U.S. patent application number 12/237037 was filed with the patent office on 2009-02-05 for semiconductor storage device and method of fabricating the same.
This patent application is currently assigned to RENESAS TECHNOLOGY CORP.. Invention is credited to Yoshiyuki Ishigaki, Shigeki Ohbayashi, Hidemoto TOMITA.
Application Number | 20090034317 12/237037 |
Document ID | / |
Family ID | 19190861 |
Filed Date | 2009-02-05 |
United States Patent
Application |
20090034317 |
Kind Code |
A1 |
TOMITA; Hidemoto ; et
al. |
February 5, 2009 |
SEMICONDUCTOR STORAGE DEVICE AND METHOD OF FABRICATING THE SAME
Abstract
A semiconductor storage device includes a memory cell array, a
plurality of word lines, a plurality of bit lines, a first gate
wiring element 3a, 3b, a second gate wiring element 3c, 3d, a first
connector 5a, 5b, and a second connector 5c, 5d. Each memory cell
10 has first and second sets having a driver transistor 11, a load
transistor 12, and an access transistor 13. The word lines are
arranged in parallel to each other along a first direction. The bit
lines are arranged in parallel to each other along a second
direction perpendicular to the first direction. The first gate
wiring element comprises a gate electrode of the first driver
transistor and the first load transistor, and has a rectangular
shape having straight line on opposite sides. The second gate
wiring element comprises a gate electrode of the access transistor
and has a rectangular shape having straight line on opposite
sides.
Inventors: |
TOMITA; Hidemoto; (Tokyo,
JP) ; Ohbayashi; Shigeki; (Tokyo, JP) ;
Ishigaki; Yoshiyuki; (Tokyo, JP) |
Correspondence
Address: |
MCDERMOTT WILL & EMERY LLP
600 13TH STREET, N.W.
WASHINGTON
DC
20005-3096
US
|
Assignee: |
RENESAS TECHNOLOGY CORP.
Tokyo
JP
|
Family ID: |
19190861 |
Appl. No.: |
12/237037 |
Filed: |
September 24, 2008 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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11727040 |
Mar 23, 2007 |
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12237037 |
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10971115 |
Oct 25, 2004 |
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11727040 |
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10190715 |
Jul 9, 2002 |
6812574 |
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10971115 |
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Current U.S.
Class: |
365/104 |
Current CPC
Class: |
Y10S 257/903 20130101;
H01L 2924/0002 20130101; H01L 27/1104 20130101; G11C 11/412
20130101; Y10S 257/904 20130101; H01L 27/11 20130101; H01L
2924/0002 20130101; H01L 2924/00 20130101 |
Class at
Publication: |
365/104 |
International
Class: |
G11C 17/12 20060101
G11C017/12 |
Foreign Application Data
Date |
Code |
Application Number |
Oct 1, 2002 |
JP |
2002-3266 |
Claims
1. A semiconductor storage device comprising: a memory cell array
comprising memory cells each having first and second driver
transistors, first and second load transistors, and first and
second access transistors, the memory cells being two-dimensionally
arranged on a semiconductor substrate; a plurality of word lines
connected to the memory cells and arranged in parallel to each
other along a first direction; a plurality of bit lines connected
to the memory cells, the bit lines being arranged in parallel to
each other along a second direction perpendicular to the first
direction; a first gate wiring element composing a gate electrode
of the first driver transistor and the first load transistor, and
having a rectangular shape having straight line on opposite sides;
a second gate wiring element composing a gate electrode of the
access transistor, and having a rectangular shape having straight
line on opposite sides; a first connector connecting the first gate
wiring element, an active region of the second driver transistor,
and an active region of the second load transistor to each other;
and a second connector connecting the second gate wiring element to
the word lines to each other.
2-15. (canceled)
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates to a semiconductor storage
device and, more particularly, to a static random access
memory.
[0003] 2. Description of the Prior Art
[0004] A static random access memory (hereinafter referred to
"SRAM") is useful because it does not require refresh operation.
However, the number of elements constituting one memory cell in the
SRAM is large to increase an occupied area by the memory cell. For
this reason, it is required to reduce a cell area. For example,
Japanese Laid-open Patent Publication No. 9-270468 (U.S. Pat. No.
