U.S. patent application number 12/364772 was filed with the patent office on 2009-06-04 for phosphorus activated nmos using sic process.
This patent application is currently assigned to Texas Instruments Incorporated. Invention is credited to Srinivasan Chakravarthi, P. R. Chidambaram.
Application Number | 20090142890 12/364772 |
Document ID | / |
Family ID | 36073022 |
Filed Date | 2009-06-04 |
United States Patent
Application |
20090142890 |
Kind Code |
A1 |
Chakravarthi; Srinivasan ;
et al. |
June 4, 2009 |
Phosphorus Activated NMOS Using SiC Process
Abstract
A method (10) of forming a transistor (100) includes treating
(12) at least some of a semiconductor substrate (102) with carbon
and then forming (18) a gate structure (114) over the semiconductor
substrate. A channel region (122) is thereby being defined within
the semiconductor substrate (102) below the gate structure (114).
Source and drain regions (140, 142) are then formed (26) within the
semiconductor substrate (102) on opposing sides of the channel
(122) with a phosphorus dopant.
Inventors: |
Chakravarthi; Srinivasan;
(Murphy, TX) ; Chidambaram; P. R.; (Richarson,
TX) |
Correspondence
Address: |
TEXAS INSTRUMENTS INCORPORATED
P O BOX 655474, M/S 3999
DALLAS
TX
75265
US
|
Assignee: |
Texas Instruments
Incorporated
Dallas
TX
|
Family ID: |
36073022 |
Appl. No.: |
12/364772 |
Filed: |
February 3, 2009 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
11558179 |
Nov 9, 2006 |
|
|
|
12364772 |
|
|
|
|
Current U.S.
Class: |
438/197 ;
257/E21.615 |
Current CPC
Class: |
H01L 29/66636 20130101;
H01L 29/6656 20130101; H01L 29/1054 20130101; H01L 29/6659
20130101; H01L 29/165 20130101; H01L 29/66651 20130101 |
Class at
Publication: |
438/197 ;
257/E21.615 |
International
Class: |
H01L 21/8232 20060101
H01L021/8232 |
Claims
1-14. (canceled)
15. A method of forming a transistor, comprising: forming a gate
structure over a semiconductor substrate, a channel region thereby
being defined within the semiconductor substrate under the gate
structure; etching portions of the substrate on opposing sides of
the channel region; forming silicon carbon material within the
etched portions of the substrate; and forming source and drain
regions within the semiconductor substrate on opposing sides of the
channel with a phosphorus dopant.
16. The method of claim 15, wherein the silicon carbon material is
epitaxially grown.
17. The method of claim 15, further comprising: forming sidewall
spacers adjacent to the gate structure prior to etching the
substrate, etched portions of the substrate thereby being
substantially aligned with the sidewall spacers.
18. The method of claim 17, wherein the silicon carbon material is
epitaxially grown.
19. The method of claim 15, further comprising: forming offset
spacers adjacent to the gate structure prior to etching the
substrate, etched portions of the substrate thereby being
substantially aligned with the offset spacers.
20. The method of claim 19, wherein the substrate is etched to a
depth of between about 200 angstroms to about 400 angstroms.
21. A method of forming a transistor comprising: forming a gate
structure over a semiconductor substrate, a channel region thereby
being defined within the semiconductor substrate below the gate
structure; etching portions of the substrate on opposing sides of
the channel region; forming silicon carbon material within the
etched portions of the substrate; forming sidewall spacers adjacent
to the gate structure; forming source and drain regions within the
semiconductor substrate on opposing sides of the channel with a
phosphorus dopant, the source and drain regions being substantially
aligned with the sidewall spacers; etching away the sidewall
spacers; forming offset spacers adjacent to the gate structure; and
forming source and drain extension regions within the semiconductor
substrate on opposing sides of the channel with a phosphorus
dopant, the source and drain extension regions being substantially
aligned with the offset spacers.
22. A method of forming a transistor comprising: forming a gate
structure over a semiconductor substrate, a channel region thereby
being defined within the semiconductor substrate below the gate
structure; forming sidewall spacers adjacent to the gate structure;
forming source and drain regions within the semiconductor substrate
on opposing sides of the channel with a phosphorus dopant, the
source and drain regions being substantially aligned with the
sidewall spacers; etching the sidewall spacers and portions of the
source and drain regions within the substrate; forming silicon
carbon material within etched portions of the substrate; forming
offset spacers adjacent to the gate structure; and forming source
and drain extension regions within the semiconductor substrate on
opposing sides of the channel with a phosphorus dopant, the source
and drain extension regions being substantially aligned with the
offset spacers.
