding workpieces (not shown), such as silicon wafers. The
processing chamber 11 and the wafer boat 12 or other jig are formed
from quartz.
[0032] In the LPCVD apparatus 1, in the course of its use, a
deposition film is formed inside the processing chamber 11, that
is, on the surface of the inner wall of the processing chamber 11
and the wafer boat 12 or other jig. Thus, in this embodiment,
hydrogen fluoride gas (HF) is used as a cleaning gas to remove this
deposition film. Hydrogen fluoride gas (HF) is generated by the
combustion reaction of hydrogen gas (H.sub.2) and fluorine gas
(F.sub.2). In this specification, the combustion reaction refers to
an exothermic chemical reaction, caused by coupling between at
least one combustible gas and at least one combustion-supporting
gas. The combustion-supporting gas is not limited to oxygen. For
instance, it is fluorine in this embodiment.
[0033] A reaction chamber 13 is provided outside the processing
chamber 11. The reaction chamber 13 is in connection with the
processing chamber 11 by an HF supply pipe 14. The reaction chamber
13 and the HF supply pipe 14 are illustratively formed from alumina
(Al.sub.2O.sub.3). The HF supply pipe 14 is provided with a valve
14a.
[0034] The reaction chamber 13 is in connection with a hydrogen gas
supply pipe 15 and a fluorine gas supply pipe 16. The hydrogen gas
supply pipe 15 and the fluorine gas supply pipe 16 serve to supply
hydrogen gas (H.sub.2) and fluorine gas (F.sub.2), respectively,
into the reaction chamber 13, and are illustratively formed from
stainless steel. The hydrogen gas supply pipe 15 and the fluorine
gas supply pipe 16 are provided with valves 15a and 16a,
respectively.
[0035] The processing chamber 11 is also in connection with another
fluorine gas supply pipe 17. The fluorine gas supply pipe 17 serves
to directly supply fluorine gas (F.sub.2) into the processing
chamber 11 without the intermediary of the reaction chamber 13, and
is illustratively formed from stainless steel. The fluorine gas
supply pipe 17 is provided with a valve 17a. Furthermore, a vacuum
pump 18 is provided outside the processing chamber 11. The
processing chamber 11 is in connection with the vacuum pump 18 by
an exhaust pipe 19.
[0036] As shown in FIGS. 1 and 2, a water-cooling apparatus 21 as a
cooling mechanism is provided around the reaction chamber 13. The
water-cooling apparatus 21 is a hollow structure illustratively
made of a metal, and its outer wall is in contact with the outer
wall of the reaction chamber 13. The water-cooling apparatus 21
cools the reaction chamber 13 by allowing cooling water to flow
through this hollow structure.
[0037] A jacket heater 22 as a heating mechanism is wound around
the outer surface of the HF supply pipe 14. The jacket heater 22 is
an electric heater in which an electric heating wire is provided in
a sheet-like heat insulator. The jacket heater 22 produces heat
upon energization and heats the HF supply pipe 14. Furthermore, a
temperature sensor 23, such as a thermocouple, is attached to the
outer surface of the HF supply pipe 14. The reaction chamber 13,
the HF supply pipe 14, the water-cooling apparatus 21, the jacket
heater 22, and the temperature sensor 23 constitute a reaction
cooling apparatus 25.
[0038] Next, a description is given of the operation of the
semiconductor manufacturing apparatus according to this embodiment
configured as described above, that is, a method for cleaning a
semiconductor manufacturing apparatus according to this
embodiment.
[0039] The valves 14a, 15a, and 16a are opened. While the vacuum
pump 18 is activated to evacuate the processing chamber 11,
hydrogen gas (H.sub.2) is supplied to the hydrogen gas supply pipe
15 at a flow rate of e.g. 1 slm (standard liter/min), and fluorine
gas (F.sub.2) is supplied to the fluorine gas supply pipe 16 at a
flow rate of e.g. 1 slm. On the other hand, fluorine gas (F.sub.2)
is supplied into the processing chamber 11 through the fluorine gas
supply pipe 17. Furthermore, the water-cooling apparatus 21 is
activated to pass cooling water through the water-cooling apparatus
21. Moreover, the temperature sensor 23 is activated.
[0040] Thus, hydrogen gas and fluorine gas are supplied into the
reaction chamber 13. Hydrogen gas is a combustible gas, and
fluorine gas is a combustion-supporting gas. Hence, these gases
react to generate hydrogen fluoride gas (HF), which serves as a
cleaning gas. At this time, heat of reaction is produced by the
reaction of hydrogen gas and fluorine gas. This heat of reaction is
transferred through the reaction chamber 13 to the water-cooling
apparatus 21 and exhausted by the cooling water flowing in the
water-cooling apparatus 21. That is, the water-cooling apparatus 21
cools the cleaning gas through the reaction chamber 13.
