U.S. patent application number 11/124211 was filed with the patent office on 2005-09-22 for industrial machine management system, and method.
This patent application is currently assigned to CANON KABUSHIKI KAISHA. Invention is credited to Ina, Hideki, Ogura, Masaya, Ogushi, Nobuaki.
Application Number | 20050209720 11/124211 |
Document ID | / |
Family ID | 18831840 |
Filed Date | 2005-09-22 |
United States Patent
Application |
20050209720 |
Kind Code |
A1 |
Ina, Hideki ; et
al. |
September 22, 2005 |
Industrial machine management system, and method
Abstract
A system for quickly and easily optimizing the parameters of an
industrial machine or solving any trouble in industrial machine is
provided. A factory (100) and vendor (200) are connected through a
data communication network (300). A management apparatus (120)
selectively gives the operation right of an industrial machine
(110) to a factory-side operation apparatus (130) or a vendor-side
operation apparatus (210) arranged at a remote site. The operation
apparatus having the given operation right can operate the
industrial machine (110) and obtain information representing the
operation condition of the industrial machine.
Inventors: |
Ina, Hideki; (Kanagawa,
JP) ; Ogushi, Nobuaki; (Tochigi, JP) ; Ogura,
Masaya; (Tokyo, JP) |
Correspondence
Address: |
FITZPATRICK CELLA HARPER & SCINTO
30 ROCKEFELLER PLAZA
NEW YORK
NY
10112
US
|
Assignee: |
CANON KABUSHIKI KAISHA
|
Family ID: |
18831840 |
Appl. No.: |
11/124211 |
Filed: |
May 9, 2005 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
11124211 |
May 9, 2005 |
|
|
|
09988875 |
Nov 21, 2001 |
|
|
|
Current U.S.
Class: |
700/95 ; 700/121;
700/9 |
Current CPC
Class: |
Y02P 90/02 20151101;
G05B 19/4184 20130101; G05B 23/0216 20130101; G06Q 10/06
20130101 |
Class at
Publication: |
700/095 ;
700/009; 700/121 |
International
Class: |
G05B 019/18; G05B
015/02 |
Foreign Application Data
Date |
Code |
Application Number |
Nov 27, 2000 |
JP |
2000-360205 |
Claims
1. A management system for managing an, industrial machine using a
data communication network, comprising: a management apparatus for
selectively giving an operation right of the industrial machine to
one of a first operation apparatus arranged in a factory where the
industrial machine is installed and a second operation apparatus
arranged at a remote site from the factory where the industrial
machine is installed; and a control apparatus for operating the
industrial machine in accordance with an instruction from the
operation apparatus to which the operation right has been given by
said management apparatus and providing information representing an
operation condition of the industrial machine to the operation
apparatus.
2. The system according to claim 1, wherein the second operation
apparatus and said control apparatus are connected through the data
communication network.
3. The system according to claim 1, wherein said management
apparatus selectively gives the operation right of the industrial
machine to one of the first and second operation apparatuses in
accordance with an instruction from a manager of the industrial
machine.
4. The system according to claim 3, wherein the system further
comprises a manager setting section for setting the manager of the
industrial machine, and said management apparatus selectively gives
the operation right of the industrial machine to one of the first
and second operation apparatuses in accordance with an instruction
from the manager set by said manager setting section.
5-9. (canceled)
10. The system according to claim 1, wherein the second operation
apparatus is arranged in a business office of a person in charge of
manufacturing, sales, or maintenance of the industrial machine or a
person in charge of services about the industrial machine.
11. The system according to claim 1, wherein the industrial machine
comprises a semiconductor manufacturing apparatus.
12. The system according to claim 11, wherein said semiconductor
manufacturing apparatus comprises anyone of an exposure apparatus,
CVD apparatus, etching apparatus, CMP apparatus, resist coating
apparatus, development apparatus, ashing apparatus, and inspection
apparatus.
13. A management method of managing an industrial machine using a
data communication network, comprising: the management step of
selectively giving an operation right of the industrial machine to
one of a first operation apparatus arranged in a factory where the
industrial machine is installed and a second operation apparatus
arranged at a remote site from the factory where the industrial
machine is installed; and the control step of sending an
instruction from the operation apparatus to which the operation
right has been given in the management step to a control apparatus
of the industrial machine to cause the control apparatus to control
the industrial machine and sending information representing an
operation condition of the industrial machine from the control
apparatus to the operation apparatus.
