U.S. patent application number 10/751796 was filed with the patent office on 2005-07-07 for efficient method of dynamic formulation of chamber selections for multiple chamber tools.
This patent application is currently assigned to Taiwan Semiconductor Manufacturing Co.. Invention is credited to Chang, Sean.
Application Number | 20050149221 10/751796 |
Document ID | / |
Family ID | 34654297 |
Filed Date | 2005-07-07 |
United States Patent
Application |
20050149221 |
Kind Code |
A1 |
Chang, Sean |
July 7, 2005 |
EFFICIENT METHOD OF DYNAMIC FORMULATION OF CHAMBER SELECTIONS FOR
MULTIPLE CHAMBER TOOLS
Abstract
A new method to manufacture a product is achieved. The method
comprises providing a control system and a process tool. The
process tool comprises multiple chambers. The process tool stores a
plurality of recipes. The control system comprises a database. A
set of chambers and a recipe name are selected based on the
database. A recipe body is uploaded from the process tool to the
control system based on the recipe name. The recipe body is
modified to generate a runtime recipe body that specifies the set
of chambers. The runtime recipe body is downloaded from the control
system to the process tool. A product is processed in the process
tool using the runtime recipe body.
Inventors: |
Chang, Sean; (Taichung City,
TW) |
Correspondence
Address: |
STEPHEN B. ACKERMAN
28 DAVIS AVENUE
POUGHKEEPSIE
NY
12603
US
|
Assignee: |
Taiwan Semiconductor Manufacturing
Co.
|
Family ID: |
34654297 |
Appl. No.: |
10/751796 |
Filed: |
January 5, 2004 |
Current U.S.
Class: |
700/121 |
Current CPC
Class: |
G05B 2219/32097
20130101; Y02P 90/02 20151101; Y02P 90/20 20151101; G05B 2219/45031
20130101; G05B 19/41865 20130101 |
Class at
Publication: |
700/121 |
International
Class: |
G06F 019/00 |
Claims
What is claimed is:
1. A method to manufacture a product, said method comprising:
providing a control system and a process tool wherein said process
tool comprises multiple chambers, wherein said process tool stores
a plurality of recipes, and wherein said control system comprises a
database; selecting a set of said chambers and a recipe name based
on said database; uploading a recipe body from said process tool to
said control system based on said recipe name; modifying said
recipe body to generate a runtime recipe body that specifies said
set of chambers; downloading said runtime recipe body from said
control system to said process tool; and processing a product in
said process tool using said runtime recipe body.
2. The method according to claim 1 further comprising: modifying
said runtime recipe body to specify a runtime recipe name prior to
said step of downloading said runtime recipe body to said process
tool; and downloading said runtime recipe name from said control
system to said process tool prior to said step of processing a
product in said process tool.
3. The method according to claim 2 further comprising deleting said
runtime recipe name from said process tool prior to said step of
downloading said runtime recipe body from said control system to
said process tool.
4. The method according to claim 2 further comprising deleting said
runtime recipe name from said process tool after said step of
processing a product in said process tool.
5. The method according to claim 1 wherein said recipe body and
said runtime recipe body are transferred between said control
system and said process tool by a SECS compatible interface.
6. The method according to claim 1 wherein said product comprises
an integrated circuit device.
7. The method according to claim 1 wherein said step of selecting a
set of said chambers and a recipe name is further based on a lot
number.
8. The method according to claim 7 wherein said step of processing
a product in said process tool using said runtime recipe body
comprises multiple said lot numbers.
9. The method according to claim 1 wherein said step of modifying
said recipe body comprises altering values of individual data
bytes.
10. A method to manufacture a product, said method comprising:
providing a control system and a plurality of process tools wherein
said process tools comprise multiple chambers, wherein said process
tools store a plurality of recipes, and wherein said control system
comprises a database; selecting a target process tool, a set of
said chambers and a recipe name based on said database; uploading a
recipe body from said target process tool to said control system
based on said recipe name; modifying said recipe body to generate a
runtime recipe body that specifies said set of chambers and that
specifies a runtime recipe name; deleting said runtime recipe name
from said target process tool; downloading said runtime recipe name
from said control system to said target process tool; processing a
product in said target process tool using said runtime recipe body;
and deleting said runtime recipe name from said target process
tool.
