| Patent | Date |
|---|
Heat Storage Unit
App 20220187026 - OKUMURA; Katsuya ; et al. | 2022-06-16 |
Self-heating sheet-like material for moisture absorption and desorption, moisture absorption and desorption body, and moisture absorption and desorption device using the same
Grant 11,291,945 - Okumura , et al. April 5, 2 | 2022-04-05 |
Seal Material For Analyzer, And Flow Cell, Detector, And Analyzer Using The Same
App 20220026345 - TSUCHIDA; Minoru ; et al. | 2022-01-27 |
Temperature Control Unit And Temperature Control Device
App 20220026162 - Hatano; Shuhei ; et al. | 2022-01-27 |
Cushion paper
Grant 10,988,876 - Okumura , et al. April 27, 2 | 2021-04-27 |
Resistor element
Grant 10,636,551 - Okumura , et al. | 2020-04-28 |
Cushion Paper
App 20200063302 - Okumura; Katsuya ; et al. | 2020-02-27 |
Resistor Element
App 20190348200 - Okumura; Katsuya ; et al. | 2019-11-14 |
Self-heating Sheet-like Material For Moisture Absorption And Desorption, Moisture Absorption And Desorption Body, And Moisture A
App 20190308132 - Okumura; Katsuya ; et al. | 2019-10-10 |
Copper Fiber Nonwoven Fabric
App 20190257014 - Okumura; Katsuya ; et al. | 2019-08-22 |
Substrate treating apparatus and substrate treating method
Grant 10,153,181 - Sasaki , et al. Dec | 2018-12-11 |
Manufacturing method of semiconductor device having a voltage resistant structure
Grant 10,109,501 - Yoshikawa , et al. October 23, 2 | 2018-10-23 |
Reticle chuck cleaner
Grant 9,884,350 - Itoh , et al. February 6, 2 | 2018-02-06 |
Semiconductor Device And Manufacturing Method Of Semiconductor Device
App 20180006125 - YOSHIKAWA; Koh ; et al. | 2018-01-04 |
Semiconductor device having a voltage resistant structure
Grant 9,786,749 - Yoshikawa , et al. October 10, 2 | 2017-10-10 |
Semiconductor Device And Manufacturing Method Of Semiconductor Device
App 20170148882 - YOSHIKAWA; Koh ; et al. | 2017-05-25 |
Reticle Chuck Cleaner
App 20150190851 - ITOH; Masamitsu ; et al. | 2015-07-09 |
Semiconductor device
Grant 9,035,453 - Okumura , et al. May 19, 2 | 2015-05-19 |
Reticle chuck cleaner
Grant 9,034,467 - Itoh , et al. May 19, 2 | 2015-05-19 |
Method and apparatus for inspecting sample surface
Grant 8,859,984 - Noji , et al. October 14, 2 | 2014-10-14 |
Method And Apparatus For Inspecting Sample Surface
App 20130313429 - Noji; Nobuharu ; et al. | 2013-11-28 |
Semiconductor device and the method for manufacturing the same
Grant 8,531,007 - Okumura , et al. September 10, 2 | 2013-09-10 |
Method and apparatus for inspecting sample surface
Grant 8,525,127 - Noji , et al. September 3, 2 | 2013-09-03 |
Semiconductor Device, Electrode Member, And Electrode Member Fabrication Method
App 20130093082 - OKUMURA; Katsuya ; et al. | 2013-04-18 |
Target for X-ray generation, X-ray generator, and method for producing target for X-ray generation
Grant 8,416,920 - Okumura , et al. April 9, 2 | 2013-04-09 |
Sample holder, sample suction device using the same, and sample processing method
Grant 8,347,744 - Muneishi , et al. January 8, 2 | 2013-01-08 |
Semiconductor device, electrode member and electrode member fabrication method
Grant 8,324,726 - Okumura , et al. December 4, 2 | 2012-12-04 |
Multichip semiconductor device, chip therefor and method of formation thereof
Grant 8,283,755 - Hayasaka , et al. October 9, 2 | 2012-10-09 |
Method For Fabricating A Semiconductor Device
App 20120244697 - Okumura; Katsuya ; et al. | 2012-09-27 |
Capacitor and manufacturing method thereof
Grant 8,247,289 - Yamanishi , et al. August 21, 2 | 2012-08-21 |
Method And Apparatus For Inspecting Sample Surface
App 20120145921 - Noji; Nobuharu ; et al. | 2012-06-14 |
Multichip semiconductor device, chip therefor and method of formation thereof
Grant 8,174,093 - Hayasaka , et al. May 8, 2 | 2012-05-08 |
Reticle Chuck Cleaner
App 20120024318 - ITOH; Masamitsu ; et al. | 2012-02-02 |
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus
Grant 8,071,157 - Ito , et al. December 6, 2 | 2011-12-06 |
Developing apparatus and developing method
Grant 8,021,062 - Nishi , et al. September 20, 2 | 2011-09-20 |
Multichip semiconductor device, chip therefor and method of formation thereof
App 20110215443 - Hayasaka; Nobuo ; et al. | 2011-09-08 |
Film Forming Method, Film Forming Apparatus, Pattern Forming Method, And Manufacturing Method Of Semiconductor Apparatus
App 20110212255 - Ito; Shinichi ; et al. | 2011-09-01 |
Switch array
Grant 7,994,443 - Hayashi , et al. August 9, 2 | 2011-08-09 |
Chemical liquid supply system
Grant 7,988,429 - Okumura , et al. August 2, 2 | 2011-08-02 |
Substrate holding apparatus, substrate transferring robot equipped with the same, and semiconductor production apparatus
Grant 7,980,611 - Zenpo , et al. July 19, 2 | 2011-07-19 |
Plasma Processing Apparatus, Electrode Plate For Plasma Processing Apparatus, And Electrode Plate Manufacturing Method
App 20110162802 - OKUMURA; Katsuya ; et al. | 2011-07-07 |
Apparatus and method for inspecting sample surface
Grant 7,952,071 - Noji , et al. May 31, 2 | 2011-05-31 |
Pump for supplying chemical liquids
Grant 7,942,647 - Okumura , et al. May 17, 2 | 2011-05-17 |
Multichip semiconductor device, chip therefor and method of formation thereof