14. The method according to claim 13, wherein the second operation
apparatus and control apparatus are connected through the data
communication network.
15. The method according to claim 13, wherein in the management
step, the operation right of the industrial machine is selectively
given to one of the first and second operation apparatuses in
accordance with an instruction from a manager of the industrial
machine.
16. The method according to claim 15, wherein the method further
comprises the setting step of setting the manager of the industrial
machine, and in the management step, the operation right of the
industrial machine is selectively given to one of the first and
second operation apparatuses in accordance with an instruction from
the manager set in the setting step.
17-21. (canceled)
22. The method according to claim 13, wherein the second operation
apparatus is arranged in a business office of a person in charge of
manufacturing, sales, or maintenance of the industrial machine or a
person in charge of services about the industrial machine.
23. The method according to claim 13, wherein the industrial
machine comprises a semiconductor manufacturing apparatus.
24. The method according to claim 23, wherein the semiconductor
manufacturing apparatus comprises anyone of an exposure apparatus,
CVD apparatus, etching apparatus, CMP apparatus, resist coating
apparatus, development apparatus, ashing apparatus, and inspection
apparatus.
Description
FIELD OF THE INVENTION
[0001] The present invention relates to a management system and
method for managing an industrial machine.
BACKGROUND OF THE INVENTION
[0002] Projection exposure apparatuses for manufacturing
semiconductor devices are required to be able to project and expose
a circuit pattern on a reticle surface onto a wafer surface at
higher resolving power as circuits are becoming micropatterned and
have higher densities. Circuit projecting and resolving power
depends on the numerical aperture (NA) and exposure wavelength of a
projection optical system. Hence, to improve the resolving power, a
method of increasing the NA of the projecting optical system or a
method of shortening the exposure wavelength is employed. For the
latter method, the exposure light source has changed from g-line to
i-line and is changing from the i-line to an excimer laser now. For
the excimer laser, exposure apparatuses that use an oscillation
wavelength of 248 or 193 nm have already been put into practical
use. Currently, a next-generation exposure apparatus with an
oscillation wavelength of 157 nm has been examined.
[0003] As the micropatterning of circuits progresses, a reticle
having a circuit pattern formed thereon and a wafer on which the
circuit pattern is projected must be accurately aligned. The
required accuracy is 1/3 the circuit line width. For example, in
the current 180-nm design, the required accuracy is 1/3, i.e., 60
nm.
[0004] In addition, a variety of device structures have been
proposed, and their production has been examined. As the use of
personal computers and the like are widespread, the tractor of
micropatterning has shifted from memories represented by DRAMs to
CPU chips. Along with further growth in IT, development of devices
for commutation systems called home wireless LANs or Bluetooth and
MMICs (Millimeter-wave Monolithic Integrated Circuits) used in ITSs
(Intelligent Transport Systems) represented by an automobile radar
using a frequency of 77 GHz or LMDSs (Local Multipoint Distribution
Services) using a frequency of 24 to 38 GHz would encourage further
micropatterning.
[0005] There are also various semiconductor device manufacturing
processes. As a planarizing technique for solving a shortage in
depth of an exposure apparatus, the W-CMP (Tungsten Chemical
Mechanical Polishing) process is already becoming a thing of the
past technique. Currently, a Cu dual damascene process has received
a great deal of attention.
[0006] Semiconductor devices also employ various structures and
materials. For example, a P-HEMT (Pseudomorphic High Electron
Mobility Transistor) formed by combining compounds such as GaAs and
InP, M-HEMT (Metamorphic-HEMT), and HBT (Heterojunction Bipolar
Transistor) using SiGe or SiGeC have been proposed.
[0007] In the current circumstances of the semiconductor industry,
the number of parameters to be optimized in a semiconductor
manufacturing apparatus such as an exposure apparatus is enormous.
In addition, these parameters are not independent but are closely
related to each other.
[0008] Conventionally, a person in charge of apparatus introduction
in each device manufacturer determines the parameters by trial and
error. A very long time is required to determine optimum
parameters. Even after parameter determination, if, e.g., a process
error occurs, the manufacturing process may be changed in
accordance with the error, and the parameters of the manufacturing
apparatus may also have to be changed again. It is also
time-consuming.
