U.S. patent application number 12/230936 was filed with the patent office on 2009-10-22 for cmos transistor using germanium condensation and method of fabricating the same.
This patent application is currently assigned to SAMSUNG ELECTRONICS CO., LTD.. Invention is credited to Joong S. JEON, Jun-Youn KIM.
Application Number | 20090261381 12/230936 |
Document ID | / |
Family ID | 41200382 |
Filed Date | 2009-10-22 |
United States Patent
Application |
20090261381 |
Kind Code |
A1 |
KIM; Jun-Youn ; et
al. |
October 22, 2009 |
CMOS transistor using germanium condensation and method of
fabricating the same
Abstract
Provided is a CMOS transistor formed using Ge condensation and a
method of fabricating the same. The CMOS transistor may include an
insulating layer, a silicon layer on the insulating layer and
including a p-MOS transistor region and an n-MOS transistor region,
a first gate insulating layer and a first gate on a channel region
of the p-MOS transistor region, and a second gate insulating layer
and a second gate on a channel region of the n-MOS transistor
region, wherein a source region and a drain region of the p-MOS
transistor region may be tensile-strained due to Ge condensation,
and the channel region of the n-MOS transistor region may be
tensile-strained due to the Ge condensation.
Inventors: |
KIM; Jun-Youn; (Suwon-si,
KR) ; JEON; Joong S.; (Seongnam-si, KR) |
Correspondence
Address: |
HARNESS, DICKEY & PIERCE, P.L.C.
P.O. BOX 8910
RESTON
VA
20195
US
|
Assignee: |
SAMSUNG ELECTRONICS CO.,
LTD.
|
Family ID: |
41200382 |
Appl. No.: |
12/230936 |
Filed: |
September 8, 2008 |
Current U.S.
Class: |
257/190 ;
257/E21.7; 257/E27.112; 438/154 |
Current CPC
Class: |
H01L 21/823814 20130101;
H01L 29/7848 20130101; H01L 21/823807 20130101 |
Class at
Publication: |
257/190 ;
438/154; 257/E27.112; 257/E21.7 |
International
Class: |
H01L 27/12 20060101
H01L027/12; H01L 21/84 20060101 H01L021/84 |
Foreign Application Data
Date |
Code |
Application Number |
Apr 18, 2008 |
KR |
10-2008-0036282 |
Claims
1. A CMOS transistor comprising: an insulating layer; a silicon
layer on the insulating layer and including a p-MOS transistor
region and an n-MOS transistor region; a first gate insulating
layer and a first gate on a channel region of the p-MOS transistor
region; and a second gate insulating layer and a second gate on a
channel region of the n-MOS transistor region, wherein a source
region and a drain region of the p-MOS transistor region are
tensile-strained due to Ge condensation, and the channel region of
the n-MOS transistor region is tensile-strained due to the Ge
condensation.
2. The CMOS transistor of claim 1, wherein the channel region of
the p-MOS transistor region is compressive-strained.
3. The CMOS transistor of claim 1, wherein the length of the
tensile-strained region is extended by about 0.1 to 2%.
4. The CMOS transistor of claim 1, wherein the channel region of
the p-MOS transistor region is a region in which Ge is condensed,
and the channel region of the p-MOS transistor region has a Ge mole
fraction smaller than those of the source region and the drain
region of the p-MOS transistor region.
5. The CMOS transistor of claim 1, wherein the first and second
gate insulating layers are formed of silicon oxide or a dielectric
material having a dielectric constant greater than that of the
silicon oxide.
6. The CMOS transistor of claim 1, wherein the first and second
gates are formed of polysilicon or a metal.
7. The CMOS transistor of claim 1, wherein the p-MOS transistor and
the n-MOS transistor have a fin structure, a trigate structure, an
omega gate structure, or a gate-all-around structure.
8. A method of fabricating a CMOS transistor using Ge condensation,
the method comprising: providing a substrate having an insulating
layer and a silicon layer on the insulating layer; patterning the
silicon layer into a p-MOS transistor region and an n-MOS
transistor region; forming a mask layer on the substrate using a
dielectric material to cover the p-MOS transistor region and the
n-MOS transistor region; exposing a source region and a drain
region of the p-MOS transistor region and a channel region of the
n-MOS transistor region through the mask layer; coating a SiGe
layer on the substrate to cover the source region and the drain
region of the p-MOS transistor region and the channel region of the
n-MOS transistor region; and condensing Ge of the SiGe layer in the
source region and the drain region of the p-MOS transistor region
and the channel region of the n-MOS transistor region by oxidizing
the SiGe layer.
