U.S. patent application number 10/986060 was filed with the patent office on 2006-05-18 for semiconductor device.
Invention is credited to Andreas Hilliger, Hiroshi Itokawa, Yoshinori Kumura, Bum-Ki Moon, Nicolas Nagel, Tohru Ozaki, Takamichi Tsuchiya, Koji Yamakawa.
Application Number | 20060102941 10/986060 |
Document ID | / |
Family ID | 36272271 |
Filed Date | 2006-05-18 |
United States Patent
Application |
20060102941 |
Kind Code |
A1 |
Itokawa; Hiroshi ; et
al. |
May 18, 2006 |
SEMICONDUCTOR DEVICE
Abstract
Disclosed is a semiconductor device comprising a semiconductor
substrate, a capacitor provided above the semiconductor substrate
and including a bottom electrode, a top electrode, and a dielectric
film provided between the bottom electrode and the top electrode,
the bottom electrode comprising a first conductive film containing
iridium, a second conductive film provided between the dielectric
film and the first conductive film and formed of a noble metal
film, a third conductive film provided between the dielectric film
and the second conductive film and formed of a metal oxide film
having a perovskite structure, and a diffusion prevention film
provided between the first conductive film and the second
conductive film and including at least one of a metal film and a
metal oxide film, the diffusion prevention film preventing
diffusion of iridium contained in the first conductive film.
Inventors: |
Itokawa; Hiroshi;
(Yokohama-shi, JP) ; Yamakawa; Koji; (Tokyo,
JP) ; Ozaki; Tohru; (Tokyo, JP) ; Kumura;
Yoshinori; (Yokohama-shi, JP) ; Tsuchiya;
Takamichi; (Yokohama-shi, JP) ; Nagel; Nicolas;
(Dresden, DE) ; Moon; Bum-Ki; (Poughkeepsie,
NY) ; Hilliger; Andreas; (Taipei-shi, TW) |
Correspondence
Address: |
FINNEGAN, HENDERSON, FARABOW, GARRETT & DUNNER;LLP
901 NEW YORK AVENUE, NW
WASHINGTON
DC
20001-4413
US
|
Family ID: |
36272271 |
Appl. No.: |
10/986060 |
Filed: |
November 12, 2004 |
Current U.S.
Class: |
257/295 ;
257/E21.009; 257/E21.664 |
Current CPC
Class: |
G11C 11/22 20130101;
H01L 28/65 20130101; H01L 28/55 20130101; H01L 27/11502 20130101;
H01L 27/11507 20130101 |
Class at
Publication: |
257/295 |
International
Class: |
H01L 29/94 20060101
H01L029/94 |
Claims
1. A semiconductor device comprising: a semiconductor substrate; a
capacitor provided above the semiconductor substrate and including
a bottom electrode, a top electrode, and a dielectric film provided
between the bottom electrode and the top electrode, the bottom
electrode comprising a first conductive film containing iridium, a
second conductive film provided between the dielectric film and the
first conductive film and formed of a noble metal film, a third
conductive film provided between the dielectric film and the second
conductive film and formed of a metal oxide film having a
perovskite structure, and a diffusion prevention film provided
between the first conductive film and the second conductive film
and including at least one of a metal film and a metal oxide film,
the diffusion prevention film preventing diffusion of iridium
contained in the first conductive film.
2. The semiconductor device according to claim 1, wherein the metal
film included in the diffusion prevention film contains at least
one of Ti, V, W, Zr, Co, Mg, Hf, Mo, Mn, Ta, Nb, Pb, and Al.
3. The semiconductor device according to claim 1, wherein the metal
oxide film included in the diffusion prevention film contains at
least one of Ti, V, W, Zr, Co, Mg, Hf, Mo, Mn, Ta, Nb, Pb, Al, and
Ru.
4. The semiconductor device according to claim 1, wherein the first
conductive film includes at least one of an iridium film and an
iridium oxide film.
5. The semiconductor device according to claim 1, wherein the
second conductive film includes at least one of a platinum film and
a ruthenium film.
6. The semiconductor device according to claim 1, wherein the metal
oxide film included in the third conductive film contains at least
one of Ru, Co, and Ni.
7. The semiconductor device according to claim 1, wherein the metal
oxide film included in the third conductive film is selected from
an SrRuO.sub.3 film, an (La,Sr)CoO.sub.3 film, a BaRuO.sub.3 film,
and an LaNiO.sub.3 film.