23. A method of forming a transistor comprising: forming a gate
structure over a semiconductor substrate, a channel region thereby
being defined within the semiconductor substrate below the gate
structure; forming sidewall spacers adjacent to the gate structure;
forming source and drain regions within the semiconductor substrate
on opposing sides of the channel with a phosphorus dopant, the
source and drain regions being substantially aligned with the
sidewall spacers; etching away the sidewall spacers; forming offset
spacers adjacent to the gate structure; forming source and drain
extension regions within the semiconductor substrate on opposing
sides of the channel with a phosphorus dopant, the source and drain
extension regions being substantially aligned with the offset
spacers; etching the portions of the source and drain regions and
extension regions within the substrate; and forming silicon carbon
material within etched portions of the substrate.
Description
FIELD OF INVENTION
[0001] The present invention relates generally to semiconductor
fabrication and more particularly to utilizing a phosphorus dopant
in a semiconductor substrate that has been treated to include
silicon carbon material in a transistor fabrication process.
BACKGROUND OF THE INVENTION
[0002] A conventional MOS transistor generally includes a
semiconductor substrate, such as silicon, having a gate structure
or gate stack formed there-over. The gate structure comprises a
conductive gate electrode overlying a thin gate dielectric. The
gate electrode typically includes polysilicon and the gate
dielectric an oxide based material. Source and drain regions are
formed in the substrate substantially aligned with the gate
structure. The source and drain regions are generally formed by
applying a dopant to the select regions of the substrate. A channel
is defined within the substrate under the gate structure between
the source and drain regions.
[0003] A voltage applied to the gate electrode induces an electric
field across the channel of the MOS transistor, and the amount of
current that flows through the channel is directly proportional to
an activation level of the source and drain regions. Thus, the
higher the activation level of the source and drain regions, the
more current can flow and the faster a circuit can perform wherein
such a MOS transistor is incorporated. Phosphorous is a dopant that
causes source and drain regions to have a high activation level as
compared to conventional source/drain dopants, such as arsenic, for
example. However, phosphorus has a high diffusity which can lead to
non-abrupt junctions. Non-abrupt junctions can be detrimental to
the performance of the transistor by adversely affecting channel
characteristics, injection velocity, carrier mobility and/or drive
current.
[0004] It would thus be advantageous to have a phosphorus doped
transistor wherein diffusity is substantially mitigated.
SUMMARY OF THE INVENTION
[0005] The following presents a simplified summary of the invention
in order to provide a basic understanding of some aspects of the
invention. This summary is not an extensive overview of the
invention. It is intended neither to identify key or critical
elements of the invention nor to delineate the scope of the
invention. Rather, its primary purpose is merely to present one or
more concepts of the invention in a simplified form as a prelude to
the more detailed description that is presented later.
[0006] The present invention relates to a device and method of
fabrication, wherein a transistor device exhibits a high level of
activity due to the use of phosphorus as a source/drain dopant. One
or more portions of a silicon substrate upon which the device is
formed are treated to include carbon which mitigates the proclivity
of phosphorus to diffuse. In this manner, a transistor device
having a high level of activity is produced having more abrupt
junctions. As such, channel characteristics, injection velocity,
carrier mobility and/or drive current are thereby enhanced.
Further, the carbon within the substrate may produce a tensile
stress therein which may further enhance mobility and lower channel
resistance.
[0007] To the accomplishment of the foregoing and related ends, the
following description and annexed drawings set forth and detail
certain illustrative aspects and implementations of the invention.
These are indicative of but a few of the various ways in which one
or more aspects of the present invention may be employed. Other
aspects, advantages and novel features of the invention will become
apparent from the following detailed description of the invention
when considered in conjunction with the annexed drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0008] FIG. 1 is a flow chart illustrating an exemplary methodology
of forming a transistor according to one or more aspects of the
present invention.
[0009] FIGS. 2-10 are a plurality of fragmentary cross sectional
diagrams illustrating a transistor device being formed in
accordance with the methodology set forth in FIG. 1.
[0010] FIG. 11 is a flow chart illustrating another exemplary
methodology of forming a transistor according to one or more
aspects of the present invention.
[0011] FIGS. 12-20 are a plurality of fragmentary cross sectional
diagrams illustrating a transistor device being formed in
accordance with the methodology set forth in FIG. 11.
[0012] FIG. 21 is a flow chart illustrating yet another exemplary
methodology of forming a transistor in accordance with one or more
aspects of the present invention.
[0013] FIGS. 22-27 are a plurality of fragmentary cross sectional
diagrams illustrating a transistor device being formed in
accordance with the methodology set forth in FIG. 21.