9. The method of claim 8, wherein the channel region of the p-MOS
transistor region has greater compressive-strain compared to the
source region and the drain region of the p-MOS transistor region,
and the channel region of the n-MOS transistor region is
tensile-strained.
10. The method of claim 8, wherein the dielectric material is
silicon nitride.
11. The method of claim 8, wherein coating the SiGe layer is
performed using a sputtering method or a chemical vapor deposition
method.
12. The method of claim 11, wherein the condensation of Ge of the
SiGe layer in the silicon layer extends a length of the
corresponding silicon layer where the condensation of Ge is
performed, by about 0.1 to about 2%.
13. The method of claim 8, wherein patterning the silicon layer
into the p-MOS transistor region further comprises: coating a
second SiGe layer on the p-MOS transistor region; and condensing Ge
of the second SiGe layer in the source region, the drain region,
and the channel region of the p-MOS transistor region by oxidizing
the second SiGe layer.
14. The method of claim 13, wherein oxidizing the second SiGe layer
includes annealing the substrate in a furnace at a temperature of
about 800 to about 950.degree. C. for about a few minutes to about
one hour while supplying oxygen into the furnace.
15. The method of claim 8, wherein the p-MOS transistor and the
n-MOS transistor have a fin structure, a trigate structure, an
omega gate structure, or a gate-all-around structure.
Description
PRIORITY STATEMENT
[0001] This application claims priority under U.S.C. .sctn.119 to
Korean Patent Application No. 10-2008-0036282, filed on Apr. 18,
2008, in the Korean Intellectual Property Office (KIPO), the entire
contents of which are incorporated herein by reference.
BACKGROUND
[0002] 1. Field
[0003] Example embodiments relate to a method of fabricating a
complementary metal-oxide-semiconductor (CMOS) transistor using
germanium condensation and a CMOS transistor formed from the same,
and more particularly, to a method of fabricating a p-MOS
transistor and an n-MOS transistor by simultaneously condensing
germanium (Ge) in a p-MOS region and an n-MOS region and a CMOS
transistor formed from the same.
[0004] 2. Description of the Related Art
[0005] A major approach for increasing an operating speed of
silicon based semiconductor devices is scaling down thereof.
However, scaling down of semiconductor devices has reached limits,
and heat emission caused by an increased number of devices is a
problem. In order to address the heat emission problem, many
studies on a higher mobility channel have been conducted.
[0006] A CMOS transistor may include a p-MOS transistor and an
n-MOS transistor on a single substrate. In order to form the p-MOS
transistor and the n-MOS transistor on a single substrate, a
p-channel and an n-channel may be formed using materials different
from each other. For example, the p-channel may be formed of
strained Si and the n-channel may be formed of a Group III-V
semiconductor. However, this method may include an epitaxial
growing process, which is complicated and expensive.
SUMMARY
[0007] To address the above and/or other problems, example
embodiments provide a method of readily fabricating a CMOS
transistor by forming a p-channel and an n-channel separately on a
silicon wafer using germanium condensation, and a CMOS transistor
formed from the same.
[0008] According to example embodiments, a CMOS transistor may
include an insulating layer, a silicon layer on the insulating
layer and including a p-MOS transistor region and an n-MOS
transistor region, a first gate insulating layer and a first gate
on a channel region of the p-MOS transistor region, and a second
gate insulating layer and a second gate on a channel region of the
n-MOS transistor region, wherein a source region and a drain region
of the p-MOS transistor region may be tensile-strained due to
germanium (Ge) condensation, and the channel region of the n-MOS
transistor region may be tensile-strained due to the germanium (Ge)
condensation.
[0009] The channel region of the p-MOS transistor region may be
compressive-strained. The length of the tensile-strained region may
be extended by about 0.1 to about 2%. The channel region of the
p-MOS transistor region may be a region in which germanium (Ge) may
be condensed, and the channel region of the p-MOS transistor region
may have a germanium (Ge) mole fraction smaller than those of the
source region and the drain region of the p-MOS transistor
region.
[0010] The first and second gate insulating layers may be formed of
silicon oxide or a dielectric material having a dielectric constant
greater than that of the silicon oxide. The first and second gates
may be formed of polysilicon or a metal. The p-MOS transistor and
the n-MOS transistor may have a fin structure, a trigate structure,
an omega gate structure, or a gate-all-around structure.