App 20110101522 - Hayasaka; Nobuo ; et al. | 2011-05-05 |
Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method
Grant 7,922,862 - Okumura , et al. April 12, 2 | 2011-04-12 |
Target For X-ray Generation, X-ray Generator, And Method For Producing Target For X-ray Generation
App 20110058655 - OKUMURA; Katsuya ; et al. | 2011-03-10 |
Film Forming Method, Film Forming Apparatus, Pattern Forming Method, And Manufacturing Method Of Semiconductor Apparatus
App 20110008545 - ITO; Shinichi ; et al. | 2011-01-13 |
Semiconductor Device And The Method For Manufacturing The Same
App 20110006403 - OKUMURA; Katsuya ; et al. | 2011-01-13 |
Transfer mask for exposure and pattern exchanging method of the same
Grant 7,862,959 - Okumura , et al. January 4, 2 | 2011-01-04 |
Magnetic Encoder Apparatus And Manufacturing Method Therefor
App 20100315073 - Arinaga; Yuji ; et al. | 2010-12-16 |
Multichip semiconductor device, chip therefor and method of formation thereof
Grant 7,829,975 - Hayasaka , et al. November 9, 2 | 2010-11-09 |
Developing Apparatus And Developing Method
App 20100216077 - NISHI; Takanori ; et al. | 2010-08-26 |
Seal structure, fluid device, integrated valve, and sealing member
Grant 7,766,341 - Okumura , et al. August 3, 2 | 2010-08-03 |
Probe method, prober, and electrode reducing/plasma-etching processing mechanism
Grant 7,750,654 - Okumura , et al. July 6, 2 | 2010-07-06 |
Developing apparatus and developing method
Grant 7,740,410 - Nishi , et al. June 22, 2 | 2010-06-22 |
Dielectric film capacitor and method of manufacturing the same
Grant 7,742,277 - Shinoda , et al. June 22, 2 | 2010-06-22 |
Sample Holding Tool, Sample Suction Device Using The Same And Sample Processing Method Using The Same
App 20100144147 - Muneishi; Takeshi ; et al. | 2010-06-10 |
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them
Grant 7,700,381 - Arikado , et al. April 20, 2 | 2010-04-20 |
Liquid chemical supply system having a plurality of pressure detectors
Grant 7,686,588 - Okumura , et al. March 30, 2 | 2010-03-30 |
Chromatography Column And Manufacturing Method Of The Same
App 20100032357 - Kiyomoto; Tomofumi ; et al. | 2010-02-11 |
Probe and method of manufacturing probe
Grant 7,649,369 - Okumura , et al. January 19, 2 | 2010-01-19 |
Manufacturing method for membrane member
Grant 7,641,806 - Okumura , et al. January 5, 2 | 2010-01-05 |
Sample Holder, Sample Suction Device Using the Same, and Sample Processing Method
App 20090293647 - Muneishi; Takeshi ; et al. | 2009-12-03 |
Plasma Processing Apparatus, Electrode Plate For Plasma Processing Apparatus, And Electrode Plate Manufacturing Method
App 20090285998 - Okumura; Katsuya ; et al. | 2009-11-19 |
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus
Grant 7,604,832 - Ito , et al. October 20, 2 | 2009-10-20 |
Substrate Holding Apparatus, Substrate Transferring Robot Equipped With The Same, And Semiconductor Production Apparatus
App 20090232631 - Zenpo; Hideharu ; et al. | 2009-09-17 |
Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method
Grant 7,585,386 - Okumura , et al. September 8, 2 | 2009-09-08 |
Plating method
Grant 7,575,664 - Matsuda , et al. August 18, 2 | 2009-08-18 |
Microstructure Probe Card, and Microstructure Inspecting Device, Method, and Computer Program
App 20090128171 - Okumura; Katsuya ; et al. | 2009-05-21 |
Wiring Substrate And Associated Manufacturing Method
App 20090120677 - NOMURA; Toshihiro ; et al. | 2009-05-14 |
Method And Apparatus For Inspecting Sample Surface
App 20090050802 - Noji; Nobuharu ; et al. | 2009-02-26 |
Switch Array
App 20090045039 - Hayashi; Masato ; et al. | 2009-02-19 |
Apparatus And Method For Inspecting Sample Surface
App 20090026368 - Noji; Nobuharu ; et al. | 2009-01-29 |
Semiconductor device and method of manufacturing the same
Grant 7,470,998 - Okumura , et al. December 30, 2 | 2008-12-30 |
Microstructure Inspecting Apparatus and Microstructure Inspecting Method
App 20080302185 - Yakabe; Masami ; et al. | 2008-12-11 |
Developing Apparatus and Developing Method
App 20080305434 - Nishi; Takanori ; et al. | 2008-12-11 |
Plating Apparatus
App 20080296165 - KUNISAWA; Junji ; et al. | 2008-12-04 |
Plating Apparatus
App 20080251385 - Kunisawa; Junji ; et al. | 2008-10-16 |
Flame resistant synthetic resin composition
Grant 7,435,769 - Kishimoto , et al. October 14, 2 | 2008-10-14 |
Multichip semiconductor device, chip therefor and method of formation thereof
App 20080237888 - Hayasaka; Nobuo ; et al. | 2008-10-02 |
Method of performing electrolytic treatment on a conductive layer of a substrate
Grant 7,387,717 - Kunisawa , et al. June 17, 2 | 2008-06-17 |
Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure
Grant 7,383,732 - Okumura , et al. June 10, 2 | 2008-06-10 |
Seal Structure, Fluid Device, Integrated Valve, And Sealing Member
App 20080111321 - Okumura; Katsuya ; et al. | 2008-05-15 |
Pump for Supplying Chemical Liquids
App 20080089794 - Okumura; Katsuya ; et al. | 2008-04-17 |
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus
App 20080090001 - Ito; Shinichi ; et al. | 2008-04-17 |
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
