U.S. patent application number 11/075707 was filed with the patent office on 2005-10-06 for teaching method and processing system.
This patent application is currently assigned to TOKYO ELECTRON LIMITED. Invention is credited to Ishizawa, Shigeru, Kumagai, Motohiro, Saeki, Hiroaki.
Application Number | 20050220582 11/075707 |
Document ID | / |
Family ID | 35054451 |
Filed Date | 2005-10-06 |
United States Patent
Application |
20050220582 |
Kind Code |
A1 |
Kumagai, Motohiro ; et
al. |
October 6, 2005 |
Teaching method and processing system
Abstract
A teaching method for storing in a controller a target moving
position of a transfer mechanism in a processing system includes
the steps of temporarily stopping the transfer mechanism in the
middle of a moving route to a temporary moving destination position
so as to make sure that the transfer mechanism does not interfere
with another members at a potential interference location where
there is a possibility that the transfer mechanism interferes with
said another member, resuming to move the temporarily stopped
transfer mechanism by inputting a moving instruction, repeating the
temporarily stopping step and the resuming step, and when the pick
reaches the temporary moving destination position, storing, as the
target moving position, in the controller a position of the pick
after adjusting and moving or without adjusting and moving the
position of the pick.
Inventors: |
Kumagai, Motohiro;
(Nirasaki-shi, JP) ; Ishizawa, Shigeru;
(Nirasaki-shi, JP) ; Saeki, Hiroaki;
(Nirasaki-shi, JP) |
Correspondence
Address: |
OBLON, SPIVAK, MCCLELLAND, MAIER & NEUSTADT, P.C.
1940 DUKE STREET
ALEXANDRIA
VA
22314
US
|
Assignee: |
TOKYO ELECTRON LIMITED
Tokyo
JP
107-8481
|
Family ID: |
35054451 |
Appl. No.: |
11/075707 |
Filed: |
March 10, 2005 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
11075707 |
Mar 10, 2005 |
|
|
|
PCT/JP03/11734 |
Sep 12, 2003 |
|
|
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Current U.S.
Class: |
414/416.05 |
Current CPC
Class: |
H01L 21/68 20130101;
H01L 21/67167 20130101; H01L 21/67259 20130101; H01L 21/67778
20130101 |
Class at
Publication: |
414/416.05 |
International
Class: |
B65B 021/02 |
Foreign Application Data
Date |
Code |
Application Number |
Sep 13, 2002 |
JP |
2002-269255 |
Claims
What is claimed is:
1. A teaching method for storing in a controller a target moving
position of a transfer mechanism in a processing system provided
with the transfer mechanism for transferring an object to be
processed by supporting same with a pick, the teaching method
comprising the steps of: temporarily stopping the transfer
mechanism in the middle of a moving route to a temporary moving
destination position so as to make sure that the transfer mechanism
does not interfere with another members at a potential interference
location where there is a possibility that the transfer mechanism
interferes with said another member; resuming to move the
temporarily stopped transfer mechanism by inputting a moving
instruction; repeating the temporarily stopping step and the
resuming step; and when the pick reaches the temporary moving
destination position, storing, as the target moving position, in
the controller a position of the pick after adjusting and moving or
without adjusting and moving the position of the pick.
2. The teaching method of claim 1, wherein the transfer mechanism
is adjusted and moved to a location where there is no possibility
of interference with another member in case there is a possibility
that the temporarily stopped transfer mechanism interferes with
said another member.
3. The teaching method of claim 1, wherein the potential
interference location is calculated and obtained in advance by the
controller based on design values of the processing system.
4. The teaching method of claim 1, wherein the controller displays
on a display unit a message for informing an operator of a
potential interference whenever the transfer mechanism is
temporarily stopped.
5. The teaching method of claim 1, wherein an arm of the transfer
mechanism is a stretchable, bendable and revolvable multi-joint
arm.
6. The teaching method of claim 1, wherein the target moving
position is a position in an inlet port for loading the object to
be processed into the processing system.
7. The teaching method of claim 2, wherein the potential
interference location is calculated and obtained in advance by the
controller based on design values of the processing system.
8. The teaching method of claim 2, wherein the controller displays
on a display unit a message for informing an operator of a
potential interference whenever the transfer mechanism is
temporarily stopped.
9. The teaching method of claim 2, wherein an arm of the transfer
mechanism is a stretchable, bendable and revolvable multi-joint
arm.
10. The teaching method of claim 2, wherein the target moving
position is a position in an inlet port for loading the object to
be processed into the processing system.
11. A processing system comprising a processing chamber for
performing a processing on an object to be processed; an inlet port
for introducing the object to be processed; an orienter for
performing a position aligning of the object to be processed; a
transfer mechanism, having a pick for supporting the object to be
processed, for transferring the object to be processed; and a
controller for controlling an operation of the transfer mechanism,
wherein the controller is configured to perform the steps of:
temporarily stopping the transfer mechanism in the middle of a
moving route to a temporary moving destination position so as to
make sure that the transfer mechanism does not interfere with
another member at a potential interference location where there is
a possibility that the transfer mechanism interferes with said
another member; resuming to move the temporarily stopped transfer
mechanism by inputting a moving instruction; repeating the
temporarily stopping step and the resuming step; and when the pick
reaches the temporary moving destination position, storing, as the
target moving position, in the controller a position of the pick
after adjusting and moving or without adjusting and moving the
position of the pick.
12. The processing system of claim 11, wherein the controller
calculates and obtains in advance the potential interference
location based on design values of the processing system.
13. The processing system of claim 11, wherein the controller is
connected to a display unit and displays on the display unit a
message for informing an operator of a potential interference
whenever the transfer mechanism temporarily is stopped.
14. The processing system of claim 12, wherein the controller is
connected to a display unit and displays on the display unit a
message for informing an operator of a potential interference
whenever the transfer mechanism temporarily is stopped.
Description
[0001] This application is a Continuation Application of PCT
International Application No. PCT/JP03/11734 filed on Sep. 12,
2003, which designated the United States.
