U.S. patent application number 11/678527 was filed with the patent office on 2007-07-19 for semiconductor thin film forming system.
Invention is credited to Tomoyuki Akashi, Hiroshi TANABE, Yoshimi Watabe.
Application Number | 20070166945 11/678527 |
Document ID | / |
Family ID | 16317686 |
Filed Date | 2007-07-19 |
United States Patent
Application |
20070166945 |
Kind Code |
A1 |
TANABE; Hiroshi ; et
al. |
July 19, 2007 |
SEMICONDUCTOR THIN FILM FORMING SYSTEM
Abstract
In a semiconductor thin film forming system for modifying a
predetermined region of a semiconductor thin film by exposing the
semiconductor thin film to a projected light patterned through a
pattern formed on a photo mask, the system includes a mechanism
(opt20') for uniformizing the light for exposure in a predetermined
area on the photo mask. This system can provide a crystallized
silicon film having a trap state density less than 1012 cm.sup.-2
and can provide a silicon-insulating film interface exhibiting a
low interface state density.
Inventors: |
TANABE; Hiroshi; (Tokyo,
JP) ; Akashi; Tomoyuki; (Tokyo, JP) ; Watabe;
Yoshimi; (Tokyo, JP) |
Correspondence
Address: |
HAYES SOLOWAY P.C.
3450 E. SUNRISE DRIVE, SUITE 140
TUCSON
AZ
85718
US
|
Family ID: |
16317686 |
Appl. No.: |
11/678527 |
Filed: |
February 23, 2007 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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11021306 |
Dec 23, 2004 |
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11678527 |
Feb 23, 2007 |
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09612551 |
Jul 7, 2000 |
6861614 |
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11021306 |
Dec 23, 2004 |
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Current U.S.
Class: |
438/401 ;
257/149; 257/E21.347 |
Current CPC
Class: |
B23K 26/0622 20151001;
B23K 26/0608 20130101; H01L 27/1285 20130101; B23K 26/04 20130101;
H01L 21/02675 20130101; B23K 26/067 20130101; H01L 21/67225
20130101; H01L 21/268 20130101; B23K 26/043 20130101; H01L 21/2026
20130101; B23K 26/046 20130101; B23K 26/0604 20130101; B23K 26/0732
20130101; B23K 26/066 20151001 |
Class at
Publication: |
438/401 ;
257/149 |
International
Class: |
H01L 21/76 20060101
H01L021/76; H01L 29/74 20060101 H01L029/74; H01L 29/47 20060101
H01L029/47; H01L 31/111 20060101 H01L031/111 |
Foreign Application Data
Date |
Code |
Application Number |
Jul 8, 1999 |
JP |
194024/1999 |
Claims
1-4. (canceled)
5. A semiconductor thin film forming system for modifying a
predetermined region of a semiconductor thin film by exposing the
semiconductor thin film to a projected exposure beam patterned
through a pattern formed on a photo mask, said system comprising an
alignment mechanism for aligning the patterned exposure beam with
reference to a mark formed on a substrate, on which said
semiconductor thin film is deposited.
6-16. (canceled)
17. The system according to claim 5, wherein said projected beam
comprises a laser beam.
18. The system according to claim 17, wherein said laser beam is
generated by an excimer laser.
19. The system according to claim 17, wherein said projected beam
is uniformized using a homogenizer, a mask and a projection lens
through which said light is applied.
20. The system according to claim 19, wherein said mask includes a
slit for throttling light passed through the homogenizer into a
rectangular beam.
21. A system according to claim 19, wherein a projection lens is
used for reducing and projecting a slit image of the mask onto said
semiconductor thin film.
22. A system according to claim 5, wherein said predetermined
region of the semiconductor thin film is modified by exposing, at a
travel pitch of the order of micrometers, the semiconductor thin
film to said projected light.
23. A system according to claim 5, wherein said predetermined
region of the semiconductor thin film is modified by exposing a
target exposure position of the semiconductor thin film to said
projected light with a target accuracy of 0.1 .mu.m to 100 .mu.m.
Description
CROSS REFERENCE TO RELATED APPLICATION
[0001] This application is a divisional of U.S. patent application
Ser. No. 11/021,306, Filed Dec. 23, 2004, which in turn is a
divisional of U.S. patent application Ser. No. 09/612,551, Filed
Jul. 7, 2000.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] This invention relates to a system for the formation of a
silicon thin film and a good-quality semiconductor-insulating film
interface. Such silicon thin films are used for crystalline silicon
thin film transistors, and such semiconductor-insulating film
interfaces are employed for field effect transistors. The invention
also relates to a semiconductor thin film forming system by the
pulsed laser exposure method. Such semiconductors include, for
example, silicon germanium (SiGe), silicon carbide (SiC), and other
silicon compounds, and GaAs, GaN, CuInSe.sub.2, ZeSe, and other
compound semiconductors. In addition, the invention relates to a
system for the manufacture of driving elements or driving circuits
composed of the semiconductor thin films or field effect thin film
transistors for displays and sensors, for example.
[0004] 2. Description of the Related Art
[0005] Typical processes for the formation of a thin film
transistor (TFT) on a glass substrate are a hydrogenated amorphous
silicon TFT process and a polycrystalline silicon TFT process. In
the former process, the maximum temperature in a manufacture
process is about 300.degree. C., and the carrier mobility is about
1 cm.sup.2/Vsec. Such a hydrogenated amorphous silicon TFT formed
by the former process is used as a switching transistor of each
pixel in an active matrix (AM) liquid crystal display (LCD) and is
driven by a driver integrated circuit (IC, an LSI formed on a
single crystal silicon substrate) arranged on the periphery of a
screen. Each of the pixels of this system includes an individual
switching element TFT, and this system can yield a better image
quality with less crosstalk than a passive matrix LCD. In such a
passive matrix LCD, an electric signal for driving the liquid
crystal is supplied from a peripheral driver circuit. In contrast,
the latter polycrystalline silicon TFT process can yield a carrier
mobility of 30 to 100 cm.sup.2/Vsec by, for example, employing a
quartz substrate and performing a process at high temperatures of
about 1000.degree. C. as in the manufacture of LSIs. For example,
when this process is applied to a liquid crystal display
manufacture, such a high carrier mobility can yield a peripheral
driver circuit on the same glass substrate concurrently with the
formation of pixel TFTs for driving individual pixels. This process
is therefore advantageous to minimize manufacture process costs and
to downsize the resulting products. If the product should be
miniaturized and should have a higher definition, a connection
pitch between an AM-LCD substrate and a peripheral driver
integrated circuit must be decreased. A conventional tab connection
method or wire bonding method cannot significantly provide such a
decreased connection pitch. However, if a process at high
temperatures as in the above case is employed in the
polycrystalline silicon TFT process, low softening point glasses
cannot be employed. Such low softening point glasses can be
employed in the hydrogenated amorphous silicon TFT process and are
available at low costs. The process temperature in the
polycrystalline silicon TFT process should be therefore decreased,
and techniques for the formation of polycrystalline silicon films
at low temperatures have been developed by utilizing a
laser-induced crystallization technique.
[0006] Such a laser-induced crystallization is generally performed
by a pulse laser irradiator having a configuration shown in FIG. 1.
A laser light supplied from a pulse laser source 1101 reaches a
silicon thin film 1107, a work, on a glass substrate 1108 via an
optical path 1106. The optical path 1106 is specified by a group of
optic devices including mirrors 1102, 1103, and 1105, and a beam
homogenizer 1104. The beam homogenizer 1104 is arranged to
uniformize spatial intensities of laser beams. Generally, the glass
substrate on an X-Y stage 1109 is moved to irradiate a selected
position on the substrate with a laser beam. The laser irradiation
can be also performed by moving the optic device group or moving
the optic device group and the stage in combination.
[0007] For example, J. Im and R. Sposili describe that a substrate
is mounted on an X-stage, and a homogenizer is mounted on a Y-stage
in FIG. 6 of "Crystalline Si films for integrated
active-matrix-liquid-crystal displays", Materials Research Society
Bulletin, vol. 21, (1996), p. 39 (Reference 1).
[0008] Laser irradiation is also performed in vacuo or in a high
purity gaseous atmosphere. Where necessary, the system has a
cassette 1110 and a substrate traveling mechanism 1111. The
cassette 1110 houses glass substrates each with a silicon thin
film, and the substrate traveling mechanism 1111 serves to move the
substrate between the cassette and the stage to house the substrate
in the cassette or to mount the substrate on the stage.
[0009] Japanese Patent Publication (JP-B) No. 7-118443 discloses a
technique of irradiating an amorphous silicon thin film on an
amorphous substrate with a short wavelength pulse laser light. This
technique can crystallize an amorphous silicon while keeping the
overall substrate from high temperatures, and can produce
semiconductor elements or semiconductor integrated circuits on
large substrates available at low costs. Such large substrates are
required in liquid crystal displays, and such substrate available
at low costs may be glasses, for example. However, as is described
in the above publication, the crystallization of an amorphous
silicon thin film by action of a short wavelength laser light
requires an irradiation intensity of about 50 to 500 mJ/cm.sup.2.
However, the maximum emission output of a conventionally available
pulse laser irradiator is at most about 1 J/pulse, and an area to
be irradiated by a single irradiation is at most about 2 to 20
cm.sup.2, by a simple conversion. For example, if the overall of a
47 cm.times.37 cm substrate should be crystallized by action of
laser, at least 87 to 870 points of the substrate must be
irradiated with a laser light. Likewise, the number of points to be
irradiated with a laser light increases with an increasing size of
the substrate, for example, as in a 1 m.times.1 m substrate. Such a
laser-induced crystallization is generally performed by a pulse
laser irradiator having a configuration shown in FIG. 1.
[0010] To form uniform thin film semiconductor elements on a large
substrate by the above technique, an effective process is known as
disclosed in Japanese Unexamined Patent Publication (JP-A) No.
5-211167 (Japanese Patent Application No. 3-315863). The process
includes the steps of dividing the elements to portions smaller
than the beam size of the laser and repeating a combination of
irradiation with several pulses and movement of the area to be
irradiated by step-and-repeat drawing method. In the process, the
lasing and the movement of a stage (i.e., the movement of a
substrate or laser beam) are alternatively performed, as shown in
FIG. 2B. However, even according to this process, the variation of
lasing intensity exceeds .+-.5% to .+-.10% when the irradiation
procedure is repeated at a density of about 1 pulse per irradiated
portion to 20 pulses per irradiated portion using a currently
available pulse laser irradiator with a uniformity of lasing
intensity of .+-.5% to .+-.10% (in continuous lasing). The
resulting polycrystalline silicon thin film and polycrystalline
silicon thin film transistor cannot therefore have satisfactorily
uniform characteristics. Particularly, the generation of a strong
or weak light caused by an unstable discharge at early stages of
lasing significantly invites such heterogeneous characteristics.
This phenomenon is called spiking. As a possible solution to the
spiking, a process of controlling an applied voltage in a
subsequent lasing with reference to the results of integrated
strengths can be employed. However, according to this process, a
rather weak light is oscillated even though the formation of
spiking is inhibited. Specifically, when irradiation periods and
non-lasing periods alternatively succeed, the intensity of a first
irradiated pulse in each irradiation period is most unstable and is
varied, as shown in FIG. 3. In addition, the history of irradiation
intensity differs from point to point to be irradiated. The
resulting transistor element and thin film integrated circuit
cannot have a significant uniformity in the substrate plane.
[0011] To avoid such a spiking, a process is known to start lasing
prior to the initiation of irradiation to an area for the formation
of element, as shown in FIG. 2A. However, this technique cannot be
applied to a process of intermittently repeating the lasing and the
movement of stage. To avoid these problems, a process is proposed
in Japanese Unexamined Patent Publication (JP-A) No. 5-90191. The
process includes the steps of allowing a pulse laser source to
continuously oscillate and inhibiting irradiation of a substrate
with the laser light by an optic shielding system during the
movement of the stage. Specifically, as shown in FIG. 2C, a laser
is continuously oscillated at a predetermined frequency, and the
movement of stage to a target irradiation position is brought into
synchronism with the shielding of an optic path. By this
configuration, a laser beam with a stable intensity can be applied
to a target irradiation position. However, although this process
can stably irradiate the substrate with a laser beam, the process
also yields increased excess lasing that does not serve to the
formation of a polycrystalline silicon thin film. The productivity
is decreased from the viewpoint of the life of an expensive laser
source and an excited gas, and the production efficiency of the
polycrystalline silicon thin film is deteriorated with respect to
power required for lasing. The production costs are therefore
increased. When a substrate to be exposed to laser is irradiated
with an excessively strong light as compared with a target
intensity, the substrate will be damaged. Such an excessively
strong light is induced by an irregular irradiation intensity. In
LCDs and other imaging devices, a light passing through the
substrate scatters in an area where the substrate is damaged, and
the quality of image is deteriorated.
[0012] A process for reducing and projecting a pattern on a photo
mask onto a silicone thin film is disclosed by R. Sposili and J. Im
in "Sequential lateral solidification of thin silicon films on
SiO.sub.2", Applied Physics Letters, vol. 69 (1996), p. 2864
(Reference 2), and by J. Im, R. Sposili, and M. Crowder in
"Single-crystal Si films for thin film transistor devices", Applied
Physics Letters, vol. 70, (1997), p. 3434 (Reference 3). The
process disclosed in these publications performs an about 1:5
reduction projection alignment using a 308-nm excimer laser, a
variable-energy attenuator, a variable-focus field lens, a
patterned-mask, a two-element imaging lens, and a
sub-micrometer-precision translation stage. By this configuration,
the process attains a beam size and a travel pitch of a substrate
stage, both of the order of micrometers. However, a laser beam
applied onto the photo mask has a spatial intensity profile
depending on the light source, and when the process is applied to
the processing of a large substrate as mentioned above, the
strength of a patterned light passing through the center of the
mask and that passing through the periphery of the mask critically
differ from each other. Accordingly, a crystalline silicon thin
film having a desired uniformity cannot be significantly obtained.
In addition, as an ultraviolet radiation with a short wavelength is
reduced and projected, the focal depth of the beam is small and the
irradiation depth is liable to shift due to warp or deformation of
the substrate. With an increasing area of the substrate, the
mechanical precision of the stage cannot be significantly ensured,
and a little tilt of the stage or a displacement of the substrate
on the stage disturbs a target laser irradiation.
[0013] A process is known for the laser irradiation. In this
process, a plurality of pulses are applied while the irradiation of
each pulse is retarded. This process is disclosed by Ryoichi
Ishihara et al. in "Effects of light pulse duration on excimer
laser crystallization characteristics of silicon thin films",
Japanese Journal of Applied Physics, vol. 34, No. 4A, (1995), p.
1759 (Reference 4). According to this reference, the
crystallization solidification rate of a molten silicon in a laser
recrystallization process is 1 m/sec or more. To achieve a
satisfactory growth of crystals, the solidification rate must be
reduced. By applying a second laser pulse immediately after the
completion of solidification, the second irradiation of laser pulse
can yield a recrystallization process with a reduced solidification
rate. In viewing, a temperature change (a time-hysteresis curve) of
silicon as shown in FIG. 4, the temperature of silicon increases
with the irradiation of laser energy, for example, as a pulse with
an intensity shown in FIG. 5. When a starting material is an
amorphous silicon (a-Si), the temperature further increases after
the melting point of a-Si, and when the supplied energy becomes
less than the energy required for increasing the temperature, the
material begins to undergo cooling. At the solidifying point of a
crystalline Si, the solidification proceeds for a solidification
time and then completes, and the material is cooled to an
atmospheric temperature. Provided that the solidification of
silicon proceeds in a thickness direction from an interface between
silicon and the substrate, an average solidification rate is
calculated according to the following equation.
[0014] Average solidification rate=(Thickness of
silicon)/(Solidification time)
[0015] Specifically, if the thickness of silicon is constant, the
solidification time is effectively prolonged to reduce the
solidification rate. If the process maintains ideal conditions on
thermal equilibrium, the solidification time can be prolonged by
increasing an ideally supplied energy, i.e., a laser irradiation
energy. However, as pointed out in the above reference, such an
increased irradiation energy invites the resulting film to become
amorphous or microcrystalline. In an actual melting and
recrystallization process, the temperature does not change in an
ideal manner as shown in FIG. 4, and the material undergoes
overheating when heated and undergoes supercooling when cooled, and
attains a stable condition. Particularly, when the cooling rate in
cooling procedure is extremely large and the material undergoes an
excessive supercooling, the material is not crystallized at around
its solidification point, and becomes an amorphous solid due to
quenching and rapid solidification. Under some conditions, thin
films are converted not into an amorphous solid but into
microcrystals, as shown in the above Reference 4. Such a
microcrystalline thin film has an extremely small grain size as
compared with a polycrystalline thin film or a single-crystal thin
film. Thus, the microcrystalline thin film includes a multitude of
grain boundaries each having a large grain boundary potential. If
the thin film is applied to, for example, a thin film transistor,
the resulting thin film transistor will have a decreased ON-state
current or an increased OFF-state leak current.
[0016] Separately, processes are known,. which include a step for
the formation of a-Si thin film as a material to be irradiated with
laser, a step for irradiating the thin film with a laser, a step
for hydrogenation with plasma, and a step for the formation of a
gate insulating film, in this order or in a modified order, while
the material thin film is kept from exposure to the air. These
processes are disclosed in the following publications.
[0017] Japanese Unexamined Patent Publication No. 5-182923
discloses a technique of subjecting an amorphous semiconductor thin
film to a heat treatment and irradiating the treated thin film with
a laser beam while keeping the thin film from exposure to the
air.
[0018] Japanese Unexamined Patent Publication No. 7-99321 discloses
a technique of moving a substrate having a laser-induced
crystallized polycrystalline silicon thin film to a plasma-enhanced
hydrogenation step and a formation step of a gate insulating film
while keeping the substrate from exposure to the air.
[0019] Japanese Unexamined Patent Publication No. 9-7911 discloses
a technique of moving a substrate having a laser-induced
crystallized polycrystalline silicon thin film to a formation step
of a gate insulating film while keeping the substrate from exposure
to the air.
[0020] Japanese Unexamined Patent Publication No. 9-17729 discloses
a technique of moving a substrate having a laser-induced
crystallized polycrystalline silicon thin film to a formation step
of a gate insulating film while keeping the substrate from exposure
to the air. By this configuration, the surface of the
polycrystalline silicon is kept from adhesion of impurities.
[0021] Japanese Unexamined Patent Publication No. 9-148246
discloses a technique of sequentially performing the formation of
an amorphous silicon thin film, laser-induced crystallization,
hydrogenation, and the formation of a gate insulating film, without
exposing the work to the air.
[0022] Japanese Unexamined Patent Publication No. 10-116989
discloses a technique of sequentially performing the formation of
an amorphous silicon thin film, laser-induced crystallization,
hydrogenation, and the formation of a gate insulating film, without
exposing the work to the air.
[0023] Japanese Unexamined Patent Publication No. 10-149984
discloses a technique of sequentially performing the formation of
an amorphous silicon thin film, laser-induced crystallization,
hydrogenation, and the formation of a gate insulating film, without
exposing the work to the air.
[0024] Japanese Unexamined Patent Publication No. 11-17185
discloses a technique of sequentially performing the formation of
an amorphous silicon thin film, laser-induced crystallization, the
formation of a gate insulating film, and the formation of a gate
electrode, without exposing the work to the air.
[0025] These concepts and techniques have been proposed to solve
the following problems. Specifically, the surface of silicon formed
by laser-induced crystallization is very active, and when the
surface is exposed to the air, impurities are liable to adhere to
the surface. Deteriorated or dispersed characteristics of the
resulting TFT may therefore result.
[0026] Accordingly, the present inventors compared the performance
between when an excimer laser-induced crystallization process and a
silicon oxide film formation process are performed in the same
system (including transfer of the substrate to another system
without exposing the substrate to the air) and when the film is
once exposed to the air. The results of this experiment revealed
that the former technique can inhibit adhesion of dusts and
particles and therefore greatly effectively improves yields of
products. However, by increasing levels of cleanliness of clean
room surroundings, equivalent advantages as above can be obtained
to some extent. To improve the yields, a system including a film
forming system and a cleaning mechanism of the substrate in the
same system is most effective. This is because particles are
adhered to the substrate during film-formation under some
conditions in an a-Si film forming step, and the film must be
exposed to the air to thereby be cleaned outside the system.
[0027] In contrast, differences in production processes do not
significantly affect the performances of thin film transistors. The
reasons for this may be supposed as follows. For example, K. Yuda
et al. disclose a fixed oxide film charge density (10.sup.11 to
10.sup.12 cm.sup.-2) of a silicon oxide film and an interface state
density (6.times.10.sup.10 cm.sup.-2eV.sup.-2 or less) between a
silicon substrate and the silicon oxide film in "Improvement of
structural and electrical properties in low-temperature gate-oxides
for poly-Si TFTs by controlling O.sub.2/SiH.sub.4 ratios", Digest
of Technical Papers 1997 International Workshop on Active Matrix
Liquid Crystal Displays, Sep. 11-12, 1997, Kogakuin Univ., Tokyo,
Japan, 87 (Reference 5). The above silicon oxide film is formed at
a temperature of about 300.degree. C. to 350.degree. C. with plasma
or formed through a heat treatment at about 600.degree. C. The
silicon substrate is generally subjected to an "RCA cleaning", is
washed with water and is then introduced into a film forming
system. In the RCA cleaning, the substrate is cleaned with an
acidic solution, heated where necessary, such as a sulfuric
acid-hydrogen peroxide mixture, a hydrochloric acid-hydrogen
peroxide-water mixture, an ammonia-hydrogen peroxide-water mixture,
or a hydrofluoric acid-water mixture. The aforementioned interface
state density is obtained from a sample of a single-crystal silicon
substrate that is exposed to the air after the formation of a clean
surface (cleaning) and is then moved to the film-formation
step.
[0028] Focusing attention to a trap state density of the
laser-induced crystallized silicon film, H. Tanabe et al. disclose
a trap state density of a crystallized silicon of 10.sup.12 to
.sup.13 cm.sup.-2, in thin film transistors with laser-induced
crystallized silicon films, in "Excimer laser crystallization of
amorphous silicon films", NEC Research and Development, vol. 35,
(1994), 254 (Reference 6). These transistors exhibit satisfactory
properties of a field effect mobility of 40 to 140
cm.sup.2/Vsec.
[0029] The trap state density of the silicon film is significantly
larger than the interface state density (or fixed oxide film charge
density) of the silicon film. Specifically, to obtain
satisfactorily advantages of a clean surface of a sample that is
obtained by forming a silicon film and a gate insulating film in
the same system without exposing the substrate to the air, the
performance (the trap state density) of the silicon film is still
insufficient.
