U.S. patent application number 11/246348 was filed with the patent office on 2006-02-09 for method for forming metal contacts on a substrate.
Invention is credited to Salman Akram.
Application Number | 20060027632 11/246348 |
Document ID | / |
Family ID | 23537751 |
Filed Date | 2006-02-09 |
United States Patent
Application |
20060027632 |
Kind Code |
A1 |
Akram; Salman |
February 9, 2006 |
Method for forming metal contacts on a substrate
Abstract
Solder bump pads are formed on a semiconductor substrate by way
of a semiconductor template that has been micromachined to receive
solder paste material. The solder paste material is then formed
into precisely controlled ball shapes and geometries.
Inventors: |
Akram; Salman; (Boise,
ID) |
Correspondence
Address: |
TRASK BRITT
P.O. BOX 2550
SALT LAKE CITY
UT
84110
US
|
Family ID: |
23537751 |
Appl. No.: |
11/246348 |
Filed: |
October 7, 2005 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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10639348 |
Aug 12, 2003 |
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11246348 |
Oct 7, 2005 |
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09942246 |
Aug 29, 2001 |
6612027 |
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10639348 |
Aug 12, 2003 |
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09389316 |
Sep 2, 1999 |
6295730 |
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09942246 |
Aug 29, 2001 |
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Current U.S.
Class: |
228/180.22 ;
228/180.21; 257/E21.508; 29/840; 427/282 |
Current CPC
Class: |
H01L 21/6835 20130101;
H05K 2203/043 20130101; H05K 3/3485 20200801; H01L 2924/014
20130101; H01L 2224/11334 20130101; H01L 2924/181 20130101; H01L
2924/01015 20130101; H01L 2924/01079 20130101; Y10T 29/49155
20150115; H01L 24/11 20130101; H05K 3/3478 20130101; Y10T 29/49117
20150115; H01L 2224/11003 20130101; H01L 2924/01029 20130101; H01L
2924/01049 20130101; H05K 2203/0338 20130101; H01L 2924/01005
20130101; H01L 2924/01322 20130101; H01L 2924/01057 20130101; H01L
2924/15787 20130101; Y10T 29/49147 20150115; H01L 2224/16 20130101;
H01L 2924/14 20130101; Y10T 29/49126 20150115; H01L 2924/00013
20130101; H01L 2924/01082 20130101; Y10T 29/49144 20150115; Y10T
29/49165 20150115; H01L 2924/01006 20130101; Y10T 29/49128
20150115; H01L 2924/01033 20130101; H01L 2924/01047 20130101; Y10T
29/49149 20150115; H01L 2224/13099 20130101; H01L 2924/00013
20130101; H01L 2224/29099 20130101; H01L 2924/15787 20130101; H01L
2924/00 20130101; H01L 2924/181 20130101; H01L 2924/00
20130101 |
Class at
Publication: |
228/180.22 ;
029/840; 228/180.21; 427/282 |
International
Class: |
B23K 31/02 20060101
B23K031/02; B05D 1/32 20060101 B05D001/32 |
Claims
1. A method of forming at least one of solder bump and a trace
comprising: providing a protective layer to a portion of the
surface of a substrate; removing a portion of the protective layer
for forming at least one opening in the protective layer; forming
at least one cavity in the substrate using the at least one opening
in the protective layer for holding material for forming at least
one of a solder bump and a trace; providing a nonstick protective
layer in the at least one cavity; and providing a heating area on
another surface of the substrate.
2. The method according to claim 1, wherein the protective layer
comprises one of a silicon oxide layer and a silicon nitride
layer.
3. The method according to claim 1, wherein the protective layer
prevents metal material from adhering to the at least one
cavity.
4. The method according to claim 1, further comprising: applying a
metal paste for forming the bump on the substrate; spreading the
metal paste across the surface within the at least one cavity;
heating the substrate to a temperature sufficient enough to
partially melt the metal paste; and removing the metal paste from
within the at least one cavity upon contacting a portion of a
substrate.
5. The method according to claim 4, further comprising: applying
the mold to a secondary substrate; using the partially melted metal
paste to form a contact with the secondary substrate; and removing
the secondary substrate from the mold, the melted metal paste
adhering solely to the secondary substrate.
6. The method according to claim 1, wherein the at least one cavity
includes one of a trapezoidally shaped cavity, a hemispherically
shaped cavity, a rectangularly shaped cavity, and a square-shaped
cavity.
