U.S. patent application number 11/557462 was filed with the patent office on 2007-05-24 for method and system for depositing material on a substrate using a solid precursor.
This patent application is currently assigned to TOKYO ELECTRON LIMITED. Invention is credited to Jozef Brcka.
Application Number | 20070113789 11/557462 |
Document ID | / |
Family ID | 37068823 |
Filed Date | 2007-05-24 |
United States Patent
Application |
20070113789 |
Kind Code |
A1 |
Brcka; Jozef |
May 24, 2007 |
METHOD AND SYSTEM FOR DEPOSITING MATERIAL ON A SUBSTRATE USING A
SOLID PRECURSOR
Abstract
A system and method is disclosed for vaporizing a solid
precursor and transporting the precursor vapor to a process
chamber. The film precursor vaporization system is coupled to the
process chamber and positioned directly above the substrate. A
precursor valve system within the film precursor vaporization
system permits closing off the flow of precursor vapor to the
process chamber while carrier gas flows through or over the film
precursor, and once the carrier gas is saturated with precursor
vapor, the precursor valve system is opened to permit the flow of
precursor vapor to the substrate.
Inventors: |
Brcka; Jozef; (Loudonville,
NY) |
Correspondence
Address: |
WOOD, HERRON & EVANS, LLP (TOKYO ELECTRON)
2700 CAREW TOWER
441 VINE STREET
CINCINNATI
OH
45202
US
|
Assignee: |
TOKYO ELECTRON LIMITED
3-6 Akasaka 5-Chome, Minato-Ku
Tokyo
JP
107
|
Family ID: |
37068823 |
Appl. No.: |
11/557462 |
Filed: |
November 7, 2006 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
11096159 |
Mar 31, 2005 |
7132128 |
|
|
11557462 |
Nov 7, 2006 |
|
|
|
Current U.S.
Class: |
118/726 ;
427/248.1; 438/758 |
Current CPC
Class: |
C23C 16/4481 20130101;
C23C 16/16 20130101 |
Class at
Publication: |
118/726 ;
427/248.1; 438/758 |
International
Class: |
C23C 16/00 20060101
C23C016/00; H01L 21/31 20060101 H01L021/31 |
Claims
1. A deposition system for forming a thin film on a substrate
comprising: a process chamber having a substrate holder configured
to support said substrate and heat said substrate, and a pumping
system configured to evacuate said process chamber; and a film
precursor vaporization system coupled to said process chamber above
said substrate and configured to vaporize a film precursor, and to
transport film precursor vapor in a carrier gas, wherein said film
precursor vaporization system comprises: a housing positioned above
the process chamber and having an opening in a bottom of said
housing that is in general alignment with an opening in a top of
said process chamber; a precursor tray supported within said
housing and an annular space formed between said precursor tray and
said housing wherein the precursor tray is configured to support
said film precursor, and wherein said precursor tray is coupled to
a carrier gas supply system configured to flow said carrier gas
through or over said film precursor, through said annular space,
and through said opening in the bottom of said housing; and a
precursor valve system disposed in said opening in said bottom of
said housing and configured to open up or close off the flow of
said film precursor vapor through said opening in said housing.
2. The deposition system of claim 1, further comprising: a vapor
distribution system coupled between said opening in said housing
and said opening in said process chamber, and configured to
introduce said film precursor vapor from said film precursor
vaporization system to said process chamber and distribute said
film precursor above said substrate.
3. The deposition system of claim 1, further comprising a solid
film precursor disposed in said precursor tray.
4. The deposition system of claim 3, wherein said solid film
precursor comprises a solid powder form.
5. The deposition system of claim 4, wherein said precursor tray
comprises a baffle plate configured to prevent the transport of
said solid film precursor out of said precursor tray.
6. The deposition system of claim 3, wherein said solid film
precursor comprises a solid tablet form.
7. The deposition system of claim 1, further comprising a metal
carbonyl film precursor disposed in said precursor tray.
8. The deposition system of claim 7, wherein said metal carbonyl
film precursor includes W(CO).sub.6, Mo(CO).sub.6,
Co.sub.2(CO).sub.8, Rh.sub.4(CO).sub.12, Re.sub.2(CO).sub.10,
Cr(CO).sub.6, Ru.sub.3(CO).sub.12, or Os.sub.3(CO).sub.12.
9. The deposition system of claim 1, wherein said precursor tray
comprises a baffle plate configured to prevent the transport of
film precursor out of said precursor tray.
10. The deposition system of claim 1, wherein said precursor valve
system comprises one or more valves.
11. The deposition system of claim 10, wherein said one or more
valves comprise at least one of a gate valve, an angle valve, or a
butterfly valve.
12. The deposition system of claim 1, further comprising a carrier
gas distribution plate within said precursor tray configured to
support said film precursor, wherein said carrier gas distribution
plate forms a carrier gas plenum at a bottom of said precursor tray
which is coupled to said carrier gas supply system.
13. The deposition system of claim 1, wherein said precursor tray
is coupled to a temperature control system configured to control
the temperature of said film precursor.