[0030] As a means for reducing damage by plasma and forming a gate
insulating film of good quality, a remote plasma-enhanced chemical
vapor deposition (CVD) process has been proposed. For example,
Japanese Unexamined Patent Publication (JP-A) No. 5-21393 discloses
a configuration in which a plasma generating chamber is separated
from a substrate processing chamber. This configuration is supposed
to attain such a low fixed oxide film charge density of 10.sup.11
to 10.sup.12 cm.sup.-2 and a low interface state density of
6.times.10.sup.10 cm.sup.-2eV.sup.-2 or less as mentioned above.
However, this advantage is restricted by the performances of a
silicon film which is previously formed.
SUMMARY OF THE INVENTION
[0031] Accordingly, an object of the invention is to provide a
process for forming a semiconductor thin film with a reduced trap
state density by light irradiation and to provide a process and
system for applying the above process to large substrates with a
high reproducibility.
[0032] Another object of the invention is to provide a means for
forming a satisfactory gate insulating film on the semiconductor
thin film of good quality and to provide a system for producing a
field effect transistor having a satisfactory
semiconductor-insulating film interface, i.e., satisfactory
properties.
[0033] (1) The invention provides, in a first aspect, a
semiconductor thin film forming system for modifying a
predetermined region of a semiconductor thin film by exposing the
semiconductor thin film to a projected light patterned through
plural patterns formed on a photo mask. The system includes a
mechanism for uniformizing the light to be applied in such a manner
that the intensity of the light in a predetermined area on the
photo mask distributes within a range of .+-.1.2% of the average
intensity of the light in the area. According to the configuration,
the exposure light is uniformized to a spatial uniformity of about
.+-.11.2% or less with, for example, a beam homogenizer and is then
applied onto the photo mask. At least the spatial distribution of
peak intensity of the light projected and applied on the
semiconductor thin film is uniformized to an identical extent with
that of the intensity distribution on the photo mask. As a result,
the overall exposed regions of the semiconductor thin film can be
modified by laser irradiation in a desired manner.
[0034] (2) In a second aspect, the invention provides a
semiconductor thin film forming system for modifying a
predetermined region of a semiconductor thin film by exposing the
semiconductor thin film to a projected light patterned through an
exposure pattern formed on a photo mask, and the semiconductor thin
film is formed on a substrate held on a substrate stage. The system
includes a mechanism for sequentially scanning the semiconductor
thin film with the patterned light by individually or concurrently
driving the photo mask and the substrate stage. When an area on the
substrate projected and irradiated with the light through the photo
mask has a size smaller than that of the substrate, the substrate
is moved to an irradiation area by action of the substrate stage. A
mask stage is moved with response to the irradiation of a laser
beam while the substrate is fixed, and target regions of the thin
film can be sequentially exposed to light.
[0035] (3) The invention provides, in a third aspect, a
semiconductor thin film forming system for modifying a
predetermined region of a semiconductor thin film by exposing the
semiconductor thin film to a projected light patterned through an
exposure pattern formed on a photo mask. The system includes a
focusing mechanism for obtaining the focus of the patterned light
on the predetermined region of the semiconductor thin film when the
semiconductor thin film is exposed to the projected patterned
light. When the substrate is moved to an irradiated area by action
of the substrate stage, the focus may be shifted and the focal
position may differ between the center and the periphery of the
substrate. The shift is caused by warp, deformation of the
substrate, variation of thickness, or variation of the degree of
verticality of the substrate stage relative to the exposure axis.
Even in this case, the above configuration can adjust the focus as
the need arises, and can provide exposure all over the substrate in
a desired manner with a good reproducibility.
[0036] (4) According to a fourth aspect, the invention provides a
semiconductor thin film forming system for modifying a
predetermined region of a semiconductor thin film by exposing the
semiconductor thin film to a projected exposure beam patterned
through a pattern formed on a photo mask. The system includes a
tilt correcting mechanism (or a leveling mechanism) for correcting
the tilt of the projected patterned beam relative to the
semiconductor thin film. When the substrate is moved to an
irradiated area by action of the substrate stage, the focal axis
may be shifted and differ between the center and the periphery of
the substrate. This shift is caused by warp, deformation of the
substrate, variation of thickness, or variation of the degree of
verticality of the substrate stage relative to the exposure axis.
Even in this case, the above configuration can correct the tilt or
level of the substrate as the need arises, and can provide exposure
all over the substrate in a desired manner with a good
reproducibility.
[0037] (5) The invention provides, in a fifth aspect, a
semiconductor thin film forming system for modifying a
predetermined region of a semiconductor thin film by exposing the
semiconductor thin film to a projected exposure beam patterned
through a pattern formed on a photo mask. The system includes an
alignment mechanism (or an alignment function) for aligning the
patterned exposure beam relative to a mark formed on a substrate,
on which the semiconductor thin film is deposited. By specifying an
exposure area with reference to the alignment mark previously
formed, a semiconductor thin film can be exposed and modified in a
target region under target exposure conditions. For example, a
channel region of a transistor alone can be exposed and modified.
Specifically, source-drain and channel regions can be sequentially
patterned and formed according to the modified regions in
successive steps.
[0038] (6) In a sixth aspect, the invention provides a
semiconductor thin film forming system for modifying a
predetermined region of a semiconductor thin film by exposing the
semiconductor thin film to a projected light patterned through a
pattern formed on a photo mask. The system includes a mechanism (or
a function) for holding a substrate on a stage, the semiconductor
thin film being deposited on the substrate. When an area on the
substrate projected and irradiated with the light through the photo
mask has a size smaller than that of the substrate, the substrate
is moved to an irradiated area by action of the substrate stage. A
mask stage is moved according to the irradiation of a laser beam
while the substrate is fixed, and target regions of the film are
sequentially exposed to light. In this case, the substrate on the
stage is displaced due to, for example, the movement of the
substrate stage. Particularly when a rotation correction (.theta.
correction) is required, corrections upon the dislocation of the
substrate deteriorate throughput, and the substrate must be fixed
and held. When the substrate is heated on the stage, the substrate
warps or bends due to heating, which causes shift of the focus or
tilt of the substrate from the exposure axis. The above
configuration can avoid these problems.
[0039] (7) In a seventh aspect, the invention provides a
semiconductor thin film forming system for modifying a
predetermined region of a semiconductor thin film by exposing the
semiconductor thin film to a projected exposure beam patterned
through a pattern formed on a photo mask. The system includes a
composing mechanism for composing a plurality of laser beams into
the exposure beam.
[0040] (8) In the system just mentioned above, the plurality of
laser beams preferably comprises first and second laser beams, and
the composing mechanism preferably composes the first and second
laser beams in such a manner that the second laser beam is applied
onto the semiconductor thin film with a delay relative to the first
laser beam.
[0041] FIG. 6 shows the relationship of the maximum cooling rate
(cooling rate, K/sec) obtained by mathematical calculation with the
threshold irradiation intensity between crystallization and
microcrystallization. In this case, a 75-nm silicon thin film is
irradiated with an excimer laser with a wavelength of 308 nm, and
the threshold is obtained by a scanning electron microscopic (SEM)
observation of the silicon thin film after laser irradiation. FIG.
5 shows an emission pulse shape of the laser used in the
experiment. This pulse shape exhibits a long emission time five
times or more that of a rectangular pulse with a pulse width of
21.4 nsec described in the Reference 6. Even a single pulse
irradiation with the pulse shape in question is therefore expected
to reduce the solidification rate as described in the Reference
6.
[0042] FIG. 7 shows a calculated temperature-time curve of silicon
in laser recrystallization using the pulse shape in question.
Specifically, FIG. 7 shows the temperature change of a silicon thin
film 75 nm thick on a SiO.sub.2 substrate when an XeCl laser having
a wavelength of 308 nm is applied at an irradiation intensity of
450 mJ/cm.sup.2. About 60 nsec into the irradiation, a second
emission peak nearly completes, and the temperature attains the
maximum and then begins to decrease. In this connection, in the
mathematical calculation, a melting-solidification point of
amorphous silicon is employed as the melting-solidification point,
and the behavior of the material around the solidification point
differs from that in the actual case. Particularly when a
crystallized film is obtained, the crystallization completes at the
solidification point of the crystalline silicon.
[0043] The curve has a large gradient upon the initiation of
cooling, but has a very small gradient at about 100 nsec, i.e., at
a third emission peak. At an elapsed time of 120 nsec, the light
emission completely ceases, and the silicon is then solidified
through another rapid cooling process. Generally, when a liquid is
solidified through "quenching" which is greatly out of a thermal
equilibrium process, a sufficiently long solidification time cannot
be obtained to form a crystal structure, and the resulting solid is
amorphous (non-crystal).
[0044] The maximum cooling rate was estimated from a
temperature-time curve of silicon as shown in FIG. 7. FIG. 6 shows
the estimated maximum cooling rates after the completion of light
emission with respect to individual irradiation intensities. The
figure shows that the cooling rate increases with an increasing
irradiation intensity.
[0045] Separately, the structure of the silicon thin film after
laser irradiation was observed with a scanning electron microscope.
As a result, the grain size once increased with an increasing
irradiation intensity, but microcrystallization was observed at a
set irradiation intensity of about 470 mJ/cm.sup.2. When the film
was irradiated with three laser pulses, the grain size markedly
increased even at a set irradiation intensity of about 470
mJ/cm.sup.2, while a microcrystallized region partially remained
(FIG. 8). This large increase of the grain size differs from the
behavior of the grain size in the one-pulse irradiation. In this
connection, an actual irradiation intensity is 5% to 10% higher
than the set level, typically in initial several pulses of excimer
laser. The threshold intensity at which microcrystallization occurs
can be therefore estimated as about 500 mJ/cm.sup.2.
[0046] Based on these results, the cooling rate at 500 mJ/cm.sup.2
as shown in FIG. 6 is estimated, and microcrystallization is found
to occur at a cooling rate of about 1.6.times.10.sup.10.degree.
C./sec or more. When the film to be irradiated is an a-Si film, the
microcrystallization occurs at an irradiation intensity of about
500 mJ/cm.sup.2 or more. Likewise, when the film to be irradiated
is a poly-Si film, the microcrystallization may occur at an
irradiation intensity about 30 mJ/cm.sup.2 higher than that in the
a-Si at the same cooling rate of about 1.6.times.10.sup.10.degree.
C./sec. By controlling the cooling rate to
1.6.times.10.sup.10.degree. C./sec or less, therefore, the
resulting crystal can be kept from becoming microcrystalline or
amorphous and can satisfactorily grow.
[0047] Next, the case where a delayed second laser light is
irradiated with a delay relative to a first laser light will now be
described. As is described above, a laser light at a late light
emission stage suppresses the increase of the cooling rate, and the
cooling rate after the completion of light emission controls the
crystallization. The last supplied energy is supposed to initialize
precedent cooling processes. Specifically, by supplying an
additional energy, a precedent cooling process is once initialized
and a solidification process is repeated again, even if the crystal
becomes amorphous or microcrystalline in the precedent cooling
process. This is probably because the interval of light irradiation
is very short of the order of nanoseconds, and loss of the energy
by thermal conduction to the substrate and radiation to the
atmosphere is small. The energy previously supplied therefore
remains nearly as intact. In this assumption, a long time interval
sufficient to dissipate heat is not considered. Accordingly, by
controlling the cooling rate after the completion of a second
heating by the additionally supplied energy, the crystal is
expected to grow satisfactorily. As shown in FIG. 9, the cooling
rate is controlled to a desired level by controlling the delay time
of the second laser irradiation.
[0048] Next, the spatial intensity distribution of an irradiated
beam will be described below. In laser irradiation with plural
slits, the spatial distribution in a slit and the spatial intensity
distribution between slits should be preferably constant. However,
these intensities vary plus or minus several percents to plus or
minus twenty percents due to restriction of designing and
production of such optic devices. At worst, the intensities vary or
distribute within a range of plus or minus several tens of
percents. Such a high variation is caused by the change of the
excimer laser beam with time or consumption of the optical system,
or adhesion of foreign substances to the optical system. FIG. 10
shows the change of the average crystal grain sized obtained from a
microscopic photograph as shown in FIG. 8. The average crystal
grain sized depends on the irradiation intensity and the number N
of irradiation times (the number of irradiated pulses), and is
expressed by the formula d=KN.sup.n, wherein K is a constant and n
is an inclination. FIG. 10 indicates that the inclination n of the
grain size changes with respect to the number N of irradiation
times changes on the border of an irradiation intensity of about
450 mJ/cm.sup.2. When target production conditions are designed
based on the irradiation intensity and the number N of irradiation
times per irradiated site, it is preferred not to concurrently
employ a condition where n=1/4 and a condition where n= 1/7, both
in the spatial intensity distribution. Even if the intensity
spatially varies, irradiation of the film should be preferably
performed in such a manner that the irradiation intensity falls in
a range of, for example, 521 to 470 mJ/cm.sup.2 (a range of
.+-.5.2% of an average intensity of 495 mJ/cm.sup.2) or of 424 to
339 mJ/cm.sup.2 (a range of .+-.11.2% of an average intensity of
381.5 mJ/cm.sup.2). By this configuration, a laser-crystallized Si
thin film exhibiting a minimized difference in average grain size
can be obtained.
[0049] (9) In an eighth aspect the invention provides a
semiconductor thin film forming system having a process chamber,
and the process chamber serves to modify a predetermined region of
a semiconductor thin film by exposing the semiconductor thin film
on a substrate to a projected light patterned through a pattern
formed on a photo mask. The system includes a mechanism for moving
the substrate from the process chamber to a different process
chamber without exposing the substrate to the atmosphere (or the
air).
[0050] (10) In the system just mentioned in (9), the different
process chamber is preferably an insulating film forming chamber
for the formation of an insulating film on the substrate.
[0051] By forming a semiconductor film-gate insulating film in the
same system without exposing the film to the air, the trap state
density of the semiconductor thin film becomes equal to or less
than the interface state density, and the film can be sufficiently
maintained clean to thereby yield a satisfactory
semiconductor-insulating film interface.
[0052] (11) In the system according to the eighth aspect, the
different process chamber may be preferably a semiconductor film
forming chamber for the formation of a semiconductor film on the
substrate.
[0053] (12) In the system according to the eighth aspect, the
different process chamber may be preferably a heat treatment
chamber for treating the substrate with heat.
[0054] (13) Preferably, the different process chamber in the system
according to the eighth aspect is a plasma treatment chamber for
subjecting the substrate to a plasma treatment by treating the
substrate with plasma.
[0055] (14) In the system according to the eighth aspect, the
process chamber is preferably a laser treatment chamber for
modifying the predetermined region of the semiconductor thin film
by exposing the semiconductor thin film on the substrate to a
projected laser beam patterned through the pattern formed on the
photo mask. The different process chamber is preferably another
laser treatment chamber.
[0056] By these configurations, the invention can provide
high-performance and multi-functional systems for the formation of
semiconductors, can provide processes for producing thin film
transistors with a high reproducibility, and can provide
high-performance thin film transistors.
[0057] Specifically, the invention can provide 1) a highly stable
semiconductor thin film processing system by which a cleaning
process with cleaning solutions can be eliminated, 2) a
multifunctional system by which a multitude of processes can be
performed in the same system to yield a space-saving semiconductor
processing system with a reduced area of the overall facilities,
and 3) a process for producing a high performance thin film
transistor at low costs, which can maintain the clean surface
(interface) of silicon without the use of cleaning solutions.
[0058] (15) The different process chamber in the system indicated
in one of (9) to (13) preferably includes a plasma generating
source for generating plasma in a predetermined area of the
different process chamber. The substrate is preferably placed in an
area in the different process chamber other than the predetermined
area.
[0059] (16) In the preferred system indicated in (13), the
different process chamber includes a plasma generating source for
generating plasma in a predetermined area of the different process
chamber. The different process chamber serves to subject the
substrate to the plasma treatment by reacting an excited gas with a
different gas. The excited gas is excited by the plasma generated
in the predetermined area. The different gas is introduced into the
different process chamber without passing through the predetermined
area.
[0060] By the configuration where the plasma generating chamber is
separated from the substrate process chamber, damage induced by
plasma can be reduced to yield a satisfactory gate insulating film.
In addition, the trap state density of the semiconductor thin film
becomes equal to or less than the interface state density, and a
satisfactory semiconductor-insulating film interface can be
obtained.
BRIEF DESCRIPTION OF THE DRAWINGS
[0061] FIG. 1 is a schematic diagram of a conventional excimer
laser annealer.
[0062] FIGS. 2A to 2D are timing charts showing conventional and
invented operation procedures of laser annealing.
[0063] FIG. 3 is a diagram showing the pulse-to-pulse stability of
laser pulse intensities.
[0064] FIG. 4 is a diagram showing an illustrative temperature
change of a silicon film.
[0065] FIG. 5 is a diagram showing an illustrative laser pulse
shape.
[0066] FIG. 6 is a diagram showing the relationship between the
irradiation intensity and the cooling rate, and the cooling rate at
which the film becomes amorphous.
[0067] FIG. 7 is an illustrative diagram of calculated temperature
changes of a silicon thin film.
[0068] FIG. 8 is a diagram showing crystal forms of silicon thin
films corresponding to individual irradiation intensities.
[0069] FIG. 9 is a diagram showing the maximum cooling rate after
the supply of a second pulse, and the cooling rate around the
solidification point.
[0070] FIG. 10 is a diagram showing the relationship between the
average crystal grain size and the process condition.
[0071] FIG. 11 is a diagram showing the overall configuration of an
embodiment of the invented exposure system.
[0072] FIG. 12 is a diagram showing an embodiment (aligning
process) of the invented exposure system.
[0073] FIGS. 13A to 13E are diagrams showing an embodiment (mask
projection process) of the invented exposure system.
[0074] FIGS. 14A and 14B are diagrams showing embodiments (control
procedures) of the invented exposure system.
[0075] FIG. 15 is a side sectional view showing the invented
exposure system, transfer chamber, and plasma-enhanced CVD
chamber.
[0076] FIG. 16 is a top view of the invented composite system
including, for example, an exposure system, transfer chamber, and
plasma-enhanced CVD chamber.
[0077] FIG. 17 is a side sectional view of the invented
plasma-enhanced CVD chamber.
[0078] FIGS. 18A to 18G2 are sectional views showing the invented
process for producing TFT.
[0079] FIGS. 19A to 19G2 are sectional views showing the invented
process for producing TFT using an alignment mark.
[0080] FIGS. 20A to 20G2 are sectional views showing the invented
process for producing TFT including the formation of an alignment
mark.
[0081] FIG. 21 is a block diagram showing an embodiment of the
control procedure for delayed pulse lasing with plural light
sources according to the invention.
[0082] FIGS. 22A to 22D are diagrams showing an embodiment of the
control procedure for delayed pulse lasing from plural light
sources according to the invention.
[0083] FIG. 23 is a diagram showing the invented laser annealer
including a focusing system.
[0084] FIG. 24 is a schematic diagram of the invented composite
system.
[0085] FIG. 25 is an enlarged view of the bellow shown in FIG.
24.
[0086] FIG. 26 is a diagram showing the relationship between the
process chamber and the vibration isolation stage shown in FIG.
24.
[0087] FIG. 27 is an enlarged view showing the configuration of the
vibration isolation stage shown in FIG. 26.
[0088] FIG. 28 is a sectional view of the invented vacuum linear
actuator driving unit.
[0089] FIG. 29 is a vertical sectional view taken along line C-C in
FIG. 28.
[0090] FIG. 30 is a diagram showing the schematic configuration of
the driving unit shown in FIG. 28.
[0091] FIG. 31 is a top view of the invented mask stage driving
mechanism.
[0092] FIG. 32 is a vertical sectional view taken along line B-B in
FIG. 31.
[0093] FIG. 33 is a top view showing the invented stage unit
including a pneumatic tilt mechanism, where a stage is
dismounted.
[0094] FIG. 34 is a side sectional view of a pneumatic tilt
mechanism for use in the invention.
[0095] FIG. 35 is a diagram showing the process and system for
eliminating reflected light for use in the invention.
[0096] FIG. 36 is a vertical sectional view showing the
configuration of an embodiment of the invented system.
[0097] FIG. 37 is an enlarged sectional view of different holes
formed in a partition.
[0098] FIG. 38 is a vertical sectional view showing the
configuration of another embodiment of the invented system.
[0099] FIG. 39 is a vertical sectional view showing the
configuration of a further embodiment of the invented system.
[0100] FIG. 40 is a block diagram showing the configuration of the
invented silicon oxide thin film forming system.
[0101] FIG. 41 is a graph showing an illustrative change of
material gas supply.
[0102] FIG. 42 is a graph showing another illustrative change of
material gas supply.
[0103] FIG. 43 is a schematic side sectional view of an embodiment
of the invented thin film forming system.
[0104] FIG. 44 is a schematic side sectional view of the
configuration of the modifier supply unit 8133 arranged in the
transfer chamber of the system in FIG. 43.
[0105] FIG. 45 is a diagram of an embodiment of the composite
optical system of plural beams for use in the invention.
[0106] FIG. 46 is a diagram of an embodiment of a composite optical
system of plural beams for use in the invention.
[0107] FIG. 47 is a diagram showing an embodiment of a mask stage
mechanism for use in the invention.
[0108] FIGS. 48A and 48B are diagrams showing an embodiment of a
mask stage mechanism for use in the invention.
[0109] FIG. 49 is a diagram showing the system and process for
precision alignment for rectangular beams.
[0110] FIG. 50 is a diagram showing an illustrative alignment mark
arrangement for use in the invention.
[0111] FIG. 51 is a perspective view showing the arrangement of an
alignment mark.
[0112] FIG. 52 is a diagram showing the configuration of a laser
annealer as an embodiment of the invention.
DESCRIPTION OF THE PREFERRED EMBODIMENT
[0113] The embodiments of the invention will now be illustrated in
detail with reference to the drawings.
[0114] FIG. 11 shows an embodiment of the invention. Pulsed
ultraviolet (UV) beams are supplied from a first excimer laser EL1
and a second excimer laser EL2 and are introduced via mirrors opt3
and otp3' and lenses opt4 to a homogenizer opt20'. The intensity
profile of the beam is adjusted in the homogenizer so as to attain
a target uniformity in a photo mask opt21, for example, an in-plane
distribution of .+-.5%. Original beams supplied from the excimer
lasers may have an intensity profile or total energy which varies
pulse to pulse. The system therefore preferably includes a
mechanism for adjusting the spatial intensity distribution and
pulse-to-pulse intensity variation on the photo mask to achieve a
higher uniformity. The homogenizer generally includes a fly-eye
lens or a cylindrical lens. The patterned light formed by the photo
mask is applied via a reduction projection optical system opt23'
and a laser inlet window W0 onto a substrate sub0 placed in a
vacuum chamber C0. The substrate is mounted on a substrate stage
S0, and a target region, for example, a pattern transfer region
ex0, can be exposed to the patterned light by operating the
substrate stage. In FIG. 11, the reduction projecting optical
system is illustrated, but the system can include a 1:1 projecting
optical system or an enlargement projecting optical system. An
optional region on the substrate is irradiated with the patterned
light by moving the substrate stage in X-Y direction in the figure.