5,744,844) and Japanese Laid-open Patent Publication No. 10-178110
(U.S. Pat. No. 5,930,163) illustrate examples of cell layout in
which one cell having a length in a word line direction which is
larger than a length in a bit line direction. Of the examples, a
flat configuration of the SRAM described in Japanese Laid-open
Patent Publication No. 10-178110 is shown in FIGS. 16 and 17. FIG.
16 is a plan view related to one memory cell of the SRAM. FIG. 17
is an equivalent circuit diagram corresponding to the memory cell
shown in FIG. 16. The length in the bit line direction is shortened
to increase the speed, and the layout of an active layer and a gate
wiring element has a simple shape to reduce a cell area.
[0005] From a viewpoint of decreasing patterning size, a phenomenon
(optical proximity) in which a resist pattern on a wafer is
distorted becomes conspicuous due to the interference of light in
an exposure device. In addition, even in an etching process,
pattern distortion is generated by the micro-loading effect after
etching. The micro-loading effect is a phenomenon in which an
etching rate decreases in a direction of depth when a pattern
having a large difference in density. In recent years, in order to
minimize these pattern distortions phenomena, a technique for the
optical proximity correction (OPC) is developed and used in which a
mask pattern is automatically corrected in advance in a photography
process.
[0006] In general, in order to form a contact by forming a contact
hole in a gate wiring element, a cover margin such as a
lithographic margin and a machining margin must be set in
consideration of blur in photolithography process. For this reason,
a portion in which a contact hole should be formed on the gate
wiring element must be deformed by increasing the width of the
portion by a length corresponding to a cover margin. In addition,
since a width must be partially increased to make the width of the
gate wiring element fine, decreasing patterning size cannot be
achieved easily.
[0007] In order to decrease patterning size in consideration of an
optical proximity correction (OPC) pattern obtained by the optical
proximity correction (OPC) technique, when gate wiring elements are
complicatedly arranged, margins for the optical proximity
correction must be set in the longitudinal and lateral directions.
For this reason, a memory cell area cannot be reduced sufficiently
because sufficient decrease in size cannot be achieved, and the
margins are factors which hinder decrease in size.
SUMMARY OF THE INVENTION
[0008] It is an object of the present invention to secure
lithographic and machining margins without complicatedly deforming
a gate shape in formation of a gate wiring element of a
semiconductor storage device, especially, an SRAM.
[0009] In accordance with one aspect of the present invention,
there is a semiconductor storage device including a memory cell
array, a plurality of word lines, a plurality of bit lines, a first
gate wiring element, a second gate wiring element, a first
connector, and a second connector. The memory cell array has a
plurality of memory cells. Each memory cell has first and second
driver transistors, first and second load transistors, and first
and second access transistors. That is to say, first and second
sets each having a driver transistors, a load transistors, and an
access transistors are designed in each memory cell within SRAM.
The memory cells are two-dimensionally arranged on a semiconductor
substrate. The word lines are connected to the memory cells and are
arranged in parallel to each other along a first direction. The bit
lines are connected to the memory cells and are arranged in
parallel to each other along a second direction perpendicular to
the first direction. The first gate wiring element composes a gate
electrode of the first driver transistor and the first load
transistor, and has a rectangular shape having straight line on
opposite sides. The second gate wiring element composes a gate
electrode of the access transistor, and has a rectangular shape
having straight line on opposite sides. That is to say, the first
and second gate wiring element have fair lines such as notch-less
shape. The first connector connects the first gate wiring element,
an active region of the second driver transistor, and an active
region of the second load transistor to each other. The second
connector connects the second gate wiring element to the word
lines.
[0010] In another aspect of the present invention, there is a
semiconductor storage device including a memory cell array, a
plurality of word lines, a plurality of bit lines, a first gate
wiring element, and a second gate wiring element. The memory cell
array has a plurality of memory cells. Each memory cell has first
and second driver transistors, first and second load transistors,
and first and second access transistors are two-dimensionally
arranged on a semiconductor substrate. The word lines are connected
to the memory cells and arranged in parallel to each other along a
first direction. The bit lines are connected to the memory cells
and arranged in parallel to each other along a second direction
perpendicular to the first direction. The first gate wiring element
composes a gate electrode of the first driver transistor and the
first load transistor. The second gate wiring element is connected
to the access transistor.
