Ishizawa; Shigeru

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ishizawa; Shigeru.The latest application filed is for "substrate processing method and substrate processing system".

Company Profile

4.15.19

Ishizawa; Shigeru - Miyagi JP
- Miyagi JP
Ishizawa; Shigeru - Nirasaki N/A JP
Ishizawa; Shigeru - Yamanashi JP
ISHIZAWA; SHIGERU - Nirasaki-Shi JP
Ishizawa; Shigeru - Tokyo JP
Ishizawa, Shigeru - Nirasaki-Shi Yamanashi-Ken JP
Ishizawa; Shigeru - Yamanashi-Ken JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate processing method and substrate processing system Grant 11,069,548 - Nishino , et al. July 20, 2	2021-07-20
Focus Ring Replacement Method And Plasma Processing System App 20200035471A1 -	2020-01-30
Focus Ring Replacement Method And Plasma Processing System App 20200035470A1 -	2020-01-30
Substrate Processing Method And Substrate Processing System App 20190362996 - NISHINO; Toru ; et al.	2019-11-28
Focus ring replacement method and plasma processing system Grant 10,490,392 - Ishizawa Nov	2019-11-26
Substrate transfer method and substrate processing apparatus Grant 10,468,278 - Ishizawa No	2019-11-05
Substrate processing method and substrate processing system Grant 10,403,525 - Nishino , et al. Sep	2019-09-03
Focus Ring Replacement Method And Plasma Processing System App 20190122870 - ISHIZAWA; Shigeru	2019-04-25
Substrate Processing Method And Substrate Processing System App 20180061692 - NISHINO; Toru ; et al.	2018-03-01
Focus Ring Replacement Method And Plasma Processing System App 20180019107 - ISHIZAWA; Shigeru	2018-01-18
Substrate Transfer Method And Substrate Processing Apparatus App 20160284577 - ISHIZAWA; Shigeru	2016-09-29
Substrate replacing method and substrate processing apparatus Grant 8,663,489 - Ishizawa , et al. March 4, 2	2014-03-04
Substrate Processing Apparatus And Method Of Controlling Substrate Processing Apparatus App 20120308341 - Ishizawa; Shigeru ; et al.	2012-12-06
Cleaning Method For Transfer Arm, Cleaning Method For Substrate Processing Apparatus And Substrate Processing Apparatus App 20110108056 - Ishizawa; Shigeru ; et al.	2011-05-12
Transportation apparatus and drive mechanism Grant 7,837,425 - Saeki , et al. November 23, 2	2010-11-23
Substrate Replacing Method And Substrate Processing Apparatus App 20100252532 - ISHIZAWA; SHIGERU ; et al.	2010-10-07
Substrate processing device Grant 7,780,391 - Matsuoka , et al. August 24, 2	2010-08-24
Processed body carrying device, and processing system with carrying device Grant 7,622,006 - Ishizawa , et al. November 24, 2	2009-11-24
Transfer mechanism and semiconductor processing system Grant 7,532,940 - Ishizawa May 12, 2	2009-05-12
Method for carrying object to be processed Grant 7,371,683 - Ishizawa , et al. May 13, 2	2008-05-13
Transfer apparatus for target object Grant 7,286,890 - Machiyama , et al. October 23, 2	2007-10-23
Semiconductor Processing System App 20070107845 - Ishizawa; Shigeru ; et al.	2007-05-17
Transfer apparatus for target object App 20060291988 - Machiyama; Wataru ; et al.	2006-12-28
Transfer mechanism and semiconductor processing system App 20060287761 - Ishizawa; Shigeru	2006-12-21
Transportation apparatus and drive mechanism App 20060210387 - Saeki; Hiroaki ; et al.	2006-09-21
Method for carrying object to be processed App 20060021575 - Ishizawa; Shigeru ; et al.	2006-02-02
Semiconductor processing system and method of transferring workpiece Grant 6,983,195 - Iijima , et al. January 3, 2	2006-01-03
Substrate processing device App 20050238464 - Matsuoka, Takaaki ; et al.	2005-10-27
Teaching method and processing system App 20050220582 - Kumagai, Motohiro ; et al.	2005-10-06
Processed body carrying device, and processing system with carrying device App 20050087300 - Ishizawa, Shigeru ; et al.	2005-04-28
Semiconductor processing system App 20040238122 - Ishizawa, Shigeru ; et al.	2004-12-02
Method of transferring processed body and processing system for processed body App 20040043513 - Ishizawa, Shigeru ; et al.	2004-03-04
Semiconductor processing system and method of transferring workpiece App 20040029300 - Iijima, Kiyohito ; et al.	2004-02-12
Deadlock avoidance method and treatment system for object to be treated Grant 6,466,835 - Ishizawa , et al. October 15, 2	2002-10-15
Apparatus and method for performing serial communication between master and slave devices Grant 5,754,780 - Asakawa , et al. May 19, 1	1998-05-19

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