U.S. patent application number 11/054739 was filed with the patent office on 2005-09-15 for side-specific cleaning apparatus.
Invention is credited to Scranton, Dana.
Application Number | 20050199277 11/054739 |
Document ID | / |
Family ID | 21996979 |
Filed Date | 2005-09-15 |
United States Patent
Application |
20050199277 |
Kind Code |
A1 |
Scranton, Dana |
September 15, 2005 |
Side-specific cleaning apparatus
Abstract
An apparatus for cleaning of a microelectronic workpiece having
a front side, a back side, and an edge includes a chamber and a
fixture within the chamber that is adapted to hold one or more
microelectronic workpieces. At least one transducer is located
within the chamber and preferably adjacent to the edge of the
microelectronic workpiece. The method includes the steps of
immersing the front side, back side, and edge of the
microelectronic workpiece in a first processing fluid while
preferably rotating the microelectronic workpiece. The
microelectronic workpiece is then rinsed and dried and immersed in
a second processing fluid such that the back side and edge of the
microelectronic workpiece are immersed in the second processing
fluid, while preferably rotating the microelectronic workpiece,
without exposing the front surface of the microelectronic workpiece
to the second processing fluid. Vibrational energy, preferably in
the form of megasonics, is introduced during at least one of the
immersions steps.
Inventors: |
Scranton, Dana; (Kalispell,
MT) |
Correspondence
Address: |
PERKINS COIE LLP/SEMITOOL
PO BOX 1208
SEATTLE
WA
98111-1208
US
|
Family ID: |
21996979 |
Appl. No.: |
11/054739 |
Filed: |
February 9, 2005 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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11054739 |
Feb 9, 2005 |
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10055302 |
Jan 23, 2002 |
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6875284 |
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Current U.S.
Class: |
134/184 ;
134/186; 134/902 |
Current CPC
Class: |
B08B 3/12 20130101; H01L
21/67057 20130101 |
Class at
Publication: |
134/184 ;
134/186; 134/902 |
International
Class: |
B08B 003/12 |
Claims
1. An apparatus for processing a microelectronic workpiece having a
front side, a back side and an edge, comprising: a chamber; a
fixture in the chamber for holding a workpiece; and at least one
sonic transducer at one side of the chamber and positioned relative
to the fixture so that the transducer is adjacent to the edge of a
workpiece placed in the fixture.
2. The apparatus of claim 1, wherein the back side of the
microelectronic workpiece is spaced apart from a bottom wall of the
chamber by less than about 0.2 inches.
3. The apparatus of claim 1, further including at least one sonic
transducer at a bottom wall of the chamber, for providing sonic
energy to the back side of the microelectronic workpiece placed in
the fixture.
4. The apparatus of claim 1, wherein the fixture is rotatable
within the chamber.
5. The apparatus of claim 4, further comprising a motor coupled to
the fixture.
6. The apparatus of claim 1, wherein the chamber is made of a sonic
energy absorbing material.
7. An apparatus for processing a microelectronic workpiece having a
front side, a back side and an edge, comprising: a chamber; a rotor
in the chamber for holding and rotating a workpiece in the chamber;
at least one liquid inlet for providing a liquid into the chamber;
at least one liquid outlet for removing liquid from the chamber;
and at least one sonic transducer in or on the chamber.
8. The apparatus of claim 7 wherein the sonic transducer is at one
side of the chamber and positioned relative to the fixture so that
the transducer is adjacent to the edge of a workpiece placed in the
fixture.
9. The processor of claim 8, wherein the chamber is disk-shaped,
and the back side of a microelectronic workpiece placed into the
rotor is spaced apart from a bottom wall of the chamber by less
than about 0.2 inches.
10. The processor of claim 7 further comprising at least one second
sonic transducer at one side of the chamber and positioned relative
to the rotor so that the transducer is adjacent to the edge of a
workpiece placed in the rotor.