App 20080090501 - Okumura; Katsuya ; et al. | 2008-04-17 |
Method for manufacturing semiconductor device and polishing apparatus
Grant 7,351,131 - Nakamura , et al. April 1, 2 | 2008-04-01 |
Multichip semiconductor device, chip therefor and method of formation thereof
Grant 7,335,517 - Hayasaka , et al. February 26, 2 | 2008-02-26 |
Probe and Method of Manufacturing Probe
App 20080036479 - Okumura; Katsuya ; et al. | 2008-02-14 |
Flow Path Block
App 20070295401 - Okumura; Katsuya ; et al. | 2007-12-27 |
Pump for Supplying Chemical Liquids
App 20070297927 - Okumura; Katsuya ; et al. | 2007-12-27 |
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus
Grant 7,312,018 - Ito , et al. December 25, 2 | 2007-12-25 |
Substrate Heating Apparatus and Substrate Heating Method
App 20070275178 - Nishi; Takanori ; et al. | 2007-11-29 |
Chemical Liquid Supply System
App 20070267065 - Okumura; Katsuya ; et al. | 2007-11-22 |
Pump Unit for Supplying Chemical Liquids
App 20070258837 - Okumura; Katsuya ; et al. | 2007-11-08 |
Apparatus for polishing a substrate
Grant 7,291,057 - Kimura , et al. November 6, 2 | 2007-11-06 |
Capacitor and manufacturing method thereof
App 20070181556 - Yamanishi; Yoshiki ; et al. | 2007-08-09 |
Capacitor and manufacturing method thereof
App 20070181928 - Yamanishi; Yoshiki ; et al. | 2007-08-09 |
Dielectric film capacitor and method of manufacturing the same
App 20070126041 - Shinoda; Tomotaka ; et al. | 2007-06-07 |
Liquid chemical supply system having a plurality of pressure detectors
App 20070122291 - Okumura; Katsuya ; et al. | 2007-05-31 |
Methods of manufacturing photomask blank and photomask
Grant 7,195,846 - Kaneko , et al. March 27, 2 | 2007-03-27 |
Electronic optical lens barrel and production method therefor
Grant 7,193,221 - Okumura , et al. March 20, 2 | 2007-03-20 |
Pattern forming apparatus and method of manufacturing pattern forming apparatus
App 20060255182 - Okumura; Katsuya ; et al. | 2006-11-16 |
Biochip and biochip kit, and method of producing the same and method of using the same
App 20060252044 - Okumura; Katsuya ; et al. | 2006-11-09 |
Flame resistant synthetic resin composition
App 20060247343 - Kishimoto; Daishiro ; et al. | 2006-11-02 |
Polishing apparatus and method
Grant 7,108,589 - Kimura , et al. September 19, 2 | 2006-09-19 |
Semiconductor device, electrode member and electrode member fabrication method
App 20060192253 - Okumura; Katsuya ; et al. | 2006-08-31 |
Polishing tool and polishing apparatus
App 20060172665 - Okumura; Katsuya ; et al. | 2006-08-03 |
Semiconductor device and method of manufacturing the same
Grant 7,084,005 - Okumura , et al. August 1, 2 | 2006-08-01 |
Method and system for producing semiconductor devices
Grant 7,079,994 - Inanami , et al. July 18, 2 | 2006-07-18 |
Semiconductor device and method of manufacturing the same
App 20060154473 - Okumura; Katsuya ; et al. | 2006-07-13 |
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them
App 20060131696 - Arikado; Tsunetoshi ; et al. | 2006-06-22 |
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them
Grant 7,057,259 - Arikado , et al. June 6, 2 | 2006-06-06 |
Semiconductor device, sales method for semiconductor device, sales system for semiconductor device and program product storing sales program for semiconductor device
Grant 7,042,790 - Arikado , et al. May 9, 2 | 2006-05-09 |
Semiconductor device using damascene technique and manufacturing method therefor
App 20060084273 - Kohyama; Yusuke ; et al. | 2006-04-20 |
Probe pins zero-point detecting method, and prober
Grant 7,023,226 - Okumura , et al. April 4, 2 | 2006-04-04 |
Method for manufacturing a semiconductor device and apparatus for manufacturing a semiconductor device
Grant 7,018,932 - Ito , et al. March 28, 2 | 2006-03-28 |
Photomask repair method and apparatus
Grant 6,991,878 - Kanamitsu , et al. January 31, 2 | 2006-01-31 |
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
App 20060009130 - Okumura; Katsuya ; et al. | 2006-01-12 |
Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure
App 20050279170 - Okumura, Katsuya ; et al. | 2005-12-22 |
Semiconductor device using damascene technique and manufacturing method therefor
Grant 6,977,228 - Kohyama , et al. December 20, 2 | 2005-12-20 |
Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method
App 20050276928 - Okumura, Katsuya ; et al. | 2005-12-15 |
Polishing apparatus and method
App 20050260933 - Kimura, Norio ; et al. | 2005-11-24 |
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
Grant 6,966,821 - Okumura , et al. November 22, 2 | 2005-11-22 |
Method for manufacturing semiconductor device and polishing apparatus
App 20050250423 - Nakamura, Kenro ; et al. | 2005-11-10 |
Apparatus and method for inspecting pattern on object
App 20050244049 - Onishi, Hiroyuki ; et al. | 2005-11-03 |
Film formation method, semiconductor element and method thereof, and method of manufacturing a disk-shaped storage medium
Grant 6,960,540 - Ito , et al. November 1, 2 | 2005-11-01 |
Plating method
App 20050211560 - Matsuda, Tetsuo ; et al. | 2005-09-29 |
Semiconductor device and method for manufacturing the same
Grant 6,946,387 - Wada , et al. September 20, 2 | 2005-09-20 |