[0041] Then, the cooled cleaning gas is introduced through the HF
supply pipe 14 into the processing chamber 11. The hydrogen
fluoride gas (HF) introduced from the HF supply pipe 14 into the
processing chamber 11 is mixed with the fluorine gas (F.sub.2)
introduced through the fluorine gas supply pipe 17 into the
processing chamber 11. This mixed gas etches the surface of the
inner wall of the processing chamber 11 and the wafer boat 12 or
other jig and removes the deposition film. Thus, the inside of the
processing chamber 11 is cleaned.
[0042] Here, hydrogen gas and fluorine gas react in the reaction
chamber 13 placed outside the processing chamber 11 and are turned
into hydrogen fluoride gas, which is sufficiently cooled by the
water-cooling apparatus 21 and then introduced into the processing
chamber 11. Hence, there is no case where hydrogen gas and fluorine
gas react in the processing chamber 11 to locally reach a high
temperature, causing damage to the processing chamber 11 and the
wafer boat 12 or other jig.
[0043] Furthermore, the temperature of the cleaning gas flowing
through the HF supply pipe 14 is measured by the temperature sensor
23. When the temperature of the cleaning gas is excessively
decreased, the jacket heater 22 is activated to heat the cleaning
gas. Thus, the temperature of the cleaning gas is kept at a
constant temperature, such as 50.degree. C. This allows etching
under a constant condition.
[0044] Next, the effect of this embodiment is described.
[0045] As described above, according to this embodiment, hydrogen
gas and fluorine gas are reacted in the reaction chamber 13 placed
outside the processing chamber 11 to generate hydrogen fluoride
gas, which is sufficiently cooled by the water-cooling apparatus 21
and then introduced into the processing chamber 11. Hence, there is
no case where hydrogen gas and fluorine gas react in the processing
chamber 11 to produce a high-temperature flame, the heat of which
causes damage to the processing chamber 11, the wafer boat 12 and
the like. That is, damage due to cleaning can be prevented.
[0046] Furthermore, the reaction chamber 13 and the HF supply pipe
14 are superior in heat resistance and thermal conductivity because
they are formed from alumina. Thus, they are not damaged by
hydrogen fluoride gas and the heat of reaction, and can efficiently
cool the cleaning gas. Here, the material of the reaction chamber
13 and the HF supply pipe 14 is not limited to alumina, but can be
any material superior in heat resistance and thermal
conductivity.
[0047] Furthermore, the cooling mechanism for cooling the cleaning
gas is implemented by the water-cooling apparatus 21. Thus, this
embodiment can realize a cost-effective cooling mechanism with easy
procurement and maintenance and high cooling efficiency.
[0048] Furthermore, hydrogen gas and fluorine gas are separately
introduced into the reaction chamber 13. Hence, even if the
hydrogen gas supply pipe 15 and the fluorine gas supply pipe 16 are
formed from stainless steel, these supply pipes are not corroded by
hydrogen fluoride gas. Thus, general-purpose stainless steel pipes
can be used for the hydrogen gas supply pipe 15 and the fluorine
gas supply pipe 16.
[0049] Furthermore, the jacket heater 22 is provided in this
embodiment. Hence, the temperature of the cleaning gas is not
excessively decreased, and the deposition film can be etched under
a suitable condition. Furthermore, because the temperature sensor
23 is provided, the temperature of the cleaning gas can be
accurately monitored.
[0050] Here, even without the jacket heater 22, the cleaning gas is
heated by the reaction of hydrogen gas and fluorine gas, and cooled
by the water-cooling apparatus 21. Hence, by adjusting the balance
between these heating and cooling, the temperature of the cleaning
gas can be kept constant. Furthermore, even without the temperature
sensor 23, the temperature of the cleaning gas can be monitored by,
for instance, a temperature sensor (not shown) provided in the
processing chamber 11. However, by providing the jacket heater 22
and the temperature sensor 23, the temperature of the cleaning gas
can be controlled more easily and accurately.
