| Patent | Date |
|---|
Semiconductor Manufacturing Method And Semiconductor Manufacturing Apparatus
App 20220301870 - FUKUMOTO; Atsushi ; et al. | 2022-09-22 |
Semiconductor Manufacturing Apparatus And Method Of Manufacturing Semiconductor Device
App 20220270885 - FUJII; Motoki ; et al. | 2022-08-25 |
Semiconductor Memory
App 20220077170 - FUKUZUMI; Yoshiaki ; et al. | 2022-03-10 |
Semiconductor Manufacturing Apparatus And Manufacturing Method Of Semiconductor Device
App 20210010134 - Aiso; Fumiki ; et al. | 2021-01-14 |
Wafer conveying apparatus and wafer conveying method
Grant 10,854,488 - Aiso , et al. December 1, 2 | 2020-12-01 |
Vaporization system
Grant 10,669,621 - Aiso , et al. | 2020-06-02 |
Semiconductor Manufacturing Apparatus, Wafer Conveying Apparatus And Wafer Conveying Method
App 20190348314 - AISO; Fumiki ; et al. | 2019-11-14 |
Semiconductor Memory
App 20190326310 - FUKUZUMI; Yoshiaki ; et al. | 2019-10-24 |
Semiconductor manufacturing apparatus with supporting columns and tables
Grant 10,403,531 - Aiso , et al. Sep | 2019-09-03 |
Semiconductor memory device and method of manufacturing the same
Grant 10,283,517 - Ohashi , et al. | 2019-05-07 |
Semiconductor Manufacturing Apparatus And Manufacturing Method Of Semiconductor Device
App 20190071771 - AISO; Fumiki ; et al. | 2019-03-07 |
Semiconductor Manufacturing Apparatus, Wafer Conveying Apparatus And Wafer Conveying Method
App 20190067066 - AISO; Fumiki ; et al. | 2019-02-28 |
Semiconductor device and method for manufacturing semiconductor device
Grant 10,186,521 - Fukumoto , et al. Ja | 2019-01-22 |
Semiconductor Manufacturing Apparatus
App 20180277400 - AISO; Fumiki | 2018-09-27 |
Semiconductor Device And Method For Manufacturing Semiconductor Device
App 20180083028 - FUKUMOTO; Atsushi ; et al. | 2018-03-22 |
Semiconductor manufacturing apparatus and manufacturing method of semiconductor device
Grant 9,920,427 - Fujii , et al. March 20, 2 | 2018-03-20 |
Vaporization System
App 20180057926 - AISO; Fumiki ; et al. | 2018-03-01 |
Semiconductor Memory Device And Method Of Manufacturing The Same
App 20180006053 - OHASHI; Takuo ; et al. | 2018-01-04 |
Method of manufacturing semiconductor memory device having charge accumulation layer positioned between control gate electrode and semiconductor layer
Grant 9,793,290 - Ohashi , et al. October 17, 2 | 2017-10-17 |
Non-volatile memory device
Grant 9,754,954 - Higuchi , et al. September 5, 2 | 2017-09-05 |
Semiconductor memory device and method of manufacturing the same
Grant 9,735,171 - Fujita , et al. August 15, 2 | 2017-08-15 |
Semiconductor Memory Device Having Voids Between Word Lines And A Source Line
App 20170229473 - FUKUMOTO; Atsushi ; et al. | 2017-08-10 |
Semiconductor memory device having voids between word lines and a source line
Grant 9,728,552 - Fukumoto , et al. August 8, 2 | 2017-08-08 |
Semiconductor manufacturing system and semiconductor manufacturing method
Grant 9,695,512 - Matsuo , et al. July 4, 2 | 2017-07-04 |
Semiconductor manufacturing apparatus and method for cleaning same
Grant 9,566,620 - Toratani , et al. February 14, 2 | 2017-02-14 |
Semiconductor Memory Device And Method Of Manufacturing The Same
App 20170018568 - FUJITA; Junya ; et al. | 2017-01-19 |
Semiconductor Memory Device And Method Of Manufacturing The Same
App 20170018569 - OHASHI; Takuo ; et al. | 2017-01-19 |
Non-volatile Memory Device
App 20160315092 - HIGUCHI; Masaaki ; et al. | 2016-10-27 |
Semiconductor manufacturing apparatus and method of manufacturing semiconductor device
Grant 9,478,416 - Fukumoto , et al. October 25, 2 | 2016-10-25 |