Pattern forming method
Grant 6,941,008 - Ando , et al. September 6, 2 | 2005-09-06 |
Polishing apparatus and method
Grant 6,935,932 - Kimura , et al. August 30, 2 | 2005-08-30 |
Method for manufacturing semiconductor device and polishing apparatus
Grant 6,933,234 - Nakamura , et al. August 23, 2 | 2005-08-23 |
Fine particle film forming apparatus and method and semiconductor device and manufacturing method for the same
Grant 6,933,216 - Sakata , et al. August 23, 2 | 2005-08-23 |
Integrated circuit device and method of manufacturing the same
Grant 6,933,205 - Matsuo , et al. August 23, 2 | 2005-08-23 |
Electronic optical lens barrel and production method therefor
App 20050173649 - Okumura, Katsuya ; et al. | 2005-08-11 |
Manufacturing method of semiconductor device
Grant 6,924,236 - Yano , et al. August 2, 2 | 2005-08-02 |
Probe method, prober, and electrode reducing/plasma-etching processing mechanism
App 20050151549 - Okumura, Katsuya ; et al. | 2005-07-14 |
Plating method and plating apparatus
Grant 6,913,681 - Matsuda , et al. July 5, 2 | 2005-07-05 |
Polishing apparatus
Grant 6,913,513 - Kimura , et al. July 5, 2 | 2005-07-05 |
Method of sequentially processing a plurality of lots each including semiconductor substrates
Grant 6,911,398 - Narita , et al. June 28, 2 | 2005-06-28 |
Fine particle film forming apparatus and method and semiconductor device and manufacturing method for the same
App 20050124164 - Sakata, Atsuko ; et al. | 2005-06-09 |
Thermal processing apparatus and a thermal processing method
App 20050121142 - Nakao, Ken ; et al. | 2005-06-09 |
Transfer mask for exposure and pattern exchanging method of the same
App 20050118516 - Okumura, Katsuya ; et al. | 2005-06-02 |
Semiconductor device and method of manufacturing the same
App 20050087853 - Okumura, Katsuya ; et al. | 2005-04-28 |
Ion generation method and filament for ion generation apparatus
Grant 6,875,986 - Murakoshi , et al. April 5, 2 | 2005-04-05 |
Electron beam tube and window for electron beam extraction
Grant 6,870,174 - Yamaguchi , et al. March 22, 2 | 2005-03-22 |
Probe pins zero-point detecting method, and prober
App 20050052195 - Okumura, Katsuya ; et al. | 2005-03-10 |
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus
App 20050022732 - Ito, Shinichi ; et al. | 2005-02-03 |
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus
App 20050026456 - Ito, Shinichi ; et al. | 2005-02-03 |
High precision pattern forming method of manufacturing a semiconductor device
Grant 6,846,750 - Ohiwa , et al. January 25, 2 | 2005-01-25 |
Multichip semiconductor device, chip therefor and method of formation thereof
App 20050014311 - Hayasaka, Nobuo ; et al. | 2005-01-20 |
Electronic commerce method for semiconductor products, electronic commerce thereof, production system, production method, production equipment design system, production equipment design method, and production equipment manufacturing method
App 20050010492 - Mitsutake, Kunihiro ; et al. | 2005-01-13 |
Electron beam tube and window for electron beam extraction
App 20040251431 - Yamaguchi, Masanori ; et al. | 2004-12-16 |
Manufacturing method for membrane member
App 20040251229 - Okumura, Katsuya ; et al. | 2004-12-16 |
Multichip semiconductor device, chip therefor and method of formation thereof
Grant 6,809,421 - Hayasaka , et al. October 26, 2 | 2004-10-26 |
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus
Grant 6,800,569 - Ito , et al. October 5, 2 | 2004-10-05 |
Method of manufacturing semiconductor device
App 20040192034 - Ohiwa, Tokuhisa ; et al. | 2004-09-30 |
Electronic Commerce Method For Semiconductor Products, Electronic Commerce Thereof, Production System, Production Method, Production Equipment Design System, Production Equipment Design Method, And Production Equipment Manufacturing Method
Grant 6,788,985 - Mitsutake , et al. September 7, 2 | 2004-09-07 |
Contact probe with guide unit and fabrication method thereof
Grant 6,784,680 - Haga , et al. August 31, 2 | 2004-08-31 |
Polishing apparatus and method
App 20040166783 - Kimura, Norio ; et al. | 2004-08-26 |
Film-forming method, film-forming apparatus and liquid film drying apparatus
App 20040126501 - Ema, Tatsuhiko ; et al. | 2004-07-01 |
Methods of manufacturing photomask blank and photomask
App 20040110073 - Kaneko, Hideo ; et al. | 2004-06-10 |
Method of manufacturing semiconductor device
Grant 6,746,969 - Shimada , et al. June 8, 2 | 2004-06-08 |
Aqueous Dispersion, Aqueous Dispersion For Chemical Mechanical Polishing Used For Manufacture Of Semiconductor Devices, Method For Manufacture Of Semiconductor Devices, And Method For Formation Of Embedded Writing
Grant 6,740,590 - Yano , et al. May 25, 2 | 2004-05-25 |
Polishing apparatus and method
Grant 6,722,964 - Kimura , et al. April 20, 2 | 2004-04-20 |
Method for monitoring the shape of the processed surfaces of semiconductor devices and equipment for manufacturing the semiconductor devices
Grant 6,723,572 - Yano , et al. April 20, 2 | 2004-04-20 |
Plating apparatus
App 20040069646 - Kunisawa, Junji ; et al. | 2004-04-15 |
Film-forming method, film-forming apparatus and liquid film drying apparatus
