U.S. patent application number 11/148386 was filed with the patent office on 2005-10-13 for cooling fin connected to a cooling unit and a pusher of the testing apparatus.
This patent application is currently assigned to ADVANTEST Corporation. Invention is credited to Fukumoto, Keiichi, Igarashi, Noriyuki, Nakamura, Hiroto, Saito, Noboru, Shimada, Kenichi, Takahashi, Hiroyuki, Watanabe, Yutaka.
Application Number | 20050225346 11/148386 |
Document ID | / |
Family ID | 27340628 |
Filed Date | 2005-10-13 |
United States Patent
Application |
20050225346 |
Kind Code |
A1 |
Saito, Noboru ; et
al. |
October 13, 2005 |
Cooling fin connected to a cooling unit and a pusher of the testing
apparatus
Abstract
A device testing apparatus including a connection terminal to
which an electronic device under test is detachably attached, a
pusher for pushing the electronic device in the direction of the
connection terminal so as to connect the electronic device to the
connection terminal, and a cooling unit for cooling the electronic
device. As the cooling unit, an element cooling the device using
electricity is for example used. The cooling unit includes a
cooling medium blower for blowing a cooling medium around the
electronic device and heat exchange projections or depressions for
raising the cooling efficiency by blowing a cooling medium. In the
device testing apparatus, even if the electronic device generates
heat on its own during testing, the electronic device is cooled
through the pusher, connection terminals, or socket, so the effect
of the heat generated by the electronic device is canceled out and
the electronic device can be tested at the predetermined
temperature as prescribed in the specification.
Inventors: |
Saito, Noboru; (Tokyo,
JP) ; Takahashi, Hiroyuki; (Nerima-Ku, JP) ;
Igarashi, Noriyuki; (Nerima-Ku, JP) ; Fukumoto,
Keiichi; (Nerima-Ku, JP) ; Nakamura, Hiroto;
(Nerima-Ku, JP) ; Watanabe, Yutaka; (Nerima-Ku,
JP) ; Shimada, Kenichi; (Nerima-Ku, JP) |
Correspondence
Address: |
BIRCH STEWART KOLASCH & BIRCH
PO BOX 747
FALLS CHURCH
VA
22040-0747
US
|
Assignee: |
ADVANTEST Corporation
32-1, Asahicho 1-chome
Tokyo
JP
179-0071
|
Family ID: |
27340628 |
Appl. No.: |
11/148386 |
Filed: |
June 9, 2005 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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11148386 |
Jun 9, 2005 |
|
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|
10716613 |
Nov 20, 2003 |
|
|
|
6919734 |
|
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10716613 |
Nov 20, 2003 |
|
|
|
10121592 |
Apr 15, 2002 |
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10121592 |
Apr 15, 2002 |
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09448303 |
Nov 24, 1999 |
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Current U.S.
Class: |
324/750.09 ;
324/750.11; 324/756.02; 324/757.01 |
Current CPC
Class: |
G01R 31/2862 20130101;
G01R 31/2868 20130101; G01R 1/0458 20130101; G01R 31/2863 20130101;
G01R 31/2806 20130101; G01R 31/2877 20130101; G01R 31/01
20130101 |
Class at
Publication: |
324/760 |
International
Class: |
G01R 031/02 |
Foreign Application Data
Date |
Code |
Application Number |
Nov 25, 1998 |
JP |
10-333864 |
Dec 22, 1998 |
JP |
10-364356 |
Dec 10, 1998 |
JP |
10-351357 |
Claims
1. A device testing apparatus comprising: a connection terminal to
which an electronic device under test is detachably connected and a
cooling unit for directly or indirectly cooling the connection
terminal.
2. A device testing apparatus comprising: a socket having a
connection terminal to which an electronic device under test is
detachably connection and a cooling unit for directly or indirectly
cooling the socket.
3. A device testing apparatus comprising: a tray for testing while
pushing terminals of a plurality of electronic devices carried on
the tray against contact portions of a test head; a pusher for
pushing each of the plurality of electronic devices held on the
tray in the direction of the contact portions; and a heat absorbing
and radiating member provided at the pusher.
4. The device testing apparatus as set forth in claim 3, wherein
the pusher comprises: a pusher base provided to be able to approach
and move away from a contact portion and a pusher block provided
integrally or separately from the pusher base and contacting an
electronic device from the surface opposite to the contact portion
to push the same.
5. The device testing apparatus as set forth in claim 3, wherein
the heat absorbing and radiating member is formed integrally with
at least part of the pusher.
6. The device testing apparatus as set forth in claim 4, wherein
the pusher block is configured separate from the pusher base and
further comprises an elastic member imparting elasticity in the
pushing direction of the electronic device to the pusher block.
7. The device testing apparatus as set forth in claim 6, wherein
the heat absorbing and radiating member is provided between elastic
members.
8. The device testing apparatus as set forth in claim 6, wherein
heat absorbing and radiating members are provided at the two sides
of an elastic member.
9. The device testing apparatus as set forth in claim 3, wherein a
flow of gas in the chamber for maintaining the electronic device at
a predetermined temperature is blown against the heat absorbing and
radiating member.
10. The device testing apparatus as set forth in claim 9, wherein
the pusher is formed with a passage for guiding the flow of gas in
the chamber for maintaining the electronic device at a
predetermined temperature in the direction of the heat absorbing
and radiating member.
11. The device testing apparatus as set forth in claim 3, wherein
the pusher is formed with a nozzle for guiding temperature control
gas, separate from the gas flow in the chamber for maintaining the
electronic device at a predetermined temperature, in the direction
of the heat absorbing and radiating member.
12. A device tester comprising: connection terminals to which an
electronic device under test is detachably connected; a pusher for
pushing the electronic device in the direction of the connection
terminals so as to connect the electronic device to the connection
terminals; a suction head having a vacuum suction bore for adhering
the electric device by suction, the suction head being attached to
the pusher; a cooling unit attached to the suction head for cooling
the electronic device; a temperature sensor for measuring a
temperature of the device; and a controller for controlling a
cooling output of the cooling unit to cancel out heat generated by
the electric device during tests and maintain the device constantly
at a predetermined temperature on the basis of a temperature signal
output by the temperature sensor.
13. The device tester as set forth in claim 12, further comprising
a chamber for maintaining a predetermined ambient temperature of
the connection terminal to which the electronic device is
detachably attached.
14. The device tester as set forth in claim 12, wherein the cooling
unit includes an element for cooling by electricity.
15. The device tester as set forth in claim 12, wherein the cooling
unit includes a cooling medium blowing means for blowing a cooling
medium around the electronic device.
16. The device tester as set forth in claim 12, wherein the cooling
unit includes projections or depressions for heat exchange for
increasing cooling efficiency by blowing the cooling medium.
17. The device tester as set forth in claim 16, wherein the
projections or depressions for heat exchange are heat absorbing and
radiating members.
18. A device tester comprising: connection terminals to which an
electronic device under test is detachably connected; and a cooling
fin for directly or indirectly cooling the connection terminals to
cancel out heat generated by the electric device during tests and
maintain the device constantly at a predetermined temperature.
19. The device tester as set forth in claim 18, further comprising
a chamber for maintaining a predetermined ambient temperature of
the connection terminal to which the electronic device is
detachably attached.
20. The device tester as set forth in claim 18, where the cooling
fin is a part of a cooling unit which includes an element for
cooling by electricity.
21. The device tester as set forth in claim 18, wherein the cooling
fin is a part of a cooling unit which includes a cooling medium
blowing means for blowing a cooling medium around the electronic
device.
22. The device tester as set forth in claim 18, wherein the cooling
fin increases cooling efficiency by blowing the cooling medium.
23. The device tester as set forth in claim 22, wherein the cooling
fin is a heat absorbing and radiating member.
24. The device tester as set forth in claim 18, wherein a plurality
of sets of cooling fins are provided.
Description
[0001] This application is a divisional of co-pending application
Ser. No. 10/716,613, filed on Nov. 20, 2003, which is a
continuation of application Ser. No. 10/121,592, filed on Apr. 15,
2002 and now abandoned, which is a divisional of application Ser.
No. 09/448,303, filed on Nov. 24, 1999 and now abandoned, the
entire contents of which are hereby incorporated by reference and
for which priority is claimed under 35 U.S.C. .sctn. 120; and this
application claims priority of Application Nos. 10-333,864 filed in
Japan on Nov. 25, 1998, 10-364,356 filed in Japan on Dec. 22, 1998,
and 10-351,357 filed in Japan on Dec. 10, 1998 under 35 U.S.C.
.sctn. 119.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] The present invention relates to a device testing apparatus
for testing IC chips and other electronic devices at a
predetermined temperature, more particularly relates to a device
testing apparatus which accurately controls the temperature of the
electronic devices even if the electronic devices generate heat on
their own during the testing and thereby enables the electronic
devices to be tested at the desired test temperature.
[0004] 2. Description of the Related Art
[0005] In the process of production of a semiconductor device etc.,
a tester is necessary for testing the finally produced IC chip or
other device. As one type of such a tester, there is known an
apparatus for testing an IC chip at high temperature, ordinary
temperature or temperature conditions lower than ordinary
temperature. This is because it is guaranteed as one of the
features of an IC chip that it operate well at high temperature,
ordinary temperature, or low temperature.
[0006] In such a tester, the top of the test head is covered by a
chamber, the inside is made an air-tight space, an IC chip is
conveyed on to the test head, the IC chip is pushed against the
test head for connection, and the IC chip is tested while
maintaining the inside of the chamber at a certain temperature
range. This type of test is used to test IC chips well and sort
them into at least good chips and defective chips.
[0007] Along with the increasingly higher speeds and increasingly
higher integration densities of IC chips in recent years, the heat
generated by the chips themselves at the time of operation becomes
larger. Such heat is generated at the time of testing IC chips as
well. Even if the inside of the chamber is maintained at a constant
temperature, it is therefore be difficult to test IC chips at the
intended test temperature. For example, as much of 30 watts of heat
is sometimes generated depending on the type of the IC chip. In
this way, when testing IC chips generating large heat, no matter
how much effort is made to hold the inside of the chamber at a
constant temperature, it becomes difficult to test the IC chips in
a prescribed range of test temperature. When unable to test IC
chips at the prescribed test temperature, there is the problem that
the reliability of the tests ends up falling.
[0008] Recently, therefore, effort has been made to develop testing
apparatuses with temperature sensors attached to the suction heads
for picking up and holding the IC chips and pressing and holding
them against the sockets of the test heads, measuring the
temperature of the IC chips at the time of the tests, and blowing
cooling air when the IC chips rise to more than a set temperature
due to the heat they generate.
[0009] Some types of testing apparatuses, however, have the suction
heads attached to rotary arms which rotate along an infinite path.
In testers where the suction heads move in this manner, there is
the problem that when attaching temperature sensors to the suction
heads, the electrical wiring from the temperature sensors becomes
complicated. If the electrical wiring from the temperature sensors
is formed by ordinary electrical wiring, the electrical wiring will
become twisted along with the rotation of the rotary arm, so it is
necessary to use rotary joints or other special connectors in the
middle of the electrical wiring. Accordingly, the testing apparatus
become higher in price and the problem occurs of rotational wear at
the rotary joints of the electrical wiring and of a decline in the
durability.
[0010] Further, in the worst case, the cables of the temperature
sensors are liable to break due to movement of the suction heads.
Further, in a structure using suction passages of the suction heads
to blow cooling air to the IC chips, it is not possible to blow a
sufficient amount of cooling air to the IC chips and therefore not
possible to deal with cases of a large amount of heat
generated.
SUMMARY OF THE INVENTION
[0011] An object of the present invention is to provide a device
testing apparatus able to accurately control the temperature of
electronic devices and test the electronic devices at a desired
test temperature even if the electronic devices generate heat on
their own at the time of testing. Another object of the present
invention is the provision of a device testing apparatus able to
apply a uniform temperature to a large number of electronic devices
in a short time.
[0012] To achieve the objects of the present invention, according
to a first aspect of the present invention, there is provided a
device testing apparatus comprising a connection terminal to which
an electronic device under test is detachably connected; a pusher
for pushing the electronic device in the direction of the
connection terminal so as to connect the electronic device to the
connection terminal; and a cooling unit attached to the pusher for
cooling the electronic device.
[0013] According to a second aspect of the present invention, there
is provided a device testing apparatus comprising a connection
terminal to which an electronic device under test is detachably
connected and a cooling unit for directly or indirectly cooling the
connection terminal.
[0014] According to a third aspect of the present invention, there
is provide a device testing apparatus comprising a socket having a
connection terminal to which an electronic device under test is
detachably connected and a cooling unit for directly or indirectly
cooling the socket.
[0015] Preferably, the cooling unit includes an element for cooling
by electricity.