Semiconductor Manufacturing Apparatus And Manufacturing Method Of Semiconductor Device
App 20160222514 - FUJII; Motoki ; et al. | 2016-08-04 |
Non-volatile memory device
Grant 9,406,691 - Higuchi , et al. August 2, 2 | 2016-08-02 |
Semiconductor Manufacturing Apparatus
App 20160208382 - Takahashi; Kensei ; et al. | 2016-07-21 |
Semiconductor Manufacturing System And Semiconductor Manufacturing Method
App 20160060762 - MATSUO; Kazuhiro ; et al. | 2016-03-03 |
Semiconductor memory device and method for manufacturing the same
Grant 9,263,319 - Fujitsuka , et al. February 16, 2 | 2016-02-16 |
Non-volatile Memory Device
App 20160013201 - HIGUCHI; Masaaki ; et al. | 2016-01-14 |
Semiconductor storage device
Grant 9,224,874 - Matsuo , et al. December 29, 2 | 2015-12-29 |
Non-volatile memory device
Grant 9,166,032 - Higuchi , et al. October 20, 2 | 2015-10-20 |
Nonvolatile semiconductor memory device and method for manufacturing same
Grant 9,142,561 - Aiso September 22, 2 | 2015-09-22 |
Semiconductor Storage Device And Manufacturing Method Thereof
App 20150255482 - TAKAHASHI; Kensei ; et al. | 2015-09-10 |
Nonvolatile semiconductor memory device and manufacturing method thereof
Grant 9,123,747 - Sonehara , et al. September 1, 2 | 2015-09-01 |
Semiconductor Storage Device
App 20150200307 - MATSUO; KAZUHIRO ; et al. | 2015-07-16 |
Semiconductor memory device and method for manufacturing the same
Grant 9,012,973 - Ohashi , et al. April 21, 2 | 2015-04-21 |
Semiconductor Memory Device And Method For Manufacturing The Same
App 20150060986 - FUJITSUKA; Ryota ; et al. | 2015-03-05 |
Nonvolatile Semiconductor Memory Device And Manufacturing Method Thereof
App 20150041815 - SONEHARA; Takeshi ; et al. | 2015-02-12 |
Nonvolatile Semiconductor Memory Device And Method For Manufacturing Same
App 20140246717 - AISO; Fumiki | 2014-09-04 |
Semiconductor Device And Method For Fabricating Semiconductor Device
App 20140048862 - Fujita; Junya ; et al. | 2014-02-20 |
Nonvolatile semiconductor memory device and method for manufacturing same
Grant 8,618,603 - Ozawa , et al. December 31, 2 | 2013-12-31 |
Semiconductor Manufacturing Apparatus And Method For Cleaning Same
App 20130319473 - Toratani; Kenichiro ; et al. | 2013-12-05 |
Stacked multiple cell nonvolatile memory device
Grant 8,546,786 - Yoshimizu , et al. October 1, 2 | 2013-10-01 |
Nonvolatile semiconductor memory device and method of manufacturing the same
Grant 8,530,957 - Mizushima , et al. September 10, 2 | 2013-09-10 |
Nonvolatile Semiconductor Memory Device And Method Of Manufacturing The Same
App 20130187217 - Mizushima; Ichiro ; et al. | 2013-07-25 |
Nonvolatile semiconductor memory device and method of manufacturing the same
Grant 8,415,242 - Mizushima , et al. April 9, 2 | 2013-04-09 |
Method Of Manufacturing Electronic Part
App 20120238099 - SHUNDO; Takeshi ; et al. | 2012-09-20 |
Nonvolatile semiconductor memory device and method for manufacturing same
Grant 8,247,857 - Ozawa , et al. August 21, 2 | 2012-08-21 |
Nonvolatile Memory Device And Method For Manufacturing Same
App 20120104340 - Yoshimizu; Yasuhito ; et al. | 2012-05-03 |
Nonvolatile memory device
Grant 8,115,245 - Yoshimizu , et al. February 14, 2 | 2012-02-14 |
Method of forming semiconductor device including trench gate structure
Grant 8,053,286 - Miyata , et al. November 8, 2 | 2011-11-08 |
Nonvolatile Semiconductor Memory Device And Method Of Manufacturing The Same
App 20110233646 - MIZUSHIMA; Ichiro ; et al. | 2011-09-29 |
Semiconductor device and method of manufacturing the same