The photo mask is mounted on a mask stage (not shown), and the beam
to be applied on the substrate can be controlled also by moving the
photo mask within a region capable of being exposed.
[0115] To apply a target patterned light onto the substrate under
desired conditions, a mechanism is required. An illustrative
mechanism will now be described. As an optical axis should be
delicately and precisely adjusted, in the following example, the
optical axis is once adjusted and then fixed, and the position of
the substrate is adjusted to control the irradiation. For adjusting
the position of the irradiated surface of the substrate relative to
the optical axis, the position of the surface in a direction of the
focus (Z direction) and the verticality relative to the optical
axis must be corrected. Of the .theta.xy tilt correction direction.
.theta.xz tilt correction direction, .theta.yz tilt correction
direction, X exposure region moving direction, Y exposure region
moving direction, and Z focusing direction in the figure, the
verticality relative to the optical axis is corrected by adjusting
in the .theta.xy tilt correction direction, .theta.xz tilt
correction direction, and .theta.yz tilt correction direction. The
position of the irradiated surface of the substrate is controlled
to an appropriate position according to the focal depth of the
optical system by adjusting the Z focusing direction.
[0116] FIG. 12 is an illustrative side sectional view of the
adjustment and alignment mechanism of the substrate. The photo mask
opt21, the reduction projection optical system opt23', and the
laser inlet window W0 are arranged with respect to an exposure axis
L0, as shown in the figure. The substrate sub0 placed in a vacuum
chamber C0 is mounted on a heater H0 with a substrate adhesion
mechanism, and a substrate-XYZ.theta.xy.theta.xz.theta.yz-stage
S0'. In this embodiment, a vacuum chamber is used, but an actual
light irradiation should be preferably performed in an atmosphere
of, for example, an inert gas, hydrogen gas, oxygen gas, or
nitrogen gas. The inside of the chamber is once evacuated and is
then replaced with the above-mentioned gas. The pressure in the
chamber may be around atmospheric (barometric) pressure. By using a
heater with a substrate adhesion mechanism, the substrate can be
heated at a temperature of from room temperature to about
400.degree. C. in light irradiation procedure. When the inside
pressure is set around barometric pressure, the substrate can be
adhered to the heater through a vacuum chucking mechanism.
Accordingly, the misalignment of the substrate can be inhibited
even if the substrate stage moves in the chamber, and the supplied
substrate can be surely fixed to the substrate stage even if the
substrate has some warp or bending. In addition, the shift of the
focal depth due to heat-induced warp or bending can be
minimized.
[0117] Laser interferometers i1 and i2 make alignment of the
substrate and a measurement of the position of the substrate in Z
direction, via a length measuring window W-i and a length measuring
mirror opt-i. To align the substrate, the position of an alignment
mark on the substrate is determined with an off-axis microscope m0,
a microscope light-source Lm, and a microscope element opt-m. A
target exposure position can be determined using information about
the substrate position obtained from the laser interferometer
system. In FIG. 12, the off-axis alignment is illustrated, but the
invented system can also employ through-the-lens alignment or
through-the-mask (through-the-reticle) alignment. In the
measurement, measurement errors can be averaged by making
measurements from plural measuring points and determining a linear
coordinate based on the measured data through the least square
method.
[0118] FIGS. 13A to 13E show the relationship between a mask
pattern and an alignment mark. The mask includes a mask
non-exposure area mask1 and a mask exposure area mask2. For
example, when an excimer laser is used as the light source, a film
that absorbs and reflects ultraviolet radiation is formed on a
quartz substrate. The ultraviolet radiation passes through such a
quartz substrate. The film is formed from, for example, aluminum,
chromium, tungsten, or other metals, or is a dielectric multilayer
film, and is then patterned by photolithography and etching
processes to yield the mask. According to a target pattern on the
mask (indicated by the white areas in FIG. 13A), a silicon film is
exposed to yield exposed Si portions (Si2) in a non-exposed Si
(Si1) as shown in FIGS. 13B and 13C. Where necessary, alignment and
adjustment is conducted to make a mark on the mask mark1 agree with
a mark on the substrate mark2 prior to exposure. A predetermined
and designed region on the silicon thin film can be therefore
exposed. In the thin film transistor forming process using a
silicon thin film, if the exposure process is a first process
requiring the alignment (i.e., no alignment mark is formed prior to
the exposure process), an exposed mark mark3 should be preferably
formed by exposure concurrently in the exposure process of the
silicon thin film. By this procedure, an alignment mark can be
formed using an optical color difference between a-Si and
crystalline Si. By performing, for example, photolithography in a
successive process with reference to the above alignment mark,
transistors and other desired mechanisms and functions can be
formed in target regions which are exposed and modified. Subsequent
to the exposure process, an Si oxide film is formed on the silicon
thin film and a target region of the silicon film is removed by
etching. FIG. 13D and 13E show the state just mentioned above. A
removed Si region (Si3) is a region where the laminated silicon
film and Si oxide film are removed by etching. In this
configuration, Si oxide films (Si4 and Si5) are laminated on the
non-exposed y Si (Si1) and the exposed Si (Si2). By forming island
structures including a silicon film covered with an oxide film as
stated above, desired channel-source-drain regions of a thin film
transistor or alignment marks necessary for successive processes
can be formed. In such a transistor, elements are separated from
one another.
[0119] FIGS. 14A and 14B are timing charts of essential control
procedures. In the illustrative control procedure (1), the
substrate is moved to a target exposure position by operating the
substrate stage. Next, the exposure position is accurately adjusted
by focusing or alignment operation. In this procedure, the exposure
position is adjusted to achieve a target predetermined accuracy of
error of, for example, about 0.1 .mu.m to 100 .mu.m. On completion
of this operation, the substrate is irradiated with light. On
completion of a series of these operations, the substrate is moved
to a successive exposure position. On completion of irradiation of
all the necessary regions on the substrate, the substrate is
replaced with a new one, and the second substrate to be treated is
subjected to a series of the predetermined operations.
[0120] In the illustrative control procedure (2), the substrate is
moved to a target exposure position by operating the substrate
stage. Next, the exposure position is accurately adjusted by
focusing or alignment operation. In this procedure, the exposure
position is adjusted to achieve a target predetermined accuracy of
error of, for example, about 0.1 .mu.m to 100 .mu.m. On completion
of this operation, the mask stage starts to operate. In the chart
shown in FIG. 14B, the substrate is irradiated with light after the
initiation of the mask stage operation to avoid variation of moving
steps during startup. Naturally, a region at a distance from the
alignment position is to be exposed due to the movement of the
stage, and an offset corresponding to the shift must be previously
considered. To avoid unstable operations, the light source may be
operated prior to the light irradiation to the substrate, and the
substrate may be irradiated with light by opening, for example, a
shutter. Particularly, when an excimer laser is employed as the
light source and lasing periods and suspension periods are repeated
in turn, several tens of pulses emitted at early stages are known
to be particularly unstable. To avoid irradiation with these
unstable laser pulses, the beams can be intercepted according to
the operation of the mask stage. On completion of irradiation of
all the necessary regions on the substrate, the substrate is
replaced with a new one, and the second substrate to be treated is
subjected to a series of the predetermined operations.
[0121] In this connection, an a-Si thin film 75 nm thick was
scanned with a 1 mm.times.50 .mu.m beam at a 0.5-.mu.m pitch in a
minor axis direction. When the scanning (irradiation) was
performed- using one light source at a laser irradiation intensity
of the irradiated surface of 470 mJ/cm.sup.2, a continuous
single-crystal silicon thin film in the scanning direction was
obtained. In addition, a beam from a second light source was
applied with a delay time of 100 nsec to yield a laser irradiation
intensity of the irradiated surface of 150 mJ/cm.sup.2, and a
continuous single-crystal silicon thin film in the scanning
direction was obtained, even at a scanning pitch of 1.0 .mu.m. The
trap state density in the crystallized silicon film was less than
10.sup.12 cm.sup.-2.
[0122] FIG. 15 is a side sectional view of an embodiment of the
invented semiconductor thin film forming system. The system
includes a plasma-enhanced CVD chamber C2, a laser irradiation
chamber C5, and a substrate transfer chamber C7. In the system, the
substrate can be transferred via gate valves GV2 and GV5 without
exposing to an atmosphere outside the system. The transfer can be
performed in vacuo or in an atmosphere of an inert gas, nitrogen
gas, hydrogen gas or oxygen gas, in high vacuum, under reduced
pressure or under pressure. In the laser irradiation chamber, the
substrate is placed on a substrate stage S5 with the aid of a
chucking mechanism. The substrate stage S5 can be heated to about
400.degree. C. In the plasma-enhanced CVD chamber, the substrate is
placed on a substrate holder S2. The substrate holder S2 can be
heated to about 400.degree. C. The figure illustrates the following
state. A silicon thin film Si1 is formed on a glass substrate Sub0,
and the substrate is then brought into the laser irradiation
chamber. The surface silicon thin film is modified into a
crystalline silicon thin film Si2 by laser irradiation, and the
substrate is then transferred to the plasma-enhanced CVD
chamber.
[0123] Laser beams are brought into the laser irradiation chamber
in the following manner. The laser beams are supplied from an
excimer laser 1 (EL1) and an excimer laser 2 (EL2), pass through a
first beam line L1 and a second beam line L2 and a laser composing
optical system opt1, a mirror opt11, a transmissive mirror opt12, a
laser irradiation optical system opt2, a homogenizer opt20, a photo
mask opt21 mounted and fixed on a photo mask stage opt22, a
projection optical system opt23, and a laser inlet window W1, and
reach the substrate surface. In this figure, two excimer lasers are
illustrated, but a different number (one or more) of light sources
can be employed in the system. The light source is not limited to
the excimer laser and includes, for example, carbon gas laser,
yttrium-aluminum-garnet (YAG) laser, and other pulse lasers. In
addition, laser pulses can be made and applied onto the substrate
by using argon laser or another continuous wave (CW) light source
and a high speed shutter.
[0124] In the plasma-enhanced CVD chamber, a radio frequency (RF)
electrode D1 and a plasma confinement electrode D3 constitute a
plasma generating region D2 at a position at a distance from a
region where the substrate is placed. For example, oxygen and
helium are supplied to the plasma generating region, and a silane
gas is supplied to the substrate using a material gas inlet system
D4. By this configuration, a silicon oxide film can be formed on
the substrate.
[0125] FIG. 16 is a top view of another embodiment of the invented
semiconductor thin film forming system. A substrate transfer
chamber C7 is respectively connected to a load-unload chamber C1, a
plasma-enhanced CVD chamber C2, a substrate heating chamber C3, a
hydrogen plasma treatment chamber C4, and a laser irradiation
chamber C5 via gate valves GV1 through GV6. Laser beams are
supplied from a first beam line L1 and a second beam line L2 and
are applied to the substrate surface via a laser composing optical
system opt1, a laser irradiation optical system opt2, and a laser
inlet window W1. Gas supply systems gas1 to gas7, and ventilators
vent1 to vent7 are connected to the individual process chambers and
the transfer chamber. By this configuration, desired gas species
can be supplied, and target process pressures can be set. In
addition, the ventilation and degree of vacuum can be controlled.
Substrates sub2 and sub6 to be processed are placed horizontally as
indicated by dotted lines in the figure.
[0126] FIG. 17 is a schematic diagram of the plasma-enhanced CVD
chamber C2. A radio frequency power source RF1 supplies a radio
frequency electrode RF2 with power. As the frequency, a high
frequency of 13.56 MHz or more is suitable. Plasmas are generated
between an electrode RF3 with gas supply holes, and the radio
frequency electrode RF2. Radicals are formed by plasma reaction and
are introduced through the gas supply holes of the electrode into a
region where the substrate is placed. Another gas is introduced by
a flat gas supply system RF4 without exposure to the plasmas, and a
gas phase reaction occurs to form a thin film on the substrate
sub2. A substrate holder S2 is designed to heat the substrate from
room temperature to about 500.degree. C. using, for example, a
heater. A silicon oxide film can be formed by reacting oxygen
radicals with silane gas. In this reaction, the ventilator vent2,
the gas supply system gas2, an oxygen gas line gas21, a helium gas
line gas22, a hydrogen gas line gas23, a silane gas line gas24, a
helium gas line gas25, and an argon gas line gas26 are used as
shown in the figure. When a silicon oxide film was formed at a
substrate temperature of 300.degree. C., at a pressure of 0.1 Torr,
at an RF power of 100 W. at a silane flow rate of 10 standard cubic
centimeters per minute (sccm), at an oxygen flow rate of 400 sccm,
and at a helium flow rate of 400 sccm, the resulting silicon oxide
film was found to have a satisfactory property of a fixed oxide
film charge density of 5.times.10.sup.11 cm.sup.-2. A more
satisfactory oxide film can be formed by increasing the ratio of
the oxygen flow rate to the silane flow rate. The plasma-enhanced
CVD chamber is not limited to a parallel plate RF plasma-enhanced
CVD system as stated above. The CVD process also includes a CVD
process under reduced pressure, a CVD process at normal pressure,
or other processes without the use of plasma, as well as
plasma-enhanced CVD processes using microwaves or electron
cyclotron resonance effect.
[0127] Table 1 shows illustrative gas species required when the
plasma-enhanced CVD system shown in FIG. 17 is used for the
formation of thin films other than silicon oxide films.
TABLE-US-00001 TABLE 1 Illustrative combinations of gas species
SiO.sub.2 Si.sub.3N.sub.4 Si Si Hydro- formation formation
formation formation genation gas21 O.sub.2 N.sub.2 gas22 He Ar Ar
gas23 H.sub.2 H.sub.2 H.sub.2 gas24 SiH.sub.4 SiH.sub.4 SiH.sub.4
gas25 He Ar Ar gas26 SiF.sub.4
[0128] A silicon nitride Si.sub.3N.sub.4 film can be formed by
using nitrogen N.sub.2 or ammonia with an argon Ar carrier gas, and
silane SiH.sub.4 with an argon carrier gas. A silicon thin film can
be formed by using hydrogen H.sub.2 and silane, or using hydrogen
with an argon carrier gas and silicon tetrafluoride SiF.sub.4 with
an argon carrier gas. In addition to these film forming processes,
the plasma-enhanced CVD system can perform hydrogen plasma
treatments of silicon thin films or of silicon oxide films.
[0129] FIGS. 18A to 18G2 are process flow charts showing an
application of the invented semiconductor thin film forming system
to a production process of thin film transistors. The process
includes the following steps.
[0130] In Step A (FIG. 18A), a glass substrate sub0 is cleaned to
remove organic substances, metals, fine particles and other
impurities. Onto the cleaned glass substrate, a substrate covering
film T1 and a silicon thin film T2 are sequentially formed. As the
substrate covering film, a silicon oxide film is formed to a
thickness of 1 .mu.m by low pressure vapor deposition (LPCVD)
process at 450.degree. C. with silane and oxygen gases as
materials. By using the LPCVD process, the overall exterior surface
of the substrate can be covered with a film, except for a region
where the substrate is held (this embodiment is not shown in the
figure). Alternatively, the process can employ, for example, a
plasma-enhanced CVD process using tetraethoxysilane (TEOS) and
oxygen as materials, a normal pressure CVD process using TEOS and
ozone as materials, or the plasma-enhanced CVD process shown in
FIG. 17. An effective substrate covering film includes such a
material as to prevent the diffusion of impurities in the substrate
material. Such impurities adversely affect semiconductor elements.
The substrate may comprise, for example, a glass having a minimized
alkali metal concentration or a quartz or glass having a polished
surface. The silicon thin film is formed to a thickness of 75 nm by
LPCVD at 500.degree. C. with a disilane gas as a material. Under
these conditions, the resulting film is to have a hydrogen atom
concentration of 1 atomic percent or less, and the film can be
prevented from, for example, roughening due to emission of hydrogen
in the laser irradiation process. Alternatively, the
plasma-enhanced CVD process shown in FIG. 17 or a conventional
plasma-enhanced CVD process can be employed. In this case, a
silicon thin film having a low hydrogen atom concentration can be
obtained by adjusting the substrate temperature or the flow rate
ratio of hydrogen to silane or the flow rate ratio of hydrogen to
silicon tetrafluoride.
[0131] In Step B (FIG. 18B), the substrate prepared in Step A is
subjected to a cleaning process to remove organic substances,
metals, fine particles, surface oxide films and other unnecessary
matter. The cleaned substrate is then introduced into the invented
thin film forming system. The substrate is irradiated with a laser
beam L0 to convert the silicon thin film to a crystallized silicon
thin film T2'. The laser-induced crystallization is performed in a
high purity nitrogen atmosphere of 99.9999% or more at a pressure
of 700 Torr or more.
[0132] In Step C (FIG. 18C), after the completion of Step B, the
process chamber is evacuated, and the substrate is then transferred
via a substrate transfer chamber to a plasma-enhanced CVD chamber.
As a first gate insulating film T3, a silicon oxide film is
deposited to a thickness of 10 nm at a substrate temperature of
350.degree. C. from material silane, helium, and oxygen gases.
Where necessary, the substrate is then subjected to hydrogen plasma
treatment or to heating and annealing. Steps A to C are conducted
in the invented thin film forming system.
[0133] In Step D (FIG. 18D), islands composed of laminated silicon
thin film and silicon oxide film are then formed. In this step, the
etching rate of the silicon oxide film should be preferably higher
than that of the silicon thin film according to etching conditions.
By forming a stepped or tapered pattern section as illustrated in
the figure, the gate leak is prevented, and a thin film transistor
having a high reliability can be obtained.
[0134] In Step E (FIG. 18E), the substrate is then cleaned to
remove organic substances, metals, fine particles and other
impurities, and a second gate insulating film T4 is formed to cover
the above-prepared islands. In this example, a silicon oxide film
30 nm thick is formed by the LPCVD process at 450.degree. C. from
material silane and oxygen gases. Alternatively, the process can
employ, for example, the plasma-enhanced CVD process using
tetraethoxysilane (TEOS) and oxygen as materials, the normal
pressure CVD process using TEOS and ozone as materials, or the
plasma-enhanced CVD process as shown in FIG. 17. Next, an n.sup.+
silicon film 80 nm thick and a tungsten silicide film 110 nm thick
are formed as gate electrodes. The n.sup.+ silicon film should be
preferably a phosphorus-doped crystalline silicon film formed by
the plasma-enhanced CVD process or LPCVD process. The work is then
subjected to photolithography and etching processes to yield a
patterned gate electrode T5.
[0135] In Step F1 or F2 (FIG. 18F1 or 18F2), a doping region T6 or
T6' is then formed using the gate as a mask. When a complementary
metal oxide semiconductor (CMOS) circuit is prepared, an n.sup.-
channel TFT requiring an n.sup.+ region, and a p.sup.- channel TFT
requiring a p.sup.+ region are separately formed. The doping
technique includes, for example, ion doping where injected dopant
ions are not subjected to mass separation, ion injection,
plasma-enhanced doping, and laser-enhanced doping. According to the
application of the product or the used technique for doping, the
surface silicon oxide film remains intact (FIG. 18F2) or is removed
(FIG. 18F1) prior to doping.
[0136] In Step G1 or G2 (FIG. 18G1 or 18G2), an interlayer
insulating film T7 or T7' is deposited, and a contact hole is
formed, and a metal is deposited thereon. The work is then
subjected to photolithography and etching to yield a metallic
wiring T8. Such interlayer insulating films include, but are not
limited to, a TEOS-based oxide film, a silica coating film, and an
organic coating film that can provide a flat film. The contact hole
can be formed by photolithography and etching with a metal. Such
metals include low resistant aluminum, copper, and alloys made from
these metals, as well as tungsten, molybdenum, and other refractory
metals. The process including these steps can produce a thin film
transistor having high performance and reliability.
[0137] FIGS. 19A to 19G2 illustrate an embodiment where an
alignment mark is previously formed and laser irradiation is
performed with reference to the alignment mark. FIGS. 20A to 20G2
illustrate another embodiment where an alignment mark is formed
concurrently with laser irradiation. These embodiments are based on
the TFT manufacture process flow, Land are basically similar to the
process shown in FIGS. 18A to 18G2. The distinguishable points of
these embodiments are described below.
[0138] In FIG. 19A, a glass substrate sub0 is cleaned to remove
organic substances, metals, fine particles, and other undesired
matter. On the cleaned substrate, a substrate covering film T1 and
a tungsten silicide film are sequentially formed. The work is then
patterned by photolithography and etching to form an alignment mark
T9 on the substrate. A mark protective film T10 is formed to
protect the alignment mark, and a silicon thin film is then
formed.
[0139] In FIG. 19B, upon laser light exposure, a target region is
exposed to light with reference to the alignment mark. The
alignment in the successive step can be performed with reference to
the preformed alignment mark or to an alignment mark formed by
crystallized silicon thin film patterning (not shown).
[0140] In FIG. 20B, a crystallized alignment mark T9' is formed
concurrently with laser irradiation to the silicon thin film. The
crystallized alignment mark is formed by utilizing a difference in
modification between an exposed region and a nonexposed region.
[0141] In FIG. 20D, alignment in the photolithography process is
performed by using the crystallized alignment mark T9'. The work is
then subjected to an etching process to form islands composed of
laminated silicon thin film and silicon oxide film.
[0142] FIG. 21 shows a laser annealer for heating and
laser-annealing an amorphous semiconductor with synchronizing
pulses. The annealer includes a laser unit 3110, a laser
irradiation processing unit 3120, and a master controller 3130. The
laser unit 3110 produces laser beams with target wavelengths and
waveforms. The laser irradiation processing unit 3120 actually
subjects a substrate W to processing with the laser beam from the
laser unit 3110. The master controller 3130 generally controls the
operations of these units. The work substrate W is made from, for
example, a glass plate. On the surface of the substrate, for
example, an amorphous Si layer as an amorphous semiconductor is
deposited. The laser beam processing converts an exposed region in
the amorphous Si layer into a polycrystalline Si (poly-Si)
layer.
[0143] The laser unit 3110 includes a pair of first and second
lasers 3111 and 3112, and a laser controller 3113. The lasers 3111
and 3112 produce pulsed laser beams. The laser controller 3113
respectively controls the excitation timings of the lasers 3111 and
3112 to produce a pair of pulsed laser beams with an appropriate
differential time, and serves as a delay controller. The first
laser 3111 is a main laser, and the substrate W is first irradiated
with a laser beam from the first laser 3111. The second laser 3112
is a subsidiary laser and the substrate W is irradiated with a
laser beam from the second laser 3112 after the irradiation of the
first laser. Each of the laser beams from the first and second
lasers 3111 and 3112 is appropriately adjusted to have an optimum
differential time and power for the processing of the substrate W.