[0016] Alternatively, preferably, the cooling unit includes a
cooling medium blowing means for blowing a cooling medium around
the electronic device.
[0017] Alternatively, preferably, the cooling unit includes
projections or depressions for heat exchange for increasing the
cooling efficiency by blowing a cooling medium. The projections or
depressions for heat exchange are not particularly limited, but are
preferably heat absorbing and radiating members. As the heat
absorbing and radiating members, for example heat radiating fins
may be mentioned.
[0018] In the device testing apparatus according to the first to
third aspects of the present invention, even if an electronic
device generates heat on its own at the time of testing, the
electronic device is cooled through the pusher, connection
terminal, or socket, so the effect of heat generated by the
electronic device is canceled out and it is possible to test an
electronic device at a predetermined temperature as stipulated in
the specifications.
[0019] Note that when testing an electronic device at ordinary
temperature, it is possible to eliminate the test chamber. When
testing the electronic device at a low temperature, however, if
just holding the electronic device in a low temperature state,
condensation sometimes becomes a problem, so it is desirable to use
a test chamber to cover the area around the connection terminals to
which the electronic device is detachably connected. Further, when
testing an electronic device at a high temperature, the present
invention is effective from the viewpoint of control of the
temperature of the electronic device so that it does not exceed a
predetermined temperature.
[0020] According to a fourth aspect of the present invention, there
is provided a device testing apparatus comprising a socket having a
connection terminal to which an electric device under test is
detachably connected; a pusher for contacting a first surface of an
electronic device and pushing the electronic device in the
direction of the connection terminal so as to connect the
electronic device to the connection terminals; a temperature sensor
arranged at the socket side for measuring the temperature of a
second surface of the electronic device at a side opposite to the
first surface; and a cooling medium blowing means for blowing a
cooling medium around the electronic device.
[0021] The temperature sensor is not particularly limited and may
be any of a thermocouple, thermistor, or other contact-type
temperature sensor for detecting temperature in contact with a
portion to be measured for temperature or a radiation thermometer
or other non-contact type temperature sensor using infrared rays or
the like to be able to detect temperature by a non-contact
method.
[0022] According to a fifth aspect of the present invention, there
is provided a device testing apparatus comprising a socket having a
connection terminal to which an electronic device under test is
detachably connected; a pusher for contacting a first surface of
the electronic device and pushing the electronic device in the
direction of the connection terminals so as to connect the
electronic device to the connection terminal; and a cooling medium
blowing means arranged at the socket side for blowing a cooling
medium to a second surface of the electronic device at the side
opposite to the first surface.
[0023] According to a sixth aspect of the present invention, there
is provided a device testing apparatus comprising a socket having a
connection terminal to which an electronic device under test is
detachably connected; a pusher for pushing the electronic device in
the direction of the connection terminals so as to connect the
electronic device to the connection terminal; and a cooling medium
blowing means arranged at the outer circumference of the pusher for
blowing a cooling medium to a side surface of the pusher.
[0024] In this case, preferably projections or depressions are
formed at the outer circumferential surface of the pusher for
increasing the heat exchange efficiency.
[0025] According to a seventh aspect of the present invention,
there is provided a device testing apparatus comprising a socket
having a connection terminal to which an electronic device under
test is detachably connected; a pusher for contacting a first
surface of the electronic device and pushing the electronic device
in the direction of the connection terminal so as to connect the
electronic device to the connection terminals; a non-contact type
temperature sensor arranged at the pusher side for measuring a
temperature of a first surface of the electronic device; and a
cooling medium blowing means for blowing a cooling medium around
the electronic device.
[0026] According to an eighth aspect of the present invention,
there is provided a device testing apparatus comprising a socket
having connection terminals to which an electronic device under
test is detachably connected; a pusher for pushing the electronic
device in the direction of the connection terminals so as to
connect the electronic device to the connection terminals; a
non-contact type temperature sensor arranged at the pusher side for
measuring a temperature of the pusher; and a cooling medium blowing
means for blowing a cooling medium around the electronic
device.
[0027] In the device testing apparatuses according to the fourth to
eighth aspects of the present invention, the pusher is not
particularly limited, but the effect of the present invention is
larger when it has a pickup nozzle attached under a suction head,
the suction head is attached to a rotary arm, and the rotary arm is
rotatably attached to a shaft. In the device testing apparatuses
according to the fourth to eighth aspects of the present invention,
even when the electronic device generates heat on its own at the
time of testing, the temperature rise of the electronic device is
detected by the temperature sensor and, when the electronic device
rises in temperature more than necessary, a cooling medium is blown
on to the electronic device directly or to the pusher to thereby
cool the electronic device. Accordingly, the effect of the heat
generated by the electronic device is canceled and the electronic
device can be tested at a predetermined temperature as prescribed
in the specifications. Note that the cooling medium is preferably
dry air cooled to a predetermined temperature. Dry air is
preferable to prevent condensation in low temperature tests.
[0028] Note that when testing the electronic device at ordinary
temperature, it is possible to eliminate the test chamber. When
testing an electronic device at a low temperature, however, if just
holding the electronic device in a low temperature state,
condensation sometimes becomes a problem, so it is desirable to use
a test chamber to cover the area around the connection terminals to
which the electronic device is detachably connected. Further, when
testing an electronic device at a high temperature, the present
invention is effective from the viewpoint of control of the
temperature of the electronic device so that it does not exceed a
predetermined temperature.
[0029] In particular, in a device testing apparatus according to
the fourth aspect of the present invention, the temperature sensor
for detecting the temperature of the electronic device is arranged
at the socket side. In a device testing apparatus having a rotary
arm type suction head, the pusher attached to the suction head
rotates, but the socket side differs from the rotatable pusher side
in that it is secured to the top of the test head. Therefore, in
the device testing apparatus according to the fourth aspect of the
present invention, the electrical wiring from the temperature
sensor is extremely easy and it is possible to avoid breakage of
the cable from the temperature sensor and other situations.
[0030] Further, in a device testing apparatus having a rotary arm
type suction head, a plurality of suction heads are generally
arranged about the shaft. When attaching temperature sensors to the
pushers attached to the suction heads, a number of temperature
sensors equal to the number of pushers becomes necessary. As
opposed to this, in the device testing apparatus according to the
present invention, it is sufficient to provide a number of
temperature sensors corresponding to the number of sockets to which
the electronic devices are attached. It is therefore possible to
reduce the number of temperature sensors.
[0031] In a device testing apparatus according to the fifth aspect
of the present invention, a cooling medium is blown toward the back
of the electronic device from the socket side to cancel out the
temperature rise due to the heat generated by the electronic device
and test the electronic device at the temperature as prescribed in
the specification. In the related art, the general practice has
been to blow a cooling medium from the top side (pusher side) of
the electronic device to the area around the electronic device, but
the electronic device cannot be said to have been sufficiently
cooled. In the device testing apparatus according to the fifth
aspect of the present invention, by directly blowing a cooling
medium toward the back of the electronic device, it is possible to
improve the cooling efficiency of the electronic device, cancel out
the effect of the heat generated by the electronic device well, and
test the electronic device at a predetermined temperature as
prescribed in the specifications.
[0032] In the device testing apparatus according to a sixth aspect
of the present invention, the cooling medium is blown to the side
surface of the pusher. A variety of components are arranged around
the socket used in the testing of the electronic device and it is
often difficult to blow a cooling medium directly toward the
electronic device. In the device testing apparatus according to the
sixth aspect of the present invention, the cooling medium is blown
toward the side surface of the pusher to cool the electronic device
indirectly. At this time, by providing heat exchange fins or other
projections or depressions at the outer circumference of the
pusher, it is possible to increase the heat exchange efficiency,
cool the pusher efficiently, and efficiently cool the electronic
device indirectly. In the device testing apparatus according to the
sixth aspect of the present invention as well, it is possible to
cancel out the effect of the heat generated by the electronic
device well and test the electronic device at a predetermined
temperature as prescribed in the specifications.
[0033] In the device testing apparatus according to a seventh
aspect of the present invention, the temperature of the pusher side
surface of the electronic device is measured by a non-contact type
temperature sensor. When the terminals of the electronic device are
arranged over the entire back (second surface) of the electronic
device, connection terminals are arranged without space between
them at the socket as well. In such a case, it is difficult to
measure the temperature of the electronic device from the socket
side. In the device testing apparatus according to the seventh
aspect of the present invention, the temperature of the pusher side
surface of the electronic device is measured by a non-contact type
temperature sensor.
[0034] If the non-contact type temperature sensor is used, there is
no need to secure the pusher and there is no need to rotate it
together with the pusher. Therefore, even if a device testing
apparatus having a rotary arm type suction head, the electrical
wiring from the temperature sensor does not become complicated. In
the device testing apparatus according to the seventh aspect of the
present invention, a non-contact type temperature sensor is used to
accurately measure the temperature of the electronic device and a
cooling medium is blown on the electronic device based on the
measurement results to cool the electronic device. Therefore, it is
possible to cancel out the effect of heat generated by the
electronic device well and test the electronic device at a
predetermined temperature as prescribed in the specifications.
[0035] In the device testing apparatus according to an eighth
aspect of the present invention, the temperature of the pusher
pushing the electronic device in the socket direction is measured
by a non-contact type temperature sensor. A variety of components
are arranged around the socket used in the testing of the
electronic device and it is often difficult to directly measure the
temperature from the pusher side surface (first surface) of the
electronic device. In the device testing apparatus according to the
eighth aspect of the present invention, the temperature of the
electronic device is not measured directly. The temperature of the
pusher is measured to estimate the temperature of the electronic
device and detect the temperature rise due to the heat generated by
the electronic device. Since the electronic device is in contact
with the pusher, if the electronic device rises in temperature due
to the heat it generates on its own, the pusher also rises in
temperature. The temperature of the pusher and the temperature of
the electronic device, however, do not always match, so in order to
estimate the temperature of the electronic device from the detected
temperature of the pusher, it is necessary to consider a correction
value found by experiments etc. for the detected temperature of the
pusher to estimate the temperature of the electronic device.
[0036] Further, in the device testing apparatus according to the
eighth aspect of the present invention as well, since a non-contact
type temperature sensor is used, there is no need to secure the
temperature sensor to the pusher and no need to make it rotate
along with the pusher. Therefore, even with a device testing
apparatus having a rotary arm type suction head, the electrical
wiring from the temperature sensor does not become complicated.
Further, in the device testing apparatus according to the eighth
aspect of the present invention, a non-contact type temperature
sensor is used to measure the temperature of the pusher, the
temperature of the electronic device is accurately predicted from
the detected temperature, and, based on the results, a cooling
medium is blown on the electronic device to cool the electronic
device. Therefore, it is possible to cancel out the effect of heat
generated by the electronic device well and test the electronic
device at a predetermined temperature as prescribed in the
specifications.
[0037] According to a ninth aspect of the present invention, there
is provided a device testing apparatus comprising a pusher for
holding or pushing an electronic device to make it approach or move
away from a contact portion of a test head; a temperature sensor
provided at the pusher; a first terminal of the temperature sensor
provided at the pusher; and a second terminal provided at the
contact portion side and contacting or not contacting the first
terminal of the temperature sensor along with the movement of the
pusher.
[0038] According to a 10th aspect of the present invention, there
is provided a device testing apparatus comprising a pusher for
holding or pushing an electronic device to make it approach or move
away from a contact portion of a test head; a temperature sensor
provided at the pusher; a first terminal of the temperature sensor
provided at the pusher; a second terminal provided at the contact
portion side and contacting or not contacting the first terminal of
the temperature sensor along with the movement of the pusher; and
an air blower unit for blowing cooling air to the electronic device
in a state where the electronic device held by the pusher is pushed
against the contact portion.
[0039] Preferably, at least one of the first terminal and second
terminal is provided to be able to move in the direction of
movement of the pusher.
[0040] Preferably the air blower unit is arranged around the
contact portion.
[0041] Preferably the air blower unit has a cooling air passage
through which cooling air is blown substantially horizontally to an
electronic device pushed against the contact portion.
[0042] In the device testing apparatuses according to the ninth and
10th aspects of the present invention, the first terminal and
second terminal contact each other at least when detection of the
temperature by a temperature sensor is necessary. There is no need
for connection by a cable etc. at other times and there is no
longer a chance of the cable of the temperature sensor breaking
along with movement of the pusher.
[0043] In particular, in the device testing apparatus according to
the 10th aspect of the present invention, since an air blower unit
is provided around the contact portion and cooling air is blown
substantially horizontally to the electronic device, a sufficient
amount of cooling air can be provided and, further, the electronic
device as a whole is blown against evenly, so the cooling effect on
the electronic device is increased and the effect of suppression of
the rise of temperature due to the heat generated by the electronic
device becomes more remarkable. Further, due to the increase of the
effect of suppression of the temperature rise, it is possible to
cool with a small amount of fluid or by blowing fluid for a short
amount of time.