11. The method according to claim 10 further comprising downloading
said runtime recipe body from said control system to said target
process tool prior to said step of downloading said runtime recipe
name from said control system to said target process tool.
12. The method according to claim 10 wherein said recipe body and
said runtime recipe body are transferred between said control
system and said target process tool by a SECS compatible
interface.
13. The method according to claim 10 wherein said product comprises
an integrated circuit device.
14. The method according to claim 10 wherein said step of selecting
a target process tool, a set of said chambers and a recipe name
based on said database is further based on a lot number.
15. The method according to claim 14 wherein said step of
processing a product in said target process tool using said runtime
recipe body comprises multiple said lot numbers.
16. The method according to claim 10 wherein said step of modifying
said recipe body comprises altering values of individual data
bytes.
17. An apparatus to manufacture a product, said apparatus
comprising: a process tool wherein said process tool comprises
multiple chambers and wherein said process tool stores a plurality
of recipes; and a control system wherein said control system
comprises a database and wherein said control system governs tasks
comprising: selecting a set of chambers and a recipe name based on
a database stored in said control system; uploading a recipe body
from said process tool to said control system based on said recipe
name; modifying said recipe body to generate a runtime recipe body
that specifies said set of chambers; downloading said runtime
recipe body from said control system to said process tool; and
processing a product in said process tool using said runtime recipe
body.
18. The apparatus according to claim 17 wherein said tasks further
comprise: modifying said runtime recipe body to specify a runtime
recipe name; and downloading said runtime recipe name from said
control system to said process tool.
19. The apparatus according to claim 18 wherein said tasks further
comprise deleting said runtime recipe name from said process
tool.
20. The apparatus according to claim 17 wherein said tasks further
comprise verifying said recipe body against said database.
21. The apparatus according to claim 17 further comprising a SECS
compatible interface between said control system and said process
tool by.
22. The apparatus according to claim 17 wherein said product
comprises an integrated circuit device.
23. The apparatus according to claim 17 wherein said task of
selecting a set of said chambers and a recipe name based on said
database is further based on a lot number.
24. The apparatus according to claim 23 wherein said task of
processing a product in said process tool using said runtime recipe
body comprises multiple said lot numbers.
25. The apparatus according to claim 17 wherein said task of
modifying said recipe body comprises altering values of individual
data bytes.
Description
BACKGROUND OF THE INVENTION
[0001] (1) Field of the Invention
[0002] The invention relates to a method to manufacture a product,
and, more particularly, to a method to formulate chamber selections
for multiple chamber tools in the manufacture of an integrated
circuit device.
[0003] (2) Description of the Prior Art
[0004] Integrated circuit manufacturing presents many unique
challenges. The typical process cycle takes many days, or weeks,
and requires a large number of complex steps. Much of the
processing is performed in batches, or lots, or wafers. These lots
must be tracked throughout the process cycle to ensure that the
proper processing sequence has been performed.
[0005] Referring now to FIG. 1, the architecture for an exemplary
manufacturing line is shown. The manufacturing process can be
divided into two general classes, the manufacturing control system
10 and the manufacturing equipment 20. The manufacturing equipment
20 comprises a collection of processing tools 40, 44, and 48, that
are used during the processing sequence for manufacturing the
integrated circuit wafers. At particular steps in the process
flows, one lot or several lots of wafers are loaded into process
tools. A process step, such as etching, thermal processing,
deposition, or ion implantation, is then performed on the wafers in
the tool.
[0006] Each process tool 40, 44, and 48, comprises a control unit
and a process chamber. TOOL003 48 comprises a single process
chamber. TOOL001 40 and TOOL002 44 are multiple chamber tools. For
example, TOOL001 40 comprises two processing chambers, labeled A
and B. TOOL002 44 comprises four processing chambers, labeled A, B,
C, and D. The multiple chamber tools 40 and 44 may be configured so
that the chambers run independently. That is, one chamber may run a
first processing variation, or recipe, while another chamber runs a
second recipe. The presence of independent, multiple chambers makes
the multiple chamber tools 40 and 44 very useful for the
manufacturer. Typically, such tools require less floor space and
utilities than an equivalent number of chambers in single chamber
tools 48.