11. An apparatus for processing a workpiece comprising: a first
rotor engageable with a second rotor to form a workpiece processing
chamber; one or more inlets in the processing chamber; one or more
outlets in the processing chamber, to allow removal of fluid from
the chamber by centrifugal force generated by rotating the
processing chamber; and at least one sonic transducer associated
with the first rotor.
12. The apparatus of claim 11 further comprising means for at least
partially filling the chamber with a liquid.
13. The apparatus of claim 11 wherein the means for at least
partially filling the chamber with a liquid comprises one or more
valves for substantially closing off the outlets.
14. The apparatus of claim 11 wherein the first rotor is a top
rotor, and the outlets are adjacent to an outer perimeter of the
top rotor.
15. The apparatus of claim 14 further comprising a seal between the
top rotor and the bottom rotor.
16. The apparatus of claim 11 wherein the inlets are generally
centrally located substantially on a rotation axis of the
processing chamber.
17. An apparatus for processing a workpiece comprising: a first
rotor; a second rotor engageable with the first rotor to form a
workpiece processing chamber; with the processing chamber having
one or more fluid inlets and one or more fluid outlets; and a valve
at one or more of the fluid outlets, for opening and closing the
outlets.
18. The apparatus of claim 17 wherein the outlets are adjacent to
an outer perimeter of the first rotor, for removal of liquid from
the chamber via centrifugal force when the chamber rotates.
19. The apparatus of claim 17 further including one or more sonic
transducers associated with the processing chamber.
20. The apparatus of claim 19 wherein the sonic transducer is
supported on and is rotatable with, the first rotor.
Description
[0001] This Application is a Divisional of U.S. patent application
Ser. No. 10/055,302, filed Jan. 23, 2002, now pending, and
incorporated herein by reference.
TECHNICAL FIELD
[0002] The field of the invention is cleaning of microelectronic
workpieces. More specifically, the field of the invention relates
to methods and devices that selectively clean various surfaces of a
microelectronic workpiece. A microelectronic workpiece is defined
here to include a workpiece formed from a substrate on which
microelectronic circuits or components, data storage elements or
layers, or micro-mechanical or optical elements are formed.
BACKGROUND
[0003] During the processing of microelectronic workpieces into,
for example, electronic devices such as integrated circuits, it is
necessary to clean the surface of the workpiece by removing
contaminants. Contaminants not removed during cleaning process tend
to reduce the overall yield of the manufacturing process. This
reduces the number of usable electronic components, such as
integrated circuits, microprocessors, memory devices, etc. that can
be obtained from a workpiece.
[0004] During the processing of microelectronic workpieces,
chemical-mechanical polishing ("CMP") is sometimes employed to
planarize or polish the surface layers of the microelectronic
workpiece. Typically, during the CMP process, the microelectronic
workpiece is typically pressed against a slurry on a polishing pad
under controlled conditions. The slurry used in the CMP process
generally includes small, abrasive particles that mechanically
remove the surface layer of the microelectronic workpiece. The
slurry also contains chemicals that chemically remove the surface
layer. After the microelectronic workpiece is polished, it is
necessary to remove the residual particles on the surface of the
microelectronic workpiece that were introduced during the CMP
process. Contaminants may be introduced by the slurry, the
polishing pad, or from features formed on the microelectronic
workpiece. These contaminants are removed in a post-CMP cleaning
process.
[0005] Current post-CMP cleaning processes have typically employed
a brush scrub, spray cleaning, or immersion process to remove the
contaminants introduced during the CMP process. Each of these
post-CMP cleaning processes, however, have particular problems when
the microelectronic workpiece includes copper (Cu) features. In
recent years, microelectronic workpieces having copper-based
features have been increasingly used because of copper's ability to
efficiently and quickly transmit electrical current. The copper
ion, however, is a highly mobile contaminant that poses particular
problems for post-CMP cleaning processes.