8. The semiconductor device according to claim 1, wherein the
dielectric film includes a ferroelectric film.
9. The semiconductor device according to claim 8, wherein the
ferroelectric film is selected from a compound film having a
perovskite structure and a compound film having a Bi aurivillius
phase structure.
10. The semiconductor device according to claim 1, further
comprising a plug which is connected to the bottom electrode and on
which the capacitor is formed.
11. The semiconductor device according to claim 10, further
comprising a transistor provided on the semiconductor substrate and
electrically connected to the plug.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates to a semiconductor device
having a capacitor.
[0003] 2. Description of the Related Art
[0004] In recent years, many efforts have been made to develop
ferroelectric memories using a ferroelectric film as a dielectric
film of a capacitor, that is, FeRAMs (Ferroelectric Random Access
Memories).
[0005] A typical ferroelectric film used for a ferro-electric
memory is a Pb(Zr.sub.xTi.sub.1-x)O.sub.3 film (PZT film) or an
SrBi.sub.2Ta.sub.2O.sub.9 film (SBT film). The PZT is a perovskite
compound, and the SBT is a Bi aurivillius phase compound having a
quasi-perovskite structure.
[0006] If for example, a PZT film is used as a ferro-electric film,
electrodes are composed of conductive perovskite type metal oxide
films such as SrRuO.sub.3 films (SRO films) or the like in order
to, for example, improve their fatigue characteristic. For example,
Jpn. Pat. Appln. KOKAI Publication No. 2000-208725 and Jpn. Pat.
Appln. KOKAI Publication No. 2000-260954 describe ferroelectric
capacitors having electrodes each made of a stacked film composed
of an SRO film and a Pt film.
[0007] Further, what is called a COP (Capacitor On Plug) structure
has been proposed in which a capacitor is formed on a plug in order
to increase the degree of integration of the ferroelectric memory.
In the COP structure, to prevent the plug from being oxidized by
thermal treatment, a bottom electrode of the capacitor is partly
composed of an Ir film or Ir oxide film, which has an excellent
oxygen barrier characteristic.
[0008] However, with this structure, Ir disadvantageously diffuses
through the conductive perovskite type metal oxide film or a
capacitor dielectric film, which degrades the characteristics or
reliability of the capacitor. For example, Ir may react with Pb in
the PZT film to form a conductive oxide, which increases a leak
current of the capacitor or Ir may react with Sr in the SRO film to
degrade the crystallinity of the SRO film, which degrades the
characteristics or reliability of a dielectric film on the SRO
film.
[0009] Thus, a problem with the conventional capacitor is that the
diffusion of Ir may degrade the characteristics or reliability of
the capacitor.
BRIEF SUMMARY OF THE INVENTION
[0010] According to an aspect of the present invention, there is
provided a semiconductor device comprising a semiconductor
substrate; a capacitor provided above the semiconductor substrate
and including a bottom electrode, a top electrode, and a dielectric
film provided between the bottom electrode and the top electrode,
the bottom electrode comprising a first conductive film containing
iridium, a second conductive film provided between the dielectric
film and the first conductive film and formed of a noble metal
film, a third conductive film provided between the dielectric film
and the second conductive film and formed of a metal oxide film
having a perovskite structure, and a diffusion prevention film
provided between the first conductive film and the second
conductive film and including at least one of a metal film and a
metal oxide film, the diffusion prevention film preventing
diffusion of iridium contained in the first conductive film.
BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING
[0011] FIGS. 1 to 3 are sectional views schematically showing a
method of manufacturing a semiconductor device according to a first
embodiment of the present invention;
[0012] FIG. 4 is a graph showing a hysteresis characteristic of a
capacitor according to the first embodiment of the present
invention;
[0013] FIG. 5 is a graph showing a hysteresis characteristic of a
capacitor according to a comparative example of the first
embodiment of the present invention;
[0014] FIG. 6 is a graph showing the diffusion of iridium according
to the first embodiment of the present invention;
[0015] FIG. 7 is a graph showing the diffusion of iridium according
to a comparative example of the first embodiment of the present
invention; and
[0016] FIG. 8 is a sectional view schematically showing a part of a
method of manufacturing a semiconductor device according to a
second embodiment of the present invention.
DETAILED DESCRIPTION OF THE INVENTION
[0017] Embodiments of the present invention will be described below
with reference to the drawings.
EMBODIMENT 1
[0018] FIGS. 1 to 3 are sectional views schematically showing a
method of manufacturing a semiconductor device according to a first
embodiment of the present invention.