[0011] According to example embodiments, a method of fabricating a
CMOS transistor using germanium (Ge) condensation may include
providing a substrate having an insulating layer and a silicon
layer on the insulating layer, patterning the silicon layer into a
p-MOS transistor region and an n-MOS transistor region, forming a
mask layer on the substrate using a dielectric material to cover
the p-MOS transistor region and the n-MOS transistor region,
exposing a source region and a drain region of the p-MOS transistor
region and a channel region of the n-MOS transistor region through
the mask layer, coating a SiGe layer on the substrate to cover the
source region and the drain region of the p-MOS transistor region
and the channel region of the n-MOS transistor region, and
condensing Ge of the SiGe layer in the source region and the drain
region of the p-MOS transistor region and the channel region of the
n-MOS transistor region by oxidizing the SiGe layer.
[0012] The channel region of the p-MOS transistor region may be
relatively compressive-strained compared to the source region and
the drain region of the p-MOS transistor region, and the channel
region of the n-MOS transistor region may be tensile-strained. The
dielectric material used to form the mask layer may be silicon
nitride. The SiGe layer may be coated using a sputtering method or
a chemical vapor deposition (CVD) method. The condensation of Ge of
the SiGe layer may extend a length of the corresponding silicon
layer where the condensation of Ge may be performed, by about 0.1
to about 2%. Patterning the p-MOS transistor region may further
include coating a second SiGe layer on the p-MOS transistor region,
and condensing Ge of the second SiGe layer in the source region,
the drain region, and the channel region of the p-MOS transistor
region by oxidizing the second SiGe layer.
[0013] Oxidizing the second SiGe layer may include annealing the
substrate in a furnace at a temperature of about 800 to about
950.degree. C. for about a few minutes to about one hour while
supplying oxygen into the furnace. The p-MOS transistor and the
n-MOS transistor may have a fin structure, a trigate structure, an
omega gate structure, or a gate-all-around structure.
BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Example embodiments will be more clearly understood from the
following detailed description taken in conjunction with the
accompanying drawings. FIGS. 1-4B represent non-limiting, example
embodiments as described herein.
[0015] FIG. 1 is a cross-sectional view of a CMOS transistor
according to example embodiments;
[0016] FIGS. 2A through 2D are cross-sectional views for explaining
a method of fabricating a CMOS transistor according to example
embodiments;
[0017] FIG. 3 is a graph showing a germanium (Ge) mole fraction in
an n-MOS transistor region; and
[0018] FIGS. 4A through 4B are cross-sectional views for explaining
a method of fabricating a CMOS transistor according to example
embodiments.
[0019] It should be noted that these Figures are intended to
illustrate the general characteristics of methods, structure and/or
materials utilized in certain example embodiments and to supplement
the written description provided below. These drawings are not,
however, to scale and may not precisely reflect the precise
structural or performance characteristics of any given embodiment,
and should not be interpreted as defining or limiting the range of
values or properties encompassed by example embodiments. For
example, the relative thicknesses and positioning of molecules,
layers, regions and/or structural elements may be reduced or
exaggerated for clarity. The use of similar or identical reference
numbers in the various drawings is intended to indicate the
presence of a similar or identical element or feature.
DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS
[0020] A CMOS transistor and a method of fabricating the CMOS
transistor using germanium condensation according to example
embodiments will now be described more fully with reference to the
accompanying drawings in which example embodiments are shown. In
the drawings, the thicknesses of layers and regions are exaggerated
for clarity. Like reference numerals in the drawings denote like
elements throughout the description. Example embodiments may,
however, be embodied in many different forms and should not be
construed as being limited to the embodiments set forth herein;
rather, these embodiments may be provided so that this disclosure
will be thorough and complete, and will fully convey the concept of
example embodiments to those skilled in the art.
[0021] It will be understood that when an element is referred to as
being "connected" or "coupled" to another element, it can be
directly connected or coupled to the other element or intervening
elements may be present. In contrast, when an element is referred
to as being "directly connected" or "directly coupled" to another
element, there are no intervening elements present. As used herein
the term "and/or" includes any and all combinations of one or more
of the associated listed items.
[0022] It will be understood that, although the terms "first",
"second", etc. may be used herein to describe various elements,
components, regions, layers and/or sections, these elements,
components, regions, layers and/or sections should not be limited
by these terms. These terms are only used to distinguish one
element, component, region, layer or section from another element,
component, region, layer or section. Thus, a first element,
component, region, layer or section discussed below could be termed
a second element, component, region, layer or section without
departing from the teachings of example embodiments.