The both pulsed laser beams PL are superimposed via a composing
optical system 3170 to yield a synchronizing pulsed beam for
processing.
[0144] The laser controller 3113 comprises, for example, a computer
and a signal shaping circuit. Specifically, the laser controller
includes a reference pulse generating circuit 3151, a delay time
setting circuit 3152, an arithmetic circuit 3153, a trigger pulse
generating circuit 3154, first and second photosensors 3161 and
3162, a pair of amplifiers 3163 and 3164, and a delay time
detecting circuit 3155. The reference pulse generating circuit 3151
produces a reference pulse. The delay time setting circuit 3152
previously sets an interval of generation, i.e., differential time,
of a pair of the pulsed laser beams PL that constitute the
synchronizing pulsed laser beam. The arithmetic circuit 3153 sets
the excitation timings of the first and second lasers 3111 and 3112
with reference to a signal output from, for example, the delay time
setting circuit 3152, and generates a command signal corresponding
to the excitation timings. The trigger pulse generating circuit
3154 receives the output of the command signal from the arithmetic
circuit 3153 and generates first and second trigger signals to
trigger the first and second lasers 3111 and 3112. The first and
second photosensors 3161 and 3162 respectively serve for high speed
photoelectric conversion of laser outputs from the first and second
lasers 3111 and 3112 and serve as photodetectors. The amplifiers
3163 and 3164 respectively amplify the outputs from the first and
second photosensors 3161 and 3162. The delay time detecting circuit
3155 receives photo detection signals from the both amplifiers 3163
and 3164 and detects a differential time between the both photo
detection signals.
[0145] The delay time setting circuit 3152 sets such a differential
time (hereinafter referred to as "set differential time t1" that
the waveform of the synchronizing pulsed beam is optimum for the
processing of the substrate W. The synchronizing pulsed beam is
formed by superimposing the laser beams from the first and second
lasers 3111 and 3112. The set differential time t1 can be set by
externally entering from, for example, a keyboard or by reading out
a set level previously stored according to the type of the
substrate W.
[0146] The arithmetic circuit 3153 generates a command signal S2
corresponding to the set differential time t1 set in the delay time
setting circuit 3152. The arithmetic circuit 5153 also calculates a
corrected differential time t2 from the set differential time t1
and generates a command signal S2' corresponding to the corrected
differential time t2. The corrected differential time t2 is
calculated with reference to the output of a measured differential
time t3 from the delay time detecting circuit 3155.
[0147] The trigger pulse generating circuit 3154 receives the
command signal S2 or S2' produced from the arithmetic circuit 3153
and subjects the signal to an appropriate processing. When
triggered by the reference pulse from the reference pulse
generating circuit 3151, the trigger pulse generating circuit 3154
respectively generates first and second trigger signals Tr1 and Tr2
with a time delay or shift of the differential time t1 (t2) to
trigger the first and second lasers 3111 and 3112.
[0148] The delay time detecting circuit 3155 cuts a pair of
photodetection signals from the amplifiers 3163 and 3164 with a
predetermined threshold, and detects a delay time t3 between a pair
of laser beams produced by the first and second lasers 3111 and
3112. The delay time t3 is determined with reference to a
difference of start-up timings of the signals.
[0149] Into the laser irradiation processing unit 3120, the
synchronizing pulsed laser beam is launched. The synchronizing
pulsed laser beam comes out from the laser unit 3110 and is
composed via a composing optical system 3170 including, for
example, mirrors 3171 and 3172, and a half mirror 3173. The laser
irradiation processing unit 3120 comprises a reduction projection
optical system 3121, a stage 3122, and a stage driving unit 3123.
The reduction projection optical system 3121 converts the
synchronizing pulsed laser beam into a beam having a target profile
and energy density distribution and projects the processed beam
onto the substrate W. The stage 3122 supports the substrate W and
moves with the substrate W in scanning operation. The stage driving
unit 3123 controls the operations of the stage 3122.
[0150] The operations of the laser annealer shown in FIG. 21 will
be illustrated below. The master controller 3130 controls the laser
controller 3113 to make the first and second lasers 3111 and 3112
to generate a pair of pulsed laser beams PL with a delay time of
the set differential time t1. Both pulsed laser beams PL are
superimposed via the composing optical system 3170 to yield a
synchronizing pulsed laser beam for processing having a
predetermined waveform, and the synchronizing pulsed laser beam is
applied onto the substrate W. The synchronizing pulsed laser beam
is triggered by the reference pulse from the reference pulse
generating circuit 3151, and the irradiation of the synchronizing
pulsed laser beam onto the substrate W is repeated in a cycle
corresponding to the cycle of the reference pulse.
[0151] In this procedure, the delay time t3 produced by the delay
time detecting circuit 3155 is monitored to find a shift .DELTA.t
of the actual delay time t3 from the set differential time t1.
Thus, the corrected differential time t2 is calculated from
.DELTA.t and t1 according to the following equation.
t2=t1-.DELTA.t=2.times.t1-t3 The corrected differential time t2 is
set as a new set point. By this procedure, the pair of pulsed laser
beams PL with a time delay substantially identical to the set
differential time t1 can be generated from the first and second
lasers 3111 and 3112. Specifically, if a delay time t3' produced by
the delay time detecting circuit 3155 is out of a predetermined
range (upper limit and lower limit) due to response characteristics
or changes with time of the first and second lasers 3111 and 3112,
a new corrected differential time t2' is calculated from a new
shift .DELTA.t' and t1[t2'=t1-.DELTA.t'] and is set as a new set
point. By repeating these procedures, the time interval of the pair
of pulsed laser beams PL constituting the synchronizing pulsed
laser beam can be maintained constant. Specifically, even if the
lasers 3111 and 3112 have different characteristics from each
other, and the response time from the trigger to exciting the laser
varies due to changes with time or changes in operation conditions,
a synchronizing pulsed laser beam having a stable waveform can be
applied onto the substrate W.
[0152] FIGS. 22A to 22D are timing charts illustrating operation
timings of the system shown in FIG. 21. FIG. 22A shows the trigger
signal Tr1 produced from the pulse generating circuits 3151 and
3154. FIG. 22B shows the pulsed laser beam PL launched from the
first pulse laser 3111. FIG. 22C shows the trigger signal Tr2
produced via the delay time setting circuit 3152 and the arithmetic
circuit 3153 from the trigger pulse generating circuit 3154 (these
circuits are referred to as "trigger delay circuits"). FIG. 22D
shows the pulsed laser beam PL launched from the second pulse laser
3112. As obvious from these figures, when a delay time Ts is set in
the trigger delay circuits 3154 and 3152, a desired pulse time
interval Td(=Td2-Td1+Ts+Tc) can be theoretically obtained.
[0153] Next, a system and a process for focusing will be described
as an embodiment of the invention.
[0154] FIG. 23 is a diagram showing the overall configuration of a
laser annealer including the focusing system according to the
embodiment. This laser annealer serves to subject a work W to be
processed to a heat treatment. The work W comprises a glass plate
and a semiconductor thin film of, for example, amorphous Si formed
on the glass plate. The laser annealer includes a laser source
3710, an irradiation optical system 3720, a stage 3730, a stage
driving unit 3740, and a master controller 3780. The laser source
3710 produces an excimer laser and other laser light AL for heating
the semiconductor thin film. The irradiation optical system 3720
converts the laser light AL into a line or spot and launches the
laser beam onto the work W at a predetermined illumination, and
serves as a processing optical system. The stage 3730 supports and
holds the work W, is smoothly movable in the X-Y plane, and is
capable of tilting around the X and Y axes. The stage driving unit
3740 is a driving means for moving or tilting the stage 3730 with
the work W mounted thereon to a necessary degree relative to, for
example, the irradiation optical system 3720. The master controller
3780 generally controls the operations of individual components of
the laser annealer. In this configuration, the stage 3730 and the
stage driving unit 3740 constitute a stage unit, and are housed in
a chamber 3790. The chamber 3790 serves to evacuate the work W and
its surroundings and to adjust the atmosphere surrounding the work
W. The chamber 3790 is placed via a vibration isolator 3792 on a
floor.
[0155] The laser annealer further comprises, as a focusing unit, a
traveling distance measuring sensor 3750, a tiltmeter 3760, and a
non-contact displacement gauge 3770, in addition to the stage 3730,
the stage driving unit 3740, and the master controller 3780. The
traveling distance measuring sensor 3750 detects the travel of the
stage 3730 as an optical or electric signal. The tiltmeter 3760
detects the height and tilt of the stage 3730 relative to the stage
driving unit 3740 as optical or electric information. The
non-contact displacement gauge detects signals corresponding to the
height and tilt of the work W relative to the irradiation optical
system 3720.
[0156] The irradiation optical system 3720 includes a homogenizer
3720a, a mask 3720b, and a projection lens 3720c. The homogenizer
3720a ensures the laser light AL to have a uniform distribution.
The laser light AL is launched from the laser source 3710 via a
mirror 3715 into the homogenizer 3720a. The mask 3720b has a slit
for throttling the laser light AL from the homogenizer 3720a into a
predetermined beam form. The projection lens 3720c reduces and
projects the slit image from the mask 3720b onto the work W. The
irradiation optical system 3720 is arranged to face the work W via
a process window 3790a in the chamber 3790, and is fixed to the
chamber 3790 by a member not shown.
[0157] The stage driving unit 3740 includes a tilting unit 3742 and
an XY stage unit 3744. The tilting unit 3742 makes the stage 3730
tilt around the X and Y axes. The XY stage unit 3744 allows the
stage 3730 together with the tilting unit 3742 to smoothly move in
the X-Y plane. The tilting unit 3742 comprises three supporting
members 3742a and a supporting member driving unit 3742b. The
supporting members 3742a each have a cylinder housed in a bellow
and are capable of expanding and contracting to a selected length.
The supporting member driving unit 3742b operates the supporting
members 3742a to expand and contract. By adjusting the lengths of
the three supporting members 3742a through the supporting member
driving unit 3742b, the tilt and distance of the stage 3730
relative to the irradiation optical system 3720 can be
appropriately finely adjusted. Specifically, the work W can be
adjusted relative to the irradiation optical system 3720 in the
position (distance) in the Z axis direction, tilt angle .theta.X
around the X axis, and tilt angle .theta.Y around the Y axis. The
three tiltmeters 3760 extend from the tilting unit 3742 side to
immediately below the stage 3730 and are eddy current sensors or
electrostatic capacitance sensors. The outputs from these sensors
accurately show to what degree the stage 3730 tilts relative to the
stage driving unit 3740.
[0158] The non-contact displacement gauge 3770 is a laser
displacement gauge, and includes a projecting unit 3771 and a light
receiving unit 3772. The projecting unit 3771 is a projection means
for launching a detective light DL to a flat region as a measuring
target T on the work W. The light receiving unit 3772 receives a
regularly reflected light RL from the measuring target T, and
produces information about the incident position of the regularly
reflected light RL. The projecting unit 3771 and the light
receiving unit 3772 are arranged to face each other with the
interposition of the irradiation optical system 3720. Specifically,
the projecting unit 3771 launches the detective light DL in a
direction inclining at a predetermined angle relative to the
optical axis of the irradiation optical system 3720. Into the light
receiving unit 3772, the reflected right RL enters in a direction.
This direction inclines in an opposed direction to the detective
light DL at the predetermined angle relative to the optical axis of
the irradiation optical system 3720. The master controller 3780
also serves as an arithmetic means for obtaining measurements
including information corresponding to the height of the measuring
target T, with reference to the information about the incident
position detected in the light receiving unit 3772. Thus, the
master controller 3780 constitutes a portion of the non-contact
displacement gauge 3770.
[0159] The projecting unit 3771 comprises a light source for
generating the detective light and a projecting optical system, and
launches a spot beam of the detective light DL through the process
window 3790a to the measuring target T on the work W. The light
receiving unit 3772 includes an image-forming optical system and a
line sensor. The image-forming optical system gathers the reflected
light RL from the measuring target T, and the gathered reflected
light RL enters the line sensor. The line sensor extends in the X-Z
plane in a direction perpendicular to the optical axis of the
reflected light RL, and detects changes of the vertical position
(height) of the work W. This configuration utilizes the fact that
the height of the work W is in a linear relationship with a
position detecting signal from the line sensor. However, when the
work W inclines relative to the optical axis of the irradiation
optical system 3720, the output of the non-contact displacement
gauge 3770 reflects not only the vertical position (height) of but
also the tilt of the work W. The tilt of the work W is corrected
using the tilting unit 3742 to bring the normal line of the work W
in parallel with the optical axis of the irradiation optical system
3720. At this point, the three supporting members 3742a
constituting the tilting unit 3742 are expanded or contracted to an
identical degree to adjust the distance between the work W and the
irradiation optical system 3720. This procedure will be described
in detail later.
[0160] The measuring targets T1, T2, and T3 are located at apexes
of a regular triangle. Each of the measuring targets is arranged at
an identical distance from a processing region (in the figure, the
center of the work W) on the work W. By controlling the XY stage
unit 3744, the detective light DL from the projecting unit 3771 can
be sequentially launched into each of the measuring targets T1, T2,
and T3 on the work W. When the tilt of the work W is to be
corrected, the tilting unit 3742 is operated so as to average the
outputs of the light receiving unit 3772 on the individual
measuring targets T1, T2, and T3. The arrangement of the measuring
targets T1, T2, and T3, and the total number of such measuring
targets can be appropriately modified according to, for example, a
required precision. Particularly, if the work W has warp or other
deformations on its surface, three or more measuring targets must
be newly selected for each processing region to be measured in the
vicinity of the processing region in question. The above-described
measuring targets T1, T2 and T3 have only to be flat surfaces, and
require no specific mark insofar as they can produce a regularly
reflected light.
[0161] The operations of the laser annealer according to the
present embodiment will now be illustrated. Initially, the work W
is transferred to and mounted on the stage 3730 in the laser
annealer. The work W on the stage 3730 is aligned relative to the
irradiation optical system .3720. The irradiation optical system
3720 serves to guide the annealing laser light AL. Next, the mask
3720b of the irradiation optical system 3720 is moved, or the stage
3730 is appropriately moved relative to the irradiation optical
system 3720. Concurrently with this procedure, the laser light AL
from the laser source 3710 is converted into a line or spot and is
launched onto the work W. On the work W, an amorphous Si or another
amorphous semiconductor thin film is formed, and a desired region
of the semiconductor is annealed and recrystallized by irradiation
and scanning of the thin film with the laser light AL. The
resulting semiconductor thin film has satisfactory electric
characteristics.
[0162] The alignment operation of the height and tilt of the work W
on the stage 3730 relative to the irradiation optical system 3720
will now be illustrated in further detail. Initially, three apexes
of a regular triangle centering on a processing region of the work
W are defined as the measuring targets T1, T2, and T3. By
controlling the XY stage unit 3744, the work W is appropriately
moved in the X-Y plane to sequentially move each of the measuring
targets T1, T2, and T3 on the work to a measuring point of the
non-contact displacement gauge 3770. During this procedure, the
detective light DL is launched from the projecting unit 3771 into
each of the measuring targets T1, T2, and T3. The reflected light
RL from each of the measuring targets T1, T2, and T3 is converted
into a signal corresponding to the incident position in the light
receiving unit 3772. In the master controller 3780, measurements
about the heights of the individual measuring targets T1, T2, and
T3 are obtained with reference to the signals about the incident
positions from the light receiving unit 3772. The measurements
obtained from the three points T1, T2, and T3 are supposed to
include errors due to the tilt of the work W. In this procedure,
these errors are neglected, and the tilt angles .theta.X and
.theta.Y of the work W are adjusted by the tilting unit 3742 so as
to control the heights of the three points T1, T2, and T3 to an
identical level. Then, the work W is appropriately moved in the X-Y
plane by the action of the XY stage unit 3744, and measurements
about the heights of the individual measuring targets T1, T2, and
T3 on the work W are obtained. By repeating the height measuring
and the adjustment of the tilt angles of the three points T1, T2,
and T3 in the above manner, tilt-induced errors in height
measurements are gradually decreased. Ultimately, when the
measurements of the three points T1, T2, and T3 agree with each
other, .theta.X=0 and .theta.Y=0, i.e. the tilt of the work becomes
zero. At this stage, any one measurement of the heights constitutes
the height of the processing region on the work W. Ultimately, the
tilting unit 3742 is operated as a Z stage to move the stage 3730,
i.e., the work W, up or down to a target height.
[0163] The invention is illustrated with reference to the
embodiments as above, but these embodiments are not intended to
limit the scope of the invention. For example, the system can
include three or more non-contact displacement gauges 3770. In this
case, the individual non-contact displacement gauges 3770 are
arranged to make measurements of three different points on the work
W concurrently. This configuration can rapidly correct the tilt of
the work W without moving the work W by action of the XY stage unit
3744.
[0164] In the above embodiment, the tilting unit 3742 is operated
as the Z stage. However, the system can include an independent Z
stage to completely separately adjust the tilt and height of the
work W.
[0165] The above embodiment employs a work W comprising a glass
substrate and a semiconductor thin film formed thereon. However,
the work may be made of any material insofar as the material can
produce a regularly reflected light.
[0166] The above focusing system is installed in a laser annealer
for annealing the semiconductor layer on the work W with the laser
light AL. The focusing system can be also applied to not only
annealers for semiconductor materials but also pulsed laser
processors by appropriately modifying the configurations of, for
example, the laser source 3710 and the irradiation optical system
3720. Such pulsed laser processors can serve to, for example,
modify, cut or weld various materials.
[0167] FIG. 24 is a schematic diagram of the configuration of a
composite system according to the invention. The illustrated system
includes a CVD system 3910 as a primary processing unit, and a
laser annealer 3920 as a secondary processing unit. The CVD system
3910 forms a film on a glass substrate (work), and the laser
annealer 3920 subjects the film-formed glass substrate to laser
annealing.
[0168] The laser annealer 3920 comprises a sealable process chamber
3921. The process chamber 3921 houses a processing stage 3922 for
mounting a glass substrate 3901 after film-formation. A ceiling of
the process chamber 3921 has a process window 3923 for passing a
laser beam from the following laser irradiating system. The
upper-space of the process chamber 3921 houses a frame 3924
constituting the laser irradiating system 3925.
[0169] The laser irradiating system 3925 receives a laser beam
produced by a laser 3926 via a reflecting mirror 3927, shapes the
laser beam to have a predetermined profile and apply the shaped
laser beam to focus on the glass substrate 3901. In this system,
only a configuration for a rectangular beam is described. Another
configuration for a long beam will be described later.
[0170] The laser irradiating system 3925 includes, for example, a
mask stage 3928 supporting a mask, an optical lens system 3929, and
a sensor 3930 as components for a rectangular beam. The sensor 3930
serves to detect the position of focus of the beam on the glass
substrate 3901 and is used for precisely adjusting the position of
focus.
[0171] The laser annealer 3920 is placed on a floor 3950 via plural
vibration isolation stages as mentioned below.
[0172] The CVD system 3910 is connected to the process chamber 3921
via a transfer chamber 3970. The transfer chamber 3970 houses a
substrate moving robot 3960 as a moving mechanism. Particularly, as
shown in FIG. 25, the process chamber 3921 is to be connected to
the transfer chamber 3970 with the interposition of the bellow
3971. The connection portion between the process chamber 3921 and
the transfer chamber 3970 is a place where the substrate moving
robot 3960 holds the glass substrate in the CVD system 3910 and
delivers the substrate to the process chamber 3921. To maintain the
inside of the process chamber 3921 in vacuo or at a constant
pressure, the connection portion must be cut off from the air, and
the bellow 3971 performs this function. The transfer chamber 3970
requires a gate valve mechanism to inhibit the communication
between the CVD system 3910 and the process chamber 3921. Such gate
valve mechanisms are well known and are not illustrated herein.
[0173] Next, the configuration of the vibration isolation stages,
essential units of the invented vibration isolation system, will be
illustrated with reference to FIGS. 26 and 27. Each of the
vibration isolation stages 3940 comprises an upper seating 4241,
and an air damper 4242 connected via a vibration isolation rubber
4243 to the upper seating 4241. On the upper seating 4241, the
process chamber 3921 is mounted. To the air damper 4242, compressed
air is supplied from a compressor 4244 via a control valve 4245.
The air damper 4242 includes a piston unit 4246 and a first stopper
member 4247. The piston unit 4246 moves up and down according to
the supplied compressed air. The first stopper member 4247 defines
a lower limit position of the piston unit 4246 during
vibration.
[0174] The upper seating 4241 comprises a second stopper member
4148. The second stopper member 4148 defines on-off of operations
of the vibration isolation stages 3940, and specifies an upper
limit position of the vibration isolation stages 3940,
specifically, an upper limit position in a height direction of a
casing which houses the air damper 4242. The casing which houses
the air damper 4242 includes a position detector 4149 for detecting
a relative distance between the casing and the second stopper
member 4148. The position detector 4149 also serves to limit the
displacement of the casing or the process chamber as follows. If
the process chamber 3921 or the casing which houses the air damper
4242 displaces to a degree exceeding a predetermined allowable
range, a portion of the position detector 4149 is engaged with the
second stopper member 4148, and this engagement limits the
displacement as shown in FIG. 26.
[0175] A detective signal is sent out from the position detector
4149 to a controller 42100 as a feedback signal. The controller
42100 controls the control valve 4245 with reference to the
relative distance between the second stopper member 4148 and the
position detector 4149 indicated by the detective signal. The
controller 42100 thus operates the vibration isolation stages 3940
to eliminate the vibration of the process chamber 3921.
[0176] Particularly, when the controller 42100 detects that the
relative distance becomes equal to or less than a predetermined
level, for example, such that a portion of the position detector
4149 comes in contact With the second stopper member 4148, the
controller 42100 stops the control operation to the control valve
4245 to cease the vibration isolation function. Contact of a
portion of the position detector 4149 with the second stopper
member 4148 means that up-and-down movements of the upper seating
4241 or of the air damper 4242 exceed the allowable range. In this
connection, the second stopper member 4148 is configured in such a
manner that the position of the second stopper member in a vertical
direction can be changed by a screw or another adjusting means.
[0177] As is thus described, each of the vibration isolation stages
3940 has a feedback control function. According to this function,
the vibration isolation stage 3940 controls the pressure of the
compressed air which defines the vibration isolation property to
thereby eliminate vibration, when the relative distance between the
second stopper member 4148 and the position detector 4149 changes.
In addition, if the up-and-down movements of the upper seating 4241
or of the air damper 4242 exceed the allowable range, the vibration
isolation stage 3940 deactivates the feedback control function. The
position of the second stopper member 4148 can be adjusted up and
down by hand, and a position at which the vibration isolation
function is stopped can be optionally set.