[0011] In the semiconductor storage device according to the present
invention, the first gate wiring element and the second gate wiring
element have rectangular shapes each having straight line on
opposite sides and being free from a notch or a projection, and are
linearly laid out. In this manner, since the first and second gate
wiring elements can be formed at high accuracy, the characteristics
of transistors constituting a memory cells can be stabilized. For
this reason, a semiconductor storage device having stable
characteristics can be obtained. In the semiconductor storage
device, contacts to the respective wiring elements are formed by
using local inter connectors (LICs). More specifically, the
contacts of the respective gate wiring elements are not formed
through via holes directly formed on the gate wiring elements, but
the contacts are formed by the local inter connectors (LICs) formed
by tungsten damascene. When the local inter connectors (LICs) are
used, regular gate wiring elements each having a rectangular shape
can be laid out without making a cover margin for contact in
formation of the gate wiring elements. In addition, since the first
gate wiring elements and the second gate wiring elements are laid
out in parallel to each other, in the step of forming gate wiring
elements by photolithography process, pattern distortion caused by
interference can be suppressed. Therefore, an optical proximity
effect in the photolithography process can be suppressed.
BRIEF DESCRIPTION OF THE DRAWINGS
[0012] The present invention will become readily understood from
the following description of preferred embodiments thereof made
with reference to the accompanying drawings, in which like parts
are designated by like reference numeral and in which:
[0013] FIG. 1 is a circuit diagram of an equivalent circuit
corresponding to one memory cell of a semiconductor storage device
according to a first embodiment of the present invention;
[0014] FIG. 2 is a plan view of a configuration in which gate
wiring elements of the semiconductor storage device according to
first embodiment of the present invention are centered;
[0015] FIG. 3 is a sectional view of the configuration along A-A'
line in FIG. 2;
[0016] FIG. 4 is a sectional view of the configuration along B-B'
line in FIG. 2;
[0017] FIG. 5 is a sectional view of the configuration along C-C'
line in FIG. 2;
[0018] FIG. 6 is a sectional view of the configuration along D-D'
line in FIG. 2;
[0019] FIG. 7 is a conceptual plan view of a portion related to
wires of a memory cell of the semiconductor storage device
according to first embodiment of the present invention when viewed
from the above;
[0020] FIG. 8 is a plan view showing the step of forming gate
wiring elements in a method of fabricating a semiconductor storage
device according to first embodiment of the present invention;
[0021] FIG. 9 is a plan view of a step of forming stack via holes
for connecting a formed local inter connector LIC in the
method;
[0022] FIG. 10 is a plan view of a step of burying tungsten in a
first via hole and removing tungsten from the other area by
etching;
[0023] FIG. 11 is a plan view of a step of depositing a third metal
layer and etching the third metal layer in the method;
[0024] FIG. 12 is a plan view of a step of forming gate wiring
elements in four memory cells of a semiconductor storage device
according to a second embodiment of the present invention;
[0025] FIG. 13 is a plan view of a configuration in which the four
gate wiring elements in the four memory cells of the semiconductor
storage device according to the second embodiment are centered;
[0026] FIG. 14 is a plan view of another configuration in which
gate wiring elements of four memory cells of the semiconductor
storage device according to the second embodiment of the present
invention are centered;
[0027] FIG. 15 is a graph on a relationship between an aspect ratio
of a gate wiring element and the number of generated defects in a
semiconductor storage device according to a fourth embodiment of
the present invention;
[0028] FIG. 16 is a plan view of a configuration in which gate
wiring elements in a prior art semiconductor storage device are
centered; and
[0029] FIG. 17 is a circuit diagram of an equivalent circuit
corresponding to one memory cell of the semiconductor storage
device shown in FIG. 16.
DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
[0030] Semiconductor storage devices according to embodiments of
the present invention and a method of fabricating the same will be
described below with reference to the accompanying drawings.
[0031] A semiconductor storage device according to first embodiment
of the present invention and a method of fabricating the same will
be described below with reference to FIGS. 1 to 11. The
semiconductor storage device will be described first with reference
to FIGS. 1 to 7. The semiconductor storage device, as shown in FIG.