Grant 6,709,699 - Ema , et al. March 23, 2 | 2004-03-23 |
Semiconductor device, its manufacturing process, position matching mark, pattern forming method and pattern forming device
Grant 6,709,966 - Hisatsune , et al. March 23, 2 | 2004-03-23 |
Method for monitoring the shape of the processed surfaces of semiconductor devices and equipment for manufacturing the semiconductor devices
App 20040048399 - Yano, Hiroyuki ; et al. | 2004-03-11 |
Semiconductor device and method for manufacturing the same
App 20040043602 - Wada, Junichi ; et al. | 2004-03-04 |
Method for manufacturing a semiconductor device and apparatus for manufacturing a semiconductor device
App 20040033448 - Ito, Shinichi ; et al. | 2004-02-19 |
Semiconductor device and method of manufacturing the same
Grant 6,673,704 - Wada , et al. January 6, 2 | 2004-01-06 |
Apparatus for polishing a substrate
App 20030232576 - Kimura, Norio ; et al. | 2003-12-18 |
Apparatus for forming liquid film
Grant 6,660,091 - Ito , et al. December 9, 2 | 2003-12-09 |
Photomask repair method and apparatus
App 20030215722 - Kanamitsu, Shingo ; et al. | 2003-11-20 |
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus
App 20030211756 - Ito, Shinichi ; et al. | 2003-11-13 |
Contact probe with guide unit and fabrication method thereof
App 20030210063 - Haga, Tsuyoshi ; et al. | 2003-11-13 |
Ion generation method and filament for ion generation apparatus
Grant 6,646,268 - Murakoshi , et al. November 11, 2 | 2003-11-11 |
Assembly part with wiring and for manufacturing system, method of manufacturing such assembly part, and semiconductor manufacturing system constituted using assembly part
Grant 6,633,045 - Sugihara , et al. October 14, 2 | 2003-10-14 |
Plating apparatus
Grant 6,632,335 - Kunisawa , et al. October 14, 2 | 2003-10-14 |
Pattern forming method
App 20030190070 - Ando, Atsushi ; et al. | 2003-10-09 |
Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes
Grant 6,614,033 - Suguro , et al. September 2, 2 | 2003-09-02 |
Semiconductor device using damascene technique and manufacturing method therefor
App 20030162396 - Kohyama, Yusuke ; et al. | 2003-08-28 |
Method for polishing a substrate
Grant 6,609,950 - Kimura , et al. August 26, 2 | 2003-08-26 |
Semiconductor device using damascene technique and manufacturing method therefor
Grant 6,608,356 - Kohyama , et al. August 19, 2 | 2003-08-19 |
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
App 20030148714 - Okumura, Katsuya ; et al. | 2003-08-07 |
Method for manufacturing semiconductor device and polishing apparatus
App 20030139049 - Nakamura, Kenro ; et al. | 2003-07-24 |
Fine particle film forming apparatus and method and semiconductor device and manufacturing method for the same
App 20030122252 - Sakata, Atsuko ; et al. | 2003-07-03 |
Hot plate and semiconductor device manufacturing method using the same
Grant 6,566,632 - Katata , et al. May 20, 2 | 2003-05-20 |
Mask trading system and method
App 20030078799 - Asano, Masafumi ; et al. | 2003-04-24 |
Integrated circuit device and method of manufacturing the same
App 20030067052 - Matsuo, Mie ; et al. | 2003-04-10 |
Semiconductor wafer having identification indication and method of manufacturing the same
Grant 6,544,804 - Yano , et al. April 8, 2 | 2003-04-08 |
Method of treating a substrate
Grant 6,528,128 - Ito , et al. March 4, 2 | 2003-03-04 |
Electron beam lithography system and pattern writing method
Grant 6,525,328 - Miyoshi , et al. February 25, 2 | 2003-02-25 |
Pattern dimension measuring system and pattern dimension measuring method
Grant 6,515,296 - Komatsu , et al. February 4, 2 | 2003-02-04 |
Method Of Treating A Substrate
App 20030012889 - Ito, Shinichi ; et al. | 2003-01-16 |
Passive semiconductor device mounted as daughter chip on active semiconductor device
Grant 6,504,227 - Matsuo , et al. January 7, 2 | 2003-01-07 |
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them
App 20030003608 - Arikado, Tsunetoshi ; et al. | 2003-01-02 |
Etching method and cleaning method of chemical vapor growth apparatus
App 20020190024 - Eguchi, Kazuhiro ; et al. | 2002-12-19 |
Plasma processing
App 20020192972 - Narita, Masaki ; et al. | 2002-12-19 |
Semiconductor device and method for manufacturing the same
App 20020192938 - Wada, Junichi ; et al. | 2002-12-19 |
Etching method and cleaning method of chemical vapor growth apparatus
Grant 6,495,054 - Eguchi , et al. December 17, 2 | 2002-12-17 |
Charged beam drawing apparatus
Grant 6,495,841 - Ando , et al. December 17, 2 | 2002-12-17 |
Method of making semiconductor device
App 20020155727 - Narita, Masaki ; et al. | 2002-10-24 |
Mas trading system and method
App 20020138404 - Akiyama, Tatsuo ; et al. | 2002-09-26 |
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
Grant 6,443,808 - Okumura , et al. September 3, 2 | 2002-09-03 |
Semiconductor device and method for manufacturing the same
Grant 6,440,843 - Wada , et al. August 27, 2 | 2002-08-27 |
Ion generation method and filament for ion generation apparatus
App 20020100876 - Murakoshi, Atsushi ; et al. | 2002-08-01 |
Plating method and plating apparatus
App 20020096435 - Matsuda, Tetsuo ; et al. | 2002-07-25 |
