U.S. patent application number 10/911602 was filed with the patent office on 2005-01-13 for electronic commerce method for semiconductor products, electronic commerce thereof, production system, production method, production equipment design system, production equipment design method, and production equipment manufacturing method.
Invention is credited to Mitsutake, Kunihiro, Okumura, Katsuya.
Application Number | 20050010492 10/911602 |
Document ID | / |
Family ID | 26593071 |
Filed Date | 2005-01-13 |
United States Patent
Application |
20050010492 |
Kind Code |
A1 |
Mitsutake, Kunihiro ; et
al. |
January 13, 2005 |
Electronic commerce method for semiconductor products, electronic
commerce thereof, production system, production method, production
equipment design system, production equipment design method, and
production equipment manufacturing method
Abstract
An electronic commerce for semiconductor products comprises a
network, a client terminal, a connection server, a virtual
production line, and a real production line. The real production
line actually manufactures semiconductor products. The virtual
production line provides a computer with substantially the same
functions as the real production line and computes an optimal lot
progress. The connection server connects the virtual production
line to the client terminal via the network. When a condition is
entered from the client terminal, the connection server transfers
this condition to the virtual production line. Simulation is
performed realtime for determining whether a product flows in the
virtual production line under the transferred condition. The
connection server transfers a simulation result to the client
terminal. Based on the simulation result, a electronic commerce is
conducted.
Inventors: |
Mitsutake, Kunihiro;
(Yokohama-shi, JP) ; Okumura, Katsuya;
(Yokohama-shi, JP) |
Correspondence
Address: |
OBLON, SPIVAK, MCCLELLAND, MAIER & NEUSTADT, P.C.
1940 DUKE STREET
ALEXANDRIA
VA
22314
US
|
Family ID: |
26593071 |
Appl. No.: |
10/911602 |
Filed: |
August 5, 2004 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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10911602 |
Aug 5, 2004 |
|
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|
09867465 |
May 31, 2001 |
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6788985 |
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Current U.S.
Class: |
705/26.1 |
Current CPC
Class: |
G06Q 30/06 20130101;
G06Q 30/0601 20130101 |
Class at
Publication: |
705/026 |
International
Class: |
G06F 017/60 |
Foreign Application Data
Date |
Code |
Application Number |
May 31, 2000 |
JP |
2000-163042 |
May 31, 2000 |
JP |
2000-163043 |
Claims
1-6. (Canceled)
7. An electronic commerce system, comprising: a virtual production
line providing a computer with substantially the same functions as
for a real production line actually manufacturing products; first
transferring means configured to transfer various information about
said real production line to said virtual production line;
computing means configured to compute an optimal lot progress on
said virtual production line based on said transferred information;
second transferring means configured to transfer work instruction
data based on a result of said computation to said real production
line; and a connection server configured to connect said virtual
production line to a client terminal via a network, wherein:
conditions input from said client terminal are transferred to said
virtual production line via said connection server transfers;
realtime simulation is performed to determine whether a product
flows on a virtual production line under transferred conditions; a
simulation result is transferred to said client terminal via said
connection server; and a transaction is effectuated based on a
simulation result.
8. A production system, comprising: a virtual production line
providing a computer with substantially the same functions as for a
real production line actually manufacturing products; receiver
configured to receive various information about said real
production line by using said virtual production line; computing
means configured to compute an optimal lot progress on said virtual
production line based on said received information; and
transferring means configured to transfer work instruction data
based on a result of said computation to said real production
line.
9. The production system according to claim 8, wherein: said system
realtime and repeatedly receives various information in said
virtual production line, computes an optimal lot progress in said
virtual production line, and transfers work instruction data from
said virtual production line to said real production line.
10. The production system according to claim 8, wherein:
information transferred from said real production line to said
virtual production line includes at least one of an order volume
for each production, lot progress situation, apparatus situation,
worker situation, and product test result.
11. The production system according to claim 8, wherein: said
computing means configured to compute an optimal lot progress finds
a plurality of lot progress estimate results for each condition of
progressing said lot and extracts at least one of said plurality of
progress estimate results.
12. The production system according to claim 11, wherein: said
computing means configured to compute an optimal lot progress is
provided with means for displaying said plurality of lot progress
estimate results found and selecting at least one computation
result.
13. The production system according to claim 11, wherein: said
computing means configured to compute an optimal lot progress
extracts one or more of said plurality of lot progress estimate
results based on user-input extraction condition.
14. The production system according to claim 8, wherein: said
computing means configured to compute an optimal lot progress
computes a solution for providing the shortest manufacturing period
and the maximum production volume.
15. The production system according to claim 8, wherein: said
computing means configured to compute an optimal lot progress finds
a solution according to which a product with a higher priority
provides a shorter manufacturing period based on priorities
assigned to ordered products.
16. The production system according to claim 8, wherein: said
receiver receives a test result of a product manufactured in said
real production line to said virtual production line and said
computing means determines the next input schedule by referencing
an order volume for the relevant product.
17. The production system according to any one of claims 8 to 16,
wherein: said real production line is a semiconductor production
line.
18. The production system according to claim 8, further comprising:
second computing means configured to compute at least one time
dependency of electric power and power usage based on said received
information, wherein: said computing means configured to compute an
optimal lot progress is based on the time dependency obtained by
said second computing means configured to compute the time
dependency and compute a lot progress based on a condition not
exceeding at least one of an electric power value and a power usage
value specified for the production line.
19. The production system according to claim 18, wherein: said
power usage includes at least one of deionized water, cooling
water, semiconductor material gas, semiconductor manufacturing gas,
semiconductor manufacturing liquid, and semiconductor manufacturing
solid.
20. A manufacturing method of using a virtual production line
provided with substantially the same functions in a computer as for
a real production line actually manufacturing products, performing
simulation in a virtual production line, and enabling efficient
operations in a real production line, said method comprising the
steps of: receiving various information about said real production
line by means of said virtual production line; computing an optimal
lot progress in said virtual production line based on said received
information; and transferring work instruction data based on a
result of said computation to said real production line.
21. The manufacturing method according to claim 20, further
comprising the step of: starting production in said real production
line based on said work instruction data.
22. The manufacturing method according to claim 20, wherein: said
method realtime and repeatedly receives various information in said
virtual production line from said real production line, computes an
optimal lot progress in said virtual production line, and transfers
work instruction data from said virtual production line to said
real production line.
23. The manufacturing method according to claim 20, wherein:
information received from said real production line to said virtual
production line includes at least one of an order volume for each
production, lot progress situation, apparatus situation, worker
situation, and product test result.
24. The manufacturing method according to claim 20, wherein: said
step of computing an optimal lot progress computes a solution for
providing the shortest manufacturing period and the maximum
production volume.
25. The manufacturing method according to claim 20, wherein: said
step of computing an optimal lot progress computes a solution
according to which a product with a higher priority provides a
shorter manufacturing period based on priorities assigned to
ordered products.
26. The manufacturing method according to claim 20, wherein: said
receiving step receives a test result of a product manufactured in
said real production line to said virtual production line and said
computing step determines the next input schedule by referencing an
order volume for the relevant product.
27. The manufacturing method according to any one of claims 20 to
26, wherein: said real production line is a semiconductor
production line.
28-31. (Canceled)
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is based upon and claims the benefit of
priority from the prior Japanese Patent Applications No.
2000-163042, filed May 31, 2000; and No. 2000-163043, filed May 31,
2000, the entire contents of both of which are incorporated herein
by reference.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] The present invention relates to an electronic commerce
method and system for semiconductor products in case of conducting
electronic commerce for semiconductor products via a network and a
production system, a production method, a production equipment
design system, a production equipment design method, and a
production equipment manufacturing method for effective operations
in a factory.
[0004] 2. Description of the Related Art
[0005] Conventionally, a typical semiconductor factory monthly
produces general-purpose products such as memory chips on the basis
of several thousand lots. A production line includes too many lots
and requires a long period of production. Because of this, it has
been difficult to estimate the completion of the product after it
went into production. Even in this situation, general-purpose
products need not be especially considered regarding input of a lot
in accordance with the delivery time, causing no serious problems.
Generally, one lot can take in about 25 to 50 wafers. Of course,
the lot can take in about 1 to 50 or 100 wafers.
[0006] On the other hand, a semiconductor factory in a SOC (System
On Chip) age is considered to chiefly produce system LSI chips on a
scale of several hundred lots as a monthly production in accordance
with customer requests. Such a small-scale factor (hereafter
referred to as the mini-fab) needs to input a necessary amount of
lots and follow the delivery time by conducting a proper lot
progress management. Further, it is necessary to determine whether
it is possible to actually manufacture the product in accordance
with customer requests such as specification, quantity, delivery
time, price, and the like.