1, has a memory cell array in which memory cells 10 each including
two sets of a driver transistor 11, a load transistor 12, and an
access transistor 13 are two-dimensionally arranged. Wires of one
of the memory cells 10 will be described below. This memory cell 10
has two types of gate wiring elements. More specifically, the
memory cell 10 has a first gate wiring elements 3a and 3b composing
a gate electrode of the driver transistor 11 to the load transistor
12, and connecting the driver transistor 11 to the load transistor
12. Additionally, the memory cell 10 has second gate wiring
elements 3c and 3d composing a gate electrode of the access
transistor 13, and connecting the access transistor 13 to a word
line WL. The first gate wiring elements 3a, 3b and the second gate
wiring elements 3c, 3d have rectangular shapes having straight line
on opposite sides being free from a notch or a projection, and are
laid out to have longitudinal directions thereof are parallel to
the direction of the gate width of the access transistor 13. More
specifically, the gate wiring elements 3 are laid out in parallel
to longitudinal direction of a word line. In this manner, since the
first and second gate wiring elements 3a, 3b, 3c, and 3d can be
formed at high accuracy, the characteristics of the respective
transistors can be made stable. For this reason, a semiconductor
storage device having stable characteristics can be fabricated. The
longitudinal direction of the word line is referred to as a first
direction. A direction being perpendicular to the first direction
is referred to as a second direction.
[0032] In Japanese Laid-open Patent Publications Nos. 2000-124332,
2000-208643, and 2000-31298 describe SRAMs each having a linearly
arranged gate wiring element. However, in all the SRAMs described
in these publications, contacts are formed by directly forming
contact holes in the gate wiring elements. In fact, since a cover
margin for making a contact is required, the gate wiring element is
deformed or has an excessive width. For this reason, in contrast to
the present invention, a rectangular gate wiring element cannot be
obtained to have straight line on opposite sides and to be free
from a notch and a projection. The "notch" mentioned here is a
crena or a depression. Therefore, the "straight line" means that a
side has substantially linear line formed without the notch.
[0033] In this semiconductor storage device, contacts to the gate
wiring elements are formed by using the local inter connector (LIC)
described in U.S. Pat. No. 5,541,427. More specifically, as the
contacts to the respective gate wiring elements, contacts are not
formed through via holes directly formed on the gate wiring
elements, and they are formed by the local inter connectors (LICs)
formed by tungsten damascene. By using the local inter connector
LIC as described above, a cover margin for contact is not needed in
fabrication of the gate wiring elements, and rectangular gate
wiring elements can be laid out having straight line on opposite
sides without a notch or a projection. Since the first gate wiring
elements 3a and 3b and the second ones 3c and 3d are laid out in
parallel to each other, pattern distortion caused by interference
can be suppressed in the step of forming the gate wiring elements
by photolithography process. For this reason, optical proximity
effect in the photolithography process can be suppressed.
Therefore, the gate wiring element can be in a small size.
[0034] In addition, the configuration of the semiconductor storage
device will be described below. As shown in FIG. 1, The
semiconductor storage device is an SRAM including first and second
driver transistors 11, first and second load transistors 12, and
first and second access transistors 13, which are arranged in one
memory cell 10. In one memory cell 10 shown in FIGS. 1 and 2, a
word line WL in the longitudinal direction is longer than a bit
line BIT in the longitudinal direction. FIG. 2 shows a
configuration in which connections between gate wiring elements 3a,
3b, 3c, and 3d and local inter connectors (LIC) 5a, 5b, 5c, and 5d
are centered. Each first gate wiring element 3a and 3b composes a
gate electrode of the driver transistors 11 and the load transistor
12. The first gate wiring elements 3a and 3b are also in contact
with the other driver transistor 11 and the other load transistor
12 in the same memory cell by the first local inter connectors
(LIC) 5a and 5b made of tungsten (W) formed by a damascene process.
Each second gate wiring element 3c, 3d composes a gate electrode of
the access transistor 13. The second gate wiring elements 3c and 3d
are also in contact with a word line by the second local inter
connectors (LICs) 5c and 5d. Cross couple wires of an inverter in
the memory cell are formed by using local inter connectors (LICs),
a bit line is formed by a second metal wire, a VDD line is formed
by a second metal wire, and a ground (GND) line is formed by a
second metal wire.