[0023] Spatially relative terms, such as "beneath," "below,"
"lower," "above," "upper" and the like, may be used herein for ease
of description to describe one element or feature's relationship to
another element(s) or feature(s) as illustrated in the figures. It
will be understood that the spatially relative terms are intended
to encompass different orientations of the device in use or
operation in addition to the orientation depicted in the figures.
For example, if the device in the figures is turned over, elements
described as "below" or "beneath" other elements or features would
then be oriented "above" the other elements or features. Thus, the
exemplary term "below" can encompass both an orientation of above
and below. The device may be otherwise oriented (rotated 90 degrees
or at other orientations) and the spatially relative descriptors
used herein interpreted accordingly.
[0024] The terminology used herein is for the purpose of describing
particular embodiments only and is not intended to be limiting of
example embodiments. As used herein, the singular forms "a," "an"
and "the" are intended to include the plural forms as well, unless
the context clearly indicates otherwise. It will be further
understood that the terms "comprises" and/or "comprising," when
used in this specification, specify the presence of stated
features, integers, steps, operations, elements, and/or components,
but do not preclude the presence or addition of one or more other
features, integers, steps, operations, elements, components, and/or
groups thereof.
[0025] Example embodiments are described herein with reference to
cross-sectional illustrations that are schematic illustrations of
idealized embodiments (and intermediate structures) of example
embodiments. As such, variations from the shapes of the
illustrations as a result, for example, of manufacturing techniques
and/or tolerances, are to be expected. Thus, example embodiments
should not be construed as limited to the particular shapes of
regions illustrated herein but are to include deviations in shapes
that result, for example, from manufacturing. For example, an
implanted region illustrated as a rectangle will, typically, have
rounded or curved features and/or a gradient of implant
concentration at its edges rather than a binary change from
implanted to non-implanted region. Likewise, a buried region formed
by implantation may result in some implantation in the region
between the buried region and the surface through which the
implantation takes place. Thus, the regions illustrated in the
figures are schematic in nature and their shapes are not intended
to illustrate the actual shape of a region of a device and are not
intended to limit the scope of example embodiments.
[0026] Unless otherwise defined, all terms (including technical and
scientific terms) used herein have the same meaning as commonly
understood by one of ordinary skill in the art to which example
embodiments belong. It will be further understood that terms, such
as those defined in commonly-used dictionaries, should be
interpreted as having a meaning that is consistent with their
meaning in the context of the relevant art and will not be
interpreted in an idealized or overly formal sense unless expressly
so defined herein.
[0027] FIG. 1 is a cross-sectional view of a CMOS transistor 100
according to example embodiments. Referring to FIG. 1, an
insulating layer 112 may be formed on a silicon substrate 110. The
insulating layer 112 may be a silicon oxide. A p-MOS transistor 120
and an n-MOS transistor 140 separated from the p-MOS transistor may
be formed on the insulating layer 112. The p-MOS transistor 120 and
the n-MOS transistor 140 may constitute a complementary
metal-oxide-semiconductor (CMOS) transistor.
[0028] The p-MOS transistor 120 may include a p-channel 122, formed
on the insulating layer 112, and a source 121 and a drain 123
formed on both sides of the p-channel 122. The source 121 and the
drain 123 may be tensile-strained SiGe layers, and the p-channel
122 between the source 121 and the drain 123 may be a relatively
compressive-strained Si layer. The holes in the
compressive-strained Si layer may have higher mobility. The
p-channel 122 may be compressed due to the expansion of the source
121 and the drain 123. The source 121 and the drain 123 may be
expanded by condensing germanium (Ge), which has a lattice constant
greater than the source 121 and the drain 123, which may be formed
of silicon. The length of the source 121 and the drain 123 may be
extended by about 0.1 to about 2%.
[0029] The n-MOS transistor 140 may include an n-channel 142,
formed on the insulating layer 112, and a source 141 and a drain
143 formed on both sides of the n channel 142. The n-channel 142
may be a tensile-strained SiGe layer. The n-channel 142 may be
extended compared to the source 141 and the drain 143. The length
of the n-channel 142 may be extended by about 0.1 to about 2%. A
first gate insulating layer 124 and a first gate 125 may be
sequentially stacked on the p-channel 122. A second gate insulating
layer 144 and a second gate 145 may be sequentially stacked on the
n-channel 142.