[0007] The manufacturing process is managed by the manufacturing
control system 10. With the advent of high speed computers and
highly developed software, much of the decision making on the
manufacturing floor is now under the control of the computer
system. The exemplary system 10 comprises a manufacturing execution
system (MES) running on a server 24. For example, PROMIS.TM.
software is frequently used for the MES role. The PROMIS.TM. server
24 comprises a database 33 that tracks every product lot in the
manufacturing facility. The processing history and current status
of each lot is stored along with the routing flow for the product.
The PROMIS.TM. server 24 also performs a role in selecting recipes
to be run on the processing tools 40, 44, and 48.
[0008] A CONSTRAINT MANAGER (CSN.TM.) server 28 is used to track
equipment resources in the manufacturing facility. The CSN.TM.
server 28 selects the most appropriate processing tool for the next
step in the processing flow for a particular lot to maximize line
throughput and to minimize cycle time. Further, the CSN.TM. server
28 can perform chamber selection within a tool. The RUN MANAGER
(RM.TM.) server 32 is used to manage the actual process runs in the
plant. The RM.TM. server 32 performs error prevention-routines and
maintains a process run database 33.
[0009] The EQUIPMENT SERVER (EQS.TM.) 36 performs direct management
of the processing tools 40, 44, and 48. The EQS.TM. 36 provides a
tool communication link using a semiconductor equipment
communication standard (SECS) protocol. Processing tools can be
directly monitored and controlled using the communication links
between the tools and the EQS.TM. 36.
[0010] Referring now to FIG. 2, the exemplary manufacturing system
is shown specifically for the case of product running on TOOL002
44. In this case, a product lot is moved into an operation step in
the PROMIS.TM. server 24. By referencing the product routing, the
PROMIS.TM. server 24 determines that the next operation requires a
manufacturing process having a recipe name "22LM11". The PROMIS.TM.
server 24 information is shared with the CSN.TM. server 28 via the
RM.TM. server 32. The CSN.TM. server 28 references the current
status of the manufacturing equipment while searching for a tool
capable of running the required recipe. The CSN.TM. server 28 makes
an equipment selection. In addition, the CSN.TM. server 28 selects
a chamber, or a set of chambers, on the tool for running this
process step. In this example, the selected tool is TOOL002 44.
Further, the CSN.TM. server 28 selects a set of chambers, chambers
B and C, to run the process. This selection is passed to the RM.TM.
server 32.
[0011] The RM.TM. server 32 receives the tool selection, recipe
name, and chamber selection information from the PROMIS.TM. server
24 and the CSN.TM. server 28. The RM.TM. server 32 now generates a
recipe name based on these selections. The generated recipe name is
a concatenation of the generic recipe "22LM11" and the specific run
chambers, "BC" to form a specific recipe name "22MM11BC."The recipe
name is used to select a recipe in the tool 44 using the SECS
interface of the EQS.TM. 36. This recipe may be-verified in the
RM.TM. server 32 by uploading the recipe contents from the process
tool 44 to the RM.TM. server 32 and then checking the recipe
contents against the RM.TM. server 32 run database. The EQS.TM. 36
then commands the tool 44 to start the process when the product
wafers have been loaded.
[0012] The reason a modified recipe name must be used is
illustrated by the process tool 44. The tool 44 contains a recipe
manager 52. The recipe manager 52 allows a process engineer to
create and to edit recipes for the tool 44. Each recipe contains
the steps, the parametric settings, and the run times for a
particular process variation. Typically, the recipe manager 52 is
accessed through an operator interface that is built into, or
attached to, the tool 44. The recipe manager 52 stores all of the
recipes for the tool 44. To process wafers in a particular chamber
of the tool 44, the recipe must contain the chamber name in
specific reference locations in the recipe sequence. Alternatively,
if multiple chambers are to be used to process wafers
simultaneously, then each chamber must be specified in the recipe
sequence.