[0035] Furthermore, a configuration extending from the substrate
surface of a semiconductor substrate 1 of the semiconductor storage
device in the vertical direction will be described below with
reference to FIGS. 3 to 7. Of these drawings, FIGS. 3 to 6 are
sectional views showing the structure along cut lines in FIG. 2. In
the semiconductor substrate 1 of the semiconductor storage device,
as shown in the sectional view along the longitudinal direction
(first direction) of a word line in FIG. 3, a P well region, an N
well region, and a P well region are sequentially formed along the
first direction. In addition, the access transistor 13, the load
transistor 12, and the driver transistors 11 are formed such that
the transistors are isolated from each other by an element
isolation oxide film. On the semiconductor substrate 1, the first
gate wiring element 3b, made of poly-silicon, connecting the driver
transistors 11 to the load transistor 12 extends along the first
direction. The second gate wiring element 3c made of poly-silicon
linearly extends on the access transistor 13 along the first
direction. As shown in FIG. 3, the first and second gate wiring
elements 3b and 3c, form contacts by the first and second local
inter connectors 5b and 5c made of tungsten and buried in a trench
for a local inter connector formed in an insulating interlayer
deposited on the gate wiring elements. In addition, as shown in
FIG. 4, the local inter connector LIC is connected to the first
metal wiring element by a stack via hole. As shown in FIG. 5, the
first local inter connectors (LICs) 5b and 5a made of tungsten are
buried. As shown in FIG. 6, as to the connection between the gate
wiring elements 3 and the local inter connectors (LICs) 5, even
though mask offset happens offset by a side-wall width can be
allowed. A configuration related to the wires of the semiconductor
storage device is shown in the plan view in FIG. 7. FIG. 7 shows
only a configuration related to the wires except for an insulating
interlayer when viewed from the above.
[0036] A method of fabricating the semiconductor storage device
will be described below with reference to FIGS. 8 to 11. This
semiconductor storage device is fabricated by the following
steps.
[0037] (a) A semiconductor substrate 1 is provided.
[0038] (b) The element isolation oxide film 2 is formed at a
predetermined portion of the semiconductor substrate 1.
[0039] (c) Ions are implanted in a predetermined portion to form a
well region. In this case, as shown in FIG. 8, well regions are
sequentially formed such that a P well region, an N well region,
and a P well region are sequentially arranged on the semiconductor
substrate 1. The direction of the arrangement is set as a first
direction. The first direction is equal to the longitudinal
direction of one memory cell 10.
[0040] (d) After a gate oxide film is deposited, and poly-silicon
wiring layers 3 serving as gate wiring layers are deposited.
[0041] (e) Ion implantation is performed to form the transistors
11, 12, and 13.
[0042] (f) Thereafter patterning is performed, as shown in FIG. 8.
In this manner, the first gate wiring elements 3a and 3b and the
second ones 3c and 3d are formed. The first gate wiring elements 3a
and 3b, as shown in FIG. 8, composes a gate electrode of the driver
transistor 11 and the load transistor 12, and are linearly arranged
along the first direction. The second gate wiring elements 3c and
3d composes a gate electrode of the access transistor 13, and are
linearly arranged along the first direction. Each of the
poly-silicon wiring layers 3 has a rectangular shape having
straight line on opposite sides and being free from a notch or a
projection, and is regularly arranged. For this reason, in
patterning, the accuracy of decreasing patterning size can be
improved.
[0043] (g) A sidewall 4 is formed.
[0044] (h) A source S and a drain D are formed by ion
implantation.
[0045] (i) A CoSi.sub.2 layer is formed.
[0046] (j) An etching stopper film is deposited. A flattening
insulating film 6a is deposited.
[0047] (k) The flattening insulating film 6a is etched by using a
mask for an local inter connector LIC. At this time, the etching is
stopped by the etching stopper.
[0048] (l) The etching stopper film exposed by etching the
flattening insulating film 6a is removed to form a trench for a
local inter connector LIC.
[0049] (m) Tungsten is deposited in the trench for local inter
connector LIC, and the resultant structure is flattened. The
tungsten is left in only the trench (W damascene process) to form a
local inter connector LIC 5 made of tungsten. The first local inter
connectors (LICs) 5a and 5b and the second local inter connectors
(LICs) 5c and 5d can be formed. Since contacts to the gate wiring
elements can be formed through the local inter connectors (LICs)
5a, 5b, 5c, and 5d, the shapes of the gate wiring elements need not
deformed to make a margin for contact. As the damascene method with
respect to the first local inter connectors (LICs) 5a and 5b, a
damascene method for forming only the wires can be used.
[0050] (n) A flattening insulating film 6b is deposited.
[0051] (o) Holes for stack via holes 7 are formed.
[0052] (p) Tungsten is removed except for the local inter
connectors (LICs) 5 and the stack via holes 7, as shown in FIG. 9.