7. The method according to claim 1, further comprising providing at
least one heating strip on a portion of the substrate.
8. The method according to claim 1, further comprising: providing a
plurality of heating strips on the another surface of the
substrate.
9. The method according to claim 7, further comprising: providing
an electrical conductor having a portion connected to the at least
one heating strip.
10. The method according to claim 8, further comprising: providing
an electrical conductor having a portion thereof connected to the
plurality of heating strips.
11. A method for forming metal shapes including at least one bump
and at least on trace, comprising: applying a protective layer to a
surface of a mold for forming at least one bump and at least one
trace on a substrate; masking the protective layer; removing at
least a portion of the protective layer to form at least one
opening in the protective layer; forming at least one cavity in the
mold through the at least one opening in the protective layer;
forming a nonstick protective layer in the at least one cavity;
applying a material to the mold; spreading the material across the
surface of the mold within the at least one cavity; heating the
mold to a temperature sufficient enough to remove the material from
the at least one cavity; and removing the material from the at
least one cavity.
12. The method according to claim 11, further comprising: applying
the mold to the substrate; and removing the substrate from the
mold, the material adhering substantially to the substrate.
13. The method according to claim 11, wherein the at least one
cavity includes one of a trapezoidally shaped cavity, a
hemispherically shaped cavity, a rectangularly shaped cavity, and a
square-shaped cavity.
14. The method according to claim 11, wherein heating the mold
includes using at least one heating strip comprising a resistance
heating strip.
15. The method according to claim 11, further comprising: forming a
plurality of heating strips on the another surface of the mold.
16. The method according to claim 11, further comprising: forming
an electrical conductor having a portion connected to the mold.
17. The method according to claim 15, further comprising: forming
an electrical conductor having a portion thereof connected to the
plurality of heating strips.
18. A method of forming at least one bump and at least one trace on
substrate using a mold, comprising: applying a protective layer to
a surface of said mold for forming bumps on a substrate; masking
the protective layer; removing a portion of the protective layer to
form at least one opening in the protective layer; forming at least
one cavity in the mold through the at least one opening in the
protective layer, the at least one cavity for holding material to
form a bump on the substrate, the cavity having at least one wall
thereof sloped at essentially 54.degree. relative to the plane of
the substrate mold; forming a nonstick protective layer in the at
least one cavity; and forming at least one heating strip on another
surface of the mold.
19. A method for forming a bump and a trace using a mold,
comprising: applying a protective layer to a surface of said mold
for forming bumps on a substrate; masking the protective layer;
removing at least a portion of the protective layer to form at
least one opening in the protective layer; forming at least one
cavity in the mold through the at least one opening in the
protective layer, the cavity having at least one wall thereof
sloped at essentially 54.degree. relative to the plane of the
substrate mold; forming a nonstick protective layer in the at least
one cavity; applying a material to the mold; spreading the material
across the surface of the mold within the at least one cavity;
heating the mold to a temperature sufficient enough for removing
the material from the at least one cavity; and removing the
material from the at least one cavity.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation of application Ser. No.
10/639,348, filed Aug. 12, 2003, pending, which is a continuation
of application Ser. No. 09/942,246, filed Aug. 29, 2001, now U.S.
Pat. No. 6,612,027, issued Sep. 2, 2003, which is a continuation of
application Ser. No. 09/389,316, filed Sep. 2, 1999, now U.S. Pat.
No. 6,295,730, issued Oct. 2, 2001.
BACKGROUND OF THE INVENTION
[0002] The present invention relates generally to forming contacts
on a semiconductor substrate and, more specifically, to the
formation of metal bump contacts or connectors on a semiconductor
substrate using micromachining techniques.
[0003] Recent advances in data processing devices and memory
circuits have resulted in the implementation of very large scale
integrated circuits (VLSI) and even ultra large scale integrated
circuits (ULSI). These VLSI and ULSI circuits are fabricated on
semiconductor chips that include integrated circuits and other
electrical parts. In order to mount a semiconductor chip to a
carrier substrate, such as a printed circuit board or a ceramic
substrate, solder bumps are arranged onto one of the semiconductor
chip and the carrier substrate so that the semiconductor chip can
be mechanically and electrically connected via metallurgical
processes by melting the solder bumps.