[0051] Next, a comparative example of this embodiment is
described.
[0052] FIG. 3 is a schematic view illustrating a semiconductor
manufacturing apparatus according to this comparative example.
[0053] As shown in FIG. 3, in contrast to the LPCVD apparatus 1
(see FIG. 1) according to the above first embodiment, the LPCVD
apparatus 101 according to this comparative example does not
include the reaction cooling apparatus 25, but hydrogen gas
(H.sub.2) and fluorine gas (F.sub.2) are directly supplied into the
processing chamber 11 through a hydrogen supply pipe 102 and a
fluorine supply pipe 103, respectively. Thus, hydrogen gas and
fluorine gas react inside the processing chamber 11 to generate
hydrogen fluoride gas (HF). A mixed gas of this hydrogen fluoride
gas (HF) and fluorine gas (F.sub.2) is used to etch the deposition
film. In FIG. 3, for clarity of illustration, the wafer boat 12
(see FIG. 1) is not shown.
[0054] In this comparative example, hydrogen gas and fluorine gas
are mixed in the processing chamber 11. Hydrogen reacts violently
with fluorine to produce heat of reaction, hence locally producing
a high-temperature flame. This flame is produced always in the same
region 112, because it is produced at the position where hydrogen
gas and fluorine gas introduced into the processing chamber 11 meet
with each other. Hence, in this region 112, the processing chamber
11 and the wafer boat or other jig made of quartz are damaged by
the heat of reaction, causing local damage 113. This requires
frequent replacement of components. Furthermore, dust occurs from
the damaged portion. This results in decreasing the productivity of
semiconductor devices.
[0055] In contrast, the above first embodiment can prevent damage
to the processing chamber and the like due to cleaning, achieving
low frequency of replacing components and little dust generation.
Thus, semiconductor devices can be manufactured with high
productivity.
[0056] Next, a second embodiment of the invention is described.
[0057] FIG. 4 is a schematic view illustrating a semiconductor
manufacturing apparatus according to this embodiment.
[0058] FIG. 5 is a perspective view illustrating the triple pipe
shown in FIG. 4.
[0059] The semiconductor manufacturing apparatus according to this
embodiment is also an LPCVD apparatus.
[0060] As shown in FIG. 4, in contrast to the LPCVD apparatus 1
(see FIGS. 1 and 2) according to the above first embodiment, the
LPCVD apparatus 2 according to this embodiment includes a triple
pipe 31 as a reaction cooling apparatus instead of the reaction
cooling apparatus 25. The end portion of the triple pipe 31 is
coupled to the processing chamber 11.
[0061] As shown in FIGS. 4 and 5, the triple pipe 31 includes an
outer tube 32, a middle tube 33, and an inner tube 34 coaxially in
this order from outside. That is, the middle tube 33 is placed
inside the outer tube 32, and the inner tube 34 is placed inside
the middle tube 33. The outer tube 32, the middle tube 33, and the
inner tube 34 are illustratively formed from alumina.
[0062] The end portion of the outer tube 32 is coupled to the
processing chamber 11, and the inside of the outer tube 32 is in
connection with the inside of the processing chamber 11. The middle
tube 33 is terminated at a position spaced from the processing
chamber 11, and the terminated portion is opened to inside the
outer tube 32. Furthermore, the inner tube 34 is also terminated at
a position spaced from the processing chamber 11, and the
terminated portion is opened to inside the outer tube 32. For
instance, the middle tube 33 and the inner tube 34 are terminated
at the same position. Thus, the middle tube 33 and the inner tube
34 are not placed inside the portion of the outer tube 32 on the
processing chamber 11 side, and this portion constitutes a single
continuous space 35.
[0063] Hydrogen gas (H.sub.2) is supplied into the inner tube 34.
Fluorine gas (F.sub.2) is supplied between the inner tube 34 and
the middle tube 33. Furthermore, a cooling gas is supplied between
the middle tube 33 and the outer tube 32. The cooling gas is a gas
which does not react with the combustible gas and the
combustion-supporting gas. In this embodiment, the cooling gas is a
gas which does not react with hydrogen gas (H.sub.2) and fluorine
gas (F.sub.2), such as nitrogen gas (N.sub.2). The temperature of
the cooling gas is preferably room temperature or less. That is,
the cooling gas can be at room temperature, or can be cooled to a
temperature lower than room temperature, but preferably, it is not
heated at least actively. The configuration of this embodiment
other than the foregoing is the same as that of the above first
embodiment.