[0019] First, as shown in FIG. 1, an isolation region 101 of an STI
(Shallow Trench Isolation) structure is formed on a p-type silicon
substrate (semiconductor substrate) 100. Subsequently, an MIS
transistor is formed as described below.
[0020] First, as a gate insulating film 102, a silicon oxide film
of thickness about 6 nm is formed by thermal oxidization.
Subsequently, arsenic-doped n.sup.+ type poly-silicon film 103 is
formed on the gate insulating film 102. Moreover, a WSi.sub.x film
104 and a silicon nitride film 105 are formed on the polysilicon
film 103. Subsequently, the polysilicon film 103, the WSi.sub.x
film 104, and the silicon nitride film 105 are processed by a
normal photo lithography process and a normal RIE process to form a
gate electrode. Subsequently, a silicon nitride film 106 is
deposited all over the surface of the resulting structure.
Moreover, RIE is carried out to form side wall spacers formed of
the silicon nitride film 106, on side walls of the gate electrode.
Although not described in detail, in the present step, source/drain
regions 107 are formed by ion implantation and thermal
treatment.
[0021] Then, as shown in FIG. 2, a CVD (Chemical Vapor Deposition)
process is used to deposit a silicon oxide film 108 all over the
surface of the resulting structure. Further, a CMP process is used
to execute a flattening process. Subsequently, a contact hole is
formed through the silicon oxide film 108 so as to reach one of the
source/drain regions 107. Then, a sputtering process or the CVD
process is used to deposit a titanium film. Subsequently, the
titanium film is nitrided by thermal treatment in a foaming gas to
form a TiN film 110. Moreover, the CVD process is used to deposit a
tungsten film 111. Subsequently, the CMP process is used to remove
the TiN film 110 and tungsten film 111 from outside the contact
hole, while leaving the TiN film 110 and the tungsten film 111 in
the contact hole. This forms a plug connected to one of the
source/drain regions 107. Then, the CVD process is used to deposit
a silicon nitride film 112 all over the surface of the resulting
structure. Furthermore, a control hole is formed so as to reach the
other source/drain region 107. Subsequently, a method similar to
that described above is used to form a TiN film 114 and a tungsten
film 115 in the contact hole. This forms a plug connected to the
other source/drain region 107.
[0022] Then, as shown in FIG. 3, a titanium (Ti) film 116 of
thickness about 10 nm is deposited by the sputtering process.
Subsequently, as a first conductive film 117, an iridium (Ir) film
117a of about 100 nm thickness and an iridium oxide (IrO.sub.2)
film 117b of about 50 nm thickness are sequentially deposited by
the sputtering process. The iridium film 117a and the iridium oxide
film 117b have an excellent oxygen barrier characteristic and can
thus prevent the oxidization of the plug 115 during the subsequent
thermal treatment step. Subsequently, as a diffusion prevention
film 118, a titanium (Ti) film 118a of thickness about 2.5 nm is
deposited by the sputtering process. The titanium film 118a
prevents the upward diffusion of the iridium contained in the
iridium film 117a and iridium oxide film 117b. Subsequently, as a
second conductive film, a platinum (Pt) film 119 of thickness about
50 nm is deposited by the sputtering process. Moreover, as a third
conductive film, an SrRuO.sub.3 film (SRO film) 120 of thickness
about 10 nm is deposited by the sputtering process. Subsequently,
the SRO film 120 is crystallized by RTA (Rapid Thermal Annealing)
in an oxygen atmosphere. The SRO film 120 with an excellent
crystallinity can be easily formed by depositing the film at a
temperature of, for example, 500.degree. C.
[0023] Then, as a dielectric film (ferroelectric film) of the
capacitor, a Pb(Zr.sub.xTi.sub.1-x)O.sub.3 film (PZT film) 121
having a thickness of about 130 nm is formed by the sputtering
process. Moreover, the PZT film 121 is crystallized by RTA in an
oxygen atmosphere.
[0024] Then, an SRO film 122 having a thickness of about 10 nm is
deposited by the sputtering process. Moreover, the SRO film 122 is
crystallized by RTA in an oxygen atmosphere. The SRO film 122 with
an excellent crystallinity can be easily formed by depositing the
film at a temperature of, for example, 500.degree. C. Furthermore,
a platinum film 123 of thickness about 50 nm is deposited by the
sputtering process.