[0004] One approach to applying and forming solder bumps and a
carrier substrate is to use a solder paste. The solder paste is
printed onto the carrier substrate and leads extending from the
semiconductor chip are placed on the solder paste on the carrier
substrate. The structure is then heated to cause the solder in the
solder paste to melt so that the semiconductor chip can be
mechanically and electrically connected to the carrier substrate.
To place the solder paste onto the carrier substrate, a metal mask
with predetermined openings is typically used. The solder paste is
applied to the surface of the metal mask and a wiper is moved
across the surface of the mask, thus pushing the solder paste
through the openings of the metal mask onto the surface of the
carrier substrate. Such masks are typically referred to as
stencils.
[0005] Unfortunately, as the critical dimensions of the integrated
circuits become smaller and smaller, the amount of solder paste
that can be pressed through a given stencil becomes smaller and the
placement of the solder paste becomes even more difficult.
Additionally, with the smaller critical dimensions, the stencil
mask becomes even more difficult to clean for a subsequent solder
paste application as well as being subject to high rates of wear
because of the constant placement of the stencil, application of
the paste to the stencil, and removal and cleaning of the
stencil.
[0006] Another method of placing conductive contacts for connecting
the semiconductor chip to the carrier substrate has been to use
preformed solder balls that are placed directly upon either the
carrier substrate or the semiconductor chip with precisely
controlled placement. Once the solder balls are in place, the
solder balls are subjected to heat to cause a partial reflow so
that the solder balls adhere to the solder pad. Unfortunately, in
this process, as the critical dimensions of the features on the
semiconductor chip tend to decrease, significant disadvantages
become apparent in using this type of technique. One disadvantage
is that the processing costs due to the limited process reliability
and the speed of the pick and place nature of the transfer process
become more evident. Another disadvantage is that the physical
handling and placement of the solder balls by the machine dictates
the minimum spacing allowed between solder bumps on a semiconductor
chip or carrier substrate and, thus, requires a semiconductor chip
that would be larger than otherwise necessary for the desired VLSI
or ULSI circuitry.
[0007] Additional problems involve the uniformity of the preformed
solder balls. At smaller and smaller ball sizes, the average
diameter of the preformed solder ball may vary greatly from the
desired diameter of the preformed solder ball. This wide
discrepancy in uniformity can lead to several problems. Preformed
solder balls not only cannot be applied where desired, but when a
too large or too small preformed solder ball is placed upon a pad,
after the formation of a connection using such a preformed solder
ball, typically the location will be noted as either having several
bad connections surrounding a ball that is too large or having a
defective connection where a ball is too small. Large diameter
preformed solder balls tend to prevent adjacent acceptable
preformed solder balls from mechanically and electrically
connecting between the carrier substrate and the semiconductor
chip. Small diameter preformed solder balls are not large enough in
diameter to connect to either of the two structures since the
adjacent acceptable preformed solder balls are larger in diameter
than the smaller ball, which can only touch one of the two
surfaces.
[0008] Yet another technique has been developed that uses a method
for forming solder balls on a semiconductor plate having apertures.
One such technique is described in U.S. Pat. No. 5,643,831,
entitled "Process for Forming Solder Balls on a Plate Having
Apertures Using Solder Paste and Transferring the Solder Ball to
Semiconductor Device, the '831 patent" issued Jul. 1, 1997. The
'831 patent discloses a method for fabricating a semiconductor
device using a solder ball-forming plate having cavities. Solder
paste is placed in the cavities using a solder paste application,
such as a squeegee. Once the cavities are filled with solder paste,
the solder ball-forming plate is heated to form solder balls in the
cavities while the plate is in an inclined position. The solder
balls are then transferred from the plate to a semiconductor
chip.
[0009] The solder ball-forming plate is fabricated from a
semiconductor material such as silicon, according to the following
method. Initially, a substantially uniform flat surface is formed
on the plate. Next, a plurality of cavities is formed in the flat
surface of the plate. The cavities are formed by etching the
semiconductor materials after a mask has been formed on the flat
surface, each cavity having the shape of a precisely formed rhombus
or parallelogram.