14. A method of depositing a thin film on a substrate using the
deposition system of claim 1, comprising: disposing said substrate
on said substrate holder in said process chamber; introducing a
film precursor to said film precursor vaporization system in said
precursor tray; flowing a carrier gas from said carrier gas supply
system through said film precursor vaporization system; heating
said film precursor to form said film precursor vapor in said
carrier gas; and exposing said substrate to said film precursor
vapor.
15. The method of claim 14, wherein heating said film precursor is
to a temperature of approximately 40 degrees C. or greater.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a divisional of co-pending U.S. Pat. No.
7,132,128, the content of which is hereby incorporated by reference
herein in its entirety. This application is also related to
co-pending U.S. patent application Ser. No. 11/096,156, entitled
"Method for Saturating a Carrier Gas with Precursor Vapor", the
content of which is herein incorporated by reference in its
entirety.
BACKGROUND OF THE INVENTION
[0002] 1. Field of Invention
[0003] The present invention relates to a system for thin film
deposition, and more particularly to a system for vaporizing a film
precursor and delivering the vapor to a deposition chamber.
[0004] 2. Description of Related Art
[0005] The introduction of copper (Cu) metal into multilayer
metallization schemes for manufacturing integrated circuits can
necessitate the use of diffusion barriers/liners to promote
adhesion and growth of the Cu layers and to prevent diffusion of Cu
into the dielectric materials. Barriers/liners that are deposited
onto dielectric materials can include refractive materials, such as
tungsten (W), molybdenum (Mo), and tantalum (Ta), that are
non-reactive and immiscible in Cu, and can offer low electrical
resistivity. Current integration schemes that integrate Cu
metallization and dielectric materials can require barrier/liner
deposition processes at substrate temperatures between about
400.degree. C. and about 500.degree. C., or lower.
[0006] For example, Cu integration schemes for technology nodes
less than or equal to 130 nm currently utilize a low dielectric
constant (low-k) inter-level dielectric, followed by a physical
vapor deposition (PVD) TaN layer and Ta barrier layer, followed by
a PVD Cu seed layer, and an electrochemical deposition (ECD) Cu
fill. Generally, Ta layers are chosen for their adhesion properties
(i.e., their ability to adhere on low-k films), and Ta/TaN layers
are generally chosen for their barrier properties (i.e., their
ability to prevent Cu diffusion into the low-k film).
[0007] As described above, significant effort has been devoted to
the study and implementation of thin transition metal layers as Cu
diffusion barriers, these studies including such materials as
chromium, tantalum, molybdenum and tungsten. Each of these
materials exhibits low miscibility in Cu. More recently, other
materials, such as ruthenium (Ru) and rhodium (Rh), have been
identified as potential barrier layers since they are expected to
behave similarly to conventional refractory metals. However, the
use of Ru or Rh can permit the use of only one barrier layer, as
opposed to two layers, such as Ta/TaN. This observation is due to
the adhesive and barrier properties of these materials. For
example, one Ru layer can replace the Ta/TaN barrier layer.
Moreover, current research is finding that the one Ru layer can
further replace the Cu seed layer, and bulk Cu fill can proceed
directly following Ru deposition. This observation is due to good
adhesion between the Cu and the Ru layers.
[0008] Conventionally, Ru layers can be formed by thermally
decomposing a ruthenium-containing precursor, such as a ruthenium
carbonyl precursor, in a thermal chemical vapor deposition (TCVD)
process. Material properties of Ru layers that are deposited by
thermal decomposition of metal carbonyl precursors (e.g.,
Ru.sub.3(CO).sub.12), can deteriorate when the substrate
temperature is lowered to below about 400.degree. C. As a result,
an increase in the (electrical) resistivity of the Ru layers and
poor surface morphology (e.g., the formation of nodules) at low
deposition temperatures has been attributed to increased
incorporation of CO reaction by-products into the thermally
deposited Ru layers. Both effects can be explained by a reduced CO
desorption rate from the thermal decomposition of the ruthenium
carbonyl precursor at substrate temperatures below about
400.degree. C.
[0009] Additionally, the use of metal carbonyls, such as ruthenium
carbonyl, can lead to poor deposition rates due to their low vapor
pressure, and the transport issues associated therewith. For
instance, transport issues can include excessive decomposition of
the precursor vapor on internal surfaces of the deposition system,
such as on the internal surfaces of the vapor delivery system used
to transport the vapor from the vaporization system to the process
chamber, thus further reducing the amount of precursor vapor that
reaches the substrate surface. Overall, the inventor has observed
that current deposition systems suffer from such a low rate, making
the deposition of such metal films impractical.
SUMMARY OF THE INVENTION
[0010] The present invention provides a deposition system for
forming a thin film on a substrate in which a film precursor
vaporization system is integrated with the process chamber, rather
than remote therefrom. The deposition system comprises a process
chamber having a substrate holder configured to support the
substrate and heat the substrate, and a pumping system configured
to evacuate the process chamber; and a film precursor vaporization
system coupled to the process chamber above the substrate and
configured to vaporize a film precursor, and to transport film
precursor vapor in a carrier gas. The film precursor vaporization
system comprises a housing positioned above the process chamber and
having an opening in the bottom of the housing that is in general
alignment with an opening in the top of the process chamber. A
precursor tray is supported within the housing and an annular space
is formed between the precursor tray and the housing. The precursor
tray is configured to support the film precursor, and is coupled to
a carrier gas supply system configured to flow the carrier gas
through or over the film precursor, through the annular space, and
through the opening in the bottom of the housing.