Pattern size evaluation apparatus
Grant 6,423,977 - Hayasaki , et al. July 23, 2 | 2002-07-23 |
Apparatus and method of forming liquid film
App 20020094370 - Ito, Shinichi ; et al. | 2002-07-18 |
Method of manufacturing semiconductor device
App 20020081863 - Shimada, Miyoko ; et al. | 2002-06-27 |
Apparatus for manufacturing a semiconductor device and a method for manufacturing a semiconductor device
App 20020053645 - Suguro, Kyoichi ; et al. | 2002-05-09 |
Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes
App 20020050573 - Suguro, Kyoichi ; et al. | 2002-05-02 |
Apparatus for manufacturing a semiconductor device and a method for manufacturing a semiconductor device
Grant 6,365,492 - Suguro , et al. April 2, 2 | 2002-04-02 |
Film-forming method, film-forming apparatus and liquid film drying apparatus
App 20020037367 - Ema, Tatsuhiko ; et al. | 2002-03-28 |
Semiconductor device, sales method for semiconductor device, sales system for semiconductor device and program product storing sales program for semiconductor device
App 20020038260 - Arikado, Tsunetoshi ; et al. | 2002-03-28 |
Polishing apparatus including attitude controller for turntable and/or wafer carrier
Grant 6,354,907 - Satoh , et al. March 12, 2 | 2002-03-12 |
Semiconductor memory and manufacturing method thereof
App 20020024082 - Tsunashima, Yoshitaka ; et al. | 2002-02-28 |
Plating apparatus and plating method for substrate
App 20020020627 - Kunisawa, Junji ; et al. | 2002-02-21 |
Semiconductor Device With A Thin Gate Stack Having A Plurality Of Insulating Layers
App 20020014657 - OHIWA, TOKUHISA ; et al. | 2002-02-07 |
Apparatus and method for polishing substrate
App 20020016074 - Kimura, Norio ; et al. | 2002-02-07 |
Method and system for producing semiconductor devices
App 20020013930 - Inanami, Ryoichi ; et al. | 2002-01-31 |
Method and system of manufacturing slurry for polishing, and method and system of manufacturing semiconductor devices
Grant 6,338,670 - Okumura , et al. January 15, 2 | 2002-01-15 |
Contact probe and fabrication method thereof
App 20020000821 - Haga, Tsuyoshi ; et al. | 2002-01-03 |
Semiconductor processing system and method of using the same
Grant 6,334,928 - Sekine , et al. January 1, 2 | 2002-01-01 |
Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes
Grant 6,335,534 - Suguro , et al. January 1, 2 | 2002-01-01 |
Electronic commerce method for semiconductor products, electronic commerce thereof, production system, production method, production equipment design system, production equipment design method, and production equipment manufacturing method
App 20010051886 - Mitsutake, Kunihiro ; et al. | 2001-12-13 |
Manufacturing method of semiconductor device
App 20010051432 - Yano, Hiroyuki ; et al. | 2001-12-13 |
Semiconductor device including an interface layer containing chlorine
Grant 6,326,658 - Tsunashima , et al. December 4, 2 | 2001-12-04 |
Pattern forming method
Grant 6,316,163 - Magoshi , et al. November 13, 2 | 2001-11-13 |
Semiconductor device manufacturing method and semiconductor device
App 20010038147 - Higashi, Kazuyuki ; et al. | 2001-11-08 |
Film formation method, semiconductor element and method thereof, and method of manufacturing a disk-shaped storage medium
App 20010039117 - Ito, Shinichi ; et al. | 2001-11-08 |
Semiconductor wafer having identification indication and method of manufacturing the same
App 20010036677 - Yano, Hiroyuki ; et al. | 2001-11-01 |
Apparatus and method of forming liquid film
App 20010036512 - Ito, Shinichi ; et al. | 2001-11-01 |
Pure water reusing system
App 20010034190 - Tanikawa, Mutsumi ; et al. | 2001-10-25 |
Polishing apparatus and method
App 20010029150 - Kimura, Norio ; et al. | 2001-10-11 |
Deposition apparatus
App 20010027748 - Ikegami, Hiroshi ; et al. | 2001-10-11 |
Heat treatment method and a heat treatment apparatus for controlling the temperature of a substrate surface
App 20010027971 - Sakurai, Hideaki ; et al. | 2001-10-11 |
Semiconductor substrate processing apparatus and method
App 20010024691 - Kimura, Norio ; et al. | 2001-09-27 |
Polishing apparatus
App 20010023167 - Kimura, Norio ; et al. | 2001-09-20 |
Semiconductor device manufacturing method and semiconductor device
Grant 6,291,891 - Higashi , et al. September 18, 2 | 2001-09-18 |
Wafer drying apparatus and method with residual particle removability enhancement
Grant 6,286,524 - Okuchi , et al. September 11, 2 | 2001-09-11 |
Method of maintaining cleanliness of substrates and box for accommodating substrates
Grant 6,284,020 - Mizuno , et al. September 4, 2 | 2001-09-04 |
Method for monitoring the shape of the processed surfaces of semiconductor devices and equipment for manufacturing the semiconductor devices
App 20010016363 - Yano, Hiroyuki ; et al. | 2001-08-23 |
Gas recovery system and gas recovery method
App 20010015133 - Sakai, Itsuko ; et al. | 2001-08-23 |
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
App 20010014572 - Okumura, Katsuya ; et al. | 2001-08-16 |
Substrate processing method and apparatus
App 20010014536 - Nakamura, Hiroko ; et al. | 2001-08-16 |
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
Grant 6,273,802 - Okumura , et al. August 14, 2 | 2001-08-14 |