[0006] Brush scrubbing is not favored for post-CMP cleaning of
microelectronic workpieces containing copper because the scrubbing
can damage the surface of the microelectronic workpiece. Since
copper is relatively soft compared to other interconnect materials,
aggressive brush scrubbing of the microelectronic workpiece can
cause scratching or smearing of the copper features. Brush
scrubbing may also further imbed particles into the surfaces of the
copper features. Moreover, brush scrubbing is not able to
adequately remove contaminants that are located on the edge region
of the microelectronic workpiece.
[0007] Immersion techniques may avoid these drawbacks. However, as
they generally use recirculated chemicals, they may cause unwanted
copper redeposition. Spray cleaning may avoid the disadvantages of
both brush and immersion cleaning. However, spray cleaning may not
be as effective in cleaning the microelectronic workpiece. As
copper ions are highly mobile, they can also easily contaminate
fabrication equipment. For example, copper contamination on the
back side of the microelectronic workpiece can be transported to
wafer handlers, indexers and chucks. Copper contamination can also
be transported to cassettes, boxes, and indexer devices.
[0008] Accordingly, there remains a need for improved post-CMP
cleaning methods and devices for cleaning copper from the front,
back, and edge of a microelectronic workpiece, while maintaining
the integrity of the copper features on the microelectronic
workpiece. A method and apparatus is needed for reducing particle
contamination from the sides and edge of the microelectronic
workpiece without damage to the copper features that are typically
located on the front side of the microelectronic workpiece. There
is also a need at the same time to keep copper oxide at low
levels.
SUMMARY OF THE INVENTION
[0009] In a first aspect of the invention, a processor for
processing a microelectronic workpiece includes a chamber, a
fixture within the chamber adapted to hold a microelectronic
workpiece, and at least one transducer within the chamber and
located adjacent to the edge of the microelectronic workpiece.
[0010] In a second, separate aspect of the invention, independent
of any apparatus aspects or elements, a method for processing a
microelectronic workpiece includes the steps of immersing the front
side, back side, and edge of the workpiece with a first processing
fluid. The workpiece is then rinsed and dried. Next, the workpiece
is advantageously partially immersed in a second processing fluid
such that the back side and edge of the microelectronic workpiece
are exposed to the processing fluid while the front side is not
exposed to the processing fluid. Vibrational energy is introduced
to the microelectronic workpiece during at least one of the
immersion steps.
[0011] In a third aspect, the method of the second aspect includes
the steps of placing the workpiece within a chamber and rotating
the workpiece during the immersion steps.
[0012] It is an object of the invention to provide improved methods
and apparatus for the process of microelectronic workpieces.
[0013] The invention resides as well in subcombinations of the
features and steps described. The invention broadly contemplates
devices and methods for performing differential cleaning on the
various surfaces of a microelectronic workpiece.
BRIEF DESCRIPTION OF THE DRAWINGS
[0014] FIG. 1 is a side cut-away view of the microelectronic
workpiece processor.
[0015] FIG. 2 is a schematic representation of the microelectronic
workpiece undergoing post-CMP cleaning.
[0016] FIG. 3 is a cut-away perspective view of a second
embodiment.
[0017] FIG. 4 is an enlarged detail view of components shown in
FIG. 3.
[0018] FIG. 5 is a perspective view of the lower rotor shown in
FIGS. 3 and 4.
[0019] FIG. 6 is a perspective view of the upper rotor showing
FIGS. 3 and 4.
[0020] FIG. 7 is an enlarged partial section view of an alternative
design for immersion processing.
DETAILED DESCRIPTION
[0021] FIG. 1 illustrates the processor 2 containing a single
microelectronic workpiece 4. The microelectronic workpiece includes
a front side 6, a back side 8, and an edge 10. The microelectronic
workpiece 4 is held within a fixture 12 located within the inside
portion of the processor 2. The processor 2 preferably includes an
immersion chamber 14 and lid 16. The term "immersion chamber" here
means walls forming a confined space for at least partially
containing a processing fluid 30. The lid 16 is preferably
removable from the immersion chamber 14 such that the
microelectronic workpiece 4 can be loaded and unloaded from the
processor 2. The lid 16 can also open by other means (e.g.,
pivoting, sliding, etc.). For some applications, the lid 16 is not
necessary and may be omitted.