[0044] According to an 11th aspect of the present invention, there
is provided a device testing apparatus comprising a tray for
testing while pushing terminals of a plurality of electronic
devices carried on the tray against contact portions of a test
head; a pusher for pushing each of the plurality of electronic
devices held on the tray in the direction of the contact portions;
and a heat absorbing and radiating member provided at the
pusher.
[0045] The heat absorbing and radiating member may be provided
separate from at least part of the pusher.
[0046] Preferably, the pusher comprises a pusher base provided to
be able to move to approach or move away from the contact portion
and a pusher block provided integrally with or separate from the
pusher base, contacting the electronic device from the reverse
surface of the contact portion, and pushing the same.
[0047] Preferably, the pusher block is configured as separate from
the pusher base and further comprises an elastic member for
imparting elasticity to the pusher block in the direction of
pushing the electronic device.
[0048] Preferably a heat absorbing and radiating member is provided
between elastic members. More preferably, heat absorbing and
radiating members are provided at the two sides of an elastic
member.
[0049] More preferably, a flow of gas in the chamber for
maintaining an electronic device at a predetermined temperature is
blown against the heat absorbing and radiating member. Still more
preferably, the pusher is formed with a passage for guiding the
flow of gas in the chamber for maintaining the electronic device at
a predetermined temperature in the direction of the heat absorbing
and radiating member.
[0050] Further, the pusher may be formed with a nozzle for guiding
temperature control gas, separate from the gas flow in the chamber
for maintaining the electronic device at a predetermined
temperature, in the direction of the heat absorbing and radiating
member.
[0051] In the device testing apparatus according to the 11th aspect
of the present invention, since a heat absorbing and radiating
member (type of cooling unit) is provided at the pusher block (part
of pusher), the heat generated by the electronic device is absorbed
by the heat absorbing and radiating member and escapes to the
surrounding environment from there. As a result, it is possible to
prevent destruction or damage of the electronic devices due to
overheating, considered a particular problem in high temperature
tests etc.
[0052] Further, not limited to high temperature tests, the rise in
temperature due to the heat generated by the devices is suppressed
by the heat absorbing and radiating effect of the heat absorbing
and radiating member, so it is possible to conduct tests by the
desired accurate temperature and the reliability of the test
results is improved.
[0053] The heat absorbing and radiating member is not particularly
limited, but is configured by a metal etc. superior in heat
conductivity. A heat sink formed by heat-radiating fins etc. is
preferably used.
[0054] In the device testing apparatus according to the 11th aspect
of the present invention, the mode of transport of the electronic
device to the contact portions is of the type of pushing the
electronic device to the contact portion in the state carried on a
tray. In particular, in this type, a large number of electronic
devices are simultaneously pushed for simultaneous measurement of a
large number of electronic devices. Therefore, the area around each
electronic device becomes overly crowded and heat easily
accumulates. Accordingly, the 11th aspect of the present invention
is more preferably applied to a device testing apparatus of a type
pushing electronic devices against contact portions in the state
carried on a tray.
[0055] In the device testing apparatus according to the 11th aspect
of the present invention, when pushing the terminals of an
electronic device against the contact portion of the test head, the
pusher base is made to approach the contact portion and the
electronic device is pushed to the contact portion side by the
pusher block.
[0056] At this time, the positional relationship of the pusher base
and the contact portion is restricted to standard dimensions by a
stopper or other mechanical mechanism or electrical motor or other
electrical mechanism. When error occurs in the positional
relationship between the pusher base and the contact portion, the
error is absorbed by the pusher block imparting elasticity to the
electronic device by an elastic member. Therefore, it is possible
to prevent an excessive pushing force from acting on the electronic
device and conversely the pushing force becoming insufficient. That
is, in the device testing apparatus according to the 11th aspect of
the present invention, the stroke of the pusher is not managed. The
pushing force against the electronic device is made uniform by
controlling the load by the pusher block.
[0057] The elastic member is not particularly limited. A coil
spring or other various types of elastic members or actuators etc.
may be used. Further, the elastic member may be provided at other
locations in addition to the pusher base.
[0058] The main error occurring in the positional relationship
between the pusher base and the contact portion may be considered
to be the thickness X of the electronic device itself, the
manufacturing dimensions Y between the pusher side stopper and
pusher surface, and the manufacturing dimensions Z between the
contact portion side stopper and tips of the contact pins. The
cumulative amount of the X to Z normally rises to as much as 0.1 to
0.2 mm or so. When considering the case of use of for example coil
springs as the elastic members, however, the error of the pushing
force acting on the electronic device becomes 3 gf/ball or so with
respect to a standard load of 25 gf/ball even when error of 2 mm
occurs. There is therefore no problem of an excessive load or
insufficient load.
[0059] The elastic member is not particularly limited, but more
preferably it is made variable in elasticity.
[0060] Variability of the elasticity means the elasticity in the
direction of pushing the electronic devices given to the pusher
block can be changed. The specific means is not particularly
limited. For example, it is possible to make the elasticity
variable by switching among a plurality of types of elastic members
having different coefficients of elasticity or possible to make the
elasticity variable by using the same elastic members and changing
the basic length of the elastic members.
[0061] By making the elasticity of the elastic members variable, it
is possible to flexibly deal with any fluctuations in the standard
load (pushing force) caused by the test conditions of the
electronic devices. Therefore, the range of application of the
device testing apparatus becomes greater.
[0062] According to the 11th aspect of the present invention, the
apparatus can be made smaller in size by efficiently arranging the
elastic members and the heat absorbing and radiating member between
the pusher based and the pusher block.
[0063] Further, according to the 11th aspect of the present
invention, by blowing a gas flow in the chamber to a plurality of
electronic devices, the gas flow is supplied evenly on the
electronic devices, the variation in the temperature distribution
due to the heat generated by the electronic devices etc. can be
effectively suppressed, and the time for elevation or reduction of
the temperature can be shortened.
[0064] Further, by forming a passage for guiding the gas flow in
the direction of the heat absorbing and radiating member in the
pusher base/or pusher block, the gas flow is evenly supplied to the
electronic devices, variation in the temperature distribution due
to the heat generated by the electronic devices can be effectively
suppressed, and the time for elevation or reduction of the
temperature can be shortened.
[0065] Further, by providing the pusher base and/or pusher block
with a nozzle for guiding a temperature control gas, separate from
the gas flow in the chamber for maintaining the electronic devices
at a predetermined temperature, toward the direction of the heat
absorbing and radiating member, fluctuations in the temperature
distribution due to the heat generated by the electronic device can
be effectively suppressed and the time for elevation or reduction
of the temperature can be shortened.
[0066] The type of the device testing apparatuses according to the
first to 11th aspects of the invention is not particularly limited.
The invention may be applied to ones which hold, pick up, or simply
push electronic devices, device testing apparatuses of a type
holding and testing a plurality of electronic devices, device
testing apparatuses of a type testing a plurality of electronic
devices loaded on a test tray, etc.
[0067] Further scope of the applicability of the present invention
will become apparent from the detailed description given
hereinafter. However, it should be understood that the detailed
description and specific examples, while indicating preferred
embodiments of the invention, are given by way of illustration
only, since various changes and modifications within the spirit and
scope of the invention will become apparent to those skilled in the
art from this detailed description.
BRIEF DESCRIPTION OF THE DRAWINGS
[0068] The present invention will become more fully understood from
the detailed description given hereinbelow and the accompanying
drawings which are given by way of illustration only, and thus are
not limitative of the present invention, and wherein:
[0069] FIG. 1 is a schematic overall view of an IC chip testing
apparatus according to a first embodiment of the present
invention;
[0070] FIG. 2 is a sectional view of key portions of the IC chip
testing apparatus;
[0071] FIG. 3 is a sectional view of key portions showing the
vicinity of connection terminals of an IC chip testing
apparatus;
[0072] FIG. 4 is a sectional view of key portions showing the
vicinity of connection terminals of an IC chip testing apparatus
according to another embodiment of the present invention;
[0073] FIG. 5 to FIG. 12 are sectional views of key portions of IC
chip testing apparatuses according to other embodiments of the
present invention;
[0074] FIG. 13 is a schematic perspective view of an IC chip
testing apparatus according to still another embodiment of the
present invention;
[0075] FIG. 14 is a schematic view of a method of handling an IC
chip in a device testing apparatus shown in FIG. 13;
[0076] FIG. 15 is a disassembled perspective view of a test tray
provided in the device testing apparatus shown in FIG. 13;
[0077] FIG. 16 is a disassembled perspective view of the structure
of a bush, insert (test tray), socket guide, and contact pins
(contact portion) in the test head shown in FIG. 13;
[0078] FIG. 17 is a sectional view of key portions along the line
XVII-XVII shown in FIG. 16;
[0079] FIG. 18 is a sectional view of key portions along the line
XVIII-XVIII shown in FIG. 16;
[0080] FIG. 19 is a disassembled perspective view of an example of
a match plate;
[0081] FIG. 20 is a sectional view of the structure of the inside
of a test chamber;
[0082] FIG. 21 is a disassembled perspective view of another
embodiment of the present invention (corresponding to FIG. 16);
[0083] FIG. 22 is a disassembled perspective view of an example of
a match plate of the embodiment shown in FIG. 21;
[0084] FIG. 23 is a sectional view of the structure of the inside
of a test chamber of the embodiment shown in FIG. 21;
[0085] FIG. 24 is a disassembled perspective view of still another
embodiment of the present invention;
[0086] FIG. 25 is a sectional view along the line XXV-XXV of a test
head portion of the embodiment shown in FIG. 24;
[0087] FIG. 26 is a sectional view of the inside of a chamber of a
device testing apparatus according to another embodiment of the
present invention;
[0088] FIG. 27 is a plane view of key portions of the match plate
shown in FIG. 26; and
[0089] FIG. 28 is a sectional view of key portions of the device
testing apparatus according to another embodiment of the present
invention.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0090] First Embodiment
[0091] As shown in FIG. 1, the IC chip testing apparatus 2
according to the present embodiment is an apparatus for testing an
IC chip, as a device under test, in an ordinary temperature, low
temperature, or high temperature state and is provided with a
handler 4 and a main test unit, not shown. The handler 4 conveys IC
chips under test successively to IC sockets provided at the test
head and stores the IC chips finished being tested on predetermined
trays sorted in accordance with the test results.
[0092] In this embodiment, the handler 4 is provided with a chamber
6. The top of a test head 10 is exposed at a test stage 8 in the
chamber 6. The top of the test head 10 is shown in FIG. 2. The top
of the test head 10 has a socket 20 attached to it. The chip
mounting opening of the socket 20 faces the inside of the chamber
so that the IC chips 22 under test conveyed from a suction head 24
may be successively detachably mounted in it.
[0093] The IC sockets 20 provided on the test head 10 are connected
through cables to the main test unit (not shown). IC chips 22
detachably mounted at the IC sockets 20 are connected through the
cables to the main test unit, then the IC chips 22 are tested by
test signals from the main test unit. Details of the IC sockets 20
will be given later.
[0094] As shown in FIG. 1, the handler 4 has an IC magazine 30 for
storing IC chips to be test and storing tested IC chips sorted into
classes. The IC magazine 30 holds loader use trays 32A on which IC
chips to be tested are carried, sorting trays 32B to 32E on which
tested IC chips are carried sorted into classes, empty trays 32F,
and option trays 32G. These trays 32A to 32G are arranged at
predetermined intervals along the X-direction and are stacked in
the Z-direction (height direction).
[0095] IC chips carried on a loader tray 32A are conveyed to a soak
stage 36 inside the chamber 6 using the first XY-conveyor 34
attached to the handler 4. Further, the IC chips finished being
tested at the test head 10 are loaded and sorted on the sorting
trays 32B to 32E of the IC magazine 30 using the second XY-conveyor
35. Among the sorting trays 32B to 32E, for example, the trays 32C
are the tray for good devices, while the other trays are the trays
for the defective devices or devices for retesting.
[0096] The empty trays 32F are conveyed to and stacked over the
sorting trays 32B to 32E which have become filled with the tested
IC chips and are used as sorting trays. The option trays 32G are
used for other applications.
[0097] The inside of the chamber 6 is air-tight in structure except
for the portion for transfer of the IC chips which is designed to
be able to open and close by a shutter etc. and for example can
maintain a high temperature state of room temperature to about 160
C or a low temperature state of room temperature to about -60 C.
The inside of the chamber 6 is divided into a soak stage 36, a test
stage 8, and an exit stage 40.