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
App 20010011000 - Okumura, Katsuya ; et al. | 2001-08-02 |
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
App 20010010996 - Okumura, Katsuya ; et al. | 2001-08-02 |
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
App 20010010997 - Okumura, Katsuya ; et al. | 2001-08-02 |
Cvd Film Formation Method And Apparatus Using Molded Solid Body And The Molded Solid Body
App 20010003603 - EGUCHI, KAZUHIRO ; et al. | 2001-06-14 |
Multichip semiconductor device and memory card
Grant 6,239,495 - Sakui , et al. May 29, 2 | 2001-05-29 |
Coating apparatus and coating method
Grant 6,200,633 - Kitano , et al. March 13, 2 | 2001-03-13 |
Film forming method
Grant 6,162,745 - Ito , et al. December 19, 2 | 2000-12-19 |
Pattern forming method
Grant 6,147,355 - Ando , et al. November 14, 2 | 2000-11-14 |
Metallization structure and method for a semiconductor device
Grant 6,124,189 - Watanabe , et al. September 26, 2 | 2000-09-26 |
Field effect transistor having elevated source and drain regions and methods of manufacturing the same
Grant 6,091,117 - Shiozawa , et al. July 18, 2 | 2000-07-18 |
Device and method for heating substrate, and method for treating substrate
Grant 6,072,162 - Ito , et al. June 6, 2 | 2000-06-06 |
Method of filling contact holes and wiring grooves of a semiconductor device
Grant 6,071,810 - Wada , et al. June 6, 2 | 2000-06-06 |
Coating apparatus
Grant 6,059,880 - Kitano , et al. May 9, 2 | 2000-05-09 |
Semiconductor device with electrode formed of conductive layer consisting of polysilicon layer and metal-silicide layer and its manufacturing method
Grant 6,048,791 - Katata , et al. April 11, 2 | 2000-04-11 |
Evacuation apparatus and evacuation method
Grant RE36,610 - Okumura , et al. March 14, 2 | 2000-03-14 |
Fabrication process using a multi-layer antireflective layer
Grant 5,998,100 - Azuma , et al. December 7, 1 | 1999-12-07 |
Pattern-forming method and lithographic system
Grant 5,994,030 - Sugihara , et al. November 30, 1 | 1999-11-30 |
Coating apparatus and coating method
Grant 5,968,268 - Kitano , et al. October 19, 1 | 1999-10-19 |
Deep trench filling method using silicon film deposition and silicon migration
Grant 5,888,876 - Shiozawa , et al. March 30, 1 | 1999-03-30 |
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
Grant 5,885,138 - Okumura , et al. March 23, 1 | 1999-03-23 |
Electron beam irradiating apparatus and electric signal detecting apparatus
Grant 5,818,217 - Komatsu , et al. October 6, 1 | 1998-10-06 |
Fabrication process using a thin resist
Grant 5,759,746 - Azuma , et al. June 2, 1 | 1998-06-02 |
Method and apparatus for evacuating vacuum system
Grant 5,746,581 - Okumura , et al. May 5, 1 | 1998-05-05 |
Semiconductor device having antireflective layer containing organic resin with dispersed carbon particles
Grant 5,744,293 - Okumura , et al. April 28, 1 | 1998-04-28 |
Process monitoring and thickness measurement from the back side of a semiconductor body
Grant 5,724,144 - Muller , et al. March 3, 1 | 1998-03-03 |
Method of forming a shallow trench isolation structure
Grant 5,721,173 - Yano , et al. February 24, 1 | 1998-02-24 |
Method of making doped semiconductor film having uniform impurity concentration on semiconductor substrate and apparatus for making the same
Grant 5,702,529 - Mikata , et al. December 30, 1 | 1997-12-30 |
Method of planarizing a semiconductor workpiece surface
Grant 5,679,610 - Matsuda , et al. October 21, 1 | 1997-10-21 |
Plasma generating apparatus and surface processing apparatus
Grant 5,660,744 - Sekine , et al. August 26, 1 | 1997-08-26 |
Magnetron plasma processing apparatus and processing method
Grant 5,660,671 - Harada , et al. August 26, 1 | 1997-08-26 |
Revolving drum polishing apparatus
Grant 5,643,056 - Hirose , et al. July 1, 1 | 1997-07-01 |
Plasma apparatus
Grant 5,639,308 - Yamazaki , et al. June 17, 1 | 1997-06-17 |
Focused ion beam deposition using TMCTS
Grant 5,639,699 - Nakamura , et al. June 17, 1 | 1997-06-17 |
Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus
Grant 5,637,153 - Niino , et al. June 10, 1 | 1997-06-10 |
In-situ temperature measurement using X-ray diffraction
Grant 5,636,258 - Okumura , et al. June 3, 1 | 1997-06-03 |
Exposure mask, exposure mask substrate, method for fabricating the same, and method for forming pattern based on exposure mask
Grant 5,620,815 - Ito , et al. April 15, 1 | 1997-04-15 |
Polishing apparatus
Grant 5,616,063 - Okumura , et al. April 1, 1 | 1997-04-01 |
Method for producing tips for atomic force microscopes
Grant 5,611,942 - Mitsui , et al. March 18, 1 | 1997-03-18 |
Method and apparatus for dicing semiconductor wafers
Grant 5,609,148 - Mitwalsky , et al. March 11, 1 | 1997-03-11 |
Semiconductor wafer support apparatus and method
Grant 5,605,574 - Tsunashima , et al. February 25, 1 | 1997-02-25 |
Apparatus for processing semiconductor wafers
Grant 5,593,537 - Cote , et al. January 14, 1 | 1997-01-14 |
Method and apparatus for repairing defect on plane surface of phase shift mask
Grant 5,569,392 - Miyoshi , et al. October 29, 1 | 1996-10-29 |