[0014] FIG. 28 is a flow chart illustrating still another exemplary
methodology of forming a transistor according to one or more
aspects of the present invention.
[0015] FIGS. 29-34 are a plurality of fragmentary cross sectional
diagrams illustrating a transistor device being formed in
accordance with the methodology set forth in FIG. 28.
DETAILED DESCRIPTION OF THE INVENTION
[0016] One or more aspects of the present invention are described
with reference to the drawings, wherein like reference numerals are
generally utilized to refer to like elements throughout, and
wherein the various structures are not necessarily drawn to scale.
It will be appreciated that where like acts, events, elements,
layers, structures, etc. are reproduced in the Figs., subsequent
(redundant) discussions of the same may be omitted for the sake of
brevity. In the following description, for purposes of explanation,
numerous specific details are set forth in order to provide a
thorough understanding of one or more aspects of the present
invention. It may be evident, however, to one of ordinary skill in
the art that one or more aspects of the present invention may be
practiced with a lesser degree of these specific details. In other
instances, known structures are shown in diagrammatic form in order
to facilitate describing one or more aspects of the present
invention.
[0017] The present invention relates to forming a transistor in a
manner that mitigates phosphorus diffusion. In particular, a
phosphorus dopant is utilized in forming source and drain regions
of the transistor. To mitigate phosphorus diffusion, a substrate
into which the phosphorus is implanted and in which the source and
drain regions are formed is treated to include carbon prior to the
source/drain implantation. The carbon acts as a gettering agent for
phosphorus interstitials that have a tendency to diffuse. In this
manner, the highly active phosphorus can be desirably implanted
while the carbon facilitates maintaining substantially abrupt
source/drain junctions. Further, the carbon may produce a tensile
stress within the substrate that may further enhance carrier
mobility and lower channel resistance.
[0018] Turning to FIGS. 1-10, an exemplary methodology 10 is
illustrated for forming a transistor 100 (FIG. 10) according to one
or more aspects of the present invention, wherein FIG. 1
illustrates the exemplary methodology 10 and FIGS. 2-10 illustrate
the exemplary transistor device at various stages of fabrication.
Although the methodology 10 is illustrated and described
hereinafter as a series of acts or events, it will be appreciated
that the present invention is not limited by the illustrated
ordering of such acts or events. For example, some acts may occur
in different orders and/or concurrently with other acts or events
apart from those illustrated and/or described herein. In addition,
not all illustrated steps may be required to implement a
methodology in accordance with one or more aspects of the present
invention. Further, one or more of the acts may be carried out in
one or more separate acts or phases. It will be appreciated that a
methodology carried out according to one or more aspects of the
present invention may be implemented in association with the
formation and/or processing of structures illustrated and described
herein as well as in association with other structures not
illustrated or described herein.
[0019] The methodology 10 begins at 12 wherein a semiconductor
substrate 102 is treated to include carbon to produce a layer of
silicon carbon material 104 over or at a top portion of the
substrate. (FIG. 2). It is to be appreciated that substrate or
semiconductor substrate as used herein can include a base
semiconductor wafer or any portion thereof (e.g., one or more wafer
die) as well as any epitaxial layers or other type of semiconductor
layers formed thereover and/or associated therewith. The substrate
can comprise, for example, silicon, silicon germanium, etc. The
silicon carbon layer 104 may be formed to a thickness of between
about 400 angstroms to about 600 angstroms via an epitaxial process
performed over an entire wafer, for example. Epitaxy is a process
by which a thin layer of single-crystal material is deposited on a
single-crystal substrate. Epitaxial growth occurs in such way that
the crystallographic structure of the substrate is reproduced in
the growing material.
[0020] To establish the silicon carbon layer 104, a carbon
containing source gas such as HCl and/or disilane can be added to
an epitaxial deposition chamber, for example, such that carbon is
incorporated into the silicon in-situ. It will be appreciated that
doing a silicon carbide epi deposition is different from masking
off an area and doing a carbon implant because different equipment
is used and the amount of carbon obtainable is much higher. For
example, the amount of carbon produced within/upon the substrate in
accordance with one or more aspects of the present invention, may
be on the order of about 0.5 to about 2 atomic percent for a layer
having a thickness of between about 100 to about 300 angstroms.
Such a concentration of carbon may provide a tensile strain in the
substrate, and more particularly within a channel region
established within the substrate (discussed below), of about 300
megapascals to about 2 gigapascals, for example, where such a
tensile strain can improve electron mobility within the channel and
thus the operating speed of a resulting NMOS transistor.