[0011] The present invention further provides a method of
depositing a thin film on a substrate using the above-described
deposition system. The method comprises: disposing the substrate on
the substrate holder in the process chamber of the deposition
system; introducing a film precursor to the film precursor
vaporization system in the deposition system; flowing a carrier gas
from the carrier gas supply system through the film precursor
vaporization system; heating the film precursor to form the film
precursor vapor in the carrier gas; and exposing the substrate to
the film precursor vapor.
BRIEF DESCRIPTION OF THE DRAWINGS
[0012] In the accompanying drawings:
[0013] FIG. 1 depicts a schematic view of a deposition system
according to an embodiment of the invention;
[0014] FIG. 2 depicts a schematic view of a deposition system
according to another embodiment of the invention;
[0015] FIG. 3 depicts a schematic view of a deposition system
according to another embodiment of the invention;
[0016] FIG. 4 presents in cross-sectional view a film precursor
vaporization system according to an embodiment of the
invention;
[0017] FIG. 5 presents in cross-sectional view a film precursor
vaporization system according to another embodiment of the
invention;
[0018] FIG. 6 presents in cross-sectional view a film precursor
vaporization system according to another embodiment of the
invention;
[0019] FIG. 7 illustrates a baffle plate for use in a film
precursor vaporization system according to an embodiment of the
invention;
[0020] FIG. 8 presents in cross-sectional view a film precursor
vaporization system according to another embodiment of the
invention; and
[0021] FIG. 9 illustrates a method of operating a deposition system
of the invention.
DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
[0022] In the following description, in order to facilitate a
thorough understanding of the invention and for purposes of
explanation and not limitation, specific details are set forth,
such as a particular geometry of the deposition system and
descriptions of various components. However, it should be
understood that the invention may be practiced in other embodiments
that depart from these specific details.
[0023] Referring now to the drawings, wherein like reference
numerals designate identical or corresponding parts throughout the
several views, FIG. 1 illustrates a deposition system 1 for
depositing a thin film, such as a ruthenium (Ru) or a rhenium (Re)
metal film, on a substrate according to one embodiment. The
deposition system 1 comprises a process chamber 10 having a
substrate holder 20 configured to support a substrate 25, upon
which the thin film is formed. The process chamber 10 is coupled to
a film precursor vaporization system 50.
[0024] The process chamber 10 is further coupled to a vacuum
pumping system 40, wherein the pumping system 40 is configured to
evacuate the process chamber 10 and film precursor vaporization
system 50 to a pressure suitable for forming the thin film on
substrate 25, and suitable for vaporization of a film precursor
(not shown) in the film precursor vaporization system 50.
[0025] Referring still to FIG. 1, the film precursor vaporization
system 50 is coupled directly to process chamber 10. The film
precursor vaporization system 50 is configured to store a film
precursor and heat the film precursor to a temperature sufficient
for vaporizing the film precursor, while introducing vapor phase
film precursor to the process chamber 10. As will be discussed in
more detail below with reference to FIGS. 2-9, the film precursor
can, for example, comprise a solid film precursor. Additionally,
for example, the film precursor can include a solid metal
precursor. Additionally, for example, the film precursor can
include a metal carbonyl. For instance, the metal carbonyl can
include ruthenium carbonyl (Ru.sub.3(CO).sub.12), or rhenium
carbonyl (Re.sub.2(CO).sub.10). Additionally, for instance, the
metal carbonyl can include W(CO).sub.6, Mo(CO).sub.6,
Co.sub.2(CO).sub.8, Rh.sub.4(CO).sub.12, Cr(CO).sub.6, or
Os.sub.3(CO).sub.12. Additionally, the film precursor vaporization
system 50 can optionally comprise a vapor distribution system 30
configured to disperse the film precursor vapor above substrate 25
in the process chamber 10.
[0026] In order to achieve the desired temperature for vaporizing
the film precursor (or subliming a solid metal precursor), the film
precursor vaporization system 50 is coupled to a vaporization
temperature control system (not shown) configured to control the
vaporization temperature. For instance, the temperature of the film
precursor is generally elevated to approximately 40-45.degree. C.