[0009] In production of semiconductor devices, time to be taken
from the setup of a manufacturing apparatus to the start of mass
production is limited. Time taken to determine parameters is also
limited. From the viewpoint of COO (Cost Of Ownership) as well, the
operation time of the manufacturing apparatus must be increased,
and therefore, the parameters that are determined once must be
quickly changed. In such a situation, it is very difficult to
manufacture various semiconductor devices with optimum parameters.
Even a manufacturing apparatus capable of obtaining high yield
cannot obtain the expected yield because it is used without
optimizing the parameters, resulting in an unnoticeable decrease in
yield. Such a decrease in yield increases the manufacturing cost
and decreases the delivery amount, and additionally, decreases the
competitive power.
[0010] The parameters of a manufacturing apparatus can be quickly
determined probably not by the user of the manufacturing apparatus
but by a person in charge of manufacturing, sales, or maintenance
of the manufacturing apparatus or a person in charge of services
about the manufacturing apparatus (such a person will be referred
to as a vendor hereinafter). This is because the vendor knows the
characteristics of the manufacturing apparatus better and has
information that is not public to the user. However, from the
viewpoint of schedule adjustment and transmit time, it is not
always the best to make the vendor actually visit the factory where
the manufacturing apparatus is installed.
[0011] For a successful semiconductor business, it is very
important to solve any trouble in manufacturing apparatus. Japanese
Patent Laid-Open No. 11-15520 has proposed an epoch-making system
that quickly solves any trouble in industrial machine such as a
semiconductor manufacturing apparatus from a remote site. In this
system, a monitoring apparatus for monitoring the operation state
of an industrial machine and a management apparatus on a vendor
side are connected through a data communication network such as the
Internet, thereby maintaining the industrial machine while
exchanging information related to the maintenance of the industrial
machine therebetween.
SUMMARY OF THE INVENTION
[0012] It is an object of the present invention to provide an
advanced system of the above-described maintenance system. More
specifically, it is an object of the present invention to provide a
system and method capable of quickly and easily optimizing the
parameters of an industrial machine or solving any trouble in
industrial machine.
[0013] According to the first aspect of the present invention,
there is provided a management system for managing an industrial
machine using a data communication network, comprising a management
apparatus for selectively giving an operation right of the
industrial machine to one of a first operation apparatus arranged
in a factory where the industrial machine is installed and a second
operation apparatus arranged at a remote site from the factory
where the industrial machine is installed, and a control apparatus
for operating the industrial machine in accordance with an
instruction from the operation apparatus to which the operation
right has been given by the management apparatus and providing
information representing an operation condition of the industrial
machine to the operation apparatus.
[0014] According to the preferred aspect of the present invention,
the second operation apparatus and the control apparatus are
preferably connected through the data communication network.
[0015] According to the preferred aspect of the present invention,
the management apparatus preferably selectively gives the operation
right of the industrial machine to one of the first and second
operation apparatuses in accordance with an instruction from a
manager of the industrial machine.
[0016] According to the preferred aspect of the present invention,
preferably, the system further comprises a manager setting section
for setting the manager of the industrial machine, and the
management apparatus selectively gives the operation right of the
industrial machine to one of the first and second operation
apparatuses in accordance with an instruction from the manager set
by the manager setting section.
[0017] According to the preferred aspect of the present invention,
the system preferably further comprises a limiting section for
limiting contents of operation of the industrial machine by the
first operation apparatus through the control apparatus when the
manager of the industrial machine is a manager of the second
operation apparatus.
[0018] According to the preferred aspect of the present invention,
the system preferably further comprises a limiting section for
limiting contents of operation of the industrial machine by the
second operation apparatus through the control apparatus when the
manager of the industrial machine is a manager of the first
operation apparatus.
[0019] According to the preferred aspect of the present invention,
the system preferably further comprises a security system for
making information related to the operation of the industrial
machine by the first operation apparatus secret to the second
operation apparatus and making information related to the operation
of the industrial machine by the second operation apparatus secret
to the first operation apparatus.
[0020] According to the preferred aspect of the present invention,
preferably, the security system makes some or all pieces of
information, which are secret to the second operation apparatus,
public to the second operation apparatus in accordance with an
instruction from the first operation apparatus and makes some or
all pieces of information, which are secret to the first operation
apparatus, public to the first operation apparatus in accordance
with an instruction from the second operation apparatus.