Semiconductor device and method of manufacturing the same
Grant 5,552,628 - Watanabe , et al. September 3, 1 | 1996-09-03 |
Magnetic field immersion type electron gun
Grant 5,548,183 - Miyoshi , et al. August 20, 1 | 1996-08-20 |
Method of screening semiconductor device
Grant 5,543,334 - Yoshii , et al. August 6, 1 | 1996-08-06 |
Electrostatic chuck having a multilayer structure for attracting an object
Grant 5,539,179 - Nozawa , et al. July 23, 1 | 1996-07-23 |
Method for designing phase-shifting masks with automatization capability
Grant 5,538,815 - Oi , et al. July 23, 1 | 1996-07-23 |
Phase shift mask and method of fabricating the same
Grant 5,536,603 - Tsuchiya , et al. July 16, 1 | 1996-07-16 |
Apparatus for processing semiconductor wafers
Grant 5,534,106 - Cote , et al. July 9, 1 | 1996-07-09 |
Apparatus for evaluating characteristics of semiconductor device and method of evaluating characteristics of semiconductor device using the same
Grant 5,491,425 - Watanabe , et al. February 13, 1 | 1996-02-13 |
Pad condition and polishing rate monitor using fluorescence
Grant 5,483,568 - Yano , et al. January 9, 1 | 1996-01-09 |
Plasma processing apparatus
Grant 5,474,643 - Arami , et al. December 12, 1 | 1995-12-12 |
Plasma generating device and surface processing device and method for processing wafers in a uniform magnetic field
Grant 5,444,207 - Sekine , et al. August 22, 1 | 1995-08-22 |
Method and apparatus for heat treating
Grant 5,431,561 - Yamabe , et al. July 11, 1 | 1995-07-11 |
Arrangement for cleaning semiconductor wafers using mixer
Grant 5,415,191 - Mashimo , et al. May 16, 1 | 1995-05-16 |
Plasma processing apparatus
Grant 5,413,663 - Shimizu , et al. May 9, 1 | 1995-05-09 |
Substrates processing device
Grant 5,405,443 - Akimoto , et al. April 11, 1 | 1995-04-11 |
Fluid coupling
Grant 5,401,065 - Okumura , et al. March 28, 1 | 1995-03-28 |
Electron optic column and scanning electron microscope
Grant 5,399,860 - Miyoshi , et al. March 21, 1 | 1995-03-21 |
Method and apparatus for polishing a workpiece
Grant 5,398,459 - Okumura , et al. March 21, 1 | 1995-03-21 |
Method for forming a silicon oxide film on a silicon waffer
Grant 5,395,645 - Kodera , et al. March 7, 1 | 1995-03-07 |
Method of cleaning reaction tube
Grant 5,380,370 - Niino , et al. * January 10, 1 | 1995-01-10 |
Heat treatment apparatus
Grant 5,370,371 - Miyagi , et al. December 6, 1 | 1994-12-06 |
Gas supplying system and gas supplying apparatus
Grant 5,368,062 - Okumura , et al. November 29, 1 | 1994-11-29 |
Connection method and connection device for electrical connection of small portions
Grant 5,328,078 - Okumura July 12, 1 | 1994-07-12 |
Semiconductor device manufacturing method
Grant 5,302,548 - Watanabe , et al. April 12, 1 | 1994-04-12 |
Method and apparatus for heat treating
Grant 5,297,956 - Yamabe , et al. March 29, 1 | 1994-03-29 |
Method of cleaning semiconductor wafers using mixer containing a bundle of gas permeable hollow yarns
Grant 5,261,966 - Mashimo , et al. November 16, 1 | 1993-11-16 |
Method of thermally processing semiconductor wafers and an apparatus therefor
Grant 5,259,883 - Yamabe , et al. November 9, 1 | 1993-11-09 |
Electrostatic chuck and plasma apparatus equipped therewith
Grant 5,255,153 - Nozawa , et al. October 19, 1 | 1993-10-19 |
Semiconductor device and method of manufacturing the same
Grant 5,254,872 - Yoda , et al. October 19, 1 | 1993-10-19 |
Plasma treating apparatus
Grant 5,250,137 - Arami , et al. October 5, 1 | 1993-10-05 |
Method of manufacturing semiconductor device
Grant 5,225,036 - Watanabe , et al. July 6, 1 | 1993-07-06 |
Pressure-reduced chamber system having a filter means
Grant 5,178,638 - Kaneko , et al. January 12, 1 | 1993-01-12 |
Semiconductor device with customized wiring
Grant 5,164,814 - Okumura November 17, 1 | 1992-11-17 |
Method of manufacturing a semiconductor device
Grant 5,162,241 - Mori , et al. November 10, 1 | 1992-11-10 |
Ion implantation apparatus and method of cleaning the same
Grant 5,144,147 - Shiozaki , et al. September 1, 1 | 1992-09-01 |
Semiconductor device and manufacturing method thereof
Grant 5,101,259 - Watanabe , et al. March 31, 1 | 1992-03-31 |
Apparatus for coating of silicon semiconductor surface
Grant 5,067,437 - Watanabe , et al. November 26, 1 | 1991-11-26 |
Pattern exposure/transfer method and pattern exposure/transfer mask apparatus
Grant 5,045,419 - Okumura September 3, 1 | 1991-09-03 |
Method of testing semiconductor elements and apparatus for testing the same
Grant 5,030,908 - Miyoshi , et al. July 9, 1 | 1991-07-09 |
Electron beam apparatus including a plurality of ion pump blocks
Grant 5,021,702 - Miyoshi , et al. * June 4, 1 | 1991-06-04 |
Film forming method and film forming device
Grant 5,015,330 - Okumura , et al. May 14, 1 | 1991-05-14 |
Semiconductor device and manufacturing method thereof
Grant 4,952,993 - Okumura August 28, 1 | 1990-08-28 |
Semiconductor device and method of manufacturing the same
Grant 4,937,652 - Okumura , et al. June 26, 1 | 1990-06-26 |
Turbomolecular pump and method of operating the same
Grant 4,926,648 - Okumura , et al. May 22, 1 | 1990-05-22 |
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