[0178] Specifically, the vibration isolation stage 3940 exerts its
function from a point where the piston unit 4246 comes in contact
with the first stopper member 4247 to a point where a portion of
the position detector 4149 comes in contact with the second stopper
member 4148. If the distance between these two points is set at 200
.mu.m, the vibration isolation stage 3940 functions within a range
of up-and-down movements of .+-.100 .mu.m.
[0179] Operations in a high precision scanning with rectangular
beams will now be described. When rectangular beams are used for
processing, the vibration in the process chamber 3921 is mainly
derived from vibration that travels from the CVD system 3910 or the
floor 3950. This vibration has an amplitude of at most plus or
minus several tens of micrometers, and the bellow 3971 does not
displace to a significant degree due to scanning. To surely
activate the vibration isolation function in scanning operation
with a rectangular beam, the relative distance between the second
stopper member 4148 and the position detector 4149 in the vibration
isolation stage 3940 should be set at a level somewhat greater than
an expected displacement. For example, the relative displacement is
set at 200 .mu.m. In this case, vibrations from the floor 3950 are
absorbed by the plural vibration isolation stages 3940 through the
feedback control function, and vibrations from the CVD system 3910
are absorbed by the bellow 3971.
[0180] Next, operations in a low precision scanning with long beams
will be described. When long beams are used for processing, the
processing stage 3922 in the process chamber 3921 moves, and the
location of center of gravity of the processing stage 3922 in the
process chamber 3921 shifts, and the overall process stage is
liable to tilt to a great degree. If the tilt is small, the same
vibration isolation function works as in the processing with
rectangular beams. However, if the tilt is large, the second
stopper member 4148 limits the function and the vibration isolation
stage 3940 stops its function. If the vibration isolation stage
3940 does not function, the process chamber 3921 and the bellow
3971 integrally move, and the relative position between the process
chamber 3921 and the bellow 3971 does not shift. Accordingly, the
bellow 3971 is not destroyed even if it undergoes large
displacement. In this connection, the scanning precision with long
beams allows large vibrations several tens of times of that in
scanning with rectangular beams, and such vibrations do not affect
the scanning precision.
[0181] Subsequently, an embodiment of the mechanical configuration
of the invented vacuum linear actuator mechanism will be
illustrated in detail with reference to FIGS. 28 and 29. A
configuration suitable for use in a vacuum chamber for laser
annealing will be described herein. Such a vacuum chamber is
symbolically indicated by dashed lines 43100 in FIG. 30, and
includes any vacuum chamber insofar as it is usable in an
atmosphere at a pressure from atmospheric pressure to about
1.0.times.10.sup.-6 Torr.
[0182] The vacuum chamber 43100 houses a stage base 4309 as a fixed
base member at the bottom. At both side ends of the stage base
4309, Y axis linear bearings 4315 and 4320 are mounted. The Y axis
linear bearings 4315 and 4320 extend in parallel with each other in
the Y axis direction, and serve to linearly guide a Y axis base
4314 which is assembled on these bearings. At both side ends of the
Y axis base 4314, a pair of X axis linear bearings 4307 are
mounted. The X axis linear bearings 4307 extend in parallel with
each other in the X axis direction, and serve to linearly guide an
X axis base 4306 assembled on these bearings. To the X axis base
4306, a trolley 4403 is attached. The trolley 4403 supports a stage
4302 including a heating heater. On the stage 4302, a work (e.g., a
glass) 4301 is placed.
[0183] The X axis base 4306 is driven by a pair of X axis linear
motors 4408. The X axis linear motors 4408 are arranged on the Y
axis base 4314 adjacent to the X axis linear bearings 4307. The
position of the X axis base 4306 is detected by an X axis linear
encoder 4410. The X axis linear encoder 4410 is arranged on the Y
axis base 4314 adjacent to one of the X axis linear motors 4408.
This configuration serves to directly drive the X axis base 4306
and to directly detect its position. This eliminates deterioration
of precision due to backlash according to conventional
technologies, and can yield quick responses.
[0184] The Y axis base 4314 is driven by two linear motors 4318 and
4323. The linear motors 4318 and 4323 are placed on the stage base
4309 and can be independently controlled. The position of the Y
axis base 4314 is detected at two points opposite to each other by
two linear encoders 4316 and 4321. The linear encoders 4316 and
4321 are arranged on the stage base 4309 adjacent to the linear
motors 4318 and 4323, respectively. This configuration also
eliminates deterioration of precision due to backlash and can yield
quick responses, as in the X axis. In addition, the position in the
Y axis direction is detected by the linear encoders 4316 and 4321
at two points at opposite ends of the Y axis base 4314. This
configuration can detect and control minute rotation of the Y axis
base 4314 with reference to a difference between individual
measurements. The minute rotation of the Y axis base 4314 means a
rotation around the Z axis which is perpendicular to X- and Y-axes,
and is hereinafter referred to as "rotation .theta. around the Z
axis".
[0185] To prevent heat irradiated by the heater of the stage 4302
from transferring into the X axis base 4306 and the Y axis base
4314, a water-cooled plate 4304 is arranged between the trolley
4403 and the X axis base 4306. The X axis base 4306 also includes a
water-cooling mechanism to prevent troubles in, for example, the
linear bearings, due to radiant heat from the heater of the stage
4302. In addition, coils of individual linear motors evolve heat
during operation of the stage. Thus, the individual linear motors
include X axis motor coil cooling plates 4411 and Y axis motor coil
cooling plates 4319 and 4324, respectively, and these cooling
plates cool the coils of the linear motors. Likewise, to prevent
damage or deterioration of precision due to thermal deformation,
the X axis linear encoder 4310 and Y axis linear encoders 4316 and
4321 include, respectively, an X axis encoder cooling plate 4412
and Y axis encoder cooling plates 4317 and 4322. These plates
maintain the encoders at constant temperatures.
[0186] The system further includes a cable guide 4413 corresponding
to the X axis linear encoder 4410, and cable guides 4325
respectively corresponding to the Y axis linear encoders 4316 and
4321. These cable guides guide cables for detective signals from
the X axis linear encoder 4410 and the Y axis linear encoders 4316
and 4321 to a fixed unit, as these encoders move.
[0187] An embodiment of the invented mask stage driving mechanism
will be illustrated below with reference to FIGS. 31 and 32. The
configuration of the stage will now be described from top to bottom
in turn. The stage includes a base plate 4601 fixed to a fixed unit
not shown. The base plate 4601 has a large round opening in the
center. The base plate 4601 includes a cross roller bearing 4703
mounted at the edge of the opening, and comprises a .theta. axis
movable unit 4604 arranged on its lower surface side. The .theta.
axis movable unit 4604 is rotatably arranged around the .theta.
axis, i.e., the Z axis via the cross roller bearing 4703. The
.theta. axis movable unit 4601 also has an opening at its center
corresponding to the opening of the base plate 4601. Under the
.theta. axis movable unit 4604, the stage includes a Y axis movable
unit 4707. The Y axis movable unit 4707 is movably arranged in the
Y axis direction via a pair of Y axis linear bearings 4707. The Y
axis linear bearings extend in parallel with each other in the Y
axis direction. The Y axis movable unit 4707 also has an opening at
its center corresponding to the opening of the base plate 4601.
[0188] The Y axis movable unit 4707 comprises an X axis movable
unit 4610 in a space formed for ensuring the arrangement of the Y
axis linear bearings 4706. Lifting air bearings 4611 and yaw-guide
air bearings 4615 and 4616 guide the X axis movable unit 4610 in
the X axis direction. The X axis movable unit 4610 also has an
opening at its center corresponding to the opening of the base
plate 4601.
[0189] Specifically, the X axis movable unit 4610 is positioned
between the .theta. axis movable unit 4604 and the Y axis movable
unit 4707 and is arranged movably in the X axis direction via
plural lifting air bearings 4611. The lifting air bearings 4611 are
arranged on a surface of the Y axis movable unit 4707 facing the X
axis movable unit 4610. The lifting air bearings 4611 serve to
float the X axis movable unit 4610 by blowing compressed air to the
lower surface of the X axis movable unit 4610. The mechanism shown
in the figures includes three lifting air bearings 4611 arranged at
angular intervals of 120 degrees.
[0190] The X axis movable unit 4610 is composed of a magnetic
material. The Y axis movable unit 4707 further comprises attraction
magnets 4618 at plural points on the surface facing the X axis
movable unit 4610. In this example, a total of nine magnets 4618,
i.e., each three magnets around three lifting air bearings 4611,
are arranged. In addition, the X axis movable unit 4610 has two
edges in parallel with the X axis direction. By using these edges,
the yaw-guide air bearings 4615 and 4616 arranged on the Y axis
movable unit 4707 guide the X axis movable unit 4610 in the X axis
direction. Each two yaw-guide air bearings 4615 and 4616 are
arranged for each of the edges of the X axis movable unit 4610. In
addition, the two yaw-guide air bearings 4616 for one edge of the X
axis movable unit 4610 respectively include pre-load pistons 4620
in combination to apply a pre-load onto the one edge. With the X
axis movable unit 4610, a mask stage 4730 is combined via a boss
4710-1. The mask stage 4730 has an opening at its center and
projects from the lower side of the Y axis movable unit 4707, and
has a supporting unit for a mask 4714 at its bottom. The opening of
the mask stage 4730 is somewhat smaller than the opening of the
base plate 4601.
[0191] The mask stage is thus configured to have three degrees of
freedom in the X, Y, and .theta. axes. The output axis of a .theta.
axis driving motor 4605 moves in the axial direction according to
the rotation of the .theta. axis driving motor 4605 to push a
.theta. axis driving plate 4619. This operation allows the .theta.
axis movable unit 4606 to rotate counterclockwvise around the Z
axis relative to its center. The output axis of the .theta. axis
driving motor 4605 is not fixed to the driving plate 4619. A
traction spring 4617 is therefore arranged between the base plate
4601 and the .theta. axis movable unit 4604 to apply a pre-load in
a clockwise direction. This configuration prevents backlash and
irregular rotation due to, for example, friction of the cross
roller bearing 4703. The rotation angle of the .theta. axis movable
unit 4604 is determined by a hollow rotary encoder 4702 to ensure
its precision. The rotary encoder 4702 is combined to a rotation
axis 4704-1, and the rotation axis 4704-1 is mounted on the .theta.
axis movable unit 4604 and integrally rotates therewith. Thus, the
rotation precision of the .theta. axis movable unit 4604 is
ensured.
[0192] A Y axis linear motor 4608 is arranged between the edge of
the .theta. axis movable unit 4604 and the edge of the Y axis
movable unit, and drives the Y axis movable unit 4707 in the Y axis
direction. The position of the Y axis movable unit 4707 is
determined by a Y axis linear encoder 4709 arranged in the vicinity
of the Y axis linear motor 4608. An X axis linear motor 4713 drives
the X axis movable unit 4610. The X axis linear motor 4713 is
arranged under the Y axis movable unit 4707, and its movable part
is connected to the boss 4710-1 to drive the X axis movable unit
4610 and the boss 4710-1 in the X axis direction. The position of
the X axis movable unit 4610 is determined by an X axis linear
encoder 4612 arranged between the lower side of the Y axis movable
unit 4707 and the boss 4710-1.
[0193] The guide mechanism of the X axis movable unit 4610 will be
illustrated in further detail below. In an actual operation, a
laser light is applied onto a work (not shown) placed under the
mask using the opening of the center as an optical path, while the
work is scanned with the laser light at a constant speed. The X
axis movable unit 4610 therefore requires a high trackability and
alignment accuracy (registration). Accordingly, the guide mechanism
of the X axis movable unit 4610 employs hydrostatic bearings, and
comprises two vertical (radial) and horizontal guide mechanisms.
The lifting air bearings 4611 mounted on the Y axis movable unit
4707 and the guide surface of the X axis movable unit 4610
constitute the hydrostatic bearing for vertical guiding.
Particularly, to ensure a gap (about 5 to 10 .mu.m) to obtain a
high guide rigidity, a pre-load is applied by attraction of the
plural magnets 4618 mounted on the Y axis movable unit 4707.
[0194] Generally, air bearings are fixed to a movable unit side.
However, in this mechanism, lifting air bearings 4611 are fixed not
to the X axis movable unit 4610 but to the Y axis movable unit 4707
which constitutes a base for the X axis movable unit 4610. This
configuration utilizes a short stroke necessary for the X axis
movable unit 4610, and reduces the weight of the X axis movable
unit 4610 and decreases the number of connected air-supply tubes to
the air bearings. Such air-supply tubes disturb the movement of the
X axis movable unit 4610.
[0195] Two pairs of the yaw-guide air bearings 4615 and 4616
mounted on the X axis movable unit 4610 constitute the hydrostatic
bearing for horizontal guiding of the X axis movable unit 4610.
These two pairs of yaw-guide air bearings 4615 and 4616 sandwich
the X axis movable unit 4610. The two yaw-guide air bearings 4615
are respectively supported by expanding bolts 4621. Each of the
expanding bolts 4621 is mounted on the X axis movable unit 4610 and
its tip is in contact with the yaw-guide air bearing 4615. By
adjusting the degree of protrusion of each expanding bolt, the
horizontal position of the X axis movable unit 4610 can be
controlled.
[0196] The yaw-guide air bearings 4616 are arranged in an opposite
side to the yaw-guide air bearings 4615, and are supported by
pre-load pistons 4620 with a constant force. This configuration can
maintain constant hydrostatic bearing gaps without being affected
by, for example, thermal deformation, mechanical processing
precision, and assembling errors of the X axis movable unit 4610,
the Y axis-movable unit 4707, and other components.
[0197] All the support points of the air bearings are spherically
supported by ceramic balls. Even if the parallelism between the air
bearing surface and a counter surface is lost due to waviness,
thermal deformation, and other deformation of the counter surface,
such loss in parallelism can be absorbed to some extent.
[0198] FIGS. 33 and 34 each show a schematic diagram of a stage
unit for a vacuum chamber including the invented pneumatic tilt
mechanism. The stage unit is placed in a vacuum chamber that can
obtain vacuum or reduced pressure. In these figures, the vacuum
chamber is not shown.
[0199] The invented pneumatic tilt mechanism includes a base 5102,
three bellows cylinders 5104-1, 5104-2, and 5104-3, and a plate
spring 5103 on the base 5102 to support a stage 5201. The bellows
cylinders are pneumatically driven. The plate spring 5103 is in the
shape of a cross. The stage 5201 includes a platform on its lower
side, and the center (intercept) of the plate 5103 is fixed to the
platform with, for example, bolts. Four edges of the plate spring
5103 are respectively fixed via supports 5202-1 to the base
5102.
[0200] Each of the bellows cylinders 5104-1, 5104-2, and 5104-3
includes a pneumatic cylinder sealed by bellows. Even if the air is
leaked from the pneumatic cylinder, this configuration can prevent
the leaked air from migrating into the vacuum chamber.
[0201] The pneumatic tilt mechanism allows the plate spring 5103 to
support the stage 5201, and permits the bellows cylinders 5104-1,
5104-2, and 5104-3 to expand and contract by supplying compressed
air to the bellows cylinders 5104-1, 5104-2, and 5104-3. The
pneumatic tilt mechanism thus adjusts the height and tilt of the
stage 5201.
[0202] FIG. 35 illustrates the configuration of an irradiation
optical system 5420. A laser light AL is launched from a laser
source (not shown) into a homogenizer 5421. The homogenizer 5421
includes first to fourth cylindrical lens arrays CA1 to CA4, and a
condenser lens 5521a. The cylindrical lens arrays CA1 to CA4 serve
to independently control vertical and horizontal beam sizes. The
condenser lens 5521a serves to condense the laser light. The first
and third cylindrical lens arrays CA1 and CA3 have a curvature in a
cross section in parallel with the paper plane, and the second and
fourth cylindrical lens arrays CA2 and CA4 have a curvature in a
cross section perpendicular to the paper plane.
[0203] The laser light AL is launched from the homogenizer 5421 via
a turning mirror 5525 into a mask assembly 5422. The mask assembly
5422 includes a mask 5522a, a reflecting member 5522b, and a field
lens 5522c. The mask 5522a has a pattern on its lower surface 5580.
The pattern is to be irradiated with the laser light AL and to be
applied to a work W. The reflecting member 5522b inhibits the laser
light AL from entering the periphery of a light transmitting region
(i.e., opening) of the pattern of the mask 5522a and from causing
reflected light. The field lens 5522c adjusts the pupil position.
The reflecting member 5522b is arranged at an angle to the mask
5522a, and a reflected light RL from an upper surface 5581 of the
reflecting member 5522b exits in a direction out of an optical axis
OA and enters a beam damper 5526 via the field lens 5522c. The
field lens 5522c can be considered to constitute a portion of the
homogenizer 5421.
[0204] The laser light AL passed through the mask 5522a enters a
projection lens 5423. The projection lens 5423 reduces and
projects, i.e., forms a slit image onto a processing surface of the
work W. The slit image is a transmitted patterned light formed on
the mask 5522a which is illuminated by the laser light AL.
[0205] Next, a first embodiment of the CVD system according to the
invention will be illustrated with reference to FIGS. 36 and 37. In
the CVD system shown in FIG. 36, a silicon oxide film as a gate
insulating film is formed on a conventional TFT glass substrate
7111, using, preferably, silane as a material gas. A casing 7112 of
the CVD system is a vacuum casing, and the inside of the casing is
maintained at a desired degree of vacuum during film forming
operation by action of an evacuating mechanism 7113. The evacuating
mechanism 7113 is connected to an evacuating port 7112b-1 formed in
the vacuum casing 7112.
[0206] The vacuum casing 7112 houses a partition 7114 at the
midpoint in a vertical direction. The partition 7114 is composed of
a conductive material and is arranged in a nearly horizontal
position, and has, for example, a square plane shape. The periphery
of the partition 7114 is in contact with a peripheral wall of the
vacuum casing 7112. The partition 7114 serves to separate the
inside of the vacuum casing 7112 to two chambers, i.e., upper and
lower chambers. The upper chamber forms a plasma-generating space
7115, and the lower chamber forms a film forming space 7116. The
partition 7114 has a target specific thickness, and an overall flat
form. The plane shape of the partition 7114 is similar to the
horizontal sectional shape of the vacuum casing 7112. The partition
7114 has an inner space 7124.
[0207] The glass substrate 7111 is placed on a substrate supporting
mechanism 7117 in the film forming space 7116. The glass substrate
7111 is substantially in parallel with the partition 7114 and is
arranged in such a manner that its film forming surface (upper
surface) faces the lower surface of the partition 7114. The
potential of the substrate supporting mechanism 7117 is maintained
at a grounding potential identical to the potential of the vacuum
casing 7112. The substrate supporting mechanism 7117 further
includes a heater 7118 inside thereof. The heater 7118 serves to
maintain the temperature of the glass substrate 7111 at a
predetermined level.
[0208] The configuration of the vacuum casing 7112 will now be
described. The vacuum casing 7112 comprises an upper casing 7112a
and a lower casing 7112b for easier assembling of the casing. The
upper casing 7112a forms the plasma generating space 7115, and the
lower casing 7112b forms the film forming space 7116. When the
upper and lower casings 7112a and 7112b are assembled into the
vacuum casing 7112, the partition 7114 is interposed between both
of the casings. The partition 7114 is mounted in such a manner that
the periphery of the partition comes in contact with a lower
insulating member 7122 of annular insulating members 7121 and 7122.
The annular insulating members 7121 and 7122 are interposed between
the upper casing 7112a and an electrode 7120, when the electrode
7120 is arranged. This configuration separates and forms the plasma
generating space 7115 and the film forming space 7116 respectively
on the upper side and lower side of the partition 7114.
Specifically, the partition 7114 and the upper casing 7112a
constitute the plasma generating space 7115. In the plasma
generating space 7115, the partition 7114, the upper casing 7112a,
and the plate electrode (radio frequency electrode) 7120 constitute
a region where a plasma 7119 is generated. The electrode 7120 is
located nearly at the midpoint between the partition 7114 and the
upper casing 7112. The electrode 7120 has plural holes 7120a. The
upper casing 7112a includes the two annular insulating members 7121
and 7122 along the side inner surface thereof. The partition 7114
and the electrode 7120 are supported and fixed by the annular
insulating members 7121 and 7122. The annular insulating member
7121 comprises an inlet pipe 7123 to bring an oxygen gas into
plasma generating space 7115 from the outside. The inlet pipe 7123
is connected via a mass flow controller (not shown) to an oxygen
gas source (not shown). The mass flow controller controls the flow
rate.
[0209] The partition 7114 separates the inside of the vacuum casing
7112 into the plasma generating space 7115 and film forming space
7116. The partition 7114 has a plurality of through holes 7125. The
through holes 7125 meet predetermined conditions and pass through
the inner space 7124 and are distributed. Only the through holes
7125 allow the plasma generating space 7115 to communicate with the
film forming space 7116. The inner space 7124 formed in the
partition 7114 serves to disperse the material gas to thereby
uniformly supply the material gas to the film forming space 7116.
In addition, the lower wall of the partition 7114 includes plural
diffusion holes 7126 to supply the material gas to the film forming
space 7116. The through holes 7125 and the diffusion holes 7126 are
respectively made so as to meet the following predetermined
conditions. To the inner space 7124, an inlet pipe 7128 is
connected for bringing the material gas into the inner space 7124.
The inlet pipe 7128 is connected to the lateral side of the inner
space 7124. The inner space 7124 includes a uniformizing plate 7127
nearly horizontally. The uniformizing plate 7127 has plural
perforated holes 7127a so as to homogeneously supply the material
gas from the diffusion holes 7126. As shown in FIG. 37, the
uniformizing plate 7127 separates the inner space 7124 of the
partition 7114 into two, upper and lower spaces 7124a and 7124b.
The material gas is supplied via the inlet pipe 7128 into the inner
space 7124. By the above configuration, the material gas is
supplied into the upper space 7124a, is brought through the holes
7127a of the uniformizing plate 7127 into the lower space 7124b,
and is diffused through the diffusion holes 7126 into the film
forming space 7116. The configuration can evenly supply the
material gas to the overall film forming space 7116.
[0210] FIG. 37 is an enlarged view of a portion of the partition
7114, i.e., essential parts of the through holes 7125, the
diffusion holes 7126 and the uniformizing plate 7127. For example,
the through holes 7125 have a larger diameter on the plasma
generating space 7115 side, and a throttled, smaller diameter on
the film forming space 7116 side.
[0211] The upper casing 7112a includes a power supply rod 7129 on
its ceiling. The power supply rod 7129 is connected to the
electrode 7120, and supplies a radio frequency power to the
electrode 7120 for discharging. The electrode 7120 serves as a
radio frequency electrode. The power supply rod 7129 is thus
covered with an insulator 7131 to insulate the rod from other
metallic parts.