[0007] However, it has been difficult for conventional mini-fabs to
strictly control the lot progress management and to correctly
estimate whether the product can be manufactured by following the
delivery time. In semiconductor products such as LSI chips, it is
considered to drastically increase business opportunities by
constructing an electronic commerce using networks such as
Internet. However, since it is difficult to conduct the lot
progress management and estimate the product manufacturing, it has
been very difficult to implement an electronic commerce for these
semiconductor products.
[0008] Hence, it has been difficult for conventional semiconductor
factories to estimate whether it is possible to conduct the lot
progress management and manufacture product. This has been a cause
of losing business opportunities for mini-fabs in a SOC age.
[0009] Generally, conventional typical semiconductor factories use
as many as dozens of apparatuses for the same purpose at various
processes. The same type of apparatuses process many lots, making
it difficult to control a flow of lots. As a system for controlling
a flow of lots, there is provided the software called "ManSim" from
TYECIN Systems, Inc. Input information includes apparatuses used
for each process of a product, processing times, apparatus groups,
and the like. Lots are allowed to flow on a computer virtually. The
system aims at controlling a flow of lots, optimizing production
lines, and conducting production scheduling.
[0010] To optimize production lines and conduct production
scheduling, it is necessary to transfer various information such as
lot progress information on an actual production line, information
about apparatus states, product's process information, and the like
to a computer system. A progress estimate is computed through the
use of these types of information as input data. The resulting
information needs to be transferred to the actual production line
as a work instruction. However, on a large-scale production system
characterized by a monthly production of several thousand lots, the
progress estimate is computed by simplifying various processes due
to restrictions on computer throughput. Accordingly, such a system
does not necessarily conduct accurate simulation.
[0011] A similar method is proposed in Jpn. Pat. Appln. KOKAI
Publication No. 10-207506. The manufacturing management system
proposed therein exchanges trial production system information via
shared information and uses a result of the simulation to manage a
manufacturing process for the production or trial production.
According to this technique, a computer system chiefly contains a
device simulation function, a process simulation function, circuit,
shape, logic simulations functions, and the like, but not a
simulation function for flowing lots. This has been the problem of
not estimating a lot flow.
[0012] FIG. 1 exemplifies a result of computing a throughput and a
work period by using ManSim. In this figure, the abscissa axis
shows the number of lots (work in process: WIP) within a production
line. The ordinate axis shows the throughput (monthly quantity of
output) and the work period. Solid lines indicates results of
computing a throughput and a work period, and a dotted line
indicates actual result of a throughput for reference. According to
this figure, when the WIP is small, the throughput is proportional
to the WIP and the work period remains constant. This state causes
little wait conditions in a lot. When the WIP increases, the
throughput gradient decreases gradually, and finally becomes a
constant value. It is known that this throughput corresponds to the
throughput of a bottlenecked apparatus. Within this region, the
work period increases in proportion to the WIP.
[0013] Increasing productivity of the production line requires
increasing the throughput and shortening the work period.
Shortening the work period needs to decrease the number of waiting
lots. In this figure, the WIP needs to be set approximately to
value A. However, this is not practical because the throughput is
too small. By contrast, increasing the WIP approximate to value C
in the figure maximizes the throughput, but lengthens the work
period. Accordingly, it is considered to be appropriate for
operations to use values approximate to B in the figure.
[0014] As indicated with a broken line in FIG. 1, however, the
throughput and productivity decreases due to maintenance or
failures of apparatuses, inconsistent arrival of products to a
bottlenecked apparatus, and the like. To prevent the throughput
from decreasing, it is necessary to accurately predict the progress
of lots and conduct optimal processing for increasing the
throughput and shortening the work period. As mentioned above,
however, a large-scale production system must simplify various
processes for computation due to restrictions on computer
throughput. It has been difficult to accurately estimate the
progress of lots.
[0015] Besides, several choices may occur when a certain apparatus
processes lots. For example, it is assumed that there is provided a
batch apparatus which can process a plurality of lots at a time.
When a given lot waits for processing, it is necessary to determine
whether to process that lot immediately or to wait until another
lot arrives. On a given apparatus, a lot with a low priority waits
and a lot with a high priority is expected to occur after a
specified time. In this case, it is necessary to determine whether
to process the low-priority lot first or to process the
high-priority lot first by suspending the low-priority lot. In
addition, when there is provided a continuous process such as
pre-treatment, oxidation (or CVD), and then post-treatment within
24 hours, it is necessary to determine at which timing the
processing should start.
[0016] There may be a variety of methods for selecting an optimal
one from a plurality of choices as mentioned above depending on
situations. Above-mentioned ManSim uniquely determines a rule for
selecting choices and computes a lot progress under the
corresponding condition. When the above-mentioned choices occur,
ManSim is incapable of such computation, also offering a serious
problem to be solved.
[0017] As described above, various processes need to be simulated
in actual production line for optimizing semiconductor production
line and scheduling the production. The actual situation is that
various processes are simplified for computation due to
restrictions on the computer throughput. Accurate simulation has
been difficult. For this reason, it has been difficult to
accurately estimate a lot progress. A method of selecting optimal
one from a plurality of choices depends on situations. A prior art
makes it difficult to select an optimal choice.
BRIEF SUMMARY OF THE INVENTION
[0018] It is an object of the present invention to provide an
electronic commerce method and a system thereof capable of lot
progress management and correctly determining possibilities of
product manufacturing thereby expanding business opportunities.
[0019] It is another object of the present invention to provide a
production system, production method, production equipment design
system, production equipment design method, and production
equipment manufacturing method capable of accurately simulating
various processes in an actual production line and implementing
effective operations especially in a relatively small-scale
factory.
[0020] For the above-mentioned problems, one embodiment of the
present invention provides the following configurations.
[0021] Namely, one embodiment of the present invention provides an
electronic commerce method for an agent manufacturing or selling
semiconductor products and a purchaser purchasing semiconductor
products to conduct an electronic commerce, the method comprising
the steps of: connecting a client terminal used by a purchaser or
his or her proxy to a virtual production line so constructed as to
simulate production processes in a real production line for
manufacturing semiconductor products on a computer; receiving a
purchaser-requested condition for a purchaser-requested product
from the client terminal; simulating realtime whether the
purchaser-requested product flows on a virtual production line
according to a purchaser-requested condition; and determining
whether a product is manufactured according to a
purchaser-requested condition.
[0022] Besides, another embodiment of the present invention
provides an electronic commerce method for an agent manufacturing
or selling semiconductor products and a purchaser purchasing
semiconductor products, to conduct an electronic commerce by using
a network, the method comprising the steps of: connecting via
network a client terminal used by a purchaser or his or her proxy
to a virtual production line so constructed as to simulate
production processes in a real production line for manufacturing
semiconductor products on a computer; inputting a
purchaser-requested product and conditions from the client terminal
and transferring this input information to the virtual production
line; simulating realtime whether a product flows on the virtual
production line according to a purchaser-requested condition based
on the product and conditions input to the virtual production line;
transferring a simulation result in the virtual production line to
the client terminal; determining whether to effectuate a business
transaction from the client terminal in response to a result of the
simulation; and issuing an instruction for manufacturing
semiconductor products from the virtual production line to the real
production line.
[0023] Still another embodiment of the present invention provides
an electronic commerce method concerning semiconductor products for
a purchaser purchasing semiconductor products to have electronic
commerce with an agent manufacturing or selling semiconductor
products by using a network, the method comprising the steps of:
connecting via network a client terminal used by a purchaser or his
or her proxy to a virtual production line so constructed as to
simulate production processes in a real production line for
manufacturing semiconductor products on a computer; inputting a
product to be purchased and conditions thereof from the client
terminal; receiving a result of simulating realtime at the client
terminal whether a product flows on the virtual production line
according to a purchaser-requested condition based on the input
product and conditions; and responding whether to purchase a
semiconductor product from the client terminal in response to the
received simulation result.
[0024] Still yet another embodiment of the present invention
provides an electronic commerce method concerning semiconductor
products for an agent manufacturing or selling semiconductor
products to have electronic commerce with a purchaser purchasing
semiconductor products by using a network, the method comprising
the steps of: connecting via network a client terminal used by a
purchaser or his or her proxy to a virtual production line so
constructed as to simulate production processes in a real
production line for manufacturing semiconductor products on a
computer; receiving a product and conditions at the virtual
production line input from the client terminal; simulating realtime
whether a product flows on the virtual production line according to
a purchaser-requested condition based on the product and conditions
transferred to the virtual production line; transferring a result
of the simulation to the client terminal; determining whether a
transaction is effectuated according to a response from the client
terminal based on the simulation result; and issuing an instruction
for semiconductor product manufacturing from the virtual production
line to the real production line when a transaction is effectuated
according to the determination.