FIELD OF THE INVENTION
[0002] The present invention relates to a processing system for
performing a pre-specified processing on an object to be processed
such as a semiconductor wafer and a teaching method of a transfer
mechanism employed in such a processing system.
BACKGROUND OF THE INVENTION
[0003] In general, in order to manufacture a semiconductor
integrated circuit, various processings such as film forming,
etching, oxidation and diffusion are performed on a wafer. Further,
in order to improve a throughput and a yield along with the trend
of miniaturization and high integration of the semiconductor
integrated circuit, a semiconductor processing system known as a
so-called cluster tool has been developed, wherein a plurality of
processing apparatuses performing either a same process or
different processes are coupled to each other via a common transfer
chamber such that various processes can be successively executed
without exposing a wafer to the atmosphere.
[0004] In such a processing system for example, a semiconductor
wafer is unloaded from a cassette container installed at an inlet
port for an object to be processed, which is disposed at a front
end of the processing system, and then carried into an inlet side
transfer chamber of the processing system by a transfer mechanism.
Next, the wafer is subjected to a position alignment process
carried out by an orienter and then is loaded into a vacuum
evacuable load-lock chamber. By another transfer mechanism, the
wafer is then loaded into a common vacuum transfer chamber whose
peripheral portions are connected to a plurality of vacuum
processing chambers, and then sequentially loaded into the vacuum
processing chambers via the common transfer chamber located at the
center so that the wafer can be processed continuously. Thereafter,
the processed wafer returns to the original cassette container
along the original path, for example.
[0005] As described above, such a processing system includes
therein a single or a plurality of transfer mechanisms and
delivery/reception and transfer of the wafer are automatically
performed by such transfer mechanisms.
[0006] Such a transfer mechanism has, e.g., a horizontally movable,
stretchable, bendable, revolvable and elevatable multi-joint arm
and serves to transfer the wafer to a specified position by
horizontally moving to a transfer location while directly holding
the wafer on a pick provided at a leading end of such arm.
[0007] In this case, there arises a need to prevent the arm, the
pick, and/or the wafer held thereon from interfering or colliding
with another member while operating the transfer mechanism. And
also, the wafer disposed at a specified position needs to be
transferred to a target position while being properly held, and
then delivered and received at a proper location with high
accuracy, e.g., with high positional accuracy not larger than
.+-.0.20 mm.
[0008] Accordingly, in case an apparatus is assembled or
extensively reconstructed for example, a so-called teaching is
carried out. Specifically, the teaching is an operation for
storing, in a controller of a computer for controlling an operation
of the transfer mechanism, position coordinates of important
positions, e.g., locations at which the delivery/reception of the
wafer W is carried out, in a moving route of the pick of the
transfer mechanism.
[0009] The teaching is performed in almost every case for
performing the wafer delivery/reception to store position
coordinates indicating, e.g., a relationship between positions of a
transfer mechanism and a cassette container, that between vertical
positions of a pick for holding the wafer and each mounting rack of
the cassette container, that between positions of a mounting table
in a load-lock chamber and the pick, that between positions of the
pick and an orienter, and that between positions of the pick and a
susceptor in each processing chamber. Further, it is to be noted
that every driving unit is equipped with an encoder or the like for
specifying driving positions thereof.
[0010] Specifically, a teaching operation is carried out as
follows. First, position coordinates of all positions that need
teaching in an apparatus are obtained from design values of the
apparatus by setting a predetermined point in the moving route of
the transfer mechanism as an absolute reference. Then, the position
coordinates are inputted to and stored in the controller as
temporary position coordinates. In this case, each of the temporary
position coordinates is inputted by considering a specified margin
so as to make sure that the pick does not interfere with another
member.
[0011] Next, when the pick is moved close to a teaching reference
position by operating the transfer mechanism based on each of the
temporary position coordinates, the operation of the transfer
mechanism is converted into a nonautomatic (hereinafter, also
referred to as "manual") mode, and the transfer mechanism is slowly
moved manually while keeping with naked eye the pick from
interfering with another member. Further, the transfer mechanism is
operated while being checked with the naked eye to make sure that a
position aligning substrate previously installed at a predetermined
position in the cassette container is in contact with the pick at a
proper position. Then, the coordinates thereof are stored in the
controller as position coordinates, thereby performing the
teaching.
[0012] Moreover, in case the teaching is performed for a mounting
table and/or a susceptor in a load-lock chamber and/or each
processing chamber, a position aligning substrate is installed at
each center thereof. Then, a corresponding pick is automatically
moved to a position close to the position aligning substrate where
it is safe from any interference. Thereafter, the pick is manually
moved so that both of them can be precisely aligned with each other
as described above and, then, position coordinates at that instant
are stored in the controller. Furthermore, the position aligning
substrate is made of, e.g., a transparent plate having thereon
pre-drawn contours of a pick, a mounting table and/or the like that
should be aligned therewith.
[0013] Further, the term nonautomatic (manual) operation denotes an
operation for moving the arm including the pick or the like by
inputting a direction (+/-) and a magnitude of movement into the
controller with the use of a keyboard and/or a joystick.
[0014] In a prior art reference of Japanese Patent Laid-open
Application No. 2000-127069, an orienter is used to achieve a labor
reduction and a high accuracy of the teaching operation. However,
there remains a drawback in that the manual operation is required
in a part of the teaching operation.
SUMMARY OF THE INVENTION
[0015] In the aforementioned teaching method, the transfer
mechanism itself is automatically moved to a safe enough position
near a teaching destination position and, then, while being checked
on safety with the naked eye, the pick is manually moved by a
micro-distance in a horizontal direction and a vertical direction
to thereby be moved to the destination position.
[0016] Accordingly, even if the pick is automatically moved to a
sufficiently safe position near the destination position initially,
a section for manually moving the pick by a minute distance becomes
quite long, which results in a considerably long teaching operation
time. Especially, such a teaching operation should be performed for
almost all the delivery/reception positions of a semiconductor
wafer as described above; and, thus, there is a drawback in that
the teaching operation time becomes quite long.
[0017] The present invention has been conceived to effectively
solve the aforementioned drawback. An object of the present
invention is to provide a teaching method and a processing system
capable of drastically reducing and shortening a teaching operation
time.