[0098] The soak stage 36 has a turntable 38 arranged in it. The
surface of the turntable 38 has indentations 42 for temporarily
holding IC chips arranged at a predetermined pitch along the
circumferential direction. In the present embodiment, there are two
rows of indentations 42 formed in the radial direction of the
turntable 38. The two rows of indentations 42 are arranged at a
predetermined pitch in the circumferencial direction. The turntable
38 turns clockwise. The IC chips carried into the indentations 42
of the turntable 38 at the loading position 44 by the first
XY-conveyor 34 are given a thermal stress (low temperature or high
temperature) until the temperature conditions to be tested are
reached while the turntable 38 is being indexed in the direction of
rotation.
[0099] At a takeout position 46 about 240 degrees in the direction
of rotation from the loading position 44 based on the center of
rotation of the turntable 38, the suction heads attached to one of
the three contact arms 48 are positioned above the turntable 38. At
that position, IC chips can be taken out from the indentations 42
by the suction heads. The three contact arms 48 are attached at
angles of substantially equal amounts in the circumferential
direction with respect to the shaft 50 and can be indexed 120
degrees at a time in the clockwise direction of rotation about the
shaft 50. Note that this "index" means to repeatedly turn by a
predetermined angle, then stop, then again turn by a predetermined
angle. At the time of this indexing of a contact arm 48, the time
when the arm 48 is stopped corresponds to the time during which IC
chips are mounted in sockets of the test head 10 and tested plus
the time for detachment of the IC chips from the sockets. The
stopping time of this indexing is the same as the stopping time of
the indexing at the turntable 38. The turntable 38 and the contact
arms 48 are rotated to be indexed synchronously.
[0100] In the embodiment, the suction heads of one of the three
contact arms 48 are positioned above the takeout position 46 of the
soak stage 36, the suction heads of another of the contact arms 48
are positioned above the contact heads 10 of the test stage 8, and
the suction heads of the other of the contact arms 48 are
positioned above the inlet 52 of the exit stage 40.
[0101] The IC chips loaded in the indentations 42 of the turntable
38 at the loading position 44 of the turntable 38 are given a
predetermined thermal stress while being indexed from the loading
position 44 to the takeout position 46 and are picked up by the
suction heads of a contact arm 48 at the takeout position 46. The
IC chips picked up by the suction heads are positioned above the
test head 10 by the indexing of the contact arm 48 in the clockwise
direction. At that position, as shown in FIG. 2, the IC chips 22
picked up and held by the suction heads 24 are attached to the
sockets 20 and tested.
[0102] The IC chips 22 attached to the sockets 20 above the test
head 10 and finished being tested are picked up again by the
suction heads 24 and positioned above the inlet 52 of the exit
stage 40 by the indexing of the contact arm 48 shown in FIG. 1 in
the clockwise direction. At this position, the tested IC chips are
slid to the exit position 54 by an exit shifter in the direction of
the arrow A. At the exit position of the exit stage 40, the IC
chips arranged above the exit shifter are returned from the
temperature of the test, that is, the low temperature or the high
temperature, to ordinary temperature. In the case of a low
temperature test, the IC chips are returned to ordinary temperature
at the exit stage 40 so it is possible to effectively prevent
condensation from occurring on the IC chips directly after being
taken out from the chamber 6.
[0103] The IC chips arranged above the exit shifter at the exit
position 54 of the exit stage 40 are returned to ordinary
temperature, then shifted in the direction of the arrow B by a not
shown exit arm and moved to an exit turn arranged at the receiving
position 56. The exit turn is designed to be able to move back and
forth between the receiving position 56 and the eject position 58
by turning in the direction of the arrow C. The suction heads of
the second XY-conveyor 35 are designed to be able to move to the
eject position 58 of the exit turn. The tested IC chips arranged at
the eject position by the exit turn are conveyed by the conveyor 35
to one of the sorting trays 32B to 32E based on the test
results.
[0104] In the device testing apparatus 2 according to the present
embodiment, a soak stage heat exchanger 60 is arranged at the
ceiling of the soak stage 36 inside the chamber 6 of the handler 4
and a test stage heat exchanger 62 is arranged at the side wall of
the test stage 8. These heat exchangers 60 and 62 are provided with
cooling units using liquid nitrogen etc. as a coolant and blowers
for circulating the cooling air inside the chamber when the tester
2 is able to perform low temperature tests. When the tester is able
to perform high temperature tests, the heat exchangers 60 and 62
are provided with heating units and blowers. When the tester is
able to perform low temperature tests and high temperature tests,
the heat exchangers 60 and 62 are provided with cooling units,
heating units, and blowers and are used switching between the
cooling units and heating units. These heat exchangers 60 and 62
are controlled by a temperature controller 70. The temperature
controller 70 receives as input output signals from a temperature
sensor 72 arranged at the test stage 8, temperature sensor 74
arranged at the soak stage 36, and other sensors and can control
the amount of heat exchange (output) of the heat exchangers 60 and
62 in accordance with the output signals from these sensors.
[0105] In the following explanation, the explanation will be given
of the case where the tester 2 is one able to perform both high
temperature tests and low temperature tests and the apparatus is
used mostly for performing low temperature tests.
[0106] As shown in FIG. 2, at the test stage 8, the bottom of the
chamber 6 comprised of a heat insulating material etc. and part of
the main base 80 holding the chamber 6 are cut away. A socket 20
held on a test head 10 is attached there.
[0107] The socket 20 is held in a socket guide 82. The socket guide
82 is attached to a base ring 88. The base ring 88 is attached to a
mounting base 90 and constitutes the chamber opening 92. The
mounting base 90 has a heat insulating property similar to that of
the chamber 6 and is detachably secured to the bottom opening of
the chamber 6 and the main base 80.
[0108] The back surface of the socket 20 (outside of chamber) has a
low temperature socket adapter 98 connected to it. The terminals of
the socket 20 are electrically connected with. The adapter 98 is
secured at the surface of the approximate center portion of the
printed circuit board 100 and enables the electrical connection
between the terminals of the socket 20 and the printed circuit
board 100. The test head 10 is attached to the bottom surface of
the printed circuit board 100. Note that the printed circuit board
100 is also called a performance board.
[0109] The test head 10 receives a drive signal from the main test
unit, not shown, and sends a test drive signal to an IC chip 22
attached to the socket 20 through the printed circuit board 100 and
the adapter 98.
[0110] In the present embodiment, as shown in FIG. 2, a heating
board 106 having an opening at its center is bolted etc. to the
back surface of the mounting base 90 (outside of chamber) through a
mounting board serving as both a heat insulating material and seal
member. The heating board 106 is also called an HIFIX heater and
comprised of a rubber heater or other planar heating element 108
sandwiched between aluminum sheets etc. At the bottom surface of
the heating board 106 is affixed in advance a first seal member
112. The first seal member 112 is configured for example as a
silicone sponge rubber sheet or other sheet having elasticity.
[0111] In this embodiment, when securing the socket adapter 98
attached to the approximate center of the printed circuit board 100
serving as the test board by connecting it to the socket 20, the
outer circumferential surface of the printed circuit board 100
directly contacts the bottom surface of the heating board 106
through the first seal member 112 and the printed circuit board
l00a is directly heated by the heating board 106.
[0112] The heating board 106 has radial drying passages 110 formed
in it. Dry gas can be sealed in the first air-tight space 118
formed between the socket guide 82 and the printed circuit board
100. As the dry gas for sealing inside the first air-tight space
118, for example use is made of dry air having for a condensation
temperature lower than the inside temperature of the chamber 6. For
example, when the inside of the chamber 6 is about -55 C, the
condensation temperature of the dry air sealed inside the first
air-tight space 118a through the drying passages 110 is preferably
about -60 C. The temperature of the dry air is for example room
temperature.
[0113] As shown in FIG. 3, in the present embodiment, the socket 20
has attached to it connection terminals 21 able to deform
elastically in the vertical direction. The bottom ends of the
connection terminals 21 are connected to the printed circuit board
100. The top ends of the connection terminals 21 are formed with
contacts 21a against which the terminals 22a of the IC chip 22 are
pushed and electrically connected.
[0114] In the present embodiment, the suction head 24 also
functions as a pusher. When testing an IC chip 22, the IC chip 22
picked up by the vacuum suction bore 25 is pushed in the direction
of the connection terminals 21 to secure electrical connection
between the terminals 22a and the contacts 21a of the connection
terminals 21.
[0115] The bottom end of the suction head 24 has attached to it a
pushing pad 26 for contacting the top surface of the terminals 22a
of the IC chip 22 and pushing these terminals 22a against the
contacts 21a of the connection terminals 21. The pushing pad 26 is
comprised of a synthetic resin or other insulating member.
[0116] Inside of the suction head 24 positioned around the bottom
end of the vacuum suction bore 25 is buried a cooling unit 27
directly contacting the IC chip 27 or indirectly contacting it
through an insulating member for cooling the same. The cooling unit
27 is comprised for example of a Peltier element, vortex tube, heat
pipe, cooling use heat exchanger, etc. A Peltier element is an
element able to cool by electricity. A vortex tube is a cooling
unit able to cool by blowing compressed air. A heat pipe is a unit
using the movement of fluid in the pipe to absorb heat. As the heat
exchanger, a passage for circulating liquid nitrogen or another
coolant or a passage for circulating a coolant from a refrigeration
cycle may be mentioned. Note that when using as a cooling unit 27 a
Peltier element or heat pipe, the position opposite to the cooling
side becomes a heat radiating portion, so, as shown in FIG. 3, the
cooling fins 29 may be connected to the cooling unit 27. Further,
when the suction head 24 itself is superior in heat conductivity,
the outer circumferential surface of the suction head is processed
to roughen it to make it function as heat radiating fins. Further,
the cooling unit 27 may be another cooling unit than the above.
[0117] Near the cooling unit 27 is arranged a temperature sensor
28. The temperature of the IC chip 22 cooled by the cooling unit 27
can be directly or indirectly measured. The temperature sensor 28
is not particularly limited, but a platinum sensor or other
thermocouple or other temperature sensor can be used. The
temperature signal measured by the temperature sensor 28 is input
to the controller. This controls the cooling output by the cooling
device 27 so as to cancel the heat generated by the IC chip 22
during tests and maintain the IC chip 22 constantly at a
predetermined temperature.
[0118] In the IC chip testing apparatus 2 according to the present
embodiment, even if the IC chip 22 generates heat on its own at the
time of testing, the cooling unit 27 cools the IC chip 22, so it is
possible to cancel out the effect due to the heat generated by the
IC chip 22 and to test the IC chip 22 at a predetermined low
temperature as prescribed in the specifications.
[0119] In the device testing apparatus of the present embodiment, a
heating board 106 is attached around the chamber opening 92a of the
chamber 6 with an inside cooled to a temperature below ordinary
temperature and the printed circuit board 100a is heated by heat
conduction. The printed circuit board 100 positioned behind the
socket 20 is heated to a temperature above the condensation point
of the ambient gas. Therefore, it is possible to effectively
prevent condensation from occurring at the printed circuit board
100 behind the socket.
[0120] Further, in the IC chip testing apparatus according to the
present embodiment, since a special spacing frame or other heat
insulating structure is not employed, the manufacturing costs
become lower. Further, since the distance between the printed
circuit board 100 and the socket 20 is remarkably short, the
electrical path from the socket 20 to the printed circuit board 100
(electrical cables etc.) can be shortened, greater resistance to
noise can be obtained, and the reliability of the tests can be
improved.
[0121] Further, in the IC chip testing apparatus 2 according to
this embodiment, by bringing the printed circuit board 100 into
contact with the heating board 106 so as to form a first air-tight
space 118 at the printed circuit board side of the socket guide 82
and forming in the heating board 106 a drying passage 110 for
feeding dry gas in the first air-tight space 118, the first
air-tight space 118 can be filled with a dry gas. This enables
condensation behind the socket guide 82 to be further effectively
prevented.
[0122] Second Embodiment
[0123] As shown in FIG. 4, in the second embodiment of the present
invention, no cooling unit is attached at the suction head 24a
side. A cooling unit 27a or 27b is attached at the side of the
socket 20. The position of arrangement of the cooling unit 27a or
27b is not particularly limited, but for example as shown in FIG. 4
the unit may be arranged between the socket 20 and socket adapter
98 or at the position of the bottom ends of the connection
terminals 21.
[0124] When arranging the cooling unit 27a between the socket 20
and the socket adapter 28, it is preferable to form a space to
prevent short-circuiting with the connection terminals 21. In this
case, the cooling unit 27a cools the IC chip 22 through the socket
20 to cancel the heat generated by the IC chip 22 and thereby
enable the IC chip 22 to be tested at a low temperature as
prescribed in the specifications.