[0013] In this control scenario, therefore, the "22MM11" recipe
must be stored in the recipe manager 52 of the tool 44 as a large
set of recipes as shown. For example, a recipe named "22MM11A" is
used when product is run using the "22MM11" sequence in chamber A,
but this recipe is not used for chambers B, C, or D. Alternatively,
recipe "22MM11ACD" is used to run recipe sequence "22MM11" in
chambers A, C, and D, but not B. Each of the "22MM11-xxxx"
variations differs from the other only in regards to the chamber
references in the recipe sequence.
[0014] The above-described architecture and method results in
several disadvantages. First, the large number of combinations of
chambers in a multiple chamber machine 44 results in a
proliferation of recipes in the recipe manager 52 of that machine
44. In the example case, 15 recipes are required to cover the
chamber variations for a single recipe "22MM11". Each major recipe
on the tool 44 may generate this magnitude of proliferation. This
proliferation of recipes results in poor usage of the available
recipe manager storage media. Further, any processing change in the
recipe must be made in every one of the fifteen recipes on an
individual basis. Therefore, a simple change in the recipe requires
a large amount of work by the process engineer. It is very easy for
the process engineer to incorrectly change or to neglect to change
a single recipe variation. This can result in a significant
incorrect processing event if the mistake is not caught. An
improved method for handling recipe selection on multiple chamber,
process tools is needed.
[0015] Several prior art inventions relate to manufacturing
management systems. U.S. Pat. No. 6,334,215 B1 to Barker et al
shows an application migration method involving a manufacturing
execution system (MES). U.S. Pat. No. 6,256,550 B1 to Wu et al
discloses a manufacturing control and reporting system capable of
tracking overall equipment effectiveness. U.S. Pat. No. 5,867,389
to Hamada et al teaches an apparatus to manage recipes in a wafer
production line. The apparatus provides the ability to
upload/download recipes, to edit recipes, and to copy recipes.
SUMMARY OF THE INVENTION
[0016] A principal object of the present invention is to provide an
effective and very manufacturable method to manufacture a
product.
[0017] A further object of the present invention is to provide a
method to dynamically formulate processing recipes for multiple
chamber process tools.
[0018] A yet further object of the present invention is to
eliminate recipe proliferation by dynamically modifying recipes to
include chamber selection information.
[0019] A yet further object of the present invention is to
eliminate errors caused by recipe proliferation.
[0020] A yet further object of the present invention is to reduce
process engineering workload due to recipe proliferation.
[0021] Another further object of the present invention is to
provide an apparatus to manufacture a product where recipe
proliferation is eliminated by dynamically modifying recipe
sequences to include chamber selection.
[0022] In accordance with the objects of this invention, a method
to manufacture a product is achieved. The method comprises
providing a control system and a process tool. The process tool
comprises multiple chambers. The process tool stores a plurality of
recipes. The control system comprises a database. A set of chambers
and a recipe name are selected based on the database. A recipe body
is uploaded from the process tool to the control system based on
the recipe name. The recipe body is modified to generate a runtime
recipe body that specifies the set of chambers. The runtime recipe
body is downloaded from the control system to the process tool. A
product is processed in the process tool using the runtime recipe
body.
[0023] Also in accordance with the objects of this invention, an
apparatus to manufacture a product is achieved. The apparatus
comprises a process tool and a control system. The process tool
comprises multiple chambers. The process tool stores a plurality of
recipes. The control system comprises a database. The control
system governs several tasks, comprising, first, selecting a set of
chambers and a recipe name based on a database stored in the
control system. A recipe body may be uploaded from the process tool
to the control system based on the recipe name. The recipe body may
be modified to generate a runtime recipe body that specifies the
set of chambers. The runtime recipe body may be downloaded from the
control system to the process tool. A product may be processed in
the process tool using the runtime recipe body.
BRIEF DESCRIPTION OF THE DRAWINGS
[0024] In the accompanying drawings forming a material part of this
description, there is shown:
[0025] FIG. 1 illustrates a prior art architecture for management
of a manufacturing facility.
[0026] FIG. 2 illustrates a prior art method to select recipes in a
process tool in a manufacturing environment.
[0027] FIG. 3 illustrates a first preferred embodiment of the
present invention.
[0028] FIG. 4 illustrates a second preferred embodiment of the
present invention.
