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Semiconductor device fabrication methods for inhibiting carbon out-diffusion in wafers having carbon-containing regions Grant 6,830,980 - Mansoori , et al. December 14, 2 | 2004-12-14 |
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Fabrication of abrupt ultra-shallow junctions using angled PAI and fluorine implant Grant 6,682,980 - Chidambaram , et al. January 27, 2 | 2004-01-27 |
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