[0018] The inventors have intensively conducted a research on a
time reduction of a teaching operation and found that even after a
transfer mechanism has been automatically moved near a destination
position, there still exists some room for a pick automatically to
be moved before reaching the destination position if the pick of
the transfer mechanism is maneuvered to move while watching out for
specific locations. The present invention has been conceived from
the above observation.
[0019] In accordance with one aspect of the invention, there is
provided a teaching method for storing in a controller a target
moving position of a transfer mechanism in a processing system
provided with the transfer mechanism for transferring an object to
be processed by supporting same with a pick, the teaching method
including the steps of: temporarily stopping the transfer mechanism
in the middle of a moving route to a temporary moving destination
position so as to make sure that the transfer mechanism does not
interfere with another members at a potential interference location
where there is a possibility that the transfer mechanism interferes
with said another member; resuming to move the temporarily stopped
transfer mechanism by inputting a moving instruction; repeating the
temporarily stopping step and the resuming step; and when the pick
reaches the temporary moving destination position, storing, as the
target moving position, in the controller a position of the pick
after adjusting and moving or without adjusting and moving the
position of the pick.
[0020] The transfer mechanism is temporarily stopped only at a
location where there is a possibility of interference with another
member and then adjusted and moved if necessary. On the other hand,
the transfer mechanism is automatically moved in a location where
there is no possibility of interference with another member.
Accordingly, a teaching operation time can be greatly reduced.
[0021] In this case, the transfer mechanism can be adjusted and
moved to a location where there is no possibility of interference
with another member in case there is a possibility that the
temporarily stopped transfer mechanism interferes with said another
member.
[0022] Further, the potential interference location can be
calculated and obtained in advance by the controller based on
design values of the processing system.
[0023] Furthermore, the controller can display on a display unit a
message for informing an operator of a potential interference
whenever the transfer mechanism is temporarily stopped.
[0024] Since the display unit displays thereon the message for
informing the potential interference, the operator recognizes the
message and, accordingly, it is possible to more effectively
prevent the transfer mechanism from interfering with another
member.
[0025] Moreover, an arm of the transfer mechanism is preferably a
stretchable, bendable and revolvable multi-joint arm.
[0026] Besides, the target moving position is preferably a position
in an inlet port for loading the object to be processed into the
processing system.
[0027] In accordance with another aspect of the invention, there is
provided a processing system including a processing chamber for
performing a processing on an object to be processed; an inlet port
for introducing the object to be processed; an orienter for
performing a position aligning of the object to be processed; a
transfer mechanism, having a pick for supporting the object to be
processed, for transferring the object to be processed; and a
controller for controlling an operation of the transfer mechanism,
wherein the controller is configured to perform the steps of:
temporarily stopping the transfer mechanism in the middle of a
moving route to a temporary moving destination position so as to
make sure that the transfer mechanism does not interfere with
another member at a potential interference location where there is
a possibility that the transfer mechanism interferes with said
another member; resuming to move the temporarily stopped transfer
mechanism by inputting a moving instruction; repeating the
temporarily stopping step and the resuming step; and when the pick
reaches the temporary moving destination position, storing, as the
target moving position, in the controller a position of the pick
after adjusting and moving or without adjusting and moving the
position of the pick.
[0028] In this case, the controller can calculate and obtain in
advance the potential interference location based on design values
of the processing system.
[0029] Further, the controller can be connected to a display unit
and display on the display unit a message for informing an operator
of a potential interference whenever the transfer mechanism
temporarily is stopped.
BRIEF DESCRIPTION OF THE DRAWINGS
[0030] The above and other objects and features of the present
invention will become apparent from the following description of
preferred embodiments, given in conjunction with the accompanying
drawings, in which:
[0031] FIG. 1 is a diagram for showing an exemplary processing
system for performing a teaching method of the present
invention;
[0032] FIG. 2 shows a schematic diagram of the processing system
illustrated in FIG. 1;
[0033] FIG. 3 illustrates a schematic diagram depicting an inlet
port;
[0034] FIG. 4 depicts a schematic diagram describing an
orienter;
[0035] FIG. 5 describes a schematic diagram showing a load-lock
chamber;
[0036] FIG. 6 provides a top view illustrating an operating
unit;
[0037] FIG. 7A presents a diagram depicting a first potential
interference location, as an example in which a teaching operation
is performed for the inlet port in accordance with a first
preferred embodiment of a method of the present invention;
[0038] FIG. 7B represents a diagram depicting a second potential
interference location, as an example in which the teaching
operation is performed for the inlet port in accordance with the
first preferred embodiment of the method of the present
invention;
[0039] FIG. 7C offers a diagram depicting a third potential
interference location, as an example in which the teaching
operation is performed for the inlet port in accordance with the
first preferred embodiment of the method of the present
invention;
[0040] FIG. 7D is a diagram showing a temporary moving destination
position, as an example in which the teaching operation is
performed for the inlet port in accordance with the first preferred
embodiment of the method of the present invention;
[0041] FIG. 7E shows a diagram illustrating a target moving
position, as an example in which the teaching operation is
performed for the inlet port in accordance with the first preferred
embodiment of the method of the present invention;
[0042] FIG. 8 illustrates a flowchart depicting a flow of the
teaching method of the present invention;
[0043] FIG. 9 depicts a diagram describing an example in which a
teaching operation is performed for the orienter in accordance with
a second preferred embodiment of the present invention;
[0044] FIG. 9A presents a diagram showing a first potential
interference location, as an example in which the teaching
operation is performed for the orienter in accordance with the
second preferred embodiment of the present invention;
[0045] FIG. 9B represents a diagram illustrating a second potential
interference location, as the example in which the teaching
operation is performed for the orienter in accordance with the
second preferred embodiment of the present invention;
[0046] FIG. 9C provides a diagram depicting a temporary moving
destination position, as the example in which the teaching
operation is performed for the orienter in accordance with the
second preferred embodiment of the present invention;
[0047] FIG. 9D offers a diagram describing a target moving
position, as the example in which the teaching operation is
performed for the orienter in accordance with the second preferred
embodiment of the present invention;
[0048] FIG. 10A is a diagram showing a first potential interference
location, as an example in which a teaching operation is performed
for the load-lock chamber in accordance with a third preferred
embodiment of the present invention;
[0049] FIG. 10B shows a diagram illustrating a second potential
interference location, as the example in which the teaching
operation is performed for the load-lock chamber in accordance with
the third preferred embodiment of the present invention;
[0050] FIG. 10C depicts a diagram describing a third potential
interference location, as the example in which the teaching
operation is performed for the load-lock chamber in accordance with
the third preferred embodiment of the present invention;
[0051] FIG. 10D provides a diagram depicting a fourth potential
interference location, as the example in which the teaching
operation is performed for the load-lock chamber in accordance with
the third preferred embodiment of the present invention; and
[0052] FIG. 10E sets forth a diagram illustrating a temporary
moving destination position, as the example in which the teaching
operation is performed for the load-lock chamber in accordance with
the third preferred embodiment of the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0053] Hereinafter, a teaching method and a preferred embodiment of
a processing system in accordance with the present invention will
be described with reference to the accompanying drawings.