[0010] Yet another example of using a solder ball-forming plate is
disclosed in U.S. Pat. No. 5,607,099, entitled "Solder Bump
Transfer Device for Flip-Chip Integrated Circuit Devices, the '099
patent" issued Mar. 4, 1997. The '099 patent discloses a carrier
device that has cavities formed in its surface for receiving and
retaining solder material. The solder material can then be
transferred to a flip-chip as solder bumps. The cavities are
located on the surface of the carrier device such that the location
of the solder material corresponds to the desired solder bump
locations on the flip-chip when the carrier device is placed in
alignment with the flip chip. The size of the cavities can be
controlled in order to deliver a precise quantity of solder
material to the flip-chip. Further, in the '099 patent, the
apertures are fabricated so that they have a width of about 300
.mu.m at the surface of the die and a width of about 125 .mu.m at
its base surface. Meanwhile, in the '831 patent, the rhombus-shaped
cavities are designed to produce a ball size of about 100 .mu.m in
diameter. Unfortunately, both of these structures cannot yet
produce a ball size for a solder ball that approaches the
dimensions currently required in placing a semiconductor chip upon
a carrier substrate using the flip-chip technology. Additionally,
the solder ball-forming cavities are limited in shape.
[0011] Accordingly, it would be advantageous to overcome the
problems of producing and using solder balls having uniform sizes
as have been shown in the prior art approaches of utilizing
preformed solder balls or to use metal masks or stencils to apply
solder paste for reflow into solder balls. Additionally, it would
be advantageous to make even smaller, more precisely formed solder
balls than is possible in the prior art as well as to fabricate
metal traces during the same step as that of forming solder balls
using a solder ball-forming plate.
[0012] Not only would it be advantageous to overcome the problems
of producing uniform solder ball sizes for use in connecting a
device to a substrate, but it would also be beneficial to provide a
way of greatly improving the precision with which solder
connections are made in alignment.
BRIEF SUMMARY OF THE INVENTION
[0013] According to the present invention, metal traces and solder
bump pads are formed on a semiconductor substrate by way of a
semiconductor template that has been micromachined to receive
solder paste material. The solder paste material is then formed
into precisely controlled ball shapes and metal trace geometries.
First, a semiconductor substrate is covered with a mask material
for protecting selected surfaces of the substrate that are not to
be etched. Next, a mask is applied in order to anisotropically etch
the substrate surface below. Solder ball sites and metal trace
channels are formed at this time. A solder nonwettable material is
applied to the exposed surfaces of the solder ball sites and the
metal trace channels. A solder paste can then be applied uniformly
across the surface of the substrate, thus filling in any sites and
channels, or both, that are used to form the desired balls. The
semiconductor template is then applied solder side to a second
substrate so that the solder balls and traces can be applied
directly on the second substrate, the solder balls being
subsequently formed on the second substrate by the heating thereof
to form the solder paste into a solder ball.
BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS
[0014] FIGS. 1A-D illustrate a cross-sectional view of steps used
in forming solder-receiving holes and channels in a substrate mold
according to the present invention;
[0015] FIG. 2 depicts a surface of the substrate mold having a
plurality of cavities formed therein;
[0016] FIG. 3 illustrates the application of solder paste to the
cavities and traces of the substrate mold of FIG. 2;
[0017] FIG. 4 depicts the formation of solder bumps in the first
substrate mold as mated to a second substrate;
[0018] FIG. 5 depicts the second substrate having metal bumps and
traces before final reflow;
[0019] FIG. 6 illustrates the formation of metal balls on the
second substrate after reflow;
[0020] FIG. 7 illustrates a schematic diagram of a mold system
using the solder mold according to the present invention;
[0021] FIG. 8 depicts a surface of a second embodiment of the
substrate mold of the present invention having a plurality of
hemispherical cross-sectional shaped cavities formed therein prior
to the removal of the resist coating on the surface of the
substrate mold;
[0022] FIG. 9 depicts the substrate mold of FIG. 8 having solder
paste in the cavities formed therein in contact with a second
substrate;
[0023] FIG. 10 depicts the second substrate having the solder paste
applied thereto after the second embodiment of the substrate mold
of the present invention of FIG. 8 is removed;
[0024] FIG. 11 depicts the second substrate of FIG. 10 after the
solder paste has been heated to form solder balls thereon;
[0025] FIG. 12 depicts a surface of a third embodiment of the
substrate mold of the present invention having a plurality of
rectangular cross-sectional shaped cavities formed therein;
[0026] FIG. 13 depicts the substrate mold of FIG. 12 having solder
paste in the rectangular cavities in contact with a second
substrate;
[0027] FIG. 14 depicts the second substrate of FIG. 13 having the
rectangularly-shaped solder paste thereon after having been removed
from the substrate of the third embodiment of the invention by the
heating thereof;
[0028] FIG. 15 depicts the second substrate after the heating of
the solder paste thereon to form solder balls;
[0029] FIG. 16 depicts a fourth embodiment of a substrate mold of
the present invention having a plurality of cavities in a surface
thereof and a plurality of heating elements on the other surface
thereof;
[0030] FIG. 17 depicts the substrate mold of FIG. 16 having solder
paste in the cavities formed in a surface thereof; and
[0031] FIG. 18 depicts the other side of the substrate mold of FIG.