in conventional systems in order to sublime, for example, ruthenium
carbonyl. At this temperature, the vapor pressure of the ruthenium
carbonyl, for instance, ranges from approximately 1 to
approximately 3 mTorr. As the film precursor is heated to cause
evaporation (or sublimation), a carrier gas is passed over the film
precursor or by the film precursor. The carrier gas can include,
for example, an inert gas, such as a noble gas (i.e., He, Ne, Ar,
Kr, Xe), or a monoxide, such as carbon monoxide (CO), for use with
metal carbonyls, or a mixture thereof. For example, a carrier gas
supply system (not shown) is coupled to the film precursor
vaporization system 50, and it is configured to, for instance,
supply the carrier gas above the film precursor via a feed line
(not shown). In another example, the carrier gas supply system is
coupled to the vapor distribution system 30 and is configured to
supply the carrier gas to the vapor of the film precursor via
another feed line (not shown) as or after it enters the vapor
distribution system 30. Although not shown, the carrier gas supply
system can comprise a gas source, one or more control valves, one
or more filters, and a mass flow controller. For instance, the flow
rate of carrier gas can range from approximately 5 sccm (standard
cubic centimeters per minute) to approximately 1000 sccm. For
example, the flow rate of carrier gas can range from about 10 sccm
to about 200 sccm. By way of further example, the flow rate of
carrier gas can range from about 20 sccm to about 100 sccm.
[0027] Referring again to FIG. 1, the optional vapor distribution
system 30, coupled to the process chamber 10, comprises a plenum
(not shown) within which the vapor disperses prior to passing
through a vapor distribution plate (not shown) and entering a
processing zone 35 above substrate 25. In addition, the vapor
distribution plate can be coupled to a distribution plate
temperature control system (not shown) configured to control the
temperature of the vapor distribution plate. For example, the
temperature of the vapor distribution plate can be set to a value
approximately equal to the vaporization temperature. However, it
may be less, or it may be greater.
[0028] Once film precursor vapor enters the processing zone 35, the
film precursor vapor thermally decomposes upon adsorption at the
substrate surface due to the elevated temperature of the substrate
25, and the thin film is formed on the substrate 25. The substrate
holder 20 is configured to elevate the temperature of substrate 25,
by virtue of the substrate holder 20 being coupled to a substrate
temperature control system 22. For example, the substrate
temperature control system 22 can be configured to elevate the
temperature of substrate 25 up to approximately 500.degree. C. In
one embodiment, the substrate temperature can range from about
100.degree. C. to about 500.degree. C. In another embodiment, the
substrate temperature can range from about 300.degree. C. to about
400.degree. C. Additionally, process chamber 10 can be coupled to a
chamber temperature control system 12 configured to control the
temperature of the chamber walls.
[0029] As described above, for example, conventional systems have
contemplated operating the film precursor vaporization system 50,
within a temperature range of approximately 40-45.degree. C. for
ruthenium carbonyl in order to limit metal vapor precursor
decomposition, and metal vapor precursor condensation. For example,
ruthenium carbonyl precursor can decompose at elevated temperatures
to form by-products, such as those illustrated below:
Ru.sub.3(CO).sub.12*(ad)RU.sub.3(CO).sub.x*(ad)+(12-x)CO(g) (1) or,
Ru.sub.3(Co).sub.x*(ad)3Ru(s)+xCO(g) (2) wherein these by-products
can adsorb, i.e., condense, on the interior surfaces of the
deposition system 1. The accumulation of material on these surfaces
can cause problems from one substrate to the next, such as process
repeatability. Alternatively, for example, ruthenium carbonyl
precursor can condense at depressed temperatures to cause
recrystallization, viz.
Ru.sub.3(CO).sub.12(g)RU.sub.3(Co).sub.12(ad) (3)
[0030] However, within such systems having a small process window,
the deposition rate becomes extremely low, due in part to the low
vapor pressure of ruthenium carbonyl. For instance, the deposition
rate can be as low as approximately 1 Angstrom per minute.
Therefore, according to one embodiment, the vaporization
temperature is elevated to be greater than or equal to
approximately 40.degree. C. Alternatively, the vaporization
temperature is elevated to be greater than or equal to
approximately 50.degree. C. In an exemplary embodiment of the
present invention, the vaporization temperature is elevated to be
greater than or equal to approximately 60.degree. C. In a further
exemplary embodiment, the vaporization temperature is elevated to
range from approximately 60-100.degree. C., and for example from
approximately 60-90.degree. C. The elevated temperature increases
the vaporization rate due to the higher vapor pressure (e.g.,
nearly an order of magnitude larger) and, hence, it is expected by
the inventors to increase the deposition rate. It may also be
desirable to periodically clean deposition system 1 following
processing of one or more substrates. For example, additional
details on a cleaning method and system can be obtained from
co-pending U.S. patent application Ser. No. 10/998,394, filed on
Nov. 29, 2004, and entitled "Method and System for Performing
In-Situ Cleaning of a Deposition System" (Attorney Docket No.
TTCA-005), which is herein incorporated by reference in its
entirety.
[0031] As discussed above, the deposition rate is proportional to
the amount of film precursor that is vaporized and transported to
the substrate prior to decomposition, or condensation, or both.
Therefore, in order to achieve a desired deposition rate, and to
maintain consistent processing performance (i.e., deposition rate,
film thickness, film uniformity, film morphology, etc.) from one
substrate to the next, it is important to provide the ability to
monitor, adjust, or control the flow rate of the film precursor
vapor. In conventional systems, an operator may indirectly
determine the flow rate of film precursor vapor by using the
vaporization temperature, and a pre-determined relationship between
the vaporization temperature and the flow rate. However, processes
and their performance drift in time, and hence it is imperative
that the flow rate is measured more accurately. For example,
additional details can be obtained from co-pending U.S. patent
application Ser. No. 10/998,393, filed on Nov. 29, 2004, and
entitled "Method and System for Measuring a Flow Rate in a Solid
Precursor Delivery System" (Attorney Docket No. TTCA-004), which is
herein incorporated by reference in its entirety.