In this manner, the stack via holes 7 can be formed to connect the
second gate wiring elements 3c and 3d to the word line WL through
the second local inter connector LICs 5c and 5d.
[0053] (q) A first metal layer 8 is deposited on the entire surface
of the resultant structure.
[0054] (r) The first metal layer 8 is removed by using a mask for a
first metal wiring element except for on a predetermined portion.
In this manner, as shown in FIG. 10, a word line WL constituted by
the first metal layer 8 can be formed.
[0055] (s) An insulating interlayer 6c is deposited.
[0056] (t) A hole for a first via hole 14 is formed.
[0057] (u) Tungsten is buried in the first via hole 14, and
tungsten is removed by etching except for the tungsten in the first
via hole 14, as shown in FIG. 10. In this manner, an electric
connection from the first metal layer 8 to a further upper layer
can be formed.
[0058] (v) A second metal layer 9 is deposited, and it is removed
except for predetermined portions. In this manner, a bit line, a
VDD line, and a ground (GND) line can be formed by the second metal
layer 9.
[0059] (w) An insulating interlayer 6d is deposited.
[0060] (x) A hole for a second via hole is formed by etching.
[0061] (y) Tungsten is buried in the second via hole, and the
tungsten is removed except for the second via hole.
[0062] (z) A third metal wiring element 15 is deposited, and it is
removed except for predetermined portions, as shown in FIG. 11.
[0063] With the above steps, the semiconductor storage device
described above can be obtained. A semiconductor storage device is
fabricated by this method. The semiconductor storage device
includes first and second gate wiring elements 3 each having a
rectangular shape having straight line on opposite sides opposite
to each other without a notch or a projection. In addition, the
first and second gate wiring elements 3 can be regularly laid out
along the longitudinal direction of the word line. In this manner,
the transistor characteristics of the driver transistor 11, the
load transistor 12, the access transistor 13, and the like
constituting the semiconductor storage device can be stabilized and
uniformed. Therefore, a semiconductor storage device having stable
characteristics can be obtained.
[0064] A semiconductor storage device according to second
embodiment of the present invention will be described below with
reference to plan views showing the configurations of four memory
cells in FIGS. 12 to 14. The semiconductor storage device is
different from that according to first embodiment except that, as
shown in FIG. 12, distance (pitches) d1 of the first gate wiring
elements 3a and 3b and the second gate wiring elements 3c and 3d in
the longitudinal direction are substantially equal to each other.
For this reason, since generation of optical proximity effect can
be suppressed in the photolithography process, the shapes of gate
wiring elements need not be deformed for optical proximity
correction (OPC). Therefore, a yield can be prevented from being
decreased by shortage of lithographic margin. Furthermore,
lithographic resolution can be improved.
[0065] The semiconductor storage device, as shown in FIG. 13, four
memory cells are constituted as one repetitive unit. More
specifically, a memory cell 10a and another 10b have mirror
symmetry with respect to the configurations of gate wiring
elements. The memory cells 10a and 10c are mirror-symmetrical each
other. Therefore, the memory cells 10a and 10d have the same gate
wiring elements, and the memory cell 10b and 10c have the same
configurations of gate wiring elements. The repetitive unit is not
limited to the above-mentioned repetitive unit, and a repetitive
unit including a plurality of memory cells may be constituted by
properly selecting a configuration of gate wiring elements.
[0066] As shown in FIG. 14, another configuration of the
semiconductor storage device, a memory cell array may be
constituted such that the configuration of the gate wiring elements
of one memory cell 10a is directly used as a repetitive unit. In
this case, each of the memory cells 10b, 10c, and 10d has the same
configuration of gate wiring elements as that of the memory cell
10a.
[0067] A semiconductor storage device according to third embodiment
of the present invention will be described below. This
semiconductor storage device is different from that according to
second embodiment except that the lengths and distance between gate
wiring elements in the longitudinal direction in the first gate
wiring elements 3a and 3b and the second gate wiring elements 3c
and 3d are substantially equal to each other, respectively, and the
widths and the distance between the gate wiring elements in a
direction (second direction) perpendicular to the longitudinal
direction are equal to each other, respectively. For this reason,
since generation of optical proximity effect can be suppressed in a
photolithography process, the shapes of gate wiring elements need
not be deformed for optical proximity correction (OPC). Therefore,
a yield can be prevented from being deteriorated by a shortage of
lithographic margin. In addition, when a regular layout pattern is
used, photolithography can be performed at high accuracy by using
super resolution technique.
