loadpatents
Patent applications and USPTO patent grants for Scranton; Dana.The latest application filed is for "processing system with in-situ chemical solution generation".
Patent | Date |
---|---|
Processing System With In-situ Chemical Solution Generation App 20080202564 - Scranton; Dana | 2008-08-28 |
Post Etch Residue Removal From Substrates App 20080083427 - Block; Joy ;   et al. | 2008-04-10 |
Workpiece Processing With Preheat App 20080060676 - Scranton; Dana | 2008-03-13 |
Single Side Workpiece Processing App 20070110895 - Rye; Jason ;   et al. | 2007-05-17 |
Multi-process system Grant 7,005,010 - Bergman , et al. February 28, 2 | 2006-02-28 |
Side-specific cleaning apparatus App 20050199277 - Scranton, Dana | 2005-09-15 |
Side-specific cleaning method and apparatus Grant 6,875,284 - Scranton April 5, 2 | 2005-04-05 |
Single wafer cleaning with ozone App 20040103919 - Kenny, Michael ;   et al. | 2004-06-03 |
Multi-process system App 20040040573 - Bergman, Eric ;   et al. | 2004-03-04 |
Multi-process system with pivoting process chamber Grant 6,691,720 - Bergman , et al. February 17, 2 | 2004-02-17 |
Substrate drying method for use with a surface tension effect dryer with porous vessel walls Grant 6,681,499 - Scranton , et al. January 27, 2 | 2004-01-27 |
Systems and methods for processing workpieces Grant 6,668,844 - Lund , et al. December 30, 2 | 2003-12-30 |
Side-specific cleaning method and apparatus App 20030136422 - Scranton, Dana | 2003-07-24 |
Vapor cleaning and liquid rinsing process vessel App 20030136429 - Scranton, Dana ;   et al. | 2003-07-24 |
Method and apparatus for cleaning of microelectronic workpieces after chemical-mechanical planarization App 20030136431 - Scranton, Dana ;   et al. | 2003-07-24 |
Surface tension effect dryer with porous vessel walls App 20030101616 - Scranton, Dana ;   et al. | 2003-06-05 |
Systems and methods for processing workpieces App 20030010362 - Scranton, Dana ;   et al. | 2003-01-16 |
Multi-process system App 20030010352 - Bergman, Eric ;   et al. | 2003-01-16 |
Process and apparatus for treating a workpiece such as a semiconductor wafer App 20020157686 - Kenny, Michael ;   et al. | 2002-10-31 |
Vertical process reactor App 20020139400 - Scranton, Dana | 2002-10-03 |
Systems and methods for processing workpieces Grant 6,427,359 - Scranton , et al. August 6, 2 | 2002-08-06 |
Single semiconductor wafer processor Grant 6,395,101 - Scranton , et al. May 28, 2 | 2002-05-28 |
Single semiconductor wafer processor App 20010020482 - Scranton, Dana ;   et al. | 2001-09-13 |
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