[0021] According to the preferred aspect of the present invention,
preferably, when the operation right of the industrial machine is
given to the first operation apparatus, the security system makes
the information representing the operation condition of the
industrial machine public to the second operation apparatus in
accordance with an instruction from the first operation apparatus,
and when the operation right of the industrial machine is given to
the second operation apparatus, the security system makes the
information representing the operation condition of the industrial
machine public to the first operation apparatus in accordance with
an instruction from the second operation apparatus.
[0022] According to the preferred aspect of the present invention,
the second operation apparatus is preferably arranged in a business
office of a person in charge of manufacturing, sales, or
maintenance of the industrial machine or a person in charge of
services about the industrial machine.
[0023] According to the preferred aspect of the present invention,
the industrial machine preferably comprises a semiconductor
manufacturing apparatus such as an exposure apparatus, CVD
apparatus, etching apparatus, CMP apparatus, resist coating
apparatus, development apparatus, ashing apparatus, or inspection
apparatus.
[0024] According to the second aspect of the present invention,
there is provided a management method of managing an industrial
machine using a data communication network, comprising the
management step of selectively giving an operation right of the
industrial machine to one of a first operation apparatus arranged
in a factory where the industrial machine is installed and a second
operation apparatus arranged at a remote site from the factory
where the industrial machine is installed, and the control step of
sending an instruction from the operation apparatus to which the
operation right has been given in the management step to a control
apparatus of the industrial machine to cause the control apparatus
to control the industrial machine and sending information
representing an operation condition of the industrial machine from
the control apparatus to the operation apparatus.
[0025] Other features and advantages of the present invention will
be apparent from the following description taken in conjunction
with the accompanying drawings, in which like reference characters
designate the same or similar parts throughout the figures
thereof.
BRIEF DESCRIPTION OF THE DRAWINGS
[0026] The accompanying drawings, which are incorporated in and
constitute a part of the specification, illustrate embodiments of
the invention and, together with the description, serve to explain
the principles of the invention.
[0027] FIG. 1 is a block diagram showing the configuration of an
industrial machine management system according to a preferred
embodiment of the present invention;
[0028] FIG. 2 is a flow chart showing the operation of a management
apparatus based on a management program;
[0029] FIG. 3 is a flow chart showing the operation of a
vendor-side operation apparatus based on an operation program;
and
[0030] FIG. 4 is a flow chart showing the operation of a
factory-side operation apparatus based on an operation program.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
[0031] The preferred embodiment of the present invention will be
described below with reference to the accompanying drawings.
[0032] FIG. 1 is a block diagram showing the configuration of an
industrial machine management system according to the preferred
embodiment of the present invention. This management system can be
formed typically by connecting one or a plurality of factories 100
to a vendor 200 located at a remote site from the factories 100
through a data communication network 300 such as the Internet or a
dedicated line.
[0033] In each factory 100, an industrial machine 110, a management
apparatus 120 for managing the industrial machine, and a
factory-side operation apparatus (first operation apparatus) 130
for operating the industrial machine 110 through the management
apparatus 120 are installed. Examples of the industrial machines
110 to be managed are semiconductor manufacturing apparatuses such
as an exposure apparatus, CVD apparatus, etching apparatus, CMP
apparatus, resist coating apparatus, development apparatus, ashing
apparatus, and inspection apparatus.
[0034] The factory-side operation apparatus 130 can operate the
industrial machine 110 through the management apparatus 120. Some
or all of the industrial machine 110, management apparatus 120, and
factory-side operation apparatus 130 may be integrated. The
factory-side operation apparatus 130 typically includes a monitor
131 for monitoring various operation states of the industrial
machine 110 or checking parameters, an input section 132 for
inputting information (e.g., parameters, commands, and programs) to
be used to operate the industrial machine 110, and an operation
program 133 for controlling the operation of the factory-side
operation apparatus 130.