[0064] Next, the operation and effect of this embodiment are
described.
[0065] A combustible gas, a combustion-supporting gas, and a
cooling gas are supplied to the triple pipe 31 from its portion not
communicating with the processing chamber 11. Here, hydrogen gas
(H.sub.2), which is a combustible gas, is supplied into the inner
tube 34, fluorine gas (F.sub.2), which is a combustion-supporting
gas, is supplied between the inner tube 34 and the middle tube 33,
and nitrogen gas (N.sub.2), which is a cooling gas, is supplied
between the middle tube 33 and the outer tube 32. These gases flow
separately in the portion of the triple pipe 31 where the middle
tube 33 and the inner tube 34 are placed, but mixed with each other
in the space 35. Thus, hydrogen gas and fluorine gas react to
generate hydrogen fluoride gas (HF). At this time, heat of reaction
is produced, but cooled by the nitrogen gas having a temperature of
room temperature or less. After the reaction is substantially
completed, the hydrogen fluoride gas is introduced into the
processing chamber 11 in the sufficiently cooled state.
[0066] Also in this embodiment, like the above first embodiment,
hydrogen gas and fluorine gas react outside the processing chamber
11 to generate hydrogen fluoride gas, which is cooled and then
introduced into the processing chamber 11. Hence, damage to the
processing chamber 11 and the like due to heat of reaction can be
prevented. Furthermore, even if unreacted hydrogen gas and fluorine
gas are introduced into the processing chamber 11, these gases have
been diluted by nitrogen gas. Hence, the reaction can be
suppressed, and damage to the processing chamber 11 and the like
can be prevented. The operation and effect of this embodiment other
than the foregoing are the same as those of the above first
embodiment.
[0067] In this embodiment, the triple pipe 31 is supplied with
hydrogen gas, fluorine gas, and nitrogen gas in this order from
inside. However, the invention is not limited thereto, but they are
supplied in the order of, for instance, fluorine gas, hydrogen gas,
and nitrogen gas from inside. Furthermore, the cooling gas is not
limited to nitrogen gas, but can be any gas which does not react
with hydrogen gas and fluorine gas. Here, if the cooling gas is a
gas with large specific heat, such as carbon dioxide (CO.sub.2),
then the cooling efficiency can be increased. Furthermore, the
material of the triple pipe 31 is not limited to alumina, but can
be any material superior in heat resistance and thermal
conductivity.
[0068] Next, a variation of this embodiment is described.
[0069] FIG. 6 is a perspective view illustrating a triple pipe in
this variation.
[0070] As shown in FIG. 6, in this variation, a water-cooling
apparatus 36, a jacket heater 37, and a temperature sensor 38 are
attached to the outer surface of the triple pipe 31. The operation
of the water-cooling apparatus 36, the jacket heater 37, and the
temperature sensor 38 is as described in the above first
embodiment. Thus, according to this variation, the temperature of
the cleaning gas can be controlled more easily and accurately. The
configuration, operation, and effect of this variation other than
the foregoing are the same as those of the above second
embodiment.
[0071] Next, a third embodiment of the invention is described.
[0072] FIG. 7 is a schematic view illustrating a semiconductor
manufacturing apparatus of this embodiment.
[0073] FIG. 8 is a graph illustrating change in the supply amount
of each gas in this embodiment, where the horizontal axis
represents time, and the vertical axis represents gas supply
amount.
[0074] In this specification, the "supply amount" refers to the
amount of gas introduced into the processing chamber 11 per unit
time.
[0075] As shown in FIG. 7, in contrast to the LPCVD apparatus 1
(see FIG. 1) according to the above first embodiment, the LPCVD
apparatus 3 used in this embodiment does not include the reaction
cooling apparatus 25. A hydrogen/nitrogen supply pipe 41 and a
fluorine/nitrogen supply pipe 42 are in direct connection with the
processing chamber 11. The configuration of the LPCVD apparatus 3
other than the foregoing is the same as that of LPCVD apparatus 1
according to the above first embodiment.
[0076] Next, a method for cleaning a semiconductor manufacturing
apparatus according to this embodiment is described.