[0030] The first and second gate insulating layers 124 and 144 may
be formed of silicon oxide or a dielectric material having a
dielectric constant greater than that of the silicon oxide. The
first and second gates 125 and 145 may be formed of polysilicon or
a metal. The p-MOS transistor 120 and the n-MOS transistor 140 may
have a fin structure, a trigate structure, an omega gate structure,
or a gate-all-around structure.
[0031] In example embodiments, the p-channel 122 of the p-MOS
transistor 120 may also be a SiGe layer. The SiGe layer of the
p-channel 122 of the p-MOS transistor 120 may be formed to have a
Ge mole fraction smaller than the Ge mole fraction of the source
121 and the drain 123 of the p-MOS transistor 120. The p-channel
122 of the p-MOS transistor 120 may be formed of a SiGe material in
order to increase the mobility of holes, and a difference in the Ge
mole fraction may be due to the Ge condensation in source and drain
regions to compressively-strain the p-channel 122 in a subsequent
fabrication process.
[0032] Although not shown in FIG. 1, the p-MOS transistor 120 and
the n-MOS transistor 140 may be separated by a device isolation
region (not shown). A method of fabricating a CMOS transistor
according to example embodiments will now be described with
reference to the following drawings. FIGS. 2A-2D are
cross-sectional views for explaining a method of fabricating a CMOS
transistor according to example embodiments.
[0033] Referring to FIG. 2A, an insulating layer 212 may be formed
on a silicon substrate 210, and a silicon layer 214 may be formed
on the insulating layer 212. Thus, a silicon-on-insulator (SOI)
substrate may be formed. Referring to FIG. 2B, a p-MOS transistor
region 220 and an n-MOS transistor region 240 may be formed by
patterning the silicon layer 214. A source region 221, a channel
region 222, and a drain region 223 may be formed in the p-MOS
transistor region 220, and a source region 241, a channel region
242, and a drain region 243 may be formed in the n-MOS transistor
region 240. A mask layer 230 covering the p-MOS transistor region
220 and the n-MOS transistor region 240 may be formed using a
dielectric material, for example, silicon nitride Si.sub.3N.sub.4.
Referring to FIG. 2C, a first hole h1, which exposes the source
region 221 and the drain region 223 of the p-MOS transistor region
220, and a second hole h2, which exposes the channel region 242 of
the n-MOS transistor region 240, may be formed by patterning the
mask layer 230.
[0034] Referring to FIG. 2D, a SiGe layer 250 may be formed on the
silicon substrate 210 using a sputtering method or a chemical
vapour deposition (CVD) method. The SiGe layer 250 may be formed
such that the SiGe layer 250 may contact the exposed source region
221 and the drain region 223 of the p-MOS transistor region 220 and
the channel region 242 of the n-MOS transistor region 240.
[0035] The SiGe layer 250 may be oxidized using a dry oxidation
method or a wet oxidation method. The oxidation of the SiGe layer
250 may be achieved by annealing the silicon substrate 210 in a
furnace that may be maintained at a temperature of about 800 to
about 950.degree. C. for about a few minutes to about one hour
while supplying oxygen into the furnace. The annealing condition
may vary according to the thickness of the SiGe layer 250 and the
Ge mole fraction in the SiGe layer 250. In the above oxidation
process, Si of the SiGe layer 250 may be oxidized and Ge may move
to the source region 221 and the drain region 223 of the p-MOS
transistor region 220 and the channel region 242 of the n-MOS
transistor region 240, which contacts the SiGe layer 250. The moved
Ge may not be further diffused due to the insulating layer 212
under the SiGe layer 250, and thus, the Ge may condensate in the
source region 221, the drain region 223, and the channel region
242.
[0036] The source region 221 and the drain region 223 of the p-MOS
transistor region 220 may become a SiGe layer. Because Ge has a
lattice constant greater than that of Si, the source region 221 and
the drain region 223 of the p-MOS transistor region 220 may be
tensile-strained, and thus, the channel region 222 between the
source region 221 and the drain region 223 may be
compressive-strained. The mobility of holes may be increased in the
compressive-strained channel region 222. The channel region 242 of
the n-MOS transistor region 240 may become a SiGe layer. The
channel region 242 may be tensile-strained due to the condensation
of Ge, and thus, the mobility of holes in the channel region 242
may be increased.
[0037] The concentration of Ge in the SiGe layer 250 and the
thickness of the SiGe layer 250 may be controlled so that the
source region 221 and the drain region 223 of the p-MOS transistor
region 220 and the channel region 242 of the n-MOS transistor
region 240 may have the Ge mole fraction to be extended about 0.1
to about 2% in a lengthwise direction of the channel.