[0035] A vendor-side operation apparatus (second operation
apparatus) 210 is installed in the business office of the vendor
200 located at a remote site from the factories 100. The
vendor-side operation apparatus 210 is connected to the management
apparatus 120 in the factory 100 through the data communication
network 300 so that the apparatus 200 can operate the industrial
machine 110 from the remote site through the management apparatus
120 and obtain information representing the operation state. Hence,
the vendor 200 can, e.g., optimize the parameters of the industrial
machine 110 while repeating operation of changing the parameters of
the industrial machine 110 and checking the operation state of the
industrial machine 110 or check the symptoms of a trouble in
industrial machine 110 or solve the trouble while operating the
industrial machine 110. Communication using the data communication
network 300 complies with, e.g., the packet communication protocol
(TCP/IP).
[0036] In optimizing the parameters or solving a trouble, the
vendor 200 can effectively use various kinds of know-how of its
own, the design data of the industrial machine 110, and the like.
To the contrary, it is very difficult for a person who does not
know the characteristics of the industrial machine 110 well, e.g.,
a person in charge on the factory 100 side to optimize the
parameters and to solve a trouble while operating the industrial
machine 110, as in the prior art, and even if it is possible, a
very long time is required. In addition, from the viewpoint of
schedule adjustment and transmit time, it is not speedy to allow a
person in charge on the vendor 200 side to visit the factory 100
each time to perform the above operation. As is apparent from the
above description, when the industrial machine 110 is a
semiconductor manufacturing apparatus such as an exposure
apparatus, the advantage of this management system becomes more
conspicuous.
[0037] The vendor-side operation apparatus 210 typically includes a
monitor 211 for monitoring various operation states of the
industrial machine 110 or checking parameters, an input section 212
for inputting information (e.g., parameters, commands, and
programs) to be used to operate the industrial machine 110, and an
operation program 213 for controlling the operation of the
vendor-side operation apparatus 210.
[0038] The management apparatus 120 includes a manager setting
section 121 for setting the manager of the industrial machine 110,
a management program 122 for controlling the management system, a
factory-side memory 123 to be exclusively used by the factory 100
side, a vendor-side memory 124 to be exclusively used by the vendor
200 side, an information management section 125 for controlling an
access to the factory-side memory 123 and vendor-side memory 124,
and a control apparatus 126 for operating the industrial machine
110 in accordance with an instruction from the factory-side
operation apparatus 130 or vendor-side operation apparatus 210 and
providing information representing the operation condition to the
factory-side operation apparatus 130 or vendor-side operation
apparatus 210.
[0039] The manager setting section 121 can set the manager, e.g.,
in accordance with mechanical operation on switches or buttons, on
the basis of information (e.g., a special code) sent from the
factory-side operation apparatus 130, vendor-side operation
apparatus 210, or another terminal, or in accordance with another
method. Typically, before the industrial machine 110 is installed
in the factory 100 by the vendor 200, and acceptance inspection and
the like are done by a person in charge in the factory 100, the
industrial machine 110 is managed by the vendor 200. After that,
the industrial machine 110 is managed by the factory 100. The
management program 122 selectively gives the operation right of the
industrial machine 110 to the factory-side operation apparatus 130
or vendor-side operation apparatus 210 and allows the operation
apparatus having the operation right to operate the industrial
machine 110. The operation right of the industrial machine 110 is
given to an appropriate operation apparatus typically in accordance
with an instruction from the manager set by the manager setting
section 121 or a permission from the manager.
[0040] The factory-side memory 123 is used to, e.g., store, of
various kinds of information such as the operation log of the
industrial machine 110 or the parameters set for the industrial
machine 110 on the factory 100 side, information that must be
secret to the vendor 200 side. The information management section
125 normally inhibits the vendor 200 side (i.e., the vendor-side
operation apparatus 210) from accessing the factory-side memory 123
but permits the vendor 200 side to access some or all pieces of
information stored in the factory-side memory 123 in accordance
with a permission given from the factory 100 side.
[0041] The vendor-side memory 124 is used to, e.g., store, of
various kinds of information such as the operation log of the
industrial machine 110 or the parameters set for the industrial
machine 110 on the vendor 200 side, information that must be secret
to the factory 100 side. The information management section 125
normally inhibits the factory 100 side (i.e., the factory-side
operation apparatus 130) from accessing the vendor-side memory 124
but permits the factory 100 side to access some or all pieces of
information stored in the vendor-side memory 124 in accordance with
a permission given from the vendor 200 side as needed.