16 illustrating the plurality of heating elements thereon along
section line 18-18 of drawing FIG. 17.
DETAILED DESCRIPTION OF THE INVENTION
[0032] Illustrated in drawing FIGS. 1A-1D is a method for
fabricating the semiconductor substrate to form metal bumps or
metal traces, or both, on the surface of a secondary substrate. A
semiconductor substrate, typically a flat planar substrate having a
flat planar upper surface, a flat planar lower surface, and a
plurality of planar sides forming the periphery of the substrate,
is selected to serve as a bump-forming substrate mold 10. The
semiconductor substrate may be of any desired size and geometric
shape suitable for use with an associated semiconductor device. The
semiconductor substrate is selected from a semiconductor base
material such as silicon, gallium arsenide, silicon on insulator,
which may include silicon on glass or sapphire, or other well-known
semiconductor substrate materials, as well as other similar types
of materials, which are capable of being precisely micromachined
and having a coefficient of thermal expansion (CTE) similar to that
of the semiconductor materials. In this particular application, it
is preferred that a silicon substrate is used for substrate mold
10, although any of the other base materials may be freely
substituted therefor. The silicon substrate is aligned such that
the flat, planar upper surface 12 of substrate mold 10 defines the
<100> plane of the substrate mold 10 which mates with a
semiconductor device (not shown). As is shown in drawing FIG. 1A,
the flat, planar upper surface 12 of substrate mold 10 has a first
protective mask layer 14 located thereon. The first protective mask
layer 14 serves to protect the surface of substrate mold 10 when a
subsequent etch is performed to make the cavities or apertures in
the flat, planar upper surface 12. First protective mask layer 14
may be selected from particular etch-resistant materials such as
nitride, oxide, or a hardened polymer spin-on mask. Substrate mold
10 typically has a thickness of about 25 to 28 mils.
[0033] Next, in drawing FIG. 1B, a photoresist 16 is applied over
the surface of first protective mask layer 14 and then exposed
through a mask to define openings exposing the selected cavity
locations to be formed in flat, planar upper surface 12. Then, as
shown in FIG. 1C, a sufficient amount of semiconductor material is
removed by an anisotropic etching from the exposed portion of the
flat, planar upper surface 12 after penetration of the exposed
portion of first protective mask layer 14, thereby forming at least
one cavity 18. Using an anisotropic etching process, the cavity 18
has walls sloped at 54.degree. relative to the <100> plane of
the substrate mold 10. The anisotropic etchant may be, for example,
KOH, or other etchant materials well known to those skilled in the
art. Further, if straight walls are desired, a dry etch using a
plasma etch apparatus may be used to form cavity 18.
[0034] After the formation of cavity 18, first protective mask
layer 14 is removed using a dry-etch process that is selective to
removing first protective mask layer 14 only and not removing any
of the underlying silicon either in the cavity 18 thus formed or on
the flat, planar upper surface 12 of substrate mold 10. For
example, if first protective mask layer 14 is silicon dioxide, a
removal substance such as phosphoric acid may be used. After the
removal of the first protective mask layer 14, a release layer 20
is formed over the entire flat, planar upper surface 12 of
substrate mold 10, particularly covering cavity 18. Release layer
20 is selected from a material that is relatively nonwettable to
metal solder. Such materials include silicon dioxide or silicon
nitride, which can be applied using a chemical vapor deposition
process. Other materials that are relatively nonwettable to metal
solder may also be used, such as nonwettable polymers or the like.
The resulting structure is depicted in drawing FIG. 1D.