[0054] FIG. 1 is a diagram for showing an exemplary processing
system for performing a teaching method of the present invention;
FIG. 2 shows a schematic diagram of the processing system
illustrated in FIG. 1; FIG. 3 illustrates a schematic diagram
depicting an inlet port; FIG. 4 depicts a schematic diagram
describing an orienter; FIG. 5 describes a schematic diagram
showing a load-lock chamber; and FIG. 6 provides a top view
illustrating an operating unit.
[0055] First, the processing system will be described.
[0056] As shown in FIG. 1, a processing system 2 has a plurality
of, e.g., four, processing chambers 4A, 4B, 4C and 4D; an
approximately hexagon shaped common transfer chamber 6; a first and
a second load-lock chamber 8A and 8B having a load-lock function;
and a narrow and long inlet side transfer chamber 10.
[0057] Specifically, each of the processing chambers 4A to 4D is
connected to one of four sides of the approximately hexagon shaped
common transfer chamber 6, and the first and the second load-lock
chamber 8A and 8B are connected to other two sides thereof,
respectively. Further, the inlet side transfer chamber 10 is
connected to both the first and the second load-lock chamber 8A and
8B.
[0058] The four processing apparatuses 4A to 4D and the first and
the second load-lock chamber 8A and 8B are respectively connected
to the common transfer chamber 6 via airtightly openable/closable
gate valves G, thereby forming a cluster tool. They can communicate
with an inside of the common transfer chamber 6, if necessary.
Further, the first and the second load-lock chamber 8A and 8B are
connected to the inlet side transfer chamber 10 via airtightly
openable/closable gate valves G, respectively.
[0059] The four processing apparatuses 4A to 4D respectively have
therein susceptors 12A to 12D, each for mounting thereon a
semiconductor wafer as an object to be processed and, further, are
designed in a way that a same process or different processes are
performed on the semiconductor wafer W as an object to be
processed. A second transfer mechanism 14 having stretchable,
bendable, elevatable and revolvable multi-joint arms is provided at
a position accessible to any of the two load-lock chambers 8A and
8B and the four processing chambers 4A to 4D. The second transfer
mechanism 14 has two picks B1 and B2 that are independently movable
in opposite directions and, thus, can carry two wafers at a time.
Further, the second transfer mechanism 14 having a single pick can
be used.
[0060] The inlet side transfer chamber 10 is of a horizontally
lengthened box. Formed at one side of the horizontally lengthened
box is a single or a plurality of, e.g., three in this embodiment,
loading ports 16 each having an openable/closable opening/closing
door 21. Further, inlet ports 18A to 18C are disposed
correspondingly to the loading ports 16, respectively. Cassette
containers 20 can be mounted on the inlet ports 18A to 18C,
respectively. Each of the cassette containers 20 can accommodate
therein a plurality of, e.g., 25, wafers W mounted in multi-levels
at an equal pitch. An opening/closing cover 20A (see FIG. 3) is
attached to each of the cassette containers 20. Referring to FIG.
3, there is illustrated a central inlet port 18B among the three
inlet ports 18A to 18C at which a driving unit 21A of the
opening/closing door 21, which is movable up and down and also
forward and backward for opening and closing the opening/closing
cover 20A of the cassette container 20, is installed.
[0061] Provided in the inlet side transfer chamber 10 is a first
transfer mechanism 22 for transferring the wafer W in a length
direction thereof. The first transfer mechanism 22 is slidably
supported on a guide rail 24 extending in the length direction in a
central portion of the inlet side transfer chamber 10. The guide
rail 24 has therein, e.g., a linear motor having an encoder as a
moving mechanism, and the first transfer mechanism 22 moves along
the guide rail 24 by the linear motor.
[0062] Further, the first transfer unit 22 has two multi-joint arms
32 and 34 installed in two vertical steps. Bifurcated picks A1 and
A2 are attached to leading ends of the multi-joint arms 32 and 34,
respectively, and a wafer W is directly held on each of the picks
A1 and A2. Each of the multi-joint arms 32 and 34 is stretchable,
bendable in a radial direction and elevatable, and the stretching
and bending of the multi-joint arms 32 and 34 can be individually
controlled. Respective rotation axes of the multi-joint arms 32 and
34 are rotatably connected to a base 36 in a coaxial shape and, for
example, can rotate as a single body in a revolving direction
relative to the base 36. Further, a single pick can be provided
instead of the two picks A1 and A2.
[0063] Disposed at the other end of the inlet side transfer chamber
10 is an orienter 26 for performing a position aligning of the
wafer. Provided in the middle of the length direction of the inlet
side transfer chamber 10 are the two load-lock chambers 8A and 8B
via the openable/closable gate valves G, respectively.
[0064] As shown in FIG. 4, the orienter 26 has a rotatable table 28
rotated by a driving motor 27 and rotates while having the wafer W
mounted thereon. Provided at an outer circumferential portion of
the rotatable table 28 is an optical sensor 30 for detecting a
peripheral portion of the wafer W. Accordingly, the optical sensor
30 can detect a location/direction of a position determiner, e.g.,
a notch or an orientation flat, and a misalignment of a center of
the wafer W.