[0029] FIG. 5 illustrates an information flow and control diagram
showing the second preferred embodiment of the present
invention.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0030] The preferred embodiments of the present invention disclose
a method to manufacture a product. The method teaches dynamically
modifying process recipes to include chamber selections of multiple
chamber process tools. Preferred embodiments are disclosed for an
integrated circuit manufacturing control system. It should be clear
to those experienced in the art that the present invention can be
applied and extended without deviating from the scope of the
present invention.
[0031] Referring now to FIG. 3, the first preferred embodiment of
the present invention is illustrated. Several important features of
the present invention are shown and discussed below. The first
preferred method 100 comprises, first, providing a control system
and a process tool. Referring again to FIG. 2, the process tool 44
comprises multiple chambers 60, 64, 68, 72. Each chamber is
preferably capable of processing product independently. Further,
the process tool 44 stores a plurality of recipes in its recipe
manager unit 52. Referring again to FIG. 1, the control system
comprises a database 33 where lot tracking and product routing
information is stored. Referring again to FIG. 3, as a first step
in the first preferred method 100, a set of chambers and a recipe
name are selected based on the database in step 110. Preferably,
the lot number, or lot numbers, of the product are entered into the
MES system, such as PROMIS.TM.. The MES system references the
tracking database to determine the next process step for that
product lot. The recipe name is then retrieved from the routing
database as an attribute. By entering, or moving in, the product
lot into the MES system, the control system requests the available
equipment status from the constraint server (CSN.TM.). The
constraint server returns the best available processing tool and,
if applicable, the best available chamber or set of chambers on the
tool.
[0032] Next, as an important feature of the present invention, a
recipe body is uploaded from the process tool to the control system
based on the recipe name in step 120. Since the actual recipe is
stored on the process tool, it must be transferred from the tool to
the equipment server (EQS.TM.). Preferably, this transfer is
performed using a SECS capatible interface between the equipment
server and the tool as is known in the art. Alternatively, the
transfer may be accomplished by other means, such as network links
or serial links.
[0033] Once the recipe body is transferred to the control system,
the recipe body is modified to generate a runtime recipe body that
specifies the set of chambers in step 130. This is an important
feature of the present invention. In the preferred embodiment, the
process tool only stores a generic copy of the recipe. This generic
copy is configured such that all of the chambers in the multiple
chamber tool are set for processing. For example, if the tool
comprises chambers A, B, C, and D, then the generic copy of the
recipe is configured to allow processing in chambers A, B, C, and
D, regardless of the current condition of the tool or any other
constraints. This generic copy is read into the control system
memory during the upload step. A modification procedure is then
performed on the generic recipe body to change the chamber settings
to those provided by the constraint server. For example, if the
constraint server specifies that the product lot(s) be run on
chamber B and C, then the modification procedure changes the
generic chamber settings from "A, B, C, D" to "B, C". As will be
discussed below in the example case, this modification is
preferably performed by simply changing the value of a byte or of
several bytes in the recipe sequence. The control system saves the
modified recipe as a "runtime recipe."Next, as an important feature
of the present invention, the runtime recipe body is downloaded
from the control system to the process tool in step 140. Once
again, the preferred data transfer method is the SECS compatible
link between the equipment server and the processing tool. As will
be discussed in the second preferred embodiment, it may be useful
to first download a new recipe name, called a runtime recipe name,
to the tool prior to downloading the runtime recipe body. This
approach has the advantage of always maintaining the original,
generic recipe on the process tool while only altering a runtime
copy. A product is then processed in the process tool using the
runtime recipe body in step 150 to complete the method 100.
[0034] Referring now to FIG. 4, a second preferred embodiment of
the present invention is illustrated. This embodiment 200 presumes
that a large number of tools are present in the manufacturing
facility. In step 210, the target tool, the chamber set, and the
recipe name are selected by the control system. Again, the product
lot(s) is analyzed by the MES system to determine the next process
step, equipment type, and recipe name. The constraint system then
determines the optimum tool in the manufacturing line, herein
called the target tool. Further, the constraint system determines
the chamber set (one or more chambers) that will be used. The
control system uploads the body of the recipe from the target tool
based on the recipe name in step 220.