[0068] The lengths, widths, and the like of the first and second
gate wiring elements are made substantially equal to each other,
respectively, and the distance between the gate wiring elements are
made equal to each other, so that burying spacing between the
layers can be kept uniform. Therefore, as an insulating interlayer,
not only a boron phosphorous silicate glass (BPSG) film having good
overhang properties, but also a film such as an nitride silicate
glass (NSG) film or a phospho-silicate glass (PSG) film using a
material having relatively poor overhang properties can be used.
For this reason, a high degree of freedom of material selection can
be obtained, and the cost can be reduced. In addition, a material
of the insulating interlayer can be selected depending on
conditions such as machining difficulties, a dielectric constant to
be set, the degree of difficulty of void generation, and a soft
error.
[0069] A semiconductor storage device according to fourth
embodiment of the present invention will be described below with
reference to the graph in FIG. 15. FIG. 15 shows a relationship
between an aspect ratio x of a gate wiring element and the number
of generated defects when the width (shorter side W) of each gate
wiring element is set to be 0.15 .mu.m. As shown in FIG. 15, this
semiconductor storage device has an aspect ratio x of longer side
length L to shorter side length W of each of first and second
wiring elements being 5 or more. In this manner, the aspect ratio
of the gate wiring element is set to be 5 or more, the number of
generated defects such as pattern disappearance in a
photolithography process can be considerably reduced.
[0070] In the semiconductor storage device according to the present
invention, the first gate wiring element and the second gate wiring
element have rectangular shapes each having straight line on
opposite sides and being free from a notch or a projection, and are
linearly laid out. In this manner, since the first and second gate
wiring elements can be formed at high accuracy, the characteristics
of transistors constituting a memory cells can be stabilized. For
this reason, a semiconductor storage device having stable
characteristics can be obtained. In the semiconductor storage
device, contacts to the respective wiring elements are formed by
using local inter connectors (LICs). More specifically, the
contacts of the respective gate wiring elements are not formed
through via holes directly formed on the gate wiring elements, but
the contacts are formed by the local inter connectors (LICs) formed
by tungsten damascene. When the local inter connectors (LICs) are
used, regular gate wiring elements each having a rectangular shape
can be laid out without making a cover margin for contact in
formation of the gate wiring elements. In addition, since the first
gate wiring elements and the second gate wiring elements are laid
out in parallel to each other, in the step of forming gate wiring
elements by photolithography process, pattern distortion caused by
interference can be suppressed. Therefore, an optical proximity
effect in the photolithography process can be suppressed.
[0071] In the semiconductor storage device according to the present
invention, the longitudinal directions of the first and second gate
wiring elements extend in the direction of the gate width of an
access transistor. For this reason, the longitudinal directions of
the gate wiring elements can be made equal to the longer side of
the memory cell.
[0072] In addition, in the semiconductor storage device according
to the present invention, the distance (pitches) of the first and
second gate electrodes are made substantially equal to each other
in the longitudinal direction (first direction). In this manner,
since generation of an optical proximity effect can be suppressed
in photolithography process, the shapes of the gate wiring elements
need not be deformed for optical proximity effect correction (OPC).
A decrease in yield caused by a shortage of lithographic margin can
be prevented. A lithographic resolution can also be improved. In
addition, since the characteristics of the respective transistors
obtained as described above can be made uniform and stable, a
semiconductor storage device having stable characteristics can be
obtained.
[0073] In the semiconductor storage device according to the present
invention, since the distance between the first and second gate
wiring elements can be made substantially equal to each other, an
optical proximity effect can be further suppressed in
photolithography process. For this reason, a decrease in yield
caused by a shortage of lithographic margin can be prevented. A
lithographic resolution can also be improved. In addition, since
the characteristics of the respective transistors obtained as
described above can be made uniform and stable, a semiconductor
storage device having stable characteristics can be obtained.
[0074] Furthermore, in the semiconductor storage device according
to the present invention, since the first and second gate wiring
elements have shorter sides having lengths which are substantially
equal to each other, a optical proximity effect can be further
suppressed in photolithography process. For this reason, a decrease
in yield caused by a shortage of lithographic margin can be
prevented. A lithographic resolution can also be improved.