[0025] Yet still another embodiment of the present invention
provides an electronic commerce system, comprising: a virtual
production line so constructed as to simulate production processes
in a real production line for actually manufacturing semiconductor
products on a computer; and a connection server for connecting the
virtual production line to a client terminal via a network,
wherein: the connection server transfers conditions input from the
client terminal to the virtual production line and transfers to the
client terminal a result of realtime simulation whether a product
flows on the virtual production line according to a transferred
condition.
[0026] Still yet another embodiment of the present invention
provides an electronic commerce system, comprising: a virtual
production line providing a computer with substantially the same
functions as for a real production line actually manufacturing
products; first transferring means configured to transfer various
information about the real production line to the virtual
production line; computing means configured to compute an optimal
lot progress on the virtual production line based on the
transferred information; second transferring means configured to
transfer work instruction data based on a result of the computation
to the real production line; and a connection server configured to
connect the virtual production line to a client terminal via a
network, wherein: conditions input from the client terminal are
transferred to the virtual production line via the connection
server transfers; realtime simulation is performed to determine
whether a product flows on a virtual production line under
transferred conditions; a simulation result is transferred to the
client terminal via the connection server; and a transaction is
effectuated based on a simulation result.
[0027] In the above embodiments of the present invention, a user
such as a sales representative or a customer connects to a virtual
production line via network. The user inputs a specified LSI
product name, specification, delivery time, price, and the like and
simulates whether such a product can be manufactured on the virtual
production line. When a result from the simulation shows that the
product can be manufactured, a transaction is initiated and a work
instruction is issued to an actual production line. Even when a
result from the simulation shows that the product cannot be
manufactured, the user can change the semiconductor product's
specification, quantity, delivery time, price, and the like. When
an acceptable solution is obtained, a transaction is initiated and
a work instruction is issued to an actual production line.
[0028] Here, the virtual production line is designed to use a
computer for simulating production processes in an actual
production line which manufactures semiconductor products. A
simulation using the virtual production line makes it possible to
correctly determine possibilities of managing a lot progress and
manufacturing the product on the actual production line.
Consequently, this allows mini-fabs in the SOC age to effectuate
the electronic commerce for semiconductor products and enlarge
business opportunities.
[0029] Yet still another embodiment of the present invention
provides a production system, comprising: a virtual production line
providing a computer with substantially the same functions as for a
real production line actually manufacturing products; receiver
configured to receive various information about the real production
line by using the virtual production line; computing means
configured to compute an optimal lot progress on the virtual
production line based on the received information; and transferring
means configured to transfer work instruction data based on a
result of the computation to the real production line.
[0030] Still yet another embodiment of the present invention
provides a manufacturing method of using a virtual production line
provided with substantially the same functions in a computer as for
a real production line actually manufacturing products, performing
simulation in a virtual production line, and enabling efficient
operations in a real production line, the method comprising the
steps of: receiving various information about the real production
line by means of the virtual production line; computing an optimal
lot progress in the virtual production line based on the received
information; and transferring work instruction data based on a
result of the computation to the real production line.
[0031] The above described embodiment of the present invention
provides a virtual factory (virtual production line) for virtually
manufacturing products including trial products The virtual factory
aims at effectively operating the production line in a factory,
especially a relatively small-scale semiconductor factory (actual
production line referred to as a mini-fab) whose monthly production
is several thousand lots or less. There are provided lot progress
information from an actual production line actually manufacturing
products and information about apparatus situations. These pieces
of information are transferred to the virtual production line. A
lot progress estimate is computed using input data including these
pieces of information and product process information maintained in
the virtual production line. As an output, the computation result
includes information about an optimal processing lot, order, and
the like. The output is transferred to the actual production line
as a work instruction.
[0032] During computation of the lot progress estimate using lot
progress information, information about apparatus situations, and
product's process information as input data, several choices may
occur when a given apparatus processes lots. For example, it is
assumed that there is provided a batch apparatus which can process
a plurality of lots at a time. When a given lot waits for
processing, it is necessary to determine whether to process that
lot immediately or to wait until another lot arrives. When another
lot is expected to arrive soon, it is considered to be beneficial
to await that lot. When another lot is not expected to arrive soon,
it is considered to be beneficial to process the current lot only.
Accordingly, an optimal processing method is considered to vary
with situations. On a given apparatus, a lot with a low priority
waits and a lot with a high priority is expected to occur after a
specified time. In this case, it is necessary to determine whether
to process the low-priority lot first or to suspend it.
[0033] The above embodiment of the present invention computes all
or part of these various choices. When there is a plurality of
choices, a lot progress is estimated with respect to all or partial
combinations of these choices. This operation is performed during a
computation time specified by the input data.
[0034] There are several to dozens of apparatuses of the same type
in a large-scale semiconductor factory which monthly produces
approximately fifty to sixty thousand wafers or more. The
above-mentioned combinations necessitate a great amount of
computations. Practically, it has been difficult to perform such
computations. By contrast, at least one or up to several
apparatuses of the same type are used in a semiconductor-factory
which monthly produces several thousand wafers or less. There are
provided apparatuses which easily cause a plurality of choices such
as apparatuses for charging a plurality of lots. These apparatuses
occupy one third or less of the whole. A chance of making choices
is smaller than the large-scale semiconductor factory which monthly
produces approximately fifty to sixty thousand wafers or more.
Accordingly, the number of combinations decreases, making it
possible to extend the time for lot progress computation.
[0035] More specifically, a conventional large-scale factory just
computes a progress for, say, 10 minutes due to restriction of a
computer. By contrast, a mini-fab according to the present
invention can compute a progress for, say, a week using the same
computer, ensuring a practical use. Based on this lot progress
estimate, it is possible to determine an optimal processing method
or sequence with reference to specially input conditions for
determining an optimal processing method or sequence. This
processing method is transferred to the production line as a work
instruction. As a result, the lots flow efficiently, shortening the
work period and improving throughput. Accordingly, this improves
productivity of semiconductor wafer manufacturing.
[0036] The use of this method for manufacturing semiconductor
wafers enables prioritized processing for products with high
priorities and efficient processing for products with low
priorities within an available range. Further, it is possible to
optimize the maintenance or a sequence of lot processing when an
apparatus is being maintained or is to be maintained.
[0037] Additional objects and advantages of the invention will be
set forth in the description which follows, and in part will be
obvious from the description, or may be learned by practice of the
invention. The objects and advantages of the invention may be
realized and obtained by means of the instrumentalities and
combinations particularly pointed out hereinafter.
BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING
[0038] The accompanying drawings, which are incorporated in and
constitute a part of the specification, illustrate presently
preferred embodiments of the invention, and together with the
general description given above and the detailed description of the
preferred embodiments given below, serve to explain the principles
of the invention.
[0039] FIG. 1 exemplifies a result of computing a throughput and a
work period according to a prior art using ManSim;
[0040] FIG. 2 is a block diagram showing an entire configuration of
an electronic commerce system for semiconductor products according
to a first embodiment;
[0041] FIG. 3 is a flowchart explaining a flow f entire processing
according to the first embodiment;
[0042] FIG. 4 is a flowchart explaining a flow of entire processing
according to the first embodiment;
[0043] FIG. 5 exemplifies a monitor screen for selecting device
specification choices;
[0044] FIGS. 6A and 6B exemplify monitor screens for entering
device specifications;
[0045] FIG. 7 exemplifies a monitor screen displaying an answer for
a price according to a ordered quantity and a delivery time;
[0046] FIG. 8 exemplifies a monitor screen for entering a quantity
to be ordered and a delivery time;
[0047] FIG. 9 exemplifies a monitor screen displaying an available
delivery time and price from a device manufacturer;
[0048] FIG. 10 exemplifies a monitor screen for renegotiating a
delivery time and a price;
[0049] FIG. 11 is a block diagram describing a second embodiment
and exemplifying a semiconductor production system used for the
electronic commerce method of the present invention;
[0050] FIG. 12 is a schematic diagram illustrating lot progress
computation using a semiconductor production system according to
the second embodiment;
[0051] FIGS. 13A to 13E lists input data and output data for the
lot progress computation using a semiconductor production system
according to the second embodiment;
[0052] FIG. 14 shows a lot flow without awaiting completion of
another lot processing identified at one point in a virtual factory
13 according to the second embodiment;
[0053] FIG. 15 describes a second embodiment, exemplifying choices
available when a lot progress is estimated;
[0054] FIG. 16 shows a lot flow by awaiting completion of another
lot processing identified at one point in a virtual factory 13
according to the second embodiment;
[0055] FIG. 17 describes a second embodiment, showing a procedure
for selecting an optimal combination from a plurality of
combinations of choices available when a lot is in process;
[0056] FIG. 18 shows a configuration of a virtual factory
performing lot look-ahead computation capable of electric power
leveling;
[0057] FIG. 19 shows characteristic curves for electric power or
power usage of apparatuses registered in the virtual factory 13
performing the electric power leveling;
[0058] FIG. 20 shows an example of condition data for electric
power or power usage of apparatuses registered in the virtual
factory 13 performing the electric power leveling;
[0059] FIG. 21 describes a production system according to a third
embodiment;
[0060] FIGS. 22A to 22C describe a production system without power
leveling;
[0061] FIGS. 22D to 22F describe a production system with power
leveling; and
[0062] FIG. 23 describes a third embodiment, showing a procedure
for selecting an optimal combination from a plurality of
combinations of choices available when a lot is in process.