[0125] When arranging the cooling unit 27b at the position of the
bottom ends of the connection terminals 21, the cooling unit 27b is
attached at the bottom ends of the connection terminals 21 through
a plastic or other insulating member 29. In this case, the cooling
unit 27b cools the IC chip 22 through the insulating member 29 and
connection terminals 21 to cancel the heat generated by the IC chip
22 and thereby enable the IC chip 22 to be tested at a low
temperature as prescribed in the specifications.
[0126] The cooling units 27a and 27b are comprised of cooling units
similar to the above cooling unit 27. Note that when the cooling
unit 27a or 27b itself has an insulating property, the cooling unit
27a or 27b may be brought into direct contact with the connection
terminals 21. The cooling unit 27a or 27b may be provided with heat
radiating fins 29a or 29b if necessary for cooling.
[0127] Modifications of First Embodiment and Second Embodiment
[0128] In the above first and second embodiments, the explanation
was made with reference to an IC chip testing apparatus 2 mainly
performing low temperature tests, but it is also possible to use
the device 2 of the present embodiments to conduct ordinary
temperature tests of electronic devices. In this case, the test
chamber 6 and the temperature controller attached inside it may be
eliminated. Even without the test chamber 6 and the internal
temperature controller, if it were possible to control the IC chip
22 to a predetermined ordinary temperature by just the cooling unit
27, 27a, and/or 27b, the chamber 6 and internal temperature
controller would become unnecessary.
[0129] When conducting low temperature tests on an IC chip 22,
however, if just maintaining the IC chip 22 at a low temperature
state, condensation would sometimes become a problem, so it is
preferable to use the test chamber 6 to cover the test stage 8 and
maintain the ambient temperature of the inside of the chamber 6 at
a predetermined low temperature state.
[0130] Further, even when conducting high temperature tests on an
IC chip 22, the present invention is effective from the viewpoint
of control to prevent the temperature of the IC chip 22 exceeding a
predetermined temperature.
[0131] Third Embodiment
[0132] The overall configuration of the IC chip testing apparatus
according to the present invention is similar to that of the device
testing apparatus according to the first embodiment shown in FIG.
1. Part of the explanation thereof will therefore be omitted.
[0133] As shown in FIG. 5, at the test stage, part of the chamber
comprised of the heat insulating material etc. is cut away. A
socket 120 held on a test head is attached there.
[0134] The socket 120 is held by the socket guide 180. The socket
guide 180 is attached to the bottom opening of the chamber 6 shown
in FIG. 1 through a not shown base ring etc.
[0135] A printed circuit board 184 is arranged behind the socket
120 (outside of chamber). The socket 120 has attached to it
connection terminals 121 able to elastically deform in the vertical
direction. The bottom ends of the connection terminals 121 are
connected to the printed circuit board 184. The top ends of the
connection terminals 121 are pushed against by the terminals of the
IC chip 122 for electrical connection. At the bottom surface of the
printed circuit board 184 is attached a test head 110. Note that
the printed circuit board 184 is also called a performance
board.
[0136] The test head 110 receives a drive signal from the main test
unit, not shown, and sends a test drive signal to the IC chip 122
connected to the connection terminals 121 of the socket 120 through
the printed circuit board 184.
[0137] In the present embodiment, as shown in FIG. 5, a suction
nozzle 127 having a vacuum suction bore 125 is provided below each
of the suction heads 124. The suction nozzle 127 also serves as a
pusher. When testing the IC chip 122, the IC chip 122 picked up by
the vacuum suction bore 125 is pushed in the direction of the
connection terminals 121 to secure electrical connection between
the terminals of the IC chip 122 and the connection terminals
121.
[0138] At the bottom end of the suction nozzle 127 is attached a
pushing pad 126 for contacting the top surface of the IC chip 122
(first surface) and pushing the terminals of the IC chip 122
against the connection terminals 121 of the socket 120. The pushing
pad 126 is comprised of a synthetic resin or other insulating
material. Note that an outer cylinder 128 may be provided around
the outer circumference of the suction nozzle 127. The outer
cylinder 128 is for example comprised of a conductive metal. By its
lower end contacting the IC chip 122, it is possible to drain the
static electricity of the chip 122. In the present invention, the
pusher also includes this outer cylinder 128.
[0139] The vacuum suction bore 125 formed in the suction nozzle 127
is given a suitable negative pressure by a not shown ejector or
other vacuum generator to detachably pick up and hold the IC chip
122 at the lower end of the suction pad 126. Note that at the time
of testing the IC chip 122, negative pressure is not introduced to
the vacuum suction bore 125. An IC chip 122 is pushed by the
suction pad 126 in the direction of the socket 120 for connection
of the terminals of the IC chip 122 and the connection terminals of
the socket 120.
[0140] As shown in FIG. 5, in the present embodiment, a temperature
sensor protecting cylinder 186 is attached through the approximate
center of the socket 120 and the printed circuit board 184. Inside
the temperature sensor protecting cylinder 186 is formed an axial
bore 188 along the axial direction. Behind the wall at the top part
of the axial bore 188 is attached a temperature sensor 190. In the
present embodiment, the temperature sensor 190 is comprised by a
thermocouple, platinum temperature measuring resistor, thermistor,
or other contact-type temperature sensor. The temperature sensor
190 enables direct measurement of the temperature of the IC chip
122 by the top surface of the wall of the top part of the sensor
protecting cylinder 186 being brought in close contact with the
back (second surface) of the IC chip 122.
[0141] The temperature data of the IC chip 122 detected by the
temperature sensor 190 is sent to a not shown controller. The
controller detects when the IC chip 122 has become higher than the
set temperature due to heat it generates during testing and blows a
cooling medium through the cooling medium passage 182 (cooling
medium blowing means) formed at the socket guide 180 or another
member to around the IC chip 122 to cool the IC chip 122.
[0142] The cooling medium is not particularly limited, but dry air
having a condensation point about the same or lower than the inside
temperature of the chamber 6 is preferable. For example, when the
inside of the chamber 6 is about -55 C, the condensation
temperature of the dry air passing through the cooling medium
passage 182 and blown around the IC chip 122 is preferably a
temperature of -55 C or lower. The temperature of the cooling
medium itself blown through the cooling medium passage 182 toward
the IC chip 122 is controlled to about the same degree as the air
temperature inside the chamber 6. The temperature of the cooling
medium, amount blown, and blowing time are determined so that the
temperature of the IC chip 122 detected by the temperature sensor
190 becomes a temperature inside the permissible range of the test
specifications. That is, the controller monitors the temperature
output of the temperature sensor 190 and controls the temperature,
amount, and blowing time of the cooling medium blown from the
cooling medium passage 182 to around the IC chip 122 so as to
cancel out the heat generated by the IC chip 122 during testing and
thereby control the temperature so that the IC chip 122 is
constantly maintained at a set temperature.
[0143] Note that the cooling medium passage 182 is comprised by
forming a through hole in an existing socket adapter 180, but it is
also possible to form a cooling medium passage in another member
separate from the socket adapter 180. It is also possible to attach
a tube, nozzle, etc. to blow the cooling medium around the IC chip
122. Further, the cooling medium passage 182 may be a single
passage. When a plurality are provided, however, the cooling
efficiency is further improved. Further, it is possible to provide
around the IC chip 122, along with a cooling medium blowing means
comprised of such a cooling medium passage 182 etc., an ambient gas
suction means for sucking in the gas around the IC chip 122. By
sucking in the gas present around the IC chip 122 (gas becoming
higher in temperature than the set temperature due to the heat
generated by the IC chip 122) and cooling the area around the IC
chip 122 by the cooling medium blowing means, the cooling
efficiency is further improved.
[0144] In such an IC chip testing apparatus according to the
present embodiment, even if the IC chip 122 generates heat on its
own at the time of testing, the heat generated is detected by the
temperature sensor 190 and a cooling medium controlled in its
temperature, amount, etc. so as to cancel out the effects of the
heat generated by the IC chip 122 is blown from the cooling medium
passage 182 toward the IC chip 122 for a predetermined time.
Therefore, at the time of testing, it is possible to test an IC
chip 122 at a predetermined set temperature as prescribed in the
specifications at all times.
[0145] In particular, with an IC chip testing apparatus according
to the present embodiment, since a temperature sensor 190 detecting
the temperature of the IC chip 122 is arranged at the socket 120
side, the electrical wiring from the temperature sensor 120 becomes
simple even in a tester having a rotary arm type suction head. Note
that in the past, a temperature sensor was arranged at the suction
nozzle 127 side and the suction nozzle 127 was made to rotate by
the rotary arm 48 shown in FIG. 1, so it was necessary to provide a
rotary contact connection terminal etc. in the middle of the
electrical wiring from the temperature sensor and the wiring became
more complicated.
[0146] Further, in a testing apparatus having a rotary arm type
suction head 124, a plurality of rotary arms 48 are generally
arranged around the shaft 50 shown in FIG. 1. When attaching a
temperature sensor to a suction nozzle 127 of a suction head 124 or
the outer cylinder 127, a number of temperature sensors
corresponding to the number of suction nozzles 1276 or outer
cylinders 128 becomes necessary. As opposed to this, in the tester
according to the present embodiment, it is sufficient to provide a
number of temperature sensor 190 corresponding to the number of
sockets 120 in which IC chips 122 are mounted, so it is possible to
reduce the number of the temperature sensors 190.
[0147] Fourth Embodiment
[0148] As shown in FIG. 6, in this embodiment, instead of the
contact type temperature sensor 190 shown in FIG. 5, a non-contact
type temperature sensor 190a such as a radiation thermometer using
infrared rays etc. is arranged. The rest of the structure is
similar to that of the tester according to the embodiment shown in
FIG. 5. Common members are assigned common reference numerals and
common portions of the explanations are omitted.
[0149] As shown in FIG. 6, the testing apparatus according to this
embodiment is exactly the same as the tester of the embodiment
shown in FIG. 5 except for having the non-contact type temperature
sensor 190a and exhibits similar actions and effects.
[0150] Fifth Embodiment
[0151] As shown in FIG. 7, in this embodiment, instead of the
cooling medium passage 182 formed at the socket adapter 180 shown
in FIG. 5 or along with the same, a cooling medium blowing nozzle
192 (cooling medium blowing means) for blowing a cooling medium
toward the back (second surface) of the IC chip 122 is attached to
the back of the socket 120. The cooling medium blowing nozzle 192
has a tube 194 connected to it. A cooling medium is fed from a not
shown cooling medium generating means. The cooling medium can be
blown from the nozzle 192 to the back of the IC chip 122.
[0152] The cooling medium generating means is not particularly
limited, but for example in the case of a low temperature test, it
may be comprised of a heat exchanger using liquid nitrogen for
lowering the temperature of the inside of the chamber 6 and a
blower while in the case of a high temperature test it may be
comprised of a heat exchanger using a heater or a cooling element
and a blower.
[0153] The rest of the structure is similar to that of the tester
according to the embodiment shown in FIG. 5. Common members are
assigned common reference numerals and common portions of the
explanations are omitted.
[0154] As shown in FIG. 7, the tester according to this embodiment
is exactly the same as the testing apparatus of the embodiment
shown in FIG. 5 except for having the blowing nozzle 192 for
blowing a cooling medium to the back of the IC chip 122, so
exhibits similar actions and effects as the third embodiment and
improves the cooling efficiency of the IC chip 122.
[0155] Sixth Embodiment
[0156] As shown in FIG. 8, in this embodiment, instead of the
cooling medium passage 182 formed at the socket adapter 180 shown
in FIG. 5 or along with the same, a cooling medium blowing nozzle
192a (cooling medium blowing means) for blowing a cooling medium
toward the side surfaces of the suction nozzle 127 and the outer
cylinder 128 is arranged. The cooling medium blowing nozzle 192a in
this embodiment is secured on the socket adapter 180.
[0157] The cooling medium blowing nozzle 192a has a tube 194a
connected to it. A cooling medium is fed from a not shown cooling
medium generating means. The cooling medium generating means used
is one similar to that illustrated in the third embodiment.
[0158] At the outer circumference of the outer cylinder 128 and/or
suction nozzle 127 to which the cooling medium from the cooling
medium blowing nozzle 192a is blown is preferably formed heat
exchange fins 129 for raising the heat exchange efficiency and more
quickly cooling the outer cylinder 128 and/or suction nozzle
127.
[0159] The rest of the structure is similar to that of the tester
according to the embodiment shown in FIG. 5. Common members are
assigned common reference numerals and common portions of the
explanations are omitted.
[0160] As shown in FIG. 8, the tester according to this embodiment
is exactly the same as the tester of the embodiment shown in FIG. 5
except for the formation of heat exchange fins 129 at the outer
circumference of the outer cylinder 128 and blowing a cooling
medium to the side surface of the outer circumference of the outer
cylinder 128, so exhibits similar actions and effects as the third
embodiment and exhibits the actions and effects explained
below.