[0021] The methodology 10 then advances to 14, wherein a layer of
silicon capping material 106 is formed over the carbon including
semiconductor substrate (FIG. 3). For example, a subsequent silicon
deposition may be performed within the same processing chamber with
the carbon source (e.g., HCl feed gas) turned off. The layer of
silicon capping material 106 may be formed to a thickness of
between about 100 angstroms to about 400 angstroms, for example,
depending upon the device being formed and how it is to be
optimized. In this manner, the silicon carbide layer 104 is
operative to provide stress to the channel region established
within the substrate (discussed below), while not giving rise to
contamination issues within the channel.
[0022] An isolation process (e.g., STI, LOCOS) is then performed at
16 to establish areas of dielectric material 110 within the
substrate 102 (FIG. 4). The isolation regions 110 electrically
isolate active regions from one another (e.g., the region where the
transistor is formed). The isolation process is, however, generally
performed at a relatively high temperature (e.g., on the order of
about 1000 degrees Celsius for about 30 minutes), which can
deactivate the carbon. Thus, amorphizing dopants (not shown) may be
implanted to reactivate the carbon. By way of example, Germanium
can be implanted at about 1E14 atoms/cm.sup.3 and/or Indium can be
implanted at about 1E13 atoms/cm.sup.3. Such amorphizing implants
can be implanted along with Vt.sub.ADJUST implants (not shown) that
are utilized to adjust a threshold voltage at which the transistor
begins to conduct current or "turns on".
[0023] Subsequently, at 18, a gate structure or gate stack 114 is
formed over the layer of capping material 106 and silicon carbon
layer 104 (FIG. 5). Although not shown, it will be appreciated that
the gate structure 114 is created by forming a layer of gate
dielectric material over the layer of capping material 106, and
then forming a layer of gate electrode material over the layer of
gate dielectric material. The layer of gate dielectric material can
include any of a number of suitable dielectric or non-conductive
materials. Some examples include silicon dioxide, high-k dielectric
materials, or a stack of such layers. By way of further example,
the layer of gate dielectric material may include any one or more
of the following, either alone or in combination: SiO.sub.2,
aluminum oxide (Al.sub.2O.sub.3), zirconium silicate, hafnium
silicate, hafnium silicon oxynitride, hafnium oxynitride, zirconium
oxynitride, zirconium silicon oxynitride, hafnium silicon nitride,
lanthanum oxide (La.sub.2O.sub.3), hafnium oxide (HfO.sub.2),
zirconium oxide (ZrO.sub.2), cerium oxide (CeO.sub.2), bismuth
silicon oxide (Bi.sub.4Si.sub.2O.sub.12), titanium dioxide
(TiO.sub.2), tantalum oxide (Ta.sub.2O.sub.5), tungsten oxide
(WO.sub.3), yttrium oxide (Y.sub.2O.sub.3), lanthanum aluminum
oxide (LaAlO.sub.3), barium strontium titanate, barium strontium
oxide, barium titanate, strontium titanate, PbZrO.sub.3, PST, PZN,
PZT and PMN.
[0024] Additionally, the layer of gate dielectric material can be
formed to a thickness of about 1 nanometer or more, and can have an
equivalent oxide thickness (EOT) of about 1 nanometer or less, for
example, while the gate electrode layer can be formed to a
thickness of between about 50 to about 200 nanometers, for example.
The gate electrode layer generally includes polysilicon, SiGe
and/or metal. The gate electrode and gate dielectric layers are
then patterned to establish the gate stack 114. Generally, the
layer of gate electrode material is patterned first and the layer
of gate dielectric material becomes at least partially patterned as
part of this process. For example, an etchant utilized to pattern
the layer of gate electrode material may also remove some of the
layer of gate dielectric material. Similarly, clean up steps
associated with patterning the layer of gate electrode material as
well as clean up steps associated with a hard mask removal process
may also remove some of the layer of gate dielectric material. The
gate structure or stack 114 is thereby established which comprises
a gate dielectric 116 under a gate electrode 118. The gate
electrode 118 is somewhat electrically conductive, and may be made
more conductive via doping. The gate electrode 118 provides a
contact area or surface for applying a voltage to the transistor.
Additionally, a channel region 122 is defined within the substrate
under the gate stack 114.
[0025] Offset spacers 124 are then formed adjacent to the gate
structure 114 at 20 (FIG. 6). For example, a thin layer of offset
material (e.g., oxide and/or nitride) is formed generally
conformally over the patterned gate structure 114 and then etched
using a generally directional etch, such as an anisotropic dry
etch, for example, to remove the layer of offset material at all
places other than adjacent to the gate structure 114. As such, thin
offset spacers 124 are left on lateral edges of the gate stack 114.