[0038] A gate stack of the p-MOS transistor region 220 and a gate
stack of the n-MOS transistor region 240 may be formed using a
conventional CMOS fabrication process. Description of the
conventional CMOS fabrication process to form the gate stack of the
p-MOS transistor region 220 and the gate stack of the n-MOS
transistor region 240 is omitted. Through the above process, the
fabrication of the CMOS transistor 100 of FIG. 1 may be completed.
The CMOS transistor 100 described above may have a fin structure, a
trigate structure, an omega gate structure, or a gate-all-around
structure. According to example embodiments, the channel regions
222 and 242 of the p-MOS transistor region 220 and the n-MOS
transistor region 240 may be formed to have an optimum or improved
mobility. For example, the channel region 222 of the p-MOS
transistor region 220 and the channel region 242 of the n-MOS
transistor region 240 may be formed in a single process. Also, the
CMOS transistor 100 may be more readily formed without the need of
an additional epitaxial process.
[0039] FIG. 3 is a graph showing a Ge mole fraction in an n-MOS
transistor region. Referring to FIG. 3, Ge is not quite found in a
source region and a drain region of the n-MOS transistor region,
and the Ge mole fraction in a channel region may be about 60%. The
gradient of the Ge mole fraction between the channel region and the
source and drain regions may vary according to the size and the
location of the second hole h2 of FIG. 2C. The Ge mole fraction in
the p-MOS transistor region, for example, the Ge mole fraction in
the source and drain regions, unlike in FIG. 3, may be higher and
Ge may not be quite found in the channel region.
[0040] A method of fabricating a CMOS transistor according to
example embodiments will now be described. Differences from the
method of fabricating the CMOS transistor 100 will be described.
Like reference numerals are used to indicate elements that are
substantially identical to the elements of previous example
embodiments, and thus, the detailed description thereof will not be
repeated.
[0041] FIGS. 4A-4B are cross-sectional views for explaining a
method of fabricating a CMOS transistor according to example
embodiments. Referring to FIG. 4A, a SOI substrate having an
insulating layer 312 formed on a Si substrate 310 and a silicon
layer 314 on the insulating layer 312 may be prepared. A p-MOS
transistor region 320 and an n-MOS transistor region 340 may be
defined by patterning the silicon layer 314. A source region 321, a
channel region 322, and a drain region 323 may be formed in the
p-MOS transistor region 320. A source region 341, a channel region
342, and a drain region 343 may be formed in the n-MOS transistor
region 340. A mask layer 330 covering the Si substrate 310, except
for the p-MOS transistor region 320, may be formed using a
dielectric material.
[0042] Referring to FIG. 4B, a SiGe layer 360 may be formed on the
Si substrate 310 using a sputtering method or a CVD method. The
SiGe layer 360 may be formed such that the SiGe layer 360 may
contact the exposed p-MOS transistor region 320. The SiGe layer 360
may be oxidized using a dry oxidation method or a wet oxidation
method. In the oxidation process, Si of the SiGe layer 360 may
become a silicon oxide in the p-MOS transistor region 320, and Ge
may move to the channel region 322, the source region 321, and the
drain region 323 of the p-MOS transistor region 320. Thus, Ge may
be condensed in the channel region 322, the source region 321, and
the drain region 323. The Ge condensation may increase the mobility
of holes in the p-MOS transistor.
[0043] The silicon oxide generated during the oxidation process may
be removed, and a mask layer 230 (refer to FIG. 2B) may be formed
on the Si substrate 310. Subsequent processes are substantially
identical to the processes of previous example embodiments, and
thus, the detailed description will not be repeated. According to
example embodiments, the mobility of the p-MOS transistor may be
optimized or improved.
[0044] In the above example embodiments, methods of simultaneously
straining a channel region of a p-MOS transistor region and a
channel region of an n-MOS transistor region may be described.
However, example embodiments may not be limited thereto, for
example, the degree of straining of each of the channel regions may
be optimized or improved by differentiating the thicknesses of the
SiGe layers or changing the ratio of Ge in the p-MOS transistor
region and the n-MOS transistor region. Also, the SiGe layer in the
p-MOS transistor region and the n-MOS transistor region may be
sequentially formed.
[0045] While example embodiments have been particularly shown and
described with reference to example embodiments thereof, it will be
understood by one of ordinary skill in the art that various changes
in form and details may be made therein without departing from the
spirit and scope of the following claims.
* * * * *