[0212] A process for forming a film with the CVD system configured
as above will be described. The glass substrate 7111 is transferred
into the vacuum casing 7112 and is placed on the substrate
supporting mechanism 7117 by a moving robot not shown. The inside
of the vacuum casing 7112 is evacuated and is maintained under
reduced pressure at a predetermined degree of vacuum by the
evacuating mechanism 7113. An oxygen gas is then supplied through
the inlet pipe 7123 into the plasma generating space 7115 in the
vacuum casing 7112. The flow rate of the oxygen gas is controlled
by the exterior mass flow controller. The flow velocity (u) of the
oxygen gas is calculated according to the following equations (1)
and (2): Q.sub.O2=.rho..sub.O2uA (1) P.sub.O2=(.rho..sub.O2RT)/M
(2) wherein Q.sub.O2 is the flow rate of oxygen gas, P.sub.O2 is
the pressure of oxygen gas, .rho..sub.O2 is the density of oxygen
gas, R is the gas constant, and T is the temperature.
[0213] Separately, silane as the material gas is supplied via the
inlet pipe 7128 into the inner space 7124 of the partition 7114.
The silane is at first supplied into the upper space 7124a of the
inner space 7124, is uniformized through the uniformizing plate
7127, diffuses to the lower space 7124b and is then supplied
through the diffusion holes 7126 directly into the film forming
space 7116. Specifically, the silane is introduced into the film
forming space 7116 without coming in contact with a plasma. As the
heater 7118 is energized, the substrate supporting mechanism 7117
in the film forming space 7116 is held at a predetermined
temperature in advance.
[0214] In this state, a radio frequency power is supplied through
the power supply rod 7129 to the electrode 7120. The radio
frequency power causes electric discharge to form an oxygen plasma
7119 around the electrode 7120 in the plasma generating space 7115.
The generation of the oxygen plasma 7119 invites the formation of
radicals (excited active species) and neutral excited species.
[0215] In this configuration, the inner space of the vacuum casing
7112 is separated into the plasma generating space 7115 and the
film forming space 7116 by the partition 7114 composed of a
conductive material. When a film is formed on the surface of the
substrate 7111, in the plasma generating space 7115, the oxygen gas
is introduced and the radio frequency power is supplied to the
electrode 7120 to form the oxygen plasma 7119. Separately, the
material gaseous silane is supplied via the inner space 7124 and
the diffusion holes 7126 of the partition 7114 and is directly
brought into the film forming space 7116. The radicals in the
oxygen plasma 7119 generated in the plasma generating space 7115
are brought through the plural through holes 7125 of the partition
7114 into the film forming space 7116, and the silane is brought
through the inner space 7124 and the diffusion holes 7126 of the
partition 7114 and is directly introduced into the film forming
space 7116. The configuration (shape) of the through holes 7125
inhibits back-diffusion of the directly-introduced silane from the
film forming space 7116 to the plasma generating space side. As is
thus described, the material gaseous silane is directly brought
into the film forming space 7116 without coming in direct contact
with the oxygen plasma 7119, and the silane can be prevented from
vigorously reacting with the oxygen plasma. In this manner, a
silicon oxide film is formed on the surface of the substrate 7111
placed in the film forming space 7116 facing the lower side of the
partition 7114.
[0216] In the above configuration, the sizes and other dimensions
of the plural through holes 7125 of the partition 7114 are
determined so as to limit the transfer of the oxygen gas to a
target range, provided that the oxygen gas in the plasma generating
space 7115 constitutes a mass transfer flow in the through holes,
and that the silane in the film forming space 7116 diffuses and
moves through the through holes 7125 into the plasma generating
space 7115. Specifically, the dimensions are determined to meet the
relationship uL/D>1, wherein D is the mutual gas diffusion
coefficient of the oxygen gas and silane passing through the
through holes 7125 of the partition 7114 at a temperature T, L is
the length (characteristic length of the through holes) of a
portion of the through holes 7125 having the minimum diameter, and
u is the gas flow velocity. The requirements in dimensions of the
through holes are preferably applied in the same manner to the
diffusion holes 7126 in the partition 7114.
[0217] The relationship uL/D>1 can be derived in the following
manner. For example, the relationship of the oxygen and silane
moving through the through holes 7125 is in accordance with the
following formula (3), wherein .rho..sub.SiH4 is the density of the
silane gas, u.sub.SiH4 is the diffusion flow velocity, and
D.sub.SiH4-O2 is the mutual gas diffusion coefficient. When the
characteristic length of the through hole is defined as L, the
equation (3) can be approximated to the following equation (4). By
comparing both sides of the equation (4), the diffusion flow
velocity of silane u.sub.SiH4 is expressed by -D.sub.SiH4-O2/L.
When the oxygen flow velocity obtained according to the above
equations (1) and (2) is defined as u, and the diffusion flow
velocity of silane is defined as =D.sub.SiH4-O2/L, the ratio
between absolute values of these flow velocities, i.e.,
|-u/(-D.sub.SiH4-O2/L)|=uL/D.sub.SiH4-O2 is the ratio of the oxygen
mass transfer rate to the silane diffusion rate. The ratio
uL/D.sub.SiH4-O2 of 1 or more means that the flow rate through
convection is larger than the flow rate through diffusion.
Specifically, the ratio uL/D.sub.SiH4-O2 set at 1 or more means
that the diffusion of silane affects less the transfer of the
silane. .rho..sub.SiH4u.sub.SiH4=-D.sub.SiH4-O2grad.rho..sub.SiH4
(3) .rho..sub.SiH4u.sub.SiH4.apprxeq.D.sub.SiH4-O2.rho..sub.SiH4/L
(4)
[0218] Next, a practical example will be described below. The value
calculated according to the equation (4) is 11, on condition that
film-formation is performed at a temperature of the partition of
7114 of 300.degree. C., at a diameter of the through hole 7125 in
the partition 7114 of 0.5 mm, a length (L) of 3 mm of the portion
having a diameter of 0.5 mm with a total of 500 through holes 7125,
at a gas flow rate of oxygen gas of 500 sccm, at a pressure of the
film forming space 7116 of 100 Pa. In this case, the mass flow of
the oxygen affects the transfer of the silane gas more
satisfactorily than the diffusion of the silane gas, and the silane
gas is diffused less into the plasma generating space 7115.
[0219] As thus described, the partition 7114 having a multitude of
the through holes 7125 and diffusion holes 7126 with the above
characteristics separates and isolates the plasma generating space
7115 and the film forming space 7116 from each other to
respectively form closed chambers. The silane directly brought into
the film forming space 7116 cannot significantly come in contact
with the oxygen plasma. According to the invented system, the
silane can be prevented from vigorously reacting with the oxygen
plasma as in conventional equivalents.
[0220] Next, a second embodiment of the invented CVD system will
now be illustrated with reference to FIG. 38. In FIG. 38,
components substantially the same as the components described in
FIG. 36 have the same reference numerals, and detailed descriptions
of these components are not repeated herein. A characteristic
configuration of the second embodiment is that the inside of the
ceiling of the upper casing 7112a includes a plate insulating
member 7333 and the electrode 7120 is arranged below the plate
insulating member 7333. The electrode 7120 is a self plate without
the holes 7120a. The electrode 7120 and the partition 7114
constitute the plasma generating space 7115 with a parallel plate
electrode configuration. Other configurations are substantially the
same as those of the first embodiment. In addition, the operations
and advantages of the CVD system according to the second embodiment
are the same as in the first embodiment.
[0221] Subsequently, a third embodiment of the invented CVD system
will now be illustrated with reference to FIG. 39. In FIG. 39,
components substantially the same as the components described in
FIG. 36 have the same reference numerals, and detailed descriptions
of these components are not repeated herein. The configuration of
the third embodiment is characterized in that the annular
insulating member 7122 formed inside of the side wall of the upper
casing 7112a additionally includes a second gas inlet pipe 7423.
The second gas inlet pipe 7423 brings a cleaning gas from the
outside into the plasma generating space 7115. The second gas inlet
pipe 7423 is connected via a mass flow controller (not shown) for
controlling the flow rate to a cleaning gas source (not shown).
When a cleaning gas is brought via the second gas inlet pipe 7423
into the plasma generating space 7115 and a radio frequency power
is supplied from the radio frequency power source to the electrode
7120, a plasma is generated in the plasma generating space 7115.
This plasma serves to form radicals for use in cleaning of the film
surface on the substrate 7111. Such cleaning gases include, for
example, NF.sub.3, CIF.sub.3, C.sub.2F.sub.4, C.sub.2F.sub.6,
H.sub.2, O.sub.2, N.sub.2, F.sub.2, Ar, and other rare gases and
halide gases. Other configurations of this embodiment are the same
as those in the first embodiment.
[0222] The gas inlet pipe 7123 and the second gas inlet pipe 7423
are controlled to permit the use of either one of these inlet
pipes. In the present embodiment, initially the cleaning gas is
introduced to clean the film surface on the substrate 7111, and the
film forming gas is then introduced to form a gate insulating film
on the film surface on the substrate 7111.
[0223] Specifically, the substrate 7111 having a laser-annealed
film (polysilicon film) on its surface is mounted on the substrate
holder 7117, and the cleaning gas is then introduced via the second
gas inlet pipe 7423 into the plasma generating space 7115, and a
radio frequency power is supplied via the power supply rod 7129 to
the electrode 7120. By this procedure, electric discharge is
initiated in the plasma generating space 7115 to generate a
cleaning gas plasma 7419. As a result, radicals are formed in the
plasma and diffuse through the plural through holes 7125 of the
partition 7114 into the film forming space 7116. The radicals then
clean the surface of the film formed on the substrate 7111. This
configuration can remove impurities formed on the film surface of
the substrate after laser annealing.
[0224] After the substrate cleaning process is completed to satisfy
predetermined conditions, the oxygen gas is brought from the gas
inlet pipe 7123 into the plasma generating space 7115, and a radio
frequency power is supplied via the power supply rod 7129 to the
electrode 7120. By this procedure, electric discharge is initiated
in the plasma generating space 7115 to yield the oxygen plasma
7119. As a result, radicals are formed in the plasma and diffuse
through the plural through holes 7125 of the partition 7114 into
the film forming space 7116. Concurrently with the supply of the
radicals, the material gas is supplied from the inlet pipe 7128
through the partition 7114 into the film forming space 7116. In the
film forming space 7116, the radicals react with the material gas
to form a gate insulating film on the film surface on the substrate
7111.
[0225] The invented film forming system should be preferably
maintained in a vacuum.
[0226] Next, a process for the formation of a film using the
systems according to embodiments of the invention will be
described.
[0227] FIG. 40 is an illustration of the invented film forming
system. The numeral 7112 in FIG. 40 is the vacuum casing shown in
FIG. 36. The vacuum casing 7112 includes the partition 7114 having
a multitude of through holes, the plasma generating space 7115, and
the film forming space 7116, and the partition 7114 separates the
plasma generating space 7115 from the film forming space 7116.
[0228] The overall system in FIG. 40 includes a film forming
material gas supply unit 7512. The material gas is supplied from
the film forming material gas supply unit 7512 via a gas inlet path
7513 including a mass flow controller (MFC) 7513a into the inner
space 7124 in the partition 7114. Such material gases include
SiH.sub.4 and other silicon hydride compounds (Si.sub.nH.sub.2n+2,
where n is an integer of 1 or more). In the film forming space
7116, the material gas introduced through the inner space 7124 in
the partition 7114 reacts with the radicals introduced through the
multitude of through holes 7125 in the partition 7114, and the
material gas is decomposed to deposit a thin film of silicon oxide
on the substrate transferred into the film forming chamber. Thus, a
film is formed.
[0229] A host controller 7514 functions as a controller of the flow
rate of the material gas in an MFC 7513a in the gas inlet path
7513. The controller 7514 can control the flow rate of the material
gas in the MFC 7513a to thereby control the supply of the material
gas brought into the film forming space 7116 to a predetermined
range, as described below. FIG. 41 is a graph showing an
illustrative change of the material gas flow rate with the abscissa
showing the time (t) and the ordinate showing the flow rate (sccm)
of the material gas. In this embodiment, the controller 7514
controls the flow rate of the material gas in the MFC 7513a in such
a manner that the flow rate (supply flow rate) of the introduced
material gas to the film forming space 7116 is restricted at early
stages of electric discharge, i.e., at early stages of film
formation, and is then increased. Next, the manner to restrict the
supply rate of the material gas will now be described.
[0230] FIG. 42 is a graph showing an illustrative control procedure
of the supply flow rate of material gas, SiH.sub.4, with the
abscissa showing the time and the ordinate showing the supply flow
rate. In the time abscissa, times t.sub.0, t.sub.1, and t.sub.2 are
set. As the plasma generating gas, for example, oxygen (O.sub.2) is
employed. The time to is the time when the oxygen gas is supplied
into the plasma generating chamber and electric discharge of the
oxygen gas is started, i.e., the starting point of film formation.
At the time t.sub.1, the supply of SiH.sub.4 starts. Accordingly,
SiH.sub.4 is not supplied from the time t.sub.0 until the time
t.sub.0. From the time t.sub.1 until the time t.sub.2, the supply
flow rate of SiH.sub.4 gradually increases with time and reaches a
constant level at the time t.sub.2. From the time t.sub.2, the
supply rate of SiH.sub.4 is maintained at the constant level. By
restricting the supply rate of the material gas at early stages of
film formation including the initiation of electric discharge
(i.e., t.sub.0 to t.sub.1, and around t.sub.1), the formation of a
silicon oxide thin film containing excess silicon at early stages
of film formation can be avoided. In addition, by gradually
increasing the supply rate of the material gas thereafter, the film
forming period can be shortened to thereby improve practical
utility.
[0231] From the time t.sub.1 until time t.sub.2, the supply rate of
the material gas may be controlled to increase according to a step
function, a proportional function, a linear function, a quadratic
function, an exponential function, and other functions.
[0232] In the above embodiments, silane is employed as an example
of the material gas. However, the material gas is not limited to
silane, and TEOS and other gaseous materials can be also employed.
In addition, the invention can be applied to film formation of not
only silicon oxide films but also silicon nitride films. The
principle of the invention can be applied to every treatment where
the material gas comes in contact with a plasma to form particles
and the introduction of ions to the substrate adversely affects the
process, and can be applied to film formation, surface treatments,
isotropic etching, and other treatments. The partition indicated in
the embodiments has a dual structure, but it may have a multilayer
structure.
[0233] According to the invention as thus described, for example,
when a silicon oxide film is formed on a large substrate from
silane or another material gas, a vacuum casing includes a
partition having plural through holes or diffusion holes that meet
predetermined conditions. The partition separates the inside of the
vacuum casing into a plasma generating space and a film forming
space. An active species is formed in the plasma generating space
and is brought through the through holes of the partition into the
film forming space. Separately, a material gas is brought through
an inner space and diffusion holes of the partition and is directly
introduced into the film forming space without coming in contact
with a plasma. This configuration can inhibit a vigorous chemical
reaction between the material gas and the plasma to thereby inhibit
the formation of particles and introduction of ions into the
substrate.
[0234] In addition, the invented system can evenly bring the
material gas, and can evenly supply the oxygen gas radicals through
the plural through holes formed in the partition. This
configuration can yield satisfactory distributions of the radicals
and silane or another material in the vicinity of the surface of
the substrate to thereby effectively form a film on a large
substrate.
[0235] FIG. 43 is a side sectional view of a clustered tool type
system. This system includes a film forming chamber 8101, a
load-lock chamber 8102, and a transfer chamber 8103. The film
forming chamber 8101 serves to form a silicon oxide film as a gate
insulating film on a substrate 8109. The transfer chamber 8103
includes a moving robot 8130 as a moving means.
[0236] The film forming chamber 8101 includes a CVD unit 8113
inside thereof. In the CVD unit 8113, a plasma is generated, and
active species taken out from the plasma serve to form a silicon
oxide film. The configuration of transfer chamber 8103
characterizes the system according to the present embodiment. As
shown in FIG. 43, the transfer chamber 8103 has a gas inlet system
(hereinafter referred to as "pressure regulating gas inlet system")
8132. The pressure regulating gas inlet system 8132 brings a gas
not adversely affecting the film formation into the inside the
system to regulate the inside pressure. In this embodiment, the
pressure regulating gas inlet system 8132 introduces hydrogen gas.
The pressure regulating gas inlet system 8132 comprises a flow
regulator and a filter not shown and can introduce a highly
purified pressure regulating gas at a predetermined flow rate.
[0237] The term "gas not adversely affecting the film formation"
means and includes gases which do not adversely affect the quality
of the resulting thin film. Such gases include, hydrogen and other
gases that do not directly affect the film formation, and gases
that improve the quality of the resulting film.
[0238] The configuration where the transfer chamber 8103 includes
the pressure regulating gas inlet system 8132 is based on a
characteristic technical concept of an evacuating unit 8131 of the
transfer chamber 8103. Specifically, in the system according to the
present embodiment, the pressure inside the transfer chamber 8103
is maintained at a degree of vacuum somewhat lower than that inside
the film forming chamber 8101.
[0239] The evacuating unit 8131 of the transfer chamber 8103 has
only to evacuate the inside of the transfer chamber to a relatively
high pressure as above, and can be configured at low costs. As the
evacuating unit 8131 of the transfer chamber 8103, for example, a
combination of a dry pump and a mechanical booster pump can be
employed. Both components are available at low costs.
[0240] As the evacuating unit 8131 of the transfer chamber
according to conventional equivalents, a system having an exhaust
speed greater than that in the film forming chamber 8101 is
generally employed, and the inside of the transfer chamber 8103 is
evacuated to a pressure lower than that in the film forming
chamber. However, this configuration will result in an expensive
evacuating unit 8131. For example, to attain the pressure inside
the film forming chamber 8101 as stated above, a turbo-molecular
pump or other expensive vacuum pumps are required. Specifically, if
the target pressure is 1 Pa or higher, the system can employ a
cheap dry pump and a mechanical booster pump in combination, but if
the target pressure is lower than 1 Pa, a turbo-molecular pump or
other expensive pumps are required. Such pumps are several times
more expensive than the dry pump and the mechanical booster
pump.
[0241] Such a relatively high target pressure inside the transfer
chamber 8103 can shorten the evacuation operation to thereby
increase the production efficiency of the overall system.
[0242] The system according to this embodiment is also greatly
characterized in that the transfer chamber 8103 includes a modifier
supply unit 8133. The modifier supply unit 8133 supplies a chemical
species (hereinafter referred to as "modifier") having a modifying
activity to the surface of the substrate 8109. This feature will
now be described in detail below.
[0243] The modifier supply unit 8133 serves to supply energy to a
gas introduced by a modifying gas inlet system 8134 to form a
plasma. The configuration of the modifier supply unit 8133 will be
illustrated with reference to FIG. 44. FIG. 44 is a schematic side
sectional view of the configuration of the modifier supply unit
8133 in the transfer chamber 8103 of the system shown in FIG.
43.
[0244] The modifier supply unit 8133 has substantially the same
configuration as the system shown in FIG. 36. However, this unit
has no material gas inlet system, and the partition 7114 is a plate
having plural holes. As shown in FIG. 43, the modifier supply unit
8133 is placed in the transfer chamber 8103 in the vicinity of a
gate valve 8104c at the boundary between the film forming chamber
8101 and the transfer chamber 8103, and is located above a transfer
line of the substrate 8109.
[0245] The modifying gas inlet system 8134 supplies a hydrogen gas
to the plasma generating space, as in the pressure regulating gas
inlet system 8132. The piping of the pressure regulating gas inlet
system 8132 may be caused to branch to the modifier supply unit
8133. By this configuration, the pressure regulating gas inlet
system 8132 also serves as the modifying gas inlet system 8134.
[0246] When a radio frequency power source goes into action while
the modifying gas inlet system 8134 brings hydrogen gas into the
plasma generating space, a plasma is generated and active hydrogen
species flow out downward. The active hydrogen-species act as a
modifier in this embodiment and are supplied to the surface of the
substrate to modify the surface. For example, when the surface of
the substrate 8109 is oxidized, the oxidized surface is reduced by
the modifier. If the surface has a bondable end, the active
hydrogen species terminates the end to thereby chemically stabilize
the surface. During the modification procedure, the substrate 8109
may be stopped on the transfer line or may be continuously
transferred for a higher efficiency.
[0247] A second embodiment of this type of system will be described
below. The system according to the second embodiment is
characterized in that a laser annealing process and a gate
insulating film forming process can be continuously performed in
vacuo. These processes are required for the production of a TFT-LCD
using a polysilicon film as a channel layer. In the system
according to the second embodiment, the transfer chamber 8103 also
includes the pressure regulating gas inlet system 8132, and the
inside of the transfer chamber 8103 is held at a pressure that is a
vacuum pressure but is higher than 1 Pa and lower than that in the
film forming chamber 8101. The pressure regulating gas inlet system
8132 brings a hydrogen gas into the transfer chamber 8103 as
mentioned above.
[0248] According to the second embodiment, the surface of the
substrate 8109 is modified by supplying a modifier after the
annealing process. This configuration plays a very important role
to improve the operating characteristics of the resulting TFT. A
polysilicon film formed by crystallizing an amorphous silicon film
in the annealing process has unbonded ends of silicon (dangling
bonds) on its surface. If the atmosphere contains oxygen or other
gases reactive with silicon during movement of the substrate 8109
from an annealing chamber (not shown) to the film forming chamber
8101, such a reactive gas readily reacts with the dangling bonds of
silicon to form a contaminated region on the surface of the
polysilicon film. If such a contaminated region is formed at an
interface between the polysilicon film and the gate insulating
film, the resulting TFT cannot have a stoichiometric composition.
This is liable to cause defective levels and other problems that
deteriorate the operating characteristics of the TFT.
[0249] The system according to the present embodiment can avoid the
above problems, by modifying the surface of silicon with active
hydrogen species after the annealing process to thereby terminate
the dangling bonds of silicon with hydrogen. In addition, the
transfer chamber 8103 is held in vacuo at a relatively high
pressure but is purged with hydrogen gas. This configuration can
reduce reactions of dangling bonds, if any, with contaminates and
increases the tendency of the dangling bonds to react with-hydrogen
to thereby terminate. By these operations and advantages, the
system according to the present embodiment can markedly
satisfactorily improve the interface between a polysilicon film and
a gate insulating film. This point constitutes a very important
technical point in the manufacture of polysilicon TFTs.
[0250] The supply of a modifier by the modifier supply unit plays
an important role in modification after the annealing process. As
described above, the surface of the substrate 8109 may be modified
by ion injection other than the use of the active species. However,
ion injection for modification after the annealing process causes
problems. Specifically, the polysilicon film crystallized in the
annealing process has a relatively weak crystal structure.
Accordingly, when ions are injected, such weak bonds are readily
broken to cause, for example, a roughened surface of the
polysilicon film. As a result, the interfacial characteristics may
be deteriorated or channel resistance may increase.
[0251] According to the present embodiment, the CVD unit 8113 is
employed to generate a plasma in a region at a distance from the
surface of the substrate and to supply the active species.