[0022] The immersion chamber 14 preferably has a shallow depth such
that a narrow gap 18 is formed between the lowermost inner surface
20 of the immersion chamber 14 and the back side 8 of the
microelectronic workpiece 4. Preferably, the gap 18 has a height or
dimension G ranging from 0.01 to 0.50 inches, or 0.02 to 0.2 or
0.25 inches, and more preferably from 0.03 to 0.10 inches. The
immersion chamber 14 is also preferably made of PTFE
(polytetrafluoroethylene) to dampen acoustic energy used in
processing.
[0023] At least one transducer 22 is located within the immersion
chamber 14. The transducer 22 emits vibrational or sonic energy
toward the microelectronic workpiece 4. The vibrational energy is
preferably in the form of megasonics. Preferably, the transducer 22
is located within the immersion chamber 14 and adjacent to the edge
of the microelectronic workpiece 4. The immersion chamber 14 may
optionally also include additional transducers 24 located adjacent
to the edge of the microelectronic workpiece 4 or underneath the
back side 8 of the microelectronic workpiece 4.
[0024] FIG. 1 shows the microelectronic workpiece 4 immersed in a
processing fluid 30. In FIG. 1, the front side 6, back side 8, and
edges 10 of the microelectronic workpiece 4 are all in contact with
the processing fluid 30. This corresponds to the "rough" cleaning
step described in more detail below, wherein bulk contamination is
removed.
[0025] The processor 2 includes an inlet 34 and an outlet 36 that
are used to fill and empty, respectively, the immersion chamber 14
with processing fluid 30. A motor 32 is preferably positioned on
the lid 16 of the immersion chamber 14. The motor 32 is connected
to the fixture 12 for rotating the fixture 12 and the workpiece 4
held in the fixture.
[0026] With reference to FIGS. 1 and 2, a description of the
operation of the processor will now be given. Initially, the
workpiece 4 is loaded within the processor 2. Preferably, the
fixture 12 holds a single microelectronic workpiece 4. However, a
multiple position fixture may be used to hold multiple workpieces
4. The workpiece 4 is suspended within the immersion chamber 14.
The back side 8 of the workpiece 4 and the lowermost inner surface
20 of the immersion chamber 14 are spaced apart by the gap 18.
[0027] When the workpiece 4 is secured within the processor 2, a
processing fluid 30 is introduced to the immersion chamber 14. This
first processing fluid 30 bathes the front side 6, the back side 8,
and the edge 10 of the microelectronic workpiece 4. Preferably,
this first processing fluid 30 includes a dilute solution
containing H.sub.2SO.sub.4, HF, or tetramethylammonium hydroxide
(TMAH). Of course, other non-aggressive cleaning agents can also be
employed that do not aggressively react with the metallic features
of the microelectronic workpiece 4. This first cleaning is a
"rough" cleaning step that is directed to cleaning the front side 6
of the workpiece 4. In this step, exposure of the processing fluid
30 to the back side 8 of the microelectronic workpiece 4 is not
detrimental. Consequently, whether the back side 8 is exposed to
the processing fluid is not significant. During this "rough"
cleaning step, the workpiece 4 is preferably rotated within the
processor 2 via the motor 32. Spinning the microelectronic
workpiece 4 provides better process uniformity. The transducers 22
and/or 24 are preferably used to introduce vibrational energy to
the microelectronic workpiece 4 through the processing fluid 30 to
assist in cleaning the workpiece. Spinning helps to control the
thickness of the liquid boundary layer formed on the workpiece.
Spinning the workpiece also helps to distribute sonic energy across
the surface of the workpiece, especially when the transducers are
located around the outside edge perimeter or circumference of the
workpiece. When the transducers are on the top or bottom of the
chamber (away or inward from the circumference), spinning is less
significant and can be omitted. The circumferential transducers 2A
and the top/bottom transducers 22 may be selectively switched on
and off, or provide varying intensity sonic energy, typically to
provide different processing characteristics to top and bottom
sides of the workpiece.