[0063] FIGS. 24A and 24B show electric power values for large-scale
and small-scale production lines;
[0064] FIG. 25 shows the concept of time shift according to the
third embodiment;
[0065] FIG. 26 describes a production system according to a fourth
embodiment;
[0066] FIGS. 27A to 27C describe a production system without power
optimization;
[0067] FIGS. 27D to 27F describe a production system with power
optimization; and
[0068] FIG. 28 describes a fourth embodiment, showing a procedure
for selecting an optimal combination from a plurality of
combinations of choices available when a lot is in process.
DETAILED DESCRIPTION OF THE INVENTION
[0069] Embodiments of the present invention will be described in
further detail with reference to the accompanying drawings.
[0070] (First Embodiment)
[0071] FIG. 2 is a block diagram showing an entire configuration of
an electronic commerce system for semiconductor products according
to a first embodiment of the present invention.
[0072] A network 10 is a computer network such as Internet. The
system implements an electronic commerce via this network 10.
[0073] The network 10 connects with a plurality of client terminals
11 and a connection server 12. The client terminal 11 is operated
by a customer such as a user or a sales representative and can be
an Internet-connectable personal computer or mobile telephone. The
connection server 12 connects with a virtual factory (virtual
production line) 13 referred to as a mini-fab. The connection
server 12 exchanges various data between the client terminal 11 and
the virtual factory 13. The virtual factory 13 is connected to a
real factory 14 as a mini-fab which actually manufactures
semiconductor products as will be described later. The virtual
factory 13 is implemented by, say, a computer system and virtually
constructs various processes in the real factory 14 on the
computer. The client terminal 11, the connection server 12, the
virtual factory 13, and the real factory 14 include
transfer/reception means 11a, 12a, 13a, and 14a for transferring
and receiving various information during communication with the
network 10 and the like.
[0074] Various information in the real factory 14 is manually or
automatically transferred to the virtual factory 13. The virtual
factory 13 simulates a lot progress estimate within a specified
time range using input data transferred from the real factory 14
such as lot progress information and apparatus state information at
a specified time. A simulation result from the virtual factory 13
is transferred to the real factory 14 as a work instruction. Based
on this instruction, for example, a worker is notified at which
time a given apparatus should complete lot processing, which lot
should be input to that apparatus, where to move the completed lot
next, or to which transport apparatus the lot should be moved, and
the like.
[0075] The following describes an electronic commerce according to
this embodiment with reference to a flowchart in FIG. 3.
[0076] The virtual factory 13 regularly manages lot progress
situations and apparatus states in the real factory 14 and is
prepared to compute a lot progress equivalent to the real factory
14 (step S1). Specifically, the real factory 14 transfers
information about the lot progress and apparatus states to the
virtual factory 13. Under this condition, a customer such as a user
or a sales representative (hereafter just referred to as the user)
connects to the virtual factory 13 via the network 10 and the
connection server 12. The user then inputs information about an
intended product such as an LSI product name, specification,
quantity, delivery time, price, and the like (step S2). The input
information is transferred to the virtual factory 13.
[0077] The virtual factory 13 receives each information entered at
step S2 and computes a lot progress estimate based on the received
information (step S3). Namely, the virtual factory 13 simulates
whether the user-specified product can be manufactured. Based on
the simulation result, the virtual factory 13 determines whether
the product can be manufactured (step S4). When the product can be
manufactured, the virtual factory 13 notifies the user of it (step
S5). As a method of transmitting this information to the user, data
indicating that the product can be manufactured is transmitted to
the client terminal 11 via the connection server 12 and the network
10. Based on the received data, the client terminal 11 uses a
monitor screen (not shown) to display the information indicating
that the product can be manufactured and prompts the user to
determine whether to purchase the product.
[0078] Based on the simulation result displayed on the monitor
screen, the user determines whether to purchase the product (step
S6). When this determination is accepted, the transaction is
passed. For determining whether to purchase the product, namely
whether to accept purchase of the product, input means (not shown)
of the client terminal 11 is used to enter information indicating
whether or not to purchase the product. When the virtual factory 13
receives information indicating purchase of the product, it is
determined that the transaction is passed. In this case, the
virtual factory 13 automatically or semiautomatically directs the
real factory 14 to manufacture that product (step S7). In an
automatic case, after it s determined that the transaction is
passed, the computer is used for issuing a work instruction to the
real factory without a human operation. In a semiautomatic case,
after it is determined that the transaction is passed, an operator
for the virtual factory 13 is prompted to determine whether to
issue a work instruction. After interrupt of a human operation such
as confirming or entering the work instruction by the operator, the
computer is used for issuing a work instruction to the real
factory.
[0079] Loop A is used when a computation result shows that the
intended product cannot be manufactured at step S4. Specifically,
loop A modifies the user's request such as the specification,
quantity, delivery time, price, and the like (step S11). Based on
this modified information, the virtual factory 13 re-simulates if
such a product can be manufactured. Namely, the lot progress
estimate is re-computed under the condition of the modified user
request (step S3). Based on the computation result, it is
determined whether the product can be manufactured (step S4). When
the computation result shows that the LSI chip can be manufactured
according to the modified user request, this result is transmitted
to the user (step S5). At this time, the content of the modified
request is also transmitted. When the user accepts it, the
transaction is passed. The acceptance by the user is performed by
the user's action to input information indicative of acceptance by
input means (not shown).
[0080] Loop B is used when the product cannot be manufactured after
modifying the user request. Specifically, the lot situation is
varied in the virtual factory 13 (step S12). The virtual factory 13
re-simulates whether such a product can be manufactured. Namely,
the lot progress estimate is re-computed under the condition of the
modified lot situation (step S3). Based on the computation result,
it is determined whether the product can be manufactured (step S4).
For example, there may be the case where the real factory 14
maintains many products with the high priority. After these
products are completed, it is expected to decrease lots in the real
factory 14. In this case, the virtual factory 13 simulates whether
the product can be manufactured by delaying a lot casting. When the
computation result shows that the LSI chip can be manufactured
according to the condition of the delayed lot casting, this result
is transmitted to the user (step S5). At this time, the user is
notified of the delayed lot casting and the delivery time. When the
user accepts it, the transaction is passed.
[0081] Loop C is used when none of the above-mentioned loops
enables the manufacture. Specifically, another mini-fab is selected
(step S13) to perform the same operations as mentioned above and
determine whether the product can be manufactured (step S4).
Namely, a lot progress estimate is computed with respect to another
mini-fab (step S3). Based on the computation result, it is
determined whether the manufacture is possible (step S4). When the
computation result shows that the manufacture is possible, this
result is transmitted to the user (step S5). When the manufacture
is determined to be impossible, the simulation is reexecuted by
using loops A and B for finding manufacturable conditions. When the
manufacture is impossible on another mini-fab, the transaction is
unsuccessful. When another mini-fab is capable of the manufacture,
this result is transmitted to the user. When the user accepts the
notification from the mini-fab, the transaction is passed.
[0082] The above-mentioned processing is described in more detail
with reference to a flowchart in FIG. 4 and monitor screens in
FIGS. 5 to 11.
[0083] When the user makes dial-up access to the connection server
12 from the client terminal 11, the server 12 requests an ID and a
password. When the user enters the ID and the password, the
connection server 12 accepts the ID and the password if they are
correct and then connects to the virtual factory 13. Concurrently,
a monitor screen of the client terminal 11 displays screen 1 for
entering device specifications as shown in FIG. 5.
[0084] Screen 1 allows the user to select either of the
following.
[0085] (1) Entering a function and finding the device configuration
as a solution
[0086] (2) Selecting a device configuration from options to
configure the system
[0087] As shown in FIG. 6A, screen 2a is used for specifying device
functions. As shown in FIG. 6B, screen 2b is used for specifying a
device configuration and parts. On screen 2a, the user enters parts
needed for the system. On screen 2b, the user selects parts
constituting the SOC.
[0088] When the user enters the device specification, the server 12
sends it to the virtual factory 13. Situations of the current lots,
manufacturing schedules, and the like are exchanged realtime
between the virtual factory 13 and the real factory 14.