[0075] Still furthermore, in the semiconductor storage device
according to the present invention, the shapes of the first gate
wiring elements and the second gate wiring elements projected on a
plane parallel to the substrate can be made substantially equal to
each other, so that burying spacing between the layers can be kept
uniform. Therefore, as an insulating interlayer, not only a BPSG
film having good overhang properties, but also a film such as an
NSG film or a PSG film using a material having relatively poor
overhang properties can be used. For this reason, a high degree of
freedom of material selection can be obtained, and the cost can be
reduced. In addition, a material of the insulating interlayer can
be selected depending on conditions such as machining difficulties
of chemical mechanical polishing, a dielectric constant to be set,
the degree of difficulty of void generation, and a soft error.
[0076] In the semiconductor storage device according to the present
invention, the first and second gate wiring elements are
symmetrically arranged with respect to a predetermined symmetrical
point. For this reason, a mask can be used such that the mask is
rotated about the predetermined symmetrical point.
[0077] Furthermore, in the semiconductor storage device according
to the present invention, an aspect ratio x of longer side L to
shorter side W of each of the first and second gate wiring elements
is 5 or more. When the aspect ratio of the gate wiring element is
set to be 5 or more, the number of generated defects such as
pattern disappearance can be considerably reduced.
[0078] Still furthermore, in the semiconductor storage device
according to the present invention, the lengths of the shorter
sides of the first and second gate wiring elements are 0.15 .mu.m
or less, the respective memory cells can be decreased patterning
size.
[0079] In the semiconductor storage device according to the present
invention, since the first and second local inter connectors
consist of tungsten damascene, a contact margin for making a
contact to a gate wiring element is not required. For this reason,
the shapes of the gate wiring elements need not be deformed for a
margin for contact in formation of the gate wiring elements.
[0080] In the semiconductor storage device according to the present
invention, the longitudinal directions of the first and second gate
wiring elements are arranged in parallel to each other. For this
reason, formation of the gate wiring elements can be simplified.
Therefore, the fabricating steps can be simplified.
[0081] In the semiconductor storage device according to the present
invention, since the distance between the first and second gate
wiring elements adjacent to each other in at least one of the first
and second directions are made substantially equal to each other,
an optical proximity effect can be suppressed in photolithography
process. For this reason, a decrease in yield caused by a shortage
of lithographic margin can be prevented. A lithographic resolution
can also be improved. In addition, since the characteristics of the
respective transistors obtained as described above can be made
uniform and stable, a semiconductor storage device having stable
characteristics can be obtained.
[0082] In the semiconductor storage device according to the present
invention, the projected shapes of the first gate wiring elements
and the second gate wiring elements on a plane parallel to the
substrate can be made substantially equal to each other, so that
burying spacing between the layers can be kept uniform. Therefore,
as an insulating interlayer, not only a BPSG film having good
overhang properties, but also a film such as an NSG film or a PSG
film using a material having relatively poor overhang properties
can be used. For this reason, a high degree of freedom of material
selection can be obtained, and the cost can be reduced. In
addition, a material of the insulating interlayer can be selected
depending on conditions such as machining difficulties of chemical
mechanical polishing, a dielectric constant to be set, the degree
of difficulty of void generation, and a soft error.
[0083] In the semiconductor storage device according to the present
invention, the contacts are made by the first and second connectors
without directly forming contact holes in the first and second gate
wiring elements. Therefore, the gate wiring elements do not require
contact margins for contact. Therefore, the shapes of the gate
wiring elements need not be deformed for contact margins in
formation of the gate wiring elements.
[0084] In the method of fabricating a semiconductor storage device
according to the present invention, the first and second gate
wiring elements having rectangular shapes each having straight line
on opposite sides and being free from a notch or a projection can
be formed. In addition, the first and second gate wiring elements
can be regularly laid out along the longitudinal direction of a
word line. For this reason, the characteristics of transistors such
as a driver transistor and an access transistor constituting the
semiconductor storage device can be made stable and uniform.
Therefore, a semiconductor storage device having stable
characteristics can be obtained.
[0085] Although the present invention has been described in
connection with the preferred embodiments thereof with reference to
the accompanying drawings, it is to be noted that various changes
and modifications are apparent to those skilled in the art. Such
changes and modifications are to be understood as included within
the scope of the present invention as defined by the appended
claims, unless they depart therefrom.
* * * * *