[0028] Next, the front side 6, back side 8, and edge 10 of the
microelectronic workpiece 4 are rinsed and dried with a rinsing
fluid (i.e., liquid and/or gas or vapor). The rinsing fluid is
introduced via the inlet 34 and removed via the outlet 36. The
workpiece 4 may optionally be spun during the rinsing and drying
steps.
[0029] A second processing fluid 31 is then introduced into the
immersion chamber 14. This second processing fluid 31 is introduced
to the immersion chamber 14 such that only the back side 8 and edge
10 of the microelectronic workpiece 4 are in contact with the
processing fluid 31. The edge 10 is defined here to include the
bevel portion, if any, of the workpiece 4. This second processing
fluid 31 is more aggressive than the processing fluid 30 used in
the "rough" cleaning step to remove copper ions/particles 40.
Preferably, the second processing fluid 31 can include a mixture of
HF and H.sub.2O.sub.2. Of course, other processing fluids that are
aggressive to metals, such as copper, can also be used. This step
is referred to as a "fine" cleaning step because the cleaning is
directed only to the back side 8 and edge 10 of the microelectronic
workpiece 4. During this "fine" cleaning step, the microelectronic
workpiece 4 is also preferably rotated within the processor 2. The
transducers 22 or 24 preferably provide vibrational energy to
microelectronic workpiece 4 through the processing fluid 30 to aid
in cleaning the workpiece.
[0030] Following the "fine" cleaning step, the front side 6, back
side 8, and edges of the workpiece 4 are rinsed and dried with a
rinsing fluid. The rinsing fluid is introduced via the inlet 34 and
removed via the outlet 36. The microelectronic workpiece 4 may be
optionally rotated during the rinsing and drying steps. After the
rinse step, the workpiece 4 may undergo optional passivation with
ozone.
[0031] FIG. 2 schematically illustrates the effects of the cleaning
process. Prior to the post-CMP cleaning process, copper
ion/particles 40 are disposed on the front side 6, back side 8, and
edge 10 of the microelectronic workpiece 4. In addition, copper
ion/particles 40 are located on top of and in between the copper
features 42 on the front side 6 of the workpiece 4. The rough
cleaning step removes copper/ion particles 40 on the front side 6
(as well as, to a certain extent, the back side 8, and edge 10) of
the workpiece 4. The "fine" cleaning step is directed at the back
side 8 and edge 10 of the microelectronic workpiece 4. After the
post-CMP cleaning process, the workpiece 4 is cleaned of copper/ion
particles 40 while the copper features 42 on the workpiece 4 remain
intact.
[0032] In a typical method, the wafer or workpiece undergoes
megasonic cleaning while immersed in an ammonium hydroxide solution
for about 1-8,3-7 or 4-6 and preferably about 5 minutes. The
solution is recirculated and filtered. The wafer is then immersed
in water with megasonic cleaning for a similar time interval, and
with 1-4 or 2-3 dump cycles. Next the wafer is brush scrubbed with
about a 50-250, 75-150, or 100 rpm brush, and a 30-120, 45-90 or 60
rpm wafer, for about 10-60, 20-45 or 30 seconds, while also
applying ammonium hydroxide solution. The wafer is then rinsed and
spin dried at 500-2500, 1000-2200 or 1500-2000 rpm, while applying
water and then nitrogen or air, for about 60-300, 90-180, or 120
seconds.
[0033] If the workpiece 4 is rotated within the processor 2, it is
preferable to position the transducers 22 and/or 24 along the sides
of the immersion chamber 14, near the gap 18. If the workpiece 4 is
fixed in place, it is preferable to also locate transducers 24 on
the bottom of the immersion chamber 14 opposite the back side 8 of
the workpiece 4.