[0032] Still referring the FIG. 1, the deposition system 1 can
further include a control system 80 configured to operate and
control the operation of the deposition system 1. The control
system 80 is coupled to the process chamber 10, the substrate
holder 20, the substrate temperature control system 22, the chamber
temperature control system 12, the vapor distribution system 30,
and the film precursor vaporization system 50.
[0033] FIGS. 2 and 3 illustrate alternative embodiments of a
deposition system 100, 100' for depositing a thin film, such as a
ruthenium (Ru) or a rhenium (Re) metal film, on a substrate. The
deposition systems 100, 100' comprise a process chamber 110 having
a substrate holder 120 configured to support a substrate 125, upon
which the thin film is formed. The process chamber 110 is coupled
to a precursor delivery system 105, 105' having film precursor
vaporization system 150 positioned above the process chamber 110
and configured to store and vaporize a film precursor 175. An
opening 136 is provided in the bottom of the vaporization system
150 for introducing vapor precursor to the process chamber 110 from
the precursor delivery system 105, 105'. Opening 136 is in general
alignment with an opening 137 in the top of process chamber 110.
Thus, the vaporization system 150 is essentially integrated with
the process chamber 110 such that gas line delivery of precursor
vapor from a remote vaporization system is eliminated. In the
embodiment shown in FIG. 3, the precursor delivery system 105'
further comprises a vapor distribution system 130 positioned
between film precursor vaporization system 150 and process chamber
110 and configured to disperse the film precursor vapor in process
space 135 above substrate 125.
[0034] Referring still to FIGS. 2 and 3, substrate holder 120
provides a horizontal surface to support substrate (or wafer) 125,
which is to be processed. Furthermore, the substrate holder 120
comprises a temperature control element (not shown), such as a
heater, coupled to substrate holder temperature control system 122.
The heater can, for example, include one or more resistive heating
elements. Alternately, the heater can, for example, include a
radiant heating system, such as a tungsten-halogen lamp. The
substrate holder temperature control system 122 can include a power
source for providing power to the one or more heating elements, one
or more temperature sensors for measuring the substrate
temperature, or the substrate holder temperature, or both, and a
controller configured to perform at least one of monitoring,
adjusting, or controlling the temperature of the substrate or
substrate holder.
[0035] During processing, the heated substrate 125 can thermally
decompose the vapor of film precursor vapor, such as a metal
carbonyl precursor, and enable deposition of a thin film, such as a
metal layer, on the substrate 125. According to one embodiment, the
film precursor includes a solid precursor. According to another
embodiment, the film precursor includes a metal precursor.
According to another embodiment, the film precursor includes a
solid metal precursor. According to yet another embodiment, the
film precursor includes a metal carbonyl precursor. According to
yet another embodiment, the film precursor can be a ruthenium
carbonyl precursor, for example Ru.sub.3(CO).sub.12. According to
yet another embodiment of the invention, the film precursor can be
a rhenium carbonyl precursor, for example Re.sub.2(CO).sub.10. As
will be appreciated by those skilled in the art of thermal chemical
vapor deposition, other ruthenium carbonyl precursors and rhenium
carbonyl precursors can be used without departing from the scope of
the invention. In yet another embodiment, the film precursor can be
W(CO).sub.6, Mo(CO).sub.6, Co.sub.2(CO).sub.8, Rh.sub.4(CO).sub.12,
Cr(CO).sub.6, or Os.sub.3(CO).sub.12.
[0036] The substrate holder 120 is heated to a pre-determined
temperature that is suitable for depositing, for instance, a
desired Ru, Re, or other metal layer onto the substrate 125.
Additionally, a heater (not shown), coupled to a chamber
temperature control system 112, can be embedded in the walls of
process chamber 110 to heat the chamber walls to a pre-determined
temperature. The heater can maintain the temperature of the walls
of process chamber 110 from about 40.degree. C. to about
100.degree. C., for example from about 40.degree. C. to about
80.degree. C. A pressure gauge (not shown) is used to measure the
process chamber pressure.
[0037] Referring specifically to FIG. 3, an optional vapor
distribution system 130 is coupled to process chamber 110. Vapor
distribution system 130 comprises a vapor distribution plate 131
configured to introduce precursor vapor from vapor distribution
plenum 132 to a processing zone 135 above substrate 125 through one
or more orifices 134.
[0038] Furthermore, the vapor distribution system 130 is positioned
at the opening 136 provided in the bottom of the vaporization
system 150 for receiving vapor precursor from the vaporization
system 150 and introducing it into vapor distribution plenum 132
for distribution to the processing zone 135 through opening 137.