Accordingly, the virtual factory 13 can perform a simulation in
consideration of the currently flowing lots and a newly input lot.
The virtual factory 13 finds a delivery time and a price based on
the currently flowing lots and a newly casting lot, and then sends
an answer to the client terminal 11 via the server 12. At this
time, say, screen 3 as shown in FIG. 7 is displayed on the monitor
screen of the client terminal 11.
[0089] When proceeding to the next screen after referencing screen
3, the user selects the NEXT button on screen 3. In response to
this button selection, the virtual factory 13 displays screen 4 as
shown in FIG. 8 on the monitor screen of the client terminal 11.
Following this screen 4, the user enters necessary items such as
quantity and delivery time. The virtual factory 13 receives these
necessary items (quantity and delivery time) and searches for a
solution which satisfies these conditions. The virtual factory 13
displays screen 5 in FIG. 9 as a first solution on the client
terminal 11, providing the user with the possible delivery time and
price (first solution). When the first solution is satisfactory,
the user can place an order. When the first solution is
unsatisfactory, the user notifies this to the virtual factory 13.
In response to this notification, the virtual factory 13 displays
screen 6 as shown in FIG. 10 on the monitor screen of the client
terminal 11 for further negotiation with the user. When the user
responds to the negotiation, the virtual factory 13 returns an
answer by computing, say, how much the price is raised if the
delivery time is expedited. This answer is presented to the user by
displaying necessary information on the monitor screen of the
client terminal 11. When the second transaction provides a
satisfactory solution, the user can place an order. When the user
places an order, the virtual factory 13 accepts the order and finds
a detailed delivery time by means of the simulation and returns an
answer to the user. Concurrently, the virtual factory 13 issues an
instruction to the real factory 14. According to this instruction,
the real factory 14 starts manufacturing the product.
[0090] According to this embodiment, the virtual factory 13 is
constructed so that the computer is used to simulate production
processes in the real factory 14 which manufactures semiconductor
products. The user such as a sales representative or a customer
connects to the virtual factory 13 via a network 10 and enters an
intended LSI product name, specification, delivery time, price, and
the like. The virtual factory 13 simulates whether a specified
product can be manufactured, correctly estimating whether the real
factory 14 can manage the lot progress and manufacture the
product.
[0091] When the above-mentioned simulation yields a manufacturable
result, the transaction is passed. A work instruction is issued to
the real factory 14. Even when the simulation yields an unfeasible
result, the virtual factory 13 varies the semiconductor product's
specification, quantity, delivery time, price, lot situation,
mini-fab for manufacturing, and the like. When an allowable
solution is obtained, the virtual factory 13 passes the transaction
and issues a work instruction to the real factory 14. This enables
electronic commerce for semiconductor products in SOC-oriented
mini-fabs and greatly expands business opportunities.
[0092] The following paragraphs (1) to (9) describe examples of
actual electronic commerce using the electronic commerce system
according to this embodiment.
[0093] (1) A sales representative made the virtual factory 13
simulate an intended product according to a user-requested
condition. A simulation result showed that the product was
processed smoothly and could be manufactured. The transaction was
passed and a work instruction was issued via the virtual factory
13.
[0094] (2) A sales representative made the virtual factory 13
simulate an intended product according to a user-requested
condition. A simulation result showed that the product couldn't be
manufactured. The process was re-simulated by changing the delivery
time. The result showed that the product could be manufactured if
the delivery time was delayed for 10 days. The user was notified of
this result and accepted it. The transaction was passed and a work
instruction was issued via the virtual factory 13.
[0095] (3) A sales representative made the virtual factory 13
simulate an intended product according to a user-requested
condition. A simulation result showed that the product couldn't be
manufactured. The process was re-simulated by changing the
operating frequency specification. The re-simulated result showed
that some part of choices which can omit some procedures could be
selected. Then the choices were selected thereby to show shorter
processing time and lower cost. In this case, the re-simulated
result also showed that the product could be manufactured if the
operating frequency specification was reduced for 50 MHz since the
shorter processing time and lower cost as the re-simulated result
met the user-requested condition. The user was notified of this
result and accepted it. The transaction was passed and a work
instruction was issued via the virtual factory 13.
[0096] (4) A sales representative made the virtual factory 13
simulate an intended product according to a user-requested
condition. A simulation result showed that the product couldn't be
manufactured since the result didn't meet the user-requested
condition. The process was re-simulated by changing the price. The
result showed that the product could be manufactured on condition
that the price was raised for 7% since the raised price met the
re-simulated result. The user was notified of this result and
accepted it. The transaction was passed and a work instruction was
issued via the virtual factory.
[0097] (5) A sales representative made the virtual factory 13
simulate an intended product according to a user-requested
condition. A simulation result showed that the product couldn't be
manufactured. The process was re-simulated by changing the quantity
and the delivery time. The result showed that the product could be
manufactured if the quantity was decreased by 10% or the delivery
time was delayed for 7 days. The user was notified of this result
and accepted it by selecting the latter. The transaction was passed
and a work instruction was issued via the virtual factory.
[0098] (6) A sales representative made the virtual factory 13
simulate an intended product according to a user-requested
condition. A simulation result showed that the product couldn't be
manufactured even if the conditions were changed. The sales
representative connected to a virtual factory capable of simulating
another mini-fab and performs the similar computation to obtain a
manufacturable result. The user was notified of this result and
accepted it. The transaction was passed and a work instruction was
issued via the virtual factory 13.
[0099] (7) A sales representative made the virtual factory 13
simulate an intended product according to a user-requested
condition. A simulation result showed that the product couldn't be
manufactured even if the conditions were changed. The result also
showed that there was the high possibility of completing a product
with the high priority two or three days later and enabling the
intended product to be manufactured. After a wait state is enabled,
a result was obtained to show that the product could be
manufactured according to the user-requested conditions three days
later. The user was notified of this result and accepted it. The
transaction was passed and a work instruction was issued via the
virtual factory 13.
[0100] (8) Two users made an inquiry almost at the same time. A
sales representative made the virtual factory 13 simulate intended
products for these users according to user-requested conditions. A
simulation result showed that the products could not be
manufactured concurrently even if the conditions were changed. Of
these users, the sales representative selected the user's product
which more profits the mini-fab or causes a smaller load to the
mini-fab, and made the virtual factory 13 simulate that product.
The result showed that the product could be manufactured. The users
were notified of this result and accepted it. The transaction was
passed and a work instruction was issued via the virtual factory
13.
[0101] As mentioned above in detail, this embodiment provides a
networked electronic commerce between an agent manufacturing and
selling semiconductor products and a purchaser purchasing
semiconductor products. A client terminal 11 operated by the
purchaser or his or her proxy is connected to a computer which
installs a virtual production line 13 capable of using the computer
to simulate production processes in an actual production line 14
for manufacturing semiconductor products. A realtime simulation is
performed whether the virtual production line 13 can process a
purchaser-requested product under purchaser-requested conditions.
It is determined whether the product can be manufactured under the
purchaser-requested conditions. This makes it possible to correctly
estimate whether the real production line can manage the lot
progress and manufacture products, greatly expanding business
opportunities in electronic commerce for semiconductor
products.
[0102] (Second Embodiment)
[0103] FIG. 11 is a block diagram exemplifying a semiconductor
production system according to a second embodiment of the present
invention.
[0104] There is provided a manufacturing apparatus group in the
real factory 14 (real production line) which actually manufactures
semiconductor products including trial products. Products flow
along each real production line in this real factory 14. A computer
in the real factory 14 manages a lot progress of each product. For
example, a proper operation on the computer screen allows to
determine which apparatus processes a given lot, whether the lot is
being processed, waits for processing, or is being transported. In
addition to lot progress data, the computer stores information
about apparatus states such as active, idle, being maintained,
failed, scheduled to be maintained, and the like.
[0105] Various information in the real factory 14 is manually or
automatically transferred to the virtual factory 13 (virtual
production line) via the network as a data transmission medium 16.
In a manual operation, a computer operator for the real factory 14
enters various information. In an automatic operation, various
sensors detect various states in the real factory 14. The sensed
data is transferred to the virtual factory 13. Various information
in the real production line 14 includes order volumes for each
production, lot progress situations, apparatus situations
(operating states, performance, defect occurrences, QC states, time
until schedule maintenance, and time needed for scheduled
maintenance), worker situations (duty states and working states),
product's test results, and the like.
[0106] The virtual factory 13 constructs the same functions as for
the real factory 14 on a computer. More specifically, the virtual
factory 13 is provided with a situation assessment program for
assessing operating states of the real factory 14 based on numeric
information and the like representing lot progress situations,
apparatus situations, worker situations, and product's test results
in the real factory 14. Using this situation assessment program,
the virtual factory 13 provides a function of deriving operating
situations in the real factory 14 by means of simulation.