Such spacers 124 may have a width of between about 10 angstroms to
about 50 nanometers, for example.
[0026] A source/drain extension region implant, for example, is
then performed at 22 to establish extension regions 130 on opposing
sides of the channel region 122 (FIG. 6). According to one or more
aspects of the present invention a phosphorus dopant is utilized in
forming the extension regions. It will be appreciated that lightly
doped, medium doped or heavily doped extension region implants may
be performed wherein the offset spacers 124 block the dopant
materials so that the extension regions 130 are substantially self
aligned with the offset spacers 124. A thermal process, such as a
rapid thermal anneal, for example, may then be employed to activate
the extension region dopants, which may cause the extension regions
130 to diffuse laterally underneath the offset spacers 124 and even
slightly under the gate structure 114 toward the channel 122 (FIG.
7). It will be appreciated that the extension region may be between
about 150 angstroms to about 400 angstroms thick after diffusion,
for example.
[0027] Sidewall spacers 134 are then formed on the offset spacers
124 at 24 (FIG. 8). The sidewall spacers comprise an insulating
material such as an oxide, a nitride or a combination of such
layers. The spacers 134 are formed by depositing a layer of such
spacer material(s) in a generally conformal manner, followed by a
directional (e.g., anisotropic) etch thereof, thereby removing such
spacer material at all locations except adjacent to the offset
spacers 124. The sidewall spacers 134 are substantially thicker
than the offset spacers 124, and may have a thickness of between
about 40 nanometers to about 140 nanometers, for example.
[0028] Source and drain regions 140, 142 are then formed by
implanting a phosphorus dopant within the substrate at 26 (FIG. 9).
The source/drain dopants are blocked by the sidewall spacers 134 so
that the source and drain regions 140, 142 are substantially
aligned with the sidewall spacers 134. Generally the source/drain
dopants are implanted at a higher energy and/or concentration than
the extension region implants so that the source and drain regions
140, 142 are formed to a greater depth and/or concentration than
the extension regions 130. The source and drain regions 140, 142
may be formed to a depth of between about 500 angstroms to about
1500 angstroms, for example.
[0029] A thermal (annealing) process is then employed at 28 to
activate the source/drain dopants, which may cause some lateral
diffusion thereof (e.g., under the sidewall spacers 134, and toward
the channel 122) (FIG. 10). The methodology 10 then advances to 30
wherein further back end processing can be performed, such as
siliciding, for example. It will be appreciated that one or more
aspects of the present invention are advantageous because while
phosphorus is desirable as a dopant due to its high activity, its
propensity to diffuse can lead to non-abrupt junctions (e.g.,
between the source and drain regions 140, 142 and the channel
region 122), which can adversely affect transistor performance.
Thus, treating the substrate to include carbon as disclosed herein
allows the desirable properties of phosphorus to be taken advantage
of while maintaining substantially abrupt junctions.
[0030] By way of further discussion, phosphorus is thought to
diffuse primarily by an interstitial mechanism. More particularly,
while not intending to be limited to any one theory, it is believed
that phosphorus has a higher diffusity as compared to more
conventional dopants because it is generally smaller in size. For
example, a phosphorus atom is generally smaller than an arsenic
atom. As such, the larger arsenic atom is more prone to come to
"rest" or reside within a vacancy in the silicon lattice structure,
where such a vacancy may be created, for example, when the dopant
atoms are implanted into the substrate thereby disturbing the
lattice structure. Some of the dopant atoms that bombard the
substrate result in interstitials or atoms that are un-attached
(e.g., those that do not fill respective vacancies). Due to its
(smaller) size, phosphorus atoms have a greater tendency to remain
as interstitials. Carbon tends to reduce the diffusion of
phosphorus because the carbon acts as a sink or gettering agent for
interstitials and thereby captures at least some of the phosphorus
interstitials. Thus, interstitial atoms gettered by carbon atoms
have a lower diffusity due to their (larger) size, for example.
Additionally, carbon interstitials readily react with other carbon
atoms to form an immobile pair. This is because carbon
interstitials diffuse faster than substitutional carbon.
Accordingly, utilizing phosphorus in forming a transistor on a
carbon containing substrate in accordance with one or more aspects
of the present invention reduces the number of phosphorus
interstitials thereby making the phosphorus diffuse less
aggressively, which in turn facilitates the creation of more abrupt
junctions.
[0031] Turning to FIGS. 11-20, another exemplary methodology 10' is
illustrated for forming a MOS transistor 100' (FIG. 20) in
accordance with one or more aspects of the present invention,
wherein FIG. 11 illustrates the exemplary methodology 10' and FIGS.