Grant 7,986,000 - Mizukami , et al. July 26, 2 | 2011-07-26 |
Semiconductor device having an elevated source/drain structure of varying cross-section
Grant 7,906,809 - Aiso March 15, 2 | 2011-03-15 |
Method of manufacturing semiconductor storage device
Grant 7,863,166 - Suzuki , et al. January 4, 2 | 2011-01-04 |
Semiconductor device and method of manufacturing the same
Grant 7,858,508 - Fujimoto , et al. December 28, 2 | 2010-12-28 |
Semiconductor memory device manufacturing method and semiconductor memory device
Grant 7,842,564 - Mizushima , et al. November 30, 2 | 2010-11-30 |
Semiconductor Device And Method Of Manufacturing The Same
App 20100117135 - MIZUKAMI; Makoto ; et al. | 2010-05-13 |
Method Of Manufacturing Semiconductor Storage Device
App 20100112791 - Suzuki; Takashi ; et al. | 2010-05-06 |
Semiconductor Manufacturing Apparatus And Method For Cleaning Same
App 20100078045 - TORATANI; Kenichiro ; et al. | 2010-04-01 |
Nonvolatile Memory Device And Method For Manufacturing Same
App 20100078622 - Yoshimizu; Yasuhito ; et al. | 2010-04-01 |
Method of manufacturing semiconductor storage device
Grant 7,651,930 - Suzuki , et al. January 26, 2 | 2010-01-26 |
Nonvolatile Semiconductor Memory Device And Method For Manufacturing Same
App 20090294828 - Ozawa; Yoshio ; et al. | 2009-12-03 |
Method Of Forming Semiconductor Device Including Trench Gate Structure
App 20090130823 - MIYATA; Kyoko ; et al. | 2009-05-21 |
Semiconductor Device Having An Elevated Source/drain Structure Of Varying Cross-section
App 20090072324 - AISO; Fumiki | 2009-03-19 |
Semiconductor device and method of manufacturing the same
Grant 7,482,235 - Aiso January 27, 2 | 2009-01-27 |
Semiconductor Memory Device Manufacturing Method And Semiconductor Memory Device
App 20090014828 - MIZUSHIMA; Ichiro ; et al. | 2009-01-15 |
Method Of Manufacturing Semiconductor Storage Device
App 20090004833 - Suzuki; Takashi ; et al. | 2009-01-01 |
Semiconductor device and method of manufacturing the same
Grant 7,470,961 - Aiso December 30, 2 | 2008-12-30 |
Semiconductor device and method for producing the same
Grant 7,351,654 - Komatsu , et al. April 1, 2 | 2008-04-01 |
Semiconductor Device And Method Of Forming The Same
App 20080073708 - AISO; Fumiki | 2008-03-27 |
Method For Manufacturing A Semiconductor Device Having A Silicon Oxynitride Film
App 20070238310 - Matsuda; Yo ; et al. | 2007-10-11 |
Semiconductor device and method of manufacturing the same
App 20070224763 - Fujimoto; Hiroyuki ; et al. | 2007-09-27 |
Semiconductor device and method of manufacturing the same
App 20060267118 - Aiso; Fumiki | 2006-11-30 |
Semiconductor device and method of manufacturing the same
App 20060240657 - Aiso; Fumiki | 2006-10-26 |
Method for cleaning a deposition chamber
App 20060121194 - Aiso; Fumiki | 2006-06-08 |
Semiconductor device and method for producing the same
App 20050260862 - Komatsu, Norishiro ; et al. | 2005-11-24 |
Method of forming insulating film improved in electric insulating property
App 20040259385 - Takimoto, Toshihide ; et al. | 2004-12-23 |
Process for forming a capacitor incorporated in a semiconductor device
Grant 6,146,966 - Hirota , et al. November 14, 2 | 2000-11-14 |
Capacitor incorporated in semiconductor device having a lower electrode composed of multi-layers or of graded impurity concentration
Grant 5,959,326 - Aiso , et al. September 28, 1 | 1999-09-28 |
Fabrication process of a stack type semiconductor capacitive element
Grant 5,858,852 - Aiso , et al. January 12, 1 | 1999-01-12 |
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