Moreover, temperature control elements (not shown), such as
concentric fluid channels configured to flow a cooled or heated
fluid, are provided for controlling the temperature of the vapor
distribution system 130, and thereby prevent the decomposition of
the film precursor inside the vapor distribution system 130. For
instance, a fluid, such as water, can be supplied to fluid channels
from a vapor distribution temperature control system 138. The vapor
distribution temperature control system 138 can include a fluid
source, a heat exchanger, one or more temperature sensors for
measuring the fluid temperature or vapor distribution plate
temperature or both, and a controller configured to control the
temperature of the vapor distribution plate 131 from about
20.degree. C. to about 100.degree. C. Referring again to both FIGS.
2 and 3, film precursor vaporization system 150 is configured to
hold a film precursor 175, and to evaporate (or sublime) the film
precursor by elevating its temperature. The terms "vaporization,"
"sublimation" and "evaporation" are used interchangeably herein to
refer to the general formation of a vapor (gas) from a solid or
liquid precursor, regardless of whether the transformation is, for
example, from solid to liquid to gas, solid to gas, or liquid to
gas. A precursor heater (not shown) is provided for heating the
film precursor 175 to maintain the film precursor at a temperature
that produces a desired vapor pressure of film precursor. The
precursor heater is coupled to a vaporization temperature control
system 152 configured to control the temperature of the film
precursor 175. For example, the precursor heater can be configured
to adjust the temperature of the film precursor (or vaporization
temperature) to be greater than or equal to approximately
40.degree. C. Alternatively, the vaporization temperature is
elevated to be greater than or equal to approximately 50.degree. C.
For example, the vaporization temperature is elevated to be greater
than or equal to approximately 60.degree. C. In one embodiment, the
vaporization temperature is elevated to range from approximately
60-100.degree. C., and in another embodiment, to range from
approximately 60-90.degree. C.
[0039] As the film precursor is heated to cause evaporation (or
sublimation), a carrier gas can be passed over the film precursor
175, or by the film precursor 175, or through the film precursor
175. For example, a carrier gas supply system 160 is coupled to the
film precursor vaporization system 150 via gas line 161, and it is
configured to, for instance, supply the carrier gas below the film
precursor 175. Additionally, carrier gas supply system 160 can also
be coupled to the precursor delivery system 105, 105' downstream of
the film precursor 175, proximate the opening 136. In FIG. 2,
carrier gas supply system 160 can be coupled to film precursor
vaporization system 150 above the opening 136 via gas line 162.
Alternatively, or additionally, as shown in FIG. 3, carrier gas
supply system 160 can be coupled to the vapor distribution system
130 below opening 136 via gas line 164 to supply the carrier gas to
the vapor of the film precursor as or after it enters the vapor
distribution system 130. Additionally, as shown in FIGS. 2 and 3,
carrier gas supply system 160 can also be coupled to the process
chamber 110 via gas line 163 to supply the carrier gas to the vapor
of the film precursor as or after it enters the process chamber
110.
[0040] The carrier gas can include, for example, an inert gas, such
as a noble gas (i.e., He, Ne, Ar, Kr, Xe), or a monoxide, such as
carbon monoxide (CO), for use with metal carbonyls, or a mixture
thereof. The carrier gas supply system 160 can comprise a gas
source (not shown), one or more control valves (not shown), one or
more filters (not shown), and a mass flow controller (not shown).
For instance, the flow rate of carrier gas can range from
approximately 5 sccm (standard cubic centimeters per minute) to
approximately 1000 sccm. In one embodiment, for instance, the flow
rate of carrier gas can range from about 10 sccm to about 200 sccm.
In another embodiment, for instance, the flow rate of carrier gas
can range from about 20 sccm to about 100 sccm.
[0041] Referring still to FIGS. 2 and 3, the film precursor
vaporization system 150 comprises a housing 170 configured to
enclose and support a precursor tray 172. An annular space 179 is
defined by the sidewall of housing 170 and precursor tray 172,
thereby creating a flow channel for the film precursor vapor from
the precursor tray 172 through the annular space 179 to the opening
136 in the bottom of the film precursor vaporization system 150.
The precursor tray 172 comprises a carrier gas distribution plate
174 configured to support the film precursor 175 and form a carrier
gas plenum 176 at the bottom of the precursor tray 172.
Additionally, a carrier gas line 178 is coupled to carrier gas
supply system 160, and configured to supply carrier gas to the
carrier gas plenum 176. The carrier gas, originating from the
carrier gas supply system 160, enters the film precursor
vaporization system 150 through carrier gas line 178 to carrier gas
plenum 176, flows through the film precursor resting atop the
carrier gas distribution plate 174, enters the vaporization space
177, flows through the annular space 179, and enters the process
chamber 110 through opening 136 (see FIG. 2) or, alternatively,
enters the vapor distribution system 130 through opening 136 (see
FIG. 3). Although the carrier gas flows through the film precursor,
other embodiments may provide for flowing the carrier over the film
precursor. The film precursor may comprise a solid powder form, or
it may comprise a solid tablet form. In the latter, additional
details for preparing the solid precursor in solid tablet form can
be ascertained from pending U.S. patent application Ser. No.