Accordingly, substantially no ions are injected into the surface of
the substrate and the system does not invite the above
problems.
[0252] FIG. 45 is a diagram illustrating the configuration of the
invented laser annealer.
[0253] The laser annealer includes a stage 3210, a pair of laser
sources 3221 and 3222, a composing optical system 3230, an
irradiation optical system 3240, a mask driving unit 3250, a stage
driving unit 3260, and a master controller 32100. The stage 3210
holds or supports a work W and is three-dimensionally smoothly
movable. The work W is a glass plate having an amorphous Si and
another semiconductor thin film formed on its surface. The laser
sources 3221 and 3222 respectively produce a pair of laser beams
LB1 and LB2 having different characteristics. The composing optical
system 3230 composes the laser beams LB1 and LB2 to yield a
composite light CL. The irradiation optical system 3240 converts
the composite light CL into a linear beam AB and launches the
linear beam AB onto the work W at a predetermined illumination. The
mask driving unit 3250 moves a mask 3242 formed in the irradiation
optical system 3240 to scan the work W with the projected linear
beam AB. The stage driving unit 3260 moves the stage 3210
supporting the work W to a necessary degree relative to, for
example, the irradiation optical system 3240. The master controller
32100 generally controls the operations of individual units of the
overall laser annealer.
[0254] Both of the pair of laser sources 3221 and 3222 are excimer
lasers or other pulsed laser sources for heating the semiconductor
thin film on the work W. The laser sources 3221 and 3222
individually and independently produce a pair of laser beams LB1
and LB2 having different characteristics such as light emitting
periods, peak intensities or wavelengths.
[0255] The composing optical system 3230 serves to spatially
combine the pair of laser beams LB1 and LB2 from the laser sources
3221 and 3222 to form the composite light CL, and includes a pair
of knife-edge mirrors 3231 and 3232 arranged in parallel with each
other. Between the composing optical system 3230 and the both laser
sources 3221 and 3222, a divergent optical system 3271 and a
telescopic optical system 3272 are respectively arranged as
regulators. The divergent optical system 3271 serves as a
regulating optical system to finely adjust the imaging position in
the optical axis direction (beam forming position) of the first
beam LB1 from the laser source 3221. The image is formed by a
homogenizer 3241 in the irradiation optical system 3240. The
telescopic optical system 3272 serves as an afocal optical system
to adjust the beam size of the second beam LB2 from the laser
source 3222 to thereby make the beam size identical to that of the
first beam LB1 entered into the composing optical system 3230.
[0256] The irradiation optical system 3240 includes a homogenizer
3241, a mask 3242, and a projection lens 3243. The homogenizer 3241
once divides the composite light CL from the composing optical
system 3230 into plural divided beams and converts the divided
beams into rectangular beams, and homogeneously superimposes and
launches the beams onto a predetermined plane. The mask 3242 has a
slit transmitting pattern and is arranged on the predetermined
plane to shield the composite light CL. The projection lens 3243
reduces and projects the transmitted pattern formed on the mask
3242 onto the work W as a linear beam AB.
[0257] The stage driving unit 3260 drives the stage 3210 and aligns
a specific region on the work W relative to the irradiation optical
system 3240. After the mask driving unit 3250 drives the mask to
scan a predetermined region on the work W with the linear beam AB
to laser-anneal the predetermined region, the stage driving unit
3260 also aligns the mask 3242 to stepwise move the mask to a
region adjacent to the predetermined region. A position detector
3280 continuously monitors the driving of the stage 3210 by the
stage driving unit 3260.
[0258] The operations of the system shown in FIG. 45 will now be
illustrated in detail. Initially, the work W is moved to and
mounted on the stage 3210 of the laser annealer. The work W on the
stage 3210 is then aligned relative to the irradiation optical
system 3240. While moving the mask 3242 of the irradiation optical
system 3240, the composite light CL obtained from the pair of laser
sources 3221 and 3222 is launched as a linear beam AB onto a
predetermined region on the work W. On the work W, a thin film of
an amorphous semiconductor such as an amorphous Si is formed. The
irradiation and scanning of the thin film with the linear beam AB
allows the predetermined region of the semiconductor to anneal and
recrystallize to thereby yield a semiconductor thin film having
satisfactory electric characteristics. The laser annealing
procedure is repeated on plural predetermined regions on the work
W, and the semiconductor thin film is annealed in the plural
predetermined regions.
[0259] In the above system, the composing optical system 3230
spatially composes the pair of laser beams LB1 and LB2 from the
pair of laser sources 3221 and 3222 to form the composite light CL.
Accordingly, the pair of laser beams LB1 and LB2 can be composed
with minimized loss, and the composite light CL as a uniform
rectangular beam relative to the pair of laser beams LB1 and LB2
can be formed on predetermined plane of mask 3242, by action of the
homogenizer 3241. In addition, the linear beam AB is obtained by
efficiently composing the laser beams LB1 and LB2 and can perform a
variety of laser annealing procedures.
[0260] FIG. 46 is a diagram illustrating the configuration of the
composing optical system 3230 and its surroundings. As is described
above, the composing optical system 3230 includes the pair of
knife-edge mirrors 3231 and 3232, allows the first beam LB1 to pass
through between a pair of knife edges 3231a and 3232a, and
separates the second beam LB2 by the aid of the pair of knife edges
3231a and 3232a. The divergent optical system 3271 finely adjusts
the image-forming position of the first beam LB1 formed by the
homogenizer 3241 and constitutes an afocal system including a
convex lens 3271a and a concave lens 3271b in combination. The
telescopic optical system 3272 serves to adjust the beam size of
the second beam LB2 to identical to that of the first beam LB1, and
constitutes an afocal system including a concave lens 3272a and a
convex lens 3272b in combination. Between the telescopic optical
system 3272 and the composing optical system 3230, a turning mirror
3233 is arranged to guide the second beam LB2. Separately, the
composite light CL obtained by composing the laser beams LB1 and
LB2 enters the homogenizer 3241. The homogenizer 3241 includes
first to fourth cylindrical lens arrays CA1 to CA4, and a convex
condenser lens 3241a. The first and third cylindrical lens arrays
CA1 and CA3 have a curvature in a cross section in parallel with
the paper plane, and the second and fourth cylindrical lens arrays
CA2 and CA4 have a curvature in a cross section perpendicular to
the paper plane.
[0261] The outline of the operations will now be described below.
The first laser beam LB1 passes through between the knife edges
3231a and 3232a, i.e., a central pupil region of the homogenizer
3241 including the optical axis .theta.A, and the second laser beam
LB2 is divided by the knife-edge mirrors 3231 and 3232 into two
beams and the divided second beams pass through the each edge of
the first beam LB1, i.e., a pair of peripheral pupil regions of the
homogenizer 3241. The beams LB1 and LB2 thus respectively enter the
homogenizer 3241. The homogenizer 3241 has an entrance pupil size
twice that of the beam size to allow the composite light CL to
enter the homogenizer. The condenser lens 3241a and other lens
systems have been corrected for aberration according to the
entrance pupil.
[0262] The composite light CL entered into the homogenizer 3241 is
divided into a number equal to the number of the segments
constituting the cylindrical lenses by action of the first to
fourth cylindrical lens arrays CA1 to CA4 to form divided secondary
light sources. The light beams are launched from the divided
secondary light sources into the condenser lens 3241a, and are
superimposed on an irradiated surface IS at the back focus of the
condenser lens 3241a to yield uniform rectangular beams.
[0263] The divergent optical system 3271 and the telescopic optical
system 3272 serve to prevent differences in focal position, beam
size, and uniformity of the rectangular beams formed by the
homogenizer 3241. These differences are caused by beam
characteristics and differences between the first and second laser
beams LB1 and LB2.
[0264] The former divergent optical system 3271 slightly changes
the numerical aperture (NA) of the first beam LB1 launched into the
homogenizer 3241 to adjust the best focal position of the
homogenizer 3241 and the beam size. The latter telescopic optical
system 3272 serves to adjust the beam size of the second beam LB2
to be identical to that of the first beam LB1 launched into the
homogenizer 3241. By these configurations, the laser beams LB1 and
LB2 are respectively divided into the same number as one another by
the cylindrical lens arrays CA1 to CA4 to yield an identical
uniformity to each other.
[0265] The operations will be illustrated in further detail below.
The first beam LB1 enters through a beam delivery (e.g. a turning
mirror) not shown into the divergent optical system 3271 for the
first beam. The divergent optical system 3271 is a substantially
1:1 afocal system and includes two lenses 3271a and 3271b. By
changing the distance between the two lenses 3271a and 3271b, the
divergent optical system 3271 can slightly adjust and change the NA
of the outgoing first beam LB1 from the divergent optical system
3271 without significantly changing the beam size of the first beam
LB1. In a practical example, the variable adjusting range of the
exit NA (a beam divergence angle of the first beam LB1) by the
divergent optical system 3271 is set to several milliradians. In
this connection, the two lenses 3271a and 3271b constitute a
two-element system of convex and concave lenses, and respectively
have little power. Even if the distance between the two lenses
3271a and 3271b is changed, the aberration does not significantly
change.
[0266] The exit first beam LB1 from the divergent optical system
3271 only passes through between the two knife-edge mirrors 3231
and 3232, i.e., the central region of the optical axis of the
homogenizer 3241. The first beam LB1 passed through between the
knife-edge mirrors 3231 and 3232 enters the central portion
(cylindrical lenses assigned to the first beam LB1) of the
cylindrical lens array CA1 of the homogenizer 3241, and is divided
into a number (six in FIG. 46) equal to the number of the
cylindrical lenses. The individual divided beams are superimposed
by the condenser lens 3241a to form a uniform beam on the
irradiated surface IS.
[0267] The second beam LB2 is launched through a beam delivery not
shown into the telescopic optical system 3272 for the second beam.
The second beam LB2 launched into the telescopic optical system
3272 is magnified or reduced in the optical system to have the
identical beam size with that of the first beam LB1, and comes out
of this optical system toward the composing optical system 3230.
The second beam LB2 is divided by the knife-edge mirrors 3231 and
3232 in the composing optical system 3230 into two beam portions
LB2a and LB2b. The beam portions LB2a and LB2b respectively pass
through each side of the first beam LB1 toward the homogenizer
3241. Both beam portions LB2a and LB2b enter the outer periphery of
the optical axis of the homogenizer 3241, i.e., both edges of the
cylindrical lens array CA1 (cylindrical lenses assigned to the
second beam LB2) of the homogenizer 3241. The beam portions are
then divided into a number equal to the number of cylindrical
lenses (in FIG. 46, a total of six including upper three and lower
three). The individual divided beams are superimposed by the
condenser lens 3241a to form a uniform beam on the irradiated
surface IS.
[0268] In the above description, both the first and second laser
beams LB1 and LB2 are to "form a uniform beam on the irradiated
surface IS". Actually, the best focal positions of both beams may
differ from each other according to divergence angles of exit beams
from the light source and other characteristics. When the best
focal positions are different, the beam sizes are often different.
The differences in characteristics of the first and second beams
LB1 and LB2 must be neutralized. To this end, the best focal
position of the second beam LB2 is determined as a true irradiated
surface IS (reference surface) and the best focal position of the
first beam LB1 is made in agreement with the true irradiated
surface IS. Specifically, the exit NA of the first beam LB1, i.e.,
the incident NA viewed from the homogenizer 3241 is changed by the
divergent optical system 3271. According to the change in the
incident NA viewed from the homogenizer 3241, the best focal
position of the first beam LB1 after passing through the
homogenizer 3241 is changed. This configuration can finely adjust
the best focal position of the first beam LB1 to agree with that of
the second beam LB2. In this connection, the relationship between
the exit NA and the shift of the best focal position varies
according to the lens configuration of the homogenizer 3241, and
detailed descriptions of these fine adjustments are omitted
herein.
[0269] FIG. 47 is a schematic diagram illustrating the
configuration of a laser annealer as an embodiment of the invented
laser processing system.
[0270] This laser annealer serves to treat a work W with heat. The
work W includes an amorphous Si or other semiconductor thin film on
a glass substrate. The laser annealer includes a laser source 3310,
an irradiation optical system 3320, and a process stage unit 3330.
The laser source 3310 produces a laser light AL such as excimer
laser for heating the semiconductor thin film. The irradiation
optical system 3320 converts the laser light AL into a line form (a
fine rectangular form) and launches the light onto the work W at a
predetermined illumination. The process stage unit 3330 supports
the work W and allows the work W to smoothly move in the X-Y plane
in a translational manner and to rotate around the Z axis.
[0271] The irradiation optical system 3320 comprises a homogenizer
3321, a mask assembly 3322, and a projection lens 3323. The
homogenizer 3321 ensures the incident laser beam AL to have a
uniform distribution. The mask assembly 3322 has a mask on which a
slit is formed, and the slit throttles the laser light passed
through the homogenizer 3321 into a fine rectangular beam. The
projection lens 3323 reduces and projects the slit image of the
mask onto the work W. Of these components, the mask assembly 3322
is exchangeably supported on a mask stage unit 3340. The mask stage
unit 3340 drives the mask assembly 3322, and the mask assembly 3322
is smoothly movable in the X-Y plane and is rotatable around the Z
axis.
[0272] The process stage unit 3330 is housed in a process chamber
3350, supports the work W in the process chamber 3350 and allows
the work W to appropriately move relative to the irradiation
optical system 3320. The laser light AL is applied from the
irradiation optical system 3320 via a process window 3350a onto the
work W, while the work W is supported in an appropriate position in
the process chamber 3350.
[0273] The system includes, on each side of the projection lens
3323, a position detector or the like. The position detector
includes a projecting unit 3361 and a light-receiving unit 3362.
The projecting unit 3361 launches a detective light via the process
window 3350a into the surface of the work W, and the light
receiving unit 3362 detects a reflected light from the surface of
the work W. Thus, the work NV on the process stage unit 3330 can be
precisely aligned relative to the irradiation optical system
3320.
[0274] In this configuration, the mask stage unit 3340 and the
projection lens 3323 are suspended by and fixed to a frame 3365
extending from the process chamber 3350. The homogenizer 3321 is
indirectly fixed to the frame 3365, but this configuration is not
shown in the figure.
[0275] The mask assembly 3322 supported by the mask stage unit 3340
is suspended at the lower end of a cylindrical mounting jig 3370,
is inserted into the bottom of an insertion port 3340a formed in
the mask stage unit 3340, and is fixed thereto. The mask assembly
3322 includes a mask 3322a, a reflecting member 3322b, and a field
lens 3322c, and integrally holds the mask 3322a, the reflecting
member 3322b, and the field lens 3322c. The mask 3322a has a slit,
and the reflecting member 3322b is arranged over the mask 3322a at
an angle relative to the mask 3322a, and inhibits other optical
elements from damage due to reflected light from the mask 3322a.
The field lens 3322c adjusts the divergence angle of the laser
light AL launched into the mask 3322a.
[0276] FIGS. 48A and 48B are diagrams showing the configuration of
the mask stage unit 3340 and the way to support the mask assembly
3322. FIG. 48A is a side sectional view of the mask stage unit 3340
and surrounding components, and FIG. 48B is a top view of the
mounting jig 3370.
[0277] The mask stage unit 3340 includes an X axis stage 3441, a Y
axis stage 3442, and a .theta. axis stage 3443. The X axis stage
3441 allows the mask assembly 3322 to move in the X axis direction
in a translational manner. The Y axis stage 3442 allows the mask
assembly 3322 together with the X axis stage 3441 to move in the Y
axis direction in a translational manner. The .theta. axis stage
3443 allows the X axis stage 3441 and the Y axis stage 3442 to
rotate around the Z axis. The X axis stage 3441 is slidably
connected via a slide guide 3445 to the Y axis stage 3442. The Y
axis stage 3442 is rotatably connected via a bearing 3446 to the
.theta. axis stage 3443.
[0278] The mask assembly 3322 includes a tubular mask holder body
3422d, and a tapered outer surface TP 1 tapering off downward on
the outer periphery of the mask holder body 3422d. The mask holder
body 3422d supports the mask 3322a, the reflecting member 3322b and
the field lens 3322c. The X axis stage 3441 has a tapered inner
surface TP2 around a round opening formed at a bottom 3441a. The
tapered inner surface TP2 is adapted to fit the tapered outer
surface TP1. By this configuration, if only the mask assembly 3322
is inserted into the round opening at the bottom 3441a of the X
axis stage 3441, the tapered outer surface TP1 fits the tapered
inner surface TP2. Thus, the mask assembly 3322 can be precisely
aligned relative to the X axis stage 3441. In addition, the mask
assembly 3322 is adapted to have a downward momentum by an annular
fixing nut 3425. The fixing nut 3425 is screwed into the bottom
3441a of the X axis stage 3441.
[0279] The mask assembly 3322 and the fixing nut 3425 are mounted
on the bottom 3441a of the X axis stage 3441 using the mounting jig
3370. The mask assembly 3322 has a depression 3422g which is
engaged with a hook-like hanging member 3471 formed on the lower
surface of the mounting jig 3370, and moves up and down according
to the operation of the mounting jig 3370. By this configuration,
the mask assembly 3322 can be easily and surely inserted into the
round opening at the bottom 3441a of the X axis stage 3441. The
fixing nut 3425 also has a depression 3425g which is engaged with
the hanging member 3471 of the mounting jig 3370, and moves up and
down according to the operation of the mounting jig 3370. By this
configuration, the fixing nut 3425 is screwed from above the mask
assembly 3322 inserted into the bottom 3441a of the X axis stage
3441 to easily and surely fix the mask assembly 3322.
[0280] The mounting jig 3370 includes a cylindrical body 3470a, a
disc supporting member 3470b, and a handle 3470c. The disc
supporting member 3470b is fixed at the bottom of the body 3470a
and supports the hanging member 3471. The handle 3470c serves to
rotate or move the body 3470a up and down together with the
supporting member 3470b. In consideration of, for example,
convenience of operation, the handle 3470c has a grip 3473
extending in three directions, as shown in FIG. 48B.
[0281] While the mask assembly 3322 is mounted at the bottom of the
mounting jig 3370, the mask assembly 3322 is inserted into an
insertion port 3440a of the mask stage unit 3340. The mask assembly
3322 is then moved down to the bottom 3441a, and at this stage, the
mounting jig 3370 is turned in a clockwise direction to separate
the mask assembly 3322 from the mounting jig 3370.
[0282] Next, the fixing nut 3425 is mounted onto the bottom of the
mounting jig 3370 in the same manner as in the mask assembly 3322,
and is inserted into the insertion port 3440a of the mask stage
unit 3340. When the fixing nut 3425 reaches the bottom, the fixing
nut 3425 is turned in a counterclockwise direction to clamp to a
predetermined position. Thus, the mask assembly 3322 is pressed
against the bottom 3441a at a constant pressure applied by a coned
disc spring 3425c. In this procedure, the tapered outer surface TP1
in the mask holder body 3422d comes into intimate contact with the
tapered inner surface TP2 in the bottom 3441a, and the mask
assembly 3322 can be precisely mounted onto the mask stage unit
3340. Thereafter, the mounting jig 3370 is turned in a clockwise
direction to separate the fixing nut 3425 from the mounting jig
3370, and the mounting jig 3370 alone can be taken out.
[0283] When the mask assembly 3322 is to be dismounted from the
mask stage unit 3340, the above-mentioned mounting procedure should
be simply reversed. Specifically, the mounting jig 3370 is inserted
into the insertion port 3440a of the mask stage unit 3340 to undo
the fixing nut 3425, and the fixing nut 3425 is taken out. Next,
the tip of the mounting jig 3370 is allowed to catch the depression
3422g of the mask assembly 3322. The mounting jig 3370 is then
slowly raised, and the mask assembly 3322 together with the
mounting jig 3370 can be taken out. Likewise, the dismounting of
the mask 3322a and the reflecting member 3322b from the mask
assembly 3322 can be performed in a reverse manner from the
mounting procedure of these elements. Detailed descriptions of such
dismounting procedures are omitted herein.
[0284] By the above procedure, the mask 3322a can be precisely
mounted onto the mask stage unit 3340. For a further precise
alignment, the mask 3322a is aligned by visual observation of an
alignment mark formed on the mask surface with, for example, a
charge-coupled device (CCD) camera not shown.
[0285] Next, a device and process for position measurement
according to an embodiment of the invention will be illustrated in
further detail with reference to the drawings.
[0286] FIG. 49 is a schematic diagram showing the configuration of
a laser annealer including the position measuring device according
to the embodiment. The laser annealer includes a laser source 3510,
an irradiation optical system 3520, a stage 3530, and a stage
driving unit 3540. The laser source 3510 produces an excimer laser
and other laser light AL for heating an amorphous Si or another
semiconductor thin film formed on a glass plate work W. The
irradiation optical system 3520 converts the laser light AL into a
line or spot and launches the laser light onto the work W at a
predetermined illumination. The stage 3530 supports the work W, is
smoothly movable in the X-Y plane and is rotatable around the Z
axis. The stage driving unit 3540 serves as a driving means to move
the stage 3530 supporting the work W to a necessary degree relative
to, for example, the irradiation optical system 3520. The
irradiation optical system 3520 may comprise, for example, a
homogenizer 3520a, a mask 3520b, and a projection lens 3520c. The
homogenizer 3520a ensures the incident laser light AL to have a
uniform distribution, and the mask 3520b has a slit for throttling
the laser light AL passed through the homogenizer 3520a into a
predetermined beam form, and the projection lens 3520c reduces and
projects the slit image of the mask 3520b onto the work W.
[0287] The laser annealer further includes a traveling distance
measuring device 3550, a projecting optical system 3560, a first
image pickup device 3571, a second image pickup device 3572, an
image processor 3580, and an illumination lamp 3565, as a position
measuring device in addition to the stage 3530 and the stage
driving unit 3540. The traveling distance measuring device 3550
detects the displacement of the stage 3530 as optical or electric
information. The projecting optical system 3560 is a coaxial
twin-lens dual-scaling system and forms an image of an alignment
mark on the work W. The first image pickup device 3571 converts a
first-scaling image of a relatively low magnification projected by
the projecting optical system 3560 into a picture signal, and the
second image pickup device 3572 converts a second-scaling image of
a relatively high magnification projected by the projecting optical
system 3560 into a picture signal. The image processor 3580
subjects the picture signals produced by the first and second image
pickup devices 3571 and 3572 to an appropriate signal processing.
The illumination lamp 3565 supplies luminous light to the
projecting optical system 3560 for the illumination of the surface
of the work W. The laser annealer further includes a master
controller 3585 which generally controls the operations of the
position measuring device and other components of the laser
annealer.