[0077] As shown in FIG. 7, according to this embodiment, in the
LPCVD apparatus 3, a mixed gas (hereinafter referred to as
"H.sub.2/N.sub.2 gas") of hydrogen gas (H.sub.2) and nitrogen gas
(N.sub.2) is introduced into the processing chamber 11 through the
hydrogen/nitrogen supply pipe 41, and a mixed gas (hereinafter
referred to as "F.sub.2/N.sub.2 gas") of fluorine gas (F.sub.2) and
nitrogen gas (N.sub.2) is introduced into the processing chamber 11
through the fluorine/nitrogen supply pipe 42. The temperature of
each gas is illustratively room temperature. Each gas is mixed not
immediately before being introduced into the processing chamber 11
but at a position remotely distanced from the processing chamber
11. For instance, hydrogen gas and fluorine gas are mixed with
nitrogen gas at a position immediately following the outlets of
cylinders storing hydrogen gas and fluorine gas.
[0078] As shown in FIG. 8, while the flow rate of the
F.sub.2/N.sub.2 gas introduced into the processing chamber 11
through the fluorine/nitrogen supply pipe 42 is kept constant, the
H.sub.2/N.sub.2 gas is intermittently supplied. Thus, the step of
supplying both hydrogen gas, which is a combustible gas, and
fluorine gas, which is a combustion-supporting gas, into the
processing chamber 11, and the step of supplying only fluorine gas,
which is a combustion-supporting gas, are alternately performed.
For instance, while continuously supplying the F.sub.2/N.sub.2 gas,
the cycle of supplying the H.sub.2/N.sub.2 gas for 10 seconds and
stopping it for 20 seconds is repeated.
[0079] According to this embodiment, when the F.sub.2/N.sub.2 gas
and the H.sub.2/N.sub.2 gas are both supplied into the processing
chamber 11, the reaction of fluorine gas (F.sub.2) and hydrogen gas
(H.sub.2) occurs in the processing chamber 11, generating hydrogen
fluoride gas (HF) and producing heat of reaction. Thus, the
deposition film adhered to the processing chamber 11, the wafer
boat 12 and the like is etched by the generated hydrogen fluoride
gas (HF) and fluorine gas (F.sub.2), and simultaneously the
processing chamber 11, the wafer boat 12 and the like are heated by
the heat of reaction.
[0080] When the supply of the H.sub.2/N.sub.2 gas is stopped and
only the F.sub.2/N.sub.2 gas is supplied into the processing
chamber 11, the reaction of fluorine gas (F.sub.2) and hydrogen gas
(H.sub.2) scarcely occurs, and etching proceeds by the already
generated hydrogen fluoride gas and fluorine gas. At this time,
because no heat of reaction is produced, the processing chamber 11,
the wafer boat 12 and the like are cooled.
[0081] Thus, according to this embodiment, the processing chamber
11, the wafer boat 12 and the like are heated and cooled. Hence,
their temperature does not significantly increase. In contrast,
even if the total supply amount of hydrogen gas is the same,
continuously supplying it at a constant flow rate causes heat of
reaction to be continuously produced in the same region inside the
processing chamber 11, and the same portion of the processing
chamber 11, the wafer boat 12 and the like is continuously heated.
Hence, this portion eventually reaches a considerably high
temperature and is damaged. In other words, in this embodiment, a
large flame is intermittently produced by the reaction of hydrogen
gas and fluorine gas. Hence, as compared with the case of
continuously producing a small flame, local heating can be
prevented. Thus, this embodiment can also prevent damage to the
processing chamber 11, the wafer boat 12 and the like due to
cleaning.
[0082] Furthermore, in this embodiment, nitrogen gas is supplied as
a cooling and dilution gas into the processing chamber 11 in
addition to hydrogen gas, which is a combustible gas, and fluorine
gas, which is a combustion-supporting gas. Thus, the deposition
film can be etched while the atmosphere in the processing chamber
11 is cooled. This also serves to prevent damage due to heat of
reaction. Furthermore, local etching can be prevented also by
diluting hydrogen gas and fluorine gas with nitrogen gas. Moreover,
the mixing effect can be enhanced by mixing hydrogen gas and
fluorine gas with nitrogen gas at a position far from the
processing chamber 11.
[0083] Next, a fourth embodiment of the invention is described.
[0084] FIG. 9 is a graph illustrating change in the supply amount
of each gas in this embodiment, where the horizontal axis
represents time, and the vertical axis represents gas supply
amount.
[0085] The LPCVD apparatus used in this embodiment is the same as
the LPCVD apparatus 3 (see FIG. 7) used in the above third
embodiment.