11/007,961, filed on Dec. 9, 2004, and entitled "Method for
Preparing Solid Precursor Tray for Use in Solid Precursor
Evaporation System" (Attorney Docket No. TTCA-011), the entire
content of which is incorporated herein by reference in its
entirety.
[0042] Referring now to FIG. 3, the film precursor vaporization
system 150 can comprise a precursor valve system 180 positioned in
the flow channel and configured to open and close the flow of vapor
precursor from the film precursor vaporization system 150 into the
process chamber 110. According to an embodiment, the precursor
valve system 180 is closed while carrier gas enters the film
precursor vaporization system 150 through the film precursor 175,
and fills the vaporization space 177 and the annular space 179 with
carrier gas and precursor vapor. The flow of carrier gas occurs for
a period of time, and then it is terminated using a valve in the
carrier gas supply system 160. For instance, the period of time may
be sufficiently large to permit the pressure in the film precursor
vaporization system 150 to stabilize. For a given vaporization
temperature, the precursor will reach a specific vapor pressure
and, since the volume of the vaporization space 177 and the annular
space 179 is known, the amount of precursor vapor to be delivered
to substrate 125 is known. Once the carrier gas in the vaporization
space 177 and annular space 179 is saturated with precursor vapor,
the precursor valve system 180 is opened in order to permit
transport of the precursor vapor to the surface of substrate
125.
[0043] In FIG. 3, the precursor valve system 180 is positioned
within the annular space 179. As shown in FIG. 4, the precursor
valve system 180 comprises one or more valves 181 located within
and, for instance, equally spaced along the annular space 179,
which is defined by the sidewall of housing 170 and tray 172.
Although four valves 181 are illustrated, more or less may be
utilized. Each valve 181 can, for example, comprise a gate valve, a
butterfly valve, or an angle valve.
[0044] Referring now to FIG. 5, a deposition system 100'' is
depicted according to another embodiment of an alternative
precursor delivery system 105''. The deposition system 100'' is
similar to deposition system 100' of FIG. 3, but rather than
positioning a valve system in the annular space 179 of the flow
channel, deposition system 100'' comprises a precursor valve system
180' positioned in the flow channel at the opening 136 between the
film precursor vaporization system 150 and the vapor distribution
system 130. The precursor valve system 180' can, for example,
comprise a gate valve. As with valve system 180, precursor valve
system 180' is configured to open and close the flow of vapor
precursor from the film precursor vaporization system 150 into the
process chamber 110.
[0045] Referring now to FIG. 6, which depicts alternative precursor
delivery system 105''', when a solid precursor in powder form is
utilized, an optional baffle plate 182 may be employed to prevent a
burst of solid particulate from reaching the annular space 179 of
the film precursor vaporization system 150. The transport of solid
particulate out of the precursor tray 172 can lead to particulate
contamination in process chamber 110. The optional baffle plate 182
can, for instance, comprise a design of slanted openings, such as
that illustrated in FIG. 7.
[0046] Referring now to FIG. 8, which depicts alternative precursor
delivery system 105'''', the precursor tray 172 can support a solid
precursor in solid tablet form, as described above. The precursor
175' can comprise cylindrical elements arranged concentrically in
such a way that the carrier gas flows through the annular space
between cylindrical precursor elements. Additional details
regarding such an arrangement of solid precursor elements is
described in pending U.S. patent application Ser. No. 11/096,077,
and entitled "Solid Precursor Vaporization System for Use in
Chemical Vapor Deposition and Method Of Using", the content of
which is herein incorporated by reference in its entirety.
[0047] Referring again to FIGS. 2 and 3, the vaporization space 177
and the annular space 179 provide for a high conductance flow
through the film precursor vaporization system 150. Additionally,
the film precursor vaporization system 150 can include an
additional temperature control system (not shown) for controlling
the wall temperature of the housing 170. The housing 170 may or may
not be maintained at a temperature different than the temperature
of the precursor tray 172. For instance, the temperature of the
housing walls can be controlled to avoid condensation of the film
precursor. The temperature can be controlled from about 20.degree.
C. to about 100.degree. C., or from about 40.degree. C. to about
90.degree. C. For example, the wall temperature of housing 170 can
be set to a value approximately equal to or greater than the
vaporization temperature.
[0048] As illustrated in FIGS. 2 and 3, the process chamber 110 is
coupled to a pumping system 118 via an exhaust line 116. The
pumping system 118 is used to evacuate process chamber 110 to the
desired degree of vacuum, and to remove gaseous species from the
process chamber 110 during processing. An automatic pressure
controller (APC) (not shown) and a trap (not shown) can be used in
series with the pumping system 118. The pumping system 118 can
include a turbo-molecular pump (TMP) capable of a pumping speed up
to 5000 liters per second (and greater). Alternately, the pumping
system 118 can include a dry roughing pump. During processing, the
carrier gas, or film precursor vapor, or any combination thereof,
can be introduced into the process chamber 110, and the chamber
pressure can be adjusted by the APC. For example, the chamber
pressure can range from approximately 1 mTorr to approximately 500
mTorr, and in a further example, the chamber pressure can range
from about 5 mTorr to about 50 mTorr. The APC can comprise a
butterfly-type valve or a gate valve. The trap can collect
unreacted precursor material and by-products from the process
chamber 110.