[0065] Further, respectively installed in the first and the second
load-lock chamber 8A and 8B are mounting tables 38A and 38B having
a diameter smaller than a wafer diameter, for temporarily mounting
the wafer W thereon (see FIG. 5). Moreover, operations of the
processing system 2, e.g., operations of the transfer mechanisms 14
and 22 and the orienter 26 and the like, are entirely controlled by
the controller 40 having a microcomputer or the like. Connected to
the controller 40 is an operating unit 41 provided with a display
unit 42 including a liquid crystal display unit for informing an
operator of a specific message and a key set 44 such as ten keys
for input. Further, by employing a touch panel for the display unit
42, a function of the key set 44 can also be served by the display
unit 42. The teaching operation is performed with the use of the
operating unit 41 while observing the pick or the like.
[0066] Hereinafter, a teaching method performed in the processing
system configured as described above will be described.
[0067] Above all, a target moving position of each of the transfer
mechanisms 14 and 22 for transferring and transporting the
semiconductor wafer W is not determined by merely setting up the
aforementioned processing system 2 and, therefore, there is a need
to store the target moving position as coordinates in a control
system thereof. Such operation is referred to as a teaching. In
this case, due to an assembly error of the processing system 2 or
an error in an initial setting of each of the transfer mechanisms
14 and 22, a temporary moving destination position determined by a
calculation based on design values of each unit is generally a
little bit different from a target moving position in the assembled
processing system 2.
[0068] Therefore, if the transfer mechanism including the pick is
automatically moved to the target moving position obtained by the
calculation based on the design values of the processing system in
order to carry out the teaching operation, there is a possibility
of interference with another member on a moving route. Accordingly,
in the conventional teaching operation, the transfer mechanism is
automatically moved to an immediate front of the temporary moving
destination position obtained by the calculation, i.e., a position
free from any interference with another member and at the same time
nearest to the temporary moving destination position. Thereafter,
as described above, the transfer mechanism is moved by a
micro-distance by the manual operation while being checked with
naked eyes to make sure that there is no interference with another
member, thereby finally positioning the pick at a proper position
and storing coordinates thereof as a target moving position.
However, in such conventional teaching operation, a considerable
time is required to move the transfer mechanism by the manual
operation while checking with the naked eyes, which results in a
long teaching operation time.
[0069] Thus, the teaching method of the present invention includes
the steps of temporarily stopping the transfer mechanism in the
middle of a moving route to a temporary moving destination position
so as to make sure that the transfer mechanism does not interfere
with another member at a potential interference location where a
possibility of interference with another member is anticipated;
resuming to move the temporarily stopped transfer mechanism by
inputting a moving instruction; repeating the temporarily stopping
step and the resuming step; and when the pick reaches the temporary
moving destination position, storing, as the target moving
position, in the controller a position of the pick, after adjusting
and moving or without adjusting and moving the position of the
pick. In other words, a position where the transfer mechanism may
interfere or collide with another member in the middle of the
moving route to the temporary moving destination position obtained
based on the design values of the processing system is obtained in
advance as a potential interference location. In order to obtain
such potential interference location, a size and a revolving radius
of a multi-joint arm and a pick of the transfer mechanism and the
like are additionally required. Such potential interference
location is influenced by the assembly error of the processing
system and/or the error in the initial setting of a driving unit of
the transfer mechanism, and is a location (a spot) where the
transfer mechanism including the pick and another member are as
close as, e.g., about 1 cm. Further, in case such adjustment and
movement has been performed, coordinates of a next potential
interference location where the transfer mechanism temporarily
stops are increased/decreased by a magnitude of the adjustment and
movement.
[0070] As described above, once a potential interference locations
is obtained by the calculation, an automatic operation of the
transfer mechanism is actually performed. In this case, whenever
the transfer mechanism reaches the potential interference location,
the transfer mechanism temporarily stops and, then, it is checked
with the naked eye whether or not the transfer mechanism interferes
with another member even in a next step. At this time, if the
possibility that the transfer mechanism interferes with another
member is anticipated, the operator adjusts and moves the transfer
mechanism by the manual operation to a position free from the
interference with another member.
[0071] Next, the operator inputs a moving instruction, thereby
automatically moving the transfer mechanism to a next potential
interference location. Further, the aforementioned confirmation by
naked eyes that there is no interference, the adjustment and
movement performed if necessary, and the input of the moving
instruction are sequentially and iteratively performed.
[0072] Moreover, if the pick reaches the temporary moving
destination position obtained based on the design values of the
processing system and the like, if necessary, the operator adjusts
and moves the pick to an optimal position by the manual operation
while checking with naked eyes and, then, stores such position in
the controller as a target moving position. Accordingly, the
teaching operation for an original target moving position is
completed.
First Preferred Embodiment
[0073] Hereinafter, an exemplary teaching operation performed for
an inlet port will be described with reference to FIGS. 7A to 7E
and FIG. 8.
[0074] FIGS. 7A to 7E show an exemplary teaching operation
performed for the inlet port in accordance with a first preferred
embodiment of a method of the present invention, and FIG. 8
illustrates a flowchart depicting a flow of a teaching method of
the present invention. Referring to FIGS. 7A to 7E, there is
illustrated a case where a teaching operation of one pick A1 of the
first transfer mechanism 22 is performed for a central inlet port
18B among three inlet ports 18A to 18C. In this case, a position
aligning substrate W formed in the same size and shape of a
semiconductor wafer is mounted on a lowest supporting bracket (not
shown) of the cassette container 20, and a position (FIG. 7D) where
the pick A1 accesses right under the position aligning substrate W
is assumed to be a temporary moving destination position. Further,
if the position of the pick relative to the position aligning
substrate mounted on the lowest supporting bracket is determined,
the pick will be able to have an access to each supporting bracket
based on a specified pitch of the supporting bracket.