[0035] Preferably, only a generic form of the particular recipe is
stored on the tool. In this way, the tool only stores the recipe
variations that are significant to the process, such as different
sequences of gas flows, different temperatures, or different
pressures. Therefore, far fewer recipes need to be stored in the
tool. This leads to several benefits. First, the process
engineering effort required to maintain the recipes is reduced.
Second, the likelihood of an error in the recipes, due to incorrect
modification by the process engineer, is reduced. Third, additional
space is created in the tool memory for additional, generic
recipes.
[0036] As an important feature, the recipe body is modified to
generate a runtime recipe body in step 230. The runtime recipe body
specifies the chamber set and a runtime recipe name. Preferably,
the modification is performed by altering data bytes in the recipe
body. By altering the recipe name value that is included in the
recipe body, the runtime recipe body can be referenced by the tool
under the runtime recipe name. For example, if the generic recipe
is "22MM11," then the generic recipe will contain a reference to
"22MM11" in the data block defined as the PPID of the recipe. The
tool may use this PPID data block within the body to identify the
recipe and as a means of verifying the recipe. Therefore, the
modification step 230 alters the PPID block with the runtime
recipe. For example, the recipe name may be changed to
"run22LM11".
[0037] Next, as an important feature, the runtime recipe name is
deleted from the target tool in step 240. By deleting any reference
to the runtime recipe name in the tool at this point, any chance of
running an old copy of the runtime recipe is eliminated. Next, the
runtime recipe is downloaded from the control system to the target
tool in step 250. The runtime recipe name is then downloaded from
the control system to the tool in step 260. At this point, the tool
contains the generic recipe, referenced, for example, by
PPID=22MM11,and the runtime recipe, referenced, for example, by
PPID=run22LM11.
[0038] Next, the product is processed in the target tool using the
runtime recipe in step 270. Preferably, the process start is
commanded by the equipment server using the SECS interface.
Finally, as an important feature, after processing of the product
is complete, the runtime recipe name is deleted from the target
tool by a command from the equipment server in step 280. This step
prevents the running of the runtime version of the recipe on the
target tool during some subsequent event. This prevents a
processing error event and eliminates proliferation of recipes on
the target tool.
[0039] Referring now to FIG. 5, an information flow and control
diagram further illustrates the second preferred embodiment of the
present invention. The diagram shows the actions of the run manager
(RM), the equipment server (EQS), the SECS link, and the tool
during the steps encompassed by the present invention. At step 1,
the run manager issues a CheckAskLoad command to the equipment
server. This command passes the target tool, the recipe name, and
the chamber set to the EQS server. The EQS server issues a SECS
standard command "S7F65" requesting an upload of the generic recipe
name (PPID) from the target tool. The tool responds in step 3 with
the "S7F66" response containing the generic PPID. EQS verifies that
the generic PPID exists and then issues a SECS command "S87F5" to
upload the body of the current PPID (PPBody). The tool responds
with the "S7F6" response that includes a data stream with the body
of the generic recipe.
[0040] The EQS now calls a function, ModifySEQBody, to modify the
recipe body. ModifySEQBody first checks the recipe body to
determine if it is a single chamber or a multiple chamber recipe.
This classification will determine how particular byte values in
the recipe body are changed. Next, the routine modifies particular
bytes in the recipe sequence to designate the particular chamber or
chambers that will be run. In the illustrated case, byte 35 is
altered. After the recipe body is modified for the chamber set, the
ModifySEQName function is called. This function will change the
PPID name stored in the recipe body to the designated, runtime
recipe name.
[0041] After the runtime recipe is modified, EQS commands the
target tool to delete the runtime recipe name, PPID, using the
"S7F67" command in step 6. The tool acknowledges this command with
the "S7F68" response in step 8. Next, EQS asks the target tool to
allow a recipe down load in the "S7F1/S7F2" sequence of steps 8 and
9. The runtime recipe body is then downloaded by the "S7F3/S7F4"
sequence of steps 10 and 11. Finally, the runtime recipe name
(PPID) is downloaded to the target tool in steps 12 and 13 using
the command sequence "S7F11/S7F12".