[0025] Then, the CVD process is used to deposit a silicon oxide
film (not shown) all over the surface of the resulting structure.
Moreover, the photo lithography process and the RIE process are
used to pattern the silicon oxide film. Subsequently, the patterned
silicon oxide film is used as a mask to etch the platinum film 123,
the SRO film 122, and the PZT film 121 by the RIE process.
Furthermore, the photo lithography process and the RIE process are
used to pattern the SRO film 120, the platinum film 119, the
titanium film 118a, the iridium oxide film 117b, the iridium film
117a, and the titanium film 116.
[0026] In this manner, a ferroelectric capacitor is formed which
comprises a bottom electrode having the titanium film 116, the
iridium 117a, the iridium oxide film 117b, the titanium film 118a,
the platinum film 119, and the SRO film 120, a dielectric film
formed of the PZT film 121, and a top electrode having the SRO film
122 and the platinum film 123.
[0027] Then, the CVD process is used to deposit a silicon oxide
film 124 all over the surface of the ferroelectric capacitor.
Subsequently, to recover from damage done to the PZT film 121
during etching, the capacitor is thermally treated at a temperature
of about 650.degree. C. in an oxygen atmosphere. During the thermal
treatment, the tungsten plug 115 is prevented from being oxidized
because the surface of the tungsten plug 115 is covered with the
iridium film 117a and iridium oxide film 117b, which have an
excellent oxygen barrier characteristic. Further, since the
titanium film 118a is formed on the iridium oxide film 117b, it
blocks the diffusion of the iridium contained in the iridium film
117a and iridium oxide film 117b. It is thus possible to prevent
the iridium from diffusing to the SRO film 120 and the PZT film 121
through the platinum film 119.
[0028] The subsequent steps are not shown. A ferroelectric memory
having a COP (Capacitor On Plug) structure is completed by
subsequently forming a contact connected to the tungsten film 111,
drive lines and bit lines, metal interconnects, and the like.
[0029] FIG. 4 is a graph showing the hysteresis characteristic of a
capacitor formed using a process similar to the above described
process. The axis of abscissa indicates a voltage applied to the
capacitor, while the axis of ordinate indicates the polarization of
the capacitor. FIG. 5 is a graph showing the hysteresis
characteristic of a capacitor according to a comparative example.
The capacitor according to the comparative example is not provided
with any diffusion prevention film (corresponding to the titanium
film 118a, shown in FIG. 3).
[0030] Comparison of FIG. 4 (present embodiment) with FIG. 5
(comparative example) clearly indicates that the capacitor
according to the present embodiment has a markedly improved
hysteresis characteristic compared to the capacitor of the
comparative example.
[0031] FIG. 6 is a graph showing the results of SIMS analysis of
the sample according to the present embodiment. FIG. 7 is a graph
showing the results of SIMS analysis of the sample according to a
comparative example of the present embodiment. The axis of abscissa
indicates depth, while the axis of ordinate indicates a secondary
ion count. For the sample according to the present embodiment, the
following films were sequentially formed on a silicon oxide film on
a silicon substrate: a titanium film of thickness about 10 nm, an
iridium film of thickness about 100 nm, an iridium oxide film of
thickness about 50 nm, a titanium film of thickness about 2.5 nm,
and a platinum film of thickness about 100 nm. The resulting
structure was then thermally treated at a temperature of about
650.degree. C. in an oxygen atmosphere for 60 minutes. For the
sample according to the comparative example, the following films
were sequentially formed on a silicon oxide film on a silicon
substrate: a titanium film of thickness about 10 nm, an iridium
film of thickness about 100 nm, an iridium oxide film of thickness
about 50 nm, and a platinum film of thickness about 100 nm. The
resulting structure was then thermally treated at a temperature of
about 650.degree. C. in an oxygen atmosphere for 60 minutes.
[0032] Comparison of FIG. 6 (present embodiment) with FIG. 7
(comparative example) clearly indicates that the sample according
to the present embodiment significantly suppresses the diffusion of
iridium into the platinum film. This is considered to result in a
favorable hysteresis characteristic such as the one shown in FIG.
4.