[0075] First, as described above, a potential interference location
where the transfer mechanism 22 is anticipated to interfere with
another member in the middle of the moving route from the reference
position of the first transfer mechanism 22 to the temporary moving
destination position illustrated in FIG. 7D is obtained in advance
based on the design values of the processing system and the size
and the revolving radius of the multi-joint arms of the transfer
mechanism 22. In such case, the position where the transfer
mechanism 22 and another member are as close as, e.g., 1 cm based
on the design values is determined to be a potential interference
location, and such information is stored in the controller 40. In
FIGS. 7A to 7E, three positions of the arm, which are illustrated
in FIGS. 7A to 7C, are obtained as respective potential
interference locations. Further, a position of a right end portion
of the guide rail 24 shown in FIG. 2 is assumed to be a reference
position (home position) 50 of the first transfer mechanism 22.
[0076] In a state that the first transfer mechanism 22 is
positioned at the reference position 50 (see FIG. 2), the operator
inputs the moving instruction by pressing a go button 44A (see FIG.
6) of the key set 44 connected to the controller 40 shown in FIG. 1
(step S1). If so, since a current position of the first transfer
mechanism 22 is not a temporary moving destination position (NO in
step S2), the controller 40 controls an operation of the first
transfer mechanism 22 to move the transfer mechanism 22 to a
location corresponding to the inlet port 18B in, e.g., a horizontal
direction. Then, by moving the multi-joint arm in a vertical
direction and a revolving direction and, at the same time,
stretching and bending the multi-joint arm (for example, extending
the multi-joint arm in the horizontal direction), the pick A1
temporarily stops at a first potential interference location
automatically, as described in FIG. 7A (step S3).
[0077] The first potential interference location is where a
distance X1 between a leading end of the pick A1 and that of the
position aligning substrate W is about 1 cm based on the design
values of the processing system. When the first transfer mechanism
22 temporarily stops, the display unit 42 displays thereon a
message such as "Do not picks or the like interfere with another
member?" to inform the operator of a potential interference of the
pick, as shown in FIG. 6. Further, simultaneously or independently,
the same message can be transferred from a speaker or the like in a
voice.
[0078] At this time, the operator checks with naked eyes whether or
not the pick A1 is positioned lower than a lower portion of another
member, i.e., the position aligning substrate W by about 2 to 3 mm
in a vertical direction, e.g., whether or not there is a
possibility of the interference with the position aligning
substrate W even if the pick A1 moves forward (step S4). In case
the possibility that the position aligning substrate W interferes
with the pick A1 is anticipated (YES in step S4), the operator
adjusts and moves the pick A1 by a micro-distance to a position
free from the interference with the position aligning substrate W
by the manual operation so that the pick A1 can be positioned lower
than the lower portion of the position aligning substrate W by
about 2 to 3 mm (step S5). Such adjustment and movement is carried
out by operating a move button 44C of the key set 44.
[0079] If the adjustment and movement of the pick A1 is completed,
or if the operator determines in the step S4 that there is no
possibility that the pick A1 interferes with another member (NO in
step S4), the operator inputs the moving instruction by pressing
the go button 44A (step S1). If so, the pick A1 of the first
transfer mechanism 22 is slightly and automatically moved forward
to a position where a distance X2 that the leading end of the pick
A1 overlaps a peripheral portion of the position aligning substrate
W is about 5 mm, i.e., to a second potential interference location,
and then temporarily stops, as illustrated in FIG. 7B (NO in step
S2 and step S3). Also in the case the pick A1 temporarily stops,
the display unit 42 displays thereon the message for informing the
potential interference of the pick. At this time, the operator
checks that the leading end of the pick A1 has entered under the
position aligning substrate W. A reason that the pick A1
temporarily stops at the position where an overlapped distance
between the pick A1 and the position aligning substrate W is about
5 mm is to minimize damages if the pick A1 interferes with the
position aligning substrate W.
[0080] Furthermore, if the operator inputs the moving instruction
by pressing the go button (step S1), the pick A1 of the first
transfer mechanism 22 is slightly and automatically moved forward
to a location where a horizontal distance X3 between a base portion
of the pick A1 and a top portion of the opening/closing door 21
(see FIG. 3) is about 1 cm based on the design values, as
illustrated in FIG. 7C, i.e., to a third potential interference
location, and then temporarily stops. At this time, the display
unit 42 displays thereon the message for informing the potential
interference of the pick. In this case, the operator checks the
pick A1 such that the base portion thereof does not interfere with
the opening/closing door 21 even if the pick A1 is moved forward.
If the operator determines that there is a possibility for the
interference of the base portion of the pick A1, the pick A1 is
slightly adjusted upwardly by the manual operation, as described
above.
[0081] Further, if the operator inputs the moving instruction by
pressing the go button, the pick A1 of the first transfer mechanism
22 automatically moves forward again to a temporary moving
destination position based on the design values and then
temporarily stops, as shown in FIG. 7D. Besides, in case there is
the adjustment and movement in the middle of a moving route by the
manual operation, the temporary moving destination position is
shifted by a magnitude of the adjustment and movement.
[0082] Accordingly, if the pick A1 has been moved forward to the
temporary moving destination position (YES in step S2), the
operator checks whether or not the position is appropriate for the
position aligning substrate W. Thereafter, if necessary, i.e., if
the position is misaligned, the pick A1 is adjusted and moved to a
target moving position by a micro-distance by the manual operation,
so that the pick A1 can be positioned right under the position
aligning substrate W, as illustrated in FIG. 7E (step S6). FIG. 7E
shows a state that the pick A1 has been moved upwardly by the
micro-distance. In addition, if the position of the pick A1 in the
temporary moving destination position shown in FIG. 7D is a proper
position as shown in FIG. 7E, the adjustment and movement in the
step S6 becomes unnecessary.
[0083] If the pick A1 has reached the proper position, i.e., the
target moving position, a save button 44B (see FIG. 6) of the key
set 44 is pressed, thereby storing position coordinate data of the
pick A1 in the controller 40 (step S8). Accordingly, the teaching
operation is completed.