[0035] Although drawing FIGS. 1A-D illustrate only a single cavity
18, it is intended that a plurality of cavities be formed in an
array across substrate mold 10. An example of a solder ball forming
mold or substrate mold 10 that has such a plurality of cavities 18
is depicted in drawing FIG. 2. Release layer 20 is applied and
utilized to minimize the wetting of solder paste on the substrate
mold 10 when the assembly is heated in order to transfer the solder
onto the bumps of the secondary surface.
[0036] Solder paste is applied, as shown in drawing FIG. 3, by use
of an applicator 22, such as a squeegee, that is passed across the
surface of substrate mold 10, pressing a metal solder paste 24 into
the plurality of cavities 18 and wiping the excess paste away. The
metal solder paste 24 fills cavities 18, thus forming
frustoconically shaped solder bumps 26 (shown in FIGS. 3 and
4).
[0037] Various types of metal solder may be used. The most widely
employed types include a lead-tin combination. Other types of metal
solder may include, but are not limited to, lead-silver,
lead-tin-silver, lead-tin-indium, indium-tin, indium-lead, or any
paste using copper or gold in combination with the lead or tin. For
example, a lead-tin solder paste having a 63/37 weight ratio has a
eutectic temperature of 183.degree. C. Another type of lead-tin
paste that has a 95/5 weight ratio has a eutectic temperature of
about 350.degree. C.
[0038] Once the metal solder paste 24 is applied to flat, planar
upper surface 12 of substrate mold 10, the entire assembly is
heated to a temperature sufficient enough to slightly melt the
metal solder paste 24 in order to begin the formation of the solder
bumps 26 to be transferred. As shown in drawing FIG. 4, after this
partially melted solder state has been reached, substrate mold 10
is inverted and applied to the surface of a carrier substrate 28,
which may comprise a semiconductor device (die), wafer, or flexible
substrate, such as a flex tape. The assembly of the substrate mold
10 and carrier substrate 28 is heated to a sufficiently high enough
temperature to cause solder bumps 26 to slightly reflow and release
from the release layer 20 formed on substrate mold 10. Substrate
mold 10 is then removed and solder bumps 26 adhere to bond pads,
terminal pads or other solder wettable conductive sites 30 on
carrier substrate 28, as shown in drawing FIG. 5. Next, an
additional reflow step may be performed that causes solder bumps 26
to form into approximately spherically-shaped solder balls 32
attached to solder wettable conductive sites 30 as depicted in
drawing FIG. 6.
[0039] Because of the generally trapezoidal shape of solder bumps
26, the solder paste, upon heating reflow, draws into a
substantially spherical shape and is held together by the surface
tension of the solder material to form approximately
spherically-shaped solder ball 32 or a truncated spherical ball
(not shown).
[0040] Although it has been depicted how spherically-shaped solder
balls or bumps 32 are formed in drawing FIG. 4, it is also possible
to form metal traces using substrate mold 10. The same type of
patterning and etch steps as described with respect to FIGS. 1A-1B
would be followed, but would include a layout that would form metal
traces or channels.
[0041] A solder mold system is depicted in drawing FIG. 7, which
incorporates the substrate mold 10 shown in drawing FIGS. 1-6. The
mold system includes solder applicator 22 for spreading metal
solder paste 24 as dispensed by metal paste dispenser 52. Once the
paste is sufficiently in place within the cavities 18, the
substrate mold 10 is mated to a secondary substrate, as shown in
drawing FIG. 4, and then placed in a low-temperature metal paste
reflow oven 54 to melt the paste to a sufficient enough consistency
to form self-supported bumps and has sufficient enough tackiness to
wet the conductive gates on the carrier substrate 28.
[0042] Referring to drawing FIG. 8, an alternative embodiment of a
substrate mold 40 of the present invention is illustrated. The
substrate mold 40 is similar to the substrate mold 10 described
hereinbefore as to construction and methods of construction except
that the cavities 18 formed therein are hemispherically-shaped. As
illustrated, the first protective mask layer 14 used to form the
plurality of cavities 18 is present on portions of the flat, planar
upper surface 42 of the substrate mold 40. As with the substrate
mold 10, the substrate mold 40 may include a release layer 20 to
aid in the release of the solder paste contained within the
hemispherical cavities 18.