[0086] In the following, a method for cleaning a semiconductor
manufacturing apparatus according to this embodiment is
described.
[0087] As shown in FIG. 7, also in this embodiment, like the above
third embodiment, in the LPCVD apparatus 3, a H.sub.2/N.sub.2 gas
is introduced into the processing chamber 11 through the
hydrogen/nitrogen supply pipe 41, and a F.sub.2/N.sub.2 gas is
introduced into the processing chamber 11 through the
fluorine/nitrogen supply pipe 42.
[0088] Here, as shown in FIG. 9, while the supply amount of
hydrogen gas and fluorine gas is kept constant, the supply amount
(hereinafter referred to as "first supply amount") of nitrogen gas
for diluting the hydrogen gas, that is, nitrogen gas supplied
through the hydrogen/nitrogen supply pipe 41, and the supply amount
(hereinafter referred to as "second supply amount") of nitrogen gas
for diluting the fluorine gas, that is, nitrogen gas supplied
through the fluorine/nitrogen supply pipe 42, are each changed
temporally.
[0089] Specifically, while the total amount of the first supply
amount and the second supply amount is kept constant, the first
supply amount and the second supply amount are changed
complementarily. That is, the step of relatively increasing the
first supply amount and relatively decreasing the second supply
amount, and the step of relatively decreasing the first supply
amount and relatively increasing the second supply amount, are
alternately performed.
[0090] According to this embodiment, the supply amount (first
supply amount) of N.sub.2 gas for diluting H.sub.2 gas and the
supply amount (second supply amount) of N.sub.2 gas for diluting
F.sub.2 gas are changed complementarily. This temporally changes,
in the processing chamber 11, the region of collision and reaction
between hydrogen gas and fluorine gas, and hence temporally changes
also the region where heat of reaction is produced. Consequently,
the temperature distribution in the processing chamber 11 is
uniformized, and no portion is continuously heated. Thus, local
damage to the processing chamber 11 and the wafer boat 12 or other
jig can be prevented. That is, in this embodiment, the position of
the flame is temporally moved so that intensive heating of a
particular portion can be prevented.
[0091] Furthermore, like the above third embodiment, this
embodiment can also achieve the cooling effect by introducing
nitrogen gas. Thus, this embodiment can also prevent damage to the
processing chamber 11, the wafer boat 12 and the like due to
cleaning.
[0092] Furthermore, according to this embodiment, the supply amount
of hydrogen gas and fluorine gas is kept constant, and the total
supply amount of nitrogen gas, that is, the total amount of the
first supply amount and the second supply amount described above is
also kept constant. Hence, the total amount of reaction can be kept
constant. This allows stable etching.
[0093] Moreover, also in this embodiment, like the above third
embodiment, hydrogen gas and fluorine gas, which are actual gases
responsible for reaction, are diluted with nitrogen gas not
responsible for reaction so that local etching in the processing
chamber 11 can be prevented. Here, mixing of hydrogen gas and
nitrogen gas and mixing of fluorine gas and nitrogen gas are
performed preferably at a position far away from the processing
chamber 11. This can further enhance the effect of mixing.
[0094] Next, a first variation of the fourth embodiment is
described.
[0095] FIG. 10 is a graph illustrating change in the supply amount
of each gas in this variation, where the horizontal axis represents
time, and the vertical axis represents gas supply amount.
[0096] As shown in FIG. 10, this variation is the same as the above
fourth embodiment in that the supply amount (first supply amount)
of nitrogen gas for diluting hydrogen gas and the supply amount
(second supply amount) of nitrogen gas for diluting fluorine gas
are changed complementarily with the total amount kept constant.
However, in this variation, the first and second supply amounts are
each allowed to take on multiple values.
[0097] According to this variation, the position of reaction
between hydrogen gas and fluorine gas can be changed among three or
more positions in the processing chamber 11. Thus, the temperature
in the processing chamber 11 can be uniformized more effectively.
Consequently, local damage to the processing chamber 11 and the
wafer boat 12 or other jig can be prevented more effectively. The
cleaning method and its effect of this variation other than the
foregoing are the same as those of the above fourth embodiment.
[0098] Next, a second variation of the fourth embodiment is
described.
[0099] FIG. 11 is a graph illustrating change in the supply amount
of each gas in this variation, where the horizontal axis represents
time, and the vertical axis represents gas supply amount.