12-20 illustrate the exemplary transistor device at various stages
of fabrication. Many of the acts of methodology 10' are similar to
those of methodology 10 and thus are addressed with the same
reference characters, but having a prime "'" notation. Similarly,
many of the layers, elements, etc. within the corresponding cross
sectional FIGS. 12-20 are similar to those referred to within FIGS.
2-10 with regard to methodology 10 and thus are also labeled with
the same reference characters, but also having a prime "'"
designation. For purposes of brevity where the same layers,
features, elements, acts, etc. of methodology 10 are reproduced in
methodology 10' and the accompanying figures., they are not once
again elaborated upon.
[0032] At 16' isolation regions 110' are formed within a substrate
102' to separate electrically active regions from one another (FIG.
12). For example, the substrate 102' can be selectively etched and
dielectric materials can be formed within the etched areas to form
the isolation regions 110'. A Vt.sub.ADJUST implant is then
performed at 15' for setting or adjusting a threshold voltage of
the transistor. As such, Vt.sub.ADJUST dopant atoms 111' are
established within the substrate 102' (FIG. 12). The substrate 102'
is then subjected to an optional etching process at 8' to form a
recess 113' therein to a depth 109' of between about 200 angstroms
to about 600 angstroms, for example (FIG. 13). The recess 113' is
then filled with a silicon carbon material 104' at 12' (e.g., via
an epitaxial process) (FIG. 14). It will be appreciated that the
etching at 8' is optional because the layer of silicon carbon
material 104' can be formed directly onto the substrate 102' as
discussed above with regard to FIG. 2. Further, the Vt.sub.ADJUST
implant is likewise optional and may also be performed before the
isolation regions 110' are formed at 16' as well as after the
silicon carbon material 104' is formed at 12'. Should dopant atoms
be implanted before isolation regions are formed, subsequent
amorphizing can be performed to re-activate the dopant atoms that
may have become de-activated during the (high temperature)
isolation processing.
[0033] A layer of silicon capping material 106' is then formed over
the layer of silicon carbon material at 14' (FIG. 15). A gate
structure or gate stack 114' is subsequently formed over the layer
of capping material 106' at 18' (FIG. 16). The gate structure 114'
comprises a gate dielectric 116' under a gate electrode 118' and
defines a channel region 122' thereunder within the substrate 102'.
Offset spacers 124' are formed adjacent to the gate structure 114'
at 20' (FIG. 17). Source/drain extension regions 130' are then
formed at 22' within the substrate 102' on opposing sides of the
channel region 122' with the offset spacers 124' serving as guides
(FIG. 17). According to one or more aspects of the present
invention, the extension regions 130' are formed with a phosphorus
dopant. A thermal (anneal) may be performed to activate the dopants
within the extension regions 130' which may cause the extension
regions 130' to diffuse laterally under the offset spacers 124'
toward the channel region 122' (FIG. 18).
[0034] Sidewall spacers 134' are then formed on the offset spacers
124' at 24' (FIG. 18). Source and drain regions 140', 142' are then
formed within the substrate 102' on opposing sides of the channel
region 122' with the sidewall spacers 134' serving as guides (FIG.
19). According to one or more aspects of the present invention, the
source and drain regions 140', 142' are formed with a phosphorus
dopant. A thermal (anneal) is subsequently performed at 28' to
activate source/drain dopants which may cause the source and drain
regions 140', 142' to diffuse laterally under the sidewall spacers
134' toward the channel region 122' (FIG. 20). The methodology 10'
then advances to 30' wherein further back end processing can be
performed, such as siliciding, for example. The carbon within the
silicon mitigates phosphorus diffusion and thereby facilitates
sharper junctions between the source and drain regions 140', 142'
and the channel region 122'.
[0035] Turning to FIGS. 21-27, another exemplary methodology 10''
is illustrated for forming a MOS transistor 100'' (FIG. 27) in
accordance with one or more aspects of the present invention,
wherein FIG. 21 illustrates the exemplary methodology 10'' and
FIGS. 22-27 illustrate the exemplary transistor device at various
stages of fabrication. Many of the acts of methodology 10'' are
similar to those of methodology 10 and thus are addressed with the
same reference characters, but having a double prime "''" notation.
Similarly, many of the layers, elements, etc. within the
corresponding cross sectional FIGS. 22-27 are similar to those
referenced within FIGS. 2-10 with regard to methodology 10 and thus
are also labeled with the same reference characters, but also
having a double prime "''" designation. For purposes of brevity the
same layers, features, elements, acts, etc. of methodology 10 that
are reproduced in methodology 10'' and the accompanying figures.,
are not discussed in great detail.