[0043] Referring to drawing FIG. 9, once the metal solder paste 24
is applied to flat, planar upper surface 42 of substrate mold 40,
as described herein with respect to substrate mold 10 illustrated
in drawing FIG. 3, the entire assembly of the substrate mold 40 and
carrier substrate 28 having solder wettable conductive sites 30 or
bond pads located thereon for the metal solder paste 24 to be
applied is heated to a temperature sufficient enough to slightly
melt the metal solder paste 24 in order to begin the formation of
the solder bumps 26 to be transferred.
[0044] As shown in drawing FIG. 9, after this partially melted
solder state has been reached, the assembly of the substrate mold
40 and the carrier substrate 28 is inverted so that the metal
solder paste 24 in cavities 18 is applied to the solder wettable
conductive sites 30 on the surface of the carrier substrate 28,
which may comprise a semiconductor device (die), wafer, or flexible
substrate, such as a flex tape. The assembly of the substrate mold
40 and carrier substrate 28 is heated to a sufficiently high enough
temperature to cause solder bumps 26 to slightly reflow and release
from the release layer 20 formed on substrate mold 40. Substrate
mold 40 is then removed and solder bumps 26 adhere to the
conductive sites, bond pads, terminal pads or other solder wettable
conductive sites 30 on carrier substrate 28, as shown in drawing
FIG. 10. Next, an additional reflow step may be performed that
causes solder bumps 26 to form into approximately
spherically-shaped solder balls 32 attached to solder wettable
conductive sites 30 as depicted in drawing FIG. 11.
[0045] Because of the generally hemispherical shape of solder bumps
26, the solder paste, upon heating reflow, draws into a
substantially spherical shape and is held together by the surface
tension of the solder material to form approximately
spherically-shaped solder balls 32 or truncated spheres.
[0046] Referring to drawing FIG. 12, an alternative embodiment of a
substrate mold 50 of the present invention is illustrated. The
substrate mold 50 is similar to the substrate molds 10 and 40
described hereinbefore as to construction and methods of
construction except that the cavities 18 formed therein are
generally rectangular or square-shaped (shown in dashed lines). The
first protective mask layer 14 used to form the plurality of
cavities 18 present on portions of the flat, planar upper surface
42 of the substrate mold 50 is not illustrated. As with the
substrate mold 10, the substrate mold 50 may include a release
layer 20 (FIG. 13) to aid in the release of the solder paste
contained within the rectangular or square-shaped cavities 18.
Referring to drawing FIG. 13, once the metal solder paste 24 is
applied to flat, planar upper surface 42 of substrate mold 50, as
described herein with respect to substrate mold 10 illustrated in
drawing FIG. 3, the entire assembly of the substrate mold 50 and
carrier substrate 28 having solder wettable conductive sites 30 or
bond pads located thereon for the metal solder paste 24 to be
applied is heated to a temperature sufficiently high enough to
slightly melt the metal solder paste 24 in order to begin the
formation of the solder bumps 26 to be transferred.
[0047] As shown in drawing FIG. 13, after this partially melted
solder state has been reached, the assembly of the substrate mold
50 and the carrier substrate 28 is inverted so that the solder
paste 24 is applied to the solder wettable conductive sites 30 on
the surface of the carrier substrate 28, which may comprise a
semiconductor device (die), wafer, or flexible substrate, such as a
flex tape. The assembly of the substrate mold 50 and carrier
substrate 28 is heated to a sufficiently high enough temperature to
cause solder bumps 26 to slightly reflow and release from the
release layer 20 formed on substrate mold 50. Substrate mold 50 is
then removed and solder bumps 26 adhere to the conductive sites,
bond pads, terminal pads or other solder wettable conductive sites
30 on carrier substrate 28, as shown in drawing FIG. 14. Next, an
additional reflow step may be performed that causes solder bumps 26
to form into approximately spherically-shaped solder balls 32
attached to solder wettable conductive sites 30 as depicted in
drawing FIG. 15.
[0048] Because of the generally rectangular shape of solder bumps
26, the solder paste, upon heating reflow, draws into a
substantially spherical shape and is held together by the surface
tension of the solder material to form approximately
spherically-shaped solder balls 32.