[0042] FIG. 2 is a flow chart showing the operation of the
management apparatus 120 based on the management program 122. In
step S401, the management apparatus 120 receives an operation
request of the industrial machine 110 from the factory-side
operation apparatus 130 or vendor-side operation apparatus 210. In
step S402, the management apparatus 120 determines whether the
factory-side operation apparatus 130 has issued the operation
request. If YES in step S402, the flow advances to step S403.
Otherwise, the flow advances to step S409.
[0043] In step S403, it is determined whether the current manager
of the industrial machine 110, i.e., the manager set by the manager
setting section 121 is on the factory 100 side. If YES in step
S403, the flow advances to step S404. Otherwise (i.e., if the
manager is on the vendor 200 side), the flow advances to step
S407.
[0044] If YES in step S403, it means that the manager
himself/herself is requesting the operation of the industrial
machine 110. Hence, in step S404, the management apparatus 120
gives the operation right of the industrial machine 110 to the
factory-side operation apparatus 130 related to the operation
request. In step S405, the management apparatus 120 causes the
control apparatus 126 to operate the industrial machine 110 in
accordance with an instruction from the factory-side operation
apparatus 130 and also acquires information representing the
operation condition of the industrial machine 110 from the
industrial machine 110 and transmits the information to the
factory-side operation apparatus 130. The factory-side operation
apparatus 130 displays the operation condition of the industrial
machine 110 on, e.g., the monitor 131 in accordance with the
information.
[0045] The management apparatus 120 may transmit the information
representing the operation condition of the industrial machine 110
that is being operated by the factory-side operation apparatus 130
to the vendor-side operation apparatus 210 in accordance with an
instruction from the factory-side operation apparatus 130.
[0046] In step S406, it is determined whether the operation of the
industrial machine 110 by the factory-side operation apparatus 130
is to be ended (e.g., whether a command indicating the end of the
operation has been received). If YES in step S406, the flow returns
to step S401.
[0047] If it is determined in step S403 that the current manager of
the industrial machine is on the vendor 200 side, the management
apparatus 120 determines in step S407 whether the vendor 200 side
will permit the operation of the industrial machine 110 by the
factory 100 side. If YES in step S407, the flow advances to step
S404 described above. If NO in step S407, the flow advances to step
S408, and the management apparatus 120 causes the monitor 131 of
the factory-side operation apparatus 130 to display an error
message. In permitting the factory 100 side to operate the
industrial machine 110, the vendor 200 side can limit the contents
(e.g., commands) of operation of the industrial machine 110 by the
factory-side operation apparatus 130.
[0048] If it is determined in step S402 that the operation request
is issued from the vendor-side operation apparatus 210, the
management apparatus 120 determines in step S409 whether the
current manager of the industrial machine 110, i.e., the manager
set by the manager setting section 121 is on the vendor 200 side.
If YES in step S409, the flow advances to step S410. If NO in step
S409 (i.e., if the manager is on the factory 100 side), the flow
advances to step S413.
[0049] If YES in step S409, it means that the manager
himself/herself is requesting the operation of the industrial
machine 110. Hence, in step S410, the management apparatus 120
gives the operation right of the industrial machine 110 to the
vendor-side operation apparatus 210 related to the operation
request. In step S411, the management apparatus 120 causes the
control apparatus 126 to operate the industrial machine 110 in
accordance with an instruction from the vendor-side operation
apparatus 210 and also acquires information representing the
operation condition of the industrial machine 110 from the
industrial machine 110 and transmits the information to the
vendor-side operation apparatus 210. The vendor-side operation
apparatus 210 displays the operation condition of the industrial
machine 110 on, e.g., the monitor 211 in accordance with the
information.
[0050] The management apparatus 120 may transmit the information
representing the operation condition of the industrial machine 110
that is being operated by the vendor-side operation apparatus 210
to the factory-side operation apparatus 130 in accordance with an
instruction from the vendor-side operation apparatus 210.
[0051] In step S412, it is determined whether the operation of the
industrial machine 110 by the vendor-side operation apparatus 210
is to be ended (e.g., whether a command indicating the end of the
operation has been received). If YES in step S412, the flow returns
to step S401.