[0036] At 18'' a gate structure 114'' is formed over a substrate
102'' at the beginning of the methodology 10'' (FIG. 22). The gate
structure 114'' is formed within an active area of the substrate
102'' which is electrically isolated from other active areas by
isolation regions 110'' formed in and on the substrate 102''.
Offset spacers 124'' are formed adjacent to the gate structure
114'' at 20'' (FIG. 23). Source/drain extension regions 130'' are
then formed in the substrate 102'' on opposing sides of a channel
region 122'' underlying the gate structure 114'' at 22'' (FIG. 23).
The extension regions 130'' are formed with a phosphorus dopant and
are generally aligned with the offset spacers 124'', but may creep
under the spacers 124'' as a result of thermal processing (e.g., a
high temperature anneal) (FIG. 23).
[0037] The substrate 102'' is then etched at 8'' to form recesses
113'' therein between the offset spacers 124'' and the isolation
regions 110'' (FIG. 24). Such recesses may be formed to a depth
109'' of between about 200 angstroms to about 600 angstroms, for
example. The recesses 113'' are then filled with silicon carbon
material 104'' at 12'' (e.g., via an epitaxial process) (FIG. 25).
Sidewall spacers 134'' are formed adjacent to the offset spacers
124'' at 24'' (FIG. 26). Source and drain regions 140'', 142'' are
formed in the substrate 102'' at 26'' on opposing sides of the
channel region 122'' at 26'' with a phosphorus dopant (FIG. 26). An
anneal is then performed at 28'' to activate source/drain dopants
which may cause the source and drain regions 140'', 142'' to
diffuse laterally under the sidewall spacers 134'' toward the
channel region 122'' (FIG. 27). The methodology 10'' then proceeds
to 30'' wherein further back end processing can be performed.
[0038] Turning to FIGS. 28-34, yet another exemplary methodology
10''' is illustrated for forming a MOS transistor 100'' (FIG. 34)
in accordance with one or more aspects of the present invention,
wherein FIG. 28 illustrates the exemplary methodology 10''' and
FIGS. 29-34 illustrate the exemplary transistor device at various
stages of fabrication. Many of the acts of methodology 10''' are
similar to those of methodology 10 and thus are addressed with the
same reference characters, but this time having a triple prime
"'''" notation. Similarly, many of the layers, elements, etc.
within the corresponding cross sectional FIGS. 29-34 are similar to
those referenced within FIGS. 2-10 with regard to methodology 10
and thus are also labeled with the same reference characters, but
also having a triple prime "'''" designation. For purposes of
brevity the same layers, features, elements, acts, etc. of
methodology 10 that are reproduced in methodology 10''' and the
accompanying figures., are discussed in substantially less
detail.
[0039] At the outset, a gate structure 114''' is formed over a
substrate 102''' at 18'''(FIG. 29). The gate structure 114''' is
formed between isolation regions 110''' formed in and on the
substrate 102''' that electrically isolate active regions from one
another. At 20''' offset spacers 124''' are formed adjacent to the
gate structure 114'''(FIG. 30). At 22''' source/drain extension
regions 130''' are formed in the substrate 102''' on opposing sides
of a channel region 122''' underlying the gate structure
114'''(FIG. 30). The extension regions 130''' are formed with a
phosphorus dopant and are generally aligned with the offset spacers
124''', but may migrate under the spacers 124''' as a result of a
thermal anneal (FIG. 30). Sidewall spacers 134''' are then formed
adjacent to the offset spacers 124''' at 24'''(FIG. 31).
[0040] Recesses 113''' are then formed within the substrate
102'''(e.g., via etching) at 8'''(FIG. 32). In this example, the
recesses 113''' are formed between the sidewall spacers 124''' and
the isolation regions 110'''(FIG. 32). Such recesses may be formed
to a depth 109''' of between about 200 angstroms to about 600
angstroms, for example. The recesses 113''' are then filled with
silicon carbon material 104''' at 12'''(e.g., via an epitaxial
deposition process) (FIG. 33). Source and drain regions 140''',
142''' are subsequently formed with a phosphorus dopant in the
substrate 102''' at 26''' on opposing sides of the channel region
122''' at 26'''(FIG. 34). An anneal is then performed at 28''' to
activate source/drain dopants which may cause the source and drain
regions 140''', 142''' to diffuse laterally under the sidewall
spacers 134''' toward the channel region 122'''(FIG. 34). The
methodology 10''' then proceeds to 30''' wherein further back end
processing can be performed.