[0161] That is, a variety of components are arranged around the
socket 120 used in the testing of an IC chip 122 and it is often
difficult to blow a cooling medium directly toward the IC chip 122.
In the present embodiment, the cooling medium is blown toward the
side surface of the outer cylinder 128 to cool the IC chip 122
indirectly. At this time, by providing heat exchange fins 129 or
other projections or depressions at the outer circumference of the
outer cylinder 128, it is possible to increase the heat exchange
efficiency, cool the outer cylinder 128 efficiently, and
efficiently cool the IC chip 122 indirectly. In the present
embodiment as well, it is possible to cancel out the effect of the
heat generated by the IC chip 122 well and test the IC chip 122 at
a predetermined temperature as prescribed in the
specifications.
[0162] Note that as a modification of this embodiment, it is
possible not to provide the cooling medium blowing nozzle 192a or
cooling medium blowing passage 182 shown in FIG. 8, but to provide
heat exchange fins 129 and other projections or depressions at the
outer circumference of the suction nozzle 127. When the heat
generated by the IC chip 122 is not that large, it is possible to
cool the IC chip 122 even with radiation of heat by the projections
or depressions.
[0163] Seventh Embodiment
[0164] As shown in FIG. 9, in this embodiment, terminals are formed
over the entire back of the IC chip 122. Corresponding to this, a
large number of connection terminals 121 are arranged at the socket
120. Therefore, in this embodiment, there is no space to provide a
temperature sensor 190 or 190a at the socket 120 side. Accordingly,
in this embodiment, as shown in FIG. 9, a non-contact type
temperature sensor 190b is arranged at the side (pusher side) of
the suction nozzle 127 and outer cylinder 128. This non-contact
temperature sensor 190b is secured to the socket adapter 180 and
not secured to the suction nozzle 127 and outer cylinder 128 and
does not move along with them. The direction of measurement of
temperature of this non-contact type temperature sensor 190b is
toward the top surface (first surface) of the IC chip 122. The
temperature of the IC chip 122 can be measured without contact.
[0165] The rest of the structure is similar to that of the tester
according to the embodiment shown in FIG. 5. Common members are
assigned common reference numerals and common portions of the
explanations are omitted.
[0166] As shown in FIG. 9, the tester according to this embodiment
exhibits similar actions and effects as the third embodiment and
exhibits the actions and effects explained below.
[0167] That is, when terminals of an IC chip 122 are arranged over
the entire back (second surface) of the IC chip 122, a
corresponding number of connection terminals are arranged without
intervening space at the socket 120. In such a case, it is
difficult to measure the temperature of the IC chip 122 from the
socket side. In the present embodiment, the temperature of the
surface of the pusher side of the IC chip 122 is measured by the
non-contact type temperature sensor 190b.
[0168] If using a non-contact type temperature sensor 190b, there
is no need to secure it to the suction nozzle 127 or outer cylinder
128 and there is no need to make it rotate by the rotary arm
together with the suction nozzle 127 and outer cylinder 128.
Therefore, even in a tester having a rotary arm type suction head
124, the electrical wiring from the temperature sensor 190b does
not become complicated. In the tester of the present embodiment, a
non-contact type temperature sensor 190b is used to accurately
measure the temperature of the IC chip 122 and a cooling medium is
blown on the IC chip 122 based on the measurement results to cool
the IC chip 122. Therefore, it is possible to cancel out the effect
of heat generated by the IC chip 122 well and test the IC chip 122
at a predetermined temperature as prescribed in the
specifications.
[0169] Eighth Embodiment
[0170] As shown in FIG. 10, in this embodiment, terminals are
formed over the entire back of the IC chip 122. Corresponding to
this, a large number of connection terminals 121 are arranged at
the socket 120. Therefore, in this embodiment, there is no space to
provide a temperature sensor 190 or 190a at the socket 120 side.
Accordingly, in this embodiment, as shown in FIG. 9, a non-contact
type temperature sensor 190c is arranged at the side (pusher side)
of the suction nozzle 127 and outer cylinder 128. This non-contact
temperature sensor 190c is secured to the socket adapter 180 and
not secured to the suction nozzle 127 and outer cylinder 128 and
does not move along with them. The direction of measurement of
temperature of this non-contact type temperature sensor 190c is
toward the outer circumferential surface of the outer cylinder 128
(pusher). The temperature of the outer cylinder 128 can be measured
without contact.
[0171] The rest of the structure is similar to that of the tester
according to the embodiment shown in FIG. 5. Common members are
assigned common reference numerals and common portions of the
explanations are omitted.
[0172] As shown in FIG. 10, the tester according to this embodiment
exhibits similar actions and effects as the third embodiment and
exhibits the actions and effects explained below.
[0173] That is, when terminals of an IC chip 122 are arranged over
the entire back (second surface) of the IC chip 122, a
corresponding number of connection terminals are arranged without
intervening space at the socket 120. Further, the suction nozzle
127 and outer cylinder 128 are arranged above the socket, so even
if a non-contact type temperature sensor is used, it is often
difficult to directly measure the temperature from the top surface
(first surface) of the IC chip 122. Therefore, in the present
embodiment, the temperature of the outer cylinder 128 is measured
by the non-contact type temperature sensor 190c.
[0174] If using a non-contact type temperature sensor 190c, there
is no need to secure it to the suction nozzle 127 or outer cylinder
128 and there is no need to make it rotate by the rotary arm
together with the suction nozzle 127 and outer cylinder 128.
Therefore, even in a tester having a rotary arm type suction head
124, the electrical wiring from the temperature sensor 190c does
not become complicated. In the testing apparatus of the present
embodiment, rather than directly measure the temperature of the IC
chip 122, a non-contact type temperature sensor 190c is used to
measure the temperature of the outer cylinder 128 so as to estimate
the temperature of the IC chip 122 and thereby detect the
temperature rise due to heat generated by the IC chip 122. The IC
chip 122 contacts the outer cylinder 128, so if the IC chip 122
rises in temperature due to heat it generates, the temperature of
the outer cylinder 128 also rises. The temperature of the outer
cylinder 128 and the temperature of the IC chip 122, however, do
not always match, so in order to estimate the temperature of the IC
chip 122 from the detected temperature of the outer cylinder 128,
it is necessary to consider a correction value found by experiments
etc. for the detected temperature of the outer cylinder 128 to
estimate the temperature of the IC chip 122.
[0175] In the present embodiment, a non-contact type temperature
sensor 190c is used to measure the temperature of the outer
cylinder 128, the temperature of the IC chip 122 is accurately
predicted from the detected temperature, and the cooling medium is
blown on the IC chip 122 based on the results so as to cool the IC
chip 122. Therefore, it is possible to cancel out the effect of
heat generated by the IC chip 122 well and test the IC chip 122 at
a predetermined temperature as prescribed in the
specifications.
[0176] Modifications of Third to Eighth Embodiments
[0177] In the above embodiments, the explanation was given of the
case of an IC chip testing apparatus mainly conducting low
temperature tests, but it is also possible to use the tester of the
present invention to conduct ordinary temperature tests of
electronic devices. In such a case, the test chamber and the
temperature controller attached inside it may be eliminated. If it
is possible to control the IC chip 122 to the predetermined
ordinary temperature by just the cooling medium blowing passage 82,
cooling medium blowing nozzle 192 or 192a, or other cooling medium
blowing means even without the test chamber and internal
temperature controller, the chamber and internal temperature
controller become unnecessary.
[0178] When conducting low temperature tests on an IC chip 122,
however, if just holding the IC chip 122 in a low temperature
state, condensation sometimes becomes a problem, so it is desirable
to use a test chamber to cover the area around the test stage and
keep the ambient temperature inside the chamber at a predetermined
low temperature state.
[0179] Further, when testing an IC chip 122 at a high temperature,
the present invention is effective from the viewpoint of control of
the temperature of the IC chip 122 so that it does not exceed a
predetermined temperature.
[0180] Ninth Embodiment
[0181] The overall configuration of the device testing apparatus
according to this embodiment is not particularly limited. It may be
that of the device testing apparatus 2 shown in FIG. 1 or may be
that of the device testing apparatus 1001 shown in the later
explained FIG. 13.
[0182] As shown in FIG. 11 and FIG. 12, in the device testing
apparatus of the present embodiment, a suction head (pusher) 304c
is attached to a not shown Z-axial direction drive unit. The
suction head 304c has a pusher base moving up or down with respect
to a contact portion 302a and a movable base attached to the pusher
base through a floating mechanism. This movable base has secured to
it a suction head body 304c10 having a suction pad 304c2 for
picking up an IC chip.
[0183] The suction head body 304c10 secured to the movable base
(not shown) is formed with a through hole 304c11 for evacuation of
the inside. Further, a suction pad 304c2 comprised of rubber or
another elastic member is secured to the inside of the suction head
body 304c10. The suction force at the time of evacuation is
imparted to the tip of the suction pad 304c2.
[0184] In particular, the suction head body 304c10 of the present
embodiment has a temperature sensor 304c12 buried in it near the
suction pad 304c2. The output side terminal 304c13 (hereinafter
referred to as the "first terminal") is provided via the cable
304c14 exposed from the suction head body 304c10 toward the bottom.
The first terminal 304c13 is comprised to be able to project or
retract by a spring or other elastic member provided inside and is
designed not to be damaged even if approaching and striking the
later explained second terminal 302b1.
[0185] An air blower unit 302b comprised of a metal block is
provided around the contact portion 302a of the test head 302. The
air blower unit 302b has formed in it a cooling air passage 302b2
through which the cooling air is guided. The cooling air blown from
the outlet of the cooling air passage, as shown in FIG. 12, flows
toward the IC chip in the middle of the test from substantially
straight at the side.
[0186] Note that a height adjustment block 302b3 is interposed
between the air blower unit 302b and the test head 302. Even if the
height positions of IC chips differ due to the different shapes of
the contact portions 302a, by selecting the thickness of the height
adjustment block 302b3, it is possible to blow the cooling air from
straight laterally to the IC chips at all times. Due to this, it is
possible to dissipate the heat generated during the testing of IC
chips.
[0187] Further, a second terminal 302b1 is provided on the top
surface of the air blower unit 302b at a position corresponding to
the above first terminal 304c13. The output signal from the
temperature sensor 304c12 is sent through the cable 304c14, first
terminal 304c13, and second terminal 302b1 to a not shown
controller.
[0188] When the solder ball terminals HB of an IC chip are pushed
against the contact pins 302a1 of the contact portion 302a, the
first terminal 304c13 contacts the second terminal 302b1, so the
temperature sensor 304c12 is used to detect the temperature of the
IC chip and send it to the not shown controller. The controller,
receiving the temperature data, judges how much the temperature of
the IC chip is off from the target temperature and, when higher in
temperature, blows cooling air from the cooling air passage 302b2
as shown in FIG. 12 to cool the IC chip. Due to this, it is
possible to cool an IC chip even if generating heat.
[0189] In the present embodiment, even if the temperature sensor
304c12 is provided at the suction head 304c, the cable of the
temperature sensor 304c12 will not break due to movement of the
suction head 304c and as a result it is possible to accurately
measure the heat generated during a test.
[0190] In addition to this, it is possible to blow a sufficient
amount of cooling air based on the measured temperature of the IC
chip and, as a result, possible to prevent the electronic device
from being destroyed or damaged by overheating, considered a
particular problem in high temperature tests. Further, since the
temperature rise due to heat generated is suppressed by blowing a
fluid, not limited to high temperature tests, it is possible to
conduct tests at the targeted accurate temperature, so the
reliability of the test results is improved.
[0191] 10th Embodiment
[0192] As shown in FIG. 13, the device testing apparatus 1001 of
the present embodiment tests (inspects) whether an IC is operating
suitably in a state applying a high temperature or low temperature
thermal stress to the IC chip and classifies the ICs in accordance
with the test results. The operating test in the state with thermal
stress applied is performed by reloading the IC chips from a tray
carrying a large number of IC chips under test (hereinafter also
called the "customer tray KST", not shown) to a test tray TST (see
FIG. 15) conveyed through the inside of the device testing
apparatus 1001.
[0193] Therefore, the device testing apparatus 1001 of the present
embodiment, as shown in FIG. 13 and FIG. 14, is comprised of an IC
magazine 1200 which holds the IC chips to be tested or classifies
and stores the tested IC chips, a loader section 1300 which sends
the IC chips from the IC magazine 1200 into the chamber section
1100, a chamber section 1100 including a test head, and an unloader
section 1400 classifying and taking out tested IC chips which had
been tested in the chamber section 1100.