Apparently, means for deriving simulation results based on various
information is not limited to software. It may be preferable to use
specified hardware as a constituent element of means for deriving
simulation results.
[0107] The present computer performance makes it impossible to
virtually implement same functions as for a large-scale
semiconductor factory which manufactures approximately fifty to
sixty thousand or more wafers. Accordingly, this embodiment aims
mainly at a relatively small-scale semiconductor factory with
monthly production of several thousand wafers or less. However, a
large-scale semiconductor factory can be divided into small
portions and can be assumed to be a collection of small-scale
factories. In this case, even the present computer system can
provide same functions as for respective small-scale factories.
[0108] In the virtual factory 13 according to this embodiment, the
computer stores product's process information and information about
an apparatus group available on real production lines or an
apparatus under discussion on introduction to the production line.
The product's process information indicates in which apparatus
group a given product is processed, how the product is processed,
and how long it takes to complete each process. A lot progress
estimate within a specified time range is simulated by using input
data, namely the lot progress information and the apparatus state
information at a given time transferred from the real factory
14.
[0109] A simulation result in the virtual factory 13 is transferred
to the real factory 14 as a work instruction via the network as a
data transmission medium 15. For example, a worker is notified at
which time a given apparatus should complete lot processing, which
lot should be cast to that apparatus, where to move the completed
lot next, or to which transport apparatus the lot should be moved,
and the like. The following operations are repeated realtime:
transferring various information from the real factory 14 to the
virtual factory 13; computing management of an optimal lot in the
virtual factory 13; and transferring work instruction data from the
virtual factory to the real factory 14. Paragraphs (1) through (9)
to follow explain examples of instruction contents under various
conditions.
[0110] The following describes operations of the semiconductor
production system in which the virtual factory 13 computes a lot
progress using information transferred from the real factory 14. As
shown in FIG. 12, the virtual factory 13 is supplied with product
recipe information, apparatus information, line situations (lot
progress situations), and conditions for determining an optimal lot
flowing. The virtual factory 13 computes a lot progress based on
this input data and outputs a lot progress estimate result, say,
for a month. FIGS. 13A to 13E exemplifies product recipe
information (FIG. 13A), apparatus information (FIG. 13B), line
situations (lot progress situations, FIG. 13C), conditions for
determining an optimal lot flowing (FIG. 13D), and a monthly lot
progress estimate (FIG. 13E). FIG. 14 schematically shows a lot
flow at a given time.
[0111] When the above-mentioned lot progress estimate is computed,
there may be provided two or more choices for various processing
methods or sequences. For example, it is assumed that there is
provided a batch apparatus which can process a plurality of lots at
a time. When a given lot waits for processing, it is necessary to
determine whether to process that lot immediately or to wait until
another lot arrives. FIG. 15 shows an example of this case. FIG. 14
shows the case when choice 1 in FIG. 15 is selected. Specifically,
this example shows a lot progress for processing Lot 1 without
awaiting a second Lot 2 in a second process (equipment B). FIG. 16
provides a lot progress example when choice 2 in FIG. 15 is
selected. Specifically, in FIG. 16, Lot 1 is processed by awaiting
the second Lot 2 in the second process (equipment B). In FIGS. 14
and 16, a first process is performed by equipment A, the second
process is performed by equipment B, and a third process is
performed by equipment C.
[0112] By comparing FIGS. 14 and 16, the work period for Lot 1
comprising three processes (including the first process to the
third process) is longer in FIG. 16 than in FIG. 14. However, the
work period for Lot 2 is shorter in FIG. 16 than in FIG. 14. In
case the entire process consists of the three process, the output
at time 1 in FIG. 14 is 1 (lot), the output at time 1 in FIG. 16 is
0 (lot), the output at time 2 in FIG. 14 is 1 (lot), and the output
at time 2 in FIG. 16 is 2 (lot). For example, if the date of
delivery is time 1, the lot progress in FIG. 14 is preferable. On
the other hand, if the date of delivery is time 2, the lot progress
in FIG. 16 is preferable.
[0113] On a given apparatus, a low-priority lot waits and a
high-priority lot is expected to occur after a specified time. In
this case, it is necessary to determine whether to process the
low-priority lot first or to suspend it.
[0114] FIG. 17 represents these choices in a tree view. This
embodiment computes a lot progress estimate for all or part of
these choices. A lot progress estimate result is derived for each
choice. Consequently, it is possible to compute a lot progress
estimate according to the way in which various choices are
selected. Thereafter, as shown in FIG. 17, an optimal lot progress
is selected from the respective lot progress estimate results. For
example, such a progress may increase the entire throughput to
shorten a work period, process a prioritized lot in a short work
period, or minimize costs. An operator needs to enter these
criteria from input means (not shown) to the virtual factory 13.
Namely, the operator refers to the lot progress estimate result for
each choice displayed on the monitor screen connected to the
virtual factory 13, sets conditions for extracting lot progresses
as mentioned above, and determines an optimal lot progress. Here,
the virtual factory 13 automatically selects an optimal progress
from the quantity obtained from lot progress estimate computation
results such as an output amount during a given period, an average
work period, a high-priority production output amount, and the like
according to priority conditions. Alternatively, an operator can
manually select an optimal method from several progress estimate
computation results as outputs.
[0115] It is unnecessary to derive lot progress estimate results
with respect to all choices. It may be preferable to derive them
with respect to only extraction conditions already specified by the
operator.
[0116] The virtual factory 13 determines the optimal lot progress,
and then issues the result as a work instruction to the real
factory 14. According to this work instruction, as mentioned above,
a worker is notified at which time a given apparatus should
complete lot processing, which lot should be input to that
apparatus, where to move the completed lot next, or to which
transport apparatus the lot should be moved, and the like. Further,
the virtual factory 13 issues an instruction how to select choices
(how to determine processing) when various choices occur. The real
factory 14 starts production according to this instruction,
allowing efficient operations in the real factory 14.
[0117] This embodiment uses the real factory 14 for actually
manufacturing products and the virtual factory 13 for providing a
computer with essentially the same functions as for this real
factory 14. The virtual factory 13 simulates production processes
in the real factory 14, allowing efficient operations in the real
factory 14. Especially for a small-scale semiconductor factory with
monthly production of several thousand wafers or less, the virtual
factory 13 can accurately simulate various processes in the real
factory 14. It is possible to strictly estimate lot progresses and
provide efficient operations in small-scale factories.
[0118] The following describes examples of instructions under
various conditions according to this embodiment.
[0119] (1) It was assumed that a high-priority lot was to arrive at
a given apparatus 15 minutes later in the real factory 14. This
information was transferred to the virtual factory 13. The virtual
factory 13 performed two simulations. One was to immediately start
processing the current lot. The other was to suspend the current
lot processing and start processing after waiting until the
high-priority lot arrives. Results of both simulations provided a
solution that it was appropriate to wait until the high-priority
lot arrives. This result was transferred to the real factory 14 for
issuing a work instruction. Consequently, it had become possible to
manufacture high-priority lots in a short work period.
[0120] (2) When a given apparatus in the real factory 14 required
maintenance, a simulation was performed in the virtual factory 13.
The simulation provided an optimal lot progress estimate result for
preferentially processing a lot subject to no or little effect of
the maintenance. This result was issued as a work instruction,
allowing efficient operations during apparatus maintenance in the
real factory 14. The maintenance could be conducted efficiently by
displaying the maintenance time, required personnel, replacement
parts, supplementary procedures for the next-to-next maintenance,
and the like on the computer screen at a given time before the
scheduled apparatus maintenance.
[0121] (3) When the apparatus was expected to fail, a simulation
was conducted in consideration of a failure in the virtual factory
13. The simulation result showed that it was appropriate to
preferentially process a high-priority product. Based on this
result, issuing a work instruction allowed the high-priority lot to
be manufactured without delaying the work period. Action against
failures could be streamlined by displaying countermeasures against
failures on the computer screen or equivalent means, preventing the
throughput from degrading or preventing the work period from being
delayed.
[0122] (4) An abnormal value was found in data of a lot which
passed a given process. The virtual factory 13 extracted a lot
which passes the process and has a possibility of causing abnormal
values. This lot was settled as a wait lot. According to an
examination thereafter, it was found that the lot could not be a
conforming article and was rejected. Thus, it had become possible
to minimize an effect of process anomaly on products.
[0123] (5) A simulation in the virtual factory 13 was used to find
an optimal rest break for workers. The simulation result showed
that a given process terminated 10 minutes later and no work
occured in 70 minutes thereafter and that it was appropriate to
take a break during that period. Based on this result, an
instruction was issued to take a break for 60 minutes after that
process. Consequently, workers could take a break without degrading
the throughput or delaying the work period.