[0033] As described above, according to the present embodiment, the
titanium film 118a (diffusion prevention film), which acts as an
effective barrier for the diffusion of the iridium, is provided
between the platinum film 119 (second conductive film) and the
stacked film (first conductive film) made of the iridium film 117a
and the iridium oxide film 117b. This makes it possible to prevent
the iridium from diffusing to the SRO film 120 (third conductive
film) and PZT film 121 (dielectric film) through the platinum film
119. It is in turn possible to suppress the reaction of the iridium
with elements contained in the SRO film or the reaction of the
iridium with elements contained in the PZT film. Consequently, the
degradation of the SRO and PZT films can be prevented. It is
therefore possible to obtain a favorable SRO and PZT films and thus
a reliable capacitor with very excellent characteristics.
[0034] In general, the iridium oxide film does not exhibit the
(111) orientation. Accordingly, if the platinum film is formed
directly on the iridium oxide film, it also does not exhibit a
favorable (111) orientation. It is thus not easy to obtain an SRO
film or PZT film having a favorable (111) orientation. In the
present embodiment, the titanium film is formed between the iridium
oxide film and the platinum film. This allows the platinum film to
be easily (111) oriented, thus making it possible to obtain an SRO
and PZT films having a favorable (111) orientation. It is therefore
possible to obtain a favorable SRO and PZT films and thus a
reliable capacitor with excellent characteristics.
EMBODIMENT 2
[0035] FIG. 8 is a sectional view schematically showing a method of
manufacturing a semiconductor device according to a second
embodiment of the present invention. The steps executed before the
steps of forming a capacitor are similar to those shown in FIGS. 1
and 2 for the first embodiment.
[0036] After the step shown in FIG. 2 for the first embodiment, the
titanium film 116 of thickness about 10 nm is deposited by the
sputtering process as shown in FIG. 8. Subsequently, as the first
conductive film 117, the iridium (Ir) film 117a of about 100 nm
thickness, and the iridium oxide (IrO.sub.2) film 117b of about 50
nm thickness are sequentially deposited by the sputtering process.
Subsequently, as a diffusion prevention film, the titanium (Ti)
film 118a of thickness about 2.5 nm and the SrRuO.sub.3 film (SRO
film) 118b of thickness about 10 nm are sequentially deposited by
the sputtering process. The titanium film 118a and the SRO film
118b prevent the upward diffusion of the iridium contained in the
iridium film 117a and iridium oxide film 117b. Then, the SRO film
118b is crystallized by RTA in an oxygen atmosphere. Subsequently,
as a second conductive film, the platinum (Pt) film 119 of
thickness about 50 nm is deposited by the sputtering process.
Moreover, as a third conductive film, an SRO film 120 of thickness
about 10 nm is deposited by the sputtering process. Subsequently,
the SRO film 120 is crystallized by RTA in an oxygen atmosphere.
The SRO film 120 with an excellent crystallinity can be easily
formed by depositing the film at a temperature of, for example,
500.degree. C.
[0037] Then, as a dielectric film (ferroelectric film) of the
capacitor, a Pb(Zr.sub.xTi.sub.1-x)O.sub.3 film (PZT film) 121
having a thickness of about 130 nm is formed by the sputtering
process. Moreover, the PZT film 121 is crystallized by RTA in an
oxygen atmosphere.
[0038] Then, an SRO film 122 having a thickness of about 10 nm is
deposited by the sputtering process. Moreover, the SRO film 122 is
crystallized by RTA in an oxygen atmosphere. The SRO film 122 with
an excellent crystallinity can be easily formed by depositing the
film at a temperature of, for example, 500.degree. C. Furthermore,
a platinum film 123 of thickness about 50 nm is deposited by the
sputtering process.
[0039] Then, the CVD process is used to deposit a silicon oxide
film (not shown) all over the surface of the resulting structure.
Moreover, the photo lithography process and the RIE process are
used to pattern the silicon oxide film. Subsequently, the patterned
silicon oxide film is used as a mask to etch the platinum film 123,
the SRO film 122, and the PZT film 121 by the RIE process.
Furthermore, the photo lithography process and the RIE process are
used to pattern the SRO film 120, the platinum film 119, the SRO
film 118b, the titanium film 118a, the iridium oxide film 117b, the
iridium film 117a, and the titanium film 116.
[0040] In this manner, a ferroelectric capacitor is formed which
comprises a bottom electrode having the titanium film 116, the
iridium film 117a, the iridium oxide film 117b, the titanium film
118a, the SRO film 118b, the platinum film 119, and the SRO film
120, the dielectric film formed of the PZT film 121, and a top
electrode having the SRO film 122 and the platinum film 123.
[0041] Then, the CVD process is used to deposit a silicon oxide
film 124 all over the surface of the ferroelectric capacitor.