[0084] By storing the position coordinates of the target moving
position in the controller 40, the pick A1 can automatically be
moved to the target moving position without interfering with
another member. In case the wafer is lifted in the cassette
container 20, the wafer is received at a position away from the
target moving position by a specific height. Further, in case the
wafer is received from another supporting bracket, since the
supporting brackets provided in multi-levels have a predetermined
pitch as described above, a height corresponding to the number of
the supporting brackets can be easily calculated.
[0085] Such teaching operation is equally performed for a pick A2
and, further, for the picks A1 and A2 of other inlet ports 18A and
18C. By comparison, in the conventional teaching method, after the
pick A1 is automatically moved to the first potential interference
location illustrated in FIG. 7A, the pick A1 is slightly moved to
the location shown in FIG. 7E by the manual operation.
[0086] Therefore, in the method of the present invention, the pick
is temporarily stopped only at a potential interference location
where there is a possibility that the pick or the like interferes
with another member. Further, whenever the pick is temporarily
stopped, if necessary, the pick is adjusted and moved by the manual
operation and then is automatically moved to a next potential
interference location. As a result, a moving time of the pick along
an entire transfer path becomes short and, thus, the teaching
operation can be quickly carried out in a short period of time.
Second Preferred Embodiment
[0087] Although the exemplary teaching operation performed for the
inlet port has been described in the first preferred embodiment, an
exemplary teaching operation performed for an orienter will be
described in a second preferred embodiment.
[0088] FIGS. 9A to 9D show the exemplary teaching operation
performed for the orienter in accordance with the second preferred
embodiment of the present invention. Further, FIGS. 9A to 9D
partially provide top views. Also in the second embodiment, a
teaching operation for the pick A1 of the first transfer mechanism
22 will be described. Further, whenever the pick A1 is temporarily
stopped at a potential interference location, the display unit
displays thereon a message for informing the operator of a
potential interference and the description thereof will be
omitted.
[0089] As in the first preferred embodiment, a potential
interference location and a temporary moving destination position
for the orienter 26 are obtained in advance based on the design
values of the processing system 2 and then stored in the controller
40. In the illustrated example, FIGS. 9A and 9B illustrate the
potential interference locations, and FIG. 9C provides the
temporary moving destination position.
[0090] First, if a moving instruction is inputted by pressing the
go button 44A (see FIG. 6) in a state that the first transfer
mechanism 22 is positioned at the reference position 50 (see FIG.
2), the first transfer mechanism 22 is automatically operated and,
further, the pick A1 is temporarily stopped at a first potential
interference location, as illustrated in FIG. 9A. The first
potential interference location is a position where a horizontal
distance Y1 between a bulkhead 10A of the inlet side transfer
chamber 10 to which the orienter 26 is attached and a leading end
of the pick A1 is, e.g., about 1 cm based on the design values of
the processing system. Accordingly, the leading end of the pick A1
can be prevented from colliding with the bulkhead 10A even if a
height of an opening of the orienter 26 is as short as about 3.6
cm. At the first potential interference location, the operator
vertically adjusts and moves the pick A1 by the manual operation,
if necessary, so that the pick A1 can enter into the orienter 26
without the interference.
[0091] Next, if the operator inputs the moving instruction by
pressing the go button, the pick A1 is automatically moved in the
horizontal direction and then temporarily stopped at a second
potential interference location, as depicted in FIG. 9B. The second
potential interference location is a position where a horizontal
distance Y2 between a peripheral portion of a rotatable table 28
and the pick A1 is, e.g., about 1 cm based on the design values of
the processing system. At the second potential interference
location, if necessary, the operator adjusts the position of the
pick A1 in the horizontal direction by the manual operation so that
the rotatable table 28 can be adequately surrounded by the pick A1
from the top view when the pick A1 is further moved. In other
words, the position thereof is adjusted by the manual operation so
that the pick does not interfere with the rotatable table 28 when
the pick A1 is further moved.
[0092] Thereafter, if the operator inputs the moving instruction by
pressing the go button, the pick A1 is automatically moved in the
horizontal direction and then reaches a temporary moving
destination position, as shown in FIG. 9C.
[0093] Further, if necessary, the operator adjusts and moves the
pick A1 to a proper position, i.e., a target moving position, by
the manual operation, as illustrated in FIG. 9D. Furthermore, by
pressing the save button 44B (see FIG. 6), position coordinate data
thereof are stored in the controller 40. In this case, before the
save button 44B is pressed, for example, a transparent position
aligning substrate W is mounted on the pick A1, as shown in the top
view of FIG. 9D and, then, it is checked that the rotatable table
28 is positioned at an approximately central portion of the
position aligning substrate W.
[0094] In FIG. 9D, since the pick A1 is positioned under the
rotatable table 28 at the temporary moving destination position
(see FIG. 9C), the pick A1 is adjusted and moved upwardly by the
manual operation and, further, properly positioned by using the
position aligning substrate W.
[0095] Also in the second preferred embodiment, the pick is
temporarily stopped only at a potential interference location where
a possibility that the pick or the like interferes with another
member is anticipated. Further, whenever the pick is temporarily
stopped, if necessary, the pick is adjusted and moved by the manual
operation, and then is automatically moved to a next potential
interference location. Therefore, a moving time of the pick along
the entire transfer path is shortened and, accordingly, the
teaching operation can be quickly performed in a short period of
time.
Third Preferred Embodiment
[0096] Hereinafter, a teaching operation performed for a load-lock
chamber in accordance with a third preferred embodiment will be
described.
[0097] FIGS. 10A to 10E illustrate an exemplary teaching operation
performed for the load-lock chamber in accordance with the third
preferred embodiment of the present invention.
[0098] Herein, an operation for teaching the pick A1 with respect
to the load-lock chamber 8A between two load-lock chambers 8A and
8B will be described as an example. The position aligning substrate
W is mounted in advance on the mounting table 38A in the load-lock
chamber 8A. Further, four potential interference locations shown in
FIGS. 10A to 10D are obtained based on the design values of the
processing system. FIG. 10E presents a temporary moving destination
position. Moreover, since the display on the display unit is same
as in the aforementioned case, the description thereof will be
omitted.