[0124] (6) When a product to be processed was changed, the virtual
factory 13 simulated whether available apparatuses were too many or
too few in accordance with changes in apparatuses to be used and
the time to use them. The result showed that an over-and-under
problem would occur with respect to the available apparatuses. A
solution for this problem was found by minimizing costs or a period
for improving or replacing apparatuses to solve. The result was
displayed on the computer screen or equivalent means. Based on the
result, an optimal procedure of replacing apparatuses was
determined and was conducted. Consequently, it had become possible
to smoothly change the product.
[0125] (7) When determining an apparatus layout in the actual
production line, an attempt was made to find an optimal layout
according to methods of minimizing a space, a flow line, the number
of workers, and power usage. As a result, a given layout was found
to be an optimal solution for minimizing the space and the flow
line and decreasing the number of workers and the power usage. The
use of this layout improved productivity.
[0126] (8) Due to occurrence of many defects, for example, it was
expected to decrease the number of products because wafers or chips
for a given product are discarded. In this case, a new lot was
input and processed by increasing the priority. Alternatively, a
waiting lot was processed by increasing the priority in the middle
of processing. Consequently, it had become possible to prevent
conforming articles for the product from being greatly
decreased.
[0127] (9) The virtual factory 13 conducted the inventory
management of direct and indirect materials. Consequently, it had
become possible to decrease the inventory of direct and indirect
materials.
[0128] (Modification)
[0129] The present invention is not limited to the above-mentioned
embodiments. The virtual factory used for the present invention
need not necessarily implement strictly the same processes as those
for the real factory and may simulate the real factory to some
extent. Accordingly, the present invention can be applied to more
large-scale semiconductor factories by using current computer
systems. The network is not limited to Internet and may be capable
of bi-directional data communication. It is possible to apply the
semiconductor production system according to this embodiment to the
electronic commerce method as described in the first
embodiment.
[0130] Though the second embodiment explains the semiconductor
production system as an example, the present invention is not
limited thereto. The present invention is applicable to relatively
small-size liquid crystal or electric appliance factories. The
present invention is also applicable to automobile factories and
chemical plants. The system size (a relatively small-size factory)
for the present invention corresponds to such a degree that a
computer to be used can perform the same number of computations for
a real line. Namely, this size is equivalent to a scope which can
virtually construct the same processing as for the real line. If
the computer performance is improved in the future, the present
invention can be applied to more large-scale systems.
[0131] The description of this embodiment assumes that one lot
comprises approximately 25 wafers, but is not limited thereto. The
present invention is applicable to any number of wafers starting
from one wafer per lot.
[0132] As mentioned above, this embodiment uses the real factory
(real production line) for actually manufacturing products and the
virtual factory (virtual production line) for providing a computer
with essentially the same functions as for this real factory.
Various information in the real factory is transferred to the
virtual factory. Based on the transferred information, the virtual
factory computes an optimal way of progressing a lot. Based on this
computation result, work instruction data is transferred to the
real factory. The production in the real factory is based on the
transferred work instruction data. Consequently, it is possible to
accurately simulate various processes in the real production line,
allowing efficient operations in relatively small-scale
factories.
[0133] When there is provided a plurality of choices, this
embodiment computes all or part of these choices. This makes it
possible to select optimal choices according to situations,
operating the production system more efficiently.
[0134] (Third Embodiment)
[0135] This embodiment concerns a modification of the second
embodiment.
[0136] The second embodiment described the cases for finding
optimal processes according to purposes of processing a
high-priority lot in a short work period and preferentially
processing a lot subject to no or little effect of the maintenance.
The third embodiment finds an optimal process for achieving an
object to perform processing so that electric power does not exceed
a preset value.
[0137] FIG. 18 shows a configuration of the virtual factory 13
capable of electric power (or power usage) leveling. FIG. 18
differs from FIG. 12 in that the apparatus's electric power or
power usage information and the electric power or power usage
condition are added as input data. FIGS. 19 and 20 provide example
data representing profiles and conditions of the electric power or
power usage for apparatuses. This embodiment exemplifies power
restrictions. The fourth embodiment exemplifies power usage
restrictions in detail.
[0138] The following describes a production system according to
this embodiment with reference to FIGS. 21, 22A to 22F, 23, 24A and
24B. FIGS. 22A to 22C describe a production system without power
optimization (power leveling). FIGS. 22D to 22F describe a
production system with power optimization.
[0139] Designing a clean room needs to estimate a rated value of
electric power used for each production apparatus. FIG. 21 shows
estimated power values in the production system. FIG. 21 diagrams
changes of the power and the temperature in an oxidation furnace.
Based on this FIG. 21, the maximum power value is determined. The
rated value of the power is found by adding a specified value to
this maximum value. For example, the rated value of the power is
set at 60 kw.
[0140] The thus found rated value of the production apparatus power
is computed for all production apparatuses in the clean room. A
preset value for the entire power is estimated by adding these
rated values. There is designed the production equipment such as
wiring and piping appropriate for the preset value for the entire
electric power.
[0141] When a clean room uses a diffusion furnace and an RTA (Rapid
Thermal Annealing) apparatus, an electric characteristic as shown
in FIG. 21 is found for each apparatus. FIG. 22A shows an electric
characteristic for the diffusion furnace. FIG. 22B shows an
electric characteristic for the RTA apparatus. Based on these
electric characteristics, the total power value is computed. FIG.
22C shows a computed power characteristic. As shown in FIG. 22C,
the diffusion furnace and the RTA apparatus cause power peaks
overlapping with each other, increasing a total value for the power
peak.
[0142] Considering an allowance, the rated value for each
production apparatus becomes several times to dozens of times as
large as a value used for actual operations. Not all production
apparatuses are in full production. The total power value (preset
value) found for the production apparatuses tends to be greater
than a value during production line operations. If the preset power
value is too larger than the actual value, the production equipment
such as wiring and piping is provided excessively. This causes a
problem of too expensive a construction cost for the clean
room.
[0143] By contrast, the start time for an RTA process using the RTA
apparatus is delayed 20 minutes (.DELTA.T) relative to the start
time for the diffusion furnace. Namely, a power characteristic in
FIG. 22D overlaps with that in FIG. 22E. Accordingly, as shown in
FIG. 22F, a peak corresponding to total power values for two
apparatuses becomes smaller than that in FIG. 22C.
[0144] The production system according to this embodiment optimizes
the power and flows lots so that the preset value for the entire
power is not exceeded. Specifically, as shown in FIG. 23, a lot in
the clean room is computed in a look-ahead manner. It is assumed
that, say, the diffusion furnace and the RTA (Rapid Thermal
Annealing) apparatus are found to be used concurrently according to
look-ahead reading of the lot. In this case, it is assumed that the
concurrent use of both the apparatuses is expected to exceed the
preset power value. As seen from a reference numeral 231 in FIG.
23, the maximum power value exceeds the preset value. Here, the
look-ahead computation is performed to delay the start time for an
RTA process using the RTA apparatus 20 minutes (.DELTA.T) relative
to the start time for the diffusion furnace. In this case, as seen
from a reference numeral 232 in FIG. 23, it is found that the
maximum power value does not exceed the preset value.
[0145] A reference numeral 232 in FIG. 23 shows relationship
between the time and the power when choices 2 and 2a are selected.
As seen from a characteristic curve 232 in FIG. 23, it is
understood that the maximum power value is maintained below the
preset value. The present invention selects choices 2 and 2a from
two possibilities. Namely, this type of choices provides lot
flowing by shifting power peaks for two apparatuses to level the
power.
[0146] This enables the production to keep the power below the
preset value. In case of FIG. 22C without power optimization, the
preset power value needs to be increased when the production is
conducted by preventing the power from exceeding the preset value.
By contrast, the case in FIG. 22F can decrease the preset power
value by means of the optimization. This embodiment can derive
conditions not exceeding the preset power value by keeping the
preset value low.
[0147] An actual production apparatus can be provided with a port
where a plurality of lots can wait. A computer can perform a
look-ahead operation to compare processes for each lot. The
computer can determine a sequence of processes, load lots from the
port to the production apparatus, and start processing. A
production apparatus operator just supplies lots to the port,
saving human resources. Alternatively, it may be preferable to
provide full automation by using an automatic transport system.
[0148] This production system works as a very effective technique
for processing waiting lots especially after completion of the
apparatus maintenance. Obviously, the production system is
available before completion of the maintenance.
[0149] Alternatively, it may be preferable to allow an operator to
manually transport a lot, mount it on an apparatus, start
processing, and the like according to a work instruction based on
the computer's look-ahead operation.