[0100] As shown in FIG. 11, this variation is also the same as the
above fourth embodiment in that the first supply amount and the
second supply amount are changed complementarily with the total
amount thereof kept constant. However, in this variation, the first
and second supply amounts are each changed gradually.
[0101] More specifically, from the state where the first supply
amount is minimized and the second supply amount is maximized, the
first supply amount is gradually increased, and the second supply
amount is gradually decreased. Thus, the first supply amount is
maximized, and the second supply amount is minimized. Subsequently,
the first supply amount is gradually decreased, and the second
supply amount is gradually increased. Thus, the first supply amount
is minimized, and the second supply amount is maximized. This cycle
is repeated.
[0102] In this variation, the position of reaction between hydrogen
gas and fluorine gas can be gradually changed in the processing
chamber 11. Thus, the temperature in the processing chamber 11 can
be made more uniform, and local damage to the processing chamber 11
and the like can be prevented more effectively. The cleaning method
and its effect of this variation other than the foregoing are the
same as those of the above fourth embodiment.
[0103] In the above fourth embodiment and the first and second
variation thereof, the total amount of the first supply amount and
the second supply amount is illustratively kept constant. However,
the invention is not limited thereto, but the total amount can be
changed. Here, it is also possible to change only one of the first
supply amount and the second supply amount. Furthermore, in the
above fourth embodiment and the first and second variation thereof,
the first and second supply amounts are illustratively changed
stepwise. However, the first and second supply amount can also be
changed continuously.
[0104] Next, a fifth embodiment of the invention is described.
[0105] FIG. 12 is a plan view illustrating a semiconductor
manufacturing apparatus according to this embodiment.
[0106] FIG. 13 is a graph illustrating a cleaning method according
to this embodiment, where the horizontal axis represents time, and
the vertical axis represents gas supply amount.
[0107] The semiconductor manufacturing apparatus according to this
embodiment is also an LPCVD apparatus.
[0108] As shown in FIG. 12, in contrast to the LPCVD apparatus 3
(see FIG. 7) in the above third embodiment, the LPCVD apparatus 5
according to this embodiment includes a plurality of
hydrogen/nitrogen supply pipes for introducing a mixed gas
(H.sub.2/N.sub.2 gas) of hydrogen gas (H.sub.2) and nitrogen gas
(N.sub.2) into the processing chamber 11, which are coupled to
different positions of the processing chamber 11. For instance, the
example shown in FIG. 12 includes three hydrogen/nitrogen supply
pipes 41a, 41b, and 41c, which are arranged in this order from the
fluorine/nitrogen supply pipe 42 side on the same horizontal plane.
In FIG. 12, for convenience of illustration, the components other
than the processing chamber 11, the hydrogen/nitrogen supply pipes
41a, 41b, and 41c, and the fluorine/nitrogen supply pipe 42 are not
shown.
[0109] Next, a description is given of the operation of the LPCVD
apparatus according to this embodiment configured as described
above, that is, a method for cleaning a semiconductor manufacturing
apparatus according to this embodiment.
[0110] As shown in FIGS. 12 and 13, in this embodiment, the supply
pipe for passing the H.sub.2/N.sub.2 gas is temporally changed
among the three hydrogen/nitrogen supply pipes 41a, 41b, and 41c.
For instance, the H.sub.2/N.sub.2 gas is first supplied through the
hydrogen/nitrogen supply pipe 41a into the processing chamber 11.
Next, the H.sub.2/N.sub.2 gas is supplied through the
hydrogen/nitrogen supply pipe 41b. Next, the H.sub.2/N.sub.2 gas is
supplied through the hydrogen/nitrogen supply pipe 41c.
Subsequently, this cycle is repeated. On the other hand, the
F.sub.2/N.sub.2 gas is supplied into the processing chamber 11
through the same fluorine/nitrogen supply pipe 42.
[0111] Thus, by temporally switching the hydrogen/nitrogen supply
pipe for passing the H.sub.2/N.sub.2 gas, the position where the
H.sub.2/N.sub.2 gas and the F.sub.2/N.sub.2 gas collide and
hydrogen gas and fluorine gas react is temporally changed in the
processing chamber 11. For instance, in the example shown in FIG.