[0099] First, if a moving instruction is inputted by pressing the
go button 44A (see FIG. 6) in a state that the first transfer
mechanism 22 is positioned at the reference position 50 (see FIG.
2), the first transfer mechanism 22 is automatically operated and,
further, the pick A1 is temporarily stopped at a first potential
interference location, as shown in FIG. 10A. The first potential
interference location is a position where a horizontal distance Z1
between a bulkhead 10B of the inlet side transfer chamber 10 to
which the load-lock chamber 8A is attached and the leading end of
the pick A1 is, e.g., about 1 cm based on the design values of the
processing system. Accordingly, the leading end of the pick A1 can
be prevented from colliding with the bulkhead 10B even if a height
of an opening of the load-lock chamber 8A is as short as about 4.9
cm. At the first potential interference location, the operator
vertically adjusts and moves the pick A1 by the manual operation,
if necessary, so that the pick A1 can enter into the load-lock
chamber 8A without the interference.
[0100] Next, if the operator inputs the moving instruction by
pressing the go button, the pick A1 is automatically moved in the
horizontal direction and then temporarily stopped at a second
potential interference location, as depicted in FIG. 10B. The
second potential interference location is a position where a
horizontal distance Z2 between a peripheral portion of the position
aligning substrate W mounted on the mounting table 38A and the pick
A1 is, e.g., about 1 cm based on the design values of the
processing system. At the second potential interference location,
if necessary, the operator adjusts the position of the pick A1 in
the vertical and the horizontal direction by the manual operation,
so that the mounting table 38A can be adequately surrounded by the
pick A1 when the pick A1 is further moved. In other words, the
position thereof is adjusted by the manual operation so that the
pick A1 does not interfere with the mounting table 38A and the
position aligning substrate W when the pick A1 is further
moved.
[0101] Thereafter, if the operator inputs the moving instruction by
pressing the go button, the pick A1 is slightly and automatically
moved in the horizontal direction and then temporarily stopped at a
third potential interference location, as shown in FIG. 10C. The
third potential interference location is a position where a
horizontal distance Z3 that the peripheral portion of the position
aligning substrate W vertically overlaps the leading end of the
pick A1 is, e.g., about 5 mm based on the design values of the
processing system. The reason of temporarily stopping the pick A1
is to minimize damages if they interfere. At this time, if
necessary, the position of the pick A1 is adjusted by the manual
operation such that the pick A1 does not interfere with another
member by a next movement.
[0102] Next, if the operator inputs the moving instruction by
pressing the go button, the pick A1 is slightly and automatically
moved in the horizontal direction and then temporarily stopped at a
fourth potential interference location, as illustrated in FIG. 10D.
The fourth potential interference location is a position where a
horizontal distance Z4 between a top portion of an open gate valve
G and a base of the pick A1 is, e.g., about 1 mm based on the
design values of the processing system. The reason for temporarily
stopping the pick A1 is to prevent the base portion of the pick A1
from colliding with the open gate valve G. At this time, if
necessary, the position of the pick A1 is adjusted by the manual
operation so that the pick A1 does not interfere with another
member by a next movement.
[0103] Then, if the operator inputs the moving instruction by
pressing the go button, the pick A1 is automatically moved in the
horizontal direction and then reaches a temporary moving
destination position, as shown in FIG. 10E.
[0104] In addition, the operator adjusts and moves the pick A1 to a
proper position, i.e., a target moving position by the manual
operation, if necessary. Further, by pressing the save button 44B
(see FIG. 6), position coordinate data thereof are stored in the
controller 40. In this case, before the save button 44B is pressed,
it is checked that the pick A1 is properly positioned relative to,
e.g., the transparent position aligning substrate W mounted on the
mounting table 38A.
[0105] Also in the third preferred embodiment, the pick is
temporarily stopped only at a potential interference location where
the pick or the like is anticipated to interfere with another
member is anticipated. Further, whenever the pick is temporarily
stopped, if necessary, the pick is adjusted and moved by the manual
operation, and then automatically moved to a next potential
interference location. Therefore, the moving time of the pick along
the entire transfer path is shortened and, accordingly, the
teaching operation can be quickly performed in a short period of
time.
[0106] Furthermore, the aforementioned teaching operation is
performed for the picks A1 and A2 with respect to the load-lock
chambers 8A and 8B.
[0107] The teaching method of the first transfer mechanism 22,
which has been described in each of the above-described
embodiments, is equally carried out for both picks B1 and B2 of the
second transfer mechanism 14 in the common transfer chamber 6 with
respect to the processing chambers 4A to 4D and the load-lock
chambers 8A and 8B.
[0108] Actually, after the teaching method is performed, the
position aligning substrate W installed at each of the determined
target moving positions is automatically transferred to the
orienter 26 and, further, coordinate data of the target moving
positions are further corrected based on a micro-variation of the
position of the position aligning substrate W.
[0109] Since the aforementioned configurations of the processing
system 1 and the transfer mechanisms 14 and 22 are only examples,
the teaching method of the present invention can be applied to
every transfer mechanism installed in an atmosphere of an
atmospheric pressure and a vacuum.
[0110] Further, although a semiconductor wafer has been described
as an example of an object to be processed, the method of the
present invention can be applied to a glass substrate, an LCD
substrate or the like without being limited thereto.
[0111] As described above, the teaching method and the processing
system of the present invention can provide following effects.
[0112] In accordance with the present invention, a transfer
mechanism is temporarily stopped only at a spot (a location) where
there is a possibility of interference with another member and then
adjusted and moved if necessary. On the other hand, the transfer
mechanism is automatically moved in a location where there is no
possibility of interference with another member. Accordingly, a
teaching operation time can be greatly reduced.
[0113] Further, in accordance with the present invention, since a
display unit displays thereon a message for informing a potential
interference, an operator recognizes the message and, accordingly,
the transfer mechanism can be prevented from interfering with
another member more effectively.
[0114] While the invention has been shown and described with
respect to the preferred embodiments, it will be understood by
those skilled in the art that various changes and modifications may
be made without departing from the spirit and scope of the
invention as defined in the following claims.
* * * * *