[0150] This production system can be used for large-scale and
small-scale production lines, but is particularly effective for
small-scale ones. FIG. 24A shows electric power values for a
large-scale production line. FIG. 24B shows electric power values
for a small-scale production line. A thin line indicates an
electric power value before leveling (prior art). A thick line
indicates an electric power value after leveling (present
invention). A dotted thin line indicates a conventional preset
power value. A dotted thick line indicates a preset power value
after leveling. By comparing FIGS. 24A and 24B, it is understood
that a difference between the leveled power value and the power
value before the leveling is greater for the small-scale production
line than for the large-scale production line. Namely, the
small-scale production line provides a greater leveling effect than
the large-scale production line. This will cause a difference
between the preset power value before the leveling and the preset
power value after the leveling. Namely, the small-scale production
line provides a larger difference between the preset power value
before the leveling and the preset power value after the leveling
than the large-sale production line. This means that the
small-scale production line can greatly decrease the preset power
value by means of the leveling.
[0151] Thus, it is possible to suppress construction costs for the
production equipment by processing lots so that the power does not
exceed the preset value and by using a small preset power
value.
[0152] The above-mentioned production system provides an example of
adjusting two apparatuses. This production system is also
applicable when three or more apparatuses are used or when there
are restrictions on the power for the entire line.
[0153] There is an advantage of applying this embodiment to a given
apparatus group in a line as described below concretely. Under the
power conditions in FIG. 20, the power for the entire line is
limited to, say, 500 kW. Further, the power is limited to 150 kw or
less for an apparatus group defined as group 1 corresponding to a
lithography process. Applying a limitation to each group can
decrease a scale of wiring from a main power supply in the
production line to the corresponding apparatus group, allowing the
line construction with low costs.
[0154] The above-mentioned example specifies 20 minutes as a time
to shift the processing. For example, the following method can
determine this time shift. FIG. 25 shows how to find a shift amount
for the start time. As the start time is shifted, the maximum power
value equals the preset value after 15 minutes. The maximum power
value becomes 90% of the preset value after 20 minutes. When the
start time is shifted 15 minutes or more, the maximum power value
does not exceed the preset value. If the shift amount is set to 15
or 16 minutes, an unexpected slight fluctuation in the power may
exceed the preset value, causing a power failure. This may stop the
line and cause a lockout condition or a serious damage. As a
solution, this example sets the shift time to 20 minutes so that
the maximum value becomes 90% or less of the preset value.
Apparently, this value is not limited to 90%. When a power
fluctuation is large, the value can be 90% or less and the shift
time can be longer than 20 minutes. On the contrary, when a power
fluctuation is small, the value can be 90% or more and the shift
time can be shorter than 20 minutes.
[0155] The present invention is not limited to the above-mentioned
embodiment. In the above-mentioned example, the electric power
leveling is described. The equivalent leveling is available for the
power usage such as water (deionized water or cooling water),
nitrogen gas, special material gas, and the like. The detail is
described in the next embodiment.
[0156] (Fourth Embodiment)
[0157] This embodiment concerns a modification of the second
embodiment.
[0158] The second embodiment described the cases for finding
optimal processes according to purposes of processing a
high-priority lot in a short work period and preferentially
processing a lot subject to no or little effect of the maintenance.
The fourth embodiment finds an optimal process for achieving an
object to perform processing so that the power usage does not
exceed a preset value.
[0159] The following describes a production system according to
this embodiment with reference to FIGS. 26, 27A to 27F, and 28.
FIGS. 27A to 27C describe a production system without power usage
optimization. FIGS. 27D to 27F describe a production system with
power usage optimization. As an example of the power usage, the
following describes leveling of the deionized water used for
cleaning as a production system process.
[0160] FIG. 26 shows a chronological change in the usage amount of
deionized water for a given treating apparatus. In the
chronological change characteristic of this figure, the first peak
corresponds to a diluting process for adjusting the chemicals
density. The second peak occurring later than the fist peak
corresponds to a rinse process.
[0161] In case a pre-treatment apparatus and a post-treatment
apparatus are installed in a clean room, there is found a
chronological change characteristic for the deionized water usage
with respect to each apparatus as shown in FIG. 26. FIG. 27A shows
the chronological change characteristic for the pre-treatment
apparatus. FIG. 27B shows the chronological change characteristic
for the post-treatment apparatus. These chronological change
characteristics are used for computing the total usage amount. FIG.
27C shows a chronological change characteristic for the computed
total value. As shown in this figure, a peak in the deionized water
usage for the pre-treatment apparatus overlaps with that for the
post-treatment apparatus, increasing a peak in the total deionized
water usage. Accordingly, it is necessary to increase a preset
value for the deionized water usage.
[0162] The start time for the post-treatment step using the
post-treatment apparatus is delayed 10 minutes (.DELTA.T) relative
to the start time for the pre-treatment apparatus. Namely, a
characteristic in FIG. 27D is overlapped with a characteristic in
FIG. 27E. As shown in FIG. 27F, a peak in the total value for two
deionized water usage amounts becomes smaller than that shown in
FIG. 27C.
[0163] The production system for optimizing the power usage flows
lots so that the maximum value does not exceed the preset value for
the entire power usage. Specifically, look-ahead computation is
performed for a lot in the clean room as shown in FIG. 28. During
the lot look-ahead, for example, it is found that the pre-treatment
apparatus and the post-treatment apparatus are used concurrently.
In this case, the maximum value is expected to exceed the preset
power usage value if both the apparatuses are used concurrently. A
reference numeral 281 in FIG. 28 shows that the maximum value for
the deionized water usage exceeds the preset value. Then, the
look-ahead computation is used to delay the start time of the
post-treatment using the post-treatment apparatus by 10 minutes
relative to the start time of the pre-treatment apparatus.
Consequently, as indicated by a reference numeral 282 of FIG. 28,
it is found that the maximum value of the deionized water usage
does not exceed the preset value.
[0164] In FIG. 28, a reference numeral 282 shows relationship
between the time and the deionized water usage when choices 2 and
2a are selected. The characteristic curve indicated by the
reference numeral 282 shows that the maximum value of the deionized
water usage is kept under the preset value. The present invention
selects choices 2 and 2a from two possibilities. Namely, this type
of choices provides lot flowing by shifting power peaks for two
apparatuses to level the power usage.
[0165] A technique similar to that described in the third
embodiment (FIG. 25) can be used to find an interval (10 minutes in
this example) for delaying the start time for a post-treatment step
by the post-treatment apparatus relative to the start time for the
pre-treatment apparatus.
[0166] The use of the above-mentioned technique enables the
production which does not exceed the preset value for the power
usage. In case of FIG. 27C without power optimization, the preset
power usage value needs to be increased when the production is
conducted by preventing the power usage from exceeding the preset
value. By contrast, the case in FIG. 27F can decrease the preset
power usage value by means of the optimization (leveling). This
embodiment can derive conditions not exceeding the preset power
usage value by keeping the preset value low.
[0167] The present invention is not limited to the above-mentioned
embodiment. In the above-mentioned example, the deionized water is
described. The equivalent leveling is available for the other power
usage such as cooling water, nitrogen gas, special material gas,
and the like. Consequently, it is possible to downsize the
production equipment scale and suppress manufacturing costs for a
clean room. Further, the similar leveling is also available for the
duct exhaust such as thermal exhaust and cabinet exhaust. Leveling
such an exhaust amount can decrease the exhaust piping size and
suppress the power for an air blower or local exhaust.
[0168] Especially, it can miniaturize the piping size which is used
for deionized water, a cooling water, and gas. In case the piping
size is such small that it can be bent by implements and the like,
it is unnecessary to weld or glue by using jointers. Therefore, the
embodiment has an advantage that workers can install piping easily,
thereby to shorten construction term of the clean room, putting
term of the equipment in and out, changing term of the layout of
each equipment.
[0169] Apparently, it is possible to combine the third and the
fourth embodiments to provide a small preset value for both the
electric power and the power usage. The equipment scale can be
further decreased by flowing lots so that the preset value is not
exceeded.
[0170] The third and the fourth embodiments explain the system
which manages an optimal lot progress based on the preset value for
the electric power or the power usage. This system can be also used
for designing the production equipment. Specifically, according to
the method of decreasing a peak of the electric power or the power
usage as shown in FIGS. 22A to 22F and 27A to 27F, the system
computes a preset value of the decreased electric power or the
decreased power usage for apparatuses. The production equipment is
designed based on the computed preset value. This makes it possible
to design streamlined small-scale production equipment. Further,
the present invention includes a method of constructing the
production equipment based on this design technique for the
production equipment.
[0171] Additional advantages and modifications will readily occur
to those skilled in the art. Therefore, the invention in its
broader aspects is not limited to the specific details and
representative embodiments shown and described herein. Accordingly,
various modifications may be made without departing from the spirit
or scope of the general inventive concept as defined by the
appended claims and their equivalents.
* * * * *