[0052] If it is determined in step S409 that the current manager of
the industrial machine is on the factory 100 side, the management
apparatus 120 determines in step S413 whether the factory 100 side
will permit the operation of the industrial machine 110 by the
vendor 200 side. If YES in step S413, the flow advances to step
S410 described above. If NO in step S413, the flow advances to step
S414, and the management apparatus 120 causes the monitor 211 of
the vendor-side operation apparatus 210 to display an error
message. In permitting the vendor 200 side to operate the
industrial machine 110, the factory 100 side can limit the contents
(e.g., commands) of operation of the industrial machine 110 by the
vendor-side operation apparatus 210.
[0053] FIG. 3 is a flow chart showing the operation of the
vendor-side operation apparatus 210 based on the operation program
213. In step S501, the vendor-side operation apparatus 210
transmits the operation request of the industrial machine 110 to
the management apparatus 120 through the data communication network
300 in accordance with the operation on the input section 212 by a
person in charge on the vendor 200 side (corresponding to step
S401).
[0054] In step S502, the vendor-side operation apparatus 210
determines whether the operation right of the industrial machine
110 has been given by the management apparatus 120. If YES in step
S502 (corresponding to step S404), the flow advances to step S503.
If NO in step S502 (corresponding to "NO" in step S407), the flow
advances to step S507 to display an error message on the monitor
211 (corresponding to step S408).
[0055] In step S503, the vendor-side operation apparatus 210
outputs an instruction to the management apparatus 120 through the
data communication network 300 to operate the industrial machine
110 in accordance with the operation on the input section 212 by
the person in charge on the vendor 200 side (corresponding to step
S405). In step S504, the vendor-side operation apparatus 210
receives information representing the operation condition of the
industrial machine 110 from the management apparatus 120 through
the data communication network 300 (corresponding to step
S405).
[0056] In step S505, the vendor-side operation apparatus 210
analyzes the information received from the management apparatus 120
and outputs the result to the monitor 211 or the like.
[0057] In step S506, it is determined whether the operation of the
industrial machine 110 is to be ended. If YES in step S506, the
flow advances to step S508 to execute end processing (e.g., a
command indicating the end of the operation is transmitted to the
management apparatus 120).
[0058] FIG. 4 is a flow chart showing the operation of the
factory-side operation apparatus 130 based on the operation program
133. In step S601, the factory-side operation apparatus 130
transmits the operation request of the industrial machine 110 to
the management apparatus 120 in accordance with the operation on
the input section 132 by a person in charge on the factory 100 side
(corresponding to step S401).
[0059] In step S602, the factory-side operation apparatus 130
determines whether the operation right of the industrial machine
110 has been given by the management apparatus 120. If YES in step
S602 (corresponding to step S410), the flow advances to step S603.
If NO in step S602 (corresponding to "NO" in step S413), the flow
advances to step S610 to display an error message on the monitor
131 (corresponding to step S414).
[0060] In step S603, the factory-side operation apparatus 130
determines whether the industrial machine 110 is to be operated in
the test mode. If YES in step S603, the flow advances to step S604.
If the industrial machine 110 is to be operated in another mode
(e.g., mass production mode), the flow advances to step S608 to
operate the industrial machine 110 in accordance with that
mode.
[0061] In step S604, the factory-side operation apparatus 130
outputs an instruction to the management apparatus 120 through to
operate the industrial machine 110 in accordance with the operation
on the input section 132 by the person in charge on the factory 100
side (corresponding to step S411). In step S605, the factory-side
operation apparatus 130 receives information representing the
operation condition of the industrial machine 110 from the
management apparatus 120 (corresponding to step S411).
[0062] In step S606, the factory-side operation apparatus 130
analyzes the information received from the management apparatus 120
and outputs the result to the monitor 131 or the like.
[0063] In step S607, it is determined whether the operation of the
industrial machine 110 is to be ended. If YES in step S607, the
flow advances to step S609 to execute end processing (e.g., a
command indicating the end of the operation is transmitted to the
management apparatus 120).
[0064] According to the present invention, a method and system for
operating an industrial machine from a remote site and checking the
operation condition can be provided. These system and method can
quickly and easily optimize the parameters of the industrial
machine or solve any trouble in industrial machine.
[0065] As many apparently widely different embodiments of the
present invention can be made without departing from the spirit and
scope thereof, it is to be understood that the invention is not
limited to the specific embodiments thereof except as defined in
the appended claims.
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