[0288] The irradiation optical system 3560 will now be illustrated
in further detail. The irradiation optical system 3560 is a coaxial
twin-lens dual-scaling system as described above, and includes a
first lens system 3561a and 3561b, a second lens system 3562a and
3562b, a half mirror 3563, and an epi-illumination system 3567. The
first lens system 3561a and 3561b projects an image of the work W
on the stage 3530 onto the first image pickup device 3571 in a
relatively low first magnification. The second lens system 3562a
and 3562b projects this projected image in a relatively high second
magnification onto the second image pickup device 3572. The half
mirror 3563 divides the image light IL from the work W and
introduces the divided beams into the first lens system 3561a and
3561b and the second lens system 3562a and 3562b. The
epi-illumination system 3567 guides an illumination light from the
illumination lamp 3565 via a cable 3566 onto the optical axis of
the second image pickup device 3572. The illumination light
produced by the illumination light 3565 has a wavelength different
from that of the laser light from the laser source 3510.
[0289] The first lens system 3561a and 3561b and the second lens
system 3562a and 3562b constitute a coaxial optical system
possessing an optical axis in common. The image light IL is
launched from the work W along the optical axis of the first lens
system 3561a and 3561b. When the image light IL is reflected by the
half mirror 3563, it enters into the center of an image field of
the first image pickup device 3571. When the image light IL passes
through the half mirror 3563, it enters along the optical axis of
the second lens system 3562a and 3562b into the center of an image
field of the second image pickup device 3572. In addition, the
epi-illumination system 3567 is arranged to be coaxial with the
second lens system 3562a and 3562b, and homogeneously illuminates a
region on the work W corresponding to the image fields of the first
and second image pickup devices 3571 and 3572.
[0290] The first image pickup device 3571 comprises a CCD device, a
solid image pickup device. The first image pickup device 3571 and
the lens 3561b constitute a CCD camera 3573. The CCD camera 3573 is
fixed to an end of a lens-barrel 3575 housing the lens 3561a.
Separately, the second image pickup device 3572 also comprises a
CCD device, and the second image pickup device 3572 and the lens
3562b constitute a CCD camera 3574. The CCD camera 3574 is fixed to
an end of a lens-barrel 3576 housing the lens 3562a. The other ends
of the both lens-barrels 3575 and 3576 are fixed to a casing which
houses the half mirror 3563.
[0291] FIG. 50 is a diagram showing an illustrative arrangement of
alignment marks formed on the surface of the work W mounted on the
stage 3530 of FIG. 49. Alignment marks M1 and M2 shown in the
figure are each a dual pattern including a bright, large cross
pattern and a dark, small cross pattern in combination.
[0292] The first alignment mark M1 is formed in one of the four
comers of the work W, and the second alignment mark M2 is formed at
another of the four comers of the work W. The first and second
alignment marks M1 and M2 are thus formed in two positions on the
work W so as to detect not only the position but also the rotation
of the work W. By measuring the positions of the first and second
alignment marks M1 and M2, the coordinates of the two reference
points on the work W can be determined, and the work W can be
aligned in such a manner that the attitude and position of the work
W can be appropriately adjusted.
[0293] The operations of the laser annealer shown in FIG. 49 will
be described in detail. The work W is moved to and mounted on the
stage 3530 of the laser annealer. The work W on the stage 3530 is
aligned relative to the irradiation optical system 3520 serving to
guide the annealing laser light AL. While appropriately moving the
stage 3530 relative to the irradiation optical system 3520, the
laser light AL is launched from the laser source 3510 and is
converted into a line or a spot and is applied onto the work W. On
the work W, an amorphous Si or another amorphous semiconductor thin
film is formed, and the semiconductor is annealed and
recrystallized by irradiation and scanning of the work with the
laser light AL. The resulting semiconductor thin film has
satisfactory electric characteristics.
[0294] The position measuring device is used for the alignment of
the work W on the stage 3530 relative to the irradiation optical
system 3520. Specifically, the stage 3530 is appropriately moved by
the stage driving unit 3540 to guide the first alignment mark M1
including a global mark M11 and a fine mark M12 to an image field
of the first image pickup device 3571 (Step S1). The position of
the work W on the stage 3530 remains within a predetermined moving
precision range (0.5 to 1 mm in the example), and the stage 3530 is
appropriately moved relative to the projecting optical system 3560
to guide and move the first alignment mark M1 in the visual field
of the first lens system 3561a and 3561b, i.e., in the image field
(5 mm size in the example) of the first image pickup device 3571.
For example, by storing the position of the first alignment mark M1
on the work W in memory as data, the stage 3530 can be
appropriately moved with reference to the positional data of the
first alignment mark M1 to surely guide the first alignment mark M1
into the image field of the first image pickup device 3571.
[0295] Subsequently, the position of the global mark M11 of the
first alignment mark M1 is determined by subjecting the picture
signal of a relatively low magnification from the first image
pickup device 3571 to image signal processing in the image
processor 3580 (Step S2). The pixels of the first image pickup
device 3571 are in a precise correspondence with distances of
points on the stage 3530, and an XY component of the distance from
the center of the first image pickup device 3571, i.e. the optical
axis of the first lens system 3561a and 3561b, to the center of the
global mark M11 can be precisely determined.
[0296] Next, while determining and monitoring the travel or stroke
of the stage by the traveling distance measuring device 3550, the
stage driving unit 3540 is driven to move the stage 3530 in the X-Y
plane to allow the center of the global mark M11 to agree with the
optical axis of the first lens system 3561a and 3561b (Step S3).
The travel determined by the travel measuring device 3550
corresponds to the distance determined in the step S2. In this
procedure, the alignment accuracy by the global mark M11 is about
10 .mu.m or less in the example. The above search alignment
procedure can positively move the fine mark M12 arranged at the
center of the global mark M11 into the image field (0.5 mm size in
the example) of the second image pickup device 3572 of a high
magnification.
[0297] The position of the fine mark M12 is then determined by
subjecting a picture signal from the second image pickup device
3572 to signal processing in the image processor 3580 (Step S4).
The pixels of the second image pickup device 3572 have a precise
correspondence with distances of points on the stage 3530, and the
distance between the center of the fine mark M12 and the center of
the second image pickup device 3572, i.e., the optical axis of the
second lens system 3562a and 3562b can be precisely determined. The
position measuring precision through the fine mark M12 is about 1
.mu.m or less in the example.
[0298] The projecting optical system 3560 serving to determine the
position of the fine mark M12 has a predetermined positional
relationship with the laser annealing irradiation optical system
3520, and the positional relationship is determined or adjusted in
advance. Accordingly, the distance from the optical axis of the
second lens system 3562a and 3562b to the center of the fine mark
M12 can be converted into the distance from the laser annealing
irradiation optical system 3520 to the center of the fine mark M12
with reference to the positional relationship (Step S5). By these
procedures, the coordinates of the first alignment mark M1 can be
precisely determined.
[0299] Likewise, the second alignment mark M2 is subjected to these
measuring procedures (steps S1 to S5), and the coordinates of the
second alignment mark M2 can be precisely, determined (Step S6). In
the example, one pixel of the second image pickup device 3572 was
set at 1 .mu.m and the position was detected with a precision of
about 1 .mu.m.
[0300] Next, the work W is aligned (Step 7) with respect to the
irradiation optical system 3520 based on the precise measurements
of the coordinates of the first and second alignment marks M1 and
M2 obtained in steps S5 and S6. Specifically, the position and
rotation of the work W are determined based on the coordinate
measurements of the fine marks of the first and second alignment
marks M1 and M2 with reference to the irradiation optical system
3520. Based on these results, the work W is arranged at a position
with a rotational attitude required upon the initiation of laser
annealing.
[0301] Next, while scanning the work W with the laser light AL such
as a laser spot or a laser line using the stage driving unit 3540
and the traveling distance measuring device 3550, the amorphous
thin film on the work W is recrystallized to sequentially form
polycrystalline thin films on the work W. In this procedure, the
work W can be scanned with the laser light AL by moving the stage
3530 in the X or Y direction by the stage driving unit 3540, while
monitoring the travel of the stage with the traveling distance
measuring device 3550. Alternatively, the work W can be scanned
with the laser light AL by allowing the irradiation optical system
3520 to have a scanning function, for example, by moving the mask
3520b in the irradiation optical system 3520.
[0302] In the position measuring process according to the first
embodiment, after the work W is transferred to and mounted on the
stage 3530, the position of the work W can be precisely determined
only by moving the work W through search alignment using the global
mark M11, and thus the position of the work W can be rapidly
determined. In addition, the global mark M11 and the fine mark M12
have similar-shaped outlines to each other, and the image
measurement algorithms in the measurements of the marks M11 and M12
can be nearly the same as each other, and the arithmetic processing
and other procedures can be simplified.
[0303] FIG. 51 is a perspective view showing arrangement of the
alignment marks formed on the surface of the work W mounted on the
stage 3530 shown in FIG. 49.
[0304] First and second global marks: M111 and M211 are
respectively formed in either one of the four corners of the work
W. Both global marks M111 and M211 have identical coordinates in
the work X axis and different coordinates in the work Y axis.
Separately, first and second fine marks M112 and M212 are
respectively arranged in the vicinity of processing areas PA on the
work W. Both fine marks M112 and M212 have identical coordinates in
the work X axis and different coordinates in the work Y axis. The
processing areas PA are areas to be projected with, for example, a
slit image of the mask 3520b by projection lens 3520c, and are
arrayed at appropriate intervals (in the figure, only two
processing areas are shown).
[0305] The positional measurements of the first and second global
marks M111 and M211 can determine the coordinates of two reference
points on the periphery of the work W. By this procedure, the
attitude of the work W can be corrected and the search alignment
(global alignment) can be performed to allow each of the first and
second fine marks M112 and M212 enter into the image field of the
second image pickup device 3572 of a high magnification (FIG. 49).
Separately, the positional measurements of the first and second
fine marks M112 and M212 can determine precise coordinates of two
reference points on the periphery of the processing areas PA
corresponding to these fine marks. The slit image of the mask 3520b
can be therefore precisely projected onto the processing areas PA
by appropriately moving the work W.
[0306] FIG. 52 is a schematic illustration of the configuration of
a laser annealer as an embodiment of the invented laser processing
system.
[0307] This laser annealer serves to treat a work W with heat, and
the work W comprises a glass substrate and an amorphous Si or
another semiconductor thin film formed on the glass substrate. The
laser annealer includes a laser source 5310, an irradiation optical
system 5320, a process stage unit 5330, a stage controller 5340,
and a master controller 53100. The laser source 5310 produces a
laser light AL such as an excimer laser for heating the
semiconductor thin film. The irradiation optical system 5320
converts the laser light AL into a line (to be precise, a fine
rectangle) and launches the laser light AL onto the work W at a
predetermined illumination. The process stage unit 5330 supports
the work W and allows the work W to smoothly move in the X-Y plane
in a translational manner and to rotate around the Z axis. The
stage controller 5340 controls the operations of the process stage
unit 5330, and the master controller 53100 generally controls the
operations of individual components of the laser annealer.
[0308] The irradiation optical system 5320 comprises a homogenizer
5320a, a mask 5320b, and a projection lens 5320c. The homogenizer
5320a ensures the incident laser light AL to have a uniform
distribution. The mask 5320b has a slit, and the slit throttles the
laser light AL passed through the homogenizer 3520a into a
rectangular beam. The projection lens 5320c reduces and projects
the slit image of the mask 5320b onto the work W. Of these
components, the mask 5320b is exchangeably supported by a mask
stage unit 5350. The mask stage unit 5350 drives and allows the
mask 5320b to smoothly move in the X-Y plane in a translational
manner and to rotate around the Z axis. The operations of the mask
stage unit 5350 are controlled by a stage controller 5360 to
monitor the timing and travel of the translation and rotation of
the mask 5320b. The mask stage unit 5350 and the stage controller
5360 constitute a mask driving unit.
[0309] The process stage unit 5330 is housed in a process chamber
5370. The laser light AL is launched from the irradiation optical
system 5320 via a process window 5370a onto the work W supported by
the process stage unit 5330 in the process chamber 5370. The
translational and rotational travels are monitored by the stage
controller 5340.
[0310] The process window 5370a is arranged on the top surface of
the process chamber 5370. Immediately above the corner of the
process window 5370a, a work alignment camera 5380 is fixed. The
work alignment camera 5380 serves to detect the misalignment of the
work W mounted on the process stage unit 5330, and includes an
image-forming optical system and a CCD and other image pickup
devices. A picture signal output from the work alignment camera
5380 is subjected to processing in an image processor 5381. Signals
produced by the image processor 5381 are entered into the master
controller 53100 and are used in the alignment of the work W
relative to the projection lens 5320c constituting the irradiation
optical system 5320.
[0311] Immediately below a corner of the mask 5320b, a mask
alignment camera 5384 as an image pickup device is fixed. The mask
alignment camera 5384 serves to detect the misalignment of the mask
5320b supported by the mask stage unit 5350, and produces a picture
signal output. The picture signal output from the mask alignment
camera 5384 is subjected to processing in an image processor 5385,
and the picked-up image is displayed on a display 5386 as a display
device, and is used in the alignment of the mask 5320b relative to
the work W.
[0312] In this configuration, the mask stage unit 5350 and the
projection lens 5320c are fixed to a frame 5390 extending from the
process chamber 5370. The mask alignment camera 5384 is also fixed
via a supporting member 5391 to the frame 5390. While the detailed
descriptions of this component are omitted herein, the supporting
member 5391 serves to adjust the position of the mask alignment
camera 5384 relative to the mask stage unit 5350. Specifically, the
mask alignment camera 5384 is moved in the X-Y plane in a
translational manner and is rotated around the Z axis, and can be
surely fixed to the frame 5390 after the completion of necessary
alignment movement.
[0313] In the above system, the image of a mask alignment mark AM
is indicated on the display 5386 while the mask 5320b is moved
relative to the projection lens 5320c by the mask stage unit 5350.
By this configuration, the position of the mask 5320b can be
precisely and positively determined in real time while visually
checking the position.
[0314] The advantages of the invention will now be listed
below.
[0315] (1) In a semiconductor thin film forming system for
modifying a predetermined region of a semiconductor thin film by
exposing the semiconductor thin film to a projected light patterned
through plural patterns formed on a photo mask, the invented system
includes a mechanism for uniformizing light for exposure in such a
manner that the light intensity in a predetermined area on the
photo mask distributes within a range of .+-.11.2% of the average
light intensity in the area. By this configuration, a semiconductor
thin film on a desired region to be patterned can be homogeneously
modified. When the system is applied to LCDs and other imaging
devices, damage of substrates due to variations in intensity of
light source can be prevented to thereby inhibit deterioration of
image quality.
[0316] (2) In a semiconductor thin film forming system for
modifying a predetermined region of a semiconductor thin film by
exposing the semiconductor thin film to a projected light patterned
through an exposure pattern formed on a photo mask, and the
semiconductor thin film is formed on a substrate held on a
substrate stage, the invented system includes a mechanism for
sequentially scanning the semiconductor thin film with the
patterned light by individually or concurrently driving the photo
mask and the substrate stage. By this configuration, selected
regions on the substrate can be sequentially modified with a high
throughput. When the system is applied to LCDs and other imaging
devices, damage of substrates due to variations in intensity of
light source can be prevented to thereby inhibit deterioration of
image quality. This system can also provide a crystallized silicon
film having a trap state density less than 10.sup.12 cm.sup.-2.
[0317] (3) In a semiconductor thin film forming system for
modifying a predetermined region of a semiconductor thin film by
exposing the semiconductor thin film to a projected light patterned
through an exposure pattern formed on a photo mask, the invented
system includes a focusing mechanism for obtaining the focus of the
projected patterned light on the predetermined region of the
semiconductor thin film when the semiconductor thin film is exposed
to the projected patterned light. The above configuration can
provide a semiconductor thin film forming system having a high
reliability in modification processes and a satisfactory
reproducibility.
[0318] (4) In a semiconductor thin film forming system for
modifying a predetermined region of a semiconductor thin film by
exposing the semiconductor thin film to a projected exposure beam
patterned through a pattern formed on a photo mask, the invented
system includes a tilt correcting mechanism (or a leveling
mechanism) for correcting the tilt of the projected patterned beam
relative to the semiconductor thin film. The above configuration
can provide a semiconductor thin film forming system having a high
reliability in modification processes and a satisfactory
reproducibility.
[0319] (5) In a semiconductor thin film forming system for
modifying a predetermined region of a semiconductor thin film by
exposing the semiconductor thin film to a projected exposure beam
patterned through a pattern formed on a photo mask, the invented
system includes an alignment mechanism (or an alignment function)
for aligning the exposure beam relative to a mark formed on a
substrate, on which the semiconductor thin film is deposited. This
configuration can achieve the exposure of a target region with an
alignment accuracy of the order of micrometers or higher. When the
system is applied to LCDs and other imaging devices, damage of
substrates due to variations in intensity of light source can be
prevented to thereby inhibit deterioration of image quality.
[0320] (6) In a semiconductor thin film forming system for
modifying a predetermined region of a semiconductor thin film by
exposing the semiconductor thin film to a projected light patterned
through a pattern formed on a photo mask, the invented system
includes a mechanism (or a function) for holding a substrate on a
stage, the semiconductor thin film being deposited on the
substrate. The above configuration can provide a semiconductor thin
film forming system having a high reliability in modification
processes and a satisfactory reproducibility.
[0321] (7) In a semiconductor thin film forming system for
modifying a predetermined region of a semiconductor thin film by
exposing the semiconductor thin film to a projected exposure beam
patterned through a pattern formed on a photo mask, the invented
system includes a composing mechanism for composing a plurality of
laser beams into the exposure beam. By this configuration, a
semiconductor thin film can be homogeneously modified with good
quality in target regions to be patterned. In addition, selected
regions on the substrate can be sequentially modified with a high
throughput.
[0322] (8) Preferably in the system just mentioned above in (7),
the plurality of laser beams comprises first and second laser
beams, and the composing mechanism composes the first and second
laser beams in such a manner that the second laser beam is applied
onto the semiconductor thin film with a delay relative to the first
laser beam. By this configuration, a semiconductor thin film can be
homogeneously modified-with good quality in target regions to be
patterned. In addition, selected regions on the substrate can be
sequentially modified with a high throughput.
[0323] (9) In a semiconductor thin film forming system having a
process chamber, the process chamber serves to modify a
predetermined region of a semiconductor thin film by exposing the
semiconductor thin film on a substrate to a projected exposure beam
patterned through a pattern formed on a photo mask, the invented
system includes a mechanism for moving the substrate from the
process chamber to a different process chamber without exposing the
substrate to the atmosphere (or the air). By this configuration, a
semiconductor thin film can be transferred to a successive process
without contamination by impurities and dusts, while the
semiconductor thin film has a chemically active surface of an
equivalent quality to that of a single crystal semiconductor thin
film. Thus, manufacture costs for the semiconductor production
system can be reduced by eliminating a cleaning process, and the
throughput can be increased by reducing evacuation periods or
cleaning periods in individual vacuum systems.
[0324] (10) In the system just mentioned above (9), preferably the
different process chamber is an insulating film forming chamber for
the formation of an insulating film on the substrate. By this
configuration, a semiconductor thin film can be transferred to a
gate insulating film forming process without contamination by
impurities and dusts, while the semiconductor thin film has a
chemically active surface of an equivalent quality to that of a
single crystal semiconductor thin film. Thus, a semiconductor
element having a satisfactory semiconductor-insulator interface can
be manufactured by a process at low temperatures of 600.degree. C.
or less. Such a good semiconductor-insulator interface is
conventionally formed, for example, in an interface between silicon
and silicon oxide formed by heating. This system can provide a
crystallized silicon film having a trap state density less than
10.sup.12 cm.sup.-2 and can provide a silicon-insulating film
interface exhibiting a low interface state density.
[0325] (11) In the system indicated in (9), the different process
chamber is preferably a semiconductor film forming chamber for the
formation of a semiconductor thin film on the substrate. By this
configuration, a semiconductor film can be transferred to a light
irradiation process without contamination by impurities and dusts,
which semiconductor film is necessary for producing a semiconductor
thin film having a chemically active surface of an equivalent
quality to that of a single crystal semiconductor thin film. Thus,
manufacture costs for the semiconductor deposition system can be
reduced by eliminating a cleaning process, and the throughput can
be increased by reducing evacuation times or cleaning times in
individual vacuum systems.
[0326] (12) In the system indicated in (9), the invention provides
a system where the different process chamber is a heat treatment
chamber for treating the substrate with heat.
[0327] (13) Preferably, the different process chamber in the system
indicated in (9) is a plasma treatment chamber for subjecting the
substrate to a plasma treatment by treating the substrate with
plasma. By this configuration, a semiconductor thin film can be
transferred to a successive process without contamination by
impurities and dusts, while the semiconductor thin film has a
chemically active surface of an equivalent quality to that of a
single crystal semiconductor thin film. Thus, manufacture costs for
the semiconductor deposition system can be reduced by eliminating a
cleaning process, and the throughput can be increased by reducing
evacuation times or cleaning times in individual vacuum
systems.
[0328] (14) In the system indicated in (9), the process chamber is
preferably a laser treatment chamber for modifying the
predetermined region of the semiconductor thin film by exposing the
semiconductor thin film on the substrate to a projected laser beam
patterned through the pattern formed on the photo mask, the
different process chamber being preferably another laser treatment
chamber. By this configuration, a semiconductor thin film can be
transferred to a successive process without contamination by
impurities and dusts, while the semiconductor thin film has a
chemically active surface of an equivalent quality to that of a
single crystal semiconductor thin film. Thus, manufacture costs for
the semiconductor production system can be reduced by eliminating a
cleaning process, and the throughput can be increased by reducing
evacuation times or cleaning times in individual vacuum
systems.
[0329] (15) In a preferred embodiment, the different process
chamber in the system indicated in any one of (9) to (13) includes
a plasma generating source for generating plasma in a predetermined
area of the different process chamber, and the substrate is placed
in an area in the different process chamber other than the
predetermined area. This configuration can inhibit plasma-induced
damage of the semiconductor thin film, which semiconductor thin
film is transferred to a successive process without contamination
by impurities and dusts and has a chemically active surface of an
equivalent good quality to that of a single crystal semiconductor
thin film.
[0330] (16) In the system indicated in (13), preferably, the
different process chamber includes a plasma source for generating
plasma in a predetermined area of the different process chamber,
and the different process chamber serves to subject the substrate
to the plasma treatment by reacting an excited gas with a different
gas, the excited gas is excited by the plasma generated in the
predetermined area, and the different gas is introduced into the
different process chamber without passing through the predetermined
area. Thus, a semiconductor element having a satisfactory
semiconductor-insulator interface can be manufactured by a process
at low temperatures of 400.degree. C. or less. Such a good
semiconductor-insulator interface is conventionally formed, for
example, in an interface between silicon and silicon oxide formed
by heating.
[0331] Other embodiments and variations will be obvious to those
skilled in the art, and this invention is not to be limited to the
specific matters stated above.
* * * * *