[0042] At this point, the CheckAskLoad command is complete, and a
return value is sent to the run manager in step 14. The standard,
run verification sequence is then performed to run the product in
the tool chambers. Following the product run, the run manager
issues the CheckEndUnload command in step 15. At this point, EQS
commands the target tool to delete the runtime PPID via the
"S7F67/S7F68" sequence in steps 16 and 17. Finally, EQS issues an
acknowledgment to the run manager in step 18.
[0043] The above-described scenario is further illustrated by
examining a part of the recipe sequence for a dry etcher used in
integrated circuit processing. Referring now to Table 1, a portion
of the recipe sequence body is shown.
1TABLE 1 Partial listing of a recipe sequence for a dry etcher
Level Item Name Value 1 Name 25E3M403* 2 StepCount 6 3 Reclen 44 4
Frozen 1 5 Waferin 0 6 ExchangeMode 0 7 Spare 0 8 LoadlockBase 0 9
Reserve 0 10 Spare 11 Title 0.25NEW 12 CreateDateSec 7 13
CreateDateMin 5 14 CreateDateHr 10 15 CreateDateDay 10 16
CreateDateMon 10 17 CreateDateYr 1 18 Creator EE 19 Modifier EE 20
Spare 21 Port 19 22 Number 1 23 WaferClean 24 Recipe 25E3M403* 25
Delay 3 26 Unit 47 27 DispFlag 0 28 Attrib 21 29 Spare 0 30
ChamberMask 6* 31 Port 19 32 Number 2 33 WaferClean 34 Recipe
STRIP-1* 35 Delay 12 36 Unit 47 37 DispFlag 0 38 Attrib 21 39 Spare
0 40 ChamberMask 24* (*= item modified by equipment server
routine)
[0044] Each item number represents a byte or several bytes of data
as determined by the standard, recipe body structure for the dry
etcher. Several items should be noted. The main recipe name,
"25E3M403" is included as item 1. This name block is changed by the
EQS system from the generic name to the runtime name during the
recipe modification.
[0045] Two process blocks are shown in the sequence. One block
comprises items 21-30. Another block comprises items 31-40. Each
process block has a recipe name, such as "25E3M403" and "STRIP-1".
These recipe names are also changed by the modification function in
EQS. Each process block also contains a ChamberMask as the last
item (30 and 40). The ChamberMask determines the particular
chambers that will be run. The ChamberMask blocks (items 30 and 40)
are modified by the EQS function to select the appropriate chambers
based on the chamber encoding scheme used by the ChamberMask
blocks.
[0046] The present invention has been applied to an integrated
circuit manufacturing facility. A comparison of this facility with
a similar facility that uses the prior art technique for managing
recipes for multiple chamber tools demonstrates impressive results
as shown in Table 2.
2TABLE 2 Comparison of Invention to Prior Art. Fab Fab Item (New
Way) (Old Way) Ave. # sequences/tech/node/tool 11 6 Ave. # chamber
combinations/tool 1 10 Total # sequences/tool/node 11 60 Ave.
maintenance/tool/node/month 10 min. 10 min. Total
maintenance/tool/node/month 110 min. 600 min. # technology
nodes/tool 3 3 Total maintenance/tool/month 330 min. 1800 min. #
multi-chamber tools 111 112 Total maintenance/month 610 hr. 3360
hr. Manpower required at 42 hr/week 3.8 mos. 20 mos.
[0047] The advantages of the present invention may now be
summarized. An effective and very manufacturable method to
manufacture a product is achieved. The method dynamically
formulates processing recipes for multiple chamber process tools.
The method eliminates recipe proliferation by dynamically modifying
recipes to include chamber selection information. The method
eliminates errors caused by recipe proliferation. The method
reduces process engineering workload due to recipe proliferation.
An apparatus to manufacture a product where recipe proliferation is
eliminated by dynamically modifying recipe sequences to include
chamber selection is achieved.
[0048] As shown in the preferred embodiments, the novel method of
the present invention provides an effective and manufacturable
alternative to the prior art.
[0049] While the invention has been particularly shown and
described with reference to the preferred embodiments thereof, it
will be understood by those skilled in the art that various changes
in form and details may be made without departing from the spirit
and scope of the invention.
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