[0041] It will be appreciated that an amorphizing implant can be
performed to activate carbon atoms formed into the recesses 113'''.
An energy utilized in such an implant can be tuned so that the
complete depth of the silicon carbide within the source/drain
regions 140''', 142''' is fully amorphized. Atoms such as Germanium
and/or Indium can be implanted, for example, at relatively high
dosages, such as at about 1E15 atoms/cm.sup.3 or 1E14
atoms/cm.sup.3, respectively, for example, to achieve a depth of
about 1000 angstroms. It will be appreciated that the gate
structure would be masked off for the amorphizing implant. Further,
while not intending to be limited to any one theory, it is believed
that the silicon carbon material 104''' within the recesses 113'''
form an alloy that has a lattice with the same structure as the
silicon substrate lattice. However, the silicon carbon alloy has a
smaller spacing. Consequently, it is believed that the silicon
carbon material 104''' within the recesses 113''' will tend to
contract, thereby creating a tensile stress within the channel
122''' of the semiconductor substrate 102'''.
[0042] It will be appreciated that while reference is made
throughout this document to exemplary structures in discussing
aspects of methodologies described herein (e.g., those structures
presented in FIGS. 2-10 while discussing the methodology set forth
in FIG. 1, those structures presented in FIGS. 12-20 while
discussing the methodology set forth in FIG. 11, those structures
presented in FIGS. 22-28 while discussing the methodology set forth
in FIG. 21 and those structures presented in FIGS. 29-34 while
discussing the methodology set forth in FIG. 28), that those
methodologies are not to be limited by the corresponding structures
presented. Rather, the methodologies (and structures) are to be
considered independent of one another and able to stand alone and
be practiced without regard to any of the particular aspects
depicted in the accompanying figures.
[0043] Further, from time to time throughout this specification and
the claims that follow, one or more layers or structures may be
described as being or containing a substance such as "carbon", etc.
These descriptions are to be understood in context and as they are
used in the semiconductor manufacturing industry. For example, in
the semiconductor industry, when a layer is described as containing
carbon, it is understood that the layer comprises pure carbon as a
principle component, but that the pure carbon may be, and typically
is, alloyed, doped, or otherwise made impure. The carbon material
is not, however, treated to such an extent that its basic
properties are substantially different from that of high purity
stoichiometric carbon.
[0044] Also, the term "exemplary" as used herein is merely meant to
mean an example, rather than the best. It is also to be appreciated
that layers and/or elements depicted herein are illustrated with
particular dimensions relative to one another (e.g., layer to layer
dimensions and/or orientations) for purposes of simplicity and ease
of understanding, and that the actual dimensions of the elements
may differ substantially from that illustrated herein.
Additionally, unless stated otherwise and/or specified to the
contrary, any one or more of the elements and/or layers set forth
herein can be formed in any number of suitable ways, such as with
spin-on techniques, sputtering techniques (e.g., magnetron and/or
ion beam sputtering), thermal growth techniques and/or deposition
techniques such as chemical vapor deposition (CVD), physical vapor
deposition (PVD) and/or plasma enhanced chemical vapor deposition
(PECVD), or atomic layer deposition (ALD), for example.
[0045] The layers described herein are also generally conformal
(e.g., to underlying features) when formed, unless stated to the
contrary. Additionally, the layers described herein can be
patterned in any suitable manner (unless indicated to the
contrary), such as with etching and/or lithographic techniques.
Lithography refers to processes for pattern transfer between
various media. A radiation sensitive resist coating is formed over
one or more layers to which the pattern is to be transferred. The
resist is itself first patterned by exposing it to radiation, where
the radiation (selectively) passes through an intervening mask
containing the pattern. As a result, the exposed or unexposed areas
of the resist coating become more or less soluble, depending on the
type of resist used. A developer is then used to remove the more
soluble areas leaving the patterned resist. The pattered resist can
then serve as a mask for the underlying layers which can be
selectively etched to transfer the pattern thereto.
[0046] Although one or more aspects of the invention have been
illustrated and described with respect to one or more
implementations, equivalent alterations and/or modifications may
occur to others skilled in the art based upon a reading and
understanding of this specification and the annexed drawings. The
invention is intended to include all such modifications and
alterations. In addition, while a particular feature or aspect of
the invention may have been disclosed with respect to only one of
several implementations, such feature or aspect may be combined
with one or more other features or aspects of the other
implementations as may be desired and/or advantageous for any given
or particular application. Furthermore, to the extent that the
terms "includes", "having", "has", "with", or variants thereof are
used in either the detailed description or the claims, such terms
are intended to be inclusive in a manner similar to the term
"comprising."
* * * * *