[0034] The transducers 22 and/or 24 may be turned on
simultaneously, or they may be switched on and off at different
times during processing. The system and methods provide for
post-CMP cleaning in an integrated system. This allows for
consistent and repeatable cleaning. In addition, as multiple
processes are performed within a single chamber, fewer workpiece
transfers are needed between other systems. The space required for
processing machines, i.e., the overall footprint, is reduced.
Processing waiting times are also reduced. An advantage of the
methods described is that cleaning the front side with a highly
effective technique does not affect the back side. The methods can
be performed in single or multiple chambers.
[0035] A preferred apparatus 50 is shown in FIGS. 3-6. The design
and operation of the apparatus 50 is described in International
Patent Application WO 99/46065, incorporated herein by reference,
with the following changes. Transducers 22 are installed in
openings or cutouts in the interior chamber member or rotor face 60
of the lower rotor 54. Wiring connecting to the transducers passes
through slip rings or an equivalent device and extend out through
the base 58 of the apparatus 50 to a power source. As the
transducers 22 are on the lower rotor 54, they rotate with the
wafer 4. Consequently, as there is no relative movement between the
wafer 4 and the transducers 22, an array of transducers, such as 3,
4, 5, 6, 7, or 8 transducers 22 may be used, to provide sonic
energy to all areas of the workpiece lower surface. A similar array
of transducers 22 may optionally be provided in the upper rotor 52,
as shown in FIG. 6. Edge transducers 24 may also be provided at the
perimeter or edge of the wafer 4, on the skirt or flange 62 of the
upper rotor 52. Again, as the edge transducers 24 spin with the
workpiece, an array of edge transducers may similarly be used.
[0036] FIGS. 4 and 7 show a further modification of the apparatus
in WO 99/46065 to provide for immersion processing. As shown in
FIG. 7, outlet valves 74 are located in the outlets 72. As shown in
FIG. 4, a stopper 80 is positioned around the lower nozzle 66 on a
stopper actuator 82, at the lower inlet 68. The o-ring 76 between
the upper and lower rotors 52 and 54 prevents any flow downwardly
out of the annular chamber 70, when the rotors are engaged together
for processing.
[0037] To provide immersion processing, the outlet valves 74 are
closed. The stopper actuator 82 moves the stopper 80 up into the
lower inlet 68, closing off the inlet 68. The workpiece chamber
enclosing the workpiece, i.e., the interconnected upper chamber 72,
lower chamber 74 and the annular chamber 70, are closed or sealed.
The only opening into the workpiece chamber is the upper inlet 86.
Fluid is supplied into the upper inlet 86 until the desired fluid
level for immersion is reached in the workpiece chamber. The fluid
level is maintained for a sufficient time to achieve immersion
processing. The outlet valves 74 are then opened. The fluid moves
out of the workpiece chamber via the centrifugal force created by
the spinning chamber. The stopper actuator 82 then moves the
stopper 80 back down, to allow fluids (gas or liquid) to be
introduced into the workpiece chamber. One or more outlets 72 and
valves 74 may be used.
[0038] In an alternative embodiment, the stopper and stopper
actuator can be omitted. In this embodiment, centrifugal force
keeps the fluid away from the lower inlet 68, so that no stopper is
needed. Alternatively, the lower inlet 68 can be continuous with or
permanently attached (i.e., in a fixed position) to the lower rotor
54. The upper inlet 86 need not be modified for immersion
processing, as gravity prevents fluid from moving out of the
workpiece chamber.
[0039] The outlet valves 74 and stopper actuator 82 (if used) may
be pneumatically, mechanically, or electrically actuated. The
outlet valves 74 may each have individual actuators, or they may be
ganged or mechanically linked to a single master actuator. Outlets
72 and valves 74 may similarly be provided only in the lower rotor
54, in place of outlets in the upper rotor 52, or in addition to
them.
[0040] While embodiments of the present invention have been shown
and described, various modifications may be made without departing
from the scope of the invention. The invention, therefore, should
not be limited, except to the following claims, and their
equivalents.
* * * * *