12, hydrogen gas and fluorine gas react primarily in region Ra when
the hydrogen/nitrogen supply pipe 41a is in use, react primarily in
region Rb when the hydrogen/nitrogen supply pipe 41b is in use, and
react primarily in region Rc when the hydrogen/nitrogen supply pipe
41c is in use. Thus, the position of the flame, so to speak, is
temporally moved, and hence the temperature distribution in the
processing chamber 11 is uniformized. This avoids intensive heating
of a particular portion in the processing chamber 11 and the wafer
boat 12 or other jig, and local damage can be prevented. Thus, this
embodiment can also prevent damage to the processing chamber 11,
the wafer boat 12 and the like due to cleaning.
[0112] Furthermore, also in this embodiment, like the above third
and fourth embodiment, hydrogen gas and fluorine gas are diluted
with nitrogen gas so that local etching in the processing chamber
11 can be prevented. Here, mixing of gases is performed preferably
at a position distanced from the processing chamber 11. This can
further enhance the effect of mixing.
[0113] In this embodiment, only one fluorine/nitrogen supply pipe
42 and a plurality of hydrogen/nitrogen supply pipes are provided,
for instance. However, the invention is not limited thereto. For
instance, it is also possible to provide only one hydrogen/nitrogen
supply pipe and a plurality of fluorine/nitrogen supply pipes.
Alternatively, both the hydrogen/nitrogen supply pipe and the
fluorine/nitrogen supply pipe can be provided in a plurality.
[0114] In this embodiment, the plurality of hydrogen/nitrogen
supply pipes are illustratively used one by one. However, the
invention is not limited thereto. A plurality of hydrogen/nitrogen
supply pipes can be used in combination at an arbitrary timing. For
instance, it is possible to use the hydrogen/nitrogen supply pipe
41a in a first period, the hydrogen/nitrogen supply pipe 41b in a
second period, the hydrogen/nitrogen supply pipe 41c in a third
period, the hydrogen/nitrogen supply pipes 41a and 41b in a fourth
period, the hydrogen/nitrogen supply pipes 41b and 41c in a fifth
period, the hydrogen/nitrogen supply pipes 41c and 41a in a sixth
period, and the hydrogen/nitrogen supply pipes 41a, 41b, and 41c in
a seventh period. Thus, the position of reaction in the processing
chamber 11 can be changed in a more complex manner, and the
temperature distribution in the processing chamber 11 can be
uniformized more effectively.
[0115] Furthermore, in this embodiment, a mixed gas
(H.sub.2/N.sub.2 gas) of hydrogen gas and nitrogen gas and a mixed
gas (F.sub.2/N.sub.2 gas) of fluorine gas and nitrogen gas are
illustratively supplied into the processing chamber 11. However,
nitrogen gas can be replaced by other dilution gases which do not
react with hydrogen gas and fluorine gas, or it is also possible to
use no dilution gas.
[0116] The invention has been described with reference to the
embodiments. However, the invention is not limited to these
embodiments. For instance, the above embodiments can be practiced
in combination with each other. For instance, also in the above
first embodiment, nitrogen gas can be introduced as a cooling gas
like the above second embodiment. Furthermore, those skilled in the
art can suitably modify the above embodiments by addition,
deletion, or design change of components, or by addition, omission,
or condition change of processes, and such modifications are also
encompassed within the scope of the invention as long as they fall
within the spirit of the invention.
[0117] For instance, in the above embodiments, the semiconductor
manufacturing apparatus is illustratively an LPCVD apparatus.
However, the invention is not limited thereto, but applicable to
any semiconductor manufacturing apparatus for manufacturing a
semiconductor device in which a deposition film is formed in the
course of its use. For instance, the invention is applicable to
various film formation apparatuses, etching apparatuses, and other
processing apparatuses. In this case, the processing chamber is an
apparatus in which a silicon wafer or other workpiece is received
and subjected to certain processes such as film formation and
processing with the atmosphere therein being controlled.
[0118] The above embodiments illustratively use hydrogen gas
(H.sub.2) as a combustible gas and fluorine gas (F.sub.2) as a
combustion-supporting gas. However, the invention is not limited
thereto. Any two or more gases generating a cleaning gas by an
exothermic reaction can be used as a combustible gas and a
combustion-supporting gas. Furthermore, in the above embodiments,
the cooling mechanism is illustratively a water-cooling apparatus
or a cooling gas, such as nitrogen gas (N.sub.2). However, the
invention is not limited thereto, but other cooling mechanism can
also be used. For instance, the reaction chamber 13 in the first
embodiment can be forced-air cooled.
* * * * *