[0194] IC Magazine 1200
[0195] The IC magazine 1200 is provided with a pre-test IC stocker
1201 for holding IC chips to be tested and a post-test IC stocker
1202 for holding IC chips classified in accordance with the test
results.
[0196] These pre-test IC stocker 1201 and post-test IC stocker 1202
are each comprised of a frame-shaped tray support frame 1203 and an
elevator 1204 able to enter from under the tray support frame 1203
and move toward the top. The tray support frame 1203 supports in it
a plurality of stacked customer trays KST. Only the stacked
customer trays KST are moved up and down by the elevator 1204.
[0197] The pre-test IC stocker 1201 holds stacked customer trays
KST on which the IC chips to be tested are held, while the
post-test IC stocker 1202 holds stacked customer trays KST on which
IC chips finished being tested are suitably classified.
[0198] Note that since the pre-test IC stocker 1201 and the
post-test IC stocker 1202 are structured the same, the numbers of
the pre-test IC stocker 1201 and the post-test IC stocker 1202 may
be suitably set in accordance with need.
[0199] In the example shown in FIG. 13 and FIG. 14, the pre-test
stocker 1201 is provided with two stockers STK-B and provided next
to that with two empty stockers STK-E to be sent to the unloader
section 1400, while the post-test IC stocker 1202 is provided with
eight stockers STK-1, STK-2, . . . , STK-8 and can hold ICs sorted
into a maximum of eight classes according to the test results. That
is, in addition to classifying ICs as good and defective, it is
possible to divide the good ICs into ones with high operating
speeds, ones with medium speeds, and ones with low speeds and the
defective ICs into ones requiring retesting etc.
[0200] Loader Section 1300
[0201] The above-mentioned customer tray KST is conveyed from the
lower side of the test board 1105 to a window 1306 of the loader
section 1300 by a tray transfer arm 1205 provided between the IC
magazine 1200 and test board 1105. Further, in the loader section
1300, the IC chips loaded on the customer tray KST are transferred
once to a preciser 1305 by the X-Y-conveyor 1304. There, the mutual
positions of the IC chips are corrected, then the IC chips
transferred to the preciser 1305 are reloaded on the test tray TST
stopped at the loader section 1300 using the X-Y conveyor 1304
again.
[0202] The IC conveyor 1304 reloading the IC chips from a customer
tray KST to the test tray TST, as shown in FIG. 13, is provided
with two rails 1301 laid over the top of the test board 1105, a
movable arm 1302 able to move back and forth (this direction
designated as the Y-direction) between the test tray TST and a
customer tray KST by these two rails 1301, and a movable head 1303
supported by the movable arm 1302 and able to move in the
X-direction along the movable arm 1302.
[0203] The movable head 1303 of the X-Y conveyor 1304 has suction
heads attached facing downward. The suction heads move while
drawing out air to pick up the IC chips from the customer tray KST
and reload the IC chips on the test tray TST. For example, about
eight suction heads are provided on the movable head 1303, so it is
possible to reload eight IC chips at one time on the test tray
TST.
[0204] Chamber Section 1100
[0205] The above-mentioned test tray TST is conveyed into the
chamber section 1100 after being loaded with the IC chips by the
loader section 1300, then the IC chips are tested in a state
carried on the test tray TST.
[0206] The chamber section 1100 is comprised of a constant
temperature chamber 1101 for giving a desired high temperature or
low temperature thermal stress to the IC chips loaded on the test
tray TST, a test chamber 1102 for making the IC chips contact the
test head in a state given the thermal stress by the constant
temperature chamber 1101, and a soak chamber 1103 for removing the
given thermal stress from the IC chips tested in the test chamber
1102.
[0207] In the soak chamber 1103, when a high temperature was
applied in the constant temperature chamber 1101, the IC chips are
cooled by blowing in air to return them to room temperature.
Alternatively, when a low temperature of about -30 C has been
applied in the constant temperature chamber 1101, it heats the IC
chips by hot air or a heater etc. to return them to a temperature
where no condensation occurs. Next, the thus treated IC chips are
conveyed out to the unloader section 1400.
[0208] As shown conceptually in FIG. 14, the constant temperature
chamber 1101 is provided with a vertical conveyor. A plurality of
test trays TST stand by supported by the vertical conveyor until
the test chamber 1102 becomes empty. While standing by, a high
temperature or low temperature thermal stress is applied to the IC
chips.
[0209] The test chamber 1102 has a test head 1104 arranged at its
center. A test tray TST is conveyed above the test head 1104 and
the IC chips are tested by bringing their input-output terminals HB
into electrical contact with the contact pins 151 of the test head
1104. On the other hand, the test tray TST finished being tested is
treated in the soak chamber 1103 to return the temperature of the
ICs to room temperature, then is ejected to the unloader section
1400.
[0210] The test board 1105 has a test tray conveyor 1108 mounted on
it. The test tray TST ejected from the soak chamber 1103 by the
test tray conveyor 1108 is returned to the constant temperature
chamber 1101 through the unloader section 1400 and the loader
section 1300.
[0211] FIG. 15 is a disassembled perspective view of the structure
of a test tray TST used in the present embodiment. The test tray
TST is comprised of a rectangular frame 1012 provided with a
plurality of crosspieces 1013 in parallel at equal intervals and
has a plurality of mounting pieces 1014 formed projecting out at
equal intervals at the two sides of these crosspieces and the sides
1012a of the frame 1012 facing the crosspieces. Insert holders 1015
are comprised between these crosspieces, between the crosspieces
1013 and the sides 1012a, and the two mounting pieces 1014.
[0212] The insert holders 1015 are designed to receive one insert
1016 each. An insert 1016 is attached to the two mounting pieces
1014 in a floating state using fasteners 1017. Therefore, mounting
holes 1021 to the mounting pieces 1014 are formed at the two ends
of the inserts 1016. For example, about 16.times.4 of these inserts
1016 are provided in one test tray TST.
[0213] Note that the inserts 1016 are made the same shape and same
dimensions and that the IC chips are received in the inserts. The
IC holder 1019 of the insert 1016 is determined by the shape of the
IC chip to be received and in the example shown in FIG. 15 is made
a rectangular indentation.
[0214] Here, if the IC chips once connected to the test head 1104
are arranged in four rows and 16 columns as shown in FIG. 15, then
for example four rows of four columns of IC chips are
simultaneously tested. That is, in the first test, the 16 IC chips
arranged every fourth column from the first column are tested
connected to the contact pins 1051 of the test head 1104. In the
second test, the test tray TST is moved one column's worth and the
IC chips arranged every fourth column from the second column are
similarly tested. By doing this a total of four times, all of the
IC chips are tested. The present invention, however, is not limited
to this. There is no need to attach inserts 1016 to all of the
columns and rows. It is possible to select the attachment positions
of the inserts 1016 in accordance with the test specifications. The
results of the test are stored at addresses determined by for
example the identification number assigned to the test tray TST and
the numbers of the IC chips assigned inside the test tray TST.
[0215] As shown in FIG. 20, a Z-axial drive (part of pusher) 1060
is provided at the top side of the test head 1104 and is moved
vertically in the Z-direction by for example a fluid pressure
cylinder. Match plates (part of pushers) 1061 shown in FIG. 19 are
attached at the bottom side of the Z-axial drive 1060. The match
plates 1061 are supported by the Z-axial drive 1060 so as to be
raised and lowered along with the Z-axial drive 1060.
[0216] The match plate 1061 is provide with a pusher (part of
pusher) 1030 shaped in accordance with the specifications of the IC
chips corresponding to the intervals of the IC chips under test at
one time as shown in FIG. 19.
[0217] FIG. 16 and FIG. 17 show a pusher 1030. This pusher 1030 has
a lead pusher base 1035 and pusher base 1034 attached to the above
match plate 1061 and moving vertically in the Z-axial direction
along with the Z-axial drive 1060 and a pusher block 1031 attached
to the pusher base 1034 via two springs (corresponding to elastic
members) 1036, 1036.
[0218] The lead pusher base 1035 and the pusher base 1034 are
bolted as shown in FIG. 17. At the two sides of the pusher base
1034 are provided guide pins 1032 to be inserted into guide holes
1020 of the insert 1016 mentioned later and guide bushes 1041 of
the socket guide 1040. Further, the pusher base 1034 is provided
with stopper guides 1033 for limiting the descent of the pusher
base 1034 along with the Z-axial drive 1060 as a lower limit. The
stopper guides 1033 abut against the stopper surface 1042 of the
socket guide 1040 to determine the standard dimensions of the lower
limit position of the pusher for pushing by a suitable pressure not
breaking the IC chip.
[0219] As shown in FIG. 17 and FIG. 18, the pusher block 1031 is
for example made of aluminum or copper. It is inserted in a through
hole made in the center of the pusher base 1034 with springs 1035,
1036 and, if necessary, shims (not shown) interposed with the lead
pusher base 1035. The springs 1036, 1036 are compression springs
(elastic members) giving a spring bias to the pusher block 1031 in
the downward direction in the figure (direction going toward IC
chip) and have elastic coefficients in accordance with a reference
load on the IC chips.
[0220] The shim inserted in accordance with need along with the
springs 1036 adjusts the reference length in the mounted state of
the springs 1036 to adjust the initial load acting on the pusher
block 1031. That is, even when using springs 1036 of the same
elastic coefficient, the insertion of the shim makes the initial
load acting on the pusher block 1031 larger. Note that it is
sufficient to be able to adjust the standard length of the springs
1036, so the position of insertion of the shim may be between a
spring 1036 and pusher block 1031 or between the lead pusher base
1035 and a spring 1036.
[0221] Between the two springs 1036, 1036 and on the top surface of
the pusher block 1031 is secured for example an aluminum heat sink
1038 superior in heat conductivity. This heat sink 1038 abuts
planarly against the top surface of the pusher block 1031 and is
formed with heat radiating fins with large surface areas on its
opposite side. The pusher block 1031 is made of aluminum or copper
with superior heat conductivities and directly contacts the IC
chip, so absorbs the heat generated by the ICs occurring during
testing as it is. The heat conducted to the pusher block 1031 is
absorbed by the heat sink 1038 and radiated to the surroundings
from the heat radiating fins so as to prevent destruction or damage
to the IC chips due to the heat generated by the IC chips or
fluctuations in the temperature conditions.
[0222] The insert 1016, as explained also in FIG. 15, is attached
to the test tray TST using a fastener 1017. It is formed at its two
sides with guide holes 1020 through which the above-mentioned guide
pins 1032 of the pusher 1030 and the guide bushes 1041 of the
socket guide 1040 are inserted. While a detailed illustration is
omitted, for example the upper half of the guide hole 1020 at the
left side is made a small diameter hole where the guide pin 1032 of
the pusher base 1034 is inserted for positioning. The lower half of
the guide hole 1020 is made a large diameter hole where the guide
bush 1041 of the socket guide 1040 is inserted for positioning.
Note that the guide hole 1020 at the right side in FIG. 17 fits
loosely with the guide pin 1032 of the pusher base 1034 and the
guide bush 1041 of the socket guide 1040.
[0223] As shown in FIG. 16 and FIG. 17, the insert 1016 is formed
at its center with an IC holder 1019. By dropping the IC chip here,
the IC chip is loaded on the test tray TST.
[0224] On the other hand, the socket guide 1040 fixed to the test
head 1104 is provided at its two sides with guide bushes 1041 for
insertion of the two guide pins 1032 of the pusher base 1034 and
positioning with these two guide pins 1032. The guide bush 1041 at
the left side also performs positioning with the insert 1016.
[0225] At the lower side of the socket guide 1040 is fixed a socket
1050 having a plurality of contact pins 1051. These contact pins
1051 are biased in the upward direction by not shown springs.
Therefore, even if pushing an IC chip, the contact pins 1051 will
retract to the top surface of the socket 1050. On the other hand,
it is possible for the contact pins 1051 to contact all of the IC
terminals even if the IC chip is pushed somewhat at an angle.
[0226] Unloader Section 1400
[0227] As shown in FIG. 13, the unloader section 1400 is provided
with X-Y conveyors 1404, 1404 of the same structure as the X-Y
conveyor 1304 provided at the loader section 1300. The X-Y
conveyors 1404, 1404 reload the tested IC chips from the test tray
TST carried out to the unloader section 1400 to the customer tray
KST.
[0228] As shown in FIG. 13, the test board 1105 of the unloader
section 1400 is provided with two pairs of windows 1406, 1406
arranged so that the customer trays KST carried to the unloader
section 1400 can be brought close to the top surface of the test
board 1105.
[0229] Further, while not illustrated, elevator tables for
elevating or lowering customer trays KST are provided below the
windows 1406. A customer tray KST becoming full after being
reloaded with the tested IC chips is placed on there and lowered
and the full tray is passed to the tray transfer arm 1205.