[0049] Referring to drawing FIG. 16, another embodiment of the
substrate mold 100 of the present invention is illustrated. The
substrate mold 100 is similar to the substrate molds 10, 40, and 50
described hereinbefore. The substrate mold 100 includes cavities 18
having any desired shape as described herein in the flat, planar
upper surface 12 and includes electrical resistance heating strips
66 located on the bottom thereof for the heating of the substrate
mold 100 with electrical conductor 68 connected thereto. The bottom
surface of the substrate mold 100 includes a coating 62 thereon to
electrically insulate the electrical resistance heating strips 66
from the substrate mold 100. The electrical resistance heating
strips 66 may be of any desired geometrical configuration to cover
the bottom surface of the substrate mold 100 to uniformly heat the
substrate mold 100 and the metal solder paste 24 located in the
cavities 18 thereof. The electrical conductor 68 may be any desired
shape and have any desired location for connection to the
electrical resistance heating strips 66. The electrical conductor
68 is covered with an insulation layer 70 located thereover. In
areas or portions of the bottom surface of the substrate mold 100
not having an electrical resistance heating strip 66 located
thereon, an insulative coating 64 of any suitable type is
provided.
[0050] Referring to drawing FIG. 17, the substrate mold 100 is
illustrated having metal solder paste 24 located in cavities 18
having release layer 20 therein. After the metal solder paste 24 is
placed in the cavities 18, a carrier substrate 28 (see FIG. 4) is
applied to the substrate mold 100, the assembly of the substrate
mold 100 and carrier substrate 28 inverted, and the electrical
resistance heating strips 66 on the substrate mold 100 actuated to
heat the metal solder paste 24 to transfer the same to the carrier
substrate 28. After the metal solder paste 24 is transferred to the
carrier substrate 28, the carrier substrate 28 is further heated to
cause the solder paste to adhere to the solder wettable conductive
sites 30 on the carrier substrate 28 to substantially form
spherically-shaped solder balls 32 thereon.
[0051] Referring to drawing FIG. 18, the electrical resistance
heating strips 66 and electrical conductor 68 are illustrated. The
electrical resistance heating strips 66 may be of any desired shape
to substantially uniformly heat the substrate mold 100. Similarly,
the electrical conductor 68 may be any desired shape to
electrically connect to the electrical resistance heating strips
66. Further, any desired connector may be used to electrically
connect the electrical conductor 68 to a source of electrical
power.
[0052] Substrate molds 10, 40, 50 and 100 described herein are
useful in forming contact bumps for many applications. One
application is the formation of flexible connecting tape that
requires bumps for interconnection of traces on the tape to a die
or other element. The micromachining of substrate mold 10 provides
a much more accurate means for placing the solder ball-shaped bumps
over the prior art methods of merely placing bumps on top of a
screen and then having the screen place the bumps in a proper
alignment. Further, the solder ball shaped bumps have a more
uniform volume and shape as the cavity dimensions in the
semiconductor mold provide a substantially precise control over the
formation of the solder ball-shaped bumps. By contrast, in the
prior art, the uniformity of solder balls has always been a
problem, especially at the smaller diameter dimensions that are now
being used. Another application for the present invention is for
the direct placement of the solder ball-shaped bumps on a
semiconductor device or die for attachment. Yet another application
includes placing the solder ball-shaped bumps on a wafer-scale
device for interconnection. This allows multiple devices placed on
the same substrate to be interconnected using the precision of the
solder ball-shaped bumps. For example, the solder ball-shaped bump
application is useful in chip scale packages (CSP) or in fine ball
grid array (FBGA) packages. The in situ electrical resistance
heating strip allows for selecting which balls need to be
transferred by selectively heating only those electrical resistance
heating strips 66.
[0053] The applications of providing interconnect and bump contacts
are numerous. For example, the metal trace interconnect and the
bump contact may be used in any type of semiconductor device such
as a memory storage device. These memory storage devices can range
from read-only memory (ROM) and random access memory (RAM) to
exotic types of memory, such as video memory and the memory used in
computer systems. Additionally, the application of this metal trace
interconnect and bump contact structure can be utilized in
micro-processor packages that are used in computer systems as well
as in other types of systems, and other types of single processing
devices and support chips normally used in electronic devices.
These electronic devices range from cellular phones to microwave
systems, to automobiles and even to programmable wrist watches.
[0054] Although the present invention has been described with
reference to a particular embodiment, the invention is not limited
to this described embodiment. The invention is limited only by the
appended claims, which include within their scope all equivalent
devices or methods which operate according to the principles of the
invention as described herein.
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