Subsequently, to recover from damage done to the PZT film 121
during etching, the capacitor is thermally treated at a temperature
of about 650.degree. C. in an oxygen atmosphere. During the thermal
treatment, the tungsten plug 115 is prevented from being oxidized
because the surface of the tungsten plug 115 is covered with the
iridium film 117a and iridium oxide film 117b, which have an
excellent oxygen barrier characteristic. Further, since the stacked
film of the titanium film 118a and SRO film 118b is formed on the
iridium oxide film 117b, the titanium film 118a and the SRO film
118b suppress the diffusion of the iridium contained in the iridium
film 117a and iridium oxide film 117b. It is thus possible to
prevent the iridium from diffusing to the SRO film 120 and the PZT
film 121 through the platinum film 119. The effect of the SRO film
118b in suppressing the diffusion of iridium is mainly based on the
reaction of iridium with the SRO film 118b. Specifically, upon
reacting with the SRO film 118b, the iridium is consumed and thus
prevented from diffusing upward. The reaction with the iridium may
degrade the crystallinity of the SRO film 118b. However, the SRO
film 118b does not contact with the PZT film 121. Consequently, the
degraded crystallinity of the SRO film 118b does not substantially
affect the PZT film 121 or the like.
[0042] The subsequent steps are not shown. A ferroelectric memory
having the COP structure is completed by subsequently forming a
contact connected to the tungsten film 111, drive lines and bit
lines, metal interconnects, and the like.
[0043] As described above, according to the present embodiment, the
stacked film (diffusion prevention film) of the titanium film 118a
and SRO film 118b is provided between the platinum film 119 (second
conductive film) and the stacked film (first conductive film) made
of the iridium film 117a and the iridium oxide film 117b. Thus, as
in the case of the first embodiment, it is possible to obtain a
favorable SRO and PZT films and thus a reliable capacitor with
excellent characteristics.
[0044] Various changes may be made to the above first and second
embodiments as described below.
[0045] The diffusion prevention film that prevents the diffusion of
the iridium may be a metal film containing at least one of Ti, V,
W, Zr, Co, Mg, Hf, Mo, Mn, Ta, Nb, Pb, and Al. Alternatively, it
may be a metal oxide film containing at least one of Ti, V, W, Zr,
Co, Mg, Hf, Mo, Mn, Ta, Nb, Pb, Al, and Ru. Alternatively, it may
be a stacked film of the above metal film and metal oxide film. The
metal oxide film may typically be a TiO.sub.2 film, a ZrO.sub.2
film, a CoO.sub.2 film, PbO.sub.2 film, Al.sub.2O.sub.3 film, an
SRO film, an Sr(Ru,Ti)O.sub.3 film, or the like. The stacked film
of the metal film and metal oxide film may typically be a Ti/SRO
film, a Ti/Sr(Ru,Ti)O.sub.3 film, a Co/SRO film, a
Co/Sr(Ru,Ti)O.sub.3 film, or the like.
[0046] The first conductive film may be a single film of iridium
(Ir), a single film of iridium oxide (IrO.sub.2), or a stacked film
of the iridium film and iridium oxide film.
[0047] The second conductive film may be a noble metal film
including at least one of a platinum film and a ruthenium film.
[0048] The third conductive film may be a conductive metal oxide
film having a perovskite crystal structure (general formula:
ABO.sub.3) and containing at least one of Ru, Co, and Ni.
Typically, the third conductive film may be an SrRuO.sub.3 film, a
(La,Sr)CoO.sub.3 film, a BaRuO.sub.3 film, an LaNiO.sub.3 film, or
the like.
[0049] The dielectric film may be a compound film having a
perovskite structure or a Bi aurivillius phase structure. It may
typically be a Pb(Zr.sub.xTi.sub.1-x)O.sub.3 film (PZT film), an
SrBi.sub.2Ta.sub.2O.sub.9 film (SBT film), or the like.
[0050] The plug may be a tungsten plug or a polysilicon plug.
[0051] The diffusion prevention film, the first conductive film,
the second conductive film, the third conductive film, and the
dielectric film may be formed using the sputtering process, the CVD
process, or a sol-gel process.
[0052] Additional advantages and modifications will readily occur
to those skilled in the art. Therefore, the invention in its
broader aspects is not limited to the specific details and
representative embodiments shown and described herein. Accordingly,
various modifications may be made without departing from the spirit
or scope of the general inventive concept as defined by the
appended claims and their equivalents.
* * * * *