[0230] Note that in the device testing apparatus 1001 of the
present embodiment, while there are a maximum of eight types of
sortable categories, it is only possible to arrange a maximum of
four customer trays KST at the windows 1406 of the unloader section
1400. To make up for this, a buffer section 1405 is provided
between the test tray TST and the window 1406 of the unloader
section 1400, and IC chips of a category rarely appearing are
stored temporarily at this buffer section 1405.
[0231] The mode of operation will be explained next.
[0232] In the test process inside the chamber section 1100, the IC
chips are conveyed to above the test head 1104 in the state carried
on the test tray TST shown in FIG. 15, more specifically the
individual IC chips are conveyed in the state dropped into the IC
holders 1019 of the inserts 1016 of the figure.
[0233] When the test tray TST stops at the test head 1104, the
Z-axial drive starts to operate and each pusher 1030 descends with
respect to each insert 1016. The two guide pins 1032, 1032 of the
pushers 1030 formed at the bottom surface of the pusher base 1034
pass through the guide holes 1020, 1020 of the inserts 1016 and
engage with the guide bushes 1041, 1041 of the socket guides
1040.
[0234] This state is shown in FIG. 17 and FIG. 18. The inserts 1016
and the pushers 1030 have a certain degree of positional error with
respect to the sockets 1050 and socket guides 1040 fixed to the
test head 1104 (that is, the device testing apparatus 1001 side).
The guide pins 1032 of the left side of the pusher bases 1034 are
fit into the small diameter holes of the guide holes 1020 of the
inserts 1016 for positioning the pushers 1030 and the inserts 1016,
so as a result it is possible for the pusher blocks 1031 attached
to the pusher bases 1034 to push the IC chips at suitable positions
in the X-Y direction.
[0235] Further, the large diameter holes of the guide holes 1020 at
the left sides of the inserts 1016 engage with the guide bushes
1041 of the left sides of the socket guides 1040, whereby the
inserts 1016 and the socket guides 1040 are positioned with respect
to each other and whereby the positioning accuracy of the IC chips
and the contact pins 1051 is improved in the X-Y direction.
[0236] Further, when the IC chips held by the IC holders 1019 of
the inserts 1016 are pushed by the pushers 1030, they are drawn
into the device guides 1052 provided at the socket 1050 or the
socket guide 1040 for positioning, so positioning of the
input-output terminals and contact pins 1051 in the X-Y direction
can be realized with a high precision.
[0237] As opposed to this, for the Z-axial direction, the load
acting on the IC chip when the stopper guide 1033 of the pusher
base 1034 and the stopper surface 1042 of the socket guide 1040
abut becomes a problem. If too large, it leads to damage to the IC
chip, while if too small, the test cannot be performed.
Accordingly, it is necessary to precisely set the distance Y in the
Z-axial direction between the stopper guide 1033 of the pusher base
1034 and the pusher block 1031 and the distance Z in the Z-axial
direction between the contact pins 1051 and the stopper surface
1042 of the socket guide 1040. These is however a limit to this as
well. Further, the thickness X of the IC chip itself has a large
effect.
[0238] In the device testing apparatus 1001 of the present
embodiment, however, the stroke of the pusher is not controlled.
Rather, the load due to the pusher block 1031 is controlled,
thereby enabling the pushing force on the IC chip to be made
uniform. That is, even if errors X, Y, and Z occur in the reference
dimensions X, Y, and Z, the pusher block 1031 imparts elasticity to
the IC chip due to the action of the springs 1036, 1036 and absorbs
these errors. Therefore, it is possible to prevent an excessive
pushing force from acting on the IC chip or conversely the pushing
force from becoming insufficient.
[0239] Further, in addition to this load management, in the present
invention, the pusher base 1031 is provided with a heat sink 1038,
so even if an IC generates heat on its own during testing, the heat
is absorbed by the heat sink 1038 and discharged from there to the
surrounding environment, so it is possible to prevent destruction
or damage of the IC due to overheating, considered a particular
problem in high temperature tests. Further, since the temperature
rise due to the heat generated is suppressed by the heat absorbing
and radiating effect of the heat sink 1038, not only for high
temperature tests, it is possible to test IC chips at the targeted
accurate temperature and the reliability of the test results is
improved.
[0240] Further, as shown in FIG. 16, FIG. 17, and FIG. 20, since
the direction of the air acts well on the heat sink 1038 in the
test chamber 1102, the heat radiating effect becomes better.
[0241] 11th Embodiment
[0242] The device testing apparatus according to the present
embodiment is substantially identical to the device testing
apparatus 1001 according to the 10th embodiment, but differs in the
number of ICs measured at the test head. Along with this, the
shapes of the match plate 1061 and the pushers 1030 differ.
Further, the shape of the heat sink 1038 provided at the pusher
base 1031 differs.
[0243] That is, while there were 2 rows.times.8 columns of ICs in
the match plate 1061 of the 10th embodiment, there are 4
rows.times.8 columns of ICs in the present embodiment as shown in
FIG. 22 and FIG. 23. Therefore, a pusher 1030 has to be made about
half the size of that shown in FIG. 16, so the heat sinks 1038 are
provided at the two sides of a spring 1036.
[0244] In this embodiment as well, the pusher block 1031 is made of
aluminum or copper superior in heat conductivity and the IC chip is
directly contacted with, so the heat generated by the IC caused
during testing is absorbed as it is and the heat conducted to the
pusher block 1031 is absorbed by the heat sink 1038. By dissipating
this from the heat-radiating fins to the surroundings, it is
possible to prevent the destruction or damage of an IC chip due to
the heat generated by the IC or fluctuations in the temperature
conditions.
[0245] 12th Embodiment
[0246] The device testing apparatus according to the present
embodiment is substantially identical to the device testing
apparatus 1001 according to the 10th embodiment, but as shown in
FIG. 24 and FIG. 25, in the present embodiment, the pusher block
1031 is secured to the pusher base 1034 and, therefore, springs
1036, 1036 are interposed between the pusher 1035a of the lead
pusher base 1035 and the pusher base 1034. That is, the pusher
1035a is designed to be able to move in the Z-axial direction with
respect to the lead pusher base 1035.
[0247] Further, the dimensions are set so that, at the bottom dead
point position of the Z-axial drive 1060, the stopper guide 1033 of
the pusher base 1034 and the stopper surface 1042 of the socket
guide 1040 do not abut. The bottom dead point position of the
Z-axial drive 1060 is determined by the abutting of the frame of
the Z-axial drive 1060 and the stopper post 1104a of the test
head.
[0248] Therefore, if the Z-axial drive 1060 is made to descend and
to push the pusher 1035a of the pusher base 1035 by its pusher
1062, the IC chip receives an upward force from the contact pin
1051 and receives a downward force due to the springs 1036. By
adjusting the balance between the two, it is possible to adjust the
load acting on the IC chip to a suitable value.
[0249] In this embodiment, the pusher block 1031 can be formed
integrally with the pusher base 1034, so the heat sink 1038 is
preferably attached to the top surface of the pusher base 1034. Due
to this, the heat generated by the IC caused during testing is
conducted through the pusher block 1031 and the pusher base 1034 to
the heat sink 1038 and radiated off from there to the surroundings,
so it is possible to prevent destruction or damage to the IC chip
due to heat generated by the IC or fluctuations in the temperature
conditions.
[0250] Note that the heat sink 1038 may be formed integrally with
the pusher base 1034.
[0251] In particular, in the present embodiment, what contacts the
IC chip are members with a large heat mass such as the pusher block
1031 and the pusher base 1034, so it is possible to sufficient
dissipate the heat even if the IC chip is one with a remarkably
large amount of heat buildup.
[0252] Further, in the present embodiment, for example, by
interposing a Peltier element between the pusher block 1031 and the
heat sink 1038 and sending a current of a predetermined direction
in accordance with the IC temperature through the Peltier element,
it is possible to realize suitable temperature control.
[0253] 13th Embodiment
[0254] The overall configuration of the device testing apparatus of
the present embodiment is substantially identical to that of the
device testing apparatus 1001 according to the 10th embodiment, but
differs in the following point.
[0255] In the present embodiment, as shown in FIG. 27, a plurality
of through holes 2122 (hereinafter referred to as second through
holes) are formed in the pushers 2121 of the match plate 2120.
Further, as shown in FIG. 26, a plurality of through holes 2112
(hereinafter referred to as first through holes) are formed at the
position of the Z-axial drive 2110 positioned directly above the
match plate 2120. The shapes, quantities, and positions of the
first and second through holes 2112 and 2122 are not particularly
limited. In the present embodiment, as shown in FIG. 27, one second
through hole 2122 is formed so as to be surrounded by four pushers
2121. The second through holes 2122 are formed so as to be
positioned substantially equally in the match plate 2120 as a
whole.
[0256] Further, as shown in FIG. 26, the top corner part of the
test chamber 2102 (or to the soak chamber) is provided with a
temperature application unit 2130. Inside of the unit 2130 are
provided a heater 2131 for applying a high temperature, a blowing
nozzle 2132 for liquid nitrogen for applying a low temperature, and
a scroll fan 2133 for supplying hot air or cooling air inside of
the chamber 2102. Further, the unit 2130 has formed with a feed
port 2134 and intake port 2135 so that the hot air or cold air
flows down as shown by the white arrow in the figure.
[0257] In this embodiment, a flow of hot air or cold air or other
gas is fed from the temperature application unit 2130. When this
flow of gas flows along the ceiling surface of the test chamber
2102 as shown in FIG. 26, part passes through the first through
holes 2112 formed in the Z-axial drive 2110 and the second through
holes 2122 formed in the match plate 2120 and blows on to the heat
sink or IC chip directly. The rest of the flow of the gas sneaks
around along the right side wall of the test chamber 102 and passes
through the gap between the match plate 2120 and the test tray TST
to return to the intake port 2135 of the unit 2130.
[0258] That is, in the device testing apparatus of the present
embodiment, the hot air or cold air or other gas flow blown out
from the feed port 2134 of the temperature application unit 2130
can be blown in parallel to the plurality of IC chips under test
carried planarly, so the amount of heat supplied to the IC chips
under test becomes uniform and the temperature elevation or
reduction time for the plurality of IC chips under test becomes
uniform. Due to this, it is possible to prevent uneven temperature
from occurring even if 64 IC chips are carried and as a result
possible to shorten the temperature elevation or reduction time.
Further, it is possible to avoid unevenness of the temperature
distribution due to heat generated by the IC chip.
[0259] 14th Embodiment
[0260] The overall configuration of the device testing apparatus of
this embodiment is substantially identical with that of the device
testing apparatus 1001 according to the 10th embodiment, but
differs in the following point.
[0261] As shown in FIG. 28, in this embodiment, a nozzle 3000 is
provided between the pair of pushers 3062 provided at the bottom
surface of the Z-axial drive 3060. The nozzle 3000 is formed with a
channel 3002 through which a temperature control gas (for example,
cooling air) circulates and a pair of blowing ports. Temperature
control gas is blown out from the blowing ports toward heat sinks
3038 provided on the pusher base 3034 connected to the lead pusher
base 3035 held at the match plate 3061.
[0262] The temperature control gas may be a flow of gas of the same
temperature as the flow of gas circulating in the chamber for
maintaining the IC chips at the test temperature, but may also be a
flow of gas of a different temperature. The temperature control gas
is preferably cooling air for reducing the temperature rise due to
the heat generated by the IC chip.
[0263] In this embodiment, in the same way as the 10th embodiment,
the pusher block 3031 is comprised of aluminum or copper having a
superior heat conductivity and directly contacts the IC chip held
in the socket 3050. Therefore, the amount of heat due to the heat
generated by the IC chip during a test is conducted to the pressure
block 3031 and conveyed from there through the pusher base 3034 or
directly to the heat sink 3038. The heat sink 3038 has temperature
control gas (cooling air) blown on it from the blowing port of the
nozzle 3000 and therefore is force-cooled. Accordingly, heat is
rapidly dissipated from the heat-radiating fins of the heat sink
3038 and it is possible to effectively prevent the temperature of
the IC chip from falling out of the test temperature range due to
heat generated by the IC chip.
[0264] Note that the nozzle 3000 may also be provided at the match
plate 3061 rather than the Z-axial drive 3060.
[0265] Other Embodiments
[0266] Note that the present invention is not limited to the above
embodiments. Various modifications may be made within the scope of
the present invention.
[0267] For example, the devices tested by the device testing
apparatus of the present invention is not limited to an IC chip and
may be other electronic devices as well.
[0268] The invention being thus described, it will be obvious that
the same may be varied in many ways. Such variations are not to be
regarded as a departure from the spirit and scope of the invention,
and all such modifications as would be obvious to one skilled in
the art are intended to be included within the scope of the
following claims.
* * * * *