[0049] Referring back to the substrate holder 120 in the process
chamber 110, as shown in FIGS. 2 and 3, a substrate lift system
(not shown), such as a substrate lift-pin system, is provided for
holding, raising, and lowering the substrate 125. Substrate 125 can
be transferred into and out of process chamber 110 through a gate
valve (not shown) and a chamber feed-through passage via a robotic
transfer system (not shown), and received by the substrate lift
system. Once the substrate 125 is received from the transfer
system, it can be lowered to the upper surface of the substrate
holder 120.
[0050] Referring still to FIGS. 2 and 3, a controller 190 includes
a microprocessor, a memory, and a digital I/O port capable of
generating control voltages sufficient to communicate and activate
inputs of the processing system 100 as well as monitor outputs from
the processing system 100. Moreover, the processing system
controller 190 is coupled to and exchanges information with process
chamber 110 and chamber temperature control system 112; precursor
delivery system 105, 105' (105'', 105''', 105''''), which includes
the film precursor vaporization system 150 and the vaporization
temperature control system 152; precursor valve system 180, 180';
vapor distribution temperature control system 138; carrier gas
supply system 160; vacuum pumping system 118; and substrate holder
temperature control system 122. In the vacuum pumping system 118,
the controller 190 is coupled to and exchanges information with the
automatic pressure controller for controlling the pressure in the
process chamber 110. A program stored in the memory is utilized to
control the aforementioned components of deposition system 100,
100' (100'') according to a stored process recipe. One example of
processing system controller 190 is a DELL PRECISION WORKSTATION
610.TM., available from Dell Corporation, Dallas, Tex. The
controller 190 may also be implemented as a general-purpose
computer, digital signal process, etc.
[0051] Controller 190 may be locally located relative to the
deposition system 100, or it may be remotely located relative to
the deposition system 100 via an internet or intranet. Thus,
controller 190 can exchange data with the deposition system 100,
100' (100'') using at least one of a direct connection, an
intranet, or the internet. Controller 190 may be coupled to an
intranet at a customer site (i.e., a device maker, etc.), or
coupled to an intranet at a vendor site (i.e., an equipment
manufacturer). Furthermore, another computer (i.e., controller,
server, etc.) can access controller 190 to exchange data via at
least one of a direct connection, an intranet, or the internet.
[0052] Referring now to FIG. 9, a method of depositing a thin film
on a substrate is described. A flow chart 800 is used to illustrate
the steps in depositing the thin film in a deposition system of the
present invention. The thin film deposition begins in 810 with
placing a substrate in the deposition system for forming the thin
film on the substrate. For example, the deposition system can
include any one of the deposition systems 100, 100', 100''
described above in FIGS. 1, 3, and 5. The deposition system can
include a process chamber for facilitating the deposition process,
and a substrate holder coupled to the process chamber and
configured to support the substrate. Then, in 820, a film precursor
is introduced to the deposition system. For instance, the film
precursor is introduced to a film precursor vaporization system
coupled to and integrated with the process chamber.
[0053] In 830, a precursor valve system coupled to the film
precursor vaporization system is closed in order to prevent
precursor vapor from exiting the film precursor vaporization system
and entering the process chamber. In 840, the film precursor is
heated to form a precursor vapor in the film precursor vaporization
system. In 850, a carrier gas passes through, or over, the film
precursor while the film precursor is heated. In 860, the flow of
carrier gas is terminated. The termination of the flow of carrier
gas into the film precursor vaporization system may occur once a
pre-specified pressure is achieved within the film precursor
vaporization system.
[0054] In 870, the substrate is heated to a substrate temperature
sufficient to decompose the film precursor vapor. In 880, after a
period of time sufficient to permit stabilization of the pressure
and of the vaporization process in the film precursor vaporization
system, the precursor valve system is opened to permit introduction
of the precursor vapor to the process chamber and exposure of the
heated substrate to the film precursor vapor. Prior to opening the
precursor valve system and while the flow of carrier gas is
terminated, the carrier gas within the film precursor vaporization
system can become saturated with film precursor vapor. Given the
vaporization temperature, the film precursor vapor can achieve a
specific partial pressure within the volume of carrier gas. Once
saturated (i.e., the partial pressure is achieved), the amount of
film precursor vapor delivered to the substrate during exposure can
be determined. When the precursor valve system is opened to expose
the substrate to precursor vapor, the transport of the precursor
vapor and carrier gas already present in the film precursor
vaporization system may or may not be accompanied by an additional
flow of a carrier gas. Steps 810 to 880 may be repeated
successively a desired number of times to deposit a metal film on a
desired number of substrates.
[0055] Although only certain exemplary embodiments of this
invention have been described in detail above, those skilled in the
art will readily appreciate that many modifications are possible in
the exemplary embodiments without materially departing from the
novel teachings and advantages of this invention. Accordingly, all
such modifications are intended to be included within the scope of
this invention.
* * * * *